Motor jacking belt transverse moving rail transfer mechanism

Abstract

The invention relates to the field of silicon wafer switching equipment, and discloses a motor jacking belt transverse moving rail transfer mechanism which comprises a jacking assembly, the jacking assembly comprises a base and a first driving source, a rotating shaft is rotationally arranged on the base, an eccentric bearing is coaxially installed on the rotating shaft, a connecting part is connected to the outer circle face of the eccentric bearing, and a sliding rail is arranged on the connecting part; a sliding block is arranged on the sliding rail, and the output end of the first driving source is connected with one end of the rotating shaft; the transverse moving assembly comprises two supporting seats, supporting plates are arranged on the supporting seats, two mounting plates are connected between the two supporting plates, a plurality of driven wheels are rotationally arranged on the mounting plates, the bottoms of the two mounting plates are connected with the same mounting seat, the mounting seat is connected with a sliding block, and a second driving source is arranged on the mounting seat; the output end of the second driving source is provided with two driving wheels, and the two driving wheels are connected with the multiple driven wheels on the two mounting plates through transmission belts correspondingly. The device is high in precision, good in stability, simple in structure, large in bearing capacity and convenient to maintain.

Description

Technical Field

[0001] The invention relates to the field of silicon chip switching equipment, and in particular to a motor lifting belt transverse track changing mechanism. Background Art

[0002] BSG removal and PSG removal are important processes in the production of photovoltaic cells. The chain-type BSG removal and PSG removal feeder is to import the silicon wafers from the basket into the chain-type process machine. During the transmission process, six sets of unloading mechanisms simultaneously transfer the silicon wafers from the basket, and the six tracks are converted into twelve tracks by the track-changing mechanism, which matches the same spacing as the twelve tracks of the process machine, and smoothly transfer the silicon wafers to the rollers of the process machine for corresponding process processing. The silicon wafers are converted from six tracks to twelve tracks. The traditional track-changing mechanism is driven by a cylinder to drive the transmission belt up and down to achieve track switching. The cylinder drive is affected by air pressure and air flow, and the movement speed stability is poor, and speed and position control is difficult. When the air pressure is adjusted to a large value, the lifting speed is high, and when it contacts the silicon wafer, it will cause vibration and position change, which may cause hidden cracks in the silicon wafer in severe cases; when the air pressure is adjusted to a small value, the lifting speed is slow, which affects the transmission rhythm, thereby reducing the equipment capacity. In addition, the service life of the cylinder under this working condition is generally 2 years. After reaching the service life, the damaged cylinder needs to be replaced frequently, which increases the maintenance cost. Moreover, the cylinder will generate a lot of noise when running, which will affect the working environment. Therefore, a motor-lifting belt transverse track-changing mechanism was developed. Summary of the invention

[0003] In view of this, the object of the present invention is to provide a motor-lifting belt transverse track-changing mechanism to solve the problems pointed out in the above background technology.

[0004] In order to achieve the above-mentioned invention object, the technical solution adopted is as follows:

[0005] A motor-lifting belt transverse track-changing mechanism, comprising:

[0006] A lifting assembly, the lifting assembly comprising a base and a first driving source, the base is rotatably provided with a rotating shaft extending in the X-axis direction, an eccentric bearing is coaxially mounted on the rotating shaft, a connecting portion is connected to the outer circumferential surface of the eccentric bearing, a slide rail extending in the Y-axis direction is provided on the connecting portion, a slider is provided on the slide rail, and an output end of the first driving source is connected to one end of the rotating shaft;

[0007] A transverse movement assembly, the transverse movement assembly includes two support seats arranged at intervals in the X-axis direction, each of the support seats is provided with a support plate sliding along the Z-axis direction, two mounting plates extending along the X-axis direction are connected between the two support plates, and a plurality of driven wheels arranged at intervals in the length direction are rotatably arranged on the two mounting plates, and the bottoms of the two mounting plates are connected to the same mounting seat, the mounting seat is connected to the slider, and a second driving source is provided on the mounting seat, and two driving wheels are provided at the output end of the second driving source, and the two driving wheels are respectively connected to the plurality of driven wheels on the two mounting plates through a transmission belt.

[0008] As a further improvement of the present invention, a plurality of guide components arranged at intervals along the X-axis direction are arranged between the two support seats, and the guide component includes a fixed seat, on which a linear bearing along the Z-axis direction is arranged, and a guide shaft is slidably arranged in the linear bearing, and one end of the guide shaft is connected to the two mounting plates.

[0009] As a further improvement of the present invention, a connecting plate is installed at the free end of the guide shaft through a fastener, and the connecting plate is respectively connected to the two mounting plates.

[0010] As a further improvement of the present invention, two connecting bolts extending along the Z-axis direction are symmetrically arranged on the support seat, and two through holes corresponding to the positions of the two connecting bolts are opened on the support plate, and are slidingly connected to the two connecting bolts through the through holes.

[0011] As a further improvement of the present invention, a sensing sheet is provided at one end of the rotating shaft away from the first driving source, and two sensing switches are provided on the base and are respectively located on both sides of the sensing sheet.

[0012] As a further improvement of the present invention, the first driving source is a servo motor, and the second driving source is a double-headed motor.

[0013] As a further improvement of the present invention, a plurality of reinforcing rib plates are arranged at intervals between the two mounting plates.

[0014] The beneficial effects of the present invention are as follows: the present invention changes the driving of the up and down movement of the transmission belt into a motor + eccentric wheel mode, adopts a servo motor, has a fast speed, high precision and good stability. An eccentric ball bearing is used to realize the eccentric function, has a simple structure, a large load-bearing capacity and is easy to maintain. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] The drawings constituting a part of this application are used to provide a further understanding of the present invention. The exemplary embodiments of the present invention and their descriptions are used to explain the present invention and do not constitute an improper limitation of the present invention. In the drawings:

[0016] Figure 1It is a structural schematic diagram of the present invention;

[0017] Figure 2 for Figure 1 A magnified view of the structure of the middle A section;

[0018] Figure 3 It is a schematic diagram of the structure of the second viewing angle of the present invention;

[0019] Figure 4 for Figure 3 A magnified view of the structure of the middle B section;

[0020] Figure 5 for Figure 3 A magnified view of the structure of the middle C section;

[0021] Figure 6 It is a structural schematic diagram of the jacking assembly in the present invention;

[0022] Figure 7 A motion diagram of the eccentric structure of the jacking assembly of the present invention;

[0023] Figure 8 is a displacement variation diagram of the transmission belt of the present invention;

[0024] Fig. 9 The speed change of the transmission belt of the present invention in transmitting the up and down movement Figure 1 ;

[0025] Fig.10 is a diagram showing a rotation speed change of the first driving source of the present invention;

[0026] Fig.11 is a displacement change diagram of the first driving source of the present invention;

[0027] Fig.12 The speed change of the transmission belt of the present invention in transmitting the up and down movement Figure 2 .

[0028] In the figure: 1. lifting assembly, 11. base, 12. first driving source, 13. rotating shaft, 14. eccentric bearing, 15. connecting part, 16. slide rail, 17. slider, 18. induction plate, 19. position sensor, 2. transverse movement assembly, 21. support seat, 211. connecting bolt, 22. support plate, 221. through hole, 23. mounting plate, 24. driven wheel, 25. mounting seat, 26. second driving source, 27. driving wheel, 28. transmission belt, 29. reinforcing rib plate, 3. guide assembly, 31. fixed seat, 32. linear bearing, 33. guide shaft, 34. fastener, 35. connecting plate. DETAILED DESCRIPTION

[0029] It should be noted that, in the absence of conflict, the embodiments and features in the embodiments of the present application can be combined with each other. The present invention will be described in detail below with reference to the accompanying drawings and in combination with the embodiments.

[0030] In order to enable those skilled in the art to better understand the solution of the present application, the technical solution in the embodiments of the present application will be clearly and completely described below in conjunction with the drawings in the embodiments of the present application. Obviously, the described embodiments are only part of the embodiments of the present application, not all of the embodiments. Based on the embodiments in the present application, all other embodiments obtained by ordinary technicians in this field without creative work should fall within the scope of protection of the present application.

[0031] like Figure 1-6 As shown, a motor-lifting belt transverse track-changing mechanism comprises:

[0032] A lifting assembly 1, the lifting assembly 1 comprises a base 11 and a first driving source 12, a rotating shaft 13 extending in the X-axis direction is rotatably provided on the base 11, an eccentric bearing 14 is coaxially mounted on the rotating shaft 13, a connecting portion 15 is connected to the outer circumferential surface of the eccentric bearing 14, a slide rail 16 extending in the Y-axis direction is provided on the connecting portion 15, a slider 17 is provided on the slide rail 16, and an output end of the first driving source 12 is connected to one end of the rotating shaft 13;

[0033] The transverse movement component 2 includes two support seats 21 spaced apart in the X-axis direction, each support seat 21 is provided with a support plate 22 sliding along the Z-axis direction, two mounting plates 23 extending along the X-axis direction are connected between the two support plates 22, and a plurality of driven wheels 24 arranged spaced apart in the length direction are rotatably provided on the two mounting plates 23, and the bottom of the two mounting plates 23 is connected to the same mounting seat 25, the mounting seat 25 is connected to the slider 17, and a second driving source 26 is provided on the mounting seat 25, and two driving wheels 27 are provided at the output end of the second driving source 26, and the two driving wheels 27 are respectively connected to the plurality of driven wheels 24 on the two mounting plates 23 through a transmission belt 28.

[0034] A plurality of guide assemblies 3 are also arranged between the two support seats 21 and are spaced apart along the X-axis direction. The guide assembly 3 includes a fixed seat 31, on which a linear bearing 32 is arranged along the Z-axis direction. A guide shaft 33 is slidably arranged in the linear bearing 32, and one end of the guide shaft 33 is connected to the two mounting plates 23.

[0035] A connecting plate 35 is installed at the free end of the guide shaft 33 via a fastener 34 , and the connecting plate 35 is respectively connected to the two mounting plates 23 .

[0036] The support seat 21 is symmetrically provided with two connecting bolts 211 extending along the Z-axis direction. The support plate 22 is provided with two through holes 221 corresponding to the positions of the two connecting bolts 211 respectively, and is slidably connected to the two connecting bolts 211 through the through holes 221 .

[0037] A sensing sheet 18 is disposed at one end of the rotating shaft 13 away from the first driving source 12 , and two position sensors 19 are disposed on the base 11 and are located on both sides of the sensing sheet 18 .

[0038] The first driving source 12 is a servo motor, the output end of which is connected to the rotating shaft 13 via a reducer and a coupling, and the second driving source 26 is a double-headed motor.

[0039] A plurality of reinforcing rib plates 29 are disposed between the two mounting plates 23 .

[0040] like Figure 7 As shown, the displacement of the transmission belt 28 is x=OB, the eccentric distance of the eccentric bearing 14 is OA=4.5mm, assuming that the first driving source 12 rotates at a uniform speed ω=12.5πrad / s, and the speed ratio of the reducer is I=1 / 5, then x=4.5cos(Iωt)=4.5cos(2.5πt), and the transmission belt 28 is set at the lowest position as the origin. At this time, ∠BOA=180 degrees, x=4.5cos(2.5πt+π), and the value of x is as follows: Figure 8 As shown, when t=0, the transmission belt 28 is at the lowest position, and when t=0.5s, the transmission belt 28 is at the highest position.

[0041] The speed of the transmission belt 28 moving up and down is the rate of change of x, that is, taking the derivative of x, we can get the movement speed v = -11.25πsin((2.5πt+π), such as Fig. 9 As shown, when t=0s and t=0.4s, the transmission belt 28 is at the start and stop positions, and the upward movement speed of the transmission belt 28 is accelerated from 0 to about 35.3mm / s, and then dropped to 0. The silicon wafer is in stable contact with the transmission belt 28 and no vibration is generated.

[0042] In fact, the servo motor speed is a process of first accelerating and then decelerating. Fig.10 As shown, the motion is analyzed in sections. Assuming the servo motor speed acceleration is α, the angular velocity ω = αt, then x1 = 4.5cos(I*αt*t+π) = 4.5cos(0.2αt 2 +π), set X = 0 when t = 0.2s, and we can calculate α = 62.5πrad / s 2 ,ω=12.5π. Then x=4.5cos(12.5πt 2 +π), the curve is as Fig.11As shown, setting t from 0.2s to 0.4s, the servo motor deceleration is α = -62.5πrad / s 2 , angular velocity ω=12.5π-62.5π(t-0.2), x2=4.5cos(-12.5πt 2 +10πt).

[0043] Taking the derivative with respect to x, we get v1 = -112.5π·t·sin(12.5t 2 +π),

[0044] v2=-(112.5π·t+45π)·sin(-12.5πt 2 +10πt), the curve is as Fig.12 shown.

[0045] From the above calculation, it can be known that when t=0s and t=0.4s, the transmission belt 28 is also in the starting and stopping positions, and the upward movement speed of the transmission belt 28 accelerates from 0 to about 70.6mm / s, and then drops to 0, and the movement trend is the same as the uniform rotation.

[0046] After the improvement, the film transmission cycle is shortened. One film transmission cycle includes 4 fixed time periods t1, one transmission belt 28 lifting time t2, and one transmission belt 28 falling time t3. The transmission belt 28 rotates at 7 rpm, the driving wheel 27 has a diameter of 40 mm and a fixed length of 330 mm. It can be calculated that t1≈0.375s, t2=t3=0.4s, the cycle T=4*t1+t2+t3=2.3s, and the equipment capacity n=12*3600 / T≈18780 pieces / hour. The capacity can be increased from 13,000 pieces / hour before the improvement to 18,000 pieces / hour, an increase of 33%.

[0047] After adopting the structural improvement of the present invention, the equipment runs more stably, the number of jams can meet 2 times / day, and the fragmentation rate is ≤0.01%.

[0048] The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. For those skilled in the art, the present invention may have various modifications and variations. Any modification, equivalent replacement, improvement, component splitting or combination, etc. made within the spirit and principle of the present invention shall be included in the protection scope of the present invention.

Claims

1. A motor-lifting belt transverse track-changing mechanism, characterized in that: include, A lifting assembly, the lifting assembly comprising a base and a first driving source, the base is rotatably provided with a rotating shaft extending in the X-axis direction, an eccentric bearing is coaxially mounted on the rotating shaft, a connecting portion is connected to the outer circumferential surface of the eccentric bearing, a slide rail extending in the Y-axis direction is provided on the connecting portion, a slider is provided on the slide rail, and an output end of the first driving source is connected to one end of the rotating shaft; A transverse movement assembly, the transverse movement assembly includes two support seats arranged at intervals in the X-axis direction, each of the support seats is provided with a support plate sliding along the Z-axis direction, two mounting plates extending along the X-axis direction are connected between the two support plates, and a plurality of driven wheels arranged at intervals in the length direction are rotatably arranged on the two mounting plates, and the bottoms of the two mounting plates are connected to the same mounting seat, the mounting seat is connected to the slider, and a second driving source is provided on the mounting seat, and two driving wheels are provided at the output end of the second driving source, and the two driving wheels are respectively connected to the plurality of driven wheels on the two mounting plates through a transmission belt.

2. The motor-lifting belt transverse track-changing mechanism according to claim 1 is characterized in that: A plurality of guide components are arranged between the two support seats and are spaced apart along the X-axis direction. The guide components include a fixed seat, on which a linear bearing is arranged along the Z-axis direction. A guide shaft is slidably arranged in the linear bearing, and one end of the guide shaft is connected to the two mounting plates.

3. The motor-lifting belt transverse track-changing mechanism according to claim 2 is characterized in that: The free end of the guide shaft is mounted with a connecting plate via a fastener, and the connecting plate is respectively connected to the two mounting plates.

4. The motor-lifting belt transverse track-changing mechanism according to claim 3 is characterized in that: The support seat is symmetrically provided with two connecting bolts extending in the Z-axis direction, and the support plate is provided with two through holes corresponding to the positions of the two connecting bolts respectively, and is slidably connected with the two connecting bolts through the through holes.

5. The motor-lifting belt transverse track-changing mechanism according to claim 4 is characterized in that: An induction sheet is disposed at one end of the rotating shaft away from the first driving source, and two induction switches are disposed on the base and are respectively located on two sides of the induction sheet.

6. The motor-lifting belt transverse track-changing mechanism according to claim 5, characterized in that: The first driving source is a servo motor, and the second driving source is a double-headed motor.

7. The motor-lifting belt transverse track-changing mechanism according to claim 6 is characterized in that: A plurality of reinforcing rib plates are arranged at intervals between the two mounting plates.

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