Composite laminated waterproof coating preparation device

Abstract

The invention discloses a composite laminated waterproof coating preparation device, and relates to the technical field of multilayer film deposition. A main body is of a double-layer chamber design, an ALD gas inlet unit and a Parylene gas inlet unit are introduced into the double-layer chamber at the same time, high-temperature and low-temperature fluid is introduced between the double-layer chamber to achieve heating and cooling of the chambers, a sample needing to be coated is placed on a sample support in the chamber, and low-energy-consumption heating of the chamber is achieved through high-temperature fluid circulation. Rapid cooling of the cavity is achieved through low-temperature fluid (such as liquid nitrogen), and the cooling waiting time after coating deposition is shortened to the maximum extent. According to the preparation method, the preparation efficiency of the composite laminated waterproof coating of the ALD coating and Parylene is improved, and the energy consumption is reduced. And meanwhile, the equipment has a rapid cooling capability, so that the preparation of the composite laminated waterproof coating at different deposition temperatures of the sample can be efficiently realized.

Description

Technical Field

[0001] The invention relates to the technical field of thin film deposition. Background Art

[0002] Parylene is a good electrical insulation, moisture-proof, mildew-proof and salt spray-proof coating material in contemporary times. It has the best water-blocking ability among organic materials and is widely used in the preparation of micron-level high-conformal waterproof thin film coatings. However, the water-blocking effect is still not as good as inorganic thin films such as aluminum oxide; nano-scale metal oxide films deposited by ALD technology, such as aluminum oxide, zinc oxide or other metal oxide films, can also be used to prepare dense pinhole-free water-blocking coatings, but they have the disadvantage that the thin film coating is easily disturbed by surface particles. By adding the ALD deposition process on the basis of the Parylene vacuum vapor deposition process, the preparation of the repeatedly laminated waterproof coating of ALD coating plus Parylene is achieved, giving full play to the advantages of the lamination and making up for each other's shortcomings. Compared with the single Parylene thin film coating, the water-blocking ability of the coating is further improved. Contents of the invention

[0003] In view of the problems in the prior art, the present invention provides a composite laminated waterproof coating preparation technology equipment, which solves the technical problems of high energy consumption for heating and long time for waiting for cooling when preparing the repeated laminated waterproof coating of ALD coating plus Parylene under the same cavity condition, while the heat of the fluid is retained to achieve the purpose of energy saving. It avoids the high time consumption of changing the cavity and the high energy consumption cost of temperature rise and fall in the traditional preparation process. At the same time, the present invention can realize the efficient and energy-saving preparation of the laminated films with different deposition temperatures under the same cavity condition through the energy-saving heating and rapid cooling capabilities of the chamber, which can better fit the production process.

[0004] The technical solution adopted by the present invention is: A composite laminate waterproof coating preparation device, the main body is a double-layer chamber, including an outer chamber and an inner chamber, the inner chamber is provided with an ALD air intake pipeline, a Parylene air intake pipeline and an evacuation pipeline, and the outer chamber is connected to a high-temperature fluid circulation storage unit and a low-temperature fluid circulation storage unit through a fluid delivery pipeline. The sample is placed on a sample holder after opening the chamber top cover, and a sealing rubber ring is provided on the chamber top cover for sealing protection, so that the preparation of composite laminates of samples with different deposition temperatures is realized in the inner chamber.

[0005] Furthermore, the air path structure of the chamber includes a chamber air inlet pipeline and an air exhaust path provided on the double-layer coating chamber, the chamber air inlet pipeline is connected to the ALD air inlet unit and the Parylene air inlet unit, and the air exhaust path is connected to a cold trap and a vacuum pump.

[0006] Furthermore, the structure adopts a double-layer chamber design with ALD air intake and Parylene air intake. At the same time, high-temperature and low-temperature fluids are added between the double-layer chambers to achieve chamber heating and cooling. The high-temperature fluid circulation realizes low-energy heating of the chamber, and the low-temperature fluid (such as liquid nitrogen) is used to achieve rapid cooling of the chamber, which greatly improves the preparation efficiency of repeated lamination of ALD coating plus Parylene and reduces energy consumption. The Parylene deposition-heating (high energy consumption)-ALD deposition-waiting for cooling (a lot of time)-Parylene deposition process is optimized to Parylene deposition-high-temperature thermal mass heating-ALD deposition-low-temperature thermal mass rapid cooling-Parylene deposition, which solves the common difficulties of high energy consumption for heating, easy heating and difficult cooling. It reduces energy consumption, reduces the coating interval time, and greatly improves the preparation efficiency of the composite laminated waterproof coating of ALD coating plus Parylene. It avoids the high time and high economic cost of changing the chamber and waiting for cooling in the traditional preparation process.

[0007] Furthermore, a method for preparing a composite laminated waterproof coating is implemented by the above-mentioned device, wherein the inner chamber is connected to the ALD air inlet unit (and the Parylene air inlet unit, the sample is placed on the sample holder and the chamber is sealed, and the high-temperature fluid circulation storage unit and the gas circuit valve 1 and the gas circuit valve 3 are opened to heat the chamber to the metal oxide deposition temperature, for example, 80°C, through the high-temperature fluid circulation. The valve of the ALD air inlet pipeline is opened to start the deposition of the ALD metal oxide coating. After the deposition is completed, the valve of the fluid recovery pipeline is opened to recover the high-temperature fluid. Then, the coating chamber is quickly cooled to room temperature by the low-temperature fluid to deposit another thin film coating, which greatly improves the preparation efficiency of the composite laminated waterproof coating of the ALD coating plus Parylene.

[0008] The intended technical effects of the present invention are: This patent is a vacuum vapor deposition device, which uses ALD technology and vacuum vapor deposition technology to realize the preparation of repeated laminated waterproof coatings on the sample surface. For example, Parylene and aluminum oxide laminates. If the traditional deposition preparation process is followed, it is necessary to switch back and forth between the Parylene vacuum vapor deposition device and the ALD deposition device to realize the preparation of thin film laminates and face the pain point of slow cooling of the coating equipment and long waiting time, which reduces the coating efficiency. The traditional process has low preparation efficiency and will greatly increase the time cost and economic cost in the preparation process. Therefore, in the design of this patent, a double-layer chamber design scheme with ALD air intake and Parylene air intake is adopted in the structure. The chamber is heated and cooled quickly by passing high and low temperature fluids between the double-layer chambers, which reduces the traditional heating energy consumption while the heat of the fluid is retained, avoiding the high energy consumption of heating in the ALD process and spending a lot of time waiting for cooling after deposition. Therefore, this patent can realize the preparation of a composite laminate of fast ALD coating plus Parylene. Compared with the traditional preparation process, it greatly reduces the time cost and economic cost. BRIEF DESCRIPTION OF THE DRAWINGS

[0009] Figure 1 It is a fluid circulation double-chamber composite stacked film deposition equipment.

[0010] In the figure: 1. fluid delivery pipeline; 2. gas circuit valve 1; 3. gas circuit valve 2; 4. high-temperature fluid circulation storage unit; 5. low-temperature fluid circulation storage unit; 6. cavity top cover; 7. sealing rubber ring; 8. gas circuit valve 3; 9. gas circuit valve 4; 10. outer chamber; 11. inner chamber; 12. sample holder; 13. evacuation pipeline; 14. cold trap; 15. vacuum pump; 16. ALD air inlet unit; 17. Parylene air inlet unit; 18. Parylene air inlet pipeline; 19. ALD air inlet pipeline; 20. fluid recovery pipeline valve. DETAILED DESCRIPTION

[0011] The technical solution of the present invention is further described below in conjunction with the accompanying drawings.

[0012] By the attached Figure 1 It can be seen that the technical solution adopted by the present invention is that the main body is a double-layer chamber, including an outer chamber 10 and an inner chamber 11, the inner chamber 11 is provided with an ALD air intake pipeline 19, a Parylene air intake pipeline 18 and an evacuation pipeline 13, and the outer chamber 10 is connected to a high-temperature fluid circulation storage unit 4 and a low-temperature fluid circulation storage unit 5 through a fluid delivery pipeline 1. The sample is placed on a sample holder 12 after opening the chamber top cover 6, and a sealing rubber ring 7 is provided on the chamber top cover for sealing protection, and the preparation of composite laminates of samples with different deposition temperatures is realized in the inner chamber 11.

[0013] The gas path structure of the coating chamber includes an ALD air inlet path 19, a Parylene air inlet pipeline 18 and an air exhaust path 13 provided on the inner chamber 11, an ALD air inlet unit 16 is connected to the chamber ALD air inlet path 19, a Parylene air inlet unit 17 is connected to the Parylene air inlet pipeline 18, and a cold trap 14 and a vacuum pump 15 are connected to the air exhaust path 13.

[0014] Taking the deposition of Parylene and metal oxide aluminum oxide composite laminate waterproof coating as an example, the air inlet of the coating chamber is connected to the Parylene air inlet unit and the aluminum oxide ALD air inlet unit respectively, the air inlet is turned on for preheating, the sample is placed on the sample holder, the vacuum pump is turned on to evacuate the sealed chamber, the Parylene air inlet air valve is turned on, the aluminum oxide ALD air inlet air valve is closed, and Parylene enters the chamber to deposit Parylene polymer film coating on the sample at room temperature. The excess Parylene is condensed and captured by the cold trap to prevent leakage. After the Parylene deposition is completed, the Parylene air inlet air valve is closed, and the air valves 1 and 3 are opened to heat the chamber to the aluminum oxide deposition temperature (such as 80°C) through high-temperature fluid circulation, and the aluminum oxide ALD air inlet air valve is opened to achieve the deposition of aluminum oxide film on the sample surface through ALD. After the ALD aluminum oxide deposition is completed, the aluminum oxide ALD air inlet valve is closed, valves 1 and 3 are closed, the fluid recovery pipeline valve is opened to recover the high-temperature fluid, and valves 2 and 4 are opened. By adding a low-temperature fluid cycle between the double-layer chambers, the cavity is quickly cooled to room temperature in order to continue to deposit the Parylene coating. Repeating the above steps, the temperature of the cavity can be increased and decreased by high and low temperature fluids under the conditions of the same cavity, which greatly reduces energy consumption and cooling waiting time, and improves the preparation efficiency of repeated lamination of ALD coating and Parylene.

[0015] It should be further explained that the above is the basic method of use of the present invention. In practical applications, it is mainly used to achieve the chamber heating and cooling capabilities under the same chamber conditions through the high-temperature and low-temperature fluids in the chamber to achieve the preparation of composite laminates with different deposition temperatures, which can better fit production applications. For example, the preparation of Parylene and alumina composite laminate waterproof coatings. The above embodiments of the present invention are only illustrations of the technical concept of the present invention, which are used to understand the technical solution of the present invention, and they are not limitations on the scope of protection of the present invention. Obvious changes made to the embodiments of the present invention that belong to the technical concept of the present invention should all fall within the scope of protection of the present invention.

Claims

1. A composite laminated waterproof coating preparation device, characterized by: The main body is a double-layer chamber, including an outer chamber (10) and an inner chamber (11). The inner chamber (11) is provided with an ALD air inlet pipeline (19), a Parylene air inlet pipeline (18) and an evacuation pipeline (13). The outer chamber (10) is connected to a high-temperature fluid circulation storage unit (4) and a low-temperature fluid circulation storage unit (5) through a fluid delivery pipeline (1). The sample is placed on a sample holder (12) after opening the chamber top cover (6). The chamber top cover is provided with a sealing rubber ring (7) for sealing protection. The preparation of composite laminates of samples with different deposition temperatures is achieved in the inner chamber (11).

2. The composite laminated waterproof coating preparation device according to claim 1 is characterized in that: The gas path structure of the coating chamber includes an ALD air inlet path (19), a Parylene air inlet pipeline (18) and an air exhaust path (13) provided on an inner chamber (11); an ALD air inlet unit (16) is connected to the chamber ALD air inlet path (19); a Parylene air inlet unit (17) is connected to the Parylene air inlet pipeline (18); and a cold trap (14) and a vacuum pump (15) are connected to the air exhaust path (13).

3. The composite laminated waterproof coating preparation device according to claim 1 is characterized in that: The structure adopts a double-layer chamber design with ALD air intake and Parylene air intake. At the same time, high-temperature and low-temperature fluids are added between the double-layer chambers to achieve chamber heating and cooling. The high-temperature fluid circulation realizes low-energy heating of the chamber, and the low-temperature fluid (such as liquid nitrogen) is used to achieve rapid cooling of the chamber, which greatly improves the preparation efficiency of repeated lamination of ALD coating and Parylene and reduces energy consumption.

4. The composite laminated waterproof coating preparation device according to claim 1 is characterized in that: The device described in claim 1 is used to connect the inner chamber (11) to the ALD air inlet unit (16) and the Parylene air inlet unit (17). After the sample is placed on the sample holder (12), the chamber is sealed, and the high-temperature fluid circulation storage unit (4) and the gas circuit valve 1 (2) and the gas circuit valve 3 (8) are opened to heat the chamber to the metal oxide deposition temperature, for example, 80°C, through the high-temperature fluid circulation. The valve of the ALD air inlet pipeline (19) is opened to start the deposition of the ALD metal oxide coating. After the deposition is completed, the fluid recovery pipeline valve (20) is opened to recover the high-temperature fluid. Then, the coating chamber is quickly cooled to room temperature by the low-temperature fluid to deposit another thin film coating, which greatly improves the preparation efficiency of the composite laminated waterproof coating of the ALD coating plus Parylene.

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