Middle clamped micro actuator based on piezoelectric film and application of middle clamped micro actuator

Abstract

The invention relates to the technical field of micro electro mechanical systems, in particular to a middle clamped micro actuator based on a piezoelectric film and application of the middle clamped micro actuator. The driving assembly comprises a piezoelectric film; the mass block is connected to the driving assembly; the middle fixed support assembly supports a vibration system formed by the driving assembly and the mass block; by adopting the piezoelectric film and the cantilever beam structure, the miniaturization of the actuator is realized, so that the actuator can be integrated into equipment with an extremely limited space; the middle clamped structure provides a stable mechanical basis for the piezoelectric film, and effectively solves the problems of vibration performance and reliability under a micro size. Compared with a traditional tactile feedback device, complicated mechanical structures such as a coil, a magnet and a transmission mechanism are not needed, the design is greatly simplified, the reliability is improved, and the service life is prolonged; the invention provides various structure selections such as a single-side film / double-side film, a single-side / double-side piezoelectric cantilever beam and the like.

Description

Technical Field

[0001] The present invention relates to the technical field of micro-electromechanical systems (MEMS), and in particular to a piezoelectric film-based intermediate-clamped micro-actuator and applications thereof. Background Art

[0002] With the rapid development of wearable devices, virtual reality (VR) and augmented reality (AR) technologies, there is a growing demand for miniaturized, high-performance tactile feedback devices. However, existing tactile feedback devices are usually large in size and difficult to integrate into space-constrained devices, such as the temples of AR / VR glasses or smart rings. In addition, traditional tactile feedback devices often require complex mechanical structures, such as coils, magnets, and transmission mechanisms, which not only increases manufacturing difficulty and cost, but also reduces the reliability and life of the device.

[0003] Piezoelectric materials have attracted much attention in the field of micro-actuators due to their excellent electro-mechanical coupling characteristics. However, how to ensure the performance and reliability of piezoelectric actuators in a tiny size is still a technical problem that needs to be solved. Especially in application scenarios such as wearable devices, how to achieve stable and efficient tactile feedback in a limited space is a major challenge facing existing technologies.

[0004] Therefore, there is an urgent need for a new type of microactuator design that can not only meet the requirements of miniaturization, but also ensure performance and reliability, and be suitable for a variety of application scenarios. Summary of the invention

[0005] The object of the present invention is to provide a piezoelectric film-based intermediate clamped microactuator and its application, so as to solve the problem of insufficient performance and reliability of microactuators in the prior art at a tiny size.

[0006] To achieve the above object, the present invention adopts the following technical solution:

[0007] A piezoelectric film-based intermediate clamped microactuator, comprising:

[0008] Frame;

[0009] A driving assembly, the driving assembly comprising a piezoelectric film;

[0010] a mass block connected to the drive assembly; and

[0011] An intermediate fixing assembly, wherein the intermediate fixing assembly supports the vibration system formed by the driving assembly and the mass block.

[0012] Specifically, the driving assembly includes:

[0013] a piezoelectric material layer;

[0014] Electrode layers disposed on the upper and lower sides of the piezoelectric material layer; and

[0015] A cantilever beam structure attached to the outer side of the electrode layer,

[0016] Wherein, the mass block is connected to the free end of the cantilever beam structure.

[0017] Specifically, the driving component further includes a thin film material layer attached to the outer side of the cantilever beam structure, wherein the thin film material layer and / or the piezoelectric material layer constitute a single-sided membrane structure or a double-sided membrane structure.

[0018] Specifically, when the driving component is a double-sided membrane structure, it includes:

[0019] an upper film, the upper film comprising a piezoelectric film and an elastic film; and

[0020] A lower film, wherein the lower film is an elastic film,

[0021] Wherein, the upper membrane and the lower membrane are respectively located on the upper surface and the lower surface of the mass block.

[0022] Specifically, the cantilever beam structure is a single-sided piezoelectric cantilever beam structure or a double-sided piezoelectric cantilever beam structure.

[0023] Wherein, when the cantilever beam structure is a bilateral piezoelectric cantilever beam structure, it includes two parallel cantilever beams, and the two parallel cantilever beams are fixed to the peripheral rigid arm structure at one end or both ends.

[0024] Specifically, the outer frame is in a rectangular or circular shape.

[0025] Wherein, when the outer frame is circular in shape, the drive components are distributed in a rotationally symmetrical or mirror-symmetrical manner.

[0026] Specifically, the intermediate fixing component is made of at least one of the following materials: silicon, silicon oxide, silicon nitride, aluminum, titanium, polyimide, stainless steel, polydimethylsiloxane, titanium dioxide, silicon carbide, quartz, ceramic material and glass material.

[0027] Specifically, the intermediate fixing component is connected to the driving component by at least one of the following methods: adhesive connection, mechanical clamping, micro welding and micro riveting.

[0028] An application of an intermediate-fixed microactuator based on a piezoelectric film, wherein the microactuator described in claims 1 to 8 is applied to at least one of the following devices: AR / VR glasses, smart glasses, smart rings, microscopes, microsensors, micropumps, microvalves, microfluidic systems, and biomedical devices.

[0029] In the application, when the microactuator is applied to AR / VR glasses or smart glasses, the microactuator is arranged in the temples of the glasses; when the microactuator is applied to a smart ring, the microactuator is arranged inside the ring and directly acts on the wearer's finger through the ring to provide tactile feedback.

[0030] Beneficial effects of the present invention:

[0031] 1. Miniaturized design: By adopting piezoelectric film and cantilever beam structure, the present invention realizes the miniaturization of the actuator, so that it can be integrated into devices with extremely limited space, such as the temples of AR / VR glasses or the inside of smart rings.

[0032] 2. High performance and reliability: The intermediate fixed support structure provides a stable mechanical foundation for the piezoelectric film, effectively solving the problems of vibration performance and reliability under tiny size.

[0033] 3. Simplified structure: Compared with traditional tactile feedback devices, the present invention does not require complex mechanical structures, such as coils, magnets and transmission mechanisms, which greatly simplifies the design and improves reliability and life.

[0034] 4. Design flexibility: The present invention provides a variety of structural options such as single-sided membrane / double-sided membrane, single-sided / double-sided piezoelectric cantilever beam, etc. to meet different application requirements.

[0035] 5. Efficient energy conversion: The piezoelectric film drive method realizes efficient conversion of electrical energy to mechanical energy, improving the overall efficiency of the actuator.

[0036] 6. Potential for wide application: This invention solves the problem of achieving effective tactile feedback in devices such as AR / VR glasses and smart rings, and provides new possibilities for the interactive experience of miniaturized devices. BRIEF DESCRIPTION OF THE DRAWINGS

[0037] In order to more clearly illustrate the technical solutions in the embodiments of the present invention, the following briefly introduces the drawings required for describing the embodiments. Obviously, the drawings described below are only some embodiments of the present invention, and those skilled in the art can obtain other drawings based on these drawings without creative work.

[0038] Figure 1 It is a front view of a cuboid single-sided membrane single-sided piezoelectric cantilever beam intermediately fixed microactuator in an embodiment of the present invention;

[0039] Figure 2 A three-dimensional cross-sectional front view of a cuboid single-sided membrane single-sided piezoelectric cantilever beam intermediately fixed microactuator according to an embodiment of the present invention;

[0040] Figure 3It is a front view of a microactuator with a single-sided membrane and a double-sided piezoelectric cantilever beam fixed in the middle according to an embodiment of the present invention;

[0041] Figure 4 A three-dimensional front view of a microactuator with a single-sided membrane and a double-sided piezoelectric cantilever beam fixed in the middle according to an embodiment of the present invention;

[0042] Figure 5 It is a front view of a rotationally symmetrical microactuator with a circular single-sided membrane and a fixed-support piezoelectric cantilever beam in the embodiment of the present invention;

[0043] Figure 6 A top view of a rotationally symmetrical microactuator with a circular single-sided membrane and a fixed-support piezoelectric cantilever beam in the embodiment of the present invention;

[0044] Figure 7 A three-dimensional front view of a rotationally symmetrical microactuator with a circular single-sided membrane and a fixed piezoelectric cantilever beam in the middle according to an embodiment of the present invention;

[0045] Figure 8 It is a front view of a microactuator with a double-sided membrane and a single-sided piezoelectric cantilever beam fixed in the middle in an embodiment of the present invention;

[0046] Fig. 9 A three-dimensional front view of a microactuator with a double-sided membrane and a single-sided piezoelectric cantilever beam fixed in the middle in an embodiment of the present invention;

[0047] Fig.10 It is a front view of a microactuator with a double-sided membrane and a double-sided piezoelectric cantilever beam fixed in the middle in an embodiment of the present invention;

[0048] Fig.11 A three-dimensional front view of a microactuator with a double-sided membrane and a double-sided piezoelectric cantilever beam fixed in the middle in an embodiment of the present invention;

[0049] Fig.12 It is a front view of a rotationally symmetrical microactuator with a circular double-sided membrane and a fixed piezoelectric cantilever beam in the middle according to an embodiment of the present invention;

[0050] Fig.13 A three-dimensional front view of a rotationally symmetrical microactuator with a circular double-sided membrane and a fixed-support piezoelectric cantilever beam in the middle in an embodiment of the present invention;

[0051] Fig.14 It is a front view of a rotationally symmetric microactuator with a circular double-sided membrane and a fixed-support piezoelectric cantilever beam in an embodiment of the present invention.

[0052] Fig.15 It is a three-dimensional front view of a rotationally symmetric microactuator with a circular double-sided membrane and a fixed piezoelectric cantilever beam in the middle in an embodiment of the present invention. DETAILED DESCRIPTION

[0053] The technical scheme in the embodiment of the present invention will be clearly and completely described below in conjunction with the drawings in the embodiment of the present invention. Obviously, the described embodiment is only a part of the embodiment of the present invention, not all of the embodiments. Based on the embodiment of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative work are within the scope of protection of the present invention.

[0054] A piezoelectric film-based intermediate-fixed microactuator comprises: an outer frame 1; a driving component 2, wherein the driving component 2 comprises a piezoelectric film; a mass block 3, wherein the mass block 3 is connected to the driving component 2; and an intermediate-fixed component 4, wherein the intermediate-fixed component 4 supports a vibration system formed by the driving component 2 and the mass block 3.

[0055] Preferably, the driving component 2 includes: a piezoelectric material layer 21; an electrode layer 22 arranged on the upper and lower sides of the piezoelectric material layer 21; and a cantilever beam structure 23 attached to the outside of the electrode layer 22, wherein the mass block 3 is connected to the free end of the cantilever beam structure 23.

[0056] Furthermore, the driving component 2 further comprises a thin film material layer 24 attached to the outer side of the cantilever beam structure 23, wherein the thin film material layer 24 and / or the piezoelectric material layer 21 constitute a single-sided membrane structure or a double-sided membrane structure.

[0057] In one embodiment of the present invention, when the driving component 2 is a double-sided membrane structure, it includes: an upper membrane, the upper membrane includes a piezoelectric film and an elastic film; and a lower membrane, the lower membrane is an elastic film, wherein the upper membrane and the lower membrane are respectively located on the upper surface and the lower surface of the mass block 3. The double membrane can be above and below the mass block 3, or it can be a double membrane combination generated by connecting a single-membrane driving component and a mass block in a mirror-symmetrical manner.

[0058] Preferably, the cantilever beam structure 23 is a single-sided piezoelectric cantilever beam structure or a double-sided piezoelectric cantilever beam structure, wherein, when the cantilever beam structure 23 is a double-sided piezoelectric cantilever beam structure, it includes two parallel cantilever beams, and the two parallel cantilever beams are fixed at one end or both ends to a surrounding rigid arm structure.

[0059] In another embodiment of the present invention, the outer frame 1 is in a rectangular or circular shape.

[0060] Wherein, when the outer frame 1 is circular in shape, the driving components 2 are distributed in a rotationally symmetrical or mirror-symmetrical manner.

[0061] Preferably, the intermediate fixing component 4 is made of at least one of the following materials: silicon, silicon oxide, silicon nitride, aluminum, titanium, polyimide, stainless steel, polydimethylsiloxane, titanium dioxide, silicon carbide, quartz, ceramic material and glass material.

[0062] Furthermore, the intermediate fixing component 4 is connected to the driving component 2 by at least one of the following methods: adhesive connection, mechanical clamping, micro welding and micro riveting.

[0063] The present invention also provides an application of an intermediate-fixed microactuator based on a piezoelectric film, and the above-mentioned microactuator is applied to at least one of the following devices: AR / VR glasses, smart glasses, smart rings, microscopes, microsensors, micropumps, microvalves, microfluidic systems and biomedical devices.

[0064] Preferably, when the microactuator is applied to AR / VR glasses or smart glasses, the microactuator is arranged in the temples of the glasses; when the microactuator is applied to a smart ring, the microactuator is arranged inside the ring and directly acts on the wearer's fingers through the ring to provide tactile feedback.

[0065] Example 1: Rectangular single-sided membrane single-sided piezoelectric cantilever beam intermediate clamped microactuator

[0066] like Figure 1 and Figure 2 As shown, this embodiment provides a cuboid single-sided membrane single-sided piezoelectric cantilever beam intermediate clamped micro actuator. The actuator comprises an outer frame 1, a driving component 2, a mass block 3 and an intermediate clamped component 4.

[0067] The outer frame 1 is in the shape of a rectangular parallelepiped, which is used to support the entire actuator structure and provide protection. The driving component 2 includes a piezoelectric material layer 21, an electrode layer 22 arranged on the upper and lower sides of the piezoelectric material layer 21, and a cantilever beam structure 23 attached to the outside of the electrode layer 22. The piezoelectric material layer 21 can be a common piezoelectric material such as PZT (lead zirconate titanate), PVDF (polyvinylidene fluoride), etc. The electrode layer 22 is usually a metal material, such as gold, platinum, etc. The cantilever beam structure 23 can be made of materials such as silicon and silicon oxide.

[0068] The mass block 3 is connected to the free end of the cantilever beam structure 23 to increase the inertia of the vibration system, thereby generating a greater vibration force. The intermediate fixed support component 4 supports the vibration system formed by the drive component 2 and the mass block 3, providing a stable mechanical foundation for the entire structure.

[0069] Preferably, the driving assembly 2 further comprises a thin film material layer 24 attached to the outside of the cantilever beam structure 23 to form a single-sided film structure. The thin film material layer 24 can be a flexible material such as polyimide, which is used to protect the cantilever beam structure and improve its stability.

[0070] In this embodiment, the intermediate fixing component 4 can be made of silicon or silicon oxide material, and connected to the driving component 2 by adhesive connection or micro welding, etc. This connection method not only ensures the stability of the structure, but also facilitates micro-machining and manufacturing.

[0071] Example 2: Microactuator with single-sided membrane and double-sided piezoelectric cantilever beam with middle clamp

[0072] like Figure 3 and Figure 4 As shown, this embodiment provides a micro actuator with a single-sided membrane and double-sided piezoelectric cantilever beams with a fixed support in the middle. Based on the embodiment 1, the single-sided cantilever beam structure is changed to a double-sided cantilever beam structure.

[0073] Specifically, the drive assembly 2 includes two parallel cantilever beam structures 23, which are fixed to the surrounding rigid arm structure at one or both ends. This bilateral structure provides a more uniform force distribution and increases the stability and load-bearing capacity of the structure.

[0074] The double-sided piezoelectric cantilever structure 23 enables the actuator to generate more complex vibration modes, such as torsional vibration. This design is particularly suitable for applications that require high stability or complex vibration modes, such as precision positioning systems or multi-mode tactile feedback devices.

[0075] Example 3: Rotationally symmetric microactuator with circular single-sided membrane and intermediate clamped piezoelectric cantilever beam

[0076] like Figure 5 , Figure 6 and Figure 7 As shown, this embodiment provides a micro-actuator with a circular single-sided membrane and a fixed-support piezoelectric cantilever beam with rotational symmetry. The outer frame 1 of the actuator is circular, and the driving components 2 are distributed in a rotational symmetric manner.

[0077] This circular design has the following advantages:

[0078] 1. Achieved uniform distribution of force and effectively reduced stress concentration;

[0079] 2. Improved the stability and balance of the structure;

[0080] 3. It can produce more complex and precise vibration modes, such as radial vibration or circular vibration;

[0081] 4. The circular design facilitates integration with circular devices, such as smart rings or circular buttons.

[0082] In this embodiment, the cantilever beam structures 23 are evenly distributed radially, and the free end of each cantilever beam is connected to a mass block 3. The intermediate fixing component 4 is located at the center of the circle, providing a stable support point for the entire structure. This rotationally symmetrical design not only improves the stability of the structure, but also produces a more uniform and controllable vibration effect.

[0083] Example 4: Microactuator with double-sided membrane and single-sided piezoelectric cantilever beam fixed in the middle

[0084] like Figure 8 and Fig. 9 As shown, this embodiment provides a micro actuator with a double-sided membrane and a single-sided piezoelectric cantilever beam fixed in the middle. The actuator adopts a double-sided membrane structure based on the embodiment 1.

[0085] Specifically, the driving assembly 2 includes:

[0086] The upper film 25 includes a piezoelectric film and an elastic film;

[0087] The lower film 26 is an elastic film.

[0088] The upper membrane 25 and the lower membrane 26 are respectively located on the upper surface and the lower surface of the mass block 3. This double-sided membrane design has the following advantages:

[0089] 1. Increase the symmetry of the structure and improve the stability of vibration;

[0090] 2. Improved the reliability and anti-drop performance of the actuator;

[0091] 3. It can realize more complex vibration modes and increase the diversity of functions;

[0092] 4. Enhanced response sensitivity to external stimuli.

[0093] Preferably, the piezoelectric film in the upper film can be a PZT material, and the elastic film can be a polyimide material. The lower film can be made of polyimide or other flexible materials. This material combination ensures a good piezoelectric effect and provides sufficient mechanical strength and flexibility.

[0094] Example 5: Microactuator with double-sided membrane and bilateral piezoelectric cantilever beam with middle clamp

[0095] like Fig.10 and Fig.11 As shown, this embodiment provides a micro actuator with a double-sided membrane and a double-sided piezoelectric cantilever beam with a fixed support in the middle. The actuator combines the double-sided cantilever beam structure of embodiment 2 and the double-sided membrane design of embodiment 4, and is a highly integrated structure.

[0096] In this design, the bilateral piezoelectric cantilever structure includes two parallel cantilever beams, which are fixed at both ends to the surrounding rigid arm structure. A double-sided membrane structure, i.e., an upper membrane and a lower membrane, is used on each cantilever beam.

[0097] This combination design has the following features:

[0098] 1. Provides the highest degree of structural stability and balance;

[0099] 2. The most complex vibration modes can be achieved, such as multi-dimensional vibration;

[0100] 3. With the highest reliability and anti-interference ability;

[0101] 4. Able to withstand large external loads.

[0102] This design is therefore particularly suitable for the most demanding applications, such as high-precision micro-robotics or medical devices requiring complex tactile feedback.

[0103] Example 6: Rotationally symmetric microactuator with circular double-sided membrane and intermediate fixed piezoelectric cantilever beam

[0104] like Fig.12 , Fig.13 , Fig.14 and Fig.15 As shown, this embodiment provides a circular double-sided membrane intermediate clamped piezoelectric cantilever beam rotationally symmetric microactuator. This design integrates all advanced features such as circular shape, double-sided membrane, rotational symmetry, etc., and is the most complex and comprehensive embodiment.

[0105] In this design, the outer frame 1 is circular, and the drive components 2 are rotationally symmetrically distributed. Each cantilever beam structure 23 adopts a double-sided membrane design, namely an upper membrane 25 and a lower membrane 26. The middle fixed support component 4 is located at the center of the circle, providing a stable support point for the entire structure.

[0106] The advantages of this design include:

[0107] 1. The most complex and precise vibration modes can be achieved, such as spherical vibration;

[0108] 2. With the highest structural stability and balance;

[0109] 3. The most adaptable, can meet various complex application requirements;

[0110] 4. It can provide uniform vibration effect in all directions.

[0111] This design is particularly suitable for application scenarios that require omnidirectional, high-precision, and high-reliability vibration, such as tactile feedback systems in high-end VR / AR devices or attitude control systems for micro-aircraft.

[0112] The microactuator of the present invention can be applied to a variety of devices, including but not limited to: AR / VR glasses, smart glasses, smart rings, microscopes, microsensors, micropumps, microvalves, microfluidic systems and biomedical devices.

[0113] In particular, when the microactuator of the present invention is applied to AR / VR glasses or smart glasses, the actuator can be set inside the temples of the glasses. Since the actuator of the present invention has the characteristics of miniaturization, it can adapt well to the limited space inside the temples. This setting can provide users with richer tactile feedback and enhance the immersion of virtual reality or augmented reality.

[0114] When applied to a smart ring, the microactuator of the present invention can be arranged inside the ring. Due to its small size and high efficiency, the actuator can directly act on the wearer's finger through the ring to provide precise tactile feedback. This design can greatly enhance the interactive ability of the smart ring and provide users with a more intuitive and rich operating experience.

[0115] The method for preparing the microactuator of the present invention may include the following steps:

[0116] 1. Providing an outer frame: The outer frame can be manufactured by micro-machining techniques such as photolithography and etching.

[0117] 2. Forming an intermediate fixing component: Silicon, silicon oxide and other materials can be used to form an intermediate fixing structure through deposition, photolithography and etching processes.

[0118] 3. Make the drive components:

[0119] a) Deposition of piezoelectric material layer: The piezoelectric material can be deposited by sputtering, chemical vapor deposition, etc.

[0120] b) Forming electrode layers: Metal electrode layers can be formed on the upper and lower sides of the piezoelectric material layer by evaporation or sputtering.

[0121] c) Fabrication of cantilever beam structure: The cantilever beam structure can be formed by methods such as photolithography and etching.

[0122] d) If it is a double-sided film structure, it is also necessary to form an upper film and a lower film on both sides of the cantilever beam structure, which can be accomplished by spin coating, photolithography and other processes.

[0123] 4. Connecting the mass block: The mass block can be connected to the free end of the cantilever beam structure by micro welding, adhesives, etc.

[0124] 5. Assembly: Install the drive assembly and mass block to the intermediate support assembly, which can be done by micro welding, adhesive connection or mechanical clamping.

[0125] 6. Packaging: Finally, the entire structure is packaged in an outer frame to form a complete microactuator.

[0126] In practical applications, the microactuator of the present invention can work in the following ways:

[0127] 1. When voltage is applied to a piezoelectric material layer, the piezoelectric material deforms due to the piezoelectric effect.

[0128] 2. This deformation will cause the cantilever beam structure to bend or twist, thereby driving the mass block to move.

[0129] 3. The movement of the mass block will produce a reaction force, causing the entire actuator to vibrate.

[0130] 4. By controlling the magnitude and frequency of the applied voltage, the intensity and pattern of the vibration can be adjusted to achieve different tactile feedback effects.

[0131] The microactuator of the present invention has the following advantages in practical applications:

[0132] 1. The miniaturized design enables it to be integrated into devices with extremely limited space, such as the temples of AR / VR glasses or the inside of a smart ring. For example, in a smart ring application, the actuator of the present invention can be less than 5 mm in diameter and less than 2 mm in thickness, which fully meets the space limitations inside the ring.

[0133] 2. High performance and reliability. Through the intermediate fixed support structure, the actuator of the present invention can maintain good vibration performance in a small size. For example, in a typical application, the actuator of the present invention can generate an acceleration of 0.1-10g and a frequency range of 20-500Hz, which completely covers the sensitive range of human body to touch.

[0134] 3. Low power consumption. Due to the piezoelectric drive, the actuator of the present invention has high energy efficiency. In typical applications, the power consumption can be as low as 1-10mW, which is very suitable for battery-powered wearable devices.

[0135] 4. Fast response. The characteristics of the piezoelectric effect enable the actuator of the present invention to respond in microseconds, which is much faster than traditional electromagnetic actuators and can provide more precise and real-time tactile feedback.

[0136] 5. Diverse vibration modes. Through different structural designs (such as single-sided / double-sided cantilever beams, rotationally symmetrical structures, etc.), the actuator of the present invention can generate multiple vibration modes, such as linear vibration, rotational vibration, radial vibration, etc., providing customized tactile feedback solutions for different application scenarios.

[0137] In summary, the present invention provides a piezoelectric film-based intermediate fixed-support microactuator and its application, which solves the problem of insufficient performance and reliability of microactuators in micro-sizes through innovative structural design and material selection. The actuator can not only meet the needs of emerging wearable devices such as AR / VR glasses and smart rings for miniaturization and high-performance tactile feedback, but can also be applied to microfluidic systems, biomedical equipment and other fields, and has broad application prospects.

[0138] Obviously, the above embodiments of the present invention are merely examples for clearly illustrating the present invention, and are not intended to limit the embodiments of the present invention. For those skilled in the art, other different forms of changes or modifications can be made based on the above description. It is not necessary and impossible to list all the embodiments here. Any modifications, equivalent substitutions and improvements made within the spirit and principles of the present invention should be included in the protection scope of the claims of the present invention.

Claims

1. A piezoelectric film-based intermediate clamped microactuator, characterized in that: include: Frame; A driving assembly, the driving assembly comprising a piezoelectric film; A mass block connected to the driving assembly; as well as An intermediate fixing assembly, wherein the intermediate fixing assembly supports the vibration system formed by the driving assembly and the mass block.

2. The microactuator according to claim 1, characterized in that: The drive assembly comprises: a piezoelectric material layer; Electrode layers disposed on the upper and lower sides of the piezoelectric material layer; and A cantilever beam structure attached to the outer side of the electrode layer, Wherein, the mass block is connected to the free end of the cantilever beam structure.

3. The microactuator according to claim 2, characterized in that: The driving component further includes a thin film material layer attached to the outer side of the cantilever beam structure, wherein the thin film material layer and / or the piezoelectric material layer constitute a single-sided membrane structure or a double-sided membrane structure.

4. The microactuator according to claim 3, characterized in that: When the driving component is a double-sided membrane structure, it includes: an upper film, the upper film comprising a piezoelectric film and an elastic film; and A lower film, wherein the lower film is an elastic film, Wherein, the upper membrane and the lower membrane are respectively located on the upper surface and the lower surface of the mass block.

5. The microactuator according to any one of claims 2 to 4, characterized in that: The cantilever beam structure is a single-sided piezoelectric cantilever beam structure or a double-sided piezoelectric cantilever beam structure. Wherein, when the cantilever beam structure is a bilateral piezoelectric cantilever beam structure, it includes two parallel cantilever beams, and the two parallel cantilever beams are fixed to the peripheral rigid arm structure at one end or both ends.

6. The microactuator according to any one of claims 1 to 4, characterized in that: The outer frame is in a rectangular or circular shape. Wherein, when the outer frame is circular in shape, the drive components are distributed in a rotationally symmetrical or mirror-symmetrical manner.

7. The microactuator according to any one of claims 1 to 4, characterized in that: The intermediate fixing component is made of at least one of the following materials: silicon, silicon oxide, silicon nitride, aluminum, titanium, polyimide, stainless steel, polydimethylsiloxane, titanium dioxide, silicon carbide, quartz, ceramic material and glass material.

8. The microactuator according to any one of claims 1 to 4, characterized in that: The intermediate fixing assembly is connected to the driving assembly by at least one of the following methods: adhesive connection, mechanical clamping, micro welding and micro riveting.

9. An application of an intermediate clamped microactuator based on a piezoelectric film, characterized in that: The microactuator according to any one of claims 1 to 8 is applied to at least one of the following devices: AR / VR glasses, smart glasses, smart rings, microscopes, microsensors, micropumps, microvalves, microfluidic systems, and biomedical devices.

10. The use according to claim 9, characterized in that: When the microactuator is applied to AR / VR glasses or smart glasses, the microactuator is arranged in the temples of the glasses; when the microactuator is applied to a smart ring, the microactuator is arranged inside the ring and directly acts on the wearer's fingers through the ring to provide tactile feedback.

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