Process operation method and semiconductor process equipment

Abstract

The embodiment of the invention provides a process operation method and semiconductor process equipment, the method is applied to an upper computer, and the method comprises the following steps: acquiring an equipment identifier and process component demand information of a lower computer; querying a first IP address allocated to the lower computer in advance according to the equipment identifier; sending the first IP address and a second IP address of the upper computer to a lower computer, so that the lower computer establishes IP communication connection with the upper computer according to the first IP address and the second IP address; and after the IP communication connection is established, sending the process component corresponding to the process component demand information to the lower computer. According to the application, the device identifier and the process component demand information reported by the lower computer can be obtained through the upper computer, the address information is distributed to the lower computer according to the device identifier, the lower computer can establish the IP communication connection with the upper computer after receiving the address information, and the process component sent by the upper computer can be automatically received after the IP communication connection is successfully established; according to the invention, the labor investment is reduced, and the working efficiency is improved.

Description

Technical Field

[0001] The present invention relates to the technical field of semiconductor process equipment, and in particular to a process operation method and semiconductor process equipment. Background Art

[0002] With the development of semiconductor technology, its production scale is also expanding, and the manufacturing process is becoming more and more complicated. In the existing technology, when pulling the process components of the lower machine, since there are multiple lower machines in the same machine and the processes of different lower machines are quite different, it is necessary to manually ensure the matching relationship of the pulled components, and the manual pulling error rate is high; after the process components are pulled, it is necessary to manually execute the loading and running commands of the process components on each lower machine. The entire operation process is complex and requires high operating personnel, and the manual operation failure rate is high; it is necessary to manually configure the communication address to complete the establishment of the communication channel, and the process is cumbersome and inefficient. Summary of the invention

[0003] In view of the above problems, embodiments of the present invention are proposed to provide a process operation method and a semiconductor process equipment that overcome the above problems or at least partially solve the above problems.

[0004] In order to solve the above problems, an embodiment of the present invention discloses a process operation method, which includes:

[0005] Obtain the equipment identification and process component requirement information of the lower computer;

[0006] According to the device identifier, query the first IP address pre-allocated to the lower computer;

[0007] Sending the first IP address and the second IP address of the host computer to the lower computer, so that the lower computer establishes an IP communication connection with the host computer according to the first IP address and the second IP address;

[0008] After the IP communication connection is established, the process component corresponding to the process component requirement information is sent to the lower computer.

[0009] Optionally, the obtaining of the equipment identification and process component requirement information of the lower computer includes:

[0010] Receive a first message sent by the lower computer, wherein the data field of the first message includes a device identification of the lower computer and process component requirement information; the destination address field of the first message is a multicast address of the link layer, and the upper computer belongs to a multicast device corresponding to the multicast address;

[0011] The first message is parsed to obtain the device identification and process component requirement information of the lower computer.

[0012] Optionally, the source address field of the first message is a link layer address of a lower computer, and sending the first IP address and the second IP address of the upper computer to the lower computer includes:

[0013] A second message is sent to the lower computer, wherein the data field of the second message includes the first IP address and the second IP address of the upper computer, and the destination address field of the second message is the link layer address of the lower computer.

[0014] Optionally, the host computer includes a database, and the database is used to store the corresponding relationship between the device identifier and the first IP address; and querying the first IP address pre-allocated to the slave computer according to the device identifier includes:

[0015] According to the device identification, the first IP address pre-allocated to the lower computer is queried from the corresponding relationship.

[0016] Optionally, the process component requirement information includes multiple process component numbers, and after the IP communication connection is established, sending the process component corresponding to the process component requirement information to the lower computer includes:

[0017] After the IP communication connection is established, the process components corresponding to the multiple process component numbers are saved in the database;

[0018] The process components corresponding to the multiple process component numbers stored in the database are sent to the lower computer.

[0019] The present invention also discloses a process operation method, which is applied to a lower computer, and the method comprises:

[0020] Send equipment identification and process component requirement information to the host computer;

[0021] Receiving a first IP address and a second IP address sent by the host computer; the first IP address is obtained by the host computer through querying the device identifier;

[0022] Establishing an IP communication connection with the host computer according to the first IP address and the second IP address;

[0023] After the IP communication connection is established, the process component corresponding to the process component requirement information sent by the host computer is received.

[0024] Optionally, sending the equipment identification and process component requirement information to the upper computer includes:

[0025] A first message is sent to the host computer, wherein the destination address field of the first message is a multicast address of the link layer, the data field of the first message includes a device identifier and process component requirement information of the lower computer, and the host computer belongs to a multicast device corresponding to the multicast address.

[0026] Optionally, the source address field of the first message is a link layer address of the lower computer, and the receiving the first IP address sent by the upper computer and the second IP address of the upper computer includes:

[0027] A second message sent by the host computer is received, wherein the data field of the second message is the second IP address of the host computer and the first IP address, and the destination address field of the second message is the link layer address of the lower computer.

[0028] The present invention also discloses a semiconductor process equipment, which includes an upper computer and a lower computer;

[0029] The lower computer is used to send equipment identification and process component requirement information to the upper computer;

[0030] The host computer is used to query the first IP address pre-allocated to the lower computer according to the device identifier; and send the first IP address and the second IP address of the host computer to the lower computer;

[0031] The lower computer is used to establish an IP communication connection with the upper computer according to the first IP address and the second IP address;

[0032] The upper computer is used for sending the process component corresponding to the process component requirement information to the lower computer after the IP communication connection is established.

[0033] The embodiments of the present invention include the following advantages:

[0034] In this application, the upper computer can obtain the equipment identification and process component requirement information reported by the lower computer, and then distribute the address information to the lower computer according to the equipment identification. After the lower computer receives the address information, it can automatically establish an IP communication connection with the upper computer. After the IP communication connection is successfully established, it can automatically receive the process components sent by the upper computer. The above process does not require human intervention, reduces labor input and improves work efficiency. BRIEF DESCRIPTION OF THE DRAWINGS

[0035] Figure 1 It is a structural block diagram of the connection relationship between a host computer and a slave computer provided by an embodiment of the present invention;

[0036] Figure 2 This is a flow chart of a lower computer executing a process component provided by an embodiment of the present invention;

[0037] Figure 3 is a flowchart of a process operation method provided by an embodiment of the present invention;

[0038] Figure 4 is a flowchart of another process operation method provided by an embodiment of the present invention;

[0039] Figure 5 is a schematic diagram of a first message provided by an embodiment of the present invention;

[0040] Figure 6 is a schematic diagram of a second message provided by an embodiment of the present invention;

[0041] Figure 7 is a flowchart of another process operation method provided by an embodiment of the present invention;

[0042] Figure 8 It is a structural block diagram of a semiconductor process equipment provided by an embodiment of the present invention. DETAILED DESCRIPTION

[0043] In order to make the above-mentioned objects, features and advantages of the present invention more obvious and easy to understand, the present invention is further described in detail below with reference to the accompanying drawings and specific embodiments.

[0044] Ethernet is a computer local area network technology that follows the IEEE802.3 technical standard and uses a shared bus transmission method, so that each pair of communicating devices on the bus can transmit data without conflict as if they had an exclusive communication channel. TCP / IP is a standard open network. The system composed of it has good compatibility and interoperability, strong resource sharing capabilities, and can easily realize the sharing of control site data and information system resources. It has the advantages of high transmission rate, low cost, easy networking, and very convenient interface. TCP / IP technology is widely used in local area networks based on Ethernet technology.

[0045] In semiconductor manufacturing equipment, there is a host computer and multiple slave computers inside a machine. The host computer is responsible for issuing operation commands, and the slave computers are computers that directly control the equipment to obtain the equipment status. The command issued by the host computer is first given to the slave computer, and the slave computer then interprets the command into the corresponding timing signal to directly control the corresponding equipment; the slave computer reads the equipment status data at intervals, converts it into a digital signal and feeds it back to the host computer. In a production environment, such as Figure 1 The diagram shows the connection relationship between a host computer and a slave computer. The host computer is connected to multiple slave computers via a hub to form a star-topology local area network. The TCP / IP protocol is used for communication between the host computer and the slave computer to complete the sending of commands and the reporting of data.

[0046] like Figure 2The flowchart of a lower computer executing a process component in the prior art is shown. After the semiconductor machine is powered on, it is necessary to manually log in to the upper computer PC and multiple lower computers (PM1 to PM2. n ) configure the communication addresses of all upper and lower computers in the semiconductor machine to complete the establishment of the communication channel; after the communication channel is established, it is necessary to manually log in to the lower computer (PM1~PM n ), execute the process component request command to pull the components of the lower machine from the upper machine PC, and then manually execute the process program to run the process. It can be seen that in the prior art, the upper machine (PC) and all the lower machines (PM1~PM2) need to be connected through a hub HUb. n ), and then manually configure the communication address to complete the establishment of the communication channel. This process is cumbersome and reduces work efficiency. Due to the large differences in the processes of different lower computers, it is necessary to manually ensure the matching relationship of the pulled process components, and the error rate is high when pulling manually. After the process components are pulled, they need to be n ) Manual execution of the loading and running commands of process components places high demands on operators and has a high failure rate in manual operations.

[0047] One of the core concepts of the embodiments of the present invention is that the upper computer can obtain the equipment identification and process component requirement information reported by the lower computer, and then distribute the first IP address pre-configured for the lower computer and the second IP address information of the upper computer to the lower computer according to the equipment identification. After the lower computer receives the address information, it can automatically establish an IP communication connection with the upper computer, and after the IP communication connection is successfully established, it can automatically receive the process components sent by the upper computer; the above process does not require human intervention, reduces human input, and improves work efficiency.

[0048] Reference Figure 3 , shows a flowchart of a process operation method provided by an embodiment of the present invention, the method is applied to a host computer, and the method may specifically include the following steps:

[0049] Step 101, obtaining the equipment identification and process component requirement information of the lower computer.

[0050] In an embodiment of the present invention, different lower computers have different process equipment identifications, for example, PM1 represents the first lower computer, PM2 represents the second lower computer, and so on, PMn represents the nth lower computer; process components refer to the recipe files required for running the process, software and the files required for automatic operation and loading thereof, for example, process programs and driver modules required for running process programs, dependent library files, script files for controlling the loading order and operation parameters of process components, etc.; process component requirement information refers to the process component information required for the operation of the lower computer, for example, PM1 requires process component 1, process component 2, and process component 3 for operation. The upper computer can determine the process components required for the operation of the lower computer based on the process component requirement information, and then send the process components required for the operation of the lower computer to the lower computer after the upper computer establishes communication with the lower computer.

[0051] Step 102: query the first IP address pre-allocated to the lower computer according to the device identification.

[0052] In the embodiment of the present invention, different first IP addresses are pre-allocated in the upper computer to different lower computers. For example, the first IP address corresponding to the PM1 device identifier stored in the upper computer is: 0xfd 0x00 0x04 0xc0 0xa8 0x06 0x0c, the first IP address corresponding to the PM2 device identifier is: 0xfd 0x00 0x04 0xc0 0xa8 0x06 0x0d, and the first IP address corresponding to the PM3 device identifier is: 0xfd 0x00 0x04 0xc0 0xa8 0x06 0x0e. The device identifier obtained by the upper computer is the PM2 device identifier, and the first IP address 0xfd 0x00 0x04 0xc0 0xa8 0x06 0x0d pre-allocated to the lower computer can be queried.

[0053] Step 103, sending the first IP address and the second IP address of the upper computer to the lower computer, so that the lower computer establishes an IP communication connection with the upper computer according to the first IP address and the second IP address.

[0054] In an embodiment of the present invention, the upper computer can obtain its own second IP address, and then send the first IP address obtained by the query and the second IP address of the upper computer to the lower computer. In an example, the second IP address of the upper computer is: 0xfb0x00 0x04 0xc0 0xa8 0x06 0x0b, and the device identifier is PM2. Therefore, the second IP address: 0xfb 0x000x04 0xc0 0xa8 0x06 0x0b and the first IP address 0xfd 0x00 0x04 0xc0 0xa8 0x06 0x0d can be sent to the lower computer. The lower computer can obtain the second IP address of the upper computer according to the second IP address: 0xfb 0x00 0x04 0xc0 0xa8 0x06 0x0b and the first IP address 0xfd 0x00 0x04 0xc0 0x0d Establish IP communication connection.

[0055] Step 104: after the IP communication connection is established, the process component corresponding to the process component requirement information is sent to the lower computer.

[0056] In an embodiment of the present invention, process components corresponding to process component information are stored in the upper computer. After the IP communication connection is established, the upper computer can send process components corresponding to process component requirement information to the lower computer. After the lower computer receives multiple process components, it can run multiple process components. In an example, if the process component requirement information includes description information of process components 1, 2, 3, and 4, the upper computer can send process components 1, 2, 3, and 4 to the lower computer according to the description information of process components 1, 2, 3, and 4. After the lower computer receives process components 1, 2, 3, and 4, it can run process components 1 to 4.

[0057] The present invention can obtain the equipment identification and process component requirement information reported by the slave computer through the upper computer, and then distribute the first IP address pre-configured for the slave computer and the second IP address information of the upper computer to the slave computer according to the equipment identification; after the lower computer receives the address information, it can automatically establish an IP communication connection with the upper computer; after the IP communication connection is successfully established, it can automatically receive the process components sent by the upper computer; the above process does not require manual intervention, reduces manual input and improves work efficiency.

[0058] Reference Figure 4 , shows a flowchart of another process operation method provided by an embodiment of the present invention, the method is applied to a host computer, and the method may specifically include the following steps:

[0059] Step 201, receiving a first message sent by a lower computer, wherein the data field of the first message includes the device identification and process component requirement information of the lower computer; the destination address field of the first message is a multicast address of the link layer, and the upper computer belongs to a multicast device corresponding to the multicast address.

[0060] In the embodiment of the present invention, the first message includes a source address field, a destination address field and a data field. The source address field is the link layer address of the lower computer, and the destination address is the multicast address of the link layer. Data can be sent to multiple multicast devices corresponding to the multicast address through the multicast address of the link layer, wherein the upper computer belongs to the multicast device corresponding to the multicast address. In an example, the multicast address of the link layer is: 01:00:5e:00:00:aa, the link layer address of the lower computer is: 11:22:33:44:55:66, and the device identifier is PM1. At this time, the format of the first message is as follows: Figure 5 As shown, Figure 5 In the figure: Data field: PM1, the process component requirement information is the number information of process components 1-5; Destination address field: 01:00:5e:00:00:aa, Source address field: 11:22:33:44:55:66.

[0061] Step 202: parse the first message to obtain the device identification and process component requirement information of the lower computer.

[0062] In the embodiment of the present invention, the host computer may parse the first message to obtain the device identification and process component information of the data field.

[0063] Step 203: query the first IP address pre-allocated to the lower computer according to the device identifier.

[0064] In an embodiment of the present invention, the host computer includes a database, and the database is used to store the corresponding relationship between the device identification and the first IP address; according to the device identification, querying the first IP address pre-assigned to the lower computer includes:

[0065] According to the device identifier, the first IP address pre-allocated to the lower computer is queried from the corresponding relationship.

[0066] In an embodiment of the present invention, the host computer includes a database, which pre-stores a correspondence between a device identifier and a first IP address, that is, the corresponding first IP address can be queried from the correspondence according to the device identifier. For example, the first IP address corresponding to the PM1 device identifier in the correspondence is: 0xfd 0x000x04 0xc0 0xa8 0x06 0x0c, the first IP address corresponding to the PM2 device identifier is: 0xfd 0x000x04 0xc0 0xa8 0x06 0x0d, the first IP address corresponding to the PM3 device identifier is: 0xfd 0x000x04 0xc0 0xa8 0x06 0x0e, and the first IP address corresponding to the PM4 device identifier is: 0xfd0x000x04 0xc0 0xa8 0x06 0x0f; the device identifier obtained by the host computer is the PM1 device identifier, and the corresponding first IP address that can be queried from the correspondence is: 0xfd 0x00 0x04 0xc0 0xa8 0x060x0c.

[0067] Step 204: Send a second message to the lower computer. The data field of the second message includes the first IP address and the second IP address of the upper computer. The destination address field of the second message is the link layer address of the lower computer.

[0068] In the embodiment of the present invention, since the link layer address of the lower computer can be obtained by parsing the first message: 11:22:33:44:55:66, the destination address of the second message is the link layer address of the lower computer, the source address is the link layer address of the upper computer, and the data field is the first IP address and the second IP address of the upper computer. In an example, the link layer address of the upper computer is aa:bb:cc:dd:ee:ff, and the second IP address of the upper computer is 0xfb 0x00 0x04 0xc0 0xa8 0x060x0b. At this time, the format of the second message is as follows: Figure 6 As shown in the figure, the data fields are: the second IP address is 0xfb 0x00 0x04 0xc00xa8 0x06 0x0b, the first IP address is: 0xfd 0x00 0x04 0xc0 0xa8 0x06 0x0c; the destination address field is: 11:22:33:44:55:66, the source address field is: aa:bb:cc:dd:ee:ff, at this time, the multicast transmission message of the lower computer is changed to the unicast transmission message of the upper computer.

[0069] Step 205: After the IP communication connection is established, the process component corresponding to the process component requirement information is sent to the lower computer.

[0070] In an embodiment of the present invention, the process component requirement information includes multiple process component numbers. After the IP communication connection is established, the process component corresponding to the process component requirement information is sent to the lower computer, including:

[0071] After the IP communication connection is established, the process components corresponding to the multiple process component numbers are saved in the database; and the process components corresponding to the multiple process component numbers saved in the database are sent to the lower computer.

[0072] In an embodiment of the present invention, the process component requirement information includes multiple process component numbers, for example, process component 1 is numbered 0x01 0x00 0x00, process component 2 is numbered 0x02 0x00 0x00, and process component 3 is numbered 0x03 0x000x00. In one example, the data field in the first message is PM1, 0x01 0x00 0x00, 0x02 0x00 0x00, 0x030x00 0x00; after the lower computer establishes an IP communication connection with the upper computer, process component 1, process component 2, and process component 3 can be saved in a database, and then process component 1, process component 2, and process component 3 saved in the database can be sent to the lower computer.

[0073] In one embodiment of the present invention, the upper computer can also query the operating modes of multiple process components according to the process component number, and then send the operating modes of the multiple process components to the lower computer, so that the lower computer runs the process components according to the operating modes of the multiple process components.

[0074] The present invention can obtain the equipment identification and process component requirement information reported by the slave computer through the upper computer, and then distribute the first IP address pre-configured for the slave computer and the second IP address information of the upper computer to the slave computer according to the equipment identification; after the lower computer receives the address information, it can automatically establish an IP communication connection with the upper computer; after the IP communication connection is successfully established, it can automatically receive the process components sent by the upper computer; the above process does not require manual intervention, reduces manual input and improves work efficiency.

[0075] Reference Figure 7 , shows another process operation method provided by an embodiment of the present invention, which is applied to a lower computer. The method may include the following steps:

[0076] Step 301: Send equipment identification and process component requirement information to a host computer.

[0077] In an embodiment of the present invention, different lower computers have different process equipment identifiers, for example, PM1 represents the first lower computer, PM2 represents the second lower computer, and so on, PMn represents the nth lower computer; the process component requirement information refers to the process component information required for the operation of the lower computer, for example, the operation of the lower computer PM1 requires process component 1, process component 2, and process component 3. The upper computer can determine the process components required for the operation of the lower computer based on the process component requirement information, and then send the process components required for the operation of the lower computer to the lower computer after the upper computer establishes communication with the lower computer.

[0078] Step 302, receiving a first IP address and a second IP address sent by the host computer; the first IP address is obtained by the host computer according to a device identification query.

[0079] In the embodiment of the present invention, different first IP addresses are pre-allocated in the upper computer to different lower computers. For example, the first IP address corresponding to the PM1 device identifier stored in the upper computer is: 0xfd 0x00 0x04 0xc0 0xa8 0x06 0x0c, the first IP address corresponding to the PM2 device identifier is: 0xfd 0x00 0x04 0xc0 0xa8 0x06 0x0d, and the first IP address corresponding to the PM3 device identifier is: 0xfd 0x00 0x04 0xc0 0xa8 0x06 0x0e. The device identifier sent by the lower computer is the PM2 device identifier, and the first IP address 0xfd 0x00 0x04 0xc0 0xa8 0x06 0x0d pre-allocated to the lower computer can be queried.

[0080] The upper computer can obtain its own second IP address, and then send the first IP address obtained by the query and the second IP address of the upper computer to the lower computer. In an example, the second IP address of the upper computer is: 0xfb 0x00 0x04 0xc00xa8 0x06 0x0b, and the device identifier is PM2. Therefore, the second IP address: 0xfb 0x00 0x04 0xc0 0xa80x06 0x0b and the first IP address 0xfd 0x00 0x040xc0 0xa8 0x06 0x0d can be sent to the lower computer.

[0081] Step 303: Establish an IP communication connection with the host computer according to the first IP address and the second IP address.

[0082] In the embodiment of the present invention, the lower computer can establish an IP communication connection according to the second IP address: 0xfb 0x00 0x04 0xc00xa8 0x060x0b and the first IP address 0xfd 0x00 0x04 0xc0 0xa8 0x06 0x0d.

[0083] Step 304: after the IP communication connection is established, receiving the process component corresponding to the process component requirement information sent by the host computer.

[0084] In an embodiment of the present invention, the upper computer stores process components corresponding to process component information. After the IP communication connection is established, the lower computer can receive process components corresponding to process component requirement information sent by the upper computer. After the lower computer receives multiple process components, it can run multiple process components. In an example, if the process component requirement information includes description information of process components 1, 2, 3, and 4, the lower computer can receive process components 1, 2, 3, and 4 sent by the upper computer. After the lower computer receives process components 1, 2, 3, and 4, it can run process components 1 to 4.

[0085] In an embodiment of the present invention, sending the equipment identification and process component requirement information to the upper computer includes:

[0086] A first message is sent to the upper computer, the destination address field of the first message is the multicast address of the link layer, the data field of the first message includes the device identification and process component requirement information of the lower computer, and the upper computer belongs to the multicast device corresponding to the multicast address.

[0087] In an embodiment of the present invention, the first message includes a source address field, a destination address field and a data field. The source address field is the link layer address of the lower computer, and the destination address is the multicast address of the link layer. Data can be sent to multiple multicast devices corresponding to the multicast address through the multicast address of the link layer, wherein the upper computer belongs to the multicast device corresponding to the multicast address. In one example, the multicast address of the link layer is: 01:00:5e:00:00:aa, the link layer address of the lower computer is: 11:22:33:44:55:66, and the device identifier is PM1. At this time, the format of the first message is: data field: PM1, process component requirement information; destination address field: 01:00:5e:00:00:aa, source address field: 11:22:33:44:55:66.

[0088] In an embodiment of the present invention, the source address field of the first message is the link layer address of the lower computer, and receiving the first IP address sent by the upper computer and the second IP address of the upper computer includes:

[0089] A second message sent by the upper computer is received, wherein the data field of the second message is the second IP address and the first IP address of the upper computer, and the destination address field of the second message is the link layer address of the lower computer.

[0090] In the embodiment of the present invention, since the link layer address of the lower computer can be obtained by parsing the first message: 11:22:33:44:55:66, the destination address of the second message is the link layer address of the lower computer, the source address is the link layer address of the upper computer, and the data field is the first IP address and the second IP address of the upper computer. In an example, the link layer address of the upper computer is aa:bb:cc:dd:ee:ff, and the second IP address of the upper computer is 0xfb 0x00 0x04 0xc0 0xa8 0x060x0b. At this time, the format of the second message is: data field: the second IP address is 0xfb 0x00 0x04 0xc0 0xa8 0x060x0b, and the first IP address is: 0xfd 0x00 0x04 0xc0 0xa8 0x06 0x0c; the destination address field is: 11:22:33:44:55:66, and the source address field is: aa:bb:cc:dd:ee:ff. At this time, the multicast transmission message of the lower computer is changed to the unicast transmission message of the upper computer.

[0091] The present invention can send equipment identification and process component requirement information to the upper computer through the lower computer. After the upper computer receives the equipment identification and process component requirement information, it can distribute the first IP address pre-configured for the lower computer and the second IP address information of the upper computer to the lower computer according to the equipment identification. The lower computer can automatically establish an IP communication connection with the upper computer according to the received address information, and can automatically receive the process components sent by the upper computer after the IP communication connection is successfully established. The above process does not require manual intervention, reduces manual input, and improves work efficiency.

[0092] It should be noted that, for the sake of simplicity, the method embodiments are described as a series of action combinations, but those skilled in the art should be aware that the embodiments of the present invention are not limited by the order of the actions described, because according to the embodiments of the present invention, certain steps can be performed in other orders or simultaneously. Secondly, those skilled in the art should also be aware that the embodiments described in the specification are all preferred embodiments, and the actions involved are not necessarily required by the embodiments of the present invention.

[0093] Reference Figure 8 , shows a structural block diagram of a semiconductor process equipment 40 provided in an embodiment of the present invention, wherein the semiconductor process equipment includes an upper computer 401 and a lower computer 402;

[0094] The lower computer 402 is used to send the equipment identification and process component requirement information to the upper computer 401;

[0095] The upper computer 401 is used to query the first IP address pre-allocated to the lower computer 402 according to the device identification; send the first IP address and the second IP address of the upper computer 401 to the lower computer 402;

[0096] The lower computer 402 is used to establish an IP communication connection with the upper computer 401 according to the first IP address and the second IP address;

[0097] The upper computer 401 is used to send the process component corresponding to the process component requirement information to the lower computer 402 after the IP communication connection is established.

[0098] In one embodiment of the present invention, the lower computer 402 is used to send a first message to the upper computer 401, the destination address field of the first message is the multicast address of the link layer, the data field of the first message includes the device identification and process component requirement information of the lower computer 402, and the upper computer 401 belongs to the multicast device corresponding to the multicast address.

[0099] In an embodiment of the present invention, the upper computer 401 is used to receive a first message sent by the lower computer 402, parse the first message, and obtain the device identification and process component requirement information of the lower computer 402.

[0100] In one embodiment of the present invention, the host computer 401 is used to send a second message to the subordinate computer 402, the data field of the second message includes the first IP address and the second IP address of the host computer, and the destination address field of the second message is the link layer address of the subordinate computer.

[0101] In one embodiment of the present invention, the host computer 401 may include a database for storing the correspondence between the device identification and the first IP address; the host computer 401 is used to query the first IP address pre-assigned to the slave computer 402 from the correspondence according to the device identification.

[0102] In one embodiment of the present invention, the process component requirement information may also include multiple process component numbers. The upper computer 401 is used to save the process components corresponding to the multiple process component numbers in the database after the IP communication connection is established; and send the process components corresponding to the multiple process component numbers saved in the database to the lower computer.

[0103] The present invention can send equipment identification and process component requirement information to the upper computer through the lower computer. After the upper computer receives the equipment identification and process component requirement information, it can distribute the first IP address pre-configured for the lower computer and the second IP address information of the upper computer to the lower computer according to the equipment identification. The lower computer can automatically establish an IP communication connection with the upper computer according to the received address information, and can automatically receive the process components sent by the upper computer after the IP communication connection is successfully established. The above process does not require manual intervention, reduces manual input, and improves work efficiency.

[0104] The various embodiments in this specification are described in a progressive manner, and each embodiment focuses on the differences from other embodiments. The same or similar parts between the various embodiments can be referenced to each other.

[0105] It should be understood by those skilled in the art that the embodiments of the present invention can be provided as methods, semiconductor process equipment. Therefore, the embodiments of the present invention can be in the form of a complete hardware embodiment, a complete software embodiment, or an embodiment combining software and hardware. Moreover, the embodiments of the present invention can be in the form of a computer program product implemented on one or more computer-usable storage media (including but not limited to disk storage, CD-ROM, optical storage, etc.) containing computer-usable program code.

[0106] The embodiments of the present invention are described with reference to the flowcharts and / or block diagrams of the methods, terminal devices (systems), and computer program products according to the embodiments of the present invention. It should be understood that each process and / or block in the flowchart and / or block diagram, as well as the combination of the processes and / or blocks in the flowchart and / or block diagram, can be implemented by computer program instructions. These computer program instructions can be provided to a processor of a general-purpose computer, a special-purpose computer, an embedded processor, or other programmable data processing terminal device to generate a machine, so that the instructions executed by the processor of the computer or other programmable data processing terminal device generate instructions for implementing the processes in the flowchart and / or block diagram. Figure 1 A process or multiple processes and / or boxes Figure 1 A device that provides the functions specified in a block or multiple blocks.

[0107] These computer program instructions may also be stored in a computer readable memory capable of directing a computer or other programmable data processing terminal device to operate in a specific manner, so that the instructions stored in the computer readable memory produce a manufactured product including an instruction device, which implements the process Figure 1 A process or multiple processes and / or boxes Figure 1 A function specified in one or more boxes.

[0108] These computer program instructions can also be loaded onto a computer or other programmable data processing terminal device so that a series of operating steps are executed on the computer or other programmable terminal device to produce a computer-implemented process, thereby providing instructions for executing on the computer or other programmable terminal device to implement the process. Figure 1 A process or multiple processes and / or boxes Figure 1 The steps for the functions specified in one or more boxes.

[0109] Although the preferred embodiments of the present invention have been described, those skilled in the art may make additional changes and modifications to these embodiments once they have learned the basic creative concept. Therefore, the appended claims are intended to be interpreted as including the preferred embodiments and all changes and modifications that fall within the scope of the embodiments of the present invention.

[0110] Finally, it should be noted that, in this article, relational terms such as first and second, etc. are only used to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Moreover, the terms "include", "comprise" or any other variants thereof are intended to cover non-exclusive inclusion, so that a process, method, article or terminal device including a series of elements includes not only those elements, but also other elements not explicitly listed, or also includes elements inherent to such process, method, article or terminal device. In the absence of further restrictions, the elements defined by the sentence "comprise a ..." do not exclude the existence of other identical elements in the process, method, article or terminal device including the elements.

[0111] The process operation method and semiconductor process equipment provided by the present invention are introduced in detail above. Specific examples are used in this article to illustrate the principles and implementation methods of the present invention. The description of the above embodiments is only used to help understand the method of the present invention and its core idea. At the same time, for those skilled in the art, according to the idea of ​​the present invention, there will be changes in the specific implementation method and application scope. In summary, the content of this specification should not be understood as a limitation on the present invention.

Claims

1. A process operation method, characterized in that: Applied to a host computer, the method includes: Obtain the equipment identification and process component requirement information of the lower computer; According to the device identifier, query the first IP address pre-allocated to the lower computer; Sending the first IP address and the second IP address of the host computer to the lower computer, so that the lower computer establishes an IP communication connection with the host computer according to the first IP address and the second IP address; After the IP communication connection is established, the process component corresponding to the process component requirement information is sent to the lower computer.

2. The method according to claim 1, characterized in that The obtaining of the equipment identification and process component requirement information of the lower computer includes: Receive a first message sent by the lower computer, wherein the data field of the first message includes a device identification of the lower computer and process component requirement information; the destination address field of the first message is a multicast address of the link layer, and the upper computer belongs to a multicast device corresponding to the multicast address; The first message is parsed to obtain the device identification and process component requirement information of the lower computer.

3. The method according to claim 2, characterized in that The source address field of the first message is a link layer address of the lower computer, and the sending of the first IP address and the second IP address of the upper computer to the lower computer includes: A second message is sent to the lower computer, wherein the data field of the second message includes the first IP address and the second IP address of the upper computer, and the destination address field of the second message is the link layer address of the lower computer.

4. The method according to claim 1, characterized in that: The host computer includes a database, and the database is used to store the corresponding relationship between the device identification and the first IP address; the querying of the first IP address pre-allocated to the lower computer according to the device identification includes: According to the device identification, the first IP address pre-allocated to the lower computer is queried from the corresponding relationship.

5. The method according to claim 4, characterized in that The process component requirement information includes multiple process component numbers. After the IP communication connection is established, the process component corresponding to the process component requirement information is sent to the lower computer, including: After the IP communication connection is established, the process components corresponding to the multiple process component numbers are saved in the database; The process components corresponding to the multiple process component numbers stored in the database are sent to the lower computer.

6. A process operation method, characterized in that: Applied to a lower computer, the method includes: Send equipment identification and process component requirement information to the host computer; Receiving a first IP address and a second IP address sent by the host computer; the first IP address is obtained by the host computer through querying the device identifier; Establishing an IP communication connection with the host computer according to the first IP address and the second IP address; After the IP communication connection is established, the process component corresponding to the process component requirement information sent by the host computer is received.

7. The method according to claim 6, characterized in that The sending of equipment identification and process component requirement information to the upper computer includes: A first message is sent to the host computer, wherein the destination address field of the first message is a multicast address of the link layer, the data field of the first message includes a device identifier and process component requirement information of the lower computer, and the host computer belongs to a multicast device corresponding to the multicast address.

8. The method according to claim 7, characterized in that The source address field of the first message is the link layer address of the lower computer, and the receiving of the first IP address sent by the upper computer and the second IP address of the upper computer includes: A second message sent by the host computer is received, wherein the data field of the second message is the second IP address of the host computer and the first IP address, and the destination address field of the second message is the link layer address of the lower computer.

9. A semiconductor process equipment, characterized in that: The semiconductor process equipment includes a host computer and a slave computer; The lower computer is used to send equipment identification and process component requirement information to the upper computer; The upper computer is used to query the first IP address pre-allocated to the lower computer according to the device identifier; Sending the first IP address and the second IP address of the host computer to the lower computer; The lower computer is used to establish an IP communication connection with the upper computer according to the first IP address and the second IP address; The upper computer is used for sending the process component corresponding to the process component requirement information to the lower computer after the IP communication connection is established.

10. The process equipment according to claim 9, characterized in that: The lower computer is used to send a first message to the upper computer. The destination address field of the first message is a multicast address of the link layer. The data field of the first message includes a device identifier and process component requirement information of the lower computer. The upper computer belongs to the multicast device corresponding to the multicast address.

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