Automatic packaging system for semiconductor photoresist containers

Abstract

The invention discloses an automatic packaging system for semiconductor photoresist containers, belonging to the technical field of semiconductor equipment, and comprising: a conveying line, which is horizontally erected on the ground, and a plurality of transmission parts are distributed on the conveying line, and each transmission part horizontally transmits container bottles that have passed air leakage detection one by one; a cleaning tank, which is arranged on one side of the conveying line; a baffle plate, which is installed on the conveying line; an inner brush unit, which is fixed on the driving seat and slides along a frame with the driving seat; a draining mechanism, which is arranged on the conveying line behind a station located at the cleaning tank; a glue injection packaging mechanism, which is arranged on the conveying line and behind a station located at the draining mechanism, and the glue injection packaging mechanism quantitatively injects semiconductor photoresist into each container bottle; in the invention, a unified standard brushing action and a strong brushing action can be adopted to fully brush the container bottles, so as to ensure that the stains at the corresponding positions in each container bottle can be completely removed.

Description

Technical Field

[0001] The invention belongs to the technical field of semiconductor equipment, in particular to an automatic packaging system for semiconductor photoresist containing containers. Background Art

[0002] The semiconductor industry is one of the core areas of modern science and technology, involving chip manufacturing, electronic component production and other aspects. In the semiconductor manufacturing process, the photolithography process is a crucial step. Photoresist is a sensitive material used in the photolithography process to form fine patterns on silicon wafers. The quality of photoresist directly affects the performance and reliability of the final chip. Photoresist is usually stored in a dedicated container to ensure its stability and purity during transportation and use. At present, with the rapid development of the semiconductor industry, the demand for photoresist is increasing, and the automatic packaging system for photoresist is becoming more and more perfect, which can significantly increase the packaging speed and improve production efficiency; but these containers must have high cleanliness and sealing, and most packaging systems are limited to high-pressure water jet washing for cleaning special containers. Although it has a certain cleaning effect, it is impossible to perform corresponding specialized cleaning for different stains in different containers. Only a unified standardized cleaning method is used, which is easy to cause stains to remain in the container; at the same time, the brushes used in the cleaning process of most equipment have cleaning dead corners, and there will be scratches in the container.

[0003] Therefore, it is necessary to provide an automatic packaging system for semiconductor photoresist containers to solve the problems raised in the above background technology. Summary of the invention

[0004] To achieve the above object, the present invention provides the following technical solution: an automatic packaging system for semiconductor photoresist containers, comprising:

[0005] The conveying line is horizontally erected on the ground, and a plurality of conveying parts are distributed on the conveying line, and each conveying part horizontally conveys the container bottles that have passed the gas leakage test one by one;

[0006] A cleaning tank is arranged on one side of the conveying line, and a frame is suspended and fixed above the conveying line and at the position of the cleaning tank, and a driving seat is slidably mounted on the frame;

[0007] A baffle plate installed on the conveying line, the baffle plate is used to divide the container bottles on the conveying line into a group according to a predetermined number;

[0008] An inner brush unit is fixed on the driving seat and slides along the frame with the driving seat, and the inner brush unit simultaneously grabs a plurality of container bottles in a group and sends them into the cleaning tank so that the container bottles are rinsed in the cleaning tank;

[0009] A draining mechanism is arranged on the conveying line and located behind the station of the cleaning tank, and the draining mechanism uses hot air to drain each group of container bottles on the conveying line, thereby removing residual water stains inside and outside the container bottles;

[0010] The glue injection packaging mechanism is arranged on the conveying line and is located behind the station of the draining mechanism. The glue injection packaging mechanism quantitatively injects semiconductor photoresist into each container bottle, and packages and conveys the container bottles that have completed the injection operation by heat sealing and capping;

[0011] The inner brush unit comprises:

[0012] The main frame has vertically arranged guide rails symmetrically fixed on both sides thereof, and a slider is slidably mounted on the guide rails;

[0013] A connecting frame is horizontally arranged below the main frame, and two ends of the connecting frame are respectively fixed to the sliding blocks;

[0014] The hook plates are arranged in a plurality, one end of each of the hook plates is rotatably connected to the connecting frame, and a fixing plate is horizontally fixed between the hook plates;

[0015] An electric telescopic rod is symmetrically connected to the connecting frame, and the telescopic ends of the electric telescopic rod are correspondingly hinged to the hook plates on both sides;

[0016] A brushing component is arranged corresponding to each of the hook plates, and each of the brushing components is horizontally fixed on the other end of the hook plate; a visual scanning unit is arranged on the conveying line and at the position of each transmission part, and the visual scanning unit uses a high-definition camera to perform internal inspection on the container bottles sent into each transmission part, and identifies and obtains the location of the stain points of each container bottle; the brushing component preferentially adopts a standard brushing action to brush the inner wall of each container bottle based on the shape and specification of each container bottle, and then adopts an appropriate strong brushing action to perform targeted brushing on the stain point position of each container bottle.

[0017] Preferably, a plurality of vertically arranged roller brushes are evenly distributed in the cleaning tank, each of the roller brushes is rotatably connected in the cleaning tank, and the plurality of roller brushes cooperate with each other to scrub the outer surface of the container bottle.

[0018] Preferably, the scrubbing assembly comprises:

[0019] A fixed cylinder, the interior of which is rotatably connected to an outer shaft tube through the center of a bearing, a shaft disc is coaxially fixed to one side of the fixed cylinder, a connecting sleeve is fixed on the shaft disc, and the center of the outer shaft tube is inserted into the connecting sleeve;

[0020] Expansion plates are circumferentially distributed on the periphery of the connecting sleeve, a plurality of connecting rods are hinged on the connecting sleeve, and each of the expansion plates is connected to the connecting sleeve through two parallel connecting rods;

[0021] A clamp ring is slidably connected to the outer shaft tube, a plurality of support rods are hinged on the outer wall of the clamp ring, and one end of the support rod is connected to the connecting rod;

[0022] A sliding sleeve is slidably connected to the outside of the shaft disc in a concentric manner, and one side of the sliding sleeve is fixed to the clamp ring through a plurality of inner rods;

[0023] The molding cylinder is fixed at one end of the outer shaft tube, and a sponge sleeve is detachably mounted on the outside of the molding cylinder.

[0024] Preferably, a mounting groove is provided on one end surface of each expansion plate, and a base plate is detachably mounted on the expansion plate through the mounting groove, and each expansion plate is supported at the bottle mouth of the container bottle by the base plate.

[0025] A push rod is rotatably connected outside the shaft disc, one end of which is in abutment contact with the sliding sleeve, and a fine-tuning telescopic rod is hinged outside the fixed cylinder, one end of which is hinged with the push rod.

[0026] Preferably, the thickness of two of the base plates on opposite sides of the connecting sleeve are set to the maximum and the minimum, and the thickness of the other base plates are the same, so that when each expansion plate support is at the bottle mouth of the container bottle, the outer shaft tube extends eccentrically into the container bottle.

[0027] Preferably, an expansion and contraction airbag is embedded in the sponge cover, and the expansion and contraction airbag can adjust the expansion and contraction of the sponge cover under air pressure regulation, so that the sponge cover is completely supported in the container bottle;

[0028] A sealing chamber is provided in the molding cylinder, and the sealing chamber is connected with the expansion and contraction air bag through multiple air guide tubes; an air guide sleeve is coaxially fixed on the side of the fixed cylinder away from the shaft disc, and the air guide sleeve sealing sleeve is arranged on the outer shaft tube, and an air supply pipe is connected to the outside of the air guide sleeve, and a first air guide hole is opened on the outer shaft tube, and the air supply pipe adjusts the air pressure of the sealing chamber through the first air guide hole.

[0029] Preferably, a plurality of axial holes are distributed on the side wall of the molding tube, and a top support block is arranged in each of the axial holes, and the top support block is radially slidably connected to the molding tube through the axial hole, and an inner spring is connected between each of the top support blocks and the molding tube, so that the top support block can be slid inwardly retracted on the molding tube through the inner spring without external force;

[0030] An air cavity is provided in the molding tube, and the air cavity is connected to each of the axial holes. Two pistons are slidably connected in the molding tube; an inner tube is slidably connected in the outer axial tube, and the two pistons are rotatably connected to the inner tube, and an air flow bin is formed between the two pistons. An air supply hole is provided on the inner tube, and the air supply hole is connected to the air flow bin.

[0031] Preferably, an airflow disk is axially slidably provided on one side of the fixed cylinder away from the shaft disk, one end of the inner tube is connected to the airflow disk, a second air guide hole is provided on the inner tube, and the second air guide hole is sealed and connected to the airflow disk;

[0032] A driving part is arranged outside the fixed cylinder, and a telescopic end of the driving part is connected to the airflow disk.

[0033] Preferably, the driving unit drives the two pistons on the inner tube to slide axially along the air cavity. At this time, the airflow bin is connected to the axial hole on the air cavity, and the second air guide hole adjusts the air pressure of each axial hole through the airflow bin, so that the top support block in the axial hole slides out.

[0034] Compared with the prior art, the present invention has the following beneficial effects:

[0035] The photoresist-containing containers of the present invention can be automatically packaged and transported one by one through a conveying line, and the visual sensor can perform internal inspection before the container bottles enter the cleaning station, so as to identify the corresponding stain residue points of each container bottle, and then the multiple container bottles in a group are taken to the cleaning tank by the internal brush unit, and the container bottles are immersed in the cleaning tank, and the internal brush unit can use a brushing component to directly clean the inner wall of the container bottle without the need for secondary or multiple transfers, thereby improving the cleaning efficiency; and during the cleaning process, the brushing component can first use a unified standard brushing action to brush the inner wall of each container bottle to quickly remove most of the surface stains, and then use an appropriate strong brushing action to perform targeted brushing on the stain point position of each container bottle, ensuring that the stains at the corresponding position in each container bottle can be completely removed, thereby ensuring the high cleanliness of the container bottle. BRIEF DESCRIPTION OF THE DRAWINGS

[0036] Figure 1 It is a schematic diagram of the overall system flow of the present invention;

[0037] Figure 2 It is a structural schematic diagram of the inner brush unit in the present invention;

[0038] Figure 3 It is a structural schematic diagram of the brushing component in the present invention;

[0039] Figure 4 for Figure 2 A schematic diagram of the structure enlargement in the middle;

[0040] Figure 5 It is a schematic diagram of the structure of the molding tube and the sponge sleeve in the present invention;

[0041] Figure 6 for Figure 5 Enlarged schematic diagram of the structure at point B in the middle.

[0042] In the figure: 1. conveying line; 11. transmission part; 12. cleaning tank; 13. frame; 14. baffle plate; 15. drain mechanism; 16. injection packaging mechanism; 17. roller brush; 2. inner brush unit; 21. main frame; 22. slider; 23. connecting frame; 24. hook plate; 25. fixed plate; 26. electric telescopic rod; 3. brushing assembly; 31. fixed cylinder; 32. outer shaft tube; 33. sponge cover ; 34. Push rod; 35. Fine-tuning telescopic rod; 36. Air guide sleeve; 37. Air supply pipe; 4. Shaft disc; 41. Connecting sleeve; 42. Expansion plate; 43. Sliding sleeve; 44. Connecting rod; 45. Clamp ring; 46. Inner rod; 47. Base plate; 5. Molding cylinder; 51. Expansion air bag; 52. Sealing chamber; 53. Air guide pipe; 54. Push support block; 55. Piston; 6. Inner tube; 61. Air supply hole; 62. Airflow disc. DETAILED DESCRIPTION

[0043] See also Figure 1-Figure 6 In an embodiment of the present invention, an automatic packaging system for semiconductor photoresist containers includes:

[0044] The conveying line 1 is horizontally erected on the ground, and a plurality of conveying parts 11 are distributed on the conveying line 1, and each conveying part 11 horizontally conveys the container bottles that have been tested for air leakage one by one;

[0045] A cleaning tank 12 is arranged on one side of the conveying line 1. A frame 13 is suspended and fixed above the conveying line 1 and at the position of the cleaning tank 12. A driving seat is slidably mounted on the frame 13.

[0046] A baffle plate 14 is installed on the conveying line 1, and the baffle plate 14 is used to group the container bottles on the conveying line 1 into a group according to a predetermined number; thereby achieving batch cleaning processing in the container bottle cleaning and improving the subsequent overall packaging efficiency;

[0047] An inner brush unit 2 is fixed on the driving seat and slides along the frame 13 with the driving seat. The inner brush unit 2 simultaneously grabs a plurality of container bottles in a group and sends them into the cleaning tank 12 so that the container bottles are rinsed in the cleaning tank 12;

[0048] The draining mechanism 15 is arranged on the conveying line 1 and is located behind the station of the cleaning tank 12. The draining mechanism 15 uses hot air to drain each group of container bottles on the conveying line 1, thereby removing residual water stains inside and outside the container bottles, and avoiding residual water stains inside the container bottles during filling, which affects the storage quality of the photoresist packaging;

[0049] The glue injection packaging mechanism 16 is arranged on the conveying assembly line 1 and is located behind the station of the draining mechanism 15. The glue injection packaging mechanism 16 quantitatively injects semiconductor photoresist into each container bottle, and packages and transports the container bottles after the injection operation by heat sealing and capping. The heat sealing and capping can prevent the photoresist from being contaminated or leaking during transportation and storage, thereby ensuring the quality and safety of the product.

[0050] The inner brush unit 2 comprises:

[0051] The main frame 21 has vertically arranged guide rails symmetrically fixed on both sides thereof, and a slider 22 is slidably mounted on the guide rails;

[0052] A connecting frame 23 is horizontally arranged below the main frame 21, and two ends of the connecting frame 23 are respectively fixed to the sliders 22;

[0053] A plurality of hook plates 24 are arranged and distributed, one end of each of the hook plates 24 is rotatably connected to the connecting frame 23, and a fixing plate 25 is horizontally fixed between the hook plates 24;

[0054] The electric telescopic rod 26 is symmetrically connected to the connecting frame 23, and the telescopic ends of the electric telescopic rod 26 are correspondingly hinged to the hook plates 24 on both sides;

[0055] The brushing components 3 are arranged one by one corresponding to each of the hook plates 24, and each of the brushing components 3 is horizontally fixed at the other end of the hook plate 24; a visual scanning unit is arranged on the conveying line 1 and at the position of each transmission part 11, and the visual scanning unit uses a high-definition camera to perform internal inspection on the container bottles sent into each transmission part 11, and identifies and obtains the location of the stain points of each container bottle; the brushing components 3 preferably use standard brushing actions to brush the inner walls of each container bottle based on the shape specifications of each container bottle, and then use appropriate strong brushing actions to perform targeted brushing on the stain point positions of each container bottle; wherein the brushing components 3 can be extended into each container bottle in turn to form an internal clamping of the container bottle, and then the container bottle is placed vertically through the telescopic action of the electric telescopic rod 26 and immersed in the cleaning tank, wherein the container bottle can also be in a horizontal or inclined state, so that the top and opening part of the container bottle can be better cleaned to avoid cleaning dead corners.

[0056] In this embodiment, a plurality of vertically arranged rolling brushes 17 are evenly distributed in the cleaning tank 12, and each of the rolling brushes is rotatably connected in the cleaning tank 12, and the plurality of rolling brushes 17 cooperate with each other to scrub the outer surface of the container bottle.

[0057] As a preferred embodiment, the scrubbing assembly 3 includes:

[0058] A fixed cylinder 31, inside which an outer shaft tube 32 is rotatably connected via a bearing center, a shaft disc 4 is coaxially fixed to one side of the fixed cylinder 31, a connecting sleeve 41 is fixed on the shaft disc 4, and the center of the outer shaft tube 32 is inserted into the connecting sleeve 41;

[0059] The expansion plates 42 are circumferentially distributed on the periphery of the connecting sleeve 41. The connecting sleeve 41 is hinged with a plurality of connecting rods 44. Each of the expansion plates 42 is connected to the connecting sleeve 41 through two parallel connecting rods 44.

[0060] A clamp ring 45 is slidably connected to the outer shaft tube 32, and a plurality of support rods are hinged on the outer wall of the clamp ring 45, and one end of the support rod is connected to the connecting rod 44;

[0061] The sliding sleeve 43 is slidably connected to the outside of the shaft disc 4 in a concentric manner, and one side of the sliding sleeve 43 is fixed to the clamping ring 45 through a plurality of inner rods 46; the sliding sleeve 43 can synchronously drive the clamping ring 45 to move through the inner rods 46 during axial sliding, and the clamping ring 45 can push the expansion plate 42 on the connecting rod 44 to radially support or retract inward during displacement, so that the plurality of expansion plates 42 cooperate with each other to clamp the bottle mouth of the container bottle;

[0062] The molding tube 5 is fixed at one end of the outer shaft tube 32. A sponge cover 33 is detachably installed on the outside of the molding tube 5. The sponge cover 33 is made of a soft material and has less wear on the inner wall of the container bottle. It can effectively avoid scratches or damage to the container bottle with a special coating. Compared with the traditional brush, it has the advantages of gentle cleaning, strong adsorption ability, easy replacement and cleaning, and a wide range of applications. Among them, the outer shaft tube 32 can be driven to rotate by the motor outside the fixed cylinder 31 through the gear meshing action, so that the sponge cover 33 can realize brushing the inside of the container bottle during the rotation.

[0063] In this embodiment, a mounting groove is provided on one end surface of each expansion plate 42, and a base plate 47 is detachably mounted on the expansion plate 42 through the mounting groove. Each expansion plate 42 is supported at the bottle mouth of the container bottle by the base plate 47;

[0064] The shaft disc 4 is rotatably connected to a push rod 34 on the outside, one end of which is in contact with the sliding sleeve 43, and the fixed cylinder 31 is hinged with a fine-tuning telescopic rod 35 on the outside, one end of which is hinged to the push rod 34, so that the bottle mouth of the container bottle can be quickly clamped or released through the telescopic adjustment effect of the fine-tuning telescopic rod 35.

[0065] In this embodiment, the thickness of two base plates 47 on opposite sides of the connecting sleeve 41 is set to be the largest and the smallest, and the thickness of the other base plates 47 is the same, so that when each of the expansion plates 42 is supported on the bottle mouth of the container bottle, the outer shaft tube 32 is eccentrically extended into the container bottle, so that during cleaning, the sponge sleeve 33 can be eccentrically squeezed and contacted on the inner wall of the container bottle to enhance the cleaning effect; especially in the standard scrubbing action, the outer shaft tube 32 is eccentrically extended into the container bottle and completes one cleaning, and the expansion plate 42 in the scrubbing assembly 3 can be retracted, To release the container bottle, the outer shaft tube 32 rotates the container bottle to a certain angle through the sponge sleeve 33, and the expansion plate 42 in the brushing assembly 3 is re-supported, so that the sponge sleeve 33 can brush the adjacent position of the inner wall of the container bottle; and after repeating it many times, the inner wall of the container bottle is completely covered and brushed; it should be noted that the specific specifications and shape of the sponge sleeve 33 can be replaced based on the inner wall structure of the container bottle, so that the sponge sleeve 33 can be completely filled in the container bottle, which is convenient for the synchronous cleaning of the side walls, bottom and upper wall of the container bottle.

[0066] In this embodiment, an expansion and contraction airbag 51 is embedded in the sponge cover 33, and the expansion and contraction airbag 51 can adjust the expansion and contraction of the sponge cover 33 under air pressure regulation, so that the sponge cover 33 is completely supported in the container bottle;

[0067] A sealed chamber 52 is provided in the molding tube 5, and the sealed chamber 52 is connected to the expansion and contraction air bag 51 through multiple air guide tubes 53; an air guide sleeve 36 is coaxially fixed on the side of the fixed cylinder 31 away from the shaft disc 4, and the air guide sleeve 36 sealing sleeve is arranged on the outer shaft tube 32, and the air guide sleeve 36 is externally connected to an air supply pipe 37, and a first air guide hole is opened on the outer shaft tube 32, and the air supply pipe 37 adjusts the air pressure of the sealed chamber 52 through the first air guide hole.

[0068] As a preferred embodiment, a plurality of axial holes are distributed on the side wall of the molding tube 5, and a top support block 54 is arranged in each of the axial holes. The top support block 54 is radially slidably connected to the molding tube 5 through the axial hole, and an inner spring is connected between each of the top support blocks 54 and the molding tube 5, so that the top support block 54 can be slid inwardly on the molding tube 5 through the inner spring without external force.

[0069] An air cavity is provided in the molding tube 5, and the air cavity is connected to each of the axial holes. Two pistons 55 are slidably connected in the molding tube 5; an inner tube 6 is slidably connected in the outer axial tube 32, and the two pistons 55 are rotatably connected to the inner tube 6, and an air flow bin is formed between the two pistons 55. An air supply hole 61 is provided on the inner tube 6, and the air supply hole 61 is connected to the air flow bin, so that the air pressure of each axial hole can be adjusted through the air flow bin, so that each top support block 54 in the axial hole is fully expanded to form a support point, so as to strengthen the scrubbing of different stain points of each container bottle.

[0070] In this embodiment, an airflow disk 62 is axially slidably provided on one side of the fixed cylinder 31 away from the shaft disk 4, one end of the inner tube 6 is connected to the airflow disk 62, and a second air guide hole (not shown in the figure) is opened on the inner tube 6, and the second air guide hole is sealed and connected to the airflow disk 62;

[0071] A driving part is arranged outside the fixed cylinder 31, and the telescopic end of the driving part is connected to the airflow disk 62. The driving part can drive the inner tube 6 to adjust the displacement along the air cavity. It should be noted that adaptive air holes are arranged at both ends of the air cavity so that the piston can slide freely in the air cavity.

[0072] In this embodiment, the driving unit drives the two pistons 55 on the inner tube 6 to slide axially along the air cavity. At this time, the airflow bin is connected to the axial hole on the air cavity, and the second air guide hole adjusts the air pressure of each axial hole through the airflow bin, so that the top support block 54 in the axial hole slides out.

[0073] What is described above is only a preferred specific implementation manner of the present invention, but the protection scope of the present invention is not limited thereto. Any technician familiar with the technical field can make equivalent replacements or changes according to the technical scheme and inventive concept of the present invention within the technical scope disclosed by the present invention, which should be covered by the protection scope of the present invention.

Claims

1. An automatic packaging system for semiconductor photoresist containers, characterized in that: It includes a conveying line horizontally erected on the ground, a cleaning tank is arranged on one side, a frame is suspended and fixed above the cleaning tank at the position of the cleaning tank, a driving seat is slidably mounted on the frame, and an inner brush unit is fixed on the driving seat and slides along the frame; The inner brush unit includes a main frame, a plurality of arranged hook plates and a brushing assembly. Vertically arranged guide rails are symmetrically fixed on both sides of the main frame, and sliders are slidably installed on the guide rails. A connecting frame is horizontally arranged below the main frame, and the two ends of the connecting frame are respectively fixed to the sliders. One end of the hook plate is rotatably connected to the connecting frame. The brushing assembly is arranged one by one with the hook plate and is horizontally fixed to the other end of the hook plate. The scrubbing assembly includes a fixed cylinder, an outer shaft tube is rotatably connected to the inner part of the fixed cylinder through the center of the bearing, a shaft disc is coaxially fixed to one side of the fixed cylinder, a connecting sleeve is fixed to the shaft disc, the center of the outer shaft tube is inserted into the connecting sleeve, and expansion plates are distributed on the outer circumference of the connecting sleeve, a molding cylinder is fixed to one end of the outer shaft tube, a sponge sleeve is detachably installed on the outer side of the molding cylinder, an installation groove is opened on one end surface of the expansion plate, and a base plate is detachably installed on the expansion plate through the installation groove; The thickness of the two base plates on the opposite sides of the connecting sleeve are set to be the largest and the smallest, and the thickness of the other base plates is the same. When each expansion plate is supported at the bottle mouth of the container bottle, the outer shaft tube extends eccentrically into the container bottle; A plurality of axial holes are distributed on the side wall of the molding tube, and a top support block is arranged in the axial hole. The top support block is radially slidably connected to the molding tube through the axial hole. An inner spring is connected between the top support block and the molding tube. The top support block is slidably retracted on the molding tube by the inner spring without external force. An air cavity is provided in the molding cylinder, the air cavity is connected with the shaft hole, and two pistons are slidably connected in the molding cylinder; The inner tube is slidably connected inside the outer shaft tube, the piston is rotatably connected with the inner tube, an air flow bin is formed between the pistons, an air delivery hole is arranged on the inner tube, and the air delivery hole is connected with the air flow bin.

2. The automatic packaging system for semiconductor photoresist containers according to claim 1, characterized in that: The automatic packaging system also includes: A baffle plate installed on the conveying line, the baffle plate is used to divide the container bottles on the conveying line into a group according to a predetermined number; The draining mechanism is arranged on the conveying line and is located behind the station of the cleaning tank; the draining mechanism uses hot air to drain each group of container bottles on the conveying line, thereby removing residual water stains inside and outside the container bottles; The glue injection packaging mechanism is arranged on the conveying line and is located behind the station of the draining mechanism; the glue injection packaging mechanism quantitatively injects semiconductor photoresist into each container bottle, and packages and conveys the container bottles that have completed the injection operation by heat sealing and capping; There are multiple conveying parts distributed on the conveying line, and each conveying part conveys the container bottles that have been tested for air leakage one by one horizontally; a visual scanning unit is arranged at the position of each conveying part on the conveying line, and the visual scanning unit uses a high-definition camera to perform internal inspection on the container bottles sent into each conveying part, and identify and obtain the location of the stain points of each container bottle; The scrubbing component first scrubs the inner wall of each container bottle using a standard scrubbing action based on the shape and specifications of each container bottle, and then uses an appropriate strong scrubbing action to perform targeted scrubbing on the stain point position of each container bottle; The inner brush unit simultaneously grabs a plurality of container bottles in a group and sends them into the cleaning tank so that the container bottles can be rinsed in the cleaning tank; The inner brush unit also includes: The electric telescopic rod is symmetrically connected to the connecting frame, and the telescopic end of the electric telescopic rod is correspondingly hinged to the hook plates on both sides; A fixing plate is horizontally fixed between the hook plates.

3. The automatic packaging system for semiconductor photoresist containers according to claim 1, characterized in that: A plurality of vertically arranged rolling brushes are evenly distributed in the cleaning tank, each of the rolling brushes is rotatably connected in the cleaning tank, and the plurality of rolling brushes cooperate with each other to scrub the outer surface of the container bottle.

4. The automatic packaging system for semiconductor photoresist containers according to claim 1, characterized in that: The scrubbing assembly also includes: A connecting rod, wherein a plurality of connecting rods are hinged on the connecting sleeve, and each of the expansion plates is connected to the connecting sleeve through two connecting rods arranged in parallel; a clamp ring, which is slidably connected to the outer shaft tube, and a plurality of support rods are hinged on the outer wall of the clamp ring, and one end of the support rod is connected to the connecting rod; The sliding sleeve is slidably connected to the outside of the shaft disc in a concentric manner, and one side of the sliding sleeve is fixed to the clamping ring through a plurality of inner rods.

5. The automatic packaging system for semiconductor photoresist containers according to claim 4, characterized in that: Each of the expansion plates is supported at the bottle mouth of the container bottle by a base plate; a push rod is rotatably connected to the outside of the shaft disc, one end of the push rod is in contact with the sliding sleeve, and a fine-tuning telescopic rod is hinged to the outside of the fixed cylinder, one end of the fine-tuning telescopic rod is hinged to the push rod.

6. The automatic packaging system for semiconductor photoresist containers according to claim 1, characterized in that: The sponge cover is embedded with an expansion and contraction airbag, which can adjust the expansion and contraction of the sponge cover under air pressure regulation, so that the sponge cover is completely supported in the container bottle; a sealing chamber is provided in the molding cylinder, and the sealing chamber is connected with the expansion and contraction airbag through a plurality of air guide tubes; An air guide sleeve is coaxially fixed on the side of the fixed cylinder away from the shaft disc, and the air guide sleeve sealing sleeve is arranged on the outer shaft tube. An air supply pipe is connected to the outside of the air guide sleeve, and a first air guide hole is opened on the outer shaft tube. The air supply pipe adjusts the air pressure of the sealing chamber through the first air guide hole.

7. The automatic packaging system for semiconductor photoresist containers according to claim 1, characterized in that: An airflow disk is axially slidably disposed on one side of the fixed cylinder away from the shaft disk, one end of the inner tube is connected to the airflow disk, a second air guide hole is opened on the inner tube, and the second air guide hole is sealed and connected to the airflow disk; A driving part is arranged outside the fixed cylinder, and a telescopic end of the driving part is connected to the airflow disk.

8. The automatic packaging system for semiconductor photoresist containers according to claim 7, characterized in that: The driving unit drives the two pistons on the inner tube to slide axially along the air cavity. At this time, the airflow bin is connected to the axial hole on the air cavity, and the second air guide hole adjusts the air pressure of each axial hole through the airflow bin, so that the top support block in the axial hole slides out.

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