Adjusting device and optical apparatus

Abstract

The application discloses a kind of adjusting device and optical equipment, including installation structure, first rotating component and second rotating component, wherein, installation structure is connected with mirror group, and mirror group is used to transmit signal;First rotating component is used to rotate the orientation of mirror group around first axis;Second rotating component is used to rotate the orientation of mirror group around second axis;Wherein, first axis and second axis are vertically arranged, and at least one of first axis and second axis coincides with the image side main surface of mirror group.It can be understood that at least one of first axis and second axis coincides with the image side main surface of mirror group, which is set, the orientation of image side main surface is adjusted with image side main surface as the rotation center during the rotation adjustment of mirror group, i.e. the orientation of light inlet of mirror group is adjusted, so that the light inlet of mirror group can be quickly and conveniently adjusted to the appropriate angle, so as to preferably receive the light signal from the object to be measured.

Description

TECHNICAL FIELD

[0001] The present application relates to the field of optical technology, in particular to an adjusting device and an optical equipment. BACKGROUND

[0002] At present, the commonly used technical means for wafer surface defect detection is optical detection technology, which has the advantages of fast detection speed and no pollution.

[0003] In the related art, the optical detection equipment generally comprises a laser, an adjusting device and a light detector, wherein the laser provides a detection beam for the wafer to be detected, the detection beam forms a signal light after passing through the defects on the surface of the wafer to be detected, the adjusting device collects the signal light and guides it to the light detector, the light detector detects the signal light after receiving it, and obtains the defect information on the surface of the wafer to be detected according to the signal light. Therefore, it is particularly important to ensure that the light detector accurately obtains the signal light transmitted by the adjusting device.

[0004] Among them, the adjusting device comprises a mounting frame and a mirror group, and the mirror group is assembled and arranged on the mounting frame. However, the mounting frame on the market is poor in assembly position of the mirror group when it is applied to the mirror group, so that the workers need to spend a long time to adjust the position and angle of the mirror group, and the working intensity of the workers is high. SUMMARY

[0005] The present application aims to at least solve one of the technical problems existing in the prior art. To this end, the present application provides an adjusting device and an optical equipment, which facilitates rapid adjustment of the mirror group.

[0006] In a first aspect, the embodiments of the present application provide an adjusting device for collecting light signals from an object to be detected, comprising:

[0007] A mounting structure connected with a mirror group, the mirror group being used for transmitting signal light;

[0008] A first rotating component for rotating the orientation of the mirror group about a first axis;

[0009] A second rotating component for rotating the orientation of the mirror group about a second axis;

[0010] The first axis and the second axis are arranged perpendicularly, and both the first axis and the second axis coincide with an image side main surface of the mirror group;

[0011] A first adjusting component arranged on the first rotating component, the first rotating component being used for rotating the first adjusting component about the first axis, the second rotating component being arranged on the first adjusting component, the first adjusting component being used for adjusting the second rotating component along the direction of the first axis, and the mounting structure being arranged on the second rotating component;

[0012] The first rotating assembly comprises a first carrier, a second carrier and a third adjusting structure, wherein a fixed shaft is arranged on the first carrier, the fixed shaft is collinear with the first axis; the third adjusting structure is connected with the first carrier and / or the second carrier, and is used for rotatingly adjusting the second carrier about the fixed shaft; and the second rotating assembly is arranged on the second carrier.

[0013] According to some embodiments of the present application, the first adjusting assembly comprises a first frame and a first adjusting structure, wherein the first rotating assembly is provided with a guide structure extending along a first axis, the first frame is slidingly arranged on the guide structure along the direction of the first axis, the first adjusting structure is arranged on the guide structure and / or the first frame, and is used for adjusting the first frame along the direction of the first axis; and the second rotating assembly is arranged on the first frame.

[0014] According to some embodiments of the present application, the first adjusting structure comprises a cover plate, a first tension spring and a first threaded pair, wherein the cover plate is fixedly connected to the top of the guide structure, the first threaded pair is arranged on one of the cover plate and the first frame along the direction of the first axis, and is arranged towards the other, the first tension spring is connected with the cover plate and the first frame, and is used for keeping the other in abutment with the first threaded pair.

[0015] According to some embodiments of the present application, the first adjusting structure further comprises a locking plate, the locking plate is connected with the first frame and the guide structure, and a part of the locking plate close to the other is provided with a locking waist-shaped hole along the direction of the first axis, the locking waist-shaped hole is provided with a locking screw connected to the other.

[0016] According to some embodiments of the present application, the guide structure comprises two guide columns arranged along the direction of the first axis, and the opposite sides of the two guide columns are each provided with a guide portion along the extending direction thereof, and the first frame is provided with a matching portion; wherein one of the guide portion and the matching portion is a guide groove, and the other is a guide protrusion slidingly arranged in the guide groove.

[0017] According to some embodiments of the present application, the second rotating assembly comprises a second frame and a second adjusting structure, the mounting structure is arranged on the second frame, the second frame is rotatably arranged on the first frame, the rotation axis between the two is coincident with the image side main surface of the lens group connected with the mounting structure, and the second adjusting structure is arranged on the first frame and / or the second frame, and is used for rotatably adjusting the second frame; wherein the second axis is the central axis of the rotation axis.

[0018] According to some embodiments of the present application, the second adjusting structure comprises a second threaded pair and a second tension spring, wherein the second threaded pair is arranged on the first frame and / or the second frame and faces the other, and the second tension spring is connected to the first frame and the second frame for keeping the other against the second threaded pair.

[0019] According to some embodiments of the present application, the inner side of the first frame is defined with a receiving space, the side of the first frame away from the guide structure is provided with a positioning through slot penetrating the inner and outer sides of the first frame, and the edge of the first frame away from the guide structure is provided with a first lug;

[0020] The inner side of the second frame is defined with a mounting space, the edge of the second frame is provided with a positioning boss, and the edge of the second frame is provided with a second lug;

[0021] The second frame is arranged in the receiving space, the positioning boss is embedded in the positioning through slot, the second threaded pair is arranged on the positioning boss and kept against the slot wall of the positioning through slot under the action of the second tension spring, the first lug and the second lug are overlapped and connected by rotating around the rotating shaft, and the mounting structure is mounted in the mounting space.

[0022] According to some embodiments of the present application, the second lug is provided with a circular arc hole around the rotating shaft, and the circular arc hole is provided with a locking screw threadedly connected with the first lug.

[0023] According to some embodiments of the present application, the third adjusting structure comprises two third threaded pairs, the two third threaded pairs are oppositely arranged on the edge of one of the first stage and the second stage, and the other is provided with a first adjusting boss abutting between the two third threaded pairs; wherein the second stage is provided with a second waist-shaped hole around the fixed shaft, and the second waist-shaped hole is provided with a locking screw threadedly connected with the first stage.

[0024] According to some embodiments of the present application, the adjusting device further comprises a second adjusting assembly, the second adjusting assembly comprises a first sliding table, a second sliding table, a fourth adjusting structure and a fifth adjusting structure, wherein the second sliding table is slidingly arranged on the first sliding table, the first stage is slidingly arranged on the second sliding table, and at least one of the first stage and the second sliding table is slidingly arranged along the second axis, and the other is slidingly arranged along a third axis perpendicular to the first axis and the second axis; wherein the fourth adjusting structure is arranged on the first sliding table and / or the second sliding table to linearly adjust the second sliding table, and the fifth adjusting structure is arranged on the second sliding table and / or the first stage to linearly adjust the first stage.

[0025] According to some embodiments of the present application, the fourth adjusting structure comprises two fourth screw pairs, one of which is arranged on the edge of one of the first sliding table and the second sliding table, and the other is arranged with a second adjusting boss abutting between the two fourth screw pairs, wherein the second sliding table is provided with a fourth waist-shaped hole along the sliding direction of the second sliding table, and the fourth waist-shaped hole is provided with a locking screw threadedly connected with the first sliding table.

[0026] According to some embodiments of the present application, at least two guide pins are arranged on the second sliding table, and the first carrier is provided with a guide opening slot at the edge position in the sliding direction, and the two guide pins are respectively arranged in the guide opening slot to enable the second sliding table to slide within a set range.

[0027] According to some embodiments of the present application, the fifth adjusting structure comprises a first screw and a second screw, wherein the edge of the second sliding table is provided with a mounting boss extending to the edge position of the first carrier, the first screw is threadedly connected with the mounting boss and abuts against the edge of the first carrier, and the second screw is arranged in the mounting boss in the axial direction and is threadedly connected with the first carrier.

[0028] In a second aspect, the embodiments of the present application provide an optical device, comprising:

[0029] a laser for emitting a probe light beam towards a to-be-measured object;

[0030] the adjusting device described above, wherein the adjusting device is used for collecting light signals from the to-be-measured object;

[0031] a light detector for receiving the signal light transmitted by the adjusting device.

[0032] As can be seen from the above technical solutions, the embodiments of the present application have the following advantages: at least one of the first axis and the second axis coincides with the image-side main surface of the lens group. In this way, during the rotation adjustment of the lens group, the lens group adjusts the orientation of the image-side main surface, that is, adjusts the orientation of the light inlet of the lens group, so that the light inlet of the lens group can be quickly and conveniently adjusted to a suitable angle, thereby preferably receiving the light signals from the to-be-measured object. BRIEF DESCRIPTION OF DRAWINGS

[0033] Figure 1 FIG. 1 is a schematic diagram of the overall structure of the adjusting device according to an embodiment of the present application;

[0034] Figure 2 FIG. 2 is a schematic diagram of the front structure of the adjusting device according to an embodiment of the present application;

[0035] Figure 3 FIG. 3 is a schematic diagram of the back structure of the adjusting device according to an embodiment of the present application;Figure 2 Cross-sectional structure schematic diagram of middle A-A;

[0036] Figure 4 Explosion structure schematic diagram of adjusting device of embodiment of the application.

[0037] In the drawings, the reference signs have the following meanings:

[0038] 100, lens structure; 200, first rotating assembly; 201, first axis; 210, first carrier; 211, fixed shaft; 212, adjusting screw hole; 213, guiding open slot; 214, first waist-shaped hole; 220, second carrier; 221, guiding structure; 2211, guiding part; 222, second waist-shaped hole; 223, first adjusting boss; 230, third adjusting structure; 231, third threaded pair; 300, second rotating assembly; 301, second axis; 310, second frame; 311, positioning boss; 312, second lug; 313, mounting space; 315, rotating shaft; 320, second adjusting structure; 321, second threaded pair; 322, second tension spring; 400, first adjusting assembly; 410, first frame; 411, matching part; 412, containing space; 413, positioning through slot; 414, first lug; 4141, circular arc hole; 420, first adjusting structure; 421, cover plate; 422, first tension spring; 423, first threaded pair; 424, locking plate; 4241, locking waist-shaped hole; 500, second adjusting assembly; 510, first sliding table; 520, second sliding table; 521, guiding pin; 522, mounting boss; 523, fourth waist-shaped hole; 524, second adjusting boss; 530, fourth adjusting structure; 531, fourth threaded pair; 540, fifth adjusting structure; 541, first screw; 542, second screw. DETAILED DESCRIPTION

[0039] In order to better understand and implement, the technical solutions in the embodiments of the application will be clearly and completely described below in combination with the drawings in the embodiments of the application.

[0040] In the description of the application, it should be noted that the terms "upper", "lower", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer" and the like indicate the orientation or positional relationship based on the orientation or positional relationship shown in the drawings, and are only for the convenience of describing the application and simplifying the description, and do not indicate or imply that the devices or elements referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as a limitation on the application.

[0041] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this application belongs. The terminology used in the description herein is for describing particular embodiments only and is not intended to be limiting of the application.

[0042] The application will be further described below in conjunction with the drawings.

[0043] Please refer to Figures 1 to 3 The adjusting device provided by the embodiment of the application comprises a mounting structure, a first rotating assembly 200 and a second rotating assembly 300, wherein the mounting structure is connected with a mirror group, and the mirror group is used for transmitting signal light. The mounting structure and the mirror group can be two modules assembled together or modules integrated together. For the convenience of description, the two modules are collectively referred to as a lens structure 100, and the image side main surface of the mirror group can also be understood as the image side main surface of the lens structure 100. The first rotating assembly 200 is used for rotating around a first axis 201 to adjust the orientation of the lens structure 100. The second rotating assembly 300 is used for rotating around a second axis 301 to adjust the orientation of the lens structure 100. The first axis 201 and the second axis 301 are arranged perpendicularly, and at least one of the first axis 201 and the second axis 301 coincides with the image side main surface of the lens structure 100. For the convenience of understanding the scheme, an XYZ axis coordinate system can be established with reference to the drawings of the specification. The first axis 201 can be understood as a coincident line or a parallel line in the direction of the X axis. The second axis 301 can be understood as a coincident line or a parallel line in the direction of the Y axis. A third axis can be understood as a coincident line or a parallel line in the direction of the Z axis, and is arranged perpendicularly to the first axis 201 and the second axis 301.

[0044] The point where the reverse extension line of the converging light ray intersects the incident parallel light ray is the image side principal point, and the plane on which each image side principal point falls is the image side main surface. More precisely, the image side principal point is the intersection of the image side main surface and the optical axis.

[0045] The second rotating assembly 300 is arranged on the first rotating assembly 200, and the lens structure 100 is arranged on the second rotating assembly 300, so that the first rotating assembly 200 rotates around the first axis 201 through the second rotating assembly 300 to adjust the orientation of the lens structure 100. Alternatively, the first rotating assembly 200 is arranged on the second rotating assembly 300, and the lens structure 100 is arranged on the first rotating assembly 200, so that the second rotating assembly 300 rotates around the second axis 301 through the first rotating assembly 200 to adjust the orientation of the lens structure 100.

[0046] In a specific application, the posture of the lens structure 100 is adjusted by rotating the first rotating assembly 200 around the first axis 201, i.e. adjusting the orientation angle of the light inlet of the lens structure 100 in one direction; and the posture of the lens structure 100 is adjusted by rotating the second rotating assembly 300 around the second axis 301, i.e. adjusting the orientation angle of the light inlet of the lens structure 100 in another direction. Since the first axis 201 is perpendicular to the second axis 301, and the axial direction of the lens structure 100 is substantially along the third axis, the first rotating assembly 200 and the second rotating assembly 300 can be cooperated to flexibly adjust the orientation angle of the light inlet of the lens structure 100. In this way, the lens structure 100 can fully receive the light signal reflected by the object to be detected, and output corresponding signal light image information to the external light detector.

[0047] In the above embodiments, at least one of the first axis 201 and the second axis 301 coincides with the image-side main surface of the lens structure 100. In this way, during the rotation adjustment, the lens structure 100 adjusts the orientation of the image-side main surface as the rotation center, i.e. adjusts the orientation of the light inlet of the lens structure 100. In this way, the light inlet of the lens structure 100 can be quickly and conveniently adjusted to a suitable angle, so as to preferably receive the light signal from the object to be detected.

[0048] In a possible embodiment, the first axis 201 and the second axis 301 both coincide with the image-side main surface of the lens structure 100. More specifically, the first axis 201 coincides with the image-side main surface of the lens structure 100, and the second axis 301 coincides with the image-side main surface of the lens structure 100. In this way, during the rotation adjustment around the first axis 201 and the second axis 301, the lens structure 100 adjusts the orientation of the image-side main surface as the rotation center. In this way, the light inlet of the lens structure 100 can be quickly and conveniently adjusted to a suitable angle, so as to preferably receive the light signal from the object to be detected.

[0049] In other possible embodiments, the first axis 201 coincides with the image-side main surface of the lens structure 100, and the first axis 201 does not coincide with the image-side main surface of the lens structure 100; or the first axis 201 does not coincide with the image-side main surface of the lens structure 100, and the first axis 201 coincides with the image-side main surface of the lens structure 100.

[0050] In some embodiments, with reference to Figure 1 and Figure 2The adjusting device further comprises a first adjusting assembly 400, the first adjusting assembly 400 is arranged on the first rotating assembly 200, the second rotating assembly 300 is arranged on the first adjusting assembly 400, and the lens structure 100 is arranged on the second rotating assembly 300. The first rotating assembly 200 rotates the first adjusting assembly 400 around the first axis 201, and the second rotating assembly 300 rotates around the first axis 201 synchronously with the first rotating assembly 200, so as to indirectly rotate and adjust the lens structure 100 around the first axis 201. The first adjusting assembly 400 is used for linearly adjusting the second rotating assembly 300 along the direction of the first axis 201, so as to indirectly linearly adjust the lens structure 100 along the direction of the first axis 201.

[0051] Of course, the first rotating assembly 200 can also be arranged on the first adjusting assembly 400, and the second rotating assembly 300 is arranged on the first rotating assembly 200, which is not described in detail.

[0052] It can be understood that the first adjusting assembly 400 is arranged between the first rotating assembly 200 and the second rotating assembly 300, and in the application process of the adjusting device, the position of the lens structure 100 in the extension direction of the first axis 201 can be adjusted by using the first adjusting assembly 400, so as to adjust the position of the lens structure 100. In this way, the light from the object to be measured is preferably incident on the adjusting device, and the adjusting device fully receives the light signal reflected by the object to be measured and transmits it to the light detector.

[0053] It should be noted that the first adjusting assembly 400 is arranged between the first rotating assembly 200 and the second rotating assembly 300, so that the first adjusting assembly 400 can fully utilize the space left between the first rotating assembly 200 and the second rotating assembly 300, thereby reducing the overall space occupied by the adjusting device.

[0054] In addition, the first adjusting assembly 400 is used for adjusting the second rotating assembly 300 along the direction of the first axis 201, and the first rotating assembly 200 rotates and adjusts the second rotating assembly 300 around the first axis 201. In this way, under the premise of meeting the linear adjustment of the lens structure 100, the first axis 201 and the second axis 301 still remain on the image side main surface, so that the lens structure 100 can be accurately adjusted more conveniently.

[0055] In some embodiments, with reference to Figure 1 , Figure 2 and Figure 4The first adjusting assembly 400 comprises a first frame 410 and a first adjusting structure 420. The first rotating assembly 200 is provided with a guide structure 221 extending along the first axis 201. The guide structure 221 can be a guide rail or other structure. The first frame 410 is slidingly arranged along the guide structure 221 along the direction of the first axis 201. The first adjusting structure 420 is arranged on the guide structure 221 and / or the first frame 410. The first adjusting structure 420 is used to linearly adjust the first frame 410 along the direction of the first axis 201. The second rotating assembly 300 is arranged on the first frame 410. Therefore, when the first adjusting structure 420 adjusts the height of the first frame 410 along the direction of the first axis 201, the second rotating assembly 300 and the lens structure 100 move up and down with the first frame 410, thereby achieving the adjustment of the lens structure 100.

[0056] In order to achieve the sliding arrangement of the first frame 410 on the guide structure 221, in a possible embodiment, the guide structure 221 comprises two guide columns arranged along the first axis 201. The two guide columns are arranged at intervals. The opposite sides of the two guide columns are each provided with a guide portion 2211 extending along the direction thereof, that is, each guide column is provided with a guide portion 2211 extending along the first axis 201 on the side wall close to the other guide column. One side of the first frame 410 is provided with a matching portion 411 matched with the guide portion 2211. The guide portion 2211 is a dovetail-shaped guide groove arranged on the guide column, and the matching portion 411 is a guide protrusion arranged on the side of the first frame 410. The guide protrusion is arranged in a dovetail shape. Thus, the matching portion 411 is slidingly embedded in the guide portion 2211, and the first frame 410 is slidingly arranged on the guide structure 221. It is also possible that the guide portion 2211 is a guide protrusion arranged on the guide column, and the matching portion 411 is a guide groove arranged on the first frame 410. The guide protrusion is slidingly arranged in the guide groove.

[0057] In other possible embodiments, the guide column is provided with a guide rail, and the first frame 410 is provided with a guide rail seat slidingly arranged on the guide rail. In this way, the first frame 410 is slidingly arranged on the guide structure 221.

[0058] To realize the adjustment of the first frame 410 along the direction of the second axis 201 by the first adjustment structure 420, in a possible embodiment, the first adjustment structure 420 comprises a cover plate 421, a first tension spring 422 and a first threaded pair 423, wherein the cover plate 421 is fixedly connected to the top of the guide structure 221, more specifically, the cover plate 421 is fixedly connected to the top of the two guide columns. The first threaded pair 423 is fixedly arranged on the cover plate 421 along the first axis 201, the action end of the first threaded pair 423 is arranged towards the first frame 410, one end of the first tension spring 422 is connected to the cover plate 421, and the other end is connected to the first frame 410, so that the first tension spring 422 pulls the first frame 410 to move towards the first threaded pair 423, so that the top of the first frame 410 and the action end of the first threaded pair 423 are kept in abutment. Of course, the first threaded pair 423 can also be arranged on the first frame 410, and the action end of the first threaded pair 423 is kept in abutment with the lower side of the cover plate 421 under the action of the first tension spring 422.

[0059] Specific adjustment process, if the worker twists the handle of the first threaded pair 423 in the forward direction, the adjustment rod of the first threaded pair 423 is elongated, thereby pushing the first frame 410 to move downward, the second rotating assembly 300 and the lens structure 100 are synchronously moved downward, thereby realizing the downward adjustment of the lens structure 100 along the first axis 201; if the worker twists the handle of the first threaded pair 423 in the reverse direction, the adjustment rod of the first threaded pair 423 is retracted, the first frame 410 moves upward under the action of the first tension spring 422, the second rotating assembly 300 and the lens structure 100 are synchronously moved upward, thereby realizing the upward adjustment of the lens structure 100 along the first axis 201.

[0060] In other possible embodiments, instead of the first threaded pair 423, the first adjustment structure 420 comprises a lead screw, the lead screw is arranged along the first axis 201 and is rotationally connected with the cover plate 421, and the lead screw is threadedly connected with the first frame 410. Therefore, the worker can rotate the lead screw, the lead screw drives the first frame 410 to slide along the direction of the first axis 201, thereby realizing the adjustment of the lens structure 100 along the direction of the first axis 201.

[0061] Further, in order to make the first frame 410 can be stably kept in the set position after adjustment, the first adjustment structure 420 further comprises a locking plate 424, which is fixedly arranged on the first frame 410 by screws, and the locking plate 424 is provided with a locking waist-shaped hole 4241 along the first axis 201 near the abutting part of the guide structure 221, and the locking waist-shaped hole 4241 is provided with a locking screw connected to the guide structure 221. Therefore, when the first frame 410 needs to be adjusted, the locking screw is kept in a loosened state, and the locking plate 424 cannot limit the linear sliding of the first frame 410 along the direction of the first axis 201; when the adjustment of the first frame 410 is completed, the locking screw is in a tightened state, and the locking screw makes the side surface of the locking plate 424 abut against the side wall of the guide structure 221, thereby limiting the sliding of the first frame 410 along the direction of the first axis 201, and further making the lens structure 100 keep in the position after adjustment.

[0062] In some embodiments, the locking plate 424 can also be fixedly arranged on the guide structure 221, and the locking screw is provided through the locking screw and is threadedly connected with the first frame 410.

[0063] In some embodiments, referring to Figures 2 to 4 The second rotation assembly 300 comprises a second frame 310 and a second adjustment structure 320, wherein the lens structure 100 is arranged on the second frame 310, the second frame 310 is rotationally arranged on the first frame 410, and the rotation axis 315 between the lens structure 100 and the second frame 310 coincides with the image side main surface of the lens structure 100 (referring to Figure 3 The second axis 301 is the central axis of the rotation axis 315. The second adjustment structure 320 is arranged on the first frame 410 and / or the second frame 310, and is used for rotationally adjusting the second frame 310. Therefore, when the second adjustment structure 320 rotationally adjusts the second frame 310, the lens structure 100 is synchronously rotated with the second frame 310, thereby realizing the angle adjustment of the entrance pupil of the lens structure 100.

[0064] To realize the rotation adjustment of the second frame 310 by the second adjustment structure 320, in a possible embodiment, the second adjustment structure 320 comprises a second screw pair 321 and a second tension spring 322, wherein the second screw pair 321 is fixedly arranged along the third axial direction on the second frame 310, and the action end of the second screw pair 321 is arranged towards the first frame 410. One end of the second tension spring 322 is connected with the first frame 410, and the other end is connected with the second frame 310. Thus, under the action of the second tension spring 322, the action end of the second screw pair 321 keeps abutting against the side of the first frame 410. Of course, the second screw pair 321 can also be fixedly arranged along the third axial direction on the first frame 410, and under the action of the second tension spring 322, the action end of the second screw pair 321 keeps abutting against the second frame 310.

[0065] Specifically in the adjustment process, the second adjustment structure 320 is arranged on the upper side of the rotation shaft 315. If the staff twists the handle of the second screw pair 321 in the forward direction, the adjusting rod of the second screw pair 321 is elongated, thereby pushing the second frame 310 to rotate downwards around the rotation shaft 315, and the lens structure 100 is synchronously rotated downwards with the second frame 310, thereby realizing the angle adjustment of the light inlet of the lens structure 100 upwards. If the staff twists the handle of the second screw pair 321 in the reverse direction, the adjusting rod of the second screw pair 321 is contracted, and the second frame 310 is rotated upwards around the rotation shaft 315 under the action of the first tension spring 422, and the lens structure 100 is synchronously rotated upwards with the second frame 310, thereby realizing the angle adjustment of the light inlet of the lens structure 100 downwards.

[0066] In other possible embodiments, a damper can be arranged on the rotation shaft 315, the staff can directly manually rotate the second frame 310, and the posture of the second frame 310 is kept by the damper, thereby keeping the posture of the lens structure 100.

[0067] Further, referring to Figure 2 and Figure 4The inner side of the first frame 410 is defined with a receiving space 412, and the side of the first frame 410 away from the guide structure 221 is provided with a positioning through slot 413 extending through the inner and outer sides of the first frame 410, and more specifically, two ends of the positioning through slot 413 extend to the receiving space 412 and the outer edge of the first frame 410 respectively. The two edges of the first frame 410 away from the guide structure 221 are provided with first lugs 414, and the receiving space 412 is located between the two first lugs 414. The edge of the second frame 310 is provided with a positioning boss 311, and the positioning boss 311 is arranged in the positioning through slot 413. The inner side of the second frame 310 is provided with a mounting space 313, and the lens structure 100 is assembled and connected in the mounting space 313. The two edges of the second frame 310 away from the guide structure 221 are provided with second lugs 312, and the mounting space 313 is located between the two second lugs 312, and the first lugs 414 and the second lugs 312 are arranged in a matched manner.

[0068] Specifically, when the first frame 410 and the second frame 310 are assembled, the second frame 310 is assembled in the receiving cavity on the inner side of the first frame 410, the positioning boss 311 is embedded in the positioning through slot 413, the second threaded pair 321 is fixed on the positioning boss 311 along the third axis direction, and the acting end of the second threaded pair 321 abuts against the slot wall of the positioning through slot 413. The second lug 312 is arranged on the inner side of the first lug 414 and is rotatably connected through the rotating shaft 315. It can be understood that the first frame 410 and the second frame 310 are assembled in the above-mentioned manner, and the first frame 410 and the second frame 310 can be compactly assembled together, so as to ensure that the overall space occupied by the adjusting device is small.

[0069] In order to keep the second frame 310 at the adjusted position after rotation adjustment, in some embodiments, the two second lugs 312 are provided with arc holes 4141 around the rotating shaft 315, the arc holes 4141 are provided with locking screws, and the locking screws are threadedly connected with the first lugs 414. Specifically, during the adjustment of the second frame 310, the locking screws are in a loosened state, the first lugs 414 and the second lugs 312 do not have obvious friction resistance, and the second frame 310 can be rotationally adjusted. After the rotation adjustment of the second frame 310 is completed, the locking screws are in a tightened state, and at this time, the first lugs 414 and the second lugs 312 have large friction resistance. Thus, the first lugs 414 generate a large holding force on the second lugs 312, so as to prevent the second frame 310 from rotating, thereby keeping the adjusted lens structure 100.

[0070] In some embodiments, with reference to Figure 1 Figure 2 With Figure 4The first rotating assembly 200 comprises a first carrier 210, a second carrier 220 and a third adjusting structure 230. The first carrier 210 is provided with a fixed shaft 211 (see Figure 3 ). The first axis 201 is the central axis of the fixed shaft 211, and the fixed shaft 211 coincides with the image side main surface of the lens structure 100. The second carrier 220 is provided with a guide structure 221, and the first frame 410 is slidingly arranged on the second carrier 220 through the guide structure 221. The third adjusting structure 230 is connected with the first carrier 210 and / or the second carrier 220. The third adjusting structure 230 is used to rotate and adjust the second carrier 220 around the fixed shaft 211. The second rotating assembly 300 is arranged on the second carrier 220. Therefore, when the third adjusting structure 230 rotates and adjusts the second carrier 220 around the fixed shaft 211, the first frame 410 and the second frame 310 rotate synchronously. Since the lens structure 100 is arranged on the second frame 310, the lens structure 100 rotates synchronously with the second frame 310. Thus, the second adjusting structure 320 rotates and adjusts the lens structure 100 around the fixed shaft 211, and the image side main surface of the lens structure 100 remains coincident with the fixed shaft 211. Of course, the first rotating assembly 200 can also use other structures to rotate and adjust the first frame 410, for example, a damping shaft is used to rotate and adjust the first frame 410.

[0071] It can be understood that, by using the above structure, the first rotating assembly 200 has simple structure and compact assembly of the first carrier 210 and the second carrier 220, which avoids occupying a large space, thereby ensuring that the occupied space of the adjusting device is not too large.

[0072] In order to realize the rotation and adjustment of the second carrier 220 by the third adjusting structure 230, in a possible embodiment, the third adjusting structure 230 comprises two third screw pairs 231, which are fixedly arranged at the edge positions of the first carrier 210 along the Y axis, and the action ends of the two third screw pairs 231 are oppositely arranged. The second carrier 220 is provided with a first adjusting boss 223 at the edge position close to the third screw pair 231, and the first adjusting boss 223 is abutted between the action ends of the two third screw pairs 231. Of course, the two third screw pairs 231 can also be arranged at the edge positions of the second carrier 220, and the edge of the first carrier 210 is provided with a first adjusting platform abutted between the two third screw pairs 231, which is not limited in the present application.

[0073] In the specific adjustment process, the worker manually adjusts the screw rod elongation of one third screw pair 231 and the screw rod contraction of another third screw pair 231, and the two third screw pairs 231 are coordinated to drive the second carrier 220 to rotate in one direction for adjustment, thereby achieving the rotation adjustment of the lens structure 100 in one direction; conversely, if the screw rod of the former third screw pair 231 is contracted and the screw rod of the latter third screw pair 231 is elongated, the two third screw pairs 231 are coordinated to drive the second carrier 220 to rotate in the other direction for adjustment, thereby achieving the rotation adjustment of the lens structure 100 in the other direction.

[0074] In other possible embodiments, the third adjustment structure 230 can include a screw pair and a tension spring, wherein the screw pair is connected to one of the first carrier 210 and the second carrier 220 and abuts the other, one end of the tension spring is connected to the first carrier 210 and the other end is connected to the second carrier 220, so that the tension spring keeps the screw pair abutting the other. It can be understood that the worker controls the extension and contraction of the screw rod of the screw pair to achieve the rotation adjustment of the second carrier 220.

[0075] Further, the second carrier 220 is provided with a second waist-shaped hole 222 in the overlapping area with the first carrier 210, and the second waist-shaped hole 222 is provided around the fixed shaft 211. The second waist-shaped hole 222 is provided with a locking screw, and the locking screw is threadedly connected with the first carrier 210. Specifically, during the adjustment of the second carrier 220, the locking screw is in a loosened state, and the first carrier 210 and the second carrier 220 do not have obvious frictional resistance, and the second carrier 220 can be adjusted in rotation. After the rotation adjustment of the second carrier 220 is completed, the locking screw is in a tightened state, at this time, the first carrier 210 and the second carrier 220 have a large frictional resistance, thereby the second carrier 220 generates a large holding force on the first carrier 210, so as to prevent the second carrier 220 from rotating, thereby maintaining the adjusted lens structure 100.

[0076] In some embodiments, the adjustment device further includes a second adjustment assembly 500 for linearly adjusting the first rotation assembly 200 along the second axis 301 and the third axis, thereby adjusting the position of the lens structure 100.

[0077] Specifically, the second adjusting assembly 500 comprises a first sliding table 510, a second sliding table 520, a fourth adjusting structure 530 and a fifth adjusting structure 540. The second sliding table 520 is slidingly arranged on the first sliding table 510, for example, slidingly arranged on the first sliding table 510 along the direction of the second axis 301 or slidingly arranged on the first sliding table 510 along the third axis. The first carrier 210 is slidingly arranged on the second sliding table 520, for example, slidingly arranged on the second sliding table 520 along the second axis 301 or slidingly arranged on the second sliding table 520 along the third axis. At least one of the first carrier 210 and the second sliding table 520 is slidingly arranged along the Y axis, and the other is slidingly arranged along the third axis, for example, the first sliding table 510 is slidingly arranged along the third axis, and the first carrier 210 is slidingly arranged along the Y axis. The fourth adjusting structure 530 is arranged on the first sliding table 510 and / or the second sliding table 520 to linearly adjust the second sliding table 520, for example, to adjust the second sliding table 520 along the direction of the third axis. The fifth adjusting structure 540 is arranged on the second sliding table 520 and / or the first carrier 210 to linearly adjust the first carrier 210, for example, to adjust the first carrier 210 along the direction of the second axis 301.

[0078] In a specific adjusting process, when the fourth adjusting structure 530 adjusts the position of the lens structure 100 along the direction of the third axis, the first rotating assembly 200, the first adjusting assembly 400 and the second rotating assembly 300 are synchronously moved along the direction of the first axis 201, so that the fourth adjusting structure 530 adjusts the position of the lens structure 100 along the direction of the third axis; and when the fifth adjusting structure 540 adjusts the first carrier 210 along the direction of the second axis 301, the first rotating assembly 200, the first adjusting assembly 400 and the second rotating assembly 300 are synchronously moved along the direction of the second axis 301, so that the fifth adjusting structure 540 adjusts the position of the lens structure 100 along the direction of the second axis. As can be seen from the above, through the arrangement of the fourth adjusting structure 530 and the fifth adjusting structure 540, the fourth adjusting structure 530 and the fifth adjusting structure 540 cooperate to flexibly adjust the position of the lens structure 100 in the YZ plane, so that the light inlet of the lens structure 100 can better receive the light signal from the object to be measured.

[0079] It can be understood that, under the premise of meeting the adjustment of the lens structure 100 along the Y axis and the third axis, the overall structure of the first sliding table 510, the second sliding table 520 and the first carrier 210 is simple, and they can be compactly assembled together, and the overall space occupied by the adjusting device is small.

[0080] To achieve the fourth adjustment structure 530 adjusting the second sliding table 520 along the third axis direction, in a possible embodiment, the fourth adjustment structure 530 comprises two fourth screw pairs 531, which are fixedly arranged at the edge positions of the first sliding table 510 along the third axis, and the action ends of the two fourth screw pairs 531 are oppositely arranged. The second sliding table 520 is arranged close to the edge positions of the fourth screw pairs 531, and is provided with a second adjustment boss 524, which is abutted between the action ends of the two fourth screw pairs 531. Of course, the two fourth screw pairs 531 can also be arranged at the edge positions of the second sliding table 520, and the edge of the first sliding table 510 is provided with a second adjustment boss abutted between the two fourth screw pairs 531, which is not limited in the present application. Therefore, the staff can adjust the screw rods of the two fourth screw pairs 531, and the two fourth screw pairs 531 cooperate to push the second sliding table 520 to move along the third axis, so as to adjust the position of the lens structure 100 along the third axis.

[0081] Further, the second sliding table 520 is provided with a fourth waist-shaped hole 523 in the overlapping area with the first sliding table 510, which is arranged along the third axis. The fourth waist-shaped hole 523 is provided with a locking screw, which is threadedly connected with the first sliding table 510. Specifically, during the adjustment of the second sliding table 520, the locking screw is in a loosened state, and the first sliding table 510 and the second sliding table 520 do not have obvious frictional resistance, so that the second sliding table 520 can be adjusted slidingly. After the rotation adjustment of the second sliding table 520 is completed, the locking screw is in a tightened state, at this time, the first sliding table 510 and the second sliding table 520 have large frictional resistance, so that the second sliding table 520 generates a large holding force on the first sliding table 510, thereby preventing the second sliding table 520 from sliding, and further maintaining the adjusted lens structure 100.

[0082] To achieve the first sliding table 210 slidingly arranged on the second sliding table 520, in a possible embodiment, referring to Figure 2 And Figure 4The second sliding table 520 is provided with at least two guide pins 521 in the Y-axis direction, and the two guide pins 521 are arranged at intervals. The first carrier 210 is provided with guide opening slots 213 at both sides of the Y-axis direction, and one guide pin 521 is slidingly arranged in one guide opening slot 213, and the other guide pin 521 is slidingly arranged in the other guide opening slot 213. Thus, the two guide pins 521 guide the first carrier 210 through the guide opening slots 213, so as to slidingly arrange the first carrier 210 on the second sliding table 520. Since one guide pin 521 is used to limit the sliding direction of the first carrier 210 along the Y-axis, and the other guide pin 521 is used to limit the sliding direction of the first carrier 210 along the Y-axis, the two guide pins 521 are slidingly arranged in one guide opening slot 213 respectively, so as to slidingly arrange the first carrier 210 within a certain range, and thus the first carrier 210 is within the effective control range of the fifth adjusting structure 540.

[0083] In order to adjust the first carrier 210 along the Y-axis by the fifth adjusting structure 540, in one possible embodiment, referring to Figure 2 With Figure 4 The fifth adjusting structure 540 includes a first screw 541 and a second screw 542. The second sliding table 520 is provided with a mounting boss 522 at the edge in the Y-axis direction, the mounting boss 522 extends to the edge of the first carrier 210, the first screw 541 is arranged on the mounting boss 522 along the Y-axis and is threadedly connected with the mounting boss 522, and the end of the first screw 541 abuts against the edge of the first carrier 210. The second screw 542 is arranged in an opening slot on the top of the mounting boss 522 along the Y-axis and is slidingly connected with the mounting boss 522 along the second axis 301. The side of the first carrier 210 close to the mounting boss 522 is provided with an adjusting screw hole 212, the screw rod of the second screw 542 is threadedly connected with the adjusting screw hole 212, or in other words, the second screw 542 is threadedly connected with the first carrier 210.

[0084] In the specific adjustment process, when the first carrier 210 needs to be adjusted away from the axial direction of the mounting boss 522, the second screw 542 is loosened. By rotating the first screw 541, the first screw 541 pushes the first carrier 210 to move away from the direction of the mounting boss, so as to adjust the first carrier 210 away from the direction of the mounting boss 522. After the adjustment of the first carrier 210 is completed, the second screw 542 is tightened, so as to keep the position of the first carrier 210. When the first carrier 210 needs to be adjusted towards the axial direction of the mounting boss 522, the second screw 542 is loosened. Rotate the first screw 541, the abutting end of the first screw 541 is retracted towards the mounting boss 522, and after the first screw 541 is rotated to the position, the second screw 542 is rotated, the second screw 542 pulls the first carrier 210 to move towards the mounting boss 522, so as to adjust the first carrier 210 towards the direction of the mounting boss 522, and when the edge of the first carrier 210 abuts against the abutting end of the first screw 541, the first carrier 210 is adjusted to the position.

[0085] Further, the first carrier 210 is provided with a first waist-shaped hole 214 in the overlapping area of the second sliding table 520, and the first waist-shaped hole 214 is provided along the Y axis. The first waist-shaped hole 214 is provided with a locking screw, and the locking screw is threadedly connected with the second sliding table 520. Specifically, during the adjustment of the first carrier 210, the locking screw is loosened, the second sliding table 520 has no obvious friction resistance with the first carrier 210, and the first carrier 210 can be adjusted slidingly. After the rotational adjustment of the first carrier 210 is completed, the locking screw is tightened, at this time, the second sliding table 520 has a large friction resistance with the first carrier 210, thereby the first carrier 210 generates a large holding force on the second sliding table 520, so as to prevent the first carrier 210 from sliding, and further keep the adjusted lens structure 100.

[0086] The application discloses an optical device, comprising a laser, the above-mentioned adjusting device and a light detector, wherein the laser is used for emitting a detection light beam towards a to-be-detected object, the adjusting device is used for collecting signal light from the to-be-detected object, and the light detector is used for receiving the signal light transmitted by the adjusting device.

[0087] Specifically, in the specific application process, an external laser emits a detection light beam towards a to-be-detected object, and the detection light beam reflects signal light after irradiating the to-be-detected object. The adjusting device is used for receiving the signal light reflected by the to-be-detected object and transmitting the signal light to the light detector. The light detector receives the signal light transmitted by the adjusting device and outputs corresponding signal light image information according to the signal light, so as to detect defects of the to-be-detected object. Of course, the light detector can also be used for detecting the distance of the to-be-detected object.

[0088] The technical means disclosed in the present application are not limited to the technical means disclosed in the above embodiments, and include technical solutions composed of any combination of the above technical features. It should be noted that, for those skilled in the art, without departing from the principles of the present application, a number of improvements and refinements can be made, and these improvements and refinements are also considered within the scope of protection of the present application.

Claims

1. An adjusting device, characterized in that, Used to collect optical signals from the object under test, including: The mounting structure is connected to the mirror assembly, which is used to transmit signal light. A first rotating component is used to rotate about a first axis to adjust the orientation of the mirror assembly; The second rotating component is used to rotate about the second axis to adjust the orientation of the mirror assembly; Wherein, the first axis and the second axis are arranged perpendicularly, and both the first axis and the second axis coincide with the image-side principal plane of the mirror group; A first adjusting component is disposed on the first rotating component, the first rotating component is used to adjust the first adjusting component by rotating around the first axis, a second rotating component is disposed on the first adjusting component, the first adjusting component is used to adjust the second rotating component along the direction of the first axis, and the mounting structure is disposed on the second rotating component; The first rotating assembly includes a first platform, a second platform, and a third adjusting structure. A fixed shaft is provided on the first platform, and the fixed shaft is collinear with the first axis. The third adjusting structure is connected to the first platform and / or the second platform and is used to adjust the second platform by rotating it around the fixed shaft. The second rotating assembly is disposed on the second platform.

2. The adjusting device according to claim 1, characterized in that, The first adjustment component includes a first frame and a first adjustment structure. The first rotation component is provided with a guide structure extending along a first axis. The first frame is slidably disposed on the guide structure along the direction of the first axis. The first adjustment structure is disposed on the guide structure and / or the first frame for adjusting the first frame along the direction of the first axis. The second rotation component is disposed on the first frame.

3. The adjusting device according to claim 2, characterized in that, The first adjustment structure includes a cover plate, a first tension spring, and a first threaded pair. The cover plate is fixedly connected to the top of the guide structure. The first threaded pair is disposed along the direction of the first axis on one of the cover plate and the first frame, and is disposed towards the other. The first tension spring is connected to the cover plate and the first frame to keep the other against the first threaded pair.

4. The adjusting device according to any one of claims 2-3, characterized in that, The first adjustment structure further includes a locking plate, which is connected to the first frame and the guide structure. The portion of the locking plate closest to the other is provided with a locking waist-shaped hole along the direction of the first axis, and a locking screw connected to the other is provided through the locking waist-shaped hole.

5. The adjusting device according to claim 2, characterized in that, The guiding structure includes two guide posts arranged along the direction of the first axis, and each of the two guide posts has a guide portion on its opposite side along its extension direction. The first frame is provided with a mating portion. Among the guide portions and the mating portion, one is a guide groove and the other is a guide protrusion slidably disposed in the guide groove.

6. The adjusting device according to claim 2, characterized in that, The second rotating assembly includes a second frame and a second adjusting structure. The mounting structure is disposed on the second frame, and the second frame is rotatably disposed on the first frame. The rotation axis between the two coincides with the image-side principal plane of the mirror assembly connected to the mounting structure. The second adjusting structure is disposed on the first frame and / or the second frame and is used to rotate and adjust the second frame. The second axis is the central axis of the rotation axis.

7. The adjusting device according to claim 6, characterized in that, The second adjustment structure includes a second threaded pair and a second tension spring, wherein the second threaded pair is disposed on the first frame and / or the second frame and is disposed toward the other, and the second tension spring is connected to the first frame and the second frame for holding the other against the second threaded pair.

8. The adjusting device according to claim 7, characterized in that, The inner side of the first frame defines an accommodating space, and the side of the first frame away from the guide structure is provided with a positioning through groove that runs through the inner and outer sides of the first frame. The edge of the first frame away from the guide structure is provided with a first lug. The inner side of the second frame defines an installation space, the edge of the second frame is provided with a positioning boss, and the edge of the second frame is provided with a second lug. The second frame is disposed in the accommodating space, the positioning boss is embedded in the positioning through groove, the second threaded pair is disposed in the positioning boss and abuts against the groove wall of the positioning through groove under the action of the second tension spring, the first lug and the second lug overlap and are rotatably connected by a rotating shaft, and the mounting structure is assembled in the mounting space.

9. The adjusting device according to claim 8, characterized in that, The second lug has an arc-shaped hole around the rotating shaft, and a locking screw that is threadedly connected to the first lug passes through the arc-shaped hole.

10. The adjusting device according to claim 1, characterized in that, The third adjustment structure includes two third threaded pairs, which are disposed opposite to each other on the edge of one of the first platform and the second platform, and the other platform is provided with a first adjustment boss that abuts against the two third threaded pairs; wherein, the second platform has a second oblong hole around the fixed axis, and a locking screw that is threadedly connected to the first platform passes through the second oblong hole.

11. The adjusting device according to claim 1, characterized in that, The adjustment device further includes a second adjustment component, which includes a first slide, a second slide, a fourth adjustment structure, and a fifth adjustment structure. The second slide is slidably disposed on the first slide, and the first platform is slidably disposed on the second slide. At least one of the first platform and the second slide is slidably disposed along a second axis, and the other is slidably disposed along a third axis, which is perpendicular to both the first axis and the second axis. The fourth adjustment structure is disposed on the first slide and / or the second slide to linearly adjust the second slide, and the fifth adjustment structure is disposed on the second slide and / or the first platform to linearly adjust the first platform.

12. The adjusting device according to claim 11, characterized in that, The fourth adjustment structure includes two fourth threaded pairs, which are disposed opposite to each other on the edge of one of the first slide and the second slide. The other slide is provided with a second adjustment boss that abuts against the two fourth threaded pairs. The second slide has a fourth oblong hole along its sliding direction, and a locking screw that is threadedly connected to the first slide passes through the fourth oblong hole.

13. The adjusting device according to claim 11, characterized in that, The second slide is provided with at least two guide pins, and the first platform is provided with guide opening slots on both sides of the sliding direction. The two guide pins are respectively slidably disposed in the guide opening slots so that the second slide can slide within a set range.

14. The adjusting device according to claim 13, characterized in that, The fifth adjustment structure includes a first screw and a second screw. The edge of the second slide is provided with a mounting boss extending to the edge of the first platform. The first screw is threadedly connected to the mounting boss and abuts against the edge of the first platform. The second screw is slidably disposed on the mounting boss along its axial direction and is threadedly connected to the first platform.

15. An optical device, characterized in that, include: A laser is used to emit a probe beam toward the object being tested. The adjusting device according to any one of claims 1 to 14; A photodetector is used to receive signal light transmitted from the mirror group connected to the adjustment device.

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