Cold trap device and vacuum system

Abstract

The invention relates to the field of cold trap adsorption, provides a cold trap device and a vacuum system, is applied to a vacuum chamber, and comprises a mounting seat, a refrigeration part and a condensation part. The mounting base comprises a cold trap cavity, the mounting base is provided with a connector used for communicating the vacuum cavity with the cold trap cavity, the refrigeration part is arranged on the mounting base, the refrigeration part is provided with a heat conduction part, and the heat conduction part is located in the cold trap cavity; the condensation part is arranged on the mounting seat and is positioned in the cold trap cavity; wherein the refrigeration part and the condensation part are arranged independently, the condensation part comprises a heat conduction shaft connected with the heat conduction part, and a plurality of heat conduction pieces are arranged on the peripheral wall of the heat conduction shaft. Due to the fact that the condensation part and the refrigeration part are independently arranged, the design allows the condensation part to concentrate on increasing the surface area so as to improve the condensation adsorption area and the heat absorption effect, and the overall performance of the system is improved. No cooling liquid exists in the condensation part, so that the problem of internal pressure does not need to be considered.

Description

Technical Field

[0001] The invention relates to the field of cold trap adsorption, and in particular to a cold trap device and a vacuum system. Background Art

[0002] In the field of vacuum technology, improving the ultimate vacuum level of the system is a key challenge in laboratory research and industrial applications. The ultimate vacuum level refers to the lowest pressure that can be achieved in a vacuum system, which is crucial to ensure accurate measurements, effectively prevent interference from impurities, and protect sensitive equipment.

[0003] In the prior art, a cold trap device is usually installed in a vacuum system to capture and condense residual gas molecules using a low-temperature surface. These gas molecules usually have a high condensation point temperature, and they can be effectively removed from the system through a cold trap. The cold trap device in the prior art usually extends a coil into the cold trap cavity for cold trap adsorption, wherein the outer surface of the coil absorbs heat and condenses, and the inside of the coil passes through a coolant for refrigeration. The coil takes into account both refrigeration and condensation, which makes it difficult for the coil to take into account both a large heat absorption area and a high internal pressure requirement. Summary of the invention

[0004] In view of the above-mentioned shortcomings of the prior art, an object of the present invention is to provide a cold trap device and a vacuum system to improve the adsorption effect of the cold trap.

[0005] To achieve the above-mentioned and other related purposes, the present invention provides a cold trap device, which is applied to a vacuum chamber, comprising:

[0006] A mounting seat, the mounting seat comprising a cold trap cavity, and the mounting seat is provided with an interface for connecting the vacuum chamber and the cold trap cavity;

[0007] A refrigeration unit is arranged on the mounting seat, the refrigeration unit is provided with a heat conducting unit, and the heat conducting unit is located in the cold trap cavity;

[0008] A condensation unit, arranged on the mounting seat, and the condensation unit is located in the cold trap cavity;

[0009] The refrigeration part and the condensation part are independently arranged, the condensation part comprises a heat-conducting shaft connected to the heat-conducting part, and a plurality of heat-conducting sheets are arranged on the peripheral wall of the heat-conducting shaft.

[0010] In a specific embodiment of the present invention, the mounting seat is a three-way structure, comprising:

[0011] A first end tube, the refrigeration unit is arranged on the first end tube, and the heat conduction unit is located inside the first end tube;

[0012] a second end tube, the condensation portion being disposed on the second end tube, and the cold trap cavity comprising an inner chamber of the second end tube;

[0013] The third end tube, the tube mouth of the third end tube can reveal the connection area between the heat conducting part and the heat conducting shaft, and the tube mouth of the third end tube is detachably mounted with a sealing plate.

[0014] In a specific embodiment of the present invention, flanges are provided on the first end pipe and the refrigeration unit for mutual connection, and at least one of the flanges on the first end pipe and the refrigeration unit is a slip-on flange.

[0015] In a specific embodiment of the present invention, the refrigeration part includes a cooling chamber for filling cooling liquid, the heat conduction part includes a side wall of one end of the cooling chamber, and the cooling chamber is connected to a liquid inlet pipe and a liquid outlet pipe.

[0016] In a specific embodiment of the present invention, the liquid inlet pipe and the liquid outlet pipe are inserted into the interior of the cooling night cavity from one end of the cooling night cavity away from the heat conduction part, the liquid inlet pipe and the liquid outlet pipe are both straight pipes, and the length of the liquid inlet pipe is greater than the length of the liquid outlet pipe.

[0017] In a specific embodiment of the present invention, a sealing cover is arranged at intervals outside the cooling night chamber, and a vacuum state is formed between the sealing cover and the cooling night chamber.

[0018] In a specific embodiment of the present invention, one end of the cooling chamber where the heat conducting portion is located protrudes from the sealing cover to extend into the first end tube.

[0019] In a specific embodiment of the present invention, the heat conducting sheet is a circular ring-shaped sheet coaxially arranged with the heat conducting axis, and a ventilation area is provided on the heat conducting sheet.

[0020] In a specific embodiment of the present invention, a support ring is provided between adjacent heat conducting sheets, two ends of the support ring support the heat conducting sheets, and an outer peripheral surface of the support ring is in contact with the inner wall of the cold trap cavity.

[0021] In a specific embodiment of the present invention, a temperature sensor and a heating unit are provided at one end of the condensation portion away from the heat conduction portion.

[0022] The present invention also provides a vacuum system, comprising:

[0023] Vacuum chamber;

[0024] A three-way pipeline, comprising a first port, a second port and a third port, wherein the first port is in communication with the vacuum chamber and a valve is provided on the first port;

[0025] A vacuum pump, one end of which is connected to the second port, and the other end of which is connected to the mechanical pump;

[0026] A cold trap device is connected to the third port, and the cold trap device is the cold trap device as described above.

[0027] The present invention provides a cold trap device and a vacuum system. Since the condensing part and the refrigeration part are independently arranged, this design allows the condensing part to focus on increasing the surface area to improve the condensation adsorption area and the heat absorption effect, thereby improving the overall performance of the system. Since there is no coolant inside the condensing part, there is no need to consider the internal pressure problem, which simplifies the design and manufacturing process and reduces maintenance costs. BRIEF DESCRIPTION OF THE DRAWINGS

[0028] In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings required for describing the embodiments are briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without creative work.

[0029] Figure 1 is a three-dimensional diagram of a cold trap device in one embodiment of the present invention;

[0030] Figure 2 It is a disassembly schematic diagram of a cold trap device in one embodiment of the present invention;

[0031] Figure 3 is a schematic structural diagram of a condensation portion in one embodiment of the present invention;

[0032] Figure 4 Schematic diagram of the internal structure of a refrigeration unit in one embodiment of the present invention;

[0033] Figure 5 The refrigeration unit in one embodiment of the present invention is Figure 4 Sectional view of the AA plane;

[0034] Figure 6 A schematic diagram of the installation of a temperature sensor in one embodiment of the present invention;

[0035] Figure 7 is a schematic structural diagram of a vacuum system in one embodiment of the present invention;

[0036] Figure 8 FIG. 4 is a schematic diagram of temperature change at one end of the condensation portion in one embodiment of the present invention.

[0037] Explanation of the reference numerals: 10. mounting seat; 11. first end tube; 12. second end tube; 13. third end tube; 14. sealing plate; 20. refrigeration unit; 21. heat transfer unit; 22. cooling chamber; 23. liquid inlet pipe; 24. liquid outlet pipe; 25. sealing cover; 30. condensation unit; 31. heat transfer plate; 32. flange mounting surface; 33. support ring; 34. temperature sensor; 35. ventilation area; 40. vacuum chamber; 50. three-way pipe; 51. first port; 52. second port; 53. third port; 54. valve; 60. vacuum pump; 70. mechanical pump. DETAILED DESCRIPTION

[0038] The following describes the embodiments of the present invention by specific examples, and those skilled in the art can easily understand other advantages and effects of the present invention from the contents disclosed in this specification. The present invention can also be implemented or applied through other different specific embodiments, and the details in this specification can also be modified or changed in various ways based on different viewpoints and applications without departing from the spirit of the present invention. It should be noted that the following embodiments and features in the embodiments can be combined with each other without conflict.

[0039] It should be noted that the illustrations provided in the following embodiments are only used to schematically illustrate the basic concept of the present invention, and thus the illustrations only show components related to the present invention rather than being drawn according to the number, shape and size of components in actual implementation. In actual implementation, the type, quantity and proportion of each component may be changed arbitrarily, and the component layout may also be more complicated.

[0040] In existing technologies, vacuum systems are often equipped with cold traps to remove residual gases. This process relies on using a low-temperature surface to attract and condense gas molecules with a higher condensation point. In this way, the system can effectively remove impurities that may have an adverse effect on subsequent experiments or operations.

[0041] The core working principle of the cold trap is to attract and condense gas molecules by cooling a cryogenic surface (usually liquid nitrogen or other cryogenic fluids). Once these gas molecules come into contact with the cryogenic surface, their energy is insufficient to maintain the distance between the molecules, thus forming a liquid substance. This not only removes the residual high molecular weight gas, but also effectively reduces the partial pressure of the low molecular weight gas, thus reducing the pressure level of the entire system.

[0042] In order to improve the efficiency of the cold trap, a cold trap with a coil structure is often used. The coil is designed to maximize the contact surface to enhance the condensation effect, while providing the necessary low temperature through the circulating coolant (such as liquid nitrogen, liquid helium, etc.). The coolant absorbs heat outside the coil and transfers it to the external environment to achieve cooling of the coil surface.

[0043] However, since the cold trap cavity remains in a vacuum state, the inside of the coil needs to maintain a higher pressure to contain the coolant and ensure its normal circulation. The pressure difference between this positive pressure environment and the low temperature environment outside the coil poses a challenge to the physical design of the coil. Excessive positive pressure may affect the strength and life of the coil, especially for those working environments that need to withstand high pressure. Therefore, during the design process, it is necessary to consider how to optimize the coil structure to balance the requirements of the heat absorption area and the internal pressure requirements to ensure the overall safety and stability of the system. Its design is difficult and difficult to balance.

[0044] like Figure 1-8 As shown, the present invention provides a cold trap device, which is applied to a vacuum chamber 40, and includes a mounting seat 10, a refrigeration unit 20, and a condensation unit 30. The vacuum chamber 40 is a chamber in a vacuum system with a vacuum state, and the vacuum chamber 40 can be a pressure vessel.

[0045] The mounting base 10 includes a cold trap cavity, and an interface for connecting the vacuum chamber 40 and the cold trap cavity is provided on the mounting base 10. The mounting base 10 serves as the basic platform of the entire cold trap device, and it is responsible for fixing and supporting the refrigeration part 20 and the condensation part 30, while ensuring its stable installation in the vacuum chamber 40. The mounting base 10 needs to have good mechanical strength and sealing to prevent external air from penetrating into the vacuum chamber 40 and destroying its vacuum state. In addition, in order to ensure seamless connection with the vacuum chamber 40, the mounting base 10 should be designed with a sealing interface, and an airtight connection with the chamber is achieved through precise docking.

[0046] The refrigeration unit 20 is arranged on the mounting seat 10, and the refrigeration unit 20 is provided with a heat conducting unit 21, and the heat conducting unit 21 is located in the cold trap cavity. The refrigeration unit 20 is the core functional module of the cold trap device, and its main task is to provide a sufficiently low temperature environment through the heat conducting unit 21 so that the condensing unit 30 can efficiently capture and condense gas molecules. The heat conducting unit 21 is usually made of high-efficiency heat-conducting materials, such as copper, aluminum, etc., preferably oxygen-free copper, to ensure that the cold is quickly and evenly distributed to the entire refrigeration area. The design of the refrigeration unit 20 also needs to consider the selection of its cooling source, such as using liquid nitrogen, liquid helium or by external refrigeration equipment to supply cold. In order to improve energy efficiency, the refrigeration unit 20 may be integrated with an automatic control system to adjust the cooling intensity according to the real-time needs of the condensing unit 30.

[0047] The condensation section 30 is disposed on the mounting base 10, and the condensation section 30 is located in the cold trap cavity. The condensation section 30 is directly located in the cold trap cavity, and captures and condenses the gas molecules escaping from the vacuum chamber 40 through the low-temperature surface. In order to improve the condensation efficiency, the condensation section 30 may include a complex surface structure or a special coating, such as a micron-level rough surface, to increase the contact area between the gas molecules and the low-temperature surface and promote the condensation process. The size and shape of the condensation section 30 must also be considered when designing to match the specific size of the cold trap cavity and the gas discharge characteristics to ensure maximum condensation efficiency.

[0048] The refrigeration unit 20 and the condensation unit 30 are independently arranged, and the condensation unit 30 includes a heat-conducting shaft connected to the heat-conducting unit 21, and a plurality of heat-conducting sheets 31 are arranged on the peripheral wall of the heat-conducting shaft. By increasing the number and length of the heat-conducting sheets 31, the surface area of ​​the condensation unit 30 is enlarged, thereby enhancing the condensation efficiency. A larger surface area means that more gas molecules can be condensed, which improves the ability to remove gas pollutants per unit time. The heat-conducting sheets 31 not only help to accelerate heat exchange, but also form more condensation surfaces, which is crucial for absorbing gas molecules. The optimized adsorption area can more effectively capture and condense gas molecules escaping from the vacuum chamber 40. The direct connection between the heat-conducting shaft and the refrigeration unit 20, as well as the design of the heat-conducting sheets 31, are intended to maximize the heat absorption capacity and ensure that the cold generated by the refrigeration unit 20 can be quickly transferred to the part that needs to be cooled. Since there is no coolant inside the condensation unit 30, this avoids the common problem of coolant leakage, simplifies the design complexity and manufacturing difficulty. In addition, there is no need for frequent liquid level monitoring and replenishment, which greatly reduces maintenance costs and operational risks.

[0049] like Figure 1 , 2 As shown, the mounting seat 10 is a three-way structure, including a first end tube 11, a second end tube 12 and a third end tube 13.

[0050] The refrigeration unit 20 is disposed on the first end tube 11 , and the heat conduction unit 21 is located inside the first end tube 11 .

[0051] The condensation unit 30 is disposed on the second end tube 12 , and the cold trap cavity includes an inner chamber of the second end tube 12 .

[0052] The tube mouth of the third end tube 13 can reveal the connection area between the heat-conducting part 21 and the heat-conducting shaft, and the tube mouth of the third end tube 13 is detachably installed with a sealing plate 14. The third end tube 13 and the second end tube 12 are coaxially arranged, and the third end tube 13 and the second end tube 12 can be considered as two sections of the same tube, and the axis of the first end tube 11 is perpendicular to the axis of the third end tube 13 and the second end tube 12. The third end tube 13 can display the connection area between the heat-conducting part 21 and the heat-conducting shaft. This design allows the outside world to observe or maintain these key components. At the same time, the tube mouth of the third end tube 13 is detachably installed with a sealing plate 14, which not only facilitates daily maintenance and inspection, but also ensures good sealing of the system when not in use, preventing external impurities from entering and affecting system performance.

[0053] During installation, the refrigeration unit 20 and the condensation unit 30 are installed first, and then the heat conduction unit 21 and the heat conduction shaft are connected from the pipe mouth of the third end pipe 13, and then the sealing plate 14 is installed. The end of the heat conduction shaft is provided with a flange mounting surface 32, and the heat conduction unit 21 includes a connecting plate, and the connecting plate and the flange mounting surface 32 are connected by bolts. Bolt compression requires flat washers, elastic washers, and flat washers to be placed under the nut in order to prevent the threads from loosening due to thermal expansion and contraction of the material.

[0054] like Figure 1 , 2 As shown, the first end tube 11 and the refrigeration unit 20 are both provided with flanges for mutual connection, and at least one of the flanges on the first end tube 11 and the refrigeration unit 20 is a slip-on flange. The rotatable feature of the slip-on flange is utilized to ensure that the connecting plate and the flange mounting surface 32 can fit well. Each end flange of the mounting seat 10 is a CF flange.

[0055] like Figure 4 , 5 As shown, the refrigeration part 20 includes a cooling chamber 22 for filling cooling liquid, and the heat conduction part 21 includes a side wall of one end of the cooling chamber 22 . The cooling chamber 22 is connected with a liquid inlet pipe 23 and a liquid outlet pipe 24 .

[0056] The design of the refrigeration unit 20 adopts a circulating flow of coolant, and the core element is the cooling chamber 22. The cooling chamber 22 is a closed space for containing coolant, and is designed to provide an efficient heat exchange environment. When the coolant passes through the cooling chamber 22, it can absorb and take away the heat generated by external components, thereby achieving the purpose of refrigeration. A heat conducting part 21 is provided on the side wall at one end of the cooling chamber 22, that is, at the connection point of the heat conducting part 21. This design makes it possible for direct contact between the cooling chamber 22 and external components that need to exchange heat, thereby realizing the effective transfer of heat energy. In this way, after the coolant in the cooling chamber 22 is heat exchanged, the heat can be transferred from the external components and continue to be cooled through the circulation system.

[0057] like Figure 4 As shown, the liquid inlet pipe 23 and the liquid outlet pipe 24 are inserted into the interior of the cooling night chamber 22 from the end of the cooling night chamber 22 away from the heat conducting part 21. The liquid inlet pipe 23 and the liquid outlet pipe 24 are both straight pipes, and the length of the liquid inlet pipe 23 is greater than the length of the liquid outlet pipe 24. The longer liquid inlet pipe 23 is closer to the heat conducting part 21, and the shorter liquid outlet pipe 24 is away from the heat conducting part 21. The temperature of the liquid inlet pipe 23 is usually lower than that of the liquid outlet pipe 24. The liquid inlet pipe 23 is placed at the end away from the heat conducting part 21 and inserted into the cooling night chamber 22, while the liquid outlet pipe 24 is located at the end close to the heat conducting part 21. This layout is to ensure that the liquid can first contact and absorb the heat generated by the heat conducting part 21, and then diffuse and evenly distribute the heat in the entire cooling night chamber 22 as the liquid flows.

[0058] like Figure 4 , 5 As shown, a sealing cover 25 is arranged at intervals on the outside of the cold night cavity 22, and a vacuum state is formed between the sealing cover 25 and the cold night cavity 22. In the vacuum space between the sealing cover 25 and the cold night cavity 22, there are no gas molecules as a heat conduction medium, thereby greatly reducing the loss of heat energy through heat conduction. Heat conduction is the process of direct heat transfer within an object or between different objects, and the vacuum state eliminates this conduction path. The vacuum layer can also effectively isolate thermal radiation, which is a way for an object to emit and receive energy in the form of electromagnetic waves. The gas density in a vacuum is extremely low, and it has almost no ability to absorb and reflect thermal radiation, thereby reducing the energy loss caused by thermal radiation.

[0059] like Figure 4 , 5 As shown, one end of the cold night chamber 22 where the heat conducting part 21 is located protrudes from the sealing cover 25 to extend into the first end tube 11. In this way, the distance between the cold night chamber 22 and the condensing part 30 can be shortened, thereby shortening the heat transfer path. By shortening the distance between the cold night chamber 22 and the condensing part 30, the heat transfer path can be significantly reduced. This means that heat can be transferred from the condensing part 30 to the cold night chamber 22 more quickly and efficiently, thereby improving the thermal efficiency of the entire system. Especially in applications where rapid cooling is required, this design can better meet the needs. Since the cold night chamber 22 is a complete chamber and does not require a large heat absorption area, the cold night chamber 22 is a complete chamber, and its design reduces the dependence on a large area of ​​heat absorption surface. This not only simplifies the structural design, but also reduces the manufacturing and maintenance costs. Since the cold night chamber 22 can effectively withstand the internal positive pressure, even if one end of it extends into the cold trap chamber, it can still maintain good structural strength and stability, thereby improving the safety and reliability of the system.

[0060] like Figure 3As shown, the heat conducting sheet 31 is a circular sheet coaxially arranged with the heat conducting shaft, and a ventilation area 35 is provided on the heat conducting sheet 31. The circular heat conducting sheet 31 can provide a larger area of ​​heat exchange interface, promoting the conduction of heat from the heat conducting shaft to the surrounding medium. The existence of the ventilation area 35 can further optimize the airflow, help effectively dissipate heat, and thus improve the overall heat conduction efficiency. The ventilation area 35 can ensure that each heat conducting sheet 31 can play a role.

[0061] like Figure 2 As shown, a support ring 33 is provided between adjacent heat conducting sheets 31, and the heat conducting sheets 31 are supported at both ends of the support ring 33, and the outer peripheral surface of the support ring 33 is attached to the inner wall of the cold trap cavity. The setting of the support ring 33 provides necessary support for the heat conducting sheet 31 to ensure that it will not be deformed or displaced due to temperature changes or other factors during operation. This structural stability can improve the reliability and durability of the entire system. The support ring 33 can be customized according to the size and shape of different heat conducting sheets 31, making the overall design more flexible and adaptable to various working conditions. This adaptability allows the system to maintain good performance in a variety of application scenarios.

[0062] like Figure 6 As shown, a temperature sensor 34 and a heating unit are provided at one end of the condensation part 30 away from the heat transfer part 21. The temperature sensor 34 (such as a CF electrode and a thermocouple feedthrough) can monitor the temperature of the blades at one end of the condensation part 30 away from the heat transfer part 21 in real time. Figure 8 The temperature change diagram of the blade at one end of the condensation section 30 away from the heat conducting section 21 is shown to ensure that the system operates at the optimal working temperature. The heating unit can be a heating wire. Before the device is used, the blades are baked using electrodes and heating wires to effectively remove water vapor on the blades. This process can not only improve the performance of the condensation section 30, but also avoid the decrease in condensation efficiency or damage to the equipment due to water vapor. The temperature sensor 34 is connected to the condensation section 30 through multiple flanges.

[0063] like Figure 7 As shown, the present invention also provides a vacuum system, including a vacuum chamber 40, a three-way pipeline 50, a vacuum pump 60 and the above-mentioned cold trap device. The third port 53 is connected to the mounting base 10 of the cold trap device and communicates with the cold trap cavity therein.

[0064] The three-way pipeline 50 includes a first port 51, a second port 52 and a third port 53. The first port 51 is connected to the vacuum chamber 40. The first port 51 is provided with a valve 54. The valve 54 can be a gate valve, a ball valve or a solenoid valve. The function of the valve 54 is to control the inlet and outlet of the gas to ensure that the chamber is operated in the required state.

[0065] One end of the vacuum pump 60 is connected to the second port 52, and the other end of the vacuum pump 60 is connected to the mechanical pump 70. The vacuum pump 60 is used to reduce the pressure in the vacuum chamber 40 and remove the gas in the chamber to achieve a vacuum environment. Common vacuum pumps 60 include dry vacuum pumps 60, oil-sealed vacuum pumps 60, vortex pumps, etc. During the operation of the system, the mechanical pump 70 can handle a large volume of gas, and the vacuum pump 60 is responsible for maintaining a high vacuum state. The combination of the two ensures the stable operation of the system at different stages.

[0066] In summary, the present invention provides a cold trap device and a vacuum system. Since the condensing section 30 and the refrigerating section 20 are independently arranged, this design allows the condensing section 30 to focus on increasing the surface area to improve the condensation adsorption area and the heat absorption effect, thereby improving the overall performance of the system. Since there is no coolant inside the condensing section 30, there is no need to consider the internal pressure problem, which simplifies the design and manufacturing process and reduces maintenance costs.

[0067] The above embodiments are merely illustrative of the principles and effects of the present invention, and are not intended to limit the present invention. Anyone familiar with the art may modify or alter the above embodiments without departing from the spirit and scope of the present invention. Therefore, all equivalent modifications or alterations made by a person of ordinary skill in the art without departing from the spirit and technical concept disclosed by the present invention shall still be covered by the claims of the present invention.

[0068] In the description herein, many specific details, such as examples of components and / or methods, are provided to provide a complete understanding of embodiments of the present invention. However, those skilled in the art will recognize that embodiments of the present invention may be practiced without one or more of the specific details or with other devices, systems, components, methods, components, materials, parts, etc. In other cases, well-known structures, materials, or operations are not specifically shown or described in detail to avoid obscuring aspects of embodiments of the present invention.

[0069] References throughout this specification to "one embodiment," "an embodiment," or "a specific embodiment" mean that a particular feature, structure, or characteristic described in connection with the embodiment is included in at least one embodiment of the invention, and not necessarily in all embodiments. Thus, various appearances of the phrases "in one embodiment," "in an embodiment," or "in a specific embodiment" in different places throughout this specification do not necessarily refer to the same embodiment. In addition, the particular features, structures, or characteristics of any specific embodiment of the invention may be combined with one or more other embodiments in any suitable manner. It should be understood that other variations and modifications of the embodiments of the invention described and illustrated herein may be possible in light of the teachings herein and are to be considered part of the spirit and scope of the invention.

[0070] It should also be understood that one or more of the elements shown in the figures may also be implemented in a more separate or more integrated manner, or even removed because they are inoperable in certain circumstances or provided because they may be useful depending on the application.

[0071] In addition, unless otherwise explicitly indicated, any marking arrows in the drawings should be regarded as exemplary only and not limiting. In addition, unless otherwise indicated, the term "or" used herein is generally intended to mean "and / or". In the case where the term is not clear because it is anticipated that the ability to separate or combine is provided, the combination of components or steps will also be regarded as indicated.

[0072] As used in the description herein and throughout the claims that follow, "a", "an", and "the" include plural references unless otherwise indicated. Likewise, as used in the description herein and throughout the claims that follow, the meaning of "in" includes "in" and "on" unless otherwise indicated.

[0073] The above description of the illustrated embodiments of the present invention (including the contents described in the Abstract) is not intended to be an exhaustive list or to limit the present invention to the precise form disclosed herein. Although specific embodiments of the present invention and examples of the present invention are described herein for illustrative purposes only, various equivalent modifications are possible within the spirit and scope of the present invention as will be recognized and appreciated by those skilled in the art. As noted, these modifications may be made to the present invention in accordance with the above description of the embodiments described in the present invention, and these modifications will be within the spirit and scope of the present invention.

[0074] Systems and methods have been generally described herein as details that aid in understanding the present invention. In addition, various specific details have been given to provide an overall understanding of embodiments of the present invention. However, those skilled in the relevant art will recognize that embodiments of the present invention may be practiced without one or more of the specific details, or may be practiced using other devices, systems, accessories, methods, components, materials, parts, etc. In other cases, well-known structures, materials, and / or operations are not specifically shown or described in detail to avoid confusion with various aspects of embodiments of the present invention.

[0075] Thus, although the invention has been described herein with reference to specific embodiments thereof, freedom of modification, various changes and substitutions are also within the foregoing disclosure, and it should be understood that in some cases, some features of the invention will be employed without the corresponding use of other features without departing from the scope and spirit of the proposed invention. Thus, many modifications may be made to adapt a particular environment or material to the essential scope and spirit of the invention. The invention is not intended to be limited to the specific terms used in the claims below and / or the specific embodiments disclosed as the best mode contemplated for carrying out the invention, but the invention will include any and all embodiments and equivalents falling within the scope of the appended claims. Thus, the scope of the invention will be determined solely by the appended claims.

Claims

1. A cold trap device, characterized in that: Applications in vacuum chambers, including: A mounting seat, the mounting seat comprising a cold trap cavity, and the mounting seat is provided with an interface for connecting the vacuum chamber and the cold trap cavity; A refrigeration unit is arranged on the mounting seat, the refrigeration unit is provided with a heat conducting unit, and the heat conducting unit is located in the cold trap cavity; A condensation unit, arranged on the mounting seat, and the condensation unit is located in the cold trap cavity; The refrigeration part and the condensation part are independently arranged, the condensation part comprises a heat-conducting shaft connected to the heat-conducting part, and a plurality of heat-conducting sheets are arranged on the peripheral wall of the heat-conducting shaft.

2. The cold trap device according to claim 1, characterized in that The mounting seat is a three-way structure, comprising: A first end tube, the refrigeration unit is arranged on the first end tube, and the heat conduction unit is located inside the first end tube; a second end tube, the condensation portion being disposed on the second end tube, and the cold trap cavity comprising an inner chamber of the second end tube; The third end tube, the tube mouth of the third end tube can reveal the connection area between the heat conducting part and the heat conducting shaft, and the tube mouth of the third end tube is detachably mounted with a sealing plate.

3. The cold trap device according to claim 2, characterized in that The first end pipe and the refrigeration unit are both provided with flanges for mutual connection, and at least one of the flanges on the first end pipe and the refrigeration unit is a slip-on flange.

4. The cold trap device according to claim 2, characterized in that: The refrigeration part comprises a cooling chamber for filling cooling liquid, the heat conduction part comprises a side wall of one end of the cooling chamber, and the cooling chamber is connected with a liquid inlet pipe and a liquid outlet pipe.

5. The cold trap device according to claim 4, characterized in that: The liquid inlet pipe and the liquid outlet pipe are inserted into the interior of the cooling night chamber from one end of the cooling night chamber away from the heat conduction part. The liquid inlet pipe and the liquid outlet pipe are both straight pipes, and the length of the liquid inlet pipe is greater than that of the liquid outlet pipe.

6. The cold trap device according to claim 4, characterized in that: A sealing cover is arranged at intervals outside the cold night chamber, and a vacuum state is formed between the sealing cover and the cold night chamber.

7. The cold trap device according to claim 6, characterized in that: One end of the cooling chamber where the heat conducting part is located protrudes from the sealing cover to extend into the first end tube.

8. The cold trap device according to claim 1, characterized in that: The heat conducting sheet is a circular ring sheet coaxially arranged with the heat conducting axis, and a ventilation area is provided on the heat conducting sheet.

9. The cold trap device according to claim 8, characterized in that: A support ring is arranged between adjacent heat conducting sheets, the two ends of the support ring support the heat conducting sheets, and the outer peripheral surface of the support ring is attached to the inner wall of the cold trap cavity.

10. The cold trap device according to claim 1, characterized in that: A temperature sensor and a heating unit are disposed at one end of the condensing portion away from the heat conducting portion.

11. A vacuum system, characterized in that: include: Vacuum chamber; A three-way pipeline, comprising a first port, a second port and a third port, wherein the first port is in communication with the vacuum chamber and a valve is provided on the first port; A vacuum pump, one end of which is connected to the second port, and the other end of which is connected to the mechanical pump; A cold trap device is connected to the third port, and the cold trap device is the cold trap device according to any one of claims 1 to 10.

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