Air spindle and spraying disc machining method

Abstract

The invention discloses an air main shaft and a spraying disc machining method.The air main shaft comprises a first set, a shaft core and a first control assembly, the shaft core is arranged in the first set, the shaft core has the rotation freedom degree of rotating along the axis of the shaft core, the shaft core comprises a mounting channel, and the first control assembly is arranged in the mounting channel; the mounting channel axially penetrates through the central part of the shaft core, the mounting channel is used for mounting a mounting piece, the first control assembly is mounted in the mounting channel, and the first control assembly is used for controlling the state of the mounting piece in the mounting channel. The technical problem that in the prior art, the machining efficiency of the spraying disc is low is solved, and the technical effect that the machining state of the air spindle connected with the installation piece is changed so as to improve the machining efficiency of the spraying disc is achieved.

Description

Technical Field

[0001] The present application relates to the technical field of spindles, and in particular to a method for processing an air spindle and a spray disc. Background Art

[0002] As the main component of the spray plate used in the semiconductor processing process, the shower head has a crucial impact on its performance. Therefore, the processing accuracy of the shower head is closely related to the processing accuracy of the semiconductor processing equipment. In order to ensure the processing accuracy, some manufacturers in the existing technology use electrospark machining equipment to process the micropores on the surface of the spray plate.

[0003] In the prior art, when performing electrospark machining, an ordinary rotating spindle is generally used to connect with the mounting part, and then the electrospark electrode is clamped by the mounting part. The above clamping method can be used when machining first-order microholes, but it can only perform rotary machining at a specified position and cannot perform shaking machining along a circular trajectory. At the same time, when facing hole shapes above the second-order hole, it is impossible to machine the tapered part connecting the holes; therefore, an additional driving device needs to be set. Since replacing the machining device requires a lot of time for realignment, the machining efficiency of the spray plate in the prior art is relatively low.

[0004] Therefore, the prior art has a problem in that the processing efficiency of the spray plate is low. Summary of the invention

[0005] In order to solve the deficiencies of the prior art, the purpose of the present application is to provide an air spindle and a spray plate processing method, which can change the processing state of the air spindle connected to the mounting member to improve the processing efficiency of the spray plate.

[0006] To achieve the above objectives, this application adopts the following technical solutions:

[0007] An air spindle, which includes: a first set, a core shaft and a first control component, the first set has a accommodating cavity; the core shaft is installed in the accommodating cavity, the core shaft is movably connected to the first set, the core shaft has the freedom of rotation along its axis, the core shaft includes a mounting channel, the mounting channel axially passes through the center part of the core shaft, the mounting channel is used to install a mounting part; the first control component is installed on the core shaft, the first control component includes at least one operating part, and the operating part is used to control the state of the mounting part in the mounting channel.

[0008] As a preferred technical solution, the operating member includes an airbag, which is configured to be deformable. There are multiple airbags, and the multiple airbags are arranged in a ring along the axial direction of the core shaft in the installation channel. The airbag is connected to the inner wall of the core shaft, and the airbag is used to abut the installation member.

[0009] As a preferred technical solution, the airbag includes at least a first state and a second state, and the second state is an initial state; wherein, when the airbag is in the first state, the pressure value inside the airbag is greater than the pressure value in the second state, and the airbag is used to push the mounting part to move in a direction away from the center of the mounting channel.

[0010] As a preferred technical solution, the core shaft also includes an installation groove, which is arranged on the inner wall of the core shaft close to the installation channel, and the installation groove is used to accommodate at least part of the airbag. There are multiple installation grooves, and the multiple installation grooves are arranged along the axial direction of the core shaft.

[0011] As a preferred technical solution, it also includes: a measuring component, which is arranged on the core shaft, and the measuring component is used to detect the position of the mounting part in the mounting channel. The measuring component includes: a detection unit, which has multiple detection units, and the detection units are respectively installed in the mounting grooves, and the detection units are configured to detect the pressure from the airbag.

[0012] As a preferred technical solution, the measuring component also includes a protective layer, which is installed in each of the mounting grooves. The protective layer at least partially covers the detection unit, and the protective layer is configured to be deformed by the pressure of the airbag, and the deformation enables the protective layer to exert a force on the detection unit.

[0013] The present application also provides a processing device, including: a second set, the aforementioned air spindle, the air spindle is installed in the second set; and a second control component, a second control component, the second control component is installed between the second set and the air spindle, the second control component is used to control the state of the air spindle in the installation channel.

[0014] The present application also provides a spray plate processing method, including: controlling the air spindle to complete the preliminary processing of the straight part of the micropores on the surface of the spray plate; switching the air spindle to the shaking processing mode, and completing the processing of the straight part of the micropores on the surface of the spray plate; keeping the mounting part tilted to complete the processing of the conical part of the micropores on the surface of the spray plate.

[0015] As a preferred technical solution, the processing of the tapered portion includes the following steps: dividing the multiple airbags into a first airbag and a second airbag, wherein the first airbag and the second airbag are respectively located on both sides of the mounting member; controlling the first airbag to be in a first state, and controlling the second airbag to be in a second state.

[0016] As a preferred technical solution, the processing method includes: dividing the multiple airbags into a first airbag and a second airbag, wherein the first airbag and the second airbag are respectively located on both sides of the mounting part; controlling the first airbag near the top end of the mandrel and the second airbag near the bottom end of the mandrel to be in a first state, and controlling the first airbag near the bottom end of the mandrel and the second airbag near the top end of the mandrel to be in a second state.

[0017] As a preferred technical solution, the processing method further includes: sequentially numbering the plurality of detection units in the circumferential direction and the axial direction of the core shaft, obtaining the pressure values ​​corresponding to the detection units with different numbers to obtain the volume of the corresponding airbag, and inferring the displacement value of the mounting part in the mounting channel according to the volume of the airbag; judging the state of the mounting part in the mounting channel according to the displacement values ​​at different positions

[0018] Compared with the prior art, the beneficial effects of this application are:

[0019] The present application provides an air spindle. When processing a spray disk, the mounting part can be controlled by a first control component, so that the mounting part can be moved from the central part of the core shaft to the eccentric part when processing the micropores on the surface of the spray disk, so as to complete the processing of the straight part of the micropores; further, the mounting part can also be controlled to switch from a vertical state to an inclined state to complete the processing of the conical part of the micropores; when completing the processing of the micropores on the surface of the spray disk, there is no need to replace the processing device or set up an additional driving device, which saves the time for replacing the processing equipment and improves the low processing efficiency of the spray disk. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] Figure 1 A cross-sectional view of the air spindle of this application;

[0021] Figure 2 This is a schematic diagram of the preliminary processing of the air spindle in this application;

[0022] Figure 3 A schematic diagram of the eccentric arrangement of the mounting member in the air spindle of the present application;

[0023] Figure 4 A schematic diagram of the tilted arrangement of the mounting member in the air spindle of the present application;

[0024] Figure 5 This is a flow chart of the method for processing micro-holes on the surface of the spray plate of this application;

[0025] Among them, 100, the first set; 110, the shell; 120, the rotor; 130, the stator; 140, the air bearing; 200, the core shaft; 210, the installation channel; 220, the installation groove; 300, the first control component; 310, the operating part; 311, the airbag; 400, the installation part; 500, the measuring component; 510, the detection unit; 520, the protective layer; 600, the processed part; 700, the second set. DETAILED DESCRIPTION

[0026] In order to enable those skilled in the art to better understand the solution of the present application, the technical solution in the specific implementation manner of the present application will be clearly and completely described below in conjunction with the drawings in the implementation manner of the present application.

[0027] As the main component of the spray plate used in the semiconductor processing process, the spray head has a vital impact on its performance. Therefore, the processing accuracy of the spray head is closely related to the processing accuracy of the semiconductor processing equipment. In order to ensure the processing accuracy, some manufacturers in the prior art use electrospark machining equipment to process the micropores on the surface of the spray plate. In the prior art, when performing electrospark machining, a common rotating spindle is generally used to connect with the mounting member 400, and then the electrospark electrode is clamped by the mounting member 400. The above clamping method can be used when processing first-order micropores, but it can only be rotated at a specified position, and cannot be shaken along a circular trajectory. At the same time, when facing a hole shape above the second-order hole, it cannot process the conical part connecting the hole and the hole; therefore, an additional driving device needs to be set. Since it takes a lot of time to re-align the processing device once, the processing efficiency of the spray plate in the prior art is low. In order to solve the above problems, it is necessary to develop a new driving device to cope with the processing of the spray plate in various different situations, while ensuring the precision of the micropore processing on the surface of the spray plate.

[0028] In order to achieve the above goals, Figures 1 to 4As shown, the present application provides an air spindle, which includes: a first set 100, a core shaft 200 and a first control assembly 300. The first set 100 includes a first housing 110, a rotor 120, a stator 130 and an air bearing 140, the core shaft 200 is at least partially located in the first housing 110 and is rotatably connected to the first housing 110, the rotor 120 is located in the first housing 110 and is fixedly connected to the core shaft 200, the stator 130 is located in the first housing 110 and is at least partially arranged around the rotor 120, and the rotor 120 can drive the core shaft 200 to rotate relative to the first housing 110 under the action of the stator 130. The air bearing 140 is at least partially installed in the first housing 110, and the core shaft 200 is rotatably connected to the first housing 110; since the air bearing 140 is a non-contact bearing, it supports and reduces friction by generating an air film between the main shaft and the bearing. When the main shaft rotates, due to the centrifugal force, the gas inside the air bearing 140 will form a high-speed air film; compared with the common main shafts often used in the prior art, the air main shaft has higher precision and less pollution, and no additional pollutants will be generated during the processing of the semiconductor spray plate. At the same time, the air main shaft can rotate by itself, and no external drive device is required, which reduces the size of the equipment and improves the processing efficiency of the equipment.

[0029] Please refer to Figure 1The spindle 200 is arranged in the first set 100, and the spindle 200 has the rotational freedom along its axis. The spindle 200 includes a mounting channel 210, and the mounting channel 210 axially passes through the central part of the spindle 200. The mounting channel 210 is used to install the mounting member 400. The first control component 300 is installed in the mounting channel 210. The first control component 300 includes at least one operating member 310, and the operating member 310 is used to abut and control the state of the mounting member 400 in the mounting channel 210. Specifically, the mandrel 200 is arranged in the first set 100, and under the action of the aforementioned air bearing, the mandrel 200 can perform a rotational motion; in the present application, a mounting channel 210 is arranged in the mandrel 200, and the mounting channel 210 is a channel axially penetrating the central part of the mandrel 200, and the mounting channel 210 is used for the installation of the mounting member 400; the mounting member 400 is a device for installing a sleeve, etc., and the mounting member 400 is used to connect with the electric spark electrode, and can drive the electric spark electrode to move, and the clamping method is preferably sleeve connection, and the mounting member 400 is sleeved on the outside of the electric spark electrode. The diameter of the mounting channel 210 is greater than the diameter of the mounting member 400, and the mounting member 400 can move or deflect in the mounting channel 210. The first control component 300 is installed in the installation channel 210. The first control component 300 is used to control the state of the mounting member 400 located in the installation channel 210. The first control component 300 can make the mounting member 400 located at the center of the installation channel 210 and drive the mounting member 400 to rotate synchronously with the core shaft 200; the first control component 300 includes at least one operating room, and the operating member 310 can be an airbag 311, a clamp, a slider, a push rod and other devices with a certain degree of freedom of movement. The operating member 310 moves to abut against the outer wall of the core shaft 200 and push the mounting member 400 to move in the installation channel 210 to change the processing state of the mounting member 400 and the core shaft 200 connected to the mounting member 400. When the spray plate is processed, the mounting member 400 can be controlled by the first control component 300 so that the mounting member 400 has a variety of processing states, including controlling the mounting member 400 to be eccentrically or tilted. This allows the air spindle in the present application to perform various types of processing with only one type of air spindle, without the need to replace the processing device or set up an additional drive device, thereby saving time for replacing the processing equipment and improving the low processing efficiency of the spray plate.

[0030] Please refer to Figures 2 to 4, the mounting member 400 includes an airbag 311, and the airbag 311 has multiple airbags 311, and the multiple airbags 311 are arranged in an annular manner in the mounting channel 210, and the airbag 311 is used to form at least part of the moving end. In one embodiment, the operating member 310 is preferably an airbag 311, and the airbag 311 is annularly installed in the mounting channel 210 along the axial direction of the core shaft 200, that is, multiple airbags 311 are evenly arranged in an array on the periphery of the mounting member 400, and the outer walls of the multiple airbags 311 can abut against the outer wall of the mounting member 400. By controlling the size of the volume of the multiple airbags 311, the movement of the mounting member 400 can be controlled accordingly. The airbag 311 is preferably an airbag 311 that can be deformed, that is, the volume of the airbag 311 increases as the air pressure increases when it is inflated. In some embodiments, the airbag 311 is installed on the inner wall of the core shaft 200, and the airbag 311 is connected to an external air supply unit.

[0031] For further information, please refer to Figure 3 to Figure 4 , the airbag 311 includes a first state and a second state, and the second state is the initial state; wherein, when the airbag 311 is in the first state, the pressure value in the airbag 311 is greater than the pressure value in the second state, and the airbag 311 is used to push the mounting member 400 to move in the direction away from the center of the mounting channel 210. Specifically, the airbag 311 has a first state and a second state, wherein the second state is defined as the initial state, and the first state is the gas supply state. Due to the gas flowing into the airbag 311 in the first state, its volume will also change. The airbag 311 in the first state will push the mounting member 400 to move in the direction away from the axis, so that the mounting member is in an eccentric state. wherein, the volume in the first state is greater than the volume in the second state. In one embodiment, the airbags 311 located on the same side in the axial direction are in the first state at the same time, and the airbags 311 located on the opposite side arranged oppositely are in the second state at the same time, at this time, the mounting member 400 is pushed away from the center of the mounting channel 210, so that the mounting member 400 and the workpiece 600 are in an eccentric state; at this time, the air spindle can complete the shaking process in the spray plate processing process. In another embodiment, the airbags 311 on the same side in the axial direction are in the first state near the upper part and in the second state near the lower part. The airbags 311 on the opposite side are arranged in a central symmetric manner with the airbags 311 on the side. At this time, the mounting member 400 is pushed to a deflected state; at this time, the air spindle can complete the processing of the conical part in the spray disc processing process. The remaining airbags 311 are in the third state. The airbags 311 in the third state have a third volume, which is between the first volume and the second volume. When the airbags 311 are in the third volume, the mounting member 400 is located in the central part of the mandrel 200.

[0032] A mounting groove 220 is provided on the inner wall of the core shaft 200 close to the mounting channel 210 , and the mounting groove 220 is used to accommodate at least part of the airbag 311 . Specifically, a mounting groove 220 is provided on the core shaft 200. The mounting groove 220 is an annular groove opened on the inner wall of the core shaft 200 and arranged circumferentially along the inner wall of the core shaft 200. There are multiple mounting grooves 220, and the multiple is two or more. The annular mounting groove 220 is arranged along the axial direction of the core shaft 200. The aforementioned airbag 311 is at least partially located in the mounting groove 220. The mounting groove 220 is used to constrain the axial displacement and radial displacement of the airbag 311; in one embodiment, it also includes a mounting member 400, which is installed in the mounting groove 220. The mounting member 400 has a accommodating cavity for accommodating the airbag 311 and a clamping portion protruding from the mounting groove 220. When the airbag 311 is in a first state, the airbag 311 protrudes from the clamping portion, and the airbag 311 can abut against the mounting member 400; when the airbag 311 is in a second state, the airbag 311 is located in the accommodating cavity, and the clamping portion and the outer peripheral surface of the mounting member 400 abut against each other.

[0033] Furthermore, it also includes a measuring assembly 500, which is arranged on the mandrel 200, and is used to detect the position of the mounting member 400 in the mounting channel 210. The measuring assembly 500 includes a detection unit 510, and the detection unit 510 has a plurality of detection units 510. The detection unit 510 is installed in the mounting groove 220, and the detection unit 510 is configured to detect the pressure value from the airbag 311. As an implementation method, Figure 2 As shown, in the present application, there are multiple detection units 510, each detection unit 510 is installed in a mounting groove 220, and each detection unit 510 is configured to detect the pressure value from the airbag 311. Among them, the airbag 311 is configured to be able to inflate or exhaust according to the pressure value detected by the detection unit 510 to adjust the working state of the mounting member 400. Specifically, the airbag 311 is inflated or exhausted through the air source control component, and the air source control component is connected to each detection unit 510 in communication. The air source control component inflates or exhausts the airbag 311 according to the pressure value detected by the detection unit 510: if the pressure value detected by the detection unit 510 is too small, the air source control component controls the exhaust of the airbag 311 on the corresponding side of the detection unit 510; if the pressure value detected by the detection unit 510 is too large, the air source control component controls the inflation of the airbag 311 on the corresponding side of the detection unit 510. It should be noted that the air source control component can be a pressure control valve, etc. The gas source control component is connected to the external gas delivery device, so that the gas source control component can control the gas delivery and suction of the external gas delivery device to the airbag 311. The measuring component 500 can also be a sheet-shaped pressure sensor, an optical sensor capable of emitting light, or an optical fiber capable of sensing pressure and outputting optical signals.

[0034] As a preferred technical solution, a protective layer 520 is further included. A protective layer 520 is installed in each installation groove 220. The protective layer 520 at least partially covers the detection unit 510. The protective layer 520 is configured to be deformed by the pressure of the airbag 311. The deformation enables the protective layer 520 to exert a force on the detection unit 510. When the gas in the air gap exerts pressure on the protective layer 520, the protective layer 520 can transmit the pressure to the detection unit 510, so that the detection unit 510 can detect and obtain the pressure value. At the same time, the protective layer 520 can buffer the impact of the gas in the air gap on the detection unit 510, thereby protecting the detection unit 510 and preventing the detection unit 510 from being damaged.

[0035] Exemplarily, the protective layer 520 can be made of flexible rubber, and the detection unit 510 in the installation groove 220 can be protected by the flexible rubber. In addition, the flexible rubber has the property of deformation, so the protective layer 520 can be deformed according to the change of the air film pressure, and the protective layer 520 has a force on the detection unit 510, so as to facilitate the detection unit 510 to detect the air film pressure value. It should be noted that the protective layer 520 can also be made of other materials with protection and deformation properties, and this application is not limited.

[0036] More specifically, the plurality of mounting grooves 220 are evenly distributed on the mandrel 200 along the axial direction of the mandrel 200. By numbering each detection unit 510 and obtaining the pressure signals of the detection units 510 at different positions, the real-time pressure values ​​at the positions corresponding to each detection unit 510 can be obtained, and the shape of the mandrel 200 can be deduced, so that the judgment result of the deflection degree of the mandrel 200 is more accurate.

[0037] The present application also provides a processing device, including: a second set 700, the aforementioned air spindle, the air spindle is installed in the second set 700; and a second control component, the second control component is installed between the second set 700 and the air spindle, and the second control component is used to control the state of the air spindle in the installation channel 210. Specifically, the processing device in the present application is used for processing a spray plate, including the aforementioned air spindle, the second set 700 sleeved outside the aforementioned air spindle, and the second control component, the second control component is connected to the outer wall of the air spindle to control the movement of the air spindle in the second set 700. In some embodiments, the second control component also includes an airbag 311, the size of the airbag 311 is different from that in the first control component 300, but the working principle is the same, and the second control component can control the deflection or horizontal movement of the air spindle; in other embodiments, the second control component includes an adjustable increase end driven by a motor, the adjustable increase end has a horizontal degree of freedom of movement, and can control the movement of the air spindle. When the second control component is in effect, the control direction can be opposite to or the same as the movement direction of the first control component 300, so as to further improve the processing accuracy and processing range during the spray plate processing.

[0038] The present application also provides a method for processing a spray plate, including: controlling a processing device to complete preliminary processing of the linear holes of the micropores on the surface of the spray plate; switching the processing mode of the processing device to make the mounting member 400 move horizontally in the horizontal direction to complete the processing of the linear holes of the micropores on the surface of the spray plate; switching the processing mode of the processing device to keep the mounting member 400 tilted to complete the processing of the conical part of the micropores on the surface of the spray plate. The processing method in the present application is used for processing the micropores on the surface of the spray plate. The micropore processing in the present application adopts the method of electrospark machining. First, the electrospark electrode is used to preliminarily process a micropore of a specified depth in the spray plate, and then the electrospark electrode is controlled to move along a preset circular trajectory in the preliminarily processed micropore (the process of movement is called shaking processing) to complete the processing of the linear part of the micropores on the surface of the spray plate; after completing the processing of the linear part, the mounting member 400 is controlled to move to a deflected state, and the process of maintaining rotation in the deflected state can complete the processing of the conical part of the micropores on the surface of the spray plate. Therefore, the processing method for micropores on the surface of the spray plate in the present application includes the following steps:

[0039] S1: Control the processing device to complete the preliminary processing of the straight part of the micropores on the surface of the spray disk. The second control component controls the air spindle to maintain a vertical state. The first control component 300 controls the mounting member 400 to maintain a vertical state. At the same time, the second set 700 is driven by an external driving member to move in a vertical direction. The core shaft 200 keeps rotating during the movement. The preliminary processing of the straight part of the micropores on the surface of the spray disk is completed in the above manner.

[0040] S2: Switch the processing mode of the processing device to make the mounting member 400 move horizontally in the horizontal direction to complete the processing of the straight portion of the micropores on the surface of the spray disk; in one embodiment, the multiple airbags 311 located on the same side are all in the first state, so that the mounting member 400 moves in the horizontal direction, and the mounting member 400 is away from the central part of the mandrel 200. When the mandrel 200 drives the mounting member 400 to rotate, the mounting member 400 drives the electric spark electrode to move along a circular trajectory to complete the shaking processing in the electric spark processing process, and completes the straight portion of the micropores on the surface of the spray disk through the shaking processing.

[0041] S3: Switch the processing mode of the processing device to keep the mounting part 400 tilted to complete the processing of the tapered part of the micropores on the surface of the spray disk; specifically, after completing the processing of the straight part, the mounting part 400 is controlled to be in a tilted state by the airbag 311, and the mounting part 400 drives the processing part 600 to complete the processing of the tapered part in the micropores in the tilted state, thereby completing the processing of the micropores on the surface of the spray disk, and then the mounting part 400 is moved from the center part of the core shaft 200 to a position deviating from the center part of the core shaft 200; the air spindle is moved as a whole in the same direction or the opposite direction to the moving direction of the mounting part 400.

[0042] As a preferred technical solution, the processing method also includes: controlling the mounting member 400 to be at the center position of the core shaft 200, so that the core shaft 200 moves to a specified position in the vertical direction, and performs preliminary processing of the micropores on the surface of the spray disk; adjusting the pressure of the airbag 311 at different positions so that the mounting member 400 is eccentrically set in the mounting channel 210, and controlling the mounting member 400 to rotate to complete the shaking processing of the micropores on the surface of the spray disk; adjusting the pressure of the airbag 311 at different positions so that the mounting member 400 is inclined in the mounting channel 210, and controlling the mounting member 400 to rotate to complete the processing of the conical portion in the micropores on the surface of the spray disk.

[0043] As an embodiment, the processing of the straight portion of the microhole includes the following steps:

[0044] S1: Grouping the plurality of airbags 311 into a first airbag and a second airbag, respectively, wherein the first airbag and the second airbag are respectively disposed on two sides of the mounting member 400;

[0045] S2: Control the first airbag to be in the first state, and control the second airbag to be in the second state. Specifically, the multiple airbags 311 are grouped, and the airbags 311 in the same vertical direction are set as the first airbags. The airbags in the first airbags are connected to the same air supply unit, and the pressure values ​​in the multiple airbags 311 are the same, so the volume changes of the airbags 311 are also the same. If the airbags 311 in the first airbags are all in the first state, the mounting member 400 will be pushed away from the axis of the core shaft 200; it can be imagined that the multiple airbags 311 arranged opposite to the airbags 311 in the first airbag along the axis of the core shaft 200 are all in the second state.

[0046] As shown in the figure, as an embodiment, the processing of the tapered portion includes the following steps:

[0047] S1: Divide the plurality of airbags 311 into a first airbag and a second airbag, wherein the first airbag and the second airbag are respectively located on two sides of the mounting member;

[0048] S2: Control the first airbag near the top of the mandrel 200 and the second airbag near the bottom of the mandrel 200 to be in the first state, and control the first airbag near the bottom of the mandrel 200 and the second airbag near the top of the mandrel 200 to be in the second state. Specifically, the multiple airbags 311 are grouped, and the airbags 311 in the same vertical direction and near the first end of the shaft 200 are set as the first airbag, and the airbag 311 near the second end of the mandrel 200 is the third airbag; the first end is the top of the mandrel 200, and the second end is the bottom of the mandrel 200. The airbag 311 arranged opposite to the first airbag 311 is set as the second airbag, and the airbag 311 arranged opposite to the third airbag 311 is set as the fourth airbag. The airbags 311 in the first airbag and the fourth airbag are connected to the same air supply unit, and the pressure values ​​in the multiple airbags 311 are the same, so the volume changes of the airbags 311 are also the same. If the airbags 311 in the first airbag are all in the first state, the mounting part 400 will be pushed away from the axis of the core shaft 200; it can be imagined that the multiple airbags 311 in the second airbag and the third airbag, which are arranged opposite to the airbags 311 in the first airbag and the fourth airbag along the axis of the core shaft 200, are all in the second state.

[0049] As shown in the figure, as an embodiment, the present application also provides a method for adjusting the state of a mounting member 400, the method comprising the following steps:

[0050] S1: The detection unit 510 detects the state of the mounting member 400 and controls the state of the mounting member 400 according to the progress of the processing;

[0051] S2: The airbags 311 at different positions switch to different states, pushing the mounting member 400 abutting against it to change its state.

[0052] Specifically, in step S1, when the detection unit 510 detects that the pressure value at the corresponding position has changed, the state of the airbag 311 can be determined according to the magnitude of the pressure value, and further the volume change of the airbag 311 can be determined. The change in the volume of the airbag 311 can push the mounting member 400 to move in different directions, and the mounting member 400 is subjected to thrusts in different directions by correspondingly changing the volumes of different airbags 311 at different positions to change the state of the mounting member 400.

[0053] like Figure 5 As shown, as an embodiment, the detection unit 510 is provided with multiple, multiple installation grooves 220 are evenly distributed on the core shaft 200 along the axial direction of the core shaft 200, and each detection unit 510 is installed in a installation groove 220; the detection unit 510 detects the state of the installation member 400 including: the multiple detection units 510 are numbered in sequence along the axial direction and axial direction of the core shaft 200, and the pressure values ​​corresponding to the detection units 510 with different numbers are obtained to obtain the pressure values ​​of the corresponding airbag 311 on the installation member 400; the state of the installation member 400 in the installation channel 210 is judged according to the pressure values ​​at different positions. Specifically, the following steps are included:

[0054] S11: The plurality of detection units 510 are numbered along the axial direction of the core shaft 200 , and the pressure values ​​of the airbags 311 at different positions are obtained by acquiring the pressure values ​​corresponding to the detection units 510 with different numbers;

[0055] S12: Determine the state of the mandrel 200 according to the pressure values ​​at different positions.

[0056] Specifically, in step S11, each detection unit 510 corresponds to a position on the core shaft 200, which is conducive to judging the pressure value of the airbag 311 at different positions on the core shaft 200, and the morphology of the airbag 311 can be judged according to the pressure value, and the state of the mounting part 400 can be judged according to the morphology of the airbag 311.

[0057] In step S12 , by judging the state of the mounting member 400 , it is helpful to control the pressure value of the airbag 311 at the corresponding position, so that the change value of the volume of the airbag 311 can be controlled, thereby improving the accuracy of the state change of the mounting member 400 .

[0058] As shown in the figure, as an embodiment, multiple detection units 510 are respectively installed in different installation slots 220, and the detection units 510 at different heights and positions are numbered, respectively (a, 1), (a, 2), (a, 3), (b, 1), (b, 2), (b, 3), where the same letter number represents that the detection units 510 are located at the same height, and the same number represents that the detection units 510 are located on the same side. At the same time, the installation slots 220 and the airbags 311 are arranged in a one-to-one correspondence with the detection units 510, so the same number can also be used. Specifically,

[0059] Technical effect:

[0060] The present application provides an air spindle. When processing a spray plate, the mounting member 400 can be controlled by the first control component 300 so that the mounting member 400 has a variety of processing states, including controlling the mounting member 400 to be eccentrically or tilted. This allows the air spindle in the present application to perform various types of processing with only one type of air spindle, without the need to replace the processing device or set up an additional drive device, thereby saving time for replacing the processing equipment and improving the low processing efficiency of the spray plate.

[0061] It should be noted that the words "first", "second" and similar words used in the specification and claims of this application do not indicate any order, quantity or importance, but are only used to distinguish different components. Similarly, words such as "one" or "a" do not indicate a quantitative limitation, but indicate the existence of at least one. "Multiple" or "several" means at least two. Unless otherwise specified, words such as "front", "back", "left", "right", "bottom" and / or "top" are only for the convenience of description and are not limited to one position or one spatial orientation. Words such as "include" or "comprise" mean that the elements or objects appearing before "include" or "comprise" include the elements or objects listed after "include" or "comprise" and their equivalents, and do not exclude other elements or objects. Words such as "connect" or "connected" are not limited to physical or mechanical connections, and may include electrical connections, whether direct or indirect.

[0062] The singular forms "a", "an", and "the" used in this specification and the appended claims are intended to include the plural forms as well, unless the context clearly indicates otherwise. It should also be understood that the term "and / or" used herein refers to and includes any or all possible combinations of one or more of the associated listed items.

[0063] It should be understood that those skilled in the art can make improvements or changes based on the above description, and all these improvements and changes should fall within the scope of protection of the claims attached to this application.

Claims

1. An air spindle, characterized in that: include: A first set (100), the first set (100) having a receiving cavity (110); a mandrel (200), the mandrel (200) being installed in the accommodating cavity (110), the mandrel (200) being movably connected to the first set (100), the mandrel (200) having a rotational freedom along its axis, the mandrel (200) comprising a mounting channel (210), the mounting channel (210) axially penetrating a central portion of the mandrel (200), the mounting channel (210) being used to mount a mounting member (400); and A first control component (300), wherein the first control component (300) is mounted on the spindle (200), and the first control component (300) comprises at least one operating member (310), wherein the operating member (310) is used to control the state of the mounting member (400) in the mounting channel (210).

2. The air spindle according to claim 1, characterized in that: The operating member (310) includes an airbag (311), the airbag (311) being configured to be deformable and recoverable, and the airbag (311) is provided in plurality; A plurality of airbags (311) are arranged in an annular manner in the installation channel (210) along the axial direction of the core shaft (200); the airbags (311) are connected to the inner wall of the core shaft (200); and the airbags (311) are used to abut against the installation member (400).

3. The air spindle according to claim 2, characterized in that: The airbag (311) comprises at least a first state and a second state, wherein the second state is an initial state; When the airbag (311) is in the first state, the pressure value in the airbag (311) is greater than the pressure value in the second state, and the airbag (311) is used to push the mounting member (400) to move in a direction away from the center of the mounting channel (210).

4. The air spindle according to claim 3, characterized in that: The core shaft (200) further comprises a mounting groove (220), wherein the mounting groove (220) is arranged on the inner wall of the core shaft (200) close to the mounting channel (210), and the mounting groove (220) is used to accommodate at least a portion of the airbag (311). There are a plurality of mounting grooves (220), and the plurality of mounting grooves (220) are arranged along the axial direction of the core shaft (200).

5. The air spindle according to claim 4, characterized in that: Also includes: A measuring assembly (500) is arranged on the core shaft (200), and the measuring assembly (500) is used to detect the position of the mounting member (400) in the mounting channel (210). The measuring assembly (500) comprises: a detection unit (510), and the detection unit (510) has a plurality of detection units (510), and the detection units (510) are respectively installed in the mounting grooves (220).

6. The air spindle according to claim 5, characterized in that: The measuring assembly (500) further comprises a protective layer (520), wherein the protective layer (520) is installed in each of the installation grooves (220), and the protective layer (520) at least partially covers the detection unit (510). The protective layer (520) is configured to be deformed by the pressure of the airbag (311), and the deformation enables the protective layer (520) to exert a force on the detection unit (510).

7. A method for processing a spray plate, used for an air spindle as claimed in any one of claims 1 to 6, characterized in that: The processing method comprises: Control the air spindle to complete the preliminary processing of the micro-hole straight line part on the surface of the spray plate; Switch the air spindle to the shaking processing mode and complete the processing of the micro-hole straight line part on the surface of the spray plate; The mounting member (400) is kept tilted to complete the processing of the microporous conical portion on the surface of the spray plate.

8. The method for processing the spray plate according to claim 7, characterized in that: The processing of the straight part of the microhole includes the following steps: Dividing a plurality of airbags (311) into a first airbag and a second airbag, wherein the first airbag and the second airbag are respectively located on two sides of the mounting member; The first airbag is controlled to be in a first state, and the second airbag is controlled to be in a second state.

9. The method for processing the spray plate according to claim 7, characterized in that: The processing of the tapered portion includes the following steps: Dividing the plurality of airbags (311) into a first airbag and a second airbag, wherein the first airbag and the second airbag are respectively located on two sides of the mounting member; The first airbag near the top of the mandrel (200) and the second airbag near the bottom of the mandrel (200) are controlled to be in a first state, and the first airbag near the bottom of the mandrel (200) and the second airbag near the top of the mandrel (200) are controlled to be in a second state.

10. The method for processing a spray plate according to claim 7, characterized in that: The processing method further comprises: sequentially numbering the plurality of detection units (510) along the circumferential direction and the axial direction of the core shaft (200), obtaining the detection values ​​corresponding to the detection units (510) with different numbers to obtain the volume of the corresponding airbag (311), and inferring the displacement value of the mounting member (400) in the mounting channel (210) according to the volume of the airbag (311); The state of the mounting member (400) in the mounting channel (210) is determined according to the displacement values ​​at different positions.

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