Slow-pulling inclined driving device and cleaning machine

Abstract

The invention provides a slow-pulling inclined driving device and a cleaning machine, and belongs to the field of silicon wafer production and processing, the slow-pulling inclined driving device comprises a slow-pulling lifting frame, an inclined supporting seat, a lifting driving mechanism, a basket positioning guide unit and an inclined limiting assembly; the two longitudinal ends of the inclined supporting seat are pivotally mounted above the two ends of the flat frame of the slow-pulling lifting frame through an inclined rotating shaft assembly; the lifting driving mechanism adopts a non-belt transmission mode, and the driving end is connected to vertical frames at the two ends of the slow-pull lifting frame. And a plurality of flower basket positioning and guiding units are arranged on the inclined supporting seat. According to the movement mechanism integrating lifting and lateral deviation inclination, residual moisture on the surface of a cleaned silicon wafer is reduced, the drying effect is improved, the slow-pull inclined driving device is integrally driven by a motor lead screw, the problems of easy aging and slipping caused by belt driving are solved, an independent positioning and guiding unit is arranged corresponding to each material basket or basket, positioning and guiding are facilitated, and the drying efficiency is improved. And therefore, the integral silicon wafer perfectness ratio is improved, and the silicon wafer cleaning device is convenient to popularize and apply in the fields of silicon wafer cleaning and the like.

Description

Technical Field

[0001] The invention belongs to the field of silicon wafer production and processing, and in particular relates to a slow-pull oblique drive device and a cleaning machine. Background Art

[0002] During the silicon wafer preparation process, a large amount of water stains will remain on the surface of the silicon wafer after cleaning. If it enters the drying process directly, the temperature difference between the silicon wafer and the process temperature is large, and there will be more water stains on the surface, and the drying efficiency is low. Therefore, before the final drying, the water stains on the surface of the silicon wafer need to be removed as much as possible. Therefore, it is hoped to design a basket or material basket driving mechanism that can move up and down in the cleaning tank and can be tilted, so as to reduce the residual water on the silicon wafer as much as possible, or to clean and drop as many impurities on the silicon wafer as possible.

[0003] In addition, in some existing material basket or flower basket drive structures, belt drive is mostly used, but silicon wafer cleaning belongs to a high temperature environment. In this environment, firstly, the belt is easy to age, and secondly, the belt drive will be accompanied by slippage and other phenomena, resulting in transmission lag. Considering the total weight of the flower basket, material basket and silicon wafers, once the transmission slips or suddenly starts, it will cause the flower basket or material basket to move suddenly, and the internal silicon wafers are easily damaged. Therefore, it is necessary to design a stable drive system.

[0004] Furthermore, in the existing cleaning and pulling device, multiple baskets are placed on the same basket support frame, but each basket or flower basket is not positioned. Once the aforementioned transmission slips or suddenly starts, the flower baskets or baskets will collide with each other, which will also cause fragmentation. Summary of the invention

[0005] In order to overcome the deficiencies of the prior art, the object of the present invention is to provide a slow-pull oblique drive device and a cleaning machine, which can solve the above-mentioned problems.

[0006] Design principle: The slow-pull device is designed with an integrated lifting and lateral tilting motion mechanism to improve the cleaning effect; secondly, the slow-pull device is driven by a motor screw as a whole, avoiding the aging and slipping problems of belt drive. Finally, an independent positioning and guiding unit is set on the slow-pull basket support frame for each basket or flower basket to facilitate positioning and guiding and avoid collisions between them.

[0007] A slow-pull oblique drive device comprises a slow-pull lifting frame which is generally concave, an inclined support seat, a lifting drive mechanism, a flower basket positioning guide unit, and an inclined limit assembly; the longitudinal ends of the inclined support seat are pivotally mounted above the two ends of the flat frame of the slow-pull lifting frame through an inclined rotating shaft assembly; the lifting drive mechanism adopts a non-belt transmission method and the driving end is connected to the vertical frames at both ends of the slow-pull lifting frame; a plurality of flower basket positioning guide units are arranged on the inclined support seat.

[0008] Optionally, the slow-pull lifting frame includes a lifting horizontal frame and a lifting vertical frame, and the two lifting vertical frames are vertically installed at two ends of the lifting horizontal frame.

[0009] Optionally, the tilting shaft assembly includes a tilting shaft, a shaft lifting flat frame end fixing member, a shaft tilting flat frame end fixing member, a shaft lifting flat support member and a shaft tilting flat frame support member; the shaft lifting flat frame end fixing member and the shaft tilting flat frame end fixing member are correspondingly arranged at the longitudinal ends of the lifting flat frame and the tilting support seat, the two ends of the tilting shaft pass through the shaft lifting flat frame end fixing member and the shaft tilting flat frame end fixing member, and the middle part of the tilting shaft is supported by a plurality of the shaft lifting flat support members and the shaft tilting flat frame support members.

[0010] Optionally, the lifting drive mechanism includes a motor reducer assembly, a first commutator, a horizontal transmission shaft, a second commutator, a vertical transmission shaft, a lifting screw assembly, an upper and lower transfer fixed plate group and a slow-pull slide plate adapter assembly; the output end of the motor reducer assembly is connected to the horizontal input end of the horizontal transmission shaft and the lower end of a vertical transmission shaft through the first commutator, and the horizontal output end of the horizontal transmission shaft is connected to the lower end of another vertical transmission shaft through the second commutator; the upper and lower parts of each lifting screw assembly are supported by the upper and lower transfer fixed plate groups and connected to the outer frame or the outer end of the cleaning tank, and a slow-pull slide plate adapter assembly driven by the lifting screw assembly is arranged between the two upper and lower transfer fixed plate groups, and the slow-pull slide plate adapter assembly is connected to the lifting vertical frame of the slow-pull lifting frame.

[0011] Optionally, the lifting drive mechanism also includes a slow-pull lifting guide assembly, and two groups of the slow-pull lifting guide assemblies are symmetrically arranged on both sides of the lifting screw assembly. The slow-pull lifting guide assembly adopts a guide sleeve assembly to enhance the lifting stability of the device.

[0012] Optionally, the flower basket positioning guide unit includes a slow-lift positioning fixing plate and a flower basket positioning plate with a positioning notch, and the flower basket positioning plate is transversely mounted on the frame of the inclined support seat through the slow-lift positioning fixing plate.

[0013] Optionally, the tilt limit assembly includes a tilt frame flip stop assembly and a vertical frame limit adjustment stop assembly, the tilt frame flip stop assembly includes an L-shaped upper stop plate arranged at both ends of the same side of the frame of the tilt support seat and a lower stop member extending outward from the longitudinal side rod on the other side, the vertical frame limit adjustment stop assembly adopts a stop rod or a stop plate structure to be arranged on the outside of the frame of the lifting vertical frame, and includes an upper stop limit adjustment seat and an angle adjustment screw member.

[0014] Optionally, a tilting drive mechanism is further provided between the slow-pull lifting frame and the tilting support seat, for driving the tilting support seat to rotate and tilt relative to the slow-pull lifting frame.

[0015] Optionally, the slow-pull oblique drive device also includes multiple lifting sensing units, the lifting sensing units include a sensing mounting rod, a sensor mounting seat and a position sensor, the upper and lower ends of the sensing mounting rod are correspondingly installed on two upper and lower transfer fixing plate groups, and the position sensor is installed on the sensing mounting rod through the sensor mounting seat.

[0016] The present invention further provides a cleaning machine, comprising a cleaning tank, a slow-pull device and a drying tank, wherein the slow-pull device adopts the aforementioned slow-pull oblique drive device.

[0017] Compared with the prior art, the beneficial effects of the present invention are: the integrated lifting and lateral tilting motion mechanism of the present application improves the cleaning effect, the slow-pull oblique drive device is driven by a motor screw as a whole, avoiding the aging and slipping problems of the belt drive, and an independent positioning and guiding unit is provided for each material basket or flower basket, which facilitates positioning and guiding and avoids collisions with each other, thereby improving the overall silicon wafer integrity rate and facilitating promotion and application in the fields of silicon wafer cleaning. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] Figure 1 It is a structural schematic diagram of the slow-pull oblique drive device of the present invention;

[0019] Figure 2 is a schematic diagram of a lifting drive mechanism;

[0020] Figure 3 It is a partial structural schematic diagram of the slow-pull oblique drive device;

[0021] Figure 4 A schematic diagram of a stop assembly for adjusting the position of a vertical frame;

[0022] Figure 5 Schematic diagram of the lift sensing unit.

[0023] Figure 6 A schematic diagram of a cleaning machine.

[0024] In the figure,

[0025] 100, slowly pull the lifting frame; 110, lift the flat frame; 120, lift the vertical frame;

[0026] 200, tilt support seat;

[0027] 300, lifting drive mechanism; 310, motor reducer assembly; 320, first commutator; 330, horizontal transmission shaft; 340, second commutator; 350, vertical transmission shaft; 360, lifting screw assembly; 361, screw body; 362, screw support end seat; 363, screw nut; 364, screw nut adapter plate; 370, upper and lower adapter fixing plate group; 380, slow pull slide plate adapter assembly; 390, slow pull lifting guide assembly; 391, slow pull guide shaft; 392, optical axis mounting end seat; 393, guide bushing;

[0028] 400, flower basket positioning guide unit; 410, slow lifting positioning fixing plate; 420, flower basket positioning plate; 421, positioning notch;

[0029] 500, tilt limit assembly; 510, tilt frame flip stop assembly; 511, upper stop plate; 512, lower stop; 520, vertical frame limit adjustment stop assembly; 521, upper stop limit adjustment seat; 522, angle adjustment screw;

[0030] 600, tilting shaft assembly; 610, tilting shaft; 620, shaft lifting flat frame end fixing member; 630, shaft tilting flat frame end fixing member; 640, shaft lifting flat support member; 650, shaft tilting flat frame support member;

[0031] 700, lifting sensor unit; 710, sensor mounting rod; 720, sensor mounting seat; 730, position sensor;

[0032] 1000, cleaning tank;

[0033] 2000, slow pull device;

[0034] 3000. Drying trough. DETAILED DESCRIPTION

[0035] In order to make the purpose, technical solution and advantages of the embodiments of the present invention clearer, the technical solution in the embodiments of the present invention will be clearly and completely described below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0036] Slow pull oblique drive device

[0037] A slow pull oblique drive device, see Figure 1-Figure 5 , including a slow-pull lifting frame 100 that is generally concave, a tilting support seat 200, a lifting drive mechanism 300, a flower basket positioning guide unit 400, a tilting limit assembly 500 and a tilting shaft assembly 600.

[0038] Layout relationship: The longitudinal ends of the tilting support seat 200 are pivotally mounted above the two ends of the flat frame of the slow-pull lifting frame 100 through an inclined shaft assembly 600; the lifting drive mechanism 300 adopts a non-belt transmission method and the driving end is connected to the vertical frames at both ends of the slow-pull lifting frame 100, thereby driving the slow-pull lifting frame 100 and the tilting support seat 200 to lift as a whole; a plurality of flower basket positioning guide units 400 are arranged on the tilting support seat 200, which are used to guide and position each supported silicon wafer flower basket.

[0039] The slow-pull lifting frame 100 includes a lifting horizontal frame 110 and a lifting vertical frame 120 , and the two lifting vertical frames 120 are vertically installed at two ends of the lifting horizontal frame 110 .

[0040] In a specific example, the lifting flat frame 110 and the lifting vertical frame 120 are both made of profiles, which need to be high temperature and corrosion resistant structures, such as stainless steel square tubes. A reinforcing rib plate is added at the connection between the two to improve strength and stability. Specifically, the tilting support seat 200 adopts a flat frame structure.

[0041] The tilting shaft assembly 600 includes a tilting shaft 610 , a shaft lifting and lowering flat frame end fixing member 620 , a shaft tilting and lowering flat frame end fixing member 630 , a shaft lifting and lowering flat support member 640 and a shaft tilting and lowering flat frame support member 650 .

[0042] For details, see Figure 2 A rotating shaft lifting frame end fixing member 620 and a rotating shaft tilting frame end fixing member 630 are correspondingly arranged at the longitudinal ends of the lifting frame 110 and the tilting support seat 200, and the two ends of the tilting shaft 610 pass through the rotating shaft lifting frame end fixing member 620 and the rotating shaft tilting frame end fixing member 630, and the middle part of the tilting shaft 610 is supported by a plurality of rotating shaft lifting support members 640 and a rotating shaft tilting frame support member 650.

[0043] In the illustrated example, a rotating shaft lifting flat frame end fixing part 620 is respectively arranged at the middle of the longitudinal ends of the lifting flat frame 110 of the slow-pull lifting frame 100, and a rotating shaft tilting flat frame end fixing part 630 is respectively arranged at the middle of the longitudinal ends of the flat frame structure of the tilting support seat 200. A bearing seat is arranged on the rotating shaft lifting flat frame end fixing part 620, and a bearing is used to support the tilting rotating shaft 610. The rotating shaft tilting flat frame end fixing part 630 may or may not be provided with a bearing seat. The rotating shaft lifting flat frame end fixing part 620 and the rotating shaft tilting flat frame end fixing part 630 at the same end are arranged alternately and adjacently.

[0044] Similarly, a plurality of the shaft lifting and leveling support members 640 are longitudinally arranged in the middle of the bottom surface of the lifting and leveling frame 110, and correspondingly, a plurality of the shaft tilting and leveling support members 650 are longitudinally arranged in the middle of the top surface of the flat frame structure of the tilting support seat 200. The number and structure of the shaft tilting and leveling support members 650 are the same as those of the shaft lifting and leveling support members 640.

[0045] The top of the shaft lifting and lowering support 640 and the shaft tilting flat frame support 650 is a bearing seat, a circular slot hole, or a semicircular groove, which is used to support the tilting shaft 610. When the top is a circular slot hole or a semicircular groove, a slip ring or a semicircular sliding plate is set at the groove surface abutting against the tilting shaft 610. The slip ring or sliding plate is a wear-resistant and corrosion-resistant structure, such as a bronze slip ring / sliding plate, a ceramic slip ring / sliding plate, etc.

[0046] The tops of two corresponding rotating shaft lifting and lowering leveling supports 640 and rotating shaft tilting flat frame supports 650 are arranged alternately and adjacently.

[0047] Among them, the lifting drive mechanism 300 includes a motor reducer assembly 310, a first commutator 320, a horizontal transmission shaft 330, a second commutator 340, a vertical transmission shaft 350, a lifting screw assembly 360, an upper and lower transfer fixed plate group 370 and a slow-pull slide plate transfer assembly 380.

[0048] Specifically, the output end of the motor reducer assembly 310 is connected to the horizontal input end of the horizontal transmission shaft 330 and the lower end of a vertical transmission shaft 350 through the first commutator 320, and the horizontal output end of the horizontal transmission shaft 330 is connected to the lower end of another vertical transmission shaft 350 through the second commutator 340; the upper and lower parts of each lifting screw rod assembly 360 are supported by the upper and lower transfer fixing plate groups 370 and connected to the outer frame or the outer end of the cleaning tank, and a slow-pull slide plate adapter assembly 380 driven by the lifting screw rod assembly 360 is arranged between the two upper and lower transfer fixing plate groups 370, and the slow-pull slide plate adapter assembly 380 is connected to the lifting vertical frame 120 of the slow-pull lifting frame 100.

[0049] The two groups of vertical transmission shafts 350 , lifting screw rod assemblies 360 , upper and lower transfer fixing plate assemblies 370 , slow-pull slide plate transfer assemblies 380 , and slow-pull lifting guide assemblies 390 are arranged at the output ends of the two vertical transmission shafts 350 .

[0050] The lifting screw assembly 360 includes a screw body 361, a screw support end seat 362, a screw nut 363 and a screw nut adapter plate 364. The lower end of the screw body 361 is connected to the upper end of the vertical transmission shaft 350 through a universal joint, and the upper and lower parts of the screw body 361 are supported and installed on the upper and lower adapter fixing plate groups 370 through the corresponding screw support end seats 362 respectively; the screw nut 363 is sleeved on the outer periphery of the screw body 361, the screw nut 363 is connected to the screw nut adapter plate 364, and the screw nut adapter plate 364 is connected to the slow-pull slide plate adapter assembly 380.

[0051] Furthermore, the lifting drive mechanism 300 also includes a slow-pull lifting guide assembly 390, and two groups of the slow-pull lifting guide assemblies 390 are symmetrically arranged on both sides of the lifting screw assembly 360. The slow-pull lifting guide assembly 390 adopts a guide shaft sleeve assembly to enhance the lifting stability of the device.

[0052] Specifically, the slow-pull lifting guide assembly 390 includes a slow-pull guide shaft 391, an optical axis mounting end seat 392 and a guide shaft sleeve 393. The upper and lower ends of the two optical axis mounting end seats 392 are fixed to the corresponding upper and lower adapter fixing plate groups 370. The guide shaft sleeve 393 is fixed to the slow-pull slide plate adapter assembly 380. The two ends of the slow-pull guide shaft 391 are sleeved and fixed by the two optical axis mounting end seats 392. The optical rod of the slow-pull guide shaft 391 is sleeved in the guide shaft sleeve 393. In the specific example, the guide shaft sleeve 393 adopts a linear bearing sleeve structure, and of course other sliding sleeve structures can also be adopted.

[0053] Furthermore, a drive mounting chassis is provided at the bottom of the lifting drive mechanism 300 including the motor reducer assembly 310 , the first commutator 320 , and the second commutator 340 . The drive mounting chassis is a flat plate structure, etc., and the form is not limited.

[0054] The flower basket positioning guide unit 400 includes a slow-lift positioning fixing plate 410 and a flower basket positioning plate 420 with a positioning notch 421 , and the flower basket positioning plate 420 is laterally mounted on the frame of the tilt support seat 200 through the slow-lift positioning fixing plate 410 .

[0055] Every two groups of slow-lifting positioning fixing plates 410 and flower basket positioning plates 420 constitute a positioning guide mechanism for a flower basket, and the interval between the two slow-lifting positioning fixing plates 410 is adapted to the width of the flower basket.

[0056] Specifically, the flower basket positioning plate 420 is a bent plate, and the flat plate portion is fixedly connected to the flat frame of the tilting support seat 200 together with the slow-lift positioning fixing plate 410 below through bolts.

[0057] The bent plates of the two flower basket positioning plates 420 of a set of positioning and guiding mechanisms are arranged obliquely upward and outward to guide and position the flower basket, and the positioning notches 421 are provided on the bent plates.

[0058] In the illustrated example, three flower basket positioning and guiding units 400 are arranged side by side to support three silicon wafer flower baskets at the same time. The number may also be two, four, five, etc. according to actual design requirements.

[0059] Among them, the tilt limit assembly 500 includes a tilt frame flip stop assembly 510 and a vertical frame limit adjustment stop assembly 520, the tilt frame flip stop assembly 510 includes an L-shaped upper stop plate 511 arranged at both ends of the same side of the frame of the tilt support seat 200 and a lower stop member 512 extending outward from the longitudinal side rod on the other side, and the vertical frame limit adjustment stop assembly 520 adopts a stop rod or a stop plate structure to be arranged on the outside of the frame of the lifting vertical frame 120, including an upper stop limit adjustment seat 521 and an angle adjustment screw member 522.

[0060] Not shown in the figure, a tilting drive mechanism is also provided between the slow-pull lifting frame 100 and the tilting support seat 200, for driving the tilting support seat 200 to rotate and tilt relative to the slow-pull lifting frame 100. The tilting drive mechanism adopts a cylinder drive mechanism, a motor sprocket drive mechanism and the like.

[0061] Furthermore, the slow pull oblique drive device also includes a plurality of lifting sensing units 700, see Figure 5 The lifting sensing unit 700 includes a sensing mounting rod 710, a sensor mounting seat 720 and a position sensor 730. The upper and lower ends of the sensing mounting rod 710 are correspondingly mounted on two upper and lower transfer fixing plate groups 370, and the position sensor 730 is mounted on the sensing mounting rod 710 through the sensor mounting seat 720.

[0062] Specifically, the sensor mounting rod 710 can be made of C-shaped groove profile, which is convenient for the installation of the sensor mounting seat 720. The sensor mounting seat 720 can be made of plate members such as angle iron. The position sensor 730 can be a photoelectric switch, a limit switch, a touch sensor switch, etc., and the form is not limited.

[0063] The lifting and tilting principle of the device is to achieve the tilting posture through eccentric gravity.

[0064] Cleaning Machine

[0065] A cleaning machine, see Figure 6 , including a cleaning tank 1000, a slow-pull device 2000 and a drying tank 3000, wherein the slow-pull device 2000 adopts the aforementioned slow-pull oblique drive device.

[0066] This device can be applied to the cleaning machine in the production of silicon wafers. During the cleaning of silicon wafers, the silicon wafer basket needs to be lifted as a whole from the cleaning tank 1000 by the slow-pull device 2000 and tilted to control the water, and then enter the drying tank 3000 of the drying station for drying. The aforementioned slow-pull oblique drive device tilts the silicon wafer batch as much as possible to remove surface water stains, which is convenient for subsequent drying.

[0067] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention, rather than to limit it. Although the present invention has been described in detail with reference to the aforementioned embodiments, those skilled in the art should understand that they can still modify the technical solutions described in the aforementioned embodiments, or make equivalent replacements for some of the technical features therein. However, these modifications or replacements do not deviate the essence of the corresponding technical solutions from the spirit and scope of the technical solutions of the embodiments of the present invention.

Claims

1. A slow-pull oblique drive device, comprising a slow-pull lifting frame (100) which is generally concave, an inclined support seat (200), a lifting drive mechanism (300), a flower basket positioning guide unit (400), and an inclined limit assembly (500); characterized in that: The longitudinal ends of the inclined support seat (200) are pivotally mounted above the two ends of the flat frame of the slow-pull lifting frame (100) via an inclined rotating shaft assembly (600); the lifting drive mechanism (300) adopts a non-belt transmission method and the driving end is connected to the vertical frames at both ends of the slow-pull lifting frame (100); and a plurality of flower basket positioning guide units (400) are arranged on the inclined support seat (200).

2. The slow-pull oblique drive device according to claim 1, characterized in that: The slow-pull lifting frame (100) comprises a lifting horizontal frame (110) and a lifting vertical frame (120), and the two lifting vertical frames (120) are vertically mounted to the two ends of the lifting horizontal frame (110).

3. The slow-pull oblique drive device according to claim 2, characterized in that: The tilting shaft assembly (600) comprises a tilting shaft (610), a shaft lifting flat frame end fixing member (620), a shaft tilting flat frame end fixing member (630), a shaft lifting flat support member (640) and a shaft tilting flat frame support member (650); the shaft lifting flat frame end fixing member (620) and the shaft tilting flat frame end fixing member (630) are correspondingly arranged at the longitudinal ends of the lifting flat frame (110) and the tilting support seat (200); the two ends of the tilting shaft (610) pass through the shaft lifting flat frame end fixing member (620) and the shaft tilting flat frame end fixing member (630), and the middle part of the tilting shaft (610) is supported by a plurality of shaft lifting flat support members (640) and shaft tilting flat frame support members (650).

4. The slow pull oblique drive device according to claim 2, characterized in that: The lifting drive mechanism (300) comprises a motor reducer assembly (310), a first commutator (320), a horizontal transmission shaft (330), a second commutator (340), a vertical transmission shaft (350), a lifting screw assembly (360), an upper and lower transfer fixing plate group (370) and a slow pull slide plate transfer assembly (380); the output end of the motor reducer assembly (310) is connected to the horizontal input end of the horizontal transmission shaft (330) and the lower end of a vertical transmission shaft (350) through the first commutator (320); the horizontal transmission shaft (330) is connected to the lower end of the second commutator (340); the lifting screw assembly (360) is connected to the horizontal input end of the horizontal transmission shaft (330) and ... vertical transmission shaft (350); the lifting screw assembly (360) is connected to the vertical transmission shaft ( The horizontal output end of the shaft (330) is connected to the lower end of another vertical transmission shaft (350) through the second commutator (340); the upper and lower parts of each lifting screw rod assembly (360) are supported and connected to the outer frame or the outer end of the cleaning tank through the upper and lower transfer fixing plate groups (370); a slow-pull slide plate transfer assembly (380) driven by the lifting screw rod assembly (360) is arranged between the two upper and lower transfer fixing plate groups (370); the slow-pull slide plate transfer assembly (380) is connected to the lifting frame (120) of the slow-pull lifting frame (100).

5. The slow-pull oblique drive device according to claim 4, characterized in that: The lifting drive mechanism (300) further comprises a slow-pull lifting guide assembly (390), wherein two groups of the slow-pull lifting guide assemblies (390) are symmetrically arranged on both sides of the lifting screw assembly (360), and the slow-pull lifting guide assembly (390) adopts a guide shaft sleeve assembly to enhance the lifting stability of the device.

6. The slow-pull oblique drive device according to claim 1, characterized in that: The flower basket positioning guide unit (400) comprises a slow-lift positioning fixing plate (410) and a flower basket positioning plate (420) with a positioning notch (421); the flower basket positioning plate (420) is laterally mounted on the frame of the inclined support seat (200) via the slow-lift positioning fixing plate (410).

7. The slow-pull oblique drive device according to claim 1, characterized in that: The tilt limit assembly (500) comprises a tilt frame flip stop assembly (510) and a vertical frame limit adjustment stop assembly (520). The tilt frame flip stop assembly (510) comprises an L-shaped upper stop plate (511) arranged at both ends of the same side of the frame of the tilt support seat (200) and a lower stop member (512) extending outward from the longitudinal side bar on the other side. The vertical frame limit adjustment stop assembly (520) adopts a stop rod or a stop plate structure and is arranged on the outer side of the frame of the lifting vertical frame (120). It comprises an upper stop limit adjustment seat (521) and an angle adjustment screw member (522).

8. The slow-pull oblique drive device according to claim 1, characterized in that: A tilting drive mechanism is also provided between the slow-pull lifting frame (100) and the tilting support seat (200), and is used to drive the tilting support seat (200) to rotate and tilt relative to the slow-pull lifting frame (100).

9. The slow-pull oblique drive device according to claim 4, characterized in that: The slow-pull oblique drive device also includes a plurality of lifting sensing units (700), and the lifting sensing units (700) include a sensing mounting rod (710), a sensor mounting seat (720) and a position sensor (730), wherein the upper and lower ends of the sensing mounting rod (710) are correspondingly mounted on two upper and lower transfer fixing plate groups (370), and the position sensor (730) is mounted on the sensing mounting rod (710) via the sensor mounting seat (720).

10. A cleaning machine, characterized in that: The cleaning machine comprises a cleaning tank (1000), a slow-pull device (2000) and a drying tank (3000), and the slow-pull device (2000) adopts the slow-pull oblique drive device according to any one of claims 1 to 9.

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