A phosphine gas purification device

Abstract

The present invention discloses a phosphine gas purification device, and specifically relates to a phosphine gas purification device, including a combined purification screen arranged in a shell, wherein the combined purification screen includes: a movable support, which includes a base and a sliding sleeve that slides vertically along the base; a mobile filter bin that is slidably connected to the sliding sleeve in a linear array, and multiple mobile filter bins respectively contain molecular sieves of different specifications. The invention places molecular sieves of different specifications in multiple mobile filter bins respectively. When in use, multiple mobile filter bins are fitted together to form a moving channel for phosphine gas, and different impurities in the phosphine gas are separated. When the molecular sieve needs to be replaced, it is only necessary to take out the entire combined purification screen and replace it as a whole, and it is not necessary to take out the molecular sieves in the mobile filter bins one by one. In the regeneration step of the molecular sieve, the sliding sleeve is driven to move, so as to move the mobile filter bins away from each other while opening the top to facilitate heating and regenerating the molecular sieve.

Description

Technical Field

[0001] The invention relates to the technical field of phosphine purification, and in particular to a phosphine gas purification device. Background Art

[0002] Phosphine, as one of the electronic special gases, can be used as a dopant in the preparation of semiconductors.

[0003] During preparation, there are certain requirements for the purity of phosphine, and the phosphine gas needs to be purified to reduce the impact of impurities on semiconductors.

[0004] According to patent number CN111892030B, published (announcement) date: 2021-07-16, a method for synthesizing and purifying phosphine is disclosed, comprising the following steps: hydrolysis reaction to obtain crude phosphine; condensing the crude phosphine at a temperature of -50 to -10°C and drying it, and subjecting the condensed and dried crude phosphine to multi-stage distillation to obtain gaseous primary pure phosphine, wherein hydrogen peroxide containing free radicals is pre-sprayed in the multi-stage distillation; primary pure phosphine is screened at least once using a molecular sieve to remove residual water, oxygen and carbon dioxide in the primary pure phosphine, and obtain high-purity phosphine. It prepares crude phosphine by the reaction of zinc phosphide and an acid solution, and then the crude phosphine is successively dried, dehydrogenated, distilled, adsorbed and screened by an alkaline solution to purify the phosphine, thereby obtaining high-purity phosphine, which abandons the traditional method of preparing phosphine by hydrolysis of metal phosphides, and has a high reaction yield and purity.

[0005] In the prior art including the above-mentioned patents, after phosphine is produced, a small amount of impurities such as methane and arsine will exist inside, which need to be separated by molecular sieves (spherical microporous crystals) to purify the phosphine gas. In the purification process, molecular sieves of different specifications are often used to carry out targeted separation of different impurities, and the molecular sieves need to be replaced after being used for a period of time so as to be reused through regeneration operations. As a result, multiple pipeline ports need to be opened and closed each time for replacing multiple molecular sieves of different specifications, which complicates the operation and affects production efficiency. Summary of the invention

[0006] The purpose of the present invention is to provide a phosphine gas purification device, aiming to solve the problem that the replacement of multiple molecular sieves is complicated and affects the production efficiency.

[0007] In order to achieve the above object, the present invention provides the following technical solution: a phosphine gas purification device, comprising a combined purification screen arranged in a housing, the combined purification screen comprising:

[0008] A movable support member, comprising a base and a sliding sleeve that slides vertically along the base;

[0009] The mobile filter bins are slidably connected to the sliding sleeve in a linear array. Molecular sieves of different specifications are respectively contained in the multiple mobile filter bins. The mobile filter bins are switched between the following two positions:

[0010] First station: the mobile filter bin moves with the sliding sleeve close to the base, and is mutually attached and communicated with the adjacent mobile filter bin;

[0011] Second workstation: the mobile filter bin moves away from the base along with the sliding sleeve, moves away from the adjacent mobile filter bin, and opens the top.

[0012] Preferably, the mobile filter bin comprises an outer sliding cover and an inner sliding cover which slide against each other, and a top covering plate is arranged on the outer sliding cover. The outer sliding cover and the inner sliding cover move away from each other as the mobile filter bin switches positions, so that the top covering plate opens the top of the inner sliding cover and the outer sliding cover and the inner sliding cover move closer to each other as the positions are switched.

[0013] Preferably, the outer sliding cover is rotatably connected with a flip segment block, and the flip segment block is switched between the following two positions:

[0014] The third station: the flip segment block flips toward the inner sliding cover as the mobile filtering bin switches to the first station to form a "concave" channel and raise the height of the molecular sieve;

[0015] Fourth station: the flip segment block switches to the second station along with the mobile filtering chamber, flips and moves out of the outer sliding cover, and lowers the height of the molecular sieve.

[0016] Preferably, the top cover plate is provided with a diversion air inlet corresponding to the raised end of the "concave" type channel and an impurity exhaust port corresponding to the depressed portion of the "concave" type channel.

[0017] Preferably, the sliding sleeve is slidably connected with a sliding plate, the inner sliding cover is arranged on the sliding plate, the diversion air inlet is provided with an air intake diversion pipe, and the air intake diversion pipe approaches each other along with the mobile filter bin to fit into the docking groove group opened on the adjacent inner sliding cover.

[0018] Preferably, coupling gears are arranged in a linear array in the sliding sleeve, a synchronous belt is arranged between the plurality of coupling gears, and the diameters of the coupling gears increase successively so that the contact plates are driven by the coupling gears of different sizes to move away from or closer to each other.

[0019] Preferably, it also includes a guiding mechanism, which includes a guiding flip plate rotatably connected to the base, the outer sliding cover is slidably connected to the guiding flip plate, and a coupling arc is provided on the flip segment block. The flip segment block moves with the mobile filter bin and flips by coupling the guiding flip plate through the coupling arc.

[0020] Preferably, the outer sliding cover is provided with an elastic frame slidably connected to the guide flip plate.

[0021] Preferably, the guide flip plate is rotatably connected to an extended flip plate, and a locking buckle is provided on the extended flip plate. When the extended flip plate flips, the locking buckle is engaged with a locking block provided on the sliding sleeve.

[0022] Preferably, the sliding sleeve is driven to move reciprocally to drive the top covering plate to open and close and to flip the flip segment block.

[0023] In the above technical scheme, a phosphine gas purification device provided by the present invention has the following beneficial effects: molecular sieves of different specifications are placed in a plurality of mobile filter bins respectively, and when in use, a plurality of mobile filter bins are fitted together to form a mobile channel for the phosphine gas, so that different impurities in the phosphine gas are separated, and when the molecular sieve needs to be replaced, only the entire combined purification sieve needs to be taken out and replaced as a whole, and the molecular sieves in the mobile filter bins do not need to be taken out one by one, and in the regeneration step of the molecular sieve, the sliding sleeve is driven to move to move the mobile filter bins away from each other while opening the top to facilitate heating and regenerating the molecular sieve. BRIEF DESCRIPTION OF THE DRAWINGS

[0024] In order to more clearly illustrate the embodiments of the present application or the technical solutions in the prior art, the drawings required for use in the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments recorded in the present invention. For ordinary technicians in this field, other drawings can also be obtained based on these drawings.

[0025] Figure 1 An overall schematic diagram provided for an embodiment of the present invention;

[0026] Figure 2 A schematic diagram of the positions of the isolation cover and the mobile filter bin provided in an embodiment of the present invention;

[0027] Figure 3 An overall explosion diagram provided for an embodiment of the present invention;

[0028] Figure 4 for Figure 3 The enlarged schematic diagram at A in the middle;

[0029] Figure 5 A schematic diagram of an explosion of a mobile filtration bin provided in an embodiment of the present invention;

[0030] Figure 6 for Figure 5 The enlarged schematic diagram of point B in the middle;

[0031] Figure 7An exploded schematic diagram of a movable support member provided in an embodiment of the present invention;

[0032] Figure 8 An overall cross-sectional schematic diagram provided for an embodiment of the present invention;

[0033] Fig. 9 for Figure 8 The enlarged schematic diagram at C in the middle;

[0034] Fig.10 Schematic diagram of a shell and a combined purification screen provided in an embodiment of the present invention.

[0035] Description of reference numerals:

[0036] 1. Combined purification screen; 11. Movable support; 111. Sliding column; 112. Spring; 12. Isolation cover; 121. Vertical partition plate; 122. Horizontal partition plate; 123. Air outlet; 13. Sliding sleeve; 131. Guide slide groove; 132. Coupling gear; 133. Synchronous belt; 14. Sliding plate; 141. Docking groove group; 2. Guide mechanism; 21. Guide flip plate; 210. Limit plate; 2 2. Extended flip plate; 221. Locking buckle; 222. Stagnation plate; 23. Locking block; 3. Mobile filter bin; 31. Outer sliding cover; 310. Elastic frame; 311. Top cover plate; 312. Diverter air inlet; 313. Impurity exhaust port; 314. Inlet diverter pipe; 315. Bottom groove; 32. Inner sliding cover; 33. Flip segment block; 4. Inlet and outlet components; 41. Inlet pipe; 42. Outlet pipe. DETAILED DESCRIPTION

[0037] In order to make the purpose, technical solution and advantages of the embodiments of the present disclosure clearer, the technical solution of the embodiments of the present disclosure will be clearly and completely described below in conjunction with the drawings of the embodiments of the present disclosure. Obviously, the described embodiments are part of the embodiments of the present disclosure, not all of the embodiments. Based on the described embodiments of the present disclosure, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present disclosure.

[0038] like Figure 1-10 As shown, a phosphine gas purification device includes a combined purification screen 1 arranged in a housing, and the combined purification screen 1 includes:

[0039] A movable support member 11, comprising a base and a sliding sleeve 13 that slides vertically along the base;

[0040] The mobile filter chamber 3 is slidably connected to the sliding sleeve 13 in a linear array. Molecular sieves of different specifications are respectively contained in the multiple mobile filter chambers 3. The mobile filter chamber 3 is switched between the following two positions:

[0041] First station: the mobile filter bin 3 moves with the sliding sleeve 13 close to the base, and is connected with the adjacent mobile filter bin 3;

[0042] Second station: The mobile filter bin 3 moves away from the base along with the sliding sleeve 13, moves away from the adjacent mobile filter bin 3, and opens the top.

[0043] Specifically, a bin body for carrying the combined purification screen 1 is provided in the shell, a sliding column 111 is provided on the base, a sliding sleeve 13 is slidably connected to the sliding column 111, and a spring 112 is provided between the two. The spring 112 is used to assist the sliding sleeve 13 to slide away from the base. An isolation cover 12 is symmetrically provided on the base, and the isolation cover 12 includes vertical partition plates 121 symmetrically provided on the upper surface, and horizontal partition plates 122 are provided in a linear array on the isolation cover 12. The number of horizontal partition plates 122 corresponds to the number of mobile filter bins 3. When installing the combined purification screen 1, molecular sieves of different specifications are placed in the mobile filter bin 3 with an open top at the second station, and then the sliding sleeve 13 is pushed close to the bottom. At this time, the mobile filter bin 3 is switched to the first station, so that multiple mobile filter bins 3 move close to the base with the sliding sleeve 13, and the mobile filter bins 3 are connected to each other with adjacent mobile filter bins 3. When taking out the combined purification sieve 1 for regeneration, it is only necessary to take out the mobile filter chamber 3 from the housing as a whole. At this time, due to the push of the spring 112, the mobile filter chamber 3 will switch to the second station, so that the mobile filter chamber 3 moves away from the base with the sliding sleeve 13, and the mobile filter chamber 3 and the adjacent mobile filter chamber 3 are separated from each other and the top is opened, so that the retentate on the molecular sieve evaporates and is discharged along the open top during heating. The whole process does not require the replacement of multiple molecular sieves separately, and replacing them together simplifies the steps and facilitates the regeneration operation.

[0044] Furthermore, the housing and the input and output pipes are made of stainless steel to prevent phosphine corrosion and leakage. The housing is provided with an inlet and outlet assembly 4, which includes an inlet pipe 41 and an outlet pipe 42. The inlet pipe 41 and the outlet pipe 42 are symmetrically arranged. The inlet pipe 41 is connected to the main inlet through a three-way pipe (such as Fig.10 As shown in FIG. 1 ), the air outlet pipe 42 is connected to the total air outlet through a three-way pipe. When installing the combined purification screen 1, the combined purification screen 1 is moved to the front of the bin body, and the air inlet pipe 41 and the air outlet pipe 42 are first connected to the mobile filtering bin 3, as shown in FIG. Fig.10 As shown, the prior art is not described in detail.

[0045] In the above technical scheme, molecular sieves of different specifications are placed in a plurality of mobile filter chambers 3 respectively. When in use, a plurality of mobile filter chambers 3 are fitted together to form a mobile channel for phosphine gas, so that different impurities in the phosphine gas are separated. When the molecular sieve needs to be replaced, only the entire combined purification sieve 1 needs to be taken out and replaced as a whole, and the molecular sieves in the mobile filter chamber 3 do not need to be taken out one by one. In the regeneration step of the molecular sieve, the sliding sleeve 13 is driven to move so as to move the mobile filter chambers 3 away from each other while opening the top to facilitate heating and regenerating the molecular sieve.

[0046] As an embodiment provided by the present invention, the mobile filter bin 3 includes an outer sliding cover 31 and an inner sliding cover 32 that slide against each other, and a top covering plate 311 is provided on the outer sliding cover 31. The outer sliding cover 31 and the inner sliding cover 32 move away from each other as the mobile filter bin 3 switches positions, so that the top covering plate 311 opens the top of the inner sliding cover 32 and approaches each other as the positions are switched.

[0047] Specifically, the outer sliding cover 31 and the inner sliding cover 32 slide with each other. When the mobile filter bin 3 is in the second position, the outer sliding cover 31 and the inner sliding cover 32 will slide to expand the distance between the two, and pull the top cover plate 311 to open the top while increasing the volume to increase the contact surface between the molecular sieve and the air, so as to facilitate the evaporation of impurities when the molecular sieve is heated and regenerated. When the mobile filter bin 3 is in the first position, the mobile filter bin 3 moves close to the base with the sliding sleeve 13. At this time, the distance between the outer sliding cover 31 and the inner sliding cover 32 is reduced to gather the molecular sieve and reduce the passage of phosphine gas carrying impurities.

[0048] When installing the combined purification screen 1, the sliding sleeve 13 is pushed close to the bottom, and the mobile filter bin 3 is switched to the first position, so that multiple mobile filter bins 3 move close to the base with the sliding sleeve 13, and the mobile filter bin 3 and the adjacent mobile filter bins 3 are connected to each other, and the distance between the outer sliding cover 31 and the inner sliding cover 32 is reduced. When taking the combined purification screen 1 for regeneration, it is only necessary to take the mobile filter bin 3 out of the shell as a whole. At this time, due to the push of the spring 112, the mobile filter bin 3 will switch to the second position, so that the mobile filter bin 3 moves away from the base with the sliding sleeve 13, and the mobile filter bin 3 and the adjacent mobile filter bin 3 are away from each other. At the same time, the outer sliding cover 31 and the inner sliding cover 32 will slide to expand the distance between them, and pull the top cover plate 311 to open the top while increasing the volume.

[0049] As an embodiment provided by the present invention, a flip segment block 33 is rotatably connected to the outer sliding cover 31, and the flip segment block 33 is switched between the following two positions:

[0050] The third station: the flipping segment block 33 switches to the first station with the mobile filtering chamber 3, and the inner sliding cover 32 flips to form a "concave" channel and raise the height of the molecular sieve;

[0051] The fourth station: the flipping segment block 33 switches to the second station along with the mobile filtering chamber 3, and flips and moves out of the outer sliding cover 31, and lowers the height of the molecular sieve.

[0052] Specifically, an arc angle is set at one end of the flip segment block 33 facing the inner sliding cover 32. When the mobile filter bin 3 is switched to the first station, the flip segment block 33 is switched to the third station. At this time, the flip segment block 33 will flip toward the inner sliding cover 32 to form a "concave" channel. Figure 5 For reference, the depression of the "concave" channel faces the left end, and the flip segment block 33 will occupy the space of the inner sliding cover 32 to assist in raising the height of the molecular sieve. At the same time, the "concave" channel formed will also guide the phosphine gas to pass through, thereby increasing the filtering effect. When the mobile filter bin 3 is switched to the second station for regeneration, the flip segment block 33 will flip and switch to the fourth station, move out of the outer sliding cover 31, and lower the height of the molecular sieve to avoid affecting the area of ​​the molecular sieve in contact with the air.

[0053] When installing the combined purification screen 1, the sliding sleeve 13 is pushed close to the bottom. At this time, the mobile filter bin 3 is switched to the first position, so that multiple mobile filter bins 3 move close to the base with the sliding sleeve 13, and the mobile filter bins 3 are connected to each other with adjacent mobile filter bins 3. At this time, the distance between the outer sliding cover 31 and the inner sliding cover 32 is reduced, and the flip segment block 33 is switched to the third position. At this time, the flip segment block 33 will flip toward the inner sliding cover 32 to form a "concave" channel to guide the phosphine gas to pass through. When taking out the combined purification screen 1 for regeneration, it is only necessary to take out the mobile filter bin 3 from the shell as a whole. At this time, due to the push of the spring 112, the mobile filter bin 3 will switch to the second station, so that the mobile filter bin 3 moves away from the base with the sliding sleeve 13, and the mobile filter bin 3 and the adjacent mobile filter bin 3 move away from each other. At the same time, the outer sliding cover 31 and the inner sliding cover 32 will slide to expand the distance between the two, and pull the top cover plate 311 to open the top while increasing the volume, and the flip segment block 33 will flip and switch to the fourth station, move out the outer sliding cover 31, and lower the height of the molecular sieve.

[0054] As an embodiment provided by the present invention, a split air inlet 312 corresponding to the raised end of the "concave" channel and an impurity exhaust port 313 corresponding to the recessed portion of the "concave" channel are provided on the top cover plate 311;

[0055] The sliding sleeve 13 is slidably connected with a sliding plate 14, the inner sliding cover 32 is arranged on the sliding plate 14, and the split air inlet 312 is provided with an air intake splitter pipe 314. The air intake splitter pipe 314 moves closer to each other with the mobile filter bin 3 to fit the docking groove group 141 opened on the adjacent inner sliding cover 32.

[0056] Specifically, the first end of the intake manifold 314 (with Figure 4For reference, the first end is the left end, and the second end is the right end) the cover is arranged on the diverter air inlet 312, and the diverter air inlet 312 corresponds to the raised end of the "concave" channel, and the sliding plate 14 and the inner sliding cover 32 are both provided with a docking groove group 141, the outer sliding cover 31 is slidably connected to the sliding plate 14, and the outer sliding cover 31 is provided with a bottom groove 315, and the bottom groove 315 will overlap and dock with the docking groove group 141 when the outer sliding cover 31 and the inner sliding cover 32 slide close to each other, and the bottom groove 315 will also dock with the right end of the second end of the adjacent air intake diverter pipe 314 when the mobile filter bins 3 approach each other, so that multiple mobile filter bins 3 are connected to each other.

[0057] Furthermore, an air outlet 123 is provided between adjacent horizontal partition plates 122 , and the air outlet 123 is connected to the impurity pipeline. The horizontal partition plates 122 separate the multiple mobile filter chambers 3 , so that the impurities separated in a single mobile filter chamber 3 are discharged through the air outlet 123 .

[0058] As an embodiment provided by the present invention, coupling gears 132 are arranged in a linear array in the sliding sleeve 13, and a synchronous belt 133 is arranged between the multiple coupling gears 132. The diameters of the coupling gears 132 increase successively, so that the sliding plates 14 are driven by the coupling gears 132 of different sizes to move away from or approach each other.

[0059] Specifically, the sliding sleeve 13 is provided with a guide groove 131, and the sliding plate 14 is slidably connected to the guide groove 131. The guide groove 131 is rotatably connected with coupling gears 132 arranged in a linear array. A synchronous belt 133 is sleeved between the coupling gears 132. The diameter of the coupling gears 13 increases in sequence (in Figure 7 For reference, the diameter increases from bottom to top), multiple coupling gears 132 are coupled to the sliding plate 14, and the smallest coupling gear 132 at the lower end is coupled to the sliding column 111, and drives the synchronous belt 133 to rotate, so that all other coupling gears 132 rotate synchronously with the lower coupling gear 132, and the coupling gears 132 at different positions have different diameters, so that when the sliding plate 14 moves and fits the coupling gears 132 at different positions, the moving distance of the sliding plate 14 will be different, so that the multiple mobile filter chambers 3 are moved closer to or farther away from each other as the sliding plate 14 moves, thereby realizing the switching of the mobile filter chamber 3 workstations.

[0060] When installing the combined purification screen 1, the sliding sleeve 13 is pushed close to the bottom, and the coupling gear 132 at the lower end rotates with the sliding sleeve 13 coupled with the sliding column 111, so that multiple sliding plates 14 move along the sliding sleeve 13 with the rotation of the remaining coupling gears 132. At this time, the mobile filter bin 3 switches to the first station, so that multiple mobile filter bins 3 move close to the base with the sliding sleeve 13, and the mobile filter bins 3 are connected to the adjacent mobile filter bins 3. At this time, the distance between the outer sliding cover 31 and the inner sliding cover 32 is reduced, and the flip segment block 33 is switched to the third station. At this time, the flip segment block 33 will flip toward the inner sliding cover 32 to form a "concave" channel to guide the phosphine gas to pass through. When taking out the combined purification screen 1 for regeneration, it is only necessary to take out the mobile filter bin 3 from the shell as a whole. At this time, due to the push of the spring 112, the coupling gear 132 at the lower end rotates with the sliding sleeve 13 coupled with the sliding column 111, so that the multiple sliding plates 14 move along the sliding sleeve 13 with the rotation of the remaining coupling gears 132, so as to switch the mobile filter bin 3 to the second station, so that the mobile filter bin 3 moves away from the base with the sliding sleeve 13, and the mobile filter bin 3 and the adjacent mobile filter bins 3 move away from each other, and at the same time, the outer sliding cover 31 and the inner sliding cover 32 will slide to expand the distance between the two, and pull the top cover plate 311 to open the top while increasing the volume, and the flip segment block 33 will flip and switch to the fourth station, move out of the outer sliding cover 31, and lower the height of the molecular sieve.

[0061] As an embodiment provided by the present invention, it also includes a guiding mechanism 2, which includes a guiding flip plate 21 rotatably connected to the base, an outer sliding cover 31 slidably connected to the guiding flip plate 21, and a coupling arc is provided on the flip segment block 33. The flip segment block 33 moves with the mobile filter bin 3 and flips through the coupling arc coupling to the guiding flip plate 21;

[0062] The outer sliding cover 31 is provided with an elastic frame 310 slidably connected to the guide flip plate 21 .

[0063] Specifically, the outer sliding cover 31 is slidably connected to the guide flip plate 21 through the elastic frame 310, and a coupling arc is provided on the flip segment block 33, and the coupling arc fits the side wall of the guide flip plate 21. When the mobile filter chamber 3 is switched from the second station to the first station for filtering, the guide flip plate 21 is flipped to a vertical state and locked. At this time, the mobile filter chamber 3 will move toward the base, and the coupling arc will fit the side wall of the guide flip plate 21 as the mobile filter chamber 3 moves, so as to drive the flip segment block 33 to move toward the mobile filter chamber 3. The guide flip plate 21 rotates inside, thereby switching to the third station to form a "concave" channel. When the mobile filtration bin 3 switches from the first station to the second station, the guide flip plate 21 is flipped to an inclined state to pull apart the outer sliding cover 31 and the inner sliding cover 32 to perform heating regeneration of the molecular sieve. At the same time, the outer sliding cover 31 slides along the guide flip plate 21 away from the base through the elastic frame 310, so as to drive the flip segment block 33 to flip through the coupling arc coupling guide flip plate 21 side wall, and move out of the outer sliding cover 31 to reduce the height of the molecular sieve.

[0064] When installing the combined purification screen 1, the sleeve 13 is pushed close to the bottom, and the coupling gear 132 at the lower end rotates with the sliding sleeve 13 coupled with the sliding column 111, so that multiple sliding plates 14 move along the sleeve 13 with the rotation of the remaining coupling gears 132. At this time, the mobile filter bin 3 is switched to the first station, so that multiple mobile filter bins 3 move close to the base with the sleeve 13, and the mobile filter bins 3 are connected to the adjacent mobile filter bins 3. At this time, the distance between the outer sliding cover 31 and the inner sliding cover 32 is reduced. At the same time, the guide flip plate 21 is flipped to a vertical state and locked, and the flip segment block 33 is switched to the third station. At this time, the flip segment block 33 will flip toward the inner sliding cover 32 to form a "concave" channel to guide the phosphine gas to pass through. When taking out the combined purification screen 1 for regeneration, it is only necessary to take out the mobile filter bin 3 as a whole from the shell. At this time, due to the push of the spring 112, the coupling gear 132 at the lower end rotates with the sliding sleeve 13 coupled with the sliding column 111, so that the multiple sliding plates 14 move along the sliding sleeve 13 with the rotation of the remaining coupling gears 132, so as to switch the mobile filter bin 3 to the second station, so that the mobile filter bin 3 moves away from the base with the sliding sleeve 13, and the mobile filter bin 3 and the adjacent mobile filter bins 3 move away from each other, and at the same time, the outer sliding cover 31 and the inner sliding cover 32 will slide to expand the distance between the two, and pull the top covering plate 311 to open the top while increasing the volume, and the flip segment block 33 will flip and switch to the fourth station, and the guide flip plate 21 will flip to an inclined state, move out of the outer sliding cover 31, and lower the height of the molecular sieve.

[0065] As an embodiment provided by the present invention, an extended flip plate 22 is rotatably connected to the guide flip plate 21, and a locking buckle 221 is provided on the extended flip plate 22. When the extended flip plate 22 flips, the locking buckle 221 is clamped on the locking block 23 provided on the sliding sleeve 13.

[0066] Specifically, the guide flip plate 21 is rotatably connected to an extended flip plate 22, and a stagnation plate 222 is provided on the extended flip plate 22. When the guide flip plate 21 is in an inclined state, the extended flip plate 22 is flipped so that the stagnation plate 222 fits the guide flip plate 21 to guide the extended flip plate 22 and the guide flip plate 21 to be in a straight line, so as to extend the length of the guide flip plate 21 for the sliding plate 14 to slide. When the guide flip plate 21 needs to be in a vertical state, the extended flip plate 22 is flipped to a horizontal state, and the locking buckle 221 is connected to the locking block 23 provided on the sliding sleeve 13 along with the flipping card, and the combined purification screen 1 is slid along the warehouse body of the shell to squeeze the extended flip plate 22 through the warehouse body to maintain a horizontal state, thereby restricting the sliding sleeve 13 and maintaining the first station of the mobile filtering warehouse 3.

[0067] When installing the combined purification screen 1, the sliding sleeve 13 is pushed close to the bottom, and the coupling gear 132 at the lower end rotates with the sliding sleeve 13 coupled with the sliding column 111, so that the multiple sliding plates 14 move along the sliding sleeve 13 with the rotation of the remaining coupling gears 132. At this time, the mobile filter bin 3 switches to the first position, so that the multiple mobile filter bins 3 move close to the base with the sliding sleeve 13, and the mobile filter bins 3 are connected with the adjacent mobile filter bins 3. At this time, the distance between the outer sliding cover 31 and the inner sliding cover 32 is reduced, and at the same time, the guide flip plate is 21 is flipped to a vertical state, and the extended flip plate 22 is flipped to a horizontal state, and the locking buckle 221 is locked on the locking block 23 set on the sliding sleeve 13 along with the flip card, and the flip segment block 33 is switched to the third station. At this time, the flip segment block 33 will flip toward the inner slide cover 32 to form a "concave" channel to guide the phosphine gas to pass through, and then the combined purification screen 1 is slid along the warehouse body of the shell to squeeze the extended flip plate 22 through the warehouse body to maintain a horizontal state, thereby restricting the sliding sleeve 13 and maintaining the first station of the mobile filter warehouse 3. When taking out the combined purification screen 1 for regeneration, it is only necessary to take out the mobile filter bin 3 as a whole from the shell. At this time, due to the push of the spring 112, the coupling gear 132 at the lower end rotates with the sliding sleeve 13 coupled with the sliding column 111, so that the multiple sliding plates 14 move along the sliding sleeve 13 with the rotation of the remaining coupling gears 132, so as to switch the mobile filter bin 3 to the second station, so that the mobile filter bin 3 moves away from the base with the sliding sleeve 13, and the mobile filter bin 3 and the adjacent mobile filter bins 3 move away from each other. At the same time, the outer sliding cover 31 and the inner sliding cover 32 will slide to expand the distance between the two, and pull the top covering plate 311 to open the top and increase the volume. The flip segment block 33 will flip and switch to the fourth station, flip the guide flip plate 21 to an inclined state, and flip the extended flip plate 22 to extend the guide flip plate 21, and the flip segment block 33 moves out of the outer sliding cover 31 and lowers the height of the molecular sieve.

[0068] As the best embodiment provided by the present invention, the sliding sleeve 13 is driven to move back and forth to drive the top cover plate 311 to open and close, and to flip the flip segment block 33.

[0069] Specifically, a limiting plate 210 is provided on the guide flip plate 21, and the limiting plate 210 is used to limit the inclination angle of the guide flip plate 21. During the regeneration of the molecular sieve, the combined purification sieve 1 is placed in a high temperature environment (the high temperature environment is 140°C~300°C), and a heat-resistant connector (the heat-resistant connector can be a borate glass rod or a high-temperature alloy rod, etc.) is installed at the output end of the telescopic cylinder or the telescopic motor. The sleeve 13 is pushed by the heat-resistant connector. The spring 112 is made of a special alloy and still has elasticity at high temperatures, so as to push the sleeve 13 back and forth during the high-temperature regeneration process. At this time, the mobile filter chamber 3 will slide along the guide flip plate 21 and the sleeve 13 whose inclination angles are limited by the limiting plate 210, thereby repeatedly opening and closing the outer sliding cover 31 and the inner sliding cover 32. At this time, the top cover plate 311 is repeatedly opened and closed to displace the molecular sieve in the mobile filter chamber 3 as it opens and closes, and rubs and assists the airflow between the molecular sieves through displacement, thereby assisting regeneration.

[0070] The above description is only by way of illustration of certain exemplary embodiments of the present invention. It is undoubted that those skilled in the art can modify the described embodiments in various ways without departing from the spirit and scope of the present invention. Therefore, the above drawings and descriptions are illustrative in nature and should not be construed as limiting the scope of protection of the claims of the present invention.

Claims

1. A phosphine gas purification device, characterized in that: The invention comprises a combined purification screen (1) arranged in a housing, wherein the combined purification screen (1) comprises: A movable support member (11) comprising a base and a sliding sleeve (13) that slides vertically along the base; The mobile filter bins (3) are slidably connected to the sliding sleeve (13) in a linear array. Molecular sieves of different specifications are respectively contained in the plurality of mobile filter bins (3). The mobile filter bins (3) are switched between the following two positions: First workstation: the mobile filter bin (3) moves along with the sliding sleeve (13) towards the base, and is mutually fitted and communicated with the adjacent mobile filter bin (3); Second workstation: the mobile filter bin (3) moves away from the base along with the sliding sleeve (13), moves away from the adjacent mobile filter bin (3), and opens the top; The mobile filter bin (3) comprises an outer sliding cover (31) and an inner sliding cover (32) which slide against each other, and a top cover plate (311) is arranged on the outer sliding cover (31). When the mobile filter bin (3) switches from the first station to the second station, the outer sliding cover (31) and the inner sliding cover (32) move away from each other, so that the top cover plate (311) opens the top of the inner sliding cover (32).

2. A phosphine gas purification device according to claim 1, characterized in that: The outer sliding cover (31) is rotatably connected to a flip segment block (33), and the flip segment block (33) is switched between the following two positions: The third station: the flip segment block (33) flips toward the inner sliding cover (32) as the mobile filtering chamber (3) switches to the first station, so as to form a "concave" channel and raise the height of the molecular sieve; Fourth station: the flip segment block (33) switches to the second station along with the mobile filtering chamber (3), flips and moves out of the outer sliding cover (31), and lowers the height of the molecular sieve.

3. A phosphine gas purification device according to claim 2, characterized in that: The top cover plate (311) is provided with a split air inlet (312) corresponding to the raised end of the "concave"-shaped channel and an impurity exhaust port (313) corresponding to the recessed portion of the "concave"-shaped channel.

4. A phosphine gas purification device according to claim 3, characterized in that: The sliding sleeve (13) is slidably connected to a sliding plate (14), the inner sliding cover (32) is arranged on the sliding plate (14), the split air inlet (312) is provided with an air intake splitter pipe (314), and the air intake splitter pipe (314) moves closer to the mobile filter bin (3) to fit into a docking groove group (141) provided on an adjacent inner sliding cover (32).

5. A phosphine gas purification device according to claim 4, characterized in that: Coupling gears (132) are arranged in a linear array in the sliding sleeve (13), and a synchronous belt (133) is sleeved between the plurality of coupling gears (132). The diameters of the coupling gears (132) increase successively, so that the contact sliding plates (14) are driven by the coupling gears (132) of different sizes to move away from or approach each other.

6. A phosphine gas purification device according to claim 2, characterized in that: It also comprises a guiding mechanism (2), which comprises a guiding flip plate (21) rotatably connected to the base, the outer sliding cover (31) being slidably connected to the guiding flip plate (21), the flip segment block (33) being provided with a coupling arc, the flip segment block (33) moving with the mobile filter bin (3) and being coupled to the guiding flip plate (21) through the coupling arc to flip.

7. A phosphine gas purification device according to claim 6, characterized in that: The outer sliding cover (31) is provided with an elastic frame (310) which is slidably connected to the guide flip plate (21).

8. A phosphine gas purification device according to claim 6, characterized in that: The guide flip plate (21) is rotatably connected to an extended flip plate (22), and the extended flip plate (22) is provided with a locking buckle (221). When the extended flip plate (22) flips, the locking buckle (221) is engaged with a locking block (23) provided on the sliding sleeve (13).

9. A phosphine gas purification device according to claim 2, characterized in that: The sliding sleeve (13) is driven to move back and forth, thereby driving the top cover plate (311) to repeatedly open and close, and causing the flip segment block (33) to flip back and forth.

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