Silicon rod cutting fluid recycling and filtering device

Abstract

The invention provides a silicon rod cutting fluid recycling and filtering device, which belongs to the technical field of silicon wafer production and manufacturing, and comprises a barrel, a water inlet and a water outlet, the mounting frame is arranged in the barrel in a sliding manner, a filter element is arranged in the mounting frame, and a replacement inlet and a replacement outlet for the mounting frame to slide in or out are correspondingly formed in the opposite sides of the barrel; at least two mounting frames are provided, and only one mounting frame is arranged on the cylinder body; a positioning mechanism for fixing the mounting frame is arranged on the cylinder body; a bearing plate hinged to the outer side of the barrel is arranged below the replacement outlet, a linkage mechanism is arranged between the mounting frame and the bearing plate, the bearing plate naturally falls downwards in an initial state, and the linkage mechanism is used for driving the bearing plate to rotate upwards to a horizontal state when the mounting frame moves towards the replacement outlet; a one-way limiting mechanism is arranged on the cylinder body and used for limiting the bearing plate to only rotate upwards or release limitation. The cleaning or replacing process of the filter element does not affect the filtering operation of the cutting fluid, the filtering efficiency of the cutting fluid is improved, and the time cost is reduced.

Description

Technical Field

[0001] The invention belongs to the technical field of silicon wafer production and manufacturing, and more specifically, relates to a silicon rod cutting liquid recovery and filtering device. Background Art

[0002] During the process of cutting silicon rods to prepare silicon wafers, the silicon powder produced by cutting is mixed in the cutting fluid. As the cutting time accumulates, the amount of silicon powder accumulates more and more, and the density of silicon powder in the cutting fluid increases accordingly, affecting the cooling and lubrication of the cutting fluid, often causing wire breakage and wire jumps, which in serious cases affect the cutting quality and reduce the cutting efficiency. Therefore, it is necessary to remove the silicon powder in the cutting fluid so that the cutting fluid can be reused to ensure the cutting quality.

[0003] The existing Chinese patent with reference announcement number CN209270955U discloses a silicon rod cutting liquid filtering and recovery device, which includes a main barrel body and a filter barrel arranged in the main barrel body; the main barrel body is provided with a water inlet, a water outlet, a water injection port and a sewage outlet, the water inlet is arranged lower than the water outlet, the water injection port is arranged at the top of the main barrel body, the sewage outlet is arranged at the bottom of the main barrel body, and the water inlet, water outlet, water injection port and sewage outlet are respectively provided with a first valve, a second valve, a third valve and a fourth valve; the filter barrel is provided with an opening at the top, a filter element is provided inside, and filter holes are provided on the side wall; the water outlet and the water inlet are respectively arranged on the upper and lower sides of the opening.

[0004] In the process of flushing the filter element in the above patent, it is necessary to stop filtering the cutting fluid, which reduces the filtering efficiency of the cutting fluid and increases the time cost. Summary of the invention

[0005] The object of the present invention is to provide a silicon rod cutting liquid recovery and filtering device to solve the technical problems existing in the prior art that the filtering efficiency of the cutting liquid is reduced and the time cost is increased.

[0006] To achieve the above-mentioned purpose, the technical solution adopted by the present invention is: to provide a silicon rod cutting liquid recovery and filtering device, including a cylinder, a water inlet and a water outlet arranged on the cylinder; also including an installation frame slidably arranged in the cylinder, a filter element is arranged in the installation frame, and a replacement inlet and a replacement outlet for the installation frame to slide in or out are correspondingly opened on the opposite side of the cylinder; the installation frame has at least two and only one is arranged on the cylinder; a positioning mechanism for fixing the installation frame is arranged on the cylinder; a support plate hinged to the outside of the cylinder is arranged below the replacement outlet, and a linkage mechanism is arranged between the installation frame and the support plate, the support plate naturally hangs downward when it is in the initial state, and the linkage mechanism is used to drive the support plate to rotate upward to a horizontal state when the installation frame moves toward the replacement outlet; a one-way limiting mechanism is arranged on the cylinder, and the one-way limiting mechanism is used to limit the support plate to only rotate upward or release the restriction. In combination with the above technical solution, in a possible implementation, the inner side walls opposite to each other of the cylinder are provided with sliding grooves for the installation frame to slide inside.

[0007] In combination with the above technical solution, in a possible implementation, the positioning mechanism includes a positioning plate vertically slidably arranged on both sides of the cylinder, a positioning shell fixed on both sides of the mounting frame and for the positioning plate to be inserted downward, and a positioning assembly arranged on the cylinder, and the positioning assembly is used to fix the positioning plate in a position separated from the positioning shell.

[0008] In combination with the above technical solution, in a possible implementation, the positioning assembly includes a fixed shell, an insertion rod and a positioning spring, the fixed shell is fixed on the outside of the cylinder at a position above the positioning plate, the insertion rod is horizontally slidably arranged on the fixed shell, and the positioning spring is arranged on the fixed shell and connected to the insertion rod; a slot is provided on the positioning plate for the inner end of the insertion rod to be inserted; when the inner end of the insertion rod is located in the slot, the positioning plate and the positioning shell are in a separated state, and the positioning spring is in a natural state; the bottom surface of the insertion rod located in the slot is inclined.

[0009] In combination with the above technical solution, in a possible implementation, the linkage mechanism includes a supporting shaft, a transmission shaft, a gear, a rack and a reverse transmission assembly; the supporting shaft is horizontally rotatably connected to the outside of the cylinder, and the supporting plate is fixed on the supporting shaft; the transmission shaft is rotatably connected to the outside of the cylinder and is coaxially arranged with the supporting shaft; the gear is coaxially fixed on the transmission shaft, and the rack is fixed on one side of the mounting frame and is used to engage with the gear; the reverse transmission assembly is arranged between the supporting shaft and the transmission shaft, and the reverse transmission assembly is used to drive the supporting shaft to reverse when the transmission shaft rotates; when the rack engages with the gear until separation, the supporting plate moves upward to a horizontal state.

[0010] In combination with the above technical solution, in a possible implementation method, the reverse transmission assembly includes a sliding screw and a guide frame, the guide frame is fixed to the outside of the cylinder, and the sliding screw is slidably arranged on the guide frame; the opposite end faces of the supporting shaft and the transmission shaft are coaxially provided with threaded holes, and both ends of the sliding screw are simultaneously threadedly connected in the corresponding threaded holes.

[0011] In combination with the above technical solution, in a possible implementation, a guide groove is provided on the outer side of the sliding screw along its length direction, and a guide block located in the guide groove is provided in the guide frame.

[0012] In combination with the above technical solution, in a possible implementation method, the one-way limiting mechanism includes a ratchet, a pawl and a separation assembly, the ratchet is coaxially fixed on the supporting shaft, the pawl is arranged on the separation assembly and engages with the ratchet, and the separation assembly is arranged on the cylinder and is used to drive the pawl to move and separate from the ratchet.

[0013] In combination with the above technical solution, in a possible implementation, the separation assembly includes a slide plate and a separation spring, the slide plate is slidably arranged on the outside of the cylinder, the sliding direction of the slide plate is consistent with the axial direction of the supporting shaft, the separation spring is arranged on the cylinder and connected to the slide plate; the pawl is arranged on the slide plate, and when the separation spring is in a natural state, the pawl is in a meshing state with the ratchet.

[0014] In combination with the above technical solution, in a possible implementation, the slide plate and the cylinder are both embedded with magnets that attract each other, and when the ratchet wheel and the pawl are in a meshing state, the two magnets are directly opposite to each other and tightly attracted to each other.

[0015] The beneficial effect of a silicon rod cutting fluid recovery and filtering device provided by the present invention is that, compared with the prior art, when the filter element needs to be cleaned or replaced, the present invention releases the fixation of the installation frame through the positioning mechanism, inserts the installation frame with the new filter element from the replacement inlet, and makes the installation frame with the old filter element slide out from the replacement outlet, and at the same time, the linkage mechanism drives the support plate to rotate upward to a horizontal state, and at the same time, the one-way limit mechanism limits the rotation direction of the support plate to support the sliding installation frame, and after the installation frame with the new filter element slides to the specified position, it is fixed by the positioning mechanism, and the filtering operation of the cutting fluid can continue, and the filter element can be cleaned or replaced after the sliding installation frame is removed from the support plate, and the cleaning or replacement process of the filter element will not affect the filtering operation of the cutting fluid, thereby improving the filtering efficiency of the cutting fluid and reducing the time cost. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] In order to more clearly illustrate the technical solutions in the embodiments of the present invention, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative labor.

[0017] Figure 1 A schematic diagram of a silicon rod cutting liquid recovery and filtering device provided in an embodiment of the present invention Figure 1 ; Figure 2 A schematic diagram of a silicon rod cutting liquid recovery and filtering device provided in an embodiment of the present invention Figure 2 ; Figure 3 A partial cross-sectional view of the installation frame, filter element and chute provided in an embodiment of the present invention; Figure 4 A partial cross-sectional view of a positioning mechanism provided by an embodiment of the present invention; Figure 5 A schematic diagram of the structure of a linkage mechanism provided by an embodiment of the present invention; Figure 6 A partial cross-sectional view of a reverse transmission assembly provided by an embodiment of the present invention; Figure 7 A partial cross-sectional view of a guide groove and a guide block provided in an embodiment of the present invention; Figure 8 A partial cross-sectional view of a one-way limiting mechanism provided in an embodiment of the present invention.

[0018] Among them, the reference numerals in the figures are as follows: 1. Cylinder; 11. Water inlet; 12. Water outlet; 13. Replace the inlet; 14. Replace the outlet; 15. Slide; 16. Magnet; 2. Mounting frame; 21. Filter element; 3. Positioning mechanism; 31. Positioning plate; 311. Slot; 32. Positioning shell; 33. Positioning assembly; 331. Fixed shell; 332. Insert rod; 333. Positioning spring; 4. Support plate; 5. Linkage mechanism; 51. Support shaft; 511. Threaded hole; 52. Transmission shaft; 53. Gear; 54. Rack; 55. Reverse transmission assembly; 551. Sliding screw; 5511. Guide groove; 552. Guide frame; 5521. Guide block; 6. One-way limiting mechanism; 61. Ratchet; 62. Ratchet; 63. Separation assembly; 631. Slide plate; 632. Separation spring. DETAILED DESCRIPTION

[0019] In order to make the technical problems, technical solutions and beneficial effects to be solved by the present invention clearer, the present invention is further described in detail below in conjunction with the accompanying drawings and embodiments. It should be understood that the described embodiments are only part of the embodiments of the present application, rather than all the embodiments, and the specific embodiments described herein are only used to explain the present invention and are not intended to limit the present invention. Based on the embodiments in the present application, all other embodiments obtained by ordinary technicians in the field without making creative work are within the scope of protection of this application.

[0020] It should be further explained that the drawings and implementation modes of the present invention mainly describe the concept of the present invention. On the basis of this concept, the specific forms and settings of some connection relationships, positional relationships and power mechanisms may not be fully described. However, on the premise that those skilled in the art understand the concept of the present invention, those skilled in the art can implement the above-mentioned specific forms and settings in a well-known manner.

[0021] When an element is referred to as being "fixed to" or "disposed on" another element, it may be directly on the other element or indirectly on the other element. When an element is referred to as being "connected to" another element, it may be directly connected to the other element or indirectly connected to the other element.

[0022] The directional words "inside and outside" refer to the inside and outside relative to the outline of each component itself. The directions or positional relationships indicated by the terms "length", "width", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside" and "outside" are based on the directions or positional relationships shown in the drawings and are only for the convenience of describing the present invention and simplifying the description. They do not indicate or imply that the device or element referred to must have a specific direction, be constructed and operated in a specific direction, and therefore should not be understood as limiting the present invention.

[0023] For ease of description, spatially relative terms such as "above", "above", "on the upper surface of", "above", etc. may be used here to describe the spatial positional relationship between a device or feature and other devices or features as shown in the figure. It should be understood that spatially relative terms are intended to include different orientations of the device in use or operation in addition to the orientation described in the figure. For example, if the device in the accompanying drawings is inverted, the device described as "above other devices or structures" or "above other devices or structures" will be positioned as "below other devices or structures" or "below other devices or structures". Thus, the exemplary term "above" may include both "above" and "below". The device may also be positioned in other different ways, and the spatially relative descriptions used here are interpreted accordingly.

[0024] A silicon rod cutting liquid recovery and filtering device provided by the present invention is now described.

[0025] like Figure 1 and Figure 2 As shown, one embodiment of the present invention provides a silicon rod cutting liquid recovery and filtering device, comprising a cylinder 1, a water inlet 11 and a water outlet 12 arranged on the cylinder 1; also comprising an installation frame 2 slidably arranged in the cylinder 1, a filter element 21 is arranged in the installation frame 2, and a replacement inlet 13 and a replacement outlet 14 for the installation frame 2 to slide in or out are correspondingly opened on the opposite side of the cylinder 1; the installation frame 2 has at least two and only one is arranged on the cylinder 1; a positioning mechanism 3 for fixing the installation frame 2 is arranged on the cylinder 1; a support plate 4 hinged to the outside of the cylinder 1 is arranged below the replacement outlet 14, and a linkage mechanism 5 is arranged between the installation frame 2 and the support plate 4. When the support plate 4 is in the initial state, it naturally hangs downward, and the linkage mechanism 5 is used to drive the support plate 4 to rotate upward to a horizontal state when the installation frame 2 moves toward the replacement outlet 14; a one-way limiting mechanism 6 is arranged on the cylinder 1, and the one-way limiting mechanism 6 is used to limit the support plate 4 to only rotate upward or release the restriction.

[0026] Further, refer to Figure 3 The inner side walls opposite to each other of the cylinder 1 are provided with sliding grooves 15 for the installation frame 2 to slide inside, which can improve the sliding stability of the installation frame 2 in the cylinder 1.

[0027] The silicon rod cutting liquid recovery and filtering device provided in the present embodiment has the advantages that compared with the prior art, when the filter element 21 needs to be cleaned or replaced, the fixing of the installation frame 2 is released by the positioning mechanism 3, and the installation frame 2 with the new filter element 21 is inserted from the replacement inlet 13, so that the installation frame 2 with the old filter element 21 slides out from the replacement outlet 14, and at the same time, the linkage mechanism 5 drives the support plate 4 to rotate upward to a horizontal state, and at the same time, the one-way limit mechanism 6 limits the rotation direction of the support plate 4 to support the sliding installation frame 2. After the installation frame 2 with the new filter element 21 slides to the specified position, it is fixed by the positioning mechanism 3, and the filtering operation of the cutting liquid can be continued. After the sliding installation frame 2 is removed from the support plate 4, the filter element 21 can be cleaned or replaced. The cleaning or replacement process of the filter element 21 will not affect the filtering operation of the cutting liquid, thereby improving the filtering efficiency of the cutting liquid and reducing the time cost.

[0028] like Figure 2 and Figure 4 As shown, the present invention provides a specific implementation method based on the above implementation method as follows: The positioning mechanism 3 includes a positioning plate 31 vertically slidably arranged on both sides of the cylinder 1, a positioning shell 32 fixed on both sides of the mounting frame 2 and for the positioning plate 31 to be inserted downward, and a positioning assembly 33 arranged on the cylinder 1, the positioning assembly 33 is used to fix the positioning plate 31 in a position separated from the positioning shell 32.

[0029] When the installation frame 2 needs to be replaced, the positioning plates 31 on both sides of the cylinder 1 are slid upward and fixed by the positioning components 33, so that the positioning plates 31 and the positioning shells 32 are separated, and the installation frame 2 can be pushed out from the replacement outlet 14. After the installation frame 2 with the new filter element 21 slides into the cylinder 1, the positioning components 33 cancel the fixation of the positioning plates 31, and the positioning plates 31 slide downward and are inserted into the corresponding positioning shells 32 to fix the installation frame 2, thereby improving the convenience of disassembly and assembly of the installation frame 2.

[0030] like Figure 4 As shown, the present invention provides a specific implementation method based on the above implementation method as follows: The positioning assembly 33 includes a fixed shell 331, an insertion rod 332 and a positioning spring 333. The fixed shell 331 is fixed on the outer side of the cylinder 1 at a position above the positioning plate 31. The insertion rod 332 is horizontally slidably set on the fixed shell 331. The positioning spring 333 is set on the fixed shell 331 and connected to the insertion rod 332. A slot 311 is provided on the positioning plate 31 for the inner end of the insertion rod 332 to be inserted. When the inner end of the insertion rod 332 is located in the slot 311, the positioning plate 31 and the positioning shell 32 are in a separated state, and the positioning spring 333 is in a natural state. The bottom surface of the insertion rod 332 located in the slot 311 is inclined.

[0031] When the installation frame 2 needs to be replaced, the positioning plate 31 is slid upward so that its top is inserted into the fixed shell 331. The top of the positioning plate 31 presses the inclined surface of the insertion rod 332, causing the positioning spring 333 to stretch. After the positioning plate 31 slides upward into position, the retraction force of the positioning spring 333 drives the inner end of the insertion rod 332 to insert into the slot 311, thereby fixing the positioning plate 31. After the installation frame 2 with the new filter element 21 slides into the cylinder 1, the insertion rod 332 is directly pulled outward to disengage it from the slot 311, and the positioning plate 31 can slide downward by its own gravity to disengage from the fixed shell 331, thereby improving the overall convenience of operation.

[0032] like Figure 2 and Figure 5 As shown, the present invention provides a specific implementation method based on the above implementation method as follows: The linkage mechanism 5 includes a supporting shaft 51, a transmission shaft 52, a gear 53, a rack 54 and a reverse transmission assembly 55. The supporting shaft 51 is horizontally rotatably connected to the outside of the cylinder 1, and the supporting plate 4 is fixed on the supporting shaft 51; the transmission shaft 52 is rotatably connected to the outside of the cylinder 1 and is coaxially arranged with the supporting shaft 51; the gear 53 is coaxially fixed on the transmission shaft 52, and the rack 54 is fixed on one side of the mounting frame 2 and is used to engage with the gear 53; the reverse transmission assembly 55 is arranged between the supporting shaft 51 and the transmission shaft 52, and the reverse transmission assembly 55 is used to drive the supporting shaft 51 to reverse when the transmission shaft 52 rotates; the rack 54 engages with the gear 53 until separation, and the supporting plate 4 moves upward to a horizontal state.

[0033] When the installation frame 2 is pushed to move toward the replacement outlet 14, the rack 54 on the installation frame 2 moves to engage with the gear 53. At this time, the movement of the installation frame 2 realizes the rotation of the transmission shaft 52 through the gear 53 and the rack 54. The rotation of the transmission shaft 52 drives the supporting shaft 51 to rotate in the opposite direction through the reverse transmission component 55, thereby realizing the upward rotation of the supporting plate 4 until the rack 54 moves to separate from the gear 53. The one-way limiting mechanism 6 keeps the supporting plate 4 in a horizontal state so that the supporting plate 4 supports the installation frame 2, thereby improving the linkage effect and operation convenience between the movement of the installation frame 2 toward the replacement outlet 14 and the upward rotation of the supporting plate 4.

[0034] like Figures 5 and 6 As shown, the present invention provides a specific implementation method based on the above implementation method as follows: The reverse transmission assembly 55 includes a sliding screw 551 and a guide frame 552. The guide frame 552 is fixed to the outside of the cylinder 1, and the sliding screw 551 is slidably set on the guide frame 552. The opposite end faces of the supporting shaft 51 and the transmission shaft 52 are coaxially provided with threaded holes 511, and both ends of the sliding screw 551 are simultaneously threadedly connected in the corresponding threaded holes 511.

[0035] When pushing the installation frame 2 to move toward the replacement outlet 14, the transmission shaft 52 rotates counterclockwise, and the rotation of the transmission shaft 52 drives the sliding screw 551 to move toward the threaded hole 511 of the supporting shaft 51. Since the sliding screw 551 is in a sliding-out state in the threaded hole 511 in the transmission shaft 52, and the sliding screw 551 is in a sliding-in state in the threaded hole 511 in the supporting shaft 51, the sliding screw 551 drives the supporting shaft 51 to rotate clockwise, thereby realizing the upward rotation of the supporting plate 4. The transmission process is stable and precise, thereby improving the linkage effect between the movement of the installation frame 2 toward the replacement outlet 14 and the upward rotation of the supporting plate 4.

[0036] Furthermore, in order to better improve the transmission effect between the sliding screw 551 and the two threaded holes 511, in this embodiment, the sliding screw 551 and the two threaded holes 511 can be connected through a ball thread, which can be specifically achieved through a ball screw.

[0037] Furthermore, in order to reduce the thread friction between the sliding screw 551 and the threaded hole 511 , the support plate 4 in this embodiment may be made of a lightweight thin plate, which is achieved by reducing the weight of the support plate 4 .

[0038] like Figure 6 to Figure 7 As shown, the present invention provides a specific implementation method based on the above implementation method as follows: A guide groove 5511 is formed on the outer side of the sliding screw rod 551 along its length direction, and a guide block 5521 located in the guide groove 5511 is provided in the guide frame 552 .

[0039] When the rotation of the transmission shaft 52 drives the sliding screw 551 to move, the guide block 5521 always slides relatively in the guide groove 5511. The guide frame 552 and the guide block 5521 can support and guide the sliding screw 551, thereby improving the movement stability of the sliding screw 551.

[0040] like Figure 5 and Figure 8 As shown, the present invention provides a specific implementation method based on the above implementation method as follows: The one-way limiting mechanism 6 includes a ratchet 61, a pawl 62 and a separation assembly 63. The ratchet 61 is coaxially fixed on the supporting shaft 51. The pawl 62 is arranged on the separation assembly 63 and meshes with the ratchet 61. The separation assembly 63 is arranged on the cylinder 1 and is used to drive the pawl 62 to move and separate from the ratchet 61.

[0041] When the supporting shaft 51 rotates, it drives the ratchet 61 to rotate synchronously, and the pawl 62 realizes a one-way limiting effect on the supporting shaft 51 through the ratchet 61; after the installation frame 2 is removed from the supporting plate 4, the pawl 62 is driven to separate from the ratchet 61 through the separation component 63, and the supporting plate 4 can drive the supporting shaft 51 to reset in the opposite direction by relying on its own gravity, and the pawl 62 can be engaged with the ratchet 61 again through the separation component 63, thereby improving the overall stability of the supporting shaft 51 during the upward rotation process and after the rotation is completed.

[0042] like Figures 5 to 8 As shown, the present invention provides a specific implementation method based on the above implementation method as follows: The separation assembly 63 includes a slide plate 631 and a separation spring 632. The slide plate 631 is slidably arranged on the outside of the cylinder 1. The sliding direction of the slide plate 631 is consistent with the axial direction of the supporting shaft 51. The separation spring 632 is arranged on the cylinder 1 and connected to the slide plate 631. The pawl 62 is arranged on the slide plate 631. When the separation spring 632 is in a natural state, the pawl 62 is in a meshing state with the ratchet 61.

[0043] After the mounting frame 2 is removed from the supporting plate 4, the slide plate 631 is pushed to drive the pawl 62 to move, thereby separating the pawl 62 from the ratchet 61. After the supporting plate 4 drives the supporting shaft 51 and the ratchet 61 to reverse and reset, the separation spring 632 drives the slide plate 631 to reset, thereby re-engaging the pawl 62 and the ratchet 61, thereby improving the convenience of operation.

[0044] like Figure 8 As shown, the present invention provides a specific implementation method based on the above implementation method as follows: The slide plate 631 and the cylinder body 1 are both embedded with magnets 16 that attract each other. When the ratchet wheel 61 and the pawl 62 are in a meshing state, the two magnets 16 are opposite to each other and tightly attracted to each other.

[0045] The two magnets 16 can make the slide plate 631 and the cylinder body 1 more stable, thereby improving the meshing stability between the ratchet wheel 61 and the pawl 62 .

[0046] The above are only preferred embodiments of the present invention and are not intended to limit the present invention. Any modifications, equivalent substitutions and improvements made within the spirit and principles of the present invention should be included in the protection scope of the present invention.

[0047] It should be noted that the terms used herein are only for describing specific embodiments and are not intended to limit the exemplary embodiments according to the present application. As used herein, unless the context clearly indicates otherwise, the singular form is also intended to include the plural form. In addition, it should be understood that when the terms "comprise" and / or "include" are used in this specification, it indicates the presence of features, steps, operations, devices, components and / or combinations thereof.

[0048] Unless otherwise specifically stated, the relative arrangement, numerical expressions and numerical values ​​of the parts and steps set forth in these embodiments do not limit the scope of the application. Meanwhile, it should be understood that, for ease of description, the sizes of the various parts shown in the accompanying drawings are not drawn according to actual proportional relationships. The technology, methods and equipment known to those of ordinary skill in the relevant art may not be discussed in detail, but in appropriate cases, the technology, methods and equipment should be considered as a part of the specification. In all examples shown and discussed here, any specific value should be interpreted as being merely exemplary, rather than as a limitation. Therefore, other examples of exemplary embodiments may have different values. It should be noted that similar reference numerals and letters represent similar items in the following drawings, and therefore, once a certain item is defined in an accompanying drawing, it does not need to be further discussed in subsequent drawings.

Claims

1. A silicon rod cutting liquid recovery and filtering device, comprising a cylinder (1), a water inlet (11) and a water outlet (12) arranged on the cylinder (1); characterized in that: It also comprises an installation frame (2) slidably arranged in the cylinder (1), a filter element (21) being arranged in the installation frame (2), and a replacement inlet (13) and a replacement outlet (14) for the installation frame (2) to slide in or out are provided on the opposite side of the cylinder (1); the installation frame (2) has at least two and only one is arranged on the cylinder (1); a positioning mechanism (3) for fixing the installation frame (2) is arranged on the cylinder (1); a filter element (21) is provided below the replacement outlet (14) and is hinged to the cylinder. (1) an outer support plate (4), a linkage mechanism (5) is provided between the mounting frame (2) and the support plate (4), the support plate (4) naturally hangs downward when in an initial state, and the linkage mechanism (5) is used to drive the support plate (4) to rotate upward to a horizontal state when the mounting frame (2) moves toward the replacement outlet (14); a one-way limiting mechanism (6) is provided on the cylinder (1), and the one-way limiting mechanism (6) is used to limit the support plate (4) to only rotate upward or release the restriction.

2. A silicon rod cutting liquid recovery and filtering device as claimed in claim 1, characterized in that: The inner side walls opposite to each other of the cylinder (1) are provided with sliding grooves (15) for the installation frame (2) to slide inside.

3. A silicon rod cutting liquid recovery and filtering device as claimed in claim 1, characterized in that: The positioning mechanism (3) comprises positioning plates (31) vertically slidably arranged on both sides of the cylinder (1), a positioning shell (32) fixed on both sides of the installation frame (2) and into which the positioning plate (31) is inserted downwardly, and a positioning assembly (33) arranged on the cylinder (1), the positioning assembly (33) being used to fix the positioning plate (31) at a position separated from the positioning shell (32).

4. A silicon rod cutting liquid recovery and filtering device as claimed in claim 3, characterized in that: The positioning assembly (33) comprises a fixed shell (331), an insertion rod (332) and a positioning spring (333); the fixed shell (331) is fixed on the outer side of the cylinder (1) at a position above the positioning plate (31); the insertion rod (332) is horizontally slidably arranged on the fixed shell (331); the positioning spring (333) is arranged on the fixed shell (331) and is connected to the insertion rod (332); the positioning plate (31) is provided with a slot (311) for the inner end of the insertion rod (332) to be inserted; when the inner end of the insertion rod (332) is located in the slot (311), the positioning plate (31) and the positioning shell (32) are in a separated state, and the positioning spring (333) is in a natural state; the bottom surface of the insertion rod (332) located in the slot (311) is inclined.

5. The silicon rod cutting liquid recovery and filtering device according to claim 1, characterized in that: The linkage mechanism (5) comprises a supporting shaft (51), a transmission shaft (52), a gear (53), a rack (54) and a reverse transmission assembly (55); the supporting shaft (51) is horizontally rotatably connected to the outside of the cylinder (1), and the supporting plate (4) is fixed on the supporting shaft (51); the transmission shaft (52) is rotatably connected to the outside of the cylinder (1) and is coaxially arranged with the supporting shaft (51); the gear (53) is coaxially fixed to the transmission shaft (52), and the rack (54) is fixed on one side of the mounting frame (2) and is used to mesh with the gear (53); the reverse transmission assembly (55) is arranged between the supporting shaft (51) and the transmission shaft (52), and is used to drive the supporting shaft (51) to rotate in the reverse direction when the transmission shaft (52) rotates; when the rack (54) meshes with the gear (53) until they are separated, the supporting plate (4) moves upward to a horizontal state.

6. A silicon rod cutting liquid recovery and filtering device as claimed in claim 5, characterized in that: The reverse transmission assembly (55) comprises a sliding screw (551) and a guide frame (552), wherein the guide frame (552) is fixed to the outside of the cylinder (1), and the sliding screw (551) is slidably arranged on the guide frame (552); the end surfaces opposite to each other of the support shaft (51) and the transmission shaft (52) are coaxially provided with threaded holes (511), and both ends of the sliding screw (551) are simultaneously threadedly connected in the corresponding threaded holes (511).

7. A silicon rod cutting liquid recovery and filtering device as claimed in claim 6, characterized in that: A guide groove (5511) is provided on the outer side of the sliding screw rod (551) along its length direction, and a guide block (5521) located in the guide groove (5511) is provided in the guide frame (552).

8. The silicon rod cutting liquid recovery and filtering device according to claim 5, characterized in that: The one-way limiting mechanism (6) comprises a ratchet (61), a pawl (62) and a separation assembly (63); the ratchet (61) is coaxially fixed on the supporting shaft (51); the pawl (62) is arranged on the separation assembly (63) and meshes with the ratchet (61); the separation assembly (63) is arranged on the cylinder (1) and is used to drive the pawl (62) to move to separate from the ratchet (61).

9. A silicon rod cutting liquid recovery and filtering device as claimed in claim 8, characterized in that: The separation component (63) comprises a slide plate (631) and a separation spring (632); the slide plate (631) is slidably arranged on the outside of the cylinder (1); the sliding direction of the slide plate (631) is consistent with the axial direction of the supporting shaft (51); the separation spring (632) is arranged on the cylinder (1) and connected to the slide plate (631); the pawl (62) is arranged on the slide plate (631); when the separation spring (632) is in a natural state, the pawl (62) and the ratchet (61) are in a meshing state.

10. A silicon rod cutting liquid recovery and filtering device as claimed in claim 9, characterized in that: The slide plate (631) and the cylinder (1) are both embedded with magnets (16) that attract each other, and when the ratchet wheel (61) and the ratchet pawl (62) are in a meshing state, the two magnets (16) face each other and adhere to each other.

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