Angular velocity sensing device, MEMS gyroscope and angular velocity measuring method

Abstract

The invention provides an angular velocity sensing device, an MEMS gyroscope and an angular velocity measuring method, and relates to the technical field of MEMS sensing. The angular velocity sensing device comprises a base, an oscillation driving assembly arranged on the base and an oscillation transmission assembly connected between the oscillation driving assembly and the base. The internal structure of the oscillation transmission assembly is provided with a connecting beam, and / or the connecting beam is connected between the oscillation transmission assembly and the base; the oscillation driving assembly is used for driving the oscillation transmission assembly to oscillate in the preset direction, the connecting beam is provided with a stress sensing area capable of sensing the oscillation, and the stress sensing area is provided with an effect junction with a piezoresistance-avalanche effect. The MEMS gyroscope comprises a reverse bias power supply, a measuring assembly, a control assembly and the angular velocity sensing device. According to the angular velocity measurement method, the MEMS gyroscope is adopted. The angular velocity sensing device applied to the gyroscope has the characteristics of high measurement sensitivity, simple structure, low manufacturing cost and small volume.

Description

Technical Field

[0001] The present invention relates to the field of micro-electromechanical sensing technology, and in particular to an angular velocity sensing device, a MEMS gyroscope and an angular velocity measuring method. Background Art

[0002] MEMS (Micro-Electro-Mechanical System) gyroscopes have the advantages of small size and low cost, and are widely used in the fields of automobiles, consumer electronics, etc. They mainly include capacitive gyroscopes and piezoresistive gyroscopes. Among them, capacitive gyroscopes have high requirements for manufacturing process and poor measurement sensitivity; piezoresistive gyroscopes have low measurement sensitivity, complex structure, and large size. Therefore, there is an urgent need for a gyroscope that can simultaneously meet the requirements of high measurement sensitivity, simple structure, low manufacturing cost, and small size. Summary of the invention

[0003] The object of the present invention is to provide an angular velocity sensor device, a MEMS gyroscope and an angular velocity measurement method to solve the technical problems of low measurement sensitivity, complex structure, high manufacturing cost and large size of the existing gyroscope.

[0004] In order to solve the above problems, the present invention provides an angular velocity sensor device, comprising a base, an oscillation driving component arranged on the base, and an oscillation transmission component connected therebetween; the internal structure of the oscillation transmission component has a connecting beam, and / or a connecting beam is connected between the oscillation transmission component and the base;

[0005] The oscillation driving component is used to drive the oscillation transmission component to perform oscillatory motion along a preset direction. The connecting beam has a stress induction area capable of inducing the oscillation motion, and the stress induction area is provided with an effect junction with a piezoresistive-avalanche effect.

[0006] Optionally, the oscillation transmission component is a symmetrical structure, there are multiple connecting beams, and the multiple connecting beams are symmetrically arranged.

[0007] Optionally, the effect junction is a PN junction.

[0008] Optionally, the oscillation transmission component comprises:

[0009] The driving frame comprises two driving frames which are symmetrically arranged in the Y direction and have openings on opposite sides, the two driving frames are connected with connecting arms between the first ends and the second ends in the Y direction, and the connecting arms are rotatably connected to the base at the symmetrical positions in the Y direction; the outer frame bars of the two driving frames along the X direction are connected to the oscillation driving assembly, and the oscillation driving assembly is used to drive the driving frame to oscillate along the Y direction;

[0010] A Coriolis frame, comprising two Coriolis frames, the two Coriolis frames are located in the two driving frames in a one-to-one correspondence, and X-directional springs are connected between the two ends of the Coriolis frames in the X direction and the corresponding driving frames; and

[0011] A detection frame, comprising two detection frames, the two detection frames are located in the two Coriolis frames in a one-to-one correspondence, and Y one-way springs are connected between the two ends of the detection frame in the Y direction and the corresponding Coriolis frames, and a coupling spring is connected between the two detection frames;

[0012] The connecting beams are connected between both ends of the detection frame along the X direction and the base, and the connecting beams are connected between the outer frame bars of the driving frame along the Y direction and the base.

[0013] Optionally, calculate the angular velocity as follows:

[0014]

[0015] In the formula, Ω Z is the angular velocity of the angular velocity sensor, rad / s; A s is the X-axis displacement of the detection frame, m; A d is the Y displacement of the Coriolis frame, m; m d is the equivalent mass of the driving frame, kg; m c is the equivalent mass of the Coriolis frame, kg; m s is the equivalent mass of the detection frame, kg; f s is the modal frequency of the detection frame, Hz; f d is the modal frequency of the driving frame, Hz; f in is the frequency of the driving voltage, Hz; Q d Q is the quality factor of the drive frame related to damping; s is the quality factor of the detection frame related to damping.

[0016] The present invention also provides a MEMS gyroscope, comprising a reverse bias power supply, a measuring component, a control component and the above-mentioned angular velocity sensor device, wherein the reverse bias power supply is connected to both ends of an effect junction in the angular velocity sensor device, and is used to apply a reverse voltage to the effect junction to cause it to enter a breakdown state; the measuring component is connected to the effect junction, and is used to measure the breakdown electrical parameters of the effect junction; and the control component is communicatively connected to the reverse bias power supply and the measuring component.

[0017] The present invention also provides an angular velocity measurement method, using the above-mentioned MEMS gyroscope, the measurement method comprising:

[0018] Adjusting the reverse bias power supply to apply a reverse voltage to the effect junction to put the effect junction into a breakdown state, and adjusting the oscillation driving component to drive the oscillation transmission component to oscillate in a preset direction;

[0019] The measuring component detects the breakdown electrical parameters of the effect junction and feeds back to the control component;

[0020] The control component calculates the angular velocity according to the breakdown electrical parameters, the structural related parameters of the angular velocity sensor device and the driving voltage of the oscillation driving component.

[0021] Optionally, the step of the control component calculating the angular velocity according to the breakdown electrical parameter, the structural related parameters of the angular velocity sensor device and the driving voltage of the oscillation driving component includes:

[0022] Calculating the stress of the corresponding connecting beam according to the breakdown electrical parameters and the structural related parameters of the angular velocity sensor device;

[0023] Calculating displacement motion information of the oscillation transmission component based on the stress and structural related parameters of the angular velocity sensor device;

[0024] The angular velocity is calculated based on the displacement motion information, the structural related parameters of the angular velocity sensor device and the driving voltage of the oscillation driving component.

[0025] Optionally, a constant reverse voltage is applied to the effect junction to make the effect junction enter a breakdown state, and the step of calculating the stress of the corresponding connecting beam according to the breakdown electrical parameters and the structural related parameters of the angular velocity sensor device includes:

[0026] The stress is calculated according to the following formula:

[0027]

[0028] in,

[0029] V Th =k B T / q;

[0030] Wherein, σ is the stress in the stress induction area, Pa; △I is the breakdown current change value of the effect junction when the stress induction area is stressed, A; I0 is the initial breakdown current of the effect junction when the stress induction area is not stressed, A; α is the material parameter related to the connecting beam and the energy band gap, eV / Pa; q is the electron charge constant, 1.602×10 -19 C; V Th is the thermal voltage, V; V BR0 is the constant reverse voltage, V; n is the error coefficient; k B is the Boltzmann constant; T is the absolute temperature of the environment where the connecting beam is located, K.

[0031] Optionally, a constant reverse current is applied to the effect junction to make the effect junction enter a breakdown state, and the step of calculating the stress of the corresponding connecting beam according to the breakdown electrical parameter and the structural related parameters of the angular velocity sensor device includes:

[0032] The stress is calculated according to the following formula:

[0033]

[0034] Where, σ is the stress in the stress induction area, Pa; △V BR is the breakdown voltage change value of the effect junction when the stress induction area is subjected to stress, V; V BR0 is the initial breakdown voltage of the effect junction when the stress induction region is not subjected to stress, V; α is the material parameter of the connecting beam related to the energy band gap, eV / Pa; E g0 Initial band gap of the material used for the connecting beam, eV; k B is the Boltzmann constant; T is the absolute temperature of the environment where the connecting beam is located, K.

[0035] When the angular velocity sensing device provided by the present invention is applied to a MEMS gyroscope, the stress change in the stress sensing area can be amplified and displayed according to the piezoresistance-avalanche effect of the effect junction through the initial breakdown electrical parameter and the breakdown electrical parameter change value with a large change amplitude, so as to improve the sensing sensitivity of the gyroscope to the angular velocity, and at the same time, the displacement of the oscillation transmission component, the angular velocity of the gyroscope, the Coriolis force, the driving voltage of the oscillation driving component, the stress in the stress sensing area, the initial breakdown electrical parameter and the breakdown electrical parameter change value are comprehensively considered to more accurately obtain the angular velocity, thereby greatly improving the angular velocity measurement sensitivity of the gyroscope; at the same time, the MEMS gyroscope only needs to set a simple-structured effect junction in the stress sensing area of ​​its connecting beam and connect a reverse bias power supply, and then cooperate with the measuring component and the control component to perform high-precision measurement of the angular velocity, and has a simple structure, a small size, low manufacturing difficulty and low cost. BRIEF DESCRIPTION OF THE DRAWINGS

[0036] In order to more clearly illustrate the specific implementation methods of the present invention or the technical solutions in the prior art, the drawings required for use in the specific implementation methods or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are some implementation methods of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0037] Figure 1 A schematic top view of the angular velocity sensor device provided by an embodiment of the present invention when it is in the form of a dual mass block;

[0038] Figure 2 A schematic top view of the angular velocity sensor device provided by an embodiment of the present invention in the form of a single mass block;

[0039] Figure 3 A schematic top view of the angular velocity sensor device provided by an embodiment of the present invention when the angular velocity sensor device is a butterfly structure;

[0040] Figure 4 A schematic flow chart of an angular velocity measurement method of a MEMS gyroscope provided in an embodiment of the present invention.

[0041] Description of reference numerals:

[0042] 100-base; 200-oscillation drive assembly; 210-fixed comb teeth; 220-movable comb teeth; 300-oscillation transmission assembly; 310-drive frame; 311-drive frame; 312-opening; 313-connecting arm; 320-Coriolis frame; 321-Coriolis frame; 330-X one-way spring; 340-detection frame; 341-detection frame; 342-coupling spring; 350-Y one-way spring; 360-transmission unit; 370-connecting unit; 400-connecting beam; 500-anchor area. DETAILED DESCRIPTION

[0043] The technical solution of the present invention will be described clearly and completely below in conjunction with the accompanying drawings. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of them. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0044] In the description of the present invention, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc., indicating the orientation or positional relationship, are based on the orientation or positional relationship shown in the drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as limiting the present invention. In addition, the terms "first", "second", and "third" are used for descriptive purposes only, and cannot be understood as indicating or implying relative importance.

[0045] In the description of the present invention, it should be noted that, unless otherwise clearly specified and limited, the terms "installed", "connected", and "connected" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be indirectly connected through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0046] This embodiment provides an angular velocity sensor device, such as Figure 1-Figure 3 As shown, it includes a base 100, an oscillation driving component 200 arranged on the base 100 and an oscillation transmission component 300 connected therebetween; the internal structure of the oscillation transmission component 300 has a connecting beam 400, and / or a connecting beam 400 is connected between the oscillation transmission component 300 and the base 100; the oscillation driving component 200 is used to drive the oscillation transmission component 300 to perform oscillating motion along a preset direction, the connecting beam 400 has a stress sensing area capable of sensing oscillating motion, and the stress sensing area is provided with an effect junction with a piezoresistive-avalanche effect.

[0047] This embodiment also provides a MEMS gyroscope, including a reverse bias power supply, a measuring component, a control component and the above-mentioned angular velocity sensor device, wherein the reverse bias power supply is connected to both ends of the effect junction in the angular velocity sensor device, and is used to apply a reverse voltage to the effect junction to make it enter a breakdown state; the measuring component is connected to the effect junction, and is used to measure the breakdown electrical parameters of the effect junction; and the control component is communicatively connected to the reverse bias power supply and the measuring component.

[0048] This embodiment also provides an angular velocity measurement method, using the above-mentioned MEMS gyroscope; Figure 4 A flow chart of a method for measuring the angular velocity of a MEMS gyroscope provided in an embodiment of the present invention. The measuring method comprises:

[0049] S402 adjusts the reverse bias power supply to apply a reverse voltage to the effect junction to put the effect junction into a breakdown state, and adjusts the oscillation driving component 200 to drive the oscillation transmission component 300 to oscillate in a preset direction.

[0050] When in use, the reverse voltage applied to the effect junction by adjusting the reverse bias power supply causes the effect junction to enter a breakdown state. In the breakdown state, the effect junction has a piezoresistive-avalanche effect. The oscillation drive component 200 is started, and the oscillation transmission component 300 oscillates along a preset direction under the drive of the oscillation drive component 200. When the gyroscope is subjected to an angular velocity, under the dual effects of the angular velocity and the oscillation motion in the preset direction, according to the Euler-Bernoulli beam theory, a corresponding stress is generated in the stress sensing region, and the stress can cause changes in the electron mobility and the energy band gap at the effect junction, thereby causing a significant change in the breakdown electrical parameters such as the breakdown voltage / breakdown current of the effect junction, and approximately linearly amplifying the mechanical stress of the stress sensing region, and correspondingly making the breakdown electrical parameters of the effect junction highly sensitive to the mechanical stress of the stress sensing region.

[0051] S404 measurement component detects the breakdown electrical parameters of the effector junction and feeds back to the control component.

[0052] S406 The control component calculates the angular velocity according to the breakdown electrical parameters, the structural related parameters of the angular velocity sensor device and the driving voltage of the oscillation driving component 200 .

[0053] The control component stores structural parameters related to the mechanical structure, connection circuit structure, environment, etc. of the angular velocity sensor device itself. The measuring component detects the breakdown electrical parameters of the effect junction in real time and feeds them back to the control component. The control component uses the breakdown electrical parameters fed back by the measuring component when the gyroscope is not subjected to angular velocity and oscillating motion as the initial breakdown electrical parameters, and uses the change between the breakdown electrical parameters fed back by the measuring component when the gyroscope is subjected to angular velocity under oscillating motion and the initial breakdown electrical parameters as the breakdown electrical parameter change values. The initial breakdown electrical parameters and the breakdown electrical parameter change values ​​with a large change amplitude can amplify and characterize the stress size of the stress sensing area, and the structural parameters of the angular velocity sensor device and the driving voltage of the oscillation driving component 200 can associate the angular velocity with the stress.

[0054] Subsequently, the control component calculates the stress on the connecting beam 400 according to the initial breakdown electrical parameters, the change value of the breakdown electrical parameters, and the structural related parameters of the angular velocity sensor device, and calculates the displacement motion information of the oscillation transmission component 300 according to the stress on the connecting beam 400, the structural related parameters of the angular velocity sensor device and the driving voltage of the oscillation driving component 200, thereby obtaining the Coriolis force on the gyroscope and combining it with the displacement motion information of the oscillation transmission component 300 to infer the angular velocity on which the gyroscope is subjected.

[0055] The MEMS gyroscope of this embodiment can amplify and display the stress change in the stress sensing area through the initial breakdown electrical parameters and the breakdown electrical parameter change value with a large change amplitude according to the piezoresistive-avalanche effect of the effect junction, so as to improve the sensing sensitivity of the gyroscope to the angular velocity, and at the same time comprehensively consider the displacement of the oscillation transmission component 300, the angular velocity of the gyroscope, the Coriolis force, the driving voltage of the oscillation driving component 200, the stress in the stress sensing area, the initial breakdown electrical parameters and the breakdown electrical parameter change value, so as to more accurately obtain the angular velocity, thereby greatly improving the angular velocity measurement sensitivity of the gyroscope; at the same time, the MEMS gyroscope only needs to set a simple effect junction in the stress sensing area of ​​its connecting beam 400 and connect it to a reverse bias power supply, and then cooperate with the measuring component and the control component to perform high-precision measurement of the angular velocity, and has a simple structure, a small size, low manufacturing difficulty and low cost.

[0056] Among them, the above description is that the internal structure of the oscillation drive component 200 has a connecting beam 400, and the connecting beam 400 is also connected between the oscillation transmission component 300 and the base 100; in addition to the above form, according to the structure of the oscillation transmission component 300, the connecting beam 400 can also be set only in the internal structure of the oscillation transmission component 300, or the connecting beam 400 can be connected only between the oscillation transmission component 300 and the base 100.

[0057] Specifically, the measurement component may include a phase-locked amplifier to ensure its measurement sensitivity and accuracy to the breakdown electrical parameters of the effector junction, and correspondingly ensure the measurement sensitivity and accuracy of the gyroscope to the angular velocity.

[0058] In this embodiment, the step of calculating the angular velocity according to the breakdown electrical parameters, the structural parameters of the angular velocity sensor device and the driving voltage of the oscillation drive component 200 in S406 of the control component can specifically include: calculating the stress of the corresponding connecting beam 400 according to the breakdown electrical parameters and the structural parameters of the angular velocity sensor device; calculating the displacement motion information of the oscillation transmission component 300 according to the stress and the structural parameters of the angular velocity sensor device; calculating the angular velocity according to the displacement motion information, the structural parameters of the angular velocity sensor device and the driving voltage of the oscillation drive component 200. When the structure of the angular velocity sensor device is determined, by setting the initial breakdown voltage applied by the reverse bias power supply to the effect junction and the frequency of the driving voltage applied by the oscillation drive component 200 to the oscillation transmission component 300, the stress on the connecting beam 400, the displacement motion information of the oscillation transmission component 300, the Coriolis force on the gyroscope can be obtained in sequence according to the breakdown electrical parameters measured by the detection component and the structural parameters of the angular velocity sensor device, and finally the angular velocity on the gyroscope can be obtained.

[0059] Optionally, in this embodiment, the reverse bias power supply may be a reverse bias voltage source with a constant voltage, and a constant reverse voltage is applied to the effect junction through the reverse bias voltage source to make the effect junction enter a breakdown state. When in use, the measuring component measures the breakdown current of the effect junction as a breakdown electrical parameter; and the step of calculating the stress of the corresponding connecting beam 400 according to the breakdown electrical parameter and the structural related parameters of the angular velocity sensor device includes:

[0060] The stress is calculated according to the following formula:

[0061]

[0062] in,

[0063] V Th =k B T / q;

[0064] Where σ is the stress in the stress induction area, Pa; △I is the breakdown current change of the effective junction when the stress induction area is stressed, A; I0 is the initial breakdown current of the effective junction when the stress induction area is not stressed, A; α is the material parameter related to the connecting beam and the energy band gap, eV / Pa; q is the electron charge constant, 1.602×10 -19 C; V Th is the thermal voltage, V; V BR0 is the constant reverse voltage, V; n is the error coefficient; k B is the Boltzmann constant; T is the absolute temperature of the environment where the connecting beam is located, K.

[0065] Wherein, σ is the required stress; △I is the breakdown electrical parameter change value in the breakdown electrical parameter, I0 is the initial breakdown electrical parameter in the breakdown electrical parameter; α, q, V Th 、V BR0 , n, k B , T are structural related parameters of the angular velocity sensor device.

[0066] In addition to connecting a constant reverse bias voltage source to the effect junction to break it down, a reverse bias current source with a constant current can also be connected to both ends of the effect junction to apply a constant reverse current to the effect junction so that the effect junction enters a breakdown state. When in use, the measuring component measures the breakdown voltage of the effect junction as a breakdown electrical parameter; the step of calculating the stress of the corresponding connecting beam 400 according to the breakdown electrical parameter and the structural related parameters of the angular velocity sensor device includes:

[0067] The stress is calculated according to the following formula:

[0068]

[0069] Where, σ is the stress in the stress induction area, Pa; △V BRis the breakdown voltage change of the stress-sensing region when the stress is applied to the junction, V; V BR0 is the initial breakdown voltage of the effect junction when the stress-sensing region is not stressed, V; α is the material parameter related to the connecting beam and the energy band gap, eV / Pa; E g0 Initial band gap of the material used for the connecting beam, eV; k B is the Boltzmann constant; T is the absolute temperature of the environment where the connecting beam is located, K.

[0070] Among them, σ is the required stress; △V BR is the breakdown voltage change value in the breakdown electrical parameters, V BR0 is the initial breakdown voltage in the breakdown electrical parameters; α, E g0 , k B , T are structural related parameters of the angular velocity sensor device.

[0071] Optionally, in this embodiment, there may be a plurality of connecting beams 400, and the plurality of connecting beams 400 are dispersedly arranged on the oscillation transmission component 300. When in use, the breakdown electrical parameters of the effect junctions on the connecting beams 400 can be associated with the displacement motion information of the oscillation transmission component 300, and a plurality of connecting beams 400 are arranged according to the structure of the oscillation transmission component 300. By measuring the breakdown electrical parameters of the effect junctions on each connecting beam 400 and related calculations, more accurate displacement motion information can be obtained, and the accuracy of the measured angular velocity can be further improved accordingly.

[0072] Preferably, in this embodiment, the oscillation transmission assembly 300 is a symmetrical structure, and the plurality of connecting beams 400 are symmetrically arranged.

[0073] Specifically, in this embodiment, the effect junction may be a PN junction. During manufacturing, a PN junction in the form of a lightly doped junction may be obtained at the connecting beam 400 through a doping process.

[0074] Of course, in some other embodiments, the effect junction may also be a junction with piezoresistive-avalanche effect other than a PN junction, and is not limited to a PN junction.

[0075] In this embodiment, the connection end area of ​​the connection beam 400 is used as a stress sensing area. Specifically, the base 100 is provided with an anchor area 500, and one end of the connection beam 400 away from the oscillation transmission component 300 is fixed to the anchor area 500, and the connection area between the connection beam 400 and the anchor area 500 is used as a stress sensing area. When the gyroscope is subjected to the same angular velocity, the connection area between the connection beam 400 and the anchor area 500 and the induced stress change is large, and the degree of triggering the piezoresistance-avalanche effect of the effect junction is greater. Accordingly, the change amplitude of the breakdown electrical parameter of the effect junction is greater, and the amplification effect of the stress and angular velocity in the stress sensing area is further improved, thereby further improving the measurement sensitivity of the gyroscope.

[0076] Of course, in some other embodiments, the effect junction may also be disposed in any other region of the connecting beam 400 that can sense stress changes.

[0077] Optionally, in this embodiment, the base 100 is provided with an anchoring area 500, the connecting beam 400 is fixedly connected to the anchoring area 500, and is provided with a first electrode and a second electrode, the first electrode is connected to the first end of the effect junction, and the second electrode is connected to the second end of the effect junction. When in use, the two power supply ends of the reverse bias power supply are connected to the first electrode and the second electrode in a one-to-one correspondence, and the two connection ends of the measuring component are connected to the first electrode and the second electrode in a one-to-one correspondence; the effect junction is relatively small in size, and the first electrode and the second electrode with a fixed position and a relatively large volume are set in the anchoring area 500. When connected, the reverse bias power supply and the measuring component can be connected to the effect junction through the connection with the first electrode and the second electrode, thereby improving the convenience of connection and the stability of connection, and correspondingly improving the manufacturing convenience and the stability of use of the gyroscope.

[0078] Specifically, in this embodiment, Figure 1 As shown, the gyroscope can adopt a double mass block form symmetrically arranged in the Y direction, and the oscillation transmission component 300 can include a driving frame 310, a Coriolis frame 320 and a detection frame 340, wherein the driving frame 310 includes two driving frames 311 symmetrically arranged in the Y direction and each having an opening 312 on one side facing the other, and the two driving frames 311 are connected with a connecting arm 313 between the first end and the second end in the Y direction, and the connecting arm 313 is rotatably connected to the base 100 at the symmetrical position in the Y direction; the two driving frames 311 are connected to the oscillation driving component 200 along the outer frame strips in the X direction, and the oscillation driving component 200 is used to drive the driving frame 310 to oscillate along the Y direction; the Coriolis frame 320 includes two Coriolis frames 321, two Each Coriolis frame 321 is located in the two driving frames 311 in a one-to-one correspondence, and an X-way spring 330 is connected between the two ends of the Coriolis frame 321 in the X direction and the corresponding driving frame 311; the detection frame 340 includes two detection frames 341, the two detection frames 341 are located in the two Coriolis frames 321 in a one-to-one correspondence, and a Y-way spring 350 is connected between the two ends of the detection frame 341 in the Y direction and the corresponding Coriolis frame 321, and a coupling spring 342 is connected between the two detection frames 341; wherein, a connecting beam 400 is connected between the two ends of the detection frame 341 along the X direction and the base 100, and a connecting beam 400 is connected between the outer frame bar of the driving frame 311 along the Y direction and the base 100.

[0079] Here is one of the specific forms of the oscillation transmission assembly 300 when the angular velocity sensor device is a dual mass block, wherein the driving frame 310, the Coriolis frame 320 and the detection frame 340 are connected to form the oscillation transmission assembly 300 through the coupling spring 342, the Y unidirectional spring 350 and the X unidirectional spring 330, and both ends of the driving frame 310 in the Y direction are rotatably connected to the base 100 through the connecting arm 313, the outer frame bars on both sides of the Y direction are fixedly connected to the base 100 through the connecting beam 400, and the outer frame bars on both sides of the detection frame 340 along the X direction are fixedly connected to the base 100 through the connecting beam 400. The oscillation drive assembly 200 is divided into two groups, and the two groups of oscillation drive assemblies 200 are connected to the outer frame bars on both sides of the driving frame 310 in the X direction in a one-to-one correspondence, and are used to drive the corresponding driving frame 311 to oscillate along the Y direction.

[0080] For this form of angular velocity sensing device, the above-mentioned step of calculating the displacement motion information of the oscillation transmission component 300 based on the stress and structural related parameters of the angular velocity sensing device includes: calculating the Y-direction displacement of the driving frame 310 and the X-direction displacement of the detection frame 340 based on the stress and structural related parameters of the angular velocity sensing device, and taking the ratio of the Y-direction displacement to the X-direction displacement as the displacement motion information.

[0081] Specifically, when in use, the reverse bias power supply is started to apply a reverse voltage to the effect junction to make it breakdown, and the detection component feeds back the detected breakdown electrical parameters of the effect junction as the initial breakdown electrical parameters to the control component; the oscillation drive component 200 is started and drives the drive frame 310 to perform reciprocating oscillating motion along the Y direction, and the connecting beam 400 connected between the drive frame 310 and the base 100 is deformed and generates stress. The breakdown electrical parameters of the effect junction change significantly under the piezoresistive-avalanche effect, and the detection component feeds back the measured breakdown electrical parameter change value to the control component. The control component can calculate the stress of the corresponding connecting beam 400 according to the initial breakdown electrical parameters, the breakdown electrical parameter change value and the structural related parameters of the angular velocity sensor device, and then calculate the Y displacement of the drive frame 310 according to the stress and the structural related parameters of the angular velocity sensor device.

[0082] Since the X-unidirectional spring 330 connected between the driving frame 310 and the Coriolis frame 320 is an elastic structure in the X direction and a rigid structure in the Y direction, the Coriolis frame 320 performs synchronous oscillatory motion along the Y direction with the driving frame 310 under the connection action of the X-unidirectional spring 330; when the gyroscope is subjected to an angular velocity around the Z direction, the Coriolis frame 320 is subjected to the action of the Coriolis force and generates motion along the X direction, and the motion is transmitted to the detection frame 340 through the Y-unidirectional spring 350; the connecting beam 400 connected between the detection frame 340 and the base 100 is deformed to generate stress, and the breakdown electrical parameter of the effect junction changes significantly under the piezoresistive-avalanche effect, and the detection component feeds back the measured breakdown electrical parameter change value to the control component, and the control component can calculate the stress of the corresponding connecting beam 400 according to the initial breakdown electrical parameter, the breakdown electrical parameter change value and the structural related parameters of the angular velocity sensor device, and then calculate the X-direction displacement of the detection frame 340 according to the stress and the structural related parameters of the angular velocity sensor device.

[0083] Then, the ratio of the Y displacement of the driving frame 310 to the X displacement of the detection frame 340 is used as displacement motion information, and the angular velocity is calculated based on the displacement motion information, structural related parameters of the angular velocity sensor device and the driving voltage of the oscillation driving component 200.

[0084] Specifically, the angular velocity can be calculated according to the following formula:

[0085]

[0086] In the formula, Ω Z is the angular velocity of the angular velocity sensor, rad / s; A s is the X-axis displacement of the detection frame, m; A d is the Y displacement of the Coriolis frame, m; m d is the equivalent mass of the driving frame, kg; m c is the equivalent mass of the Coriolis frame, kg; m s is the equivalent mass of the detection frame, kg; f s is the modal frequency of the detection frame, Hz; f d is the modal frequency of the driving frame, Hz; f in is the frequency of the driving voltage, Hz; Q d Q is the quality factor of the drive frame related to damping; s is the quality factor of the detection frame related to damping.

[0087] Of course, in other embodiments, the angular velocity sensor device may also adopt other dual-mass block forms, single-mass block forms, four-mass block forms, butterfly-type, ring-shaped structures, etc., and is not limited to the above-mentioned dual-mass block form.

[0088] like Figure 2 As shown, the angular velocity sensing device can also adopt a single mass block form, and the oscillation drive components 200 are divided into two groups. The two groups of oscillation drive components 200 are connected to the two ends of the oscillation transmission component 300 in the Y direction one by one, and the two ends of the oscillation transmission component 300 in the X direction are fixed to the base 100 through the connecting beam 400, wherein the stress sensing area of ​​the connecting beam 400 is provided with an effective junction.

[0089] or Figure 3 As shown, the angular velocity sensing device can also adopt a butterfly structure, wherein the oscillation drive component 200 is not shown, and the oscillation transmission component 300 includes two transmission units 360 and two connection units 370, wherein a single connection unit 370, a single transmission unit 360, a single transmission unit 360 and a single connection unit 370 are arranged in sequence along the Y direction, and two adjacent ones are connected by a connecting beam 400, and the ends of the two connection units 370 facing away from the connecting beam 400 are fixed to the base 100 through the anchor area 500.

[0090] Among them, the oscillation drive component 200 can adopt a comb-tooth capacitor, and the oscillation drive component 200 includes a matching fixed comb 210 and a movable comb 220, the fixed comb 210 is fixedly connected to the base 100, and the movable comb 220 is fixedly connected to the drive frame 310 of the oscillation transmission component 300; when in use, the driving voltage between the fixed comb 210 and the movable comb 220 is changed, and the movable comb 220 is driven to reciprocate and oscillate along the Y direction through the change of electrostatic force, thereby driving the drive frame 310 to oscillate along the Y direction. Of course, in other embodiments, the oscillation drive component 200 can also adopt other forms, which can drive the oscillation transmission component 300 to oscillate along a preset direction.

[0091] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention, rather than to limit it. Although the present invention has been described in detail with reference to the aforementioned embodiments, those skilled in the art should understand that they can still modify the technical solutions described in the aforementioned embodiments, or replace some or all of the technical features therein with equivalents. However, these modifications or replacements do not cause the essence of the corresponding technical solutions to deviate from the scope of the technical solutions of the embodiments of the present invention.

Claims

1. An angular velocity sensor device, characterized in that: The invention comprises a base (100), an oscillation driving component (200) arranged on the base (100), and an oscillation transmission component (300) connected therebetween; the internal structure of the oscillation transmission component (300) comprises a connecting beam (400), and / or a connecting beam (400) is connected between the oscillation transmission component (300) and the base (100); The oscillation driving component (200) is used to drive the oscillation transmission component (300) to perform oscillatory motion along a preset direction, the connecting beam (400) has a stress induction area capable of inducing the oscillation motion, and the stress induction area is provided with an effect junction having a piezoresistive-avalanche effect.

2. The angular velocity sensor device according to claim 1, characterized in that: The oscillation transmission component (300) is a symmetrical structure, and there are a plurality of connecting beams (400), and the plurality of connecting beams (400) are symmetrically arranged.

3. The angular velocity sensor device according to claim 1, characterized in that: The effective junction is a PN junction.

4. The angular velocity sensor device according to claim 1, characterized in that: The oscillation transmission component (300) comprises: The driving frame (310) comprises two driving frames (311) which are symmetrically arranged in the Y direction and are provided with openings (312) on opposite sides, the two driving frames (311) are connected with connecting arms (313) between the first ends and the second ends in the Y direction, and the connecting arms (313) are rotatably connected to the base (100) at symmetrical positions in the Y direction; the outer frame bars of the two driving frames (311) along the X direction are connected to the oscillation driving assembly (200), and the oscillation driving assembly (200) is used to drive the driving frames (311) to oscillate along the Y direction; A Coriolis frame (320) comprises two Coriolis frames (321), the two Coriolis frames (321) are located in the two driving frames (311) in a one-to-one correspondence, and an X-directional spring (330) is connected between both ends of the Coriolis frames (321) in the X direction and the corresponding driving frames (311); and, A detection frame (340) comprises two detection frames (341), the two detection frames (341) are located in the two Coriolis frames (321) in a one-to-one correspondence, and Y one-way springs (350) are connected between the two ends of the detection frames (341) in the Y direction and the corresponding Coriolis frames (321), and a coupling spring (342) is connected between the two detection frames (341); The connecting beams (400) are connected between the two ends of the detection frame (341) along the X direction and the base (100), and the connecting beams (400) are connected between the outer frame bars of the driving frame (311) along the Y direction and the base (100).

5. The angular velocity sensor device according to claim 4, characterized in that: Calculate the angular velocity using the following formula: In the formula, Ω Z is the angular velocity of the angular velocity sensor, rad / s; A s is the X-axis displacement of the detection frame, m; A d is the Y displacement of the Coriolis frame, m; m d is the equivalent mass of the driving frame, kg; m c is the equivalent mass of the Coriolis frame, kg; m s is the equivalent mass of the detection frame, kg; f s is the modal frequency of the detection frame, Hz; f d is the modal frequency of the driving frame, Hz; f in is the frequency of the driving voltage, Hz; Q d Q is the quality factor of the drive frame related to damping; s is the quality factor of the detection frame related to damping.

6. A MEMS gyroscope, characterized in that: It comprises a reverse bias power supply, a measuring component, a control component and the angular velocity sensor device according to any one of claims 1 to 5, wherein the reverse bias power supply is connected to both ends of an effect junction in the angular velocity sensor device and is used to apply a reverse voltage to the effect junction to make it enter a breakdown state; the measuring component is connected to the effect junction and is used to measure the breakdown electrical parameters of the effect junction; and the control component is communicatively connected to the reverse bias power supply and the measuring component.

7. A method for measuring angular velocity, characterized in that: Using the MEMS gyroscope described in claim 6, the measuring method comprises: Adjusting the reverse bias power supply to apply a reverse voltage to the effect junction so that the effect junction enters a breakdown state, and adjusting the oscillation driving component (200) to drive the oscillation transmission component (300) to oscillate along a preset direction; The measuring component detects the breakdown electrical parameters of the effect junction and feeds back to the control component; The control component calculates the angular velocity according to the breakdown electrical parameters, the structural related parameters of the angular velocity sensor device and the driving voltage of the oscillation driving component (200).

8. The angular velocity measurement method according to claim 7, characterized in that: The step of the control component calculating the angular velocity according to the breakdown electrical parameter, the structural related parameters of the angular velocity sensor device and the driving voltage of the oscillation driving component (200) comprises: Calculating the stress of the corresponding connecting beam (400) according to the breakdown electrical parameter and the structural related parameters of the angular velocity sensor device; Calculating displacement motion information of the oscillation transmission component (300) according to the stress and structural related parameters of the angular velocity sensor device; The angular velocity is calculated based on the displacement motion information, the structural related parameters of the angular velocity sensor device and the driving voltage of the oscillation driving component (200).

9. The angular velocity measurement method according to claim 8, characterized in that: A constant reverse voltage is applied to the effect junction to make the effect junction enter a breakdown state, and the step of calculating the stress of the corresponding connecting beam according to the breakdown electrical parameters and the structural related parameters of the angular velocity sensor device includes: The stress is calculated according to the following formula: in, V Th =k B T / q; Wherein, σ is the stress in the stress induction area, Pa; △I is the breakdown current change value of the effect junction when the stress induction area is stressed, A; I0 is the initial breakdown current of the effect junction when the stress induction area is not stressed, A; α is the material parameter related to the connecting beam and the energy band gap, eV / Pa; q is the electron charge constant, 1.602×10 -19 C; V Th is the thermal voltage, V; V BR0 is the constant reverse voltage, V; n is the error coefficient; k B is the Boltzmann constant; T is the absolute temperature of the environment where the connecting beam is located, K.

10. The angular velocity measurement method according to claim 8, characterized in that: A constant reverse current is applied to the effect junction to make the effect junction enter a breakdown state, and the step of calculating the stress of the corresponding connecting beam according to the breakdown electrical parameters and the structural related parameters of the angular velocity sensor device includes: The stress is calculated according to the following formula: Where, σ is the stress in the stress induction area, Pa; △V BR is the breakdown voltage change value of the effect junction when the stress induction area is subjected to stress, V; V BR0 is the initial breakdown voltage of the effect junction when the stress induction region is not subjected to stress, V; α is the material parameter related to the connecting beam and the energy band gap, eV / Pa; E g0 Initial band gap of the material used for the connecting beam, eV; k B is the Boltzmann constant; T is the absolute temperature of the environment where the connecting beam is located, K.

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