Hall sensor and Hall device
By designing the second Hall component in Hall sensors, the problem of zero bias of the Hall sensor is solved, the zero bias eliminate or decrease, and improve the measurement range and system sensitivity.
Patent Information
- Application Number
- CN202411456659.8
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- Filing Date
- 2024-10-18
- Publication Date
- 2025-01-24
AI Technical Summary
The zero-field offset (zero bias) of the Hall sensor is often not zero, resulting in the Hall voltage not zero at zero magnetic field, affecting measurement accuracy and system sensitivity.
Design a Hall sensor, including a first Hall element and a second Hall element. The second Hall element is mirror symmetrical to the first Hall element, and the mirror symmetry axis direction is connected to the output electrode pair of the first Hall element. The formed directions are parallel, and the sensing plane of the first Hall element is coplanar with the sensing plane of the second Hall element.
Through the symmetrical design of the mirror surface, the resistance difference is eliminated, the unbalanced voltage is reduced, the zero bias is eliminated or decreased, and the measurement range and the sensitivity of the system of the Hall sensor are improved.
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Figure CN119365060A_ABST
Abstract
Description
Technical Field
[0001] The present application relates to the field of electronic technology, and in particular to a Hall sensor and a Hall device. Background Art
[0002] The Hall effect refers to the phenomenon that when a solid conductor (or semiconductor) is placed in a magnetic field and current passes through it, the charge carriers (such as electrons) in the conductor are deflected to one side by the Lorentz force, thereby generating a voltage (Hall voltage) in a direction perpendicular to the current and magnetic field.
[0003] Hall sensors based on the Hall effect have been widely used in the measurement of magnetic field, current, displacement, rotation speed, etc. However, the zero field offset (zero bias) of the Hall sensor is often not zero, that is, the Hall voltage is not zero in zero magnetic field. Therefore, it is very necessary to eliminate the zero bias voltage. Summary of the invention
[0004] In view of this, embodiments of the present application provide a Hall sensor and a Hall device to solve at least one problem existing in the background technology.
[0005] In a first aspect, an embodiment of the present application provides a Hall sensor, wherein the Hall sensor includes a first Hall element and a second Hall element;
[0006] The first Hall element has at least one pair of first input electrode pairs and one pair of first output electrode pairs; the second Hall element has at least one pair of second input electrode pairs and one pair of second output electrode pairs; wherein the second input electrode pair is electrically connected to the first input electrode pair so that the current direction between the second input electrode pairs is the same as the current direction between the first input electrode pairs; the second output electrode pair is electrically connected to the first output electrode pair so as to output a Hall voltage at the first output electrode pair; the first input electrode pair is used to connect to an excitation power supply to generate the Hall voltage;
[0007] Among them, the second Hall element is mirror-symmetrical to the first Hall element, and the direction of the mirror-symmetrical axis is parallel to the direction formed by at least one pair of output electrodes of the first Hall element being connected to each other; and the first sensing plane of the first Hall element and the second sensing plane of the second Hall element are coplanar with each other.
[0008] In combination with the first aspect, in an optional implementation, the first input electrode pair includes a first input electrode and a second input electrode opposite to each other; the first output electrode pair includes a first output electrode and a second output electrode opposite to each other;
[0009] The direction formed by the first input electrode and the second input electrode being connected to each other is the first direction of the first element, and the direction formed by the first output electrode and the second output electrode being connected to each other is the second direction of the first element; the first direction of the first element and the second direction of the first element are arranged at a preset angle;
[0010] The second input electrode pair includes a third input electrode and a fourth input electrode facing each other; the second output electrode pair includes a third output electrode and a fourth output electrode facing each other;
[0011] The direction formed by the connection between the third input electrode and the fourth input electrode is the first direction of the second element, the direction formed by the connection between the third output electrode and the fourth output electrode is the second direction of the second element; the first direction of the second element and the second direction of the second element are arranged at the preset angle;
[0012] Wherein, the second direction of the first element is parallel to the second direction of the second element.
[0013] In combination with the first aspect, in an optional implementation, the first direction of the first element is collinear with the first direction of the second element.
[0014] In a second aspect, an embodiment of the present application provides a Hall sensor, the Hall sensor comprising a first Hall element, a second Hall element, and a substrate for mounting the first Hall element and the second Hall element;
[0015] The first Hall element has at least one pair of first input electrode pairs and one pair of first output electrode pairs; the second Hall element has at least one pair of second input electrode pairs and one pair of second output electrode pairs; wherein the second input electrode pair is electrically connected to the first input electrode pair so that the current direction between the second input electrode pairs is the same as the current direction between the first input electrode pairs; the second output electrode pair is electrically connected to the first output electrode pair so as to output a Hall voltage at the first output electrode pair; the first input electrode pair is used to connect to an excitation power supply to generate the Hall voltage;
[0016] The second Hall element is mirror-symmetrical to the first Hall element, and the direction of the mirror-symmetrical axis is parallel to the direction in which at least one pair of output electrodes of the first Hall element are connected to each other.
[0017] In conjunction with the second aspect, in an optional implementation manner, the first Hall element and the second Hall element are both independent packages;
[0018] The first Hall element comprises:
[0019] A first input connection pad, electrically connected to an input electrode of the first input electrode pair;
[0020] a second input connection pad, electrically connected to the other input electrode of the first input electrode pair;
[0021] A first output connection pad, electrically connected to an output electrode of the first output electrode pair;
[0022] The second output connection pad is electrically connected to the other output electrode in the first output electrode pair.
[0023] In combination with the second aspect, in an optional implementation manner, the Hall sensor further includes a first input connection pad, a second input connection pad, a first output connection pad, and a second output connection pad arranged on the substrate, which are used as external electrical connection ports of the packaged Hall sensor;
[0024] The first input connection pad is electrically connected to one input electrode of the first input electrode pair, and the second input connection pad is electrically connected to the other input electrode of the first input electrode pair;
[0025] The first output connection pad is electrically connected to one output electrode in the first output electrode pair, and the second output connection pad is electrically connected to the other output electrode in the first output electrode pair.
[0026] In combination with the second aspect, in an optional implementation manner, the Hall sensor further includes two pairs of electrode connection pads arranged on the substrate;
[0027] One pair of the two pairs of electrode connection pads is used to mount the second input electrode pair of the second Hall element, and the other pair of the two pairs of electrode connection pads is used to mount the second output electrode pair of the second Hall element, so as to electrically connect the second input electrode pair with the first input electrode pair through the two pairs of electrode connection pads, and electrically connect the second output electrode pair to the first output electrode pair.
[0028] In combination with the second aspect, in an optional embodiment, the Hall sensor also includes four intermediate connecting plates arranged on the substrate, so as to electrically connect the second input electrode pair with the first input electrode pair through the four intermediate connecting plates, and electrically connect the second output electrode pair to the first output electrode pair.
[0029] In combination with the second aspect, in an optional implementation manner, each electrode of the first Hall element is electrically connected to each of the intermediate connection plates in a one-to-one correspondence via flying wires.
[0030] In combination with the second aspect, in an optional implementation, the first input electrode pair includes a first input electrode and a second input electrode opposite to each other; the first output electrode pair includes a first output electrode and a second output electrode opposite to each other;
[0031] The direction formed by the first input electrode and the second input electrode being connected to each other is the first direction of the first element, and the direction formed by the first output electrode and the second output electrode being connected to each other is the second direction of the first element; the first direction of the first element and the second direction of the first element are arranged at a preset angle;
[0032] The second input electrode pair includes a third input electrode and a fourth input electrode facing each other; the second output electrode pair includes a third output electrode and a fourth output electrode facing each other;
[0033] The direction formed by the connection between the third input electrode and the fourth input electrode is the first direction of the second element, the direction formed by the connection between the third output electrode and the fourth output electrode is the second direction of the second element; the first direction of the second element and the second direction of the second element are arranged at the preset angle;
[0034] Wherein, the second direction of the first element is parallel to the second direction of the second element.
[0035] In combination with the second aspect, in an optional implementation, the first direction of the first element is collinear with the first direction of the second element.
[0036] In a third aspect, an embodiment of the present application provides a Hall device, including:
[0037] The Hall sensor as described in the first aspect; or the Hall sensor as described in the second aspect;
[0038] The conditioning circuit is electrically connected to the Hall sensor and is used to perform at least one of the following on the Hall voltage output by the Hall sensor: amplification; voltage or current conversion; filtering.
[0039] The beneficial effects brought by the technical solution provided by the embodiment of the present application include: the Hall sensor of the embodiment of the present application includes a first Hall element and a second Hall element; the first Hall element has at least a pair of first input electrode pairs and a pair of first output electrode pairs; the second Hall element has at least a pair of second input electrode pairs and a pair of second output electrode pairs; wherein the second input electrode pair is electrically connected to the first input electrode pair so that the current direction between the second input electrode pairs is the same as the current direction between the first input electrode pairs; the second output electrode pair is electrically connected to the first output electrode pair so as to output the Hall voltage at the first output electrode pair; the first input electrode pair is used to connect to an excitation power supply to generate a Hall voltage; wherein the second Hall element is mirror-symmetrical to the first Hall element, and the direction of the mirror-symmetrical axis is parallel to the direction formed by at least one pair of output electrode pairs of the first Hall element being connected to each other; and the first sensing plane of the first Hall element and the second sensing plane of the second Hall element are coplanar with each other, can be easily prepared and realized, and can eliminate or reduce the zero bias, solve the problem of excessive zero bias, and thus can increase the measurement range of the system in which the Hall sensor is located and reduce heat generation, thereby greatly improving the sensitivity of the system.
[0040] Additional aspects and advantages of the embodiments of the present application will be given in part in the description below and in part will become apparent from the description below or will be learned through the practice of the embodiments of the present application. BRIEF DESCRIPTION OF THE DRAWINGS
[0041] The drawings described herein are used to provide a further understanding of the present application and constitute a part of the present application. The drawings are not necessarily drawn to scale, and local features may be enlarged or reduced to more clearly show the details of the local features. The illustrative embodiments of the present application and their descriptions are used to explain the present application and do not constitute an improper limitation on the present application. In the drawings:
[0042] Figure 1 A schematic diagram of a specific example of a Hall sensor in the related art;
[0043] Figure 2 For Figure 1 Schematic diagram of the equivalent circuit corresponding to the Hall sensor in FIG.
[0044] Figure 3 This is a schematic diagram of the structure of Example 1 of the Hall sensor in the embodiment of the present application;
[0045] Figure 4 A schematic diagram of a specific example of a Hall element in an embodiment of the present application;
[0046] Figure 5 For Figure 3 Schematic diagram of the equivalent circuit corresponding to the Hall sensor in FIG.
[0047] Figure 6 This is a schematic diagram of the structure of Example 2 of the Hall sensor in the embodiment of the present application;
[0048] Figure 7 This is a schematic diagram of the structure of Example 3 of the Hall sensor in the embodiment of the present application;
[0049] Figure 8 This is a schematic diagram of the structure of Example 4 of the Hall sensor in the embodiment of the present application;
[0050] Fig. 9 This is a schematic structural diagram of a specific example of a substrate in an embodiment of the present application;
[0051] Fig.10 It is a schematic diagram of a principle block diagram of a specific example of a Hall device in an embodiment of the present application. DETAILED DESCRIPTION
[0052] In order to make the technical solutions and beneficial effects of the present invention more clearly understandable, the following is a detailed description by listing specific embodiments. The drawings are not necessarily drawn to scale, and local features may be enlarged or reduced to more clearly show the details of the local features; unless otherwise defined, the technical and scientific terms used herein have the same meanings as those in the technical field to which this application belongs.
[0053] The embodiments of the present application are not exhaustive, but are only illustrative of some embodiments, and are not intended to be a specific limitation on the scope of protection of the present application. In the absence of contradiction, each step in a certain embodiment can be implemented as an independent embodiment, and the steps can be arbitrarily combined. For example, in a certain embodiment, the solution after removing some steps can also be implemented as an independent embodiment, and the order of the steps in a certain embodiment can be arbitrarily exchanged. In addition, the optional implementations in a certain embodiment can be arbitrarily combined; in addition, the embodiments can be arbitrarily combined, for example, some or all of the steps of different embodiments can be arbitrarily combined, and a certain embodiment can be arbitrarily combined with the optional implementations of other embodiments.
[0054] In each embodiment of the present application, unless otherwise specified or there is a logical conflict, the terms and / or descriptions between the embodiments are consistent and can be referenced to each other. The technical features in different embodiments can be combined to form a new embodiment based on their internal logical relationships.
[0055] The terms used in the embodiments of the present application are only for the purpose of describing specific embodiments and are not intended to limit the present application.
[0056] In the embodiments of the present application, unless otherwise specified, elements expressed in the singular form, such as "a", "an", "the", "above", "said", "aforementioned", "this", etc., may mean "one and only one", or "one or more", "at least one", etc. For example, when using articles such as "a", "an", "the" in English in translation, the noun after the article may be understood as a singular expression or a plural expression.
[0057] In the embodiments of the present application, "plurality" refers to two or more.
[0058] In some embodiments, the terms "at least one", "one or more", "a plurality of", "multiple", etc. can be used interchangeably.
[0059] In some embodiments, "at least one of A and B", "A and / or B", "A in one case, B in another case", "A in one case, B in another case", etc., may include the following technical solutions according to the situation: in some embodiments, A (A is executed independently of B); in some embodiments, B (B is executed independently of A); in some embodiments, execution is selected from A and B (A and B are selectively executed); in some embodiments, A and B (both A and B are executed). When there are more branches such as A, B, C, etc., the above is also similar.
[0060] In some embodiments, the recording method of "A or B" may include the following technical solutions according to the situation: in some embodiments, A (A is executed independently of B); in some embodiments, B (B is executed independently of A); in some embodiments, execution is selected from A and B (A and B are selectively executed). When there are more branches such as A, B, C, etc., the above is also similar.
[0061] The prefixes such as "first" and "second" in the embodiments of the present application are only used to distinguish different description objects, and do not constitute restrictions on the position, order, priority, value or content of the description objects. The statement of the description object refers to the description in the context of the claims or embodiments, and should not constitute redundant restrictions due to the use of prefixes. For example, if the description object is a "field", the ordinal number before the "field" in the "first field" and the "second field" does not limit the position or order between the "fields", and the "first" and "second" do not limit whether the "fields" they modify are in the same message, nor do they limit the order of the "first field" and the "second field". For another example, if the description object is a "level", the ordinal number before the "level" in the "first level" and the "second level" does not limit the priority between the "levels". For another example, the numerical value of the description object is not limited by the ordinal number, and can be one or more. Taking the "first device" as an example, the numerical value of the "device" can be one or more. In addition, the objects modified by different prefixes may be the same or different. For example, if the description object is "device", then the "first device" and the "second device" may be the same device or different devices, and their types may be the same or different. For another example, if the description object is "information", then the "first information" and the "second information" may be the same information or different information, and their contents may be the same or different.
[0062] In some embodiments, terms such as “…”, “determine…”, “in the case of…”, “at the time of…”, “when…”, “if…”, “if…”, etc. can be used interchangeably.
[0063] In some embodiments, terms such as "greater than", "greater than or equal to", "not less than", "more than", "more than or equal to", "not less than", "higher than", "higher than or equal to", "not lower than", and "above" can be replaced with each other, and terms such as "less than", "less than or equal to", "not greater than", "less than", "less than or equal to", "no more than", "lower than", "lower than or equal to", "not higher than", and "below" can be replaced with each other.
[0064] In some embodiments, devices, etc. can be interpreted as physical or virtual, and their names are not limited to the names recorded in the embodiments. Terms such as "device", "equipment", "device", "circuit", "network element", "node", "function", "unit", "section", "system", "network", "chip", "chip system", "entity", and "subject" can be used interchangeably.
[0065] In some embodiments, the term "connection" may indicate that an electrical signal or data is transmitted between a connected end and a connected end, and may be understood as "electrical connection", "communication connection", etc. "Connection" may be a direct connection between two components, an indirect connection established through other components, internal communication between two components, or any other possible connection form.
[0066] In the process of implementing the present invention, the inventors found that the related art has the following problems:
[0067] Figure 1 A specific example of a Hall sensor in the related art is shown. Figure 1 As shown, the Hall sensor generates and outputs a Hall voltage through a Hall element 201. Then, if Figure 2 As shown, Figure 1 The equivalent circuit of the Hall sensor in can be equivalent to a bridge circuit. The left input electrode is respectively connected to the first end of the first resistor R1 and the first end of the third resistor R3, the right input electrode is respectively connected to the first end of the second resistor R2 and the first end of the fourth resistor R4, the upper output electrode is respectively connected to the second end of the first resistor R1 and the second end of the second resistor R2, and the lower output electrode is respectively connected to the second end of the third resistor R3 and the second end of the fourth resistor R4. Since there are usually differences between the first resistor R1, the second resistor R2, the third resistor R3 and the fourth resistor R4, the zero bias of the Hall sensor is often not zero.
[0068] The Hall voltage at zero magnetic field often reaches 5mv-50mv. In this way, after the Hall voltage passes through the post-amplifier and other conditioning circuits, the measurement range of the system becomes smaller and heat is generated, reducing the sensitivity of the system.
[0069] However, there is currently no good solution to the zero bias problem of Hall sensors.
[0070] Figure 3 A specific example of the Hall sensor in the embodiment of the present application is shown. Figure 3 As shown, the Hall sensor includes a first Hall element 101 and a second Hall element 102;
[0071] The first Hall element 101 has at least one pair of first input electrode pairs and one pair of first output electrode pairs; the second Hall element 102 has at least one pair of second input electrode pairs and one pair of second output electrode pairs; wherein the second input electrode pairs are electrically connected to the first input electrode pairs so that the current direction between the second input electrode pairs is the same as the current direction between the first input electrode pairs; the second output electrode pair is electrically connected to the first output electrode pair so as to output a Hall voltage at the first output electrode pair; the first input electrode pair is used to connect to an excitation power supply to generate a Hall voltage;
[0072] Among them, the second Hall element 102 is mirror-symmetrical to the first Hall element 101, and the direction of the mirror-symmetrical axis is parallel to the direction formed by at least one pair of output electrodes of the first Hall element 101 being connected to each other; and the first sensing plane of the first Hall element 101 and the second sensing plane of the second Hall element 102 are coplanar with each other.
[0073] In the embodiments of the present application, the Hall element may be referred to by different names, such as Hall resistor element, semiconductor Hall, semiconductor Hall resistor, etc., and the names are not limited here.
[0074] In some possible implementations, the shape of the base of the Hall element may include at least one of the following: a regular octagon; a cross; a rectangle; a square.
[0075] In some possible implementations, the material of the substrate may include a Group III-V compound. A Group III-V compound may be a compound formed by Group III-V elements. Group III-V elements are Group 13 elements in the periodic table and may include boron (B), aluminum (Al), gallium (Ga), indium (In), and thallium (Tl). Exemplarily, the material of the substrate may include at least one of the following: a silicon substrate; a gallium arsenide substrate; a boron substrate.
[0076] In some possible implementations, the excitation power source may be a current source; or a voltage source.
[0077] In some possible implementations, the polarity of the Hall voltage between the first output electrode pair of the first Hall element 101 and the polarity of the Hall voltage between the second output electrode pair of the second Hall element 102 may be the same to obtain superposition of the Hall voltages instead of cancellation.
[0078] In one embodiment, Figure 3 As shown, the first Hall element 101 and the second Hall element 102 may have a cross-shaped structure formed by intersecting horizontal and vertical parts. The two ends of the horizontal part may be formed into a pair of input electrode pairs. The two ends of the vertical part may be formed into a pair of output electrode pairs.
[0079] In some possible implementations, the first Hall element 101 (or the second Hall element 102) may include one or more input electrode pairs, and / or one or more output electrode pairs. The directions in which each of the multiple input electrode pairs is connected to each other may be parallel to each other. The directions in which each of the multiple output electrode pairs is connected to each other may be parallel to each other; or they may be at an angle, such as Figure 4 As shown, the direction in which the first group of output electrode pairs 002 are connected to each other and the direction in which the second group of output electrode pairs 003 are connected to each other may form a certain angle. Figure 4 In the figure, the base of the Hall element is a regular octagon and includes an excitation power input electrode pair 001 and a ground electrode pair 004.
[0080] Exemplarily, when the first Hall element 101 includes a plurality of input electrode pairs, an excitation power supply may be input to the first Hall element 101 through the plurality of input electrode pairs to improve the use efficiency of the power supply and improve the sensitivity of the Hall element.
[0081] In some possible implementations, the angle between the connection direction of the input electrode pair of the first Hall element 101 and the connection direction of the output electrode pair of the second Hall element 102 can be 90° (vertical) or other angles (such as Figure 4 shown).
[0082] In the embodiment of the present application, the sensing plane of the Hall element may be a magnetic sensing plane, and the Hall element may sense the intensity of the magnetic field passing through the sensing plane.
[0083] like Figure 3 As shown, in some possible implementations, the current direction between the first input electrode pair and the current direction between the second input electrode pair can be from left to right; or, from right to left. In some possible implementations, the Hall voltage output by the first output electrode pair can be a positive voltage for the upper output electrode and a negative voltage for the lower output electrode; or, a negative voltage for the upper output electrode and a positive voltage for the lower output electrode.
[0084] In the embodiments of the present application, mirror symmetry can be understood as a symmetrical relationship between an object (or figure) and the image of the object (or figure) in the mirror when a mirror is placed on the mirror symmetry axis. For example, after the object is flipped 180°, it is mirror symmetrical with the original position of the object, and the front side of the object is flipped to the position where the back side of the object was originally. The distance from any point on the line to the mirror symmetry axis is equal to the distance from the point to the mirror symmetry axis after the mirror symmetry.
[0085] In some possible implementations, the direction of the mirror symmetry axis may be parallel to the direction in which at least one pair of output electrode pairs of the first Hall element 101 is connected to each other. That is, when multiple pairs of output electrode pairs are arranged in parallel in the first Hall element 101, the mirror symmetry axis may be parallel to the direction in which each pair of output electrode pairs is connected to each other.
[0086] For example, when the first Hall element 101 is flipped 180°, that is, when the first sensing plane of the first Hall element 101 and the second sensing plane of the second Hall element 102 are coplanar with each other, the front direction of the first Hall element 101 and the front direction of the second Hall element 102 are opposite in direction. Figure 3As shown in The symbol indicates the direction in which the first Hall element 101 faces upward. The symbol indicates the direction in which the second Hall element 102 faces downward at the position where the first Hall element 101 is turned over.
[0087] In some possible implementations, the first Hall element 101 and the second Hall element 102 may be produced in the same batch, and usually their structures and parameters are the same or similar, that is, the first Hall element 101 and the second Hall element 102 may be the same, so that the Hall voltage results generated by each are the same or similar; or, they may be produced in different batches, and their structures and parameters are the same or similar. In this way, the elimination of zero bias can be achieved. Of course, the first Hall element 101 and the second Hall element 102 may also be different, and the zero bias can also be reduced. Compared with the first Hall element 101 and the second Hall element 102 being the same and being able to eliminate the zero bias, the effect of reducing the zero bias may be slightly worse.
[0088] In some possible implementations, the structures and parameters of the two Hall elements are the same or similar, which can be understood as the first resistors R1 of the two Hall elements are the same or similar, the second resistors R2 of the two Hall elements are the same or similar, the third resistors R3 of the two Hall elements are the same or similar, and the fourth resistors R4 of the two Hall elements are the same or similar.
[0089] like Figure 5 As shown, Figure 3 The equivalent circuit of the Hall sensor in can be equivalent to a bridge circuit in which each bridge arm has two resistors in parallel. Among them, the eleventh resistor R11, the twelfth resistor R12, the thirteenth resistor R13 and the fourteenth resistor R14 can be the first Hall element 101, and the twenty-first resistor R21, the twenty-second resistor R22, the twenty-third resistor R23 and the twenty-fourth resistor R24 can be the second Hall element 102. Then, the eleventh resistor R11 and the twenty-first resistor R21 are connected in parallel between the first input electrode and the first output electrode of the first Hall element 101, the twelfth resistor R12 and the twenty-second resistor R22 are connected in parallel between the second input electrode and the first output electrode of the first Hall element 101, the thirteenth resistor R13 and the twenty-third resistor R23 are connected in parallel between the first input electrode and the second output electrode of the first Hall element 101, and the fourteenth resistor R14 and the twenty-fourth resistor R24 are connected in parallel between the second input electrode and the second output electrode of the first Hall element 101.
[0090] In this way, when the first Hall element 101 and the second Hall element 102 are two identical Hall elements, the resistance on the left and right bridge arms connected to the first output electrode (or the second output electrode) is the same through mirror symmetry, eliminating the resistance difference, thereby significantly reducing the unbalanced voltage and eliminating the zero bias. Similarly, when the first Hall element 101 and the second Hall element 102 are two Hall elements that are not completely the same (there are differences or the differences are not large), the zero bias can be reduced to solve the problem of excessive zero bias.
[0091] The Hall sensor of the embodiment of the present application is easy to manufacture and implement, and can eliminate or reduce zero bias, thereby solving the problem of excessive zero bias, thereby increasing the measurement range of the system in which the Hall sensor is located and reducing heat generation, thereby greatly improving the sensitivity of the system.
[0092] In an alternative embodiment, if Figure 6 As shown, the first input electrode pair includes a first input electrode 1011 and a second input electrode 1012 opposite to each other; the first output electrode pair includes a first output electrode 1013 and a second output electrode 1014 opposite to each other;
[0093] The direction formed by the first input electrode 1011 and the second input electrode 1012 being connected to each other is the first direction of the first element, and the direction formed by the first output electrode 1013 and the second output electrode 1014 being connected to each other is the second direction of the first element; the first direction of the first element and the second direction of the first element are arranged at a preset angle;
[0094] The second input electrode pair includes a third input electrode 1021 and a fourth input electrode 1022 opposite to each other; the second output electrode pair includes a third output electrode 1023 and a fourth output electrode 1024 opposite to each other;
[0095] The direction formed by the third input electrode 1021 and the fourth input electrode 1022 being connected to each other is the first direction of the second element, and the direction formed by the third output electrode 1023 and the fourth output electrode 1024 being connected to each other is the second direction of the second element; the first direction of the second element and the second direction of the second element are arranged at a preset angle;
[0096] The second direction of the first element is parallel to the second direction of the second element.
[0097] In this way, the unbalanced voltage can be greatly reduced or eliminated, the zero bias can be eliminated or reduced, and the problem of excessive zero bias can be solved.
[0098] In some possible implementations, the first input electrode 1011 is electrically connected to the third input electrode 1021, the second input electrode 1012 is electrically connected to the fourth input electrode 1022, the first output electrode 1013 is electrically connected to the third output electrode 1023, and the second output electrode 1014 is electrically connected to the fourth output electrode 1024. In this way, the current direction between the first input electrode 1011 and the second input electrode 1012 is the same as the current direction between the third input electrode 1021 and the fourth input electrode 1022, and the Hall voltage polarity between the first output electrode 1013 and the second output electrode 1014 is the same as the Hall voltage polarity between the third output electrode 1023 and the fourth output electrode 1024.
[0099] In an alternative embodiment, if Figure 6 As shown, the first direction of the first element is collinear with the first direction of the second element.
[0100] In some possible implementations, the positional relationship between the first direction of the first element and the first direction of the second element may include any one of the following: colinear; parallel.
[0101] For example, when the first direction of the first element is perpendicular to the second direction of the first element, and the first direction of the second element is perpendicular to the second direction of the second element, the first direction of the first element and the first direction of the second element can be collinear or parallel. Compared with parallel, the collinear layout can be more conducive to reducing the difference in the magnetic field between the two Hall elements, and is more conducive to eliminating or reducing zero bias.
[0102] Figure 7 Another specific example of the Hall sensor in the embodiment of the present application is shown. Figure 7 As shown, the Hall sensor includes a first Hall element 101, a second Hall element 102, and a substrate 103 for mounting the first Hall element 101 and the second Hall element 102;
[0103] The first Hall element has at least one pair of first input electrode pairs and one pair of first output electrode pairs; the second Hall element has at least one pair of second input electrode pairs and one pair of second output electrode pairs; wherein the second input electrode pairs are electrically connected to the first input electrode pairs so that the current direction between the second input electrode pairs is the same as the current direction between the first input electrode pairs; the second output electrode pair is electrically connected to the first output electrode pair so as to output a Hall voltage at the first output electrode pair; the first input electrode pair is used to connect to an excitation power supply to generate a Hall voltage;
[0104] The second Hall element 102 is mirror-symmetrical to the first Hall element 101 , and the direction of the mirror-symmetrical axis is parallel to the direction in which at least one pair of output electrodes of the first Hall element 101 are connected to each other.
[0105] The present application embodiment (such as Figure 7 The Hall sensor in the embodiment (as shown in Figure 3 The difference between the Hall sensor in the embodiment of the present application (as shown in FIG. 1 ) includes at least one of the following: being packaged on the substrate 103; including a conductive pattern arranged on the substrate 103; including a flying lead. Figure 7 The Hall sensor in the embodiment (as shown in Figure 3 The specific implementation structure and technical effects of the same parts of the Hall sensor in FIG. 1 and FIG. 2 are shown in FIG. 3 and 4 , respectively. The details will not be repeated below.
[0106] In the embodiments of the present application, the substrate may be referred to by different names, such as PCB board, circuit board, etc., and the name is not limited here.
[0107] In some possible implementations, the first Hall element 101 and the second Hall element 102 are both mounted on the substrate 103 , so that the first sensing plane of the first Hall element 101 and the second sensing plane of the second Hall element 102 can be coplanar with each other.
[0108] In some possible implementations, the front side of the first Hall element 101 faces upward, so that the metal electrode of the first Hall element 101 can be connected to a power supply (such as welding, etc.). The front side of the second Hall element 102 faces downward, so that the metal electrode of the second Hall element 102 can be more conveniently electrically connected to the electrode connection pad (PAD) arranged on the PCB board, for example, a mounting method can be adopted. Exemplarily, the first Hall element 101 can be fixed on the PCB board by thermal conductive adhesive or the like. The second Hall element 102 can be mounted on the PCB board by SMT (Surface Mounted Technology) technology.
[0109] The Hall sensor of the embodiment of the present application is easy to implement and can eliminate or reduce zero bias, thereby solving the problem of excessive zero bias, thereby increasing the measurement range of the system in which the Hall sensor is located and reducing heat generation, thereby greatly improving the sensitivity of the system.
[0110] In an alternative embodiment, if Figure 8 As shown, the first Hall element 101 and the second Hall element 102 are both independent packages;
[0111] The first Hall element 101 includes:
[0112] A first input connection pad 1015, electrically connected to an input electrode of the first input electrode pair;
[0113] A second input connection pad 1016, electrically connected to the other input electrode in the first input electrode pair;
[0114] A first output connection pad 1017, electrically connected to an output electrode in the first output electrode pair;
[0115] The second output connection pad 1018 is electrically connected to the other output electrode in the first output electrode pair.
[0116] In some possible implementations, the second Hall element 102 may include: a third input connection plate, electrically connected to an input electrode in the second input electrode pair; a fourth input connection plate, electrically connected to the other input electrode in the second input electrode pair; a third output connection plate, electrically connected to an output electrode in the second output electrode pair; and a fourth output connection plate, electrically connected to the other output electrode in the second output electrode pair.
[0117] For example, Figure 8 The black borders indicating the first Hall element 101 and the second Hall element 102 as separate packages may be boundary boxes of the separate packages.
[0118] In some possible implementations, the first Hall element 101 and the second Hall element 102 may be independent packages obtained by independent packaging in the same batch, or may be from different batches. Independent packages may have different names, such as Hall chips, etc., and the names are not limited here.
[0119] In some possible implementations, the first input connection disk, the second input connection disk, the first output connection disk, and the second output connection disk can be used to connect the Hall sensor to the excitation power supply and output the Hall voltage, and can serve as the external electrical connection port of the Hall sensor.
[0120] In some possible implementations, the electrical connection between each connection pad and each electrode may include at least one of the following: a conductive pattern (wire) is arranged on the PCB board; a flying wire. In the present application, the flying wire may be referred to by different names, such as a jumper wire, etc., and the name is not limited here. It is a connection method that can directly connect two metal nodes (such as electrodes or PADs) with wires. In some possible implementations, the flying wire may include at least one of the following: a gold wire; a copper wire.
[0121] The embodiment of the present application adopts an independent package (hall chip), so that the preparation of the Hall sensor is easy to achieve and the production process is simplified.
[0122] In an optional embodiment, the Hall sensor further includes a first input connection pad, a second input connection pad, a first output connection pad, and a second output connection pad arranged on the substrate, which are used as external electrical connection ports of the packaged Hall sensor;
[0123] The first input connection pad is electrically connected to one input electrode of the first input electrode pair, and the second input connection pad is electrically connected to the other input electrode of the first input electrode pair;
[0124] The first output connection pad is electrically connected to one output electrode in the first output electrode pair, and the second output connection pad is electrically connected to the other output electrode in the first output electrode pair.
[0125] Thus, in some possible implementations, different from Figure 8 The first Hall element 101 and the second Hall element 102 may not be in the form of independent packages. Based on this, the first input connection plate, the second input connection plate, the first output connection plate and the second output connection plate may be arranged on the substrate to realize the connection of the Hall sensor to the excitation power supply and the output of the Hall voltage, which may serve as the external electrical connection port of the Hall sensor.
[0126] In an alternative embodiment, if Fig. 9 As shown, the Hall sensor further includes two pairs of electrode connection pads arranged on the substrate 103;
[0127] One pair of the two pairs of electrode connection pads is used to mount the second input electrode pair of the second Hall element 102, and the other pair of the two pairs of electrode connection pads is used to mount the second output electrode pair of the second Hall element 102, so as to electrically connect the second input electrode pair with the first input electrode pair and electrically connect the second output electrode pair to the first output electrode pair through the two pairs of electrode connection pads.
[0128] In some possible implementations, the substrate also has at least PCB traces and flying wires, so that the first input electrode pair of the first Hall element 101 and the second input electrode pair of the second Hall element 102 are respectively connected through a corresponding pair of two pairs of electrode connection pads, and the first output electrode pair of the first Hall element 101 and the second output electrode pair of the second Hall element 102 are respectively connected through the other corresponding pair of the two pairs of electrode connection pads.
[0129] In the embodiment of the present application, by arranging the electrode connection pads on the substrate 103, the electrode pads of the second Hall element 102 can be directly buckled on the electrode connection pads and mounted on the PCB board through SMT technology, thereby improving the reliability of electrical connection. In addition, the arrangement position can be accurately set at the position where the first Hall element 102 is located after flipping, thereby improving the installation accuracy.
[0130] In an optional embodiment, the Hall sensor further includes four intermediate connection pads arranged on the substrate 103, so as to electrically connect the second input electrode pair with the first input electrode pair and the second output electrode pair with the first output electrode pair through the four intermediate connection pads.
[0131] In this way, the electrical connection lines between the electrode pairs of the two Hall elements can be laid out on the substrate through the intermediate connection plate, for example, part of the electrical connection lines can be laid out in the form of PCB traces, thereby simplifying wiring and reducing parasitic inductance.
[0132] For example, Figure 6 and Fig. 9 As shown, the third input electrode 1021 is electrically connected to the first intermediate connection disk 1035 through the wiring on the PCB, and then the first intermediate connection disk 1035 is electrically connected to the first input electrode 1011 through the flying wire; the fourth input electrode 1022 is electrically connected to the second intermediate connection disk 1036 through the wiring on the PCB, and then the second intermediate connection disk 1036 is electrically connected to the second input electrode 1012 through the flying wire; the third output electrode 1023 is electrically connected to the third intermediate connection disk 1037 through the wiring on the PCB, and then the third intermediate connection disk 1037 is electrically connected to the first output electrode 1013 through the flying wire; the fourth output electrode 1024 is electrically connected to the fourth intermediate connection disk 1038 through the wiring on the PCB, and then the fourth intermediate connection disk 1038 is electrically connected to the second output electrode 1014 through the flying wire.
[0133] In an optional implementation, each electrode of the first Hall element 101 is electrically connected to each intermediate connection pad in a one-to-one correspondence via a flying wire.
[0134] In some possible implementations, each intermediate connection pad may be arranged one-to-one next to each electrode of the first Hall element 101 (eg, as close as possible) to shorten the length of the flying wire, thereby further reducing the parasitic inductance.
[0135] In an optional embodiment, the first input electrode pair includes a first input electrode and a second input electrode opposite to each other; the first output electrode pair includes a first output electrode and a second output electrode opposite to each other;
[0136] The direction formed by the first input electrode and the second input electrode being connected to each other is the first direction of the first element, and the direction formed by the first output electrode and the second output electrode being connected to each other is the second direction of the first element; the first direction of the first element and the second direction of the first element are arranged at a preset angle;
[0137] The second input electrode pair includes a third input electrode and a fourth input electrode facing each other; the second output electrode pair includes a third output electrode and a fourth output electrode facing each other;
[0138] The direction formed by the third input electrode and the fourth input electrode connected to each other is the first direction of the second element, and the direction formed by the third output electrode and the fourth output electrode connected to each other is the second direction of the second element; the first direction of the second element and the second direction of the second element are arranged at a preset angle;
[0139] The second direction of the first element is parallel to the second direction of the second element.
[0140] In an optional embodiment, the first direction of the first element is collinear with the first direction of the second element.
[0141] Fig.10 A specific example of a Hall device in an embodiment of the present application is shown. Fig.10 As shown, the Hall device includes:
[0142] The Hall sensor 1000 of the above embodiment; or the Hall sensor 1000 of another embodiment;
[0143] The conditioning circuit 2000 is electrically connected to the Hall sensor 1000 and is used to perform at least one of the following operations on the Hall voltage output by the Hall sensor 1000: amplification; voltage or current conversion; filtering.
[0144] In some possible implementations, the conditioning circuit 2000 includes an amplifier circuit for amplifying the first input signal (such as the Hall voltage) and then outputting the amplified signal.
[0145] In some possible implementations, the conditioning circuit 2000 includes a conversion circuit for converting a second input signal (such as a Hall voltage, a Hall voltage amplified by an amplifier circuit, etc.) into a voltage or current output.
[0146] In some possible implementations, the conditioning circuit 2000 includes a filtering circuit for filtering and outputting a third input signal (such as a Hall voltage, a Hall voltage amplified by an amplifier circuit, a Hall voltage amplified by an amplifier circuit and converted by a conversion circuit, etc.).
[0147] The embodiment of the present application can improve the output signal quality and the signal-to-noise ratio by processing the output of the Hall sensor through a conditioning circuit.
[0148] It should be understood that the above embodiments are exemplary and are not intended to include all possible implementations included in the claims. Various modifications and changes may be made on the basis of the above embodiments without departing from the scope of the present application. Similarly, the various technical features of the above embodiments may be arbitrarily combined to form other embodiments of the present application that may not be explicitly described. Therefore, the above embodiments only express several implementations of the present application and do not limit the scope of protection of the patent of this application.
Claims
1. A Hall sensor, characterized in that: The Hall sensor includes a first Hall element and a second Hall element; The first Hall element has at least one pair of first input electrode pairs and one pair of first output electrode pairs; The second Hall element has at least one pair of second input electrode pairs and one pair of second output electrode pairs; wherein the second input electrode pair is electrically connected to the first input electrode pair so that the current direction between the second input electrode pairs is the same as the current direction between the first input electrode pairs; the second output electrode pair is electrically connected to the first output electrode pair so as to output a Hall voltage at the first output electrode pair; the first input electrode pair is used to connect to an excitation power supply to generate the Hall voltage; Among them, the second Hall element is mirror-symmetrical to the first Hall element, and the direction of the mirror-symmetrical axis is parallel to the direction formed by at least one pair of output electrodes of the first Hall element being connected to each other; and the first sensing plane of the first Hall element and the second sensing plane of the second Hall element are coplanar with each other.
2. The Hall sensor according to claim 1, characterized in that: The first input electrode pair includes a first input electrode and a second input electrode opposite to each other; the first output electrode pair includes a first output electrode and a second output electrode opposite to each other; The direction formed by the first input electrode and the second input electrode being connected to each other is the first direction of the first element, and the direction formed by the first output electrode and the second output electrode being connected to each other is the second direction of the first element; the first direction of the first element and the second direction of the first element are arranged at a preset angle; The second input electrode pair includes a third input electrode and a fourth input electrode facing each other; the second output electrode pair includes a third output electrode and a fourth output electrode facing each other; The direction formed by the connection between the third input electrode and the fourth input electrode is the first direction of the second element, the direction formed by the connection between the third output electrode and the fourth output electrode is the second direction of the second element; the first direction of the second element and the second direction of the second element are arranged at the preset angle; Wherein, the second direction of the first element is parallel to the second direction of the second element.
3. The Hall sensor according to claim 2, characterized in that: The first direction of the first element is collinear with the first direction of the second element.
4. A Hall sensor, characterized in that: The Hall sensor includes a first Hall element, a second Hall element, and a substrate for mounting the first Hall element and the second Hall element; The first Hall element has at least one pair of first input electrode pairs and one pair of first output electrode pairs; The second Hall element has at least one pair of second input electrode pairs and one pair of second output electrode pairs; wherein the second input electrode pair is electrically connected to the first input electrode pair so that the current direction between the second input electrode pairs is the same as the current direction between the first input electrode pairs; the second output electrode pair is electrically connected to the first output electrode pair so as to output a Hall voltage at the first output electrode pair; the first input electrode pair is used to connect to an excitation power supply to generate the Hall voltage; The second Hall element is mirror-symmetrical to the first Hall element, and the direction of the mirror-symmetrical axis is parallel to the direction in which at least one pair of output electrodes of the first Hall element are connected to each other.
5. The Hall sensor according to claim 4, characterized in that: The first Hall element and the second Hall element are both independent packages; The first Hall element comprises: A first input connection pad, electrically connected to an input electrode of the first input electrode pair; a second input connection pad, electrically connected to the other input electrode of the first input electrode pair; A first output connection pad, electrically connected to an output electrode of the first output electrode pair; The second output connection pad is electrically connected to the other output electrode in the first output electrode pair.
6. The Hall sensor according to claim 4, characterized in that: The Hall sensor further comprises a first input connection pad, a second input connection pad, a first output connection pad and a second output connection pad arranged on the substrate, which are used as external electrical connection ports of the packaged Hall sensor; The first input connection pad is electrically connected to one input electrode of the first input electrode pair, and the second input connection pad is electrically connected to the other input electrode of the first input electrode pair; The first output connection pad is electrically connected to one output electrode in the first output electrode pair, and the second output connection pad is electrically connected to the other output electrode in the first output electrode pair.
7. The Hall sensor according to claim 4, characterized in that: The Hall sensor further comprises two pairs of electrode connection pads arranged on the substrate; One pair of the two pairs of electrode connection pads is used to mount the second input electrode pair of the second Hall element, and the other pair of the two pairs of electrode connection pads is used to mount the second output electrode pair of the second Hall element, so as to electrically connect the second input electrode pair with the first input electrode pair through the two pairs of electrode connection pads, and electrically connect the second output electrode pair to the first output electrode pair.
8. The Hall sensor according to claim 4, characterized in that: The Hall sensor further includes four intermediate connection pads arranged on the substrate, so as to electrically connect the second input electrode pair with the first input electrode pair and electrically connect the second output electrode pair to the first output electrode pair through the four intermediate connection pads.
9. The Hall sensor according to claim 8, characterized in that: Each electrode of the first Hall element is electrically connected to each intermediate connection plate in a one-to-one correspondence through flying wires.
10. The Hall sensor according to any one of claims 4 to 9, characterized in that: The first input electrode pair includes a first input electrode and a second input electrode opposite to each other; the first output electrode pair includes a first output electrode and a second output electrode opposite to each other; The direction formed by the first input electrode and the second input electrode being connected to each other is the first direction of the first element, and the direction formed by the first output electrode and the second output electrode being connected to each other is the second direction of the first element; the first direction of the first element and the second direction of the first element are arranged at a preset angle; The second input electrode pair includes a third input electrode and a fourth input electrode facing each other; the second output electrode pair includes a third output electrode and a fourth output electrode facing each other; The direction formed by the connection between the third input electrode and the fourth input electrode is the first direction of the second element, the direction formed by the connection between the third output electrode and the fourth output electrode is the second direction of the second element; the first direction of the second element and the second direction of the second element are arranged at the preset angle; Wherein, the second direction of the first element is parallel to the second direction of the second element.
11. The Hall sensor according to claim 10, characterized in that: The first direction of the first element is collinear with the first direction of the second element.
12. A Hall device, characterized in that: include: The Hall sensor according to any one of claims 1 to 3; Or, a Hall sensor as described in any one of claims 4 to 11; The conditioning circuit is electrically connected to the Hall sensor and is used to perform at least one of the following on the Hall voltage output by the Hall sensor: amplification; voltage or current conversion; filtering.