Quantum chip detection tool and detection device

Abstract

The invention relates to the technical field of quantum chip detection, in particular to a quantum chip detection tool and a detection device.The quantum chip detection tool comprises a mounting base, a vertical telescopic rod is fixedly mounted at the bottom of the mounting base, a connecting strip block is mounted on the vertical telescopic rod, and the connecting strip block is fixedly connected with the telescopic end of the vertical telescopic rod through a connector; a limiting installation groove is formed in the inner wall of the connecting strip block, a distance adjusting assembly is installed in the limiting installation groove, a first clamping strip and a second clamping strip are installed on the distance adjusting assembly, receding through hole grooves are formed in the first clamping strip and the second clamping strip correspondingly, and sliding clamping positioning assemblies are installed in the receding through hole grooves. The sliding clamping and positioning assemblies are divided into two groups; according to the invention, errors caused by shaking or displacement of the chip in the detection process can be effectively prevented, and influence on detection comprehensiveness caused by partial shielding of the chip body can be avoided; the detection efficiency is improved, different detection requirements are met, and the detection accuracy and adaptability are improved.

Description

Technical Field

[0001] The present invention relates to the field of quantum chip detection technology, and in particular to a quantum chip detection tool and a detection device. Background Art

[0002] Quantum chip testing is the process of testing semiconductor chips designed and manufactured based on the principles of quantum mechanics. Its core is to verify the performance and function of quantum chips to ensure that they can accurately perform quantum computing tasks. This kind of testing usually involves precise measurement of the state of quantum bits, and the use of methods such as state vector tomography, process tomography, and random benchmarking to evaluate the overall performance and stability of quantum chips. A detection device is required when testing quantum chips. For example, a quantum chip detection tool and detection device disclosed in Announcement No. (CN217981726U) The quantum chip has a first surface, which has a test port. The quantum chip detection tooling includes a probe element, which is used to be electrically connected to the detection equipment, and a limiting element, which limits the relative position of the quantum chip and the probe element, so that the test port and the probe element can be electrically connected. In the present application, by setting the limiting element, the relative position of the quantum chip and the probe element can be limited during the contact process between the test port and the probe element, so that the test port can quickly and accurately achieve electrical contact with the probe element, without the need to calibrate the relative position of the test port and the probe element during the test process, thereby saving test time and greatly improving the test efficiency of the quantum chip.

[0003] However, although the above technical solution can calibrate the relative position of the probe and the quantum chip when in use, the fixed position of the probe cannot guarantee the flexible adjustment of different detection points of the quantum chip, the detection of the quantum chip is not sufficient, and the size of the limiting element is fixed, which cannot cope with the limiting use of quantum chips of different sizes. The use is not flexible enough and there are certain disadvantages in the use process.

[0004] In view of this, the present invention is proposed. Summary of the invention

[0005] In order to overcome the technical defects of the prior art, the present invention provides a quantum chip detection tooling and detection device, which realizes flexible adjustment of the height and spacing of the chip body clamping position, thereby improving the accuracy and adaptability of the detection; ensuring stable clamping of the chip body, effectively preventing errors caused by shaking or displacement of the chip during the detection process, improving the reliability of the detection, and can avoid partial obstruction of the chip body affecting the comprehensiveness of the detection; improving the detection efficiency and adapting to different detection needs.

[0006] The technical solution adopted by the present invention is: it includes a mounting base, the vertical telescopic rod is fixedly mounted on the bottom of the mounting base, the connecting bar is mounted on the vertical telescopic rod, the connecting bar is fixedly connected to the telescopic end of the vertical telescopic rod through the connecting head, a limited mounting groove is provided on the inner wall of the connecting bar, the distance adjustment component is installed in the limited mounting groove, the first clamping bar and the second clamping bar are installed on the distance adjustment component, the first clamping bar and the second clamping bar are both provided with a clearance through hole groove, the sliding clamping positioning component is installed in the clearance through hole groove, the sliding clamping positioning component is divided into two groups, and the two groups of the sliding clamping positioning components are symmetrically distributed on the first clamping bar and the second clamping bar, and the sliding clamping positioning component is used to clamp and fix the chip body.

[0007] Preferably, in order to control the stepper motor to turn on so that the bidirectional threaded rod can rotate in the limit mounting groove through the first rotating joint, the distance adjustment assembly includes the stepper motor and the bidirectional threaded rod, the stepper motor is fixed on the inner wall of one end of the limit mounting groove, the bidirectional threaded rod is rotatably installed in the limit mounting groove through the first rotating joint, and one end of the bidirectional threaded rod is fixedly connected to the output shaft of the stepper motor.

[0008] Preferably, in order to control the rotation of the bidirectional threaded rod so as to drive the two threaded sliders to slide in opposite directions in the limiting mounting groove, thereby realizing the adjustment of the distance between the first clamping strip and the second clamping strip, the bidirectional threaded rod is provided with a threaded slider, and the threaded slider is slidably engaged in the limiting mounting groove. There are two threaded sliders, and the two threaded sliders are respectively located at the opposite thread ends of the bidirectional threaded rod, and the first clamping strip and the second clamping strip are respectively fixed on the two threaded sliders.

[0009] Preferably, in order to enable the transverse sliding block to slide in the yielding through hole groove by controlling the push-pull telescopic rod, the sliding clamping positioning assembly includes the push-pull telescopic rod and the transverse sliding block, the push-pull telescopic rod is fixedly mounted on the connecting bar block through the fixing seat, the transverse sliding block is slidably clamped in the yielding through hole groove, and one end of the transverse sliding block is fixedly connected to the telescopic end of the push-pull telescopic rod through the connecting convex plate.

[0010] Preferably, in order to control the extension and retraction of the upper and lower clamping cylinders so that the upper clamping circular plate and the lower clamping circular plate can be brought close to or apart, thereby achieving clamping and fixing the chip body, the other end of the transverse sliding slider is fixedly installed with the U-shaped mounting seat, and the clamping cylinder is fixedly installed on the U-shaped mounting seat. The clamping cylinder is divided into two, and the two clamping cylinders are symmetrically distributed at the upper and lower ends of the U-shaped mounting seat. The upper clamping circular plate and the lower clamping circular plate are respectively fixedly installed on the two clamping cylinders, and the upper clamping circular plate and the lower clamping circular plate are used to clamp and fix the chip body.

[0011] Preferably, in order to facilitate the disassembly and assembly of the detection probe and flexibly adjust the position of the detection probe, a quantum chip detection device includes the rotating connecting plate, which is rotatably connected to the mounting base through the rotating adjustment component, the circular operating table is fixedly installed on the top of the rotating connecting plate, a limiting slide groove is provided on the top of the circular operating table, the lateral adjustment component is installed in the limiting slide groove, the vertical lifting push rod is installed on the lateral adjustment component, the detection probe is installed on the vertical lifting push rod, and the detection probe is fixedly connected to the telescopic end of the vertical lifting push rod through the latch positioning component.

[0012] Preferably, in order to control the built-in motor of the mounting base to turn on and enable the driving gear to rotate, so that the driving gear ring can drive the rotating connecting plate to rotate on the mounting base, the rotation adjustment assembly includes the driving gear ring and the driving gear, the driving gear ring is fixedly sleeved on the rotating connecting plate, the driving gear is rotatably installed on the mounting base, and the driving gear is fixedly connected to the output shaft of the built-in motor of the mounting base.

[0013] Preferably, in order to control the servo motor to turn on, the adjusting screw can be rotated in the limiting slide groove through the second rotating joint, thereby driving the adjusting slider to slide in the limiting slide groove, thereby realizing the position adjustment of the vertical lifting push rod, the transverse movement adjustment assembly includes the servo motor and the adjusting screw, the servo motor is fixed on the inner wall of one end of the limiting slide groove, the adjusting screw is rotatably installed on the inner wall of the other end of the limiting slide groove through the second rotating joint, and one end of the adjusting screw is fixedly connected to the output shaft of the servo motor, the adjusting slider is threadedly installed on the adjusting screw, the adjusting slider is slidably engaged in the limiting slide groove, and the vertical lifting push rod is fixed on the adjusting slider.

[0014] Preferably, in order to enable the annular clamping block to drive the positioning pin rod to be fixedly inserted in the positioning pin hole through the clamping spring, the positioning pin rod can be disengaged from the positioning pin hole through the lifting handle, so as to facilitate the fixing of the probe seat on the inner recess seat, the latch pin positioning assembly comprises the inner recess seat and the probe seat, the inner recess seat is fixed to the telescopic end of the vertical lifting push rod, the detection probe is fixed to the probe seat, the probe seat is inserted in the inner recess seat, the inner recess seat is fixedly installed with the L-shaped connecting plate, the positioning pin rod is fixedly installed on the L-shaped connecting plate, one end of the positioning pin rod is inserted in the corresponding positioning pin holes opened on the inner recess seat and the probe seat, and the other end of the positioning pin rod is fixedly installed with the lifting handle, the positioning pin rod is fixedly sleeved with the annular clamping block, and the annular clamping block is elastically connected to the L-shaped connecting plate through the clamping spring.

[0015] The beneficial effects of the present invention are: through the vertical telescopic rod, the connecting bar and the distance adjustment component, the height and spacing of the clamping position of the chip body can be flexibly adjusted, thereby improving the accuracy and adaptability of the detection; The symmetrical distribution of the sliding clamping and positioning components ensures stable clamping of the chip body, effectively preventing errors caused by shaking or displacement of the chip during the detection process, improving the reliability of the detection, and being able to flexibly adjust the clamping position to avoid partial obstruction of the chip body and affecting the comprehensiveness of the detection; Through the rotation adjustment component and the lateral adjustment component, accurate detection of different positions of the chip is achieved, which also improves the detection efficiency and reduces the difficulty of operation. In addition, through the pin positioning component, the detection probe can be easily disassembled, assembled and replaced to meet different detection needs. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Figure 1 It is a schematic diagram of the overall structure of the present invention.

[0017] Figure 2 It is a structural schematic diagram of the rotation adjustment component of the present invention.

[0018] Figure 3 It is a structural schematic diagram of the transverse adjustment component of the present invention.

[0019] Figure 4 It is a schematic diagram of the connection structure between the inner recess and the probe seat of the present invention.

[0020] Figure 5 It is a schematic diagram of the installation structure of the positioning pin rod of the present invention.

[0021] Figure 6 It is a schematic diagram of the installation structure of the first clamping bar and the second clamping bar of the present invention.

[0022] Figure 7 It is a schematic structural diagram of the distance adjustment component of the present invention.

[0023] Figure 8 The figure is a schematic diagram of the installation structure of the push-pull telescopic rod of the present invention.

[0024] Fig. 9 for Figure 8 Enlarged structural diagram at A in the middle.

[0025] Description of the accompanying drawings: In the figure: 1, mounting base; 2, vertical telescopic rod; 3, connecting bar; 4, connector; 5, distance adjustment assembly; 501, stepping motor; 502, bidirectional threaded rod; 503, first rotating joint; 504, threaded slider; 6, first clamping bar; 7, second clamping bar; 8, sliding clamping positioning assembly; 801, push-pull telescopic rod; 802, lateral sliding block; 803, fixed seat; 804, connecting convex plate; 805, U-shaped mounting seat; 806, clamping cylinder; 807, upper clamping circular plate; 808, lower clamping circular plate; 9, chip body; 1 0. Rotating connecting plate; 11. Rotating adjustment assembly; 1101. Driving gear ring; 1102. Driving gear; 12. Circular operating table; 13. Transverse adjustment assembly; 1301. Servo motor; 1302. Adjusting screw; 1303. Second rotating joint; 1304. Adjusting slider; 14. Vertical lifting push rod; 15. Detection probe; 16. Pin positioning assembly; 1601. Inner recess; 1602. Probe seat; 1603. L-shaped connecting plate; 1604. Positioning pin rod; 1605. Lifting handle; 1606. Annular clamping block; 1607. Clamping spring. DETAILED DESCRIPTION

[0026] The present invention will be further described below in conjunction with the accompanying drawings: like Figure 1-Figure 9As shown, the present embodiment provides a quantum chip detection tooling, including a mounting base 1, a vertical telescopic rod 2 is fixedly mounted on the bottom of the mounting base 1, a connecting bar 3 is mounted on the vertical telescopic rod 2, the connecting bar 3 is fixedly connected to the telescopic end of the vertical telescopic rod 2 through a connector 4, a limited mounting groove is provided on the inner wall of the connecting bar 3, a distance adjustment component 5 is installed in the limited mounting groove, a first clamping bar 6 and a second clamping bar 7 are installed on the distance adjustment component 5, a make-way through-hole groove is provided on the first clamping bar 6 and the second clamping bar 7, a sliding clamping positioning component 8 is installed in the make-way through-hole groove, the sliding clamping positioning component 8 is divided into two groups, and the two groups of sliding clamping positioning components 8 are symmetrically distributed on the first clamping bar 6 and the second clamping bar 7, the sliding clamping positioning component 8 is used to clamp and fix the chip body 9, and during operation, the quantum chip is first placed between the first clamping bar 6 and the second clamping bar 7, and then the height of the vertical telescopic rod 2 is adjusted so that the connecting bar 3 and the clamping device thereon can be close to the chip. Next, the distance adjustment component 5 is used to accurately adjust the distance between the first clamping bar 6 and the second clamping bar 7 to accommodate chips of different sizes. Through the sliding clamping and positioning component 8, two groups of symmetrically distributed sliding clamping and positioning components 8 clamp and fix the chip body 9 from both sides, gently and firmly clamp the chip body 9 to ensure that it does not move or shake during the detection process, and the sliding clamping and positioning component 8 slides in the yielding through-hole groove to facilitate clamping and fixing the chip body 9 from different positions of the chip body 9, avoiding obstruction of the detection point of the chip body 9, effectively improving the accuracy and stability of chip detection, and reducing the detection error caused by chip position deviation. At the same time, its flexible adjustment function can adapt to quantum chips of various sizes, improve the versatility and practicality of tooling, and provide strong support for the precise detection of quantum chips.

[0027] The distance adjustment component 5 includes a stepper motor 501 and a bidirectional threaded rod 502. The stepper motor 501 is fixed on the inner wall of one end of the limit mounting groove. The bidirectional threaded rod 502 is rotatably installed in the limit mounting groove through a first rotating joint 503, and one end of the bidirectional threaded rod 502 is fixedly connected to the output shaft of the stepper motor 501. A threaded slider 504 is installed on the bidirectional threaded rod 502. The threaded slider 504 is slidably engaged in the limit mounting groove. There are two threaded sliders 504, and the two threaded sliders 504 are respectively located at the reverse thread ends of the bidirectional threaded rod 502. The first clamping bar 6 and the second clamping bar 7 are respectively fixed on the two threaded sliders 504. When adjusting the chip clamping distance, by controlling the starting and rotation direction of the stepper motor 501, the output shaft of the stepper motor 501 will drive the bidirectional threaded rod 502 to rotate in the limit mounting groove. Since the bidirectional threaded rod 502 has reverse thread ends, when the stepper motor 501 rotates forward or reverse, the two threaded sliders 504 will move along the forward and reverse directions of the bidirectional threaded rod 502 respectively, thereby driving the first clamping bar 6 and the second clamping bar 7 to move closer or farther away, so that the adjustment of the clamping distance becomes accurate and fast, and can easily adapt to quantum chips of different sizes, which not only ensures the stability of the chip during the detection process, but also reduces the tediousness of manual adjustment, providing a strong guarantee for the fast and accurate detection of quantum chips.

[0028] The sliding clamping positioning assembly 8 includes a push-pull telescopic rod 801 and a transverse sliding block 802. The push-pull telescopic rod 801 is fixedly mounted on the connecting bar 3 through a fixing seat 803. The transverse sliding block 802 is slidably connected to the through-hole groove. One end of the transverse sliding block 802 is fixedly connected to the telescopic end of the push-pull telescopic rod 801 through a connecting convex plate 804. The other end of the transverse sliding block 802 is fixedly mounted with a U-shaped mounting seat 805. A clamping cylinder 806 is fixedly mounted on the U-shaped mounting seat 805. The clamping cylinder 806 is divided into two, and the two clamping cylinders The cylinders 806 are symmetrically distributed at the upper and lower ends of the U-shaped mounting seat 805. The upper clamping circular plate 807 and the lower clamping circular plate 808 are fixedly installed on the two clamping cylinders 806, respectively. The upper clamping circular plate 807 and the lower clamping circular plate 808 are used to clamp and fix the chip body 9. When the quantum chip needs to be clamped and fixed, firstly, the extension and contraction of the push-pull telescopic rod 801 is controlled to drive the transverse sliding block 802 to slide in the through-hole groove, and then the U-shaped mounting seat 805 and the clamping cylinders 806 thereon are adjusted to the appropriate position. Subsequently, the two symmetrically distributed clamping cylinders 806 are started, and the piston rods of the cylinders will push the upper clamping circular plate 807 and the lower clamping circular plate 808 to approach the upper and lower surfaces of the chip respectively, until the two are lightly attached and firmly clamp the chip. The clamping process is accurate and fast, effectively avoiding the movement or shaking of the chip during the detection process, not only improving the stability and accuracy of the clamping of the chip body 9, but also realizing flexible adaptation to chip bodies 9 of different sizes through the adjustment function of the push-pull telescopic rod 801, and the clamping position of the chip body 9 can be flexibly adjusted to avoid affecting the detection. At the same time, the symmetrical distribution and precise control of the clamping cylinder 806 ensure that the chip body 9 is evenly stressed during the clamping process, avoiding damage to the chip body 9 caused by improper clamping.

[0029] A quantum chip detection device includes a rotating connecting plate 10, which is rotatably connected to a mounting base 1 through a rotating adjustment component 11, a circular operating table 12 is fixedly installed on the top of the rotating connecting plate 10, a limited position slide groove is provided on the top of the circular operating table 12, a lateral adjustment component 13 is installed in the limited position slide groove, a vertical lifting push rod 14 is installed on the lateral adjustment component 13, a detection probe 15 is installed on the vertical lifting push rod 14, and the detection probe 15 is fixedly connected to the telescopic end of the vertical lifting push rod 14 through a latch positioning component 16. The rotating adjustment component 11 includes The driving gear ring 1101 and the driving gear 1102, the driving gear ring 1101 is fixedly sleeved on the rotating connecting plate 10, the driving gear 1102 is rotatably mounted on the mounting base 1, and the driving gear 1102 is fixedly connected to the output shaft of the built-in motor of the mounting base 1. When in use, the driving gear 1102 is driven to rotate by the built-in motor of the mounting base 1. Due to the meshing relationship between the driving gear 1102 and the driving gear ring 1101, the driving gear ring 1101 will drive the rotating connecting plate 10 and the circular operating table 12 thereon to rotate, thereby adjusting the orientation of the detection probe 15. Then, the lateral position of the detection probe 15 is adjusted by sliding the lateral adjustment component 13 in the limiting slide groove to align it with the area to be detected of the chip body 9. Then, the vertical lifting push rod 14 is started, and the detection probe 15 firmly connected by the latch positioning component 16 will move vertically downward until it contacts the surface of the chip body 9 and performs detection, realizing the flexible adjustment of the detection probe 15 in three-dimensional space, which can easily adapt to the detection requirements of different positions and angles. At the same time, precise control of the vertical lifting push rod 14 and the latch positioning assembly 16 ensures the stability and accuracy of the detection probe 15 during the detection process, and improves the convenience of replacing the detection probe 15 to adapt to different detection requirements.

[0030] The lateral adjustment assembly 13 includes a servo motor 1301 and an adjustment screw 1302. The servo motor 1301 is fixed on the inner wall of one end of the limiting slide. The adjustment screw 1302 is rotatably installed on the inner wall of the other end of the limiting slide through a second rotating joint 1303. One end of the adjustment screw 1302 is fixedly connected to the output shaft of the servo motor 1301. An adjustment slider 1304 is threadedly installed on the adjustment screw 1302. The adjustment slider 1304 is slidably engaged in the limiting slide. The vertical lifting push rod 14 is fixed on the adjustment slider 1304. When the detection probe 15 needs to be adjusted in the horizontal position, the servo motor 1301 is first started, and the output shaft of the servo motor 1301 will drive the adjustment screw 1302 to rotate in the limiting slide. Due to the threaded connection relationship between the adjustment screw 1302 and the adjustment slider 1304, the adjustment slider 1304 will move along the axial direction of the adjustment screw 1302, thereby driving the vertical lifting push rod 14 and the detection probe 15 thereon to make horizontal adjustments. By precisely controlling the rotation angle and speed of the servo motor 1301 , the lateral position of the detection probe 15 can be precisely controlled, which not only improves the accuracy and stability of the lateral adjustment of the detection probe 15 , but also enables rapid and accurate adjustment of the position of the detection probe 15 through precise control of the servo motor 1301 .

[0031] The latch positioning assembly 16 includes an inner recess 1601 and a probe seat 1602. The inner recess 1601 is fixed to the telescopic end of the vertical lifting push rod 14. The detection probe 15 is fixed to the probe seat 1602. The probe seat 1602 is plugged into the inner recess 1601. An L-shaped connecting plate 1603 is fixedly installed on the inner recess 1601. A positioning pin rod 1604 is fixedly installed on the L-shaped connecting plate 1603. One end of the positioning pin rod 1604 is plugged into the inner recess 1601 and the probe seat 1 602, the other end of the positioning pin rod 1604 is fixedly installed with a lifting handle 1605, and the positioning pin rod 1604 is fixedly sleeved with an annular abutting block 1606, and the annular abutting block 1606 is elastically connected to the L-shaped connecting plate 1603 through a abutting spring 1607. When it is necessary to fix the detection probe 15 to the telescopic end of the vertical lifting push rod 14, the probe seat 1602 is first inserted into the inner recess 1601 to align the positioning pin holes of the two. Then, the positioning pin rod 1604 is inserted into the positioning pin hole by the lifting handle 1605, and the annular abutting block 1606 is tightly fitted on the inner recess 1601 and the probe seat 1602 under the action of the abutting spring 1607, thereby realizing the stable fixation of the detection probe 15. When the detection probe 15 needs to be removed, the lifting handle 1605 only needs to be gently pulled, and the positioning pin rod 1604 can be pulled out from the positioning pin hole, so that quick removal can be achieved, thereby achieving a stable fixation of the detection probe 15, simplifying the installation and removal process of the detection probe 15, and improving the convenience of replacing the detection probe 15 to meet different usage requirements.

[0032] The above shows and describes the basic principles and main features of the present invention and the advantages of the present invention. Those skilled in the art should understand that the present invention is not limited to the above embodiments. The above embodiments and descriptions are only for illustrating the principles of the present invention. Without departing from the spirit and scope of the present invention, the present invention may have various changes and improvements, which shall fall within the scope of the present invention to be protected. The scope of protection of the present invention is defined by the attached claims and their equivalents.

Claims

1. A quantum chip detection tool, comprising a mounting base (1), characterized in that: A vertical telescopic rod (2) is fixedly mounted on the bottom of the mounting base (1), a connecting bar (3) is mounted on the vertical telescopic rod (2), the connecting bar (3) is fixedly connected to the telescopic end of the vertical telescopic rod (2) through a connecting head (4), a limited mounting groove is provided on the inner wall of the connecting bar (3), a distance adjustment component (5) is installed in the limited mounting groove, a first clamping bar (6) and a second clamping bar (7) are installed on the distance adjustment component (5), the first clamping bar (6) and the second clamping bar (7) are both provided with a clearance through hole groove, a sliding clamping positioning component (8) is installed in the clearance through hole groove, the sliding clamping positioning component (8) is divided into two groups, and the two groups of the sliding clamping positioning components (8) are symmetrically distributed on the first clamping bar (6) and the second clamping bar (7), and the sliding clamping positioning component (8) is used to clamp and fix the chip body (9).

2. The quantum chip detection tooling according to claim 1, characterized in that: The distance adjustment assembly (5) comprises a stepping motor (501) and a bidirectional threaded rod (502); the stepping motor (501) is fixed to the inner wall of one end of the position limiting installation slot; the bidirectional threaded rod (502) is rotatably installed in the position limiting installation slot via a first rotating joint (503); and one end of the bidirectional threaded rod (502) is fixedly connected to the output shaft of the stepping motor (501).

3. The quantum chip detection tooling according to claim 2, characterized in that: A threaded slider (504) is installed on the bidirectional threaded rod (502), and the threaded slider (504) is slidably engaged in the limit mounting groove. There are two threaded sliders (504), and the two threaded sliders (504) are respectively located at the reverse thread ends of the bidirectional threaded rod (502). The first clamping strip (6) and the second clamping strip (7) are respectively fixed on the two threaded sliders (504).

4. The quantum chip detection tooling according to claim 1, characterized in that: The sliding clamping positioning assembly (8) comprises a push-pull telescopic rod (801) and a transverse sliding block (802); the push-pull telescopic rod (801) is fixedly mounted on the connecting bar (3) via a fixing seat (803); the transverse sliding block (802) is slidably engaged in the yielding through hole groove; one end of the transverse sliding block (802) is fixedly connected to the telescopic end of the push-pull telescopic rod (801) via a connecting convex plate (804).

5. The quantum chip detection tooling according to claim 4, characterized in that: A U-shaped mounting seat (805) is fixedly installed on the other end of the transverse sliding block (802), and a clamping cylinder (806) is fixedly installed on the U-shaped mounting seat (805). The clamping cylinder (806) is divided into two, and the two clamping cylinders (806) are symmetrically distributed at the upper and lower ends of the U-shaped mounting seat (805). An upper clamping circular plate (807) and a lower clamping circular plate (808) are respectively fixedly installed on the two clamping cylinders (806), and the upper clamping circular plate (807) and the lower clamping circular plate (808) are used to clamp and fix the chip body (9).

6. A quantum chip detection device, according to the quantum chip detection tooling according to any one of claims 1-5, characterized in that: The invention comprises a rotating connecting plate (10), wherein the rotating connecting plate (10) is rotatably connected to the mounting base (1) via a rotating adjustment component (11), a circular operating table (12) is fixedly mounted on the top of the rotating connecting plate (10), a limiting slide groove is provided on the top of the circular operating table (12), a lateral adjustment component (13) is mounted in the limiting slide groove, a vertical lifting push rod (14) is mounted on the lateral adjustment component (13), a detection probe (15) is mounted on the vertical lifting push rod (14), and the detection probe (15) is fixedly connected to the telescopic end of the vertical lifting push rod (14) via a latch positioning component (16).

7. The quantum chip detection device according to claim 6, characterized in that: The rotation adjustment assembly (11) comprises a driving gear ring (1101) and a driving gear (1102); the driving gear ring (1101) is fixedly sleeved on the rotating connection plate (10); the driving gear (1102) is rotatably mounted on the mounting base (1); and the driving gear (1102) is fixedly connected to a built-in motor output shaft of the mounting base (1).

8. The quantum chip detection device according to claim 6, characterized in that: The transverse movement adjustment component (13) comprises a servo motor (1301) and an adjustment screw (1302), wherein the servo motor (1301) is fixed on the inner wall of one end of the limiting slide groove, and the adjustment screw (1302) is rotatably mounted on the inner wall of the other end of the limiting slide groove via a second rotating joint (1303), and one end of the adjustment screw (1302) is fixedly connected to the output shaft of the servo motor (1301), and an adjustment slider (1304) is threadedly mounted on the adjustment screw (1302), and the adjustment slider (1304) is slidably engaged in the limiting slide groove, and the vertical lifting push rod (14) is fixed on the adjustment slider (1304).

9. The quantum chip detection device according to claim 6, characterized in that: The latch positioning assembly (16) comprises an inner recessed seat (1601) and a probe seat (1602), wherein the inner recessed seat (1601) is fixed to the telescopic end of the vertical lifting push rod (14), the detection probe (15) is fixed to the probe seat (1602), the probe seat (1602) is plugged into the inner recessed seat (1601), an L-shaped connecting plate (1603) is fixedly mounted on the inner recessed seat (1601), and a fixed probe (15) is fixedly mounted on the L-shaped connecting plate (1603). A positioning pin rod (1604), one end of which is inserted into the positioning pin holes correspondingly provided on the inner recess (1601) and the probe seat (1602), and a lifting handle (1605) is fixedly installed on the other end of the positioning pin rod (1604), and an annular clamping block (1606) is fixedly sleeved on the positioning pin rod (1604), and the annular clamping block (1606) is elastically connected to the L-shaped connecting plate (1603) via a clamping spring (1607).

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