Detection device and detection adjustment method

Abstract

The present invention discloses a detection device and a detection and adjustment method. The detection device includes a first positioning component, a second positioning component, and a third positioning component. The first positioning component includes a first reference rod and a second reference rod. The first reference rod is provided with a first reference surface for abutting against an OHB; the second reference rod is slidably arranged on the first reference rod along a first direction, and is provided with a second reference surface for abutting against a walking track. The second positioning component includes an elastic member arranged along the first direction, and the two ends of the elastic member are respectively connected to the first reference rod and the second reference rod. The third positioning component includes a first connecting rod and a second connecting rod. The first connecting rod and the second connecting rod are provided with a movable scale, and the movable scale is provided with a scale mark corresponding to the spacing between the first reference surface and the second reference surface. The present invention facilitates the detection and adjustment of the spacing between the OHB and the walking track to avoid the inability of the overhead crane to accurately pick up and place the wafer box on the OHB due to the spacing deviation.

Description

Technical Field

[0001] The present invention relates to the field of semiconductor transmission technology, and in particular to a detection device and a detection adjustment method. Background Art

[0002] In the semiconductor manufacturing process, overhead cranes are often used to transfer wafer boxes containing wafers between different process machines. When the wafer box does not need to be transferred temporarily, it can be temporarily stored in an overhead buffer (OHB) located on one side of the walking track; when the wafer box on the OHB needs to be transferred, the gripper mechanism on the overhead crane is moved to the OHB through the transverse mechanism on the overhead crane to grab the wafer box. Usually, the transverse distance of the transverse mechanism is pre-set according to the distance between the OHB and the walking track. In actual application, if the distance between the OHB and the walking track deviates, the overhead crane may not be able to accurately pick up and place the wafer box on the OHB. Summary of the invention

[0003] To overcome the above shortcomings, the purpose of the present invention is to provide a detection device and a detection and adjustment method, which are convenient for detecting and adjusting the distance between the OHB and the travel track, so as to avoid the inability of the overhead crane to accurately pick up and place the wafer box on the OHB due to the distance deviation between the OHB and the travel track.

[0004] A detection device according to an embodiment of the present invention includes:

[0005] A first positioning component, the first positioning component includes a first reference rod and a second reference rod, the first reference rod is provided with a first reference surface that can abut on the OHB along a first direction; the second reference rod is slidably arranged on the first reference rod along the first direction, and is provided with a second reference surface for abutting on the walking track, and the second reference surface is parallel to the first reference surface;

[0006] A second positioning component, wherein the second positioning component comprises an elastic member arranged along a first direction, and two ends of the elastic member are respectively connected to the first reference rod and the second reference rod;

[0007] The third positioning component includes a first connecting rod and a second connecting rod, wherein the first connecting rod and the second connecting rod have one end that is close to each other and is pivotally fixed, and the other end is pivotally connected to the first reference rod and the second reference rod respectively; the first connecting rod and the second connecting rod are jointly provided with a movable scale, and the movable scale is provided with scale marks corresponding to the spacing between the first reference plane and the second reference plane.

[0008] Furthermore, the movable scale includes a first scale and a second scale, the first scale and the second scale are respectively fixed to the first connecting rod and the second connecting rod, and the first scale and the second scale partially overlap along the second direction to form the scale mark.

[0009] Furthermore, a first ruler groove is formed at one end of the first scale away from the first connecting rod, and a second ruler groove is formed at one end of the second scale away from the second connecting rod. The first ruler groove can overlap with the second ruler groove in the second direction.

[0010] Furthermore, the movable ruler also includes an inserting plate, and the inserting plate can be inserted into the overlapping first ruler groove and second ruler groove.

[0011] Furthermore, the first reference rod includes a first vertical rod and a first horizontal rod arranged vertically. The first horizontal rod is arranged along the first direction and is provided with a sliding rail for the second reference rod to slide. The first vertical rod is provided with a limit plate, and the limit plate can abut against the OHB along the second direction.

[0012] Furthermore, the second reference rod includes a second vertical rod and a second horizontal rod arranged vertically, the second vertical rod is provided with the second reference surface, and the second horizontal rod is arranged along the first direction and is provided with a slider that slides along the first reference rod.

[0013] Furthermore, an end of the second cross bar away from the sliding block is provided with an extension section extending from the second vertical bar, and the extension section is arranged along the first direction and can abut against the upper end surface of the walking track.

[0014] The present invention also provides a detection and adjustment method using the above detection device, comprising the following steps:

[0015] Applying force to move the second reference rod toward the first reference rod, so that the distance between the first reference plane and the second reference plane is smaller than the distance between the OHB and the walking track, and at this time, the elastic member is in a compressed state;

[0016] The first reference rod and the second reference rod are placed between the OHB and the walking track, and the first reference surface abuts against the OHB along a first direction; the second reference rod is loosened, and the second reference rod can move in a direction away from the first reference rod under the action of the elastic member until the second reference surface abuts against the walking track, and at this time, the elastic member is still in a compressed state;

[0017] The scale mark reading on the movable scale is read and compared with a preset value. If the scale mark reading is less than the preset value, the OHB is knocked and pushed in a direction away from the walking track until the scale mark reading is the same as the preset value; if the scale mark reading is greater than the preset value, the OHB is knocked and pushed in a direction close to the walking track until the scale mark reading is the same as the preset value.

[0018] The present invention also provides a detection and adjustment method using the above detection device, comprising the following steps:

[0019] When the first ruler groove and the second ruler groove are set to coincide with each other, the spacing between the first reference plane and the second reference plane is set to be a standard spacing;

[0020] Applying force to move the second reference rod toward the first reference rod, so that the distance between the first reference plane and the second reference plane is smaller than the distance between the OHB and the walking track, and at this time, the elastic member is in a compressed state;

[0021] The first reference rod and the second reference rod are placed between the OHB and the walking track, and the first reference surface abuts against the OHB along a first direction; the second reference rod is loosened, and the second reference rod can move in a direction away from the first reference rod under the action of the elastic member until the second reference surface abuts against the walking track, and at this time, the elastic member is still in a compressed state;

[0022] Observe whether the first ruler groove and the second ruler groove are overlapped. If they are overlapped, it means that the distance between the OHB and the walking track does not need to be adjusted.

[0023] The present invention also provides a detection and adjustment method using the above detection device, comprising the following steps:

[0024] When the first ruler groove and the second ruler groove are overlapped, the spacing between the first reference surface and the second reference surface is set to be the standard spacing;

[0025] Apply force to move the second reference rod toward the first reference rod so that the first ruler groove overlaps with the second ruler groove; insert the plug plate into the first ruler groove and the second ruler groove, and then release the second reference rod, at this time, the first reference rod and the second reference rod remain stationary;

[0026] Place the first reference rod and the second reference rod between the OHB and the walking track. If the first reference plane abuts against the OHB along the first direction and there is a gap between the second reference plane and the walking track, push the OHB toward the direction approaching the walking track until the second reference plane abuts against the walking track. If the first reference plane does not abut against the OHB along the first direction and the second reference plane abuts against the walking track, push the OHB toward the direction away from the walking track until the first reference plane and the second reference plane can abut against the OHB and the walking track respectively along the first direction. BRIEF DESCRIPTION OF THE DRAWINGS

[0027] Figure 1 This is a schematic diagram of the structure in which the detection device according to an embodiment of the present invention is placed between the OHB and the walking track;

[0028] Figure 2 This is a structural schematic diagram of another perspective in which the detection device of an embodiment of the present invention is placed between the OHB and the walking track;

[0029] Figure 3 It is a structural schematic diagram of a detection device according to an embodiment of the present invention;

[0030] Figure 4 A schematic diagram of the structure of the detection device according to another embodiment of the present invention from another perspective;

[0031] Figure 5 It is a schematic structural diagram of the detection device when the elastic member is compressed according to an embodiment of the present invention.

[0032] In the figure:

[0033] 1-first reference rod; 11-first reference plane; 12-first vertical rod; 13-first horizontal rod; 14-limiting plate;

[0034] 2-second reference rod; 21-second reference plane; 22-second vertical rod; 23-second crossbar; 231-slider; 24-extension section;

[0035] 3-elastic member; 31-cylinder; 32-moving rod;

[0036] 41-first connecting rod; 42-second connecting rod; 43-movable scale; 431-first scale; 432-second scale;

[0037] 5-OHB;

[0038] 6- Walking track. DETAILED DESCRIPTION

[0039] The preferred embodiments of the present invention are described in detail below in conjunction with the accompanying drawings so that the advantages and features of the present invention can be more easily understood by those skilled in the art, thereby making a clearer and more definite definition of the protection scope of the present invention.

[0040] Example

[0041] In the prior art, when measuring and adjusting the distance between the OHB and the running track, a rod of fixed length is required, and the length of the rod is adapted to the required standard distance between the OHB and the running track (i.e., the pre-set distance). During operation, place the rod between the running track and the OHB. If the rod can be arranged along the width direction of the running track, and the two ends of the rod are respectively in contact with the side panels of the running track and the OHB, it means that the distance between the running track and the OHB is the standard distance; if the rod can be arranged along the width direction of the running track, and one end of the rod is in contact with the running track, and there is a gap between the other end and the side panel of the OHB, it means that the distance between the running track and the OHB is greater than the standard distance. At this time, keep the rod still and knock and push the side panel of the OHB in the direction close to the running track until O The side plate of HB abuts against the rod, at this time, the distance between the running track and OHB is adjusted to the standard distance; if the rod cannot be located between the running track and OHB along the width direction of the running track, it means that the distance between the running track and OHB is smaller than the standard distance. At this time, the side plate of OHB is knocked and pushed away from the running track so that the distance between the side plate of OHB and the running track is sufficient to accommodate the rod arranged along the width direction of the running track, and then the two ends of the rod body are respectively abutted between the running track and OHB by knocking and pushing the side plate of OHB.

[0042] Since OHB is usually hoisted and fixed by bolts and waist-shaped holes, the OHB can be slightly moved laterally by knocking and pushing, thereby adjusting the distance between the OHB and the running track. However, when a fixed-length rod is used for adjustment, the operator needs to hold the rod in hand during the adjustment process, and it is difficult for the operator to keep the position of the rod unchanged by holding the rod for a long time. In addition, when the OHB side panel is knocked and pushed in the direction of the running track, the impact force of the knock will be transmitted to the running track through the rod, which may cause slight deformation or displacement of the running track.

[0043] Based on this, see Appendix Figure 1-3As shown, a detection device of the present invention includes a first positioning component, a second positioning component, and a third positioning component. The first positioning component includes a first reference rod 1 and a second reference rod 2. The first reference rod 1 is provided with a first reference surface 11 that can abut against the OHB5 along the first direction; the second reference rod 2 is slidably arranged on the first reference rod 1 along the first direction, and is provided with a second reference surface 21 for abutting against the walking track 6, and the second reference surface 21 is parallel to the first reference surface 11. The second positioning component includes an elastic member 3 arranged along the first direction, and the two ends of the elastic member 3 are connected to the first reference rod 1 and the second reference rod 2 respectively. The third positioning component is located above the second positioning component, and includes a first connecting rod 41 and a second connecting rod 42. The first connecting rod 41 and the second connecting rod 42 are pivotally fixed at one end close to each other, and the other end is pivotally connected to the first reference rod 1 and the second reference rod 2 respectively; the first connecting rod 41 and the second connecting rod 42 are jointly provided with a movable scale 43, and the movable scale 43 is provided with scale marks corresponding to the distance between the first reference surface 11 and the second reference surface 21.

[0044] It should be noted that, in this embodiment, the "first direction" refers to the width direction of the running track 6, and the "second direction" refers to the length direction of the running track 6. The positions where the first reference plane 11 and the second reference plane 21 abut on the OHB5 and the running track 6 are consistent with the abutment positions of the rods in the prior art. Therefore, when the first reference plane 11 and the second reference plane 21 abut on the OHB5 and the running track 6 respectively, the distance between the first reference plane 11 and the second reference plane 21 can be equal to the distance between the OHB5 and the running track 6.

[0045] During detection, the second reference rod 2 is moved toward the direction close to the first reference rod 1, so that the second reference rod 2 and the first reference rod 1 can be placed between OHB5 and the running track 6 along the first direction. At this time, the elastic member 3 is compressed, and the first connecting rod 41 and the second connecting rod 42 are linked accordingly and present a folded posture; the first reference rod 1 and the second reference rod 2 are placed between OHB5 and the running track 6, and the first reference surface 11 is abutted against OHB5 along the first direction, and then the second reference rod 2 is released. The second reference rod 2 can be moved away from the first reference rod 1 under the action of the elastic member 3, and the first connecting rod 41 and the second connecting rod 42 are linked accordingly and present an unfolded posture until the second reference surface 21 abuts against the running track 6. At this time, the scale mark reading on the movable ruler 43 is the distance between OHB5 and the running track 6.

[0046] In the first positioning component, by setting a first reference plane 11 abutting against OHB5 on the first reference rod 1, and setting a second reference plane 21 abutting against the walking track 6 on the second reference rod 2, the measurement of the distance between OHB5 and the walking track 6 can be converted into the measurement of the distance between the first reference plane 11 and the second reference plane 21; then, by setting the second positioning component, when the first reference rod 1 and the second reference rod 2 are placed between OHB5 and the walking track 6, the first reference plane 11 and the second reference plane 21 can always abut against OHB5 and the walking track 6 under the action of the elastic member 3, ensuring the consistency of the distance between the first reference plane 11 and the second reference plane 21 and the distance between OHB5 and the walking track 6, thereby ensuring the accuracy of the measurement; then, by folding or unfolding the first connecting rod 41 and the second connecting rod 42 in the third positioning component, the dynamic measurement of the distance between the first reference plane 11 and the second reference plane 21 by the active scale 43 is ensured, and the distance between OHB5 and the walking track 6 is quickly obtained through the scale mark, thereby improving the detection efficiency.

[0047] In the first positioning component, the second reference rod 2 slides relative to the first reference rod 1, so that the distance between the first reference plane 11 and the second reference plane 21 is adjustable, so as to quickly place the first reference rod 1 and the second reference rod 2 between the OHB5 and the walking track 6, avoiding the problem that the first reference rod 1 and the second reference rod 2 cannot be placed due to the small distance between the OHB5 and the walking track 6; and because the distance between the first reference plane 11 and the second reference plane 21 is adjustable, it can adapt to the changes in the distance requirements between the OHB5 and the walking track 6 in different application scenarios, thereby expanding the scope of application and flexibility of use of the detection device of the present application.

[0048] In the second positioning component, the elastic member 3 is provided so that the first reference rod 1 and the second reference rod 2 can automatically abut against OHB5 and the running track 6 during the detection process, which not only improves the detection efficiency, but also reduces the work intensity of the personnel holding the detection device during the detection process; and due to the provision of the elastic member 3, the first reference surface 11 of the first reference rod 1 and the second reference surface 21 of the second reference rod 2 can flexibly abut against OHB5 and the running track 6 to avoid damage to OHB5 and the running track 6 caused by rigid abutment. In addition, when the position of OHB5 is subsequently adjusted by knocking and pushing, the elastic member 3 can buffer and reduce the impact force of the knocking to avoid deformation or displacement of the running track 6 caused by the impact force of the knocking being transmitted to the running track 6.

[0049] In the third positioning component, through the pivotal cooperation of the first connecting rod 41 and the second connecting rod 42, the third positioning component can be linked with the sliding of the second reference rod 2 relative to the first reference rod 1, thereby ensuring that the scale mark on the movable ruler 43 is always adapted to the distance between the first reference surface 11 and the second reference surface 21, and realizing the dynamic measurement of the distance between the first reference surface 11 and the second reference surface 21. And because the third positioning component can read the scale mark reading in real time (equivalent to the real-time distance between OHB5 and the walking track 6), when the OHB5 position is adjusted by knocking and pushing in the subsequent process, the knocking and pushing force can be controlled according to the difference between the scale mark reading and the standard distance. For example, when the difference is small, the knocking and pushing force can be slightly smaller, and when the difference is large, the knocking and pushing force can be slightly larger, so that the distance adjustment is more convenient and quick.

[0050] It should be noted that, during the detection process, no matter whether the distance between OHB5 and the running track 6 is greater than, less than or equal to the standard distance, when the first reference rod 1 and the second reference rod 2 are located between OHB5 and the running track 6, the first reference plane 11 and the second reference plane 21 can respectively abut against OHB5 and the running track 6 under the action of the elastic member 3. In other words, in order to ensure that the first reference plane 11 and the second reference plane 21 can always abut against OHB5 and the running track 6 respectively during the detection process, the elastic member 3 should always be in a compressed state. In other words, when the elastic member 3 is in a natural state, the distance between the first reference plane 11 and the second reference plane 21 should be greater than the distance between OHB5 and the running track 6.

[0051] In some embodiments, see Appendix Figure 3-5 As shown, the movable scale 43 includes a first scale 431 and a second scale 432, and the first scale 431 and the second scale 432 are respectively fixed to the first connecting rod 41 and the second connecting rod 42, and the first scale 431 and the second scale 432 partially overlap along the second direction to form a scale mark. During the sliding process of the second reference rod 2, the first connecting rod 41 and the second connecting rod 42 can be folded or unfolded accordingly, thereby causing the size of the overlapping portion of the first scale 431 and the second scale 432 to change. Therefore, the change in the spacing between the first reference surface 11 and the second reference surface 21 can be quantified by using the change in the overlapping portion of the first scale 431 and the second scale 432.

[0052] Specifically, the first scale 431 and the second scale 432 are arranged at the junction of the first connecting rod 41 and the second connecting rod 42, wherein one end of the first scale 431 is fixedly connected to the first connecting rod 41, and the other end is inclined toward the second connecting rod 42. One end of the second scale 432 is fixedly connected to the second connecting rod 42, and the other end is inclined toward the first connecting rod 41. And one end of the first scale 431 away from the first connecting rod 41 and one end of the second scale 432 away from the second connecting rod 42 overlap in the second direction to form a scale mark.

[0053] In some embodiments, a first ruler groove is provided at one end of the first scale 431 away from the first connecting rod 41, and a second ruler groove is provided at one end of the second scale 432 away from the second connecting rod 42. When the spacing between the first reference plane 11 and the second reference plane 21 is a standard spacing, the first ruler groove and the second ruler groove can overlap in the second direction. By setting the first ruler groove and the second ruler groove, it can be directly determined whether the spacing between OHB5 and the running track 6 is a standard spacing, thereby eliminating the need to determine whether the spacing between OHB5 and the running track 6 is a standard spacing by reading the scale mark during the detection process, thereby improving the detection efficiency.

[0054] Furthermore, the end of the first scale 431 away from the first connecting rod 41 is a first wedge-shaped surface, and along the second direction, the first wedge-shaped surface gradually slopes down from the direction close to the second scale 432 to the direction away from the second scale 432. The end of the second scale 432 away from the second connecting rod 42 is a second wedge-shaped surface, and along the second direction, the second wedge-shaped surface gradually slopes down from the direction close to the first scale 431 to the direction away from the first scale 431. Since the first scale groove and the second scale groove are respectively arranged on the first wedge-shaped surface and the second wedge-shaped surface, and the inclined arrangement of the first wedge-shaped surface and the second wedge-shaped surface, the operator can observe whether the first scale groove overlaps with the second scale groove at different positions, thereby improving the convenience of detection.

[0055] In order to avoid visual fatigue caused by human eyes observing whether the first ruler groove and the second ruler groove overlap, in some embodiments, the movable ruler 43 also includes an insert plate, and when the first ruler groove and the second ruler groove overlap, the insert plate can be inserted into the first ruler groove and the second ruler groove at the same time.

[0056] During the detection process, when the first reference surface 11 and the second reference surface 21 are respectively in contact with the OHB5 and the running track 6, the plug-in board is inserted from the first ruler slot to the second ruler slot (or from the second ruler slot to the first ruler slot). If the plug-in board can be inserted into the second ruler slot (or the first ruler slot), it means that the spacing between the OHB5 and the running track 6 is the standard spacing. If the plug-in board cannot be inserted into the second ruler slot (or the first ruler slot), it means that the spacing between the OHB5 and the running track 6 is not the standard spacing. The setting of the plug-in board can quickly determine whether the first ruler slot and the second ruler slot overlap.

[0057] In some embodiments, see Appendix Figure 3-4 As shown, the first reference rod 1 includes a vertically arranged first vertical rod 12 and a first cross rod 13. The first cross rod 13 is arranged along a first direction, and is provided with a slide rail for sliding the second reference rod 2. The first vertical rod 12 is arranged vertically, and is provided with a first reference surface 11.

[0058] In order to improve the stability of the abutment position between the first reference rod 1 and OHB5, in some embodiments, a limiting plate 14 that can abut on OHB5 along the second direction is further provided on the first vertical rod 12. The first reference surface 11 can limit the abutment position between the first reference rod 1 and OHB5 in the first direction, and the limiting plate 14 can limit the abutment position between the first reference rod 1 and OHB5 in the second direction, that is, the abutment position between the first reference rod 1 and OHB5 can be limited in two vertical directions through the cooperation of the limiting plate 14 and the first reference surface 11, thereby ensuring the stability of the abutment position between the first reference rod 1 and OHB5, and avoiding the problem of inaccurate measurement results caused by the deflection or slippage of the abutment position when knocking and pushing OHB5 in the future.

[0059] In some embodiments, the second reference rod 2 includes a second vertical rod 22 and a second cross rod 23 arranged vertically. The first cross rod 13 is arranged along the first direction, and a slider 231 sliding along the slide rail is arranged thereon. The second vertical rod 22 is arranged vertically, and a second reference surface 21 is arranged thereon.

[0060] Furthermore, an extension section 24 extending from the second vertical rod 22 is provided at one end of the second cross bar 23 away from the slider 231, and the extension section 24 is arranged along the first direction and can abut against the upper end surface of the running track 6. The extension section 24 can limit the abutting position of the second reference bar 2 and the running track 6 in the vertical direction, and then the second reference surface 21 can limit the abutting position of the second reference bar 2 and the running track 6 in the first direction, so as to ensure that the abutting position of the second reference bar 2 and the running track 6 is limited in two vertical directions, thereby ensuring the stability of the abutting position of the second reference bar 2 and the running track 6.

[0061] In addition, the first reference rod 1 abuts on OHB5 in the first direction and the second direction upper limit position, and the second reference rod 2 abuts on the walking track 6 in the first direction and the vertical upper limit position. Therefore, when the first reference rod 1 and the second reference rod 2 are placed between OHB5 and the walking track 6, OHB5 and the walking track 6 can jointly limit the entire detection device in three directions (first direction, second direction, vertical), and thus, there is no need to manually hold the detection device during the detection and subsequent adjustment process, which reduces the workload of the operator to a certain extent.

[0062] In some embodiments, see Appendix Figure 3As shown, the elastic member 3 includes a cylinder 31, a moving rod 32, and a spring arranged along a first direction. One end of the cylinder 31 is connected to the second vertical rod 22. The spring is located in the cylinder 31, and its two ends are connected to the moving rod 32 and the cylinder 31 respectively. One end of the moving rod 32 is connected to the first vertical rod 12, and the other end extends into the cylinder 31 and is connected to the spring.

[0063] When the second reference rod 2 slides relative to the first reference rod 1, the second vertical rod 22 can move toward or away from the first vertical rod 12, and the cylinder 31 moves accordingly and drives the spring to compress or stretch, and the spring then pushes or pulls the moving rod 32 to move away from or toward the cylinder 31. It should be noted that in this embodiment, when the second reference rod 2 and the first reference rod 1 are located between the OHB5 and the running track 6, the spring is always in a compressed state, so the spring always pushes the moving rod 32 to move the moving rod 32 away from the cylinder 31 until the first reference rod 1 and the second reference rod 2 abut against the OHB5 and the running track 6 respectively.

[0064] In the elastic member 3, the cooperation of the cylinder 31, the moving rod 32 and the spring ensures that the elastic member 3 can telescope and move with the sliding of the second reference rod 2 relative to the first reference rod 1, and can also use the cylinder 31 to guide the movement of the moving rod 32 to guide the sliding direction of the second reference rod 2 relative to the first reference rod 1, thereby avoiding the situation where the second reference rod 2 is difficult to move along the slide rail due to the angle between it and the first reference rod 1 when it slides under force.

[0065] Based on the above detection device, the present invention also provides a detection and adjustment method, comprising the following steps:

[0066] (1) Applying force to move the second reference rod 2 toward the first reference rod 1, so that the distance between the first reference plane 11 and the second reference plane 21 is smaller than the distance between the OHB 5 and the running track 6. At this time, the elastic member 3 is in a compressed state;

[0067] (2) The first reference rod 1 and the second reference rod 2 are placed between the OHB 5 and the running track 6, and the first reference surface 11 abuts against the OHB 5 along the first direction; the second reference rod 2 is released, and the second reference rod 2 can move away from the first reference rod 1 under the action of the elastic member 3 until the second reference surface 21 abuts against the running track 6, and at this time, the elastic member 3 is still in a compressed state;

[0068] (3) Read the scale mark reading on the movable scale 43 and compare it with the preset value (i.e., the standard spacing). If the scale mark reading is less than the preset value, push OHB5 in the direction away from the running track 6 until the scale mark reading is the same as the preset value; if the scale mark reading is greater than the preset value, push OHB5 in the direction close to the running track 6 until the scale mark reading is the same as the preset value.

[0069] Step (1) ensures that the detection device can smoothly enter between OHB5 and the running track 6 by moving the second reference rod 2 toward the first reference rod 1; step (2) enables the first reference rod 1 and the second reference rod 2 to automatically abut against OHB5 and the running track 6 through the action of the elastic member 3, so that the distance between the first reference plane 11 and the second reference plane 21 can be equal to the distance between OHB5 and the running track 6; step (3) can quickly determine whether the distance between OHB5 and the running track 6 is correct by comparing the scale mark reading with the preset value, and then adjust OHB5 by knocking and pushing according to the comparison result, so as to adjust the distance between OHB5 and the running track 6 to the required preset value. The detection and adjustment method realizes the distance change between the first reference plane 11 and the second reference plane 21 through the sliding change of the first reference rod 1 and the second reference rod 2, and can adapt to the distance measurement between OHB5 and the running track 6 in different application scenarios, thereby improving the flexibility of use.

[0070] Specifically, in step (2), when the first reference rod 1 and the second reference rod 2 are placed between OHB5 and the running track 6, the first reference surface 11 is abutted against OHB5 in the first direction, and the limit plate 14 is abutted against OHB5 in the second direction, and then the extension section 24 is overlapped on the upper end of the running track 6; the second reference rod 2 is released, and the second reference rod 2 can move in the direction away from the first reference rod 1 under the action of the elastic member 3. At this time, the second vertical rod 22 moves in the direction of the running track 6 under the action of the elastic member 3, and the second cross rod 23 moves immediately, and drives the extension section 24 to move along the upper end surface of the running track 6 until the second reference surface 21 of the second vertical rod 22 abuts against the side surface of the running track 6. At this time, the extension section 24 is still overlapped on the upper end of the running track 6.

[0071] Through the cooperation of the first reference plane 11, the limit plate 14 and the extension section 24, the position of the detection device in the first direction, the second direction and the vertical direction can be limited, and then after the second reference rod 2 is subsequently loosened, the detection device can be stably located between the OHB5 and the walking track 6 without manual holding, and because the limit plate 14 and the extension section 24 are limited in the second direction and the vertical direction, after the second reference rod 2 is loosened, the second reference rod 2 can only move along the first direction under the action of the elastic member 3, thereby ensuring that the spacing direction between the first reference plane 11 and the second reference plane 21 remains in the first direction.

[0072] In step (3), if the scale mark reading is less than the preset value, it means that the distance between OHB5 and the running track 6 is too small. At this time, OHB5 is knocked and pushed in the direction away from the running track 6 to make OHB5 move slightly in the direction away from the running track 6. Since the elastic member 3 is in a compressed state, when a gap appears between OHB5 and the first reference surface 11 due to the movement of OHB5, the first reference rod 1 can move synchronously with OHB5 under the action of the elastic member 3 to ensure that the first reference surface 11 always abuts against OHB5. At this time, due to the movement of the first reference rod 1, the first connecting rod 41 and the second connecting rod 42 are linked and unfolded, and the scale mark reading on the movable scale 43 changes immediately. When the scale mark reading is consistent with the preset value, it means that the distance between OHB5 and the running track 6 has been adjusted to the preset value. At this time, the detection device can be taken out from between OHB5 and the running track 6.

[0073] If the scale mark reading is greater than the preset value, it means that the distance between OHB5 and the running track 6 is too large. At this time, OHB5 is knocked and pushed in the direction close to the running track 6 to make OHB5 move slightly in the direction close to the running track 6, and the first reference rod 1 then moves in the direction of the second reference rod 2, the elastic member 3 is further compressed, and the first connecting rod 41 and the second connecting rod 42 are then linked and folded, and the scale mark reading on the movable scale 43 changes immediately. When the scale mark reading is consistent with the preset value, it means that the distance between OHB5 and the running track 6 has been adjusted to the preset value. At this time, the detection device can be taken out from between OHB5 and the running track 6. In the process of knocking and pushing OHB5 in the direction of the running track 6, the impact force of the knocking on OHB5 will be buffered and reduced by the elastic member 3, thereby avoiding the deformation and movement of the running track 6 caused by the impact force of the knocking being transmitted to the running track 6.

[0074] If the scale mark reading is equal to the preset value, it means that the distance between OHB5 and the running track 6 does not need to be adjusted. At this time, the detection device can be taken out from between OHB5 and the running track 6. When taking out the detection device, force is applied to the first reference rod 1 and the second reference rod 2 to make the first reference rod 1 and the second reference rod 2 approach each other until the distance between the first reference surface 11 and the second reference surface 21 is smaller than the distance between OHB5 and the running track 6, and then the first reference rod 1 and the second reference rod 2 are lifted upward to take the detection device out from between OHB5 and the running track 6.

[0075] Due to the action of the elastic member 3, the first reference plane 11 and the second reference plane 21 can always abut against the OHB5 and the walking track 6. Therefore, during the detection and adjustment process, the personnel do not need to hold the detection device, but only need to observe the changes in the scale mark readings in real time, which reduces the work intensity of the personnel.

[0076] In some embodiments, in order to quickly determine whether the distance between the OHB 5 and the walking track 6 is deviated, the present invention further provides a detection and adjustment method, comprising the following steps:

[0077] (1) When the first ruler groove and the second ruler groove coincide with each other, the spacing between the first reference surface 11 and the second reference surface 21 is set as the standard spacing;

[0078] (2) applying force to move the second reference rod 2 toward the first reference rod 1, so that the distance between the first reference plane 11 and the second reference plane 21 is smaller than the distance between the OHB 5 and the running track 6. At this time, the elastic member 3 is in a compressed state;

[0079] (3) The first reference rod 1 and the second reference rod 2 are placed between the OHB 5 and the running track 6, and the first reference surface 11 abuts against the OHB 5 along the first direction; the second reference rod 2 is released, and the second reference rod 2 can move away from the first reference rod 1 under the action of the elastic member 3 until the second reference surface 21 abuts against the running track 6, and at this time, the elastic member 3 is still in a compressed state;

[0080] (4) Observe whether the set first groove and second groove overlap. If so, it means that the distance between OHB5 and the running track 6 does not need to be adjusted.

[0081] This method can quickly determine whether the spacing between OHB5 and the running track 6 is correct by simply observing whether the first ruler groove and the second ruler groove overlap, thereby eliminating the tedious operation of reading the scale mark and comparing the read scale mark with the preset value, making the detection more convenient and quick. However, in step (4), when observing whether the first ruler groove and the second ruler groove overlap, there may be a misjudgment phenomenon due to visual fatigue of the operator. Based on this, in some embodiments, a plug plate can be used to determine whether the first ruler groove and the second ruler groove overlap. Specifically, in step (4), the plug plate is inserted along the first groove toward the second groove. If the plug plate can be inserted into the first groove and the second groove at the same time, it means that the first groove and the second groove overlap, and the spacing between OHB5 and the running track 6 is the standard spacing. At this time, there is no need to adjust the spacing between OHB5 and the running track 6. If the plug plate cannot be inserted into the first groove and the second groove at the same time, it means that the first groove does not overlap with the second groove, and the spacing between OHB5 and the running track 6 is not the standard spacing. At this time, the spacing between OHB5 and the running track 6 needs to be adjusted.

[0082] In some embodiments, based on the cooperation between the plug board and the first ruler slot and the second ruler slot, the present invention further provides a detection and adjustment method, comprising the following steps:

[0083] (1) When the first ruler groove and the second ruler groove coincide with each other, the spacing between the first reference surface 11 and the second reference surface 21 is set as the standard spacing;

[0084] (2) Apply force to move the second reference rod 2 toward the first reference rod 1 so that the first ruler groove overlaps with the second ruler groove; insert the plug plate into the first ruler groove and the second ruler groove, and then release the second reference rod 2. At this time, the first reference rod 1 and the second reference rod 2 remain stationary;

[0085] (3) Place the first reference rod 1 and the second reference rod 2 between OHB5 and the running track 6. If the first reference surface 11 abuts against OHB5 along the first direction and there is a gap between the second reference surface 21 and the running track 6, push OHB5 in the direction close to the running track 6 until the second reference surface 21 abuts against the running track 6. If the first reference surface 11 does not abut against OHB5 along the first direction and the second reference surface 21 abuts against the running track 6, push OHB5 in the direction away from the running track 6 until the first reference surface 11 and the second reference surface 21 can abut against OHB5 and the running track 6 respectively along the first direction.

[0086] By inserting the plug plate into the first ruler slot and the second ruler slot, the spacing between the first reference plane 11 and the second reference plane 21 is fixed to the standard spacing. When the detection device is placed between OHB5 and the running track 6, if the first reference plane 11 abuts against OHB5 along the first direction, and there is a gap between the second reference plane 21 and the running track 6, it means that the spacing between OHB5 and the running track 6 is greater than the standard spacing; if the first reference plane 11 does not abut against OHB5 along the first direction, and the second reference plane 21 abuts against the running track 6, it means that the spacing between OHB5 and the running track 6 is less than the standard spacing; if the first reference plane 11 and the second reference plane 21 abut against OHB5 and the running track 6 respectively along the first direction, it means that the spacing between OHB5 and the running track 6 is equal to the standard spacing. In the detection and adjustment process, the detection and adjustment method does not need to observe the reading of the scale mark in real time, thereby reducing the labor intensity of personnel.

[0087] The above implementation modes are only for illustrating the technical concept and features of the present invention, and their purpose is to enable people familiar with this technology to understand the content of the present invention and implement it, and they cannot be used to limit the protection scope of the present invention. Any equivalent changes or modifications made according to the spirit of the present invention should be included in the protection scope of the present invention.

Claims

1. A detection device, characterized in that: include A first positioning component, the first positioning component includes a first reference rod and a second reference rod, the first reference rod is provided with a first reference surface that can abut on the OHB along a first direction; the second reference rod is slidably arranged on the first reference rod along the first direction, and is provided with a second reference surface for abutting on the walking track, and the second reference surface is parallel to the first reference surface; A second positioning component, wherein the second positioning component comprises an elastic member arranged along a first direction, and two ends of the elastic member are respectively connected to the first reference rod and the second reference rod; The third positioning component comprises a first connecting rod and a second connecting rod, wherein the first connecting rod and the second connecting rod have one end close to each other pivotally fixed, and the other end pivotally connected to the first reference rod and the second reference rod respectively; the first connecting rod and the second connecting rod are jointly provided with a movable scale, and the movable scale is provided with a scale mark corresponding to the spacing between the first reference plane and the second reference plane; the movable scale comprises a first scale and a second scale, wherein one end of the first scale is fixedly connected to the first connecting rod, and the other end is inclined toward the direction of the second connecting rod, and one end of the second scale is fixedly connected to the second connecting rod, and the other end is inclined toward the direction of the first connecting rod, and an end of the first scale away from the first connecting rod and an end of the second scale away from the second connecting rod overlap in the second direction to form the scale mark.

2. The detection device according to claim 1, characterized in that: A first ruler groove is formed at one end of the first scale away from the first connecting rod, and a second ruler groove is formed at one end of the second scale away from the second connecting rod. The first ruler groove can overlap with the second ruler groove in a second direction.

3. The detection device according to claim 2, characterized in that: The movable ruler also includes an inserting plate, and the inserting plate can be inserted into the overlapping first ruler groove and second ruler groove.

4. The detection device according to claim 1, characterized in that: The first reference rod comprises a first vertical rod and a first horizontal rod arranged vertically. The first horizontal rod is arranged along a first direction and is provided with a slide rail for the second reference rod to slide. The first vertical rod is provided with a limit plate, and the limit plate can abut against the OHB along a second direction.

5. The detection device according to claim 1, characterized in that: The second reference rod comprises a second vertical rod and a second cross rod which are arranged vertically. The second vertical rod is provided with the second reference surface. The second cross rod is arranged along the first direction and is provided with a slider which slides along the first reference rod.

6. The detection device according to claim 5, characterized in that: An end of the second cross bar away from the sliding block is provided with an extension section extending from the second vertical bar, and the extension section is arranged along the first direction and can abut against the upper end surface of the walking track.

7. A detection and adjustment method using the detection device according to any one of claims 1 to 6, characterized in that: The steps include: Applying force to move the second reference rod toward the first reference rod, so that the distance between the first reference plane and the second reference plane is smaller than the distance between the OHB and the walking track, and at this time, the elastic member is in a compressed state; The first reference rod and the second reference rod are placed between the OHB and the walking track, and the first reference surface abuts against the OHB along a first direction; the second reference rod is loosened, and the second reference rod can move in a direction away from the first reference rod under the action of the elastic member until the second reference surface abuts against the walking track, and at this time, the elastic member is still in a compressed state; The scale mark reading on the movable scale is read and compared with a preset value. If the scale mark reading is less than the preset value, the OHB is knocked and pushed in a direction away from the walking track until the scale mark reading is the same as the preset value; if the scale mark reading is greater than the preset value, the OHB is knocked and pushed in a direction close to the walking track until the scale mark reading is the same as the preset value.

8. A detection and adjustment method using the detection device of claim 2, characterized in that: The steps include: When the first ruler groove and the second ruler groove are set to coincide with each other, the spacing between the first reference plane and the second reference plane is set to be a standard spacing; Applying force to move the second reference rod toward the first reference rod, so that the distance between the first reference plane and the second reference plane is smaller than the distance between the OHB and the walking track, and at this time, the elastic member is in a compressed state; The first reference rod and the second reference rod are placed between the OHB and the walking track, and the first reference surface abuts against the OHB along a first direction; the second reference rod is loosened, and the second reference rod can move in a direction away from the first reference rod under the action of the elastic member until the second reference surface abuts against the walking track, and at this time, the elastic member is still in a compressed state; Observe whether the first ruler groove and the second ruler groove are overlapped. If they are overlapped, it means that the distance between the OHB and the walking track does not need to be adjusted.

9. A detection and adjustment method using the detection device of claim 3, characterized in that: The steps include: When the first ruler groove and the second ruler groove are overlapped, the spacing between the first reference surface and the second reference surface is set to be the standard spacing; Apply force to move the second reference rod toward the first reference rod so that the first ruler groove overlaps with the second ruler groove; insert the plug plate into the first ruler groove and the second ruler groove, and then release the second reference rod, at this time, the first reference rod and the second reference rod remain stationary; Place the first reference rod and the second reference rod between the OHB and the walking track. If the first reference plane abuts against the OHB along the first direction and there is a gap between the second reference plane and the walking track, push the OHB toward the direction approaching the walking track until the second reference plane abuts against the walking track. If the first reference plane does not abut against the OHB along the first direction and the second reference plane abuts against the walking track, push the OHB toward the direction away from the walking track until the first reference plane and the second reference plane can abut against the OHB and the walking track respectively along the first direction.

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