Liquid supply arm, chemical mechanical polishing device and equipment

Abstract

The invention provides a liquid supply arm, a chemical mechanical polishing device and equipment. The liquid supply arm comprises a swing arm and is used for conveying polishing liquid to the polishing pad; the swing arm is in contact connection with the rotating shaft and can rotate relative to the rotating shaft; the positioning mechanism is arranged on the swing arm and the rotating shaft and used for controlling the swing arm to be repositioned to the working position when the swing arm deviates from the working position; the working position is the position of the swing arm relative to the rotating shaft when the swing arm conveys polishing liquid to the polishing pad; the reset assembly is connected to the swing arm, and a contact end is formed on the reset assembly; the positioning piece is arranged between the rotating shaft and the swing arm and connected to the rotating shaft, the contact end of the reset assembly can slide relative to the positioning piece, the positioning piece is provided with a positioning groove, the swing arm is arranged at the working position when the contact end is arranged in the positioning groove, and the reset assembly is used for controlling the contact end to slide into the positioning groove again when the contact end is separated from the positioning groove. The position of the polishing solution supply arm can be kept consistent and accurate, and it is ensured that the polishing solution is accurately fed and accurately drips to the target position.

Description

Technical Field

[0001] The embodiments of the present application relate to the field of semiconductor processing technology, and in particular to a liquid supply arm, a chemical mechanical polishing device and equipment. Background Art

[0002] In semiconductor processing technology, chemical mechanical polishing (CMP) is a key process. Among them, the landing point of the polishing liquid has a serious impact on the quality of the polished surface. If the landing point of the polishing liquid is unstable, the chemical and mechanical forces will be strong and weak during the polishing process, which will make it difficult to ensure the stability and consistency of the surface quality of the workpiece (such as a wafer). Therefore, it is very important to accurately control the landing point of the polishing liquid.

[0003] At present, the polishing liquid supply arm in the related technology is prone to cause the polishing liquid dripping position to be dispersed when the external environment changes or the machine vibrates, thereby affecting the accuracy of the polishing liquid landing point, and further having an adverse effect on the polishing effect of the workpiece. Summary of the invention

[0004] In view of this, the embodiments of the present application provide a liquid supply arm and a chemical mechanical polishing device to at least partially solve the above problems.

[0005] According to the first aspect of the embodiment of the present application, a liquid supply arm is provided, which includes: a swing arm for conveying polishing liquid to the polishing pad; a rotating shaft, the swing arm is in contact with and connected to the rotating shaft and can rotate relative to the rotating shaft; a positioning mechanism, arranged on the swing arm and the rotating shaft, and used to control the swing arm to be repositioned to the working position when the swing arm deviates from the working position; the working position is the position of the swing arm relative to the rotating shaft when the swing arm conveys polishing liquid to the polishing pad; a reset assembly, connected to the swing arm, the reset assembly is formed with a contact end; a positioning piece, arranged between the rotating shaft and the swing arm and connected to the rotating shaft, the contact end of the reset assembly can slide relative to the positioning piece, the positioning piece is provided with a positioning groove, the swing arm is placed in the working position when the contact end is placed in the positioning groove, and the reset assembly is used to control the contact end to slide back into the positioning groove when the contact end is separated from the positioning groove.

[0006] Furthermore, in the above-mentioned liquid supply arm, the reset assembly includes: a columnar body, the swing arm is provided with an embedding hole, and the columnar body is arranged in the embedding hole; an elastic member is arranged in the embedding hole; a reset body, which is partially placed in the embedding hole, and the elastic member is placed between the columnar body and the reset body, and the part of the reset body placed outside the connecting hole forms the contact end, and when the contact end is separated from the positioning groove, the elastic member is in a compressed state.

[0007] Furthermore, in the above-mentioned liquid supply arm, the reset body is a sphere.

[0008] Furthermore, in the above-mentioned liquid supply arm, the reset assembly includes: a columnar body, the swing arm is provided with an embedding hole, the columnar body is arranged in the embedding hole, and the columnar body is provided with a cylindrical hole along the axial direction; a sphere, the sphere part is embedded in the cylindrical hole and can rotate relative to the cylindrical hole; an elastic member, the elastic member is arranged in the cylindrical hole and one end abuts against the sphere part so that the sphere part moves axially under the action of the spring force.

[0009] Furthermore, in the above-mentioned liquid supply arm, the columnar body is provided with a columnar hole along the axial direction, and the elastic member is arranged in the columnar hole; the spherical body is partially embedded in the columnar hole and can rotate relative to the columnar hole.

[0010] Furthermore, in the above-mentioned liquid supply arm, the reset component is a ball plunger provided with a spring, and the ball head of the ball plunger can be rotatably arranged in the positioning groove.

[0011] Furthermore, in the above-mentioned liquid supply arm, the number of the positioning groove is one; or, the number of the positioning grooves is multiple and distributed along the circumference of the positioning member.

[0012] Furthermore, in the above-mentioned liquid supply arm, the swing arm includes: a rotating body, rotatably arranged on the rotating shaft, and the reset assembly is arranged on the rotating body; a flange, connected to the side of the rotating body facing the positioning member and slidably contacted and connected with the positioning member; a cantilever, one end of which is connected to the rotating body and the other end is a free end.

[0013] Furthermore, in the above-mentioned liquid supply arm, the surface of the positioning member that is in contact with the flange is formed with a damping area and a non-damping area along the circumferential direction; when the flange is in contact and connected with the damping area, a damping connection is formed between the positioning member and the flange; when the flange is in contact and connected with the non-damping area, a non-damping connection is formed between the positioning member and the flange.

[0014] Furthermore, in the above-mentioned liquid supply arm, a surface of the positioning member used for contacting and connecting with the flange is formed with a groove and a first boss; a surface of the flange used for contacting and connecting with the positioning member is formed with a second boss; when the second boss is in contact and connected with the groove, a non-damping connection is formed between the positioning member and the flange; when the second boss is in contact and connected with the first boss, a damping connection is formed between the positioning member and the flange.

[0015] Furthermore, in the above-mentioned liquid supply arm, the groove is an arc-shaped groove coaxial with the positioning member, the first boss is an arc-shaped platform coaxial with the positioning member; the second boss is an arc-shaped platform coaxial with the flange, and the second boss is adapted to the shape of the arc-shaped groove and the first boss.

[0016] Furthermore, in the above-mentioned liquid supply arm, the positioning groove is placed on a side of the groove and / or the first boss away from the axis of the positioning member.

[0017] Furthermore, in the above-mentioned liquid supply arm, the circumferential length of the groove is greater than the circumferential length of the first boss.

[0018] Furthermore, in the above-mentioned liquid supply arm, the swing arm also includes: an adjustment plate, which is arranged between the rotating body and the flange and connected to the rotating body through a tightening screw, and is used to adjust the damping force between the flange and the positioning member.

[0019] Furthermore, in the above-mentioned liquid supply arm, it also includes: a base, which is provided with a base hole, the rotating shaft is rotatably arranged in the base hole, and the side wall of the base is provided with a locking hole connected to the base hole; an arc nut, which is arranged in the base hole and is attached to the rotating shaft along the circumference of the rotating shaft, and the arc nut is provided with a connecting hole facing the surface of the base; a locking piece, which is passed through the locking hole and connected to the connecting hole to lock the rotating shaft and the base.

[0020] Furthermore, in the above-mentioned liquid supply arm, an arc-shaped boss is formed on the surface of the arc-shaped nut close to the base, and correspondingly, an arc-shaped groove is opened on the side wall of the base hole, and the arc-shaped boss is embedded in the arc-shaped groove.

[0021] Furthermore, in the above-mentioned liquid supply arm, the arc-shaped nut is formed with a grid structure on the outer side surface facing the base to increase the friction between the arc-shaped nut and the side wall of the base hole.

[0022] Furthermore, in the above-mentioned liquid supply arm, a notch is provided on the inner side surface of the arc-shaped nut toward the rotating shaft, so as to cause the arc-shaped nut to deform during the locking connection so as to increase the friction between the arc-shaped nut and the rotating shaft.

[0023] Further, in the above-mentioned liquid supply arm, the connecting hole is one; or, the connecting holes are multiple and arranged along the arc direction of the arc nut; accordingly, the base is provided with multiple locking holes corresponding to the connecting holes one by one.

[0024] Further, in the above-mentioned liquid supply arm, the number of the arc-shaped nut is one; or, the number of the arc-shaped nuts is multiple and evenly distributed along the circumference of the rotating shaft; accordingly, the base is provided with locking holes corresponding to each of the arc-shaped nuts.

[0025] According to a second aspect of an embodiment of the present application, a chemical mechanical polishing device is provided, comprising a polishing head, a loading platform, a polishing pad disposed on the loading platform, and any one of the above-mentioned liquid supply arms.

[0026] According to a third aspect of an embodiment of the present application, there is provided an apparatus for wafer processing, the apparatus comprising the chemical mechanical polishing device described in the preceding aspects.

[0027] In this embodiment, during the process of the swing arm delivering polishing liquid to the polishing pad, if the swing arm deviates from its working position due to factors such as changes in the external environment or vibration of the machine, the positioning mechanism will automatically correct the swing arm and reposition it to the working position, thereby ensuring that the position of the polishing liquid supply arm can maintain consistency and accuracy throughout the entire delivery process, ensuring the precise delivery of the polishing liquid and accurately dripping it at the target position, solving the problem of scattered and inaccurate polishing liquid dripping position caused by the shaking of the supply arm in related technologies, and improving the polishing effect of the workpiece.

[0028] It should be understood that the foregoing general description and the following detailed description are exemplary and explanatory only and are not restrictive of the present application. BRIEF DESCRIPTION OF THE DRAWINGS

[0029] The above and other objects, features and advantages of the present application will become more apparent by describing in more detail exemplary embodiments of the present application in conjunction with the accompanying drawings, wherein the same reference numerals generally represent the same components in the exemplary embodiments of the present application.

[0030] Figure 1 This is a schematic diagram of the structure of the liquid supply arm proposed in an embodiment of the present application; Figure 2 Another schematic diagram of the structure of the liquid supply arm proposed in the embodiment of the present application; Figure 3 This is another structural schematic diagram of the liquid supply arm proposed in an embodiment of the present application; Figure 4 A schematic diagram of the circumferentially expanded structure of the reset assembly in the liquid supply arm proposed in an embodiment of the present application; Figure 5 This is another structural schematic diagram of the liquid supply arm proposed in an embodiment of the present application; Figure 6 A schematic diagram of the connection structure between the flange and the positioning member in the liquid supply arm proposed in an embodiment of the present application; Figure 7 A schematic diagram of another connection structure between the flange and the positioning member in the liquid supply arm proposed in an embodiment of the present application; Figure 8 This is another structural schematic diagram of the liquid supply arm proposed in an embodiment of the present application; Fig. 9 This is a schematic structural diagram of the arc-shaped nut in the liquid supply arm proposed in an embodiment of the present application.

[0031] Reference numerals: Swing arm 100; embedding hole 110; rotating body 120; flange 130; second boss 131; cantilever 140; adjustment sheet 150; tightening screw 160; positioning pin 170; rotating shaft 200; positioning mechanism 300; reset assembly 310; columnar body 311; elastic member 312; reset body; 313; positioning member 320; positioning groove 321; groove 322; first boss 323; base 400; base hole 410; locking hole 420; locking member 430; arc nut 440; connecting hole 441; arc boss 442; grid structure 443; cutout 444; nozzle seat 500; nozzle 510; polishing liquid supply pipe 600; protective cover 700; locking mechanism 800; sleeve 900. DETAILED DESCRIPTION

[0032] The preferred embodiments of the present application will be described in more detail below with reference to the accompanying drawings. Although the preferred embodiments of the present application are shown in the accompanying drawings, it should be understood that the present application can be implemented in various forms and should not be limited by the embodiments described herein. On the contrary, these embodiments are provided to make the present application more thorough and complete, and to fully convey the scope of the present application to those skilled in the art.

[0033] The terms used in this application are for the purpose of describing specific embodiments only and are not intended to limit this application. The singular forms of "a", "said" and "the" used in this application and the appended claims are also intended to include plural forms unless the context clearly indicates other meanings. It should also be understood that the term "and / or" used herein refers to and includes any or all possible combinations of one or more associated listed items.

[0034] It should be understood that although the terms "first", "second", "third", etc. may be used in the present application to describe various components, these components should not be limited to these terms. These terms are only used to distinguish components of the same type from each other. For example, without departing from the scope of the present application, the first component may also be referred to as the second component, and similarly, the second component may also be referred to as the first component. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of the features. In the description of the present application, the meaning of "plurality" is two or more, unless otherwise clearly and specifically defined.

[0035] In the description of the present application, it should be understood that the terms "length", "width", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", etc., indicating the orientation or position relationship, are based on the orientation or position relationship shown in the drawings, and are only for the convenience of describing the present application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as a limitation on the present application.

[0036] Unless otherwise clearly specified and limited, the terms "installed", "connected", "connected", "fixed" and the like should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between two elements. For ordinary technicians in this field, the specific meanings of the above terms in this application can be understood according to specific circumstances.

[0037] When polishing a workpiece, the workpiece is usually fixed on the polishing head of the polishing machine so that the workpiece maintains the correct position and pressure during the polishing process. The liquid supply arm will deliver the polishing liquid to the rotating polishing pad. As the polishing head moves, the workpiece contacts the polishing pad and is ground and polished under the combined action of the polishing liquid and abrasive. However, in the related art, when the polishing liquid supply arm changes in the external environment or the machine vibrates, it is easy to cause the polishing liquid to drip and disperse, thereby affecting the accuracy of the polishing liquid landing point, and then adversely affecting the polishing effect of the workpiece.

[0038] In response to the above problems, an embodiment of the present application provides a liquid supply arm to solve the problem of scattered polishing liquid droplet points.

[0039] The technical solution of the embodiments of the present application is described in detail below with reference to the accompanying drawings.

[0040] See also Figures 1 to 3 , Figure 8 According to one embodiment of the present application, the liquid supply arm includes: a swing arm 100, a rotating shaft 200 and a positioning mechanism 300. The swing arm 100 is used to deliver polishing liquid to the polishing pad, and the swing arm 100 is in contact with the rotating shaft 200 and can rotate relative to the rotating shaft 200. The positioning mechanism 300 is arranged on the swing arm 100 and the rotating shaft 200, and is used to control the swing arm 100 to reposition to the working position when the swing arm 100 deviates from the working position. The working position is the position of the swing arm 100 relative to the rotating shaft 200 when the swing arm 100 delivers polishing liquid to the polishing pad.

[0041] It can be understood that in some embodiments, the liquid supply arm may further include a base 400, a nozzle seat 500, a polishing liquid supply pipe 600, a protective cover 700, a locking mechanism 800, a sleeve 900, etc. Among them, the base 400 is provided with a base hole 410, and the rotating shaft 200 is rotatably arranged in the base hole 410. The side wall of the base hole 410 corresponding to the rotating shaft 200 is provided with a locking hole 420 that penetrates the base 400, and the locking hole 420 is connected to the base hole 410. The locking member 430 is penetrated through the locking hole 420 to lock the rotating shaft 200 and the base 400. When the locking member 430 is in a locked state, the rotating shaft 200 cannot rotate relative to the base 400; when the locking member 430 is in an unlocked state, the rotating shaft 200 can rotate relative to the base 400.

[0042] The nozzle holder 500, the polishing liquid supply pipe 600 and the protective cover 700 are all arranged on the swing arm 100. The nozzle holder 500 is installed with a nozzle 510, and the polishing liquid supply pipe 600 is connected to the nozzle 510. The nozzle 510 is used to transport the polishing liquid in the polishing liquid supply pipe 600 to the polishing pad. The protective cover 700 is adapted to the shape of the swing arm 100 and is arranged above the swing arm 100 (relative to the Figure 1 In a specific implementation, the rotating shaft 200 is an annular body, and the polishing liquid supply pipe 600 is disposed inside the annular body and extends inside the swing arm 100 to communicate with the nozzle 510 disposed on the nozzle seat 500.

[0043] The sleeve 900 is rotatably disposed outside the rotating shaft 200. The locking mechanism 800 is disposed between the swing arm 100 and the sleeve 900. The locking mechanism 800 can fixedly connect the swing arm 100 and the sleeve 900, and the swing arm 100 and the sleeve 900 can rotate integrally relative to the rotating shaft 200 to adjust the position of the swing arm 100. In specific implementation, the locking mechanism 800 can be a positioning pin, etc., and the swing arm 100 and the sleeve 900 are both provided with positioning holes, and the positioning pin passes through the positioning holes on the swing arm 100 and the sleeve 900 to lock the swing arm 100 and the sleeve 900.

[0044] When the position of the swing arm 100 needs to be adjusted, the sleeve 900 can be operated to rotate relative to the rotating shaft 200, thereby driving the swing arm 100 to rotate relative to the rotating shaft 200, which is easy to operate.

[0045] The swing arm 100 is in contact with and connected to the rotating shaft 200 and can rotate relative to the rotating shaft 200. The swing arm 100 does not rotate or swing relative to the rotating shaft 200 when delivering polishing liquid to the polishing pad at the working position, but may deviate from the working position when subjected to external force, that is, the swing arm 100 rotates relative to the rotating shaft 200. At this time, the positioning mechanism 300 in this embodiment can control the swing arm 100 to return to the working position.

[0046] In this embodiment, the locking member 430 is placed in an unlocked state. At this time, the rotating shaft 200 can drive the swing arm 100 to rotate relative to the base 400, thereby adjusting the position of the swing arm 100. After the swing arm 100 is adjusted to the preset position, the locking member 430 is locked. At this time, the rotating shaft 200 is fixed relative to the base 400.

[0047] When the swing arm 100 delivers polishing liquid to the polishing pad, the position of the swing arm 100 relative to the rotating shaft 200 remains unchanged. At this time, the position of the swing arm 100 relative to the rotating shaft 200 is the working position of the swing arm 100.

[0048] In this embodiment, during the process of the swing arm 100 conveying polishing liquid to the polishing pad, if the swing arm 100 deviates from its working position due to factors such as changes in the external environment or vibration of the machine, the positioning mechanism 300 will automatically correct the swing arm 100 and reposition it to the working position, thereby ensuring that the position of the polishing liquid supply arm can maintain consistency and accuracy throughout the entire conveying process, ensuring the precise delivery of the polishing liquid and accurately dripping it at the target position, solving the problem of scattered and inaccurate polishing liquid dripping position caused by the shaking of the supply arm in related technologies, and improving the polishing effect of the workpiece.

[0049] In some embodiments, see Figure 2 and Figure 4 The positioning mechanism 300 includes: a reset assembly 310 and a positioning member 320. The reset assembly 310 is connected to the swing arm 100, and the reset assembly 310 can rotate with the swing arm 100. The reset assembly 310 is formed with a contact end. The positioning member 320 is arranged between the rotating shaft 200 and the swing arm 100 and is connected to the rotating shaft 200. The positioning member 320 can rotate with the rotating shaft 200. The contact end of the reset assembly 310 can slide relative to the positioning member 320. The positioning member 320 is provided with a positioning groove 321. When the contact end of the reset assembly 310 is placed in the positioning groove 321, the swing arm 100 is placed in the working position. When the contact end of the reset assembly 310 is out of the positioning groove 321, the reset assembly 310 can control the contact end to slide back into the positioning groove 321.

[0050] In this embodiment, the swing arm 100 is positioned by the positioning groove 321. When the contact end of the reset component 310 is in the positioning groove 321, the swing arm 100 is in the working position. At this time, the swing arm 100 delivers polishing liquid to the polishing pad. When the contact end of the swing arm 100 is separated from the positioning groove 321 due to factors such as machine vibration, the swing arm 100 will swing near its working position. At this time, the reset component 310 can guide the contact end to slide back into the positioning groove 321. Through this reset process, the swing arm 100 can return to its correct working position, ensuring the accurate supply of polishing liquid and the normal polishing of the workpiece.

[0051] In some embodiments, see Figure 4The reset assembly 310 includes: a columnar body 311, an elastic member 312 and a reset body 313. The swing arm 100 is provided with an embedding hole 110, the columnar body 311 and the elastic member 312 are both arranged in the embedding hole 110, the reset body 313 is partially arranged in the embedding hole 110, the elastic member 312 is arranged between the columnar body 311 and the reset body 313, and the part of the reset body 313 arranged outside the embedding hole 110 is formed with a contact end, which is slidably arranged in the positioning groove 321, and when the contact end is separated from the positioning groove 321, the elastic member 312 is in a compressed state. When the contact end is placed in the positioning groove 321, the elastic member 312 can be in a compressed state or in a free state (the elastic member 312 is in a state of no force, maintaining its original length and shape).

[0052] In specific implementation, the elastic member 312 may be a spring, an elastic sheet, etc., one end of the elastic member 312 may be connected to the columnar body 311 or may not be connected, and the other end of the elastic member 312 may be connected to the reset body 313 or may not be connected. The cross-sectional shape of the columnar body 311 may be circular, elliptical, etc., and this embodiment does not impose any limitation on the cross-sectional shape of the columnar body. The shape of the positioning groove 321 may be adapted to the shape of the contact end, or may be a more common shape such as a V-shaped groove.

[0053] In order to reduce the friction between the positioning member 320 and avoid damage to the positioning member 320, in specific implementation, the contact end of the reset body 313 may have a smooth surface, such as an arc surface, a spherical surface, etc.

[0054] In this embodiment, when the reset body 313 is separated from the positioning groove 321 and swings near the positioning groove 321 due to reasons such as machine vibration, since the elastic member 312 is in a compressed state at this time, the rebound force of the elastic member 312 can bounce the reset body 313 back into the positioning groove 321 when it swings to the position of the positioning groove 321, thereby quickly resetting the swing arm 100 to the working position.

[0055] Furthermore, in some embodiments, the reset body 313 is a sphere, and the reset body 313 rolls on the surface of the positioning member 320 to reduce the friction between the reset body 313 and the positioning member 320 to avoid damage to the positioning member 320 during the sliding process.

[0056] In some embodiments, see Figure 4 The reset assembly 310 includes: a columnar body 311, an elastic member 312 and a sphere; wherein the swing arm 100 is provided with an embedding hole 110, the columnar body 311 is arranged in the embedding hole 110, the columnar body is provided with a columnar hole along the axial direction, the elastic member 312 is arranged in the columnar hole, the sphere is embedded in the columnar hole and can rotate relative to the columnar hole; one end of the elastic member 312 abuts against the sphere so that the sphere can move axially under the action of the spring force. The elastic member 312 is not connected to the sphere.

[0057] In this embodiment, the reset body 313 is a sphere, thereby forming a rolling connection with the positioning member 320 to further reduce the friction between the reset body 313 and the positioning member 320 .

[0058] In some embodiments, the reset assembly 310 may be a ball plunger provided with a spring, and the ball head of the ball plunger may be rollably disposed in the positioning groove 321. When the ball head is separated from the positioning groove 321, the ball head may be re-entered into the positioning groove 321 by the rebound force of the spring, thereby completing the reset action of the swing arm 100.

[0059] In some embodiments, there is only one positioning slot 321, that is, the swing arm 100 has only one fixed working position, which makes the swing arm 100 do not need to switch between multiple positions, but always remain in the same working position. This single working position design not only reduces mechanical complexity, but also improves system stability and operational reliability.

[0060] In other embodiments, there are multiple (eg, two or more) positioning grooves 321 and they are distributed along the circumference of the positioning member 320 .

[0061] For example, Figure 6 and Figure 7 The positioning member 320 shown in the figure has three positioning grooves 321. When the swing arm 100 drives the reset assembly 310 to rotate so that the contact end enters the positioning groove 321, the polishing liquid supply arm is in the working position.

[0062] In this embodiment, the swing arm 100 can be switched between multiple preset working positions according to different working requirements, which increases the flexibility of the system to meet the polishing requirements of workpieces of different sizes or shapes. In addition, the evenly distributed positioning grooves 321 ensure the stability of the swing arm 100 at each working position, further improving the accuracy and efficiency of the polishing process.

[0063] Understandably, see Figure 3 and Figure 5 In some embodiments, the swing arm 100 may further include: a rotating body 120, a flange 130 and a cantilever 140. The rotating body 120 can rotate relative to the rotating shaft 200, the reset assembly 310 is arranged on the rotating body 120, and the flange 130 is connected to the side of the rotating body 120 facing the positioning member and can rotate synchronously with the rotating body 120. The flange 130 is slidably contacted and connected with the positioning member 320, and the rotating body 120 can drive the flange 130 to rotate relative to the positioning member 320. One end of the cantilever 140 is connected to the rotating body 120, and the other end of the cantilever 140 is a free end. The rotating body 120 can drive the cantilever 140 to rotate relative to the rotating shaft 200, and the nozzle seat 500, the polishing liquid supply pipe 600 and the protective cover 700 are all arranged on the cantilever 140.

[0064] In a specific implementation, the reset assembly 310 may be disposed on the outside of the flange 130. The flange 130 may be a wear-resistant flange made of a wear-resistant material, such as carbon steel, stainless steel, ductile iron, gray cast iron, and the like.

[0065] In some embodiments, the surface of the positioning member 320 that is used to contact the flange 130 is formed with a damping area and a non-damping area along the circumferential direction. When the flange 130 is in contact with the damping area, a damping connection is formed between the positioning member 320 and the flange 130; when the flange 130 is in contact with the non-damping area, a non-damping connection is formed between the positioning member 320 and the flange 130. When the non-damping connection is formed between the positioning member 320 and the flange 130, the contact end of the reset assembly 310 is placed in the positioning groove 321.

[0066] It should be noted that, in this embodiment, the damping area and the non-damping area refer to different areas on the surface of the positioning member 320 that are in contact with the flange 130 , and they have different functions.

[0067] When the flange 130 contacts the damping area of ​​the positioning member 320, a damping connection is formed between the two. This connection has a certain friction or resistance between the flange 130 and the positioning member 320 to slow down or control the movement of the flange 130, prevent the flange 130 from accidentally moving due to vibration or other external forces during operation, and the damping connection helps to maintain the stable position of the flange 130.

[0068] Relative to the damping zone, the non-damping zone is another area on the positioning member 320. When the flange 130 contacts the non-damping zone, a non-damping connection is formed between them. The non-damping connection can have no friction at all, for example, when the non-damping zone is set as a hollow structure, there is no friction at all; or the friction can be relatively small, for example, when the non-damping zone is set as an area with a relatively smooth surface. The non-damping zone in this embodiment is an area used to reduce the friction between the flange 130 and the positioning member 320, so that the flange 130 can rotate freely within a certain range and can be smoothly reset after being subjected to external force.

[0069] In a specific implementation, both the positioning member 320 and the flange 130 can be annular bodies, and the diameter of the positioning member 320 can be larger than the diameter of the flange 130. The flange 130 is in contact and connected with the annular area of ​​the positioning member 320 close to the axis, and the positioning groove 321 is arranged in the area of ​​the positioning member 320 close to the edge away from the axis.

[0070] When the polishing liquid supply arm is in the working position, the flange 130 is in contact with the non-damping area of ​​the positioning member 320, and the swing arm 100 is fixed at this time. When the swing arm 100 moves left and right near the positioning groove 321 due to factors such as machine vibration, the contact end can automatically rebound into the positioning groove 321 under the action of the reset component 310, that is, the swing arm 100 can automatically rebound to the working position to ensure that the landing point of the polishing liquid will not be offset. The setting of the non-damping area contact allows the swing arm 100 to be reset smoothly.

[0071] When the staff repairs or maintains the swing arm 100, the staff can push the swing arm 100 to swing to the damping area, and the flange 130 is in contact and connected with the damping area of ​​the positioning member 320. At this time, due to the existence of the damping force, the swing arm 100 can stay at any position without affecting the operator, thereby avoiding the free swing of the polishing liquid supply arm and affecting the normal operation of the operator.

[0072] Further, see Figure 6 and Figure 7 In some embodiments, the surface of the positioning member 320 used for contacting and connecting with the flange 130 is formed with a groove 322 and a first boss 323; the surface of the flange 130 used for contacting and connecting with the positioning member 320 is formed with a second boss 131. When the second boss 131 is in contact with the groove 322, a non-damping connection is formed between the positioning member 320 and the flange 130, such as Figure 6 When the second boss 131 is in contact with the first boss 323, a damping connection is formed between the positioning member 320 and the flange 130, as shown in FIG. Figure 7 shown.

[0073] In a specific implementation, the groove 322 may be an arc-shaped groove coaxial with the positioning member 320, and the first boss 323 may be an arc-shaped platform coaxial with the positioning member 320; the second boss 131 may be an arc-shaped platform coaxial with the flange 130, and the second boss 131 is adapted to the shape of the arc-shaped groove and the first boss 323. The positioning groove 321 is placed on the side of the groove 322 and / or the first boss 323 away from the axis of the positioning member 320. When the second boss 131 is in contact with the groove 322, the contact end of the reset body 313 is placed in the positioning groove 321.

[0074] In specific implementation, the number of the grooves 322 and the first bosses 323 can be determined according to actual conditions, for example, two can be provided and arranged alternately, or more than two can be provided, and this embodiment does not impose any limitation on this. The number of the second bosses 131 should be compatible with the number of the grooves 322 and the first bosses 323.

[0075] In this embodiment, the positioning member 320 is formed with a groove 322 and a first boss 323 , which overlaps with the flange 130 intermittently to control the area where the damping force is formed between the flange 130 and the positioning member 320 .

[0076] Furthermore, in some embodiments, the circumferential length of the groove 322 is greater than the circumferential length of the first boss 323, so that when the swing arm 100 is in operation, when the swing arm 100 is swung and reset by external force, the second boss 131 is always within the range of the groove 322 (non-damping contact) and will not swing into the range of the first boss 323 (damping contact), so as to avoid the second boss 131 reaching the first boss 323. The existence of the damping force prevents the reset assembly 310 from resetting to the working position.

[0077] See also Figure 5 and Figure 8 In some embodiments, the swing arm 100 further includes an adjustment sheet 150 . The adjustment sheet 150 is disposed between the rotating body 120 and the flange 130 and connected to the rotating body 120 via a tightening screw 160 , and is used to adjust the damping force between the flange 130 and the positioning member 320 .

[0078] For specific implementation, see Figure 8 The flange 130 and the adjusting piece 150 can be kept relatively fixed in radial position with the swing arm 100 through the positioning pin 170, and the swing arm 100 can drive the flange 130 and the adjusting piece 150 to rotate.

[0079] In this embodiment, the positioning member 320 is fixedly connected to the rotating shaft 200, and the flange 130 is fixedly connected to the rotating body 120. The damping force between the flange 130 and the positioning member 320 can be adjusted by adjusting the screwing depth of the tightening screw 160 to move the adjustment plate 150 along the axial direction of the flange 130 to adjust the contact pressure between the flange 130 and the positioning member 320, thereby changing the damping force between the two.

[0080] In some embodiments, see Figure 2 , Figure 3 and Fig. 9 , further comprising: an arc nut 440. The arc nut 440 is disposed in the base hole 410 and is attached to the rotating shaft 200 along the circumference of the rotating shaft 200. The arc nut 440 has a connecting hole 441 on the surface of the base 400. The locking member 430 is passed through the locking hole 420 and connected to the connecting hole 441 on the arc nut 440 to lock the rotating shaft 200 and the base 400.

[0081] In specific implementation, the arc nut 440 can be coaxially arranged with the rotating shaft 200; the locking member 430 can be a screw or the like. In this embodiment, the locking member 430 can pass through the locking hole 420 and connect with the connecting hole 441 on the arc nut 440, thereby realizing the locking and unlocking functions of the base 400 and the rotating shaft 200, and facilitating the multi-angle adjustment of the landing point. Since the arc nut 440 is arc-shaped, the contact with the rotating shaft 200 is a surface contact. Compared with the point contact in the related art, this embodiment increases the friction force and has a large locking force, ensuring that the base 400 and the positioned rotating shaft 200 are firmly and reliably fixed, and will not deviate to cause inaccurate landing point position, effectively avoiding the misalignment of the rotating shaft 200 relative to the base 400 that may occur during the locking process, thereby affecting the landing point.

[0082] In some embodiments, a connecting hole 441 is defined on the arc-shaped nut 440 ; correspondingly, a locking hole 420 corresponding to the arc-shaped nut 440 is defined on the base 400 .

[0083] In other embodiments, each arc-shaped nut 440 is provided with a plurality of (eg, two or more) connecting holes 441, and the plurality of connecting holes 441 are evenly distributed along the arc direction of the arc-shaped nut 440; accordingly, see Figure 3 The base 400 is provided with a plurality of locking holes 420 corresponding to the connecting holes 441 , and the base 400 and the rotating shaft 200 can be locked and fixed by a plurality of locking members 430 .

[0084] In this embodiment, the evenly distributed connection holes 441 provide multiple locking points, which increase the connection stability between the arc nut 440 and the base 400, effectively disperse the stress of the connection points, and reduce the burden of a single connection point. The evenly distributed connection holes 441 also help to balance the load, especially when the arc nut 440 is subjected to rotational or vibration loads, this connection method can reduce deformation or wear caused by uneven loads. In addition, multiple connection holes 441 are also convenient for maintenance and replacement. When a certain connection hole 441 is worn or damaged, it can be fixed through other connection holes 441 without completely replacing the entire arc nut 440, thereby reducing maintenance costs and downtime.

[0085] In some embodiments, multiple (for example, two or more) arc nuts 440 can be provided, and each arc nut 440 is evenly distributed along the circumference of the rotating shaft 200; accordingly, the base 400 is provided with locking holes 420 corresponding to each arc nut 440, and the evenly distributed multiple locking points can effectively prevent the rotating shaft 200 from rotating relative to the base 400, thereby ensuring the position accuracy of the rotating shaft 200 during operation.

[0086] Furthermore, in some embodiments, an arc-shaped boss 442 is formed on the surface of the arc-shaped nut 440 close to the base 400 , and accordingly, an arc-shaped groove is formed on the side wall of the base hole 410 , and the arc-shaped boss 442 is embedded in the arc-shaped groove to fix the arc-shaped nut 440 .

[0087] In some embodiments, a grid structure 443 is formed on the outer side of the arc nut 440 facing the base 400 , that is, the outer side of the arc nut 440 is grid-drawn to further increase the friction between the arc nut 440 and the side wall of the base hole 410 .

[0088] In some embodiments, a notch 444 is formed on the inner side of the arc nut 440 facing the rotating shaft 200 , so as to increase the friction between the arc nut 440 and the rotating shaft 200 when the arc nut 440 is deformed during the locking connection.

[0089] In a specific implementation, the number of the cutouts 444 may be one or more. When the number of the cutouts 444 is more than one, they may be distributed along the arc direction of the arc-shaped nut 440 .

[0090] When the locking member 430 (such as a screw) tightens the arc nut 440 , the arc nut 440 is deformed so as to better fit with the rotating shaft 200 , thereby increasing the friction force.

[0091] The embodiment of the present application further provides a chemical mechanical polishing device, which includes a polishing head, a loading platform, a polishing pad disposed on the loading platform, and any one of the above-mentioned liquid supply arms.

[0092] Among them, the specific implementation process of the liquid supply arm can be found in the above description, and this application will not go into details here.

[0093] The embodiment of the present application also proposes a device for wafer processing, which includes the aforementioned chemical mechanical polishing device. For example, the device is a thinning and polishing integrated device for wafer processing, which may include the aforementioned chemical mechanical polishing device and a wafer thinning device. In the processing procedure, the wafer may first be thinned by the thinning device for the back side, and then be polished by the chemical mechanical polishing device for the surface to remove surface stress.

[0094] In this embodiment, during the process of the swing arm 100 conveying polishing liquid to the polishing pad, if the swing arm 100 deviates from its working position due to factors such as changes in the external environment or vibration of the machine, the positioning mechanism 300 will automatically correct the swing arm 100 and reposition it to the working position, thereby ensuring that the position of the polishing liquid supply arm can maintain consistency and accuracy throughout the entire conveying process, ensuring the precise delivery of the polishing liquid and accurately dripping it at the target position, solving the problem of scattered and inaccurate polishing liquid dripping position caused by the shaking of the supply arm in related technologies, and improving the polishing effect of the workpiece.

[0095] Obviously, those skilled in the art can make various changes and modifications to the present application without departing from the spirit and scope of the present application. Thus, if these modifications and variations of the present application fall within the scope of the claims of the present application and their equivalents, the present application is also intended to include these modifications and variations.

Claims

1. A liquid supply arm, characterized in that: include: A swing arm for delivering polishing liquid to the polishing pad; A rotating shaft, wherein the swing arm is in contact with and connected to the rotating shaft and can rotate relative to the rotating shaft; a positioning mechanism, provided on the swing arm and the rotating shaft, for controlling the swing arm to be repositioned to the working position when the swing arm deviates from the working position; the working position is the position of the swing arm relative to the rotating shaft when the swing arm delivers polishing liquid to the polishing pad; A reset assembly connected to the swing arm, the reset assembly being formed with a contact end; A positioning member is arranged between the rotating shaft and the swing arm and connected to the rotating shaft. The contact end of the reset assembly can slide relative to the positioning member. The positioning member is provided with a positioning groove. When the contact end is placed in the positioning groove, the swing arm is placed in the working position. The reset assembly is used to control the contact end to slide back into the positioning groove when the contact end is out of the positioning groove.

2. The liquid supply arm according to claim 1, characterized in that: The reset component comprises: A columnar body, wherein the swing arm is provided with an embedding hole, and the columnar body is disposed in the embedding hole; An elastic member, arranged in the embedding hole; The reset body is partially placed in the embedding hole, the elastic member is placed between the columnar body and the reset body, the part of the reset body placed outside the embedding hole is formed with the contact end, and when the contact end is separated from the positioning groove, the elastic member is in a compressed state.

3. The liquid supply arm according to claim 2, characterized in that: The resetting body is a sphere.

4. The liquid supply arm according to claim 1, characterized in that: The reset component comprises: A columnar body, the swing arm is provided with an embedding hole, the columnar body is arranged in the embedding hole, and the columnar body is provided with a columnar hole along the axial direction; A sphere, wherein the sphere is partially embedded in the cylindrical hole and can rotate relative to the cylindrical hole; An elastic member is arranged in the columnar hole and one end of the elastic member abuts against the spherical part so that the spherical part moves axially under the action of the spring force.

5. The liquid supply arm according to claim 1, characterized in that: The reset assembly is a ball plunger provided with a spring, and the ball head of the ball plunger can be rotatably arranged in the positioning groove.

6. The liquid supply arm according to claim 1, characterized in that: There is one positioning groove; or, There are multiple positioning grooves distributed along the circumference of the positioning member.

7. The liquid supply arm according to claim 1, characterized in that: The swing arm comprises: A rotating body, rotatably disposed on the rotating shaft, and the reset assembly is disposed on the rotating body; A flange connected to a side of the rotating body facing the positioning member and slidably contacting and connected with the positioning member; The cantilever has one end connected to the rotating body and the other end is a free end.

8. The liquid supply arm according to claim 7, characterized in that: The surface of the positioning member in contact with the flange is formed with a damping area and a non-damping area along the circumferential direction; When the flange is in contact with the damping area, a damping connection is formed between the positioning member and the flange; When the flange is in contact with the non-damping area, a non-damping connection is formed between the positioning member and the flange.

9. The liquid supply arm according to claim 8, characterized in that: The surface of the positioning member used for contacting and connecting with the flange is formed with a groove and a first boss; A second boss is formed on the surface of the flange used for contacting and connecting with the positioning member; When the second boss is in contact with the groove, a non-damping connection is formed between the positioning member and the flange; When the second boss is in contact with and connected to the first boss, a damping connection is formed between the positioning member and the flange.

10. The liquid supply arm according to claim 9, characterized in that: The groove is an arc-shaped groove coaxial with the positioning member, and the first boss is an arc-shaped boss coaxial with the positioning member; The second boss is an arc-shaped boss coaxial with the flange, and the second boss is matched with the arc-shaped groove and the first boss in shape.

11. The liquid supply arm according to claim 9, characterized in that: The positioning groove is disposed on a side of the groove and / or the first boss away from the axis of the positioning member.

12. The liquid supply arm according to claim 9, characterized in that: The circumferential length of the groove is greater than the circumferential length of the first boss.

13. The liquid supply arm according to claim 7, characterized in that: The swing arm also includes: An adjusting plate is arranged between the rotating body and the flange and connected to the rotating body through a tightening screw, and is used for adjusting the damping force between the flange and the positioning member.

14. The liquid supply arm according to any one of claims 1 to 13, characterized in that: Also includes: A base having a base hole, the rotating shaft being rotatably arranged in the base hole, and a locking hole communicating with the base hole being arranged on a side wall of the base; An arc-shaped nut is arranged in the base hole and is attached to the rotating shaft along the circumference of the rotating shaft, and a connecting hole is opened on the surface of the arc-shaped nut facing the base; A locking member is inserted into the locking hole and connected to the connecting hole to lock the rotating shaft and the base.

15. The liquid supply arm according to claim 14, characterized in that: An arc-shaped boss is formed on the surface of the arc-shaped nut close to the base, and correspondingly, an arc-shaped groove is opened on the side wall of the base hole, and the arc-shaped boss is embedded in the arc-shaped groove.

16. The liquid supply arm according to claim 14, characterized in that: The arc-shaped nut is formed with a grid structure on the outer side facing the base to increase the friction between the arc-shaped nut and the side wall of the base hole.

17. The liquid supply arm according to claim 14, characterized in that: The arc-shaped nut is provided with a cutout on the inner side surface of the rotating shaft, so as to deform the arc-shaped nut during the locking connection to increase the friction between the arc-shaped nut and the rotating shaft.

18. The liquid supply arm according to claim 14, characterized in that: There is one connecting hole; or The connecting holes are multiple and are arranged along the arc direction of the arc nut; accordingly, the base is provided with multiple locking holes corresponding to the connecting holes one by one.

19. The liquid supply arm according to claim 14, characterized in that: There is one arc-shaped nut; or, There are multiple arc-shaped nuts evenly distributed along the circumference of the rotating shaft; accordingly, the base is provided with locking holes corresponding to each of the arc-shaped nuts.

20. A chemical mechanical polishing device, characterized in that: The invention comprises a polishing head, a loading platform, a polishing pad arranged on the loading platform, and a liquid supply arm as claimed in any one of claims 1 to 19.

21. A device for wafer processing, characterized in that: The apparatus comprises the chemical mechanical polishing device as claimed in claim 20.

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