Chuck assembly

Abstract

A chuck assembly is provided. A chuck assembly according to an embodiment of the present invention comprises: a turntable on which a substrate is mounted; the rotating part is concentric with the rotating center of the rotating table; and a chuck pin for supporting the substrate, in which the turntable includes a protruding portion protruding upward from a surface facing the substrate, and the chuck pin is coupled to the protruding portion in such a manner that the protruding portion is introduced into the chuck pin. The projection may be integrally formed with a surface of the turntable facing the substrate.

Description

Technical Field

[0001] The present invention relates to a chuck assembly for supporting a semiconductor substrate. Background Art

[0002] Generally, the semiconductor manufacturing process includes the steps of etching and cleaning the semiconductor substrate. During these processes, various particles, metal impurities and other contaminants may remain on the substrate, which will have a negative impact on the yield and reliability of semiconductor components. Therefore, when manufacturing semiconductors, a cleaning process must be performed to remove the contaminants remaining on the substrate.

[0003] The semiconductor substrate may be placed on a rotating table and rotated at high speed, and cleaning to remove contaminants may be performed by supplying a fluid such as a processing liquid or a cleaning liquid onto the substrate rotating at high speed.

[0004] A plurality of chuck pins are provided on the rotating table to support the substrate, and the chuck pins can be moved to a supporting position for fixing the substrate in a state of supporting the substrate and a standby position spaced apart from the substrate by a moving unit provided on the rotating table.

[0005] As the existing chuck pin moves to the supporting position or the standby position by the moving unit, a gap is generated at the point where the chuck pin is connected to the rotating table. In order to minimize the gap, a connecting component such as a gasket needs to be added between the chuck pin and the rotating table.

[0006] Even if connecting parts are added, gaps may be generated between the turntable or chuck pins due to manufacturing quality or assembly process. If they are made of different materials, the thermal expansion coefficients are different, and they may be deformed into other shapes due to high-temperature fluid flowing into the gap. Even if they are made of the same material, due to differences in thickness, shape, etc., there may be problems of new gaps being generated or gaps being enlarged during use.

[0007] If a fluid flows into the gap, the connection parts may become loose and deform due to thermal expansion of the fluid, causing the chuck pins to fail to properly support the substrate. Summary of the invention

[0008] The present invention is proposed to solve the technical problems of the prior art as described above. The purpose of the present invention is to provide a chuck assembly with a structure that prevents the generation of gaps by forming a protrusion integrally with a turntable, and further blocks the inflow of fluid by covering the protrusion with a cover, so that even if the chuck pin moves to the supporting position and the standby position, the fluid will not flow into the turntable.

[0009] Technical Solution According to one embodiment of the present invention, a chuck assembly may include: a rotating table for mounting a substrate; a rotating portion concentric with the rotation center of the rotating table; and a chuck pin for supporting the substrate, wherein the rotating table includes a protruding portion protruding upward from a surface facing the substrate, and the chuck pin is combined with the protruding portion in a form in which the protruding portion is introduced into the chuck pin, and the protruding portion may be formed as one piece with the surface of the rotating table facing the substrate.

[0010] Specifically, the protrusion may be formed of the same material as the surface and disposed perpendicularly relative to the surface, and the protrusion may be abutted and engaged with the chuck pin at both the inner surface and the outer surface.

[0011] Specifically, the chuck pin may include: a cover, which is combined with the outer surface and the upper surface of the protrusion and supports the substrate, wherein one end of the cover can surround the outer surface of the protrusion and the other end supports the substrate to prevent the fluid supplied to the rotating table from flowing horizontally from the rotating table to the inner surface of the protrusion.

[0012] Specifically, the cover may include: a first contact, which is in contact with the upper surface of the protrusion on the inner surface; and a second contact, which is in contact with the protrusion at a position lower than the first contact on the inner surface, wherein even if the fluid is continuously supplied to have a height around the protrusion and vertically flow into the second contact, the fluid cannot reach the first contact because the first contact is set at a position higher than the second contact and is horizontally spaced apart relative to the second contact.

[0013] Specifically, the protrusion may include: a first protrusion, which is formed as a whole with the turntable and protrudes vertically upward relative to the turntable; and a second protrusion, which is formed as a whole with the turntable and the first protrusion and extends downward from the first protrusion, wherein the inner surface of the second protrusion can surround the chuck pin, and the outer surface of the second protrusion can be surrounded by an opening set in the substrate.

[0014] Specifically, the chuck assembly may further include: a hinge portion, arranged inside the turntable; and a lifting portion, hingedly coupled to the hinge portion, and capable of lifting and lowering in a direction perpendicular to the rotation direction of the turntable, wherein the chuck pin may be hingedly moved toward the rotation center direction of the turntable or in the opposite direction according to the lifting and lowering movement of the lifting portion.

[0015] Specifically, the chuck pin can hinge the cover toward the rotation center of the turntable as the lifting part descends, thereby supporting the substrate, and the chuck pin can hinge the cover in the opposite direction of the rotation center of the turntable as the lifting part rises, thereby separating the cover from the substrate.

[0016] According to another embodiment of the present invention, a chuck assembly may include: a rotating table for mounting a substrate; a rotating portion for rotating the rotating table; and a chuck pin for supporting the substrate, wherein the rotating table has a surface facing the substrate and is provided with a plurality of protrusions protruding upward from the periphery of the surface, and the chuck pin may be arranged on the protrusion in a form of surrounding the outer periphery of the protrusion, and the surface and the plurality of protrusions may be formed as a whole.

[0017] Specifically, the plurality of protrusions may have a hollow shape, and the chuck pin may be inserted into the protrusions and provided in a shape surrounding the outer circumference of the protrusions, thereby simultaneously contacting the inside and the outside of the protrusions.

[0018] Specifically, the surface and the plurality of protrusions may be integrally formed of a single material, and the plurality of protrusions may protrude downward from the surface on an extension line of a shape protruding upward from the surface.

[0019] Effects of the Invention According to the chuck assembly of the present invention, even when the position of the chuck pin changes, it is possible to prevent the fluid from flowing into the opening between the points where the chuck pin and the rotary table are connected. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] Figure 1 It is a perspective view of an upper surface of a substrate disposed in a chuck assembly according to an embodiment of the present invention.

[0021] Figure 2 It is a three-dimensional view of the lower surface of a chuck assembly according to an embodiment of the present invention.

[0022] Figure 3 FIG. 1 is a plan view of an upper surface of a substrate disposed in a chuck assembly according to an embodiment of the present invention.

[0023] Figure 4 It is a three-dimensional view of an upper surface supporting a substrate in a chuck assembly according to an embodiment of the present invention.

[0024] Figure 5 It is a plan view of an upper surface supporting a substrate in a chuck assembly according to an embodiment of the present invention.

[0025] Figure 6FIG. 1 is a side view showing a state where a substrate is supported in a chuck assembly according to an embodiment of the present invention.

[0026] Figure 7 It is a partial cross-sectional view of a state where a substrate is supported in a chuck assembly according to an embodiment of the present invention.

[0027] Description of reference numerals: 1: Chuck assembly 10: Rotating table 11: Lifting part 13: Connecting part 14: Chuck pin 141: Main body 142: Cover 15: Support pin 16: protrusion 161: first protrusion 162: Second protrusion 17: Opening 181: first contact 182: second contact 20: Rotating part 21: Rotating axis S: Substrate DETAILED DESCRIPTION

[0028] The purpose, specific advantages and new features of the present invention will become more clear from the following detailed description and preferred embodiments related to the drawings. It should be noted that when the components of each drawing are assigned with reference numerals in this specification, the same reference numerals are assigned to the same components as much as possible even if they are presented in different drawings. In addition, in the process of describing the present invention, if the specific description of the relevant known technology is judged to be likely to unnecessarily confuse the gist of the present invention, its detailed description will be omitted.

[0029] In addition, the drawings are provided only to facilitate understanding of the embodiments disclosed in this specification. The technical ideas disclosed in this specification are not limited to the drawings, and should be understood to include all changes, equivalents or substitutes contained in the ideas and technical scope of the present invention.

[0030] Figure 1 is a three-dimensional view of the upper surface of the arrangement substrate in the chuck assembly according to one embodiment of the present invention, Figure 2 is a three-dimensional view of the lower surface of a chuck assembly according to an embodiment of the present invention, Figure 3 is a plan view of the upper surface of the arrangement substrate in the chuck assembly according to one embodiment of the present invention, Figure 4 is a three-dimensional view of an upper surface supporting a substrate in a chuck assembly according to an embodiment of the present invention, Figure 5 is a plan view of an upper surface supporting a substrate in a chuck assembly according to an embodiment of the present invention, Figure 6 is a side view showing a state where a substrate is supported in a chuck assembly according to an embodiment of the present invention, Figure 7 FIG. 1 is a partial cross-sectional view of a chuck assembly according to an embodiment of the present invention, showing a state where a substrate is supported.

[0031] Reference Figure 1 The chuck assembly 1 may include a rotating table 10 , a rotating portion 20 , a chuck pin 14 , and a supporting pin 15 .

[0032] The rotating table 10 provides a place for mounting the substrate S on one surface and may have a plurality of openings 17 arranged radially around the rotating portion 20 , and a chuck pin 14 described later may be arranged in each opening 17 .

[0033] The chuck pins 14 may be arranged to protrude and extend from the one surface of the turntable 10, and accordingly, the one surface of the turntable 10 and the substrate S may be separated by a predetermined distance by the chuck pins 14. The side surface of the substrate S may be mounted on the turntable 10 by the chuck pins 14, and the lower surface may be supported by the support pins 15 and rotated together with the turntable 10 by the rotating part 20 described later.

[0034] The chuck pins 14 can be moved to the supporting position or the standby position according to the movement of the lifting part 11 described later. The chuck pins 14 can mount the substrate S to the rotating table 10 at the supporting position. When the chuck pins 14 are moved to the standby position, the substrate is supported by the supporting pins 15 on the lower surface, but can be removed from the rotating table 10 because it is separated from the chuck pins 14.

[0035] The number and position of the chuck pins 14 are not limited, refer to Figure 1 Support pins 15 may be provided around the chuck pin 14, and the number and position of the support pins 15 are not limited.

[0036] The support pins 15 are arranged apart from the chuck pins 14 and can be arranged between the chuck pins 14 and the rotation center of the turntable 10 to support the lower surface of the substrate S. When the chuck pins 14 are moved to the standby position, the chuck pins 14 are arranged apart from the substrate S, and the support pins 15 can support the lower surface of the substrate S to space the substrate S from the turntable 10.

[0037] The support pin 15 is hingedly connected to a connection portion 13 described later, and can be moved to a support position or a standby position like the chuck pin 14 . Therefore, when a substrate S having a different size is mounted, the support pin 15 can perform the same function as the chuck pin 14 .

[0038] The rotating table 10 may be in the form of a disk, but is not limited thereto and may also be in a rotatable asymmetric form.

[0039] The rotating part 20 may be provided at the center of the rotating stage 10, and the rotating stage 10 may rotate around the rotating part 20 as the rotation center, so the rotating part 20 may include a rotating shaft 21 as the rotation center. The rotating part 20 may rotate relative to the center or eccentricity of the cross section according to the position where the rotating shaft 21 is provided.

[0040] Reference Figure 2 In the turntable 10 , a rotating shaft 21 and a lifting portion 11 forming a rotation center of the turntable 10 may be provided on the opposite surface of the one surface on which the substrate S is mounted.

[0041] The rotating shaft 21 can receive power from a driving unit (not shown) to be described later and rotate the rotating table 10 . The lifting unit 11 disposed around the rotating shaft 21 can move the chuck pins 14 or the support pins 15 to a supporting position or a standby position.

[0042] The lifting unit 11 may receive power from the driving unit and change the position of the chuck pins 14 or the support pins 15 , so that the positions of a plurality of chuck pins 14 or the support pins 15 can be changed by one operation.

[0043] Reference Figure 3 The plurality of chuck pins 14 may be radially arranged on the rotating table 10 along the circumference of the rotating table 10. The plurality of chuck pins 14 may be arranged at positions symmetrical to each other with respect to the rotating portion 20, so that the substrate S can be stably supported.

[0044] The chuck pins 14 may be disposed at the edge of the rotating table 10 , but are not limited thereto, and the diameter of the substrate S that can be disposed may be determined according to the positions of the chuck pins 14 .

[0045] The support pins 15 are disposed closer to the rotation axis 21 than the chuck pins 14 so that the substrate S having a large diameter can be supported from the lower surface while the side surface of the substrate S is supported by the chuck pins 14 and the substrate S having a small diameter can be supported by the side surface.

[0046] Reference Figure 4 The chuck pin 14 may be arranged to protrude and extend through a surface of the rotating table 10. One end of the chuck pin 14 may be arranged inside the rotating table 10, and the other end may protrude and extend through a surface of the rotating table 10.

[0047] The other end of the chuck pin 14 can support the substrate S, and the substrate S can be supported by the cover 142 in the chuck pin 14. Figure 7 Provide explanation.

[0048] Reference Figure 6A plurality of chuck pins 14 provided on the rotating table 10 are spaced apart from each other so as to support the substrate S at the other end in a horizontal state. The substrate S may be arranged to be spaced apart from a surface of the rotating table 10 by a predetermined distance.

[0049] Figure 7 It is a partial cross-sectional view of a state in which a substrate S is supported in a chuck assembly 1 according to an embodiment of the present invention, and is a diagram showing a portion of the cross section of the chuck assembly 1 in an enlarged manner in order to illustrate the operation method of the chuck pin 14 in the chuck assembly 1 according to an embodiment of the present invention.

[0050] Reference Figure 7 The chuck assembly 1 may include a lifting portion 11 , a hinge portion (not shown), a connecting portion 13 , a chuck pin 14 , a protruding portion 16 and contact points 181 , 182 .

[0051] One or more openings 17 are formed on a surface of the rotating table 10 where the substrate S is mounted, and the chuck pins 14 are arranged in the openings 17. The diameter of the openings 17 is larger than that of the chuck pins 14, so that the chuck pins 14 can move to a supporting position or a standby position in the openings 17.

[0052] The chuck pins 14 may be arranged in a direction perpendicular to the rotation direction of the turn table 10 , so that the chuck pins 14 may be arranged in a direction perpendicular to a surface of the turn table 10 on which the substrate S is installed.

[0053] One end of the chuck pin 14 is connected to the connection part 13 provided inside the rotating table 10, and the other end of the chuck pin 14 can be used to support the substrate S. One end of the chuck pin 14 can be hinged to the connection part 13, so that it can move to the supporting position or the standby position according to the movement of the lifting part 11 described later.

[0054] As the connection portion 13 described later moves by the lifting portion 11 , the chuck pin 14 hingedly coupled to the connection portion 13 can be hingedly moved to a supporting position or a standby position.

[0055] The other end of the chuck pin 14 may have a shape corresponding to the edge of the substrate S so that when the chuck pin 14 is located at the supporting position, the side surface or edge of the substrate S can be supported. The other end of the chuck pin 14 may have a structure for supporting the substrate S so that the substrate S does not move in the direction of the turntable 10 and in the opposite direction of the center of the turntable 10 when the chuck pin 14 is located at the supporting position.

[0056] For example, the other end of the chuck pin 14 may be provided with a groove (not shown) that can be inserted into at least one surface of the edge of the substrate S, but the present invention is not limited thereto.

[0057] According to this, when the plurality of chuck pins 14 support the substrate S at the supporting position, the substrate S does not escape at least in the direction of the turntable 10 and in the direction opposite to the center of the turntable 10 .

[0058] Reference Figure 7 The lifting part 11 is arranged to extend through a surface of the rotating table 10 and is configured to move up and down relative to the surface. For example, the lifting movement means moving along the A direction. One end of the lifting part 11 can be connected to a driving part (not shown) and can be configured to move up and down by the driving part. The other end of the lifting part 11 can be hinged to the hinge part.

[0059] The hinge part is configured such that one end is hingedly connected to the lifting part 11 and the other end is hingedly connected to the inner wall of the rotating table 10. As the lifting part 11 moves up and down along the A direction, the hinge part can move along the B direction with the connection part relative to the inner wall as the center.

[0060] The hinge part may be provided with a spring (not shown), which is compressed as the lifting part 11 rises, expands when the external force on the lifting part 11 is removed, and restores the hinge part to its original position, thereby allowing the lifting part 11 to descend.

[0061] The connection part 13 is arranged inside the rotating table 10 in a manner parallel to the rotation center direction of the rotating table 10, can be horizontally moved along the rotation center direction of the rotating table 10, and is configured such that one end is connected to the part where the lifting part 11 and the hinge part are hinged. Alternatively, one end of the connection part 13 can be hinged to any one of the lifting part 11 and the hinge part.

[0062] Accordingly, the connection part 13 is configured to move with the lifting and lowering movement of the lifting part 11 or the hinge movement of the hinge part. The connection part 13 can be configured to have the other end hingedly coupled to the chuck pin 14. The other end of the connection part 13 can be hingedly coupled to one end of the chuck pin 14. As the hinge part hinges along the B direction, the connection part 13 can move horizontally along the C direction.

[0063] One end of the chuck pin 14 is hingedly coupled to the connection portion 13 , so that as the connection portion 13 moves in the C direction, the chuck pin 14 can be hingedly moved in the D direction.

[0064] When the driving unit applies an external force to one end of the lifting unit 11 in the direction of the turntable 10 , the lifting unit 11 can move upward relative to one surface of the turntable 10 (direction A).

[0065] As the lifting unit 11 rises, the other end of the lifting unit 11 rises, causing the hinge unit to hinge (direction B). One end of the hinge unit connected to the lifting unit 11 hinges toward the center of the rotating table 10 .

[0066] As one end of the hinge portion performs hinge movement, the connection portion 13 connected to the hinge portion moves horizontally (in the C direction), and the connection portion 13 moves toward the center direction of the turntable 10 .

[0067] As the connection portion 13 moves, the chuck pin 14 connected to the other end of the connection portion 13 hinges (in the D direction). The other end of the chuck pin 14 for supporting the substrate S hinges in the direction opposite to the center of the turntable 10 .

[0068] Thus, when the lifting unit 11 rises, the other end of the chuck pin 14 is hingedly moved in the direction opposite to the rotation center of the turntable 10, so that when the lifting unit 11 rises, the chuck pin 14 can be separated from the substrate S. That is, when the lifting unit 11 rises, the chuck pin 14 moves to the standby position.

[0069] When the external force applied to one end of the lifting part 11 is removed, the lifting part 11 can move downward relative to a surface of the rotating table 10 (direction A), and the hinge part hinges to the original position (direction B) and resets due to the elastic force of the spring of the hinge part, so that the lifting part 11 can move downward.

[0070] As the lifting part 11 and the hinge part move to their original positions, the connecting part 13 connected to the hinge part moves horizontally (direction C). The connecting part 13 moves in the direction opposite to the center of the rotating table 10. As the connecting part 13 moves, the chuck pin 14 connected to the other end of the connecting part 13 moves in a hinged manner (direction D), so that the other end of the chuck pin 14 for supporting the substrate S moves in a hinged manner toward the center of the rotating table 10.

[0071] Thus, when the lifting part 11 descends, the other end of the chuck pin 14 will be hinged toward the rotation center direction of the turntable 10, so that when the lifting part 11 descends, the chuck pin 14 can contact and support the substrate S. That is, when the lifting part 11 descends, the chuck pin 14 moves to the supporting position.

[0072] Reference Figure 7 The structure of the chuck pin 14 and the protrusion 16 around the chuck pin 14 can be different from the existing chuck pin. One end of the chuck pin 14 can be hinged with the connecting part 13, and the other end can support the substrate S. In the chuck pin 14, the main body 141 can be hinged with the connecting part 13, and the cover 142 can support the substrate S.

[0073] The body 141 may be hingedly coupled to the connection portion 13 and inserted into the opening 17 to move to a supporting position or a standby position together with a cover 142 supporting the substrate S. The body 141 and the cover 142 may be included in the chuck pin 14 and are referred to as the chuck pin 14 .

[0074] The chuck pin 14 may be combined with the boss 16 in such a manner that the boss 16 is introduced into the chuck pin 14 or provided on the boss 16 in a form surrounding the outer periphery of the boss 16 , and may include a cover 142 described later.

[0075] The body 141 may be supported by an inner surface of the protrusion 16 protruding relative to the turntable 10 , and the thickness may be varied according to the length direction to protrude relative to the turntable 10 by a predetermined distance.

[0076] The thickness of the section of the main body 141 combined with the protrusion 16 and the section from the protrusion 16 to the connecting portion 13 can be different from each other. Here, the thickness of the section combined with the protrusion 16 is thinner and the thickness of the section from the protrusion 16 to the connecting portion 13 is thicker, so that the relative position of the main body 141 with respect to the protrusion 16 can be prevented from changing by the difference in thickness.

[0077] The main body 141 can be hinged with the connection part 13 to move to the support position or the standby position, and the outer surface of the main body 141 and the inner surface of the protrusion 16 can move together through the connection part 13 while being in contact with each other.

[0078] The main body 141 is configured to partially protrude relative to the protrusion 16 integrated with the rotating table 10 so that it can be combined with the cover 142 at the end. The main body 141 is blocked from the outside by the cover 142 and the protrusion 16 combined at the end so as not to contact the fluid.

[0079] The cover 142 may be combined with the body 141 protruding from the turntable 10 and the turntable 10 to support the substrate S, and may be connected to the end of the body 141 to support the side surface or edge of the substrate S. Following the connection with the end of the body 141, the cover 142 may move to a supporting position or a standby position together with the body 141, and may be combined with a protrusion 16 protruding vertically from the turntable 10.

[0080] Reference Figure 7 , the inner surface of the cover 142 may be set in multiple levels, and may include a level having the same thickness as the body 141 and a level having the same thickness as the protrusion 16 .

[0081] The inner surface of the cover 142 may be combined with the body 141 and the protrusion 16, and may include a first contact 181 at which the inner surface of the cover 142 contacts the body 141 and the protrusion 16 simultaneously, and a second contact 182 at a position of the inner surface lower than the first contact contacting the protrusion 16.

[0082] The first contact 181 may be provided in the inner surface of the cover 142 at the same level as the thickness of the body 141 , and the second contact 182 may be provided in the inner surface of the cover 142 at the same level as the thickness of the protrusion 16 .

[0083] The first contact 181 may be disposed higher than the second contact 182 in the height direction of the rotating table 10 as the vertical direction, but disposed to be offset from each other in the horizontal direction, so that the first contact 181 and the second contact 182 may be arranged horizontally spaced apart.

[0084] Cleaning can be performed by supplying a predetermined amount of fluid such as a processing liquid or a cleaning liquid to the substrate S rotating at a high speed or continuously supplying the processing liquid or the cleaning liquid. During this process, the fluid may flow down from the substrate S and be supplied to the rotating table 10.

[0085] The existing chuck pin uses a separate connection component such as an O-ring to prevent the fluid present on the turntable 10 from flowing into the inside of the turntable 10. However, since the fluid flows into the gap provided for connecting the turntable 10 and the connection component and the gap becomes larger due to thermal expansion of the fluid, there is a problem that the connection with the turntable 10 becomes loose.

[0086] Since the turntable 10 and the connection member are made of different materials, their thermal expansion coefficients are different, which may cause the gap to become larger. In order to prevent this phenomenon, they can also be made of the same material.

[0087] In the case where the turntable 10 and the connecting component are made of the same material, even if there is no gap between the turntable 10 and the connecting component initially, due to the differences in thickness, shape, etc., the distances moved by the chuck pin 14 caused by the connection portion 13 may be different, and a gap may eventually be generated.

[0088] The chuck assembly 1 according to an embodiment of the present invention uses the protrusion 16 formed integrally with the turntable 10 as a connecting member for the turntable 10 , thereby eliminating the need for a connection process due to the protrusion 16 and the turntable 10 being separately provided, and thus no gap is generated.

[0089] Furthermore, the protrusion 16 protrudes vertically with respect to the rotating table 10 , and as the outer surface of the protrusion 16 is combined with the inner surface of the cover 142 , even if a part of the fluid flows in, the inflow of the fluid can be prevented to the greatest extent.

[0090] The protrusion 16 is integrally provided with the surface of the rotating table 10 facing the substrate S, and a plurality of protrusions 16 may be provided upward around the surface. The protrusion 16 is provided in a hollow form and may be combined with the chuck pin 14 inside, so that the chuck pin 14 may be abutted and combined at both the inner and outer surfaces.

[0091] The protrusion 16 may include a first protrusion 161 formed integrally with the rotating table 10 and protruding vertically upward relative to the rotating table 10 , and a second protrusion 162 extending downward.

[0092] Since the first protrusion 161 is formed integrally with the rotating table 10, no additional process is required to connect with the rotating table 10 and no gap is generated. The first protrusion 161 can protrude vertically upward relative to the rotating table 10, thereby preventing the fluid on the rotating table 10 from flowing in due to the height difference.

[0093] The first protrusion 161 has an inner surface surrounding the main body 141 and an outer surface surrounded by the cover 142 , so that the first protrusion 161 can doubly protect the main body 141 together with the cover 142 to prevent the fluid from reaching the main body 141 .

[0094] The second protrusion 162 may be formed integrally with the rotating table 10 and the first protrusion 161, and may extend downward from the first protrusion 161. Figure 7 The second protrusion 162 may have the same shape as the first protrusion 161 , so that the first protrusion 161 and the second protrusion 162 may extend upward and downward respectively with the rotating table 10 as the center.

[0095] The inner surface of the second protrusion 162 surrounds the body 141 and the outer surface is surrounded by the opening 17, so that it can move to the support position or the standby position at the opening 17 together with the body 141. The second protrusion 162 can contact the portion of the body 141 where the thickness becomes different, thereby preventing the relative movement of the body 141 with respect to the second protrusion 162, thereby allowing the body 141 and the protrusion 162 to move together.

[0096] Reference Figure 7 The portion of the rotating stage 10 connected to the outer surface of the first protrusion 161 may be formed to have a curve or curvature. The fluid may be supplied to the rotating stage 10 by the fluid supplied to the substrate S. If the fluid is continuously supplied, the fluid supplied to the rotating stage 10 may condense to have a height.

[0097] On the rotating stage 10 , the fluid may condense at a connection portion such as a portion where the rotating stage 10 is connected to the outer surface of the first protrusion 161 , and the connection portion may be formed to have a curve or curvature to hinder condensation of the fluid.

[0098] The chuck assembly 1 according to an embodiment of the present invention can prevent the fluid disposed on the rotating table 10 from flowing into the rotating table 10 to the greatest extent possible, as described below.

[0099] The rotating table 10 and the protrusion 16 are formed as a whole, so that there is no gap between the rotating table 10 and the protrusion 16, so the fluid cannot flow in through the gap, and in the protrusion 16, the first protrusion 161 protrudes upward from the rotating table 10 in a manner having a height, so that the fluid present on the rotating table 10 can be prevented from flowing in due to the height difference.

[0100] The cover 142 coupled to the end of the body 141 is coupled to the first protrusion 161 on the inner surface to cover the first protrusion 161 from above to below, thereby preventing the inflow of the fluid supplied from the upper end of the first protrusion 161.

[0101] Reference Figure 7 The cover 142 may be provided with a first contact 181 that contacts the body 141 and the first protrusion 161 at the same time, and a second contact 182 that contacts the first protrusion 161 at a position lower than the first contact 181. However, if the second contact 182 is adjacent to the rotating table 10 and the fluid has a height, a portion of it may flow into the second contact 182.

[0102] If the fluid is continuously supplied to the turntable 10 , the fluid may condense and have a height. However, the first protrusion 161 protrudes vertically upward from the turntable 10 , thereby preventing the fluid from flowing horizontally into the turntable 10 .

[0103] However, if the fluid has a height, the fluid may flow vertically into the second contact 182 which is the location where the cover 142 is combined with the first protrusion 161. However, the portion where the first protrusion 161 and the rotating table 10 are connected is formed to have a curve or curvature, thereby minimizing the situation where the fluid flows into the second contact 182.

[0104] Since the first contact 181 is disposed at a higher position than the second contact 182 and is horizontally spaced apart and thus is not disposed on the same vertical line, the fluid flowing in from the second contact 182 does not easily reach the first contact 181 .

[0105] In order to reach the first contact 181 in contact with the main body 141, the fluid flowing into the second contact 182 needs to move vertically at the second contact 182 and move horizontally after bending to reach the first contact 181. Therefore, the fluid flowing into the second contact 182 cannot reach the first contact 181 or the main body 141.

[0106] The chuck assembly 1 according to an embodiment of the present invention includes a plurality of devices for preventing the fluid from flowing into the interior of the rotary table 10 , thereby being able to prevent deformation of the connection components caused by the fluid in a manner different from that of the existing chuck assembly 1 .

[0107] In the rotating table 10, the thickness of the portion arranged around the chuck pin 14 and at the upper end of the opening 17 is set to be smaller than the thickness of the rotating table 10 arranged at other positions so that it can be moved. Therefore, when the chuck pin 14 moves, the protrusion 16 formed as one body with the rotating table 10 can move together.

[0108] Even if the fluid on the rotating table 10 penetrates or flows into the gap, if the temperature of the fluid is room temperature, the gap will not deform significantly. However, if the temperature of the fluid is a high temperature of more than 70 degrees, if the fluid penetrates or flows into the gap, the temperature of the fluid may cause the components forming the gap to deform, and cause different forms of deformation depending on the shape and material of each component, so that the gap expands, which may cause more deformation.

[0109] The present invention is not limited to the above-described embodiments, and may include a combination of the above-described embodiments and known technologies as another embodiment.

[0110] The present invention has been described in detail above through specific embodiments, but this is only used to specifically illustrate the present invention and the present invention is not limited thereto. Within the technical concept of the present invention, it is obvious that deformation or improvement can be made by persons with ordinary knowledge in the technical field.

[0111] Simple deformation and even modification of the present invention belong to the field of the present invention, and the specific protection scope of the present invention will be clarified according to the claims.

Claims

1. A chuck assembly, comprising: Rotating table for substrate installation; A rotating part, which is concentric with the rotation center of the rotating table; as well as a chuck pin for supporting the substrate, The rotating stage includes a protrusion protruding upward from a surface facing the substrate. The chuck pin is coupled to the protruding portion in a form in which the protruding portion is introduced into the chuck pin, The protrusion is formed integrally with a surface of the rotating table facing the substrate.

2. The chuck assembly according to claim 1, wherein: The protrusion is formed of the same material as the surface and is disposed perpendicularly relative to the surface. The protrusion is in abutment engagement with the chuck pin at both the inner surface and the outer surface.

3. The chuck assembly according to claim 2, wherein: The chuck pin comprises: a cover, combined with the outer surface and the upper surface of the protrusion and supporting the substrate, One end of the cover surrounds the outer surface of the protruding portion and the other end supports the substrate to prevent the fluid supplied to the rotating table from flowing horizontally from the rotating table to the inner surface of the protruding portion.

4. The chuck assembly according to claim 3, wherein: The cover comprises: A first contact point contacts the upper surface of the protrusion on the inner surface; and a second contact point in contact with the protrusion at a position on the inner surface lower than the first contact point, Even if the fluid is continuously supplied and has a height around the protrusion and flows vertically into the second contact, the fluid cannot reach the first contact because the first contact is arranged at a position higher than the second contact and is horizontally spaced apart from the second contact.

5. The chuck assembly according to claim 2, wherein: The protrusion comprises: A first protrusion formed as a whole with the rotating table and protruding vertically upward relative to the rotating table; and a second protrusion formed integrally with the rotating platform and the first protrusion and extending downward from the first protrusion, The inner surface of the second protrusion surrounds the chuck pin, and the outer surface of the second protrusion is surrounded by an opening provided on the substrate.

6. The chuck assembly of claim 5, further comprising: A hinge portion, arranged inside the rotating platform; as well as A lifting part is hingedly coupled to the hinge part and is capable of lifting and lowering in a direction perpendicular to the rotation direction of the rotating platform. The chuck pin is hingedly moved toward the rotation center direction of the rotating table or in the opposite direction according to the lifting and lowering movement of the lifting part.

7. The chuck assembly according to claim 6, wherein: The chuck pins cause the cover to hinge toward the rotation center of the rotating table as the lifting part descends, thereby supporting the substrate. The chuck pins cause the cover to be hingedly moved in a direction opposite to the rotation center of the turntable as the lifting portion ascends, thereby being spaced apart from the substrate.

8. A chuck assembly comprising: Rotating table for substrate installation; A rotating unit, which rotates the rotating table; as well as a chuck pin for supporting the substrate, The rotating table has a surface facing the substrate and is provided with a plurality of protrusions protruding upward from the periphery of the surface. The chuck pin is arranged on the protruding portion in a form surrounding the outer periphery of the protruding portion, The surface and the plurality of protrusions are formed as one body.

9. The chuck assembly according to claim 8, wherein: The plurality of protrusions have a hollow shape, The chuck pin is inserted into the protruding portion and is provided in a form surrounding the outer periphery of the protruding portion, thereby simultaneously contacting the inside and the outside of the protruding portion.

10. The chuck assembly of claim 9, wherein: The surface and the plurality of protrusions are formed integrally from a single material, The plurality of protrusions protrude downward from the surface on an extension line of a shape protruding upward from the surface.

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