Air spindle

Abstract

The invention discloses an air spindle. The air spindle comprises a shell, a spindle body, a rotor, a stator and an air bearing. The air bearing comprises a bearing outer ring and a bearing inner ring, the bearing outer ring is connected with the shell, the bearing inner ring is matched with the main shaft, the bearing inner ring comprises a fixing part and at least one deflection part, the fixing part and the deflection parts are distributed in the axial direction of the air bearing, the fixing part is fixed to the bearing outer ring, and the air bearing further comprises at least one air bag. The deflection part is connected with the bearing outer ring through the air bag, and the air bag is configured to be deformable so that the deflection part can deflect relative to the fixed part. Through the arrangement, the air bearing can automatically reset, and the stability of the air bearing is enhanced.

Description

Technical Field

[0001] The present application relates to the technical field of spindles, and in particular to an air spindle. Background Art

[0002] The air spindle uses an air bearing to rotate and support the spindle. The air bearing is a common non-contact bearing that supports and reduces friction by generating an air film between the spindle and the bearing. When the spindle rotates, the gas inside the air bearing forms a high-speed air film due to the centrifugal force. This air film separates the spindle from the air bearing, allowing the spindle to rotate freely, reducing friction and wear. During the operation of the air bearing, due to the poor stability of the air film, the air bearing will be skewed, resulting in greater rotational friction between the spindle and the air bearing, and the air bearing cannot reduce the rotational friction of the spindle, thereby reducing the rotation accuracy of the air spindle.

[0003] Therefore, when the air bearing is tilted, how to adjust the state of the air bearing to improve the rotation accuracy of the air spindle is a technical problem that needs to be solved urgently in the art. Summary of the invention

[0004] In order to solve the deficiencies of the prior art, the purpose of the present application is to provide an air spindle, which can adjust the state of the air bearing when the air bearing is tilted, so as to improve the rotation accuracy of the air spindle.

[0005] To achieve the above objectives, this application adopts the following technical solutions: An air spindle, comprising: a shell, a spindle, a rotor, a stator and an air bearing; the spindle is at least partially located in the shell and is rotatably connected to the shell; the rotor is located in the shell and is connected to the spindle; the stator is located in the shell and is at least partially arranged around the rotor; the air bearing is at least partially installed in the shell and rotatably connects the spindle to the shell; the air bearing comprises an outer ring of a bearing and an inner ring of a bearing, the outer ring of the bearing is connected to the shell, the inner ring of the bearing cooperates with the spindle, the inner ring of the bearing comprises a fixed part and at least one deflection part, the fixed part and at least one deflection part are distributed along the axial direction of the air bearing, the fixed part is fixed to the outer ring of the bearing, the air bearing also comprises at least one air bag, the deflection part is connected to the outer ring of the bearing through the air bag, and the air bag is configured to be deformable so that the deflection part can deflect relative to the fixed part.

[0006] As a preferred technical solution, the bearing inner ring is provided with at least one groove extending along the circumference of the air bearing, and the groove is at least partially located between the deflection part and the fixed part, and the notch of the groove is located on the surface of the bearing inner ring close to the bearing outer ring, and the distance between the bottom of the groove and the surface of the bearing inner ring close to the main shaft along the radial direction of the air bearing is greater than 0, so that the deflection part is at least partially connected to the fixed part.

[0007] As a preferred technical solution, two deflection parts are provided, and the two deflection parts are distributed on both sides of the fixed part along the axial direction of the air bearing, and the two deflection parts are connected to the outer ring of the bearing through the airbag.

[0008] As a preferred technical solution, the airbag includes a first state and a second state. When the airbag is in the first state, the volume of the airbag is a first volume, and the first volume is configured to be able to drive the side of the deflection part away from the fixed part to deflect toward the main axis direction; when the airbag is in the second state, the volume of the airbag is a second volume, and the second volume is configured to be able to drive the side of the deflection part away from the fixed part to deflect toward the outer ring of the bearing; wherein the first volume is larger than the second volume.

[0009] As a preferred technical solution, the length of each of the airbags along the circumference of the bearing outer ring is less than or equal to half the length of the outer peripheral surface of the deflection portion along the circumference of the bearing outer ring.

[0010] As a preferred technical solution, a plurality of first mounting grooves are provided on a side of the air bearing close to the main shaft, and the plurality of first mounting grooves are distributed along the axial direction of the air bearing; the air main shaft also includes: a plurality of first optical fibers, each of which is installed in one of the first mounting grooves, and each of the first optical fibers is configured to detect the air pressure value between the air bearing and the main shaft; wherein the airbag is configured to be inflated or exhausted according to the air pressure value detected by the first optical fiber to adjust the deflection degree of the deflection part.

[0011] As a preferred technical solution, the air spindle includes multiple layers of first protective layers, each of the first installation grooves is installed with multiple layers of the first protective layers, the multiple layers of the first protective layers at least partially cover the first optical fiber, and the multiple layers of the first protective layers are configured to be deformed by the air pressure between the air bearing and the spindle, and the deformation enables the multiple layers of the first protective layers to exert a force on the first optical fiber; a side of the multiple layers of the first protective layers facing away from the first optical fiber and a side of the air bearing close to the spindle are basically located on the same circumference; As a preferred technical solution, a plurality of the first mounting grooves are evenly distributed on the air bearing along the axial direction of the air bearing.

[0012] As a preferred technical solution, the air spindle includes a plurality of second optical fibers, the bearing inner ring is a porous material, and the plurality of second optical fibers are located in the bearing inner ring. Each of the second optical fibers is configured to detect the air pressure value within the pore size of the porous material, so that the second optical fiber can detect blockage in the bearing inner ring.

[0013] As a preferred technical solution, the air spindle includes a plurality of third optical fibers, which are installed on the side of the bearing inner ring close to the bearing outer ring, and each of the third optical fibers is configured to detect pressure changes on the side of the bearing inner ring close to the bearing outer ring, so that the third optical fiber can detect the deformation of the bearing inner ring.

[0014] Compared with the prior art, the beneficial effects of this application are: The present application provides an air spindle, which, when the air bearing is tilted, inflates or deflates the airbag to deform the airbag, thereby causing the deflection portion of the bearing inner ring to deflect relative to its fixed portion, thereby realizing the return of the air bearing. Thus, the axis of the air bearing and the axis of the spindle can coincide, thereby improving the rotation accuracy of the air spindle. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] Figure 1 This is a schematic diagram of the structure of the air spindle of this application; Figure 2 A cross-sectional view of the air spindle of this application; Figure 3 for Figure 2 Partial cross-sectional view of the AA section; Figure 4 This is a structural schematic diagram of the tilted state of the air bearing of this application; Figure 5 This is a structural schematic diagram of the air bearing in the return state of this application; Figure 6 for Figure 2 Partial cross-sectional view of the middle BB section; Among them, 100, air spindle; 11, shell; 12, spindle; 121, limit groove; 13, rotor; 14, stator; 15, air bearing; 151, bearing outer ring; 152, bearing inner ring; 1521, fixing part; 1522, deflection part; 1523, slot; 1524, first mounting groove; 153, airbag; 16, gap; 17, first optical fiber; 18, multi-layer first protective layer; 19, second optical fiber; 110, third optical fiber. DETAILED DESCRIPTION

[0016] In order to enable those skilled in the art to better understand the solution of the present application, the technical solution in the specific implementation manner of the present application will be clearly and completely described below in conjunction with the drawings in the implementation manner of the present application.

[0017] like Figure 1 , Figure 2 and Figure 3 As shown, the present application provides an air spindle 100 , which includes: a housing 11 , a spindle 12 , a rotor 13 , a stator 14 and an air bearing 15 .

[0018] The main shaft 12 is at least partially located in the housing 11 and is rotatably connected to the housing 11. The rotor 13 is located in the housing 11 and is fixedly connected to the main shaft 12. The stator 14 is located in the housing 11 and is at least partially arranged around the rotor 13. The rotor 13 can drive the main shaft 12 to rotate relative to the housing 11 under the action of the stator 14. The air bearing 15 is at least partially installed in the housing 11 and rotatably connects the main shaft 12 to the housing 11.

[0019] The main shaft 12 is provided with a limiting groove 121, and the air bearing 15 is at least partially located in the limiting groove 121 and has a gap 16 with the limiting groove 121. The gap 16 includes the gap 16 between the inner peripheral wall of the air bearing 15 and the bottom of the limiting groove 121, and the gap 16 between the axial end surface of the air bearing 15 and the side wall of the limiting groove 121.

[0020] The limiting groove 121 is an annular groove opened on the outer peripheral wall of the main shaft 12 and arranged circumferentially along the outer peripheral wall of the main shaft 12. The air bearing 15 is at least partially located in the limiting groove 121 to realize the axial displacement constraint and radial displacement constraint of the air bearing 15 and the main shaft 12. The gap 16 between the air bearing 15 and the limiting groove 121 allows the air film to be generated between the air bearing 15 and the limiting groove 121 after the air bearing 15 is ventilated. This air film separates the main shaft 12 from the air bearing 15, so that the main shaft 12 can rotate freely, reducing the friction and wear of the main shaft 12.

[0021] The air bearing 15 includes a bearing outer ring 151 and a bearing inner ring 152. The bearing outer ring 151 is fixedly connected to the housing 11, and the bearing inner ring 152 is installed and fitted in the limiting groove 121 of the main shaft 12. The bearing inner ring 152 includes a fixed portion 1521 and at least one deflection portion 1522. The fixed portion 1521 and the at least one deflection portion 1522 are distributed along the axial direction of the air bearing 15, and the fixed portion 1521 is fixed to the bearing outer ring 151. The air bearing 15 also includes at least one airbag 153, and the deflection portion 1522 is connected to the bearing outer ring 151 through the airbag 153. The airbag 153 is configured to be deformable so that the deflection portion 1522 can deflect relative to the fixed portion 1521.

[0022] The airbag 153 includes a deformable flexible shell, and the airbag 153 has a gas-filled chamber inside. When the airbag 153 is inflated, the airbag 153 expands and deforms; when the airbag 153 is deflated, the airbag 153 contracts and deforms. Since one end of the airbag 153 is connected to the fixed bearing outer ring 151, and the other end of the airbag 153 is connected to the deflection portion 1522 of the bearing inner ring 152, and the fixed portion 1521 of the bearing inner ring 152 is fixedly connected to the bearing outer ring 151, when the airbag 153 expands or contracts, the deflection portion 1522 of the bearing inner ring 152 will deflect relative to the fixed portion 1521. When the air bearing 153 occurs Figure 4 When the airbag 153 is tilted, the airbag 153 is inflated or exhausted to deform, so that the deflection portion 1522 can deflect relative to the fixed portion 1521, and the air bearing 15 returns to the normal position. Figure 5 Status shown.

[0023] The air spindle 100 of the present application, when the air bearing 15 is tilted, inflates or deflates the airbag 153, causing the airbag 153 to deform, thereby causing the deflection portion 1522 of the bearing inner ring 152 to deflect relative to its fixed portion 1521, thereby realizing the return of the air bearing 15. Thus, the axis of the air bearing 15 and the axis of the spindle 12 can be made to coincide, which is beneficial to reducing the friction between the air bearing 15 and the spindle 12, so as to improve the rotation accuracy of the air spindle 100.

[0024] Specifically, the airbag 153 includes a first state and a second state. When the airbag 153 is in the first state, the volume of the airbag 153 is a first volume, and the first volume is configured to be able to drive the side of the deflection part 1522 away from the fixing part 1521 to deflect toward the main shaft 12; when the airbag 153 is in the second state, the volume of the airbag 153 is a second volume, and the second volume is configured to be able to drive the side of the deflection part 1522 away from the fixing part 1521 to deflect toward the bearing outer ring 151. The first volume is greater than the second volume.

[0025] The airbag 153 is inflated so that the airbag 153 is in a first state and has a first volume. The airbag 153 with the first volume squeezes the deflection portion 1522, so that the side of the deflection portion 1522 away from the fixed portion 1521 deflects toward the main shaft 12, thereby returning the air bearing 15 to the center. The airbag 153 is deflated so that the airbag 153 is in a second state and has a second volume. The airbag 153 with the second volume pulls the deflection portion 1522, so that the side of the deflection portion 1522 away from the fixed portion 1521 deflects toward the bearing outer ring 151, thereby returning the air bearing 15 to the center.

[0026] The airbag 153 also includes a third state. When the airbag 153 is in the third state, the volume of the airbag 153 is a third volume, which is smaller than the first volume and larger than the second volume. When the airbag 153 is in the third state, the deflection portion 1522 does not deflect relative to the fixing portion 1521, and the air bearing 15 is in normal working condition.

[0027] As an implementation, the bearing inner ring 152 is provided with at least one slot 1523 extending along the circumference of the air bearing 15, and the slot 1523 is at least partially located between the deflection portion 1522 and the fixed portion 1521. The slot opening of the slot 1523 is located on the surface of the bearing inner ring 152 close to the bearing outer ring 151, and the distance between the slot bottom of the slot 1523 and the surface of the bearing inner ring 152 close to the main shaft 12 along the radial direction of the air bearing 15 is greater than 0, so that the deflection portion 1522 is at least partially connected to the fixed portion 1521, so that the deflection portion 1522 can deflect relative to the fixed portion 1521.

[0028] The arrangement structure of the above-mentioned slot 1523 enables, when the deflection portion 1522 is squeezed by the airbag 153, the deflection portion 1522 can use the connection between the deflection portion 1522 and the fixed portion 1521 as a rotation axis to realize the deflection portion 1522 deflecting toward the main shaft 12 on the side away from the fixed portion 1521, at this time, the slot 1523 is deformed into a shape that gradually widens from the slot bottom toward the slot opening; and enables, when the deflection portion 1522 is pulled by the airbag 153, the deflection portion 1522 can use the connection between the deflection portion 1522 and the fixed portion 1521 as a rotation axis to realize the deflection portion 1522 deflecting toward the bearing outer ring 151 on the side away from the fixed portion 1521, at this time, the slot 1523 is deformed into a shape that gradually narrows from the slot bottom toward the slot opening. The slot 1523 needs to have a certain width so that when the deflection portion 1522 away from the fixing portion 1521 deflects toward the bearing outer ring 151 , the deflection portion 1522 and the fixing portion 1521 at one end close to the slot 1523 will not contact each other.

[0029] In the present application, two deflection parts 1522 are provided, and the two deflection parts 1522 are distributed on both sides of the fixed part 1521 along the axial direction of the air-floating bearing 15. The two deflection parts 1522 are connected to the outer ring 151 of the bearing through the airbags 153, so that the two airbags 153 on both sides can adjust the two deflection parts 1522 respectively: when the air-floating bearing 15 is tilted, the airbag 153 on one side squeezes the deflection part 1522 on the side, so that the side of the deflection part 1522 away from the fixed part 1521 deflects toward the main shaft 12; the airbag 153 on the other side pulls the corresponding side deflection part 1522, so that the side of the deflection part 1522 away from the fixed part 1521 deflects toward the outer ring 151 of the bearing. Thereby, the adjustment of the deflection part 1522 is more flexible, and the return effect of the air-floating bearing 15 is better.

[0030] Specifically, the length of each airbag 153 along the circumference of the bearing outer ring 151 is less than or equal to half of the length of the outer circumference of the deflection part 1522 along the circumference of the bearing outer ring 151. If the length of each airbag 153 along the circumference of the bearing outer ring 151 is greater than half of the length of the outer circumference of the deflection part 1522 along the circumference of the bearing outer ring 151, it will cause the two ends of the deflection part 1522 symmetrical about the main axis 12 to be stretched or compressed at the same time. However, the bearing inner ring 152 is a rigid part, that is, the deflection part 1522 is a rigid part, so the deflection part 1522 will not be stretched or compressed at the same time. If the deflection part 1522 is stretched or compressed at the same time, the deflection part 1522 will be deformed and damaged, thereby deforming the bearing inner ring 152, thereby reducing the working reliability of the air bearing 15.

[0031] As a way to achieve this, Figure 6 As shown, a plurality of first mounting grooves 1524 are provided on one side of the air bearing 15 close to the main shaft 12, and the plurality of first mounting grooves 1524 are distributed along the axial direction of the air bearing 15. The air main shaft 100 further includes: a plurality of first optical fibers 17, each of which is installed in a first mounting groove 1524, and each of which is configured to detect the air pressure value between the air bearing 15 and the main shaft 12. The airbag 153 is configured to be inflated or exhausted according to the air pressure value detected by the first optical fiber 17 to adjust the deflection degree of the deflection part 1522. Specifically, the airbag 153 is inflated or exhausted by an air source control component, and the air source control component is in communication connection with each of the first optical fibers 17. The air source control component inflates or deflates the airbag 153 according to the air pressure value detected by the first optical fiber 17: if the air pressure value detected by the first optical fiber 17 is too small, the air source control component controls the deflation of the airbag 153 on the corresponding side of the first optical fiber 17; if the air pressure value detected by the first optical fiber 17 is too large, the air source control component controls the inflation of the airbag 153 on the corresponding side of the first optical fiber 17. It should be noted that the air source control component can be a pressure control air valve, etc. Among them, the air source control component is connected to an external air supply device, so that the air source control component can control the air supply and suction of the external air supply device to the airbag 153.

[0032] As a way to achieve this, Figure 6As shown, the air spindle 100 includes a multi-layer first protective layer 18, and the multi-layer first protective layer 18 is used to protect the first optical fiber 17. Each first installation groove 1524 is installed with a multi-layer first protective layer 18, and the multi-layer first protective layer 18 at least partially covers the first optical fiber 17. The multi-layer first protective layer 18 is configured to be deformed by the air pressure between the air bearing 15 and the spindle 12, and the deformation makes the multi-layer first protective layer 18 have a force on the first optical fiber 17. When the gas in the air gap generates pressure on the multi-layer first protective layer 18, the multi-layer first protective layer 18 can transfer the pressure to the first optical fiber 17, so that the first optical fiber 17 can detect the air pressure value. At the same time, the multi-layer first protective layer 18 can buffer the impact of the gas in the air gap on the first optical fiber 17, and play a role in protecting the first optical fiber 17 and preventing the first optical fiber 17 from being damaged.

[0033] Exemplarily, the multi-layer first protective layer 18 can be made of flexible rubber, and the first optical fiber 17 in the first installation groove 1524 can be protected by the flexible rubber. In addition, the flexible rubber has the property of deformation, so the first protective layer 18 can be deformed according to the change of the air film pressure, and the first protective layer 18 has a force on the first optical fiber 17, so as to facilitate the first optical fiber 17 to detect the air film pressure value. It should be noted that the first protective layer 18 can also be made of other materials with protection and deformation properties, and this application is not limited.

[0034] Specifically, the side of the multi-layer first protective layer 18 facing away from the first optical fiber 17 and the side of the air bearing 15 close to the main shaft 12 are basically located on the same circumference. If the side of the multi-layer first protective layer 18 facing away from the first optical fiber 17 protrudes from the side of the air bearing 15 close to the main shaft 12, the multi-layer first protective layer 18 may contact with the main shaft 12 and generate friction; if the side of the multi-layer first protective layer 18 facing away from the first optical fiber 17 is recessed into the side of the air bearing 15 close to the main shaft 12, it may cause the air gap between the bearing inner ring 152 and the main shaft 12 to be unevenly distributed. Therefore, by setting the side of the multi-layer first protective layer 18 facing away from the first optical fiber 17 to be basically located on the same circumference as the side of the air bearing 15 close to the main shaft 12, it is beneficial to reduce the friction between the air bearing 15 and the main shaft 12, and can improve the stability of the rotation of the main shaft 12, so as to improve the rotation accuracy of the air main shaft 100.

[0035] More specifically, a plurality of first mounting grooves 1524 are evenly distributed on the air bearing 15 along the axial direction of the air bearing 15. By numbering each first optical fiber 17 and obtaining the pressure signal of the first optical fiber 17 at different positions, the real-time pressure value of the position corresponding to each first optical fiber 17 can be obtained, and the shape of the air bearing 15 can be derived, so that the judgment result of the deflection degree of the air bearing 15 is more accurate.

[0036] As a way to achieve this, Figure 6 As shown, the air spindle 100 includes a plurality of second optical fibers 19, the bearing inner ring 152 is a porous material, the gas entering the bearing inner ring 152 is discharged from the bearing inner ring 152 through the holes on the bearing inner ring 152, and the plurality of second optical fibers 19 are located in the bearing inner ring 152. Each second optical fiber 19 is configured to be able to detect the air pressure value in the aperture of the porous material, so that the second optical fiber 19 can detect the blockage in the bearing inner ring 152. Blockage in the bearing inner ring 152 is one of the reasons for the deflection of the air bearing 15. Therefore, if the air bearing 15 is judged to be deflected by the air pressure value detected by each first optical fiber 17, the air pressure value in the aperture of the bearing inner ring 152 is detected by each second optical fiber 19 to judge whether the bearing inner ring 152 is blocked.

[0037] As a way to achieve this, Figure 6 As shown, the air spindle 100 includes a plurality of third optical fibers 110, which are installed on the side of the bearing inner ring 152 close to the bearing outer ring 151. Each third optical fiber 110 is configured to detect the pressure change on the side of the bearing inner ring 152 close to the bearing outer ring 151, so that the third optical fiber 110 can detect the deformation of the bearing inner ring 152. The deformation of the bearing inner ring 152 is one of the reasons for the deflection of the air bearing 15. Therefore, if the air bearing 15 is deflected by judging the air pressure value detected by each first optical fiber 17, the pressure change on the side of the bearing inner ring 152 close to the bearing outer ring 151 is detected by each third optical fiber 110 to judge whether the bearing inner ring 152 is deformed.

[0038] It should be noted that the words "first", "second" and similar words used in the specification and claims of this application do not indicate any order, quantity or importance, but are only used to distinguish different components. Similarly, words such as "one" or "a" do not indicate a quantitative limitation, but indicate the existence of at least one. "Multiple" or "several" means at least two. Unless otherwise specified, words such as "front", "back", "left", "right", "bottom" and / or "top" are only for the convenience of description and are not limited to one position or one spatial orientation. Words such as "include" or "comprise" mean that the elements or objects appearing before "include" or "comprise" include the elements or objects listed after "include" or "comprise" and their equivalents, and do not exclude other elements or objects. Words such as "connect" or "connected" are not limited to physical or mechanical connections, and may include electrical connections, whether direct or indirect.

[0039] The singular forms "a", "said" and "the" used in this specification and the appended claims are also intended to include the plural forms, unless the context clearly indicates otherwise. It should also be understood that the term "and / or" used herein refers to and includes any or all possible combinations of one or more of the associated listed items.

[0040] It should be understood that those skilled in the art can make improvements or changes based on the above description, and all these improvements and changes should fall within the scope of protection of the claims attached to this application.

Claims

1. An air spindle (100), comprising: Housing (11); a main shaft (12), wherein at least a portion of the main shaft (12) is located inside the housing (11) and is rotationally connected to the housing (11); a rotor (13), the rotor (13) being located in the housing (11) and connected to the main shaft (12); a stator (14), the stator (14) being located in the housing (11) and at least partially arranged around the rotor (13); An air bearing (15), the air bearing (15) being at least partially mounted in the housing (11) and rotatably connecting the main shaft (12) to the housing (11); It is characterized in that The air-floating bearing (15) comprises a bearing outer ring (151) and a bearing inner ring (152), wherein the bearing outer ring (151) is connected to the housing (11), and the bearing inner ring (152) cooperates with the main shaft (12), and the bearing inner ring (152) comprises a fixed portion (1521) and at least one deflection portion (1522), wherein the fixed portion (1521) and at least one deflection portion (1522) are distributed along the axial direction of the air-floating bearing (15), and the fixed portion (1521) is fixed to the bearing outer ring (151). The air-floating bearing (15) further comprises at least one airbag (153), wherein the deflection portion (1522) is connected to the bearing outer ring (151) via the airbag (153), and wherein the airbag (153) is configured to be deformable so that the deflection portion (1522) can deflect relative to the fixed portion (1521).

2. The air spindle (100) according to claim 1, characterized in that: The bearing inner ring (152) is provided with at least one groove (1523) extending along the circumference of the air-floating bearing (15); the groove (1523) is at least partially located between the deflection portion (1522) and the fixed portion (1521); the notch of the groove (1523) is located on the surface of the bearing inner ring (152) close to the bearing outer ring (151); the distance between the groove bottom of the groove (1523) and the surface of the bearing inner ring (152) close to the main shaft (12) along the radial direction of the air-floating bearing (15) is greater than 0, so that the deflection portion (1522) and the fixed portion (1521) are at least partially connected.

3. The air spindle (100) according to claim 1, characterized in that: Two deflection parts (1522) are provided, and the two deflection parts (1522) are distributed on both sides of the fixed part (1521) along the axial direction of the air-floating bearing (15), and the two deflection parts (1522) are connected to the bearing outer ring (151) through the airbag (153).

4. The air spindle (100) according to claim 1 or 3, characterized in that: The airbag (153) comprises a first state and a second state. When the airbag (153) is in the first state, the volume of the airbag (153) is a first volume, and the first volume is configured to be able to drive the side of the deflection portion (1522) away from the fixed portion (1521) to deflect in the direction of the main shaft (12); when the airbag (153) is in the second state, the volume of the airbag (153) is a second volume, and the second volume is configured to be able to drive the side of the deflection portion (1522) away from the fixed portion (1521) to deflect in the direction of the bearing outer ring (151); Wherein the first volume is greater than the second volume.

5. The air spindle (100) according to claim 4, characterized in that: The length of each airbag (153) along the circumference of the bearing outer ring (151) is less than or equal to half the length of the outer peripheral surface of the deflection portion (1522) along the circumference of the bearing outer ring (151).

6. The air spindle (100) according to claim 1, characterized in that: A plurality of first mounting grooves (1524) are provided on a side of the air bearing (15) close to the main shaft (12), and the plurality of first mounting grooves (1524) are distributed along the axial direction of the air bearing (15); The air spindle (100) further comprises: a plurality of first optical fibers (17), each of the first optical fibers (17) being installed in one of the first installation grooves (1524), and each of the first optical fibers (17) being configured to be able to detect an air pressure value between the air bearing (15) and the main shaft (12); The airbag (153) is configured to be able to be inflated or exhausted according to the air pressure value detected by the first optical fiber (17) to adjust the deflection degree of the deflection portion (1522).

7. The air spindle (100) according to claim 6, characterized in that: The air spindle (100) comprises multiple layers of first protective layers (18), each of the first mounting grooves (1524) is provided with multiple layers of the first protective layers, the multiple layers of the first protective layers at least partially cover the first optical fiber (17), and the multiple layers of the first protective layers are configured to be deformed by the air pressure between the air bearing (15) and the spindle (12), and the deformation enables the multiple layers of the first protective layers to exert a force on the first optical fiber (17); A side of the multiple layers of the first protective layer facing away from the first optical fiber (17) and a side of the air bearing (15) close to the main axis (12) are substantially located on the same circumference.

8. The air spindle (100) according to claim 7, characterized in that: A plurality of the first mounting grooves (1524) are evenly distributed on the air bearing (15) along the axial direction of the air bearing (15).

9. The air spindle (100) according to claim 1, characterized in that: The air spindle (100) includes a plurality of second optical fibers (19), the bearing inner ring (152) is a porous material, and the plurality of second optical fibers (19) are located inside the bearing inner ring (152), and each second optical fiber (19) is configured to be able to detect an air pressure value within an aperture of the porous material, so that the second optical fiber (19) can detect a blockage condition within the bearing inner ring (152).

10. The air spindle (100) according to claim 1, characterized in that The air spindle (100) includes a plurality of third optical fibers (110), and the plurality of third optical fibers (110) are installed on a side of the bearing inner ring (152) close to the bearing outer ring (151), and each of the third optical fibers (110) is configured to be able to detect a pressure change on a side of the bearing inner ring (152) close to the bearing outer ring (151), so that the third optical fiber (110) can detect a deformation of the bearing inner ring (152).

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