Cryopump system, cryopump monitoring method, and cryopump monitoring program

Abstract

The invention provides a cryopump monitoring technology which facilitates the easy mastering of the state of a cryopump system. A cryopump system (100) is provided with: a sensor for measuring a measurement parameter relating to the cryopump system (100); a cryopump controller (110) configured to receive the measurement parameter from the sensor, determine an operation parameter of the cryopump system (100) so that the measurement parameter follows a target value, and operate the cryopump system (100) at the determined operation parameter; and a cryopump monitor (130) configured to acquire time series data of the measurement parameters and time series data of the operation parameters, and display a time series graph of the measurement parameters and a time series graph of the operation parameters so that the time series graphs are aligned with each other.

Description

[0001] This application claims priority based on Japanese Patent Application No. 2023-115879 filed on Jul. 14, 2023. The entire contents of the Japanese patent application are incorporated herein by reference. Technical Field

[0002] The invention relates to a cryopump system, a cryopump monitoring method and a cryopump monitoring program. Background Art

[0003] A cryopump is a vacuum pump that collects gas molecules on a cryopanel cooled to a very low temperature by condensation or adsorption and then exhausts the gas. Usually, a cryopump is installed in a vacuum processing apparatus to achieve a clean vacuum environment required in semiconductor circuit manufacturing processes, etc.

[0004] Patent Document 1: Japanese Patent Application Laid-Open No. 7-293438

[0005] During the operation of the cryopump, various data are continuously obtained from the cryopump. The data obtained may include, for example, the cooling temperature of the cryopanel in the cryopump and the radiation shield surrounding the cryopanel, the internal pressure of the refrigerator for cooling the cryopump, the operating frequency of the motor for driving the refrigerator, etc. In a vacuum processing device, sometimes multiple cryopumps are installed, and such data is obtained for each cryopump. Such a variety of and large amounts of data related to the cryopump can be used for monitoring or diagnosis of the cryopump.

[0006] In order to verify whether the diagnosis result is correct and report this verification to the cryopump user, the cryopump design engineer is sometimes required to sort out and analyze the large amount of data obtained so as to understand the status of the cryopump. In fact, this work is done by the engineer based on his own experience, which is time-consuming and laborious. In addition, it is actually difficult for users without relevant experience to do this work. Summary of the invention

[0007] One of the exemplary purposes of an embodiment of the present invention is to provide a cryopump monitoring technology that helps to easily grasp the status of a cryopump system.

[0008] According to one embodiment of the present invention, a cryogenic pump system comprises: a sensor for measuring measurement parameters related to the cryogenic pump system; a cryogenic pump controller, which is configured to receive the measurement parameters from the sensor, determine the operating parameters of the cryogenic pump system in a manner that the measurement parameters follow target values, and operate the cryogenic pump system with the determined operating parameters; and a cryogenic pump monitor, which is configured to obtain timing data of the measurement parameters and timing data of the operating parameters, and display the timing curve graph of the measurement parameters and the timing curve graph of the operating parameters in a manner aligned with the time axis.

[0009] According to one embodiment of the present invention, a cryogenic pump monitoring method includes the following steps: acquiring timing data of measurement parameters related to a cryogenic pump system; acquiring timing data of operating parameters of a cryogenic pump system controlled in such a manner that the measurement parameters follow target values; and displaying a timing curve graph of the measurement parameters and a timing curve graph of the operating parameters in a manner aligned with a time axis.

[0010] In addition, any combination of the above-mentioned constituent elements or any form in which the expression of the present invention is converted into a method, an apparatus, a system, a storage medium, a computer program, etc. may also be practiced as an embodiment of the present invention.

[0011] According to the present invention, it is possible to provide a cryopump monitoring technology that helps to easily understand the state of a cryopump system. BRIEF DESCRIPTION OF THE DRAWINGS

[0012] Figure 1 Schematic diagram showing a cryopump system according to an embodiment.

[0013] Figure 2 FIG. 1 is a schematic diagram showing an example of a cryopump that can be used in the cryopump system according to the embodiment.

[0014] Figure 3 FIG. 1 is a schematic diagram showing an example of a compressor that can be used in the cryopump system according to the embodiment.

[0015] Figure 4 : is a flowchart showing a cryopump monitoring method according to an embodiment.

[0016] Figure 5 FIG. 1 is a schematic diagram showing an example of a cryopump monitor that can be used in the cryopump system according to the embodiment.

[0017] Figure 6 1 is a schematic diagram showing an example of a timing graph display in the cryopump monitor according to the embodiment.

[0018] Figure 7 FIG. 1 is a schematic diagram showing another example of the timing graph display in the cryopump monitor according to the embodiment.

[0019] Figure 8 This is a schematic diagram showing still another example of the timing graph display in the cryopump monitor according to the embodiment.

[0020] Fig. 9 It is a schematic diagram showing another example of the cryopump system according to the embodiment.

[0021] In the figure: 10 - cryopump, 100 - cryopump system, 110 - cryopump controller, 130 - cryopump monitor, 136a - first display area, 136b - second display area. DETAILED DESCRIPTION

[0022] Hereinafter, embodiments of the present invention will be described in detail with reference to the accompanying drawings. In the following description and the accompanying drawings, identical or equivalent components, parts, and processes are marked with the same symbols, and repeated descriptions are appropriately omitted. In each of the drawings, for the convenience of description, the scale or shape of each part is appropriately set, and unless otherwise specifically stated, it is not to be interpreted restrictively. The embodiments are examples, and they do not limit the scope of the present invention in any way. All features or combinations thereof described in the embodiments are not necessarily the essence of the invention.

[0023] Figure 1 1 is a schematic diagram showing a cryopump system 100 according to an embodiment. The cryopump system 100 is mounted on a vacuum processing apparatus 200 and is used to evacuate a vacuum container 202 of the vacuum processing apparatus 200 to a desired vacuum degree. The vacuum processing apparatus 200 is configured to process a processing object such as a wafer by a desired vacuum process under a vacuum environment in the vacuum container 202. The vacuum processing apparatus 200 may be, for example, an ion implantation apparatus, a sputtering apparatus, a vapor deposition apparatus, or other vacuum processing apparatus.

[0024] The vacuum processing apparatus 200 includes a main controller 204 and a housing 206 in addition to the vacuum container 202. The main controller 204 is configured to control the communication between the vacuum processing apparatus 200 and the cryopump system 100. The main controller 204 may be configured as a control device for controlling the vacuum processing apparatus 200, or may constitute a part of such a control device. The housing 206 forms the exterior of the vacuum processing apparatus 200 and accommodates various components of the vacuum processing apparatus 200. The vacuum container 202 and the main controller 204 are arranged in the housing 206.

[0025] The housing 206 may be an enclosure that covers the entire surface of the vacuum processing device 200. The housing 206 may include: a frame structure that is provided with and supports the components of the vacuum processing device 200; a panel component that separates the inside of the vacuum processing device 200 from the outside; and an openable and closable door leaf for accessing the inside of the vacuum processing device 200 from the outside. The panel component and the door leaf may be mounted on the frame structure. In order to prevent radiation that may be generated in the vacuum processing device 200 from leaking to the outside, the housing 206 may include a radiation shielding material such as lead.

[0026] Alternatively, the housing 206 may not cover the entire surface of the vacuum processing apparatus 200. For example, a portion of the housing 206 may be opened so that a portion of the vacuum processing apparatus 200 can be observed from the outside.

[0027] The cryopump system 100 includes at least one cryopump 10 , at least one compressor 12 , a cryopump controller 110 , a network 120 , and a cryopump monitor 130 .

[0028] In order to evacuate the vacuum container 202 of the vacuum processing apparatus 200, the cryopump 10 is installed in the vacuum container 202. Therefore, the cryopump 10 and the vacuum container 202 are arranged together in the housing 206 of the vacuum processing apparatus 200. An exemplary structure of the cryopump 10 that can be used in the cryopump system 100 involved in the embodiment will be referred to later. Figure 2 Give a narrative.

[0029] The purpose of providing the compressor 12 is to supply refrigerant gas to an expander (described later) provided in the cryopump 10 and to discharge refrigerant gas from the expander. The compressor 12 is connected to the expander of the cryopump 10 via a gas pipeline 13, and the compressor 12 is arranged outside the housing 206 of the vacuum processing device 200. The gas pipeline 13 includes: a high-pressure pipeline 13a, which connects the compressor 12 to the expander so as to supply the refrigerant gas from the compressor 12 to the expander; and a low-pressure pipeline 13b, which connects the compressor 12 to the expander so as to recover the refrigerant gas from the expander to the compressor 12. An exemplary structure of the compressor 12 that can be used in the cryopump system 100 involved in the embodiment will be referred to later. Figure 3 Give a narrative.

[0030] In addition, a plurality of cryopumps 10 (eg, several to a dozen or more cryopumps 10 ) may be provided in the cryopump system 100 . In addition, a plurality of compressors 12 may be provided in the cryopump system 100 to supply and discharge refrigerant gas to the cryopumps 10 .

[0031] The cryopump controller 110 is configured to centrally control the cryopump system 100 according to the instructions received from the main controller 204. In addition, the cryopump controller 110 is configured to send information related to the cryopump system 100 to the main controller 204. Thus, the cryopump controller 110 can control the cryopump 10 and the compressor 12 according to the instructions from the main controller 204, and can send information related to the cryopump 10 and information related to the compressor 12 to the main controller 204.

[0032] The cryopump controller 110 is connected to the main controller 204 through a first communication line 208. The first communication line 208 may be, for example, a communication cable such as RS-232C. As an example, the cryopump controller 110 is also disposed in the housing 206 of the vacuum processing apparatus 200, similarly to the main controller 204. As another example, the cryopump controller 110 may also be disposed outside the housing 206 of the vacuum processing apparatus 200.

[0033] The details will be described later, but the cryopump system 100 includes a sensor for measuring a measurement parameter related to the cryopump system 100. The cryopump system 100 may be provided with a plurality of sensors for measuring different measurement parameters (for example, a first temperature sensor 22 and a second temperature sensor 23 provided in the cryopump 10, a first pressure sensor 54 and a second pressure sensor 55 provided in the compressor 12, etc.). When the cryopump system 100 includes a plurality of cryopumps 10, such a plurality of sensors may be provided on each cryopump 10.

[0034] The cryopump controller 110 may be configured to receive measurement parameters from sensors, determine operating parameters of the cryopump system 100 (e.g., operating frequency of the expander motor 30) in a manner that the measurement parameters follow target values, and operate the cryopump 10 with the determined operating parameters. In the case where the cryopump system 100 includes a plurality of cryopumps 10, the cryopump controller 110 may be configured to receive measurement parameters from sensors of each of the plurality of cryopumps 10, determine operating parameters of the cryopump 10 in a manner that the measurement parameters follow target values, and operate the cryopump 10 with the determined operating parameters.

[0035] The network 120 connects the cryopump 10 and the cryopump controller 110 for communication. In the cryopump system 100, information related to the cryopump 10 is transmitted between the cryopump 10 and the cryopump controller 110 via the network 120. The cryopump 10 is connected to the cryopump controller 110 via a second communication line 122. The second communication line 122 may be, for example, a communication cable such as RS-485.

[0036] The network 120 also connects the compressor 12 to the cryopump controller 110 for communication. In the cryopump system 100, information related to the compressor 12 is transmitted between the compressor 12 and the cryopump controller 110 via the network 120. The compressor 12 is connected to the cryopump controller 110 via a third communication line 123. The third communication line 123 may be, for example, a communication cable such as RS-485.

[0037] The cryopump monitor 130 is connected to the network 120 and is configured to display information related to the cryopump 10 transmitted via the network 120. In addition or alternatively, the cryopump monitor 130 may be configured to display information related to the compressor 12 transmitted via the network 120.

[0038] like Figure 1 As shown, the cryopump monitor 130 may be directly connected to the network 120 without passing through the main controller 204. That is, the cryopump monitor 130 may be configured not to communicate with the main controller 204 of the vacuum processing apparatus 200. In the example shown in the figure, the cryopump monitor 130 is connected to the cryopump controller 110 via the fourth communication line 124. The fourth communication line 124 may be, for example, a communication cable such as RS-485.

[0039] The cryopump monitor 130 is arranged outside the housing 206 of the vacuum processing apparatus 200. The cryopump monitor 130 can be arranged at a position away from the housing 206. As shown in the figure, the cryopump monitor 130 can be arranged on or near the compressor 12. The cryopump monitor 130 can also be arranged on a monitor installation surface arranged near the compressor 12. The monitor installation surface can be, for example, a wall surface near the compressor 12 or a surface of a device located near the compressor 12.

[0040] The cryopump monitor 130 may be detachably mounted on the cryopump system 100, or may be connected to the network 120 as needed when the cryopump system 100 needs to be monitored. The cryopump monitor 130 need not always be mounted on the cryopump system 100. For example, the cryopump monitor 130 may be detachably mounted on the compressor 12.

[0041] In this embodiment, the cryopump monitor 130 is configured to obtain the time series data of the measurement parameters and the time series data of the operation parameters, and to display the time series curve graph of the measurement parameters and the time series curve graph of the operation parameters in a manner aligned with the time axis. An exemplary structure of the cryopump monitor 130 that can be used in the cryopump system 100 according to the embodiment will be described later. Figure 5 Give a narrative.

[0042] Regarding the internal structure of the cryopump controller 110 and the cryopump monitor 130, in terms of hardware structure, it is implemented by components or circuits represented by a CPU or memory of a computer, and in terms of software structure, it is implemented by a computer program, etc., but it is appropriately depicted in the figure as a functional block implemented by their cooperation. It should be understood by those skilled in the art that these functional blocks can be implemented in various forms by a combination of hardware and software. For example, the cryopump monitor 130 can be implemented by a combination of a processor 132 such as a CPU (Central Processing Unit) or a microcomputer and a software program executed by the processor 132. The software program can be a computer program (for example, a cryopump monitoring program) for causing the processor 132 to execute the cryopump monitoring method involved in the embodiment.

[0043] Figure 2 1 is a schematic diagram showing an example of a cryopump 10 that can be used in the cryopump system 100 according to the embodiment. The cryopump 10 includes an expander 14, a cryopump housing 16, a radiation shield 18, and a cryopanel 20. The cryopump 10 also includes a pressure sensor 21, a roughing valve 24, a purge valve 26, and a vent valve 28, and these valves are provided on the cryopump housing 16.

[0044] The compressor 12 is constructed as follows: it recovers refrigerant gas from the expander 14 and supplies the refrigerant gas to the expander 14 again after increasing the pressure of the recovered refrigerant gas. The expander 14 is also called a cold head, and together with the compressor 12, it constitutes an ultra-low temperature refrigerator. The expander 14 is sometimes also called a "refrigerator". The circulation of the refrigerant gas between the compressor 12 and the expander 14 is accompanied by appropriate pressure changes and volume changes of the refrigerant gas in the expander 14, thereby constituting a thermodynamic cycle that produces coldness, and the expander 14 can provide ultra-low temperature cooling. The refrigerant gas is usually helium, but other suitable gases can also be used. For ease of understanding, in Figure 1 Arrows are used to indicate the flow direction of the refrigerant gas. As an example, the cryogenic refrigerator is a two-stage Gifford-McMahon (GM) refrigerator, but it can also be a pulse tube refrigerator, a Stirling refrigerator or other types of cryogenic refrigerators.

[0045] The cryopump container 16 is a vacuum container designed to maintain a vacuum during the vacuum exhaust operation of the cryopump 10 and to withstand the pressure of the surrounding environment (for example, atmospheric pressure). The cryopump container 16 includes a cryopanel container 16a having an air inlet 17 and a refrigerator container 16b. The cryopanel container 16a has a dome-shaped shape in which the air inlet 17 is open and the opposite side is closed, and a radiation shield 18 and a cryopanel 20 are contained therein. The refrigerator container 16b has a cylindrical shape, one end of which is fixed to the room temperature part of the expander 14, and the other end is connected to the cryopanel container 16a, and the expander 14 is inserted therein. In addition, a pressure sensor 21 measures the pressure inside the cryopump container 16.

[0046] The radiation shield 18 is thermally connected to the first cooling stage of the expander 14, thereby being cooled to a first cooling temperature (for example, 80K to 120K). The cryopanel 20 is thermally connected to the second cooling stage of the expander 14, thereby being cooled to a second cooling temperature (for example, 10K to 20K) lower than the first cooling temperature. The radiation shield 18 is arranged in the cryopump container 16 in a manner surrounding the cryopanel 20, and shields the heat input from the cryopump container 16 and the surrounding environment to the cryopanel 20. The gas entering from the air inlet 17 of the cryopump 10 is captured on the cryopanel 20 by condensation or adsorption. The structure of the cryopump 10, such as the configuration and shape of the radiation shield 18 and the cryopanel 20, can appropriately adopt various well-known structures, and therefore will not be described in detail here.

[0047] Furthermore, a first temperature sensor 22 for measuring the temperature of the radiation shield 18 and a second temperature sensor 23 for measuring the temperature of the cryopanel 20 are provided in the cryopump housing 16. The cryopump controller 110 may be connected to the first temperature sensor 22 to receive a first measured temperature signal indicating a first cooling temperature measured by the first temperature sensor 22, and may be connected to the second temperature sensor 23 to receive a second measured temperature signal indicating a second cooling temperature measured by the second temperature sensor 23.

[0048] The roughing valve 24 is mounted on the cryopump container 16 (e.g., the refrigerator housing 16b). The roughing valve 24 is connected to a roughing pump (not shown) provided outside the cryopump 10. The roughing pump is a vacuum pump used to evacuate the cryopump 10 to its operation start pressure. When the roughing valve 24 is opened under the control of the cryopump controller 110, the cryopump container 16 is connected to the roughing pump, and when the roughing valve 24 is closed, the cryopump container 16 is blocked from the roughing pump. By opening the roughing valve 24 and operating the roughing pump, the cryopump 10 can be depressurized.

[0049] The purge valve 26 is installed on the cryopump container 16 (for example, the cryopanel housing 16a). The purge valve 26 is connected to a purge gas supply device (not shown) provided outside the cryopump 10. When the purge valve 26 is opened under the control of the cryopump controller 110, the purge gas is supplied to the cryopump container 16, and when the purge valve 26 is closed, the supply of the purge gas to the cryopump container 16 is blocked. The purge gas can be, for example, nitrogen or other dry gases, and the temperature of the purge gas can be, for example, adjusted to room temperature, or can be heated to a temperature higher than room temperature. By opening the purge valve 26 to introduce the purge gas into the cryopump container 16, the cryopump 10 can be pressurized. In addition, the cryopump 10 can be heated from an ultra-low temperature to room temperature or a temperature higher than the room temperature.

[0050] The exhaust valve 28 is mounted on the cryopump container 16 (for example, the refrigerator housing 16b). The exhaust valve 28 is provided to discharge the fluid from the inside of the cryopump 10 to the outside. The fluid discharged from the exhaust valve 28 is basically a gas, but it can also be a liquid or a gas-liquid mixture. The exhaust valve 28 can be opened and closed under the control of the cryopump controller 110. At the same time, the exhaust valve 28 can also be opened mechanically based on the pressure difference between the inside and outside of the cryopump container 16. The exhaust valve 28 is configured to also function as a safety valve that releases the pressure to the outside when excess pressure is generated in the cryopump container 16.

[0051] Furthermore, the expander 14 is provided with a variable speed expander motor 30 for driving the expander 14. The expander motor 30 has an inverter, and can change the operating frequency (i.e., the rotation speed) of the expander motor 30 under the control of the cryopump controller 110. The operating frequency of the expander motor 30 specifies the number of times per unit time of the heat cycle (the GM cycle in the case of the GM refrigerator) performed in the expander 14 (i.e., the frequency of the heat cycle).

[0052] The cryopump 10 may include an input / output circuit 32 that collects information sent and received between the cryopump 10 and the cryopump controller 110. The input / output circuit 32 may be, for example, an I / O module or a remote I / O unit. The input / output circuit 32 is electrically connected to the various devices (e.g., the pressure sensor 21, the first temperature sensor 22, the second temperature sensor 23, the roughing valve 24, the purge valve 26, the exhaust valve 28, and the expander motor 30) of the cryopump 10 in order to send and receive signals between these devices. Furthermore, the input / output circuit 32 is connected to the cryopump controller 110 for communication via the second communication line 122.

[0053] Therefore, the cryopump 10 transmits a measured pressure signal indicating the measured pressure in the cryopump container 16 based on the pressure sensor 21 to the cryopump controller 110 via the input-output circuit 32 (and the second communication line 122). The cryopump 10 transmits a measured temperature signal indicating the measured temperature of each of the first temperature sensor 22 and the second temperature sensor 23 to the cryopump controller 110 via the input-output circuit 32. Furthermore, the cryopump 10 transmits a valve state signal indicating the open and closed state of each valve (i.e., the roughing valve 24, the purge valve 26, and the exhaust valve 28) to the cryopump controller 110 via the input-output circuit 32. The cryopump 10 transmits a motor state signal indicating the switch state and the operating frequency of the expander motor 30 to the cryopump controller 110 via the input-output circuit 32.

[0054] Furthermore, the cryopump 10 receives a valve control signal from the cryopump controller 110 indicating an action command of each valve through the input-output circuit 32, and the input-output circuit 32 sends the valve control signal to the corresponding valve. The valve that receives the valve control signal opens and closes according to the valve control signal. Similarly, the cryopump 10 receives a motor control signal from the cryopump controller 110 indicating an action command of the expander motor 30 through the input-output circuit 32, and the input-output circuit 32 sends the motor control signal to the expander motor 30. The expander motor 30 is switched on and off or its operating frequency is controlled according to the motor control signal.

[0055] As described above, the cryopump controller 110 may be configured to receive measurement parameters from sensors, determine operating parameters of the cryopump 10 so that the measurement parameters follow target values, and operate the cryopump 10 with the determined operating parameters.

[0056] For example, the cryopump controller 110 may be configured to control the expander 14 according to the first cooling temperature measured by the first temperature sensor 22 during the vacuum exhaust operation of the vacuum container 202 based on the cryopump 10. For example, the cryopump controller 110 may control the operating frequency of the expander motor 30 by feedback control so as to minimize the deviation between the first measured temperature and the first target temperature. The cryopump controller 110 may determine the operating frequency of the expander motor 30 as a function of the deviation between the measured temperature and the target temperature (for example, by PID control). The cryopump controller 110 outputs the determined operating frequency to the expander motor 30, and the expander motor 30 operates at the determined operating frequency.

[0057] The first target temperature is usually set to a constant value. The first target temperature is set as a specification parameter according to, for example, a process performed in the vacuum processing apparatus 200 in which the cryopump 10 is installed. During the operation of the cryopump 10, the target temperature can be changed as needed.

[0058] When the heat load of the cryopump 10 increases, the temperature of the radiation shield 18 will increase. When the measured temperature based on the first temperature sensor 22 is higher than the target temperature, the cryopump controller 110 will increase the operating frequency of the expander motor 30. As a result, the frequency of the heat cycle in the expander 14 will also increase, and the radiation shield 18 will be cooled toward the target temperature. On the contrary, when the measured temperature based on the first temperature sensor 22 is lower than the target temperature, the operating frequency of the expander motor 30 will be reduced, and the radiation shield 18 will be heated toward the target temperature. In this way, the first cooling temperature can be maintained within a temperature range near the first target temperature. Since the operating frequency of the expander motor 30 can be appropriately adjusted according to the heat load, such control helps to reduce the power consumption of the cryopump 10.

[0059] In order to adjust the cooling capacity of the expander 14, the expander 14 may be provided with a heating device 34 such as an electric heater that is thermally connected to the radiation shield 18 in a manner that can heat the radiation shield 18 instead of controlling the operating frequency of the expander motor 30, or in addition to controlling the operating frequency of the expander motor 30, the expander 14 may be provided with a heating device 34 such as an electric heater that is thermally connected to the radiation shield 18 in a manner that can heat the radiation shield 18. The cryopump controller 110 may be configured to switch the switch of the heating device 34 and / or control the power input to the heating device 34. At this time, the cryopump controller 110 may control the input to the heating device 34 through feedback control so as to minimize the deviation between the first measured temperature and the first target temperature. The cryopump controller 110 may determine the input to the heating device 34 as a function of the deviation between the measured temperature and the target temperature (for example, through PID control). When the measured temperature based on the first temperature sensor 22 is higher than the target temperature, the cryopump controller 110 reduces the input to the heating device 34 (or turns off the heating device 34). Conversely, when the temperature measured by the first temperature sensor 22 is lower than the target temperature, the input to the heating device 34 is increased (or the heating device 34 is turned on), and the radiation shield 18 is heated toward the target temperature.

[0060] Controlling the cryopump 10 based on the first target temperature in this way is sometimes referred to as "first-stage temperature control". In the first-stage temperature control, the temperature of the cryopanel 20 is not directly controlled. That is, as a result of the first-stage temperature control, the cryopanel 20 is cooled to a temperature that depends on the second-stage refrigeration capacity of the expander 14 and the heat load from the outside.

[0061] Similarly, the cryopump controller 110 can also perform so-called "two-stage temperature control" that controls the expander 14 according to the target temperature of the cryopanel 20. In this case, the cryopump controller 110 can be configured to control the expander 14 according to the second cooling temperature measured by the second temperature sensor 23. For example, the cryopump controller 110 can control the operating frequency of the expander motor 30 (or the input of the heating device that heats the cryopanel 20) through feedback control to minimize the deviation between the second measured temperature and the second target temperature. In this way, the temperature of the cryopanel 20 can follow the target temperature. In the two-stage temperature control, the first-stage cooling temperature (i.e., the temperature of the radiation shield 18) is not directly controlled. In the two-stage temperature control, the first-stage cooling temperature depends on the first-stage refrigeration capacity of the expander 14 and the heat load from the outside.

[0062] Furthermore, during the regeneration operation of the cryopump 10, the cryopump controller 110 can control the roughing valve 24, the purge valve 26, the exhaust valve 28, and the expander motor 30 according to the pressure in the cryopump container 16 (or, as needed, according to the temperature of the cryopanel 20 and the pressure in the cryopump container 16).

[0063] Figure 3 1 is a schematic diagram showing an example of a compressor 12 that can be used in the cryopump system 100 according to the embodiment. The compressor 12 includes a high-pressure gas outlet 50, a low-pressure gas inlet 51, a high-pressure flow path 52, a low-pressure flow path 53, a first pressure sensor 54, a second pressure sensor 55, a bypass line 56, a compressor body 57, and a compressor housing 58.

[0064] The high-pressure gas outlet 50 is provided on the compressor housing 58 as a discharge port of the working gas of the compressor 12, and the low-pressure gas inlet 51 is provided on the compressor housing 58 as a suction port of the working gas of the compressor 12. The high-pressure pipeline 13a is connected to the high-pressure gas outlet 50, and the low-pressure pipeline 13b is connected to the low-pressure gas inlet 51. The high-pressure flow path 52 connects the discharge port of the compressor body 57 to the high-pressure gas outlet 50, and the low-pressure flow path 53 connects the low-pressure gas inlet 51 to the suction port of the compressor body 57. The compressor housing 58 accommodates the high-pressure flow path 52, the low-pressure flow path 53, the first pressure sensor 54, the second pressure sensor 55, the bypass pipeline 56 and the compressor body 57. The compressor 12 is also called a compressor unit.

[0065] The compressor body 57 is constructed as follows: the working gas sucked from its suction port is compressed internally and discharged from the discharge port. The compressor body 57 can be, for example, a vortex pump, a rotary pump, or other pump that increases the pressure of the working gas. The compressor body 57 can have a variable speed compressor motor 57a. The compressor motor 57a has an inverter that can change the motor operating frequency under the control of the cryopump controller 110. In this way, the compressor body 57 can be constructed so that the flow rate of the discharged working gas can be changed. Alternatively, the compressor body 57 can also be constructed so as to discharge a constant flow rate of the working gas. The compressor body 57 is also called a compression chamber.

[0066] The first pressure sensor 54 is disposed on the high-pressure flow path 52 to measure the pressure of the working gas flowing through the high-pressure flow path 52. The second pressure sensor 55 is disposed on the low-pressure flow path 53 to measure the pressure of the working gas flowing through the low-pressure flow path 53. Therefore, the first pressure sensor 54 and the second pressure sensor 55 may also be referred to as a high-pressure sensor and a low-pressure sensor, respectively.

[0067] The bypass line 56 connects the high-pressure flow path 52 to the low-pressure flow path 53 in such a way that the working gas bypasses the expander 14 and flows back from the high-pressure flow path 52 to the low-pressure flow path 53. A relief valve 60 is provided on the bypass line 56, and the relief valve 60 is used to open and close the bypass line 56 or control the flow rate of the working gas flowing through the bypass line 56. The relief valve 60 is configured to open when a pressure difference above a set pressure acts between its inlet and outlet. The relief valve 60 can be an on-off valve or a flow control valve, for example, a solenoid valve. The set pressure can be appropriately set based on the designer's experience or experiments or simulation tests conducted by the designer. In this way, it is possible to prevent the pressure difference between the high-pressure line 13a and the low-pressure line 13b from exceeding the set pressure and becoming too large.

[0068] As an example, the relief valve 60 can be opened and closed under the control of the cryopump controller 110. The cryopump controller 110 can control the relief valve 60 as follows: compare the measured pressure difference between the high-pressure pipeline 13a and the low-pressure pipeline 13b with the set pressure, and open the relief valve 60 when the measured pressure difference is greater than the set pressure, and close the relief valve 60 when the measured pressure difference is less than the set pressure difference. The cryopump controller 110 can obtain the measured pressure difference between the high-pressure pipeline 13a and the low-pressure pipeline 13b based on the measured pressure of the first pressure sensor 54 and the second pressure sensor 55. As another example, the relief valve 60 can also be configured to work as a so-called safety valve, that is, mechanically open when a pressure difference greater than the set pressure acts between the inlet and outlet.

[0069] The cryopump controller 110 may be configured to receive the measured parameters from the sensor, determine the operating parameters of the compressor 12 in a manner that the measured parameters follow the target value, and operate the compressor 12 with the determined operating parameters. For example, the cryopump controller 110 may be configured to control the operating frequency of the compressor motor 57a according to the measured pressure (for example, the first pressure measured by the first pressure sensor 54, the second pressure measured by the second pressure sensor 55, or the pressure difference between the first pressure and the second pressure). The cryopump controller 110 may control the operating frequency of the compressor motor 57a by feedback control to minimize the deviation between the measured pressure and the target pressure. The cryopump controller 110 may determine the operating frequency of the compressor motor 57a as a function of the deviation between the measured pressure and the target pressure (for example, by PID control). The cryopump controller 110 outputs the determined operating frequency to the compressor motor 57a, and the compressor motor 57a operates at the determined operating frequency.

[0070] In addition, the compressor 12 may have various other components. For example, an oil separator, an absorber, etc. may be provided on the high-pressure flow path 52. Other components such as a storage tank may be provided on the low-pressure flow path 53. In addition, the compressor 12 may also be provided with an oil circulation system that uses oil to cool the compressor body 57 or a cooling system that uses cooling water to cool the oil.

[0071] The operation of the cryopump 10 of the above structure is described below. When the cryopump 10 is operated, first, before the operation, the vacuum container 202 is roughly pumped to a specified pressure (for example, about 100Pa or about 10Pa) using other appropriate rough pumps. Usually, a gate valve is provided between the vacuum container 202 and the air inlet 17 of the cryopump 10, and the gate valve is closed during the rough pumping of the vacuum container 202. Thereafter (or simultaneously with the rough pumping of the vacuum container 202), the cryopump 10 is operated. By driving the expander 14, the radiation shield 18 and the cryopanel 20 are cooled to the first cooling temperature and the second cooling temperature, respectively. A baffle thermally connected to the radiation shield 18 may be provided at the air inlet 17, and the baffle is also cooled to the first cooling temperature together with the radiation shield 18. Thereafter, the gate valve is opened, and the vacuum exhaust of the vacuum container 202 based on the cryopump 10 is started.

[0072] The baffle plate and the radiation shield 18 cooled to the first cooling temperature cool the gas flying from the vacuum container 202 toward the cryopump 10. At the first cooling temperature, the vapor pressure is sufficiently low (for example, 10 -8Pa or less) condenses on their surfaces. The gas may also be referred to as the first gas. The first gas is, for example, water vapor. In this way, the cryopump 10 is able to exhaust the first gas. A portion of the gas whose vapor pressure is not low enough at the first cooling temperature enters the cryopump 10 from the gas inlet 17. Alternatively, another portion of the gas is reflected by the baffle and does not enter the cryopump 10 but returns to the vacuum container 202.

[0073] The gas entering the cryopump 10 is cooled by the cryopanel 20. At the second cooling temperature, the vapor pressure is sufficiently low (for example, 10 -8 The gas (less than 100 Pa) condenses on the surface of the cryopanel 20. This gas may also be referred to as a second gas. The second gas is, for example, argon. In this way, the cryopump 10 can discharge the second gas.

[0074] The gas whose vapor pressure is not low enough at the second cooling temperature is adsorbed on an adsorbent such as activated carbon provided on the surface of the cryopanel 20. The gas may also be referred to as a third gas. The third gas is, for example, hydrogen. In this way, the cryopump 10 can discharge the third gas. Therefore, the cryopump 10 can discharge various gases by condensation or adsorption, so that the vacuum degree of the vacuum container 202 can reach a desired level.

[0075] Figure 4 The present invention is a flowchart of a cryopump monitoring method according to an embodiment of the present invention. The method includes the following steps: obtaining time series data of measurement parameters related to the cryopump system 100 (S10); obtaining time series data of operating parameters of the cryopump system 100 controlled in a manner such that the measurement parameters follow target values ​​(S20); and displaying a time series curve graph of the measurement parameters and a time series curve graph of the operating parameters in a manner aligned with the time axis (S30).

[0076] As described above, the cryopump system 100 is provided with various sensors such as the first temperature sensor 22, the second temperature sensor 23, the first pressure sensor 54, and the second pressure sensor 55 for measuring measurement parameters related to the cryopump system 100. In order to control the cryopump system 100, the measurement parameters continuously measured by these sensors during the operation of the cryopump system 100 are input to the cryopump controller 110. The cryopump controller 110 determines the operating parameters of the cryopump system 100 based on the acquired measurement parameters.

[0077] The time series data of the measurement parameters and the operating parameters thus obtained may be stored in a storage unit provided in the cryopump controller 110. Alternatively, the time series data of the measurement parameters and the time series data of the operating parameters may also be stored in an external storage device that can be connected to the cryopump controller 110. These time series data may be relatively long-term data, for example, time series data of an operation period of at least one month, at least half a year, or at least one year.

[0078] In S10, the processor 132 (refer to Figure 1 ) obtains the time series data of the measurement parameters from the cryopump controller 110. The processor 132 may also obtain the data from an external storage device storing the time series data of the measurement parameters.

[0079] The processor 132 may acquire time series data of a plurality of measurement parameters. For example, the processor 132 may acquire time series data of the first measurement parameter to the fourth measurement parameter, respectively. The first measurement parameter may be the first cooling temperature measured by the first temperature sensor 22. The second measurement parameter may be the second cooling temperature measured by the second temperature sensor 23. The third measurement parameter may be the first pressure measured by the first pressure sensor 54. The fourth measurement parameter may be the second pressure measured by the second pressure sensor 55.

[0080] In S20, the processor 132 obtains the timing data of the operating parameters from the cryopump controller 110 (or the external storage device). The processor 132 can obtain the timing data of multiple operating parameters, for example, the timing data of the operating frequency of the expander motor 30 and the operating frequency of the compressor motor 57a can be obtained. In the case where a heating device 34 is provided on the expander 14, the processor 132 can obtain the timing data of the input of the heating device 34 instead of the operating frequency of the expander motor 30, or in addition to obtaining the operating frequency of the expander motor 30, the timing data of the input of the heating device 34 can also be obtained.

[0081] In S30, the processor 132 generates a timing curve graph of the measurement parameters based on the acquired timing data of the measurement parameters. When the timing data of multiple measurement parameters are acquired, the processor 132 generates a timing curve graph for each measurement parameter. In addition, the processor 132 generates a timing curve graph for the operation parameters based on the acquired timing data of the operation parameters. When the timing data of multiple operation parameters are acquired, the processor 132 generates a timing curve graph for each operation parameter. The timing curve graph is a graph in which one of the vertical axis and the horizontal axis (e.g., the horizontal axis) represents time and the other (e.g., the vertical axis) represents the measurement parameter (or the operation parameter).

[0082] like Figure 5 As shown, the cryopump monitor 130 includes a display 134 for displaying information related to the cryopump system 100. The processor 132 is configured to control the display 134 so that the generated time series graph of at least one measurement parameter and / or operating parameter is displayed on the display 134.

[0083] For example, the processor 132 may be configured to set a display area for displaying a specific timing curve graph on the display 134. A single display area may be set on the display 134, and a timing curve graph of a measurement parameter (or operating parameter) may be displayed in the display area. Alternatively, a plurality of display areas for displaying corresponding timing curve graphs may be set on the display 134, and corresponding timing curve graphs may be displayed in each display area. For example, a first display area and a second display area may be set on the display 134, and a timing curve graph of a measurement parameter may be displayed in the first display area, and a timing curve graph of an operating parameter may be displayed in the second display area.

[0084] The processor 132 may be configured to switch between a plurality of graph display screens on the display 134. In this case, for example, at least one display area may be set on the first graph display screen, and at least one display area may be set on the second graph display screen. Timing graphs of different measurement parameters (or operating parameters) may be displayed in the display area of ​​the first graph display screen and the display area of ​​the second graph display screen. For example, a timing graph of measurement parameters and operating parameters related to the cryopump 10 may be displayed on the first graph display screen, and a timing graph of measurement parameters and operating parameters related to the compressor 12 may be displayed on the second graph display screen.

[0085] Furthermore, the processor 132 may be configured to display a plurality of timing curve graphs in a certain display area. For example, the same measurement parameters (e.g., the first cooling temperature) of a plurality of cryopumps 10 may be displayed in a certain display area. Furthermore, the same operating parameters (e.g., the operating frequency of the expander motor 30) of a plurality of cryopumps 10 may be displayed in a certain display area.

[0086] In this embodiment, the processor 132 is configured to display the time series graph of the measurement parameters and the time series graph of the operation parameters on the display 134 so that the time axes are aligned. Such a graph display example will be described later.

[0087] Figure 5 1 is a schematic diagram showing an example of a cryopump monitor 130 that can be used in the cryopump system 100 according to the embodiment. Figure 5 As shown, on the display 134 of the cryopump monitor 130 , a first display area 136 a , a second display area 136 b , and a third display area 136 c are set as an example.

[0088] In this example, a timing curve diagram of the first cooling temperature T1 measured by the first temperature sensor 22 is displayed in the first display area 136a as a first measurement parameter. In the first timing curve diagram, the vertical axis represents the first cooling temperature T1, and the horizontal axis represents time. The operating frequency of the expander motor 30 is displayed in the second display area 136b as a first operating parameter. In the second timing curve diagram, the vertical axis represents the operating frequency of the expander motor 30, and the horizontal axis represents time. The timing curve diagram of the second cooling temperature T2 measured by the second temperature sensor 23 is displayed in the third display area 136c as a second measurement parameter. In the third timing curve diagram, the vertical axis represents the second cooling temperature T2, and the horizontal axis represents time.

[0089] These display areas (specifically, the first display area 136a, the second display area 136b, and the third display area 136c) are set to be arranged in the vertical direction on the display 134. Therefore, the horizontal axes (i.e., time axes) of the timing curve graphs displayed in these display areas are consistent. In other words, the same position on the horizontal axis of the timing curve graphs displayed in each display area represents the same time.

[0090] The first display area 136a, the second display area 136b, and the third display area 136c are respectively set at the upper part, the middle part, and the lower part on the display 134. The second display area 136b is adjacent to the lower side of the first display area 136a, and the third display area 136c is adjacent to the lower side of the second display area 136b. Therefore, the timing curve of the operating frequency of the expander motor 30 is displayed adjacent to the lower side of the timing curve of the first cooling temperature T1. Moreover, the timing curve of the second cooling temperature T2 is displayed adjacent to the lower side of these two timing curves.

[0091] The plurality of display areas are set so that the timing curve graph displayed in each display area can be identified. Figure 5 As an example, the first display area 136a, the second display area 136b, and the third display area 136c are set on the display 134 to be arranged in the vertical direction with a small gap between them. As another example, it can also be set so that two adjacent display areas (for example, the first display area 136a and the second display area 136b) are arranged without a gap. Alternatively, it can also be set so that at least a part of the two display areas overlap. In short, as long as the timing curves of different parameters can be identified on the display 134, the display areas used to display these timing curves can be separated from each other on the display 134, or they can also overlap with each other.

[0092] As described later, the time series graph of the first measurement parameter and the time series graph of the first operation parameter may be displayed in a row so that the target value of the first measurement parameter is close to the limit value of the first operation parameter. To achieve this, the display position of the target value of the first measurement parameter may be defined at the edge (e.g., the lower edge) of the first display area 136a, and the display position of the limit value of the first operation parameter may be defined at the edge of the second display area 136b that is close to the edge of the first display area 136a (e.g., the upper edge of the second display area 136b).

[0093] Figure 6 FIG. 1 is a schematic diagram showing an example of a timing graph display in the cryopump monitor 130 according to the embodiment. Figure 5 As described above, the first cooling temperature T1 is displayed in the first display area 136a, the operating frequency of the expander motor 30 is displayed in the second display area 136b, and the second cooling temperature T2 is displayed in the third display area 136c.

[0094] In this example, the vertical axis of the first display area 136a is set to the right side of the area, and the numerical value (80K, 90K, 100K) indicating the first cooling temperature T1 is displayed on the right side. In addition, the vertical axis of the second display area 136b is set to the left side of the area, and the numerical value (50Hz to 100Hz) indicating the operating frequency of the expander motor 30 is displayed on the left side. Similarly, the vertical axis of the third display area 136c is set to the left side of the area, and the numerical value (10K to 20K) indicating the second cooling temperature T2 is displayed on the left side.

[0095] And, in Figure 6 In the example of , since the lower edge of the first display area 136a is connected to the upper edge of the second display area 136b, the horizontal line indicating 80K in the first display area 136a is consistent with the horizontal line indicating 100Hz in the second display area 136b. On the other hand, the lower edge of the second display area 136b is separated from the upper edge of the third display area 136c, and the horizontal line indicating 50Hz in the second display area 136b and the horizontal line indicating 20K in the third display area 136c are displayed separately.

[0096] In this embodiment, if Figure 6 As shown, the cryopump monitor 130 can display a time series graph of the first cooling temperature T1 , the operating frequency of the expander motor 30 , and the second cooling temperature T2 in a manner aligned with the time axis.

[0097] Therefore, the measured parameters and the operating parameters determined therefrom, for example, the first cooling temperature T1 and the operating frequency of the expander motor 30, can be read in unison with the naked eye. Therefore, the state of the cryopump system (for example, changes in the measured parameters and operating parameters at a certain moment or within a certain time range) can be easily grasped.

[0098] Furthermore, also for different measurement parameters (for example, the first cooling temperature T1 and the second cooling temperature T2), their changes can be grasped on the same time axis.

[0099] In this example, the cryopump system 100 has four cryopumps (Pump1, Pump2, Pump3, and Pump4). Figure 6 , four timing graphs of the first cooling temperature T1, the operating frequency of the expander motor 30, and the second cooling temperature T2 are respectively shown corresponding to the four cryopumps (i.e., a total of twelve graphs are displayed). The four graphs of the first cooling temperature T1 are displayed in a summary in the first display area 136a, the four graphs of the operating frequency of the expander motor 30 are displayed in a summary in the second display area 136b, and the four graphs of the second cooling temperature T2 are displayed in a summary in the third display area 136c. Therefore, it is possible to easily compare the measurement parameters (or operating parameters) between different cryopumps 10.

[0100] However, regarding the first cooling temperature T1, the four graphs overlap each other in most of the graphs. This is because the above-mentioned first-stage temperature control is performed. In each of the four cryopumps, the first cooling temperature T1 is controlled to be consistent with the target temperature (80K in this example) within a specified temperature range (for example, a range of ±0.1°C).

[0101] However, as in Figure 6 As shown in the area surrounded by the dotted boxes 138a, 138b, and 138c, sometimes the first cooling temperature T1 of a certain cryopump 10 deviates from the target temperature and exceeds the target temperature. Such a situation may occur when the heat load from the outside of the vacuum container 202 to the cryopump 10 is too large, or due to time degradation caused by the long-term operation of the cryopump 10. At this time, in order to restore the first cooling temperature T1 to the target temperature, the operating frequency of the expander motor 30 is increased, and finally reaches a predetermined upper limit value (95Hz in this example) and is maintained at the upper limit value. Figure 6 It can be observed that, even so, the first cooling temperature T1 continues to rise.

[0102] In this example, if Figure 6As shown, the timing curve diagram of the first cooling temperature T1 and the timing curve diagram of the operating frequency of the expander motor 30 are arranged and displayed in such a manner that the target value of the first cooling temperature T1 (e.g., 80K) and the limit value of the operating frequency of the expander motor 30 (e.g., the upper limit, e.g., 95Hz) are close to each other. Specifically, the display position of the target value of the first cooling temperature T1 is defined at the lower edge of the first display area 136a, and the display position of the upper limit value of the operating frequency of the expander motor 30 is defined at the upper edge of the second display area 136b. As a result, the observer can continuously and integrally recognize the changes in the cryopump system 100, that is, the operating frequency of the expander motor 30 reaches the upper limit value and the first cooling temperature T1 exceeds the target temperature and rises.

[0103] The processor 132 of the cryopump monitor 130 may be configured to display a mark 140 indicating that the diagnosis of the cryopump 10 has been performed at a position 142 of the diagnosis time on the time axis of the timing graph on the display 134. In this way, it is possible to easily understand that there is a relevant diagnosis result on the timing graph of the measurement parameter and / or the operation parameter.

[0104] The diagnosis can be performed by the cryopump controller 110 based on the acquired measurement parameters and / or operating parameters. The diagnosis can be performed by a diagnostic method based on comparison of the acquired parameters with diagnostic thresholds, a known cryopump diagnostic method that has been proposed, or other appropriate diagnostic methods, and therefore will not be described in detail here.

[0105] In the example shown in the figure, a symbol "!" is displayed as the mark 140, indicating a position 142 on the time axis corresponding to the diagnosis time. The mark 140 may also include characters indicating the diagnosis result, such as "failure", "abnormality", and "normal".

[0106] In addition, the mark 140 may be displayed in a manner indicating a parameter to be noted in the diagnosis result. In the illustrated example, at the diagnosis time indicated by the mark 140, the operating frequency of the expander motor 30 reaches the upper limit value, and as a result, the first cooling temperature T1 begins to deviate from the target temperature, so the mark 140 includes an arrow indicating the position of the diagnosis time on the timing curve of the first cooling temperature T1.

[0107] Furthermore, the processor 132 may also be configured to display the diagnostic information of the cryopump 10 associated with the tag 140 on the display 134 in response to the operator's designation of the tag 140. The diagnostic information of the cryopump 10 may be a diagnostic report including documents, charts, photos, etc. that explain the diagnostic results. In the case where a decomposition investigation of the cryopump 10 is performed during the diagnosis, the diagnostic information may also include photos or explanatory documents of the decomposition investigation. The diagnostic information of the cryopump 10 may be associated with the tag 140 in, for example, a hypertext format or other appropriate format. For example, the tag 140 can be specified by an appropriate input operation performed by the operator (for example, operating a pointer displayed on the display 134, etc.). In this way, it is easy to grasp the detailed diagnostic results, which is very convenient.

[0108] Figure 7 1 is a schematic diagram showing another example of the timing curve graph display in the cryopump monitor 130 involved in the embodiment. In the case where the heating device 34 is controlled instead of the control of the operating frequency of the expander motor 30, the input of the heating device 34 can be displayed in the second display area 136b. As in the above example, the first cooling temperature T1 and the second cooling temperature T2 are displayed in the first display area 136a and the third display area 136c, respectively. The three timing curve graphs of the first cooling temperature T1, the input of the heating device 34, and the second cooling temperature T2 are displayed on the display 134 in a manner aligned with the time axis.

[0109] As reference Figure 6 As described above, the first cooling temperature T1 of the cryopump 10 may deviate from the target temperature and exceed the target temperature ( Figure 6 At this time, in order to restore the first cooling temperature T1 to the target temperature, the input of the heating device 34 is reduced, and finally reaches the preset lower limit value (0W in this example) and is maintained at the lower limit value. In short, the heating device 34 is turned off. However, Figure 7 It can be seen that even if the heating device 34 is turned off, the first cooling temperature T1 continues to rise.

[0110] The timing curve diagram of the first cooling temperature T1 and the timing curve diagram of the input of the heating device 34 are arranged and displayed in such a manner that the target value of the first cooling temperature T1 (e.g., 80K) and the limit value of the input of the heating device 34 (e.g., the lower limit value, such as 0W) are close. Specifically, the display position of the target value of the first cooling temperature T1 is defined at the lower edge of the first display area 136a, and the display position of the lower limit value of the input of the heating device 34 is defined at the upper edge of the second display area 136b. On the vertical axis of the second display area 136b representing the input of the heating device 34, the value decreases as it goes upward. Thus, the observer can continuously and integrally recognize the changes in the cryopump system 100 in which the input of the heating device 34 reaches the lower limit value and the first cooling temperature T1 rises above the target temperature.

[0111] In addition, when both the operating frequency of the expander motor 30 and the input of the heating device 34 are controlled in order to control the first cooling temperature T1 to the target temperature, the timing curve diagram of both the operating frequency of the expander motor 30 and the input of the heating device 34 and the timing curve diagram of the first cooling temperature T1 can also be displayed together.

[0112] Figure 8 1 is a schematic diagram showing another example of a timing graph display in the cryopump monitor 130 involved in the embodiment. The cryopump monitor 130 can display the measured parameters and operating parameters related to the compressor 12 in a manner aligned with the time axis. Therefore, the cryopump monitor 130 can set the fourth display area 136d and the fifth display area 136e on the display 134. The timing graph of the first pressure PH measured by the first pressure sensor 54 and the second pressure PL measured by the second pressure sensor 55 is displayed in a summary on the fourth display area 136d. The timing graph of the pressure difference DP between the first pressure PH and the second pressure PL and the timing graph of the operating frequency F of the compressor motor 57a are displayed in a summary on the fifth display area 136e. In other words, the fifth display area 136e displaying the pressure difference DP and the sixth display area displaying the operating frequency F are set on the display 134 in a manner overlapping each other. For the measured parameters and operating parameters related to the compressor 12, the mark 140 can also be displayed.

[0113] in addition, Figure 8 The two display areas shown may be set on the same screen as the first to third display areas ( 136 a to 136 c ) related to the cryopump 10 , or may be set on another switchable screen.

[0114] like Figure 8As shown by mark 140, during the operation of the compressor 12, although the operating frequency F of the compressor motor 57a reaches the preset upper limit value (78 Hz in this example), the pressure difference DP between the first pressure PH and the second pressure PL sometimes deviates from the target pressure difference (for example, 1.5 MPa) and is lower than the target pressure difference (in addition, in the fifth display area 136e, on the vertical axis on the right side representing the pressure difference DP, the value decreases as it goes up).

[0115] In this example, if Figure 8 As shown, the timing curve diagram of the pressure difference DP and the timing curve diagram of the operating frequency of the compressor motor 57a are displayed in a row so that the target value of the pressure difference DP (e.g., 1.5 MPa) and the limit value of the operating frequency of the compressor motor 57a (e.g., the upper limit value, e.g., 78 Hz) are close to each other. Thus, the observer can continuously and integrally recognize the change of the cryopump system 100 that the operating frequency of the compressor motor 57a reaches the upper limit value and the pressure difference DP deviates from the target value and gradually decreases.

[0116] The present invention has been described above based on the embodiments. The present invention is not limited to the above-mentioned embodiments, and those skilled in the art should understand that various design changes can be made, various modifications can exist, and such modifications are also within the scope of the present invention. Various features described in one embodiment can also be applied to other embodiments. The new embodiment generated by the combination has the effects of each of the combined embodiments.

[0117] In the above embodiment, the cryopump monitor 130 is described as an example in which the timing graph is displayed in the form of an image on the display 134. However, the cryopump monitor 130 may be configured to display in other forms. For example, the cryopump monitor 130 may be configured to display the timing graph on paper by printing.

[0118] Furthermore, the cryopump monitor 130 may also be disposed at a location far away from the cryopump 10 or the vacuum processing apparatus 200, and may be communicatively connected to the cryopump controller 110, for example, via the Internet or other appropriate communication networks. The cryopump controller 110 may output time series data of measurement parameters and / or operation parameters to the communication network, and the cryopump monitor 130 may receive data outputted from the cryopump controller 110 from the communication network.

[0119] The cryopump monitor 130 may also be a stand-alone device. In other words, the cryopump monitor 130 may also be configured not to communicate with the cryopump controller 110. At this time, the cryopump monitor 130 may obtain these timing data from a computer-readable medium storing timing data of measurement parameters and / or operating parameters. In the computer-readable medium, timing data output from the cryopump controller 110 (or other controller or storage device) may be pre-stored. Such a computer-readable medium may be connected to the cryopump monitor 130 so that the timing data is read into the cryopump monitor 130. The computer-readable medium may be, for example, a computer-readable medium in various known forms such as a hard disk and a USB memory.

[0120] The cryopump monitor 130 may be a computer (e.g., a general-purpose computer such as a personal computer) on which the cryopump monitoring program according to the embodiment is installed. Alternatively, the cryopump monitor 130 may be installed in an electronic device such as a smart phone that can be carried by a worker. Alternatively, the cryopump monitor 130 may be installed in a monitor device mounted on the vacuum processing apparatus 200.

[0121] In the above embodiment, an example is given in which a plurality of cryopumps 10 are controlled by a common cryopump controller 110, but the present invention is not limited thereto. Fig. 9 As shown in FIG. 1 , the cryopump system 100 may also include a plurality of controllers 110a for respectively controlling a plurality of cryopumps 10 instead of the cryopump controller 110. As described above, each cryopump 10 may be provided with a sensor for measuring a measurement parameter related to the cryopump 10 (e.g., Figure 2 and Figure 3 As shown in the figure, the first temperature sensor 22 and the second temperature sensor 23 provided in the cryopump 10, the first pressure sensor 54 and the second pressure sensor 55 provided in the compressor 12, etc.). Each controller 110a may be configured to receive the measured parameters of the cryopump 10 from the sensor of the corresponding cryopump 10, determine the operating parameters of the cryopump 10 in such a manner that the measured parameters follow the target values, and operate the cryopump 10 with the determined operating parameters.

[0122] The cryopump monitor 130 may be configured to obtain the timing data of the measurement parameters and the timing data of the operating parameters of each cryopump 10, and display the timing curve graph of the measurement parameters and the timing curve graph of the operating parameters in a manner aligned with the time axis. At this time, the cryopump monitor 130 may obtain the timing data of the measurement parameters and / or the operating parameters from each controller 110a via the communication network. Alternatively, the cryopump monitor 130 may also obtain these timing data from a computer-readable medium storing the timing data of the measurement parameters and / or the operating parameters. In this way, Figure 6As illustrated, the cryopump monitor 130 may display a time series graph of the first cooling temperature T1 , the operating frequency of the expander motor 30 , and the second cooling temperature T2 .

[0123] In the above embodiment, the compressor 12 is controlled by the cryopump controller 110, but the present invention is not limited to this. Fig. 9 As shown, the cryopump system 100 may also include a compressor controller 12a for controlling the compressor 12. The compressor controller 12a may be configured to control the compressor 12 autonomously (i.e., independently of the control of the cryopump 10). Therefore, the compressor controller 12a may be configured to receive measurement parameters related to the compressor 12 from a sensor, determine the operating parameters of the compressor 12 in such a way that the measurement parameters follow the target values, and operate the compressor 12 with the determined operating parameters. For example, the compressor controller 12a may be configured to control the operating frequency of the compressor motor 57a based on the measured pressure (e.g., the first pressure measured by the first pressure sensor 54, the second pressure measured by the second pressure sensor 55, or the pressure difference between the first pressure and the second pressure). The compressor controller 12a may be provided separately from the cryopump controller 110, and may be mounted on the compressor 12. In reference to Figures 1 to 3 In the illustrated cryopump system 100 , a compressor controller 12 a for controlling the compressor 12 may be provided in this manner.

[0124] The cryopump monitor 130 may also be configured to obtain the timing data of the measured parameters and the timing data of the operating parameters related to the compressor 12, and display the timing curve graph of the measured parameters and the timing curve graph of the operating parameters in a manner aligned with the time axis. In this case, the cryopump monitor 130 may obtain the timing data of the measured parameters and / or the operating parameters from the compressor controller 12a via the communication network. Alternatively, the cryopump monitor 130 may also obtain these timing data from a computer-readable medium storing the timing data of the measured parameters and / or the operating parameters. In this way, Figure 8 As illustrated, the cryopump monitor 130 can display a timing graph of the first pressure PH measured by the first pressure sensor 54, the second pressure PL measured by the second pressure sensor 55, the pressure difference DP between the first pressure PH and the second pressure PL, and the operating frequency F of the compressor motor 57a.

[0125] The embodiments of the present invention can also be expressed as the following items marked with numbers.

[0126] 1. A cryopump system, characterized by comprising:

[0127] Sensors for measuring parameters related to the cryopump system;

[0128] a cryopump controller configured to receive the measurement parameter from the sensor, determine an operation parameter of the cryopump system so that the measurement parameter follows a target value, and operate the cryopump system with the determined operation parameter; and

[0129] The cryopump monitor is configured to acquire the time series data of the measurement parameter and the time series data of the operation parameter, and display the time series graph of the measurement parameter and the time series graph of the operation parameter in a manner aligned with the time axis.

[0130] 2. The cryopump system according to claim 1, characterized in that:

[0131] The cryopump monitor is configured to display the time series graph of the measurement parameter and the time series graph of the operating parameter in an aligned manner so that the target value of the measurement parameter and the limit value of the operating parameter are close to each other.

[0132] 3. The cryopump system according to claim 2, characterized in that:

[0133] The cryogenic pump monitor is configured such that a display position of the target value of the measurement parameter is defined at an edge of a first display area that displays a timing curve graph of the measurement parameter, and a display position of the limit value of the operating parameter is defined at an edge of a second display area that displays a timing curve graph of the operating parameter, close to an edge of the first display area.

[0134] 4. The cryopump system according to any one of items 1 to 3, characterized in that

[0135] The cryopump monitor is configured to display a mark indicating that the diagnosis of the cryopump system has been performed at a position of a diagnosis time on the time axis.

[0136] 5. The cryopump system according to item 4, characterized in that:

[0137] The cryopump monitor is configured to display diagnostic information of the cryopump system associated with the mark in response to designation of the mark by an operator.

[0138] 6. The cryopump system according to any one of items 1 to 5, characterized in that

[0139] The cryopump system further includes a second sensor configured to measure a second measurement parameter related to the cryopump system that is different from the measurement parameter.

[0140] The cryopump monitor is configured to acquire time series data of the second measurement parameter and to display the time series graph of the second measurement parameter in a manner aligned with the time series graphs of the measurement parameter and the operating parameter on the time axis.

[0141] 7. The cryopump system according to any one of items 1 to 6, characterized in that

[0142] The cryogenic pump system comprises:

[0143] multiple cryogenic pumps; and

[0144] a plurality of sensors for respectively measuring measurement parameters related to corresponding cryopumps among the plurality of cryopumps;

[0145] The cryopump controller is configured to receive the measurement parameter from a corresponding sensor among the plurality of sensors for each of the plurality of cryopumps, determine an operating parameter of the cryopump in such a manner that the measurement parameter follows a target value, and operate the cryopump with the determined operating parameter.

[0146] The cryopump monitor is configured to acquire the time series data of the measurement parameter and the time series data of the operation parameter for each of the plurality of cryopumps, and to display the time series graph of the measurement parameter and the time series graph of the operation parameter in a manner aligned with a time axis.

[0147] 8. The cryopump system according to item 7, characterized in that

[0148] The cryopump monitor is configured to collectively display a plurality of time series graphs of the measurement parameters of the plurality of cryopumps and collectively display a plurality of time series graphs of the operation parameters of the plurality of cryopumps.

[0149] 9. The cryopump system according to any one of items 1 to 6, characterized in that

[0150] The cryogenic pump system comprises:

[0151] Multiple cryogenic pumps;

[0152] a plurality of sensors for respectively measuring measurement parameters related to corresponding cryopumps among the plurality of cryopumps; and

[0153] a plurality of controllers, respectively controlling the plurality of cryopumps to replace the cryopump controller,

[0154] Each controller is configured to receive the measurement parameter from a corresponding sensor among the plurality of sensors for a corresponding cryopump among the plurality of cryopumps, determine an operating parameter of the cryopump in such a manner that the measurement parameter follows a target value, and operate the corresponding cryopump with the determined operating parameter.

[0155] The cryopump monitor is configured to acquire the time series data of the measurement parameter and the time series data of the operation parameter for each of the plurality of cryopumps, and to display the time series graph of the measurement parameter and the time series graph of the operation parameter in a manner aligned with a time axis.

[0156] 10. A cryopump monitoring method, comprising the following steps:

[0157] Acquiring time series data of measured parameters related to the cryopump system;

[0158] acquiring time series data of an operating parameter of the cryopump system controlled so that the measured parameter follows a target value; and

[0159] The time series graph of the measurement parameter and the time series graph of the operation parameter are displayed in a manner that the time axes are aligned.

[0160] 11. The cryopump monitoring method according to claim 10, characterized in that:

[0161] The step of displaying includes arranging and displaying the time series graph of the measurement parameter and the time series graph of the operation parameter in such a manner that the target value of the measurement parameter is close to the limit value of the operation parameter.

[0162] 12. The cryopump monitoring method according to claim 11, characterized in that:

[0163] The step of displaying includes: defining the display position of the target value of the measurement parameter at the edge of the first display area of ​​the timing curve diagram displaying the measurement parameter, and defining the display position of the limit value of the operating parameter at the edge of the second display area of ​​the timing curve diagram displaying the operating parameter close to the edge of the first display area.

[0164] 13. The cryopump monitoring method according to any one of items 10 to 12, characterized in that:

[0165] The step of displaying includes displaying a mark indicating that the diagnosis of the cryopump system has been performed at a position of a diagnosis time on the time axis.

[0166] 14. The cryopump monitoring method according to claim 13, characterized in that:

[0167] The step of displaying includes displaying the diagnostic information of the cryopump system associated with the mark in response to the operator's designation of the mark.

[0168] 15. The cryopump monitoring method according to any one of items 10 to 12, characterized in that:

[0169] The cryopump monitoring method further includes the steps of: acquiring time series data of a second measurement parameter related to the cryopump system that is different from the measurement parameter;

[0170] The step of displaying includes displaying the time series graph of the second measurement parameter in a manner that the time series graphs of the measurement parameter and the operation parameter are aligned with the time axis.

[0171] 16. The cryopump monitoring method according to any one of items 10 to 15, characterized in that:

[0172] The cryopump system comprises a plurality of cryopumps.

[0173] The step of acquiring the time series data of the measurement parameters comprises: acquiring the time series data of the measurement parameters for each of the plurality of cryopumps,

[0174] The step of acquiring the time series data of the operating parameter includes: acquiring, for each of the plurality of cryopumps, the time series data of the operating parameter of the cryopump controlled so that the measured parameter follows a target value;

[0175] The displaying step includes: displaying the time series graph of the measurement parameter and the time series graph of the operation parameter in a manner that the time axes are aligned with each other for each of the plurality of cryopumps.

[0176] 17. The cryopump monitoring method according to claim 16, characterized in that:

[0177] The displaying step includes: collectively displaying a plurality of time series graphs of the measured parameters of the plurality of cryopumps, and collectively displaying a plurality of time series graphs of the operating parameters of the plurality of cryopumps.

[0178] 18. A cryopump monitoring program, characterized in that it causes a computer to execute the following steps:

[0179] Acquiring time series data of measured parameters related to the cryopump system;

[0180] acquiring time series data of an operating parameter of the cryopump system controlled so that the measured parameter follows a target value; and

[0181] The time series graph of the measurement parameter and the time series graph of the operation parameter are displayed in a manner that their time axes are aligned.

[0182] The present invention has been described above based on the implementation method and using specific sentences, but the implementation method only shows one aspect of the principle and application of the present invention. Without departing from the scope of the idea of ​​the present invention specified in the technical solution, the implementation method allows for a variety of modifications or configuration changes.

Claims

1. A cryopump system, characterized in that: have: Sensors for measuring parameters related to the cryopump system; a cryopump controller configured to receive the measurement parameter from the sensor, determine an operation parameter of the cryopump system so that the measurement parameter follows a target value, and operate the cryopump system with the determined operation parameter; and The cryopump monitor is configured to acquire the time series data of the measurement parameter and the time series data of the operation parameter, and display the time series graph of the measurement parameter and the time series graph of the operation parameter in a manner aligned with the time axis.

2. The cryopump system according to claim 1, characterized in that The cryopump monitor is configured to display the time series graph of the measurement parameter and the time series graph of the operating parameter in an aligned manner so that the target value of the measurement parameter and the limit value of the operating parameter are close to each other.

3. The cryopump system according to claim 2, characterized in that: The cryogenic pump monitor is configured such that a display position of the target value of the measurement parameter is defined at an edge of a first display area that displays a timing curve graph of the measurement parameter, and a display position of the limit value of the operating parameter is defined at an edge of a second display area that displays a timing curve graph of the operating parameter, close to an edge of the first display area.

4. The cryopump system according to any one of claims 1 to 3, characterized in that: The cryopump monitor is configured to display a mark indicating that the diagnosis of the cryopump system has been performed at a position of a diagnosis time on the time axis.

5. The cryopump system according to claim 4, characterized in that The cryopump monitor is configured to display diagnostic information of the cryopump system associated with the mark in response to designation of the mark by an operator.

6. The cryopump system according to any one of claims 1 to 3, characterized in that: The cryopump system further includes a second sensor configured to measure a second measurement parameter related to the cryopump system that is different from the measurement parameter. The cryopump monitor is configured to acquire time series data of the second measurement parameter and to display the time series graph of the second measurement parameter in a manner aligned with the time series graphs of the measurement parameter and the operating parameter on the time axis.

7. The cryopump system according to any one of claims 1 to 3, characterized in that: The cryogenic pump system comprises: multiple cryogenic pumps; and a plurality of sensors for respectively measuring a measurement parameter related to a corresponding cryopump among the plurality of cryopumps; The cryopump controller is configured to receive the measurement parameter from a corresponding sensor among the plurality of sensors for each of the plurality of cryopumps, determine an operating parameter of the cryopump in such a manner that the measurement parameter follows a target value, and operate the cryopump with the determined operating parameter. The cryopump monitor is configured to acquire the time series data of the measurement parameter and the time series data of the operation parameter for each of the plurality of cryopumps, and to display the time series graph of the measurement parameter and the time series graph of the operation parameter in a manner aligned with a time axis.

8. The cryopump system according to claim 7, characterized in that The cryopump monitor is configured to collectively display a plurality of time series graphs of the measurement parameters of the plurality of cryopumps and collectively display a plurality of time series graphs of the operation parameters of the plurality of cryopumps.

9. The cryopump system according to any one of claims 1 to 3, characterized in that: The cryogenic pump system comprises: Multiple cryogenic pumps; a plurality of sensors for respectively measuring measurement parameters related to corresponding cryopumps among the plurality of cryopumps; and a plurality of controllers, respectively controlling the plurality of cryopumps to replace the cryopump controller, Each controller is configured to receive the measurement parameter from a corresponding sensor among the plurality of sensors for a corresponding cryopump among the plurality of cryopumps, determine an operating parameter of the cryopump in such a manner that the measurement parameter follows a target value, and operate the corresponding cryopump with the determined operating parameter. The cryopump monitor is configured to acquire the time series data of the measurement parameter and the time series data of the operation parameter for each of the plurality of cryopumps, and to display the time series graph of the measurement parameter and the time series graph of the operation parameter in a manner aligned with a time axis.

10. A cryogenic pump monitoring method, characterized in that: The steps include: Acquiring time series data of measured parameters related to the cryopump system; acquiring time series data of an operating parameter of the cryopump system controlled so that the measured parameter follows a target value; and The time series graph of the measurement parameter and the time series graph of the operation parameter are displayed in a manner that the time axes are aligned.

11. The cryopump monitoring method according to claim 10, characterized in that: The step of displaying includes arranging and displaying the time series graph of the measurement parameter and the time series graph of the operation parameter in such a manner that the target value of the measurement parameter is close to the limit value of the operation parameter.

12. The cryopump monitoring method according to claim 11, characterized in that: The step of displaying includes: defining the display position of the target value of the measurement parameter at the edge of the first display area of ​​the timing curve diagram displaying the measurement parameter, and defining the display position of the limit value of the operating parameter at the edge of the second display area of ​​the timing curve diagram displaying the operating parameter close to the edge of the first display area.

13. The cryopump monitoring method according to any one of claims 10 to 12, characterized in that: The step of displaying includes displaying a mark indicating that the diagnosis of the cryopump system has been performed at a position of a diagnosis time on the time axis.

14. The cryopump monitoring method according to claim 13, characterized in that: The step of displaying includes displaying the diagnostic information of the cryopump system associated with the mark in response to the operator's designation of the mark.

15. The cryopump monitoring method according to any one of claims 10 to 12, characterized in that: The cryopump monitoring method further includes the steps of: acquiring time series data of a second measurement parameter related to the cryopump system that is different from the measurement parameter; The step of displaying includes displaying the time series graph of the second measurement parameter in a manner that the time series graphs of the measurement parameter and the operation parameter are aligned with the time axis.

16. A cryopump monitoring program, characterized in that: Instruct the computer to perform the following steps: Acquiring time series data of measured parameters related to the cryopump system; acquiring time series data of an operating parameter of the cryopump system controlled so that the measured parameter follows a target value; and The time series graph of the measurement parameter and the time series graph of the operation parameter are displayed in a manner that the time axes are aligned.

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