A test bench and a measuring method

Abstract

The present application provides a test bench and a measuring method, which relate to the field of precision equipment technology. The test bench involved in the present application includes a platform module; a motion module, which is arranged on the platform module, and is used to receive materials and move the materials, and the motion module includes a carrier and a material adsorption device connected to the carrier; a material adjustment module, which is arranged on the platform module, and is used to receive materials and adjust the position of the materials; a loading and unloading auxiliary transmission module, which is arranged on the platform module, and is used to enable the material adjustment module to move on the platform module and be in a first detection station; a first detection module, which is arranged on the first detection station, and can move in a vertical direction perpendicular to the first direction, and is used to obtain the first position of the material in the material adjustment module; a second detection module, which is arranged on the second detection station, and can move in a vertical direction, and is used to obtain the second position of the material before the material adsorption device moves the material and / or the third position of the material after the motion module moves the material.

Description

Technical Field

[0001] The embodiments of this specification relate to the technical field of precision equipment, and specifically to a test bench and a measurement method. Background Art

[0002] The test bench can be used to reproduce the actual scene requirements of materials in the production process, and measure and obtain data that materials may encounter in various production links based on the actual scene requirements. The data obtained by the test bench can be used to feedback and optimize the parameter debugging of the material loading action, handover action, or movement action in the actual production process. At present, there is no comprehensive test system that can simultaneously realize material loading, clamping, transmission and measurement verification. A single-function test bench cannot cover the use requirements of multiple scenarios. Summary of the invention

[0003] One or more embodiments of the present specification provide a test bench, including a platform module; a motion module, disposed on the platform module, for receiving materials and moving the materials, the motion module comprising a carrier that can move along a first direction on the platform module and is located at a first detection station or a second detection station, and a material adsorption device connected to the carrier for carrying materials; a material adjustment module, disposed on the platform module, for receiving materials and adjusting the positions of the materials; a loading and unloading auxiliary transmission module, disposed on the platform module, for enabling the material adjustment module to move on the platform module and be located at the first detection station; a first detection module, disposed at the first detection station, capable of moving along a vertical direction perpendicular to the first direction, for obtaining a first position of the material in the material adjustment module; a second detection module, disposed at the second detection station, capable of moving along the vertical direction, for obtaining a second position of the material before the material adsorption device moves the material and / or a third position of the material after the motion module moves the material.

[0004] In some embodiments, the motion module further includes: a first linear drive device, the first linear drive device is used to drive the carrier to move along the first direction; a first guide module, extending in the first direction, for guiding the carrier.

[0005] In some embodiments, the motion module also includes: two balancing mass blocks respectively arranged on both sides of the platform, and the two balancing mass blocks are arranged along a second direction intersecting with the first direction; a first linear driving device installed between the balancing mass block and the platform, and the first linear driving device is used to drive the platform to move along the first direction; a second linear driving device installed between the platform module and the balancing mass block, and the second linear driving device is used to drive the balancing mass block to move along the first direction, and the movement direction of the two balancing mass blocks is opposite to the movement direction of the platform.

[0006] In some embodiments, the motion module further includes: a first guide module extending in the first direction, for guiding the carrier; and two second guide modules extending in the first direction, for guiding the two balancing mass blocks respectively.

[0007] In some embodiments, the balancing mass block includes a first block and a second block, the first block is connected to the first linear drive device, and the second block is connected to the second linear drive device; wherein the first block and the second block are connected by one or more flexible connectors.

[0008] In some embodiments, the motion module also includes: a locking device in place that locks the carrier and the material adsorption device on the platform module through negative pressure; the locking device in place includes: a fixed block, a flexible part, an adsorption block and a preload mechanism; the fixed block is fixedly connected to the carrier; the flexible part flexibly connects the fixed block and the adsorption block; the side of the adsorption block facing away from the fixed block is provided with one or more negative pressure areas for providing negative pressure, and the adsorption block can be adsorbed on the platform module; the preload mechanism is connected to the fixed block and extends in the direction of the adsorption block, and is used to apply a preload force to the adsorption block.

[0009] In some embodiments, the fixed block includes: an annular portion, a middle portion of which forms an accommodating space for accommodating the preload mechanism; an outer boss extending outward along the outer edge of the annular portion, the outer boss being fixedly connected to the flexible member; and an inner boss extending inward along the inner edge of the annular portion, the inner boss being used to install the preload mechanism; the flexible member is a flexible sheet; the flexible sheet has a first area fixedly connected to the fixed block and a second area fixedly connected to the adsorption block; at least a portion of the second area is capable of elastic deformation relative to the plane where the first area is located; there is a gap between the second area of ​​the flexible sheet and the fixed block to provide space for at least a portion of the second area to undergo elastic deformation.

[0010] In some embodiments, the preload mechanism includes: a preload elastic member, a first pressure plate and a second pressure plate, the first pressure plate is fixedly connected to the fixed block, the second pressure plate directly or indirectly abuts against the adsorption block, one end of the preload elastic member abuts against the first pressure plate, and the other end of the preload elastic member abuts against the second pressure plate; or, the preload mechanism includes: a preload cylinder, one of the cylinder body and the piston of the preload cylinder is fixedly connected to the fixed block, and the other of the cylinder body and the piston of the preload cylinder directly or indirectly abuts against the adsorption block.

[0011] In some embodiments, the material adjustment module includes: an adjustment base, an adjustment platform that can be air-floating supported on the adjustment base, and a linear adjustment motion system that drives the adjustment platform to achieve planar movement or rotation relative to the adjustment base; the linear adjustment motion system includes at least two groups of linear adjustment motion components arranged on the adjustment platform along the first direction and at least one group of linear adjustment motion components arranged on the adjustment platform along a second direction intersecting with the first direction.

[0012] In some embodiments, the loading and unloading auxiliary transmission module includes: an air-floating guide rail assembly, the air-floating guide rail assembly includes a vertical air-floating mating surface and two relatively arranged lateral air-floating mating surfaces; the adjustment base of the material adjustment module can be air-floating supported on the vertical air-floating mating surface of the air-floating guide rail assembly; the adjustment base of the material adjustment module is also connected to a first air-floating pad and a second air-floating pad, the first air-floating pad and the second air-floating pad are respectively air-floating supported on the two lateral air-floating mating surfaces; one of the first air-floating pad and the second air-floating pad is a rigid air-floating pad, and the other of the first air-floating pad and the second air-floating pad is a flexible air-floating pad.

[0013] In some embodiments, the loading and unloading auxiliary transmission module includes: a third linear drive device, used to drive the material adjustment module to move along the first direction, and the third linear drive device is located on both sides of the first linear drive device used to drive the carrier to move along the first direction; a third guide module extending in the first direction, used to guide the material adjustment module.

[0014] In some embodiments, the platform module includes: a first platform; a second platform, arranged above the first platform, and the motion module, the material adjustment module, and the loading and unloading auxiliary transmission module are arranged on the second platform; a shock absorber, connecting the first platform and the second platform, and used to absorb the impact force of the second platform in the vertical direction; a buffer limit module, connecting the first platform and the second platform, and used to absorb the impact force of the second platform in the first direction and / or the second direction, the first direction and the second direction are located in the same plane, and the first direction intersects with the second direction; a safety lock module, connecting the first platform and the second platform, and at least used to implement rigid limitation on the second platform in the vertical direction perpendicular to the first direction and the second direction, the first direction and / or the second direction.

[0015] In some embodiments, the safety lock module includes a top plate, a limit rod, a base and a lock limit assembly; the top plate is fixedly connected to the second platform, and the base is fixedly connected to the first platform; one end of the limit rod is fixedly connected to the top plate; the other end of the limit rod is movably arranged on the base; the lock limit assembly is sleeved on the outside of the limit rod to limit the movement of the top plate and / or the limit rod relative to the base.

[0016] In some embodiments, the locking and limiting assembly includes an adjusting nut and a locking and fixing component; the adjusting nut is sleeved on the outside of the limiting rod and can slide relative to the limiting rod; the locking and fixing component is fixedly connected to the base, the locking and fixing component is sleeved on the outside of the limiting rod and the adjusting nut, and the adjusting nut can move and be fixed relative to the locking and fixing component; the locking and limiting assembly also includes a buffer pad, the buffer pad is arranged on the locking and fixing component, and the top plate can abut against the adjusting nut and / or the buffer pad.

[0017] In some embodiments, it also includes: a third detection module, used to obtain the surface shape of the material.

[0018] One or more embodiments of the present specification provide a measurement method for a test bench, which is applicable to any of the test benches described above, and the measurement method includes one or more of an alignment measurement method, a slip measurement method, and a surface measurement method: the alignment measurement method includes: the loading and unloading auxiliary transmission module causes the material adjustment module carrying the material to move to the first detection station, adjusts the material to a preset global reference position based on the first position obtained by the first detection module, and transfers the material to the material adsorption device; the slip measurement method includes: the motion module moves with the material, and obtains the slip amount of the material based on the second position of the material before the movement and the third position of the material after the movement obtained by the second detection module; the surface measurement method includes: the motion module moves with the material, obtains the first surface shape of the material before the movement and the second surface shape of the material after the movement, and obtains the surface shape change of the material.

[0019] The beneficial effects that may be brought about by the embodiments of this specification include but are not limited to: (1) providing a comprehensive test system that can simultaneously realize receiving materials, transferring materials, carrying materials, and measuring and verifying; (2) being able to realize the detection of received materials and the comparison of the material sliding position before and after the movement; (3) reducing the influence of the motion module on the platform module during movement by the opposite movement of the balancing mass block relative to the motion module; (4) realizing the flexible connection between the first block and the second block of the balancing mass block through the flexible connector, reducing the movement difference between the first block and the second block, thereby reducing the influence of the movement of the balancing mass block on the platform module; (5) the flexible connector can cope with the dimensional deviation caused by the manufacture and assembly of the first block and the second block; (6) realizing reliable locking through negative pressure adsorption, avoiding the tiny vibration caused by the self-locking of the first linear drive device, ensuring the locking accuracy in place, and avoiding the wear of the platform module; (7) the structure of the flexible sheet further ensures that the movement and pitch only occur in the direction from the fixed block to the adsorption block, further avoiding displacement in the plane direction; (8) providing a preload force through the preload mechanism to assist the contact between the adsorption block and the adsorbed object; (9 ) The material adjustment module is used to realize the planar movement or rotation of the material; (10) The cooperation between the rigid air floating cushion and the flexible air floating cushion can ensure that there is no excessive gap between the lateral air floating mating surfaces of the air floating cushion and the air floating guide rail, thereby ensuring the control accuracy; (11) The shock absorber is used to realize the shock absorption of the movement of the second platform relative to the first platform; (12) The buffer limit module absorbs the impact force in one or more directions in the plane; (13) The safety lock module limits the range of movement of the limit rod through the base, and at the same time limits the movement of the top plate and / or the limit rod through the lock limit component; (14) The full locking module limits the movement of the limit rod in two directions in the plane through the base and the locking limit member, and limits the movement of the top plate and / or the limit rod in the vertical direction through the locking limit member; (15) The limit stroke is adjusted by adjusting the nut and the locking fixing member; (16) The limit stroke can be adjusted to zero by adjusting the nut, thereby achieving rigid fixation of the base and the top plate; (17) The buffer pad absorbs part of the impact force before rigid limit to avoid impact on the base and the structure connected to the base; (18) The surface shape change of the material before and after movement can be detected. It should be noted that different embodiments may produce different beneficial effects. In different embodiments, the beneficial effects that may be produced may be any one or a combination of the above, or any other beneficial effects that may be obtained. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] Figure 1 is a schematic diagram of a test bench according to some embodiments of the present specification.

[0021] Figure 2 It is a schematic diagram of a test bench and an interferometer according to some embodiments of the present specification.

[0022] Figure 3 yes Figure 1 A partial enlarged schematic diagram of .

[0023] Figure 4 It is a stereoscopic diagram of a detection module of a test bench according to some embodiments of the present specification.

[0024] Figure 5 It is a schematic top view of a detection module of a test bench according to some embodiments of this specification.

[0025] Figure 6 It is a schematic diagram of a detection module of a test bench according to some embodiments of the present specification.

[0026] Figure 7 , Figure 8 is a schematic diagram of a second platform of a test bench according to some embodiments of the present specification.

[0027] Fig. 9 is a schematic side view of a second platform of a test bench according to some embodiments of the present specification.

[0028] Fig.10 is a schematic diagram of a first platform of a test bench according to some embodiments of the present specification.

[0029] Fig.11 yes Fig.10 A partial enlarged schematic diagram of .

[0030] Fig.12 It is a schematic diagram of a safety lock module of a test bench according to some embodiments of this specification.

[0031] Fig.13 It is a schematic cross-sectional view of a safety lock module of a test bench according to some embodiments of the present specification.

[0032] Fig.14 is a schematic diagram of a motion module of a test bench according to some embodiments of the present specification.

[0033] Fig.15 is a schematic diagram of the lower surface of the motion module of the test bench according to some embodiments of the present specification.

[0034] Fig.16 , Fig.17 It is a schematic diagram of a material adsorption device of a test bench according to some embodiments of the present specification.

[0035] Fig.18 , Fig.19 is a schematic diagram of a flexible component of a test bench according to some embodiments of the present specification.

[0036] Fig. 20 It is a cross-sectional schematic diagram of a material adsorption device of a test bench shown in some embodiments of this specification.

[0037] Fig.21 It is a three-dimensional cross-sectional schematic diagram of a material adsorption device of a test bench shown in some embodiments of this specification.

[0038] Fig. 22 It is a cross-sectional schematic diagram of a material adsorption device of a test bench shown in other embodiments of this specification.

[0039] Fig.23 It is a three-dimensional cross-sectional schematic diagram of a material adsorption device of a test bench shown in other embodiments of this specification.

[0040] Fig.24 is a schematic diagram of a balancing mass block of a test bench according to some embodiments of the present specification.

[0041] Fig.25 Schematic diagram of an exploded view of a balancing mass block of a test bench according to some embodiments of the present specification.

[0042] Fig.26 , Fig. 27 is a schematic diagram of a flexible connector of a test bench according to some embodiments of the present specification.

[0043] Fig.28 It is a schematic diagram of an adjustment platform of a test bench according to some embodiments of the present specification.

[0044] Fig.29 It is a schematic diagram of the lower surface of the adjustment platform of the test bench shown in some embodiments of this specification.

[0045] Fig.30 It is a schematic diagram of an adjustment base of a test bench according to some embodiments of the present specification.

[0046] Fig.31 It is a schematic diagram of the lower surface of the adjustment base of the test bench shown in some embodiments of this specification.

[0047] Fig.32 It is a schematic diagram of the assembly of the air flotation cushion of the test bench shown in some embodiments of this specification.

[0048] Fig.33 Schematic diagram of an air flotation pad of a test bench according to some embodiments of the present specification.

[0049] Markings in the figure: 1 platform module; 2 motion module; 21 carrier; 22 material adsorption device; 23 locking device in place; 3 material adjustment module; 31 adjustment base; 311 groove cavity; 312 mounting block; 313 adjustment base positive pressure area; 314 adjustment base negative pressure area; 32 adjustment carrier; 33 linear adjustment motion component; 34 guide block; 35 adjustment carrier negative pressure area; 36 adjustment carrier positive pressure area; 341 air flotation component; 4 loading and unloading auxiliary transmission module; 41 air flotation guide rail component; 411 vertical air flotation matching surface; 412 lateral air flotation matching surface; 42 first air flotation pad; 43 second air flotation pad; 44 bracket; 45 third linear drive device; 451 third motor coil; 452 third motor magnet; 5 first detection module; 51 first detection camera; 6 second detection module; 61 second detection camera; 62 third detection camera; 63 fourth detection camera; 7 The third detection module; 81 adapter plate; 82 z-axis linear motion system; 83 camera; 91 first limit surface; 92 second limit surface; 93 third limit surface; 94 fourth limit surface; 10 cross beam; 11 first platform; 12 second platform; 13 shock absorber; 14 buffer limit module; 141 first fixing member; 142 buffer member; 143 second fixing member; 15 safety lock module; 151 top plate; 152 limit rod; 1520 limit rod head; 153 base; 154 lock limit assembly; 1541 adjustment nut; 15410 adjustment nut boss; 1542 lock fixing member; 1543 buffer pad; 231 fixing block; 2310 mounting hole; 232 flexible member; 23201 first hole; 23202 second hole; 2323 flexible sheet groove; 2324 Deformation part; 233 adsorption block; 2330 adsorption block fixing structure; 2331 negative pressure area; 23310 negative pressure channel; 2332 positive pressure area; 23320 positive pressure channel; 234 preload mechanism; 2311 annular part; 2312 outer boss; 2313 inner boss; 2321 first area; 2322 second area; 2340 preload elastic member; 23401 guide column; 2341 first pressure plate; 23412 first pressure plate accommodating space; 2342 second pressure plate; 2343 preload cylinder; 24 balance mass block; 241 first block; 242 second block; 243 flexible connector; 2431 fixed part; 2432 flexible part; 244 rigid limiter; 25 first linear drive device; 250 first guide module; 251 first motor coil; 252 The first motor magnet; 253 the carrier base; 26 the second linear drive device; 260 the second guide module; 261 the second motor coil; 262 the second motor magnet. DETAILED DESCRIPTION

[0050] In order to more clearly illustrate the technical solutions of the embodiments of this specification, the embodiments will be described in detail below with reference to the accompanying drawings. Obviously, the contents described below are some examples or embodiments of this specification. For ordinary technicians in this field, without paying creative work, the technical solutions or means disclosed in this specification can also be applied to other scenarios based on these technical contents.

[0051] It should be understood that the "system", "device", "equipment", "part" and / or "piece", "unit" and / or "module" used in this specification are a method for distinguishing different components, elements, parts, portions or assemblies at different levels. However, if other words can achieve the same purpose, the words can be replaced by other expressions.

[0052] Unless otherwise specified, technical terms used in this specification to describe components, elements, etc. do not refer to the singular, but may also include the plural. Generally speaking, terms such as "include", "comprise", etc. only indicate that the steps, elements, or components that have been clearly identified are included, and these steps, elements, and components do not constitute an exclusive list, such as the method or device described may also include other steps or components.

[0053] In the description of this specification, it should be understood that the description of orientation, such as the orientation or position relationship indicated by up, down, front, back, left, right, etc., is based on the orientation or position relationship shown in the drawings, which is only for the convenience of describing this application and simplifying the description, and does not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on this application. In the description of this specification, unless otherwise clearly defined, the terms such as setting, installing, connecting, etc. should be understood in a broad sense, and technicians in the relevant technical field can reasonably determine the specific meaning of the above terms in this specification in combination with the specific content of the technical solution.

[0054] The test bench can be used to reproduce the actual scenario requirements of materials (such as raw materials, intermediates, and products) in the production process, and measure and obtain data that the materials may encounter in various production links based on the actual scenario requirements. For example, measuring the clamping action process of the material, measuring the feeding accuracy of the material, measuring the handover accuracy of the material, etc. Exemplarily, the content tested by the test bench may specifically include measuring the feeding position of the material (such as the position on the first mechanism, and the position on the second mechanism when transferring from the first mechanism to the second mechanism), measuring the position slip or rotation of the carrier after carrying the material, and measuring the surface deformation caused by the clamping or adsorption of the material. The data obtained by the test bench can be used to feedback and optimize the parameter debugging of the material feeding action, handover action, or movement action in the actual production process.

[0055] In some embodiments, the material to be tested may be a plate-like structure, and its thickness may be 0.5-1 mm, such as 525 μm, 625 μm, 775 μm, 925 μm, etc. In some embodiments, the material may be supported by air floating by a mechanism (such as a feeding mechanism and a carrier, etc.) to detach from the surface of the mechanism, or may be adsorbed by the mechanism to be fixed to the surface of the mechanism, thereby realizing the bearing of one or more mechanisms, the transfer between mechanisms, and the movement of the mechanism carrying the material. In some cases, the adsorption of the material by the carrier can locate its position on the carrier to a certain extent, but after the carrier moves, the material may slip and / or rotate relative to the carrier. In other cases, the adsorption of the material by the carrier may also have different adsorption forces provided by different regions, and the movement of the carrier (such as high-speed movement or high-acceleration movement) may affect the actual adsorption of the material, so that the adsorption of the material before and after the movement is different, and the adsorption surface of the material changes (such as the microscopic bending and warping caused by mechanical adsorption on the upper surface of the thin plate-like structure).

[0056] In some relevant usage scenarios, the loading and unloading of materials is an essential link in many key processes in the entire production line, and the process parameters of loading and unloading need to be debugged and optimized. In some relevant embodiments, the debugging and optimization of parameters can be verified by directly debugging on the production line, but this method is inefficient and difficult to cover as many scene requirements as possible. In some relevant embodiments, the debugging and optimization of parameters can also be debugged and verified through a test bench, but the current test bench has a single test function, and there is no comprehensive test system that can simultaneously realize the loading, clamping, transmission and measurement verification of materials. A single-function test bench is also difficult to cover as many scene requirements as possible.

[0057] Based on this, a test bench is provided in one or more embodiments of the present specification, which can simulate the loading, transfer and movement of materials in the production process, and test its relative position change, relative rotation change and / or adsorption surface change before and after loading, transfer and movement.

[0058] Figure 1 is a schematic diagram of a test bench according to some embodiments of this specification, Figure 2 is a schematic diagram of a test bench and an interferometer according to some embodiments of this specification, see Figure 1 , Figure 2 , a test bench for one or more embodiments is shown.

[0059] For the convenience of explanation, let's establish a coordinate system, taking the test plane provided by the test bench or a plane parallel to the test plane as the reference plane. Figure 1As shown, the xy plane is taken as the reference plane, the y-axis direction of the xy plane is taken as the first direction, the x-axis direction of the xy plane is taken as the second direction, and the vertical direction perpendicular to the xy plane is taken as the z-axis direction. In some embodiments, the x-axis direction may intersect with the y-axis direction. In some further embodiments, the x-axis direction may be perpendicular to the y-axis direction. In some embodiments, based on this coordinate system, the direction of rotation around the x-axis may be taken as the Rx direction, the direction of rotation around the y-axis may be taken as the Ry direction, and the direction of rotation around the z-axis may be taken as the Rz direction.

[0060] In one or more embodiments of the present specification, the test bench may include: a platform module 1 , a motion module 2 , a material adjustment module 3 , and a loading and unloading auxiliary transmission module 4 .

[0061] In some embodiments, the platform module 1 provides a test plane of the test platform, and the motion module 2 is disposed on the platform module 1, and is used to receive materials and move the materials on the platform module 1. In some embodiments, the motion module 2 can move along the y-axis direction of the platform module 1. In some embodiments, the motion module 2 can carry the materials to perform high-speed or high-acceleration motion.

[0062] In some embodiments, the motion module 2 may include a carrier 21 that can move along a first direction (e.g., y-axis direction) on the platform module 1 and is in the first detection station or the second detection station, and a material adsorption device 22 connected to the carrier 21 for carrying materials. In some embodiments, the carrier 21 can adjust the posture of the material adsorption device 22 and the material located on the material adsorption device 22. In some embodiments, the posture may include a position on the z-axis, a position in the xy plane (e.g., a position in the x-axis direction and / or a position in the y-axis direction), a rotation in the Rz direction, and a rotation in the Rx and / or Ry directions. In some embodiments, the material adsorption device 22 may provide an adsorption force to allow the material to be adsorbed on the surface of the material adsorption device 22, so as to achieve the fixation of the material relative to the material adsorption device 22. In some embodiments, the material adsorption device 22 may further provide an air buoyancy force to allow the material to be separated from the adsorption device, so as to adjust the posture of the material or achieve the handover of the material.

[0063] In some embodiments, the material adjustment module 3 is disposed on the platform module 1 to receive the material and adjust the position of the material. In some embodiments, the material adjustment module 3 can adjust the position of the material relative to the material adjustment module 3 in the x-axis direction, the y-axis direction and / or the Rz direction.

[0064] In some embodiments, the loading and unloading auxiliary transmission module 4 is arranged on the platform module 1, and is used to enable the material adjustment module 3 to be on the platform module 1 and be at the first detection station. In some embodiments, the loading and unloading auxiliary transmission module 4 can enable the material adjustment module 3 to move along the y-axis direction and be at the first detection station, so as to allow the material adjustment module 3 and the material adsorption device 22 of the motion module 2 to achieve the handover of materials. In some embodiments, the loading and unloading auxiliary transmission module 4 can enable the material adjustment module 3 to move along the first motion axis, and the motion module 2 also moves along the first motion axis. In this embodiment, the first detection station and the second detection station can be arranged in the middle of the first motion axis, so that the material adjustment module 3 and the motion module 2 can both move to the first detection station, and the motion module 2 can also move to the second detection station.

[0065] In other embodiments, the auxiliary transmission module 4 for loading and unloading can make the material adjustment module 3 move linearly in any direction on the platform module 1 and move to the first detection position. For example, the material adjustment module 3 can move along the x-axis direction or in a direction inclined relative to the x-axis and y-axis and be in the first detection station. Exemplarily, in some embodiments, the auxiliary transmission module 4 for loading and unloading can make the material adjustment module 3 move along the second motion axis, and the second motion axis is arranged along the x-axis direction. In this embodiment, the motion module 2 can move along the third motion axis, and the third motion axis is arranged along the y-axis direction. In this embodiment, the end of the second motion axis can overlap with the end of the first motion axis in the z-axis direction, and the first detection station can be set at the overlapping position so that both the material adjustment module 3 and the motion module 2 can move to the first detection station. In this embodiment, the second detection station can be set in the middle of the third motion axis so that the motion module 2 can also move to the second detection station.

[0066] See also Figures 3 to 5 As shown, in some embodiments, the test bench may further include: a first detection module 5, which is disposed at a first detection station and can move along a vertical direction (e.g., a z-axis direction) perpendicular to the first direction (e.g., the y-axis direction) to obtain a first position of the material in the material adjustment module 3.

[0067] In some embodiments, the first detection module 5 is correspondingly arranged with a z-axis linear motion system that drives the first detection module 5 to move along the z-axis direction. In some embodiments, the first detection module 5 can be a visual detection module. In some embodiments, the first detection module 5 can be a CCD visual detection camera. In some embodiments, the first detection module 5 can include two first detection cameras 51. In some embodiments, the two first detection cameras 51 are used to detect marks on the material.

[0068] In some embodiments, the platform module 1 has a crossbeam 10 , which may be located above a test plane provided by the platform module 1 , and the first visual inspection module 5 (eg, two first inspection cameras 51 ) is disposed on the crossbeam 10 .

[0069] In some embodiments, the test bench may also include: a second detection module 6, which is arranged at a second detection station and can move along a vertical direction (for example, a z-axis direction) to obtain a second position of the material before the material adsorption device 22 moves the material and / or a third position of the material after the movement module moves the material.

[0070] In some embodiments, the second detection module 6 is correspondingly arranged with a z-axis linear motion system that drives the second detection module 6 to move along the z-axis direction. In some embodiments, the second detection module 6 can be a visual detection module. In some embodiments, the second detection module 6 can be a CCD visual detection camera. In some embodiments, the second detection module 6 can include three groups of six detection cameras. Exemplarily, the three groups of six detection cameras can include: two second detection cameras 61 for detecting marks on the carrier 21, two third detection cameras 62 for detecting marks on the material, and two fourth detection cameras 63 for detecting marks on the material adsorption device 22.

[0071] In some embodiments, the second visual inspection module 6 is also disposed on the beam 10. In some embodiments, two first inspection cameras are disposed on one side of the beam 10, and two second inspection cameras 61, two third inspection cameras 62 and two fourth inspection cameras 63 are disposed on the other side of the beam 10.

[0072] See also Figures 3 to 5 As shown, in some embodiments, the two first detection cameras 51 and the two third detection cameras 62 are located at the innermost side of the beam 10, that is, the most central position of the beam 10. In some embodiments, the two first detection cameras 51 are arranged opposite to the two third detection cameras 62. In some embodiments, the spacing between the two first detection cameras 51 and the spacing between the two third detection cameras 62 are equal. In some embodiments, the two fourth detection cameras 63 are respectively located on the outer sides of the two third detection cameras 62. In some embodiments, the two second detection cameras 61 are respectively located on the outer sides of the two fourth detection cameras 63, that is, the outermost side of the beam 10.

[0073] In some embodiments, two material marks are provided on the material (e.g., on both sides of the material), and the two first detection cameras 51 are respectively used to detect the positions of the two material marks when the material is located at the first detection station, and the two third detection cameras 62 are respectively used to detect the positions of the two material marks when the material is located at the second detection station. In some embodiments, two material adsorption device marks are provided on the material adsorption device 22 (e.g., on both sides of the material adsorption device 22), and the two fourth detection cameras 63 are respectively used to detect the positions of the two material adsorption device marks when the carrier 21 and the material adsorption device 22 are located at the second detection station. In some embodiments, two carrier marks are provided on the carrier 21 (e.g., on both sides of the carrier 21), and the two second detection cameras 61 are respectively used to detect the positions of the two carrier marks when the carrier 21 is located at the second detection station.

[0074] In some embodiments, the material mark is detected at the first detection station to cooperate with the accurate loading of the material. In some embodiments, the carrier mark and the material adsorption device mark before and after the movement are detected at the second detection station to determine the position change of the carrier before and after the movement, the position change of the material adsorption device, the rotation angle change of the carrier, and the rotation angle change of the material adsorption device. In some embodiments, by detecting the material mark before and after the movement at the second detection station, the relative position change and absolute position change of the material before and after the movement, the relative rotation angle change and absolute rotation angle change of the material can be obtained in conjunction with the aforementioned detected carrier mark and material adsorption device mark. Based on the above-mentioned parameters in various directions, the simulated loading situation, simulated transfer situation, and simulated movement situation of the material can be obtained, and various parameters in the actual production process can be optimized based on this.

[0075] In some embodiments, see Figure 6As shown, a detection camera module in one or more embodiments is shown, which can be applied to one or more detection cameras in the first detection module 5, and can also be applied to one or more detection cameras in the second detection module 6. In some embodiments, the detection camera module may include: an adapter plate 81 fixedly connected to the crossbeam 10, a z-axis linear motion system 82 arranged on the adapter plate 81, and a camera 83 arranged at the bottom of the z-axis linear motion system 82. In some embodiments, the z-axis linear motion system 82 drives the camera 83 to move in the z-axis direction to achieve the focus of the camera 83. In some embodiments, the adapter plate 81 may be an L-shaped plate structure, wherein the horizontal part of the L-shaped plate structure is fixedly connected to the crossbeam 10, and the vertical part of the L-shaped plate structure is fixedly connected to the z-axis linear motion system 82. In some embodiments, the z-axis linear motion system 82 may include a camera fixing block and a camera linear drive motor arranged between the camera fixing block and the adapter plate 81. In some embodiments, the z-axis linear motion system 82 may also include a slider and a guide rail arranged between the camera fixing block and the adapter plate 81 for implementing the guidance in the z-axis direction.

[0076] In some embodiments, the test bench may further include: a third detection module 7, the third detection module 7 is used to obtain the surface shape of the material. In some embodiments, the third detection module 7 can be used to further obtain the adsorption surface shape change of the material before and after the movement. In some embodiments, the third detection module 7 can be an optical detection module, such as an interferometer.

[0077] In one or more embodiments of this specification, see Figures 7 to 9 As shown, the motion module 2 also includes: a first linear drive device 25 and a first guide module 250. In some embodiments, the first linear drive device 25 is used to drive the stage 21 to move along a first direction (e.g., the y-axis direction). In some embodiments, there may be two first linear drives 25, and the two first linear drives 25 are respectively disposed on both sides of the stage 21. In some embodiments, the two first linear drives 25 work synchronously to drive the stage 21 to move. In some further embodiments, the stage 21 may also be configured with a stage base 253 disposed at the lower end of the stage 21, and the two first linear drives 25 may be respectively disposed on both sides of the stage base 253.

[0078] In some embodiments, the first linear drive device 25 may include a first motor coil 251 and a first motor magnet 252 that match each other. In some embodiments, the first motor coil 251 is fixedly connected to the carrier 21 or the carrier base 253, and the first motor magnet 252 may be fixedly connected to other fixed structures or other movable structures (such as movable structures that can move along the y-axis direction) located on both sides of the carrier 21.

[0079] In some embodiments, the first guide module 250 extends in the first direction to guide the carrier 21. In some embodiments, there may be multiple first guide modules 250, and multiple first guide modules 250 are arranged in parallel. Exemplarily, the number of first guide modules 250 may be two or three. In some embodiments, the first guide module 250 may include a first guide module rail disposed on the upper surface of the platform module 1, and a first guide module slider matching the first guide module rail, wherein the first guide module slider is fixedly connected to the lower surface of the carrier 21 to allow the carrier 21 to move along the first guide module rail.

[0080] In some embodiments, see Fig. 9 As shown, the motion module 2 further includes: a first grating system 271, and the first grating system 271 is used to detect the position of the stage 21 or the stage base 253 relative to the platform module 1. In some embodiments, the first grating system 271 may include a grating ruler and a reading head. In some embodiments, one of the grating ruler and the reading head is disposed on the stage base 253, and the other of the grating ruler and the reading head is disposed on the platform module 1.

[0081] In one or more embodiments of this specification, see Figures 7 to 9 As shown, the motion module 2 further includes: two balancing masses 24 respectively arranged on both sides of the carrier 21, and the two balancing masses 24 are arranged along a second direction (for example, an x-axis direction) intersecting with the first direction (for example, a y-axis direction). In some embodiments, a portion of the first linear drive device 25 can be connected to the balancing mass 24. In some embodiments, the first motor magnet 252 of the first linear drive device 25 can be fixedly connected to the balancing mass 24 (i.e., the aforementioned other movable structures). Further, the two first motor magnets 252 can be fixedly connected to the side surfaces of the two balancing mass 24 located on both sides of the carrier 21, respectively.

[0082] In some embodiments, the motion module further includes: a second linear drive device 26 and a second guide module 260. In some embodiments, the second linear drive device 26 is used to drive the balancing mass block 24 to move along a first direction (e.g., the y-axis direction). In some embodiments, there may be two second linear drives 26, and the two second linear drives 26 are respectively disposed on both sides of the platform module 1, and the two second linear drives 26 respectively drive the two balancing mass blocks 24 to move. In some embodiments, the two second linear drives 26 work synchronously to synchronously drive the two balancing mass blocks 24 to move.

[0083] In some embodiments, the second linear drive device 26 may include a second motor coil 261 and a second motor magnet 262 that match each other. In some embodiments, the second motor coil 261 is fixedly connected to the platform module 1 , and the second motor magnet 262 is fixedly connected to the balancing mass block 24 .

[0084] In some embodiments, the second guide module 260 extends in the first direction and is used to guide the balancing mass block 24. In some embodiments, there may be multiple second guide modules 260, and multiple second guide modules 260 are arranged in parallel. Exemplarily, the number of second guide modules 260 corresponding to each balancing mass block 24 may be two or three. In some embodiments, the second guide module 260 may include a second guide module rail disposed on the upper surface of the platform module 1, and a second guide module slider matching the second guide module rail, wherein the second guide module slider is fixedly connected to the lower surface of the balancing mass block 24 to allow the balancing mass block 24 to move along the second guide module rail.

[0085] In some embodiments, see Figure 8 As shown, two second guide modules 260 may be intermittently arranged on the axis in the same y-axis direction, thereby leaving space for the second linear drive device 26 .

[0086] In some embodiments, see Fig. 9 As shown, the motion module 2 also includes: a second grating system 272, and the second grating system 272 is used to detect the position of the stage 21 or the stage base 253 relative to the balance mass block 24. In some embodiments, when the stage base 253 and the balance mass block 25 are relatively displaced, the second grating system 272 can detect the positions of both. In some embodiments, the second grating system 272 may include a grating ruler and a reading head. In some embodiments, one of the grating ruler and the reading head is disposed on the stage base 253, and the other of the grating ruler and the reading head is disposed on the balance mass block 24.

[0087] In some embodiments, see Fig. 9 As shown, the motion module 2 further includes: a third grating system 273, and the third grating system 273 is used to detect the position of the balance mass block 24 relative to the platform module 1. In some embodiments, the third grating system 273 may include a grating ruler and a reading head. In some embodiments, one of the grating ruler and the reading head is arranged on the balance mass block 24, and the other of the grating ruler and the reading head is arranged on the platform module 1.

[0088] In some embodiments, the movement direction of the two balancing masses 24 is opposite to the movement direction of the carrier 21. In some embodiments, the carrier base 253, the carrier 21, the material adsorption device 22, and the material on the material adsorption device 22 may impact the platform module 1 during the high-acceleration movement along the first guide module 250 driven by the first linear drive device 25, causing the platform module 1 to vibrate, thereby affecting the movement accuracy of the device and the detection accuracy of the detection module (such as the first detection module 5, the second detection module 6 or other detection modules). In some embodiments, the two balancing masses 24 can reduce the impact of the motion module 2 on the entire device or the platform module 1 therein during the high acceleration process, and can reduce the loss of motion accuracy caused by the impact, so as to achieve high acceleration and high precision of the motion module 2, and at the same time have high dynamic flatness, and can cope with high acceleration impact and environmental stability requirements in the surface measurement scenario.

[0089] In some embodiments, the balancing mass block 24 moves based on the movement of the carrier 21, thereby reducing the aforementioned impact. Exemplarily, when the carrier 21 and its accessories move at a constant speed along the positive direction of the y-axis direction, the balancing mass block 24 moves at a constant speed along the opposite direction of the y-axis direction, and the overall center of mass position of the mechanism remains unchanged. Exemplarily, when the carrier 21 and its accessories move at an accelerated speed along the opposite direction of the y-axis direction, the balancing mass block 24 moves at an accelerated speed along the positive direction of the y-axis direction, and the overall center of mass position of the mechanism remains unchanged.

[0090] In one or more embodiments of this specification, see Figures 7 to 9 as well as Figure 24 to Figure 27 As shown, in some embodiments, the balancing mass block 24 includes a first block 241 and a second block 242, wherein the first block 241 is connected to the first linear drive device 25 (e.g., the first motor magnet 252), and the second block 242 is connected to the second linear drive device 26 (e.g., the second motor magnet 262). The first block 241 and the second block 242 are connected via one or more flexible connectors 243, and the flexible connector 243 is used to achieve a flexible connection between the first block 241 and the second block 242, so as to reduce the motion difference between the first block 241 and the second block 242 due to being driven by different linear drive devices, thereby reducing the impact or vibration caused by the motion difference on the platform module 1. In some embodiments, the flexible connector 243 can be provided to cope with the dimensional deviation caused by manufacturing and assembly.

[0091] In some embodiments, see Fig.26 , Fig. 27As shown, the flexible connector 243 may be in a straight line or in a C-shape. In some embodiments, the number of the flexible connectors 243 may be two or more. In some embodiments, the two flexible connectors 243 may include a straight line flexible connector 243 and a C-shaped flexible connector 243. In some embodiments, the flexible connector 243 may include a fixed portion 2431 at both ends thereof, and a flexible portion 2432 connecting the two fixed portions 2431. Among them, the two fixed portions 2431 are fixedly connected to the first block 241 and the second block 242 respectively, and the flexible portion 2432 can be compressed in the direction from the first block 241 to the second block 242, and can also be bent, twisted, torsion, etc. in the direction intersecting with the direction from the first block 241 to the second block 242, so as to achieve a flexible connection between the first block 241 and the second block 242.

[0092] In some embodiments, there is a gap between the two fixing portions 2431 , and the flexible portion 2432 may be one or more spring leaves disposed in the gap.

[0093] In some embodiments, see Fig.24 , Fig.25 As shown, the test bench further includes: a rigid stopper 244, which is fixedly connected to one of the first block 241 and the second block 242 and can abut against the other of the first block 241 and the second block 242. In some embodiments, since the first block 241 and the second block 242 are connected only by a compressible and deformable flexible connector 243, and the length of the flexible portion 2432 in the flexible connector 243 is short, it is easy to fold and be damaged when being squeezed by the two fixed portions 2431, and the rigid stopper 244 is arranged to limit the minimum position between the first block 241 and the second block 242, and avoid the folding of the flexible portion 2432.

[0094] In one or more embodiments of this specification, see Fig.14 , Fig.15 As shown, the motion module 2 further includes: a locking device 23 for locking the carrier 21 and the material adsorption device 22 on the platform module 1 by negative pressure. In some embodiments, the locking device 23 can be arranged on the lower surface of the carrier 21. In other embodiments, the locking device 23 can be arranged on the lower surface of the carrier base 253 located on the lower side of the carrier 21.

[0095] In some embodiments, see Figures 16 to 21As shown, the locking device 23 in place may include: a fixed block 231, a flexible member 232, an adsorption block 233 and a preload mechanism 234. The flexible member 232 flexibly connects the fixed block 231 and the adsorption block 2333 to allow the adsorption block 233 to approach or move away from the fixed block 231, and / or allows the adsorption block 233 to adjust its pitch angle in each direction relative to the fixed block 231 (for example, rotation in the Rx / Ry direction and a combination of the two). The side of the adsorption block 233 facing away from the fixed block 231 is provided with one or more negative pressure areas 2331 for providing negative pressure, so as to allow the adsorption block 233 to realize the adsorption function, thereby realizing the locking of the motion module 2 and the platform module 1. The preload mechanism 234 is connected to the fixed block 231 and extends in the direction of the adsorption block 233, and is used to apply a preload force to the adsorption block 233. The preload force can allow the adsorption block 233 to have a tendency to move away from the fixed block 231, which is convenient for the adsorption block 233 to fit with the adsorbed object, so that the adsorption of the adsorption block 233 will not be restricted by the microscopic plane conditions of the adsorbed surface, and at the same time, it is convenient for the adsorption block 233 to have a compressed space when adsorption is implemented. In some embodiments, the negative pressure area 2331 can be in the shape of a cavity, and a plurality of negative pressure holes are opened in the negative pressure area 2331, and the negative pressure holes can be connected to an external vacuum pump to provide negative pressure.

[0096] In some embodiments, the fixing block 231 is fixedly connected to the stage base 253 via a mounting hole 2310 provided on the fixing block 231 , and the adsorption block 233 can adsorb the platform module 1 .

[0097] In some embodiments, see Fig. 20 As shown, the fixing block 231 includes: an annular portion 2311, an outer boss 2312 extending outwardly along the outer edge of the annular portion 2311, and an inner boss 2313 extending inwardly along the inner edge of the annular portion 2311. Among them, the middle part of the annular portion 2311 forms a accommodating space for accommodating the preload mechanism 234, the outer boss 2312 is fixedly connected to the flexible member 232, and the inner boss 2313 is used to install the preload mechanism 234. In some embodiments, the fixing block 231 can be rectangular, circular or other shapes when viewed from above. In some embodiments, the mounting hole 2310 is opened on the annular portion 2311 of the fixing block 231, and there can be multiple mounting holes 2310, for example Fig.16 In some embodiments, the outer boss 2312 is provided with a hole for connecting the flexible member 232. In some embodiments, the inner boss 2313 is provided with a hole for connecting the preload mechanism 234.

[0098] In one or more embodiments of this specification, see Fig.18 , Fig.19As shown, the flexible member 232 is a flexible sheet. In some embodiments, the flexible sheet is used to provide a certain flexibility or elasticity to allow the adsorption block 233 to pitch in all directions relative to the fixed block 231 (for example, rotation in the Rx / Ry direction and a combination of the two), and further be able to restore the initial position after the adsorption ends. In some embodiments, the flexible sheet is in the form of a thin sheet, and the flexible sheet is roughly parallel to the surface of the platform module 1. In some embodiments, when the first linear drive mechanism 25 maintains the carrier 21 and its accessories (such as the carrier base 253, the material adsorption device 22, and the material on the material adsorption device 22, etc.) in the current position (that is, when the motor is self-locked), it will cause the carrier 21 and its accessories to produce a small vibration in the direction of movement (for example, the y-axis direction). Based on the thin sheet structure of the flexible sheet, the direction of the flexibility or elasticity provided by the flexible sheet is Fig. 20 The up and down directions in Fig. 20 The left and right directions or the front and back directions in the flexible sheet are flexible or elastic in the up and down directions and rigid in other directions. Therefore, after the adsorption block 233 is adsorbed, the flexible sheet will not produce Fig. 20 The fixed block 231 and the adsorption block 233 have rigidity in the direction of movement of the carrier 21 and its accessories (for example, the y-axis direction), thereby preventing the carrier 21 and its accessories from being displaced in the left-right direction or the front-back direction. Fig. 20 Relative vibration caused by the first linear drive mechanism 25 in the left-right direction or the front-back direction.

[0099] In some embodiments, the flexible sheet has a first region 2321 fixedly connected to the fixing block 231 and a second region 2322 fixedly connected to the adsorption block 233, and at least a portion of the second region 2322 can be elastically deformed relative to the plane where the first region 2321 is located. Further, the first region 2321 of the flexible sheet can surround the second region 2322, see Fig.19 As shown, Fig.19 The second area 2322 is shown in the dotted line portion of Fig.19 The first area 2321 is shown outside the dotted line portion. In some embodiments, the flexible sheet is further provided with a first flexible sheet hole 23201 for connecting to the outer boss 2312 and a second flexible sheet hole 23202 for connecting to the adsorption block 233.

[0100] In one or more embodiments of the present specification, the flexible sheet can be made of rigid and / or elastic material (such as spring steel), and structural flexibility or structural elasticity can be formed by means of grooving. Exemplarily, a plurality of flexible sheet grooves 2323 that penetrate the thickness direction of the flexible sheet are provided inside the second area 2322 of the flexible sheet, and the plurality of flexible sheet grooves 2323 separate at least a portion of the second area 2322 into one or more deformation portions 2324, and the deformation portion 2324 can be elastically deformed relative to the first area 2321, and the adsorption block 233 is fixedly connected to the one or more deformation portions 2324 (for example, fixedly connected via the second groove 23202 of the flexible sheet). In some embodiments, the flexible sheet groove 2323 can be located on one side of the interior of the second area 2322 and / or at the center of the interior of the second area 2322 (in this case, a portion of the second area 2322 can be deformed relative to the plane where the first area 2321 is located). In other embodiments, the flexible sheet groove 2323 may also extend to the boundary of the second region 2322 (in this case, all parts of the second region 2322 can be deformed relative to the plane where the first region 2321 is located).

[0101] In some embodiments, Fig.18 , Fig.19 As shown, the flexible sheet slot 2323 may be in an I-shape. In other embodiments, the flexible sheet slot 2323 may also be radial. In some embodiments, the flexible sheet slot 2323 may be in a C-shape to form a deformation portion 2324. Fig.18 , Fig.19 In the embodiment of the present invention, the flexible sheet groove 2323 forms two symmetrical deformation parts 2324, which has good symmetry. Fig. 20 The pitch angle of the horizontal plane in the horizontal plane is easy to adjust in the left-right direction and the front-back direction relative to the horizontal plane (it can be understood that it is easy to adjust the pitch angle of the adsorption plane of the adsorption block 233, that is, the measurement plane in each direction), and can be stably fixed to the adsorption block 233. In a further embodiment, the flexible sheet slot 2323 can also form more deformation parts 2324, which may have better adjustment performance of angles in each direction, but it is more difficult to be fixed to the adsorption block 233.

[0102] In some embodiments, there is a gap between the second region 2322 of the flexible sheet and the fixing block 231 to provide a space for elastic deformation of the second region 2322. In some embodiments, the lower end of the outer boss 2312 protrudes from the annular portion 2311, thereby forming an accommodation space inside the outer boss 2312, which provides a gap between the second region 2322 of the flexible sheet and the fixing block 231.

[0103] In some embodiments, see Fig. 20As shown, the upper end of the adsorption block 233 is fixedly connected to the lower surface of the second area 2322 of the flexible sheet. When the second area 2322 of the flexible sheet undergoes elastic deformation, the upper end of the adsorption block 233 may enter the accommodating space along with the elastic deformation of the flexible sheet. In some embodiments, the adsorption block 233 forms an adsorption block fixing structure 2330 on the side facing the flexible sheet, and the size of the adsorption block fixing structure 2330 is smaller than the size of the accommodating space so that it can partially or completely enter the accommodating space. Exemplarily, the adsorption block 233 can be a two-stage or multi-stage step structure, and the uppermost step structure of the adsorption block 233 forms the adsorption block fixing structure 2330.

[0104] In one or more embodiments of the present specification, the flexible member may be one or more flexible blocks, which are arranged around the outer edge of the lower surface of the fixed block, the upper end of the flexible block is fixedly connected to the fixed block, and the lower end of the flexible block is fixedly connected to the adsorption block, thereby providing flexibility or elasticity between the fixed block and the adsorption block. In this embodiment, the flexible block may be made of a flexible material, specifically, silicone or rubber.

[0105] In some embodiments, a guide structure (such as a guide column and a guide sleeve, or a guide rail and a slider) may be further provided between the fixed block and the adsorption block to avoid possible displacement of the flexible block structure in the xy plane in some cases.

[0106] In other embodiments of the present specification, the flexible member may also be a spring sheet with an S-shaped longitudinal section and arranged on the outer edge of the fixing block.

[0107] In one or more embodiments of this specification, see Figures 16 to 21 As shown, the preload mechanism 234 includes: a preload elastic member 2340, and the two ends of the preload elastic member 2340 are respectively directly or indirectly against the fixed block 231 and the adsorption block 233. In some embodiments, the preload elastic member 2340 can be a spring, or an elastic bellows, or an elastic silicone or rubber structure. The preload elastic member 2340 provides a preload force, so that the adsorption block 233 has a tendency to move away from the fixed block 231. The preload elastic member 2340 can be compressed by the reaction force provided by the adsorption block 233, and the compression direction can be adaptively adjusted to a certain extent. When the adsorption block 233 generates a pitch angle (such as rotation in the Rx / Ry direction and a combination of the two), the direction of applying the preload force can be adaptively fine-tuned to assist the contact between the adsorption block 233 and the platform module 1.

[0108] In one or more embodiments of the present specification, the preload mechanism 234 also includes: a first pressure plate 2341 and a second pressure plate 2342, wherein the first pressure plate 2341 is fixedly connected to the fixed block 231, one end of the preload elastic member 2340 abuts against the first pressure plate 2341, the second pressure plate 2342 directly or indirectly abuts against the adsorption block 233, and the other end of the preload elastic member 2340 abuts against the second pressure plate 2341.

[0109] In some embodiments, the second pressing plate 2342 can be indirectly pressed against the adsorption block 233, for example, the second pressing plate 2342 is pressed against the flexible member 232 (for example, a flexible sheet, for example, the second region 2322 of the flexible sheet), and the flexible sheet is fixedly connected to the adsorption block 233 to transmit the force of the second pressing plate 2342. In this embodiment, the flexible sheet holds the second pressing plate 2342 and the preload elastic member 2340 in the accommodation space of the annular portion 2311. In some embodiments, the second pressing plate 2342 and components located above the second pressing plate 2342, such as the preload elastic member 2340, and other related structures act on the flexible sheet due to gravity, thereby also providing a certain preload force. In some further embodiments, the second pressing plate 2342 can also be fixedly connected to the flexible sheet (for example, the upper surface of the flexible sheet).

[0110] In other embodiments, the second pressure plate 2342 can directly abut against the adsorption block 233. For example, the flexible member 232, such as a flexible sheet, is fixedly connected to the adsorption block 233, and an escape zone is provided to allow the second pressure plate 2342 to pass through the flexible sheet and abut against the adsorption block 233.

[0111] In other embodiments, the second pressing plate 2342 can abut against the adsorption block 233 and the flexible member 232 such as a flexible sheet at the same time. Exemplarily, the second pressing plate 2342 can be a two-stage step structure, the outer edge of the second pressing plate 2342 abuts against the flexible member 232 such as a flexible sheet, and the middle portion of the second pressing plate 2342 protrudes downward, penetrates the flexible member 232 such as a flexible sheet, and abuts against the adsorption block 233.

[0112] In some embodiments, the first pressure plate 2342 is fixedly connected to the inner boss 2313 , and related structures in the preload mechanism 234 of some embodiments that may be attached to the first pressure plate 2342 , such as the preload elastic member 2340 , can be installed to the fixed block 231 through the first pressure plate 2342 .

[0113] In some embodiments, the first pressing plate 2341 defines a first pressing plate groove for accommodating the preload elastic member 2340 , and / or the second pressing plate 2342 defines a second pressing plate groove for accommodating the preload elastic member 2340 .

[0114] In some embodiments, the preload mechanism 234 also includes: a guide column 23401 fixedly connected to the first pressure plate 2341 or the second pressure plate 2342, the preload elastic member 2340 is sleeved outside the guide column 23401, and the outer diameter of the guide column 23401 is slightly smaller than the inner diameter of the preload elastic member 2340. While the guide column 23401 supports / guides the preload elastic member 2340, it allows the preload elastic member 2340 to undergo a certain degree of axial bending to adapt to the pitch angle of the adsorption block 233.

[0115] In some embodiments, see Fig. 20 As shown, the longitudinal section of the first pressing plate 2341 is configured as a C-shape, the first pressing plate 2341 has a first pressing plate accommodating space 23412, and the first pressing plate groove is opened inside the first pressing plate accommodating space 23412. In some embodiments, the inner diameter of the first pressing plate accommodating space 23412 matches the inner diameter of the inner boss 2313, and further, the outer diameter of the second pressing plate 2342 is smaller than the inner diameter of the inner boss 2313 and smaller than the inner diameter of the first pressing plate accommodating space 23412, so as to allow the second pressing plate 2342 to be accommodated inside the inner boss 2313 and even the first pressing plate accommodating space 23412 after being pressed.

[0116] In one or more embodiments of this specification, see Fig. 22 , Fig.23 As shown, the preload mechanism 234 includes: a preload cylinder 2343, one of the cylinder body and the piston of the preload cylinder 2343 is fixedly connected to the fixed block 231, and the other of the cylinder body and the piston of the preload cylinder 2343 directly or indirectly abuts against the adsorption block 233. The preload cylinder 2343 works to move the piston relative to the cylinder body, thereby providing a preload force to the adsorption block 233 based on the fixed block 231.

[0117] In some embodiments, the piston of the pre-stressing cylinder 2343 is fixedly connected to the inner boss 2313, and the cylinder body of the pre-stressing cylinder 2343 is arranged inside the inner boss 2313, and the cylinder body directly or indirectly abuts against the adsorption block 233 (for example, it can indirectly abut against the adsorption block 233 through the flexible sheet, and / or directly abut against the adsorption block 233 through the flexible sheet).

[0118] In some embodiments, the surface of the cylinder body of the pre-compression cylinder 2343 that contacts the flexible sheet or the adsorption block 233 may be a curved surface to adapt to the pitch angles of the adsorption block 233 in all directions.

[0119] It should be noted that the aforementioned pitch, pitch angle, etc. may refer to the angle change of the adsorbed plane caused by the difference or change in the microscopic conditions of the adsorbed plane, or the movement of the adsorbed object, which causes the lower surface of the adsorption block 233 (for example, the side away from the fixed block 231) to form an upward or downward floating angle in various directions in order to implement accurate adsorption, or the adaptive Rx / Ry direction rotation angle of the adsorption block 233 as a whole.

[0120] In one or more embodiments of the present specification, the side of the adsorption block 233 facing away from the fixed block 231 is provided with one or more positive pressure areas 2332 for providing positive pressure gas. The positive pressure gas provided by the positive pressure area 2332 can form an air film between the adsorption block 233 and the platform module 1, so as to reduce the friction of the adsorption block 233 moving relative to the platform module 1, or to make the adsorption block 3 separate from the platform module 1, and reduce or even avoid the interference of the adsorption block 233 with the platform module 1 when the carrier 21 and its accessories move relative to the platform module 1. In some embodiments, the number of negative pressure areas 2331 is one, and the positive pressure area 2332 surrounds the negative pressure area 2331. In other embodiments, the number of negative pressure areas 2331 is multiple, and the positive pressure area 2332 surrounds the negative pressure area 2331 and / or is located between adjacent negative pressure areas 2331. See. Fig. 20 As shown, a positive pressure channel 23320 connected to the positive pressure area 2332 and a negative pressure channel 23310 connected to the negative pressure area 2331 are shown, wherein the positive pressure channel 23320 is used to provide positive pressure gas to the positive pressure area 2332, and the negative pressure channel 23310 is used to connect an air pump to provide negative pressure to the negative pressure area 2331.

[0121] In some embodiments, when the carrier 21 of the motion module 2 needs to be locked relative to the platform module 1, negative pressure is provided to the negative pressure area 2331 by a vacuum pump to generate adsorption, so that the carrier 21 and its accessories are firmly adsorbed on the platform module 1; when the carrier 21 of the motion module 2 needs to move relative to the platform module 1, the positive pressure area 2332 provides positive pressure to make the carrier base 253 of the carrier 21 separate from the upper surface of the platform module 1, and the carrier base 253 is supported by air floating and has no effect on the movement.

[0122] In some embodiments, the in-position locking device 23 can realize brake locking during measurement (such as surface measurement, etc.) to ensure the stability of the material posture.

[0123] In one or more embodiments of this specification, see Figure 28 to Figure 31As shown, the material adjustment module 3 includes: an adjustment base 31, an adjustment platform 32 that can be air-floatingly supported on the adjustment base 31, and a linear adjustment motion system that drives the adjustment platform 32 to achieve planar movement (for example, movement along the x-axis direction or the y-axis direction) or rotation (for example, rotation in the Rz direction) relative to the adjustment base 31.

[0124] In some embodiments, the linear adjustment motion system includes at least two groups of linear adjustment motion components 33 arranged on the adjustment platform 32 along a first direction (for example, the y-axis direction) and at least one group of linear adjustment motion components 33 arranged on the adjustment platform 32 along a second direction (for example, the x-axis direction) intersecting the first direction.

[0125] In some embodiments, a receiving groove is provided on the adjustment platform 32, and the linear adjustment motion assembly 33 is embedded in the adjustment platform 32. In some embodiments, the linear adjustment motion assembly 33 may include a guide block 34, a motor stator and a motor mover. The guide block 34 is provided with a receiving cavity extending along the motor driving direction. The motor stator and the motor mover are received in the receiving cavity. The motor stator is fixedly connected to the guide block 34, and the motor mover is fixedly connected to the adjustment platform 32. In some embodiments, the guide block 34 is limited on the adjustment base 31. In some embodiments, the motor mover can move relative to the motor stator and the guide block, thereby driving the adjustment platform 32 to move relative to the adjustment base 31. In some embodiments, a motor push rod may be provided on the motor stator, one end of which is fixedly connected to the motor mover, and the motor push rod can be controlled to push the motor mover to slide away from or close to the motor stator, thereby driving the adjustment platform 32 to move relative to the guide block 34 (or the adjustment base 31).

[0126] In some embodiments, see Fig.29 As shown, the lower surface of the guide block 34 is provided with an air flotation assembly 341. In some embodiments, the lower surface of each guide block 34 is provided with two air flotation assemblies 341 arranged opposite to each other. Fig.30 As shown, each guide block 34 has two oppositely arranged concave grooves 311 at the position on the adjustment base 31, and two air flotation components 341 are respectively arranged in the two concave grooves 311. In some embodiments, a mounting block 312 is formed between the two oppositely arranged concave grooves 311, and an air film is formed between the two oppositely arranged air flotation components 341 and the two side surfaces of the same mounting block 312, so that the guide block 34 is limited on the adjustment base 31.

[0127] In some embodiments, see Fig.30As shown, the cooperation of a mounting block 312 extending along the y-axis direction on the adjustment base 31 and a group of air-floating components 341 arranged along the y-axis direction on the corresponding adjustment platform 32 can realize the air-floating guidance of the adjustment platform 32 relative to the adjustment base 31 in the y-axis direction (and limit the maximum displacement in the x-axis direction). In some embodiments, the cooperation of two mounting blocks 312 extending along the x-axis direction on the adjustment base 31 and two groups of air-floating components 341 arranged along the axial direction on the corresponding adjustment platform 32 can realize the air-floating guidance of the adjustment platform 32 relative to the adjustment base 31 in the x-axis direction (and limit the maximum displacement in the y-axis direction).

[0128] In some embodiments, see Fig.28 As shown, the two linear adjustment motion components 33 arranged along the y-axis direction act in the same direction (drive in the same direction) to make the adjustment stage 32 move in the y-axis direction relative to the adjustment base 31. In some embodiments, the linear adjustment motion components 33 arranged along the x-axis direction act to make the adjustment stage 32 move in the x-axis direction relative to the adjustment base 31. In some embodiments, the two linear adjustment motion components 33 arranged along the y-axis direction act in different directions (drive in opposite directions) to make the adjustment stage 32 rotate in the Rz direction relative to the adjustment base 31.

[0129] In some embodiments, see Fig.29 As shown, the adjustment stage 32 is provided with an adjustment stage positive pressure area 36 for making the adjustment stage 32 float on the adjustment base 31. In some embodiments, the adjustment stage positive pressure area 36 on the adjustment stage 32 cooperates with the corresponding position on the adjustment base 31 to realize the air floating support of the adjustment stage 32 relative to the adjustment base 31 in the z-axis direction. In some embodiments, the adjustment stage 32 is also provided with an adjustment stage negative pressure area 35 for making the adjustment stage 32 adsorb on the adjustment base 31 to realize the current position positioning.

[0130] In one or more embodiments of this specification, see Fig.32 , Fig.33 As shown, the loading and unloading auxiliary transmission module 4 includes: an air-floating guide rail assembly 41, and the air-floating guide rail assembly 41 includes a vertical air-floating mating surface 411 and two oppositely arranged lateral air-floating mating surfaces 412. In some embodiments, the air-floating guide rail assembly 41 extends to the first detection station. In some embodiments, the air-floating guide rail assembly 41 is approximately located at one end of the motion module 2. In some embodiments, the vertical air-floating mating surface 411 can be parallel to the test plane. In some embodiments, the lateral air-floating mating surface 412 can be perpendicular to the test plane.

[0131] In some embodiments, the air-floating guide rail assembly 41 may include two air-floating guide rails arranged along the movement direction of the material adjustment module 3 (for example, the y-axis direction, or the x-axis direction, or any direction in the xy plane). In some embodiments, both air-floating guide rail assemblies 41 extend to the first detection station to allow the material adjustment module 3 to move to the first detection station. In some embodiments, the upper surfaces of both air-floating guide rails provide a vertical air-floating mating surface 411. In some embodiments, a side surface of each air-floating guide rail may provide a lateral air-floating mating surface 412, and each of the two air-floating guide rails provides a lateral air-floating mating surface 412. In some embodiments, the cross-section of the air-floating guide rail may be rectangular or stepped. In some embodiments, there is a gap between the two air-floating guide rails for avoiding other drive mechanisms or guide rails, such as the first linear drive device 25 and the first guide module 250 of the motion module 2, so as to allow the first linear drive device 25 and the first guide module 250 to extend to the first detection station, thereby allowing the carrier 21 to move to the first detection station.

[0132] In some embodiments, the adjustment base 31 of the material adjustment module 3 can be arranged on the vertical air-floating matching surface 411 of the air-floating guide rail assembly 41 with air-floating support, so as to reduce the movement resistance of the material adjustment module 3 and improve the driving accuracy of the loading and unloading auxiliary transmission module 4. Fig.31 As shown, the adjustment base 31 is provided with an adjustment base positive pressure area 313 for making the adjustment base 31 float on the air-floating guide rail assembly 41, and the adjustment base positive pressure area 313 cooperates with the vertical air-floating matching surface 411 to realize the air-floating support of the adjustment base 31 of the material adjustment module 3 relative to the air-floating guide rail assembly 41 in the z-axis direction. In some embodiments, the adjustment base 31 is also provided with an adjustment base negative pressure area 314 for making the adjustment base 31 adsorb on the air-floating guide rail assembly 41 to realize the current position positioning.

[0133] In some embodiments, the adjustment base 31 of the material adjustment module 3 is also connected to a first air-floating pad 42 and a second air-floating pad 43, and the first air-floating pad 42 and the second air-floating pad 43 are respectively air-floating supported on two lateral air-floating mating surfaces 412, so as to realize the air-floating guidance of the adjustment base 31 of the material adjustment module 3 relative to the air-floating guide rail assembly 41 in the y-axis direction (and limit the maximum displacement in the x-axis direction). In some embodiments, a bracket 44 is provided on each side of the adjustment base 31 of the material adjustment module 3, and the first air-floating pad 42 and the second air-floating pad 43 are respectively connected to the two brackets 44. In some embodiments, the two sides of the adjustment base 31 can protrude from the two air-floating guide rails, so that the bracket 44 can extend downward and hide the first air-floating pad 42 and the second air-floating pad 43 under the adjustment base 31.

[0134] In some embodiments, one of the first air floating pad 42 and the second air floating pad 43 is a rigid air floating pad, and the other of the first air floating pad 42 and the second air floating pad 43 is a flexible air floating pad. In some embodiments, the cooperation of the rigid air floating pad and the flexible air floating pad can ensure that there is no excessive gap between the air floating pad and the lateral air floating mating surface 412 of the air floating guide rail, thereby ensuring control accuracy.

[0135] In some embodiments, when the adjustment base 31 of the material adjustment module 3 moves relative to the air flotation guide rail assembly 41, the air flotation pad (e.g., the first air flotation pad 42 and the second air flotation pad 43) needs to be in close contact with the lateral air flotation mating surface 412 to ensure control accuracy. In some embodiments, the close contact between the air flotation pad and the lateral air flotation mating surface 412 can be achieved by pre-installation, but it may not be able to maintain close contact after the material adjustment module 3 moves for a certain period of time, resulting in a decrease in control accuracy. By configuring one of the two air flotation pads as a flexible air flotation pad, the two air flotation pads can be closely fitted with the two lateral air flotation mating surfaces 412, so that regardless of whether there is an error in the lateral air flotation mating surface 412, the thickness of the air film formed between the air flotation support surface of the air flotation pad and the lateral air flotation mating surface 412 can be guaranteed to be stable, thereby reducing the error.

[0136] In some embodiments, the flexible air floating cushion has a pre-pressure adjustment mechanism for applying pre-pressure to the flexible air floating cushion. In some embodiments, the pre-pressure adjustment mechanism is disposed between the bracket 44 and the flexible air floating cushion, and provides the flexible air floating cushion with pre-pressure toward the lateral air floating mating surface 412 based on the bracket 44.

[0137] In one or more embodiments of this specification, see Fig.32 , Fig.33 As shown, the loading and unloading auxiliary transmission module 4 includes: a third linear drive device 45, used to drive the material adjustment module 3 to move along the first direction, and the third linear drive device 45 is located on both sides of the first linear drive device 25 used to drive the carrier 21 to move along the first direction, so as to allow both the material adjustment module 3 and the carrier 21 to move to the first detection station.

[0138] In some embodiments, the third linear drive device 45 includes a third motor coil 451 and a third motor magnet 452 that match each other. In some embodiments, the third motor coil 451 is fixedly connected to the adjustment base 31 of the material adjustment module 3 (for example, a bracket 44 disposed on the adjustment base 31), and the third motor magnet 452 is fixedly connected to the platform module 1.

[0139] In some embodiments, the loading and unloading auxiliary transmission module 4 includes a third guide module extending in the first direction, which is used to guide the material adjustment module 3. In some embodiments, the third guide module may include one or more third guide module rails arranged on the upper surface of the platform module 1, and a third guide module slider matching the third guide module rails, wherein the third guide module slider is fixedly connected to the lower surface of the material adjustment module 3 to allow the material adjustment module 3 to move along the third guide module slide rail. In other embodiments, the third guide module may also be the above-mentioned air-floating guide rail assembly 41.

[0140] In some embodiments, the loading and unloading auxiliary transmission module 4 further includes a fourth grating system 46, which is used to detect the position of the material adjustment module 3 relative to the platform module 1 (for example, relative to the position of the air-floating guide rail assembly 41 fixed to the platform module 1). In some embodiments, the fourth grating system 46 may include a grating ruler and a reading head. In some embodiments, one of the grating ruler and the reading head is disposed on the adjustment base 31 of the material adjustment module 3, and the other of the grating ruler and the reading head is disposed on the air-floating guide rail of the air-floating guide rail assembly 41.

[0141] In one or more embodiments of this specification, see Fig.10 , Fig.11 As shown, the platform module 1 includes: a first platform 11 and a second platform 12, the second platform 12 is arranged above the first platform 11, and the motion module 2, the material adjustment module 3, and the loading and unloading auxiliary transmission module 4 are arranged on the second platform 12. In some embodiments, the platform module 1 also includes a shock absorber 13, a buffer limit module 14 and a safety lock module 15 connecting the first platform 11 and the second platform 12. In some embodiments, the shock absorber 13 is used to absorb the impact force of the second platform 12 in the vertical direction. In some embodiments, the buffer limit module 14 is used to absorb the impact force of the second platform 12 in the first direction (for example, the y-axis direction) and / or the second direction (for example, the x-axis direction), wherein the first direction and the second direction can be located in the same plane, and the first direction can intersect with the second direction. In some embodiments, the safety lock module 15 is at least used to implement rigid limit on the second platform 12 in the vertical direction (for example, the z-axis direction) perpendicular to the first direction and the second direction, the first direction and / or the second direction.

[0142] In some embodiments, the shock absorber 13, the buffer limit module 14 and the safety lock module 15 can absorb or partially absorb the impact force of the second platform 12 relative to the first platform 11 in the x-axis direction, the y-axis direction, and / or the z-axis direction, and realize the limitation of the displacement and rotation of the second platform 12 in both the vertical and planar directions relative to the first platform 11, and at the same time can adjust the range of the limit position of the movement, and can further selectively make the second platform 12 have a fixed vertical distance relative to the first platform 11 to be suitable for transportation.

[0143] In one or more embodiments of this specification, see Fig.10 As shown, the number of shock absorbers 13 may be four, and the four shock absorbers 13 are respectively arranged at the four corners of the first platform 11. In some embodiments, the shock absorber 13 is used to absorb the impact force in the third direction perpendicular to the first platform 11 provided by the second platform 12, for example, to absorb the impact force in the z-axis direction. In some embodiments, the shock absorber 13 may be a passive shock absorber, such as a rubber block, an elastomer, an air bag, etc. In other embodiments, the shock absorber 13 may also be an active shock absorber that actively absorbs the second platform according to the movement (such as acceleration) of the second platform 12, such as a cylinder, etc.

[0144] In one or more embodiments of this specification, see Fig.11 As shown, the buffer limit module 14 includes: a first fixing member 141 fixedly connected to the first platform 11, a buffer member 142 fixedly connected to the first fixing member 141, and a second fixing member 143 connecting the buffer member 142 and the second platform 12. The buffer member 142 extends in a first direction (for example, the y-axis direction) and / or a second direction (for example, the x-axis direction), and the buffer member 142 is used to absorb the impact force provided by the second platform 12 in the first direction and / or the second direction parallel to the first platform 11, for example, to absorb the impact force in the y-axis direction and / or the x-axis direction.

[0145] In some embodiments, the buffer 142 is suspended relative to the first platform 11 and can be compressed in one direction of the y-axis direction or the x-axis direction to achieve buffering. In some embodiments, in order to absorb the impact force in the y-axis direction, the buffer 142 is configured to extend in the y-axis direction. In other embodiments, in order to absorb the impact force in the x-axis direction, the buffer 142 is configured to extend in the x-axis direction. In other embodiments, the buffer 142 can also be configured to extend in a direction having an angle with both the y-axis direction and the x-axis direction to absorb the impact force in the y-axis direction and the x-axis direction. In addition, a plurality of buffers 142 arranged in different directions can also be provided according to actual needs. In some embodiments, the buffer 142 can be a rubber block, an elastomer, or an air bag.

[0146] In some embodiments, the first fixing member 141 may be a plate-like structure fixed vertically or approximately vertically to the upper surface of the first platform 11, and one end of the buffer member 142 is fixedly connected to the upper end of the plate-like structure. In some embodiments, the second fixing member 143 may be a block-like structure, and the other end of the buffer member 142 is fixedly connected to the side of the block-like structure, and the upper surface of the block-like structure is fixedly connected to the second platform 12. In some implementations, the first fixing member 141, the buffer member 142, and the second fixing member 143 are L-shaped.

[0147] In one or more embodiments of this specification, see Fig.12 , Fig.13 As shown, the safety lock module 15 may include: a top plate 151, a limiting rod 152, a base 153 and a lock limiting assembly 154. In some embodiments, the base 153 may be fixed to one of the first platform 11 or the second platform 12, and the top plate 152 may be fixed to the other of the first platform 11 or the second platform 12. Taking the example that the base 153 is fixed to the first platform 11 and the top plate 152 is fixed to the second platform 12, in some embodiments, one end of the limiting rod 152 is fixedly connected to the top plate 151, and the top plate 151 is used to bear the impact force of the second platform 12 and transmit the movement of the second platform 12 to the movement of the limiting rod 152. In some embodiments, the other end of the limiting rod 152 is movably disposed on the base 153, and the displacement of the limiting rod 152 in the y-axis direction and the x-axis direction is limited by the base 153 fixed on the first platform 11, wherein the y-axis direction may be Fig.13 The left and right directions in the x-axis direction can be Fig.13 The front-to-back direction.

[0148] In some embodiments, the locking and limiting assembly 154 is sleeved on the outside of the limiting rod 152, and can be used to limit the movement of the top plate 151 and / or the limiting rod 152 relative to the base 153. In some embodiments, the locking and limiting assembly 154 can limit the displacement of the top plate 151 relative to the base 153 by limiting the movement of the limiting rod 152, and further limit the displacement of the second platform 12 relative to the first platform 11. In some embodiments, the locking and limiting assembly 154 can be specifically used to limit the displacement of the top plate 151 and / or the limiting rod 152 relative to the base 153 in the z-axis direction, wherein the z-axis direction can be Fig.13 In some embodiments, the locking limit assembly 154 can further limit the displacement of the limit rod 152 relative to the base 153 in the y-axis direction and the x-axis direction.

[0149] In some embodiments, a plurality of safety lock modules 15 may be arranged between the first platform 11 and the second platform 12. For example, three or more non-colinear safety lock modules 15 may be arranged. For example, a plurality of lock points may be provided on the second platform 12, and a safety lock module 15 is provided at each lock point, and each safety lock module 15 may have the same limit stroke. In some embodiments, the number of lock points may be three, and they may be arranged in a ring array relative to the center of the second platform 12. In other embodiments, the number of lock points may be four, and the four lock points may be located at the four corners of the rectangular second platform 12, or the four sides of the rectangular second platform 12. In other embodiments, the number of lock points may be more.

[0150] In some embodiments, a plurality of safety locking modules 15 can limit the displacement of the second platform 12 relative to the first platform 11 (e.g., displacement along the x-axis, y-axis, and / or z-axis). For example, when the second platform 12 is displaced relative to the first platform 11, a plurality of locking points on the second platform 12 move synchronously relative to the first platform 11. In some embodiments, a plurality of safety locking modules 15 can have the same limit stroke (e.g., the distance that the top plate 151 and / or the limit rod 152 are allowed to move toward the bottom plate 153). At this time, a plurality of locking points on the second platform 12 are simultaneously limited by the safety locking modules 15, so that the second platform 12 is parallel to the first platform 11 at the maximum displacement (i.e., the closest distance between the second platform 12 and the first platform 11).

[0151] In some embodiments, the plurality of safety lock modules 15 may also limit the rotation of the second platform 12 relative to the first platform 11 (e.g., rotation in the Rx direction and / or the Ry direction). For example, when the second platform 12 rotates relative to the first platform 11, a plurality of lock points on the second platform 12 move asynchronously relative to the first platform 11. In some embodiments, the plurality of safety lock modules 15 may have the same limit stroke (e.g., the distance that allows the top plate 151 and / or the limit rod 152 to move toward the bottom plate 153), at which time one or more of the plurality of lock points on the second platform 12 are first limited by the corresponding safety lock module 15, and the remaining lock points are respectively limited by the corresponding safety lock module 15, so that the second platform 12 can finally be in a parallel state with the first platform 11 at the maximum displacement. In other embodiments, the plurality of safety lock modules 15 may also have different limit strokes, so that the second platform 12 can finally be in a predetermined posture at the maximum displacement.

[0152] By analogy, the plurality of safety locking modules 15 can further limit the composite movement of displacement and rotation of the second platform 12 relative to the first platform 11 .

[0153] In one or more embodiments of the present specification, the locking and limiting assembly 154 includes an adjusting nut 1541 and a locking and fixing member 1542. The adjusting nut 1541 is sleeved outside the limiting rod 152 and can slide relative to the limiting rod 152. The locking and fixing member 1542 is fixedly connected to the base 153. The locking and fixing member 1542 is sleeved outside the limiting rod 152 and the adjusting nut 1541. The adjusting nut 1541 can move and fix relative to the locking and fixing member 1542. In some embodiments, the adjusting nut 1541 is kept stationary in the y-axis direction and the x-axis direction relative to the base 153 through the locking and fixing member 1542. There is a gap between the outer periphery of the limiting rod 152 and the inner wall of the adjusting nut 1541. The adjusting nut 1541 can limit the displacement of the limiting rod 152 in the y-axis direction and the x-axis direction, thereby limiting the displacement of the second platform 12 relative to the first platform 11 in the y-axis direction and the x-axis direction. The adjusting nut 1541 can also limit the displacement of the top plate 151 and / or the limiting rod 152 toward the base 153 in the z-axis direction, thereby limiting the displacement of the second platform 12 relative to the first platform 11 in the z-axis direction toward the first platform 11. In some embodiments, by adjusting the position of the adjusting nut 1541 relative to the locking and fixing member 1542, the maximum travel of the second platform 12 relative to the first platform 11 in the z-axis direction toward the first platform 11 can be adjusted.

[0154] In some embodiments, the adjusting nut 1541 can be threadedly connected with the locking and fixing member 1542, and the adjusting nut 1541 can be rotated to move the adjusting nut 1541 relative to the locking and fixing member 1542 in the z-axis direction, and the adjusting nut 1541 can be kept stationary to be stationary relative to the locking and fixing member 1542 in the z-axis direction. In some embodiments, the threaded connection between the adjusting nut 1541 and the locking and fixing member 1542 provides stable height adjustment, and when the adjusting nut 1541 is screwed to any position of the locking and fixing member 1542, it can be temporarily fixed at that position by means of threaded connection, without the need for an additional locking structure, and is easy to adjust.

[0155] In some embodiments, the locking and limiting assembly 154 further includes a buffer pad 1543, which is disposed on the locking and fixing member 1542, and the top plate 151 can abut against the adjusting nut 1541 and / or the buffer pad 1543. In some embodiments, the adjusting nut 1541 can be raised by rotation and protrude from the buffer pad 1543. At this time, when the second platform 12 is subjected to the impact force and the top plate 151 moves downward, it can directly abut against the adjusting nut 1541 to achieve rigid limiting. In other embodiments, the adjusting nut 1541 can be rotated to a position flush with the buffer pad 1543, and at this time, the top plate 151 can abut against the adjusting nut 1541 and the buffer pad 1543 at the same time. In some other embodiments, the adjusting nut 1541 can be rotated to a position where the buffer pad 1543 protrudes from the adjusting nut 1541. At this time, when the second platform 12 is subjected to an impact force and carries the top plate 151 downward, it can resist against the buffer pad 1543, and absorb the impact force through the buffer pad 1543. When the buffer pad 1543 cannot completely absorb the impact force, the buffer pad 1543 is further compressed and resists against the adjusting nut 1541, thereby achieving rigid limiting after energy absorption.

[0156] In some embodiments, see Fig.13 As shown, the thickness of the buffer pad 1543 can be greater than the thickness of the adjusting nut boss 15410 of the adjusting nut 1541, so as to allow the top plate 151 to first contact the buffer pad 1543 in some cases, absorb part of the impact force, and then press against the adjusting nut 1541 for rigid limitation, so as to prevent the impact force of the second platform 12 from being directly transmitted to the first platform 11 through the adjusting nut 1541, the locking and fixing component 1542 and the base 153, causing damage to the components.

[0157] In one or more embodiments of the present specification, the adjusting nut 1541 has an adjusting nut boss 15410, and the adjusting nut boss 15410 has a first limiting surface 91 facing the top plate 151 (for example, the upper surface of the adjusting nut boss 15410), and when the second platform 12 carries the top plate 151 to move downward, it can contact the first limiting surface 91 of the adjusting nut boss 15410, and the first limiting surface 91 is used to limit the movement of the top plate 151 toward the base 153.

[0158] Since the bottom plate 153 and the locking member 1542 are fixedly arranged relative to the first platform 11, the displacement of the adjusting nut 1541 in the z-axis direction can adjust the maximum distance between the first limiting surface 91 and the upper surface of the first platform 11, thereby adjusting the movement limit position of the second platform 12. Fig.12 , Fig.13As shown, when the adjusting nut 1541 rises, the range in which the second platform 12 and the top plate 151 can move toward the first platform 11 is reduced; when the adjusting nut 1541 falls, the range in which the second platform 12 and the top plate 151 can move toward the first platform 11 is increased. In some embodiments, the adjusting nut 1541 can be further raised to the maximum limit position against the top plate 151, at which time the range of the movement limit position of the second platform 12 is zero, that is, the second platform 12 cannot move downward toward the first platform 11, achieving the effect of rigidly fixing the second platform 12 to the first platform 11, so that the second platform 12 can remain fixed relative to the first platform 11 without vibration or shaking during transportation.

[0159] In some embodiments, the adjusting nut boss 15410 further comprises a second limiting surface 92 (e.g., the lower surface of the adjusting nut boss 15410) facing the locking and fixing member 1542, and the second limiting surface 92 is used to limit the position of the adjusting nut boss 1541 relative to the locking and fixing member 1542. Fig.13 As shown, the outer diameter of the adjusting nut boss 15410 is larger than the inner diameter of the locking and fixing member 1542, so that the second limiting surface 92 can abut against the surface of the locking and fixing member 1542 facing the second platform 12 (for example, a part of the upper end surface of the locking and fixing member 1542), thereby limiting the lowermost extreme position of the adjusting nut 1541.

[0160] In some embodiments, the outer diameter of the adjusting nut boss 15410 is smaller than the outer diameter of the locking and fixing member 1542, so as to reserve space for setting the buffer pad 1543 on the surface of the locking and fixing member 1542 facing the second platform 12. In some embodiments, the buffer pad 1543 is arranged around the adjusting nut boss 15410. In some embodiments, the number of the buffer pad 1543 can be one or more, and the buffer pad 1543 can be annular, semi-annular, C-shaped, etc. In some embodiments, the number of the buffer pad 1543 can be multiple, and the multiple buffer pads 1543 are arranged in a ring. In some embodiments, the buffer pad 1543 can be a polyurethane cushion, or it can be rubber, silicone, etc.

[0161] In one or more embodiments of this specification, see Fig.12 , Fig.13As shown, the other end of the limiting rod 152 is provided with a limiting rod head 1520, and the limiting rod head 1520 is provided with a third limiting surface 93 (for example, the upper surface of the limiting rod head 1520) facing the locking and fixing member 1542, and the third limiting surface 93 is used to prevent the limiting rod 152 from being separated from the base 153. In some embodiments, the third limiting surface 93 cooperates with the locking and fixing member 1542 to prevent the limiting rod 152 from being separated from the base 153. Exemplarily, the inner diameter of the locking and fixing member 1542 is smaller than the outer diameter of the third limiting surface 93, and when the limiting rod 152 is facing the locking and fixing member 1542, the locking and fixing member 1542 is locked. Fig.13 When the third limiting surface 93 moves upward in the middle, the upper surface of the third limiting surface 93 cannot be separated from the base 153 because it is against the lower surface of the locking and fixing member 1542. In some embodiments, the base 153 and the locking and fixing member 1542 form a limiting rod head accommodating space for accommodating the limiting rod head 1520. For example, a limiting rod groove for accommodating the limiting rod head 1520 is provided on the base 153, and there is a gap between the outer periphery of the limiting rod head 1520 and the side wall of the limiting rod groove. The surface of the locking and fixing member 1542 and the limiting rod groove are surrounded to form the limiting rod head accommodating space. The limiting rod head 1520 can be moved in the y-axis direction ( Fig.13 The left and right directions in the x-axis direction ( Fig.13 in the anterior-posterior direction) and / or in the z-axis direction ( Fig.13 The base 153 and the locking and fixing member 1542 can move within a certain range in the up and down directions (in the vertical direction) and cannot escape from the accommodating space of the limit rod head, thereby realizing the limitation of the limit rod 152 in the above three directions by the base 153 and the locking and fixing member 1542.

[0162] In some embodiments, the gap between the limiting rod 152 and the adjusting nut 1541, and the gap between the outer periphery of the limiting rod head 1520 and the inner wall of the base 153 can be 1-3 mm, for example, 1.5-2.5 mm. Exemplarily, the gap between the limiting rod 152 and the adjusting nut 1541, or the gap between the outer periphery of the limiting rod head 1520 and the inner wall of the base 153 can be 1 mm, 1.2 mm, 1.4 mm, 1.5 mm, 1.68 mm, 2 mm, 2.75 mm, 3 mm.

[0163] In some embodiments, when the limiting rod 152 is displaced in the x-axis direction or the y-axis direction due to the impact force of the second platform 12, the limiting rod 152 may first be limited by the adjusting nut 1541 on the limiting rod portion of the limiting rod 152 in the x-axis direction and the y-axis direction, and then limited by the base 153 on the limiting rod head 1520 of the limiting rod 152 in the x-axis direction and the y-axis direction, or vice versa. In some embodiments, the gap between the limiting rod 152 and the adjusting nut 1541, and the gap between the limiting rod head 1520 and the base 153 may be adjusted to adjust the above-mentioned sequential limiting relationship. In some embodiments, the component that first limits the limiting rod 152 is prone to deformation or loosening due to frequent impacts, and by arranging the above-mentioned sequential limiting relationship, the component that is easy to replace can be adjusted according to actual needs, and based on this, it is determined whether the component needs to be replaced, and at the same time, when one of the two components fails, the other can still maintain work (redundant design). For example, when the adjusting nut 1541 is first impacted by the limiting rod 152 and the base 153 is then impacted by the limiting rod 152, it can be considered that when the base 153 is impacted by the limiting rod 152, the adjusting nut 1541 may be deformed, loosened or damaged. At this time, the adjusting nut 1541 can be replaced to maintain the stability of the mechanism.

[0164] In other embodiments, the limiting rod 152 may also be limited by the adjusting nut 1541 and the base 153 at the same time to increase the limiting area and reduce the pressure generated by the impact force.

[0165] In some embodiments, the limit rod head 1520 further has a fourth limit surface 94 facing the base 153, and the fourth limit surface 94 is used to limit the movement of the top plate 151 toward the base 153, thereby limiting the displacement of the limit rod 152 in the z-axis direction through the base 153.

[0166] In some embodiments, when the limiting rod 152 is displaced in the z-axis direction due to the impact force of the second platform 12, the limiting rod 152 may first be limited in the z-axis direction by the buffer pad 1543 and the adjusting nut 1541, and then limited in the z-axis direction by the base 153, or vice versa. Based on the redundant design principle similar to the above, the deformed, loose or damaged components can be replaced in time while maintaining the stability of the mechanism.

[0167] In other embodiments, the limiting rod 152 may also be limited by the buffer pad 1543 and the base 153 at the same time, or by the adjusting nut 1541 and the base 153 at the same time, or by the buffer pad 1543, the adjusting nut 1541 and the base 153 at the same time, so as to increase the limiting area and reduce the pressure generated by the impact force.

[0168] In some embodiments, the shock absorber 13 and the buffering limit module 14 can buffer the second platform 12 to prevent damage caused by always rigidly limiting the second platform 12. In some embodiments, the shock absorber 13 and the buffering limit module 14 absorb part or all of the impact force of the second platform 12. The shock absorber 13 is the first level of protection, which performs vertical shock absorption and absorbs part or all of the impact force of the second platform 12; the buffering limit module 14 is the second level of protection, which performs buffering and limiting in the movement direction of the motion mechanism, which is a flexible limit protection; when the shock absorber 13 and the buffering limit module 14 cannot absorb all the impact force, the safety lock module 15 works as the last level of limit protection, realizing limit protection in the vertical direction (i.e., the axial direction of the safety lock module 15, or the z-axis direction) and the first and second directions in the plane (i.e., the radial direction of the safety lock module 15, or the x-axis direction and the y-axis direction), which is a rigid limit. When the second platform 12 has an impact and slip tendency during high-acceleration movement, the safety locking module 15 can also prevent the tabletop of the second platform 12 from tipping over.

[0169] In one or more embodiments of the present specification, a test bench measurement method is provided, which is applicable to the above-mentioned test bench. The measurement method includes one or more of an alignment measurement method, a slip measurement method, and a surface measurement method.

[0170] In one or more embodiments of the present specification, the alignment measurement method includes: the loading and unloading auxiliary transmission module 4 moves the material adjustment module 3 carrying the material to the first detection station, adjusts the material to a preset global reference position based on the first position obtained by the first detection module 5, and transfers the material to the material adsorption device 22.

[0171] In some embodiments, the alignment measurement method may specifically include: the material adjustment module 3 is in the initial position, the material is placed on the adjustment platform 32 of the material adjustment module 3, the third linear drive device 45 of the loading and unloading auxiliary transmission module 4 drives the adjustment base 31 of the material adjustment module 3 to carry the adjustment platform 32 and the material along the air flotation guide rail assembly 41 to the first detection station, and the material is adjusted to a preset global reference position based on the first position obtained by the first detection module 5. The first linear drive device 25 of the motion module 2 drives the platform base 253 and the platform 21 and the material adsorption device 22 located thereon to move along the first guide module 250 to the first detection station, and transfers the material from the adjustment platform 32 to the material adsorption device 22 and implements adsorption positioning on the material.

[0172] In some embodiments, adjusting the material to a preset global reference position may include: adjusting the planar movement of the material in the y-axis direction through the same-direction action (driving in the same direction) of two linear adjustment motion components 33 arranged along the y-axis direction, adjusting the planar movement of the material in the x-axis direction through a linear adjustment motion component 33 arranged along the x-axis direction, and / or adjusting the planar rotation of the material in the Rz direction through the different-direction action (driving in opposite directions) of two linear adjustment motion components 33 arranged along the y-axis direction to adjust the posture of the material, so that the material is finally in the preset global reference position.

[0173] In some embodiments, transferring the material from the adjustment platform 32 to the material adsorption device 22 and adsorbing and positioning the material may include: adjusting the position of the material on the material adsorption device 22 in the z-axis direction, the rotation angles in the Rx direction and the Ry direction through the platform 21, so that the material adsorption device 22 is pre-placed in the same global reference position as the adjustment platform 32, transferring the material from the adjustment platform 32 to the material adsorption device 22, and adsorbing and positioning the material.

[0174] In one or more embodiments of the present specification, the slip measurement method includes: the motion module 2 moves the material, and based on the second position of the material before the movement and the third position of the material after the movement obtained by the second detection module 6, the slip amount of the material is obtained.

[0175] In some embodiments, the slip measurement method may specifically include: the first linear drive device 25 of the motion module 2 drives the carrier base 253 and the carrier 21, the material adsorption device 22 and the material thereon to move along the first guide module 250 to the second detection station, the second detection module 6 obtains the current position of the material as the second position, the motion module 2 moves with the material, the first linear drive device 25 of the motion module 2 drives the carrier base 253 and the carrier 21, the material adsorption device 22 and the material thereon to move along the first guide module 250 back to the second detection station, and the second detection module 6 obtains the current position of the material as the third position. In some embodiments, the slip measurement method may also specifically include: obtaining the slip amount of the material based on the second position and the third position.

[0176] In some embodiments, the motion module 2 carries the material to perform uniform motion, accelerated motion, or high-accelerated motion.

[0177] In some embodiments, when the motion module 2 is moving with the material, the in-position locking device 23 provides positive pressure to achieve air floating support to avoid interference with the movement of the motion module 2 .

[0178] In some embodiments, the movement of the motion module 2 carrying the material may include: the first linear drive device 25 of the motion module 2 drives the carrier base 253 and the carrier 21, the material adsorption device 22 and the material thereon to move along the first guide module 250, and at the same time, the second linear drive device 26 of the motion module 2 drives the two balancing mass blocks 24 to move along the second guide module 260, and the movement direction of the balancing mass blocks 24 is opposite to the movement direction of the material, so that the overall center of mass position of the motion module 2 remains unchanged, thereby reducing or even avoiding the impact of the movement of the motion module 2 on the platform module 1.

[0179] In some embodiments, the second position and the third position may include: the position of one or more marks on the carrier 21 , the position of one or more marks on the material, and the position of one or more marks on the material adsorption device 22 .

[0180] In one or more embodiments of the present specification, the surface shape measurement method includes: the motion module 2 moves the material, obtains a first surface shape of the material before the movement and a second surface shape of the material after the movement, and obtains a surface shape change of the material.

[0181] In some embodiments, the movement of the material carried by the motion module 2 in the surface measurement method is similar to the movement of the material carried by the motion module 2 in the slip measurement method, and thus will not be described in detail.

[0182] In some embodiments, the first surface shape of the material before the movement and the second surface shape of the material after the movement are obtained by the third detection module 7 to obtain the surface shape change of the material.

[0183] In some embodiments, before the third detection module 7 obtains the first surface shape or the second surface shape, the in-position locking device 23 provides negative pressure adsorption to enable the carrier 21 to be locked relative to the platform module 1, such as the second platform 12, to obtain stable surface shape data.

[0184] The basic concepts have been described above. Obviously, for those skilled in the art, the above detailed disclosure is only for example and does not constitute a limitation of this specification. Although not explicitly stated here, those skilled in the art may make various modifications, improvements and corrections to this specification. Such modifications, improvements and corrections are taught in this specification, so such modifications, improvements and corrections still belong to the spirit and scope of the exemplary embodiments of this specification.

Claims

1. A test bench, characterized in that: include: Platform module; A motion module, disposed on the platform module, for receiving materials and moving the materials, the motion module comprising a carrier that can move along a first direction on the platform module and is located at a first detection station or a second detection station, and a material adsorption device connected to the carrier for carrying materials; A material adjustment module, provided on the platform module, for receiving materials and adjusting the position of the materials; A material loading and unloading auxiliary transmission module, provided on the platform module, for enabling the material adjustment module to move on the platform module and be located at the first detection station; A first detection module, disposed at the first detection station, capable of moving in a vertical direction perpendicular to the first direction, for obtaining a first position of the material in the material adjustment module; A second detection module, disposed at the second detection station, capable of moving along the vertical direction, for obtaining a second position of the material before the material adsorption device moves the material and / or a third position of the material after the movement module moves the material; The motion module further comprises: a locking device for locking the carrier and the material adsorption device on the platform module by negative pressure; The in-place locking device comprises: a fixed block, a flexible member, an adsorption block and a preload mechanism; The fixed block is fixedly connected to the carrier; The flexible member flexibly connects the fixing block and the adsorption block; The adsorption block has one or more negative pressure areas for providing negative pressure on a side facing away from the fixed block, and the adsorption block can be adsorbed on the platform module; The preload mechanism is connected to the fixed block and extends toward the adsorption block, and is used to apply a preload force to the adsorption block; The preload mechanism comprises: a preload elastic member, a first pressing plate and a second pressing plate, wherein the first pressing plate is fixedly connected to the fixed block, the second pressing plate directly or indirectly abuts against the adsorption block, one end of the preload elastic member abuts against the first pressing plate, and the other end of the preload elastic member abuts against the second pressing plate; Alternatively, the preloading mechanism comprises: a preloading cylinder, one of the cylinder body and the piston of the preloading cylinder is fixedly connected to the fixed block, and the other of the cylinder body and the piston of the preloading cylinder is directly or indirectly in contact with the adsorption block.

2. The test bench according to claim 1, characterized in that: The motion module also includes: A first linear driving device, the first linear driving device is used to drive the stage to move along the first direction; The first guide module extends in the first direction and is used for guiding the carrier.

3. The test bench according to claim 1, characterized in that: The motion module also includes: Two balancing masses are respectively arranged on both sides of the carrier, and the two balancing masses are arranged along a second direction intersecting with the first direction; A first linear drive device installed between the balancing mass block and the carrier, the first linear drive device is used to drive the carrier to move along the first direction; A second linear drive device is installed between the platform module and the balancing mass block, and the second linear drive device is used to drive the balancing mass block to move along the first direction. The movement direction of the two balancing mass blocks is opposite to the movement direction of the carrier.

4. The test bench according to claim 3, characterized in that: The motion module also includes: A first guide module extending in the first direction, used for guiding the carrier; The two second guide modules extending in the first direction are respectively used to guide the two balancing mass blocks.

5. The test bench according to claim 3 or 4, characterized in that: The balancing mass block comprises a first block and a second block, the first block is connected to the first linear drive device, and the second block is connected to the second linear drive device; Wherein, the first block and the second block are connected via one or more flexible connectors.

6. The test bench according to claim 1, characterized in that: The fixing block comprises: an annular portion, the middle portion of which forms an accommodating space for accommodating the preload mechanism; an outer boss extending outwardly along the outer edge of the annular portion, the outer boss being fixedly connected to the flexible member; and an inner boss extending inwardly along the inner edge of the annular portion, the inner boss being used to install the preload mechanism; The flexible member is a flexible sheet; the flexible sheet has a first area fixedly connected to the fixed block and a second area fixedly connected to the adsorption block; at least a portion of the second area can undergo elastic deformation relative to the plane where the first area is located; there is a gap between the second area of ​​the flexible sheet and the fixed block to provide space for at least a portion of the second area to undergo elastic deformation.

7. The test bench according to claim 1, characterized in that: The material adjustment module comprises: an adjustment base, an adjustment platform which is arranged on the adjustment base in an air-floating manner, and a linear adjustment motion system which drives the adjustment platform to realize planar movement or rotation relative to the adjustment base; The linear adjustment motion system includes at least two groups of linear adjustment motion components arranged on the adjustment platform along the first direction and at least one group of linear adjustment motion components arranged on the adjustment platform along a second direction intersecting the first direction.

8. The test bench according to claim 1, characterized in that: The loading and unloading auxiliary transmission module comprises: an air-floating guide rail assembly, wherein the air-floating guide rail assembly comprises a vertical air-floating mating surface and two oppositely arranged lateral air-floating mating surfaces; The adjustment base of the material adjustment module can be arranged on the vertical air-floating matching surface of the air-floating guide rail assembly in an air-floating supported manner; The adjustment base of the material adjustment module is also connected to a first air floating cushion and a second air floating cushion, and the first air floating cushion and the second air floating cushion are respectively supported by air floating on the two lateral air floating matching surfaces; One of the first air floating pad and the second air floating pad is a rigid air floating pad, and the other of the first air floating pad and the second air floating pad is a flexible air floating pad.

9. The test bench according to claim 1, characterized in that: The loading and unloading auxiliary transmission module comprises: a third linear driving device, used to drive the material adjustment module to move along the first direction, and the third linear driving device is located on both sides of the first linear driving device used to drive the carrier to move along the first direction; The third guide module extending in the first direction is used to guide the material adjustment module.

10. The test bench according to claim 1 or 3, characterized in that: The platform module includes: First platform; A second platform is arranged above the first platform, and the movement module, the material adjustment module, and the loading and unloading auxiliary transmission module are arranged on the second platform; a shock absorber, connected to the first platform and the second platform, and used to absorb the impact force of the second platform in the vertical direction; a buffer limit module, connecting the first platform and the second platform, and used to absorb the impact force of the second platform in the first direction and / or the second direction, wherein the first direction and the second direction are located in the same plane, and the first direction intersects with the second direction; A safety locking module connects the first platform and the second platform, and is used at least to rigidly limit the second platform in the vertical direction perpendicular to the first direction and the second direction, the first direction and / or the second direction.

11. The test bench according to claim 10, characterized in that: The safety lock module includes a top plate, a limit rod, a base and a lock limit assembly; The top plate is fixedly connected to the second platform, and the base is fixedly connected to the first platform; One end of the limiting rod is fixedly connected to the top plate; The other end of the limiting rod is movably arranged on the base; The locking and limiting assembly is sleeved outside the limiting rod and is used to limit the movement of the top plate and / or the limiting rod relative to the base; The locking and limiting assembly includes an adjusting nut and a locking and fixing member; The adjusting nut is sleeved outside the limiting rod and can slide relative to the limiting rod; The locking and fixing member is fixedly connected to the base, and the locking and fixing member is sleeved outside the limiting rod and the adjusting nut, and the adjusting nut can move and be fixed relative to the locking and fixing member; The locking and limiting assembly also includes a buffer pad, which is arranged on the locking and fixing component, and the top plate can abut against the adjusting nut and / or the buffer pad.

12. The test bench according to claim 1, characterized in that: Also includes: The third detection module is used to obtain the surface shape of the material.

13. A measuring method for a test bench, characterized in that: Applicable to the test bench according to any one of claims 1 to 12, wherein the measurement method comprises one or more of an alignment measurement method, a slip measurement method, and a surface measurement method: The alignment measurement method comprises: the loading and unloading auxiliary transmission module causes the material adjustment module carrying the material to move to the first detection station, adjusts the material to a preset global reference position based on the first position obtained by the first detection module, and transfers the material to the material adsorption device; The slippage measurement method comprises: the movement module moves the material, and based on the second position of the material before the movement and the third position of the material after the movement obtained by the second detection module, the slippage amount of the material is obtained; The surface shape measurement method comprises: the motion module moves the material, a first surface shape of the material before the movement and a second surface shape of the material after the movement are acquired, and a surface shape change of the material is obtained.

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