Auxiliary device for quartz fire processing

Abstract

The invention discloses an auxiliary device for quartz fire processing, and relates to the technical field of semiconductor processing, the auxiliary device comprises a bottom rod and a screw rod arranged at the upper end of the bottom rod, the upper end of the screw rod is sleeved with an adjusting sleeve with a downward opening, an insert bush is fixedly arranged in the adjusting sleeve, the upper end of the screw rod is sleeved with the insert bush and is in threaded connection with the screw rod, and the screw rod is sleeved with a spring; and the spring is compressed between the bottom rod and the bushing. According to the technical scheme, the auxiliary device for quartz fire processing replaces graphite cushion blocks and graphite gaskets with different heights used in existing processing so as to adjust semiconductor quartz pieces with different height specifications, and the auxiliary device has the advantages of being suitable for the semiconductor quartz pieces with different height specifications and efficient in adjustment.

Description

Technical Field

[0001] The invention relates to the technical field of semiconductor processing, in particular to an auxiliary device for quartz fire processing. Background Art

[0002] Fire processing is a process in the semiconductor quartz processing industry. Semiconductor fire processing uses high-temperature melting technology to process semiconductor devices. It can change the physical properties and structural characteristics of semiconductor materials by high-temperature heating and partial melting, thereby manufacturing the required electronic components. It can control the performance and structure of semiconductor materials, change the performance and structure of devices, and thus achieve more efficient electronic devices. Therefore, the technology of semiconductor fire processing occupies an important position in semiconductor technology. In the existing semiconductor quartz processing process, graphite pads and graphite gaskets of different heights are generally used to adjust semiconductor quartz parts of different height specifications. Due to the large variety of pads, it is difficult to manage the pads and the adjustment efficiency is slow.

[0003] For example, Chinese patent publication number CN110127995A, publication date August 16, 2019, named "Quartz vertical boat groove rod processing system and method", includes: a working platform, a graphite backer, a quartz support frame and a quartz groove rod are placed on the working platform; a plurality of quartz support frames are arranged and placed on the working platform, used to support the quartz groove rod; a graphite backer, after the quartz groove rod is placed on the quartz support frame, the graphite backer is used to support one end of the quartz groove rod; a robot arm, a flame gun claw is provided at the front end of the robot arm, and the flame gun claw is used to clamp the nozzle of the flame gun.

[0004] The disadvantages of the existing patents are that in the existing semiconductor quartz processing process, graphite pads and graphite gaskets of different heights are generally used to adjust semiconductor quartz parts of different height specifications. Due to the large variety of pads, the pad management is difficult and the adjustment efficiency is slow. Summary of the invention

[0005] The purpose of the present invention is to solve the problem that in the existing semiconductor quartz processing process, graphite pads and graphite gasket combinations of different heights are generally used to adjust semiconductor quartz parts of different height specifications. Due to the large variety of pads, the pad management is difficult and the adjustment efficiency is slow. An auxiliary device for quartz fire processing that is suitable for semiconductor quartz parts of different height specifications and has high adjustment efficiency is provided.

[0006] In order to achieve the above object, the present invention adopts the following technical solutions: An auxiliary device for quartz fire processing includes a bottom rod and a screw rod arranged at the upper end of the bottom rod, an adjusting sleeve with an opening facing downward is sleeved on the upper end of the screw rod, a sleeve is fixedly arranged inside the adjusting sleeve, the sleeve is sleeved on the upper end of the screw rod and is threadedly connected to the screw rod, a spring is sleeved on the screw rod, and the spring is compressed between the bottom rod and the sleeve. An auxiliary device for quartz fire processing described in the present technical solution replaces the graphite pads and graphite gaskets of different heights used in the existing processing to adjust semiconductor quartz parts of different height specifications. The bottom rod is arranged on the workbench, and the height of the adjusting sleeve is adjusted by the threaded connection between the screw rod and the sleeve, which makes the adjustment more convenient and intuitive. There is no need to replace different pads and gaskets, the semiconductor quartz parts can be placed on the upper end of the adjusting sleeve, and the semiconductor quartz parts to be processed are supported by a number of auxiliary devices. It is suitable for semiconductor quartz parts of different height specifications and has efficient adjustment.

[0007] Preferably, the bottom rod and the adjusting sleeve are made of graphite, and the insert sleeve and the screw are made of metal. During fire processing, the bottom rod and the adjusting sleeve are made of graphite to resist high temperatures. A nesting is embedded in the graphite adjusting sleeve, and the insert sleeve and the screw are threadedly connected. Since graphite threads are not durable, the insert sleeve and the screw are made of metal to increase the service life of the threaded connection.

[0008] Preferably, an air intake mechanism is provided at the lower end of the bottom rod, and the air intake mechanism is connected to the inner cavity of the sleeve through the bottom rod and the screw rod. A first gap connected to the inner cavity of the sleeve is provided between the adjustment sleeve and the sleeve. The air intake mechanism takes in air to form an annular air curtain outside the spring, and the inner cavity of the sleeve is connected to the upper end of the first gap. The air intake mechanism takes in air to form an annular air curtain outside the spring. When the semiconductor quartz piece is subjected to long-term fire processing, the air curtain has a temperature insulation effect on the spring to prevent the elasticity of the spring from changing under the action of high temperature, and at the same time has a cooling effect on the insert to prevent the thread between the insert and the screw rod from changing under the action of high temperature, thereby ensuring the height adjustment accuracy of the auxiliary device during the fire processing.

[0009] Preferably, the upper end of the adjusting sleeve is provided with an air outlet hole connecting the outside of the adjusting sleeve and the inner cavity of the sleeve, and the air outlet hole is provided with a pressure block that is tightened in the air outlet hole by a tensioning member, and the air intake mechanism drives the pressure block to rise so that the inner cavity of the sleeve is connected to the outside of the adjusting sleeve. In this technical solution, the pressure block includes a pressure block body and a cone arranged on the pressure block body, the cross section of the cone is larger at the top and smaller at the bottom, and a flow channel is provided on the side wall of the pressure block body. The upper end of the air outlet hole is provided with a mounting groove, and the mounting groove cooperates with the cone and the pressure block body. The air intake mechanism drives the pressure block to rise so that a gap is formed between the cone and the inner wall of the mounting groove, and the gap connects the flow channel so that the inner cavity of the sleeve is connected to the outside of the adjusting sleeve. When the pressure block is tightened in the air outlet hole, the upper end surface of the pressure block is flush with the upper end surface of the adjusting sleeve. The material of the pressure block is graphite.

[0010] When the quartz piece is placed on the auxiliary device, the air intake mechanism introduces air at room temperature, and the air intake of the air intake mechanism drives the pressing block to rise, and part of the air in the sleeve is blown out to play a buffering and protective role in the placement process of the quartz piece. Only when the product is placed on the auxiliary device does it cause impact; another part of the air in the sleeve is blown out from the first gap to form an annular wind curtain outside the spring.

[0011] Preferably, the outer wall of the screw rod is provided with a scale, and the scale cooperates with the lower end of the adjustment sleeve, so that the height adjustment between the sleeve and the screw rod is more intuitive.

[0012] Preferably, the lower part of the adjustment sleeve is sleeved on the upper part of the bottom rod, a second gap communicating with the outside of the bottom rod is provided between the adjustment sleeve and the bottom rod, and a scale is provided on the upper side wall of the adjustment sleeve to match the lower end of the adjustment sleeve. The lower part of the adjustment sleeve is sleeved on the upper part of the bottom rod, and the spring is located between the adjustment sleeve and the screw rod. The adjustment sleeve protects the spring to prevent the elasticity of the spring from changing under high temperature, thereby ensuring the height adjustment accuracy of the auxiliary device during the fire processing process.

[0013] Preferably, a through hole is horizontally provided at the upper end of the screw rod, a pressing block is provided in the through hole, and the pressing block is pressed against the inner wall of the sleeve through a pressing member, and the pressing block further improves the stability between the screw rod and the sleeve.

[0014] Preferably, the adjustment sleeve comprises a sleeve with two ends through and a sleeve cover arranged on the sleeve, the sleeve cover is arranged on the upper end of the insert sleeve, the sleeve cover is sealedly connected to the insert sleeve, and the sleeve cover is sealedly connected to the sleeve. A sealing ring is arranged on the inner wall of the sleeve cover, which plays a sealing role in turn.

[0015] Preferably, the bottom rod is provided with a first through hole passing through the upper end and the lower end of the bottom rod, the screw rod is provided with a second through hole passing through the upper end and the lower end of the screw rod, the first through hole is connected with the second through hole, the second through hole is connected with the inner cavity of the sleeve, the upper end side wall of the sleeve is provided with a notch, and the inner cavity of the sleeve is connected with the gap through the notch.

[0016] Preferably, when the quartz piece is placed on the auxiliary device, the air intake mechanism introduces air at room temperature; when the quartz piece is fire-processed, the air intake mechanism introduces oxygen; when the quartz piece is annealed, the air intake mechanism introduces cooled air.

[0017] In the technical solution, when the quartz piece is placed on the auxiliary device, the air at room temperature is introduced into the air intake mechanism, and the air drives the pressing block to rise and blow out from the air outlet, which plays a role in buffering and protecting the quartz piece; when the quartz piece is fire-processed, the air intake mechanism introduces oxygen to play a role in assisting combustion, and the upper outer wall of the pressing block is a conical surface with a larger upper part and a smaller lower part, so that the oxygen is dispersed, making the fire processing of the quartz piece more uniform; when the quartz piece is annealed, the air intake mechanism introduces cooled air to play a cooling role.

[0018] Therefore, the present invention has the following beneficial effects: it replaces the graphite pads and graphite gaskets of different heights used in the existing processing, is applicable to semiconductor quartz parts of different height specifications, and has efficient adjustment; and improves the service life and use accuracy of the auxiliary device. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] Figure 1 It is a structural schematic diagram of embodiment 1 of the present invention.

[0020] Figure 2 It is a cross-sectional view of the first embodiment of the present invention.

[0021] Figure 3 It is a structural schematic diagram of Embodiment 1 of the present invention without the spring.

[0022] Figure 4 It is a structural schematic diagram of the screw in the first embodiment of the present invention.

[0023] Figure 5 It is a cross-sectional view of the second embodiment of the present invention.

[0024] Figure 6 It is a cross-sectional view of the third embodiment of the present invention.

[0025] Figure 7 It is a cross-sectional view of the air intake mechanism connected in the third embodiment of the present invention.

[0026] Figure 8 It is a cross-sectional view of embodiment 4 of the present invention.

[0027] As shown in the figure: Bottom bar 1, first through hole 1.1, Screw 2, through hole 2.1, pressing block 2.2, second through hole 2.3, Adjusting sleeve 3, air outlet 3.1, pressing block 3.2, flow channel 3.2.1, sleeve 3.3, sleeve cover 3.4, Insert 4, notch 4.1, Spring 5, air intake mechanism 6, first gap 7, second gap 8, fixing pin 9, scale 10. DETAILED DESCRIPTION

[0028] In order to make the purpose, technical scheme and advantages of the technical solution embodiments of the present invention clearer, the present invention is further described below in conjunction with the accompanying drawings and specific implementation methods.

[0029] Embodiment 1, as Figure 1 , Figure 2 , Figure 3 , Figure 4 An auxiliary device for quartz fire processing shown in the figure includes a bottom rod 1 and a screw rod 2 arranged at the upper end of the bottom rod 1, an adjusting sleeve 3 with an opening facing downward is sleeved on the upper end of the screw rod 2, an insert sleeve 4 is fixed inside the adjusting sleeve 3, the insert sleeve 4 is sleeved on the upper end of the screw rod 2 and is threadedly connected to the screw rod 2, a spring 5 is sleeved on the screw rod 2, and the spring 5 is compressed between the bottom rod 1 and the insert sleeve 4.

[0030] Fire processing is a process in the semiconductor quartz processing industry. Semiconductor fire processing uses high-temperature melting technology to process semiconductor devices. It can change the physical properties and structural characteristics of semiconductor materials by high-temperature heating and partial melting, thereby manufacturing the required electronic components. It can control the performance and structure of semiconductor materials, change the performance and structure of devices, and thus achieve more efficient electronic devices. Therefore, the technology of semiconductor fire processing occupies an important position in semiconductor technology. In the existing semiconductor quartz processing process, graphite pads and graphite gaskets of different heights are generally used to adjust semiconductor quartz parts of different height specifications. Due to the large variety of pads, it is difficult to manage the pads and the adjustment efficiency is slow.

[0031] In order to solve the problem that in the existing semiconductor quartz processing process, graphite pads and graphite gaskets of different heights are generally used to adjust semiconductor quartz parts of different height specifications, due to the large variety of pads, the pad management is difficult and the adjustment efficiency is slow, an auxiliary device for quartz fire processing that is suitable for semiconductor quartz parts of different height specifications and has high adjustment efficiency is provided.

[0032] An auxiliary device for quartz fire processing in the technical solution replaces the graphite pads and graphite gaskets of different heights used in the existing processing to adjust semiconductor quartz parts of different height specifications. The bottom rod 1 is set on the workbench, and the height of the adjustment sleeve 3 is adjusted by the threaded connection between the screw 2 and the insert sleeve 4, which makes the adjustment more convenient and intuitive. There is no need to replace different pads and gaskets. The semiconductor quartz part can be placed on the upper end of the adjustment sleeve 3. The semiconductor quartz part to be processed is supported by a number of auxiliary devices. It is suitable for semiconductor quartz parts of different height specifications and has efficient adjustment.

[0033] In this embodiment, the bottom rod 1 and the adjusting sleeve 3 are made of graphite, and the insert sleeve 4 and the screw 2 are made of metal. During fire processing, the bottom rod 1 and the adjusting sleeve 3 are made of graphite to resist high temperatures. A nesting is embedded in the graphite adjusting sleeve 3, and the insert sleeve 4 and the screw 2 are threadedly connected. Since graphite threads are not durable, the insert sleeve 4 and the screw 2 are made of metal to increase the service life of the threaded connection.

[0034] Further optimization of screw 2, such as Figure 1 , Figure 2 , Figure 3 , Figure 4 As shown, a through hole 2.1 is horizontally provided at the upper end of the screw rod 2, and a pressing block 2.2 is provided in the through hole 2.1. The pressing block 2.2 is pressed against the inner wall of the insert sleeve 4 through a pressing member. The pressing block 2.2 further improves the stability between the screw rod 2 and the insert sleeve 4.

[0035] Further optimize the adjustment sleeve 3, such as Figure 1 , Figure 2 , Figure 3 , Figure 4 As shown, the adjustment sleeve 3 includes a sleeve 3.3 with two ends through and a sleeve cover 3.4 arranged on the sleeve 3.3, the sleeve cover 3.4 is arranged on the upper end of the insert sleeve 4, the sleeve cover 3.4 is sealedly connected to the insert sleeve 4, and the sleeve cover 3.4 is sealedly connected to the sleeve 3.3. A sealing ring is arranged on the inner wall of the sleeve cover 3.4, which plays a sealing role in turn.

[0036] Further optimize the bottom rod 1 and the screw rod 2, such as Figure 1 , Figure 2 , Figure 3 , Figure 4 As shown, the bottom rod 1 is provided with a first through hole 1.1 penetrating the upper end and the lower end of the bottom rod 1, the screw rod 2 is provided with a second through hole 2.3 penetrating the upper end and the lower end of the screw rod 2, the first through hole 1.1 is communicated with the second through hole 2.3, the second through hole 2.3 is communicated with the inner cavity of the insert sleeve 4, the upper end side wall of the insert sleeve 4 is provided with a notch 4.1, and the inner cavity of the insert sleeve 4 is communicated with the gap through the notch 4.1.

[0037] Furthermore, the insert sleeve and the adjusting sleeve are fixed by a fixing pin, and the fixing pin passes through the adjusting sleeve and the side wall of the insert sleeve.

[0038] Embodiment 2, as Figure 5The auxiliary device for quartz fire processing shown in the figure comprises a bottom rod 1 and a screw rod 2 arranged at the upper end of the bottom rod 1. The upper end of the screw rod 2 is sleeved with an adjustment sleeve 3 with its opening facing downwards. A sleeve 4 is fixedly arranged inside the adjustment sleeve 3. The sleeve 4 is sleeved on the upper end of the screw rod 2 and is threadedly connected with the screw rod 2. A spring 5 is sleeved on the screw rod 2. The spring 5 is compressed between the bottom rod 1 and the sleeve 4. An air intake mechanism 6 is arranged at the lower end of the bottom rod 1. The air intake mechanism 6 is connected to the inner cavity of the sleeve 4 through the bottom rod 1 and the screw rod 2. A first gap 7 connected to the inner cavity of the sleeve 4 is arranged between the adjustment sleeve 3 and the sleeve 4. The air intake mechanism 6 intakes air to form an annular air curtain outside the spring 5. The inner cavity of the sleeve 4 is connected to the upper end of the first gap 7. The air intake mechanism 6 intakes air to form an annular air curtain outside the spring 5. When the semiconductor quartz parts are subjected to long-term fire processing, the air curtain acts as a thermal insulation for the spring 5 to prevent the elasticity of the spring 5 from changing under high temperature. At the same time, it cools the insert to prevent the threads between the insert and the screw 2 from changing under high temperature, thereby ensuring the height adjustment accuracy of the auxiliary device during the fire processing.

[0039] An auxiliary device for quartz fire processing in the technical solution replaces the graphite pads and graphite gaskets of different heights used in the existing processing to adjust semiconductor quartz parts of different height specifications. The bottom rod 1 is set on the workbench, and the height of the adjustment sleeve 3 is adjusted by the threaded connection between the screw 2 and the insert sleeve 4, which makes the adjustment more convenient and intuitive. There is no need to replace different pads and gaskets. The semiconductor quartz part can be placed on the upper end of the adjustment sleeve 3. The semiconductor quartz part to be processed is supported by a number of auxiliary devices. It is suitable for semiconductor quartz parts of different height specifications and has efficient adjustment.

[0040] In this embodiment, the bottom rod 1 and the adjusting sleeve 3 are made of graphite, and the insert sleeve 4 and the screw 2 are made of metal. During fire processing, the bottom rod 1 and the adjusting sleeve 3 are made of graphite to resist high temperatures. A nesting is embedded in the graphite adjusting sleeve 3, and the insert sleeve 4 and the screw 2 are threadedly connected. Since graphite threads are not durable, the insert sleeve 4 and the screw 2 are made of metal to increase the service life of the threaded connection.

[0041] Furthermore, the insert sleeve and the adjusting sleeve are fixed by a fixing pin, a limiting block is provided at the outer end of the fixing pin, the limiting block is limited on the outer wall of the adjusting sleeve, and the inner end of the fixing pin is threadedly connected to the insert sleeve.

[0042] Further optimization of screw 2, such as Figure 5 As shown, a through hole 2.1 is horizontally provided at the upper end of the screw rod 2, and a pressing block 2.2 is provided in the through hole 2.1. The pressing block 2.2 is pressed against the inner wall of the insert sleeve 4 through a pressing member. The pressing block 2.2 further improves the stability between the screw rod 2 and the insert sleeve 4.

[0043] Further optimize the adjustment sleeve 3, such as Figure 5As shown, the adjustment sleeve 3 includes a sleeve 3.3 with two ends through and a sleeve cover 3.4 arranged on the sleeve 3.3, the sleeve cover 3.4 is arranged on the upper end of the insert sleeve 4, the sleeve cover 3.4 is sealedly connected to the insert sleeve 4, and the sleeve cover 3.4 is sealedly connected to the sleeve 3.3. A sealing ring is arranged on the inner wall of the sleeve cover 3.4, which plays a sealing role in turn.

[0044] Further optimize the bottom rod 1 and the screw rod 2, such as Figure 5 As shown, the bottom rod 1 is provided with a first through hole 1.1 penetrating the upper end and the lower end of the bottom rod 1, the screw rod 2 is provided with a second through hole 2.3 penetrating the upper end and the lower end of the screw rod 2, the first through hole 1.1 is communicated with the second through hole 2.3, the second through hole 2.3 is communicated with the inner cavity of the insert sleeve 4, the upper end side wall of the insert sleeve 4 is provided with a notch 4.1, and the inner cavity of the insert sleeve 4 is communicated with the gap through the notch 4.1.

[0045] Further optimize the screw 2, such as Figure 5 As shown, a scale 10 is provided on the outer wall of the screw rod 2, and the scale 10 is matched with the lower end of the adjustment sleeve 3. The scale 10 makes the height adjustment between the insert sleeve 4 and the screw rod 2 more intuitive.

[0046] Embodiment three, as Figure 6 , Figure 7 The auxiliary device for quartz fire processing shown in the figure comprises a bottom rod 1 and a screw rod 2 arranged at the upper end of the bottom rod 1. The upper end of the screw rod 2 is sleeved with an adjustment sleeve 3 with its opening facing downwards. A sleeve 4 is fixedly arranged inside the adjustment sleeve 3. The sleeve 4 is sleeved on the upper end of the screw rod 2 and is threadedly connected with the screw rod 2. A spring 5 is sleeved on the screw rod 2. The spring 5 is compressed between the bottom rod 1 and the sleeve 4. An air intake mechanism 6 is arranged at the lower end of the bottom rod 1. The air intake mechanism 6 is connected to the inner cavity of the sleeve 4 through the bottom rod 1 and the screw rod 2. A first gap 7 connected to the inner cavity of the sleeve 4 is arranged between the adjustment sleeve 3 and the sleeve 4. The air intake mechanism 6 intakes air to form an annular air curtain outside the spring 5. The inner cavity of the sleeve 4 is connected to the upper end of the first gap 7. The air intake mechanism 6 intakes air to form an annular air curtain outside the spring 5. When the semiconductor quartz parts are subjected to long-term fire processing, the air curtain acts as a thermal insulation for the spring 5 to prevent the elasticity of the spring 5 from changing under high temperature. At the same time, it cools the insert to prevent the threads between the insert and the screw 2 from changing under high temperature, thereby ensuring the height adjustment accuracy of the auxiliary device during the fire processing.

[0047] In this embodiment, the upper end of the adjusting sleeve 3 is provided with an air outlet 3.1 which connects the outside of the adjusting sleeve 3 and the inner cavity of the insert sleeve 4. The air outlet 3.1 is provided with a pressure block 3.2 which is tightened in the air outlet 3.1 by a tensioning member. The air intake mechanism 6 drives the pressure block 3.2 to rise so that the inner cavity of the insert sleeve 4 is connected to the outside of the adjusting sleeve 3. In this technical solution, the pressure block 3.2 includes a pressure block 3.2 body and a cone provided on the pressure block 3.2 body. The cross section of the cone is larger at the top and smaller at the bottom. The side wall of the pressure block 3.2 body is provided with a flow channel 3.2.1. The upper end of the air outlet 3.1 is provided with a mounting groove, which cooperates with the cone and the pressure block 3.2 body. The air intake mechanism 6 drives the pressure block 3.2 to rise so that a gap is formed between the cone and the inner wall of the mounting groove. The gap connects the flow channel 3.2.1 so that the inner cavity of the insert sleeve 4 is connected to the outside of the adjusting sleeve 3. When the pressing block 3.2 is tightened in the air outlet 3.1, the upper end surface of the pressing block 3.2 is flush with the upper end surface of the adjusting sleeve 3. The material of the pressing block 3.2 is graphite.

[0048] When the quartz piece is placed on the auxiliary device, the air intake mechanism 6 introduces air at room temperature, and the air intake mechanism 6 drives the pressing block 3.2 to rise, and part of the air in the sleeve 4 is blown out, which plays a buffering and protective role in the placement process of the quartz piece. Only when the product is placed on the auxiliary device does it cause impact; another part of the air in the sleeve 4 is blown out from the first gap 7 to form an annular wind curtain outside the spring 5.

[0049] An auxiliary device for quartz fire processing in the technical solution replaces the graphite pads and graphite gaskets of different heights used in the existing processing to adjust semiconductor quartz parts of different height specifications. The bottom rod 1 is set on the workbench, and the height of the adjustment sleeve 3 is adjusted by the threaded connection between the screw 2 and the insert sleeve 4, which makes the adjustment more convenient and intuitive. There is no need to replace different pads and gaskets. The semiconductor quartz part can be placed on the upper end of the adjustment sleeve 3. The semiconductor quartz part to be processed is supported by a number of auxiliary devices. It is suitable for semiconductor quartz parts of different height specifications and has efficient adjustment.

[0050] In this embodiment, the bottom rod 1 and the adjusting sleeve 3 are made of graphite, and the insert sleeve 4 and the screw 2 are made of metal. During fire processing, the bottom rod 1 and the adjusting sleeve 3 are made of graphite to resist high temperatures. A nesting is embedded in the graphite adjusting sleeve 3, and the insert sleeve 4 and the screw 2 are threadedly connected. Since graphite threads are not durable, the insert sleeve 4 and the screw 2 are made of metal to increase the service life of the threaded connection.

[0051] Further optimization of screw 2, such as Figure 6 , Figure 7 As shown, a through hole 2.1 is horizontally provided at the upper end of the screw rod 2, and a pressing block 2.2 is provided in the through hole 2.1. The pressing block 2.2 is pressed against the inner wall of the insert sleeve 4 through a pressing member. The pressing block 2.2 further improves the stability between the screw rod 2 and the insert sleeve 4.

[0052] Further optimize the adjustment sleeve 3, such as Figure 6 , Figure 7 As shown, the adjustment sleeve 3 includes a sleeve 3.3 with two ends through and a sleeve cover 3.4 arranged on the sleeve 3.3, the sleeve cover 3.4 is arranged on the upper end of the insert sleeve 4, the sleeve cover 3.4 is sealedly connected to the insert sleeve 4, and the sleeve cover 3.4 is sealedly connected to the sleeve 3.3. A sealing ring is arranged on the inner wall of the sleeve cover 3.4, which plays a sealing role in turn.

[0053] Further optimize the bottom rod 1 and the screw rod 2, such as Figure 6 , Figure 7 As shown, the bottom rod 1 is provided with a first through hole 1.1 penetrating the upper end and the lower end of the bottom rod 1, the screw rod 2 is provided with a second through hole 2.3 penetrating the upper end and the lower end of the screw rod 2, the first through hole 1.1 is communicated with the second through hole 2.3, the second through hole 2.3 is communicated with the inner cavity of the insert sleeve 4, the upper end side wall of the insert sleeve 4 is provided with a notch 4.1, and the inner cavity of the insert sleeve 4 is communicated with the gap through the notch 4.1.

[0054] Further optimize the screw 2, such as Figure 6 , Figure 7 As shown, a scale 10 is provided on the outer wall of the screw rod 2, and the scale 10 is matched with the lower end of the adjustment sleeve 3. The scale 10 makes the height adjustment between the insert sleeve 4 and the screw rod 2 more intuitive.

[0055] Embodiment 4, as Figure 8 The auxiliary device for quartz fire processing shown in the figure comprises a bottom rod 1 and a screw rod 2 arranged at the upper end of the bottom rod 1. The upper end of the screw rod 2 is sleeved with an adjustment sleeve 3 with its opening facing downwards. A sleeve 4 is fixedly arranged inside the adjustment sleeve 3. The sleeve 4 is sleeved on the upper end of the screw rod 2 and is threadedly connected with the screw rod 2. A spring 5 is sleeved on the screw rod 2. The spring 5 is compressed between the bottom rod 1 and the sleeve 4. An air intake mechanism 6 is arranged at the lower end of the bottom rod 1. The air intake mechanism 6 is connected to the inner cavity of the sleeve 4 through the bottom rod 1 and the screw rod 2. A first gap 7 connected to the inner cavity of the sleeve 4 is arranged between the adjustment sleeve 3 and the sleeve 4. The air intake mechanism 6 intakes air to form an annular air curtain outside the spring 5. The inner cavity of the sleeve 4 is connected to the upper end of the first gap 7. The air intake mechanism 6 intakes air to form an annular air curtain outside the spring 5. When the semiconductor quartz parts are subjected to long-term fire processing, the air curtain acts as a thermal insulation for the spring 5 to prevent the elasticity of the spring 5 from changing under high temperature. At the same time, it cools the insert to prevent the threads between the insert and the screw 2 from changing under high temperature, thereby ensuring the height adjustment accuracy of the auxiliary device during the fire processing.

[0056] In this embodiment, the upper end of the adjusting sleeve 3 is provided with an air outlet 3.1 which connects the outside of the adjusting sleeve 3 and the inner cavity of the insert sleeve 4. The air outlet 3.1 is provided with a pressure block 3.2 which is tightened in the air outlet 3.1 by a tensioning member. The air intake mechanism 6 drives the pressure block 3.2 to rise so that the inner cavity of the insert sleeve 4 is connected to the outside of the adjusting sleeve 3. In this technical solution, the pressure block 3.2 includes a pressure block 3.2 body and a cone provided on the pressure block 3.2 body. The cross section of the cone is larger at the top and smaller at the bottom. The side wall of the pressure block 3.2 body is provided with a flow channel 3.2.1. The upper end of the air outlet 3.1 is provided with a mounting groove, which cooperates with the cone and the pressure block 3.2 body. The air intake mechanism 6 drives the pressure block 3.2 to rise so that a gap is formed between the cone and the inner wall of the mounting groove. The gap connects the flow channel 3.2.1 so that the inner cavity of the insert sleeve 4 is connected to the outside of the adjusting sleeve 3. When the pressing block 3.2 is tightened in the air outlet 3.1, the upper end surface of the pressing block 3.2 is flush with the upper end surface of the adjusting sleeve 3. The material of the pressing block 3.2 is graphite.

[0057] When the quartz piece is placed on the auxiliary device, the air intake mechanism 6 introduces air at room temperature, and the air intake mechanism 6 drives the pressing block 3.2 to rise, and part of the air in the sleeve 4 is blown out, which plays a buffering and protective role in the placement process of the quartz piece. Only when the product is placed on the auxiliary device does it cause impact; another part of the air in the sleeve 4 is blown out from the first gap 7 to form an annular wind curtain outside the spring 5.

[0058] In this embodiment, the lower part of the adjustment sleeve 3 is sleeved on the upper part of the bottom rod 1, and a second gap 8 communicating with the outside of the bottom rod 1 is provided between the adjustment sleeve 3 and the bottom rod 1, and a scale 10 matching the lower end of the adjustment sleeve 3 is provided on the upper side wall of the adjustment sleeve 3. The lower part of the adjustment sleeve 3 is sleeved on the upper part of the bottom rod 1, and the spring 5 is located between the adjustment sleeve 3 and the screw 2. The adjustment sleeve 3 protects the spring 5, prevents the elasticity of the spring 5 from changing under high temperature, and ensures the height adjustment accuracy of the auxiliary device during the fire processing process.

[0059] An auxiliary device for quartz fire processing in the technical solution replaces the graphite pads and graphite gaskets of different heights used in the existing processing to adjust semiconductor quartz parts of different height specifications. The bottom rod 1 is set on the workbench, and the height of the adjustment sleeve 3 is adjusted by the threaded connection between the screw 2 and the insert sleeve 4, which makes the adjustment more convenient and intuitive. There is no need to replace different pads and gaskets. The semiconductor quartz part can be placed on the upper end of the adjustment sleeve 3. The semiconductor quartz part to be processed is supported by a number of auxiliary devices. It is suitable for semiconductor quartz parts of different height specifications and has efficient adjustment.

[0060] In this embodiment, the bottom rod 1 and the adjusting sleeve 3 are made of graphite, and the insert sleeve 4 and the screw 2 are made of metal. During fire processing, the bottom rod 1 and the adjusting sleeve 3 are made of graphite to resist high temperatures. A nesting is embedded in the graphite adjusting sleeve 3, and the insert sleeve 4 and the screw 2 are threadedly connected. Since graphite threads are not durable, the insert sleeve 4 and the screw 2 are made of metal to increase the service life of the threaded connection.

[0061] Further optimization of screw 2, such as Figure 8 As shown, a through hole 2.1 is horizontally provided at the upper end of the screw rod 2, and a pressing block 2.2 is provided in the through hole 2.1. The pressing block 2.2 is pressed against the inner wall of the insert sleeve 4 through a pressing member. The pressing block 2.2 further improves the stability between the screw rod 2 and the insert sleeve 4.

[0062] Further optimize the adjustment sleeve 3, such as Figure 8 As shown, the adjustment sleeve 3 includes a sleeve 3.3 with two ends through and a sleeve cover 3.4 arranged on the sleeve 3.3, the sleeve cover 3.4 is arranged on the upper end of the insert sleeve 4, the sleeve cover 3.4 is sealedly connected to the insert sleeve 4, and the sleeve cover 3.4 is sealedly connected to the sleeve 3.3. A sealing ring is arranged on the inner wall of the sleeve cover 3.4, which plays a sealing role in turn.

[0063] Further optimize the bottom rod 1 and the screw rod 2, such as Figure 8 As shown, the bottom rod 1 is provided with a first through hole 1.1 penetrating the upper end and the lower end of the bottom rod 1, the screw rod 2 is provided with a second through hole 2.3 penetrating the upper end and the lower end of the screw rod 2, the first through hole 1.1 is communicated with the second through hole 2.3, the second through hole 2.3 is communicated with the inner cavity of the insert sleeve 4, the upper end side wall of the insert sleeve 4 is provided with a notch 4.1, and the inner cavity of the insert sleeve 4 is communicated with the gap through the notch 4.1.

[0064] The specific embodiments described above are only preferred implementations of the present invention, and are not intended to limit the specific implementation scope of the present invention. All equivalent changes made according to the shape and structure of the present invention should be included in the protection scope of the present invention.

Claims

1. A quartz fire processing auxiliary device, characterized in that: It includes a bottom rod and a screw rod arranged at the upper end of the bottom rod. The upper end of the screw rod is sleeved with an adjustment sleeve with an opening facing downwards. The adjustment sleeve is fixed with an insert sleeve. The insert sleeve is sleeved on the upper end of the screw rod and is threadedly connected with the screw rod. A spring is sleeved on the screw rod and compressed between the bottom rod and the insert sleeve.

2. A quartz fire processing auxiliary device according to claim 1, characterized in that: The bottom rod and the adjusting sleeve are made of graphite, and the insert sleeve and the screw rod are made of metal.

3. A quartz fire processing auxiliary device according to claim 2, characterized in that: An air intake mechanism is provided at the lower end of the bottom rod, and the air intake mechanism is connected to the inner cavity of the sleeve through the bottom rod and the screw rod. A first gap connected to the inner cavity of the sleeve is provided between the adjustment sleeve and the sleeve. The air intake mechanism intakes air to form an annular wind curtain outside the spring, and the inner cavity of the sleeve is connected to the upper end of the first gap.

4. A quartz fire processing auxiliary device according to claim 1, 2 or 3, characterized in that: The upper end of the adjusting sleeve is provided with an air outlet hole connecting the outside of the adjusting sleeve and the inner cavity of the insert sleeve. The air outlet hole is provided with a pressure block tightened in the air outlet hole by a tensioning member. The air intake mechanism drives the pressure block to rise to connect the inner cavity of the insert sleeve with the outside of the adjusting sleeve.

5. A quartz fire processing auxiliary device according to claim 1, 2 or 3, characterized in that: The outer wall of the screw rod is provided with a scale, and the scale matches with the lower end of the adjusting sleeve.

6. A quartz fire processing auxiliary device according to claim 1, 2 or 3, characterized in that: The lower part of the adjustment sleeve is sleeved on the upper part of the bottom rod, a second gap communicating with the outside of the bottom rod is provided between the adjustment sleeve and the bottom rod, and a scale matching with the lower end of the adjustment sleeve is provided on the upper side wall of the adjustment sleeve.

7. A quartz fire processing auxiliary device according to claim 1, 2 or 3, characterized in that: A through hole is horizontally arranged at the upper end of the screw rod, a pressing block is arranged in the through hole, and the pressing block is pressed against the inner wall of the insert sleeve through a pressing piece.

8. A quartz fire processing auxiliary device according to claim 1, 2 or 3, characterized in that: The adjusting sleeve comprises a sleeve with two ends penetrating therethrough and a sleeve cover arranged on the sleeve, wherein the sleeve cover is arranged on the upper end of the insert sleeve, the sleeve cover is sealingly connected to the insert sleeve, and the sleeve cover is sealingly connected to the sleeve.

9. The auxiliary device for quartz fire processing according to claim 3, characterized in that: The bottom rod is provided with a first through hole penetrating the upper end and the lower end of the bottom rod, the screw rod is provided with a second through hole penetrating the upper end and the lower end of the screw rod, the first through hole is communicated with the second through hole, the second through hole is communicated with the inner cavity of the sleeve, the upper end side wall of the sleeve is provided with a notch, and the inner cavity of the sleeve is communicated with the gap through the notch.

10. The auxiliary device for quartz fire processing according to claim 4, characterized in that: When the quartz piece is placed on the auxiliary device, the air intake mechanism introduces air at room temperature; when the quartz piece is fire-processed, the air intake mechanism introduces oxygen; when the quartz piece is annealed, the air intake mechanism introduces cooling air.

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