A magnetic-controlled Czochralski single crystal device

Abstract

The present invention belongs to the technical field of single crystal furnaces, and specifically relates to a magnetic controlled Czochralski single crystal device, which includes a superconducting magnet; the superconducting magnet is arranged inside the single crystal furnace; a cooling unit is sleeved on the outer periphery of the superconducting magnet; the cooling unit includes two mounting ring plates arranged at the top and bottom of the outer ring of the superconducting magnet; two annular water pipes are fixedly connected to the surfaces of the two mounting ring plates close to each other; a plurality of pairs of cooling pipes are arranged in a surrounding manner between the two mounting ring plates; the two ends of one cooling pipe in each pair are communicated with the two annular water pipes in the inner ring; the two ends of the other cooling pipe in each pair are communicated with the two annular water pipes in the outer ring; the flow directions of the coolant in the two annular water pipes in each pair are opposite; through the relative flow of the coolant in each pair of cooling pipes, and the superconducting magnet is evenly surrounded by multiple pairs of cooling pipes, thereby reducing the temperature difference generated during the cooling and temperature reduction of the superconducting magnet, and improving the production quality of single crystal silicon.

Description

Technical Field

[0001] The present invention belongs to the technical field of single crystal furnaces, and specifically relates to a magnetic controlled Czochralski single crystal device. Background Art

[0002] A magnetic controlled Czochralski single crystal furnace is a device that suppresses the thermal convection of the melt by applying an additional strong magnetic field in an inert gas environment, reduces the impurity content of the crystal, improves the uniformity of the longitudinal and radial impurity distributions, and obtains high-quality single crystals; with the development of superconducting magnet technology, more and more superconducting magnets have replaced traditional conventional electromagnets, which can generate stronger magnetic fields and have a more obvious effect on suppressing the thermal convection of the melt. Combined with the corresponding crystal pulling process, larger-sized or higher-quality single crystals can be prepared. The superconducting magnet system is one of the key components of a single crystal pulling furnace.

[0003] A patent application with the publication number CN110129890A discloses a coil structure for magnetic controlled Czochralski single crystal and a method for magnetic controlled Czochralski single crystal, including a first coil and a second coil arranged coaxially up and down. An auxiliary coil is arranged in the exact middle between the first coil and the second coil, and the auxiliary coil is coaxially arranged with the first coil; when energized, the currents in the first coil and the second coil are in opposite directions; by adding an auxiliary coil between the first coil and the second coil, on the basis of a pair of coaxial and opposite coils, the magnetic field generated by the auxiliary coil is superimposed on the magnetic field generated by the pair of opposite coils, thereby enhancing the magnetic field strength and improving the quality of single crystal silicon; in addition, by setting the auxiliary coil to adjust and optimize the magnetic field, the uniformity of the magnetic field can be adjusted, so as to have consistency in suppressing the thermal convection of the melt in the single crystal furnace, making the prepared single crystal silicon have a very high purity, and at the same time reducing the weight of the magnet.

[0004] The existing magnetic controlled Czochralski single crystal furnace uses the coolant in the cold shield arranged on the outer wall of the furnace to circulate for cooling. However, since the temperature of the coolant at the liquid inlet end of the cold shield is lower than the temperature of the coolant at the liquid outlet end of the cold shield, the cooling effect near the liquid inlet end of the cold shield is higher than that at the liquid outlet end of the cold shield, resulting in a temperature difference in the superconducting magnet in the magnetic controlled Czochralski single crystal furnace, and reducing the production quality of single crystal silicon.

[0005] Therefore, the present invention provides a magnetic controlled Czochralski single crystal device. Summary of the Invention

[0006] In order to make up for the deficiencies of the prior art and solve at least one of the technical problems proposed in the background art.

[0007] The technical solution adopted by the present invention to solve its technical problems is as follows: A magnetically controlled Czochralski single crystal device described in the present invention includes a superconducting magnet; the superconducting magnet is arranged inside a single crystal furnace; a cooling unit is sleeved on the outer periphery of the superconducting magnet; the cooling unit includes two mounting ring plates arranged at the top and bottom of the outer ring of the superconducting magnet; two annular water pipes are fixedly connected to the surfaces of the two mounting ring plates close to each other; a plurality of pairs of cooling pipes are arranged in a surrounding manner between the two mounting ring plates; the two ends of one cooling pipe in each pair are communicated with the two annular water pipes in the inner ring; the two ends of the other cooling pipe in each pair are communicated with the two annular water pipes in the outer ring; the cooling pipes are connected to an external cooling system through pipelines; the flowing directions of the coolant in the two annular water pipes in each pair are opposite; through the relative flow of the coolant in each pair of cooling pipes, and the superconducting magnet is evenly surrounded by a plurality of pairs of cooling pipes, thereby reducing the temperature difference generated when the superconducting magnet is cooled, and improving the production quality of single crystal silicon.

[0008] Preferably, the cooling pipe is of a corrugated structure; the two cooling pipes in each pair are arranged in parallel; thereby not only being able to comprehensively cool down the superconducting magnet, but also improving the uniformity of temperature reduction and reducing the temperature difference.

[0009] Preferably, a storage ring box is fixedly connected to the outer periphery of the bottom surface of the top mounting ring plate; granular abrasive is contained inside the storage ring box; a first three-way valve is connected between the top of the cooling pipe and the top annular water pipe; the middle part of the first three-way valve is communicated with the bottom discharge port of the storage ring box; the top of the first three-way valve is communicated with a high-pressure air pump through an air pipe; a recovery ring box is fixedly connected to the outer periphery of the top surface of the bottom mounting ring plate; a second three-way valve is connected between the bottom of the cooling pipe and the bottom annular water pipe; the middle part of the second three-way valve is communicated with the recovery ring box through a pipeline; the abrasive inside the storage ring box enters the first three-way valve, and at the same time, the high-pressure air pump conveys high-pressure gas into the first three-way valve, the high-pressure gas carries the granular abrasive through the cooling pipe, and the granular abrasive impacts the impurities and dirt in the cooling pipe, so that the impurities and dirt are separated from the inner wall of the cooling pipe and move into the interior of the recovery ring box along with the air flow; thus, the dredging and cleaning work of the cooling pipe is completed, the situation of blockage of the cooling pipe is reduced, and the cooling and temperature reduction effect of the superconducting magnet is ensured.

[0010] Preferably, an annular air nozzle is fixedly connected to the outer periphery of the top of the first three-way valve; a plurality of spray nozzles are arranged in a surrounding manner inside the inner ring of the annular air nozzle, and the wind direction of the spray nozzles is inclined downward; a plurality of through holes are surrounded and opened on the outer periphery of the top of the first three-way valve; the annular air nozzle is sleeved on the outer periphery of the through holes; the spray nozzles pass through the through holes; the annular air nozzle is communicated with the high-pressure air pump; the plurality of spray nozzles blow into the interior of the first three-way valve, so that the air flow is fully mixed with the abrasive, thereby improving the cleaning effect of the abrasive on the inner wall of the cooling pipe.

[0011] Preferably, a connector is connected to the bottom discharge port of the storage ring box; a connecting pipe is connected between the connector and the first three-way valve; an air cavity is formed at one end of the connector away from the connecting pipe; a shunt pipe is connected to the end of the air cavity away from the connecting pipe; the other end of the shunt pipe is communicated with the annular air nozzle through an air pipe; an annular air pipe is arranged on the outer side of the bottom of the storage ring box; the shunt pipe is communicated with the annular air pipe; the annular air pipe is communicated with the high-pressure air pump.

[0012] Preferably, a plurality of sets of dispersing blades are fixedly connected around the inside of the connecting pipe; each set of dispersing blades is arranged staggeredly; the caking adhesion of the abrasive is reduced, which is beneficial to the abrasive passing through the cooling pipe for cleaning work.

[0013] Preferably, a rotating ring is slidably installed on the front surface of the inner cavity of the storage ring box; a plurality of pushing plates are bolted to the bottom surface of the rotating ring; the bottom of the pushing plate is in sliding contact with the bottom of the inner cavity of the storage ring box; the pushing plate is inclined; a plurality of notches are uniformly formed at the bottom of the pushing plate; a driving component is arranged on the outer side of the storage ring box, and the driving component drives the rotating ring to rotate.

[0014] Preferably, the driving component includes a gear ring fixedly connected to the outer ring of the rotating ring; a motor is fixedly connected to the top surface of the top mounting ring plate; a gear is fixedly connected to the bottom of the output shaft of the motor; the gear is meshed with the gear ring.

[0015] Preferably, a plurality of groups of air outlets are uniformly formed on the top surface of the recovery ring box; the plurality of groups of air outlets and the plurality of pairs of cooling pipes are alternately distributed; a filtering component is arranged between two adjacent groups of air outlets; a plurality of cleaning ports are formed around the outer ring of the recovery ring box; the cleaning ports correspond to the cooling pipes; a sealing baffle is bolted to the outside of the cleaning ports.

[0016] Preferably, the filtering component includes a housing bolted inside the recovery ring box; filter nets are fixedly connected to both sides of the housing; a through hole corresponding to the air outlet is formed in the middle top surface of the housing.

[0017] The beneficial effects of the present invention are as follows:

[0018] 1. A magnetic-controlled Czochralski single crystal device according to the present invention includes a mounting ring plate, an annular water pipe, and a cooling pipe; the coolant in the cooling system is divided into two paths. One path of the coolant is transported to an annular water pipe at the top, and then divided into multiple cooling pipes and transported downward to a corresponding annular water pipe at the bottom, and then flows back to the cooling system; the other path of the coolant is transported to another annular water pipe at the bottom, and then divided into multiple other cooling pipes and transported upward to a corresponding annular water pipe at the top, and then flows back to the cooling system; through the relative flow of the coolant in each pair of cooling pipes, and multiple pairs of cooling pipes uniformly surround the superconducting magnet, thereby reducing the temperature difference generated when the superconducting magnet is cooled, and improving the production quality of single crystal silicon.

[0019] 2. A magnetic-controlled Czochralski single crystal device according to the present invention includes a storage ring box, a first three-way valve, a recovery ring box, a second three-way valve, and a high-pressure air pump; the abrasive in the storage ring box enters the first three-way valve. At the same time, the high-pressure air pump transports high-pressure gas into the first three-way valve. The high-pressure gas carries granular abrasive through the cooling pipe. The granular abrasive impacts the impurity dirt in the cooling pipe, causing the impurity dirt to detach from the inner wall of the cooling pipe and move along with the air flow into the interior of the recovery ring box; thus, the dredging and cleaning work of the cooling pipe is completed, reducing the occurrence of blockage of the cooling pipe, and ensuring the cooling effect of the superconducting magnet. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] The present invention will be further described below with reference to the accompanying drawings.

[0021] Figure 1 is a perspective view of the present invention;

[0022] Figure 2 is an exploded view of the present invention;

[0023] Figure 3 is a perspective view of the annular water pipe and the cooling pipe in the present invention;

[0024] Figure 4 is a perspective view of the cooling pipe in the present invention;

[0025] Figure 5 is a perspective view of the first three-way valve, the connector, and the connecting pipe in the present invention;

[0026] Figure 6 is an exploded view of the first three-way valve, the connector, and the connecting pipe in the present invention;

[0027] Figure 7 is a cross-sectional view of the first three-way valve in the present invention;

[0028] Figure 8 is a cross-sectional view of the connector in the present invention;

[0029] Figure 9It is a cross-sectional view of the connecting pipe in the present invention;

[0030] Figure 10 It is a cross-sectional view of the storage ring box in the present invention;

[0031] Figure 11 It is a three-dimensional view of the push plate in the present invention;

[0032] Figure 12 It is an exploded view of the storage ring box in the present invention;

[0033] In the figure: 1, superconducting magnet; 2, mounting ring plate; 3, annular water pipe; 4, cooling pipe; 5, storage ring box; 6, first three-way valve; 7, recovery ring box; 8, second three-way valve; 9, annular air nozzle; 10, nozzle; 11, through hole; 12, connector; 13, connecting pipe; 14, air cavity; 15, shunt pipe; 16, annular air pipe; 17, dispersing blade; 18, rotating ring; 19, push plate; 20, notch; 21, gear ring; 22, motor; 23, gear; 24, air outlet; 25, cleaning port; 26, sealing baffle; 27, housing; 28, filter screen. Specific embodiments

[0034] In order to make the technical means, creative features, achieved purposes and effects of the present invention easy to understand, the present invention will be further described below in conjunction with specific embodiments.

[0035] As Figures 1 to 4 shown, a magnetic-controlled Czochralski single crystal device described in an embodiment of the present invention includes a superconducting magnet 1; the superconducting magnet 1 is arranged in a single crystal furnace; a cooling unit is sleeved on the outer periphery of the superconducting magnet 1; the cooling unit includes two mounting ring plates 2 arranged at the top and bottom of the outer ring of the superconducting magnet 1; two annular water pipes 3 are fixedly connected to the surfaces of the two mounting ring plates 2 close to each other; a plurality of pairs of cooling pipes 4 are arranged around between the two mounting ring plates 2; two ends of one cooling pipe 4 in each pair are communicated with the two annular water pipes 3 in the inner ring; two ends of the other cooling pipe 4 in each pair are communicated with the two annular water pipes 3 in the outer ring; the cooling pipe 4 is connected to an external cooling system through a pipeline; the flow directions of the coolant in the two annular water pipes 3 in each pair are opposite; during operation, the coolant in the cooling system is divided into two paths, one path of the coolant is conveyed to one annular water pipe 3 at the top, and then divided into a plurality of cooling pipes 4 and conveyed downward to a corresponding annular water pipe 3 at the bottom, and then flows back to the cooling system; the other path of the coolant is conveyed to the other annular water pipe 3 at the bottom, and then divided into a plurality of other cooling pipes 4 and conveyed upward to the corresponding annular water pipe 3 at the top, and then flows back to the cooling system; through the relative flow of the coolant in each pair of cooling pipes 4, and the plurality of pairs of cooling pipes 4 uniformly surround the superconducting magnet 1, the temperature difference generated during the cooling and temperature reduction of the superconducting magnet 1 is reduced, and the production quality of single crystal silicon is improved.

[0036] As Figures 1 to 4 shown, the cooling pipe 4 has a corrugated structure; every two of the cooling pipes 4 are arranged in parallel; by arranging the cooling pipe 4 in a corrugated shape and every two of the cooling pipes 4 in parallel, not only can the superconducting magnet 1 be comprehensively cooled down, but also the uniformity of temperature reduction is improved and the temperature difference is reduced.

[0037] As Figures 1 to 5 shown, a storage ring box 5 is fixedly connected to the outer ring of the bottom surface of the top mounting ring plate 2; granular abrasive is contained inside the storage ring box 5; a first three-way valve 6 is connected between the top of the cooling pipe 4 and the top annular water pipe 3; the middle of the first three-way valve 6 is communicated with the bottom discharge port of the storage ring box 5; the top of the first three-way valve 6 is communicated with a high-pressure air pump through an air pipe; a recovery ring box 7 is fixedly connected to the outer ring of the top surface of the bottom mounting ring plate 2; a second three-way valve 8 is connected between the bottom of the cooling pipe 4 and the bottom annular water pipe 3; the middle of the second three-way valve 8 is communicated with the recovery ring box 7 through a pipeline;

[0038] When the coolant flows in the cooling pipe 4 for a long time, scale will form inside the cooling pipe 4, affecting the flow of the coolant in the cooling pipe 4, and thus affecting the cooling effect; therefore, it is necessary to regularly clean the impurities and dirt in the cooling pipe 4;

[0039] During operation, the coolant in the cooling pipe 4 is discharged, the first three-way valve 6 is controlled to switch so that the top of the cooling pipe 4 is communicated with the storage ring box 5, and at the same time, the second three-way valve 8 is controlled to switch so that the bottom of the cooling pipe 4 is communicated with the recovery ring box 7; the abrasive inside the storage ring box 5 enters the first three-way valve 6, and at the same time, the high-pressure air pump transports high-pressure gas into the first three-way valve 6, and the high-pressure gas carries the granular abrasive through the cooling pipe 4, and the granular abrasive impacts the impurities and dirt in the cooling pipe 4, causing the impurities and dirt to break away from the inner wall of the cooling pipe 4 and move into the recovery ring box 7 along with the air flow;

[0040] When the impurities and dirt inside the cooling pipe 4 are cleaned up, the first three-way valve 6 is controlled to switch to disconnect the connection with the storage ring box 5 and cut off the transportation of the abrasive. At this time, the high-pressure gas continues to be transported so that the high-pressure gas continuously passes through the cooling pipe 4 to remove the residual abrasive in the cooling pipe 4. After that, the transportation of the high-pressure gas is stopped and the second three-way valve 8 is controlled to switch to disconnect the communication with the recovery ring box 7; finally, the coolant is transported into the cooling pipe 4;

[0041] Thus, the dredging and cleaning work of the cooling pipe 4 is completed, the situation of blockage of the cooling pipe 4 is reduced, and the cooling and temperature reduction effect of the superconducting magnet 1 is ensured.

[0042] As Figures 5 to 7As shown, an annular air nozzle 9 is fixedly connected to the outer ring at the top of the first three-way valve 6; a plurality of nozzles 10 are arranged around the inner ring of the annular air nozzle 9, and the wind direction of the nozzles 10 is inclined downward; a plurality of through holes 11 are formed around the outer ring at the top of the first three-way valve 6; the annular air nozzle 9 is sleeved on the outer periphery of the through holes 11; the nozzles 10 pass through the through holes 11; the annular air nozzle 9 is communicated with the high-pressure air pump; during operation, when the abrasive in the storage ring box 5 enters the first three-way valve 6, the high-pressure air pump pumps high-pressure gas into the annular air nozzle 9, and then blows it into the first three-way valve 6 through a plurality of nozzles 10, so that the air flow is fully mixed with the abrasive, thereby improving the cleaning effect of the abrasive on the inner wall of the cooling pipe 4.

[0043] As Figure 5 , Figure 6 and Figure 8 shown, a connector 12 is connected to the bottom discharge port of the storage ring box 5; a connecting pipe 13 is connected between the connector 12 and the first three-way valve 6; an air cavity 14 is formed at one end of the connector 12 away from the connecting pipe 13; a shunt pipe 15 is connected to the end of the air cavity 14 away from the connecting pipe 13; the other end of the shunt pipe 15 is communicated with the annular air nozzle 9 through a trachea; an annular trachea 16 is arranged on the outer side of the bottom of the storage ring box 5; the shunt pipe 15 is communicated with the annular trachea 16; the annular trachea 16 is communicated with the high-pressure air pump;

[0044] During operation, the abrasive in the storage ring box 5 falls from the bottom discharge port into the connector 12. At this time, the high-pressure air pump transports high-pressure gas into the annular trachea 16, and then shunts and transports it into the shunt pipe 15 for further shunting. One-way air flow is transported into the annular air nozzle 9, and the other-way air flow is transported into the air cavity 14 of the connector 12. The air flow in the air cavity 14 is transported into the annular air nozzle 9 along the connecting pipe 13. The air flow in the air cavity 14 pushes the abrasive falling into the connector 12 into the first three-way valve 6. At the same time, the air flow in the air cavity 14 will form a low-pressure area below the discharge port of the storage ring box 5, which is beneficial to the abrasive in the storage ring box 5 falling into the connector 12; thus, it is beneficial for the abrasive to enter the first three-way valve 6.

[0045] As Figure 5 , Figure 6 and Figure 9 shown, a plurality of groups of dispersing blades 17 are fixedly connected around the inside of the connecting pipe 13; each group of dispersing blades 17 is arranged staggered; during operation, when the abrasive passes through the connecting pipe 13, the abrasive is dispersed by a plurality of groups of dispersing blades 17, so that the abrasive is fully dispersed, reducing the agglomeration and adhesion of the abrasive, and thus facilitating the abrasive to pass through the cooling pipe 4 for cleaning work.

[0046] AsFigure 1 , Figure 2 , Figure 10 and Figure 11 As shown in Figure 10 and Figure 11 , a rotating ring 18 is slidably installed in the inner cavity of the storage ring box 5; a plurality of push plates 19 are bolted to the bottom surface of the rotating ring 18; the bottom of the push plate 19 is in sliding contact with the bottom of the inner cavity of the storage ring box 5; the push plate 19 is inclined; a plurality of notches 20 are evenly formed at the bottom of the push plate 19; a driving assembly is arranged outside the storage ring box 5, and the driving assembly drives the rotating ring 18 to rotate.

[0047] The driving assembly includes a gear ring 21 fixedly connected to the outer ring of the rotating ring 18; a motor 22 is fixedly connected to the top surface of the top mounting ring plate 2; a gear 23 is fixedly connected to the bottom of the output shaft of the motor 22; the gear 23 meshes with the gear ring 21.

[0048] During operation, when cleaning the impurities and dirt in the cooling pipe 4, the motor 22 drives the gear 23 to rotate, driving the gear ring 21 and the rotating ring 18 to rotate inside the storage ring box 5, driving a plurality of push plates 19 to move inside the storage ring box 5, and the push plates 19 push the abrasive inside the storage ring box 5 to move, so that the abrasive can fully enter the inside of the connector 12. At the same time, the push plates 19 can disperse the abrasive, reducing the caking and adhesion of the abrasive; thus ensuring the conveying efficiency of the abrasive.

[0049] As Figure 1 , Figure 2 and Figure 12 shown, a plurality of air outlets 24 are evenly formed on the top surface of the recovery ring box 7; the plurality of air outlets 24 and the plurality of pairs of cooling pipes 4 are alternately distributed; a filtering assembly is arranged between adjacent two groups of air outlets 24; a plurality of cleaning ports 25 are circumferentially formed on the outer ring of the recovery ring box 7; the cleaning ports 25 correspond to the cooling pipes 4; a sealing baffle 26 is bolted to the outside of the cleaning port 25.

[0050] The filtering assembly includes a housing 27 bolted inside the recovery ring box 7; filter nets 28 are fixedly connected to both sides of the housing 27; a through hole corresponding to the air outlet 24 is formed in the middle top surface of the housing 27.

[0051] During operation, after the high-pressure gas carries the granular abrasive through the cooling pipe 4, it enters the inside of the recovery ring box 7. The air flow passes through the filter net 28 and enters the inside of the housing 27, and then is discharged from the air outlet 24 out of the recovery ring box 7, while the abrasive and impurities and dirt remain inside the recovery ring box 7; the staff can remove the sealing baffle 26 and clean through the cleaning port 25; thus realizing the recovery work of the abrasive and impurities and dirt.

[0052] Working principle: The coolant in the cooling system is divided into two paths. One path of the coolant is transported to a circular water pipe 3 at the top, and then divided and transported to a plurality of cooling pipes 4 and sent downward to a corresponding circular water pipe 3 at the bottom, and then flows back to the cooling system; the other path of the coolant is transported to another circular water pipe 3 at the bottom, and then divided and transported to another plurality of cooling pipes 4 and sent upward to a corresponding circular water pipe 3 at the top, and then flows back to the cooling system; through the relative flow of the coolant in each pair of cooling pipes 4, and a plurality of pairs of cooling pipes 4 evenly surround the superconducting magnet 1, the temperature difference generated during the cooling and temperature reduction of the superconducting magnet 1 is reduced, and the production quality of monocrystalline silicon is improved;

[0053] The coolant flows in the cooling pipe 4 for a long time, and scale will form inside the cooling pipe 4, affecting the flow of the coolant in the cooling pipe 4, and thus affecting the cooling effect; therefore, it is necessary to regularly clean the impurities and dirt in the cooling pipe 4;

[0054] Discharge the coolant in the cooling pipe 4, control the switching of the first three-way valve 6, so that the top of the cooling pipe 4 is connected to the storage ring box 5, and at the same time, control the switching of the second three-way valve 8, so that the bottom of the cooling pipe 4 is connected to the recovery ring box 7;

[0055] The motor 22 drives the gear 23 to rotate, drives the gear ring 21 and the rotating ring 18 to rotate inside the storage ring box 5, drives a plurality of push plates 19 to move inside the storage ring box 5, and the push plates 19 push the abrasive in the storage ring box 5 to move, so that the abrasive can fully enter the inside of the connector 12, and at the same time, the push plates 19 can disperse the abrasive, reducing the caking and adhesion of the abrasive;

[0056] At the same time, the high-pressure air pump transports high-pressure gas into the inside of the annular air pipe 16, and then divides and transports it into the shunt pipe 15, and divides it again. One path of the air flow is transported into the inside of the annular air nozzle 9, and the other path of the air flow is transported into the air cavity 14 of the connector 12. The air flow in the air cavity 14 is transported to the annular air nozzle 9 along the connecting pipe 13. The air flow in the air cavity 14 pushes the abrasive falling into the inside of the connector 12 into the first three-way valve 6. At the same time, the air flow in the air cavity 14 will form a low-pressure area below the discharge port of the storage ring box 5, which is beneficial to the abrasive inside the storage ring box 5 to fall into the connector 12; when the abrasive passes through the connecting pipe 13, the abrasive is dispersed by a plurality of groups of dispersing blades 17, so that the abrasive is fully dispersed, reducing the caking and adhesion of the abrasive;

[0057] The abrasive enters into the first three-way valve 6. At the same time, high-pressure gas is delivered into the first three-way valve 6. The high-pressure gas carries the granular abrasive through the cooling pipe 4. The granular abrasive impacts the impurities and dirt in the cooling pipe 4, causing the impurities and dirt to detach from the inner wall of the cooling pipe 4 and move into the interior of the recovery ring box 7 along with the air flow. The air flow passes through the filter screen 28 and enters the interior of the housing 27, and then is discharged from the air outlet 24 out of the recovery ring box 7, while the abrasive and the impurities and dirt remain in the interior of the recovery ring box 7.

[0058] After the impurities and dirt inside the cooling pipe 4 are cleaned up, control the first three-way valve 6 to switch, disconnect the connection with the storage ring box 5, and cut off the delivery of the abrasive. At this time, continue to deliver high-pressure gas so that the high-pressure gas continuously passes through the cooling pipe 4 to remove the residual abrasive in the cooling pipe 4. After that, stop delivering the high-pressure gas and control the second three-way valve 8 to switch to disconnect the communication with the recovery ring box 7. Finally, deliver the coolant into the cooling pipe 4.

[0059] Thus, the dredging and cleaning work of the cooling pipe 4 is completed, the situation of blockage of the cooling pipe 4 is reduced, and the cooling and temperature reduction effect of the superconducting magnet 1 is ensured.

[0060] The above shows and describes the basic principles, main features and advantages of the present invention. Those skilled in the art should understand that the present invention is not limited by the above embodiments. What is described in the above embodiments and the specification only illustrates the principles of the present invention. Without departing from the spirit and scope of the present invention, the present invention will have various changes and improvements, and these changes and improvements all fall within the scope of the present invention claimed. The scope of protection claimed by the present invention is defined by the appended claims and their equivalents.

Claims

1. A magnetically controlled CZ-type single crystal pulling device, comprising a superconducting magnet (1); the superconducting magnet (1) is arranged in a single crystal furnace; and is characterized in that: A cooling unit is provided on the outer periphery of the superconducting magnet (1); the cooling unit comprises two mounting ring plates (2) arranged at the top and bottom of the outer ring of the superconducting magnet (1); two annular water pipes (3) are fixedly connected to the adjacent sides of the two mounting ring plates (2); a plurality of pairs of cooling pipes (4) are arranged around the two mounting ring plates (2); the two ends of one cooling pipe (4) in each pair are connected to the two annular water pipes (3) in the inner ring; the two ends of the other cooling pipe (4) in each pair are connected to the two annular water pipes (3) in the outer ring; the cooling pipe (4) is connected to an external cooling system via a pipeline; the flow directions of the coolant in the two annular water pipes (3) in each pair are opposite; The cooling tubes (4) are of a corrugated structure; each pair of two cooling tubes (4) are arranged in parallel.

2. A magnetically controlled CZ-type single crystal pulling device according to claim 1, characterized in that: The outer ring of the bottom surface of the mounting ring plate (2) at the top is fixedly connected to a storage ring box (5); the interior of the storage ring box (5) is filled with granular abrasives; a No. 1 three-way valve (6) is connected between the top of the cooling tube (4) and the annular water pipe (3) at the top; the middle of the No. 1 three-way valve (6) is connected to the bottom discharge port of the storage ring box (5); the top of the No. 1 three-way valve (6) is connected to a high-pressure air pump through an air pipe; the outer ring of the top surface of the mounting ring plate (2) at the bottom is fixedly connected to a recovery ring box (7); a No. 2 three-way valve (8) is connected between the bottom of the cooling tube (4) and the annular water pipe (3) at the bottom; and the middle of the No. 2 three-way valve (8) is connected to the recovery ring box (7) through a pipeline.

3. The magnetically controlled Czochralski single crystal device according to claim 2, characterized in that: The top outer ring of the No. 1 three-way valve (6) is fixedly connected with an annular air nozzle (9); the inner ring of the annular air nozzle (9) is surrounded by a plurality of nozzles (10), and the wind direction of the nozzles (10) is inclined downward; the top outer ring of the No. 1 three-way valve (6) is surrounded by a plurality of through holes (11); the annular air nozzle (9) is sleeved on the outer circumference of the through hole (11); the nozzles (10) pass through the through hole (11); and the annular air nozzle (9) is connected to the high-pressure air pump.

4. The magnetically controlled CZ-type single crystal pulling device according to claim 3, characterized in that: The bottom discharge port of the storage ring box (5) is connected to a connector (12); a connecting pipe (13) is connected between the connector (12) and the No. 1 three-way valve (6); an air cavity (14) is provided inside the connector (12) at one end away from the connecting pipe (13); a shunt pipe (15) is connected to one end of the air cavity (14) away from the connecting pipe (13); the other end of the shunt pipe (15) is connected to the annular air nozzle (9) through an air pipe; an annular air pipe (16) is provided on the outer side of the bottom of the storage ring box (5); the shunt pipe (15) is connected to the annular air pipe (16); and the annular air pipe (16) is connected to the high-pressure air pump.

5. The magnetically controlled CZ-type single crystal pulling device according to claim 4, characterized in that: A plurality of groups of dispersing blades (17) are fixedly connected around the interior of the connecting tube (13); the dispersing blades (17) of each group are arranged in an alternating manner.

6. The magnetically controlled CZ-type single crystal pulling device according to claim 2, characterized in that: A rotating ring (18) is slidably mounted in the inner cavity of the storage ring box (5); a plurality of push plates (19) are bolted to the bottom surface of the rotating ring (18); the bottom of the push plate (19) is in sliding contact with the bottom of the inner cavity of the storage ring box (5); the push plate (19) is arranged at an angle; a plurality of notches (20) are evenly arranged on the bottom of the push plate (19); a driving assembly is arranged on the outer side of the storage ring box (5), and the driving assembly drives the rotating ring (18) to rotate.

7. The magnetically controlled CZ-pull single crystal device according to claim 6, characterized in that: The driving assembly comprises a gear ring (21) fixedly connected to the outer ring of the rotating ring (18); a motor (22) is fixedly connected to the top surface of the mounting ring plate (2); a gear (23) is fixedly connected to the bottom of the output shaft of the motor (22); and the gear (23) is meshed with the gear ring (21).

8. The magnetically controlled Czochralski single crystal device according to claim 2, characterized in that: The top surface of the recovery ring box (7) is evenly provided with a plurality of groups of air outlets (24); the plurality of groups of air outlets (24) and the plurality of pairs of cooling pipes (4) are alternately distributed; a filter assembly is provided between two adjacent groups of air outlets (24); a plurality of cleaning ports (25) are provided around the outer ring of the recovery ring box (7); the cleaning ports (25) correspond to the cooling pipes (4); and a sealing baffle (26) is bolted to the outer side of the cleaning port (25).

9. The magnetically controlled CZ-pull single crystal device according to claim 8, characterized in that: The filter assembly comprises a shell (27) bolted to the inside of the recovery ring box (7); filter screens (28) are fixedly connected to both sides of the shell (27); and a through hole corresponding to the air outlet (24) is provided on the middle top surface of the shell (27).

Images