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209results about "Integrated circuit testing" patented technology

Chip test calibration method and chip tester

The invention relates to the technical field of integrated circuit test and calibration, and discloses a chip test and calibration method and a chip tester. The chip test calibration method is applied to a chip test module and specifically comprises the following steps that S101, a starting signal sent by a user terminal is received, environment initialization operation is executed, and after initialization is completed, a system automatically enters a standby mode and waits for an external trigger signal or a user instruction; and S102, synchronously capturing input and output signal waveforms of the tested chip at a preset sampling frequency through a high-precision current sensor and a voltage sampling circuit. Through a dynamic parameter acquisition and real-time compensation technology, a voltage reference error is effectively reduced, the temperature control precision is superior to + / -0.3 DEG C, signal distortion caused by environmental interference is effectively inhibited, a multi-dimensional calibration model is combined with time domain, frequency domain and statistical characteristic analysis, nonlinear errors and system drift can be dynamically corrected, and the system performance is improved. And the attenuation error of a test signal transmission path is lower than 0.02 dB.
Owner:BEIJING VIAGRA TECHNOLOGY CO LTD

Chip service life detection method and service life prolonging method

The invention discloses a chip life detection method and a life prolonging method, and the method comprises the following steps: 1, extracting a chip sample, constructing a chip life detection system, and obtaining a simulation data set of the chip sample through the chip life detection system, the simulation data set at least comprises a chip performance data set, a chip operation data set, a chip working environment data set and a chip failure data set, and 2, constructing an improved neural network model to train and learn detected chip data information parameters so as to improve the chip life detection fitting capability. The service life of the chip is detected by adopting the technical scheme of constructing the improved neural network model, so that the reliability and the performance stability of the chip under the conditions of long-time use and load can be evaluated conveniently, and the detection capability of the service life of the chip is improved.
Owner:UNIV OF ELECTRONICS SCI & TECH OF CHINA

SRAM (Static Random Access Memory) storage radiation resistance test method and system based on running state injection

The invention relates to the technical field of SRAM (Static Random Access Memory) memory anti-radiation testing, and discloses an SRAM memory anti-radiation testing method and system based on running state injection, and the method comprises the following steps: system initialization, mapping preparation and time sequence baseline establishment; carrying out model quantitative compiling, sensitivity analysis and physical bit candidate generation; generating a running state injection plan and loading a test case; performing operation state execution, disturbance injection and synchronous monitoring acquisition; multi-source triggering, weight read-back and fault decoupling judgment are carried out; and performing quantitative evaluation on anti-radiation performance, constructing a degradation curve and outputting a report. The system corresponds to the method. According to the invention, a hardware-in-the-loop operation state injection and online evaluation technology is constructed, and the technical problems of guidance and position limited disturbance / equivalent irradiation injection based on weight bit level sensitivity and logic-physical mapping are solved.
Owner:HANGZHOU AURORA SEMICONDUCTOR CO LTD

Integrated circuit performance test method based on multi-dimensional parameter fusion

The invention provides an integrated circuit performance testing method based on multi-dimensional parameter fusion, and belongs to the technical field of integrated circuit performance testing. S2, collecting multi-dimensional parameters; s3, data preprocessing; s4, carrying out multi-dimensional parameter fusion; and S5, performance test analysis. Through multi-parameter coverage, multi-algorithm collaboration and full-process closed loop, the problems of isolation, fragmentation and simplification of traditional testing are solved, and systematic and refined technical support is provided for performance testing of the integrated circuit.
Owner:UNIV OF ELECTRONIC SCI & TECH OF CHINA CHENGDU COLLEGE

Multi-source heterogeneous data processing method and system based on test chip

The invention discloses a multi-source heterogeneous data processing method and system based on a test chip, and the method comprises the steps: employing a distributed message queue to access a multi-protocol data stream in real time, collecting the multi-source heterogeneous data related to a chip test, and carrying out the normalization preprocessing; performing cross-domain spatio-temporal feature alignment and mapping on the preprocessed multi-source heterogeneous data, constructing a hybrid incidence matrix based on linear correlation degree and nonlinear correlation degree, extracting three-dimensional joint features, and generating a dynamic metadata tag; generating nodes and edges by using the incidence matrix and the extracted three-dimensional joint features, constructing a parameter association graph structure, performing graph embedding training and generating an index structure, positioning Top-K candidates based on the index structure by using query features and labels, and sorting and returning a result according to a comprehensive distance; the problem that cross-domain association analysis is difficult to carry out due to the fact that the format difference of multi-source heterogeneous data generated by existing chip testing is large is solved, and the precision and efficiency of multi-source heterogeneous data processing are improved.
Owner:SUZHOU XINLIAN ZHILIAN TECHNOLOGY CO LTD

Chip testing method and device based on multi-physics field simulation

The invention relates to the technical field of semiconductors, and provides a chip testing method and device based on multi-physics field simulation, and the method comprises the steps: collecting the multi-physics field response data of a chip, carrying out the feature splitting and classification processing, obtaining a thermal response feature vector, an electromagnetic response feature matrix and a stress distribution sequence, and generating a thermal response map; and carrying out correlation calculation on the electromagnetic response characteristic matrix based on the thermal response map to obtain a discriminative risk grade value and an error weighting factor, then carrying out risk trend fitting analysis on the stress distribution sequence, and generating a chip performance stability evaluation index and a test adaptability score under multi-physics field interference. The chip performance stability evaluation index and the test adaptability score under the multi-physics field interference are generated by using the collected multi-physics field response data, so that comprehensive evaluation of the performance of the chip under the multi-physics field effect is realized, and the problem that the accuracy of the test result is insufficient when the chip is in a complex environment in which multiple physics fields act at the same time is solved.
Owner:SHENZHEN ADREAMER ELITE CO LTD

Parameter optimization method for chip electromagnetic fault injection test and computer equipment

The invention discloses a parameter optimization method for a chip electromagnetic fault injection test, and the method comprises the steps: collecting a large number of electromagnetic fault injection test data of a training chip, and constructing a training data set; training a plurality of models by using the constructed training data set, and establishing a mapping relationship between the electromagnetic fault injection parameter and the attack success rate; collecting a small amount of electromagnetic fault injection test data of the novel-type chip to be tested; carrying out transfer learning on the trained model by using data of a chip to be tested with a new model, and selecting an optimal model from the models after transfer learning; determining a value range of electromagnetic fault injection parameters of a chip to be detected of a new type, constructing a multi-dimensional parameter space, and generating uniformly distributed parameter combinations by using a Latin hypercube sampling method; and inputting the parameter combinations into the optimal model, predicting the attack success rate of each parameter combination, and selecting the optimal parameter combination of the electromagnetic fault injection test. According to the method, the electromagnetic fault injection parameter combination can be automatically optimized, and the manual tuning cost is reduced.
Owner:CHINA ELECTRONICS RELIABILITY AND ENVIRONMENTAL TESTING INSTITUTE ((THE FIFTH INSTITUTE OF ELECTRONICS MINISTRY OF INDUSTRY AND INFORMATION TECHNOLOGY) (CHINA SAIBAO LABORATORY)

Comprehensive detection system for new energy automobile chip

The invention discloses a comprehensive detection system for a new energy automobile chip. The comprehensive detection system comprises a data acquisition module used for acquiring operation data of the new energy automobile chip; the signal processing module is used for converting the analog signal into a digital signal and processing the signal; the fault analysis module is used for analyzing the operation data through a machine learning algorithm and constructing high-sensitivity features strongly related to faults; the safety test module is used for carrying out HBM, CDM and EMC tests to evaluate the safety performance of the chip; the performance test module is used for evaluating the performance of the chip under set extreme conditions through a high temperature life test HTOL and an early life failure test ELFR; and the data storage and analysis module is used for storing test data. According to the scheme provided by the invention, the prediction accuracy, the measurement efficiency and the anomaly detection capability are improved according to the measured electrical variable and the measured magnetic variable, so that the performance, the safety and the reliability of the chip can be comprehensively evaluated.
Owner:AAVID (SHENZHEN) SYST CO LTD

General verification system, device and method suitable for functional performance of FPGA (Field Programmable Gate Array) device

The invention discloses a universal verification system, device and method suitable for the functional performance of an FPGA device, and relates to the technical field of FPGA device testing, the universal verification system comprises verification hardware, verification software, a verification auxiliary instrument and environment equipment, and the specific verification steps are as follows: step 1, on-chip logic function verification; step 2, common interface function verification; 3, software and hardware adaptability function verification; 4, comprehensive performance function verification; 5, dynamic power consumption testing; step 6, common IP function verification; 7, testing associated parameters; step 8, system adaptability; and step 9, environment adaptability. The universal verification system is suitable for verification of a serial interface function, a multi-path IO compatibility test function, development software platform adaptability, simulator adaptability, a configuration mode, configuration starting time, a signal processing function, official IP supportability and the like, and has functions of a high-speed interface protocol, an Aurora protocol, a DDR protocol, an IIC protocol, an SPI protocol and the like.
Owner:成都天奥技术发展有限公司

Testing apparatus and method for operating the same

The present disclosure provides a testing apparatus, which includes a plurality of devices under test (DUTs) and an advanced process control monitor (APCM). The APCM includes a switch circuit, a control circuit, a detection circuit, and an auxiliary control circuit. The switch circuit includes a plurality of switch devices corresponding to the DUTs. The control circuit includes a plurality of control devices corresponding to the switch devices, and is configured to sequentially activate one of the switch devices during a test procedure of the testing apparatus. The detection circuit is configured to provide a first power supply voltage to a first terminal of each switch device. The auxiliary control circuit is configured to provide a second power supply voltage to a second terminal of each switch device deactivated the control circuit.
Owner:TAIWAN SEMICONDUCTOR MANUFACTURING CO LTD

Aging prediction method for ASIC special password intelligent chip

The invention discloses an ASIC special password intelligent chip aging prediction method, and relates to the field of chip aging prediction, and the method comprises the steps: carrying out the feature fusion coding through obtaining chip power supply wiring layer data and collecting environment parameters, obtaining an aging sensitivity feature vector, carrying out the fractional order aging dynamics modeling based on the aging sensitivity feature vector, and carrying out the aging prediction. Performing chip aging state prediction based on the chip aging state change equation to obtain an aging track prediction sequence, extracting an aging sensitivity feature vector component and the aging track prediction sequence to perform residual life probability evaluation, and obtaining a residual life cumulative distribution function; on the basis of the residual life cumulative distribution function, uncertainty analysis is carried out on chip aging prediction to obtain a two-factor risk index, a coupling aging rule between hardware structure weakness and environmental stress is grasped, real aging sensitive points of the chip can be accurately reflected, and accurate reference can be provided for preventive maintenance of the chip.
Owner:YIANXIN MICROELECTRONICS (JIANGSU) CO LTD

Quality detection method and device of integrated circuit, electronic equipment and storage medium

PendingCN119619793AImprove the efficiency of detection and testingImprove quality inspection efficiencyIntegrated circuit testingTesting MethodsIntegrated circuit
The invention provides an integrated circuit quality detection method and device, electronic equipment and a storage medium. The method comprises the following steps: acquiring a plurality of integrated circuits; for each integrated circuit, carrying out various rapid detection tests on the integrated circuit according to a predetermined test condition; in response to determining that the plurality of integrated circuits all pass the plurality of rapid detection tests, performing a plurality of sampling detection tests on the plurality of integrated circuits; and in response to determining that the plurality of integrated circuits pass the plurality of sampling detection tests, determining that the plurality of integrated circuits pass the quality detection, thereby solving the technical problem that the quality detection result of the integrated circuit is not accurate in the prior art, and improving the accuracy of determining the quality detection result of the integrated circuit.
Owner:CASIC DEFENSE TECH RES & TEST CENT

Chip testing system, method and device

The invention relates to a chip testing system, device and method. The chip test system comprises a server and an embedded test device which are in communication connection. The server is configured to store a test program and load the stored test program to the embedded test device; the embedded test device is configured to run a test program so as to test one or more chips to be tested connected with the embedded test device, and the test program simultaneously tests the computing power load and the memory pressure of the chips to be tested in parallel when running. According to the chip testing system, device and method, the testing efficiency can be remarkably improved, and the real performance of the chip in an actual service scene can be accurately reflected.
Owner:BLACK SESAME TECH CO LTD

Chip quality testing optimization

Testing a semiconductor can be time-consuming as the chip architecture becomes more complex. Testing the possible scenarios becomes increasingly difficult. Chip quality characteristics relating to the chips on a wafer can be used to estimate a probability or rating relating to bypassing system-level testing (SLT). A chip can bypass SLT if there is a high likelihood of passing SLT. Thousands of chip characteristics can be received from wafer testing, chip probe testing, environmental parameters, factory parameters, and other parameters. A chip quality model can use chip quality characteristics as input to generate chip group and SLT parameters. The chip quality model can be a machine learning model or other types of machine learning systems. The chip group parameter or the SLT parameter can be used to direct the testing path of a chip where some chips can bypass SLT thereby saving production time.
Owner:NVIDIA CORP

Apparatus and method for burn-in board alignment and sealing between chamber and frame for semiconductor burn-in process

The present disclosure relates to burn-in apparatus, transfer method, burn-in chamber, and interchangeable frame thereof for semiconductor devices burn-in process. The burn-in apparatus comprises a burn-in chamber with an incomplete base which is to be completed and thermally insulated in cooperation with a thermal insulation base of at least one interchangeable frame which is to be removably moved into and docked in the chamber to complete the burn-in apparatus. Cooperating alignment elements are respectively arranged at the frame and the chamber, and configured to progressively and movably couple to each other to lift the frame to bring a set of burn-in boards that are supported on the frame into alignment for insertion into a set of receiving connectors in the chamber. Cooperating thermal insulation side elements may be respectively arranged at the frame and the chamber, and include complementary characteristics configured to provide a clearance gap between the thermal insulation side elements when they partially overlap each other and an abutting fit when they substantially or fully overlap each other.
Owner:MSV SYST & SERVICES PTE LTD

System for testing an integrated circuit of a device and its method of use

A cartridge, including a cartridge frame, formations on the cartridge frame for mounting the cartridge frame in a fixed position to an apparatus frame, a contactor support structure, a contactor interface on the contactor support structure, a plurality of terminals, held by the contactor support structure, for contacting contacts on a device, and a plurality of conductors, held by the contactor support structure, connecting the interface to the terminals.
Owner:AEHR TEST SYST

Computer graphics card plugging test equipment and method

The invention discloses a computer graphics card plugging and unplugging test device and method, relates to the technical field of graphics card plugging and unplugging tests, and aims to solve the technical problem that the graphics card plugging and unplugging tests have defects, and the computer graphics card plugging and unplugging test device comprises a test platform, a test mechanism, a plugging and unplugging assembly, a winding assembly and a stretching assembly. According to the invention, a linear and arc-shaped array plugging effect is formed through the plugging assembly by means of the clamping groove, the clamping ring and the first spring; the linear mode efficiently simulates manual plugging and unplugging, and rapid detection is achieved; performing arc-shaped mode multi-angle inclination test; the winding assembly is engaged with a pawl through ratchets and a threading channel, so that a connecting wire is effectively prevented from being wound, and a test port can move without resistance; according to the stretching assembly, a spring is replaced by an air pressure cavity, a supporting rod is flexibly adjusted and controlled through air inflation and air exhaust, line lengths are adapted to different array ports, the testing mechanism can adjust the lengths of a connecting frame and a push rod, the testing mechanism is adapted to display cards of various sizes by means of a pneumatic frame and a rubber strip, a real scene is accurately simulated, and it is powerfully guaranteed that performance detection of the display cards is comprehensive and accurate.
Owner:DONGGUAN CONSUNG SMART TECH CO LTD

Wafer probe station detection path planning method, wafer probe station detection path planning device, wafer probe station detection path planning equipment and probe station

The invention relates to the technical field of probe detection, and discloses a wafer probe station detection path planning method, device and equipment and a probe station. The method comprises the following steps: performing boundary enhancement processing on a wafer surface image to obtain a boundary enhancement input tensor; executing dual-path feature extraction based on the boundary enhancement input tensor to obtain a first feature map including a chip boundary and a test point position; performing channel attention and space attention screening on the first feature map to obtain a second feature map; performing chip distribution feature analysis on the second feature map to obtain a test point clustering result; probe moving path planning is executed, and a global optimal path is obtained; and establishing a probe station inverse kinematics model based on the global optimal path, and calculating a probe track control sequence according to the probe station inverse kinematics model. According to the method, the wafer surface chip boundary feature extraction capability is enhanced, the stability and smoothness of the probe in the high-speed test process are ensured, and the probe positioning precision is greatly improved.
Owner:东莞市台易电子科技有限公司

Semiconductor apparatus examination method and semiconductor apparatus examination apparatus

A semiconductor apparatus examination method includes a step of acquiring a first interference waveform based on signals from a plurality of drive elements according to light from a first light beam spot including the plurality of drive elements in a semiconductor apparatus, a step of acquiring a second interference waveform based on signals from the plurality of drive elements according to light from a second light beam spot having a region configured to partially overlap the first spot and including the plurality of drive elements, and a step of separating a waveform signal for each of the drive elements in the first and second spots based on the first and second interference waveforms.
Owner:HAMAMATSU PHOTONICS KK

Integrated circuit and test system including the same

An integrated circuit and a test system including the same are provided. Provided is an integrated circuit including a plurality of first semiconductor intellectual property (IP) cores, a chip connection circuit including a first through silicon via, a second through silicon via, a receiver electrically connected to the first through silicon via, and a driver electrically connected to the second through silicon via, a multiplexing circuit configured to select an input / output (I / O) target selection signal, a test enable circuit configured to provide a test enable signal to the chip connection circuit, based on a test mode of the integrated circuit, and a test control circuit configured to provide the I / O target selection signal to the multiplexing circuit.
Owner:SAMSUNG ELECTRONICS CO LTD

System and method for z-pat defect-guided statistical outlier detection of semiconductor reliability failures

A system and method for Z-PAT defect-guided statistical outlier detection of semiconductor reliability failures includes receiving electrical test bin data with semiconductor die data for a plurality of wafers in a lot generated by a statistical outlier detection subsystem configured to perform Z-direction Part Average Testing (Z-PAT) on test data generated by an electrical test subsystem after fabrication of the plurality of wafers in the lot, receiving characterization data for the plurality of wafers in the lot generated by a semiconductor fab characterization subsystem during the fabrication of the plurality of wafers in the lot, determining a statistical correlation between the electrical test bin data and the characterization data at a same x, y position on each of the plurality of wafers in the lot, and locating defect data signatures on the plurality of wafers in the lot based on the statistical correlation.
Owner:KLA CORP

Systems and methods for adaptive semiconductor testing using in-line defect portion average testing

The adaptive semiconductor test system and method uses an online defective portion average test configured to receive a plurality of online defective portion average test scores (I-PAT) from an I-PAT system, the plurality of I-PAT scores being generated by the I-PAT system based on semiconductor die data for a plurality of semiconductor dies. The semiconductor die data includes characterization measurements for the plurality of semiconductor dies, and each I-PAT score of the plurality of I-PAT scores represents a weighted defect rate determined by the I-PAT system as a function of the characterization measurements for a corresponding semiconductor die of the plurality of semiconductor dies. Apply one or more rules to the plurality of I-PAT scores during a dynamic decision process. Generate one or more adaptive tests for at least one semiconductor die of the plurality of semiconductor dies in response to the dynamic decision process.
Owner:KLA CORP

Test method and test system for semiconductor device testing

The invention provides a test method for testing a semiconductor device, which comprises the following steps of: executing at least one test item in a group of test items on the semiconductor device under a first environment condition; generating, by the machine learning model, an identification result based on the test results of the at least one test item, the identification result predicting at least one test result of performing one or more test items of the set of test items on the semiconductor device under a second environmental condition; and determining whether to perform one or more test items in the set of test items on the semiconductor device under a second environmental condition based on the identification result. According to the invention, based on the test result under the first environment condition, the machine learning model is utilized to predict and obtain the corresponding identification result, so that whether the test needs to be executed again under the second environment or not is determined according to the identification result.
Owner:MEDIATEK INC

Software ecological management method of automatic test equipment and application thereof

The invention discloses a software ecological management method of automatic test equipment and application thereof, and belongs to the technical field of integrated circuit test. The method comprises the following steps: automatically writing a version identifier containing firmware information of an upper computer and a lower computer when a test program is compiled; when the program is loaded, the system obtains the actual version of the current operating environment and compares the actual version with the version identifier; if the versions are not matched, the system interrupts program execution through consistency verification and an interlocking controller, and a version switching manager is started; and the version switching manager automatically closes the current environment according to the version identifier, searches a version information base, switches the software of the upper computer, synchronously updates the firmware of the lower computer to a target version, and restores the test after the environment verification is passed. Through binding during compiling and forced verification during loading, automatic and accurate switching of the test environment is achieved, the problems that manual switching is prone to errors and software and hardware collaboration is poor are solved, and the test risk and the maintenance cost are remarkably reduced.
Owner:HANGZHOU CORE MOMENT TECH CO LTD

Test machine detection system and detection method, medium and computer equipment

The invention discloses a test machine detection system and method, a medium and computer equipment, and belongs to the field of semiconductor tests.The method comprises the steps that a program detection code is run through a test machine; sending an instruction code to the detection board by using the test mother board; executing the instruction code by using the detection board; the detection result of the instruction code executed by the detection board is displayed by using the on-off of the light-emitting diode; a detection result is fed back to the test machine through the detection plate; performing data comparison on the detection result by utilizing the test machine, and if the detection result is abnormal, displaying fail output by utilizing a test interface; and if the detection result is normal, displaying pass output by using a test interface. According to the application of the invention, each module in the system can be detected, the detection result can be synchronously displayed on the test machine and the detection board, the abnormal position and the abnormal type of the abnormal module can be rapidly locked, and the formation of a rapid abnormal processing scheme is facilitated.
Owner:TIANSHUI HUATIAN TECH

Intelligent aging test system and method based on single-chip microcomputer

The invention relates to an intelligent chip aging test system and method. According to the system disclosed by the invention, high-precision dynamic monitoring and intelligent management of a plurality of aging chips are realized through integrated power supply management, multi-channel signal acquisition, redundancy control and remote communication. The system core comprises a power supply module, a signal acquisition module, a core processing unit and a plurality of peripheral equipment interfaces; according to the method, through staged power-on time sequence control, dual redundancy check, dynamic load simulation and cloud data synchronization, the test reliability and efficiency are remarkably improved, the method is suitable for high-temperature aging screening and quality evaluation of semiconductor devices, the production cost is effectively reduced, and production process optimization is supported. The invention belongs to the technical field of electronic testing.
Owner:ZHUHAI ORBITA AEROSPACE SCI TECH CO LTD

Integrated circuit testing equipment

The present invention belongs to the technical field of testing equipment, and specifically is an integrated circuit testing equipment, including a controller, a testing box, a mobile platform, a chuck, a transmission hole, a transmission rod, a transmission block, a rotating rod, a connecting rod, a sliding block and a sliding groove; a transmission hole is provided at a position corresponding to the chuck on one side of the testing box; transmission rods are slidably connected to the front and rear ends of the transmission hole; a transmission block is fixedly connected to the position corresponding to the chuck and the transmission rod; the transmission rods are engaged with the transmission blocks, and each transmission rod is hingedly connected to a rotating rod on the side away from the chuck; a sliding block is fixedly connected to the side of each rotating rod close to the chuck, and a connecting rod is fixedly connected between the two rotating rods; a sliding groove is provided at the lower end of the transmission block corresponding to the sliding block; the present invention solves the problem that in order to prevent the influence of particulate matter in the air on the detection process, the detection process is carried out in a clean room with a large area, thereby making cleaning control more difficult.
Owner:HUAINAN NORMAL UNIV

Techniques for imaging low duty cycle signals using scanning electron microscopes

Techniques for imaging low duty cycle signals using a scanning electron microscope. Systems, components, methods, and algorithms for generating differential data are described. A computer-implemented method includes directing a first pulse of charged particles toward a sample. The method may include generating first detector data based at least in part on an interaction between the charged particles of the first pulse and the sample. The method may include directing a second pulse of charged particles toward the sample. The method may include generating second detector data based at least in part on an interaction between the charged particles of the second pulse and the sample. The method may also include generating differential data using the first detector data and the second detector data, wherein the differential data describes a change between an "on" state of the sample and an "off" state of the sample.
Owner:FEI CO

Methods, systems, articles of manufacture, and apparatus for improved thermal tests of integrated circuit devices

PCT designated stage expiredWO2025071802A1Thermometer detailsIntegrated circuit testing
Systems, apparatus, articles of manufacture, and methods are disclosed that improve thermal tests of integrated circuit devices. An example apparatus includes interface circuitry; machine readable instructions; and programmable circuitry to at least one of instantiate or execute the machine readable instructions to determine a condition of a fluid to be dispensed by a pneumatic nozzle, the condition of the fluid including a temperature of the fluid; determine a ratio of a first liquid, a second liquid, and a superheated vapor that combine to result in the condition of the fluid; and cause the first liquid, the second liquid, and the superheated vapor to be provided to the pneumatic nozzle in proportions defined by the ratio.
Owner:INTEL CORP

Inspection device and inspection method

To provide a technique that can improve accuracy of movement correction in a stage of moving relative to a probe card.SOLUTION: An inspection device perform electrical inspection of a substrate. The inspection device includes a probe card having a plurality of probes, a stage on which the substrate is placed, the substrate is moved relative to the probe card, and the substrate is brought into contact with the plurality of probes, and a control unit that controls the movement of the stage. The control unit uses a first displacement amount based on a vertical load of the probe card and a second displacement amount based on an unbalanced load of the probe card tilted with respect to the vertical load to calculate a three-dimensional correction amount in the unbalanced load and move the stage on the basis of the calculated correction amount.SELECTED DRAWING: Figure 4
Owner:TOKYO ELECTRON LTD