Tray assemblies for precursor delivery systems and related methods

Abstract

A tray assembly includes a plurality of trays. Each of the plurality of trays includes a first tray portion and a second tray portion, the first tray portion and the second tray portion being coupleable together by a retainer and engageable with a cam member. Depending on the orientation of the cam member, each of the plurality of trays of the tray assembly is configurable between an unfolded configuration and a folded configuration. In the folded configuration, the tray assembly is insertable into an ampoule. In the deployed configuration, the tray assembly is removable from the ampoule.

Description

Technical Field

[0001] The present disclosure relates to configurable tray assemblies for use in precursor delivery systems and related methods.

[0002] priority

[0003] This disclosure claims priority to U.S. Provisional Patent Application No. 63 / 341,832, filed on May 13, 2022, which is incorporated herein by reference. Background Art

[0004] Precursor delivery includes producing a vapor precursor from a solid precursor material contained in an ampoule. The vapor precursor is delivered downstream to a tool, such as a semiconductor processing tool and the like. Summary of the invention

[0005] Some embodiments of the present disclosure are directed to a tray assembly. In some embodiments, the tray assembly includes a first tray portion and a second tray portion. In some embodiments, the first tray portion and the second tray portion are configured to be couplable by a retainer and engageable with a cam member, so that when coupled together by the retainer, the first tray portion and the second tray portion can be configured between an unfolded configuration and a folded configuration based on the orientation of the cam member.

[0006] In some embodiments, the first tray portion includes a first bracket member portion, and the second tray portion includes a second bracket member portion. In some embodiments, when disposed at the periphery of the first bracket member portion and the second bracket member portion, the retainer couples the first bracket member portion and the second bracket member portion together to define a bracket member.

[0007] In some embodiments, the retainer comprises at least one of an elastic band, a compressible ring, a circular spring, or any combination thereof.

[0008] In some embodiments, the first tray portion includes a first trough member portion; and the second tray portion includes a second trough member portion. In some embodiments, when the first tray portion and the second tray portion are coupled together by the retainer, the first trough member portion and the second trough member portion define a trough member.

[0009] In some embodiments, the cam member is configured to align between the first slot member portion and the second slot member portion.

[0010] In some embodiments, the cam member is configurable between a first orientation and a second orientation. In some embodiments, in the first orientation, the cam member is configured to engage with the slot member. In some embodiments, in the second orientation, the cam member is configured not to engage with the slot member.

[0011] In some embodiments, in the first orientation, the cam member pushes against the slot member such that the first tray portion and the second tray portion are configured in the deployed configuration.

[0012] In some embodiments, in the second orientation, the cam member does not push against the slot member such that the first tray portion and the second tray portion are configured in the folded configuration.

[0013] In some embodiments, the cam member further comprises a locking member, wherein the locking member is configured to be insertable between the first tray portion and the second tray portion to lock the first tray portion and the second tray portion in the deployed configuration.

[0014] In some embodiments, in the folded configuration, the first tray portion and the second tray portion are configured to be supported on the locking member.

[0015] In some embodiments, at least one of the first tray portion and the second tray portion includes a plurality of slots.

[0016] In some embodiments, the cam member further includes a hollow shaft member defining a vapor passageway.

[0017] Some embodiments of the present disclosure relate to a precursor delivery system. In some embodiments, the precursor delivery system comprises an ampoule; and a tray assembly according to any combination of any embodiments disclosed herein.

[0018] In some embodiments, in the expanded configuration, the first tray portion and the second tray portion push against an inner wall surface of the ampoule to be in thermal contact with the ampoule.

[0019] In some embodiments, in the expanded configuration, the first tray portion and the second tray portion define a vapor passageway between the first tray portion and the second tray portion.

[0020] In some embodiments, in the folded configuration, the first tray portion and the second tray portion are not in thermal contact with an inner wall surface of the ampoule.

[0021] Some embodiments of the present disclosure are directed to a method. In some embodiments, the method includes the step of obtaining a tray assembly according to any combination of any embodiments disclosed herein. In some embodiments, the method includes the step of orienting the cam member so that the first tray portion and the second tray portion are configured to be in the folded configuration. In some embodiments, the method includes the step of inserting the tray assembly into an interior chamber of an ampoule. In some embodiments, the method includes the step of orienting the cam member so that the first tray portion and the second tray portion are configured to be in the unfolded configuration.

[0022] In some embodiments, the method further comprises the steps of: orienting the cam member so that the first tray portion and the second tray portion are configured in the folded configuration; and removing the tray assembly from the interior chamber of the ampoule.

[0023] Some embodiments of the present disclosure are directed to a tray. In some embodiments, the tray includes a body. In some embodiments, the body has a folded configuration and an unfolded configuration. In some embodiments, the unfolded configuration includes an opening through the body, the opening defining a passageway therethrough.

[0024] In some embodiments, the folded configuration does not include the opening through the body. BRIEF DESCRIPTION OF THE DRAWINGS

[0025] Some embodiments of the present disclosure are described herein with reference to the accompanying drawings by way of example only. With specific reference now to the accompanying drawings in detail, it is emphasized that the embodiments shown are by way of example and for the purpose of illustrative discussion of the embodiments of the present disclosure. In this regard, the description in conjunction with the accompanying drawings makes it clear to those skilled in the art how the embodiments of the present disclosure may be practiced.

[0026] Figure 1 A schematic cross-sectional view depicts a non-limiting embodiment of an ampoule 100 according to some embodiments.

[0027] Figure 2A A schematic perspective view of a first tray portion is depicted according to some embodiments.

[0028] Figure 2B A schematic perspective view depicting a second tray portion according to some embodiments.

[0029] Figure 2C Depicted is a schematic plan view of a tray assembly configured in an expanded configuration in accordance with some embodiments.

[0030] Figure 2D Depicted is a schematic plan view of a tray assembly configured in a folded configuration according to some embodiments.

[0031] Figure 2E Depicted is a schematic plan view of a cam member according to some embodiments.

[0032] Figure 3 Depicted is a schematic plan view of a cam member tool according to some embodiments.

[0033] Figure 4 A flow chart depicting a method of using a tray assembly according to some embodiments. DETAILED DESCRIPTION

[0034] Among those benefits and improvements disclosed, other objects and advantages of the present disclosure will become apparent from the following description in conjunction with the accompanying drawings. Detailed embodiments of the present disclosure are disclosed herein; however, it should be understood that the disclosed embodiments are merely illustrative of the disclosure that can be embodied in various forms. In addition, the various examples given with respect to the various embodiments of the present disclosure are intended to be illustrative rather than restrictive.

[0035] Any prior patents and publications cited herein are incorporated by reference in their entirety.

[0036] Throughout the specification and claims, the following terms have the meanings clearly associated with them herein, unless the context clearly dictates otherwise. The phrases "in one embodiment," "in an embodiment," and "in some embodiments" used herein do not necessarily refer to the same embodiment, although they may refer to the same embodiment. In addition, the phrases "in another embodiment" and "in some other embodiments" used herein do not necessarily refer to different embodiments, although they may refer to different embodiments. All embodiments of the present disclosure are intended to be combinable without departing from the scope or spirit of the present disclosure.

[0037] As used herein, the term "based on" is not exclusive and allows for being based on additional factors not described unless the context clearly dictates otherwise. In addition, throughout the specification, the meanings of "a / an" and "the" include plural references. The meaning of "in" includes "in" and "on".

[0038] Figure 1A schematic cross-sectional view of a non-limiting embodiment of an ampoule 100 according to some embodiments is depicted. The ampoule 100 contains a tray assembly 102 in an interior chamber 104 of the ampoule 100. The interior chamber 104 has an interior wall surface 106. The tray assembly 102 includes trays 108, each tray 108 being configured to contain a vaporizable precursor. Each tray 108 of the tray assembly 102 includes a portion 110 configured to be in contact (e.g., thermal contact, physical contact, etc.) with the interior wall surface 106 of the ampoule 100. The surface-to-surface contact of the portion 110 with the interior wall surface 106 enhances heat transfer from the ampoule 100 to each tray 108, and thus enhances heat transfer from each tray 108 to the vaporizable precursor on each tray 108. Various fluid flow paths are defined in the interior chamber 104 of the ampoule 100, allowing fluid to flow through the ampoule 100 upward, downward, or both. The illustrated ampoule 100 has a generally cylindrical interior chamber. However, it should be understood that the interior chamber 104 of the ampoule may have other shapes without departing from the scope of the present disclosure.

[0039] The trays 108 of the tray assembly 102 are configurable between an expanded configuration and a folded configuration. In the expanded configuration, the diameter of each tray 108 is increased by an amount sufficient to cause each portion of each tray 108 to push against the inner wall surface 106 of the ampoule 100. This radially outward expansion of each tray 108 enhances thermal contact with the inner wall surface 106 of the ampoule 100 while also serving to wedge each tray 108 and the tray assembly 102 into the interior chamber 104 of the ampoule 100. In the folded configuration, the diameter of each tray 108 is smaller than the diameter of the interior chamber 104 of the ampoule 100. This radially inward folding of each tray 108 reduces the size of the tray assembly 102 so that the tray assembly 102 can be relatively easily installed and removed from ampoules of all sizes and depths. The tray assembly 102 can thus be inserted into the interior chamber 104 of the ampoule 100 in the folded configuration, and upon insertion, the tray assembly 102 is configured in the expanded configuration to achieve thermal contact with the ampoule 100. The tray assembly 102 can then be reconfigured in the folded configuration for removal from the ampoule 100.

[0040] Figures 2A to 2D Depicting various aspects of a tray assembly 200. The tray assembly 200 includes a first tray portion 202A and a second tray portion 202B. The first tray portion 202A and the second tray portion 202B are coupleable together by a retainer 204 and engageable with a cam member 206. Depending on the orientation of the cam member 206, the tray 202 can be configured between an unfolded configuration and a folded configuration. Figure 2A A schematic perspective view of the first tray portion 202A is depicted. Figure 2B A schematic perspective view of the second tray portion 202B is depicted. Figure 2C Depicted is a schematic plan view of a tray assembly in an expanded configuration. Figure 2D Depicted is a schematic plan view of a tray assembly in a folded configuration. Figure 2E A schematic plan view of the cam member 206 is depicted. Figures 2A to 2E Various aspects of the tray assembly depicted in each of the embodiments will be discussed in more detail below.

[0041] Figure 2A A schematic perspective view of a non-limiting embodiment of the first tray portion 202A according to some embodiments is depicted. The first tray portion 202A includes a first bracket member portion 208A, a first trough member portion 210A, a first base plate 212A and a first curved wall assembly 214A. The first bracket member portion 208A and the first trough member portion 210A are generally located on or near a central vertical axis 216A. The first base plate 212A connects the first tray member portion 208A to the first curved wall assembly 214A. As shown, the first base plate 212A has an inclined portion 218A, which transitions to a non-inclined portion 220A near the periphery of the first base plate 212A. The non-inclined portion 220A is connected to the first curved wall assembly 214A extending around the entire periphery of the first base plate 212A, except that the first tray portion 202A can be coupled to the second tray portion 202B.

[0042] Figure 2B A schematic perspective view of a non-limiting embodiment of a second tray portion 202B according to some embodiments is depicted. The second tray portion 202B includes a second tray member portion 208B, a second trough member portion 210B, a second base plate 212B and a second curved wall assembly 214B. The second tray member portion 208B and the second trough member portion 210B are usually located on or near a central vertical axis 216B. The second base plate 212B connects the second tray member portion 208B to the second curved wall assembly 214B. As shown, the second base plate 212B has an inclined portion 218B, which transitions to a non-inclined portion 220B near the periphery of the second base plate 212B. The non-inclined portion 220B is connected to the second curved wall assembly 214B, and the second curved wall assembly 214B extends around the entire periphery of the second base plate 212B, except that the second tray portion 202B can be coupled to the first tray portion 202A.

[0043] exist Figures 2C to 2D, the first tray portion 202A and the second tray portion 202B are shown assembled together to obtain the tray assembly 200. When assembled together, the retainer 204 is disposed at the periphery of the first tray member portion 208A and the second tray member portion 208B. The retainer 204 may include at least one of an elastic band, a compressible ring, a circular spring, or any other similar component. Since the retainer is located at the periphery and is usually compressed, the retainer 204 applies a radially inward force sufficient to couple the first tray member portion 208A and the second tray member portion 208B together, thereby defining the tray member 208. Because the first trough member portion 210A and the second trough member portion 210B are formed in the first tray member portion 208A and the second tray member portion 208B, coupling the first tray member portion 208A and the second tray member portion 208B also defines the trough member 210. It should be understood that direct surface-to-surface contact between the two components is not necessary for the two components to be coupled or coupled together.

[0044] Figure 2E 206 according to some embodiments. Figure 2E As shown, the cam member 206 includes a cam 232 and a pin 234. Figures 2C to 2D , the cam member 206 is shown disposed between the first tray portion 202A and the second tray portion 202B and rotatably aligned with the first slot member portion 210A and the second slot member portion 210B. Due to the rotatable alignment, the cam member 206 is configurable between various orientations in which the cam 232 of the cam member 206 is engaged or not engaged with the slot member 210. For example, in Figure 2C , the cam member 206 is oriented so that the cam 232 engages with the slot member 210. By engaging in this manner, the cam 232 pushes against the slot member 210 sufficiently to allow the first tray portion 202A and the second tray portion 202B to be separated by the retainer 204 but still coupled together. The opening formed between the first tray portion 202A and the second tray portion 202B defines a fluid or vapor passage. In some embodiments, the pin 234 of the cam member 206 is used to lock the tray 202 in an expanded configuration. That is, the pin 234 of the cam member 206 is positioned or wedged between the first tray portion 202A and the second tray portion 202B, thereby locking the first tray portion 202A and the second tray portion 202B in place. Once unlocked, the cam member 206 can be rotated in either direction to configure or reconfigure the tray assembly 200 to be in a folded configuration. By rotating the cam member 206, the cam 232 disengages from the slot member 210, sufficient to allow the first tray portion 202A and the second tray portion 202B to be folded together. Figure 2DAs shown, in the folded configuration, neither the cam 232 nor the cam member 206 engages with the slot member 210, or if any one of them engages, the degree of such engagement is less than that observed in the unfolded configuration. In the folded configuration, the pin can be positioned above or below the bracket member 208.

[0045] Figure 3 A schematic plan view of a cam member tool 300 is depicted according to some embodiments. The cam member tool 300 includes a shaft 302 and a cam member 304 positioned along the length of the shaft 302. In some embodiments, the shaft 302 is hollow to define a fluid or vapor passage. Each cam member 304 includes a cam 306 and a pin 308. Each cam member 304 is configured to be rotatably aligned between slot member portions of different trays. That is, each cam member 304 can engage with slot members from different trays so that the tray assembly includes multiple trays, each tray being configurable between an expanded configuration and a folded configuration. Figure 3 As shown, the cam member tool 300 is configured with three (3) trays, for a total of up to four (4) trays. For example, a tray assembly using the cam member tool 300 may include three separate trays on each cam member 304. In the folded configuration, the cam member tool 300 is configured to support each of the three trays on the pin 308 of each cam member 304. That is, the pin 308 of each cam member 304 is positioned below each tray so that each tray rests on the pin 308. In this configuration, the tray assembly can be inserted into and removed from the ampoule. In the unfolded configuration, the cam 306 of the cam member 304 is aligned between and engaged with the groove members of each tray, so that the first tray portion and the second tray portion of each tray are separated, thereby achieving the unfolded configuration. The configuration of the trays between the unfolded and folded configurations can be performed consistently. Although the camming tool 300 is configured for a total of three (3) to four (4) pallets, it should be understood that the camming tool 300 may be configured for one (1) to one hundred (100) pallets, or any number therebetween.

[0046] Figure 4 is a flow chart of method 400 according to some embodiments. Figure 4As shown, method 400 may include one or more of the following steps in any order: step 402: obtaining a tray assembly according to any one or more embodiments disclosed herein in any combination; step 404: orienting a cam member in a first orientation such that the first tray portion and the second tray portion are configured in a folded configuration; step 406: inserting the tray assembly into an inner chamber of an ampoule; step 408: orienting the cam member in a second orientation such that the first tray portion and the second tray portion are configured in an expanded configuration; step 410: orienting the cam member in the first orientation such that the first tray portion and the second tray portion are configured in a folded configuration; and step 412: removing the tray assembly from the inner chamber of the ampoule.

[0047] Any component of the present disclosure may include a thermally conductive material. Examples of thermally conductive materials include, but are not limited to, at least one of stainless steel, silver, silver alloys, copper, copper alloys, aluminum, aluminum alloys, lead, nickel, nickel-clad, graphite, pyrolytic carbon coated graphite, silicon carbide coated graphite, boron nitride, ceramic materials, any combination thereof, any alloy thereof, or any composite thereof. In some embodiments, the tray or any portion thereof includes at least one of stainless steel, silver, silver alloys, copper, copper alloys, aluminum, aluminum alloys, lead, nickel, nickel-clad, graphite, pyrolytic carbon coated graphite, silicon carbide coated graphite, boron nitride, ceramic materials, any combination thereof, any alloy thereof, or any composite thereof. In some embodiments, the tray or any portion thereof includes at least one of graphite, nickel, stainless steel, aluminum alloy, or any combination thereof. In some embodiments, the tray or any portion thereof is coated with nickel using sputtering deposition. In some embodiments, the tray or any portion thereof is coated with graphite. In some embodiments, the graphite includes polycrystalline graphite having an amorphous carbon content of 20% to 80% by volume based on the total volume of the graphite.

[0048] The tray is configured to contain a vaporizable precursor. The vaporizable precursor may include, consist of, or consist essentially of at least one of an elemental metal, a metal halide, a metal oxyhalide, an organometallic compound, a metal-organic complex, or any combination thereof.

[0049] In some embodiments, the vaporizable precursor comprises, consists of, or consists essentially of at least one of: dimethylhydrazine, trimethylaluminum (TMA), hafnium chloride (HfCl 4 ), zirconium chloride (ZrCl 4 ), indium trichloride, indium monochloride, aluminum trichloride, titanium iodide, carbonyl tungsten, Ba(DPM) 2 、Strontium divalerylmethanoate (Sr(DPM) 2 )、TiO(DPM) 2 、Zr(DPM) 4), decaborane, octadecaborane, boron, magnesium, gallium, indium, antimony, copper, phosphorus, arsenic, lithium, sodium tetrafluoroborate, precursors containing alkyl amidine ligands, organometallic precursors, zirconium tert-butylate (Zr(t-OBu) 4 ), tetrakis(diethylamino)zirconium(Zr(Net 2 ) 4 ), tetradiethylamino hafnium (Hf(Net 2 ) 4 ), tetrakis(dimethylamino)titanium (TDMAT), tert-butyliminotris(dimethylamino)tantalum (TBTDET), penta(dimethylamino)tantalum (PDMAT), penta(ethylmethylamino)tantalum (PEMAT), tetrakis(dimethylamino)zirconium (Zr(NMe 2 ) 4 ), Hafnium tert-butylate (Hf(tOBu) 4 ), Xenon difluoride (XeF 2 ), xenon tetrafluoride (XeF 4 ), xenon hexafluoride (XeF 6 ) or any combination thereof.

[0050] In some embodiments, the vaporizable precursor comprises, consists of, or consists essentially of at least one of decaborane, hafnium tetrachloride, zirconium tetrachloride, indium trichloride, a metal organic β-diketonate complex, tungsten hexafluoride, cyclopentadienylcycloheptatrienyl-titanium (CpTiCht), aluminum trichloride, titanium iodide, cyclooctatetraenylcyclopentadienyl titanium, biscyclopentadienyl titanium diazide, trimethylgallium, trimethylindium, an alkylaluminum such as trimethylaluminum, triethylaluminum, trimethylamine alane, dimethylzinc, tetramethyltin, trimethylantimony, diethylcadmium, tungsten carbonyl, or any combination thereof.

[0051] In some embodiments, the vaporizable precursor includes elemental boron, copper, phosphorus, decaborane, gallium halide, indium halide, antimony halide, arsenic halide, gallium halide, aluminum iodide, titanium iodide, MoO 2 Cl 2 、MoOCl 4 、MoCl 5 、WCl 5 WOCl 4 、WCl 6 , cyclopentadienyl cycloheptatrienyl titanium (CpTiCht), cyclooctatetraenyl cyclopentadienyl titanium, biscyclopentadienyl titanium diazide, In(CH 3 ) 2 (hfac), dibromomethylantimony, carbonyl tungsten, metal organic β-dihydride hue complex, metal organic alkoxide complex, metal organic carboxylate complex, metal organic aryl complex, metal organic amide complex, or any combination thereof, at least one of, consisting of, or consisting essentially of. In some embodiments, the vaporizable precursor comprises MoO2 Cl 2 、MoOCl 4 , WO 2 Cl 2 WOCl 4 or at least one of any combination thereof, consisting of, or consisting essentially of.

[0052] In some embodiments, the vaporizable precursor comprises, consists of, or consists essentially of at least one source material of any type that can be liquefied by heating or dissolving in a solvent, including, for example, but not limited to, decaborane (B 10 H1 4 ), pentaborane (B 5 H 9 ), octadecaborane (B1 8 H 22 ), boric acid (H 3 BO 3 )、SbCl 3 、SbCl 5 or any combination thereof. In some embodiments, the vaporizable precursor comprises AsCl 3 , AsBr 3 , AsF 3 , AsF 5 , AsH 3 、As 4 O 6 、As 2 Se 3 m、As 2 S 2 、As 2 S 3 、As 2 S 5 、As 2 Te 3 , B 4 H 11 , B 4 H 10 , B 3 H 6 N 3 , BBr 3 , BCl 3 , BF 3 , BF 3 .O(C 2 H 5 ) 2 , BF 3 .HOCH 3 , B 2 H 6 、F 2、HF、GeBr 4 、GeCl 4 、GeF 4 、GeH 4 、H 2 、HCl、H 2 The、H 2 The、H 2 S、WF 6 、SiH 4 、SiH 2 Cl 2 、SiHCl 3 、SiCl 4 、SiH 3 Cl、NH 3 、NH 3 、Ar、Br 2 、HBr、BrF 5 、CO 2 、CO、COCl 2 、COF 2 、Cl 2 、ClF 3 、CF 4 、C 2 F 6 、C 3 F 8 、C 4 F 8 、C 5 F 8 、CHF 3 、CH 2 F 2 、CH 3 F、CH 4 、SiH 6 、He、HCN、Kr、Ne、Ni(CO) 4 、HNO 3 、NO、N 2 、NO 2 、NF 3 、N 2 O、C 8 H 24 THEIR 4 Flaw 4 、PH 3 、POCl 3 、PCl 5 、PF 3 、PFS、SbH 3 、SO 2 、SF 6 、SF 4 、Si(OC 2 H 5 )4 , C 4 H 16 Si 4 O 4 、Si(CH 3 ) 4 、SiH(CH 3 ) 3 、TiCl 4 、Xe、SiF 4 , WOF 4 、TaBr 5 、TaCl 5 、TaF 5 、Sb(C 2 H 5 ) 3 、Sb(CH 3 ) 3 、In(CH 3 ) 3 , PBr 5 , PBr 3 , RuF 5 or at least one of any combination thereof.

[0053] In some embodiments, the solvent is an organic solvent, an inorganic solvent, or any combination thereof. In some embodiments, the solvent contains arsenic, phosphorus, antimony, germanium, indium, tin, selenium, tellurium, fluorine, carbon, boron, aluminum, bromine, carbon, chlorine, nitrogen, silicon, tungsten, tantalum, ruthenium, selenium, nickel, sulfur, or any combination thereof. It should be understood that other vaporizable precursors may be used herein without departing from the present disclosure.

[0054] aspect

[0055] Various aspects are described below. It should be understood that any one or more features listed in the following aspects can be combined with any one or more other aspects.

[0056] Aspect 1. A tray assembly comprising:

[0057] a first pallet portion; and

[0058] Second tray section;

[0059] wherein the first tray portion and the second tray portion are configured to be couplable by a retainer and engageable with the cam member so that when coupled together by the retainer,

[0060] The first tray portion and the second tray portion are configurable between an expanded configuration and a folded configuration based on the orientation of the cam member.

[0061] Aspect 2. The tray assembly according to aspect 1, wherein

[0062] The first tray portion includes a first bracket member portion, and

[0063] The second tray portion includes a second bracket member portion,

[0064] Wherein when disposed on the periphery of the first bracket member portion and the second bracket member portion, the retainer couples the first bracket member portion and the second bracket member portion together, thereby defining a bracket member.

[0065] Aspect 3. The tray assembly according to any one of aspects 1 to 2, wherein the retainer comprises at least one of an elastic band, a compressible ring, a circular spring, or any combination thereof.

[0066] Aspect 4. The tray assembly according to any one of aspects 1 to 3, wherein

[0067] The first tray portion includes a first trough member portion; and

[0068] The second tray portion includes a second trough member portion,

[0069] Wherein, when the first tray portion and the second tray portion are coupled together by the retainer, the first trough member portion and the second trough member portion define a trough member.

[0070] Aspect 5. The tray assembly of aspect 4, wherein the cam member is configured to align between the first slot member portion and the second slot member portion.

[0071] Aspect 6. The tray assembly according to aspect 5,

[0072] wherein the cam member is configurable between a first orientation and a second orientation,

[0073] wherein, in a first orientation, the cam member is configured to engage with the slot member,

[0074] Wherein, in the second orientation, the cam member is configured to not engage with the slot member.

[0075] Aspect 7. The tray assembly of aspect 6, wherein in the first orientation, the cam member pushes against the slot member such that the first tray portion and the second tray portion are configured in the deployed configuration.

[0076] Aspect 8. The tray assembly of aspect 6, wherein in the second orientation, the cam member does not push against the slot member such that the first tray portion and the second tray portion are configured in a folded configuration.

[0077] Aspect 9. The tray assembly according to aspect 5, wherein the cam member further comprises

[0078] locking member,

[0079] The locking member is configured to be insertable between the first tray portion and the second tray portion to lock the first tray portion and the second tray portion in the expanded configuration.

[0080] Aspect 10. The tray assembly of aspect 9, wherein, in the folded configuration, the first tray portion and the second tray portion are configured to be supported on the locking member.

[0081] Aspect 11. The tray assembly according to any one of aspects 1 to 10, wherein at least one of the first tray portion and the second tray portion comprises a plurality of slits.

[0082] Aspect 12. The tray assembly of any one of aspects 1 to 11, wherein the cam member further comprises a hollow shaft member defining a vapor passage.

[0083] Aspect 13. A tray assembly according to any one of Aspects 1 to 12, wherein the first tray portion and the second tray portion include at least one of stainless steel, silver, silver alloy, copper, copper alloy, aluminum, aluminum alloy, lead, nickel, nickel coating, graphite, pyrolytic carbon coated graphite, silicon carbide coated graphite, boron nitride, ceramic material, any combination thereof, any alloy thereof, or any composite thereof.

[0084] Aspect 14. The tray assembly according to any one of aspects 1 to 13, wherein the first tray portion and the second tray portion include at least one of graphite, nickel, stainless steel, aluminum alloy, or any combination thereof.

[0085] Aspect 15. The tray assembly of any one of aspects 1 to 14, wherein the first tray portion and the second tray portion comprise an aluminum alloy, and wherein the first tray portion and the second tray portion are configured to contain a vaporizable precursor comprising a metal halide.

[0086] Aspect 16. The tray assembly of any one of aspects 1 to 15, wherein the first tray portion and the second tray portion are coated with nickel using sputter deposition.

[0087] Aspect 17. The tray assembly of any one of aspects 1 to 16, wherein the first tray portion and the second tray portion are coated with graphite, wherein the graphite comprises polycrystalline graphite having an amorphous carbon content of 20% to 80% by volume based on the total volume of the graphite.

[0088] Aspect 18. A precursor delivery system comprising:

[0089] Ampoules; and

[0090] 17. A pallet assembly according to any one of claims 1 to 17.

[0091] Aspect 19. The precursor delivery system according to aspect 18, wherein, in the deployed configuration, the first tray portion and the second tray portion are pushed against the inner wall surface of the ampoule to be in thermal contact with the ampoule.

[0092] Aspect 20. The precursor delivery system of aspect 18, wherein, in the deployed configuration, the first tray portion and the second tray portion define a vapor passageway between the first tray portion and the second tray portion.

[0093] Aspect 21. The precursor delivery system of aspect 18, wherein, in the folded configuration, the first tray portion and the second tray portion are not in thermal contact with the inner wall surface of the ampoule.

[0094] Aspect 22. A method comprising:

[0095] Obtaining a pallet assembly according to any one of aspects 1 to 17;

[0096] orienting the cam member so that the first tray portion and the second tray portion are configured in a folded configuration;

[0097] inserting the tray assembly into the interior chamber of the ampoule; and

[0098] The cam member is oriented such that the first tray portion and the second tray portion are configured in the deployed configuration.

[0099] Aspect 23. The method according to aspect 22, further comprising:

[0100] orienting the cam member so that the first tray portion and the second tray portion are configured in a folded configuration; and

[0101] Remove the tray assembly from the interior chamber of the ampoule.

[0102] Aspect 24. A pallet comprising:

[0103] main body,

[0104] The main body has a folded configuration and an unfolded configuration.

[0105] Wherein the deployed configuration includes an opening through the body, the opening defining a passageway therethrough.

[0106] Aspect 25. The tray of aspect 24, wherein the folded configuration does not include an opening through the body.

[0107] It should be understood that changes may be made in detail, especially in the materials of construction employed and the shape, size and arrangement of parts without departing from the scope of the present disclosure. This specification and described embodiments are examples, with the true scope and spirit of the present disclosure being indicated by the appended claims.

Claims

1. A tray assembly, comprising: first tray section; and Second tray section; wherein the first tray portion and the second tray portion are configured to be couplable by a retainer and engageable with a cam member so that when coupled together by the retainer, The first tray portion and the second tray portion are configurable between an unfolded configuration and a folded configuration based on an orientation of the cam member.

2. The tray assembly of claim 1, wherein The first tray portion includes a first bracket member portion, and The second tray portion includes a second bracket member portion, Wherein when disposed at the periphery of the first and second bracket member portions, the retainer couples the first and second bracket member portions together, thereby defining a bracket member. 3 . The tray assembly of claim 1 , wherein the retainer comprises at least one of an elastic band, a compressible ring, a circular spring, or any combination thereof.

4. The tray assembly of claim 1, wherein The first tray portion includes a first trough member portion; and The second tray portion includes a second trough member portion, in, The first and second trough member portions define a trough member when the first and second tray portions are coupled together by the retainer.

5. The tray assembly of claim 4, wherein the cam member is configured to align between the first slot member portion and the second slot member portion.

6. The tray assembly according to claim 5, wherein the cam member is configurable between a first orientation and a second orientation, in, In the first orientation, the cam member is configured to engage the slot member, Wherein, in the second orientation, the cam member is configured to not engage with the slot member.

7. The tray assembly according to claim 6, wherein: In the first orientation, the cam member pushes against the slot member such that the first and second tray portions are configured in the deployed configuration.

8. The tray assembly of claim 6, wherein: In the second orientation, the cam member does not push against the slot member such that the first and second tray portions are configured in the folded configuration.

9. The tray assembly of claim 5, wherein the cam member further comprises: locking member, The locking member is configured to be insertable between the first tray portion and the second tray portion to lock the first tray portion and the second tray portion in the expanded configuration.

10. The pallet assembly of claim 9, wherein: In the folded configuration, the first tray portion and the second tray portion are configured to be supported on the locking member.

11. The tray assembly of claim 1, wherein at least one of the first tray portion and the second tray portion comprises a plurality of slots.

12. The tray assembly of claim 1, wherein the cam member further comprises a hollow shaft member defining a vapor passageway.

13. The tray assembly of claim 1, wherein the first tray portion and the second tray portion comprise at least one of stainless steel, silver, silver alloys, copper, copper alloys, aluminum, aluminum alloys, lead, nickel, nickel coating, graphite, pyrolytic carbon coated graphite, silicon carbide coated graphite, boron nitride, a ceramic material, any combination thereof, any alloy thereof, or any composite thereof.

14. The tray assembly of claim 1, wherein the first tray portion and the second tray portion comprise at least one of graphite, nickel, stainless steel, aluminum alloy, or any combination thereof.

15. The tray assembly of claim 1, wherein the first tray portion and the second tray portion comprise an aluminum alloy, and wherein the first tray portion and the second tray portion are configured to contain a vaporizable precursor comprising a metal halide.

16. The tray assembly of claim 1, wherein the first tray portion and the second tray portion are coated with nickel using sputter deposition.

17. The tray assembly of claim 1, wherein the first tray portion and the second tray portion are coated with graphite, wherein the graphite comprises polycrystalline graphite having an amorphous carbon content of 20% to 80% by volume based on the total volume of the graphite.

18. A precursor delivery system comprising: ampoule; and The tray assembly of claim 1.

19. The precursor delivery system of claim 18, wherein In the expanded configuration, the first tray portion and the second tray portion are pushed against an inner wall surface of the ampoule to be in thermal contact with the ampoule.

20. The precursor delivery system of claim 19, wherein In the folded configuration, the first tray portion and the second tray portion are not in thermal contact with an inner wall surface of the ampoule.

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