Method for measuring S parameter and terminal equipment

Abstract

The invention is applicable to the technical field of measurement of microwave characteristics of wafer-level semiconductor devices, and provides a method for measuring an S parameter and terminal equipment. The method comprises the steps that vector calibration is conducted by using a basic calibration kit, and an 8-term error model is obtained; according to a system error item in the 8-term error model, crosstalk correction is conducted, at least two standard crosstalk pieces at the position of a to-be-measured piece are measured, and two crosstalk items are obtained; according to the systemerror item in the 8-term error model and the two crosstalk items, vector calibration is conducted, the to-be-measured piece is measured, and the S parameter of the to-be-measured piece is obtained. By means of the method, the problem about the influence of the crosstalk error items between probes in the high-frequency on-chip measurement process and the problem about a large random error caused by a single crosstalk standard in the crosstalk correction process can be solved, and the measurement accuracy of the high-frequency on-chip S parameter is further improved.

Description

technical field [0001] The invention belongs to the technical field of microwave characteristic measurement of wafer-level semiconductor devices, and in particular relates to a method for detecting S parameters and terminal equipment. Background technique [0002] A large number of "on-chip S-parameter test systems" equipped in the microelectronics industry require vector calibration of on-chip calibration components before use. The types of calibration components include SOLT (Short-Open-Load-Thru, short-circuit open-circuit load through), SOLR (Short-Open-Load-Reciprocal, short-circuit open-circuit load reciprocity), TRL (Thru-Reflect-Line, straight-through reflection line), LRM (Line-Reflect-Match, line reflection matching), LRRM (Line-Reflect-Reflect -Match, line reflection reflection matching), etc. Usually SOLT, SOLR, LRM, and LRRM use a 12-term error model, while TRL and MultilineTRL use an 8-term system error model. The calibration parts characterize the imperfecti...

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Problems solved by technology

[0004] In view of this, the embodiment of the present invention provides a method and terminal equipment for detecting S parameters, which solves the influence of the crosstalk error term between probes and probes in the high-frequency on-chip test process, and solves the problem of a single crosstalk error in the crosstalk correction process. The large random error caused by the standard further improves the measurement accuracy of high-frequency on-chip S-parameters

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