Motor heat dissipation device, motion system and semiconductor device

Abstract

The present invention discloses a motor heat dissipation device, a motion system and a semiconductor device. The motor heat dissipation device includes: a motor stator and a motor rotor, the motor rotor being configured to be able to reciprocate relative to the motor stator; a heat exchange pipeline disposed on the motor rotor and performing heat exchange with the motor rotor; a condensation chamber connected to one end of the heat exchange pipeline, wherein a plurality of condensation fins that are interconnected and internally provided with a coolant are arranged in the condensation chamber, and a gas medium contacts the condensation fins to be converted into a liquid medium and flows into the heat exchange pipeline; a check valve connected to the other end of the heat exchange pipeline and connected to the condensation chamber, the heat exchange between the heat exchange pipeline and the motor rotor causes the liquid medium in the heat exchange pipeline to be converted into a gas medium and enter the check valve, and the check valve is used to introduce the gas medium into the condensation chamber and prevent the liquid medium in the condensation chamber from flowing back. The present invention solves the heat dissipation problem of the motor in a vacuum environment, reduces the influence on the vibration of equipment, especially power components, and ensures the airtightness in a vacuum environment.

Description

Technical Field

[0001] The invention relates to a motor heat dissipation device, a motion system and semiconductor equipment, and belongs to the technical field of motor heat dissipation. Background Art

[0002] In semiconductor front-end measurement equipment, the cavity is a vacuum environment. A linear motor is installed in the cavity to drag the load platform to reciprocate. When the current passes through the rotor winding of the linear motor, ohmic heat is generated. Compared with the atmospheric environment, the heat generated by the motor in a vacuum environment is difficult to dissipate and conduct due to the lack of heat convection, which will cause local overheating of the motor, affecting its working efficiency and motion accuracy.

[0003] At present, most motors use two methods for heat dissipation: one is air cooling and the other is liquid cooling. Air cooling usually uses fans and other forms to remove heat from the surface of the motor by enhancing convection. However, since the working environment here is a vacuum environment and there is no convection, air cooling is not applicable. Liquid cooling usually uses a heat exchanger design, which requires the layout of complex pipes to remove heat through the cold flow medium, and the circulation of the liquid usually requires the introduction of an external pump. Since the heat-generating part of the linear motor is the rotor coil, the movement process makes it difficult to arrange the pipes. Even if flexible connections such as hoses are used, there is a risk of coolant leakage; secondly, the introduction of fluid media and external pumps inevitably requires openings in the cavity, which can easily destroy the vacuum environment of the cavity; in addition, the introduction of the pump also adds a new source of vibration, affecting the stable operation of the equipment.

[0004] With respect to the above-mentioned problems in the prior art, no effective solution has been proposed yet. Summary of the invention

[0005] To solve the above problems, the present invention provides a motor heat dissipation device, a motion system and a semiconductor device. The motor heat dissipation device can achieve cooling and heat dissipation of the motor, especially cooling and heat dissipation of a linear motor arranged in a vacuum cavity.

[0006] In a first aspect, the present invention provides a motor heat dissipation device, comprising:

[0007] A motor stator and a motor mover, wherein the motor mover is configured to be capable of reciprocating motion relative to the motor stator;

[0008] A heat exchange pipe, disposed on the motor mover and exchanging heat with the motor mover;

[0009] A condensation chamber connected to one end of the heat exchange pipe, wherein a plurality of condensation plates which are interconnected and have a coolant inside are arranged in the condensation chamber, and the gas medium is converted into a liquid medium in contact with the condensation plates and flows into the heat exchange pipe;

[0010] A check valve is connected to the other end of the heat exchange pipe and is connected to the condensation chamber. The heat exchange pipe exchanges heat with the motor rotor, causing the liquid medium in the heat exchange pipe to be converted into a gas medium and enter the check valve. The check valve is used to introduce the gas medium into the condensation chamber and prevent the liquid medium in the condensation chamber from flowing back.

[0011] In an embodiment of the present invention, a telescopic chamber is further included. The telescopic chamber is installed on the base, one end of which is fixedly connected to the base, and the other end is connected to the coolant inside several of the condensation fins through a coolant pipe. A plurality of the telescopic chambers are arranged in parallel. The telescopic chambers are arranged in pairs, and the two ends of the telescopic chambers arranged in pairs that are fixedly connected to the base are arranged in opposite directions, so that the telescopic directions of the two telescopic chambers arranged in pairs are opposite.

[0012] In an embodiment of the present invention, a flow channel is provided in the base. The flow channel is connected to the telescopic chamber. An installation groove is provided near the flow channel in the base, and a cooling source is provided in the installation groove.

[0013] In an embodiment of the present invention, the heat exchange pipe, the condensation chamber, the check valve, and the telescopic chamber move synchronously with the motor rotor.

[0014] In an embodiment of the present invention, the inside of the condensation fin is a hollow structure and is provided with coolant. A circulation pipe is arranged through several of the condensation fins and is interconnected through the circulation pipe. The condensation fin is arranged in an inclined downward conical structure. The bottom of the circulation pipe is connected to a coolant pipe through a coolant channel, and the coolant in the circulation pipe flows into the coolant pipe through the coolant channel.

[0015] In an embodiment of the present invention, the height of the inner bottom surface of the condensation chamber is configured to decrease from the middle to both sides. Liquid storage grooves are provided on both sides of the inner bottom surface of the condensation chamber. A liquid passage port is provided on the side wall of the condensation chamber near the liquid storage groove, and the liquid passage port is connected to the heat exchange pipe.

[0016] In an embodiment of the present invention, one end of the heat exchange pipe is connected to a liquid passage pipe, and the liquid passage pipe is connected to the condensation chamber. The condensation chamber is located above the heat exchange pipe, so that the liquid medium in the condensation chamber flows into the heat exchange pipe through the liquid passage pipe under the action of gravity.

[0017] In an embodiment of the present invention, the other end of the heat exchange pipe is connected to a first joint, the first joint is connected to a ventilation pipe, and the ventilation pipe is connected to the check valve through a second joint.

[0018] In an embodiment of the present invention, the condensation chamber has a ventilation port, and the ventilation port is communicated with the outlet of the check valve through a connection channel. The connection channel is of a tapered port structure, and the inner diameter of the end thereof connected to the condensation chamber is larger than the inner diameter of the other end thereof connected to the check valve.

[0019] In a second aspect, the present invention provides a motion system, including the motor heat dissipation device described above. The motion system further includes a motion platform, and a carrying boss for carrying devices is arranged on the motion platform; the motion platform is connected to the motor mover, the motor stator is fixed to the base, a guide rail is arranged on the base, the motion platform is movably connected to the guide rail, and the motor mover drives the motion platform to move along the guide rail; wherein, the check valve is embedded in the motion platform, the condensation chamber is fixedly installed on the motion platform, and the connection channel is arranged in the motion platform.

[0020] In a third aspect, the present invention provides a semiconductor device, including the motor heat dissipation device or the motion system described above. The semiconductor device further includes a working chamber, and the motor heat dissipation device or the motion system is installed in the working chamber.

[0021] The beneficial effects of the present invention are as follows:

[0022] The motor heat dissipation device, motion system and semiconductor device provided by the present invention use the cycle of gas-liquid phase change to take away the heat on the motor mover. There is no need to introduce a circulating power source. Relying on the height difference of the structural design, the liquid phase change medium flows through the heat exchange pipeline arranged on the motor mover by gravity, absorbs heat and volatilizes into gas to take away the heat. The gas enters the condensation chamber, and condensation fins are arranged above the condensation chamber. When the gas contacts the condensation fins, it liquefies and drips into the liquid storage tank, and then flows back into the heat exchange pipeline from the liquid storage tank to realize the cycle. A coolant is arranged in the condensation fins, and through the internal circulation, the coolant is transferred to the base at the bottom to transfer the heat to the outside of the cavity. Correspondingly, the linear guide rail, the condensation chamber, the motion platform, the liquid pipeline, the gas pipeline and the motor mover are connected to each other to form a whole and move reciprocally synchronously, without relative movement, which increases the stability of the connection part; at the same time, the reciprocating movement of the motor also provides power for the cycle of liquid flow to ensure the full operation of the whole device.

[0023] The present invention solves the heat dissipation problem of the motor in a vacuum environment, which can effectively improve the operation stability and service life of the motor. In addition, after the heat dissipation power is reduced, the energy utilization rate of the motor is higher, the energy density of the motor is increased, and a smaller model and size of the motor can be used for load driving, saving space and being more conducive to the layout of equipment. Moreover, the overall use of the evaporation heat absorption of the gas-liquid phase change medium takes away the heat of the motor rotor. Compared with the traditional heat conduction and heat exchange, the efficiency of phase change heat absorption is higher. The motor relies on its own movement and the installation design height difference as the power source, without introducing power components such as pumps, greatly reducing the impact on the whole machine equipment, especially the impact of the vibration of power components, and ensuring the stable operation of the equipment. Secondly, the problem of heat dissipation of vacuum moving parts is solved. All pipeline connections and moving platforms move synchronously as a whole, without relative movement, and the connection and installation of pipelines are more stable, ensuring airtightness in a vacuum environment and ensuring the vacuum degree requirement for the operation of the equipment. In addition, the device realizes the self-circulation of the coolant. Without introducing any power source, the coolant can self-circulate and be transmitted to the base in the vacuum cavity to realize heat exchange with the outside world. BRIEF DESCRIPTION OF THE DRAWINGS

[0024] Figure 1 FIG. is a perspective view of the motor heat dissipation device provided by an embodiment of the present invention.

[0025] Figure 2 FIG. is a perspective view of another angle of the motor heat dissipation device provided by an embodiment of the present invention.

[0026] Figure 3 FIG. is the front view of the motor heat dissipation device provided by an embodiment of the present invention.

[0027] Figure 4 FIG. is the rear view of the motor heat dissipation device provided by an embodiment of the present invention.

[0028] Figure 5 FIG. is a perspective view of the motor heat dissipation device provided by an embodiment of the present invention without a moving platform.

[0029] Figure 6 FIG. is a perspective view of a partial structure of the motor heat dissipation device provided by an embodiment of the present invention.

[0030] Figure 7 FIG. is the top view of a partial structure of the motor heat dissipation device provided by an embodiment of the present invention.

[0031] Figure 8 FIG. is a schematic diagram of the internal structure of the condensation chamber provided by an embodiment of the present invention.

[0032] Figure 9 FIG. is the bottom view of the condensation chamber provided by an embodiment of the present invention.

[0033] Figure 10 isFigure 9 The A-A sectional view in

[0034] Figure 11 The perspective view of the motor heat dissipation device provided by the embodiment of the present invention without the base.

[0035] Figure 12 The schematic diagram of the internal structure of the motor heat dissipation device provided by the embodiment of the present invention without the base from a three-dimensional perspective.

[0036] Figure 13 The schematic diagram of the internal structure of the motor heat dissipation device provided by the embodiment of the present invention without the base from a planar perspective.

[0037] Figure 14 The bottom view of the motor heat dissipation device provided by the embodiment of the present invention.

[0038] Figure 15 is Figure 14 the B-B sectional view in

[0039] Figure 16 The schematic diagram of the movement of the coolant circulation system provided by the embodiment of the present invention.

[0040] In the figure: 1. Base; 2. Guide rail; 3. Moving platform; 31. Carrying boss; 4. Motor stator; 5. Motor rotor; 6. Heat exchange pipe; 7. First joint; 8. Vent pipe; 9. Condensation chamber; 91. Mounting ear seat; 92. Condensation fin; 93. Circulation pipe; 94. Liquid inlet; 95. Vent port; 96. Liquid storage tank; 97. Coolant channel; 10. Liquid pipe; 11. Second joint; 12. Check valve; 13. Locking nut; 14. Flange; 15. Connection channel; 16. Coolant pipe; 17. Expansion chamber; 18. Mounting seat; 19. Flow channel; 20. Mounting groove. Detailed implementation manners

[0041] Next, the technical solutions of the present invention will be clearly and completely described in conjunction with the accompanying drawings. Obviously, the described embodiments are some, but not all, of the embodiments of the present invention. All other embodiments obtained by those of ordinary skill in the art based on the embodiments of the present invention without creative efforts shall fall within the protection scope of the present invention.

[0042] In the description of the present invention, it should be noted that the orientation or positional relationship indicated by the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc. is based on the orientation or positional relationship shown in the drawings. It is only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be construed as a limitation to the present invention. In addition, the terms "first" and "second" are only used for descriptive purposes and cannot be construed as indicating or implying relative importance. Among them, the terms "first position" and "second position" are two different positions.

[0043] In the description of the present invention, it should be noted that unless otherwise clearly specified and defined, the terms "mounted", "connected", and "connected" should be understood in a broad sense. For example, it can be a fixed connection or a detachable connection; it can be a mechanical connection or an electrical connection; it can be directly connected or indirectly connected through an intermediate medium, and it can be the connection inside two elements. For those of ordinary skill in the art, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0044] The embodiments of the present application provide a motor heat dissipation device, a motion system, and a semiconductor device. The motor heat dissipation device can achieve heat dissipation for the motor, especially for cooling the linear motor arranged in the vacuum chamber, and can also achieve heat dissipation for the other motors arranged in the vacuum chamber.

[0045] Please refer to Figure 1 、 Figure 2 、 Figure 3 、 Figure 4 、 Figure 5 、 Figure 6 、 Figure 7 and Figure 8 , the motor includes a motor stator 4 and a motor mover 5. The motor mover 5 can perform a non-contact reciprocating motion in the groove provided in the motor stator 4. The motor stator 5 can be fixed on the base 1. Guide rails 2 are provided on both sides of the base 1. The moving platform 3 is movably connected to the guide rails 2. The motor mover 5 drives the moving platform 3 to move along the guide rails 2.

[0046] Since the main heat - generating part during the operation of the motor is the rotor coil part of the motor, it is necessary to cool and dissipate the heat of the motor rotor 5. The embodiment of the present application provides a motor heat - dissipation device. This motor heat - dissipation device uses the evaporation heat absorption of the gas - liquid phase - change medium to take away the heat of the motor rotor 5. The heat absorption by phase change has a higher heat - transfer efficiency compared with traditional heat exchange, and then the absorbed heat is circulated through the coolant in the condensation fin 92 to transfer the heat outside the device. The entire gas - liquid phase - change system of this motor heat - dissipation device can be divided into three parts, one part is the connection structure of the heat - exchange pipeline 6, one part is the condensation chamber 9 structure, and one part is the check - valve 12 structure.

[0047] In some embodiments, the motor heat - dissipation device includes a heat - exchange pipeline 6. One end of the heat - exchange pipeline 6 is connected to a first joint 7, the first joint 7 is connected to a ventilation pipe 8, the ventilation pipe 8 is connected to a check - valve 12 through a second joint 11, and one end of this heat - exchange pipeline 6 is the gas - flow end; the other end of the heat - exchange pipeline 6 can be connected to a liquid - passing pipe 10 through a lock nut 13, and the liquid - passing pipe 10 is connected to the condensation chamber 9, and the other end of this heat - exchange pipeline 6 is the liquid - flow end. Exemplarily, the first joint 7 can be selected as a right - angle elbow, and the second joint 11 can be selected as a tee joint.

[0048] Please refer to Figure 6 、 Figure 7 、 Figure 8 、 Figure 9 、 Figure 10 、 Figure 11 and Figure 12 In some embodiments, the condensation chamber 9 stores a liquid medium for gas - liquid phase change. A condensation fin 92 is arranged in the condensation chamber 9. The inside of the condensation fin 92 is a hollow structure and is provided with coolant. A circulation pipe 93 passes through between several condensation fins 92 and is interconnected through the circulation pipe 93. The bottom of the circulation pipe 93 is connected to a coolant channel 97, and the bottom of the coolant channel 97 is connected to a coolant pipe 16. The coolant can flow out of the condensation chamber 9 through the coolant channel 97 and enter the coolant pipe 16. Several condensation fins 92 are connected together through the circulation pipe 93, which can realize the circulation flow of the coolant and prevent the coolant from being trapped in the hollow structure of the condensation fin 92 without flowing. Exemplarily, the condensation chamber 9 can be fixedly installed below the moving platform 3 through the mounting lugs 91 provided on both side walls at its two ends.

[0049] Furthermore, several condensation fins 92 are arranged in an inclined - downward conical structure, and the height of the inner bottom surface of the condensation chamber 9 is configured to decrease from the middle to both sides, that is, the inner bottom surface of the condensation chamber 9 is set to have a slope with a higher middle and lower sides. There are liquid - storage grooves 96 sunken downward on both sides of the inner bottom surface of the condensation chamber 9, and a liquid - passing port 94 is arranged on the side wall of the condensation chamber 9 near the liquid - storage groove 96. The liquid - passing port 94 is connected to the liquid - passing pipe 10.

[0050] Furthermore, a ventilation port 95 is provided on one side wall of the condensation chamber 9. The ventilation port 95 is located above the middle of the inner bottom surface of the condensation chamber 9 and is higher than the liquid storage tank 96. Thus, the height difference between the ventilation port 95 and the liquid storage tank 96 can prevent the liquid medium stored in the liquid storage tank 96 from flowing out through the ventilation port 95, avoiding the backflow of the liquid medium.

[0051] Specifically, the gas of the gas-liquid phase change enters the condensation chamber 9 through the ventilation port 95. When the gas contacts the condensation fins 92 above the interior of the condensation chamber 9, it liquefies and transforms into a liquid, and the liquid will drip down along the condensation fins 92 to the bottom. A number of condensation fins 92 are arranged in an inclined downward conical structure to facilitate the downward dripping of the liquid. The condensation fins 92 are arranged above the cavity. The interior of the condensation fins 92 is hollow and filled with circulating coolant, which can effectively promote the liquefaction of the phase change medium and is beneficial to the liquefaction process. Due to the slope design of the inner bottom surface of the condensation chamber 9, the bottom presents a slope, which is convenient for the liquefied liquid to flow and accumulate. The accumulated liquid will flow to the two low-lying sides. The liquid storage tanks 96 arranged in a downward concave shape on both sides of the inner bottom surface of the condensation chamber 9 can store the liquid medium of the gas-liquid phase change and provide a buffering effect when the phase change speed is relatively fast and the cavity is filled with liquid. A liquid discharge port 94 is provided on the side wall of the condensation chamber 9 near the liquid storage tank 96, and the liquid medium flows out of the condensation chamber 9 through the liquid discharge port 94 and enters the externally connected liquid discharge pipe 10.

[0052] Please refer to Figure 5 、 Figure 7 、 Figure 11 、 Figure 12 and Figure 13 , in some embodiments, the heat exchange pipe 6 is arranged on the motor rotor 5. Specifically, the heat exchange pipe 6 can be embedded inside the motor rotor 5, and can be integrally formed with the motor rotor 5 by pouring epoxy resin, or can be installed on the surface of the motor rotor 5. The heat exchange pipe 6 can adopt an S-shaped pipeline design, and its structure is in an "S" shape, which can fully increase the contact area with the motor rotor 5 and improve the heat exchange efficiency; preferably, the heat exchange pipe 6 can adopt a material with high thermal conductivity.

[0053] Furthermore, the condensation chamber 9 and the liquid pipe 10 are higher than the heat exchange pipe 6. The reasonable structural arrangement of the condensation chamber 9 enables the liquid to achieve circulating heat dissipation by its own gravity. Specifically, the liquid medium flowing out of the condensation chamber 9 flows into the liquid pipe 10. Due to the height difference, the liquid medium will flow into the heat exchange pipe 6 under the action of gravity. The heat exchange pipe 6 is made of a material with high thermal conductivity, such as copper pipe, etc. The flow channel of the heat exchange pipe 6 is designed as an S-shaped coiled structure to fully contact the motor rotor 5 and increase the contact area of heat transfer. Correspondingly, the heat exchange pipe 6 can be embedded inside the motor rotor 5, and can be integrally formed with the motor rotor 5 by pouring epoxy resin, or can be attached to the surface of the motor rotor 5. The liquid phase change medium absorbs heat and undergoes a phase change after passing through the heat exchange pipe 6, and gradually changes from liquid to gas in the heat exchange pipe 6. The gaseous phase change media on both sides flow into the check valve 12 through the gas pipe 8 via the second joint 11.

[0054] In some embodiments, the check valve 12 can be a Tesla valve. The Tesla valve is a non-return valve that simply uses the flow channel design and does not require moving parts. The structure of the Tesla valve consists of a series of alternating pipeline branches. When the fluid enters the pipeline in the forward direction, it can basically flow through unobstructed without being hindered; but when entering from the other direction, the fluid flowing out of the annular branch will collide head-on with the fluid on the inclined branch, thus hindering the flow of the fluid. After passing through multiple pipeline branches, very little fluid can flow out of the pipe orifice, and even the fluid flow can be controlled to prevent it from flowing out, thus playing the role of a check valve.

[0055] Furthermore, the vent 95 of the condensation chamber 9 is connected to the outlet of the check valve 12 through a connection channel 15. The connection channel 15 is a conical orifice structure, and the inner diameter of the end connected to the condensation chamber 9 is larger than the inner diameter of the end connected to the check valve 12.

[0056] Specifically, after passing through the check valve 12, the gasified gas ensures the unidirectional flow of the gas, and then flows into the connection channel 15 opened inside the moving platform 3. The design of the connection channel 15 with a conical orifice structure can ensure that the liquid does not flow back, and the pre-installed check valve 12 can further prevent the liquid from flowing back into the gas pipe 8. In this embodiment of the present application, the Tesla valve is used as the non-return valve 12 for gas flow. Combined with the conical structure of the connection channel 15, it is convenient for the gas to pass through and prevents the liquid from flowing back, realizing gas-liquid separation, ensuring that the gas-liquid two phases do not interfere with each other in their respective spaces. When the gas flows through the connection channel 15, it enters the condensation chamber 9, and liquefaction occurs in the condensation chamber 9, starting a new cycle of gas-liquid phase change.

[0057] The heat of the motor rotor 5 is removed by the above-mentioned gas-liquid phase change system. However, since this is a sealed vacuum environment, if the heat on the condensation fin 92 is not transferred out in time, the temperature of the condensation fin 92 will slowly rise, affecting the subsequent gas-liquid phase change process. Therefore, the motor heat dissipation device is also equipped with a coolant circulation system.

[0058] Please refer to Figure 3 、 Figure 4 、 Figure 11 、 Figure 12 、 Figure 13 、 Figure 14 、 Figure 15 and Figure 16 In some embodiments, the coolant circulation system of the motor heat dissipation device includes a telescopic cavity 17. The telescopic cavity 17 is located below the condensation cavity 9. The coolant channels 97 of the telescopic cavity 17 and the condensation cavity 9 are connected by a coolant pipe 16. The coolant pipe 16 is connected to the telescopic cavity 17 through a flange 14. Optionally, the telescopic cavity 17 is installed above the base 1. One end of it is fixedly connected to the mounting seat 18 provided on the base 1, and the other end is connected to the coolant pipe 16. Among them, the telescopic cavity 17 is a cavity that can be telescoped. Exemplarily, the telescopic cavity 17 can be a telescopic pipe fitting, such as a corrugated pipe or other structures. The coolant pipe 16 is connected to the telescopic cavity 17. While ensuring the vacuum tightness, the vacuum telescopic cavity 17 is compressed and elongated by the moving platform 3, thereby driving the liquid in the pipeline to circulate reciprocally, realizing the self-circulation of the coolant.

[0059] Furthermore, the telescopic cavities 17 are arranged in pairs, and multiple telescopic cavities 17 are arranged in parallel. The two ends of the two telescopic cavities 17 arranged in pairs that are fixedly connected to the base 1 are arranged in opposite directions, that is, the positions of the fixed ends of the two telescopic cavities 17 are opposite, so that the telescopic directions of the two telescopic cavities 17 arranged in pairs are opposite. That is, when one of the two telescopic cavities 17 arranged in pairs is in the extended state, the other is in the compressed state, ensuring that the total volume of the coolant in the circulation system remains unchanged. Optionally, the telescopic cavities 17 can be set to an even number. In this embodiment, the telescopic cavities 17 are set to two, a total of one pair.

[0060] Taking the two telescopic cavities 17 provided in this embodiment as an example, when the moving platform 3 moves, the moving platform 3 drives the condensation cavity 9 to move, and the condensation cavity 9 drives the telescopic cavity 17 to do telescopic motion through the coolant pipe 16. Since the positions of the fixed ends of the two telescopic cavities 17 are opposite, when one telescopic cavity 17 is in the compressed state, the other telescopic cavity 17 is in the extended state. This design can ensure that the volume of the coolant remains constant.

[0061] Optionally, a flow channel 19 is provided inside the base 1. The flow channel 19 is communicated with the telescopic cavity 17. The circulation pipe 93 of the condensation cavity 9 is communicated with the flow channel 19 through a plurality of coolant channels 97, a plurality of coolant pipes 16, and a plurality of telescopic cavities 17, so as to realize the circulating flow of the coolant. Among them, the number of the coolant channels 97, the coolant pipes 16, and the telescopic cavities 17 is the same.

[0062] Optionally, an installation groove 20 is provided at the bottom of the base 1. The installation groove 20 is as close as possible to the flow channel 19. Since the base 1 at the bottom is fixed, a cooling source can be placed in the installation groove 20. The cooling source can be a cooling liquid source, a cooling fan, etc., for heat exchange with the outside world, so as to take away the heat of the coolant in the flow channel 19 inside the base 1.

[0063] The coolant circulation system provided by this embodiment of the present application does not introduce an external power source. The circulation of the coolant does not rely on an external pump to provide power, and completely relies on the reciprocating motion of the motor itself to realize the internal circulation of the coolant, which greatly reduces the impact on the whole machine equipment, especially the impact of the vibration of the power components, and ensures the stable operation of the equipment. The flow direction of the circulating liquid is as Figure 16 shown. When the moving platform 3 moves to the left, the coolant pipe 16 drives the first telescopic cavity ( Figure 16 the bellows 1 therein) to move to the left. The first telescopic cavity is compressed, and the coolant flows from right to left in the first telescopic cavity, enters the flow channel 19 inside the base 1, and flows from left to right in the flow channel 19. The coolant enters the second telescopic cavity ( Figure 16 the bellows 2 therein). The second telescopic cavity is driven by the coolant pipe 16 to be in an extended state, and the coolant also moves from right to left in the second telescopic cavity, flows into the coolant pipe 16, and enters the circulation pipe 93 of the coolant. When the moving platform 3 moves to the right, the coolant pipe 16 drives the second telescopic cavity to be compressed. The coolant flows from left to right in the second telescopic cavity, enters the flow channel 19 inside the base 1, and flows from right to left in the flow channel 19. The coolant enters the first telescopic cavity. The first telescopic cavity is driven by the coolant pipe 16 to be in an extended state. The coolant moves from left to right in the first telescopic cavity, flows into the coolant pipe 16, and enters the circulation pipe 93 of the coolant. Thus, the internal circulation of the coolant is realized through the reciprocating motion of the motor.

[0064] In addition, the embodiment of the present application also provides a motion system. The motion system includes the above-mentioned motor heat dissipation device. In some embodiments, the motion system further includes a base 1 and a moving platform 3. The moving platform 3 is connected to the motor mover 5. The motor stator 4 is fixed to the base 1. The base 1 is provided with a guide rail 2. The moving platform 3 is movably connected to the guide rail 2. The motor mover 5 drives the moving platform 3 to move along the guide rail 2. Among them, the check valve 12 is embedded in the moving platform 3. The condensation cavity 9 can be fixedly installed below the moving platform 3 through the mounting lugs 91 provided on its side wall. The connection channel 15 is arranged in the moving platform 3.

[0065] In this embodiment, the entire moving platform 3 is fixedly installed on the linear guide rails 2 on both sides of the base 1. The guide rails 2 play a supporting role. When the motor is powered on, the motor mover 5 drives the heat exchange pipeline 6 and the moving platform 3 to move reciprocally together. Thus, when the motor mover 5 of the motion system drags the moving platform 3 to move reciprocally, ohmic heat will be generated when the current passes through the motor mover winding. The motor heat dissipation device provided by the embodiment of the present application can effectively cool and dissipate heat from the motor.

[0066] Since the condensation chamber 9 and the check valve 12 are arranged below the moving platform 3, in order to prevent uneven heat on the moving platform 3 from affecting the accuracy of the devices carried on the moving platform 3, a carrying boss 31 for carrying devices is provided on the moving platform 3. Due to the small contact area and low thermal conductivity of the carrying boss 31, the operating stability and accuracy of the devices on the moving platform 3 can be ensured.

[0067] The present application integrates the motor mover 5, the heat exchange pipeline 6, the moving platform 3, the condensation chamber 9, the check valve 12, and the guide rail 2 into an integrated layout to form a whole, which can move synchronously, ensuring the stability of the heat dissipation connection of the moving parts; at the same time, the reciprocating motion of the linear motor is used as the power source for the gas-liquid flow and the coolant flow, eliminating the introduction of additional power source components, saving costs, and reducing the impact on the whole machine equipment, especially the impact of the vibration of the power components; in addition, the heat exchange pipeline 6 is directly arranged on the motor mover 5, the check valve 12 of the gas flow channel and the condensation chamber 9 for liquid condensation are both arranged below the moving platform 3, and the overall structure is compact, saving space, which is beneficial to the layout of the remaining equipment.

[0068] In addition, the embodiment of the present application also provides a semiconductor device, which includes the above-mentioned motor heat dissipation device or motion system. In some embodiments, the semiconductor device further includes a working chamber, and the motor heat dissipation device or motion system is installed in the working chamber. Specifically, the base 1 can be installed at the bottom of the working chamber.

[0069] Among them, the working chamber can be a vacuum working chamber. The internal environment of the vacuum working chamber is a vacuum. When the motor mover 5 in the chamber drags the moving platform 3 to move reciprocally, ohmic heat will be generated when the current passes through the motor mover winding. The motor heat dissipation device provided by the embodiment of the present application can effectively cool and dissipate heat from the motor, especially for cooling and dissipating heat from the linear motor arranged in the vacuum chamber, and can also cool and dissipate heat from the remaining motors arranged in the vacuum chamber.

[0070] In addition, in addition to the above-mentioned method of using the coolant pipe 16 in conjunction with the telescopic cavity 17 to introduce the coolant into the flow channel 19 of the base 1 and then exchanging heat with the outside world, the coolant circulation system of the motor heat dissipation device in the semiconductor device can also adopt a flexible hose connection method. Specifically, an interface connected to the hose can be set at the outlet of the condensation chamber 9, and an interface and hose connection are designed on the vacuum working chamber, and connected to external power source equipment, such as a circulating pump, etc., so as to realize the circulation of the coolant and heat transfer to the outside world.

[0071] In summary, the motor heat dissipation device, motion system and semiconductor equipment provided by the present application solve the heat dissipation problem of the motor in a vacuum environment, and can effectively improve the running stability and service life of the motor. In addition, after the heat dissipation power is reduced, the energy utilization rate of the motor is higher, the energy density of the motor is improved, and a motor of smaller model and size can be used for load dragging, which saves space and is more conducive to the layout of the equipment; and the evaporation absorption of the gas-liquid phase change medium is used as a whole to remove the heat of the motor mover. Compared with traditional heat conduction and heat exchange, the efficiency of phase change heat absorption is higher. The motor relies on its own movement and the height difference of the installation design as the power source, and there is no need to introduce power elements such as pumps, which greatly reduces the impact on the whole equipment, especially the impact of the vibration of the power element, and ensures the stable operation of the equipment; secondly, the problem of heat dissipation of vacuum moving parts is solved, all pipeline connections and motion platforms move synchronously as a whole, there is no relative movement, and the connection and installation of the pipeline are more stable, ensuring the airtightness in the vacuum environment and ensuring the vacuum degree requirements of the equipment; in addition, the device realizes the self-circulation of the coolant, and the coolant can be self-circulated without introducing any power source, and transferred to the base in the vacuum cavity to realize heat exchange with the outside world.

[0072] The above embodiments are only used to illustrate the technical solutions of the present application, rather than to limit them. Although the present application has been described in detail with reference to the aforementioned embodiments, those skilled in the art should understand that they can still modify the technical solutions described in the aforementioned embodiments, or make equivalent replacements for some of the technical features therein. These modifications or replacements do not deviate the essence of the corresponding technical solutions from the spirit and scope of the technical solutions of the embodiments of the present application, and should all be included in the protection scope of the present application.

Claims

1. A motor heat dissipation device, characterized in that: include: A motor stator (4) and a motor mover (5), wherein the motor mover (5) is configured to be capable of reciprocating relative to the motor stator (4); A heat exchange pipe (6) is arranged on the motor mover (5) and performs heat exchange with the motor mover (5); A condensation chamber (9) is connected to one end of the heat exchange pipe (6), wherein a plurality of condensation plates (92) which are interconnected and have a cooling liquid inside are arranged in the condensation chamber (9), and the gas medium is converted into a liquid medium upon contact with the condensation plates (92) and flows into the heat exchange pipe (6); a check valve (12) connected to the other end of the heat exchange pipe (6) and connected to the condensation chamber (9); the heat exchange pipe (6) and the motor rotor (5) perform heat exchange so that the liquid medium in the heat exchange pipe (6) is converted into a gas medium and enters the check valve (12); the check valve (12) is used to introduce the gas medium into the condensation chamber (9) and prevent the liquid medium in the condensation chamber (9) from flowing back; It also includes a telescopic chamber (17), wherein the telescopic chamber (17) is installed on the base (1), one end of which is fixedly connected to the base (1), and the other end is connected to the coolant inside a plurality of the condensing plates (92) through a coolant pipe (16); a plurality of the telescopic chambers (17) are arranged in parallel, and the telescopic chambers (17) are arranged in pairs, and the two telescopic chambers (17) arranged in pairs are arranged opposite to one end fixedly connected to the base (1), so that the telescopic directions of the two telescopic chambers (17) arranged in pairs are opposite.

2. The motor heat dissipation device according to claim 1, characterized in that: A flow channel (19) is provided in the base (1), the flow channel (19) is communicated with the telescopic cavity (17), and a mounting groove (20) is provided on the base (1) near the flow channel (19), and a cooling source is provided in the mounting groove (20).

3. The motor heat dissipation device according to claim 1, characterized in that: The heat exchange pipe (6), the condensation chamber (9), the check valve (12), and the telescopic chamber (17) move synchronously with the motor mover (5).

4. The motor heat dissipation device according to claim 1, characterized in that: The interior of the condensing sheet (92) is a hollow structure and is provided with a coolant. A circulation pipe (93) is passed through a plurality of the condensing sheets (92) and the condensing sheets (92) are interconnected through the circulation pipe (93). The condensing sheets (92) are arranged in a downwardly inclined conical structure. The bottom of the circulation pipe (93) is connected to a coolant pipe (16) through a coolant channel (97). The coolant in the circulation pipe (93) flows into the coolant pipe (16) through the coolant channel (97).

5. The motor heat dissipation device according to claim 1, characterized in that: The height of the inner bottom surface of the condensing chamber (9) is configured to decrease from the middle to both sides, and downwardly recessed liquid storage tanks (96) are provided on both sides of the inner bottom surface of the condensing chamber (9), and a liquid through hole (94) is provided on the side wall of the condensing chamber (9) near the liquid storage tank (96), and the liquid through hole (94) is connected to the heat exchange pipe (6).

6. The motor heat dissipation device according to claim 1, characterized in that: One end of the heat exchange pipe (6) is connected to a liquid pipe (10), and the liquid pipe (10) is connected to the condensation chamber (9). The condensation chamber (9) is located above the heat exchange pipe (6), so that the liquid medium in the condensation chamber (9) flows into the heat exchange pipe (6) through the liquid pipe (10) under the action of gravity.

7. The motor heat dissipation device according to claim 1, characterized in that: The other end of the heat exchange pipe (6) is connected to a first joint (7), the first joint (7) is connected to a vent pipe (8), and the vent pipe (8) is connected to the check valve (12) via a second joint (11).

8. The motor heat dissipation device according to claim 1, characterized in that: The condensation chamber (9) has a vent (95), and the vent (95) is connected to the outlet of the check valve (12) via a connecting channel (15). The connecting channel (15) is a conical port structure, and the inner diameter of one end connected to the condensation chamber (9) is larger than the inner diameter of the other end connected to the check valve (12).

9. A motion system, characterized in that The motor heat dissipation device comprises the motor heat dissipation device as described in claim 8, wherein the motion system further comprises a motion platform (3), and the motion platform (3) is provided with a bearing boss (31) for bearing components; the motion platform (3) is connected to the motor mover (5), the motor stator (4) is fixed to the base (1), the base (1) is provided with a guide rail (2), the motion platform (3) is movably connected to the guide rail (2), and the motor mover (5) drives the motion platform (3) to move along the guide rail (2); wherein the check valve (12) is embedded in the motion platform (3), the condensation chamber (9) is fixedly installed on the motion platform (3), and the connecting channel (15) is placed in the motion platform (3).

10. A semiconductor device, characterized in that The semiconductor device comprises the motor heat dissipation device according to any one of claims 1 to 8 or the motion system according to claim 9, wherein the semiconductor device further comprises a working chamber, and the motor heat dissipation device or the motion system is installed in the working chamber.

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