A light source coupling system, method, device and storage medium

Abstract

The present application provides a light source coupling system, method, device and storage medium, and the system includes: a first lens combination, an attenuation plate, a second lens combination, a continuously adjustable long-pass filter and a continuously adjustable short-pass filter. The light emitted by the light source passes through the first lens combination to form parallel light, and the attenuation plate is used to adjust the brightness of the parallel light, and the transmittance of the attenuation plate changes in a fixed gradient; the parallel light with adjusted brightness is converged through the second lens combination to form converged light, and the spectral band of the converged light is adjusted by the continuously adjustable long-pass filter and the continuously adjustable short-pass filter, and the two are respectively placed on both sides of the convergent image plane corresponding to the second lens combination; the axial distance between the two is fixed, and the spectral band of the convergent light is adjusted by adjusting the axial distance between the continuously adjustable long-pass filter and the convergent image plane, thereby realizing symmetrical adjustment of the spectral band, improving the adjustment efficiency of the spectral band, and meeting the requirements of efficient and accurate adjustment.

Description

Technical Field

[0001] The present invention relates to the field of optical technology, and in particular to a light source coupling system, method, device and storage medium. Background Art

[0002] Currently, in the field of semiconductor measurement, microscopic imaging technology can be used to measure the object to be measured, where the object to be measured can be a wafer. During the measurement process, different light source brightness and different spectral bands may be used to illuminate the object to be measured, that is, the light source brightness or spectral band is adjusted to obtain better measurement results.

[0003] However, the current adjustment of light source brightness and spectral band is rather cumbersome, resulting in low adjustment efficiency and failing to meet the needs of efficient and accurate adjustment. Summary of the invention

[0004] In view of this, the purpose of the present application is to provide a light source coupling system, method, device and storage medium, which can achieve efficient and accurate adjustment of the light source brightness and spectral band.

[0005] To achieve the above purpose, this application has the following technical solutions:

[0006] The present application provides a light source coupling system, the system comprising: a first lens combination, an attenuation plate, a second lens combination, a continuously adjustable long-pass filter and a continuously adjustable short-pass filter, wherein the transmittance of the attenuation plate varies in a fixed gradient;

[0007] The light emitted by the light source passes through the first lens combination to form parallel light, and the brightness of the parallel light is adjusted by the attenuation sheet;

[0008] The parallel light after brightness adjustment is converged through the second lens combination to form converged light, and the spectral band of the converged light is adjusted by using the continuously adjustable long-pass filter and the continuously adjustable short-pass filter;

[0009] The continuously adjustable long-pass filter and the continuously adjustable short-pass filter are respectively placed on both sides of the converging image plane corresponding to the second lens combination, the axial distance between the continuously adjustable long-pass filter and the continuously adjustable short-pass filter is fixed, and the spectral band of the converging light can be adjusted by adjusting the axial distance between the continuously adjustable long-pass filter and the converging image plane.

[0010] Optionally, the axial distance between the continuously adjustable long pass filter and the continuously adjustable short pass filter is determined according to the spot size of the converged light incident on the continuously adjustable long pass filter and the continuously adjustable short pass filter being less than or equal to a size threshold.

[0011] Optionally, the continuously adjustable long-pass filter and the continuously adjustable short-pass filter are connected at a fixed axial distance by a fixing device.

[0012] Optionally, the continuously adjustable long-pass filter is placed on a side of the converging image plane close to the attenuation plate, and the continuously adjustable short-pass filter is placed on a side of the converging image plane away from the attenuation plate.

[0013] Optionally, the attenuation sheet includes a first attenuation sheet and a second attenuation sheet, and the brightness of the parallel light is adjusted by using the first attenuation sheet and the second attenuation sheet.

[0014] Optionally, the system further comprises: a third lens combination, a beam splitter prism, a fourth lens combination and a spectrometer;

[0015] The light is converged by adjusting the spectral band and formed into parallel light by using the third lens combination;

[0016] The parallel light is converged to the spectrometer through the beam splitter prism and the fourth lens combination;

[0017] The spectrometer is used to monitor the light after brightness adjustment and spectral band adjustment in real time.

[0018] Optionally, the angle of the converged light incident on the continuously adjustable long-pass filter and the continuously adjustable short-pass filter is 5.2 degrees.

[0019] The present application provides a light source coupling method, which is applied to any of the light source coupling systems described above, and the method includes:

[0020] Controlling the light source to emit light, the light passing through the first lens combination to form parallel light;

[0021] The transmittance of the attenuation sheet is controlled to adjust the brightness of the parallel light, and the parallel light after brightness adjustment is converged through the second lens combination to form converged light;

[0022] Controlling the filtering bands of the continuously adjustable long-pass filter and the continuously adjustable short-pass filter and the axial distance between the continuously adjustable long-pass filter and the converging image plane to adjust the spectral band of the converging light;

[0023] The continuously adjustable long-pass filter and the continuously adjustable short-pass filter are respectively placed on both sides of the convergent image plane corresponding to the second lens combination, and the axial distance between the continuously adjustable long-pass filter and the continuously adjustable short-pass filter is fixed.

[0024] The present application provides a light source coupling device, the device comprising: a processor and a memory;

[0025] The memory is used to store instructions;

[0026] The processor is used to execute the instructions in the memory to perform the method as described above.

[0027] The present application provides a computer-readable storage medium, comprising instructions, which, when executed on a computer, enable the computer to execute the above-described method.

[0028] The present application provides a light source coupling system, which includes: a first lens combination, an attenuation plate, a second lens combination, a continuously adjustable long-pass filter, and a continuously adjustable short-pass filter. The light emitted by the light source passes through the first lens combination to form parallel light, and the brightness of the parallel light is adjusted by the attenuation plate, that is, the brightness of the light source is adjusted by the attenuation plate. Since the transmittance of the attenuation plate changes in a fixed gradient, efficient adjustment of the brightness of the light source can be achieved according to the change in transmittance; the parallel light with adjusted brightness is converged by the second lens combination to form converged light, and the spectral band of the converged light is adjusted by the continuously adjustable long-pass filter and the continuously adjustable short-pass filter. The continuously adjustable long-pass filter and the continuously adjustable short-pass filter are respectively placed on both sides of the convergent image surface corresponding to the second lens combination, so as to achieve uniform adjustment of the spot size; the axial distance between the continuously adjustable long-pass filter and the continuously adjustable short-pass filter is fixed, and the continuously adjustable long-pass filter and the continuously adjustable short-pass filter are adjusted by adjusting the continuously adjustable short-pass filter. The axial distance between the long-pass filter and the converging image plane adjusts the spectral band of the converging light, that is, when adjusting the axial distance between the continuously adjustable long-pass filter and the converging image plane, since the axial distance between the continuously adjustable long-pass filter and the continuously adjustable short-pass filter is fixed, the axial distance between the continuously adjustable short-pass filter and the converging image plane also changes accordingly, thereby realizing symmetrical adjustment of the spectral band, avoiding frequent adjustment problems caused by poor symmetry of the spectral band, and improving the adjustment efficiency of the spectral band; that is to say, the present application adopts an attenuation plate with a fixed gradient transmittance and a continuously adjustable long-pass filter and a continuously adjustable short-pass filter with a fixed axial distance to achieve efficient and accurate adjustment of the light source brightness and the spectral band, meeting the needs of efficient and accurate adjustment. BRIEF DESCRIPTION OF THE DRAWINGS

[0029] In order to more clearly illustrate the embodiments of the present application or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are some embodiments of the present application. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying any creative work.

[0030] Figure 1 A schematic structural diagram of a light source coupling system provided in an embodiment of the present application is shown;

[0031] Figure 2A schematic diagram of the structure of a damping sheet provided in an embodiment of the present application is shown;

[0032] Figure 3 A schematic structural diagram of another light source coupling system provided in an embodiment of the present application is shown;

[0033] Figure 4 A schematic flow chart of a light source coupling method provided in an embodiment of the present application is shown. DETAILED DESCRIPTION

[0034] In order to make the purpose, technical solution and advantages of the embodiments of the present application clearer, the technical solution in the embodiments of the present application will be clearly and completely described below in conjunction with the drawings in the embodiments of the present application. Obviously, the described embodiments are part of the embodiments of the present application, not all of the embodiments. Based on the embodiments in the present application, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of this application.

[0035] This application is described in detail with reference to schematic diagrams. When describing the embodiments of this application in detail, for the sake of convenience, the cross-sectional diagrams showing the device structure will not be partially enlarged according to the general scale, and the schematic diagrams are only examples, which should not limit the scope of protection of this application. In addition, in actual production, the three-dimensional dimensions of length, width and depth should be included.

[0036] Currently in the field of semiconductor quantity detection, microscopic imaging technology can be used to detect the object to be measured, where the object to be measured can be a wafer. During the measurement process, different light source brightness and different spectral bands may be used to illuminate the object to be measured, that is, the light source brightness or spectral band is adjusted to obtain better measurement results. Especially for high-end wafer manufacturing nodes, it is often necessary to use different spectral bands and different light source brightness to illuminate different samples in order to obtain better measurement results. At this time, a coupling module that can switch the light source spectral band and light source brightness is crucial.

[0037] Currently, the spectral band of the light source is adjusted through a continuous long-pass filter and a continuous short-pass filter. However, when adjusting the spectral band of the light source, the continuous long-pass filter and the continuous short-pass filter are placed separately, resulting in poor symmetry in the adjustment of the light source spectrum. In addition, in order to optimize the symmetry of the light source spectrum, the positions of the two need to be adjusted frequently, resulting in cumbersome adjustment of the symmetry of the light source spectrum.

[0038] Therefore, the current adjustment of the light source brightness and spectral band is rather cumbersome, resulting in low adjustment efficiency and failing to meet the needs of efficient and accurate adjustment.

[0039] Based on this, the present application provides a light source coupling system, which includes: a first lens combination, an attenuation plate, a second lens combination, a continuously adjustable long-pass filter, and a continuously adjustable short-pass filter. The light emitted by the light source passes through the first lens combination to form parallel light, and the brightness of the parallel light is adjusted by using the attenuation plate, that is, the brightness of the light source is adjusted by using the attenuation plate. Since the transmittance of the attenuation plate changes in a fixed gradient, efficient adjustment of the brightness of the light source can be achieved according to the change in transmittance; the parallel light with adjusted brightness is converged through the second lens combination to form converged light, and the spectral band of the converged light is adjusted by using the continuously adjustable long-pass filter and the continuously adjustable short-pass filter. The continuously adjustable long-pass filter and the continuously adjustable short-pass filter are respectively placed on both sides of the convergent image surface corresponding to the second lens combination, which can achieve uniform adjustment of the spot size; the axial distance between the continuously adjustable long-pass filter and the continuously adjustable short-pass filter is fixed, and the continuously adjustable long-pass filter and the continuously adjustable short-pass filter are adjusted by adjusting the continuously adjustable short-pass filter. The axial distance between the long-pass filter and the converging image plane adjusts the spectral band of the converging light, that is, when adjusting the axial distance between the continuously adjustable long-pass filter and the converging image plane, since the axial distance between the continuously adjustable long-pass filter and the continuously adjustable short-pass filter is fixed, the axial distance between the continuously adjustable short-pass filter and the converging image plane also changes accordingly, thereby realizing symmetrical adjustment of the spectral band, avoiding frequent adjustment problems caused by poor symmetry of the spectral band, and improving the adjustment efficiency of the spectral band; that is to say, the present application adopts an attenuation plate with a fixed gradient transmittance and a continuously adjustable long-pass filter and a continuously adjustable short-pass filter with a fixed axial distance to achieve efficient and accurate adjustment of the light source brightness and the spectral band, meeting the needs of efficient and accurate adjustment.

[0040] In order to better understand the technical solution and technical effects of the present application, specific embodiments will be described in detail below with reference to the accompanying drawings.

[0041] See also Figure 1 , which is a structural schematic diagram of a light source coupling system provided in an embodiment of the present application.

[0042] The light source coupling system provided in the embodiment of the present application includes: a first lens combination 110 , an attenuation plate 120 , a second lens combination 130 , a continuously adjustable long-pass filter 140 and a continuously adjustable short-pass filter 150 .

[0043] The light emitted by the light source forms parallel light through the first lens combination 110, and the parallel light is incident on the attenuation plate 120. The attenuation plate 120 is used to adjust the brightness of the parallel light. The parallel light with adjusted brightness is converged by the second lens combination 130 to form converged light. The converged light is incident on the continuously adjustable long-pass filter 140 and emitted from the continuously adjustable short-pass filter 150. The spectral band of the converged light is adjusted by the continuously adjustable long-pass filter 140 and the continuously adjustable short-pass filter 150.

[0044] In the embodiment of the present application, the first lens assembly 110 is used to adjust the light emitted by the light source into parallel light, and the second lens assembly 130 is used to adjust the light into convergent light.

[0045] In the embodiment of the present application, the transmittance of the attenuation sheet 120 changes in a fixed gradient, that is, the attenuation sheet 120 changes in sequence according to the fixed gradient, and the attenuation sheet 120 is used to adjust the brightness of the light source. Since the transmittance of the attenuation sheet 120 changes in a fixed gradient, when adjusting the brightness of the light source, the transmittance can be adjusted efficiently and quickly according to the gradient change law of the transmittance of the attenuation sheet 120, thereby achieving efficient adjustment of the brightness of the light source.

[0046] As an example, the attenuation sheet 120 includes a plurality of transmittance regions 121, and the plurality of transmittance regions 121 vary in a fixed gradient. Figure 2 As shown, the attenuation sheet 120 may be a circular structure, and the transmittance region 121 may be a fan-shaped region. Figure 2 The fixed gradient change of the plurality of transmittance regions 121 is represented by the grayscale change of the plurality of transmittance regions 121 .

[0047] In the embodiment of the present application, the continuously adjustable long-pass filter 140 and the continuously adjustable short-pass filter 150 are used to adjust the spectral band, and the continuously adjustable long-pass filter 140 and the continuously adjustable short-pass filter 150 are respectively placed on both sides of the convergent image plane 200 corresponding to the second lens assembly 130. Placing the continuously adjustable long-pass filter 140 and the continuously adjustable short-pass filter 150 on both sides of the convergent image plane 200 can achieve a small difference in the spot size of the convergent light when incident on the continuously adjustable long-pass filter 140 and the continuously adjustable short-pass filter 150, or even the same, to achieve uniform adjustment of the spot size, avoid the problem of different spot sizes caused by placing the continuously adjustable long-pass filter 140 and the continuously adjustable short-pass filter 150 on the same side of the convergent image plane 200, and improve the efficiency of spectral band adjustment.

[0048] The axial distance between the continuously adjustable long-pass filter 140 and the continuously adjustable short-pass filter 150 is fixed, and the spectral band of the converged light is adjusted by adjusting the axial distance between the continuously adjustable long-pass filter 140 and the convergent image plane 200. When adjusting the axial distance between the continuously adjustable long-pass filter 140 and the convergent image plane 200, since the axial distance between the continuously adjustable long-pass filter 140 and the continuously adjustable short-pass filter 150 is fixed, the axial distance between the continuously adjustable short-pass filter 150 and the convergent image plane 200 also changes accordingly, thereby achieving symmetrical adjustment of the spectral band, avoiding the frequent adjustment problem caused by poor symmetry of the spectral band, and improving the adjustment efficiency of the spectral band. That is to say, by fixing the axial distance between the continuously adjustable long-pass filter 140 and the continuously adjustable short-pass filter 150 and adjusting the axial position at the same time, and then adjusting the spectral band, a spectral distribution with better symmetry is finally obtained, thereby achieving efficient adjustment of the spectral band.

[0049] In the embodiment of the present application, in order to achieve efficient adjustment of the spectral band without affecting the light performance, the axial distance between the continuously adjustable long-pass filter 140 and the continuously adjustable short-pass filter 150 has an axial distance threshold limit. When the spot size of the convergent light incident on the continuously adjustable long-pass filter 140 and the continuously adjustable short-pass filter 150 is less than or equal to the size threshold, it can be achieved that the convergent light can still be detected after passing through the continuously adjustable long-pass filter 140 and the continuously adjustable short-pass filter 150. Therefore, the axial distance threshold can be determined according to the spot size of the convergent light incident on the continuously adjustable long-pass filter 140 and the continuously adjustable short-pass filter 150 being less than or equal to the size threshold, and then the axial distance between the continuously adjustable long-pass filter 140 and the continuously adjustable short-pass filter 150 is determined according to the axial distance threshold.

[0050] As an example, the size threshold may be 1 mm.

[0051] In the embodiment of the present application, considering that there is a fixed axial distance between the continuously adjustable long-pass filter 140 and the continuously adjustable short-pass filter 150, in order to achieve that the axial distance between the continuously adjustable long-pass filter 140 and the continuously adjustable short-pass filter 150 remains unchanged when the spectral band is adjusted, a fixing device can be used to connect the continuously adjustable long-pass filter 140 and the continuously adjustable short-pass filter 150 at a fixed axial distance. By connecting the continuously adjustable long-pass filter 140 and the continuously adjustable short-pass filter 150 at a fixed axial distance using a fixing device, it is possible to achieve that when adjusting the axial position of the continuously adjustable long-pass filter 140, the axial position of the continuously adjustable short-pass filter 150 can be directly adjusted simultaneously using the fixing device, and the axial distance between the continuously adjustable long-pass filter 140 and the continuously adjustable short-pass filter 150 remains unchanged. In addition, a fixing device is used to connect the continuously adjustable long-pass filter 140 and the continuously adjustable short-pass filter 150 to simultaneously adjust the axial positions of the continuously adjustable long-pass filter 140 and the continuously adjustable short-pass filter 150, which can not only achieve symmetrical adjustment of the spectral bands, but also avoid the problem of cumbersome adjustment caused by separately adjusting the axial positions of the continuously adjustable long-pass filter 140 and the continuously adjustable short-pass filter 150 while still maintaining a fixed axial distance between the two, thereby further improving the efficiency of the spectral band adjustment.

[0052] In the embodiment of the present application, the continuously adjustable long-pass filter 140 is placed on the side of the convergent image plane 200 close to the attenuation plate 120, and the continuously adjustable short-pass filter 150 is placed on the side of the convergent image plane 200 away from the attenuation plate 120. That is to say, the convergent light formed by the second lens assembly 130 is first incident on the continuously adjustable long-pass filter 140, and then continues to be incident on the continuously adjustable short-pass filter 150 after passing through the continuously adjustable long-pass filter 140, and then exits after passing through the continuously adjustable short-pass filter 150, that is, the light passes through the continuously adjustable long-pass filter 140 and the continuously adjustable short-pass filter 150 in sequence.

[0053] In an embodiment of the present application, the attenuation plate 120 may include a first attenuation plate 122 and a second attenuation plate 123, and the first attenuation plate 122 and the second attenuation plate 123 may be used to adjust the brightness of the parallel light, that is, the first attenuation plate 122 and the second attenuation plate 123 may be used to jointly adjust the brightness of the light source.

[0054] The first attenuation sheet 122 and the second attenuation sheet 123 both include a plurality of transmittance regions 121, and the plurality of transmittance regions 121 vary with a fixed gradient. By using the different transmittances of the first attenuation sheet 122 and the second attenuation sheet 123, which both vary with a fixed gradient, various adjustment methods of the light source brightness are achieved.

[0055] refer to Figure 3As shown, the first attenuation plate 122 and the second attenuation plate 123 are located between the first lens combination 110 and the second lens combination 130 . The parallel light formed by the first lens combination 110 first passes through the first attenuation plate 122 , and then passes through the second attenuation plate 123 , and then is incident on the second lens combination 130 .

[0056] In the embodiment of the present application, the light source coupling system further includes: a third lens assembly 160, a beam splitter prism 170, a fourth lens assembly 180 and a spectrometer 190, Figure 3 shown.

[0057] After the spectral band of the converged light is adjusted by the continuously adjustable long-pass filter 140 and the continuously adjustable short-pass filter 150, the converged light after the spectral band adjustment is incident on the third lens combination 160, and the third lens combination 160 is used to form parallel light, which is incident on the beam splitter 170 and is divided into two beams of light from the beam splitter 170, namely the first light and the second light, and the first light is incident on the fourth lens combination 180, and the fourth lens combination 180 is used to form converged light, and the converged light is incident on the spectrometer 190, so that the light after brightness adjustment and spectral band adjustment is monitored in real time by the spectrometer 190. By using the spectrometer 190 to monitor the light in real time, it can be used as the spectral feedback of the entire light source coupling system when the brightness adjustment or spectral band adjustment is performed, so as to directly obtain the adjustment result of the brightness adjustment or spectral band adjustment, which is convenient for further optimizing the brightness adjustment or spectral band adjustment.

[0058] As an example, the parameters of the beam splitter prism include the beam splitting ratio, which is 90T / 10R, that is, the transmitted light accounts for 90% and the reflected light accounts for 10%.

[0059] In practical applications, the light source coupling system further includes: a third attenuation plate 124, referring to Figure 3 The third attenuation plate 124 is located between the beam splitter prism 170 and the fourth lens assembly 180 , that is, the first light emitted from the beam splitter prism 170 is incident on the third attenuation plate 124 , and then the first light emitted from the third attenuation plate 124 is incident on the fourth lens assembly 180 .

[0060] In the embodiment of the present application, the light source coupling system further includes: a fifth lens assembly 210, referring to Figure 3 shown.

[0061] The second light emitted from the beam splitter prism 170 is incident on the fifth lens combination 210, and the fifth lens combination 210 is used to form a convergent light, which is incident on the Kohler illumination module of the microscopic imaging module, thereby realizing quantity detection using microscopic imaging technology.

[0062] In the embodiment of the present application, the light source coupling system further includes: a bandpass filter wheel set 220, referring to Figure 3 The bandpass filter wheel set 220 is connected to a motor, and the motor drives the bandpass filter wheel set 220 to rotate.

[0063] The bandpass filter wheel set 220 is located between the third lens assembly 160 and the beam splitter prism 170. The parallel light emitted from the third lens assembly 160 is incident on the bandpass filter wheel set 220, and then is incident on the beam splitter prism 170 after passing through the bandpass filter wheel set 220.

[0064] In an embodiment of the present application, the first lens combination 110 is a 2.5-fold magnification lens, that is, the first lens combination 110 amplifies the light of the light source to form parallel light, and performs 2.5-fold magnification. The light angle of the converged light rays converged by the second lens combination 130 incident on the continuously adjustable long-pass filter 140 and the continuously adjustable short-pass filter 150 is 5.2 degrees. The third lens combination 160 is a 1-fold magnification lens, that is, the third lens combination 160 amplifies the converged light rays to form parallel light, and performs 1-fold magnification. In other words, by setting the first lens combination 110, the third lens combination 160, and the light angles of the light rays incident on the continuously adjustable long-pass filter 140 and the continuously adjustable short-pass filter 150, a more cut-off spectral distribution is obtained. When the light angle of the light rays incident on the continuously adjustable long-pass filter 140 and the continuously adjustable short-pass filter 150 is smaller, the more the spectrum edge is cut off.

[0065] refer to Figure 3 As shown, the light source is a laser driven light source (LDLS) 230, and the broad spectrum light emitted by the light source is coupled into the light source coupling system through the optical fiber 240. The parameters of the optical fiber 240 include the optical fiber diameter and the numerical aperture (NA), for example, the light diameter is 400 microns, the NA is 0.22, and the light source coupling system amplifies the light emitted from the optical fiber 240 by 2.5 times to 1000 microns, and the NA is 0.09.

[0066] In practical applications, the light source coupling system further includes a controller, which is used to control the light emitted by the light source, control the transmittance of the attenuation plate 120, control the filter bands of the continuously adjustable long-pass filter 140 and the continuously adjustable short-pass filter 150, and control the axial distance between the continuously adjustable long-pass filter 140 and the convergent image plane 200. The controller can also control the motor to control the rotation of the bandpass filter wheel set 220.

[0067] It can be seen that the present application provides a light source coupling system, and the system includes: a first lens combination, an attenuation plate, a second lens combination, a continuously adjustable long-pass filter, and a continuously adjustable short-pass filter. The light emitted by the light source passes through the first lens combination to form parallel light, and the brightness of the parallel light is adjusted by using the attenuation plate, that is, the brightness of the light source is adjusted by using the attenuation plate. Since the transmittance of the attenuation plate changes in a fixed gradient, efficient adjustment of the brightness of the light source can be achieved according to the change in transmittance; the parallel light with adjusted brightness is converged through the second lens combination to form converged light, and the spectral band of the converged light is adjusted by using the continuously adjustable long-pass filter and the continuously adjustable short-pass filter. The continuously adjustable long-pass filter and the continuously adjustable short-pass filter are respectively placed on both sides of the convergent image surface corresponding to the second lens combination, so as to achieve uniform adjustment of the spot size; the axial distance between the continuously adjustable long-pass filter and the continuously adjustable short-pass filter is fixed, and the continuously adjustable long-pass filter and the continuously adjustable short-pass filter are adjusted by adjusting the continuously adjustable short-pass filter. The axial distance between the long-pass filter and the converging image plane adjusts the spectral band of the converging light, that is, when adjusting the axial distance between the continuously adjustable long-pass filter and the converging image plane, since the axial distance between the continuously adjustable long-pass filter and the continuously adjustable short-pass filter is fixed, the axial distance between the continuously adjustable short-pass filter and the converging image plane also changes accordingly, thereby realizing symmetrical adjustment of the spectral band, avoiding frequent adjustment problems caused by poor symmetry of the spectral band, and improving the adjustment efficiency of the spectral band; that is to say, the present application adopts an attenuation plate with a fixed gradient transmittance and a continuously adjustable long-pass filter and a continuously adjustable short-pass filter with a fixed axial distance to achieve efficient and accurate adjustment of the light source brightness and the spectral band, meeting the needs of efficient and accurate adjustment.

[0068] Based on a light source coupling system provided in the above embodiment, an embodiment of the present application further provides a light source coupling method, and its working principle is described in detail below in conjunction with the accompanying drawings.

[0069] See also Figure 4 , which is a flow chart of a light source coupling method provided in an embodiment of the present application.

[0070] The light source coupling method provided in the embodiment of the present application is applied to the light source coupling system provided in the above embodiment. The light source coupling system includes a controller, and the light source coupling method provided in the embodiment of the present application is executed by the controller.

[0071] The light source coupling method provided in the embodiment of the present application comprises the following steps:

[0072] S101, controlling the light source to emit light, and the light passes through a first lens combination to form parallel light.

[0073] In an embodiment of the present application, the controller is used to control the light source to emit light. The light source is a laser driven light source (LDLS).

[0074] The light is incident on the first lens combination and forms parallel light through the first lens combination.

[0075] S102, controlling the transmittance of the attenuation sheet to adjust the brightness of the parallel light, and the parallel light after the brightness adjustment is converged by the second lens combination to form converged light.

[0076] In an embodiment of the present application, the controller is used to control the transmittance of the attenuation sheet to adjust the brightness of the parallel light.

[0077] The attenuation sheet may include a first attenuation sheet and a second attenuation sheet, and the brightness of the parallel light can be adjusted by using the first attenuation sheet and the second attenuation sheet, that is, the brightness of the light source can be adjusted by using the first attenuation sheet and the second attenuation sheet together. The controller is used to control the transmittance of the first attenuation sheet and the second attenuation sheet.

[0078] The parallel light after brightness adjustment is converged by the second lens combination to form convergent light.

[0079] S103, controlling the filter bands of the continuously adjustable long-pass filter and the continuously adjustable short-pass filter and the axial distance between the continuously adjustable long-pass filter and the converging image plane to adjust the spectral band of the converging light.

[0080] In an embodiment of the present application, a controller is used to control the filtering bands of a continuously adjustable long-pass filter and a continuously adjustable short-pass filter and the axial distance between the continuously adjustable long-pass filter and the converging image plane, thereby realizing spectral band adjustment using the continuously adjustable long-pass filter and the continuously adjustable short-pass filter.

[0081] The continuously adjustable long-pass filter and the continuously adjustable short-pass filter are respectively placed on both sides of the convergent image plane corresponding to the second lens combination, and the axial distance between the continuously adjustable long-pass filter and the continuously adjustable short-pass filter is fixed.

[0082] In an embodiment of the present application, the controller may also control the third attenuation plate and the motor, and control the rotation speed of the motor to thereby control the rotation of the bandpass filter wheel assembly.

[0083] Based on the light source coupling method provided in the above embodiment, the embodiment of the present application further provides a light source coupling device, the light source coupling device comprising:

[0084] The processor and the memory may be one or more processors. In some embodiments of the present application, the processor and the memory may be connected via a bus or other means.

[0085] The memory may include a read-only memory and a random access memory, and provides instructions and data to the processor. A portion of the memory may also include an NVRAM. The memory stores an operating system and operating instructions, executable modules or data structures, or a subset thereof, or an extended set thereof, wherein the operating instructions may include various operating instructions for implementing various operations. The operating system may include various system programs for implementing various basic services and processing hardware-based tasks.

[0086] The processor controls the operation of the terminal device and may also be referred to as a CPU.

[0087] The method disclosed in the above embodiment of the present application can be applied to a processor or implemented by a processor. The processor can be an integrated circuit chip with signal processing capabilities. In the implementation process, each step of the above method can be completed by an integrated logic circuit of hardware in the processor or an instruction in the form of software. The above processor can be a general-purpose processor, DSP, ASIC, FPGA or other programmable logic device, discrete gate or transistor logic device, discrete hardware component. The methods, steps and logic block diagrams disclosed in the embodiments of the present application can be implemented or executed. The general-purpose processor can be a microprocessor or the processor can also be any conventional processor, etc. The steps of the method disclosed in the embodiment of the present application can be directly embodied as a hardware decoding processor to perform, or the hardware and software modules in the decoding processor can be combined to perform. The software module can be located in a mature storage medium in the field such as a random access memory, a flash memory, a read-only memory, a programmable read-only memory or an electrically erasable programmable memory, a register, etc. The storage medium is located in the memory, and the processor reads the information in the memory and completes the steps of the above method in combination with its hardware.

[0088] The embodiment of the present application also provides a computer-readable medium for storing program code, where the program code is used to execute any one of the methods of the aforementioned embodiments.

[0089] It should be noted that the computer-readable medium mentioned above in the present application may be a computer-readable signal medium or a computer-readable storage medium or any combination of the above two. The computer-readable storage medium may be, for example, but not limited to, an electrical, magnetic, optical, electromagnetic, infrared, or semiconductor system, device or device, or any combination of the above. More specific examples of computer-readable storage media may include, but are not limited to: an electrical connection with one or more wires, a portable computer disk, a hard disk, a random access memory (RAM), a read-only memory (ROM), an erasable programmable read-only memory (EPROM or flash memory), an optical fiber, a portable compact disk read-only memory (CD-ROM), an optical storage device, a magnetic storage device, or any suitable combination of the above. In the present application, a computer-readable storage medium may be any tangible medium containing or storing a program that can be used by or in combination with an instruction execution system, device or device. In the present application, a computer-readable signal medium may include a data signal propagated in a baseband or as part of a carrier wave, which carries a computer-readable program code. This propagated data signal may take a variety of forms, including but not limited to electromagnetic signals, optical signals, or any suitable combination of the above. Computer readable signal media may also be any computer readable medium other than computer readable storage media, which may send, propagate or transmit a program for use by or in conjunction with an instruction execution system, apparatus or device. The program code contained on the computer readable medium may be transmitted using any appropriate medium, including but not limited to: wires, optical cables, RF (radio frequency), etc., or any suitable combination of the above.

[0090] The computer-readable medium may be included in the electronic device, or may exist independently without being incorporated into the electronic device.

[0091] Each embodiment in this specification is described in a progressive manner, and the same or similar parts between the embodiments can be referred to each other, and each embodiment focuses on the differences from other embodiments. In particular, for the method embodiment, since it is basically similar to the system embodiment, the description is relatively simple, and the relevant parts can be referred to the partial description of the system embodiment.

[0092] The above is only a preferred implementation of the present application. Although the present application has been disclosed as a preferred embodiment, it is not intended to limit the present application. Any technician familiar with the art can use the above disclosed methods and technical contents to make many possible changes and modifications to the technical solution of the present application without departing from the scope of the technical solution of the present application, or modify it into an equivalent embodiment of equivalent changes. Therefore, any simple modification, equivalent change and modification made to the above embodiments based on the technical essence of the present application without departing from the content of the technical solution of the present application still falls within the scope of protection of the technical solution of the present application.

[0093] Based on the implementations provided in the above aspects, this application can also be further combined to provide more implementations.

Claims

1. A light source coupling system, characterized in that: The system comprises: a first lens combination, an attenuation plate, a second lens combination, a continuously adjustable long-pass filter and a continuously adjustable short-pass filter, wherein the transmittance of the attenuation plate changes in a fixed gradient; The light emitted by the light source passes through the first lens combination to form parallel light, and the brightness of the parallel light is adjusted by the attenuation sheet; The parallel light after brightness adjustment is converged through the second lens combination to form converged light, and the spectral band of the converged light is adjusted by using the continuously adjustable long-pass filter and the continuously adjustable short-pass filter; The continuously adjustable long-pass filter and the continuously adjustable short-pass filter are respectively placed on both sides of the convergent image plane corresponding to the second lens combination, the axial distance between the continuously adjustable long-pass filter and the continuously adjustable short-pass filter is fixed, and the continuously adjustable long-pass filter and the continuously adjustable short-pass filter are connected at a fixed axial distance by a fixing device; The spectral band of the converged light is symmetrically adjusted by adjusting the axial distance between the continuously adjustable long-pass filter and the converging image plane; when adjusting the axial position of the continuously adjustable long-pass filter, the axial position of the continuously adjustable short-pass filter is adjusted simultaneously by a fixing device, and the axial distance between the continuously adjustable long-pass filter and the continuously adjustable short-pass filter is kept unchanged.

2. The system according to claim 1, characterized in that The axial distance between the continuously adjustable long pass filter and the continuously adjustable short pass filter is determined according to the spot size of the converged light incident on the continuously adjustable long pass filter and the continuously adjustable short pass filter being less than or equal to a size threshold.

3. The system according to claim 1, characterized in that The continuously adjustable long-pass filter is placed on a side of the converging image plane close to the attenuation plate, and the continuously adjustable short-pass filter is placed on a side of the converging image plane away from the attenuation plate.

4. The system according to claim 1, characterized in that The attenuation sheet includes a first attenuation sheet and a second attenuation sheet, and the brightness of the parallel light is adjusted by using the first attenuation sheet and the second attenuation sheet.

5. The system according to claim 1, characterized in that The system further comprises: a third lens combination, a beam splitter prism, a fourth lens combination and a spectrometer; The light is converged by adjusting the spectral band and formed into parallel light by using the third lens combination; The parallel light is converged to the spectrometer through the beam splitter prism and the fourth lens combination; The spectrometer is used to monitor the light after brightness adjustment and spectral band adjustment in real time.

6. The system according to any one of claims 1 to 5, characterized in that: The angle of the converged light incident on the continuously adjustable long-pass filter and the continuously adjustable short-pass filter is 5.2 degrees.

7. A light source coupling method, characterized in that: Applied to the light source coupling system according to any one of claims 1 to 6, the method comprising: Controlling the light source to emit light, the light passing through the first lens combination to form parallel light; The transmittance of the attenuation sheet is controlled to adjust the brightness of the parallel light, and the parallel light after brightness adjustment is converged through the second lens combination to form converged light; Controlling the filter bands of the continuously adjustable long-pass filter and the continuously adjustable short-pass filter to adjust the spectral band of the converged light; symmetrically adjusting the spectral band of the converged light by adjusting the axial distance between the continuously adjustable long-pass filter and the convergent image plane; The continuously adjustable long-pass filter and the continuously adjustable short-pass filter are respectively placed on both sides of the converging image surface corresponding to the second lens combination, and the axial distance between the continuously adjustable long-pass filter and the continuously adjustable short-pass filter is fixed; the continuously adjustable long-pass filter and the continuously adjustable short-pass filter are connected at a fixed axial distance by a fixing device; when adjusting the axial position of the continuously adjustable long-pass filter, the axial position of the continuously adjustable short-pass filter is adjusted simultaneously by the fixing device, and the axial distance between the continuously adjustable long-pass filter and the continuously adjustable short-pass filter is kept unchanged.

8. A light source coupling device, characterized in that: The device comprises: a processor and a memory; The memory is used to store instructions; The processor is used to execute the instructions in the memory to perform the method according to claim 7.

9. A computer-readable storage medium, characterized in that: The method comprises instructions which, when executed on a computer, cause the computer to perform the method as claimed in claim 7.

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