Coating device and coating system

Abstract

The coating device is used for coating a glass substrate, the coating device comprises a main body, an aerosol generating cavity and an aerosol discharging channel are formed in the main body, the aerosol discharging channel comprises a connecting section and a nozzle section, the connecting section is communicated with the aerosol generating cavity, and the nozzle section is downwards communicated with the external environment. The area of the through-flow section is gradually reduced downwards, and the through-flow section is parallel to the width direction of the coating device, so that the flow velocity and distribution of the gas can be effectively adjusted, the gas is ensured to be densely and uniformly sprayed to the surface of the glass substrate, the coating uniformity is ensured, and the coating quality is further improved.

Description

Technical Field

[0001] The present invention relates to the field of film coating technology, and in particular to a film coating device and a film coating system. Background Art

[0002] The existing coating device is provided with an aerosol generating chamber and an aerosol discharge channel connected to the aerosol generating chamber. The aerosol generated in the aerosol generating chamber is sprayed from the aerosol discharge channel to the substrate glass to generate a desired film layer on the substrate glass. However, since the side wall at the bottom end of the aerosol discharge channel is vertically extended, the gas spraying is uneven due to the edge effect of the nozzle, which leads to quality problems of the coated glass product.

[0003] In view of the above shortcomings, it is necessary to design a coating device and a coating system to solve the above shortcomings. Summary of the invention

[0004] Therefore, the technical problem to be solved by the present invention is that in the existing coating device, since the side wall of the bottom end of the aerosol discharge channel is vertically extended, uneven gas injection caused by the edge effect of the nozzle will occur, thereby providing a coating device and a coating system.

[0005] In order to solve the above technical problems, the technical solution of the present invention is as follows:

[0006] A coating device is used for coating a glass substrate, comprising a main body, wherein an aerosol generating chamber and an aerosol discharge channel are formed in the main body, wherein the aerosol discharge channel comprises a connecting section and a nozzle section, wherein the connecting section is connected to the aerosol generating chamber, and the nozzle section is downwardly connected to the external environment, and the area of ​​the flow cross section thereof gradually decreases downward, and the flow cross section is parallel to the width direction of the coating device.

[0007] Furthermore, the flow cross section is in the shape of an isosceles trapezoid.

[0008] Furthermore, the projection length of the side wall of the nozzle segment in the horizontal plane is 20 mm to 50 mm, and the projection length in the vertical plane is 30 mm to 50 mm.

[0009] Furthermore, the projection of the side wall of the nozzle segment to the horizontal plane is 60 degrees.

[0010] Furthermore, it also includes a nozzle connected to the main body, the nozzle is an independent component, and the nozzle section is the inner cavity of the nozzle.

[0011] Furthermore, a pressure sensor is provided on the inner side wall of the connecting section, and / or a temperature sensor is provided on the inner side wall of the aerosol generating chamber.

[0012] Furthermore, the aerosol generating chambers are arranged in pairs, and the coating device further comprises a mixing chamber located between the two aerosol generating chambers and respectively connected to the two aerosol generating chambers.

[0013] Furthermore, two waste gas cavities and two exhaust channels are formed in the main body. In the width direction of the coating device, the two waste gas cavities are respectively located outside the two aerosol generating cavities, and the exhaust channels are downwardly connected to the external environment. The waste gas cavities are connected to the exhaust channels.

[0014] Furthermore, an exhaust device is provided in the exhaust gas chamber.

[0015] The technical solution of the present invention has the following advantages:

[0016] 1. The coating device provided by the present invention is used for coating a glass substrate, and includes a main body, in which an aerosol generating chamber and an aerosol discharge channel are formed, and the aerosol discharge channel includes a connecting section and a nozzle section, the connecting section is connected to the aerosol generating chamber, and the nozzle section is downwardly connected to the external environment, and the area of ​​its flow cross section gradually decreases downward, and the flow cross section is parallel to the width direction of the coating device. Such a design can effectively adjust the flow rate and distribution of the gas to ensure that the gas is finely and evenly sprayed onto the surface of the glass substrate, thereby ensuring the uniformity of the coating and further improving the coating quality.

[0017] 2. The coating device provided by the present invention also includes a nozzle connected to the main body. The nozzle is an independent part, and the nozzle section is the inner cavity of the nozzle. Since the nozzle is an independent part, a nozzle can be added to the main body, which can conveniently improve the uneven aerosol spraying phenomenon caused by the vertical extension of the side wall at the bottom end of the aerosol discharge channel.

[0018] A coating system comprises the above-mentioned coating device and a tin bath, wherein the coating device is arranged in the tin bath.

[0019] The technical solution of the present invention has the following advantages:

[0020] The coating system provided by the present invention has all the advantages of the aforementioned coating devices. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] In order to more clearly illustrate the specific implementation methods of the present invention or the technical solutions in the prior art, the drawings required for use in the specific implementation methods or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are some implementation methods of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0022] Figure 1 It is a schematic diagram of a screenshot of a coating device in an embodiment of the present invention.

[0023] Description of reference numerals:

[0024] 1. Main body; 2. Oil cooling circulation chamber 1; 3. Exhaust gas chamber; 4. Exhaust gas inlet slit; 5. Exhaust channel; 6. Oil cooling circulation chamber 2; 7. Temperature sensor; 8. Aerosol generation chamber; 9. Connecting slit; 10. Guide plate; 11. Mixing chamber; 12. Pressure sensor; 13. Nozzle section; 14. Connecting section; A. Nozzle; B. Aerosol discharge channel. DETAILED DESCRIPTION

[0025] The technical solution of the present invention will be described clearly and completely below in conjunction with the accompanying drawings. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0026] In the description of the present invention, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc., indicating the orientation or positional relationship, are based on the orientation or positional relationship shown in the drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as limiting the present invention. In addition, the terms "first", "second", and "third" are used for descriptive purposes only, and cannot be understood as indicating or implying relative importance.

[0027] In the description of the present invention, it should be noted that, unless otherwise clearly specified and limited, the terms "installed", "connected", and "connected" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be indirectly connected through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0028] In addition, the technical features involved in the different embodiments of the present invention described below can be combined with each other as long as they do not conflict with each other.

[0029] like Figure 1As shown, the present invention provides a coating system, including a tin bath and a coating device installed in the tin bath. The main body 1 of the coating device is a rectangular parallelepiped structure, and is made of high temperature resistant and high thermal conductivity materials to ensure stability and durability in a vacuum or high temperature environment. The coating device is suspended in a narrow section of the tin bath on a float glass production line. The temperature range of the narrow section of the tin bath is 650°C to 600°C, so that the formed glass substrate can be coated with the help of the high temperature condition of the narrow section of the tin bath. The bottom of the coating device is open and faces the top of the glass conveyor belt in the narrow section of the tin bath. The width direction of the coating device is as shown in FIG. Figure 1 Indicated by the arrow.

[0030] The coating device includes a pair of aerosol generating chambers 8, a mixing chamber 11, a pair of exhaust gas chambers 3, two oil-cooling circulation chambers 1 2, two oil-cooling circulation chambers 2 6, a temperature sensor 7 and a pressure sensor 12. The mixing chamber 11 is located between the two aerosol generating chambers 8 and is connected to the two aerosol generating chambers 8 respectively. The two oil-cooling circulation chambers 1 2 are used to cool the aerosol generating chambers 8 to prevent the equipment from overheating. The two oil-cooling circulation chambers 2 6 are used to cool the exhaust gas chamber 3 to prevent the equipment from overheating.

[0031] The width of the two aerosol generating chambers 8 is 150 mm to 200 mm, and they are respectively located in the two oil-cooling circulation chambers 2 that are closer to the vertical center line of the coating device, and one side wall of the aerosol generating chamber 8 is seamlessly connected to the side wall of the corresponding oil-cooling circulation chamber 2 that is parallel to and relatively close to the vertical center line of the coating device. The aerosol generating chamber 8 and the oil-cooling circulation chamber 2 are seamlessly connected on both side walls, respectively, with connecting slits 9 of the same size, for the aerosol to flow out of the aerosol generating chamber 8 and enter the mixing chamber 11. The two temperature sensors 7 are respectively arranged on the side walls of the two aerosol generating chambers 8 to achieve precise temperature control to ensure the quality of the coating. Specifically, the vertical distance between the top surface of the temperature sensor 7 and the bottom wall of the connecting slit 9 is 120 mm to 150 mm, so as to ensure that the measured temperature can represent the temperature of the entire aerosol generating chamber 8 and avoid measurement errors caused by local overheating and overcooling.

[0032] In this embodiment, the aerosol discharge channel B includes a connecting section 14 and a nozzle section 13. The connecting section 14 is connected to the mixing chamber 11, and the nozzle section 13 is connected to the external environment downward, and the area of ​​its flow cross section gradually decreases downward, and the flow cross section is parallel to the width direction of the coating device. Such a design can effectively adjust the flow rate and distribution of the gas to ensure that the gas is finely and evenly sprayed onto the surface of the glass substrate, ensure the uniformity of the coating, and further improve the quality of the coating. In addition, after coating, the thickness of the coating in different areas of the glass plate was accurately measured using a step tester. The results showed that the film thickness in the middle area was stably maintained at 500nm, while the film thickness in the remaining parts (including non-edge areas and edge areas) was evenly distributed within the range of 500nm±0.1nm. The step tester is an existing mature device, and its structure and usage are not described in detail here.

[0033] Preferably, the flow cross section is in the shape of an isosceles trapezoid. The projection length of the side wall of the nozzle segment 13 in the horizontal plane is 20 mm to 50 mm, and the projection length in the vertical plane is 30 mm to 50 mm. More preferably, the projection of the side wall of the nozzle segment 13 to the horizontal plane is 60 degrees.

[0034] The coating device also includes a nozzle A ( Figure 1 The nozzle A is an independent part, specifically a stainless steel part, and is welded to the side wall of the oil cooling circulation chamber 1 2. The nozzle section 13 is the inner cavity of the nozzle A. Since the nozzle A is an independent part, a nozzle A can be added at the bottom end of the side wall of the oil cooling circulation chamber 1 2, which can conveniently improve the uneven gas injection phenomenon caused by the vertical extension of the side wall of the bottom end of the aerosol discharge channel B in the prior art. Of course, the nozzle A can also be integrally formed with the side wall of the oil cooling circulation chamber 1.

[0035] The width of the mixing chamber 11 is 200 mm to 250 mm, and the vertical centerline of the coating device coincides with the vertical centerline of the mixing chamber 11. Two guide plates 10 are cross-mounted on the inner wall of the mixing chamber 11 to enhance the convection mixing of the gas and improve the uniformity of the aerosol. The height of the aerosol generating chamber 8 is less than the height of the mixing chamber 11, and the top surface of the aerosol generating chamber 8 is lower than the top surface of the mixing chamber 11, and the bottom surface is higher than the bottom surface of the mixing chamber 11.

[0036] The width of the connecting section 14 of the aerosol discharge channel B is 100 mm to 130 mm. The aerosol discharge channel B is located below the mixing chamber 11 and is connected to the mixing chamber 11. The aerosol discharge channel B is located between two oil-cooling circulation chambers 12 that are close to the vertical center line of the coating device. The two pressure sensors 12 are respectively located on two opposite side walls of the aerosol discharge channel B. The pressure sensor 12 is used to monitor the pressure changes during the flow of the aerosol to ensure the stable operation of the coating device. Specifically, the vertical distance between the bottom surface of the pressure sensor 12 and the top point of the nozzle is 40 mm to 60 mm, so that the pressure changes of the fluid flow can be clearly felt.

[0037] The width of the two exhaust gas chambers 3 is 150mm to 200mm. The two exhaust gas chambers 3 are respectively located in two oil-cooling circulation chambers 2 6 that are far from the vertical center line of the coating device. The exhaust gas chamber 3 is seamlessly connected to the side wall of the oil-cooling circulation chamber 2 6 that is relatively close to the vertical center line of the coating device. An exhaust passage 5 that is downwardly connected to the external environment is formed between the oil-cooling circulation chamber 1 2 and the oil-cooling circulation chamber 2 6. The exhaust gas chamber 3 and the oil-cooling circulation chamber 2 6 are seamlessly connected on both side walls, respectively, with exhaust gas inlet slits 4 of the same size. An exhaust device (not shown) is provided near the exhaust gas inlet slit 4 in the exhaust gas chamber 3. When the exhaust device is activated, the exhaust gas generated during the coating process can be sucked into the exhaust passage 5 and enter the exhaust gas chamber 3 from the exhaust gas inlet slit 4. The horizontal distance between the vertical center line of the exhaust passage 5 and the vertical center line of the nozzle is 400mm to 450mm, which can prevent the aerosol sprayed from the nozzle from being directly discharged from the exhaust passage 5, thereby ensuring the uniformity and thickness of the coating.

[0038] During coating, when the molten glass enters the narrow section of the tin bath from the tin bath, the coating device located in the narrow section of the tin bath is started, and aerosol is sprayed onto the glass substrate directly below (in this embodiment, the glass substrate selected has a refractive index of 1.52 and a spectral (400-1200nm) transmittance of 78%, which is of course also applicable to other glass substrates) to deposit a TCO film layer on the surface of the glass substrate. The raw materials of the plating solution are 75 to 85 parts of tin source, 8 to 15 parts of fluorine source, 7 to 10 parts of stabilizer, and 7 to 13 parts of catalyst by weight. Among them, the tin source is monobutyltin trichloride, the fluorine source is trifluoroacetic acid, the stabilizer is ethyl acetate, the catalyst is water vapor, and the carrier is nitrogen or oxygen. Specifically, the tin source, fluorine source, stabilizer and catalyst are mixed with the carrier in the aerosol generation chamber 8 of the coating device to fully react and vaporize into an aerosol, and then enter the mixing chamber 11 through the connecting slit 9. After a second full and uniform mixing and atomization in the mixing chamber 11, it passes through two guide plates 10 and is guided to the glass coating area by the aerosol discharge channel B. Since the heat released in the narrow section of the tin tank is fully utilized, the mixed gas undergoes a continuous transformation of heating, evaporation, and re-gasification, and quickly condenses and deposits on the hot glass substrate. Finally, a TCO coating with good performance is formed on the surface of the continuously moving glass substrate. The exhaust gas generated by the reaction passes through the exhaust channel 5, the exhaust gas entry slit 4 and enters the exhaust gas chamber 3. By using the coating device, coating solution composition and coating environment provided by the present invention, the refractive index of the coating obtained was measured to be 1.7, the spectral (400-1200nm) transmittance was 85%, the surface square resistance was 7Ω / □, the haze was 14%, and further careful observation revealed that there were no interference fringes or film clouds on the surface of the coating.

[0039] The coating device provided by the present invention has the following advantages:

[0040] 1) The coating device has a simple structural design and a simple and convenient operation process, which can ensure the uniformity of the film layer on the glass plate, thereby improving the coating quality and the overall effect of the product;

[0041] 2) The two exhaust gas chambers 3 of the coating equipment are located in the oil cooling circulation chamber 2 6, and are connected to the exhaust channel 5 through the exhaust gas entry slit 4, which can quickly collect the exhaust gas generated during the coating process and reduce the impact of impurities on the coating quality;

[0042] 3) The TCO film produced by the coating device has good uniformity, high wear resistance and visible light transmittance;

[0043] 4) The coating device utilizes the existing heat source during the coating process, thereby reducing energy loss and complying with the current energy conservation, emission reduction and green environmental protection concepts;

[0044] 5) The aerosol generation chamber 8 and the exhaust gas chamber 3 in the coating device are symmetrically arranged to ensure the symmetry of the fluid flow.

[0045] Obviously, the above embodiments are merely examples for the purpose of clear explanation, and are not intended to limit the implementation methods. For those skilled in the art, other different forms of changes or modifications can be made based on the above description. It is not necessary and impossible to list all the implementation methods here. The obvious changes or modifications derived therefrom are still within the scope of protection of the invention.

Claims

1. A coating device for coating a glass substrate, characterized in that: The device comprises a main body (1), wherein an aerosol generating chamber (8) and an aerosol discharge channel (B) are formed in the main body (1), wherein the aerosol discharge channel (B) comprises a connecting section (14) and a nozzle section (13), wherein the connecting section (14) is connected to the aerosol generating chamber (8), and the nozzle section (13) is connected downward to the external environment, and the area of ​​the flow cross section thereof gradually decreases downward, and the flow cross section is parallel to the width direction of the coating device.

2. The coating device according to claim 1, characterized in that: The flow cross section is in the shape of an isosceles trapezoid.

3. The coating device according to claim 2, characterized in that: The projection length of the side wall of the nozzle section (13) in the horizontal plane is 20 mm to 50 mm, and the projection length in the vertical plane is 30 mm to 50 mm.

4. The coating device according to claim 3, characterized in that: The angle between the side wall of the nozzle section (13) and the horizontal plane is 60 degrees.

5. The coating device according to claim 1, characterized in that: It also comprises a nozzle connected to the main body, the nozzle is an independent part, and the nozzle section (13) is the inner cavity of the nozzle.

6. The coating device according to claim 1, characterized in that: A pressure sensor (12) is provided on the inner side wall of the connecting section, and / or a temperature sensor (7) is provided on the inner side wall of the aerosol generating chamber (8).

7. The coating device according to any one of claims 1 to 6, characterized in that: The aerosol generating chambers (8) are arranged in pairs, and the coating device further comprises a mixing chamber (11) located between the two aerosol generating chambers (8) and respectively connected to the two aerosol generating chambers (8).

8. The coating device according to any one of claims 1 to 6, characterized in that: Two waste gas cavities (3) and two exhaust channels (5) are also formed in the main body. In the width direction of the coating device, the two waste gas cavities (3) are respectively located outside the two aerosol generating cavities (8), and the exhaust channels (5) are downwardly connected to the external environment. The waste gas cavities (3) are in communication with the exhaust channels (5).

9. The coating device according to claim 8, characterized in that: An exhaust device is provided in the waste gas chamber (3).

10. A coating system, characterized in that: The invention comprises a coating device and a tin bath as described in any one of claims 1 to 9, wherein the coating device is arranged in the tin bath.

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