Filter module

Abstract

A filter module includes an interface body and a filter holding body. A filter may be disposed between the filter holding body and a filter holder joined to the filter holding body. The filter holding body may further include a valve. The filter holder may be joined to the filter holding body by snap-fit, press-fit, or welding. The filter holder may include a mount configured to contact the filter such that the filter is remote from a filter grille. The filter module may be used to provide purge in a wafer container, such as a front open wafer transfer cassette (FOUP).

Description

Technical Field

[0001] The present disclosure relates to a module for housing a filter, in particular, a filter module for a wafer container. Background Art

[0002] Purification assemblies for wafer containers, such as front opening pods (FOUPs), typically include multiple discrete components, including grommets, filters, valves, and various sealing components. The filters are typically held in place by welding them into a filter element, which is then included in the purification assembly. Additionally, filter grilles used to hold the filters can impede flow through the portion of the filter covered by such grilles. Summary of the invention

[0003] The present disclosure relates to a module for housing a filter, in particular, a filter module for a wafer container.

[0004] By using an elastic interface body instead of a grommet, and inserting the filter holder into the interface body, a simple unified structure can be provided for the purification module. This simplifies the structure and prevents malfunctions, such as when the purification module is installed without including a sealing element.

[0005] By separating the filter from the grid using supports disposed on the filter grid, the effective surface area of ​​the filter can be increased by reducing clogging at the points where the filter surface contacts the grid. This can increase flow and reduce pressure drop across the filter. The reduction in pressure drop can reduce vibration or dislodgment of the wafer container when providing purification through the filter.

[0006] The filter is held in place without welding by simply snapping the perimeter of the filter and securing the filter using a snap fit, such as a ring snap fit. This simplifies manufacturing and avoids potential particle generation that can result from having to use ultrasonic welding to secure the filter. It can also avoid the introduction of contaminants, such as off-gassing released by the adhesive compound, which would otherwise serve to retain the filter.

[0007] In an embodiment, a gas exchange module for a substrate container includes a filter housing and an interface body. The interface body includes a hole configured to receive the filter housing. The gas exchange module further includes a filter disposed at one end of the filter housing and a filter holder coupled to the filter housing.

[0008] In an embodiment, the filter housing further comprises a valve. In an embodiment, the valve is a check valve.

[0009] In an embodiment, the interface body includes one or more retention features disposed on an outer surface of the interface body.

[0010] In an embodiment, the filter holder is joined to the filter housing by a snap fit formed between one or more first snap fit features provided on the filter holder and one or more second snap fit features provided on the filter housing. In an embodiment, the filter is held between a first retaining surface provided on the filter holder and a second retaining surface provided on the filter housing by compression only. In an embodiment, the filter holder is joined to the filter housing by welding. In an embodiment, the welding is laser welding. In an embodiment, the welding is ultrasonic welding. In an embodiment, the filter holder is joined to the filter housing by press fit.

[0011] In an embodiment, a filter holder includes a retaining element disposed in an opening defined by the filter holder. The retaining element includes a plurality of pairs of spokes. Each of the plurality of pairs of spokes extends toward a center, and the center defines a channel. Each of the plurality of spokes includes a filter retaining beam configured to contact the filter, and the total surface area of ​​the filter retaining beams is less than the total surface area of ​​the retaining element.

[0012] In an embodiment, the interface body comprises an elastic material.

[0013] In an embodiment, the substrate container includes a substrate container body defining an interior space, the substrate container including a gas exchange port. The substrate container further includes a gas exchange module disposed in the gas exchange port. The gas exchange module includes a filter housing and an interface body. The interface body includes an interface body and a hole configured to receive the filter housing. The gas exchange module further includes a filter disposed at an end of the filter housing and a filter holder engaged to the filter housing. When the gas exchange module is disposed in the gas exchange port, the interface body is configured to form a seal around the gas exchange port.

[0014] In embodiments, the interface body includes one or more retaining features disposed on an outer surface of the interface body and the gas exchange port includes one or more openings configured to receive the one or more retaining features disposed on the outer surface of the interface body.

[0015] In an embodiment, the filter housing comprises a valve.

[0016] In an embodiment, the filter holder is joined to the filter housing by a snap fit formed between one or more first snap fit features provided on the filter holder and one or more second snap fit features provided on the filter housing. In an embodiment, the filter is held between a first retaining surface provided on the filter holder and a second retaining surface provided on the filter housing by compression only. In an embodiment, the filter holder is joined to the filter housing by welding. In an embodiment, the welding is laser welding. In an embodiment, the welding is ultrasonic welding. In an embodiment, the filter holder is joined to the filter housing by press fit.

[0017] In an embodiment, a filter holder includes a retaining element disposed in an opening defined by the filter holder. The retaining element includes a plurality of pairs of spokes. Each of the plurality of pairs of spokes extends toward a center, and the center defines a channel. Each of the plurality of spokes includes a filter retaining beam configured to contact the filter, and the total surface area of ​​the filter retaining beams is less than the total surface area of ​​the retaining element.

[0018] In an embodiment, the interface body comprises an elastic material.

[0019] In an embodiment, a method of providing gas exchange in a substrate container includes assembling a gas exchange module by inserting a filter housing into a hole of an interface body, placing a filter at an end of the filter housing, and attaching a filter holder to the filter housing. The method further includes inserting the gas exchange module into a gas exchange port of a substrate container.

[0020] In an embodiment, attaching the filter holder to the filter housing comprises forming a snap fit between one or more first snap fit features provided on the filter holder and one or more second snap fit features provided on the filter housing. In an embodiment, the filter is retained between a first retaining surface provided on the filter holder and a second retaining surface provided on the filter housing by compression only.

[0021] In embodiments, inserting the gas exchange module into the gas exchange port of the substrate container includes forming an interface between an opening disposed in the gas exchange port and one or more retaining features disposed on an outer surface of the interface body.

[0022] In an embodiment, the method further comprises directing a flow of air through the interface body, passing the flow of air through a valve disposed in the filter housing, and passing the flow of air through the filter.

[0023] In an embodiment, a filter holder comprises a filter holding body defining an opening. The filter holding body has one or more holding elements extending into the opening in a direction transverse to the opening. At least one of the one or more holding elements comprises one or more seats, each of the one or more seats protruding from a side of the one or more holding elements configured to face the filter to be fixed by the filter holder. The surface area of ​​the contact surface of the one or more seats is smaller than the surface area of ​​the one or more holding elements.

[0024] In an embodiment, the opening is circular.

[0025] In an embodiment, the one or more retaining elements include a central body and a plurality of spokes. In an embodiment, the one or more seats are disposed at a junction between the central body and the plurality of spokes.

[0026] In an embodiment, the one or more retaining elements include a plurality of spokes configured to meet at a center of the opening.

[0027] In an embodiment, said one or more retaining elements form a grid over said opening.

[0028] In an embodiment, the one or more retaining elements include a plurality of pairs of spokes. Each of the plurality of pairs of spokes extends toward a center, and the center defines a channel. In an embodiment, the one or more supports are filter retaining beams disposed on the spokes of the plurality of pairs of spokes.

[0029] In an embodiment, the filter holding body comprises an attachment portion comprising a snap fit feature.

[0030] In an embodiment, a filter assembly includes a filter and a filter holder. The filter holder includes a filter holding body defining an opening and having one or more holding elements extending into the opening in a direction transverse to the opening. At least one of the one or more holding elements includes one or more supports, each of the one or more supports protruding from a side of the one or more holding elements configured to face the filter. The surface area of ​​the contact surface of the one or more supports is less than the surface area of ​​the one or more holding elements. The filter contacts the filter holder at the support.

[0031] In an embodiment, the opening is circular.

[0032] In an embodiment, the one or more retaining elements comprise a central body and a plurality of spokes. In an embodiment, the one or more seats are disposed at a junction between the central body and the plurality of spokes. In an embodiment, the central body is a ring.

[0033] In an embodiment, the one or more retaining elements include a plurality of spokes configured to meet at a center of the opening.

[0034] In an embodiment, said one or more retaining elements form a grid over said opening.

[0035] In an embodiment, the one or more retaining elements include a plurality of pairs of spokes. Each of the plurality of pairs of spokes extends toward a center, and the center defines a channel. In an embodiment, the one or more supports are filter retaining beams disposed on the spokes of the plurality of pairs of spokes.

[0036] In an embodiment, the filter holding body comprises an attachment portion comprising a snap fit feature.

[0037] In an embodiment, the filter assembly further comprises a canister and the filter holder is coupled to the canister. In an embodiment, the filter assembly further comprises a purge port and the filter holder is coupled to the purge port. In an embodiment, the filter assembly further comprises a gas exchange module and the filter holder is coupled to the gas exchange module. In an embodiment, the filter assembly further comprises a housing having a port and the filter holder is coupled to the port.

[0038] In an embodiment, a method of holding a filter includes securing the filter using a filter holder, the filter holder including a filter holding body defining an opening, the filter holding body having one or more holding elements extending into the opening in a direction transverse to the opening. At least one of the one or more holding elements includes one or more seats, each of the one or more seats protruding from a side of the holding element configured to face the filter to be secured by the filter holder. The surface area of ​​the contact surface of the one or more holding elements is less than the surface area of ​​the one or more holding elements, and the filter contacts the filter holder at the seats.

[0039] In an embodiment, the filter holder includes a filter holder body defining an opening. The filter holder body has a contact surface surrounding the opening, a filter contact surface, and a snap-fit ​​retention feature disposed on one or more inner surfaces of one or more walls. The one or more walls surround the filter contact surface.

[0040] In an embodiment, the snap-fit ​​retention feature is an annular protrusion.

[0041] In an embodiment, the snap-fit ​​retention feature comprises a plurality of protrusions.

[0042] In an embodiment, the snap-fit ​​retention feature is an annular groove.

[0043] In an embodiment, the snap-fit ​​retention feature comprises a plurality of recesses formed in the one or more inner surfaces.

[0044] In an embodiment, a filter assembly includes a port body. The port body includes a port filter contact surface and a port snap-fit ​​feature. The filter assembly further includes a filter and a filter holder. The filter holder includes a filter holder body defining an opening. The filter holder body has a contact surface surrounding the opening, a holder filter contact surface, and a holder snap-fit ​​feature disposed on one or more inner surfaces of one or more walls. The one or more walls surround the filter contact surface. A portion of the filter is compressed between the port filter contact surface and the holder filter contact surface. The port snap-fit ​​feature is configured to snap-fit ​​with the holder snap-fit ​​feature.

[0045] In an embodiment, the filter is held between the port filter contact surface and the retainer filter contact surface solely by compression.

[0046] In an embodiment, the port body is contained in a canister having a canister body comprising an elastomeric material. In an embodiment, the port body is contained in a purge port. In an embodiment, the port body is contained in a housing. In an embodiment, the port body is contained in a gas exchange module.

[0047] In an embodiment, the filter holder comprises one or more retaining elements extending through an opening of the filter holder. At least one of the one or more retaining elements comprises one or more seats, each of the one or more seats protruding from a side of the one or more retaining elements configured to face the filter. The surface area of ​​the contact surface of the one or more seats is smaller than the surface area of ​​the one or more retaining elements. The filter contacts the filter holder at the seats.

[0048] In an embodiment, the filter holder includes a retaining element disposed in an opening defined by the filter holder. The retaining element includes a plurality of pairs of spokes. Each of the plurality of pairs of spokes extends toward a center, and the center defines a channel. Each of the plurality of spokes includes a filter retaining beam configured to contact the filter, and the total surface area of ​​the filter retaining beams is less than the total surface area of ​​the retaining element.

[0049] In an embodiment, a method of assembling a filter assembly includes placing a filter between a port body and a filter holder, and snapping the filter holder onto the port body such that one or more port body snap-fit ​​features disposed on the port body engage with one or more holder snap-fit ​​features disposed on the filter holder.

[0050] In embodiments, the filter is compressed between a port filter contact surface and a retainer filter contact surface.

[0051] In embodiments, the method further comprises maintaining the position of the filter solely by the compression of the filter between the port filter contact surface and the retainer filter contact surface.

[0052] In embodiments, the method further comprises contacting the filter at a seat disposed on one or more retaining elements extending into an opening of the filter holder, wherein a contact area of ​​the seat is smaller than a surface area of ​​the one or more retaining elements.

[0053] In an embodiment, the port body is contained in a canister. In an embodiment, the port body is contained in a purge port. In an embodiment, the port body is contained in a housing. In an embodiment, the port body is contained in a gas exchange module. BRIEF DESCRIPTION OF THE DRAWINGS

[0054] Figure 1 An exploded view of a filter module according to an embodiment is shown.

[0055] Figure 2 A cross-sectional view of a filter module according to an embodiment is shown.

[0056] Figure 3 A filter holder according to an embodiment is shown.

[0057] Figure 4A A cross-sectional view of a filter and a filter holder according to an embodiment is shown.

[0058] Figure 4B A cross-sectional view of a filter and a filter holder according to an embodiment is shown.

[0059] Figure 4C A cross-sectional view of a filter and a filter holder according to an embodiment is shown.

[0060] Figure 4D A cross-sectional view of a filter and a filter holder according to an embodiment is shown.

[0061] Figure 4E A cross-sectional view of a filter and a filter holder according to an embodiment is shown.

[0062] Figure 5 Another cross-sectional view of a filter and a filter holder according to an embodiment is shown.

[0063] Figure 6 A perspective view of a tank according to an embodiment is shown.

[0064] Figure 7 A perspective view showing a housing according to an embodiment.

[0065] Figure 8 A container according to an embodiment is shown.

[0066] Fig. 9 A filter holder according to an embodiment is shown. DETAILED DESCRIPTION

[0067] The present disclosure relates to a module for housing a filter, in particular a filter module for a wafer container.

[0068] Figure 1 An exploded view of a filter module according to an embodiment is shown. The filter module 100 includes an interface body 102 and a filter housing 104. The filter module 100 may optionally include one or more operating elements. Optionally, a valve 106 may be included in the filter housing 104 as an operating element. A filter 108 may be retained between the filter housing 104 and a filter holder 110. Optionally, a sensor 112 may be incorporated into the filter housing 104 as an operating element.

[0069] The filter module 100 is configured to be received in a wafer container, such as a front opening pod (FOUP). The filter module is configured to provide an interface with a fluid source, such as a purge gas source, and direct the received fluid through a filter 108. The fluid may be any suitable liquid or gas to be introduced into the wafer container. Optionally, the filter module 100 further includes a valve 106 to meter flow into the wafer container or prevent flow out of the wafer container from the filter module 100.

[0070] The interface body 102 is a body configured to interface with a fluid source, such as a purge gas source. The interface body 102 further includes an aperture configured to receive a portion of a filter housing such that the filter housing 104 can be inserted into the aperture. The interface body 102 can be made of an elastomeric material configured to form a seal between the interface body 102 and the portion of the filter housing 104 inserted into the aperture of the interface body 102. Further, the elastomeric material of the interface body 102 can be configured to form a seal between the interface body 102 and a portion of a wafer container, such as a purge port opening into which the interface body 102 can be inserted. The interface body 102 can be configured so that the interface body 102 can be retained in a portion of a wafer container, such as a purge port opening into which the interface body 102 can be inserted. Retention can be provided, for example, by sizing the interface body 102 to provide a press fit, providing one or more retaining features, such as protrusions on a surface of the interface body, or any other suitable structure included on the interface body 102.

[0071] The filter housing 104 is configured to be inserted into a hole disposed in the interface body 102 and is configured to be connected to the filter holder 110 so that the filter 108 can be secured at the interface body 102 into the fluid path of the filter module 100. The filter housing 104 may optionally include one or more features configured to interface with features disposed in the hole of the interface body 102 so that the filter housing 104 is retained in the interface body 102. In an embodiment, the filter housing 104 forms a press fit with the hole formed in the interface body 102.

[0072] One or more operating elements may be included in the filter module 100 to interact with the fluid passing therethrough. As a non-limiting example, the operating element may be a valve, a sensor, or any other suitable device for interacting with the flow, such as for measuring and / or controlling the characteristics of the flow. An example of an operating element may be a valve 106. The valve 106 may optionally be included in the filter housing 104 as an operating element. In an embodiment, the valve 106 is a check valve configured to prevent flow toward the interface body 102. The valve 106 may be, for example, a check valve assembly, an umbrella valve, or any other suitable valve for metering flow or preventing flow to the interface body 102. The valve 106 may be retained in the body of the filter housing 104, such as by extending a protrusion of the umbrella valve through a hole disposed in the filter housing 104.

[0073] The filter 108 can be any suitable media for filtering the fluid flowing through the filter module 100. As a non-limiting example, the filter 108 can be a disc of filter media. The filter 108 can further include a porous material surrounding the filter media. In an embodiment, the filter 108 is retained by clamping between the filter housing 104 and the filter holder 110. In an embodiment, the filter 108 is welded to the filter housing 104 or the filter holder 110, such as by ultrasonic welding.

[0074] The filter holder 110 is configured to engage the filter housing 104 so that the filter 108 is held in place. The filter holder 110 may include a contact surface configured to clamp the filter 108 on one or more surfaces disposed on the filter housing 104. In an embodiment, the filter holder 110 includes one or more snap-fit ​​retaining features for attaching to the filter housing 104. In an embodiment, the filter holder 110 includes an annular snap-fit ​​retaining feature for attaching to a corresponding annular feature disposed on the filter housing 104. In an embodiment, the filter holder 110 includes one or more retaining elements configured to support and retain the filter. Optionally, the retaining elements of the filter holder 110 may include a seat configured to contact the filter 108 with a reduced surface area compared to the surface area of ​​the entirety of the one or more retaining elements.

[0075] In an embodiment, one or more sensors may be included in an operational element included in the filter module 100. One example of such an operational element is a sensor 112. The sensor 112 may optionally be included in the filter module 100. The sensor 112 may be a wired or wireless sensor disposed in the filter housing 104 or the interface body 102. The sensor 112 may be any suitable sensor that measures a characteristic of interest, such as relative humidity, the presence of volatile organic compounds (VOCs), pressure, oxygen levels, or the like.

[0076] Figure 2 A cross-sectional view of a filter module according to an embodiment is shown. The filter module 200 includes an interface body 202 and a filter housing 204. Optionally, a valve 206 may be included in the filter housing 204. A filter 208 may be held between the filter housing 204 and a filter holder 210. Optionally, a sensor 212 may be incorporated into the filter housing 204.

[0077] The filter module 200 is a filter module configured to be used with a wafer container such as a FOUP. For example, the filter module 200 can be inserted into a purge port of a wafer container to position the filter in a flow path from which purge gas is introduced into the wafer container.

[0078] The interface body 202 includes an aperture 214 configured to interface with a purge source, such as a purge source included in a tool that interfaces with the wafer container. The aperture 214 may be configured to receive a portion of the purge source.

[0079] The interface body 202 further includes an aperture 216 configured to receive an insert portion 224 of the filter housing 204. One or more interface body retention features 218 may be formed in the aperture 216. The interface body retention features may be 218, for example, one or more protrusions or recesses configured to retain the filter housing 204 in the aperture 216. In an embodiment, the interface body retention features 218 are annular protrusions. In an embodiment, the interface body retention features 218 are annular grooves. In an embodiment, at least a portion of the aperture 216 is provided with the interface body retention features 218 by sizing so that a press fit is formed between the filter housing 204 and the aperture 216.

[0080] The interface body 202 may further include engagement features 220 formed on an outer surface 222 of the interface body 202. The engagement features 220 may be configured to engage with a wafer container, such as at an opening provided on an inner surface of a port into which the filter module 200 is to be inserted. In an embodiment, the engagement features 220 are a plurality of protrusions from the outer surface 222. In an embodiment, each of the protrusions is configured to facilitate insertion, such as by having a chamfer on an upper side of the engagement features 220. In an embodiment, the engagement features 220 are one or more annular ribs surrounding the interface body 202. In an embodiment, the interface body 202 is press-fit into the wafer container, making contact at a smooth outer surface of the interface body, without using discrete engagement features 220 protruding from or formed in the outer surface of the interface body 202.

[0081] The interface body 202 may be made of or include an elastic material that can be compressed when the interface body 202 is located in a corresponding port disposed on a wafer container so that the interface body 202 can form a seal within the port. The elastic material may be, for example, an elastomer, such as a fluoroelastomer. A non-limiting example of such an elastic material is FKM. The elastic material may be, for example, a thermoplastic elastomer. Non-limiting examples of thermoplastic elastomers suitable for use as elastic materials include styrene block copolymers, thermoplastic polyolefin elastomers, and the like. An elastic material may further be included at the hole 214 so that the interface body 202 can seal a purge source used with a wafer container including the purge module 200.

[0082] The filter housing 204 includes an insert portion 224 configured to be received in the hole 216 of the interface body 202. The insert portion 224 may include one or more filter housing retention features 226. The filter housing retention features 226 may be configured to be combined with the interface body retention features 218 to secure the filter housing 204 to the interface body 202. The filter housing retention features 226 may be, for example, one or more protrusions or recesses formed in the surface of the insert portion 224. In an embodiment, the filter housing retention features 226 are annular protrusions. In an embodiment, the filter housing retention features 226 are annular grooves. In an embodiment, at least a portion of the hole insert portion 224 is provided with the filter housing retention features 226 by sizing so that a press fit is formed between the filter housing 204 and the hole 216. The hole 216 may be configured so that a fluid received at the hole 214 can enter the filter housing 204.

[0083] The valve 206 is a valve that can be optionally included in the filter housing 204. The valve 206 can be any suitable valve that controls flow through the filter housing 204. In an embodiment, the valve 206 is a check valve, such as a mechanical check valve, a duckbill valve, or an umbrella valve. In an embodiment, the valve 206 is an umbrella valve. When the valve 206 is an umbrella valve, the filter housing 204 can include a ring 228 through which a stem 230 of the valve 206 can extend to keep the umbrella valve in place within the filter housing 204. In an embodiment, the valve 206 is a mechanical check valve assembly.

[0084] Filter 208 is a filter held between filter housing 204 and filter holder 210. In an embodiment, filter 208 is one or more pieces of filter media. In an embodiment, filter 208 comprises a coating or container on or surrounding the filter media. In an embodiment, the container for the filter media of filter 208 is a permeable material sheet joined to each other, for example, by ultrasonic welding. Filter 208 can be any suitable filter for the fluid passing through purification module 200.

[0085] The filter holder 210 can be coupled to the filter housing 204 to hold the filter 208. The filter holder 210 includes a peripheral portion 232, one or more filter holding elements 234, one or more seats 236, a filter contact surface 238, and a holder attachment feature 240. The peripheral portion 232 is configured to surround the end of the filter housing 204 to which the filter holder 210 is attached. The peripheral portion 232 defines an opening. Optionally, one or more filter holding elements 234 can be positioned in the opening, for example to prevent the filter 208 from being pushed out or otherwise disengaged from the filter housing 204 and the filter holder 210. In an embodiment, the filter holding element 234 includes a central ring and a plurality of spokes that join the central ring to the outer peripheral portion 232. In an embodiment, the filter holding element 234 includes one or more lengths extending through the opening, for example to provide a grille. In an embodiment, when the purification module 200 is assembled, the one or more seats 236 extend from the one or more filter holding elements 234 on the side facing the filter 208. One or more stands 236 may contact filter 208 to position filter 208 away from at least a portion of one or more filter retaining elements 234. The surface area of ​​stands 236 contacting filter 208 may be less than the surface area of ​​filter retaining element 234, such that filter 208 is less hindered by contact with stands 236 than by contact with filter retaining element 234.

[0086] The filter contact surface 238 may be provided as part of the outer peripheral portion 232. When the purification module 200 is assembled, the filter contact surface 238 faces the filter housing 204. The filter contact surface 238 may be spaced apart from the opposite filter contact surface 242 of the filter housing 204 by a distance equal to or less than the thickness of the filter 208, so that the filter 208 is clamped between the filter contact surface 238 and the corresponding filter contact surface 242 provided on the filter housing 204. In an embodiment, the filter 208 may be retained only by clamping between the filter contact surface 238 and the filter housing 204. In an embodiment, the filter 208 may be fixed to one or both of the filter contact surface 238 and the filter housing 204 by an adhesive. In an embodiment, the filter 208 may be fixed to one or both of the filter contact surface 238 and the filter housing 204 by welding.

[0087] The retainer attachment feature 240 allows the filter retainer 210 to mechanically engage with the filter housing 204. In an embodiment, the retainer attachment feature 240 is an annular recess or an annular protrusion configured to form a snap fit with a corresponding filter housing attachment feature 242 disposed on the filter housing 204. In an embodiment, the retainer attachment feature 240 includes a plurality of protrusions or recesses configured to interface with the corresponding filter housing attachment feature 242, such as snaps, detents, or the like.

[0088] A sensor 212 may optionally be included in the purification module 200. The sensor 212 may be any suitable sensor capable of measuring one or more parameters of interest, such as flow rate, relative humidity, the presence and / or amount of a chemical, such as a volatile organic compound (VOC) or oxygen, or the like. In an embodiment, the sensor 212 is positioned within the interface body 202. In an embodiment, the sensor 212 is positioned within the filter housing 204.

[0089] Figure 3 A filter holder according to an embodiment is shown. The filter holder 300 includes an outer ring 302 having an inner surface 304 and an attachment feature 306 formed on the inner surface 304. The outer ring 302 defines an opening 308. A retaining element 310 extends into the opening 308. Figure 3 In the embodiment shown in , the retaining element 310 includes a plurality of spokes 312 and a central ring 314. When the filter holder 300 is in use, the abutment 316 is disposed on the retaining element 308 on the side facing the filter. When the filter holder 300 is in use, the filter contact surface 318 is disposed on the outer ring 302 on the side facing the filter.

[0090] The filter holder 300 is configured to be attached to a structure, such as a purification module, a port, or a filter adapter (such as the filter housing 204) to hold a filter, such as the filter 208, as described above and Figure 2 In an example embodiment, the filter holder 300 may be a single piece. The filter holder 300 may be made of a rigid plastic material such as polycarbonate, high density or ultra high molecular weight polyethylene (HDPE or UHMWPE) or any other such suitable rigid polymer material.

[0091] The outer ring 302 defines the circumference of the filter holder 300. Although the outer ring 302 is Figure 3304. The outer ring 302 is shown as a circular profile in the figure, but it should be understood that the filter holder 300 can be shaped to correspond to the purification module, port or filter adapter configured for use therewith, and the shape of the outer ring 302 has corresponding changes, such as elliptical, square, rectangular or other such profiles. The outer ring 302 includes an inner surface 304 on the hole defined by the outer ring 302. The hole defined by the inner surface 304 is configured to be assembled over the purification module, port or filter adapter. The attachment feature 306 can be formed on or in the hole defined by the inner surface 304. The attachment feature 306 can include one or more protrusions or recesses on the inner surface 304. In an embodiment, the attachment feature 306 is an annular groove formed in the inner surface 304. In an embodiment, the attachment feature 306 is an annular protrusion formed on the inner surface 304. The attachment feature 306 can be configured to interface with one or more features formed on the purification module, port or filter adapter with which the filter holder 300 is used. The attachment feature 306 can allow the filter holder 300 to be coupled to a corresponding purification module, port, or filter adapter by a mechanical connection such as a snap fit. In an embodiment, the snap fit is a snap fit between the annular attachment feature 306 and a corresponding annular feature on the corresponding purification module, port, or filter adapter. Other examples of attachment features can include continuous or intermittent threads, multiple snap fit features, one or more interference fit surfaces, detents, or the like.

[0092] The opening 308 is defined by the outer ring 302. In an embodiment, the opening 308 is surrounded by a filter contact surface 318 described below. The opening 308 is configured to allow the fluid passing through the filter to further pass through the filter holder 300. The opening 308 may include a plurality of open areas separated by a retaining element 310. The retaining element 310 may extend into or through the opening 308. When the retaining element 310 is retained by the filter holder 300 and pressure is applied to the filter, such as by the fluid flowing through the filter, the retaining element 310 can prevent disengagement and reduce or prevent the filter from bending. In an embodiment, the retaining element 310 may include one or more rods extending through the opening 308. In an embodiment, the retaining element 310 may include a plurality of elements that cross each other, such as meeting in the center, forming a grid above the opening 308, or the like. In an embodiment, the retaining element 310 includes a center ring 314 connected to the outer ring 302 by a plurality of spokes 312.

[0093] The supports 316 may protrude from the retaining element 310 at one or more predetermined locations on the retaining element 310. The supports 316 provide a contact surface configured to contact the filter that is smaller than a surface of the retaining element 310 that may otherwise contact the filter. The number, position, surface area, and height of the supports 316 may be based on the support requirements and mechanical properties of the filter that the filter holder 300 is used to hold. For example, the hardness of the filter media and / or the pressure on the filter may affect the number of supports 316, their position, and / or the area of ​​those supports 316 that are required to reduce flexing or bending of the filter to above an allowable level. In an embodiment, the supports are disposed at one or more joints between the spokes 312 and the center ring 314. In an embodiment, one or more of the supports 316 may be continuous over a length defined from a first point on the outer ring 302 to a second point on the outer ring 302, such as described below and in Fig. 9 The filter retaining beam 914 shown in FIG.

[0094] The filter contact surface 318 is the surface of the filter holder 300 between the inner surface 304 and the opening 308. The filter contact surface 318 may include some or all of the area between the inner surface 304 and the opening 308. When the filter holder 300 is installed on a corresponding purification module, port, or filter adapter, the filter contact surface 318 faces the filter. In an embodiment, the filter contact surface 318 contacts the filter so that the filter is compressed when the filter holder 300 is installed. In an embodiment, the filter is attached to the filter contact surface 318 by welding or an adhesive. In an embodiment, the compression of the filter contact surface 318 and the surface of the purification module, port, or filter adapter on the filter is the only force that holds the filter in place. In an embodiment, the filter contact surface 318 is a flat surface. In an embodiment, the filter contact surface includes a texture, such as protrusions, grooves, surface roughness, combinations thereof, or the like to engage the filter. In an embodiment, at least a portion of the support 316 may be continuous with the filter contact surface 318, such as described below and Fig. 9 The filter retaining beam 914 shown in FIG.

[0095] Figure 4A A cross-sectional view of a filter and a filter holder according to an embodiment is shown. A filter 400 is held by clamping between a filter holder 402 and a filter adapter 404. The filter holder 402 includes an outer ring 406, with a snap-fit ​​recess 408 formed on an inner surface 410 provided in the outer ring 406. The filter adapter 404 includes a snap-fit ​​protrusion 412.

[0096] Filter 400 is a filter held between filter adapter 404 and filter holder 402. In an embodiment, filter 400 is one or more pieces of filter media. In an embodiment, filter 400 comprises a coating or container on or surrounding the filter media. In an embodiment, the container for the filter media of filter 400 is a sheet of permeable material connected to each other, for example, by ultrasonic welding.

[0097] The filter holder 402 is configured to hold the filter 400 in place. The filter holder 402 may be, for example, as discussed above and as Figure 3 4. The filter holder 402 may be configured such that the filter 400 is clamped between a filter contact surface 414 of the filter holder 402 and a corresponding filter contact surface 416 of the filter adapter 404. In an embodiment, the filter contact surfaces 414, 416 may be flat surfaces. In an embodiment, the filter contact surfaces 414, 416 may be coplanar with the plane of the filter 400. In an embodiment, the filter contact surfaces 414, 416 may be angled relative to the plane of the filter 400. In an embodiment, one or both of the filter contact surfaces 414, 416 may include surface features such as bumps, ridges, grooves, textures, protrusions, recesses, or the like. In an embodiment, the clamping between the filter contact surfaces 414, 416 may be the only retaining force of the filter 400. The outer ring 406 defines the perimeter of the filter holder 402. The outer ring 406 may have any suitable shape such that it corresponds to the shape of the filter adapter 404. The outer ring 406 includes an inner surface 410 facing the center of the filter holder 402. A snap-fit ​​recess 408 is formed in the inner surface 410. The snap-fit ​​recess 408 is configured to receive the snap-fit ​​protrusion 412. In an embodiment, a plurality of snap-fit ​​recesses 408 are provided in the inner surface 410, corresponding to the plurality of snap-fit ​​protrusions 412 on the filter adapter 404. In an embodiment, the snap-fit ​​recess 408 is an annular recess formed in the inner surface 410.

[0098] The filter adapter 404 is configured to allow the filter holder 402 to be attached so that the filter 400 can be held therebetween. In an embodiment, the filter adapter 404 is a filter housing, such as Figure 2 In an embodiment, the filter adapter 404 is provided as a filter adapter for a canister, such as described below and in Figure 6 In an embodiment, the filter adapter 404 is a port included in the housing, such as port 702 disposed on the housing 700, as shown in FIG. Figure 7In an embodiment, the filter adapter 404 is contained in a container, such as container 800, such as Figure 8 408. The filter adapter 404 includes a snap-fit ​​protrusion proximate one end having a filter contact surface 416. The snap-fit ​​protrusion 412 is a protrusion formed on the outer surface of the filter adapter 404. The snap-fit ​​protrusion 412 may include one or more protrusions. In an embodiment, the snap-fit ​​protrusion 412 is an annular protrusion. In an embodiment, the snap-fit ​​protrusion 412 may include an inclined surface toward the end of the filter adapter 404 and a sharp corner on a side away from the end of the filter adapter 404. The inclined surface may facilitate interfacing with the inner surface 410 of the filter holder 402. The sharp corner may provide an interface through which the snap fit between the snap-fit ​​protrusion 412 and the snap-fit ​​recess 408 may be fixed. The snap-fit ​​protrusion 412 and the snap-fit ​​recess 408 are sized and positioned to form a snap-fit ​​attachment of the filter holder 402 and the filter adapter 404, respectively. In an embodiment, the snap fit formed by the snap fit protrusion 412 and the snap fit recess 408 can position the filter contact surfaces 414, 416 relative to each other, separated by a gap less than the uncompressed thickness of the filter 400, so that the filter 400 is compressed when clamped by the filter contact surfaces 414 and 416.

[0099] Figure 4B A cross-sectional view of a filter and a filter holder according to an embodiment is shown. The filter 400 is held by clamping between a filter holder 420 and a filter adapter 422. The filter holder 420 includes an outer ring 406 in which an inner surface 410 is disposed. The inner surface 410 is a vertical surface, and a horizontal surface 424 is disposed at the bottom of the outer ring 406. The filter adapter 422 includes a vertical surface 426 and a horizontal surface 428 surrounding the vertical surface 426. The filter holder 420 and the filter adapter 422 can be joined by laser welding formed between the inner surface 410 and the vertical surface 426 and / or between the horizontal surfaces 424, 426.

[0100] Figure 4C A cross-sectional view of a filter and filter holder according to an embodiment is shown. The filter 400 is held by clamping between a filter holder 430 and a filter adapter 432. The filter holder 430 includes an outer ring 406 with ultrasonic welding features 434 formed on an inner surface 410 disposed in the outer ring 406. The filter adapter 432 includes ultrasonic welding features 436. When the filter holder 430 and the filter adapter 432 are placed together, the ultrasonic welding features 434, 436 can interface with each other and, when ultrasonic energy is provided, form a weld that joins the filter holder 430 to the filter holder 432.

[0101] Figure 4DA cross-sectional view of a filter and a filter holder according to an embodiment is shown. The filter 400 is held by clamping between a filter holder 440 and a filter adapter 442. The filter holder 440 includes an outer ring 406 having an inner surface 410 disposed in the outer ring 406. The filter adapter 442 includes a press-fit surface 444. The inner surface 410 and the press-fit surface 444 are respectively sized so that the filter holder 440 can be attached to the filter adapter 442 by press-fit and friction between the inner surface 410 and the press-fit surface 444.

[0102] Figure 4E A cross-sectional view of a filter and a filter holder according to an embodiment is shown. The filter 400 is held by clamping between a filter holder 450 and a filter adapter 452. The filter holder 450 includes an outer ring 454 having an outer surface 456 forming a perimeter of the outer ring 454. The filter adapter 404 includes a recess 458 including an inner surface 460 defining a perimeter of the recess 458. The outer surface 456 and the inner surface 460 of the filter holder 450 are respectively sized so that the filter holder 450 can be attached to the filter adapter 452 by compression and friction between the outer surface 456 and the inner surface 460.

[0103] Figure 5 Another cross-sectional view of a filter and filter holder according to an embodiment is shown. Filter 500 is held by filter holder 502. Filter holder 502 includes an outer ring 504 defining an opening 506. Retaining element 508 extends into or through opening 506. Figure 5 In the embodiment shown in , the retaining element 508 comprises spokes 510 and a central ring 512. A support 514 is provided on the filter holder 502, on the side facing the filter 500.

[0104] Filter 500 is a filter at least partially held by filter holder 502. In an embodiment, filter 500 is one or more pieces of filter media. In an embodiment, filter 500 comprises a coating or container on or surrounding the filter media. In an embodiment, the container for the filter media of filter 500 is sheets of permeable material joined to each other, for example, by ultrasonic welding.

[0105] The filter holder 502 is configured to hold the filter 500 at a filter adapter, such as the filter adapter 404 discussed above and shown in FIG. 4. The filter holder 502 can be, for example, a filter adapter 404 as discussed above and shown in FIG. Figure 3. The filter holder 502 includes an outer ring 504. Although the filter holder 502 is shown as being cylindrical with the outer ring 504 having a circular profile, it should be understood that the filter holder 502 may have any suitable shape to correspond to the filter adapter with which the filter holder 502 is to be used. The outer ring 504 of the filter holder 502 defines an opening 506. The opening 506 allows fluid to enter and exit the filter 500. A retaining element 508 extends into or through the opening 506. The retaining element 508 may support the filter 500, for example, to prevent pressure from blowing the filter 500 out of the filter holder 502 and its corresponding filter adapter. In an embodiment, the retaining element 508 extends through the opening 506. In an embodiment, the retaining element 508 forms a grid above the opening 506. The retaining elements may form a radial pattern, such as a plurality of retaining elements 508 meeting at the center of the opening 506, or as Figure 5 As shown in FIG. 5 , a plurality of spokes 510 are each joined to a center ring 512 .

[0106] The support 514 is disposed on the retaining element 508 on a side of the retaining element 508 facing the filter 500. In an embodiment, the support 514 is integrally formed with the retaining element 508. In an embodiment, the support 514 is the only point within the perimeter of the opening 506 where the filter holder 502 contacts the filter 500. The support 514 can be sized so that the surface area of ​​the support 514 contacting the filter 500 is less than the surface area of ​​the retaining element 508. Therefore, when the filter 500 is retained by the filter holder 502, the support can increase the unobstructed surface area of ​​the filter 500. The increase in unobstructed surface area can reduce the pressure drop across the filter 500. In an embodiment, the reduction in the pressure drop across the filter 500 can be as high as 20% when compared to a filter 500 retained by contacting the entire corresponding surface of a retaining element without such a support. The support 514 can be sized and positioned based on the support requirements and mechanical properties of the filter 500 that the filter holder 502 is used to retain. For example, the stiffness of the filter media and / or the pressure on the filter 500 may affect the number of stands 514, their positioning, and / or the area of ​​those stands 514 that are needed to reduce flexing or bending of the filter to above acceptable levels. Figure 5 In the embodiment shown in , the support 514 is disposed at one or more joints between the spokes 510 and the center ring 512.

[0107] Figure 6A perspective view of a canister according to an embodiment is shown. Canister 600 includes a resilient canister body 602, a filter adapter 604, a filter 606, and a filter holder 608. Canister 600 is configured to contain a substance. In an embodiment, the substance may be a gas to be released. In an embodiment, the substance may be a solid or liquid configured to produce a gas to be released. In an embodiment, the substance may be configured or selected to interact with a fluid passing through filter 606, such as a desiccant, a reagent, or the like. Canister 600 may be configured to be inserted into another container or held at a specific location in an apparatus, such as as a desiccant container for a wafer container such as a FOUP.

[0108] The container body 602 is an elastic body configured to define an interior space. The container body 602 may include a hole configured to receive a portion of the filter adapter 604, such as those described above and Figure 2 The hole 216 shown in FIG.

[0109] The filter adapter 604 is configured to allow the filter 606 to be attached to the container body 602. The filter adapter 604 may include a portion configured to be inserted into the container body 602 at the aperture. The filter adapter 604 and / or the container body 602 may include features configured to hold the container body 602 and the filter adapter 604 together, such as an annular protrusion and optionally a recess sized to form a press fit between the filter adapter 604 at the aperture or the like. The filter adapter 604 may include an end having an attachment feature configured to allow attachment of the filter holder 608. The end and attachment features may be, for example, according to the embodiments described above and Figure 2 . The structure of the filter housing attachment feature 242 is shown in FIG.

[0110] The filter 606 includes a filter media and optionally a coating or covering. The filter 606 can be any suitable filter for filtering fluid flowing into or out of the container 600. The filter 606 can be held in place by clamping between the port 604 and the filter holder 608. In an embodiment, the filter 606 is held only by clamping between the port 604 and the filter holder 608. In an embodiment, the filter 606 can be held, for example, by using an adhesive, welding, or any other such holding method.

[0111] The filter holder 608 can be coupled to the end of the filter adapter 604 to secure the filter 606 over the end of the filter adapter 604. In an embodiment, the filter holder 608 includes features configured to engage with attachment features disposed on the end of the filter adapter 604, such as one or more protrusions or recesses configured to form a snap fit or other such engagement with corresponding attachment features on the end of the filter adapter 604. In an embodiment, the feature on the filter holder 608 is an annular protrusion or recess configured to form an annular snap fit with the end of the filter adapter 604. The filter holder 608 can include a filter retaining element, such as those described above and Figure 2 Filter holding element 234 shown in FIG. In an embodiment, the filter holding element may include a support, such as described above and Figure 2 The support 236 shown in FIG.

[0112] Figure 7 A perspective view of a housing according to an embodiment is shown. The housing 700 includes a port 702, a filter 704, and a filter holder 706. The housing 700 may define an interior space. The housing 700 may be, for example, a wafer container, such as a FOUP. The housing 700 may include one or more ports 702 configured to supply fluid to the interior space (e.g., additional purge ports disposed on the housing 700). The one or more ports 702 may each protrude into the interior space. Each of the one or more ports 702 may include an end having an attachment feature configured to allow attachment of the filter holder 706. The end and attachment feature may, for example, be configured as described above and Figure 2 . The structure of the filter housing attachment feature 242 is shown in FIG.

[0113] Filter 704 includes filter media and optionally a coating or covering. Filter 704 can be any suitable filter for filtering fluid entering housing 700 through port 702. Filter 704 can be held in place by clamping between port 702 and filter holder 706. In an embodiment, filter 704 is held simply by clamping between port 702 and filter holder 706. In an embodiment, filter 704 can be held, for example, by using an adhesive, welding, or any other such holding method.

[0114] Filter holder 706 can be coupled to port 702 to secure filter 704 over port 702. In an embodiment, filter holder 706 includes features configured to engage with attachment features disposed on port 702, such as one or more protrusions or recesses configured to form a snap fit or other such engagement with corresponding attachment features of port 702. In an embodiment, the features on filter holder 706 are annular protrusions or recesses configured to form an annular snap fit with port 702. Filter holder 706 can include a filter retaining element, such as those described above and Figure 2 Filter holding element 234 shown in FIG. In an embodiment, the filter holding element may include a support, such as described above and Figure 2 The support 236 shown in FIG.

[0115] Figure 8 A container according to an embodiment is shown. Container 800 includes a container body 802, a filter adapter 804, a filter 806, and a filter holder 808. Container 800 can be a rigid container configured to store a substance. In an embodiment, the substance can be a gas to be released. In an embodiment, the substance can be a solid or liquid configured to produce a gas to be released. In an embodiment, the substance can be configured or selected to interact with a fluid passing through filter 806, such as a desiccant, a reagent, or the like.

[0116] The container body 802 is a rigid body that defines an interior space configured to contain a substance. The container body is further configured to be closed by attachment of a filter adapter 804. The filter adapter 804 may be, for example, a lid of the container 800 configured to be coupled to the container body 802 to close the interior space. The filter adapter 804 may include a protrusion having an end with an attachment feature configured to allow a filter holder 808 to be attached. The end and attachment feature may be, for example, according to the methods described above and Figure 2 . The structure of the filter housing attachment feature 242 is shown in FIG.

[0117] Filter 806 includes filter media and optionally a coating or covering. Filter 806 can be any suitable filter for filtering fluid flowing into or out of container 800. Filter 806 can be held in place by clamping between port 804 and filter holder 808. In an embodiment, filter 806 is held only by clamping between port 804 and filter holder 808. In an embodiment, filter 806 can be held, for example, by using an adhesive, welding, or any other such holding method.

[0118] The filter holder 808 may engage a protrusion formed in the filter adapter 804 to secure the filter 806 over the protrusion of the slave filter adapter 804. In an embodiment, the filter holder 808 includes features configured to engage with attachment features provided on the protrusion of the slave filter adapter 804, such as one or more protrusions or recesses configured to form a snap fit or other such engagement with corresponding attachment features of the protrusion of the slave filter adapter 804. In an embodiment, the feature on the filter holder 808 is an annular protrusion or recess configured to form an annular snap fit with the protrusion of the slave filter adapter 804. The filter holder 808 may include a filter retaining element, such as those described above and Figure 2 Filter holding element 234 shown in FIG. In an embodiment, the filter holding element may include a support, such as described above and Figure 2 The support 236 shown in FIG.

[0119] Fig. 9 A filter holder according to an embodiment is shown. The filter holder 900 includes an outer ring 902 having an inner surface 904 and an attachment feature 906. The outer ring 902 defines an opening 908. A retaining element 910 can be disposed within the opening 908. The retaining element 910 can define a channel 912. A filter retaining beam 914 can be included in the retaining element 910. A filter contact surface 916 can also be disposed on the filter holder 900.

[0120] The filter holder 900 is configured to be attached to a structure, such as a purification module, a port, or a filter adapter (such as the filter housing 204) to hold a filter (such as the filter 208), as described above and Figure 2 Filter holder 900 may be used, for example, to replace Figure 6 , or in place of the filter holder 608 shown and described above Figure 8 808 shown in and described above. In an example embodiment, the filter holder 900 can be a single piece. The filter holder 900 can be made of a rigid plastic material such as polycarbonate, high-density or ultra-high molecular weight polyethylene (HDPE or UHMWPE) or any other such suitable rigid polymer material.

[0121] The outer ring 902 defines the periphery of the filter holder 900. Although the outer ring 902 is Figure 3 900 is shown as a circular profile, but it should be understood that the filter holder 900 can be shaped to correspond to a purification module, port or filter adapter used therewith, and the shape of the outer ring 902 can be correspondingly varied, such as an elliptical, square, rectangular or other such profile.

[0122] The inner surface 904 is disposed in a hole defined by the outer ring 902. The hole defined by the inner surface 904 is configured to be assembled above a purification module, a port, or a filter adapter. An attachment feature 906 may be formed on or in the hole defined by the inner surface 904. The attachment feature 906 may include one or more protrusions or recesses on the inner surface 904. In an embodiment, the attachment feature 906 is an annular groove formed in the inner surface 904. In an embodiment, the attachment feature 906 is an annular protrusion formed on the inner surface 904. The attachment feature 906 may be configured to interface with one or more features formed on the purification module, port, or filter adapter used with the filter holder 900. The attachment feature 906 may allow the filter holder 900 to be coupled to a corresponding purification module, port, or filter adapter by a mechanical connection such as a snap fit. In an embodiment, the snap fit is a snap fit between the annular attachment feature 906 and a corresponding annular feature on the corresponding purification module, port, or filter adapter. Other examples of attachment features may include continuous or intermittent threads, multiple snap-fit ​​features, one or more interference fit surfaces, detents, or the like.

[0123] The opening 908 is defined by the outer ring 902. In an embodiment, the opening 908 is surrounded by a filter contact surface 916 described below. The opening 908 is configured to allow fluid passing through the filter to further pass through the filter holder 900. A plurality of channels 912 may be defined within the opening 908 by the retaining element 910. The channels 912 may allow the purified gas to pass through the filter held by the filter holder 900 to exit the purification module after passing through the filter held by the filter holder 900.

[0124] The retaining element 910 can extend through the opening 908. When the retaining element 910 is retained by the filter holder 900 and pressure is applied to the filter (e.g., by fluid flowing through the filter), the retaining element 910 can resist disengagement and reduce or prevent filter bending. Fig. 9 In the embodiment shown in , the retaining elements include spokes that each define a rectangular channel 912 therein, the spokes meeting at the center of the opening 908 where another channel 912 is defined.

[0125] Filter retention beam 914 is included in retaining element 910. Fig. 9 , the filter retaining beams extend along the outer periphery of the spokes of the retaining element 910. The filter retaining beams 914 can extend continuously from a first point on the outer ring 902 to a second point on the outer ring 902. The filter retaining beams 914 can be used as a support for the filter, for example, instead of or in addition to the filter retaining beams described above and respectively shown in FIG. Figure 2 , 35 and the supports 236, 316 and / or 514. The filter holding beam 914 provides a contact surface configured to contact the filter that is smaller than a surface of the holding element 310 that may otherwise contact the filter. The stress generated by the contact between the filter and the filter holding beam 914 can be distributed across the length of the filter holding beam 914.

[0126] The filter contact surface 916 is the surface of the filter holder 900 between the inner surface 904 and the opening 908. The filter contact surface 916 may include some or all areas between the inner surface 904 and the opening 908. When the filter holder 900 is installed on the corresponding purification module, port or filter adapter, the filter contact surface 916 faces the filter. In an embodiment, the filter contact surface 916 contacts the filter so that the filter is compressed when the filter holder 900 is installed. In an embodiment, the filter is attached to the filter contact surface 916 by welding or adhesive. In an embodiment, the compression of the filter by the filter contact surface 916 and the surface of the removal module, port or filter adapter is the only force that keeps the filter in place. In an embodiment, the filter contact surface 916 is a flat surface. In an embodiment, the filter contact surface includes textures, such as protrusions, grooves, surface roughness, combinations thereof or the like to engage the filter. In an embodiment, the filter holding beam 914 is connected to the filter contact surface so that the contact with the filter is continuous from the filter contact surface across the entire length of each of the filter holding beams.

[0127] aspect:

[0128] It should be understood that any of aspects 1 to 10 may be combined with any of aspects 11 to 19, 20 to 24, 25 to 33, 34 to 47, 48, 49 to 53, 54 to 61, or 62 to 69. It should be understood that any of aspects 11 to 19 may be combined with any of aspects 20 to 24, 25 to 33, 34 to 47, 48, 49 to 53, 54 to 61, or 62 to 69. It should be understood that any of aspects 20 to 24 may be combined with any of aspects 25 to 33, 34 to 47, 48, 49 to 53, 54 to 61, or 62 to 69. It should be understood that any of aspects 25 to 33 may be combined with any of aspects 34 to 47, 48, 49 to 53, 54 to 61, or 62 to 69. It should be understood that any of aspects 34 to 47 may be combined with any of aspects 48, 49 to 53, 54 to 61, or 62 to 69. It should be understood that aspect 48 may be combined with any of aspects 49 to 53, 54 to 61, or 62 to 69. It should be understood that any of aspects 49 to 53 may be combined with any of aspects 54 to 61, or 62 to 69. It should be understood that any of aspects 54 to 61 may be combined with any of aspects 62 to 69.

[0129] Aspect 1. A gas exchange module for a substrate container, comprising:

[0130] filter housing;

[0131] an interface body including an aperture configured to receive the filter housing;

[0132] a filter disposed at one end of the filter housing; and

[0133] A filter holder is coupled to the filter housing.

[0134] Aspect 2. The gas exchange module according to aspect 1, wherein the filter housing further comprises a valve.

[0135] Aspect 3. A gas exchange module according to Aspect 2, wherein the valve is a check valve.

[0136] Aspect 4. A gas exchange module according to any one of aspects 1 to 3, wherein the valve interface body includes one or more retaining features disposed on an outer surface of the interface body.

[0137] Aspect 5. A gas exchange module according to any one of Aspects 1 to 4, wherein the filter holder is coupled to the filter housing by snapping together one or more first snapping features provided on the filter holder and one or more second snapping features provided on the filter housing.

[0138] Aspect 6. The gas exchange module according to any one of aspects 1 to 4, wherein the filter holder is joined to the filter housing by welding.

[0139] Aspect 7. The gas exchange module according to any one of aspects 1 to 4, wherein the filter holder is joined to the filter housing by press-fitting.

[0140] Aspect 8. A gas exchange module according to aspects 5 to 7, wherein the filter is retained between a first retaining surface provided on the filter holder and a second retaining surface provided on the filter housing by compression only.

[0141] Aspect 9. A gas exchange module according to any one of Aspects 1 to 8, wherein the filter holder includes a retaining element disposed in an opening defined by the filter holder, the retaining element including a plurality of pairs of spokes, each of the plurality of pairs of spokes extending toward a center, the center defining a channel; each of the plurality of spokes includes a filter retaining beam configured to contact the filter, wherein the total surface area of ​​the filter retaining beams is smaller than the total surface area of ​​the retaining element.

[0142] Aspect 10. A gas exchange module according to any one of aspects 1 to 9, wherein the interface body comprises an elastic material.

[0143] Aspect 11. A substrate container comprising:

[0144] a substrate container body defining an interior space, the substrate container including a gas exchange port;

[0145] A gas exchange module disposed in the gas exchange port, the gas exchange module comprising:

[0146] filter housing;

[0147] an interface body including an aperture configured to receive the filter housing;

[0148] a filter disposed at one end of the filter housing; and

[0149] a filter holder coupled to the filter housing,

[0150] Wherein when the gas exchange module is disposed in the gas exchange port, the interface body is configured to form a seal at a periphery of the gas exchange port.

[0151] Aspect 12. A substrate container according to Aspect 11, wherein the interface body includes one or more retaining features disposed on an outer surface of the interface body and the gas exchange port includes one or more openings configured to receive the one or more retaining features disposed on the outer surface of the interface body.

[0152] Aspect 13. The substrate container according to any one of aspects 11 to 12, wherein the filter housing comprises a valve.

[0153] Aspect 14. A substrate container according to any one of Aspects 11 to 13, wherein the filter holder is coupled to the filter housing by snapping together one or more first snapping features provided on the filter holder and one or more second snapping features provided on the filter housing.

[0154] Aspect 15. The substrate container according to any one of aspects 11 to 13, wherein the filter holder is joined to the filter housing by welding.

[0155] Aspect 16. The substrate container according to any one of aspects 11 to 13, wherein the filter holder is joined to the filter housing by press-fitting.

[0156] Aspect 17. The substrate container according to any one of aspects 14 to 16, wherein the filter is held between a first holding surface provided on the filter holder and a second holding surface provided on the filter housing by compression only.

[0157] Aspect 18. A substrate container according to any one of Aspects 11 to 17, wherein the filter holder includes a retaining element disposed in an opening defined by the filter holder, the retaining element including a plurality of pairs of spokes, each of the plurality of pairs of spokes extending toward a center, the center defining a channel; each of the plurality of spokes includes a filter retaining beam configured to contact the filter, wherein the total surface area of ​​the filter retaining beams is less than the total surface area of ​​the retaining element.

[0158] Aspect 19. The substrate container according to any one of aspects 11 to 18, wherein the interface body comprises an elastic material.

[0159] Aspect 20. A method of providing gas exchange in a substrate container, comprising:

[0160] assembling a gas exchange module by inserting a filter housing into the aperture of the interface body, positioning a filter between the filter housing and a filter holder, and attaching the filter holder to the filter housing; and

[0161] The gas exchange module is inserted into the gas exchange port of the substrate container.

[0162] Aspect 21. The method according to aspect 20, wherein attaching the filter holder to the filter housing includes forming a snap fit between one or more first snap fit features disposed on the filter holder and one or more second snap fit features disposed on the filter housing.

[0163] Aspect 22. The method according to aspect 21, wherein the filter is retained between a first retaining surface provided on the filter holder and a second retaining surface provided on the filter housing by compression only.

[0164] Aspect 23. A method according to any one of Aspects 20 to 22, wherein inserting the gas exchange module into the gas exchange port of the substrate container includes forming an interface between an opening provided in the gas exchange port and one or more retaining features provided on an outer surface of the interface body.

[0165] Aspect 24. The method according to any one of aspects 20 to 23, further comprising directing a flow of air through the interface body, passing the flow of air through a valve disposed in the filter housing, and passing the flow of air through the filter.

[0166] Aspect 25. A filter holder comprising:

[0167] a filter holding body defining an opening, the filter holding body having one or more holding elements extending into the opening in a direction transverse to the opening,

[0168] wherein at least one of the one or more retaining elements comprises one or more stands, each of the one or more stands protruding from a side of the one or more retaining elements configured to face a filter to be fixed by the filter holder, and

[0169] The contact surface of the one or more seats has a surface area that is smaller than the surface area of ​​the one or more retaining elements.

[0170] Aspect 26. The filter holder of Aspect 25, wherein the opening is circular.

[0171] Aspect 27. The filter holder of any one of aspects 25-26, wherein the one or more retaining elements include a central body and a plurality of spokes.

[0172] Aspect 28. The filter holder of Aspect 27, wherein the one or more seats are disposed at a junction between the central body and the plurality of spokes.

[0173] Aspect 29. The filter holder of any one of aspects 25 to 28, wherein the one or more retaining elements include a plurality of spokes configured to meet at a center of the opening.

[0174] Aspect 30. The filter holder of any one of aspects 25 to 29, wherein the one or more retaining elements form a grid over the opening.

[0175] Aspect 31. The filter holder of any one of aspects 25-26, wherein the one or more retaining elements include a plurality of pairs of spokes, each of the plurality of pairs of spokes extending toward a center, the center defining a channel.

[0176] Aspect 32. The filter holder of Aspect 31, wherein the one or more supports are filter retaining beams disposed on the spokes of the plurality of pairs of spokes.

[0177] Aspect 33. The filter holder according to any one of aspects 25 to 32, wherein the filter holding body includes an attachment portion including a snap-fit ​​feature.

[0178] Aspect 34. A filter assembly comprising:

[0179] Filters; and

[0180] a filter holder comprising a filter holding body defining an opening, the filter holding body having one or more holding elements extending into the opening in a direction transverse to the opening,

[0181] wherein at least one of the one or more retaining elements comprises one or more stands, each of the one or more stands protruding from a side of the one or more retaining elements configured to face the filter, and

[0182] The contact surface of the one or more seats has a surface area that is smaller than the surface area of ​​the one or more retaining elements, and

[0183] The filter contacts the filter holder at the seat.

[0184] Aspect 35. The filter assembly of aspect 34, wherein the opening is circular.

[0185] Aspect 36. The filter assembly of any of aspects 34-35, wherein the one or more retaining elements include a central body and a plurality of spokes.

[0186] Aspect 37. The filter assembly of aspect 36, wherein the one or more supports are disposed at a junction between the central body and the plurality of spokes.

[0187] Aspect 38. The filter assembly of any one of aspects 36 to 37, wherein the central body is a ring.

[0188] Aspect 39. The filter assembly of any one of aspects 34 to 38, wherein the one or more retaining elements include a plurality of spokes configured to meet at a center of the opening.

[0189] Aspect 40. The filter assembly of any one of aspects 34 to 39, wherein the one or more retaining elements form a grid over the openings.

[0190] Aspect 41. The filter assembly of any one of aspects 34-35, wherein the one or more retaining elements include a plurality of pairs of spokes, each of the plurality of pairs of spokes extending toward a center, the center defining a channel.

[0191] Aspect 42. The filter holder of Aspect 41, wherein the one or more supports are filter retaining beams disposed on the spokes of the plurality of pairs of spokes.

[0192] Aspect 43. The filter assembly of any one of aspects 34 to 42, the filter holding body comprising an attachment portion comprising a snap-fit ​​feature.

[0193] Aspect 44. The filter assembly according to any one of aspects 34 to 42, further comprising a canister, the filter holder being coupled to the canister.

[0194] Aspect 45. The filter assembly of any one of aspects 34 to 42, further comprising a purge port, the filter holder being coupled to the purge port.

[0195] Aspect 46. The filter assembly according to any one of aspects 34 to 42, further comprising a gas exchange module, the filter holder being coupled to the gas exchange module.

[0196] Aspect 47. The filter assembly of any one of aspects 34 to 42, further comprising a housing having a port, the filter remaining coupled to the port.

[0197] Aspect 48. A method of holding a filter, comprising securing the filter using a filter holder, the filter holder comprising a filter holding body defining an opening, the filter holding body having one or more holding elements extending into the opening in a direction transverse to the opening,

[0198] wherein at least one of the one or more retaining elements comprises one or more stands, each of the one or more stands protruding from a side of the retaining element configured to face a filter to be secured by the filter holder,

[0199] The contact surface of the one or more retaining elements has a surface area that is smaller than the surface area of ​​the one or more retaining elements, and

[0200] The filter contacts the filter holder at the seat.

[0201] Aspect 49. A filter holder comprising:

[0202] A filter holder body defines an opening, the filter holder body having a contact surface surrounding the opening, a filter contact surface, and snap-fit ​​retention features disposed on one or more interior surfaces of one or more walls surrounding the filter contact surface.

[0203] Aspect 50. The filter holder of Aspect 49, wherein the snap-fit ​​retention feature is an annular protrusion.

[0204] Aspect 51. The filter holder of Aspect 49, wherein the snap-fit ​​retention feature comprises a plurality of protrusions.

[0205] Aspect 52. The filter holder of Aspect 49, wherein the snap-fit ​​retention feature is an annular groove.

[0206] Aspect 53. The filter holder of Aspect 49, wherein the snap-fit ​​retention feature comprises a plurality of recesses formed in the one or more interior surfaces.

[0207] Aspect 54. A filter assembly comprising:

[0208] a port body comprising a port filter contact surface and a port snap-fit ​​feature;

[0209] Filters; and

[0210] A filter holder comprising a filter holder body defining an opening, the filter holder body having a contact surface surrounding the opening, a holder filter contact surface, and a holder snap-fit ​​feature disposed on one or more inner surfaces of one or more walls surrounding the filter contact surface.

[0211] wherein a portion of the filter is compressed between the port filter contact surface and the retainer filter contact surface, and

[0212] The port snap-fit ​​feature is configured to form a snap fit with the retainer snap-fit ​​feature.

[0213] Aspect 55. The filter assembly of aspect 54, wherein the filter is held between the port filter contact surface and the retainer filter contact surface solely by compression.

[0214] Aspect 56. The filter assembly of any one of aspects 54-55, wherein the port body is contained in a canister having a canister body comprising an elastic material.

[0215] Aspect 57. The filter assembly of any one of aspects 54-55, wherein the port body is included in a purge port.

[0216] Aspect 58. The filter assembly of any one of aspects 54-55, wherein the port body is contained in a housing.

[0217] Aspect 59. The filter assembly of any one of Aspects 54-55, wherein the port body is included in a gas exchange module.

[0218] Aspect 60. The filter assembly of any one of aspects 54 to 59, wherein the filter holder comprises one or more retaining elements extending through an opening of the filter holder, wherein:

[0219] wherein at least one of the one or more retaining elements comprises one or more stands, each of the one or more stands protruding from a side of the one or more retaining elements configured to face the filter,

[0220] The contact surface of the one or more seats has a surface area that is smaller than the surface area of ​​the one or more retaining elements, and

[0221] The filter contacts the filter holder at the seat.

[0222] Aspect 61. A filter assembly according to any one of Aspects 54 to 59, wherein the filter holder includes a retaining element disposed in an opening defined by the filter holder, the retaining element including a plurality of pairs of spokes, each of the plurality of pairs of spokes extending toward a center, the center defining a channel; each of the plurality of spokes includes a filter retaining beam configured to contact the filter, wherein the total surface area of ​​the filter retaining beams is less than the total surface area of ​​the retaining element.

[0223] Aspect 62. A method of assembling a filter assembly, comprising:

[0224] placing a filter between the port body and the filter holder; and

[0225] The filter holder is snapped onto the port body such that one or more port body snap-fit ​​features disposed on the port body engage with one or more holder snap-fit ​​features disposed on the filter holder.

[0226] Aspect 63. The method of Aspect 62, wherein the filter is compressed between a port filter contact surface and a retainer filter contact surface.

[0227] Aspect 64. The method according to aspect 63, further comprising maintaining the position of the filter solely by the compression of the filter between the port filter contact surface and the retainer filter contact surface.

[0228] Aspect 65. A method according to any one of Aspects 62 to 64, further comprising contacting the filter at a support provided on one or more retaining elements extending into an opening of the filter holder, wherein a contact area of ​​the support is smaller than a surface area of ​​the one or more retaining elements.

[0229] Aspect 66. The method according to any one of aspects 62 to 65, wherein the port body is contained in a can.

[0230] Aspect 67. The method according to any one of Aspects 62 to 65, wherein the port body is included in a purge port.

[0231] Aspect 68. The method according to any one of Aspects 62 to 65, wherein the port body is contained in a housing.

[0232] Aspect 69. The method according to any one of Aspects 62 to 65, wherein the port body is included in a gas exchange module.

[0233] The examples disclosed in this application should be regarded as illustrative rather than restrictive. The scope of the invention is indicated by the appended claims rather than the preceding description; and all changes that come within the meaning and range of equivalency of the claims are embraced therein.

Claims

1. A gas exchange module for a substrate container, comprising: filter housing; an interface body including an aperture configured to receive the filter housing; a filter disposed at one end of the filter housing; and A filter holder is coupled to the filter housing.

2. The gas exchange module of claim 1, wherein the filter housing further comprises a valve.

3. A gas exchange module according to claim 2, wherein the valve is a check valve.

4. A gas exchange module according to claim 1, wherein the valve interface body includes one or more retaining features disposed on an outer surface of the interface body.

5. The gas exchange module according to claim 1, wherein the filter holder is coupled to the filter housing by a snap fit formed between one or more first snap fit features provided on the filter holder and one or more second snap fit features provided on the filter housing.

6. A gas exchange module according to claim 5, wherein the filter is retained between a first retaining surface provided on the filter holder and a second retaining surface provided on the filter housing by compression only.

7. A gas exchange module according to claim 1, wherein the filter holder includes a retaining element disposed in an opening defined by the filter holder, the retaining element including a plurality of pairs of spokes, each of the plurality of pairs of spokes extending toward a center, the center defining a channel; each of the plurality of spokes includes a filter retaining beam configured to contact the filter, wherein the total surface area of ​​the filter retaining beams is smaller than the total surface area of ​​the retaining element.

8. The gas exchange module of claim 1, wherein the interface body comprises an elastic material.

9. A substrate container comprising: a substrate container body defining an interior space, the substrate container including a gas exchange port; A gas exchange module disposed in the gas exchange port, the gas exchange module comprising: filter housing; an interface body including an aperture configured to receive the filter housing; a filter disposed at one end of the filter housing; and a filter holder coupled to the filter housing, Wherein when the gas exchange module is disposed in the gas exchange port, the interface body is configured to form a seal at a periphery of the gas exchange port.

10. The substrate container of claim 9, wherein the interface body includes one or more retaining features disposed on an outer surface of the interface body and the gas exchange port includes one or more openings configured to receive the one or more retaining features disposed on the outer surface of the interface body.

11. The substrate container of claim 9, wherein the filter housing comprises a valve.

12. The substrate container of claim 9, wherein the filter holder is coupled to the filter housing by a snap fit formed between one or more first snap fit features disposed on the filter holder and one or more second snap fit features disposed on the filter housing.

13. The substrate container of claim 12, wherein the filter is retained between a first retaining surface provided on the filter holder and a second retaining surface provided on the filter housing by compression only.

14. A substrate container according to claim 9, wherein the filter holder includes a retaining element disposed in an opening defined by the filter holder, the retaining element including a plurality of pairs of spokes, each of the plurality of pairs of spokes extending toward a center, the center defining a channel; each of the plurality of spokes includes a filter retaining beam configured to contact the filter, wherein the total surface area of ​​the filter retaining beams is less than the total surface area of ​​the retaining element.

15. The substrate container of claim 9, wherein the interface body comprises an elastomeric material.

16. A method of providing gas exchange in a substrate container, comprising: assembling a gas exchange module by inserting a filter housing into the aperture of the interface body, positioning a filter between the filter housing and a filter holder, and attaching the filter holder to the filter housing; and The gas exchange module is inserted into the gas exchange port of the substrate container.

17. The method of claim 16, wherein attaching the filter holder to the filter housing comprises forming a snap fit between one or more first snap fit features disposed on the filter holder and one or more second snap fit features disposed on the filter housing.

18. The method of claim 17, wherein the filter is retained between a first retaining surface provided on the filter retainer and a second retaining surface provided on the filter housing by compression only.

19. The method of claim 16, wherein inserting the gas exchange module into the gas exchange port of the substrate container includes forming an interface between an opening disposed in the gas exchange port and one or more retaining features disposed on an outer surface of the interface body.

20. The method of claim 16, further comprising directing a flow of air through the interface body, passing the flow of air through a valve disposed in the filter housing, and passing the flow of air through the filter.

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