Single-drive multi-basket synchronous throwing device and cleaning machine

Abstract

The invention provides a single-drive multi-basket synchronous throwing device and a cleaning machine, and belongs to the field of silicon wafer production and processing.The single-drive multi-basket synchronous throwing device comprises a plurality of integrally-concave throwing frames, a frame connecting cross beam, a push rod throwing assembly, a transmission supporting cam assembly, a drive reversing assembly and a throwing guide assembly; a corresponding throwing eccentric mechanism is designed for each flower basket of multiple flower baskets, but one driving motor is adopted, so that one-machine multi-drive stable lifting throwing of non-belt transmission is realized; and secondly, independent positioning and guiding units corresponding to the material baskets or the flower baskets are arranged on the structural supporting frame, so that positioning and guiding are facilitated, mutual collision is avoided, the overall throwing and cleaning effect and the perfectness ratio of the silicon wafers are improved, and popularization and application in the fields of silicon wafer cleaning and the like are facilitated.

Description

Technical Field

[0001] The invention belongs to the field of silicon wafer production and processing, and in particular relates to a single-drive multi-basket synchronous throwing device and a cleaning machine. Background Art

[0002] During the silicon wafer preparation process, silicon mud, silicon powder and other impurities will remain on the outer surface of the cut and separated silicon wafers, which need to be cleaned. Conventionally, a wafer basket is used to fix the silicon wafers together for cleaning. However, the direction of the silicon wafer basket or silicon wafer material basket is often fixed in the cleaning tank and will not move. Before the final drying, water stains and impurities on the surface of the silicon wafer need to be removed as much as possible. Therefore, it is hoped to design a basket or material basket driving mechanism that can swing left and right in the cleaning tank, so that as many impurities on the silicon wafer as possible can be cleaned and dropped.

[0003] In addition, in some existing material basket or flower basket drive structures, belt drive is mostly used, but silicon wafer cleaning belongs to a high temperature environment. In this environment, firstly, the belt is easy to age, and secondly, the belt drive will be accompanied by slippage and other phenomena, resulting in transmission lag. Considering the total weight of the flower basket, material basket and silicon wafers, once the transmission slips or suddenly starts, it will cause the flower basket or material basket to move suddenly, and the internal silicon wafers are easily damaged. Therefore, it is necessary to design a stable drive system.

[0004] Furthermore, for the existing double material basket / flower basket synchronously driven throwing structure, a motor is used to drive a driving shaft with an eccentric wheel, which will cause the fatigue of the single shaft to accelerate under the heavy load of the two flower baskets, and the stability of the whole machine is insufficient. Summary of the invention

[0005] In order to overcome the deficiencies of the prior art, the object of the present invention is to provide a single-drive multi-flower basket synchronous throwing device and a cleaning machine, which can solve the above-mentioned problems.

[0006] Design principle: For double or multiple flower baskets, a corresponding throwing eccentric mechanism is designed for each flower basket, but a driving motor is used to achieve stable throwing without belt transmission; secondly, an independent positioning and guiding unit is set on the structural support frame corresponding to each material basket or flower basket to facilitate positioning and guiding and avoid collision between them.

[0007] A single-drive multi-flower basket synchronous throwing device comprises a plurality of throwing frames which are concave in shape as a whole, a frame connecting crossbeam, a push rod throwing assembly, a transmission support cam assembly, a driving reversing assembly and a throwing guide assembly; the plurality of the throwing frames are arranged side by side and fixedly connected at the ends by the frame connecting crossbeam, the push rod throwing assembly and the throwing guide assembly are arranged at the two ends of each throwing frame, a transmission support cam assembly is arranged longitudinally and horizontally below the two ends of a corresponding throwing frame, the bottoms of every two push rod throwing assemblies are installed at the two ends of the transmission support cam assembly, the driving reversing assembly is drivingly connected to the transmission support cam assembly, and the throwing guide assembly is sleeved on the push rod throwing assembly and fixed to the frame externally.

[0008] Optionally, the throwing frame includes a supporting flat frame and a throwing vertical frame, and the two throwing vertical frames are vertically installed at both ends of the supporting flat frame. A plurality of flower basket positioning guide units corresponding to the material basket support are arranged on the supporting flat frame.

[0009] Optionally, the frame connecting beams are connected to the top outer side of the throwing frame at intervals, and the interval area is used for the arrangement of the end plate of the rinsing tank.

[0010] Optionally, the push rod throwing assembly includes a push rod body, a push rod top plate and a push rod bottom plate, the top of the push rod body is transferred to the bottom of the frame connecting beam through the push rod top plate, and the bottom of the push rod body is fixedly connected to the horizontally arranged push rod bottom plate.

[0011] Optionally, the transmission support cam assembly includes a transmission bearing seat, an eccentric bearing unit and a transmission bevel gear installed on the transmission shaft; one of the transmission bevel gears is installed at one end of the transmission shaft close to the drive reversing assembly, and two eccentric bearing units are arranged below the push rod throwing assembly.

[0012] Optionally, the eccentric bearing unit includes a sleeve, an eccentric wheel, an eccentric outer bearing and a bearing pressure plate, the eccentric wheel sleeve is arranged on the outer periphery of the sleeve, the eccentric outer bearing sleeve is arranged on the outer periphery of the eccentric wheel, and the bearing pressure plate connects the sleeve, the eccentric wheel and the inner ring of the eccentric outer bearing from one side.

[0013] Optionally, the driving reversing assembly includes a throwing motor, a reducer, a driving shaft, a driving bearing seat and a driving bevel gear; the throwing motor is connected to the reducer, and the driving shaft driven by the reducer is horizontally arranged below the same end of the throwing frame and supported by multiple driving bearing seats. Driving bevel gears corresponding to the number of throwing frames are installed on the driving shaft, and the driving bevel gears are meshed and connected with the corresponding transmission bevel gears.

[0014] Optionally, the throwing guide assembly includes a guide sleeve, a guide adapter block and a guide fixing assembly, the guide adapter block has a vertically opened accommodating hole, the guide sleeve is installed in the accommodating hole, the outer side of the guide adapter block is installed to the guide fixing assembly, the guide fixing assembly is used to be connected to an external frame, and the guide sleeve is covered and supported on the outer periphery of the push rod body of the push rod throwing assembly.

[0015] Optionally, a flower basket positioning and guiding unit for accommodating a plurality of flower baskets is provided on the upper frame surface of the throwing frame, and the flower basket positioning and guiding unit includes a flower basket positioning plate provided with a positioning notch, and the flower basket positioning plate adopts a bent plate composed of a supporting flat plate and a guiding positioning inclined plate, and the positioning notch is provided on the guiding positioning inclined plate, and the supporting flat plate is horizontally fixed to the crossbeam surface of the throwing frame.

[0016] The present invention also provides a cleaning machine, including a cleaning tank, a lifting and throwing device and an outer frame. The lifting and throwing device adopts the aforementioned single-drive multi-basket synchronous throwing device. The cleaning tank and the lifting and throwing device are arranged in the outer frame, and the throwing guide assembly is connected to the outer frame.

[0017] Compared with the prior art, the beneficial effects of the present invention are as follows: the present application designs a corresponding throwing eccentric mechanism for each flower basket of multiple flower baskets, but adopts one driving motor to realize stable lifting and throwing of one machine with multiple drives without belt transmission; secondly, an independent positioning and guiding unit is arranged on the structural support frame corresponding to each material basket or flower basket, which is convenient for positioning and guiding and avoids collision with each other, thereby improving the overall throwing and cleaning effect and the integrity rate of silicon wafers, and facilitating promotion and application in fields such as silicon wafer cleaning. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] Figure 1 It is a structural schematic diagram of a single-drive multi-flower basket synchronous throwing device of the present invention;

[0019] Figure 2 It is a schematic diagram of a throwing frame provided with a flower basket positioning and guiding unit;

[0020] Figure 3 It is a partial structural schematic diagram of a single-drive multi-flower basket synchronous throwing device;

[0021] Figure 4 is a schematic diagram of an eccentric bearing unit;

[0022] Figure 5 Schematic diagram of the flower basket positioning guide unit.

[0023] Figure 6 A schematic diagram of a cleaning machine.

[0024] In the figure,

[0025] 100, throwing frame; 110, supporting flat frame; 120, throwing vertical frame;

[0026] 200, frame connecting beam;

[0027] 300, push rod throwing assembly; 310, push rod body; 320, push rod top plate; 330, push rod bottom plate;

[0028] 400, transmission support cam assembly; 410, transmission shaft; 420, transmission bearing seat; 430, eccentric bearing unit; 431, shaft sleeve; 432, eccentric wheel; 433, eccentric outer bearing; 434, bearing pressure plate; 440, transmission bevel gear;

[0029] 500, driving reversing assembly; 510, throwing motor; 520, reducer; 530, driving shaft; 540, driving bearing seat; 550, driving bevel gear;

[0030] 600, throwing guide assembly; 610, guide sleeve; 620, guide adapter block; 630, guide fixing assembly;

[0031] 700, flower basket positioning guide unit; 710, flower basket positioning plate; 711, supporting plate; 712, guiding positioning inclined plate;

[0032] 800, top beam guard;

[0033] 1000, cleaning tank;

[0034] 2000, lifting and throwing device;

[0035] 3000, external rack. DETAILED DESCRIPTION

[0036] In order to make the purpose, technical solution and advantages of the embodiments of the present invention clearer, the technical solution in the embodiments of the present invention will be clearly and completely described below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0037] Throwing device

[0038] A single-drive multi-flower basket synchronous throwing device, see Figure 1-Figure 5 , including a plurality of overall concave throwing frames 100, a frame connecting beam 200, a push rod throwing assembly 300, a transmission support cam assembly 400, a drive reversing assembly 500 and a throwing guide assembly 600.

[0039] Layout relationship: Multiple throwing frames 100 are arranged side by side and fixedly connected at the ends by the frame connecting beam 200, and the push rod throwing assembly 300 and the throwing guide assembly 600 are arranged at the two ends of each throwing frame 100, and a transmission support cam assembly 400 is arranged longitudinally and horizontally below the two ends of a corresponding throwing frame 100, and the bottoms of every two push rod throwing assemblies 300 are installed to the two ends of the transmission support cam assembly 400, the driving reversing assembly 500 is driven and connected to the transmission support cam assembly 400, and the throwing guide assembly 600 is sleeved on the push rod throwing assembly 300 and fixed to the frame externally.

[0040] The throwing frame 100 includes a supporting flat frame 110 and a throwing vertical frame 120. The two throwing vertical frames 120 are vertically installed at both ends of the supporting flat frame 110. A plurality of flower basket positioning guide units 700 corresponding to the material basket support are arranged on the supporting flat frame 110.

[0041] The frame connecting beams 200 are connected to the top outer side of the throwing frame 120 at intervals, and the interval area is used for the end plate arrangement of the rinsing tank.

[0042] Furthermore, a top beam guard 800 is provided on the outer side of the frame connecting cross beam 200 to protect the upper part of both ends of the throwing device.

[0043] Among them, the push rod throwing assembly 300 includes a push rod body 310, a push rod top plate 320 and a push rod bottom plate 330. The top of the push rod body 310 is transferred to the bottom of the frame connecting beam 200 through the push rod top plate 320, and the bottom of the push rod body 310 is fixedly connected to the horizontally arranged push rod bottom plate 330.

[0044] Among them, the transmission support cam assembly 400 includes a transmission bearing seat 420, an eccentric bearing unit 430 and a transmission bevel gear 440 installed on the transmission shaft 410; one of the transmission bevel gears 440 is installed at one end of the transmission shaft 410 close to the drive reversing assembly 500, and two eccentric bearing units 430 are arranged below the push rod throwing assembly 300.

[0045] See also Figure 4 The eccentric bearing unit 430 includes a sleeve 431, an eccentric wheel 432, an eccentric outer bearing 433 and a bearing pressure plate 434. The eccentric wheel 432 is sleeved on the outer periphery of the sleeve 431, and the eccentric outer bearing 433 is sleeved on the outer periphery of the eccentric wheel 432. The bearing pressure plate 434 connects the sleeve 431, the eccentric wheel 432 and the inner ring of the eccentric outer bearing 433 from one side.

[0046] The driving reversing assembly 500 includes a throwing motor 510, a reducer 520, a driving shaft 530, a driving bearing seat 540 and a driving bevel gear 550. Specifically, the throwing motor 510 is connected to the reducer 520, the driving shaft 530 is horizontally arranged below the same end of the throwing frame 100 and is driven by the reducer 520, and is supported by a plurality of driving bearing seats 540, and driving bevel gears 550 corresponding to the number of the throwing frames 100 are installed on the driving shaft 530, and the driving bevel gears 550 are meshed and connected with the corresponding transmission bevel gears 440.

[0047] In the illustrated example, two throwing frames 100 are used, so the number of driving bevel gears 550 is also two, and the number of transmission bevel gears 440 is four.

[0048] Among them, the throwing guide assembly 600 includes a guide sleeve 610, a guide adapter block 620 and a guide fixing assembly 630. The guide adapter block 620 has a vertical accommodating hole, the guide sleeve 610 is installed in the accommodating hole, the outer side of the guide adapter block 620 is installed to the guide fixing assembly 630, the guide fixing assembly 630 is used to be connected to an external frame, and the guide sleeve 610 covers the outer periphery of the push rod body 310 supported on the push rod throwing assembly 300.

[0049] Furthermore, a flower basket positioning guide unit 700 corresponding to accommodating multiple flower baskets is provided on the upper frame surface of the throwing frame 100, and the flower basket positioning guide unit 700 includes a flower basket positioning plate 710 provided with a positioning notch, and the flower basket positioning plate 710 adopts a bent plate composed of a supporting flat plate 711 and a guiding positioning inclined plate 712, and the positioning notch is provided on the guiding positioning inclined plate 712, and the supporting flat plate 711 is horizontally fixed to the beam surface of the throwing frame 100.

[0050] Every two groups of flower basket positioning plates 710 constitute a flower basket positioning guide unit 700, and the interval between the two flower basket positioning plates 710 is adapted to the width of the flower basket.

[0051] The two guiding and positioning inclined plates 712 of a flower basket positioning and guiding unit 700 are arranged obliquely upward and outward to play a role in guiding and positioning the flower basket.

[0052] In the illustrated example, three flower basket positioning and guiding units 700 are arranged side by side to support three silicon wafer flower baskets at the same time. The number may also be two, four, five, etc. according to actual design requirements.

[0053] Cleaning Machine

[0054] See also Figure 6The cleaning machine includes a cleaning tank 1000, a lifting and throwing device 2000 and an outer frame 3000. The lifting and throwing device 2000 adopts the aforementioned single-drive multi-flower basket synchronous throwing device, the cleaning tank 1000 and the lifting and throwing device 2000 are arranged in the outer frame 3000, and the throwing guide assembly 600 is connected to the outer frame 3000.

[0055] In the illustrated example, multiple groups of cleaning tanks 1000 and lifting and flinging devices 2000 are arranged side by side to improve the overall cleaning efficiency.

[0056] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention, rather than to limit it. Although the present invention has been described in detail with reference to the aforementioned embodiments, those skilled in the art should understand that they can still modify the technical solutions described in the aforementioned embodiments, or make equivalent replacements for some of the technical features therein. However, these modifications or replacements do not deviate the essence of the corresponding technical solutions from the spirit and scope of the technical solutions of the embodiments of the present invention.

Claims

1. A single-drive multi-flower basket synchronous throwing device, characterized in that: It comprises a plurality of overall concave throwing frames (100), a frame connecting crossbeam (200), a push rod throwing assembly (300), a transmission support cam assembly (400), a drive reversing assembly (500) and a throwing guide assembly (600); A plurality of the throwing frames (100) are arranged side by side and fixedly connected at the ends by the frame connecting crossbeam (200); the push rod throwing assembly (300) and the throwing guide assembly (600) are arranged at the two ends of each throwing frame (100); a transmission support cam assembly (400) is arranged longitudinally and horizontally below the two ends of a corresponding throwing frame (100); the bottoms of every two push rod throwing assemblies (300) are installed at the two ends of the transmission support cam assembly (400); the driving reversing assembly (500) is driven and connected to the transmission support cam assembly (400); and the throwing guide assembly (600) is sleeved on the push rod throwing assembly (300) and fixed to the frame externally.

2. The single-drive multi-flower basket synchronous throwing device according to claim 1, characterized in that: The throwing frame (100) comprises a supporting flat frame (110) and a throwing vertical frame (120), wherein the two throwing vertical frames (120) are vertically mounted to two ends of the supporting flat frame (110), and a plurality of flower basket positioning guide units (700) corresponding to the material basket supports are arranged on the supporting flat frame (110).

3. The single-drive multi-flower basket synchronous throwing device according to claim 2, characterized in that: The frame connecting beams (200) are connected to the top outer side of the throwing frame (120) at intervals, and the interval area is used for arranging the end plate of the rinsing tank.

4. The single-drive multi-flower basket synchronous throwing device according to claim 1, characterized in that: The push rod throwing assembly (300) comprises a push rod body (310), a push rod top plate (320) and a push rod bottom plate (330); the top of the push rod body (310) is connected to the bottom of the frame connecting beam (200) through the push rod top plate (320), and the bottom of the push rod body (310) is fixedly connected to the horizontally arranged push rod bottom plate (330).

5. The single-drive multi-flower basket synchronous throwing device according to claim 1, characterized in that: The transmission support cam assembly (400) comprises a transmission bearing seat (420), an eccentric bearing unit (430) and a transmission bevel gear (440) mounted on a transmission shaft (410); one of the transmission bevel gears (440) is mounted on one end of the transmission shaft (410) close to the drive reversing assembly (500), and two eccentric bearing units (430) are arranged below the push rod throwing assembly (300).

6. The single-drive multi-flower basket synchronous throwing device according to claim 5, characterized in that: The eccentric bearing unit (430) comprises a shaft sleeve (431), an eccentric wheel (432), an eccentric outer bearing (433) and a bearing pressure plate (434); the eccentric wheel (432) is sleeved on the outer periphery of the shaft sleeve (431); the eccentric outer bearing (433) is sleeved on the outer periphery of the eccentric wheel (432); and the bearing pressure plate (434) connects the shaft sleeve (431), the eccentric wheel (432) and the inner ring of the eccentric outer bearing (433) from one side.

7. The single-drive multi-flower basket synchronous throwing device according to claim 5, characterized in that: The driving reversing assembly (500) comprises a throwing motor (510), a reducer (520), a driving shaft (530), a driving bearing seat (540) and a driving bevel gear (550); The throwing motor (510) is connected to the reducer (520), and the driving shaft (530) is driven by the reducer (520) and is arranged horizontally below the same end of the throwing frame (100), and is supported by a plurality of driving bearing seats (540). Driving bevel gears (550) corresponding to the number of the throwing frames (100) are installed on the driving shaft (530), and the driving bevel gears (550) are meshed and connected with the corresponding transmission bevel gears (440).

8. The single-drive multi-flower basket synchronous throwing device according to claim 4, characterized in that: The throwing guide assembly (600) includes a guide sleeve (610), a guide adapter block (620) and a guide fixing assembly (630), wherein the guide adapter block (620) is vertically provided with a receiving hole, the guide sleeve (610) is installed in the receiving hole, the outer side of the guide adapter block (620) is installed to the guide fixing assembly (630), the guide fixing assembly (630) is used to be connected to an external frame, and the guide sleeve (610) covers the outer periphery of a push rod body (310) supported on the push rod throwing assembly (300).

9. The single-drive multi-flower basket synchronous throwing device according to claim 1, characterized in that: A flower basket positioning guide unit (700) corresponding to accommodating a plurality of flower baskets is arranged on the upper frame surface of the throwing frame (100); the flower basket positioning guide unit (700) comprises a flower basket positioning plate (710) provided with a positioning notch; the flower basket positioning plate (710) is a bent plate consisting of a supporting flat plate (711) and a guiding positioning inclined plate (712); the positioning notch is provided on the guiding positioning inclined plate (712); and the supporting flat plate (711) is horizontally fixed to the crossbeam surface of the throwing frame (100).

10. A cleaning machine, comprising a cleaning tank (1000), a lifting and throwing device (2000) and an outer frame (3000), characterized in that: The lifting and throwing device (2000) adopts the single-drive multi-flower basket synchronous throwing device described in any one of claims 1 to 9, the cleaning tank (1000) and the lifting and throwing device (2000) are arranged in the outer frame (3000), and the throwing guide assembly (600) is connected to the outer frame (3000).

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