Radiation refrigeration type thermochromic intelligent window based on F-P cavity and manufacturing method

Abstract

The invention discloses a manufacturing method of a radiation refrigeration type thermochromic intelligent window based on an F-P cavity. The manufacturing method comprises the following steps that 1, clean Low-E glass is prepared to serve as a substrate; preparing an intermediate dielectric layer coating containing PMMA (Polymethyl Methacrylate); preparing a top composite layer coating containing W-VO2 and PVP (Polyvinyl Pyrrolidone); 2, quantitatively taking an intermediate dielectric layer coating, uniformly coating the intermediate dielectric layer coating on the upper surface of the substrate, and drying after coating to form an intermediate dielectric layer; and 3, quantitatively taking a top composite layer coating, uniformly coating the upper surface of the middle dielectric layer with the top composite layer coating, and drying after coating to form a top composite layer. The invention further provides a radiation refrigeration type thermochromic intelligent window based on the F-P cavity. The intelligent window is manufactured through the manufacturing method of the radiation refrigeration type thermochromic intelligent window based on the F-P cavity. According to the invention, the transmittance in the visible light wave band and the adaptive modulation capability from near infrared to far infrared are enhanced.

Description

Technical Field

[0001] The present invention relates to the field of microelectronic device preparation, and in particular to a radiation cooling type thermochromic smart window based on an FP cavity and a preparation method thereof. Background Art

[0002] At present, building energy consumption accounts for 45.5% of the country's total energy consumption, and building carbon emissions account for 50.9% of the country's total carbon emissions. About 20% of energy consumption and carbon emissions are generated during the operation of buildings, which are used to meet daily energy needs such as indoor lighting, air conditioning, ventilation and heating. Windows are an indispensable part of the building envelope, providing landscape, light transmission and ventilation functions. However, compared with other building components, the extremely poor light and heat regulation performance of glass windows has caused a lot of energy loss. Therefore, windows play an important role in changing the energy demand of buildings. By improving the thermal and optical properties of architectural glass, the purpose of reducing heat loss and reducing drying and cooling energy consumption can be achieved.

[0003] When VO2 changes from a semiconductor phase to a metallic phase, its carrier concentration will increase suddenly, and its electrical and optical properties will also change suddenly. The doping of tungsten will cause the phase transition temperature of vanadium dioxide to drop to 32°C, which is consistent with the actual needs of life. The introduction of PVP and PMMA materials can not only be used as a dispersant but also as a transparent material to increase the transmittance of visible light. At the same time, when vanadium dioxide is in a metallic state, the three-layer film forms a cavity structure, which provides enhanced absorption in the mid-infrared band. With the development of microelectronic devices towards miniaturization and reliability, the FP cavity structure has become an important research method in the field of improving the performance of microelectronic devices.

[0004] Traditional methods for preparing radiation cooling smart windows mainly include hydrogels, phase change materials, electrochromic, multiple scattering absorption, etc. However, their large-scale promotion and use are hindered by their requirements for performance such as conversion rate, number of cycles, and durability, as well as large size and low cost industrial development requirements. Therefore, providing a feasible low-cost, multi-band modulation, high-performance and adjustable radiation cooling thermochromic smart window development method has become an urgent problem to be solved. Summary of the invention

[0005] The present invention provides a radiative cooling type thermochromic smart window based on an FP cavity and a manufacturing method thereof in order to solve the technical problems existing in the known technology.

[0006] The technical solution adopted by the present invention to solve the technical problems existing in the known technology is:

[0007] A method for manufacturing a radiative cooling thermochromic smart window based on an FP cavity comprises the following steps:

[0008] Step 1, prepare clean Low-E glass as a substrate; prepare an intermediate dielectric layer coating containing PMMA; prepare a top composite layer coating containing W-VO2 and PVP;

[0009] Step 2, quantitatively taking the intermediate dielectric layer coating and evenly coating it on the upper surface of the substrate, and drying it after coating to form the intermediate dielectric layer;

[0010] Step 3, quantitatively taking the top composite layer coating and evenly coating it on the upper surface of the middle medium layer, and drying it after coating to form the top composite layer.

[0011] Furthermore, in step 1, the method of preparing clean Low-E glass as a substrate includes the following method steps:

[0012] Single silver Low-E glass is used as a substrate; the Low-E glass substrate is ultrasonically cleaned in an acetone solution for 12 to 20 minutes, then ultrasonically cleaned in anhydrous ethanol for 12 to 20 minutes, and finally ultrasonically cleaned in deionized water for 12 to 20 minutes and dried for later use.

[0013] Furthermore, in step 1, the method for preparing the intermediate dielectric layer coating containing PMMA comprises the following method steps:

[0014] 5 to 10 parts of PMMA and 100 parts of acetone are put into a container by mass, the container is sealed, and reacted at a temperature of 65 to 72° C. for 1.5 to 2 hours to prepare an intermediate dielectric layer coating.

[0015] Further, in step 1, the method for preparing the top composite layer coating comprising W-VO2 and PVP comprises the following method steps:

[0016] By mass, 6 to 10 parts of W-VO2 nanoparticles are added to a container containing 100 parts of anhydrous ethanol, the container is sealed, and ultrasonic dispersion is performed at 65 to 72°C for 25 to 35 minutes to form a W-VO2 nanoparticle dispersion. Then, 1.5 to 3 parts of PVP are added to the W-VO2 nanoparticle dispersion and the container is sealed. Ultrasonic oscillation is continued for 0.8 to 1.5 hours, and finally stirring is performed for 2.5 to 3.5 hours. The top composite layer coating is then allowed to stand for 20 to 28 hours.

[0017] Furthermore, step 2 includes the following method steps:

[0018] Single silver Low-E glass is used as a substrate; the surface of the silver-plated layer of the single silver Low-E glass is used as the upper surface of the substrate; the intermediate dielectric layer coating is taken and placed on the upper surface of the substrate, and then spin-coated with a coating machine; after spin-coating, the coating is dried and the surface haze is removed; the ratio of the mass of the intermediate dielectric layer coating to the upper surface area of ​​the substrate is 2-3 g / cm 2 .

[0019] Furthermore, when spin coating the intermediate dielectric layer coating, first rotate the glue spreader at a spin coating speed of 800 to 1000 r / min for 10 to 15 seconds; then rotate the glue spreader at a spin coating speed of 2500 to 3000 r / min for 20 to 25 seconds; after spin coating, dry in an environment of 140 to 160° C. for 5 to 6 minutes.

[0020] Furthermore, step 3 includes the following method steps:

[0021] The top composite layer coating is spin-coated on the upper surface of the middle dielectric layer by a coating machine; the coating is dried after spin coating; the ratio of the top composite layer coating mass to the upper surface area of ​​the substrate is 2-3 g / cm 2 .

[0022] Furthermore, when spin coating the top composite layer coating, first rotate the glue spreader at a spin coating speed of 600 to 800 r / min for 4 to 6 seconds; then rotate the glue spreader at a spin coating speed of 2300 to 2700 r / min for 8 to 12 seconds; after spin coating, dry in an environment of 50 to 70°C for 5 to 10 minutes.

[0023] Furthermore, the intermediate medium layer coating and / or the top composite layer coating are quantitatively taken using a pipette gun.

[0024] The present invention also provides a FP cavity-based radiation cooling type thermochromic smart window, which is manufactured using the above-mentioned FP cavity-based radiation cooling type thermochromic smart window manufacturing method.

[0025] The advantages and positive effects of the present invention are as follows: the present invention provides a method for manufacturing a radiation cooling type thermochromic smart window based on an FP cavity; the process parameters such as stirring parameters, drying parameters, and spin coating parameters are optimized to prepare a radiation cooling type thermochromic smart window, which provides a higher visible light transmittance, and improves its ability to modulate thermal radiation and near-infrared regulation. A method for manufacturing a radiation cooling type thermochromic smart window with low cost, multi-band modulation, high performance and adjustable performance is provided.

[0026] The FP cavity-based radiative cooling type thermochromic smart window of the present invention enhances the transmittance in the visible light band and the adaptive modulation capability from near infrared to far infrared. The FP cavity-based radiative cooling type thermochromic smart window of the present invention not only maintains its visible light transmittance, but also enhances its adaptive temperature modulation capability of solar energy and wide spectrum mid-infrared thermal radiation, further promoting the development of thermochromism in the field of smart windows and radiative cooling. BRIEF DESCRIPTION OF THE DRAWINGS

[0027] Figure 1The present invention is a flowchart of a method for manufacturing a radiative cooling thermochromic smart window based on a FP cavity.

[0028] Figure 2 This is a visible-mid-infrared infrared spectrum line diagram of a radiation cooling thermochromic smart window based on the FP cavity prepared in the present invention.

[0029] Figure 3 Schematic diagram of light scattering absorption when the top composite layer of a radiative cooling thermochromic smart window based on the FP cavity prepared by the present invention is semiconductor VO2.

[0030] Figure 4 Schematic diagram of light scattering absorption when the top composite layer of a radiative cooling thermochromic smart window based on the FP cavity prepared by the present invention is metallic VO2.

[0031] In the figure: 1, top composite layer; 2, middle dielectric layer; 3, substrate. DETAILED DESCRIPTION

[0032] The present invention will be described in detail below with reference to the accompanying drawings and in combination with embodiments. It should be understood that the preferred embodiments described herein are only used to illustrate and explain the present invention, and are not used to limit the present invention.

[0033] In the description of the present invention, the terms "upper", "lower", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom" and the like indicate positions or positional relationships based on the positions or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention rather than requiring the present invention to be constructed and operated in a specific orientation, and therefore should not be construed as limiting the present invention. The terms "connected" and "connection" used in the present invention should be understood in a broad sense, for example, it can be a fixed connection or a detachable connection; it can be a direct connection or an indirect connection through an intermediate component; it can also be an electrical connection or signal transmission; for those of ordinary skill in the art, the specific meanings of the above terms can be understood according to the specific circumstances.

[0034] The Chinese meanings of the following English words, phrases and abbreviations in this application are as follows:

[0035] VO2: Vanadium dioxide.

[0036] PVP: polyvinylpyrrolidone.

[0037] PMMA: polymethyl methacrylate.

[0038] FP cavity: FP cavity refers to Fabry-Pérot resonant cavity, which is an optical resonant cavity composed of two parallel mirrors.

[0039] W-VO2: Tungsten-doped vanadium dioxide, which is a composite material composed of two compounds, vanadium dioxide (VO2) and tungsten (W). Tungsten is doped into the crystal structure of vanadium dioxide during the preparation process.

[0040] Low-E: Low-E glass, also known as low-radiation glass, is a film product composed of multiple layers of metal or other compounds coated on the glass surface. Its coating layer has the characteristics of high transmittance of visible light and high reflection of mid- and far-infrared rays, making it have excellent heat insulation effect and good light transmittance compared with ordinary glass and traditional architectural coated glass.

[0041] See also Figures 1 to 4 A method for manufacturing a radiative cooling thermochromic smart window based on a FP cavity comprises the following steps:

[0042] Step 1, prepare clean Low-E glass as substrate 3; prepare an intermediate dielectric layer coating containing PMMA; prepare a top composite layer coating containing W-VO2 and PVP;

[0043] Step 2, quantitatively taking the intermediate dielectric layer coating and uniformly coating it on the upper surface of the substrate 3, and drying it after coating to form the intermediate dielectric layer 2;

[0044] Step 3, quantitatively taking the top composite layer coating and evenly coating it on the upper surface of the intermediate medium layer 2, and drying it after coating to form the top composite layer 1.

[0045] Preferably, in step 1, the method for preparing clean Low-E glass as substrate 3 may include the following method steps:

[0046] Single silver Low-E glass can be used as the substrate 3; the Low-E glass substrate 3 can be ultrasonically cleaned in an acetone solution for 12 to 20 minutes, then ultrasonically cleaned in anhydrous ethanol for 12 to 20 minutes, and finally ultrasonically cleaned in deionized water for 12 to 20 minutes and dried for later use.

[0047] Preferably, in step 1, the method for preparing the intermediate dielectric layer coating containing PMMA may include the following method steps:

[0048] 5 to 10 parts of PMMA and 100 parts of acetone can be put into a container by weight, the container is sealed, and the reaction is carried out at a temperature of 65 to 72° C. for 1.5 to 2 hours to prepare the intermediate dielectric layer coating.

[0049] Preferably, in step 1, the method for preparing a top composite layer coating comprising W-VO2 and PVP may include the following method steps:

[0050] 6 to 10 parts of W-VO2 nanoparticles can be added by mass into a container containing 100 parts of anhydrous ethanol, and the container is sealed. The container is ultrasonically dispersed at a temperature of 65 to 72°C for 25 to 35 minutes to form a W-VO2 nanoparticle dispersion. Then, 1.5 to 3 parts of PVP are added to the W-VO2 nanoparticle dispersion and the container is sealed. Ultrasonic oscillation is continued for 0.8 to 1.5 hours, and finally stirring is performed for 2.5 to 3.5 hours. The top composite layer coating is then formed.

[0051] Preferably, step 2 may include the following method steps:

[0052] Single silver Low-E glass can be used as the substrate 3; the surface of the silver-plated layer of the single silver Low-E glass can be used as the upper surface of the substrate 3; the intermediate dielectric layer coating can be taken and placed on the upper surface of the substrate 3, and then spin-coated with a coating machine; after spin-coating, it is dried and the surface haze is removed; the ratio of the mass of the intermediate dielectric layer coating to the upper surface area of ​​the substrate 3 can be 2 to 3 g / cm 2 .

[0053] Preferably, when spin coating the intermediate dielectric layer coating, the coating machine can be rotated for 10 to 15 seconds at a coating speed of 800 to 1000 r / min; the coating machine can be rotated for 20 to 25 seconds at a coating speed of 2500 to 3000 r / min; after spin coating, the coating can be dried in an environment of 140 to 160°C for 5 to 6 minutes.

[0054] Preferably, step 3 may include the following method steps:

[0055] The top composite layer coating can be spin-coated on the upper surface of the intermediate dielectric layer 2 by a coating machine; the coating is dried after spin coating; the ratio of the mass of the top composite layer coating to the upper surface area of ​​the substrate 3 is 2 to 3 g / cm 2 .

[0056] Preferably, when spin coating the top composite layer coating, the glue spreader can be rotated for 4 to 6 seconds at a spin coating speed of 600 to 800 r / min; the glue spreader can be rotated for 8 to 12 seconds at a spin coating speed of 2300 to 2700 r / min; after spin coating, the coating can be dried in an environment of 50 to 70°C for 5 to 10 minutes.

[0057] Preferably, the intermediate medium layer coating and / or the top composite layer coating can be quantitatively taken using a pipette gun.

[0058] The present invention also provides a FP cavity-based radiation cooling type thermochromic smart window, which is manufactured using the above-mentioned FP cavity-based radiation cooling type thermochromic smart window manufacturing method.

[0059] The following is a preferred embodiment of the present invention to further illustrate the working process and working principle of the present invention:

[0060] A method for preparing a radiative cooling thermochromic smart window based on an FP cavity. Based on the FP cavity structure principle, a FP cavity structure model is prepared on low-e glass, the material mass ratio and the preparation method are optimized, and the stirring parameters, drying parameters, spin coating parameters and other process parameters are optimized to prepare a radiative cooling thermochromic smart window, which provides a higher visible light transmittance and improves its ability to modulate thermal radiation and near-infrared regulation.

[0061] The method comprises the following steps:

[0062] Step I: Pretreatment of Low-E substrate. This experiment uses commercial single silver Low-E glass as the substrate, with a size of 2.5×2.5 cm and a thickness of 5 mm. Remove organic impurities and dust on the surface of the substrate to prevent contamination of the film. First, place the Low-E substrate in an acetone solution for ultrasonic cleaning for 15 minutes, then place it in anhydrous ethanol for ultrasonic cleaning for 15 minutes, and finally place it in deionized water for ultrasonic cleaning for 15 minutes and dry it for use.

[0063] Step II, preparation of PMMA intermediate medium layer solution. The thickness of the intermediate medium layer was controlled by changing the viscosity of the solution. 400 mg of PMMA was dissolved in 7.5 ml of acetone for use. During the entire preparation process, the solution was sealed with a screw bottle to prevent acetone from volatilizing.

[0064] Step III, preparation of W-VO2(NP) & PVP solution. In order to reduce the corrosion of the PMMA intermediate dielectric layer during the preparation of the top composite layer, PVP and ethanol were selected as the dispersant and solvent respectively, taking advantage of the difference in solubility of different materials in different solvents. 175 mg of W-VO2(NP) was added to 3 ml of anhydrous ethanol and ultrasonically dispersed at 60°C for 30 minutes to form a W-VO2(NP) dispersion. Then, 50 mg of PVP(K30) was added to the dispersion and ultrasonic oscillation was continued for 1 hour. Finally, it was stirred for 3 hours using a magnetic stirrer and then allowed to stand for 24 hours for use. During the entire preparation process, a screw-capped bottle was used to seal the solution to prevent alcohol evaporation.

[0065] Step IV, Preparation of the three-layer structure of the dielectric layer thickness FP cavity. Use a pipette to measure 200 μL of the PMMA acetone solution prepared in step 2 and drop it on the pretreated Low-E substrate surface, and then use a gel coater to spin coat. The spin coating parameters are selected as low speed 800 r / min rotation for 10 s and high speed 3000 r / min rotation for 20 s. After the PMMA layer is spin-coated, heat it at 150°C for 5 minutes to remove the surface haze and dry it.

[0066] Step V, the top W-VO2 (NP) & PVP composite layer is spin-coated with a solution of 150 mg of W-VO2 (NP) in step 3. Use a pipette to measure 200 μL of W-VO2 (NP) & PVP solution and drop it on the prepared PMMA dielectric layer. The spin-coating parameters are adjusted to a low speed of 700 r / min for 5 s and a high speed of 2500 r / min for 10 s. After spin coating, dry at 60°C for 5 to 10 minutes.

[0067] Furthermore, the specific steps of the method include the following:

[0068] Step 1: Preparation before synthesis.

[0069] A1: Cleaning containers, preparation tools and substrates3.

[0070] The beaker, medicine spoon, magnetic stirrer and glass substrate 3 are ultrasonically cleaned to ensure the cleanliness of their surfaces. The cleaning process is as follows: an appropriate amount of anhydrous ethanol is poured into the beaker and ultrasonically cleaned for 15 minutes to ensure that the impurities and dust in the beaker are removed; the substrate 3 is placed in a clean beaker and ultrasonically cleaned with acetone and anhydrous ethanol for 15 minutes respectively; finally, the cleaned substrate 3 is taken out, transferred to a tray and placed in an oven for drying for 15 minutes.

[0071] A2: Weigh PMMA, PVP, and W-VO2 nanoparticles.

[0072] Use a high-precision electronic scale to weigh 400 mg of PMMA powder, 175 mg of W-VO2 nanoparticles, and 50 mg of PVP powder. K30 type PVP powder is used as the PVP powder.

[0073] Step 2: Preparation of intermediate medium layer coating.

[0074] B1: Take 7.5 ml of acetone, mix 400 mg of PMMA powder with 7.5 ml of acetone, stir to dissolve, set the stirring parameter to 500 r / min, and the time to 3 hours to obtain the intermediate dielectric layer coating.

[0075] Step 3: Top composite coating preparation.

[0076] C1: Take 3 ml of anhydrous ethanol. Add 175 mg of W-VO2 nanoparticles into 3 ml of anhydrous ethanol and disperse by ultrasonic at 60°C for 30 min to form a W-VO2 nanoparticle dispersion.

[0077] C2: Add PVP powder. Add 50 mg of PVP powder to the W-VO2 nanoparticle dispersion and continue ultrasonic oscillation for 1 hour, and finally stir for 3 hours with a magnetic stirrer, and then let it stand for 24 hours to obtain the top composite layer coating.

[0078] Step 4: Preparation of the intermediate dielectric layer 2.

[0079] D1: Spin coating the intermediate dielectric layer.

[0080] 200 μL of the intermediate dielectric layer coating prepared in step 2 was measured with a pipette and dropped onto the upper surface of the Low-E glass substrate 3, and then spin-coated with a coater. The spin-coating parameters were selected as low speed 800 r / min for 10 s and high speed 3000 r / min for 20 s.

[0081] D2: Drying the intermediate dielectric layer 2.

[0082] After spin coating, the intermediate dielectric layer 2 is dried at 150° C. for 5 minutes to remove the surface haze and dry the layer.

[0083] Step 5: Preparation of the top composite layer 1.

[0084] E1: Spin coating of top composite layer 1.

[0085] Use a pipette to measure 200 μL of the top composite layer coating and drop it on the prepared intermediate dielectric layer 2. The spin coating parameters are adjusted to a low speed of 700 r / min for 5 s and a high speed of 2500 r / min for 10 s.

[0086] E2: Drying the top composite layer 1.

[0087] After the top composite layer 1 is spin-coated, it is dried at 60° C. for 5 minutes to achieve the purpose of removing surface haze and drying.

[0088] The present invention provides a design method for a radiative cooling type thermochromic smart window based on an FP cavity, which effectively establishes a FP cavity structure model applied to the field of radiative cooling type smart windows, characterizes its spectral characteristics, and improves its ability to modulate thermal radiation and near-infrared regulation. The thermochromic radiative cooling type smart window structure is prepared by a spin coating process, and the preparation process and conditions are optimized to meet the performance requirements of the smart window and radiative cooling fields. The process is simple and the preparation cost is reduced. The present invention has a promoting effect on the development of microelectronic devices.

[0089] The above-mentioned PMMA, PVP, W-VO2 nanoparticles, anhydrous ethanol, and acetone are all made of materials in the existing technology, and the above-mentioned beaker, medicine spoon, magnetic stirrer and glass substrate 3, pipette gun, glue spreader, electronic scale and other preparation tools are made of preparation tools in the existing technology.

[0090] The embodiments described above are only used to illustrate the technical ideas and features of the present invention, and their purpose is to enable those skilled in the art to understand the contents of the present invention and implement them accordingly. The patent scope of the present invention cannot be limited only by this embodiment, that is, any equivalent changes or modifications made to the spirit disclosed by the present invention still fall within the patent scope of the present invention.

Claims

1. A method for manufacturing a radiative cooling thermochromic smart window based on a FP cavity, characterized in that: The steps include: Step 1, prepare clean Low-E glass as a substrate; prepare an intermediate dielectric layer coating containing PMMA; prepare a top composite layer coating containing W-VO2 and PVP; Step 2, quantitatively taking the intermediate dielectric layer coating and evenly coating it on the upper surface of the substrate, and drying it after coating to form the intermediate dielectric layer; Step 3, quantitatively taking the top composite layer coating and evenly coating it on the upper surface of the middle medium layer, and drying it after coating to form the top composite layer.

2. The method for manufacturing a radiative cooling thermochromic smart window based on a FP cavity according to claim 1, characterized in that: In step 1, the method of preparing clean Low-E glass as a substrate includes the following method steps: Single silver Low-E glass is used as a substrate; the Low-E glass substrate is ultrasonically cleaned in an acetone solution for 12 to 20 minutes, then ultrasonically cleaned in anhydrous ethanol for 12 to 20 minutes, and finally ultrasonically cleaned in deionized water for 12 to 20 minutes and dried for later use.

3. The method for manufacturing a radiative cooling thermochromic smart window based on a FP cavity according to claim 1, characterized in that: In step 1, the method for preparing the intermediate dielectric layer coating containing PMMA includes the following method steps: 5 to 10 parts of PMMA and 100 parts of acetone are put into a container by mass, the container is sealed, and reacted at a temperature of 65 to 72° C. for 1.5 to 2 hours to prepare an intermediate dielectric layer coating.

4. The method for manufacturing a radiative cooling thermochromic smart window based on a FP cavity according to claim 1, characterized in that: In step 1, the method for preparing a top composite coating comprising W-VO2 and PVP comprises the following method steps: By mass, 6 to 10 parts of W-VO2 nanoparticles are added to a container containing 100 parts of anhydrous ethanol, the container is sealed, and ultrasonic dispersion is performed at 65 to 72°C for 25 to 35 minutes to form a W-VO2 nanoparticle dispersion. Then, 1.5 to 3 parts of PVP are added to the W-VO2 nanoparticle dispersion and the container is sealed. Ultrasonic oscillation is continued for 0.8 to 1.5 hours, and finally stirring is performed for 2.5 to 3.5 hours. The top composite layer coating is then allowed to stand for 20 to 28 hours.

5. The method for manufacturing a radiative cooling thermochromic smart window based on a FP cavity according to claim 1, characterized in that: Step 2 includes the following method steps: Single silver Low-E glass is used as a substrate; the surface of the silver-plated layer of the single silver Low-E glass is used as the upper surface of the substrate; the intermediate dielectric layer coating is taken and placed on the upper surface of the substrate, and then spin-coated with a coating machine; after spin-coating, the coating is dried and the surface haze is removed; the ratio of the mass of the intermediate dielectric layer coating to the upper surface area of ​​the substrate is 2-3 g / cm 2 .

6. The method for manufacturing a radiative cooling thermochromic smart window based on a FP cavity according to claim 5, characterized in that: When spin coating the intermediate dielectric layer coating, first rotate the glue spreader at a spin coating speed of 800-1000 r / min for 10-15 seconds; then rotate the glue spreader at a spin coating speed of 2500-3000 r / min for 20-25 seconds; after spin coating, dry in an environment of 140-160°C for 5-6 minutes.

7. The method for manufacturing a radiative cooling thermochromic smart window based on a FP cavity according to claim 1, characterized in that: Step 3 includes the following method steps: The top composite layer coating is spin-coated on the upper surface of the middle dielectric layer by a coating machine; the coating is dried after spin coating; the ratio of the top composite layer coating mass to the upper surface area of ​​the substrate is 2-3 g / cm 2 .

8. The method for manufacturing a radiative cooling thermochromic smart window based on a FP cavity according to claim 7, characterized in that: When spin coating the top composite layer coating, first rotate the glue machine at a spin coating speed of 600-800 r / min for 4-6 seconds; then rotate the glue machine at a spin coating speed of 2300-2700 r / min for 8-12 seconds; after spin coating, dry in an environment of 50-70°C for 5-10 minutes.

9. The method for manufacturing a radiative cooling thermochromic smart window based on a FP cavity according to claim 1, characterized in that: Use a pipette to quantitatively apply the intermediate dielectric layer coating and / or the top composite layer coating.

10. A radiative cooling thermochromic smart window based on FP cavity, characterized in that: The smart window is manufactured by the manufacturing method of the FP cavity-based radiation cooling type thermochromic smart window according to any one of claims 1 to 9.

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