High-purity silicon material drying device and drying method

Abstract

The invention discloses a high-purity silicon material drying device which comprises a box body and two material frames, the two material frames slide in the box body in a staggered mode, the tops of the opposite sides of the two material frames are fixedly connected with tooth plates, and the high-purity silicon material drying device relates to the technical field of silicon material processing. According to the high-purity silicon material drying device and the drying method, the two material frames are arranged on the whole device, each material frame is divided into two areas, namely the drying area and the to-be-dried area through the corresponding partition plate, the two areas can be switched, during drying, feeding can be conducted in the to-be-dried areas, and after alternate switching, dried silicon materials can be discharged; and when the high-purity silicon materials are dried, the stirring rods on the two sides of the box body can stir and disperse the silicon materials on the screening frame, the silicon materials make full contact with hot air in the box body, drying is more uniform, and the quality of the high-purity silicon materials is improved.

Description

Technical Field

[0001] The invention relates to the technical field of silicon material processing, and in particular to a high-purity silicon material drying device and a drying method. Background Art

[0002] The silicon chemical industry is a rapidly developing emerging industry, mainly using quartz sand as raw material. The industries involved include: rubber, coatings, plastics, metallurgy, washing, welding, construction, medicine, feed, catalysis, etc. It has many related products and its products are widely used. It is an indispensable raw material for modern industry and high-tech industry. According to market survey, the domestic market demand for silicon series products increases at a rate of 10% every year, and the development prospect is broad. Silicon is an important semiconductor material, with the chemical element symbol Si. The silicon used in the electronics industry should have high purity and excellent electrical and mechanical properties. Silicon is the semiconductor material with the largest output and the widest application. Its output and usage mark a The electronic industry level of a country, the electroactive impurities phosphorus and boron in qualified semiconductors and polysilicon should be lower than 0.4ppb and 0.1ppb respectively. When pulling single crystals, a certain amount of electroactive impurities should be added to obtain the required conductivity type and resistivity. Heavy metals such as copper, gold, iron and non-metallic carbon are extremely harmful impurities. Their presence will deteriorate the performance of the PN junction. The carbon content in silicon is relatively high. Those below 1ppm can be considered as low-carbon single crystals. When the carbon content exceeds 3ppm, its harmful effects are already significant. The oxygen content in silicon is very high. The presence of oxygen is both beneficial and harmful. The oxygen content of CZ silicon single crystals is in the range of 5 to 40ppm; the oxygen content of zone-melting silicon single crystals can be lower than 1ppm.

[0003] During the processing of high-purity silicon materials, they need to be dried. In the existing drying process, the stockpiling of silicon materials will affect the uniformity and efficiency of drying, and also affect the quality of the finished product. In addition, the loading and unloading of silicon materials will consume a certain amount of manpower and time, which will increase the overall drying time and reduce the efficiency of the drying process of high-purity silicon materials. In addition, the particle size of silicon materials is inconsistent. Traditional drying processes require further screening after drying, which increases the processing steps. Summary of the invention

[0004] In view of the deficiencies in the prior art, the present invention provides a high-purity silicon material drying device and a drying method, which solve the problems mentioned in the above background technology.

[0005] To achieve the above objectives, the present invention is implemented through the following technical solutions: a high-purity silicon material drying device, comprising a box body and a material frame, wherein two material frames are provided and slide inside the box body in a staggered manner, a toothed plate is fixedly connected to the top of the two material frames on opposite sides, and a U-shaped frame is fixedly connected to the top of the box body, a first motor is fixedly connected to the top of the U-shaped frame, and a first gear meshing with the toothed plate is fixedly connected to the output end of the first motor;

[0006] A U-shaped plate is fixedly connected to the top of both sides of the box body, and a second motor is fixedly connected to one side of the U-shaped plate, a bidirectional threaded rod is fixedly connected to the output end of the second motor, and sliders are threadedly connected to the two sides of the surface of the bidirectional threaded rod, the bottom of the slider is fixedly connected to the outer frame through a vertical rod, and a horizontal plate is fixedly connected between the two sides of the inner wall of the outer frame, a stirring rod is rotatably connected to the inside of the horizontal plate, and a stirring rod is fixedly connected to the surface of the stirring rod, a second gear is fixedly connected to the surface of one end of the stirring rod, and a pulley is fixedly connected to one side of the second gear, the surface of the pulley is connected through a belt drive, a third motor is fixedly connected to both sides of the box body, and a gear column meshing with the second gear is fixedly connected to the output end of the third motor.

[0007] Preferably, the bottom end of the vertical rod passes through the box body and extends to the inside of the box body, and through grooves adapted to the vertical rod are provided on both sides of the top of the box body.

[0008] Preferably, movable grooves adapted to the material frame are provided on both sides of the interior of the box body, and pulleys are fixedly connected to both sides of the bottom of the material frame, and slide grooves adapted to the pulleys are provided inside the box body and on both sides of the bottom of the movable grooves.

[0009] Preferably, the outer frame is located inside the box body, and the top and bottom of the outer frame are fixedly connected with movable blocks, the surface of the movable blocks is slidably connected to the inner wall of the box body, the number of horizontal plates on the outer frame is four, and the gear column is located at the center of the outer frame.

[0010] Preferably, a partition is fixedly connected between the top and the bottom of the inner wall of the material frame, and a screening frame is slidably connected between one side of the partition and the side opposite to the inner wall of the material frame, a material receiving frame is slidably connected to the bottom of the screening frame, and a slide plate adapted to the screening frame is fixedly connected to one side of the partition and one side of the inner wall of the material frame.

[0011] Preferably, both sides of the top of the material receiving frame are fixedly connected with T-shaped plates, and both sides of the bottom of the screening frame are fixedly connected with movable plates adapted to the T-shaped plates, and the number of screening frames on the single material frame is set to eight.

[0012] Preferably, a hot air blower is fixedly connected to the surface of the box, and the air outlet of the hot air blower is connected to an air outlet duct, one end of the air outlet duct passes through the box and extends to the interior of the box, and both sides of the surface of one end of the air outlet duct extending to the interior of the box are connected to horizontal pipes.

[0013] The present invention also discloses a drying method of a high-purity silicon material drying device, which specifically comprises the following steps:

[0014] S1. Place the silicon material to be dried on the top of the screening frame, and then slide it into the slide inside the material frame;

[0015] S2. Start the first motor through an external switch, the first motor drives the first gear to rotate, the first gear drives the tooth plate to move, and the two material frames move alternately. When moving, the pulley at the bottom of the material frame slides inside the chute;

[0016] S3. At this time, the silicon material to be dried can be added to the screening frame of the material frame exposed outside the box, and the hot air blower is started by an external switch. The hot air is blown to the silicon material on the screening frame through the air outlet pipe and the cross pipe to dry the silicon material;

[0017] S4, start the second motor, the second motor drives the bidirectional threaded rod to rotate, the slider on the surface of the bidirectional threaded rod will move relatively, the slider drives the outer frame inside the box to move relatively through the vertical rod, so that the stirring rod moves to the top of the screening frame;

[0018] S5, start the third motor through an external switch, and the third motor drives the gear column to rotate, the rotation of the gear column drives the second gear to rotate, and the stirring rods on the four horizontal plates are driven to rotate simultaneously through the transmission of the pulley and the mutual engagement between the second gears, and the stirring rods turn over and disperse the silicon material on the screening frame, and the screened material falls into the receiving frame;

[0019] S6. After the drying is completed, the first motor is started again, the first motor is reversed, and the position of the material frame is switched, so that the material can be unloaded and the next wave of drying operations can be carried out.

[0020] The present invention provides a high-purity silicon material drying device and drying method. Compared with the prior art, the present invention has the following beneficial effects:

[0021] (1) The high-purity silicon material drying device and drying method are characterized in that a U-shaped plate is fixedly connected to the top of both sides of the box body, and a second motor is fixedly connected to one side of the U-shaped plate, the output end of the second motor is fixedly connected to a bidirectional threaded rod, and both sides of the surface of the bidirectional threaded rod are threadedly connected to sliders, the bottom of the slider is fixedly connected to an outer frame through a vertical rod, and a horizontal plate is fixedly connected between the two sides of the inner wall of the outer frame, a stirring rod is rotatably connected inside the horizontal plate, and a stirring rod is fixedly connected to the surface of the stirring rod, a second gear is fixedly connected to the surface of one end of the stirring rod, and a pulley is fixedly connected to one side of the second gear, and the surface of the pulley is connected through a belt drive, a third motor is fixedly connected to both sides of the box body, and a gear column meshing with the second gear is fixedly connected to the output end of the third motor, two material frames are arranged on the device as a whole, and the material frame itself is divided into two areas by a partition, namely a drying area and a waiting area, and the two areas can be switched. When drying, the waiting area can be loaded, and after alternating switching, the dried silicon material can be unloaded, thereby facilitating re-loading, saving loading and unloading time, and improving the overall processing efficiency.

[0022] (2) The high-purity silicon material drying device and drying method are characterized in that a stirring rod is connected to the inside of the horizontal plate through internal rotation, and a stirring rod is fixedly connected to the surface of the stirring rod, a second gear is fixedly connected to the surface of one end of the stirring rod, and a pulley is fixedly connected to one side of the second gear, a partition is fixedly connected between the top and the bottom of the inner wall of the material frame, and a screening frame is slidably connected between one side of the partition and the side opposite to the inner wall of the material frame, a material receiving frame is slidably connected to the bottom of the screening frame, one side of the partition and one side of the inner wall of the material frame are fixedly connected with a slide plate adapted to the screening frame, both sides of the top of the material receiving frame are fixedly connected with a T-shaped plate, and both sides of the bottom of the screening frame are fixedly connected with The movable plate is matched with the T-plate, and there are eight screening frames on a single material frame. When the high-purity silicon material is drying, the stirring rods on both sides of the box can stir and disperse the silicon material on the screening frame, so that it can fully contact with the hot air inside the box, and the drying is more uniform, thereby improving the quality of the high-purity silicon material. While the stirring rod is dispersing the silicon material, the setting of the gear column allows the stirring rod to disperse and screen the silicon material in a rotating manner. The receiving frame at the bottom of the screening frame receives the screened silicon material, reducing the step of screening by another device after drying in the traditional processing method. The integrated operation improves the overall processing efficiency and saves the overall drying processing time. BRIEF DESCRIPTION OF THE DRAWINGS

[0023] Figure 1 A three-dimensional diagram of the structure of the present invention;

[0024] Figure 2 It is a three-dimensional diagram of the box structure of the present invention;

[0025] Figure 3It is a structural schematic diagram of the material frame of the present invention;

[0026] Figure 4 is a three-dimensional diagram of the stirring rod structure of the present invention;

[0027] Figure 5 It is a three-dimensional diagram of the gear column structure of the present invention;

[0028] Figure 6 It is a structural schematic diagram of the outer frame of the present invention;

[0029] Figure 7 It is a schematic diagram of the structure of the screening frame and the material receiving frame of the present invention;

[0030] Figure 8 For the present invention Figure 3 A partial enlarged view of point A in the middle.

[0031] In the figure: 1-box, 2-material frame, 3-tooth plate, 4-U-shaped frame, 5-first motor, 6-first gear, 7-U-shaped plate, 8-second motor, 9-bidirectional threaded rod, 10-slider, 11-vertical rod, 12-outer frame, 13-horizontal plate, 14-stirring rod, 15-stirring rod, 16-second gear, 17-pulley, 18-belt, 19-third motor, 20-gear column, 21-movable groove, 22-pulley, 23-chute, 24-movable block, 25-partition, 26-screening frame, 27-material receiving frame, 28-slide plate, 29-T-shaped plate, 30-movable plate, 31-hot air blower, 32-air outlet pipe, 33-horizontal pipe, 34-through groove. DETAILED DESCRIPTION

[0032] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0033] See also Figure 1-8 The present invention provides a technical solution: a high-purity silicon material drying device, comprising a box body 1 and a material frame 2, wherein two material frames 2 are provided and slide inside the box body 1 in a staggered manner, and a tooth plate 3 is fixedly connected to the top of the two material frames 2 on opposite sides, and a U-shaped frame 4 is fixedly connected to the top of the box body 1, a first motor 5 is fixedly connected to the top of the U-shaped frame 4, and a first gear 6 meshing with the tooth plate 3 is fixedly connected to the output end of the first motor 5;

[0034] A U-shaped plate 7 is fixedly connected to the top of both sides of the box body 1, and a second motor 8 is fixedly connected to one side of the U-shaped plate 7, a bidirectional threaded rod 9 is fixedly connected to the output end of the second motor 8, and sliders 10 are threadedly connected to both sides of the surface of the bidirectional threaded rod 9, the bottom of the slider 10 is fixedly connected to the outer frame 12 through a vertical rod 11, and a horizontal plate 13 is fixedly connected between the two sides of the inner wall of the outer frame 12, a stirring rod 14 is rotatably connected inside the horizontal plate 13, and a stirring rod 15 is fixedly connected to the surface of the stirring rod 14, a second gear 16 is fixedly connected to the surface of one end of the stirring rod 14, and a pulley 17 is fixedly connected to one side of the second gear 16, and the surface of the pulley 17 is connected through a belt 18 for transmission, a third motor 19 is fixedly connected to both sides of the box body 1, and a gear column 20 meshing with the second gear 16 is fixedly connected to the output end of the third motor 19.

[0035] Specifically, the first motor 5 and the second motor 8 are three-phase asynchronous motors that can rotate forward and reverse.

[0036] In the present invention, the bottom end of the vertical rod 11 passes through the box body 1 and extends to the inside of the box body 1 , and through grooves 34 matching with the vertical rod 11 are formed on both sides of the top of the box body 1 .

[0037] In the present invention, movable grooves 21 adapted to the material frame 2 are provided on both sides inside the box body 1, and pulleys 22 are fixedly connected to both sides of the bottom of the material frame 2. Slide grooves 23 adapted to the pulley 22 are provided inside the box body 1 and on both sides at the bottom of the movable grooves 21.

[0038] In the present invention, the outer frame 12 is located inside the box body 1, and the top and bottom of the front and rear of the outer frame 12 are fixedly connected with movable blocks 24, the surface of the movable block 24 is slidably connected to the inner wall of the box body 1, the number of horizontal plates 13 on the outer frame 12 is four, and the gear column 20 is located at the center of the outer frame 12.

[0039] Specifically, there are five stirring rods 14 on each transverse plate 13 , one of which is provided with a pulley 17 , and the gear column 20 is meshed with the second gears 16 on the two middle transverse plates 13 .

[0040] In the present invention, a partition 25 is fixedly connected between the top and the bottom of the inner wall of the material frame 2, and a screening frame 26 is slidably connected between one side of the partition 25 and the side opposite to the inner wall of the material frame 2, and a material receiving frame 27 is slidably connected to the bottom of the screening frame 26, and a slide plate 28 adapted to the screening frame 26 is fixedly connected to one side of the partition 25 and one side of the inner wall of the material frame 2.

[0041] In the present invention, both sides of the top of the material receiving frame 27 are fixedly connected with T-shaped plates 29, and both sides of the bottom of the screening frame 26 are fixedly connected with movable plates 30 adapted to the T-shaped plates 29. There are eight screening frames 26 on a single material frame 2.

[0042] In the present invention, a hot air blower 31 is fixedly connected to the surface of the box body 1, and the air outlet of the hot air blower 31 is connected to an air outlet duct 32. One end of the air outlet duct 32 passes through the box body 1 and extends to the interior of the box body 1. Both sides of the surface of the air outlet duct 32 extending to one end of the interior of the box body 1 are connected to horizontal pipes 33.

[0043] The present invention also discloses a drying method of a high-purity silicon material drying device, which specifically comprises the following steps:

[0044] S1, placing the silicon material to be dried on the top of the screening frame 26, and then sliding it into the slide 28 inside the material frame 2;

[0045] S2. Start the first motor 5 through an external switch, the first motor 5 drives the first gear 6 to rotate, the first gear 6 drives the tooth plate 3 to move, and the two material frames 2 move alternately. When moving, the pulley 22 at the bottom of the material frame 2 slides inside the chute 23;

[0046] S3, at this time, the silicon material to be dried can be added to the screening frame 26 of the material frame 2 exposed outside the box body 1, and the hot air blower 31 is started by an external switch, and the hot air is blown to the silicon material on the screening frame 26 through the air outlet pipe 32 and the cross pipe 33 to dry the silicon material;

[0047] S4, start the second motor 8, the second motor 8 drives the bidirectional threaded rod 9 to rotate, the slider 10 on the surface of the bidirectional threaded rod 9 will move relatively, the slider 10 drives the outer frame 12 inside the box body 1 to move relatively through the vertical rod 11, so that the stirring rod 14 moves to the top of the screening frame 26;

[0048] S5, start the third motor 19 through an external switch, and the third motor 19 drives the gear column 20 to rotate, the rotation of the gear column 20 drives the second gear 16 to rotate, and the stirring rods 14 on the four horizontal plates 13 are driven to rotate simultaneously through the transmission of the pulley 17 and the mutual engagement between the second gear 16, and the stirring rods 15 turn over and disperse the silicon material on the screening frame 26, and the screened material falls into the receiving frame 27;

[0049] S6. After the drying is completed, the first motor 5 is started again, the first motor 5 is reversed, and the position of the material frame 2 is switched, so that the material can be unloaded and the next wave of drying operations can be carried out.

[0050] Meanwhile, the contents not described in detail in this specification belong to the prior art known to those skilled in the art.

[0051] It should be noted that, in this article, relational terms such as first and second, etc. are only used to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Moreover, the terms "include", "comprise" or any other variants thereof are intended to cover non-exclusive inclusion, so that a process, method, article or device including a series of elements includes not only those elements, but also other elements not explicitly listed, or also includes elements inherent to such process, method, article or device.

[0052] Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present invention, and that the scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. A high-purity silicon material drying device, comprising a box (1) and a material frame (2), wherein two material frames (2) are provided and slide inside the box (1) in a staggered manner, characterized in that: A toothed plate (3) is fixedly connected to the top of the two material frames (2) on opposite sides, and a U-shaped frame (4) is fixedly connected to the top of the box body (1), a first motor (5) is fixedly connected to the top of the U-shaped frame (4), and a first gear (6) meshing with the toothed plate (3) is fixedly connected to the output end of the first motor (5); The tops of both sides of the box body (1) are fixedly connected with U-shaped plates (7), and one side of the U-shaped plates (7) is fixedly connected with a second motor (8), the output end of the second motor (8) is fixedly connected with a bidirectional threaded rod (9), and both sides of the surface of the bidirectional threaded rod (9) are threadedly connected with sliders (10), the bottom of the slider (10) is fixedly connected with an outer frame (12) through a vertical rod (11), and a horizontal plate (13) is fixedly connected between the two sides of the inner wall of the outer frame (12), and the interior of the horizontal plate (13) is rotatably connected with A stirring rod (14) is provided, and a stirring rod (15) is fixedly connected to the surface of the stirring rod (14); a second gear (16) is fixedly connected to the surface of one end of the stirring rod (14); a pulley (17) is fixedly connected to one side of the second gear (16); the surface of the pulley (17) is connected by a belt (18); both sides of the box body (1) are fixedly connected to a third motor (19); and an output end of the third motor (19) is fixedly connected to a gear column (20) meshing with the second gear (16).

2. A high-purity silicon material drying device according to claim 1, characterized in that: The bottom end of the vertical rod (11) passes through the box body (1) and extends to the inside of the box body (1), and through grooves (34) adapted to the vertical rod (11) are provided on both sides of the top of the box body (1).

3. A high-purity silicon material drying device according to claim 1, characterized in that: Both sides of the box body (1) are provided with movable grooves (21) adapted to the material frame (2), and both sides of the bottom of the material frame (2) are fixedly connected with pulleys (22), and both sides of the box body (1) and the bottom of the movable grooves (21) are provided with sliding grooves (23) adapted to the pulleys (22).

4. The high-purity silicon material drying device according to claim 1, characterized in that: The outer frame (12) is located inside the box body (1), and the top and bottom of the outer frame (12) are fixedly connected with movable blocks (24), the surface of the movable block (24) is slidably connected to the inner wall of the box body (1), the number of the upper horizontal plates (13) of the outer frame (12) is four, and the gear column (20) is located at the center of the outer frame (12).

5. The high-purity silicon material drying device according to claim 1, characterized in that: A partition (25) is fixedly connected between the top and bottom of the inner wall of the material frame (2), and a screening frame (26) is slidably connected between one side of the partition (25) and the side opposite to the inner wall of the material frame (2), a material receiving frame (27) is slidably connected to the bottom of the screening frame (26), and a slide plate (28) adapted to the screening frame (26) is fixedly connected to one side of the partition (25) and one side of the inner wall of the material frame (2).

6. A high-purity silicon material drying device according to claim 1, characterized in that: Both sides of the top of the material receiving frame (27) are fixedly connected with T-shaped plates (29), and both sides of the bottom of the screening frame (26) are fixedly connected with movable plates (30) adapted to the T-shaped plates (29), and the number of screening frames (26) on the single material frame (2) is set to eight.

7. The high-purity silicon material drying device according to claim 1, characterized in that: A hot air blower (31) is fixedly connected to the surface of the box body (1), and the air outlet of the hot air blower (31) is connected to an air outlet pipe (32), one end of the air outlet pipe (32) passes through the box body (1) and extends to the interior of the box body (1), and both sides of the surface of the air outlet pipe (32) extending to the interior of the box body (1) are connected to transverse pipes (33).

8. A high-purity silicon material drying device according to any one of claims 1 to 7, characterized in that: The drying method specifically comprises the following steps: S1, placing the silicon material to be dried on the top of the screening frame (26), and then sliding it into the slide plate (28) inside the material frame (2); S2. The first motor (5) is started by an external switch, the first motor (5) drives the first gear (6) to rotate, the first gear (6) drives the tooth plate (3) to move, and the two material frames (2) move alternately, and when moving, the pulley (22) at the bottom of the material frame (2) slides inside the slide groove (23); S3. At this time, the silicon material to be dried can be added to the screening frame (26) of the material frame (2) exposed outside the box body (1), and the hot air blower (31) is started by an external switch, and the hot air is blown toward the silicon material on the screening frame (26) through the air outlet pipe (32) and the cross pipe (33), thereby drying the silicon material; S4, starting the second motor (8), the second motor (8) drives the bidirectional threaded rod (9) to rotate, the slider (10) on the surface of the bidirectional threaded rod (9) moves relatively, the slider (10) drives the outer frame (12) inside the box body (1) to move relatively through the vertical rod (11), so that the stirring rod (14) moves to the top of the screening frame (26); S5, starting the third motor (19) through an external switch, and the third motor (19) drives the gear column (20) to rotate, the rotation of the gear column (20) drives the second gear (16) to rotate, and through the transmission of the pulley (17) and the mutual engagement between the second gear (16), the stirring rods (14) on the four horizontal plates (13) are driven to rotate simultaneously, and the stirring rods (15) turn over and disperse the silicon material on the screening frame (26), and the screened material falls into the receiving frame (27); S6. After the drying is completed, the first motor (5) is started again, the first motor (5) is reversed, and the position of the material frame (2) is switched, so that the material can be unloaded and the next drying operation can be carried out.

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