Detection equipment and method based on solid-state spinning color center

Abstract

The invention provides detection equipment and method based on a solid-state spinning color center. The detection equipment comprises a probe, a laser source, a fluorescence detection device, a control mechanism and a signal processing module. The probe comprises a solid-state spinning color center and is opposite to a to-be-detected surface; the laser source is used for generating laser, the laser passes through the probe along a transmission path and irradiates a to-be-measured surface, and part of light reflected by the to-be-measured surface is transmitted to the probe; the control mechanism is used for controlling the relative movement between the probe and the to-be-detected surface, so that the probe faces different detection positions on the to-be-detected surface; and the signal processing module is used for collecting the fluorescence electric signal, converting the fluorescence electric signal into image data, and integrating the image data at different detection positions into a distribution diagram representing fluorescence intensity. According to the distribution diagram, micron-scale or nano-scale nondestructive detection diagnosis can be realized, laser reflection can be applied to various materials, the detection application range is expanded, the structure is simple, and the convenience is high.

Description

Technical Field

[0001] The present invention relates to the field of quantum nondestructive testing, and in particular to a testing device and method based on solid-state spin color centers. Background Art

[0002] Nondestructive testing technology refers to the detection of defects or unevenness on the surface or inside of a material without damaging its internal structure and chemical properties. It can provide reliability assessment for the safe use of in-service equipment or materials while ensuring product quality. Common nondestructive testing methods include ultrasonic detection, machine vision detection, magnetic particle detection, etc. The shortcomings of these detection methods are that they cannot achieve high-precision detection purposes, such as nondestructive testing of micron-level or even nano-level defects.

[0003] Quantum precision measurement technology has been applied in nondestructive detection in recent years due to its micro / nano-level spatial resolution and extremely high sensitivity. For example, for the detection of ferromagnetic structures such as pipelines and rails, the photoluminescence effect is used to detect magnetic leakage of defects by using the interaction between solid-state spin centers and magnetic fields. However, this method requires the ferromagnetic material to be magnetized first. The introduction of magnetization equipment increases the complexity of the operation and is not applicable to materials that cannot be magnetized. How to improve the wide applicability and convenience of quantum nondestructive testing has become a problem that needs to be solved. Summary of the invention

[0004] In view of the shortcomings of the prior art described above, the purpose of the present invention is to provide a detection device and method based on solid-state spin color centers, which is used to solve the problem that quantum non-destructive testing in the prior art is only applicable to ferromagnetic materials, has a narrow scope of application, requires magnetization of ferromagnetic materials, and has poor convenience.

[0005] To achieve the above-mentioned and other related purposes, the present invention provides a detection device based on solid-state spin color centers, comprising: A probe, including a solid spin color center, facing the surface to be measured; A laser source is used to generate laser light and irradiate the laser light to the probe. The laser light passes through the probe and irradiates the surface to be measured. Part of the light reflected by the surface to be measured is then irradiated to the probe. The laser light is used to excite the solid-state spin color center to generate fluorescence. A fluorescence detection device, used to detect the fluorescence generated by the probe and output a fluorescence electrical signal; A control mechanism, used to control the relative movement between the probe and the surface to be measured, so that the probe faces different detection positions on the surface to be measured; The signal processing module is used to collect fluorescent electrical signals, convert them into image data, and then collect the image data at different detection positions into one image to form a distribution diagram representing the fluorescence intensity.

[0006] Furthermore, the image data is a color value or a grayscale value. In the signal processing module, the collected fluorescent electrical signal is converted into a color value or a grayscale value by setting a relationship between the fluorescent electrical signal and the color value or the grayscale value.

[0007] Furthermore, it also includes a camera for shooting videos of different detection positions on the surface to be tested being faced with the probe; the signal processing module is also used to collect multiple video frames of the video and splice the multiple video frames to obtain an area map consisting of all the detection positions on the surface to be tested.

[0008] Furthermore, the signal processing module also obtains defect points from the distribution map, and determines the positions of the defect points on the surface to be tested by comparing them with the area map.

[0009] Furthermore, the fluorescence detection device detects fluorescence from the laser irradiation side and also includes at least one optical element for separating and guiding the laser and the light from the probe, guiding the laser to be transmitted to the probe, and guiding the light from the probe to be transmitted to the fluorescence detection device.

[0010] Furthermore, it also includes a microwave module for radiating microwaves to the probe.

[0011] Furthermore, when performing detection, the frequency of microwaves radiated to the probe is a fixed value. By performing ODMR measurement of microwave sweep on the probe before detection, and drawing the ODMR spectrum by the signal processing module, the resonant frequency point on the spectrum or the microwave frequency corresponding to the maximum value of the spectrum slope on one side of any resonance peak is selected as the fixed frequency point.

[0012] Furthermore, a bias magnetic field module is included, which is used to apply a bias magnetic field to the probe.

[0013] Furthermore, the solid-state spin color center is one of a diamond nitrogen vacancy color center, a diamond germanium vacancy color center, a diamond silicon vacancy color center, a silicon carbide divacancy color center, a silicon carbide silicon vacancy color center, and a hexagonal boron nitride boron vacancy color center.

[0014] To achieve the above-mentioned and other related purposes, the present invention also provides a detection method based on solid-state spin color centers, comprising: A probe containing a solid spin color center is pointed toward the surface to be measured, and a laser is irradiated to the probe. The laser passes through the probe and then irradiates the surface to be measured. Part of the light reflected by the surface to be measured is then irradiated to the probe, or microwaves are radiated to the probe, and the fluorescence generated by the probe is collected to obtain a fluorescent electrical signal. The relative movement between the probe and the surface to be tested is controlled so that the probe points to different detection positions on the surface to be tested, and fluorescent electrical signals at multiple detection positions are obtained. The fluorescent electrical signals are converted into image data, and the image data at different detection positions are collected in one picture to form a distribution diagram representing the fluorescence intensity.

[0015] As described above, the detection device and method based on solid-state spin color centers of the present invention have the following beneficial effects: By applying the laser reflected by the surface to be tested to the solid spin color center, and based on the principle that the color center produces changing fluorescence in response to the change of laser intensity, the surface to be tested is scanned and detected. The collected fluorescent electrical signal is processed and converted into image data, and the image data at different detection positions are collected in one image to form a distribution map representing the fluorescence intensity for non-destructive testing diagnosis. While realizing micron or nanometer-level defect diagnosis, laser reflection can be applied to a variety of materials, expanding the scope of application of quantum non-destructive testing, and the structure is simple and convenient.

[0016] By setting up a camera to capture videos of the surface to be tested facing the probe at different detection positions, and using video frame stitching technology to form area maps of different detection positions, and establishing a corresponding relationship between the distribution map and the area map, defect location can be further achieved. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1 Shown is a schematic diagram of the structure of the detection device of the present invention; Figure 2 It is a schematic structural diagram of an embodiment of a detection device of the present invention; Figure 3 The display is a distribution diagram representing the fluorescence intensity formed by combining the fluorescence electrical signals of different detection positions in one diagram of the present invention; Figure 4 Displayed is a regional map formed by different detection positions obtained after splicing the video frames according to the present invention; Figure 5 It is a schematic structural diagram of another embodiment of the detection device of the present invention; Figure 6 The ODMR spectrum shows eight resonance peaks of diamond nitrogen vacancy color centers; Figure 7 Shown is a schematic diagram of cutting a video frame according to the present invention; Figure 8 Shown is a schematic diagram of non-detection position shearing after image stitching according to the present invention.

[0018] Component number explanation: 1—probe; 2—laser source; 3—fluorescence detection device; 31—filter; 32—photodetector; 4—control mechanism; 5—signal processing module; 6—optical circulator; 7—microwave module; 71—microwave source; 72—microwave amplifier; 73—microwave circulator; 74—microwave antenna; 8—bias magnetic field module; 9—camera; 100—surface to be measured; 200—optical fiber. DETAILED DESCRIPTION

[0019] The following describes the embodiments of the present invention by specific examples, and those skilled in the art can easily understand other advantages and effects of the present invention from the contents disclosed in this specification. The present invention can also be implemented or applied through other different specific embodiments, and the details in this specification can also be modified or changed in various ways based on different viewpoints and applications without departing from the spirit of the present invention. It should be noted that the following embodiments and features in the embodiments can be combined with each other without conflict.

[0020] It should be noted that the illustrations provided in the following embodiments are only used to illustrate the basic concept of the present invention in a schematic manner, and thus the illustrations only show components related to the present invention rather than being drawn according to the number, shape and size of components in actual implementation. In actual implementation, the type, quantity and proportion of each component may be changed arbitrarily, and the component layout may also be more complicated.

[0021] Embodiment 1: Figure 1 As shown, this embodiment provides a detection device based on solid-state spin color centers, including: a probe 1, a laser source 2, a fluorescence detection device 3, a control mechanism 4, and a signal processing module 5.

[0022] Wherein, the probe 1 comprises a solid spin color center. In this embodiment, the solid spin color center is a diamond nitrogen vacancy color center. The probe 1 is a diamond structure containing a nitrogen vacancy color center, and the size can be selected from the micrometer or nanometer level. Other color centers can also be selected, such as a diamond germanium vacancy color center, a diamond silicon vacancy color center, a silicon carbide divacancy color center, a silicon carbide silicon vacancy color center, or a hexagonal boron nitride boron vacancy color center. Since the detection is realized based on the photoluminescence effect of the solid spin color center, the solid spin color center will generate fluorescence under the irradiation of the laser. Different solid spin color centers may have different wavelengths of excitation light. For example, for diamond nitrogen vacancy color centers and hexagonal boron nitride boron vacancy color centers, a 532nm green laser is generally used; a 900-940nm laser is used for a silicon carbide divacancy color center, and other color centers can be excited by corresponding lasers.

[0023] The probe 1 faces the surface to be tested 100. Under the control of the control mechanism 4, the probe 1 and the surface to be tested 100 move relative to each other so that the probe faces different detection positions on the surface to be tested. In this embodiment, the probe 1 scans point by point along the surface to be tested to obtain the measurement results of the entire surface or a partial area. Figure 2As shown, the control mechanism 4 controls the movement of the surface to be tested 100, so that the probe scans point by point on the surface to be tested, and can scan line by line along the line, and the fluorescent electrical signal of each scanning point can be obtained after scanning. The control mechanism 4 uses a precision adjustment instrument, which can achieve micro / nano-level adjustment steps to finely adjust the probe 1 to different detection positions on the surface to be tested 100.

[0024] The laser light generated by the laser source 2 is irradiated to the probe 1 along the transmission path, and then irradiated on the surface to be measured 100 after passing through the probe 1. Part of the light reflected by the surface to be measured 100 is then irradiated to the probe 1. The reflection of the laser can be divided into specular reflection and diffuse reflection. For a smooth surface to be measured, specular reflection will occur, and for a rough surface, diffuse reflection will occur. For the same plane, the reflection situation is the same. For example, for a position where there is a crack or the roughness changes, the reflection of the light will change, and the light reflected to the probe will also change, causing the intensity of the laser light received by the probe to change. Since the intensity of the laser affects the polarization of the color center and the rate of generating fluorescent photons, within a certain intensity range, the fluorescence intensity increases with the increase of the laser intensity. Based on this principle, by detecting the fluorescence, the fluorescence corresponding to each detection position on the surface to be measured is obtained, and it is combined into a distribution map to realize the judgment of defects.

[0025] The fluorescence detection device 3 includes a filter 31 and a photodetector 32. The light from the probe 1 is filtered out by the filter 31 to remove the fluorescence, and then collected by the photodetector 32, which converts the received fluorescence into an electrical signal.

[0026] The signal processing module 5 is used to collect the fluorescent electrical signal, and after converting it into image data, the image data at different detection positions are collected in one picture to form a distribution diagram representing the fluorescence intensity. Among them, the image data can be in the form of color values ​​or gray values. By setting the relationship between the fluorescent electrical signal and the color value or gray value, the fluorescent electrical signal is converted into the color value or gray value. For example, the HSL color mode is adopted, and the saturation S and brightness L in HSL are set to fixed values, and the corresponding relationship between the hue H and the fluorescent electrical signal (here, the voltage value) is established. After obtaining the measurement results, the color value of each detection position can be obtained by conversion according to this relationship. Collected in one picture, it can be used to represent the distribution of fluorescence intensity. Of course, the color value can also adopt other modes such as RGB. Figure 3 The grayscale value is used as the image data, and the grayscale value is used to represent the fluorescence intensity. The distribution diagram is obtained. It can be seen from the figure that the grayscale value of some areas is different from that of other areas, indicating that there are cracks or the roughness has changed. Figure 4 The area map obtained by shooting the detection position and stitching the images is shown in Figure 4The signal processing module 5 may include an analog circuit and a host computer, wherein the analog circuit collects the fluorescent electrical signal, and the host computer realizes the data processing and the display function of the distribution diagram through programming.

[0027] It can be seen that this embodiment uses the photoluminescence effect of the solid-state spin color center to reflect the laser from the surface to be tested, and acts on the color center in the form of light intensity changes. By measuring the fluorescence changes generated by the color center, it is possible to diagnose whether there are defects or changes in roughness on the surface to be tested. On the first hand, based on the micro-nano spatial resolution of quantum measurement, micro-nano defect diagnosis is achieved; on the second hand, laser reflection is not limited to ferromagnetic materials such as metals, and can be applied to a variety of materials, such as plastics, ceramics, glass, semiconductor materials, etc., and has a wide range of adaptability; on the third hand, the structure of this embodiment is simple, and does not require equipment and operations such as magnetization, and is highly convenient.

[0028] This embodiment collects fluorescence on the laser emission side and also includes at least one optical element for separating and guiding the laser and the light from the probe, guiding the laser to be transmitted to the probe, and guiding the light from the probe to be transmitted to the fluorescence detection device. This optical element can be a light circulator or a dichroic filter. Figure 2 An example of an optical circulator is given as an example, and a dichroic film or other optical elements or a combination of multiple optical elements may also be used, which will not be described in detail here.

[0029] In this embodiment, optical fiber is used to transmit laser and fluorescence. One end of the optical fiber is used to input laser, and the other end is connected to the probe 1. The probe 1 can be connected to the end face of the optical fiber by bonding. For example, Figure 7 The optical fiber 200 shown has a conical end for bonding the probe 1. Since the probe is micro / nano-sized, it can be replaced by a point in the image after shooting, which is not drawn in the figure. Figure 2 In the case where an optical circulator 6 is provided, optical fibers can be used to connect the laser source 2, the optical circulator 6, the probe 1, and the fluorescence detection device 3. Optical fiber transmission is more conducive to the flexible adjustment of the optical path structure, and of course, spatial optical transmission can also be used.

[0030] Implementation 2: Based on the first embodiment, the detection device in this embodiment, such as Figure 5 As shown, it also includes a microwave module 7, which is used to radiate microwaves to the probe to perform coherent manipulation of the color center. When the applied microwave frequency is equal to m s =0 and m s = ±1, resonance occurs, and a resonance peak appears at the resonance frequency on the ODMR spectrum. ,in, is the spin-lattice relaxation rate, is the transverse relaxation rate, is the effective transverse relaxation rate, is the upper limit of contrast, is the microwave field intensity. When these parameters are constant, the laser pumping rate The increase of will make the ODMR spectral line contrast C increase first and then decrease. The contrast is calculated as: , is the fluorescence signal intensity without microwave action, is the fluorescence signal intensity under microwave action. The laser intensity is proportional to the pump rate, so the effect of laser intensity on fluorescence also follows this rule. It can be seen that within a certain monotonic range, the fluorescence intensity changes monotonically with the change of laser intensity, and the specific monotonic range can be determined by experiment.

[0031] The microwave module 7 may exemplarily include a microwave source 71, a microwave amplifier 72, a microwave circulator 73, and a microwave antenna 74 connected in sequence. The microwaves generated by the microwave source 71 are transmitted to the microwave antenna 74 and then radiated to the probe 1 by the microwave antenna 74. The microwave antenna 74 may be a spiral antenna and is mounted on the outside of the diamond.

[0032] This embodiment adopts the fixed frequency method for detection, and the selected fixed frequency point is the resonance frequency point on the ODMR spectrum line or the microwave frequency corresponding to the maximum value of the spectrum line slope on one side of any resonance peak. The fixed frequency point can be obtained before detection by implementing microwave sweep ODMR measurement, that is, at a fixed position on the probe opposite to the surface to be measured, the laser source 2 irradiates the laser to the probe 1, the microwave module 7 radiates microwaves to the probe 1, and scans the microwave frequency, the fluorescence detection device 3 detects the fluorescence and outputs the fluorescence electrical signal, the signal processing module 5 collects the fluorescence electrical signal, and draws the ODMR spectrum line according to the change of the fluorescence electrical signal with the microwave frequency, and the above-mentioned fixed frequency point is obtained from the ODMR spectrum line. In the case of no bias magnetic field, taking the nitrogen vacancy color center as an example, two resonance peaks are generated on the ODMR spectrum line due to the color center stress.

[0033] A bias magnetic field module 8 is also provided for applying a bias magnetic field to the probe 1. When determining the fixed frequency point, microwave frequency sweep ODMR measurement is performed under the condition of applying the bias magnetic field. The bias magnetic field can be used to adjust the number of resonance peaks. Due to different solid-state spin color centers, the number of color center axes may be different. For example, a diamond NV single color center or a silicon carbide color center or a diamond germanium vacancy single color center or a diamond silicon vacancy single color center or a hexagonal boron nitride color center has one axis, and there is only one pair of resonance frequency points on its ODMR sweep spectrum line. For example, an ensemble diamond NV color center or an ensemble diamond germanium vacancy color center or an ensemble diamond silicon vacancy color center has four color center axes. By adjusting the angular relationship between the bias magnetic field and the axis, the number of resonance frequency points that can appear on its ODMR sweep spectrum line can be 2, 4, 6, or 8. Figure 6As shown, there are 8 resonance frequencies (f1-f8) of nitrogen vacancy color centers. At least one resonance frequency or the point with the maximum slope on one side of any resonance frequency can be selected as a fixed frequency point. When testing at the fixed frequency point, the same bias magnetic field is applied.

[0034] In this embodiment, a camera 9 is also included for capturing videos of the probe 1 facing different detection positions on the surface to be tested 100. Figure 5 As shown, the camera 9 is facing the surface to be tested 100, the probe 1 is located between the camera 9 and the surface to be tested 100, the laser is obliquely incident on the surface to be tested 100 and passes through the probe 1, the camera 9 can capture the video of different detection positions on the surface to be tested 100 facing the probe 1, and output the video frame. The signal processing module 5 also collects multiple video frames of the video, and splices the multiple video frames to obtain a regional map composed of all the detection positions on the surface to be tested. Figure 4 As shown in the figure, it is a regional map composed of all the detection positions after splicing, and Figure 3 The distribution diagram in corresponds to Figure 3 After the defect point is determined in Figure 4 By matching the corresponding positions in the image with the corresponding positions in the image, the exact position of the defect on the surface to be tested can be obtained, and the defect can be located. This can solve the problem that the detection area is only a part of the surface to be tested, and the defect cannot be located on the actual surface to be tested.

[0035] When the camera 9 is shooting, the optical fiber and the probe will be captured. Figure 7 As shown in the figure, it is a schematic diagram of a video frame taken. It is preferred to place the probe at the center of the shooting field of view. On the one hand, it is convenient for camera positioning. On the other hand, when the image is stitched, when scanning point by point from left to right along the surface to be measured, the probe is small in size and can be regarded as a point located at the tapered end of the optical fiber. A vertical line is drawn with the point where the probe is located as the boundary ( Figure 7 The left side A part where the probe and optical fiber are inserted is cut off, and the right side B part is used for splicing. The left line center of the right side B part is the starting detection position, which is convenient for cutting off the non-detection position after splicing.

[0036] The image stitching method can adopt the method in the prior art, which can be specifically: (1) Preliminary trimming processing: trim the area on one side where the probe and the optical fiber are located in each video frame one by one according to the shooting order. Figure 7 Take the image in the figure as an example, and scan point by point and line by line from left to right along the surface to be tested. The left side where the probe and the optical fiber are shot is cut off with the vertical line where the probe is located as the boundary, and the right side is reserved for splicing. The right side cut out in this step is as follows Figure 8 As shown, for the first video frame, the center point c of the left line of its B part is the starting detection position, and for the last video frame, the center point d of the left line of its B part is the end detection position. Figure 8The ellipsis in the figure indicates that the B part of the video frames shot horizontally and vertically are aligned at the same coordinates; (2) Feature point extraction and matching: Extract key feature points from each captured video frame. Key feature points include points with grayscale value changes, corner points, etc. Algorithms such as SURF, SIFT or ORB can be used to identify and match key feature points between adjacent frames; (3) Image registration: Based on the matched key feature points, calculate the change matrix of each video frame, and transform the video frame through the change matrix so that all video frames are aligned in the same coordinate system. This can be achieved by using algorithms such as perspective transformation and affine transformation; (4) Image stitching: Fusion and reconstruction of the overlapping areas of the registered images. The algorithms that can be used include weighted averaging method, maximum synthesis method, etc.; (5) Trimming off non-detection positions: According to the starting detection position and the end detection position determined in step (1), perform the following operations respectively: Figure 8 The horizontal and vertical lines (indicated by the dotted lines) shown in the figure are used as the detection position area, and the area outside the dotted lines is cut off; (6) Quality enhancement: Apply image enhancement techniques such as sharpening, contrast adjustment and color correction to improve the overall visual effect and obtain the final area map.

[0037] After the images are stitched, a coordinate correspondence is established between the distribution map and the stitched region map, so that the defect points in the distribution map can be matched to the region map. The position of the defect point on the surface to be tested can be obtained from the correspondence between the region map and the surface to be tested.

[0038] Embodiment 3: This embodiment provides a detection method based on solid-state spin color centers, comprising: A probe containing a solid spin color center is pointed toward the surface to be measured, and a laser is irradiated to the probe. The laser passes through the probe and then irradiates the surface to be measured. Part of the light reflected by the surface to be measured is then irradiated to the probe, or microwaves are radiated to the probe, and the fluorescence generated by the probe is collected to obtain a fluorescent electrical signal. The relative movement between the probe and the surface to be tested is controlled so that the probe points to different detection positions on the surface to be tested, and fluorescent electrical signals at multiple detection positions are obtained. The fluorescent electrical signals are converted into image data, and the image data at different detection positions are collected in one picture to form a distribution diagram representing the fluorescence intensity.

[0039] The solid spin color center in this embodiment can be selected from one of diamond nitrogen vacancy color center, diamond germanium vacancy color center, diamond silicon vacancy color center, silicon carbide divacancy color center, silicon carbide silicon vacancy color center, hexagonal boron nitride boron vacancy color center. Detection is achieved based on the photoluminescence effect of the solid spin color center. The solid spin color center will produce fluorescence under the irradiation of laser. Different solid spin color centers may have different wavelengths of excitation light. For example, for diamond nitrogen vacancy color center and hexagonal boron nitride boron vacancy color center, a 532nm green laser is generally used; the silicon carbide divacancy color center uses a 900-940nm laser, and other color centers can be excited by corresponding lasers.

[0040] The detection principle and specific method steps in this embodiment can be referred to in the first embodiment, and will not be repeated here.

[0041] In order to solve the problem that the detection area is only a part of the surface to be tested, and the defect cannot be located on the actual surface to be tested through the fluorescence distribution map, in this embodiment, a video of different detection positions on the surface to be tested being pointed at by the probe is also shot, and multiple video frames of the video are collected, and multiple video frames are spliced ​​to obtain a regional map of all detection positions on the surface to be tested. When the defect point is obtained from the distribution map, the position of the defect point on the surface to be tested is also determined by comparing the regional map. The method of video frame splicing processing can refer to the description in Example 2, which will not be repeated here.

[0042] The detection device in the first or second embodiment may be used as an example to implement the method in this embodiment, but it is certainly not limited thereto, and other devices may also be used to implement this method.

[0043] The above embodiments are merely illustrative of the principles and effects of the present invention, and are not intended to limit the present invention. Anyone familiar with the art may modify or alter the above embodiments without departing from the spirit and scope of the present invention. Therefore, all equivalent modifications or alterations made by a person of ordinary skill in the art without departing from the spirit and technical concept disclosed by the present invention shall still be covered by the claims of the present invention.

Claims

1. A detection device based on solid-state spin color centers, characterized in that: The detection equipment comprises: A probe, including a solid spin color center, facing the surface to be measured; A laser source is used to generate laser light and irradiate the laser light to the probe. The laser light passes through the probe and irradiates the surface to be measured. Part of the light reflected by the surface to be measured is then irradiated to the probe. The laser light is used to excite the solid-state spin color center to generate fluorescence. A fluorescence detection device, used to detect the fluorescence generated by the probe and output a fluorescence electrical signal; A control mechanism, used to control the relative movement between the probe and the surface to be measured, so that the probe faces different detection positions on the surface to be measured; The signal processing module is used to collect fluorescent electrical signals, convert them into image data, and then collect the image data at different detection positions into one image to form a distribution diagram representing the fluorescence intensity.

2. The detection device according to claim 1, characterized in that: The image data is a color value or a gray value. In the signal processing module, the collected fluorescent electric signal is converted into a color value or a gray value by setting a relationship between the fluorescent electric signal and the color value or the gray value.

3. The detection device according to claim 1, characterized in that: It also includes a camera for shooting videos of different detection positions on the surface to be tested being faced with the probe; a signal processing module is also used to collect multiple video frames of the video and splice the multiple video frames to obtain a regional map consisting of all detection positions on the surface to be tested.

4. The detection device according to claim 3, characterized in that: The signal processing module also obtains defect points from the distribution map and determines the positions of the defect points on the surface to be tested by comparing them with the area map.

5. The detection device according to claim 1, characterized in that: The fluorescence detection device detects fluorescence from the laser irradiation side and also includes at least one optical element for separating and guiding the laser and the light from the probe, guiding the laser to the probe, and guiding the light from the probe to the fluorescence detection device.

6. The detection device according to any one of claims 1 to 5, characterized in that: The device also includes a microwave module for radiating microwaves to the probe.

7. The detection device according to claim 6, characterized in that: During the detection, the microwave frequency radiated to the probe is a fixed value. The ODMR measurement of microwave sweep is performed on the probe before the detection, and the ODMR spectrum is drawn by the signal processing module. The resonant frequency point on the spectrum or the microwave frequency corresponding to the maximum value of the spectrum slope on one side of any resonance peak is selected as the fixed frequency point.

8. The detection device according to claim 7, characterized in that: The invention also comprises a bias magnetic field module for applying a bias magnetic field to the probe.

9. The detection device according to claim 1, characterized in that: The solid-state spin color center is one of a diamond nitrogen vacancy color center, a diamond germanium vacancy color center, a diamond silicon vacancy color center, a silicon carbide divacancy color center, a silicon carbide silicon vacancy color center, and a hexagonal boron nitride boron vacancy color center.

10. A detection method based on solid-state spin color centers, characterized in that: The method comprises: A probe containing a solid spin color center is pointed toward the surface to be measured, and a laser is irradiated to the probe. The laser passes through the probe and then irradiates the surface to be measured. Part of the light reflected by the surface to be measured is then irradiated to the probe, or microwaves are radiated to the probe, and the fluorescence generated by the probe is collected to obtain a fluorescent electrical signal. The relative movement between the probe and the surface to be tested is controlled so that the probe points to different detection positions on the surface to be tested, and fluorescent electrical signals at multiple detection positions are obtained. The fluorescent electrical signals are converted into image data, and the image data at different detection positions are collected in one picture to form a distribution diagram representing the fluorescence intensity.

Images