Valve island type vacuum pump system

Abstract

The invention discloses a valve terminal type vacuum pump system which comprises a plurality of bases which are stacked in the X-axis direction. A user can arrange a proper number of bases as required, so that the applicability of the vacuum pump system is better; after the multiple bases are stacked in the X-axis direction, the first air channels of the bases correspond in position and communicate with one another after assembly, and the second air channels correspond in position and communicate with one another after assembly, so that positive-pressure air enters the vacuum pump system through the first confluence channels in a unified mode, negative-pressure air enters the vacuum pump system through the second confluence channels in a unified mode, the airflow passing performance is good, and operation is stable; and additional arrangement of a flow channel is not needed, so that the overall structure of the vacuum pump system is compact, and miniaturization of the device is facilitated. The vacuum pump units are in one-to-one correspondence with the bases, and each vacuum pump unit is detachably matched with the corresponding base in an inserted mode, so that mechanical connection and electrical connection are formed between the vacuum pump units and the corresponding base. The structural design has the advantages of being convenient to disassemble and assemble and easy to maintain.

Description

Technical Field

[0001] The present invention relates to the technical field of valve islands, and in particular to a valve island type vacuum pump system. Background Art

[0002] Vacuum equipment is a device that generates, improves and (or) maintains vacuum, including vacuum application equipment and vacuum acquisition equipment, such as vacuum pump systems and vacuum generator systems. Vacuum equipment is widely used in the fields of machinery, electronics, packaging, printing, plastics and robots in industrial automation. For example, if a mobile grasping device is needed on a packaging line, the grasping device is provided with a vacuum adsorption device, and the vacuum adsorption device is provided with a suction cup. After the suction cup contacts the object to be sucked, a temporary sealed space is formed. The air in the sealed space is extracted or thinned by a vacuum pump, generating a pressure difference between the inside and the outside, so that the suction cup can absorb the object to grasp and move.

[0003] In the prior art, when multiple vacuum pump units need to be used, the multiple vacuum pump units need to be arranged with pipelines, lines, etc. respectively, which makes the overall structure of the vacuum pump system complex, occupies a large space, and has poor operating stability.

[0004] Therefore, it is necessary to improve the existing technology. Summary of the invention

[0005] The purpose of the present invention is to solve the problem in the prior art that when multiple vacuum pump units are needed, the multiple vacuum pump units need to be arranged with pipelines and lines separately, which makes the overall structure of the vacuum pump system complex, occupies a large space and has poor operating stability. A valve island type vacuum pump system is proposed to solve the problem that when multiple vacuum pump units are needed, the multiple vacuum pump units need to be arranged with pipelines and lines separately, which makes the overall structure of the vacuum pump system complex, occupies a large space and has poor operating stability.

[0006] To achieve the above object, the present invention adopts the following technical solutions: A valve island type vacuum pump system comprises a plurality of bases, wherein the plurality of bases are stacked along the X-axis direction, wherein the bases are provided with a first air port, a first air channel connected to the first air port, a second air port and a second air channel connected to the second air port, wherein after adjacent bases are stacked, the positions of the first air channels correspond and are connected to each other to form a first confluence channel, and the positions of the second air channels correspond and are connected to each other to form a second confluence channel, wherein the first confluence channel and the second confluence channel are arranged separately from each other; and a plurality of vacuum pump units corresponding to the bases one by one, wherein each of the vacuum pump units is detachably plugged and matched with the corresponding bases respectively, so that a mechanical connection and an electrical connection are formed between the two, wherein the vacuum pump unit comprises an air-controlled valve unit and a control valve unit connected to the air-controlled valve unit, wherein the vacuum pump unit is provided with a third air port connected to the first air port and a fourth air port connected to the second air port, wherein the vacuum pump unit is provided with a negative pressure air channel connected to the third air port and a positive pressure air channel connected to the fourth air port, wherein both the negative pressure air channel and the positive pressure air channel are connected to the air-controlled valve unit.

[0007] Furthermore, each of the bases is provided with a circuit board A, and the circuit board A is respectively provided with a first electrical signal plug interface, a second electrical signal plug interface and a third electrical signal plug interface, wherein any two adjacent bases are plugged together through the corresponding first electrical signal plug interface and the second electrical signal plug interface to achieve electrical connection between the two adjacent bases; the vacuum pump unit is provided with a circuit board B inside, and the circuit board B is provided with a fourth electrical signal plug interface plugged together with the third electrical signal plug interface to achieve electrical connection between the vacuum pump unit and the base.

[0008] Furthermore, it also includes a first mounting seat and a second mounting seat, and several of the bases are serially connected between the first mounting seat and the second mounting seat along the X-axis direction. The first mounting seat is provided with a circuit board C, and the circuit board C is provided with a fifth electrical signal plug interface. The fifth electrical signal plug interface is plugged into and matched with the first electrical signal plug interface of the base located at the outermost side to achieve electrical connection between the first mounting seat and the base at the outermost side.

[0009] Furthermore, the first mounting seat and / or the second mounting seat is provided with a fifth air port, a third air channel for connecting the fifth air port with the first confluence channel, and the first mounting seat and / or the second mounting seat is provided with a sixth air port, a fourth air channel for connecting the sixth air port with the second confluence channel.

[0010] Furthermore, it also includes a control box, which is fixedly connected to the first mounting seat. A circuit board D is arranged in the control box, and the circuit board D is provided with a sixth electrical signal plug interface. The circuit board C is provided with a seventh electrical signal plug interface that is plugged and matched with the sixth electrical signal plug interface to achieve electrical connection between the control box and the first mounting seat.

[0011] Furthermore, a plug part is provided at the bottom of the vacuum pump unit, and the base is provided with a socket that cooperates with the plug part, and the plug part is plugged and cooperated with the socket to realize the connection between the vacuum pump unit and the base; a latch that cooperates with the plug part for locking is slidably provided in the base, and the latch can slide between a first position and a second position relative to the base; when the latch is in the first position, the latch locks the plug part, so that the vacuum pump unit is fixedly connected to the base; when the latch is in the second position, the latch releases the lock on the plug part, so that the vacuum pump unit and the base are released from the fixed connection.

[0012] Furthermore, the plug part includes a first plug part, a second plug part and a third plug part arranged at the bottom of the vacuum pump unit, and the socket includes a first socket corresponding to the first plug part and a second socket corresponding to the third plug part; the side edge of the bottom of the first plug part is provided with a locking groove arranged along the sliding direction of the latch, and the latch is provided with a first locking mouth that locks with the locking groove; the second plug part is provided with a locking buckle, and the latch is provided with a second locking mouth that locks with the locking buckle; the bottom side wall of the third plug part is provided with a third locking mouth, and the latch is provided with a locking tongue that locks with the third locking mouth.

[0013] Furthermore, the vacuum pump unit also includes an equipment main body module, a valve assembly module and a pressure gauge module, the pressure gauge module and the valve assembly module are both installed to the equipment main body module, the air-controlled valve unit and the control valve unit are both arranged in the valve assembly module, the air-controlled valve unit includes a vacuum valve and a piercing valve, the control valve unit includes a vacuum pilot valve for controlling the operation of the vacuum valve and an piercing pilot valve for controlling the operation of the piercing valve; the equipment main body module is provided with a working port connected to both the negative pressure airway and the positive pressure airway.

[0014] Furthermore, the control valve unit is respectively provided with a pilot converging channel, a vacuum control air channel and an air-breaking control air channel, the pilot converging channel is respectively connected with the vacuum pilot valve and the air-breaking pilot valve, the vacuum control air channel is respectively connected with the vacuum pilot valve and the vacuum valve, and the air-breaking control air channel is respectively connected with the air-breaking pilot valve and the air-breaking valve; the air control valve unit is respectively provided with a seventh air port and an eighth air port corresponding to the vacuum valve, and a ninth air port and a tenth air port corresponding to the air-breaking valve, and the ninth air port is always connected with the pilot converging channel; the seventh air port and the eighth air port are both connected with the negative pressure air channel, and the ninth air port and the tenth air port are both connected with the positive pressure air channel.

[0015] Furthermore, the air-controlled valve unit also includes an air-controlled valve body, a partition is provided in the air-controlled valve body, the partition divides the inner cavity of the air-controlled valve body into an upper mounting cavity and a lower mounting cavity, the vacuum valve is arranged in the upper mounting cavity, the air-breaking valve is arranged in the lower mounting cavity, a valve stem A is movably provided in the vacuum valve, an upper cavity of the valve stem A is provided between the upper end surface of the valve stem A and the air-controlled valve body, a lower cavity of the valve stem A is provided between the lower end surface of the valve stem A and the partition, a valve stem B is movably provided in the air-breaking valve, an upper cavity of the valve stem B is provided between the upper end surface of the valve stem B and the partition, a lower cavity of the valve stem B is provided between the lower end surface of the valve stem B and the air-controlled valve body, the vacuum control airway is connected with the upper cavity of the valve stem A, and the air-breaking control airway is connected with both the lower cavity of the valve stem A and the upper cavity of the valve stem B.

[0016] After adopting the above structure, the beneficial effects of the present invention are: (1) A valve island type vacuum pump system described in the present invention comprises a plurality of bases, which are stacked along the X-axis direction. The bases are provided with a first gas port, a first gas channel connected to the first gas port, a second gas port and a second gas channel connected to the second gas port. After the adjacent bases are stacked, the positions of the first gas channels correspond and are connected to each other to form a first confluence channel, and the positions of the second gas channels correspond and are connected to each other to form a second confluence channel. The first confluence channel and the second confluence channel are arranged separately from each other. The user can arrange a suitable number of bases as needed, so that the applicability of the vacuum pump system is better; after the plurality of bases are stacked along the X-axis direction, the positions of the first gas channels of the bases correspond and are connected to each other after assembly, and the positions of the second gas channels correspond and are connected to each other after assembly, so that the vacuum pump system uniformly enters positive pressure gas through the first confluence channel and uniformly enters negative pressure gas through the second confluence channel, the air flow performance is good, the operation is stable, and no additional flow channel is required, so that the overall structure of the vacuum pump system is compact, which is conducive to the miniaturization of the device.

[0017] (2) A valve island type vacuum pump system described in the present invention comprises a plurality of vacuum pump units corresponding to the bases one by one, each of the vacuum pump units is removably plugged into and matched with the corresponding bases, so that the two are mechanically and electrically connected, the vacuum pump unit comprises an air control valve unit, a control valve unit connected to the air control valve unit, the vacuum pump unit is provided with a third air port correspondingly connected to the first air port, a fourth air port correspondingly connected to the second air port, the vacuum pump unit is provided with a negative pressure airway connected to the third air port, and a positive pressure airway connected to the fourth air port, the negative pressure airway and the positive pressure airway are both connected to the air control valve unit. The vacuum pump unit is connected to the first air port of the base through the third air port and connected to the first confluence channel; the vacuum pump unit is connected to the second air port of the base through the fourth air port and connected to the second confluence channel; the design of the structure makes the overall flow channel layout of the vacuum pump system reasonable, thereby making the vacuum pump system compact.

[0018] (3) A valve island type vacuum pump system described in the present invention further includes a first mounting seat and a second mounting seat, and a plurality of said bases are connected in series between the first mounting seat and the second mounting seat along the X-axis direction. The expansion function is achieved by detachably arranging a plurality of bases between the first mounting seat and the second mounting seat. When the number of bases needs to be increased, the connecting piece is loosened and taken out. After the required number of bases is increased, the first mounting seat, the base and the second mounting seat are fastened with the connecting piece. At the same time, a spare base can also be configured to facilitate customers to expand the vacuum pump unit. For example, when N vacuum pump units need to be used, N+1 bases are assembled between the first mounting seat and the second mounting seat, and a cover plate is installed on one of the bases. When the N+1th base needs to be activated, the cover plate only needs to be removed and the vacuum pump unit can be plugged into the spare base. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] In order to more clearly illustrate the specific embodiments of the present invention, the following is a brief introduction to the drawings required for use in the description of the specific embodiments. Obviously, the drawings described below are some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying any creative work.

[0020] Figure 1 The overall structure of the present invention is shown in FIG. Figure 1 ; Figure 2 The overall structure of the present invention is shown in FIG. Figure 2 (with a cover plate); Figure 3 It is an exploded view of the overall structure of the present invention (with a cover plate); Figure 4 It is a transverse cross-sectional view of the overall structure of the present invention. Figure 1 ; Figure 5 It is a transverse cross-sectional view of the overall structure of the present invention. Figure 2 ; Figure 6 It is a transverse cross-sectional view of the overall structure of the present invention. Figure 3 ; Figure 7 The longitudinal section of the vacuum pump unit of the present invention is connected with the base Figure 1 ; Figure 8 The longitudinal section of the vacuum pump unit of the present invention is connected with the base Figure 2 ; Fig. 9 The longitudinal section of the vacuum pump unit of the present invention is connected with the base Figure 3 ; Fig.10 The longitudinal section of the vacuum pump unit of the present invention is connected with the base Figure 4 ; Fig.11 The longitudinal section of the vacuum pump unit of the present invention is connected with the base Figure 5 ; Fig.12 The present invention Fig.11 A schematic diagram of the structure at A; Fig.13 The longitudinal section of the vacuum pump unit of the present invention is connected with the base Figure 6 ; Fig.14 The control box of the present invention is connected with the first mounting seat, the base and the second mounting seat. Figure 1 ; Fig.15 The control box of the present invention and the first mounting seat, the base and the second mounting seat are connected schematically. Figure 2 (with a cover plate); Fig.16 is a schematic diagram of the cooperative connection between the vacuum pump unit and the latch of the present invention (the latch is in the first position); Fig.17 The present invention Fig.16 A schematic diagram of the structure at B; Fig.18 is a three-dimensional schematic diagram of a vacuum pump unit of the present invention; Fig.19 The present invention Fig.18 A schematic diagram of the structure at position C of FIG. Fig. 20 is an exploded view of the vacuum pump unit of the present invention; Fig.21 is a three-dimensional schematic diagram of a base of the present invention; Fig. 22 It is a longitudinal cross-sectional view of the first mounting seat, the base and the second mounting seat of the present invention in cooperation with each other; Fig.23 is a three-dimensional schematic diagram of the latch of the present invention; Fig.24 It is a three-dimensional schematic diagram of the cover plate of the present invention.

[0021] Figures 1 to 24 The bid number is: 1. Base; 11. First air port; 12. First air duct; 13. Second air port; 14. Second air duct; 15. Circuit board A; 151. First electrical signal plug interface; 152. Second electrical signal plug interface; 153. Third electrical signal plug interface; 16. First socket; 17. Second socket; 18. First sealing ring; 19. Cover plate; 191. First blocking block; 1911. Second sealing ring; 192. Second blocking block; 1921. Third sealing ring; 2. Vacuum pump unit; 21. Third air port; 211. Negative pressure air duct; 2111. First negative pressure air duct; 2112. Second negative pressure air duct; 22. Fourth air port; 221 , positive pressure airway; 2211, first positive pressure airway; 2212, second positive pressure airway; 23, circuit board B; 231, fourth electrical signal plug interface; 24, first plug part; 241, locking groove; 25, second plug part; 251, locking buckle; 2511, gap; 2512, protrusion; 2513, guide slope; 2514, locking slope; 26, third plug part; 261, third locking port; 27, equipment main body module; 271, working port; 272, first wedge-shaped positioning groove; 273, second wedge-shaped positioning groove; 274, throttle valve; 275, filter device; 2751, buckle structure; 2752, buckle; 2753, card slot; 28, valve assembly module; 281, first wedge-shaped positioning block; 282, second wedge-shaped positioning block; 29, pressure gauge module; 291, pressure sensor; 3, air-controlled valve unit; 31, vacuum valve; 311, seventh air port; 312, eighth air port; 313, valve stem A; 314, vacuum manual lever; 32, air-breaking valve; 321, ninth air port; 322, tenth air port; 323, valve stem B; 33, air-controlled valve body; 331, partition; 3311, vent; 4, control valve unit; 41, vacuum pilot valve; 42, air-breaking pilot valve; 421, air-breaking manual lever; 43, pilot confluence channel; 44 , vacuum control airway; 45, air-breaking control airway; 5, first mounting seat; 51, circuit board C; 511, fifth electrical signal plug interface; 512, seventh electrical signal plug interface; 52, connector; 6, second mounting seat; 61, fifth air port; 611, third airway; 62, sixth air port; 621, fourth airway; 7, control box; 71, circuit board D; 711, sixth electrical signal plug interface; 8, latch; 81, first locking port; 811, large port end; 812, small port end; 82, second locking port; 83, locking tongue; 84, vertical portion; 85, handle; 110, first confluence channel; 120, second confluence channel. DETAILED DESCRIPTION

[0022] In order to make the above-mentioned objects, features and advantages of the present invention more obvious and easy to understand, the specific embodiments of the present invention are described in detail below in conjunction with the accompanying drawings. In the following description, many specific details are set forth to facilitate a full understanding of the present invention. However, the present invention can be implemented in many other ways different from those described herein, and those skilled in the art can make similar improvements without violating the connotation of the present invention, so the present invention is not limited by the specific embodiments disclosed below.

[0023] In the description of the present invention, it should be understood that if the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", "clockwise", "counterclockwise", "axial", "radial", "circumferential" and the like appear, the orientation or position relationship indicated by these terms is based on the orientation or position relationship shown in the accompanying drawings, which is only for the convenience of describing the present invention and simplifying the description, and does not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as limiting the present invention.

[0024] In addition, if the terms "first" or "second" appear, these terms are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Therefore, the features defined as "first" or "second" may explicitly or implicitly include at least one of the features. In the description of the present invention, if the term "plurality" appears, the meaning of "plurality" is at least two, such as two, three, etc., unless otherwise clearly and specifically defined.

[0025] In the present invention, unless otherwise clearly defined and limited, if the terms "installed", "connected", "connected", "fixed" and the like appear, these terms should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between two elements, unless otherwise clearly defined. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0026] In the present invention, unless otherwise clearly specified and limited, if there is a description that a first feature is "above" or "below" a second feature, etc., or the like, it may mean that the first and second features are in direct contact, or that the first and second features are in indirect contact through an intermediate medium. Moreover, the first feature being "above", "above" and "above" the second feature may mean that the first feature is directly above or obliquely above the second feature, or simply means that the first feature is higher in level than the second feature. The first feature being "below", "below" and "below" the second feature may mean that the first feature is directly below or obliquely below the second feature, or simply means that the first feature is lower in level than the second feature.

[0027] It should be noted that if an element is referred to as being "fixed to" or "disposed on" another element, it may be directly on the other element or there may be a central element. If an element is considered to be "connected to" another element, it may be directly connected to the other element or there may be a central element at the same time. If present, the terms "vertical", "horizontal", "upper", "lower", "left", "right" and similar expressions used in the present invention are for illustrative purposes only and do not represent the only implementation method.

[0028] It should be noted that, in the absence of conflict, the embodiments of the present invention and the features in the embodiments can be combined with each other. The present invention will be described in detail below with reference to the accompanying drawings and in combination with the embodiments.

[0029] like Figures 1 to 24 As shown, a valve island type vacuum pump system includes a plurality of bases 1, the plurality of bases 1 are stacked along the X-axis direction, the base 1 is provided with a first gas port 11, a first gas channel 12 connected to the first gas port 11, a second gas port 13 and a second gas channel 14 connected to the second gas port 13, after the adjacent bases 1 are stacked, the positions of the first gas channels 12 correspond and are connected to each other to form a first confluence channel 110, the positions of the second gas channels 14 correspond and are connected to each other to form a second confluence channel 120, the first confluence channel 110 and the second confluence channel 120 are arranged separately from each other; a plurality of vacuum pumps corresponding to the bases 1 one by one Pump unit 2, each of the vacuum pump units 2 is detachably plugged into and matched with the corresponding base 1 to form a mechanical connection and an electrical connection between the two. The vacuum pump unit 2 includes an air-controlled valve unit 3 and a control valve unit 4 connected to the air-controlled valve unit 3. The vacuum pump unit 2 is provided with a third air port 21 corresponding to the first air port 11 and a fourth air port 22 corresponding to the second air port 13. The vacuum pump unit 2 is provided with a negative pressure airway 211 connected to the third air port 21 and a positive pressure airway 221 connected to the fourth air port 22. The negative pressure airway 211 and the positive pressure airway 221 are both connected to the air-controlled valve unit 3.

[0030] Based on the above embodiments, the present invention aims to solve a problem of providing a valve island type vacuum pump system, comprising a plurality of bases 1, wherein the plurality of bases 1 are stacked along the X-axis direction, and the base 1 is provided with a first gas port 11, a first gas channel 12 connected to the first gas port 11, a second gas port 13 and a second gas channel 14 connected to the second gas port 13. After adjacent bases 1 are stacked, positions of the first gas channels 12 correspond and are interconnected to form a first confluence channel 110, positions of the second gas channels 14 correspond and are interconnected to form a second confluence channel 120, and the first confluence channel 110 and the second confluence channel 120 are arranged separately from each other. The user can arrange a suitable number of bases 1 according to needs, so that the applicability of the vacuum pump system is better; after several bases 1 are stacked along the X-axis direction, the positions of the first air channels 12 of the bases 1 correspond and are interconnected after assembly, and the positions of the second air channels 14 correspond and are interconnected after assembly, so that the vacuum pump system uniformly intakes positive pressure gas through the first confluence channel 110 and uniformly intakes negative pressure gas through the second confluence channel 120, with good air flow performance and stable operation, and no additional flow channel needs to be arranged, so that the overall structure of the vacuum pump system is compact, which is conducive to the miniaturization of the device. It includes a plurality of vacuum pump units 2 corresponding to the bases 1 one by one, each of the vacuum pump units 2 is detachably plugged into the corresponding base 1 to form a mechanical and electrical connection between the two, the vacuum pump unit 2 includes an air-controlled valve unit 3, and a control valve unit 4 connected to the air-controlled valve unit 3, the vacuum pump unit 2 is provided with a third air port 21 corresponding to the first air port 11, and a fourth air port 22 corresponding to the second air port 13, the vacuum pump unit 2 is provided with a negative pressure airway 211 connected to the third air port 21, and a positive pressure airway 221 connected to the fourth air port 22, and the negative pressure airway 211 and the positive pressure airway 221 are both connected to the air-controlled valve unit 3. The vacuum pump unit 2 is connected to the first air port 11 of the base 1 through the third air port 21, and is connected to the first confluence channel 110; the vacuum pump unit 2 is connected to the second air port 13 of the base 1 through the fourth air port 22, and is connected to the second confluence channel 120; the design of this structure makes the overall flow channel layout of the vacuum pump system reasonable, thereby making the vacuum pump system structure compact.

[0031] As another preferred embodiment of the present invention, a circuit board A15 is provided in each of the bases 1, and the circuit board A15 is respectively provided with a first electrical signal plug interface 151, a second electrical signal plug interface 152 and a third electrical signal plug interface 153, wherein any two adjacent bases 1 are plugged in and matched with each other through the corresponding first electrical signal plug interface 151 and the second electrical signal plug interface 152 to achieve electrical connection between the two adjacent bases 1; a circuit board B23 is provided inside the vacuum pump unit 2, and the circuit board B23 is provided with a fourth electrical signal plug interface 231 which is plugged in and matched with the third electrical signal plug interface 153 to achieve electrical connection between the vacuum pump unit 2 and the base 1. It also includes a first mounting seat 5 and a second mounting seat 6. Several bases 1 are serially connected between the first mounting seat 5 and the second mounting seat 6 along the X-axis direction. The first mounting seat 5 is provided with a circuit board C51. The circuit board C51 is provided with a fifth electrical signal plug interface 511. The fifth electrical signal plug interface 511 is plugged with the first electrical signal plug interface 151 of the base 1 located at the outermost side to achieve electrical connection between the first mounting seat 5 and the base 1 at the outermost side. It also includes a control box 7. The control box 7 is fixedly connected to the first mounting seat 5. A circuit board D71 is provided in the control box 7. The circuit board D71 is provided with a sixth electrical signal plug interface 711. The circuit board C51 is provided with a seventh electrical signal plug interface 512 plugged with the sixth electrical signal plug interface 711 to achieve electrical connection between the control box 7 and the first mounting seat 5. In this embodiment, Figure 4 and Figure 7 As shown, the first electrical signal plug interface 151 is a first row of pins, and the second electrical signal plug interface 152 is a first row of females; the third electrical signal plug interface 153 is a second row of females, the fourth electrical signal plug interface 231 is a second row of pins, the fifth electrical signal plug interface 511 is a first row of females, the sixth electrical signal plug interface 711 is a first row of pins, and the seventh electrical signal plug interface 512 is a first row of females. The plug-in connection between the first row of pins and the first row of females and the plug-in connection between the second row of pins and the second row of females replaces the traditional wiring harness connection. This structural design makes the electrical connection between the control box 7 and the first mounting seat 5, the first mounting seat 5 and the base 1, the adjacently arranged base 1, and the pressure gauge module 29 and the base 1 more convenient, without the need to sort out the wiring harness and then connect it to the corresponding end, and only the first row of pins needs to be inserted into the first row of females and the second row of pins needs to be inserted into the second row of females; the detachable connection structure is realized by the first row of pins and the first row of females, and the second row of pins and the second row of females, which has the characteristics of convenient disassembly and assembly and simple maintenance. Moreover, this structure makes the overall structure of the installed vacuum pump system more compact and beautiful.

[0032] As another preferred solution of the present invention, the first mounting seat 5 and / or the second mounting seat 6 is provided with a fifth gas port 61, a third gas channel 611 for connecting the fifth gas port 61 with the first confluence channel 110, and the first mounting seat 5 and / or the second mounting seat 6 is provided with a sixth gas port 62, a fourth gas channel 621 for connecting the sixth gas port 62 with the second confluence channel 120. Through the provision of the fifth gas port 61 and the first confluence channel 110, the vacuum pump system realizes uniform intake of positive pressure gas; through the provision of the sixth gas port 62 and the second confluence channel 120, the vacuum pump system realizes uniform intake of negative pressure gas. In this embodiment, the base 1 is provided with a first gas port 11 and a second gas port 13, and the base 1 is provided with a first gas channel 12 connected to the first gas port 11 and a second gas channel 14 connected to the second gas port 13. When a plurality of bases 1 are stacked, the positions of the first gas channels 12 correspond and are connected to each other to form a first confluence channel 110, and the positions of the second gas channels 14 correspond and are connected to each other to form a second confluence channel 120. The first confluence channel 110 and the second confluence channel 120 are arranged separately from each other. The vacuum pump unit 2 is provided with a third gas port 21 corresponding to the first gas port 11 and a fourth gas port 22 corresponding to the second gas port 13. Through the design of this structure, the vacuum pump unit 2 is connected to the first confluence channel 110 through the third gas port 21 provided at the bottom thereof, and is connected to the second confluence channel 120 through the fourth gas port 22 provided at the bottom thereof, so as to realize the unified inlet of positive pressure gas and the unified inlet of negative pressure gas of the vacuum pump system. The mechanism for uniformly feeding positive pressure gas and uniformly feeding negative pressure gas is arranged in the base assembly composed of the first mounting seat 5, the base 1 and the second mounting seat 6. When the vacuum pump unit 2 needs to be replaced, it is only necessary to disassemble the vacuum pump unit 2 without disassembling the entire valve island assembly, making the repair and maintenance of the vacuum pump unit 2 more convenient. Furthermore, the method of uniformly feeding positive pressure gas and uniformly feeding negative pressure gas is adopted, so that each vacuum pump unit 2 does not need to be additionally provided with positive pressure gas and negative pressure gas intake components (such as air pipes, etc.), which is conducive to reducing the cost of the vacuum pump system.

[0033] As another preferred embodiment of the present invention, a connecting member 52 is disposed transversely through the first mounting seat 5, the second mounting seat 6 and the base 1 to achieve a detachable connection between the first mounting seat 5, the second mounting seat 6 and the base 1. Figure 3 As shown, the expansion function of the base 1 of the vacuum pump system is realized by detachably arranging a plurality of bases 1 between the first mounting seat 5 and the second mounting seat 6. When the number of bases 1 needs to be increased, the connector 52 is loosened and taken out. After the required number of bases 1 is increased, the first mounting seat 5, the second mounting seat 6 and the base 1 are fastened with the connector 52. At the same time, the arrangement of the cover plate 19 facilitates the configuration of the spare base 1, so as to facilitate the customer to expand the vacuum pump unit 2, such as Figure 3 and Fig.24 For example, when N vacuum pump units 2 are needed, N+1 bases 1 are assembled between the first mounting seat 5 and the second mounting seat 6, and a cover plate 19 is installed on one of the bases 1. When the N+1th base 1 needs to be activated, the cover plate 19 only needs to be removed and the vacuum pump unit 2 can be plugged into the spare base 1. Of course, two or more spare bases 1 can also be provided, that is, two or more bases 1 with cover plates 19 can be configured.

[0034] In a further embodiment, Figure 3 As shown, a first sealing ring 18 is provided between the first mounting seat 5 and the base 1, between adjacent bases 1, and between the base 1 and the second mounting seat 6. The first sealing ring 18 is provided to prevent leakage of gas in the first confluence channel 110 and the second confluence channel 120.

[0035] As another preferred embodiment of the present invention, a plug part is provided at the bottom of the vacuum pump unit 2, and a socket matched with the plug part is provided at the base 1, and the plug part is plugged and matched with the socket to realize the connection between the vacuum pump unit 2 and the base 1; a latch 8 matched with the plug part for locking is slidably provided in the base 1, and the latch 8 can slide between a first position and a second position relative to the base 1; when the latch 8 is in the first position, the latch 8 locks the plug part, so that the vacuum pump unit 2 is fixedly connected to the base 1; when the latch 8 is in the second position, the latch 8 releases the lock on the plug part, so that the vacuum pump unit 2 and the base 1 are released from the fixed connection. The plug part includes a first plug part 24, a second plug part 25 and a third plug part 26 arranged at the bottom of the vacuum pump unit 2, and the socket includes a first socket 16 corresponding to the first plug part 24 and a second socket 17 corresponding to the third plug part 26; the side edge of the bottom of the first plug part 24 is provided with a locking groove 241 arranged along the sliding direction of the latch 8, and the latch 8 is provided with a first locking hole 81 that is locked with the locking groove 241; the second plug part 25 is provided with a locking buckle 251, and the latch 8 is provided with a second locking hole 82 that is locked with the locking buckle 251; the bottom side wall of the third plug part 26 is provided with a third locking hole 261, and the latch 8 is provided with a locking tongue 83 that is locked with the third locking hole 261.

[0036] In this embodiment, if Figures 16 to 18 and Fig.23As shown, the latch 8 can slide between the first position and the second position of the base 1 relative to the base 1. When the latch 8 is in the first position, the locking buckle 251 is inserted into the second locking opening 82 to achieve locking cooperation, and the first plug part 24 slides into the small end 812 of the first locking opening 81 to achieve locking cooperation between the locking groove 241 and the small end 812. The locking tongue 83 is inserted into the third locking opening 261 to achieve locking cooperation, thereby achieving a fixed connection between the vacuum pump unit 2 and the base 1. , at this time, the vacuum pump unit 2 cannot be removed from the base 1; when it is necessary to move the latch 8 from the first position to the second position, the latch 8 is pulled forward by the handle 85, so that the locking buckle 251 is disengaged from the second locking opening 82, the locking groove 241 slides into the large opening 811 of the first locking opening 81, and the locking tongue 83 is disengaged from the third locking opening 261, so as to release the fixed connection between the vacuum pump unit 2 and the base 1, and the vacuum pump unit 2 can be removed from the base 1.

[0037] In a further embodiment, the second plug portion 25 is provided with two locking buckles 251 that cooperate with the second locking opening 82, the two locking buckles 251 both extend forward relative to the second plug portion 25, a gap 2511 is formed between the two locking buckles 251 for the locking buckles 251 to deform, and the surfaces of the two locking buckles 251 that are separated from each other are provided with protrusions 2512, and the protrusions 2512 are provided with guide slopes 2513 and locking slopes 2514 that respectively cooperate with the second locking opening 82. Fig.19 and Fig.23 As shown, the setting of the gap 2511 reserves deformation space for the deformation of the locking buckle 251. When the locking buckle 251 is inserted into the second locking opening 82, the two locking buckles 251 approach each other, so that the protrusion 2512 can enter the second locking opening 82. After entering the second locking opening 82, the locking buckle 251 recovers under the action of its own elastic force to achieve the locking function. The setting of the guide slope 2513 facilitates the locking buckle 251 to drive the protrusion 2512 to insert into the second locking opening 82, and the setting of the locking slope 2514 is used for locking with the second locking opening 82. In a further embodiment, the inclination angle of the locking slope 2514 is larger than the inclination angle of the guide slope 2513, so that the locking slope 2514 can achieve locking with the second locking opening 82, so that the latch 8 remains in a state of locking with the locking buckle 251.

[0038] In a further embodiment, the first locking opening 81 includes a large opening end 811 for the first plug portion 24 to enter and a small opening end 812 for locking with the first plug portion 24. Fig.17 , Fig.18 and Fig.23As shown, when the vacuum pump unit 2 needs to be locked with the base 1, the first plug part 24 enters through the large mouth end 811, and moves the latch 8 from the second position of the base 1 to the first position of the base 1. At this time, the first plug part 24 slides into the small mouth end 812, and the locking groove 241 forms a locking fit at the small mouth end 812; when the vacuum pump unit 2 needs to be disengaged from the locking fit with the base 1, the first plug part 24 slides from the small mouth end 812 into the large mouth end 811, so that the first plug part 24 can be pulled out from the large mouth end 811.

[0039] In a further embodiment, a cover plate 19 is further included. When the vacuum pump unit 2 is not required to be provided on the base 1, the first gas port 11 and the second gas port 13 of the base 1 are blocked by the cover plate 19. A first blocking block 191 corresponding to the first gas port 11 and a second blocking block 192 corresponding to the second gas port 13 are provided at the bottom of the cover plate 19. Fig.15 and Fig.24 As shown, the provision of the cover plate 19 facilitates the configuration of the spare base 1, so as to facilitate the customer to expand the vacuum pump unit 2. For example, when N vacuum pump units 2 are needed, N+1 bases 1 are assembled between the first mounting seat 5 and the second mounting seat 6, and the cover plate 19 is installed on one of the bases 1. When the N+1th base 1 needs to be activated, it is only necessary to remove the cover plate 19 and plug the vacuum pump unit 2 into the spare base 1. Of course, two or more spare bases 1 can also be provided, that is, two or more bases 1 with cover plates 19 are configured. In this embodiment, the detachable connection mechanism between the cover plate 19 and the base 1 is the same as the detachable connection mechanism between the vacuum pump unit 2 and the base 1, which will not be repeated here.

[0040] In a further embodiment, Figure 3 As shown, a second sealing ring 1911 is provided between the first block 191 and the first gas port 11, and a third sealing ring 1921 is provided between the second block 192 and the second gas port 13. The provision of the second sealing ring 1911 increases the sealing performance between the first gas port 11 and the first block 191; the provision of the third sealing ring 1921 increases the sealing performance between the second gas port 13 and the second block 192.

[0041] As another preferred embodiment of the present invention, the vacuum pump unit 2 also includes an equipment main body module 27, a valve assembly module 28 and a pressure gauge module 29, the pressure gauge module 29 and the valve assembly module 28 are both installed on the equipment main body module 27, the air-controlled valve unit 3 and the control valve unit 4 are both arranged in the valve assembly module 28, the air-controlled valve unit 3 includes a vacuum valve 31 and a piercing valve 32, the control valve unit 4 includes a vacuum pilot valve 41 for controlling the operation of the vacuum valve 31 and a piercing pilot valve 42 for controlling the operation of the piercing valve 32; the equipment main body module 27 is provided with a working port 271 connected to both the negative pressure airway 211 and the positive pressure airway 221. The control valve unit 4 is respectively provided with a pilot converging channel 43, a vacuum control air channel 44 and a breaking air control air channel 45, the pilot converging channel 43 is respectively connected with the vacuum pilot valve 41 and the breaking air pilot valve 42, the vacuum control air channel 44 is respectively connected with the vacuum pilot valve 41 and the vacuum valve 31, and the breaking air control air channel 45 is respectively connected with the breaking air pilot valve 42 and the breaking air valve 32; the air control valve unit 3 is respectively provided with a seventh air port 311 and an eighth air port 312 corresponding to the vacuum valve 31, and a ninth air port 321 and a tenth air port 322 corresponding to the breaking air valve 32, the ninth air port 321 is always connected with the pilot converging channel 43; the seventh air port 311 and the eighth air port 312 are both connected with the negative pressure air channel 211, and the ninth air port 321 and the tenth air port 322 are both connected with the positive pressure air channel 221. The negative pressure airway 211 includes a first negative pressure airway 2111 and a second negative pressure airway 2112, the first negative pressure airway 2111 is respectively connected to the seventh air port 311 and the fourth air port 22, and the second negative pressure airway 2112 is respectively connected to the eighth air port 312 and the working port 271; the positive pressure airway 221 includes a first positive pressure airway 2211 and a second positive pressure airway 2212, the first positive pressure airway 2211 is respectively connected to the ninth air port 321 and the third air port 21, and the second positive pressure airway 2212 is respectively connected to the tenth air port 322 and the working port 271. The air-controlled valve unit 3 also includes an air-controlled valve body 33, in which a partition 331 is provided, and the partition 331 divides the inner cavity of the air-controlled valve body 33 into an upper mounting cavity and a lower mounting cavity. The vacuum valve 31 is provided in the upper mounting cavity, and the air-breaking valve 32 is provided in the lower mounting cavity. A valve stem A313 is movably provided in the vacuum valve 31, and a valve stem A upper cavity is provided between the upper end surface of the valve stem A313 and the air-controlled valve body 33, and the valve stem A valve stem A lower cavity is provided between the lower end surface of A313 and the partition 331, a valve stem B323 is movably provided in the air-breaking valve 32, a valve stem B upper cavity is provided between the upper end surface of the valve stem B323 and the partition 331, a valve stem B lower cavity is provided between the lower end surface of the valve stem B323 and the air-controlled valve body 33, the vacuum control airway 44 is connected with the valve stem A upper cavity, and the air-breaking control airway 45 is connected with both the valve stem A lower cavity and the valve stem B upper cavity.The vacuum pump unit 2 further includes a throttle valve 274 , which is disposed on the second positive-pressure air passage 2212 and located between the tenth air port 322 and the working port 271 . The positive-pressure gas flowing out of the piercing valve 32 reaches the working port 271 after being throttled by the throttle valve 274 .

[0042] In this embodiment, the air-breaking valve 32 is provided with a reset spring B for controlling the reset of the valve stem B323. It should be noted that the valve stem A313 can also achieve the reset function by moving upward under the action of air pressure. Therefore, the user can selectively assemble the reset spring A for resetting the valve stem A313 according to their actual needs. When the user chooses not to assemble the reset spring A in the lower cavity of the valve stem A, the vacuum pump unit 2 has a power-off retention function. Specifically, after the suction cup installed at the working port 271 adsorbs the product and there is a sudden power outage during the transportation process, the valve stem A313 will not automatically reset, but will always remain in the current position. At this time, the suction cup will always remain in the working state of adsorbing the product and will not release the product. This function helps to protect the adsorbed product and prevent the adsorbed product from being released during transportation due to power outage and causing damage.

[0043] The valve island type vacuum pump system described in the present invention can realize multiple functions, such as using negative pressure gas to draw a vacuum and using positive pressure gas to break the air. Through modular design, the overall structure becomes more compact, thereby saving installation space and facilitating installation and subsequent maintenance work. The connections between the various components are tighter, reducing the possibility of leakage, and can achieve efficient collaborative work. It can not only use negative pressure gas to draw a vacuum to achieve the required vacuum degree, but also quickly break the vacuum state when needed and restore to a normal atmospheric pressure environment. This vacuum pump system can meet the diverse needs under complex working conditions, thereby significantly improving work efficiency.

[0044] In this embodiment, the vacuum valve 31 and the air-breaking valve 32 are both two-position two-way air-controlled valves, and the vacuum pilot valve 41 and the air-breaking pilot valve 42 are both two-position three-way solenoid valves. The seventh air port 311 of the vacuum valve 31 is connected to the fourth air port 22 through the first negative pressure airway 2111, and the eighth air port 312 of the vacuum valve 31 is connected to the working port 271 through the second negative pressure airway 2112; the ninth air port 321 of the air-breaking valve 32 is connected to the third air port 21 through the first positive pressure airway 2211, and the tenth air port 322 of the air-breaking valve 32 is connected to the working port 271 through the second positive pressure airway 2212.

[0045] Working process: Negative pressure gas enters through the sixth gas port 62, passes through the fourth gas channel 621, the second confluence channel 120, the second gas port 13, the fourth gas port 22 and the first negative pressure gas channel 2111 to reach the seventh gas port 311 of the vacuum valve 31, as shown in FIG. Figure 7 and Figure 8 As shown; the positive pressure gas source enters through the fifth gas port 61, through the third gas channel 611, the first confluence channel 110, the first gas port 11, the third gas port 21 and the first positive pressure gas channel 2211 to reach the ninth gas port 321 of the air-breaking valve 32, as Fig. 9 When the vacuum valve 31 needs to work, the vacuum pilot valve 41 works, so that the vacuum control airway 44 is opened, and the valve stem A313 moves downward, as shown in FIG. Fig.11 and Fig.12 As shown, the eighth gas port 312 of the vacuum valve 31 is connected to the seventh gas port 311, and the negative pressure gas is connected to the working port 271 through the second negative pressure gas channel 2112. Figure 7 and Figure 8 As shown; at this time, the valve stem B323 does not move, and the air-breaking valve 32 does not work. When the air-breaking valve 32 needs to work, the air-breaking pilot valve 42 controls the air-breaking control airway 45 to open, the valve stem A313 moves up, and the valve stem B323 moves down, as shown. Fig.13 As shown, the vacuum valve 31 is not working, the tenth gas port 322 of the air-breaking valve 32 is connected with the ninth gas port 321, and the positive pressure gas from the tenth gas port 322 reaches the working port 271 after being throttled by the throttle valve 274 to break through the air and discharge. Fig.10 When the air breaking control air passage 45 is closed, the valve stem B323 is reset under the action of the reset spring B.

[0046] In a further embodiment, the vacuum valve 31 is provided with a vacuum manual lever 314, and the air-breaking pilot valve 42 is provided with an air-breaking manual lever 421. In an initial state, the seventh air port 311 of the vacuum valve 31 is not connected to the eighth air port 312. When the vacuum manual lever 314 is pressed, the seventh air port 311 of the vacuum valve 31 is connected to the eighth air port 312; in an initial state, the ninth air port 321 of the air-breaking valve 32 is not connected to the tenth air port 322. When the air-breaking manual lever 421 is pressed, the ninth air port 321 of the air-breaking valve 32 is connected to the tenth air port 322. By providing the vacuum manual lever 314 and the air-breaking manual lever 421, both electrical control and manual control can be achieved. In the event of insufficient power supply or failure, the user can perform manual control operations to ensure the normal operation of the equipment. The dual control method greatly improves the reliability and flexibility of the equipment. In this embodiment, Fig.18As shown, since the vacuum pump unit 2 is a sheet-like structure, and in order to make the structure of the vacuum pump unit 2 compact, the vacuum manual lever 314 is arranged on the vacuum valve 31. The specific structures of the vacuum pilot valve 41, the air-breaking pilot valve 42 and the air-breaking manual lever 421 can refer to a solenoid control valve disclosed in a Chinese invention patent application (publication number: CN110657276A). In view of the fact that the basic structures / principles of the vacuum pilot valve 41, the air-breaking pilot valve 42 and the air-breaking manual lever 421 have been disclosed in detail in the prior art, they will not be described in detail in this embodiment.

[0047] In a further embodiment, the valve assembly module 28 is provided with a first wedge-shaped positioning block 281 and a second wedge-shaped positioning block 282, and the equipment main body module 27 is provided with a first wedge-shaped positioning groove 272 corresponding to the first wedge-shaped positioning block 281 and a second wedge-shaped positioning groove 273 corresponding to the second wedge-shaped positioning block 282. The valve assembly module 28 is quickly positioned with the equipment main body module 27 by the cooperation between the first wedge-shaped positioning block 281 and the first wedge-shaped positioning groove 272, and the cooperation between the second wedge-shaped positioning block 282 and the second wedge-shaped positioning groove 273, and then the valve assembly module 28 is fixedly installed to the equipment main body module 27 by a bolt, so that the valve assembly module 28 can be quickly and conveniently fixedly installed to the equipment main body module 27. In addition, in the process of tightening the bolts, the first wedge-shaped positioning block 281 and the first wedge-shaped positioning groove 272, and the second wedge-shaped positioning block 282 and the second wedge-shaped positioning groove 273 are gradually wedged, so that the connection between the valve assembly module 28 and the equipment main body module 27 is tight and stable.

[0048] In a further embodiment, the pressure gauge module 29 is provided with a pressure sensor 291, and the detection end of the pressure sensor 291 extends into the second negative pressure airway 2112 to detect the negative pressure data in the second negative pressure airway 2112. Figure 8 As shown, by providing a pressure sensor 291, it is beneficial to realize the energy-saving function of the vacuum pump unit 2. Specifically, the pressure sensor 291 detects the negative pressure data in the second negative pressure airway 2112, and after comparing the pressure value with the preset pressure range, the vacuum pilot valve 41 is switched between the on and off states, so that the negative pressure value in the second negative pressure airway 2112 is maintained within a preset and stable range, preventing the adsorbed objects from falling and greatly reducing the gas consumption.

[0049] In this embodiment, if Fig.10As shown, the positive pressure gas flowing out of the tenth air port 322 of the air-breaking valve 32 passes through the throttle of the throttle valve 274 and reaches the working port 271 through the second positive pressure air channel 2212 to break the air and discharge the gas. The setting of the throttle valve 274 can adjust the flow rate of the air-breaking gas, thereby avoiding the blowing away of the product due to the large air-breaking flow when adsorbing small products.

[0050] As another preferred embodiment of the present invention, a filter device 275 is provided at the working port 271, and the filter device 275 is detachably mounted on the vacuum pump unit 2 using a snap-fit ​​structure 2751. Figure 3 and Fig. 20 As shown, the filter device 275 is arranged between the working port 271 and the second negative pressure airway 2112 to filter the gas inhaled by the working port 271. In a further embodiment, an elastic sheet is arranged on the filter device 275, a buckle 2752 is arranged on the elastic sheet, and a card slot 2753 that is engaged with the buckle 2752 is arranged on the device main body module 27. A plug-in portion is arranged at the bottom of the filter device 275, and the device main body module 27 is provided with a plug-in slot for inserting the plug-in portion. When installing the filter device 275, the plug-in portion is inserted into the plug-in slot, and the buckle 2752 is inserted into the card slot 2753. The detachable installation of the filter device 275 is realized by the engagement of the buckle 2752 with the card slot 2753, which is convenient for replacing the filter device 275.

[0051] Obviously, the above embodiments are merely examples for clear explanation, and are not intended to limit the implementation methods. For those skilled in the art, other different forms of changes or modifications can be made based on the above description. It is not necessary and impossible to list all the implementation methods here. The obvious changes or modifications derived from them are still within the protection scope of the present invention.

Claims

1. A valve island type vacuum pump system, characterized in that: include: A plurality of bases (1), wherein the plurality of bases (1) are stacked along an X-axis direction, wherein the bases (1) are provided with a first air port (11), a first air channel (12) connected to the first air port (11), a second air port (13), and a second air channel (14) connected to the second air port (13); after the adjacent bases (1) are stacked, the positions of the first air channels (12) correspond to each other and are connected to each other to form a first confluence channel (110); the positions of the second air channels (14) correspond to each other and are connected to each other to form a second confluence channel (120); and the first confluence channel (110) and the second confluence channel (120) are arranged to be separated from each other; A plurality of vacuum pump units (2) corresponding to the bases (1) are provided, each of the vacuum pump units (2) being removably plugged into and matched with the corresponding base (1) so that a mechanical connection and an electrical connection are formed between the two. The vacuum pump unit (2) comprises an air control valve unit (3) and a control valve unit (4) connected to the air control valve unit (3). The vacuum pump unit (2) is provided with a third air port (21) corresponding to the first air port (11) and a fourth air port (22) corresponding to the second air port (13). The vacuum pump unit (2) is provided with a negative pressure air channel (211) connected to the third air port (21) and a positive pressure air channel (221) connected to the fourth air port (22). Both the negative pressure air channel (211) and the positive pressure air channel (221) are connected to the air control valve unit (3).

2. A valve island type vacuum pump system according to claim 1, characterized in that: A circuit board A (15) is arranged inside each of the bases (1), and the circuit board A (15) is respectively provided with a first electrical signal plug interface (151), a second electrical signal plug interface (152) and a third electrical signal plug interface (153), wherein any two adjacent bases (1) are plugged in and matched with each other through the corresponding first electrical signal plug interface (151) and the second electrical signal plug interface (152), so as to realize an electrical connection between the two adjacent bases (1); a circuit board B (23) is arranged inside the vacuum pump unit (2), and the circuit board B (23) is provided with a fourth electrical signal plug interface (231) plugged in and matched with the third electrical signal plug interface (153), so as to realize an electrical connection between the vacuum pump unit (2) and the base (1).

3. A valve island type vacuum pump system according to claim 2, characterized in that: The invention also comprises a first mounting seat (5) and a second mounting seat (6), wherein a plurality of the bases (1) are connected in series between the first mounting seat (5) and the second mounting seat (6) along the X-axis direction, wherein the first mounting seat (5) is provided with a circuit board C (51), wherein the circuit board C (51) is provided with a fifth electrical signal plug interface (511), and the fifth electrical signal plug interface (511) is plugged into and matched with a first electrical signal plug interface (151) of the base (1) located at the outermost side, so as to realize electrical connection between the first mounting seat (5) and the base (1) at the outermost side.

4. A valve island type vacuum pump system according to claim 3, characterized in that: The first mounting seat (5) and / or the second mounting seat (6) are provided with a fifth air port (61) and a third air channel (611) for connecting the fifth air port (61) with the first confluence channel (110); the first mounting seat (5) and / or the second mounting seat (6) are provided with a sixth air port (62) and a fourth air channel (621) for connecting the sixth air port (62) with the second confluence channel (120).

5. A valve island type vacuum pump system according to claim 3, characterized in that: The device further comprises a control box (7), the control box (7) being fixedly connected to the first mounting seat (5), a circuit board D (71) being arranged inside the control box (7), the circuit board D (71) being provided with a sixth electrical signal plug interface (711), and the circuit board C (51) being provided with a seventh electrical signal plug interface (512) which is plugged and matched with the sixth electrical signal plug interface (711), so as to realize electrical connection between the control box (7) and the first mounting seat (5).

6. A valve island type vacuum pump system according to claim 1, characterized in that: The bottom of the vacuum pump unit (2) is provided with a plug portion, and the base (1) is provided with a socket that cooperates with the plug portion, and the plug portion and the socket are plugged and cooperated to realize the connection between the vacuum pump unit (2) and the base (1); a latch (8) that cooperates with the plug portion for locking is slidably provided in the base (1), and the latch (8) can slide between a first position and a second position relative to the base (1); when the latch (8) is in the first position, the latch (8) locks the plug portion, so that the vacuum pump unit (2) and the base (1) are fixedly connected; when the latch (8) is in the second position, the latch (8) releases the locking of the plug portion, so that the vacuum pump unit (2) and the base (1) are released from the fixed connection.

7. A valve island type vacuum pump system according to claim 6, characterized in that: The plug portion comprises a first plug portion (24), a second plug portion (25) and a third plug portion (26) which are arranged at the bottom of the vacuum pump unit (2); the socket comprises a first socket (16) corresponding to the first plug portion (24) and a second socket (17) corresponding to the third plug portion (26); a side edge of the bottom of the first plug portion (24) is provided with a locking groove (241) arranged along the sliding direction of the lock latch (8); the lock latch (8) is provided with a first locking opening (81) which is locked with the locking groove (241); the second plug portion (25) is provided with a locking buckle (251); the lock latch (8) is provided with a second locking opening (82) which is locked with the locking buckle (251); a side wall of the bottom of the third plug portion (26) is provided with a third locking opening (261); the lock latch (8) is provided with a locking tongue (83) which is locked with the third locking opening (261).

8. The valve island type vacuum pump system according to claim 1, characterized in that: The vacuum pump unit (2) further comprises an equipment main body module (27), a valve assembly module (28) and a pressure gauge module (29); the pressure gauge module (29) and the valve assembly module (28) are both mounted on the equipment main body module (27); the air control valve unit (3) and the control valve unit (4) are both arranged in the valve assembly module (28); the air control valve unit (3) comprises a vacuum valve (31) and a piercing valve (32); the control valve unit (4) comprises a vacuum pilot valve (41) for controlling the operation of the vacuum valve (31) and a piercing pilot valve (42) for controlling the operation of the piercing valve (32); the equipment main body module (27) is provided with a working port (271) which is in communication with both the negative pressure airway (211) and the positive pressure airway (221).

9. A valve island type vacuum pump system according to claim 8, characterized in that: The control valve unit (4) is provided with a pilot converging channel (43), a vacuum control air channel (44) and a piercing air control air channel (45), respectively; the pilot converging channel (43) is respectively connected to the vacuum pilot valve (41) and the piercing air pilot valve (42), the vacuum control air channel (44) is respectively connected to the vacuum pilot valve (41) and the vacuum valve (31), and the piercing air control air channel (45) is respectively connected to the piercing air pilot valve (42) and the piercing air valve (32); the air control valve unit (3) A seventh air port (311) and an eighth air port (312) are respectively provided on the valve body, which are matched with the vacuum valve (31), and a ninth air port (321) and a tenth air port (322) are respectively matched with the air-breaking valve (32). The ninth air port (321) is always connected to the pilot converging channel (43); the seventh air port (311) and the eighth air port (312) are both connected to the negative pressure air channel (211), and the ninth air port (321) and the tenth air port (322) are both connected to the positive pressure air channel (221).

10. A valve island type vacuum pump system according to claim 9, characterized in that: The air-controlled valve unit (3) further comprises an air-controlled valve body (33), wherein a partition (331) is provided in the air-controlled valve body (33), wherein the partition (331) divides the inner cavity of the air-controlled valve body (33) into an upper mounting cavity and a lower mounting cavity, wherein the vacuum valve (31) is provided in the upper mounting cavity, and the air-breaking valve (32) is provided in the lower mounting cavity, wherein a valve stem A (313) is movably provided in the vacuum valve (31), and an upper cavity of the valve stem A is provided between the upper end surface of the valve stem A (313) and the air-controlled valve body (33), A valve stem A lower cavity is provided between the lower end surface of the valve stem A (313) and the partition plate (331); a valve stem B (323) is movably provided in the air-breaking valve (32); a valve stem B upper cavity is provided between the upper end surface of the valve stem B (323) and the partition plate (331); a valve stem B lower cavity is provided between the lower end surface of the valve stem B (323) and the air-controlled valve body (33); the vacuum control airway (44) is connected to the valve stem A upper cavity; and the air-breaking control airway (45) is connected to both the valve stem A lower cavity and the valve stem B upper cavity.

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