Interdigital transducer and surface acoustic wave resonator

Abstract

The invention provides an interdigital transducer and a surface acoustic wave resonator, and relates to the technical field of semiconductors, the interdigital transducer comprises a first bus bar and a second bus bar which are oppositely arranged, and a plurality of interdigital electrode units arranged along a first direction are formed between the first bus bar and the second bus bar. The first direction is perpendicular to the opposite direction of the first bus bar and the second bus bar; each interdigital electrode unit comprises an L-shaped electrode and a long-finger electrode, the adjacent L-shaped electrodes are connected end to end, the long-finger electrodes are located between the adjacent L-shaped electrodes, and the adjacent long-finger electrodes alternately extend towards the L-shaped electrode of the same interdigital electrode unit in the opposite direction through the first bus bar and the second bus bar. Circuit connection of the resonator can be achieved without adding a bridging layer, the space size of the overall structure is greatly reduced, the manufacturing process is simplified, and therefore the process complexity, the process cost and the time cost are reduced.

Description

Technical Field

[0001] The present application relates to the field of semiconductor technology, and in particular to an interdigital transducer and a surface acoustic wave resonator. Background Art

[0002] With the rapid development of high-frequency applications such as mobile communications and the Internet of Things, spectrum resources are becoming increasingly scarce, and the demand for frequency bands has increased significantly. As an important component for frequency selection and signal filtering, surface acoustic wave filters (SAW filters) are evolving towards high performance, small size and low cost. Among them, the DMS (Double Mode SAW) structure has become a widely used filter structure in modern communication equipment due to its advantages in improving frequency selectivity and out-of-band suppression effects.

[0003] However, the traditional DMS structure often requires a bridge layer in the manufacturing process, which is used to ensure the precise arrangement of electrodes, achieve the excitation of specific acoustic wave modes, and avoid short circuits between electrodes and unnecessary coupling interference. However, the use of the bridge layer not only increases the complexity of the manufacturing process, but also limits the miniaturization design of the filter, affecting the applicability of the resonator in compact applications. Summary of the invention

[0004] The purpose of the embodiments of the present application is to provide an IDT and a surface acoustic wave resonator, which can reduce or even eliminate the dependence on the bridging layer, significantly reduce the process complexity, and optimize the production cost.

[0005] In one aspect of an embodiment of the present application, a forked finger transducer is provided, comprising a first bus bar and a second bus bar arranged opposite to each other, a plurality of forked finger electrode units arranged along a first direction are formed between the first bus bar and the second bus bar, and the first direction is perpendicular to the relative direction of the first bus bar and the second bus bar; each forked finger electrode unit comprises an L-shaped electrode and a long finger electrode, adjacent L-shaped electrodes are connected end to end, the long finger electrodes are located between adjacent L-shaped electrodes, and adjacent long finger electrodes extend alternately from the first bus bar and the second bus bar along relative directions to the L-shaped electrode of the same forked finger electrode unit.

[0006] Optionally, adjacent L-shaped electrodes are connected end to end to form a plurality of openings arranged along a first direction between the first bus bar and the second bus bar, the plurality of openings alternately face the first bus bar and the second bus bar, and the long finger electrodes extend from the first bus bar or the second bus bar on the opposite side of the opening toward the opening along a relative direction.

[0007] Optionally, in the first direction, a finger width between any adjacent long finger electrodes and L-shaped electrodes is 0.3λ to 0.7λ, where λ is a resonant wavelength.

[0008] Optionally, along the relative direction, a first gap width g1 between the end of the L-shaped electrode and the first bus bar or the second bus bar is 0.4λ~1λ, and a second gap width g2 between the end of the long finger electrode and the end of the L-shaped electrode is 0.4λ~1λ.

[0009] Another aspect of an embodiment of the present application provides a surface acoustic wave resonator, comprising: a plurality of the above-mentioned IDTs arranged along a first direction, wherein L-shaped electrodes of the plurality of IDTs are connected end to end.

[0010] Optionally, it also includes reflection gratings arranged at both ends of the plurality of interdigital transducers along the first direction.

[0011] Optionally, the first bus bar and the second bus bar of the IDT are connected to the signal input port and the signal output port respectively, and the multiple L-shaped electrodes connected end to end form at least one grounding port at both ends along the first direction.

[0012] Optionally, any end point of the multiple L-shaped electrodes connected end to end may form a grounding port, and the multiple grounding ports divide the multiple L-shaped electrodes connected end to end and the first bus bar and the second bus bar into multiple sections.

[0013] Optionally, each section of the first bus bar and the second bus bar is correspondingly connected to a signal input port and a signal output port.

[0014] Optionally, a break is provided on the first bus bar or the second bus bar, and the grounding port extends out of the first bus bar or the second bus bar through the break.

[0015] The interdigital transducer and surface acoustic wave resonator provided in the embodiments of the present application have long finger electrodes arranged alternately to make full use of the space and optimize the layout of the electrodes. The multiple L-shaped electrodes connected end to end form an overall electrode structure as the ground signal part, which cooperates with the layout of the long finger electrodes. The ground signal part can be directly extended to the head and tail of the overall electrode structure, that is, the head and tail of the DMS resonator, ensuring good grounding performance. In addition, since the ground signal is directly extended to the head and tail of the overall electrode structure, the intersection of the ground line with the input line and the output line is avoided, so that the circuit connection of the DMS resonator can be realized without adding a bridging layer, which not only effectively solves the problem of line connection in the prior art, but also greatly reduces the spatial size of the overall structure after removing the bridging layer, simplifies the manufacturing process, and thus reduces the complexity of the process, process cost and time cost. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] In order to more clearly illustrate the technical solutions of the embodiments of the present application, the drawings required for use in the embodiments of the present application will be briefly introduced below. It should be understood that the following drawings only show certain embodiments of the present application and therefore should not be regarded as limiting the scope. For ordinary technicians in this field, other related drawings can be obtained based on these drawings without paying creative work.

[0017] Figure 1 It is a schematic diagram of the structure of a traditional interdigital transducer; Figure 2 is a schematic diagram of the structure of the interdigital transducer provided in this embodiment; Figure 3 is a schematic structural diagram of an L-shaped electrode of an interdigital transducer provided in this embodiment; Figure 4 This is a schematic diagram of the traditional 5th-order DMS structure; Figure 5 Is for Figure 4 Schematic diagram of actual process connection; Figure 6 This is one of the schematic diagrams of the circuit connection method of the DMS resonator provided in this embodiment; Figure 7 yes Figure 6 Schematic diagram of actual process connection; Figure 8 This is the second schematic diagram of the circuit connection method of the DMS resonator provided in this embodiment; Fig. 9 This is the third circuit connection diagram of the DMS resonator provided in this embodiment.

[0018] Icon: 1-first end bus bar; 2-second end bus bar; 3-first electrode; 4-second electrode; 5-reflection grid; 6-resonator; 7-grounding area; 8-bridging layer; 10-interdigital transducer; 11-first bus bar; 12-second bus bar; 13-long finger electrode; 14-L-shaped electrode; 140-opening; 21-reflection grid; 22-signal input port; 23-signal output port; 24-grounding port; 25-break; 26-functional layer; F1-first direction; D-relative direction; W-aperture; g1-first gap width; g2-second gap width; p-finger width. DETAILED DESCRIPTION

[0019] The technical solutions in the embodiments of the present application will be clearly and completely described below in conjunction with the drawings in the embodiments of the present application.

[0020] In the description of this application, it should be noted that the terms "inside", "outside", etc. indicate the orientation or positional relationship based on the orientation or positional relationship shown in the drawings, or the orientation or positional relationship in which the product of the application is usually placed when in use, which is only for the convenience of describing this application and simplifying the description, and does not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on this application. In addition, the terms "first", "second", etc. are only used to distinguish the description, and cannot be understood as indicating or implying relative importance.

[0021] It should also be noted that, unless otherwise clearly specified and limited, the terms "disposed" and "connected" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a direct connection, or an indirect connection through an intermediate medium, or it can be the internal communication of two elements. For ordinary technicians in this field, the specific meanings of the above terms in this application can be understood according to specific circumstances.

[0022] Figure 1 It is a schematic diagram of the structure of a traditional interdigital transducer, which is an electrode with a periodic pattern in a finger-shaped or comb-shaped plane. Specifically, a plurality of first electrodes 3 extend from the first end bus bar 1 to the second end bus bar 2, and a plurality of second electrodes 4 extend from the second end bus bar 2 to the first end bus bar 1, and the first electrodes 3 and the second electrodes 4 are arranged alternately at intervals. When it is applied to a dual-mode coupled surface acoustic wave (DMS) resonator, it can usually be divided into 3rd order DMS, 5th order DMS, 7th order DMS, etc., up to Nth order DMS according to the order. By adjusting different orders, a specific bandwidth and suppression effect can be achieved. The DMS resonator contains 1 to N resonant units, each of which has a different pitch (electrode spacing), and the filtering effect is optimized by a specific combination of weighting coefficients. Due to the particularity of the DMS structure, the Nth order DMS resonator needs to be configured with 2×N ports, of which a is the signal input end, b is the signal output end, a+b=N, and the remaining ports are grounded. Due to this structure, the lines between the ground terminal and the input terminal and the output terminal inevitably overlap, and a bridge layer 8 needs to be added to prevent the ground line from contacting the input line and the output line. Figure 4 The figure shows a schematic diagram of a traditional 5-order DMS structure, where the DMS structure is Figure 4 The two ends in the lateral direction are reflection grids 5, and the five areas of different depths in the middle represent different resonators 6 of each order. The DMS structure circuit component has 10 ports, five of which are used as two-input and three-output input ports and output ports, and the remaining five ports are grounded.

[0023] like Figure 5The figure shows the actual process connection diagram of the traditional 5th-order DMS resonator. Figure 5 It can be seen that the lower area is the routing of the input (IN PUT) signal, the upper area is the routing of the output (OUT PUT) signal, and the grounding area 7 is used for grounding routing. Since each resonator in the 5th-order resonator requires a grounding routing, the lines between the ground end and the input end and the output end will inevitably overlap. Therefore, it is necessary to add a bridge layer 8 (bridge layer) to the input signal line and the output signal line to raise the area, and then use the line that crosses the bridge layer 8 to achieve the connection problem of the ground line. Usually, according to the process capability, the realization width of the line has a minimum size requirement, and the bridge layer 8 needs to ensure that the signal lines are blocked from contacting each other and has a larger size foundation, so the bridge layer 8 must occupy a certain size space. Figure 5 The conventional fifth-order DMS resonator shown in the figure has five bridge layers 8 added to avoid contact between the ground line and the input line and the output line, which takes up a large space. On the other hand, additional photolithography steps are required to complete the production of the bridge layer 8, which will increase the process cost and time.

[0024] Therefore, how to remove the bridging layer 8, thereby further reducing the size of the DMS structure and reducing the process cost and manufacturing time, has become an important direction for optimizing the design of the DMS resonator.

[0025] Based on this, to solve the above problems, please refer to Figure 2 As shown, an embodiment of the present application provides an interdigital transducer 10, comprising: a first bus bar 11 and a second bus bar 12 arranged opposite to each other, a plurality of interdigital electrode units arranged along a first direction F1 are formed between the first bus bar 11 and the second bus bar 12, and the first direction F1 is perpendicular to the relative direction D of the first bus bar 11 and the second bus bar 12; each of the interdigital electrode units comprises an L-shaped electrode 14 and a long finger electrode 13, adjacent L-shaped electrodes 14 are connected end to end, the long finger electrode 13 is located between adjacent L-shaped electrodes 14, and adjacent long finger electrodes 13 are alternately extended from the first bus bar 11 and the second bus bar 12 along the relative direction D to the L-shaped electrode 14 of the same interdigital electrode unit.

[0026] like Figure 2 As shown, a long finger electrode 13 and an adjacent L-shaped electrode 14 can form an interdigitated electrode unit, and a plurality of such interdigitated electrode units are periodically arranged and alternately arranged between the first bus bar 11 and the second bus bar 12 to form a cyclic resonator structure. Figure 3As shown, adjacent L-shaped electrodes 14 are connected end to end and extend along the first direction F1 to form a meandering overall electrode structure. Such a meandering shape can form openings 140 alternately formed along the first direction F1, so that long finger electrodes 13 are arranged at the positions of the openings 140.

[0027] Specifically, multiple openings 140 are arranged along the first direction F1 between the first bus bar 11 and the second bus bar 12, and the multiple openings 140 are alternately oriented toward the first bus bar 11 and the second bus bar 12, and the long finger electrodes 13 extend along the relative direction D from the first bus bar 11 or the second bus bar 12 on the opposite side of the opening 140 toward the opening 140.

[0028] The long finger electrodes 13 extend alternately from the first bus bar 11 or the second bus bar 12 toward the opening 140 , that is, one long finger electrode 13 is connected to the first bus bar 11 on the left side and extends toward the opening 140 on the opposite side (right side); the adjacent long finger electrode 13 is connected to the second bus bar 12 on the right side and extends toward the opening 140 on the opposite side (left side).

[0029] The alternately arranged long finger electrodes 13 are respectively connected to the first bus bar 11 and the second bus bar 12 to form the input signal connection and the output signal connection of the interdigital transducer 10. The first bus bar 11 and the second bus bar 12 can be interchanged as the input signal connection and the output signal connection, for example, the first bus bar 11 can be used as the input and the second bus bar 12 can be used as the output, or the first bus bar 11 can be used as the output and the second bus bar 12 can be used as the input.

[0030] The alternately arranged long finger electrodes 13 fully utilize the space and optimize the layout of the electrodes. Figure 1 The interdigital transducer is used in this application. Figure 2 , Figure 3 The overall electrode structure formed by the multiple L-shaped electrodes 14 connected end to end as shown is used as the ground signal part. In conjunction with the layout of the long finger electrode 13, the ground signal part can be directly extended to the end of the overall electrode structure, that is, the end of the DMS resonator, to ensure good grounding performance. In addition, since the ground signal is directly extended to the end of the overall electrode structure, the intersection of the ground line with the input line and the output line is avoided, so that the circuit connection of the DMS resonator can be realized without adding a bridge layer, which not only effectively solves the problem of line connection in the prior art, but also greatly reduces the spatial size of the overall structure after removing the bridge layer, simplifies the manufacturing process, and thus reduces the complexity of the process, the process cost and the time cost.

[0031] In the first direction F1, the finger width p between any adjacent long finger electrodes 13 and L-shaped electrodes 14 is 0.3λ to 0.7λ, where λ is the resonance wavelength, which ensures effective coupling and conversion of sound waves and improves the efficiency of acoustic-electrical energy conversion.

[0032] In addition, along the relative direction D, the first gap width g1 between the end of the L-shaped electrode 14 and the first bus bar 11 or the second bus bar 12 is 0.4λ~1λ, and the second gap width g2 between the end of the long finger electrode 13 and the end of the L-shaped electrode 14 is 0.4λ~1λ.

[0033] The gap between the end of the L-shaped electrode 14 along the first direction F1 and the bus bar and the long finger electrode 13 is set to be a first gap width g1 and a second gap width g2, and the design range of the first gap width g1 and the second gap width g2 are both 0.4λ~1λ. When set in this way, not only the isolation between the electrodes is enhanced, but also a more flexible electrical connection method is formed in the entire resonator.

[0034] In addition, the length of the endpoints of the two alternately arranged long finger electrodes 13 located in the opening 140 along the relative direction D can be set as the aperture W. Generally, the overall aperture W value range can be adjusted according to actual conditions.

[0035] On this basis, the embodiment of the present application also discloses a surface acoustic wave resonator, and the above-mentioned interdigital transducer 10 can be applied to a dual-mode coupled surface acoustic wave (DMS) resonator, please refer to Figure 6 As shown, the DMS resonator includes a plurality of IDTs 10 arranged along a first direction F1, wherein the L-shaped electrodes 14 of the plurality of IDTs 10 are connected end to end, and further includes a reflection grating 21 disposed at both ends of the plurality of IDTs 10 along the first direction F1.

[0036] The IDT 10 is used for acoustic-electric energy conversion, while the reflective grating 21 is used for reflecting sound waves to ensure that the sound waves do not leak out, enhance the coupling efficiency of the sound waves, and control the propagation direction of the waves, thereby improving the filtering performance and selectivity of the resonator.

[0037] When applied to DMS resonators, for example Figure 6 As shown, the DMS resonator is a 5th-order DMS resonator structure, and the L-type electrodes 14 connected end to end in the 5th-order DMS resonator structure form an overall electrode structure so as to be grounded at the end to end of the overall electrode structure. By optimizing the layout of the L-type electrode 14 and the long-finger electrode 13, dual-mode excitation is achieved without a bridging layer.

[0038] The first bus bar 11 and the second bus bar 12 of the interdigital transducer 10 are respectively connected to the signal input port 22 and the signal output port 23, and at least one grounding port 24 is formed at the head end and the tail end of the overall electrode structure along the first direction F1. In other words, the head end of the overall electrode structure can be used as a grounding port 24, or the tail end of the overall electrode structure can be used as a grounding port 24, either of which can be selected.

[0039] The 5-order DMS resonator structure is connected as a whole by an L-shaped electrode 14 connected end to end in sequence. The first bus bar 11 and the second bus bar 12 are connected to the signal input port 22 and the signal output port 23 respectively. The whole electrode structure is used as a ground signal part, and at least one ground port 24 is provided. The ground port 24 can be the head end or the tail end of the whole electrode structure. Figure 6 In the example, the head and tail ends of the overall electrode structure each form a ground port 24, which can improve the signal passing capacity and ensure good grounding performance. By connecting multiple L-shaped electrodes 14 end to end in sequence, the ground port 24 is extended to the head and tail of the overall electrode structure, which can avoid the intersection of the wiring circuit with the input line and the output line, thereby solving the problem of the need to set a bridge layer when the lines cross.

[0040] like Figure 7 Shown Figure 6 The corresponding process structure diagram of the 5th-order DMS resonator structure is Figure 6 The fifth-order DMS resonator is disposed on the corresponding functional layer 26, which is generally a piezoelectric layer. Figure 5 and this application Figure 7 Through the interdigital transducer 10 of the present application, the circuit connection of the DMS resonator structure can be achieved without adding a bridging layer, which not only solves the line connection problem, but also greatly reduces the spatial size of the overall structure and simplifies the manufacturing process.

[0041] Further, refer to Figure 8 As shown, any endpoint on the overall electrode structure formed by the L-shaped electrodes 14 connected end to end can be used to connect to the grounding port 24 after being led out from the bus bar, that is, any endpoint on the overall electrode structure can be used for grounding. In this way, the overall electrode structure used for grounding is segmented through the grounding port 24, and the corresponding signal input port 22 and signal output port 23 can be connected to the bus bar section corresponding to each section of the overall electrode structure, so as to realize the formation of the signal input port 22, the signal output port 23 and its diversified grounding logic in any area, so that a flexible routing layout can be carried out.

[0042] The routing of traditional ground and signal ports is often complex and specific, which limits the routing layout when the ports are fixed. In the face of the growing design requirements for high performance and small size, especially in complex DMS resonator structures, the routing layout of the present application can flexibly adjust the positions of the signal ports (signal input port 22, signal output port 23) and the ground port 24, making the routing more convenient and reasonable, fully optimizing the space utilization, and adapting to the routing requirements of various structures, thereby improving the applicability of the DMS resonator.

[0043] In addition, the flexible port layout of the present application can flexibly arrange the location of the bridging layer, optimize the layout of the bridging layer, and remove the bridging layer at certain locations. Figure 5 The existing solution of setting a bridging layer for fixed ports, even if multiple signal ports and ground ports 24 are set in the present application, since the positions of the ports can be flexibly arranged, the probability of setting a bridging layer can be reduced to a certain extent. While taking into account the flexible layout of the ports, the spatial size of the overall structure can be reduced to a certain extent, the process complexity and cost can be reduced, so that the multi-order DMS resonator structure can achieve a more flexible grounding logic, thereby supporting diversified performance design.

[0044] This application except Figure 6 In addition to grounding the first and last ends of the overall electrode structure formed by the L-shaped electrodes 14 connected in sequence along the first direction F1, any end point in the middle region of the overall electrode structure may also be grounded. Figure 8 As shown, both ends of the integral electrode structure are grounded and led out by the first bus bar 11 ; any two ends are selected in the middle area of ​​the integral electrode structure as grounding ports 24 , and both grounding ports 24 are led out by the second bus bar 12 . Fig. 9 As shown, one end of the integral electrode structure is used as the grounding port 24 and is led out by the first bus bar 11 , and any end in the middle area of ​​the integral electrode structure is selected as the grounding port 24 and is led out by the second bus bar 12 .

[0045] In addition, a break 25 is provided on the bus bar, such as Figure 8 As shown, the grounding port 24 is led out from the break 25 of the bus bar, and the effective separation between signal input, signal output and grounding is ensured through the break 25. The break 25 divides the bus bar into different sections, and the bus bars in different sections are correspondingly connected to the signal output port 23 or the signal input port 22.

[0046] In summary, this application cancels the setting of the bridge layer, so that the DMS resonator can be further miniaturized without affecting the performance, and the manufacturing process can be simplified when solving the line connection problem. Alternatively, the setting of the bridge layer can be reduced, while taking into account the flexible layout of the port, the spatial size of the overall structure can be reduced to a certain extent, and then the multi-order DMS resonator structure can achieve more flexible grounding logic and support diversified performance design.

[0047] In addition to being applicable to the above-mentioned DMS resonator, the surface acoustic wave resonator of the present application can also be a normal surface acoustic wave filter (NSAW), a temperature compensated surface acoustic wave resonator (TCSAW), or a thin film surface acoustic wave filter (TFSAW). The surface acoustic wave resonator has the same structure and beneficial effects as the IDT 10 in the aforementioned embodiment. The structure and beneficial effects of the IDT 10 have been described in detail in the aforementioned embodiment, and will not be repeated here.

[0048] The above description is only an embodiment of the present application and is not intended to limit the protection scope of the present application. For those skilled in the art, the present application may have various modifications and variations. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present application shall be included in the protection scope of the present application.

Claims

1. An interdigital transducer, characterized in that: include: A first bus bar (11) and a second bus bar (12) are arranged opposite to each other, and a plurality of interdigitated electrode units arranged along a first direction (F1) are formed between the first bus bar (11) and the second bus bar (12), wherein the first direction (F1) is perpendicular to a relative direction (D) between the first bus bar (11) and the second bus bar (12); each of the interdigitated electrode units comprises an L-shaped electrode (14) and a long finger electrode (13), and adjacent L-shaped electrodes (14) are connected end to end, and the long finger electrodes (13) are located between adjacent L-shaped electrodes (14), and adjacent long finger electrodes (13) are alternately extended from the first bus bar (11) and the second bus bar (12) along the relative direction (D) to the L-shaped electrode (14) of the same interdigitated electrode unit.

2. The interdigital transducer according to claim 1, characterized in that: Adjacent L-shaped electrodes (14) are connected end to end to form a plurality of openings (140) arranged along the first direction (F1) between the first bus bar (11) and the second bus bar (12); the plurality of openings (140) are alternately oriented toward the first bus bar (11) and the second bus bar (12); and the long finger electrodes (13) extend along the relative direction (D) from the first bus bar (11) or the second bus bar (12) on the opposite side of the opening (140) toward the opening (140).

3. The interdigital transducer according to claim 1, characterized in that: In the first direction (F1), the finger width (p) between any adjacent long finger electrodes (13) and L-shaped electrodes (14) is 0.3λ to 0.7λ, where λ is the resonance wavelength.

4. The interdigital transducer according to claim 3, characterized in that: Along the relative direction (D), a first gap width (g1) between an end of the L-shaped electrode (14) and the first bus bar (11) or the second bus bar (12) is 0.4λ to 1λ, and a second gap width (g2) between an end of the long finger electrode (13) and an end of the L-shaped electrode (14) is 0.4λ to 1λ.

5. A surface acoustic wave resonator, characterized in that: It comprises a plurality of IDTs according to any one of claims 1 to 4 arranged along the first direction (F1), wherein the L-shaped electrodes (14) of the plurality of IDTs are connected end to end.

6. The surface acoustic wave resonator according to claim 5, characterized in that: It also includes reflection gratings (21) arranged at both ends of the plurality of interdigital transducers along the first direction (F1).

7. The surface acoustic wave resonator according to claim 6, characterized in that: The first bus bar (11) and the second bus bar (12) of the interdigital transducer are respectively connected to a signal input port (22) and a signal output port (23), and a plurality of L-shaped electrodes (14) connected end to end form at least one grounding port (24) at both ends along the first direction (F1).

8. The surface acoustic wave resonator according to claim 7, characterized in that: Any end point of the multiple L-shaped electrodes (14) connected end to end can form the grounding port (24), and the multiple grounding ports (24) divide the multiple L-shaped electrodes (14) connected end to end and the first bus bar (11) and the second bus bar (12) into multiple sections.

9. The surface acoustic wave resonator according to claim 8, characterized in that: Each section of the first bus bar (11) and the second bus bar (12) is correspondingly connected to the signal input port (22) and the signal output port (23).

10. The surface acoustic wave resonator according to any one of claims 7 to 9, characterized in that: A break (25) is provided on the first bus bar (11) or the second bus bar (12), and the grounding port (24) extends out of the first bus bar (11) or the second bus bar (12) through the break (25).

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