Composite laminated waterproof coating preparation device

Abstract

The invention discloses a composite laminated waterproof coating preparation device, and relates to the technical field of multilayer film deposition. A main body adopts a double-layer chamber design, an ALD gas inlet unit and a Parylene gas inlet unit are introduced into the double-layer chamber at the same time, a low-temperature fluid gas inlet unit is connected between the double-layer chamber, a sample needing to be coated is placed on a sample support in the chamber, rapid cooling of the chamber is achieved through low-temperature fluid (such as liquid nitrogen), the cooling waiting time after a coating is deposited is shortened to the maximum extent, and the coating quality is improved. And the preparation efficiency of the composite laminated waterproof coating of the ALD coating and Parylene is improved. And meanwhile, the equipment has a rapid cooling capability, so that the preparation of the composite laminated waterproof coating at different deposition temperatures of the sample can be efficiently realized.

Description

Technical Field

[0001] The invention relates to the technical field of multilayer thin film deposition. Background Art

[0002] Parylene is a good electrical insulation, moisture-proof, mildew-proof and salt-fog-proof coating material in the contemporary world. It has the best water-blocking ability among organic materials and is widely used in the preparation of micron-level high-conformal waterproof film coatings. However, the water-blocking effect is still not as good as inorganic films such as aluminum oxide. Nano-level metal oxide films deposited by ALD technology, such as aluminum oxide, zinc oxide or other metal oxide films, can also be used to prepare dense pinhole-free water-blocking coatings, but they have the disadvantage that the film coating is easily disturbed by surface particles. By adding the ALD deposition process on the basis of the Parylene vacuum vapor deposition process, the repeated lamination waterproof coating of ALD coating plus Parylene is prepared, giving full play to the advantages of lamination and making up for the shortcomings. Compared with the single Parylene film coating, the water-blocking ability of the coating is further improved. Summary of the invention

[0003] In view of the problems in the prior art, the present invention provides a composite laminated waterproof coating preparation technology equipment, which solves the technical problem that it takes a long time to wait for cooling when preparing the repeated laminated waterproof coating of ALD coating plus Parylene under the same cavity conditions. It avoids the high time consumption of changing the cavity and the high cost of temperature rise and fall in the traditional preparation process. At the same time, the present invention can realize the efficient preparation of the laminated layers of thin films with different deposition temperatures under the same cavity conditions through the rapid cooling ability of the chamber, which can better fit the production process.

[0004] The technical solution adopted by the present invention is: A composite laminate waterproof coating preparation device, the main body is a double-layer chamber, including an outer chamber and an inner chamber, the inner chamber is provided with an ALD air inlet pipeline, a Parylene air inlet pipeline, an internal heating device and an evacuation pipeline, and the outer chamber is provided with a low-temperature fluid delivery pipeline. The sample is placed on the sample holder after opening the chamber top cover, and the chamber top cover is provided with a sealing rubber ring for sealing protection, and the preparation of composite laminates of samples with different deposition temperatures is realized in the inner chamber.

[0005] Furthermore, the air path structure of the chamber includes a chamber air inlet pipeline and an air exhaust path provided on the double-layer coating chamber, the chamber air inlet pipeline is connected to the ALD air inlet unit and the Parylene air inlet unit, and the air exhaust path is connected to a cold trap and a vacuum pump.

[0006] Furthermore, the present invention adopts a double-layer chamber design with ALD air intake and Parylene air intake in structure. At the same time, due to the addition of low-temperature fluid (such as liquid nitrogen) between the double-layer chambers, the chamber has the ability to quickly cool down, and the Parylene deposition-heating-ALD deposition-waiting for cooling (a lot of time)-Parylene deposition process is simplified to Parylene deposition-heating-ALD deposition-Parylene deposition, which solves the common difficulty of easy heating and difficult cooling, greatly reduces the cooling waiting time, and greatly improves the preparation efficiency of repeated lamination of ALD coating and Parylene.

[0007] A method for preparing a composite laminated waterproof coating is achieved by the above-mentioned device. The inner chamber is connected to the ALD air inlet unit and the Parylene air inlet unit. After the sample is placed on the sample holder, the chamber is sealed and the internal heating device of the chamber is turned on to raise the temperature to the metal oxide deposition temperature, such as 80°C. The valve of the ALD air inlet pipeline is opened to start the deposition of the ALD metal oxide coating. Then, the coating chamber is quickly cooled to room temperature by low-temperature fluid to deposit another thin film coating, which greatly improves the preparation efficiency of the composite laminated waterproof coating of the ALD coating plus Parylene.

[0008] The intended technical effects of the present invention are: This patent is a vacuum vapor deposition device, which uses ALD technology and vacuum vapor deposition technology to realize the preparation of repeated laminated waterproof coatings on the sample surface. For example, Parylene and aluminum oxide laminates. If the traditional deposition preparation process is followed, it is necessary to switch back and forth between the Parylene vacuum vapor deposition device and the ALD deposition device to realize the preparation of thin film laminates and face the pain point of slow cooling of the coating equipment and long waiting time, which reduces the coating efficiency. The traditional process has low preparation efficiency and will greatly increase the time cost and economic cost in the preparation process. Therefore, in the design of this patent, a double-layer chamber design scheme with ALD air intake and Parylene air intake is adopted in the structure. By adding low-temperature fluid (such as liquid nitrogen) between the double-layer chambers, the rapid cooling of the cavity is achieved, avoiding a lot of time waiting for cooling after ALD process deposition. Therefore, this patent can realize the preparation of a composite laminate of rapid ALD coating plus Parylene. Compared with the traditional preparation process, it greatly reduces the time cost and economic cost. BRIEF DESCRIPTION OF THE DRAWINGS

[0009] Figure 1 It is a double-chamber composite stacked thin film deposition equipment.

[0010] In the figure: 1. Cryogenic fluid storage unit; 2. Cryogenic fluid delivery pipeline; 3. ALD air inlet unit; 4. ALD air inlet pipeline; 5. Parylene air inlet pipeline; 6. Parylene air inlet unit; 7. Air valve; 8. Cavity top cover; 9. Sealing rubber ring; 10. Outer chamber; 11. Inner chamber; 12. Internal heating device; 13. Sample holder; 14. Evacuation pipeline; 15. Cold trap; 16. Vacuum pump. DETAILED DESCRIPTION

[0011] The technical solution of the present invention is further described below in conjunction with the accompanying drawings.

[0012] By the attached Figure 1 It can be seen that the technical solution adopted by the present invention is that the main body is a double-layer chamber design, including an outer chamber 10 and an inner chamber 11, the inner chamber 11 is provided with an ALD air inlet pipeline 4, a Parylene air inlet pipeline 5, an internal heating device 12 and an evacuation pipeline 14, and the outer chamber 10 is provided with a low-temperature fluid delivery pipeline 2. The sample is placed on the sample holder 13 after opening the chamber top cover 8, and the chamber top cover is provided with a sealing rubber ring 9 for sealing protection, and the preparation of composite laminates of different deposition temperatures of the sample is realized in the inner chamber 11.

[0013] The gas path structure of the coating chamber includes an ALD air inlet path 4, a Parylene air inlet pipeline 5 and an air exhaust path 14 are provided on the inner chamber 11, the ALD air inlet unit 3 is connected to the chamber ALD air inlet path 4, the Parylene air inlet pipeline 5 is connected to the Parylene air inlet unit 6, and the cold trap 15 and the vacuum pump 16 are connected to the air exhaust path.

[0014] Taking the deposition of Parylene and metal oxide aluminum oxide composite laminate waterproof coating as an example, the air inlet of the coating chamber is connected to the Parylene air inlet unit 6 and the aluminum oxide ALD air inlet unit 3 respectively, the air inlet is turned on for preheating, the sample is placed on the sample holder 13, the vacuum pump 16 is turned on to evacuate the sealed chamber, the Parylene air inlet air valve 7 is turned on, the aluminum oxide ALD air inlet air valve 7 is closed, and Parylene enters the chamber to deposit the Parylene polymer thin film coating on the sample at room temperature, and the excess Parylene is condensed and captured by the cold trap 15 to prevent leakage. After the Parylene deposition is completed, the Parylene air inlet air valve 7 is closed, the heating device 12 inside the cavity is turned on to heat the chamber to the aluminum oxide deposition temperature (such as: 80°C), and the aluminum oxide ALD air inlet air valve 7 is opened to achieve the deposition of aluminum oxide film on the sample surface by ALD. After the ALD aluminum oxide deposition is completed, the aluminum oxide ALD air inlet valve 7 is closed, and the low-temperature fluid air inlet valve 7 is opened. By adding a low-temperature fluid (such as liquid nitrogen) between the double-layer chambers, the cavity is quickly cooled to room temperature to continue to deposit the Parylene coating. Repeating the above steps, the cavity can be quickly cooled under the conditions of the same cavity, greatly reducing the cooling waiting time and improving the preparation efficiency of repeated lamination of ALD coating and Parylene.

[0015] It should be further explained that the above is the basic method of use of the present invention. In practical applications, it is mainly used to prepare composite laminates with different deposition temperatures under the same cavity conditions through the rapid cooling ability of the chamber, which can better fit production applications. For example, the preparation of Parylene and alumina composite laminate waterproof coatings. The above embodiments of the present invention are only illustrations of the technical concept of the present invention, which are used to understand the technical solution of the present invention, and they are not limitations on the scope of protection of the present invention. Obvious changes made to the embodiments of the present invention that belong to the technical concept of the present invention should all fall within the scope of protection of the present invention.

Claims

1. A composite laminated waterproof coating preparation device, characterized by: The main body is a double-layer chamber, including an outer chamber (10) and an inner chamber (11). The inner chamber (11) is provided with an ALD air inlet pipeline (4), a Parylene air inlet pipeline (5), an internal heating device (12) and an evacuation pipeline (14), and the outer chamber (10) is provided with a low-temperature fluid delivery pipeline (2). The sample is placed on a sample holder (13) after opening the chamber top cover (8). The chamber top cover is provided with a sealing rubber ring (9) for sealing protection. The preparation of composite laminates of samples with different deposition temperatures is achieved in the inner chamber (11).

2. The composite laminated waterproof coating preparation device according to claim 1 is characterized in that: The gas path structure of the coating chamber includes an ALD air inlet path (4), a Parylene air inlet pipeline (5) and an air exhaust path (14) provided on an inner chamber (11); an ALD air inlet unit (3) is connected to the chamber ALD air inlet path (4); a Parylene air inlet unit (6) is connected to the Parylene air inlet pipeline (5); and a cold trap (15) and a vacuum pump (16) are connected to the air exhaust path.

3. The composite laminated waterproof coating preparation device according to claim 1 is characterized in that: The structure adopts a double-layer chamber design with ALD air intake and Parylene air intake. At the same time, the cavity has the ability to quickly cool down by adding low-temperature fluid (such as liquid nitrogen) between the double-layer chambers, which greatly reduces the cooling waiting time and greatly improves the preparation efficiency of repeated lamination of ALD coating and Parylene.

4. A method for preparing a composite laminated waterproof coating, characterized in that: The device of claim 1 is used to connect the inner chamber (11) to the ALD air inlet unit (3) and the Parylene air inlet unit (6). After placing the sample on the sample holder (13), the chamber is sealed and the heating device (12) inside the chamber is turned on to raise the temperature to the metal oxide deposition temperature, for example, 80° C. The valve (7) of the ALD air inlet pipeline (4) is opened to start the deposition of the ALD metal oxide coating. Then, the coating chamber is quickly cooled to room temperature by low-temperature fluid to deposit another thin film coating, which greatly improves the preparation efficiency of the composite laminated waterproof coating of the ALD coating plus Parylene.

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