Electronic gun wire harness fracture detection method, device and system

Abstract

The invention discloses a fracture detection method, device and system for an electron gun wire harness. The fracture detection method comprises the following steps: adjusting a test current applied to the electron gun wire harness; acquiring the actual current of the electron gun wire harness; and determining the breakage degree of the electron gun wire harness according to the test current and the actual current. According to the breakage detection method for the electron gun wire harness, the breakage degree of the electron gun wire harness can be judged by detecting and analyzing the current of the wire harness, the cost is low, operation is convenient, the wire harness cannot be damaged, and the safety of workers can be guaranteed.

Description

Technical Field

[0001] The present invention relates to the technical field of electron guns, and in particular to a method, device and system for detecting the breakage of an electron gun harness. Background Art

[0002] In the semiconductor manufacturing industry, electron beam scanning measurement technology has become increasingly important due to its high sensitivity and ability to detect defects that cannot be found by optical inspection equipment. Electron beam scanning measurement instruments apply a heating current to the cathode of the thermal field electron gun filament to reach its rated operating temperature, apply an extraction voltage to the filament to allow a large number of free electrons inside to escape, and then apply a suppression voltage to form an electron beam. The electron beam can be pulled and accelerated by several high-voltage electric fields to bombard the sample under test, thereby exciting secondary electrons, and capturing defects by collecting and analyzing these secondary electrons.

[0003] The heating current, extraction voltage, suppression voltage and high-voltage electric field of the above-mentioned electron beam scanning measuring instrument are provided by the electron gun high-voltage power supply. Usually, this high-voltage power supply takes up a large space and is heavy and difficult to carry. It cannot be directly installed on the vacuum chamber, and the filament and each high-voltage coil must be connected through a high-voltage harness. These electron gun high-voltage harnesses often require special design, usually using an inner core of at least 10 copper wires twisted into one, plus an insulation layer with a radius of more than 3 mm, and wrapped shielding wires to meet the requirements of carrying current 3A and withstand voltage 20kV. In actual use scenarios, these high-voltage harnesses are often 1-3 meters long and are soft enough to be bundled together and fixed to the inside of the outer casing of the scanning measuring instrument.

[0004] During the long-term operation of the scanning measuring instrument, these high-voltage harnesses are often damaged due to various reasons. For example, the insulation layer is aged; for example, the limitation of the installation method causes stress to be easily generated inside the harness, and under the stress concentration effect, it is very easy to cause material fatigue and breakage; or the harness is broken due to being pulled hard. Sometimes the damaged high-voltage harness is completely broken, which causes the output of the electron gun high-voltage power supply to be unable to be normally applied to the high vacuum chamber through the high-voltage harness; and sometimes the high-voltage harness is only partially broken, such as half of the 10 copper wires are broken and poorly contacted, which will cause the high-voltage harness to have unstable output voltage, or various faults such as decreased overcurrent capacity. These faults make the measurement image of the electron beam scanning measuring instrument poor or even no image. Since the high-voltage harness breaks inside and cannot be directly observed by the naked eye, and this fault phenomenon is the same as the high-voltage power supply failure, vacuum chamber vacuum failure, secondary electron probe failure, etc., and because the high-voltage harness replacement steps are cumbersome, it is easy to be ignored by engineers when troubleshooting the cause of equipment failure.

[0005] For high-voltage harnesses with faults, the existing means of detecting the breakage of high-voltage harnesses are not effective. Simple multimeter measurements, such as those with a multimeter, can detect completely broken harnesses, but are often helpless for partially broken harnesses. First, the resistance of the 1-3 meter high-voltage harness itself is at the milliohm level, while the increase in resistance caused by local breakage is at the micro-ohm level, which cannot be effectively identified by the multimeter. Second, if the multimeter is assisted by the broken line method, the high-voltage harness needs to be applied with rated high voltage electricity to be effectively measured. The broken line method has the risk of electric shock in operation and is not recommended. In addition, various mature and widely used commercial methods, such as the pulse reflection method, the high-voltage voltage direct flash method, the high-voltage voltage flash method, etc., can determine the location of the fault point, but for high-voltage harnesses with a length of less than 10m and a small cross-sectional area, they are blind spots for measurement. These measuring devices are expensive in themselves, and it is not economical to improve them. Summary of the invention

[0006] The present invention provides a method, device and system for detecting the fracture of an electron gun wire harness. The actual current of the electron gun wire harness is detected and the degree of fracture of the electron gun wire harness is determined by analyzing and comparing the actual current with a preset current. The fracture detection method is not only low-cost and simple to operate, but also can realize accurate detection of the degree of fracture of the electron gun wire harness and will not damage the electron gun wire harness.

[0007] According to a first aspect of the present invention, there is provided a method for detecting a break of an electron gun wire harness, comprising:

[0008] regulating a test current applied to the electron gun wiring harness;

[0009] Obtaining the actual current of the electron gun wire beam;

[0010] The degree of breakage of the electron gun wire bundle is determined according to the test current and the actual current.

[0011] Optionally, adjust the test current applied to the electron gun wire bundle, including:

[0012] Applying a first preset current to the electron gun beam, and sequentially increasing the test current in a first preset step length, or

[0013] Applying a second preset current to the electron gun wire bundle, and sequentially reducing the test current in a second preset step length;

[0014] Wherein, the first preset current is smaller than the second preset current.

[0015] Optionally, determining the degree of breakage of the electron gun wire bundle according to the test current and the actual current includes:

[0016] When the actual current increases according to the increase of the test current or when the actual current decreases according to the decrease of the test current, the system enters a waiting-for-diagnosis state;

[0017] When the actual current is 0, it is determined that the electron gun wire bundle is completely broken.

[0018] Optionally, when the actual current increases according to the increase of the test current or the actual current decreases according to the decrease of the test current, entering the state to be diagnosed includes:

[0019] When the actual current continues to increase according to the increase of the test current, and / or

[0020] When the actual current continues to decrease according to the decrease of the test current, it is determined that the electron gun wire harness is not broken;

[0021] When the actual current increases according to the increase of the test current, and the actual current increases to a first threshold and stops increasing, and / or

[0022] When the actual current decreases according to the decrease of the test current and the actual current decreases to a second threshold and stops decreasing, it is determined that the electron gun wire bundle is partially broken.

[0023] According to a second aspect of the present invention, there is provided a device for detecting the breakage of an electron gun harness, which executes the method for detecting the breakage of an electron gun harness described in the first aspect, wherein the device comprises: a current detection module, a current setting module and a constant current source module;

[0024] The first output end of the current setting module is connected to the constant current source module, and the current setting module adjusts the test current applied to the electron gun wire harness based on the control instruction of the user end;

[0025] The first output end of the current detection module is connected to the electron gun wire harness, the second output end of the current detection module is connected to the first input end of the current setting module, and the current detection module is used to detect the actual current of the electron gun wire harness in real time and feed it back to the current setting module;

[0026] The output end of the constant current source module is connected to the current detection module, and the constant current source module applies the test current to the electron gun harness.

[0027] Optionally, a display module is also included;

[0028] The first input end of the display module is connected to the second output end of the current setting module, the second input end of the display module is connected to the third output end of the current detection module, and the display module is used to display the test current and the actual current.

[0029] Optionally, the first output end of the current detection module includes a first interface and a second interface;

[0030] The first interface is connected to the first end of the electron gun wire bundle, and the second interface is connected to the second end of the electron gun wire bundle;

[0031] The first interface and the second interface are used to transmit the test current to the electron gun harness and to feed back the actual current to the current detection module.

[0032] Optionally, a power interface module is also included;

[0033] The input end of the power interface module is connected to the external power supply network through a power line, and the power interface module is used to convert the alternating current provided by the external power supply network into direct current.

[0034] Optionally, a warning module is also included;

[0035] The warning module is connected to the display module, and is used to issue a warning message when the actual current is 0; wherein the warning message includes at least one of the following: a voice reminder, a buzzer reminder, and a light reminder.

[0036] According to a third aspect of the present invention, a system for detecting the breakage of an electron gun harness is provided, comprising a power supply, an electron gun harness to be tested, and the device for detecting the breakage of an electron gun harness according to any one of the second aspects.

[0037] The present invention discloses a method, device and system for detecting the fracture of an electron gun wire harness, including adjusting a test current applied to the electron gun wire harness; obtaining the actual current of the electron gun wire harness; and determining the fracture degree of the electron gun wire harness according to the test current and the actual current. The present invention provides a method, device and system for detecting the fracture of an electron gun wire harness, which detects the actual current of the electron gun wire harness and analyzes and compares the actual current with a preset current to determine the fracture degree of the electron gun wire harness. The fracture detection method is not only low-cost and simple to operate, but also can realize accurate detection of the fracture degree of the electron gun wire harness, and will not damage the electron gun wire harness.

[0038] It should be understood that the contents described in this section are not intended to identify the key or important features of the embodiments of the present invention, nor are they intended to limit the scope of the present invention. Other features of the present invention will become easily understood through the following description. BRIEF DESCRIPTION OF THE DRAWINGS

[0039] In order to more clearly illustrate the technical solutions in the embodiments of the present invention, the following briefly introduces the drawings required for use in the description of the embodiments. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without creative work.

[0040] Figure 1 It is a flow chart of a method for detecting fracture of an electron gun wire harness provided by an embodiment of the present invention;

[0041] Figure 2 is a flow chart of another method for detecting fracture of an electron gun wire bundle provided by an embodiment of the present invention;

[0042] Figure 3 is a flow chart of another method for detecting fracture of an electron gun wire bundle provided by an embodiment of the present invention;

[0043] Figure 4 is a flow chart of another method for detecting fracture of an electron gun wire bundle provided by an embodiment of the present invention;

[0044] Figure 5 It is a block diagram of a device for detecting a break of an electron gun wire harness provided by an embodiment of the present invention;

[0045] Figure 6 It is a circuit schematic diagram of a current detection module in a device for detecting a break of an electron gun wire harness provided by an embodiment of the present invention;

[0046] Figure 7 It is a circuit principle diagram of a current setting module in a device for detecting a break of an electron gun wire harness provided by an embodiment of the present invention;

[0047] Figure 8 It is a circuit schematic diagram of a constant current source module in a device for detecting the breakage of an electron gun wire harness provided by an embodiment of the present invention;

[0048] Fig. 9 This is another circuit principle diagram of a constant current source module in a device for detecting breakage of an electron gun wire harness provided in an embodiment of the present invention. DETAILED DESCRIPTION

[0049] In order to enable those skilled in the art to better understand the scheme of the present invention, the technical scheme in the embodiments of the present invention will be clearly and completely described below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work should fall within the scope of protection of the present invention.

[0050] It should be noted that the terms "first", "second", etc. in the specification and claims of the present invention and the above-mentioned drawings are used to distinguish similar objects, and are not necessarily used to describe a specific order or sequence. It should be understood that the data used in this way can be interchanged where appropriate, so that the embodiments of the present invention described herein can be implemented in an order other than those illustrated or described herein. In addition, the terms "including" and "having" and any variations thereof are intended to cover non-exclusive inclusions, for example, a process, method, system, product or device that includes a series of steps or units is not necessarily limited to those steps or units that are clearly listed, but may include other steps or units that are not clearly listed or inherent to these processes, methods, products or devices.

[0051] It should be understood that the various forms of processes shown above can be used to reorder, add or delete steps. For example, the steps described in the present invention can be executed in parallel, sequentially or in different orders, as long as the desired results of the technical solution of the present invention can be achieved, and this document does not limit this.

[0052] Figure 1 is a flow chart of a method for detecting a fracture of an electron gun wire harness provided by an embodiment of the present invention, with reference to Figure 1 , an embodiment of the present invention provides a method for detecting a fracture of an electron gun wire bundle, comprising:

[0053] S1. Adjust the test current applied to the electron gun wire bundle.

[0054] Among them, the electron gun is a device that generates, accelerates and converges high-energy density electron beams. It is widely used in many fields such as inelastic electron scattering and fluorescent screen luminescence. When using an electron beam scanning measuring instrument, it needs to be provided by an electron gun high-voltage power supply. Usually, this high-voltage power supply takes up a large space and is heavy and difficult to carry. It cannot be directly installed on the vacuum chamber, and the filament and each high-voltage coil must be connected by a high-voltage wire harness. The electron gun wire harness detected in this embodiment is the high-voltage wire harness for the electron gun. When the test current is applied to the high-voltage wire harness, the current response of the normal and broken wire harnesses is different.

[0055] Specifically, the test current applied to the electron gun wire bundle is adjusted to test the electron gun wire bundle.

[0056] S2. Get the actual current of the electron gun beam.

[0057] Specifically, the actual current fed back by the electron gun harness after applying different test currents is monitored and obtained in real time.

[0058] S3. Determine the degree of breakage of the electron gun harness based on the test current and the actual current.

[0059] Specifically, the fracture degree of the electron gun wire bundle is determined by analyzing and comparing different test currents applied to the electron gun wire bundle and the actual current fed back by the electron gun wire bundle. The fracture degree may include any one of the following: no fracture, complete fracture and partial fracture.

[0060] The embodiment of the present invention determines the degree of fracture of the electron gun wire bundle by detecting the actual current of the electron gun wire bundle and analyzing and comparing the actual current with the preset current. The fracture detection method is not only low-cost and simple to operate, but also can realize accurate detection of the degree of fracture of the electron gun wire bundle without damaging the electron gun wire bundle.

[0061] Based on the above-mentioned embodiments of the invention, the embodiments of the invention further refine the adjustment of the test current applied to the electron gun wire beam. Figure 2 is a flow chart of another method for detecting the breakage of an electron gun wire bundle provided by an embodiment of the present invention, with reference to Figure 2 , the control method of the embodiment of the present invention includes:

[0062] S21, applying a first preset current to the electron gun wire bundle, and sequentially increasing the test current with a first preset step length, or applying a second preset current to the electron gun wire bundle, and sequentially decreasing the test current with a second preset step length.

[0063] Specifically, a first preset current is applied to the electron gun wire bundle, exemplarily, the first preset current may be 2A, and the test current applied to the electron gun wire bundle is increased in sequence, and the amount of change each time of increase may be 0.02A, or a second preset current is applied to the electron gun wire bundle, exemplarily, the second preset current may be 3A, and the test current applied to the electron gun wire bundle is decreased in sequence, and the amount of change each time of decrease may be 0.02A, wherein the first preset current is less than the second preset current. The embodiment of the present invention does not limit the first preset current, the second preset current, the first preset step length, and the second preset step length, and the first preset step length and the second preset step length may also be the same, and the user may set them according to actual needs.

[0064] S22. Obtain the actual current of the electron gun beam.

[0065] S23. Determine the degree of breakage of the electron gun harness according to the test current and the actual current.

[0066] On the basis of the above-mentioned embodiments of the invention, the embodiments of the invention further refine the method for determining the degree of breakage of the electron gun wire bundle according to the test current and the actual current. Figure 3 is a flow chart of another method for detecting the breakage of an electron gun wire bundle provided by an embodiment of the present invention, with reference to Figure 3 , the control method provided by the embodiment of the present invention includes:

[0067] S31. Adjust the test current applied to the electron gun wire bundle.

[0068] S32, obtaining the actual current of the electron gun beam.

[0069] S33. Determine the degree of breakage of the electron gun harness according to the test current and the actual current.

[0070] S34. Compare the test current and the actual current.

[0071] When the actual current increases as the test current increases or when the actual current decreases as the test current decreases, execute step S3401; when the actual current does not increase as the test current increases, when the actual current does not decrease as the test current decreases, or when the actual current is 0, execute step S3402.

[0072] S3401. When the actual current increases as the test current increases or when the actual current decreases as the test current decreases, the system enters a state to be diagnosed.

[0073] Specifically, the current applied to the electron gun wire bundle is 2A, and the current applied to the electron gun wire bundle is adjusted by an increase of 0.02A each time. When the actual current fed back by the electron gun wire bundle increases with the increased test current, or

[0074] The current applied to the electron gun harness is 3A, and the current applied to the electron gun harness is adjusted in reductions of 0.02A each time. When the actual current fed back by the electron gun harness decreases with the reduced test current, it proves that the electron gun harness is not completely broken at this time, but it is not possible to directly determine whether the electron gun harness has a partial break at this time. Therefore, it enters the diagnosis state.

[0075] S3402. When the actual current is 0, it is determined that the electron gun wire harness is completely broken.

[0076] Specifically,

[0077] When the actual current fed back by the electron gun harness is 0 regardless of how the test current applied to the electron gun harness changes (ie, the test current can be increased or decreased sequentially), it proves that the electron gun harness is completely broken.

[0078] On the basis of the above-mentioned embodiments of the invention, the embodiments of the invention further refine the process of entering the state to be diagnosed when the actual current increases according to the increase of the test current or when the actual current decreases according to the decrease of the test current. Figure 4 is a flow chart of another method for detecting the breakage of an electron gun wire bundle provided by an embodiment of the present invention, with reference to Figure 4 , the control method provided by the embodiment of the present invention includes:

[0079] S41. Adjust the test current applied to the electron gun wire bundle.

[0080] S42, obtaining the actual current of the electron gun beam.

[0081] S43. Determine the degree of breakage of the electron gun harness according to the test current and the actual current.

[0082] S44. Compare the test current and the actual current.

[0083] S45. When the actual current increases as the test current increases or when the actual current decreases as the test current decreases, the system enters a state to be diagnosed.

[0084] S46: When the actual current continues to increase according to the increase of the test current, and / or when the actual current continues to decrease according to the decrease of the test current, it is determined that the electron gun harness is not broken.

[0085] Specifically, when the actual current fed back by the electron gun harness continues to increase according to the increase of the test current, exemplarily, the test current applied to the electron gun harness is 2A, which increases by 0.02A each time, and the actual current fed back by the electron gun harness continues to increase with the increase of the test current, and / or when the actual current fed back by the electron gun harness continues to decrease according to the decrease of the test current, exemplarily, the test current applied to the electron gun harness is 3A, which decreases by 0.02A each time, and the actual current fed back by the electron gun harness continues to decrease with the decrease of the test current, it can be understood that when the actual current fed back by the electron gun harness is consistent with the test current applied to the electron gun harness, it proves that the electron gun harness is not broken at this time.

[0086] S47. When the actual current increases according to the increase of the test current and stops increasing when it reaches a first threshold, and / or when the actual current decreases according to the decrease of the test current and stops decreasing when it reaches a second threshold, it is determined that a partial break occurs in the electron gun harness.

[0087] Specifically, when the electron gun wire harness has a local break, for example, 5 of the 10 strands are broken, the cross-sectional area of ​​the electron gun wire harness becomes smaller, the resistance increases but the increase is not obvious, and it cannot be effectively identified under static measurement. However, when a large current is passed, a local high temperature will be generated at the break, and the high temperature will increase the skin effect, thereby further increasing the resistance. In addition, because the spacing at the broken strand break is very small, when the voltage is applied, there will be a tip discharge phenomenon, commonly known as sparking, and the voltage cannot be stable at this time. When the above situation occurs, according to the area of ​​the break, the current carrying capacity of the electron gun wire harness will decrease, and at this time, the actual current fed back by the electron gun wire harness will be less than the set current value. Especially when the electron gun wire harness has a local break, the actual current fed back by the electron gun wire harness will increase according to the increase of the test current, and the actual current will stop increasing when it increases to the first threshold, and / or the actual current fed back by the electron gun wire harness will decrease according to the decrease of the test current, and the actual current will stop decreasing when it decreases to the second threshold, then it is determined that the electron gun wire harness has a local break, wherein the first threshold and the second threshold can be set according to actual needs.

[0088] Among them, the current carrying capacity of the electron gun harness can be calculated by the following formula:

[0089]

[0090] Among them, I is the current of the electron gun beam, U is the voltage of the electron gun beam, S is the cross-sectional area of ​​the electron gun beam, ρ is the resistivity, and L is the length of the electron gun beam.

[0091] According to the same inventive concept, Figure 5 is a block diagram of a device for detecting the breakage of an electron gun wire harness provided by an embodiment of the present invention, with reference to Figure 5 An embodiment of the present invention provides a device for detecting the fracture of an electron gun harness, which executes the method for detecting the fracture of an electron gun harness in any of the above-mentioned embodiments of the invention. The detection device includes: a current detection module 1, a current setting module 2 and a constant current source module 3; the first output end of the current setting module 2 is connected to the constant current source module 3, and the current setting module 2 adjusts the test current applied to the electron gun harness 4 based on the control instruction of the user end; the first output end of the current detection module 1 is connected to the electron gun harness 4, the second output end of the current detection module 1 is connected to the first input end of the current setting module 2, and the current detection module 1 is used to detect the actual current of the electron gun harness 4 in real time and feed it back to the current setting module 2; the output end of the constant current source module 3 is connected to the current detection module 1, and the constant current source module 3 applies the test current to the electron gun harness 4.

[0092] Specifically, the first output end of the current detection module 1 is connected to the electron gun harness 4, and the second output end of the current detection module 1 is connected to the first input end of the current setting module 2. The current detection module 1 is used to detect the actual current of the electron gun harness 4 in real time and feed it back to the current setting module 2.

[0093] Figure 6 is a circuit schematic diagram of a current detection module in a device for detecting a break of an electron gun wire harness provided by an embodiment of the present invention, with reference to Figure 6 The actual current I1 on the sampling resistor R1 is converted into a feedback voltage Vfb through the calculation of the operational amplifier IC1. After the resistance combination of the resistors R2 and R3, this voltage value can be regarded as the actual current of the electron gun beam and fed back to the current setting module 2. The feedback voltage Vfb can be calculated by the following formula.

[0094]

[0095] Among them, 100 kΩ is the resistance value of the resistor R3; 10 kΩ is the resistance value of the resistor R2.

[0096] The first output end of the current setting module 2 is connected to the constant current source module 3 , and the current setting module 2 adjusts the test current applied to the electron gun harness 4 based on the control instruction of the user end.

[0097] Figure 7 is a circuit schematic diagram of a current setting module in a device for detecting a break of an electron gun wire harness provided by an embodiment of the present invention, with reference to Figure 7 , the processor IC2 is controlled by the buttons SA and SB, and the circuit composed of the processor IC3 and the operational amplifier IC4 outputs the setting voltage V set Under the control of processor IC2, this setting voltage V set It will control the constant current source module 3 to output a 1:1 set current Set Current. It can be understood that each time the button SB is pressed, the current setting module 2 will increase the set current loaded by the constant current source module 3 on the electron gun harness 4 by 0.02A, which can reach a maximum of 6A, thereby completing the adjustment of the test current of the electron gun harness 4; or each time the button SA is pressed, the current setting module 2 will reduce the set current loaded by the constant current source module 3 on the electron gun harness 4 by 0.02A, which can reach a maximum of 6A, thereby completing the adjustment of the test current of the electron gun harness 4.

[0098] The output end of the constant current source module 3 is connected to the current detection module 1 , and the constant current source module 3 applies the test current to the electron gun harness 4 .

[0099] Figure 8 is a circuit schematic diagram of a constant current source module in a device for detecting a break of an electron gun wire harness provided by an embodiment of the present invention, with reference to Figure 8 , set the voltage Vset to enter the operational amplifier IC5 through R4. The output of this operational amplifier IC5 can control the output voltage of the power MOS tube Q2 when the transistor Q1 is turned on. Depending on Vset, 0-24V DC can be output to the third leg of the transformer T1. Transformer T1 is a center-tapped transformer with a turns ratio of 20:4 between the primary and secondary sides. Its power is specially designed to be 40W to prevent the broken high-voltage wiring harness from heating up severely during testing and thus damaging the detection device. In order for the center-tapped transformer to work, two power MOS tubes Q3 and Q4 are required to convert the output voltage of Q2 into the required input voltage on the T1 coil through fast switching action. In order for the power MOS tubes Q3 and Q4 to work normally, a set of inverted PWM waves CLK needs to be provided. The circuit diagram is as follows Fig. 9 As shown, Fig. 9 This is another circuit principle diagram of a constant current source module in a device for detecting breakage of an electron gun wire harness provided in an embodiment of the present invention.

[0100] Combination Figure 8 and Fig. 9 , timer IC6 outputs a PWM wave with a frequency of 25kHz under the combination of resistor R5, resistor R6, and capacitor C1, and obtains its inverse PWM wave through IC7, and then boosts it to 15V through 1C8 to control the switching actions of Q3 and Q4 respectively. When there is an input voltage on the primary side of transformer T1, the corresponding voltage will be output on the secondary side according to the turns ratio. This voltage is rectified by diodes D2 and D3 to become a DC voltage and applied to both ends of the measured electron gun harness 4. Among them, inductor L1 is a common-mode inductor, which is used to eliminate common-mode current to improve the accuracy of measurement. The size of R7 is 0.5 ohms, and its function is to simulate the filament load connected in actual use. R8 is a current detection resistor for current detection module 1 to sample the actual current. The output voltage of current detection module 1 is returned to operational amplifier IC5 as feedback voltage Vfb to adjust the balance of the entire circuit. Finally, Vfb will be equal to Vset, and constant current source module 3 will stabilize the output current. At this time, the actual output current will be consistent with the set current. However, when the electron gun harness 4 under test has a broken fault, the actual current flowing through the electron gun harness will be less than the set current, and the corresponding Vfb will never reach Vset. The operational amplifier IC5 will be in an unbalanced resistor configuration circuit, and thus the voltage of the two input pins cannot be balanced, resulting in the output voltage value of the power supply (i.e. 15V); and Q2 will also output its maximum value of 24V. At this time, the design of limiting the power of transformer T1 to 40W can effectively protect the entire circuit.

[0101] Optional, continue to refer to Figure 5The electron gun harness fracture detection device also includes a display module 5; a first input end of the display module 5 is connected to the second output end of the current setting module 2, a second input end of the display module 5 is connected to the third output end of the current detection module 1, and the display module 5 is used to display the test current and the actual current.

[0102] Specifically, the display module 5 can be used to display the test current applied to the electron gun harness 4, display the actual current fed back by the electron gun harness 4 and other information; illustratively, the display module 5 can be a digital tube.

[0103] Optionally, the first output end of the current detection module 1 includes a first interface and a second interface (the first interface and the second interface are not shown in the figure); the first interface is connected to the first end of the electron gun harness, and the second interface is connected to the second end of the electron gun harness; the first interface and the second interface are used to transmit the test current to the electron gun harness and to feed back the actual current to the current detection module.

[0104] Specifically, the first output end of the current detection module 1 includes a first interface and a second interface, which are respectively connected in series with the electron gun harness 4 for transmitting the test current to the electron gun harness 4 and feeding back the actual current of the electron gun harness 4 to the display module 5.

[0105] Optional, reference Figure 5 The electron gun harness fracture detection device includes a power interface module 6; the input end of the power interface module 6 is connected to the external power supply network through a power line, and the power interface module 6 is used to convert the AC power provided by the external power supply network into DC power.

[0106] Specifically, the power interface module 6 is used to convert the 90V-260V AC power in the external power supply network into a voltage such as 24V to provide power to the display module 5 and the like.

[0107] Optional, reference Figure 5 The fracture detection device of the electron gun harness includes a warning module 7; the warning module 7 is connected to the display module 5, and the warning module 7 is used to issue a warning message when the actual current is 0; wherein the warning message includes at least one of the following: voice reminder, buzzer reminder and light reminder.

[0108] Specifically, the warning module 7 is connected to the display module 5. The warning module 7 is used to send out a warning message to remind the staff when the actual current of the electron gun harness 4 is 0 and it is judged that the electron gun harness 4 is completely broken. The warning information includes voice reminder, buzzer reminder and light reminder.

[0109] According to the same inventive concept, an embodiment of the present invention provides an electron gun harness fracture detection system, comprising a power supply, an electron gun harness to be tested, and an electron gun harness fracture detection device according to any one of the above-mentioned inventive embodiments.

[0110] The electron gun harness fracture detection system provided by the embodiment of the present invention can achieve the same technical effect as the electron gun harness fracture detection device provided by the above-mentioned embodiment of the invention, which will not be described in detail here.

[0111] The above specific implementations do not constitute a limitation on the protection scope of the present invention. It should be understood by those skilled in the art that various modifications, combinations, sub-combinations and substitutions can be made according to design requirements and other factors. Any modification, equivalent substitution and improvement made within the spirit and principle of the present invention should be included in the protection scope of the present invention.

Claims

1. A method for detecting the breakage of an electron gun wire harness, characterized in that: include: regulating a test current applied to the electron gun wiring harness; Obtaining the actual current of the electron gun wire beam; The degree of breakage of the electron gun wire bundle is determined according to the test current and the actual current.

2. The method for detecting fracture of an electron gun harness according to claim 1, characterized in that: Adjust the test current applied to the electron gun harness, including: Applying a first preset current to the electron gun beam, and sequentially increasing the test current in a first preset step length, or Applying a second preset current to the electron gun wire bundle, and sequentially reducing the test current in a second preset step length; Wherein, the first preset current is smaller than the second preset current.

3. The method for detecting fracture of an electron gun harness according to claim 2, characterized in that: Determining the degree of breakage of the electron gun wire bundle according to the test current and the actual current includes: When the actual current increases according to the increase of the test current or when the actual current decreases according to the decrease of the test current, the system enters a waiting-for-diagnosis state; When the actual current is 0, it is determined that the electron gun wire bundle is completely broken.

4. The method for detecting fracture of an electron gun harness according to claim 3, characterized in that: When the actual current increases according to the increase of the test current or the actual current decreases according to the decrease of the test current, the system enters a state to be diagnosed, including: When the actual current continues to increase according to the increase of the test current, and / or When the actual current continues to decrease according to the decrease of the test current, it is determined that the electron gun wire harness is not broken; When the actual current increases according to the increase of the test current, and the actual current stops increasing when it reaches a first threshold, and / or When the actual current decreases according to the decrease of the test current and the actual current decreases to a second threshold and stops decreasing, it is determined that the electron gun wire bundle is partially broken.

5. A device for detecting the breakage of an electron gun wire harness, characterized in that: The method for detecting the breakage of the electron gun wire harness according to claims 1 to 4 is implemented, wherein the detection device comprises: a current detection module, a current setting module and a constant current source module; The first output end of the current setting module is connected to the constant current source module, and the current setting module adjusts the test current applied to the electron gun wire harness based on the control instruction of the user end; The first output end of the current detection module is connected to the electron gun wire harness, the second output end of the current detection module is connected to the first input end of the current setting module, and the current detection module is used to detect the actual current of the electron gun wire harness in real time and feed it back to the current setting module; The output end of the constant current source module is connected to the current detection module, and the constant current source module applies the test current to the electron gun harness.

6. The device for detecting the breakage of an electron gun harness according to claim 5, characterized in that: Also includes a display module; The first input end of the display module is connected to the second output end of the current setting module, the second input end of the display module is connected to the third output end of the current detection module, and the display module is used to display the test current and the actual current.

7. The device for detecting the breakage of an electron gun harness according to claim 5, characterized in that: The first output end of the current detection module includes a first interface and a second interface; The first interface is connected to the first end of the electron gun wire bundle, and the second interface is connected to the second end of the electron gun wire bundle; The first interface and the second interface are used to transmit the test current to the electron gun harness and to feed back the actual current to the current detection module.

8. The device for detecting the breakage of an electron gun harness according to claim 5, characterized in that: Also included is a power interface module; The input end of the power interface module is connected to the external power supply network through a power line, and the power interface module is used to convert the alternating current provided by the external power supply network into direct current.

9. The device for detecting the breakage of an electron gun harness according to claim 6, characterized in that: Also includes a warning module; The warning module is connected to the display module, and is used to issue a warning message when the actual current is 0; wherein the warning message includes at least one of the following: a voice reminder, a buzzer reminder, and a light reminder.

10. A fracture detection system for an electron gun harness, characterized in that: The invention comprises a power supply, an electron gun wire harness to be tested and a fracture detection device for an electron gun wire harness according to any one of claims 5 to 9.

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