Shape measurement device and shape measurement method

Abstract

A first point measurement control unit 101 rotates a cylindrical part 11a of a cylindrical rotating part 11 to a reference cylindrical angle alpha 1, rotates a cylindrical part 13a of a mirror rotating part 13 to a reference mirror angle beta 1, and irradiates laser light, thereby measuring the position of a predetermined first point A in an internal space from a reflection point R of the laser light in a mirror 14. The first rotation control unit (102) rotates the cylindrical part (11a) by 180 degrees from a reference cylindrical angle (alpha 1). The second rotation control unit (103) rotates the cylindrical section (13a) by 180 degrees from the reference mirror angle (beta1). The second point measurement control unit (104) measures the position of a second point (B) in the internal space from the reflection point (R) of the laser beam (L) in the mirror (14) by irradiating the laser beam after rotating the cylindrical section (11a) by 180 degrees and the cylindrical section (13a) by 180 degrees. A correction control unit (105) corrects the rotational operation of the cylindrical section (11a) and the rotational operation of the cylindrical section (13a).

Description

Technical Field

[0001] The present invention relates to a shape measuring device and a shape measuring method. Background Art

[0002] There are many technologies for measuring the cross-sectional shape of the internal space of a tunnel, a large underground cave, a building, or a large cylindrical tube. Among them, a laser rangefinder is used to measure the cross-sectional shape of the internal space. A laser rangefinder is a measuring instrument that uses a laser to measure distance. It is a device that measures the distance from the starting point of the laser to the irradiation point of the object by irradiating the laser to the object (target object) and converting the time from the starting point (emitting source) of the laser to the time when the laser is reflected by the irradiation point (measuring point) of the object and returns to the starting point into a distance.

[0003] For example, Japanese Patent Publication No. 2001-255144 (Patent Document 1) describes a measuring device that is set in a tunnel and used to measure its internal shape. The device is equipped with an optical distance measuring mechanism, a light projection direction variable mechanism, a rotation displacement detection mechanism, a rotation mechanism, a rotation displacement detection mechanism, a distance measuring control mechanism, an operation control mechanism and an operation mechanism. In addition, Japanese Patent Publication No. 2002-81935 (Patent Document 2) describes a size measuring device for an elevator. The device is equipped with a distance meter, a reflector, a hollow rotation mechanism and an operation control device. Japanese Patent Publication No. 2018-21327 (Patent Document 3) describes a roundness measuring device that measures the roundness of the inner circumference of a cylindrical wall section assembled by a shield machine. The device is equipped with a distance detection unit, a scanning unit, a rotation angle detection unit and a roundness calculation unit.

[0004] On the other hand, the present applicant has applied for and obtained a patent for an internal space cross-sectional shape measuring device for measuring the internal space cross-sectional shape as shown in Japanese Patent Application Publication No. 2015-42974 (Patent Document 4). The internal space cross-sectional shape measuring device includes a laser distance measuring unit, a cylindrical rotating unit, a reflecting unit, a cross-sectional shape calculating unit, a first tilt adjusting unit, and a second tilt adjusting unit.

[0005] Prior art literature

[0006] Patent Literature

[0007] Patent document 1: Japanese Patent Application Publication No. 2001-255144

[0008] Patent document 2: Japanese Patent Application Publication No. 2002-81935

[0009] Patent document 3: Japanese Patent Application Publication No. 2018-21327

[0010] Patent Document 4: Japanese Patent Application Publication No. 2015-42974 Summary of the invention

[0011] Technical problem to be solved by the invention

[0012] Therefore, in the case of an internal space cross-sectional shape measuring device that rotates the laser of a laser rangefinder on a cylindrical portion of a cylindrical rotating portion provided with a mirror on site, a calibration operation must be performed to confirm whether the laser is correctly rotated 180 degrees. In the calibration operation, first, the measurer sets the device at a position near the center of the internal space on site, and sets two reference points (a first reference point and a second reference point) that exist on a straight line on both sides of the device with the device as the center. Next, the measurer rotates the cylindrical portion, irradiates the laser of the laser rangefinder to the first reference point, and confirms the rotation action of the cylindrical portion. Further, the measurer rotates the cylindrical portion 180 degrees, and this time irradiates the laser of the laser rangefinder to the second reference point, and confirms whether the laser is correctly irradiated to the second reference point.

[0013] Therefore, when the laser does not irradiate the second reference point, the measurement accuracy of the device deteriorates. The following three reasons can be considered as the reasons why the laser does not irradiate the second reference point correctly. The first reason is that the cylinder does not rotate 180 degrees correctly. In this case, since the optical axis of the laser does not coincide with the rotation axis of the cylinder, the rotation movement of the cylinder and the position of the cylinder must be adjusted. The second reason is that the second reference point is not set correctly. The third reason is that the device is not set correctly. Since these three reasons can be considered, if the laser does not irradiate the second reference point correctly, the measurer must confirm the three reasons one by one on site to perform correction work.

[0014] However, the calibration operation has a technical problem that it takes a lot of time and effort. In addition, it is difficult to calibrate all the causes. When the laser irradiation point is slightly offset from the second reference point, it is difficult to find out the cause of the offset. Further, for example, the adjustment position of the cylindrical part and the setting position of the device are offset in opposite directions, so the laser irradiation point is consistent with the second reference point visually, but the offset between the two does not change, resulting in errors in the measurement points of other rotation angles. Then, if the calibration operation is not properly performed, it is impossible to enter the subsequent measurement of the internal space cross-sectional shape. Therefore, when the measurer spends more than half a day on the calibration operation, it becomes a bottleneck in the measurement of the internal space cross-sectional shape. In addition, if this calibration operation is not properly performed, there will be a technical problem that the measurement accuracy of the internal space cross-sectional shape deteriorates. In the above, the two directions on both sides of the device are used as calibration spaces, but there must be calibration spaces in two directions of orthogonal directions, which means that there must be calibration spaces in a total of four directions, and there is a technical problem that a place is required. The technologies described in Patent Documents 1 to 4 cannot solve such technical problems.

[0015] Therefore, the present invention has been made to solve the above-mentioned problems, and an object of the present invention is to provide a shape measuring device and a shape measuring method that can easily perform calibration work and measure the shape with high accuracy.

[0016] Technical solutions for solving technical problems

[0017] The shape measuring device according to the present invention comprises: a laser distance measuring unit, a cylindrical rotating unit, a holding unit, a mirror rotating unit, a mirror, a first measuring control unit, a first rotating control unit, a second rotating control unit, a second point measuring control unit and a correction control unit. The laser distance measuring unit is fixed to a plane table and can measure the distance from the starting point of the laser to the irradiation point irradiated by the laser. The cylindrical rotating unit is arranged at the end of the plane table and the cylindrical rotating unit makes the rotation axis of the rotatable cylindrical unit coincide with the laser from the laser distance measuring unit. The first surface of the holding unit has a through hole for the laser to pass through and is fixed to the end of the cylindrical part of the cylindrical rotating unit from which the laser is emitted, and the second surface of the holding unit has a cylindrical hole and is bent at a right angle to the first surface. The mirror rotating unit is fixed to the second surface and the end of the cylindrical part is rotatably mounted to the cylindrical hole in a state where the rotation axis of the rotatable cylindrical part intersects with the laser from the laser distance measuring unit. A mirror is fixed to the end of the cylindrical portion, and a reflecting surface is arranged on the extension line of the rotation axis of the cylindrical portion to reflect the laser from the laser distance measuring unit. The first measurement control unit rotates the cylindrical portion to a specified reference cylindrical angle, and rotates the cylindrical portion to a specified reference mirror angle, and irradiates the laser, thereby measuring the position of a specified first point in the internal space from the reflection point of the laser in the mirror. The first rotation control unit rotates the cylindrical portion 180 degrees from the reference cylindrical angle. The second rotation control unit rotates the cylindrical portion from the reference mirror angle to a reversal angle that is linearly symmetrical with the laser emitted from the end of the cylindrical portion as a symmetry line. The second measurement control unit irradiates the laser after rotating the cylindrical portion 180 degrees and rotating the cylindrical portion by the reversal angle, thereby measuring the position of a specified second point in the internal space from the reflection point of the laser in the mirror. The correction control unit corrects the rotation of the cylinder from the reference cylinder angle to 180 degrees and the rotation of the column from the reference mirror angle to the reverse angle so that the position of the second point coincides with the position of the first point.

[0018] The shape measuring method according to the present invention is a shape measuring device including a laser distance measuring unit, a cylinder rotating unit, a holding unit, a mirror rotating unit, and a mirror. The shape measuring method includes the following steps: a first measurement control step, a first rotation control step, a second rotation control step, a second point measurement control step, and a correction control step. Each control step of the shape measuring method corresponds to each control unit of the shape measuring device.

[0019] Effects of the Invention

[0020] According to the shape measuring device and shape measuring method of the present invention, the calibration work can be easily performed and the shape can be measured with high accuracy. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] Figure 1 1 is a schematic diagram and a functional block diagram of a shape measuring device according to the present invention.

[0022] Figure 2 1 and 2 are a top view, a front side perspective view, a right side view, and a back side perspective view of a shape measuring device according to the present invention.

[0023] Figure 3 It is a front view and a right side view of the shape measuring device according to the present invention when the cylindrical part and the column part rotate.

[0024] Figure 4 FIG. 1 is a flowchart for showing the execution procedure of the shape measuring method according to the present invention.

[0025] Figure 5 (A) is a front cross-sectional view, a front view and a top view of the shape measuring device according to the present invention when measuring the position of the first point, Figure 5 (B) is a front cross-sectional view, a front view and a top view of the cylindrical portion when it is rotated 180 degrees.

[0026] Figure 6 (A) is the front cross-sectional view, front view and top view of the cylindrical part when it is rotated 180 degrees. Figure 6 (B) is the xy plane, the front view and the top view showing the difference between the position of the first point and the position of the second point.

[0027] Figure 7 (A) is a rear perspective view showing an example of shape measurement when the measurement angle β0 of the shape measuring device according to the present invention is 0 degrees, Figure 7 (B) is a rear perspective view showing an example of shape measurement when the measurement angle β0 is 30 degrees.

[0028] Figure 8 (A) is a plan view showing an example of the rotation of the columnar portion and the rotation of the cylindrical portion when the reference mirror angle β1 is 20 degrees and the reversal angle β2 is 140 degrees. Figure 8 (B) is a plan view showing an example of the rotation of the columnar portion and the rotation of the cylindrical portion when the reference mirror angle β1 is 340 degrees and the reversal angle β2 is 220 degrees.

[0029] Fig. 9 It is a perspective view showing an example of rotation at a first rotation angle and a second rotation angle and an internal structure of a shape measuring device provided with a cover portion and a transmission portion.

[0030] Fig.10 This is a perspective view of the device side and the tunnel side, showing an example in which the shape measuring device is applied to a tunnel excavation surface.

[0031] Fig.11 (A) is a perspective view showing an example of rotation of the cylindrical portion of the embodiment, Fig.11 (B) is a perspective view showing an example of rotation of the cylindrical portion.

[0032] Fig.12 This is a schematic diagram showing an example of a confirmation experiment of the variation in measured values.

[0033] Fig.13 This is a table showing the results of a confirmation experiment of the variation in measured values.

[0034] Fig.14 This is a schematic diagram showing an example of a confirmation experiment for the accuracy of measured values.

[0035] Fig.15 This is a table showing the results of a confirmation experiment of the accuracy of the measured values. DETAILED DESCRIPTION

[0036] Hereinafter, an embodiment of the shape measuring device according to the present invention will be described with reference to the drawings to facilitate understanding of the present invention. In addition, the following embodiment is an example of embodying the present invention and does not limit the technical scope of the present invention.

[0037] like Figure 1 and Figure 2 As shown, the shape measuring device 1 according to the present invention includes a laser distance measuring unit 10 , a cylindrical rotating unit 11 , a holding unit 12 , a mirror rotating unit 13 , a mirror 14 (reflecting unit), and a control device 15 .

[0038] The laser distance measuring unit 10 is fixed to a flat table 10a and can measure the distance from a starting point S of the laser L to an irradiation point P irradiated with the laser L. The cylindrical rotating unit 11 is provided at an end of the flat table 10a, and a rotating axis 11b of the rotatable cylindrical unit 11a is aligned with the laser L (optical axis) from the laser distance measuring unit 10.

[0039] In addition, the first surface 12a of the holding portion 12 has a through hole for passing the laser light L and is fixed to the end of the cylindrical portion 11a of the cylindrical rotating portion 11 from which the laser light L is emitted, and the second surface 12b has a cylindrical hole and is bent at a right angle to the first surface 12a. The first surface 12a and the second surface 12b of the holding portion 12 form an L shape, and the second surface 12b is provided along the laser light passing through the first surface 12a.

[0040] In addition, the mirror rotating portion 13 is fixed to the second surface 12b of the holding portion 12 and the end of the cylindrical portion 13a is rotatably mounted in the cylindrical hole of the second surface 12b in a state where the rotation axis 13b of the rotatable cylindrical portion 13a intersects the laser L (optical axis) from the laser distance measuring portion 10.

[0041] The mirror 14 is fixed to the end of the cylindrical portion 13 a of the mirror rotating portion 13 , and has a reflecting surface 14 a disposed on an extension line of the rotating shaft 13 b of the cylindrical portion 13 a to reflect the laser light L from the laser distance measuring portion 10 .

[0042] In addition, the control device 15 is connected to the laser distance measuring unit 10, the cylindrical rotating unit 11, and the mirror rotating unit 13, respectively, and controls each unit. The control device 15 irradiates the laser L from the laser distance measuring unit 10, and measures the distance from the starting point S of the laser L to the irradiation point P of the laser L. In addition, the control device 15 rotates the cylindrical portion 11a of the cylindrical rotating unit 11 to rotate the holding portion 12 fixed to the end of the cylindrical portion 11a. Further, the control device 15 rotates the cylindrical portion 13a of the mirror rotating unit 13 to rotate the mirror 14 fixed to the end of the cylindrical portion 13a.

[0043] Here, if Figure 2 As shown, the fixed distance d1 from the starting point S of the laser L of the laser distance measuring unit 10 to the reflection point R of the mirror 14 is fixed after the assembly of the device, so the radial distance d3 from the reflection point R of the laser L to the irradiation point P of the laser L can be calculated by subtracting the fixed distance d1 from the measured distance d2 from the starting point S of the laser L to the irradiation point P of the laser L.

[0044] Then, in the shape measuring device 1 according to the present invention, the laser light L can be rotated about two axes by the rotation of the cylindrical portion 11 a of the cylindrical rotating portion 11 and the rotation of the columnar portion 13 a of the mirror rotating portion 13 .

[0045] Here, the relationship between the radial distance d3 and the position of the irradiation point P from the reflection point R is described. Figures 1 to 3 As shown, the traveling direction of the laser L from the starting point S of the laser distance measuring unit 10 is set as the x-axis direction, the direction at right angles to the traveling direction of the laser L and on the upper side is set as the y-axis direction, and the direction at right angles to the traveling direction of the laser L and on the right side is set as the z-axis direction.

[0046] Then, with the y-axis direction as a reference, when the rotation angle of the laser L from the y-axis direction to the right (in the counterclockwise direction) toward the z-axis direction is set to a first rotation angle α (degrees), the y-coordinate value and the z-coordinate value of the irradiation point P of the laser L relative to the reflection point R of the laser L are as shown in the following mathematical formulas (1) and (2).

[0047] y=d3×cosα…(1)

[0048] z=d3×sinα…(2)

[0049] When the first rotation angle α is 0 degrees, the laser light L (optical axis) coincides with the y-axis direction, and when the first rotation angle α is 90 degrees, the laser light L (optical axis) coincides with the z-axis direction.

[0050] In addition, when the rotation angle of the laser L from the y-axis direction to the right side (in the counterclockwise direction) toward the x-axis direction is set to a second rotation angle β (degrees), the y-coordinate value and the x-coordinate value of the irradiation point P of the laser L relative to the reflection point R of the laser L are as shown in the following mathematical formulas (3) and (4).

[0051] y=d3×cosβ…(3)

[0052] x=d3×sinβ…(4)

[0053] When the second rotation angle β is 0 degrees, the laser light L (optical axis) coincides with the y-axis direction, and when the second rotation angle β is 90 degrees, the laser light L (optical axis) coincides with the x-axis direction.

[0054] Here, the control device 15 measures the measured distance d2 from the starting point S of the laser L to the irradiation point P of the laser L, and calculates the radial distance d3 by subtracting the fixed distance d1 from the measured distance d2. Using the first rotation angle α of the cylindrical portion 11a, the second rotation angle β of the cylindrical portion 13a and these mathematical formulas (1) to (4), the position (x coordinate value, y coordinate value, z coordinate value) of the irradiation point P of the laser L relative to the reflection point R of the laser L can be calculated.

[0055] On the other hand, the control device 15 has a built-in CPU, ROM, RAM, HDD, SSD, etc. (not shown). For example, the CPU uses the RAM as a work area to execute programs stored in the ROM, HDD, SSD, etc. In addition, each control unit described later is also implemented by the CPU executing the program.

[0056] Next, refer to Figures 1 to 8 The structure and execution sequence of the embodiment of the present invention will be described. First, the measurer carries the shape measuring device 1 and goes to the internal space of the site where the cross-section or surface shape of the internal space is to be measured. Figure 5 As shown in (A), the measurer sets the shape measuring device 1 at a position near the center of the internal space 5 at the site, and turns on the power of the control device 15 of the shape measuring device 1. In this way, the control device 15 starts up and enters the shape measurement preparation.

[0057] Here, the measurer inputs a calibration key ( Figure 4 :S101 is), the first point measurement control unit 101 of the control device 15 rotates the cylindrical portion 11a of the cylindrical rotating portion 11 to a specified reference cylindrical angle α1, and rotates the cylindrical portion 13a of the mirror rotating portion 13 to a specified reference mirror angle β1, and irradiates the laser L, thereby measuring the position of the specified first point A in the internal space from the reflection point R of the laser in the mirror 14 ( Figure 4 :S102).

[0058] Here, the measurement method of the first point measurement control unit 101 is not particularly limited, for example, Figure 5 As shown in (A), the first point measurement control unit 101 rotates the cylindrical portion 11a of the cylindrical rotating unit 11 to a predetermined reference cylindrical angle α1 (here, 90 degrees, a right angle at which the laser light is directed from the y-axis direction to the z-axis direction), thereby aligning the laser light L with the y-axis direction. Next, the first point measurement control unit 101 rotates the cylindrical portion 13a of the mirror rotating unit 13 to a predetermined reference mirror angle β1 (here, 0 degrees), thereby aligning the laser light L with the z-axis direction. Then, the first point measurement control unit 101 irradiates the laser light L from the laser distance measuring unit 10 and measures the measurement distance d2, calculates the radial distance d3, and calculates the position (xa, ya, za) of the first point A using the reference cylindrical angle α1, the reference mirror angle β1, and these mathematical formulas (1) to (4).

[0059] When the measurement by the first point measurement control unit 101 is completed, the first rotation control unit 102 of the control device 15 rotates the cylindrical portion 11a of the cylindrical rotating unit 11 by 180 degrees from the reference cylindrical angle α1 ( Figure 4 :S103).

[0060] Here, the rotation method of the first rotation control unit 102 is not particularly limited, for example, Figure 5 As shown in (B), the first rotation control unit 102 rotates the cylindrical portion 11a from the reference cylindrical angle α1 to the correction cylindrical angle α2 which is increased by 180 degrees. In other words, the first rotation control unit 102 rotates the cylindrical portion 11a 180 degrees. Here, the rotation direction of the cylindrical portion 11a is not particularly limited. Figure 5 As shown in (B), the direction may be counterclockwise rotation relative to the z-axis direction or clockwise rotation.

[0061] When the rotation of the first rotation control unit 102 is completed, the second rotation control unit 103 of the control device 15 rotates the cylindrical portion 13a of the mirror rotating portion 13 from the reference mirror angle β1 to a reverse angle β2 ( Figure 4 :S104).

[0062] Here, the rotation method of the second rotation control unit 103 is not particularly limited, for example, Figure 6 As shown in (A), when the reference mirror angle β1 is 0 degrees, the reversal angle β2, which is linearly symmetrical with the laser light L emitted from the end of the cylindrical portion 11a as the symmetry line, is 180 degrees. Therefore, the second rotation control unit 103 rotates the cylindrical portion 13a to the correction mirror angle β2, and the correction mirror angle β2 is a reversal angle obtained by increasing the reference mirror angle β1 by 180 degrees. In other words, the second rotation control unit 103 rotates the cylindrical portion 13a 180 degrees. Here, the reversal angle β2 is not particularly limited as long as it is an angle linearly symmetrical with the laser light L emitted from the end of the cylindrical portion 11a as the symmetry line relative to the reference mirror angle β1. In addition, the rotation direction of the cylindrical portion 13a is not particularly limited. Figure 6 As shown in (A), it can be a clockwise direction relative to the x-axis direction or a counterclockwise direction.

[0063] In this way, the first rotation control unit 102 rotates the cylindrical portion 11a by 180 degrees, and the second rotation control unit 103 rotates the cylindrical portion 13a by the reverse angle β2 (here, 180 degrees), so that the laser light L returns to the same position as the first point A. In the above, although after the first rotation control unit 102 rotates the cylindrical portion 11a ( Figure 4 :S103), the second rotation control unit 103 rotates the cylindrical portion 13a ( Figure 4 :S104), but since it is sufficient as long as the laser L returns to the same position as the first point A, the above can also be reversed. After the second rotation control unit 103 rotates the cylindrical portion 13a, the first rotation control unit 102 rotates the cylindrical portion 11a.

[0064] When the rotation of the second rotation control unit 103 is completed, the second point measurement control unit 104 of the control device 15 rotates the cylindrical portion 11a by 180 degrees and rotates the cylindrical portion 13a by a reverse angle β2 (here, 180 degrees), and then irradiates the laser light L, thereby measuring the position of the predetermined second point B of the internal space 5 from the reflection point R of the laser light L on the mirror 14 ( Figure 4 :S105).

[0065] Here, the measurement method of the second point measurement control unit 104 is not particularly limited, for example, Figure 6As shown in (A), the second point measurement control unit 104 irradiates the laser L from the laser distance measuring unit 10 to measure the measurement distance d2, calculates the radius distance d3, and uses the correction cylinder angle α2, the correction mirror angle β2 (reversal angle) and these mathematical formulas (1) to (4) to calculate the position (xb, yb, zb) of the second point B.

[0066] When the measurement of the second point measurement control unit 104 is completed, the correction control unit 105 of the control device 15 then corrects the rotation movement of the cylinder portion 11a from the reference cylinder angle α1 to the correction cylinder angle α2 (here 180 degrees) and the rotation movement of the cylindrical portion 13a from the reference mirror angle β1 to the reversal angle β2 (correction mirror angle) (here 180 degrees) in such a way that the position of the second point B is consistent with the position of the first point A.

[0067] Here, the correction method of the correction control unit 105 is not particularly limited. For example, the correction control unit 105 determines whether the position (xb, yb, zb) of the second point B is consistent with the position (xa, ya, za) of the first point A ( Figure 4 :S106).

[0068] Here, the determination method of the correction control unit 105 is not particularly limited. For example, the position of the second point B (xb, yb, zb) and the position of the first point A (xa, ya, za) are as follows: Figure 6 As shown in (B), it is arranged on the xy plane composed of the x-axis direction and the y-axis direction. In other words, the difference between the position (xb, yb, zb) of the second point B and the position (xa, ya, za) of the first point A is composed of the difference in the rotation direction of the cylindrical portion 11a (here, the y-axis direction) and the difference in the rotation direction of the cylindrical portion 13a (here, the x-axis direction). Therefore, the correction control unit 105 calculates the difference in the x-axis direction (dx=xb-xa) and the difference in the y-axis direction (dy=yb-ya) between the position (xb, yb, zb) of the second point B and the position (xa, ya, za) of the first point A. Then, the correction control unit 105 determines whether the difference dy in the y-axis direction is within the specified y-axis direction threshold dy0, and whether the difference dx in the x-axis direction is within the specified x-axis direction threshold dx0.

[0069] As a result of the determination, if the difference dy in the y-axis direction is within the threshold value dy0 in the y-axis direction, and the difference dx in the x-axis direction is within the threshold value dx0 in the x-axis direction, the correction control unit 105 determines that the position (xb, yb, zb) of the second point B is consistent with the position (xa, ya, za) of the first point A ( Figure 4 : S106 is), and no special correction processing will be performed.

[0070] On the other hand, as a result of the determination, when the difference dy in the y-axis direction exceeds the threshold value dy0 in the y-axis direction, or when the difference dx in the x-axis direction exceeds the threshold value dx0 in the x-axis direction, the correction control unit 105 determines that the position (xb, yb, zb) of the second point B does not coincide with the position (xa, ya, za) of the first point A ( Figure 4 : S106, No), and the rotation of the cylindrical portion 11a or the rotation of the cylindrical portion 13a is corrected in such a way that the position (xb, yb, zb) of the second point B is consistent with the position (xa, ya, za) of the first point A ( Figure 4 :S107).

[0071] Here, the correction method of the correction control unit 105 is not particularly limited. For example, when the difference dy in the y-axis direction exceeds the threshold value dy0 in the y-axis direction, even if the cylindrical portion 11a rotates 180 degrees, it will not be correctly rotated 180 degrees, so the difference dy in the y-axis direction will be generated. Therefore, the correction control unit 105 uses the radial distance d3 from the reflection point R of the laser L in the mirror 14 to the irradiation point P of the laser L in the measurement of the position of the first point A (or the second point B) and the difference dy in the y-axis direction to calculate the angle difference dα in the y-axis direction by the following mathematical formula (5).

[0072] dα=tan -1 (dy / d3)…(5)

[0073] Then, the correction control unit 105 calculates the correction value ay of the rotational motion Y of the cylindrical portion 11 a using the angle difference dα according to the following equation (6).

[0074] ay=(180-dα) / 180…(6)

[0075] The correction value ay is a value obtained by dividing a subtraction value obtained by subtracting the angle difference dα from 180 degrees by 180 degrees. The correction control unit 105 can correct the rotational motion Y of the cylindrical portion 11a by multiplying the rotational motion Y of the cylindrical portion 11a by the correction value ay. Thus, when the cylindrical portion 11a rotates 180 degrees, the correction value ay can be used to correctly rotate the cylindrical portion 11a 180 degrees. In addition, the above-mentioned method based on angles (angle method) can also be based on radians (radian method). The same applies to the following.

[0076] In addition, when the difference dx in the x-axis direction exceeds the threshold value dx0 in the x-axis direction, even if the cylindrical portion 13a rotates by the reverse angle β2 (here, 180 degrees), it will not be correctly rotated by 180 degrees, so the difference dx in the x-axis direction will occur. Therefore, the correction control unit 105 uses the radial distance d3 from the reflection point R of the laser light L in the mirror 14 to the irradiation point P of the laser light L in the measurement of the position of the first point A (or the second point B) and the difference dx in the x-axis direction to calculate the angle difference dβ in the x-axis direction using the following mathematical formula (7).

[0077] dβ=tan -1 (dx / d3)…(7)

[0078] Then, the correction control unit 105 calculates the correction value ax of the rotational motion X of the cylindrical portion 11a by the following equation (8) using the reference mirror angle β1, the reverse angle β2, and the angle difference dβ.

[0079] ax=(β2-β1-dβ) / (β2-β1)…(8)

[0080] The correction value ax is a value obtained by dividing a second subtraction value obtained by subtracting the angle difference dβ from a first subtraction value obtained by subtracting the reference mirror angle β1 from the reverse angle β2 by the first subtraction value.

[0081] Here, when the reference mirror angle β1 is 0 degrees and the reverse angle β2 is 180 degrees, the correction value ax of the rotational motion X of the cylindrical portion 11a is calculated by the following mathematical formula (9).

[0082] ax=(180-dβ) / 180…(9)

[0083] In this case, the correction value ax is a value obtained by dividing a subtraction value obtained by subtracting the angle difference dβ from 180 degrees by 180 degrees. The correction control unit 105 can correct the rotational motion X of the cylindrical portion 13a by multiplying the correction value ax on the rotational motion X of the cylindrical portion 13a. Thus, when the cylindrical portion 13a rotates 180 degrees, the correction value ax can be used to correctly rotate the cylindrical portion 13a 180 degrees.

[0084] If no correction processing is performed ( Figure 4 : S106, Yes) or when the correction control unit 105 completes the correction ( Figure 4 :S107), the correction control unit 105 of the control device 15 asks the measurer whether the calibration is completed ( Figure 4 :S108).

[0085] Here, the inquiry method of the correction control unit 105 is not particularly limited. For example, the correction control unit 105 displays the position (xa, ya, za) of the first point A and the position (xb, yb, zb) of the second point B and displays that the correction is completed, and displays the correction completion key and the re-correction key as selectable to prompt the measurer to select either the correction completion key or the re-correction key.

[0086] Here, if the measurer considers that recalibration is necessary, he selects the recalibration key, and the correction control unit 105 receives the selection of the recalibration key and returns to S102, and the first point measurement control unit 101 measures the position of the first point A again ( Figure 4 :S102).

[0087] Here, if the measurer wants to change the position of the first point A, for example, the measurer inputs the reference cylinder angle α1 of the cylinder 11a, and the first point measurement control unit 101 receives the reference cylinder angle α1 of the cylinder 11a, rotates the cylinder 11a of the cylinder rotating unit 11 by the reference cylinder angle α1, and measures the position of the first point A in the internal space 5. Thus, the position of the first point A and the position of the second point B can be measured at other positions while repeating the calibration, and the correction process can be performed. In addition, when the measurer inputs the reference mirror angle β1 of the cylinder 13a, similarly, the first point measurement control unit 101 receives the reference mirror angle β1 of the cylinder 13a, rotates the cylinder 13a of the mirror rotating unit 11 by the reference mirror angle β1, and measures the position of the first point A in the internal space. In addition, in S102, when the measurement of the position of the first point A is completed, the process up to S108 is repeated.

[0088] On the other hand, in S108, if the measurer believes that it is not necessary to calibrate again, he selects the calibration completion key, and the correction control unit 105 accepts the selection of the calibration completion key, and the shape measurement control unit 106 of the control device 15 rotates the rotation angle β of the cylindrical portion 13a to the specified measurement angle β0, while rotating the rotation angle α of the cylindrical portion 11a to the specified measurement angle α0, while irradiating the laser L, thereby measuring the shape with a radius d3 from the reflection point R of the laser L in the rotation angle α of the cylindrical portion 11a to the irradiation point P of the laser L as the radius, with the reflection point R of the laser L in the mirror 14 as the center ( Figure 4 :S109).

[0089] Here, the measurement method of the shape measurement control unit 106 is not particularly limited, for example, Figure 7As shown in (A), the shape measurement control unit 106 rotates the cylindrical portion 11a at a rotation angle α of a predetermined measurement angle α0 (for example, 45 degrees) while rotating the cylindrical portion 13a at a rotation angle β to a predetermined measurement angle β0 (for example, 0 degrees), and irradiates the laser L, thereby calculating the radius distance for each measurement angle α0. Here, the measurement angle α0 is not particularly limited, and examples thereof include 5 degrees, 10 degrees, 20 degrees, 30 degrees, 45 degrees, 60 degrees, 90 degrees, and the like.

[0090] Here, the shape measurement control unit 106 rotates the rotation angle α of the cylindrical portion 11a from 0 to 360 degrees, thereby rotating the laser light L from 0 to 360 degrees. Then, the shape measurement control unit 106 calculates the position of the irradiation point P at each measurement angle α0 centered on the reflection point R of the laser light L, and connects the position of the irradiation point P at each measurement angle α0, thereby being able to measure the cross-sectional shape of the internal space 5 at the site.

[0091] In addition, if Figure 7 As shown in (B), the shape measurement control unit 106 rotates the rotation angle β of the cylindrical portion 13a to a predetermined measurement angle β0 (for example, 30 degrees), and irradiates the laser L while rotating the rotation angle α of the cylindrical portion 11a at a predetermined measurement angle α0 (for example, 45 degrees), thereby calculating the radial distance for each measurement angle α0. Then, the shape measurement control unit 106 calculates the position of the irradiation point P at each measurement angle α0 centered on the reflection point R of the laser L, and connects the position of the irradiation point P at each measurement angle α0. Here, by rotating the cylindrical portion 13a at a predetermined measurement angle β0, the cross-sectional shape of the internal space 5 in a direction inclined from the vertical direction can be measured. In addition, in the above description, the rotation angle α of the cylindrical portion 11a is rotated while the measurement angle β of the cylindrical portion 13a is fixed to measure each irradiation point P, but this is not limited to this. By appropriately combining the measurement angle β of the cylindrical portion 13a and the rotation angle α of the cylindrical portion 11a, not only the cross-sectional shape but also various surface shapes can be measured.

[0092] In this way, the present invention can easily perform calibration operations and measure shapes with high precision. In particular, by setting the rotation axis of the laser L to two axes, not only the cross-sectional shape of the internal space 5 in the vertical direction but also the cross-sectional shape of the internal space 5 in the direction inclined from the vertical direction can be measured, which can expand the measurement range of the shape.

[0093] In particular, the present invention performs correction by forward and reverse movements of two axes based on the rotation of the cylindrical portion 11a and the rotation of the cylindrical portion 13a, not by correction of the absolute position on one axis, but by correction of the relative position on two axes. Therefore, it is possible to eliminate the second cause of the defects in the setting of the second reference point or the third cause of the defects in the setting position of the device among the three causes in the existing correction work, and focus on the first cause of the defects in the rotation of the cylindrical portion 11a and the cylindrical portion 13a. As a result, it is possible to achieve the efficiency of the correction work and the improvement of the correction accuracy.

[0094] Furthermore, in the conventional one-axis internal space cross-sectional shape measuring device, it is necessary to have correction space in four directions every 90 degrees in the orthogonal direction of the rotation axis, but in the two-axis shape measuring device of the present invention, it is not necessary to have correction space in the opposite directions due to the forward and reverse actions, and two directions are sufficient, thereby reducing the correction space. In other words, the correction space of the two-axis shape measuring device of the present invention is sufficient as long as it is one-fourth of the correction space of the one-axis internal space cross-sectional shape measuring device.

[0095] However, although the above description is based on the case where the reference mirror angle β1 is 0 degrees and the reversal angle β2 is 180 degrees, there is no particular limitation as long as the reversal angle β2 is an angle that is linearly symmetrical to the reference mirror angle β1 with the laser light L emitted from the end of the cylindrical portion 11a as the symmetry line.

[0096] For example, Figure 8 As shown in (A), when the reference mirror angle β1 is 20 degrees, the reversal angle β2 is 180-20-20 = 140 degrees. Thus, the cylindrical portion 11a is rotated 180 degrees, and the second point B returns to the first point A.

[0097] In addition, if Figure 8 As shown in (B), when the reference mirror angle β1 is 340 degrees, the reversal angle β2 is 180-(340-360)-(340-360)=220 degrees. Thus, the cylindrical portion 11a is rotated 180 degrees, and the second point B returns to the first point A. In this way, the reversal angle β2 can be appropriately determined.

[0098] In addition, in the present invention, the holding portion 12, the mirror rotating portion 13 and the mirror 14 are configured to be exposed to the outside, but if Fig. 9As shown, a cover portion 16 for protecting the holding portion 12, the mirror rotating portion 13, and the mirror 14 and a transmission portion 17 provided on the cover portion 16 and transmitting the laser light L may be further provided to protect the holding portion 12, the mirror rotating portion 13, and the mirror 14. The transmission portion 17 is configured in a rectangular shape along the laser light L emitted from the end of the cylindrical portion 11a together with the scanning area of ​​the laser light L.

[0099] In the above description, the correction control unit 105 is configured to correct the rotational motion X of the cylindrical portion 11a and the rotational motion Y of the columnar portion 13a, but an adjustment mechanism for physically adjusting the first rotation angle and the second rotation angle may be separately provided in the main body of the shape measuring device 1. For example, a first adjustment mechanism for adjusting the first rotation angle of the cylindrical portion 11a and a second adjustment mechanism for adjusting the second rotation angle of the columnar portion 13a may be provided separately, thereby enabling physical adjustment.

[0100] Since the present invention can achieve high precision, it can measure not only the cross-sectional shape of the internal space of tunnels, large underground caverns, buildings, large cylindrical tubes, etc., but also the cross-sectional shape of the internal space of small underground caverns, small cylindrical tubes, etc. Furthermore, it is very suitable for confirming and inspecting their changes over time.

[0101] For example, the present invention can be used to measure the gap (shield tail gap) between the inner circumference of the tail of a shield machine used for excavating a subway or sewer tunnel and the outer circumference of a section located inside the tail. For example, the shape measuring device 1 according to the present invention is set near the center of the tunnel, and a calibration operation is performed. First, the inner circumference of the tail of the shield machine is measured as a first shape, and then the outer circumference of the section located inside the tail is measured as a second shape. The second shape is subtracted from the first shape, thereby measuring the shield tail gap.

[0102] Furthermore, in mountain tunnel construction, it is extremely important to ensure the stability of the tunnel excavation face, and therefore regular monitoring of the push-out amount of the tunnel excavation face is necessary. The present invention can be used to measure the push-out amount of the tunnel excavation face. For example, the shape measuring device 1 according to the present invention is set on the front side of the tunnel excavation face, and a correction operation is performed. First, the surface of the initial tunnel excavation face is measured as a first shape, and then, after a predetermined period of time, the surface of the same tunnel excavation face is measured as a second shape. The second shape is subtracted from the first shape, thereby being able to measure the push-out amount of the tunnel excavation face. Specifically, as Fig.10 As shown, the shape measuring device 1 provided with the cover portion 16 and the transmission portion 17 is vertically erected, and the tunnel excavation surface is scanned with the laser light L at a predetermined first rotation angle α and a second rotation angle β, thereby being able to measure the surface of the tunnel excavation surface.

[0103] In addition, the present invention can be used to measure the displacement of the excavation surface and the management of the completed part of the mountain tunnel. It can also measure the displacement of the slope and wall surface, and can also measure the three-dimensional surface shape.

[0104] <Examples, Comparative Examples, etc.>

[0105] The present invention will be specifically described below with reference to Examples and Comparative Examples, but the present invention is not limited thereto.

[0106] <Example>

[0107] like Figures 1 to 7 As shown, the shape measuring device 1 according to the present invention is assembled and manufactured, and Fig.11 (A) and Fig.11 As shown in (B), the manufactured shape measuring device 1 is used as an example. Fig.11 As shown in (A), the rotation angle of the fixed cylindrical portion 13a is confirmed, and the cylindrical portion 11a rotates 360 degrees. Fig.11 As shown in (B), the rotation angle of the fixed cylindrical portion 11a is confirmed, and the columnar portion 13a rotates 360 degrees.

[0108] <Confirmation test of the variation of measured values>

[0109] like Fig.12 As shown, the shape measuring device 1 of the embodiment is arranged vertically at a predetermined distance (about 2000 mm) from the wall in the room, and the rotation angle of the cylindrical portion 13a reflected at right angles to the emission direction of the laser L is set to an instrument angle of 0 degrees in a state where the laser L is aligned with the y-axis direction, and the first rotation angle α of the cylindrical portion 11a and the second rotation angle β of the cylindrical portion 13a are corrected, and measurement points (from No. 1 to No. 63) corresponding to each first rotation angle α and each second rotation angle β are set. Then, the steps S101 to S108 are implemented to perform the calibration process, and then the radius distance d3 from the reflection point R of the laser L to the irradiation point P of the laser L is measured ten times. Among the ten measured values, the subtraction value of subtracting the minimum value from the maximum value is calculated as the difference, and the deviation of the measured value is confirmed. In addition, the average value of the ten times is also calculated.

[0110] <Results of the Confirmation Test of the Deviation of the Measurement Values>

[0111] like Fig.13 As shown, the differences among the measurement points No. 1 to No. 63 were all less than 1.5 mm, and it was found that the variation in the measurement values ​​was extremely small.

[0112] <Comparative Example>

[0113] A commercially available measuring machine was used as a comparative example.

[0114] <Confirmation test of the accuracy of measured values>

[0115] like Fig.14 As shown, the shape measuring device 1 of the embodiment is horizontally arranged at a predetermined distance (about 2000 mm) from the ceiling in the room, and the rotation angle of the cylindrical portion 13a reflected at a right angle to the emission direction of the laser light L is set to an instrument angle of 0 degrees in a state where the laser light L is aligned with the z-axis direction, and the first rotation angle α of the cylindrical portion 11a and the second rotation angle β of the cylindrical portion 13a are corrected, and measuring points (No. 1 to No. 9, No. 14, No. 22, No. 26 to No. 33, No. 38, No. 46, No. 53, No. 57 to No. 63) corresponding to each first rotation angle α and each second rotation angle β are set, and the positions of the measuring points are numbered and the positions of the measuring points are corresponding to the positions of the measuring points. Fig. 9 The same). Then, the steps S101 to S108 are implemented to perform calibration processing, and then the position of each measurement point is measured using the radius distance d3 from the reflection point R of the laser L to the irradiation point P of the laser L. On the other hand, the shape measuring device 1 of the embodiment is changed to the measuring machine of the comparative example, and the position of each measurement point is measured using the measuring machine. Then, the subtraction calculation value of the position of the measurement point of the embodiment is subtracted from the position of the measurement point of the comparative example in the x-axis direction, the y-axis direction, and the z-axis direction, and the size of the difference in the measurement value is confirmed.

[0116] <Results of the Confirmation Test of the Accuracy of the Measurement Values>

[0117] like Fig.15 As shown, the differences among the measuring points No. 1 to No. 9, No. 14, No. 22, No. 26 to No. 33, No. 38, No. 46, No. 53, and No. 57 to No. 63 are all less than 5.0 mm. The measured values ​​of the shape measuring device 1 of the embodiment are very close to the measured values ​​of the measuring machine currently used, and it is known that the measured values ​​of the embodiment are highly accurate.

[0118] Industrial Applicability

[0119] As described above, the shape measuring device and shape measuring method according to the present invention are useful in the field of measuring the shape of tunnels or buildings, such as the civil engineering technology field, the surveying technology field, the measurement technology field, etc., and despite their simple structure, they are effective as a shape measuring device and shape measuring method that can measure the shape with high precision.

[0120] Description of Reference Numerals

[0121] 1: shape measuring device, 10: laser distance measuring unit, 10a: plane table, 11: cylinder rotating unit, 11a: cylinder unit, 11b: rotation axis, 12: holding unit, 12a: first surface, 12b: second surface, 13: mirror rotating unit, 13a: cylinder unit, 13b: rotation axis, 14: mirror, 14a: reflection surface, 15: control device, 16: cover unit, 17: transmission unit, 101: first point measurement control unit, 102: first rotation control unit, 103: second rotation control unit , 104: second point measurement control unit, 105: correction control unit, 106: shape measurement control unit, 5: internal space, A: first point, B: second point, d1: fixed distance, d2: measurement distance, d3: radius distance, L: laser, P: irradiation point, R: reflection point, S: starting point, α: first rotation angle, α0: measurement angle, α1: reference cylinder angle, α2: correction cylinder angle, β: second rotation angle, β0: measurement angle, β1: reference mirror angle, β2: reversal angle.

Claims

1. A shape measuring device comprising: A laser distance measuring unit, fixed to the flat table, capable of measuring the distance from the starting point of the laser to the irradiation point irradiated by the laser; a cylindrical rotating part, which is provided at an end of the flat table and which makes the rotation axis of a rotatable cylindrical part coincide with the laser from the laser distance measuring part; A holding portion, wherein a first surface of the holding portion has a through hole for the laser to pass through and is fixed to the end of the cylindrical portion of the cylindrical rotating portion from which the laser is emitted, and a second surface of the holding portion has a cylindrical hole and is bent in a right angle direction relative to the first surface; a mirror rotating unit fixed to the second surface and rotatably mounting an end of the cylindrical portion to the cylindrical hole in a state where the rotation axis of the rotatable cylindrical portion intersects the laser light from the laser distance measuring unit; a mirror fixed to the end of the cylindrical portion, and having a reflecting surface arranged on an extension line of the rotation axis of the cylindrical portion to reflect the laser light from the laser distance measuring portion; a first point measurement control unit that rotates the cylindrical portion to a predetermined reference cylindrical angle and the cylindrical portion to a predetermined reference mirror angle, irradiates the laser light, and thereby measures the position of a predetermined first point in the internal space from a reflection point of the laser light in the mirror; a first rotation control unit, which rotates the cylindrical portion 180 degrees from the reference cylindrical angle; A second rotation control unit rotates the cylindrical portion from the reference mirror angle to a reverse angle that is line symmetrical with the laser light emitted from the end of the cylindrical portion as a symmetry line; a second point measurement control unit that irradiates the laser beam after rotating the cylindrical portion 180 degrees and rotating the cylindrical portion by the reverse angle, thereby measuring the position of a predetermined second point in the internal space from a reflection point of the laser beam on the mirror; as well as The correction control unit corrects the rotation of the cylinder from the reference cylinder angle to 180 degrees and the rotation of the column from the reference mirror angle to the reverse angle so that the position of the second point coincides with the position of the first point.

2. The shape measuring device according to claim 1, wherein: The shape measuring device also includes a shape measurement control unit, which irradiates the laser while rotating the rotation angle of the cylindrical part at a prescribed measurement angle, while rotating the rotation angle of the cylindrical part to a prescribed measurement angle, so as to measure a shape with a radius distance from the reflection point of the laser in the rotation angle of the cylindrical part to the irradiation point of the laser as the radius, with the reflection point of the laser in the mirror as the center.

3. The shape measuring device according to claim 1, wherein: The direction of the laser light from the starting point of the laser distance measuring unit is defined as the x-axis direction, the direction perpendicular to the direction of the laser light and upward is defined as the y-axis direction, and the direction perpendicular to the direction of the laser light and rightward is defined as the z-axis direction. The first point measurement control unit makes the laser light coincide with the y-axis direction by rotating the cylindrical portion to a predetermined reference cylindrical angle, and makes the laser light coincide with the z-axis direction by rotating the cylindrical portion to a predetermined reference mirror angle, irradiates the laser light from the laser distance measurement unit, measures the measurement distance from the starting point of the laser light to the irradiation point of the laser light, subtracts the fixed distance from the starting point of the laser light to the reflection point of the mirror from the measurement distance, thereby calculating the radius distance d3, and uses the reference cylindrical angle α1, the reference mirror angle β1 and the following mathematical formulas (1) to (4) to calculate the position (xa, ya, za) of the first point. y=d3×cosα…(1) z=d3×sinα…(2) y=d3×cosβ…(3) x=d3×sinβ…(4) The second point measurement control unit irradiates the laser from the laser distance measurement unit to measure the measurement distance, calculates the radial distance d3, and calculates the position (xb, yb, zb) of the second point using the correction cylinder angle α2, the correction mirror angle β2 and the mathematical formulas (1) to (4). The correction control unit performs correction so that the position (xb, yb, zb) of the second point coincides with the position (xa, ya, za) of the first point.

4. The shape measuring device according to claim 1, wherein: The correction control unit calculates the difference between the position of the second point and the position of the first point in the rotation direction of the cylindrical portion and the difference between the position of the second point and the position of the first point in the rotation direction of the cylindrical portion, and determines whether the difference in the rotation direction of the cylindrical portion falls within a prescribed first threshold and whether the difference in the rotation direction of the cylindrical portion falls within a prescribed second threshold, When the difference in the rotation direction of the cylindrical portion falls within a predetermined first threshold value and the difference in the rotation direction of the columnar portion falls within a predetermined second threshold value, the correction control unit does not perform correction processing, When the difference in the rotational direction of the cylindrical portion exceeds a predetermined first threshold value, the correction control unit corrects the rotational motion of the cylindrical portion. The correction control unit corrects the rotational motion of the cylindrical portion when the difference in the rotational direction of the cylindrical portion exceeds a predetermined second threshold value.

5. The shape measuring device according to claim 1, wherein: The correction control unit calculates the difference between the position of the second point and the position of the first point in the rotation direction of the cylindrical portion, and the difference between the position of the second point and the position of the first point in the rotation direction of the cylindrical portion, uses the radial distance from the reflection point of the laser in the mirror to the irradiation point of the laser in the measurement of the position of the first point or the second point and the difference in the rotation direction of the cylindrical portion to calculate the correction value of the rotation movement of the cylindrical portion, and uses the radial distance and the difference in the rotation direction of the cylindrical portion to calculate the correction value of the rotation movement of the cylindrical portion, thereby correcting the rotation movement of the cylindrical portion and the rotation movement of the cylindrical portion.

6. The shape measuring device according to claim 1, wherein: The direction of the laser light from the starting point of the laser distance measuring unit is defined as the x-axis direction, the direction perpendicular to the direction of the laser light and upward is defined as the y-axis direction, and the direction perpendicular to the direction of the laser light and rightward is defined as the z-axis direction. The correction control unit calculates the difference in the x-axis direction (dx=xb-xa) and the difference in the y-axis direction (dy=yb-ya) between the position (xb, yb, zb) of the second point and the position (xa, ya, za) of the first point, The correction control unit uses the radial distance d3 from the reflection point of the laser light in the mirror to the irradiation point of the laser light and the difference dy in the y-axis direction in the measurement of the position of the first point to calculate the angle difference dα in the y-axis direction by the following mathematical formula (5): dα=tan -1 (d / d3)…(5) The correction control unit calculates the correction value ay of the rotational motion of the cylindrical portion using the angle difference dα according to the following mathematical formula (6): ay=(180-dα) / 180…(6) The correction control unit corrects the rotational motion of the cylindrical portion by multiplying the rotational motion of the cylindrical portion by a correction value ay.

7. The shape measuring device according to claim 1, wherein: The direction of the laser light from the starting point of the laser distance measuring unit is defined as the x-axis direction, the direction perpendicular to the direction of the laser light and upward is defined as the y-axis direction, and the direction perpendicular to the direction of the laser light and rightward is defined as the z-axis direction. The correction control unit calculates the difference in the x-axis direction (dx=xb-xa) and the difference in the y-axis direction (dy=yb-ya) between the position (xb, yb, zb) of the second point and the position (xa, ya, za) of the first point, The correction control unit uses the radial distance d3 from the reflection point of the laser light in the mirror to the irradiation point of the laser light and the difference dx in the x-axis direction in the measurement of the position of the first point to calculate the angle difference dβ in the x-axis direction by the following mathematical formula (7): dβ=tan -1 (dx / d3)…(7) The correction control unit calculates the correction value ax of the rotational motion of the cylindrical portion by using the reference mirror angle β1, the reverse angle β2 and the angle difference dβ according to the following mathematical formula (8): ax=(β2-β1-dβ) / (β2-β1)…(8) The correction control unit corrects the rotational motion of the cylindrical portion by multiplying the rotational motion of the cylindrical portion by a correction value ax.

8. The shape measuring device according to claim 6, wherein: The correction control unit calculates the difference in the x-axis direction (dx=xb-xa) and the difference in the y-axis direction (dy=yb-ya) between the position (xb, yb, zb) of the second point and the position (xa, ya, za) of the first point, The correction control unit uses the radial distance d3 from the reflection point of the laser light in the mirror to the irradiation point of the laser light and the difference dx in the x-axis direction in the measurement of the position of the first point to calculate the angle difference dβ in the x-axis direction by the following mathematical formula (7): dβ=tan -1 (dx / d3)…(7) The correction control unit calculates the correction value ax of the rotational motion of the cylindrical portion by using the reference mirror angle β1, the reverse angle β2 and the angle difference dβ according to the following mathematical formula (8): ax=(β2-β1-dβ) / (β2-β1)…(8) The correction control unit corrects the rotational motion of the cylindrical portion by multiplying the rotational motion of the cylindrical portion by a correction value ax.

9. The shape measuring device according to claim 7, wherein: When the reference mirror angle β1 is 0 degrees and the reverse angle β2 is 180 degrees, the correction value ax of the rotational motion of the cylindrical portion is calculated by the following mathematical formula (9): ax=(180-dβ) / 180…(9).

10. A shape measuring method, comprising: A laser distance measuring unit, fixed to the flat table, capable of measuring the distance from the starting point of the laser to the irradiation point irradiated by the laser; a cylindrical rotating part, which is provided at an end of the flat table and which makes the rotation axis of a rotatable cylindrical part coincide with the laser from the laser distance measuring part; A holding portion, wherein a first surface of the holding portion has a through hole for the laser to pass through and is fixed to the end of the cylindrical portion of the cylindrical rotating portion from which the laser is emitted, and a second surface of the holding portion has a cylindrical hole and is bent in a right angle direction relative to the first surface; a mirror rotating unit fixed to the second surface and rotatably mounting an end of the cylindrical portion to the cylindrical hole in a state where the rotation axis of the rotatable cylindrical portion intersects the laser light from the laser distance measuring unit; as well as A mirror is fixed to the end of the cylindrical portion, and a reflecting surface is arranged on the extension line of the rotation axis of the cylindrical portion to reflect the laser from the laser distance measuring unit. The shape measuring method comprises the following steps: a first point measurement control step of rotating the cylindrical portion to a predetermined reference cylindrical angle and rotating the cylindrical portion to a predetermined reference mirror angle, irradiating the laser light, and thereby measuring the position of a predetermined first point in the internal space from a reflection point of the laser light in the mirror; A first rotation control step of rotating the cylindrical portion 180 degrees from the reference cylindrical angle; a second rotation control step of rotating the cylindrical portion 180 degrees from the reference mirror angle; a second point measurement control step of irradiating the laser beam after rotating the cylindrical portion 180 degrees and rotating the cylindrical portion 180 degrees, thereby measuring the position of a predetermined second point in the internal space from a reflection point of the laser beam in the mirror; as well as The correction control step corrects the rotation of the cylinder portion from the reference cylinder angle to 180 degrees and the rotation of the column portion from the reference mirror angle to 180 degrees so that the position of the second point coincides with the position of the first point.

Images