An inspection device for chip manufacturing for spot checks

Abstract

The present invention relates to a sampling inspection device for chip manufacturing, which includes a housing assembly and a cleaning assembly. A power assembly is installed above the interior of the housing assembly, and a clamping assembly is connected to the lower end of the power assembly. The cleaning assembly is located on the left and right sides of the clamping assembly. The clamping assembly includes an air pipe, a turbine, and a suction cup fixture. A turbine is installed inside the air pipe, and a suction cup fixture is installed at the lower end of the air pipe. The cleaning assembly includes a support frame, a cleaning brush, a first transmission wheel, a belt, and a second transmission wheel. A cleaning brush is installed inside the support frame. The first transmission wheels are connected to the front and back sides of the support frame. The beneficial effects of the present invention are: the device has an air supplement structure to avoid clamping damage to the chip; the device can clean the surface of the chip and can also position the chip; the device can avoid light to prevent the light from affecting the detection effect of the device, and at the same time has a sealing structure to prevent light leakage at the connection.

Description

Technical Field

[0001] The present invention relates to the technical field of chip processing, and specifically to a sampling inspection device for chip manufacturing. Background Art

[0002] During the chip manufacturing process, a sampling inspection device is required to perform visual inspection on the processed chips. The chips are inspected through an optical microscope to determine whether the chips are intact. Through the inspection with the optical microscope, problems in the chip manufacturing process, such as defects, non-uniformities, or damages, can be detected in a timely manner, so that corresponding measures can be taken for repair or improvement to improve the quality and performance of the chips.

[0003] Most of the existing sampling inspection devices directly clamp the chips using suction cup jigs, and then place the chips in the detection area for inspection. However, if the chips move during the transmission process, the clamping structure of the device cannot clamp the chips well. Even if the chips are clamped, it is easy to cause the chips to be placed in the wrong position, affecting the detection effect of the device.

[0004] Therefore, it is necessary to design a sampling inspection device for chip manufacturing to address the above problems. Summary of the Invention

[0005] The purpose of the present invention is to provide a sampling inspection device for chip manufacturing to solve the problems raised in the above background art.

[0006] To achieve the above purpose, the present invention provides the following technical solution: A sampling inspection device for chip manufacturing, including a housing assembly (1) and a cleaning component. Above the interior of the housing assembly, a power component is installed, and a clamping component is connected to the lower end of the power component. The cleaning component is located on the left and right sides of the clamping component. The clamping component includes an air pipe, a turbine, and a suction cup jig. A turbine is installed inside the air pipe, and a suction cup jig is installed at the lower end of the air pipe. The cleaning component includes a support frame, a cleaning brush, a first transmission wheel, a belt, and a second transmission wheel. A cleaning brush is installed inside the support frame. The front and back sides of the support frame are connected with the first transmission wheel, and a belt is arranged outside the first transmission wheel. The side of the belt away from the first transmission wheel is connected with the second transmission wheel.

[0007] Furthermore, air supply components are installed in the middle of both sides of the clamping component. A box body component is installed on the right side inside the housing assembly, and an automatic closing component is arranged inside the box body component. A chip body is installed in the middle of the automatic closing component, and sealing components are connected to the upper ends of both sides of the automatic closing component. Locking components are arranged below the front and back ends of the sealing component, and a valve body component is connected to the lower end in the middle of the sealing component.

[0008] Further, the housing assembly includes a housing, a fan, an air duct, and a belt conveyor. A fan is installed on one side of the housing. The air outlet of the fan is connected to the air duct, and a belt conveyor is installed on the left side inside the housing.

[0009] Further, the power assembly includes an electric slide rail and multiple-stage hydraulic cylinders, and multiple-stage hydraulic cylinders are installed at the lower end of the electric slide rail.

[0010] Further, the air supply assembly includes an air supply pipe and rolling steel balls, and rolling steel balls are installed on both sides at the upper end of the air supply pipe.

[0011] Further, the box body assembly includes a light-shielding box, fill lights, and a detection camera. Fill lights are installed on the five inner walls of the light-shielding box, and detection cameras are installed on the left and right inner walls of the light-shielding box.

[0012] Further, the automatic closing assembly includes a first spring, a detection table, a connecting rod, and a connecting block. The upper end of the first spring is connected to the detection table, the upper end of the detection table is connected to the connecting rod, and the upper end of the connecting rod is connected to the connecting block.

[0013] Further, the sealing assembly includes a cover door and a sealing air cushion, and the sealing air cushion is inlaid on the outer side of the cover door.

[0014] Further, the locking assembly includes a locking head and a permanent magnet, and a permanent magnet is arranged on the side of the locking head close to the box body assembly.

[0015] Further, the valve body assembly includes a valve frame, a second spring, a moving block, and a valve core block. A second spring is arranged inside the valve frame. A moving block is arranged on the side of the second spring close to the central axis of the valve frame, and a valve core block is arranged on the side of the moving block away from the second spring.

[0016] Compared with the prior art, the beneficial effects of the present invention are as follows: The device has a gas supplement structure to avoid clamping damage to the chip. The device can clean the surface of the chip and can also position the chip. The device can be light-shielded to avoid the influence of light on the detection effect of the device, and also has a sealing structure to avoid light leakage at the connection.

[0017] 1. The present invention sucks air through the fan, so that the suction cup fixture has a certain suction force to clamp the chip body. During the clamping process, air can be supplied to the inside of the ventilation pipe through the air supply pipe to supplement gas, avoiding the continuous generation of a large suction force by the suction cup fixture and causing damage to the chip body.

[0018] 2. When the present invention is in the clamping operation, air is sucked inside the ventilation pipe, generating air flow, which drives the turbine to rotate. The turbine drives the cleaning brush to rotate through the belt, so that the cleaning brush can clean the surface of the chip body.

[0019] 3. During the cleaning process of the surface of the chip body by the cleaning brush of the present invention, since the air flow received by the turbine is upward, both turbines rotate inward, so that the cleaning brush also rotates inward, enabling the cleaning brush to push the chip body downward towards the suction fixture. Since the wind forces received by the two turbines are the same, the forces on the turbines are the same, so that the rotational forces of the cleaning brush are the same. Therefore, when the cleaning brush pushes the chip body, the chip body will have the same forces on both ends after being centered and cannot move, thus achieving centering of the chip body.

[0020] 4. When placing the chip body, the present invention presses the detection table downward, so that the detection table drives the cover door to close through the connecting rod, so that the cover door and the light-shielding box are combined to form a sealed environment, preventing external light sources from entering and affecting the visual detection effect of the device.

[0021] 5. After the chip body is placed, the ventilation pipe of the present invention will rise to a certain height. At this time, the air supply pipe will be docked with the valve frame, so as to push open the moving block that forms an elastic structure between the second spring and the valve frame, causing the valve core block to open, so that the air supply pipe blows air into the valve frame, causing the sealing air cushion outside the cover door to expand, enabling the sealing air cushion to seal the edge of the cover door, increasing the sealing performance between the cover door and the light-shielding box, better enhancing the light-shielding effect, and facilitating the operation of the device. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] Figure 1 is a front view structural schematic diagram of a sampling inspection device for chip manufacturing according to the present invention;

[0023] Figure 2 is a sectional structural schematic diagram of a clamping assembly of a sampling inspection device for chip manufacturing according to the present invention;

[0024] Figure 3 is an enlarged structural schematic diagram of a cleaning assembly of a sampling inspection device for chip manufacturing according to the present invention;

[0025] Figure 4 is a sectional structural schematic diagram of a box body assembly of a sampling inspection device for chip manufacturing according to the present invention;

[0026] Figure 5 is an enlarged structural schematic diagram of a sealing assembly of a sampling inspection device for chip manufacturing according to the present invention;

[0027] Figure 6 is a three-dimensional structural schematic diagram of a sealing assembly of a sampling inspection device for chip manufacturing according to the present invention;

[0028] Figure 7 is a sectional structural schematic diagram of a valve body assembly of a sampling inspection device for chip manufacturing according to the present invention.

[0029] In the figure: 1. Outer shell assembly; 101. Housing; 102. Fan; 103. Air duct; 104. Belt conveyor; 2. Power assembly; 201. Electric slide rail; 202. Multi-stage hydraulic cylinder; 3. Clamping assembly; 301. Vent pipe; 302. Turbine; 303. Suction cup fixture; 4. Cleaning assembly; 401. Support frame; 402. Cleaning brush; 403. First drive wheel; 404. Belt; 405. Second drive wheel; 5. Air supply assembly; 501. Air supply pipe; 502. Rolling steel ball; 6. Box body assembly; 601. Light-shielding box; 602. Supplementary light; 603. Detection camera; 7. Automatic closing assembly; 701. First spring; 702. Detection table; 703. Connecting rod; 704. Connecting block; 8. Chip body; 9. Sealing assembly; 901. Cover door; 902. Sealing air cushion; 10. Locking assembly; 1001. Locking head; 1002. Permanent magnet; 11. Valve body assembly; 1101. Valve frame; 1102. Second spring; 1103. Moving block; 1104. Valve core block. Detailed implementation

[0030] As Figure 1 、 Figure 2 and Figure 3 shown, the present invention provides a technical solution: A sampling inspection device for chip manufacturing, including an outer shell assembly 1 and a cleaning assembly 4. Above the interior of the outer shell assembly 1, a power assembly 2 is installed, and the lower end of the power assembly 2 is connected to a clamping assembly 3. The cleaning assembly 4 is located on the left and right sides of the clamping assembly 3. The clamping assembly 3 includes a vent pipe 301, a turbine 302, and a suction cup fixture 303. A turbine 302 is installed inside the vent pipe 301, and a suction cup fixture 303 is installed at the lower end of the vent pipe 301. The cleaning assembly 4 includes a support frame 401, a cleaning brush 402, a first drive wheel 403, a belt 404, and a second drive wheel 405. A cleaning brush 402 is installed inside the support frame 401. The front and back sides of the support frame 401 are connected to the first drive wheel 403, and a belt 404 is arranged outside the first drive wheel 403. The side of the belt 404 away from the first drive wheel 403 is connected to the second drive wheel 405;

[0031] The specific operation is as follows. By the fan 102 for air extraction, the suction cup fixture 303 has a certain suction force to clamp the chip body 8. During the clamping process, the air supply pipe 501 can supply air to the inside of the vent pipe 301 for air replenishment, so as to avoid the suction cup fixture 303 continuously generating a large suction force and damaging the chip body 8;

[0032] During the clamping operation, air is sucked inside the ventilation pipe 301, generating an air flow, which drives the turbine 302 to rotate. Through the belt 404, the turbine 302 drives the cleaning brush 402 to rotate, so that the cleaning brush 402 can clean the surface of the chip body 8.

[0033] During the cleaning process of the surface of the chip body 8 by the cleaning brush 402, since the air flow received by the turbine 302 is upward, both turbines 302 rotate inward, so that the cleaning brush 402 also rotates inward, enabling the cleaning brush 402 to push the chip body 8 downward towards the suction cup fixture 303. Since the wind forces received by the two turbines 302 are the same, the forces on the turbines 302 are the same, so that the rotational forces of the cleaning brush 402 are the same. Therefore, when the cleaning brush 402 pushes the chip body 8, after the chip body 8 is centered, the two ends are evenly stressed and cannot move, thus achieving centering of the chip body 8.

[0034] As Figure 4 、 Figure 5 、 Figure 6 and Figure 7 As shown in

[0035] As Figure 1 shown, the housing assembly 1 includes a housing 101, a fan 102, an air duct 103 and a belt conveyor 104. A fan 102 is installed on one side of the housing 101, the air outlet of the fan 102 is connected to the air duct 103, and a belt conveyor 104 is installed on the left side inside the housing 101.

[0036] The air duct 103 adopts a telescopic structure, such as a corrugated pipe, etc., or an external pipe winding device can be set to wind up the air duct 103 to prevent the air duct 103 from spreading and affecting the operation of the equipment.

[0037] As Figure 1 shown, the power assembly 2 includes an electric slide rail 201 and a multi-stage hydraulic cylinder 202, and the multi-stage hydraulic cylinder 202 is installed at the lower end of the electric slide rail 201.

[0038] Through the electric slide rail 201 and the multi-stage hydraulic cylinder 202, the equipment can achieve cross movement of the material, facilitating the clamping and placement of the material by the equipment.

[0039] As Figure 7As shown, the air supply assembly 5 includes an air supply pipe 501 and rolling steel balls 502, and the rolling steel balls 502 are installed on both sides of the upper end of the air supply pipe 501;

[0040] The rolling steel balls 502 assist in the insertion of the air supply pipe 501. The rolling steel balls 502 can reduce the friction during the insertion of the air supply pipe 501 and reduce the insertion force.

[0041] As Figure 4 shown, the box body assembly 6 includes a light-shielding box 601, a fill light 602 and a detection camera 603. The fill light 602 is installed on the five inner walls of the light-shielding box 601, and the detection cameras 603 are installed on the left and right inner walls of the light-shielding box 601;

[0042] The fill light 602 is installed on the five inner surfaces of the light-shielding box 601, so as to be able to perform full-angle fill light on the chip, reduce the generation of shadows, make it more convenient to detect the chip, and increase the detection accuracy of the device.

[0043] As Figure 4 shown, the automatic closing assembly 7 includes a first spring 701, a detection table 702, a connecting rod 703 and a connecting block 704. The upper end of the first spring 701 is connected to the detection table 702, the upper end of the detection table 702 is connected to the connecting rod 703, and the upper end of the connecting rod 703 is connected to the connecting block 704;

[0044] The elastic structure of the first spring 701 will push the detection table 702 upward, so that the connecting rod 703 pushes the cover door 901 upward, so that the cover door 901 opens.

[0045] As Figure 5 and Figure 6 shown, the sealing assembly 9 includes a cover door 901 and a sealing air cushion 902, and the sealing air cushion 902 is inlaid on the outside of the cover door 901;

[0046] When placing the chip body 8, the detection table 702 will be pressed downward, so that the detection table 702 drives the cover door 901 to close through the connecting rod 703, so that the cover door 901 and the light-shielding box 601 are combined to form a sealed environment, preventing external light sources from entering and affecting the visual detection effect of the device.

[0047] As Figure 6 shown, the locking assembly 10 includes a locking head 1001 and a permanent magnet 1002, and the permanent magnet 1002 is arranged on the side of the locking head 1001 close to the box body assembly 6;

[0048] The combination of the locking head 1001 and the permanent magnet 1002 can prevent the cover door 901 from opening during the detection work and affect the detection of the device.

[0049] As Figure 7As shown in the figure, the valve body assembly 11 includes a valve frame 1101, a second spring 1102, a moving block 1103, and a valve core block 1104. A second spring 1102 is disposed inside the valve frame 1101. A moving block 1103 is disposed on one side of the second spring 1102 close to the central axis of the valve frame 1101, and a valve core block 1104 is disposed on the side of the moving block 1103 away from the second spring 1102.

[0050] After the chip body 8 is placed, the ventilation pipe 301 will rise to a certain height. At this time, the air supply pipe 501 will be docked with the valve frame 1101, so as to push open the moving block 1103 that forms an elastic structure between the second spring 1102 and the valve frame 1101, causing the valve core block 1104 to open, so that the air supply pipe 501 blows air inside the valve frame 1101, causing the sealing air cushion 902 outside the cover door 901 to expand, so that the sealing air cushion 902 can seal the edge of the cover door 901, increasing the sealing performance between the cover door 901 and the light-shielding box 601, better increasing the light-shielding effect, and facilitating the operation of the device.

[0051] Working principle: First, the chip body 8 is conveyed by the belt conveyor 104. Then, the electric slide rail 201 and the multi-stage hydraulic cylinder 202 are opened to drive the clamping assembly 3 to move above the chip body 8. Then, the multi-stage hydraulic cylinder 202 is used to control the suction cup fixture 303 to descend. At the same time, the blower 102 is turned on, so that the air duct 103 evacuates the inside of the air pipe 301. During the evacuation, the air flow inside the air pipe 301 will drive the turbine 302 to rotate, so that the turbine 302 drives the first transmission wheel 403 to rotate. Then, the second transmission wheel 405 is driven to rotate through the belt 404. Thus, the second transmission wheel 405 drives the cleaning brush 402 that forms a rotating structure with the support frame 401 to rotate, so that the cleaning brush 402 cleans the surface of the chip body 8 to be grabbed. At the same time, the air flow received by the turbine 302 is upward, and both turbines 302 rotate inward, so that the cleaning brush 402 also rotates inward, enabling the cleaning brush 402 to push the chip body 8 downward to the lower part of the suction cup fixture 303, thereby realizing the positioning of the chip body 8. At the same time, the suction cup fixture 303 continues to move downward until it contacts the chip body 8. At this time, the suction cup fixture 303 will form an adsorption effect to realize the clamping of the chip body 8. At this time, no air can enter the suction cup fixture 303, so the turbine 302 will no longer rotate, and thus the cleaning brush 402 will not rotate either, avoiding interference during the clamping process. And at this time, the air supply pipe 501 supplies air to the air pipe 301, so as to ensure that the blower 102 can continue to work. Then, the chip body 8 is moved into the light-shielding box 601 through the electric slide rail 201 and the multi-stage hydraulic cylinder 202. During the placement of the chip body 8, the multi-stage hydraulic cylinder 202 presses the detection table 702 downward, so that the connecting rod 703 pulls the cover door 901, causing the cover door 901 to close. At this time, the permanent magnet 1002 attracts and fixes the locking head 1001, so as to lock the cover door 901. At this time, the blower 102 is changed to a blowing structure, so that the chip body 8 is separated from the suction cup fixture 303. At the same time, the air pipe 301 will stretch upward, so that the air supply pipe 501 is inserted into the valve frame 1101. During the insertion of the air supply pipe 501, the rolling steel balls 502 assist the insertion of the air supply pipe 501. The rolling steel balls 502 can reduce the friction force of the insertion of the air supply pipe 501 and reduce the insertion force. When the air supply pipe 501 is inserted into the valve frame 1101, it will inflate the inside of the cover door 901, so that the sealing air cushion 902 expands to seal the periphery of the cover door 901. At this time, the supplementary light 602 and the detection camera 603 are turned on to perform the detection work. When the detection is completed, the blower 102 is changed back to the suction mode. At this time, the air supply pipe 501 will extract the gas in the sealing air cushion 902 to make the sealing air cushion 902 deflate. Then, the suction cup fixture 303 clamps and takes away the detected chip body 8. When the air pipe 301 moves upward, it will push the cover door 901 upward, so as to facilitate the equipment to take out the material. At the same time, the elastic structure of the first spring 701 will push the detection table 702 upward.Push the connecting rod 703 upward against the cover door 901, so that after the cover door 901 is opened, it will not close if not affected by external forces.

Claims

1. A sampling inspection device for chip manufacturing, characterized in that, It includes a housing assembly (1) and a cleaning assembly (4). Above the interior of the housing assembly (1), a power assembly (2) is installed, and the lower end of the power assembly (2) is connected to a clamping assembly (3). The cleaning assembly (4) is located on the left and right sides of the clamping assembly (3). The clamping assembly (3) includes an air pipe (301), a turbine (302), and a suction cup fixture (303). Inside the air pipe (301), a turbine (302) is installed, and at the lower end of the air pipe (301), a suction cup fixture (303) is installed. The cleaning assembly (4) includes a support frame (401), a cleaning brush (402), a first transmission wheel (403), a belt (404), and a second transmission wheel (405). Inside the support frame (401), a cleaning brush (402) is installed. On the front and back sides of the support frame (401), a first transmission wheel (403) is connected, and outside the first transmission wheel (403), a belt (404) is arranged. On the side of the belt (404) away from the first transmission wheel (403), a second transmission wheel (405) is connected. The housing assembly (1) includes a housing (101), a blower (102), an air duct (103), and a belt conveyor (104). On one side of the housing (101), a blower (102) is installed. The air outlet of the blower (102) is connected to the air duct (103). When the blower (102) is turned on, the air duct (103) evacuates the air inside the air pipe (301). While evacuating the air, the air flow inside the air pipe (301) drives the turbine (302) to rotate.

2. The sampling inspection device for chip manufacturing according to claim 1, wherein On the middle parts of both sides of the clamping assembly (3), a gas supply assembly (5) is installed. On the right side inside the housing assembly (1), a box assembly (6) is installed. Inside the box assembly (6), an automatic closing assembly (7) is arranged. In the middle of the automatic closing assembly (7), a chip body (8) is installed. At the upper ends of both sides of the automatic closing assembly (7), a sealing assembly (9) is connected. Below the front and back ends of the sealing assembly (9), a locking assembly (10) is arranged. At the lower end in the middle of the sealing assembly (9), a valve body assembly (11) is connected.

3. A sampling inspection device for chip manufacturing according to claim 1, characterized in that, Inside the left side of the housing (101), a belt conveyor (104) is installed.

4. A sampling inspection device for chip manufacturing according to claim 1, wherein, The power assembly (2) includes an electric slide rail (201) and a multi-stage hydraulic cylinder (202). At the lower end of the electric slide rail (201), a multi-stage hydraulic cylinder (202) is installed.

5. The sampling inspection device for chip manufacturing according to claim 2, characterized in that, The gas supply assembly (5) includes a gas supply pipe (501) and rolling steel balls (502). On both sides at the upper end of the gas supply pipe (501), rolling steel balls (502) are installed.

6. The sampling inspection device for chip manufacturing according to claim 2, characterized in that, The box assembly (6) includes a light-shielding box (601), a supplementary light (602), and a detection camera (603). On the five inner walls of the light-shielding box (601), a supplementary light (602) is installed. On the left and right inner walls of the light-shielding box (601), a detection camera (603) is installed.

7. The sampling inspection device for chip manufacturing according to claim 2, wherein The automatic closing component (7) includes a first spring (701), a detection table (702), a connecting rod (703) and a connecting block (704). The upper end of the first spring (701) is connected to the detection table (702), the upper end of the detection table (702) is connected to the connecting rod (703), and the upper end of the connecting rod (703) is connected to the connecting block (704).

8. The sampling inspection device for chip manufacturing according to claim 2, wherein, The sealing component (9) includes a cover door (901) and a sealing air cushion (902), and the sealing air cushion (902) is inlaid on the outer side of the cover door (901).

9. The sampling inspection device for chip manufacturing according to claim 2, wherein, The locking component (10) includes a locking head (1001) and a permanent magnet (1002), and the permanent magnet (1002) is arranged on one side of the locking head (1001) close to the box body component (6).

10. A sampling inspection device for chip manufacturing according to claim 2, characterized in that, The valve body component (11) includes a valve frame (1101), a second spring (1102), a moving block (1103) and a valve core block (1104). The second spring (1102) is arranged inside the valve frame (1101). The moving block (and the moving block (1103) is arranged on one side of the second spring (1102) close to the central axis of the valve frame (1101), and the valve core block (1104) is arranged on the side of the moving block (1103) away from the second spring (1102).

Images