Transfer device for maintenance of silicon carbide chamber graphite piece

Abstract

The invention discloses a silicon carbide chamber graphite piece maintenance transfer device which comprises a transfer trolley, transfer dies and a protective cover, at least two trays arranged up and down are arranged on the transfer trolley, and one transfer die is placed in each tray. Each transfer mold is provided with a plurality of containing grooves which are used for containing different types of graphite pieces and matched with the graphite pieces in shape, the containing grooves and the graphite pieces in the containing grooves are in an attached state, and each transfer mold is covered with a protective cover to cover the corresponding containing groove. Each graphite piece is placed in the corresponding containing groove in the transfer mold, the graphite pieces do not make contact with one another, the graphite pieces do not make contact with the transfer trolley, the graphite pieces do not collide with the transfer trolley in the transfer process, the stable transportation environment ensures that the physical structure of the graphite pieces is complete, and the service life of the graphite pieces is prolonged; and the protective cover covers the graphite piece, so that the surface of the graphite piece is prevented from being stained with impurities such as dust and chippings in the transfer process.

Description

Technical Field

[0001] The invention relates to the technical field of semiconductor manufacturing, and in particular to a transfer device for maintaining graphite parts in a silicon carbide chamber. Background Art

[0002] In the field of semiconductor manufacturing, the quality of silicon carbide chamber graphite parts is directly related to the quality and performance of semiconductor products. Due to their own particularity, graphite parts have extremely high requirements for handling, maintenance and storage. Graphite parts need to be transported to the maintenance workshop for maintenance. During the transportation process, the graphite parts may be damaged due to bumps if not handled with care. On the one hand, it affects the service life of the graphite parts and shortens the time to replace new parts. It is not only time-consuming, but also increases the economic burden on the company. On the other hand, if damaged graphite parts are used in the semiconductor manufacturing process, it may lead to unstable product performance or even defective products, affecting the quality of semiconductor manufacturing.

[0003] Therefore, there is an urgent need for a transfer device for maintaining silicon carbide chamber graphite parts to solve the above-mentioned technical problems. Summary of the invention

[0004] The present invention aims to solve the above-mentioned technical problems, namely, to solve the following problems caused by the existing graphite parts being easily damaged due to collision with the transfer device during the transfer process: first, the damage to the graphite parts affects the service life of the graphite parts and shortens the time for replacing new parts, which not only wastes time but also increases the economic burden on the enterprise; second, if the damaged graphite parts are used in the semiconductor manufacturing process, it may cause unstable product performance or even defective products, affecting the quality of semiconductor manufacturing.

[0005] To this end, the present invention provides a transfer device for maintaining silicon carbide chamber graphite parts, including a transfer vehicle, a transfer mold and a protective cover. The transfer vehicle is provided with at least two trays arranged up and down, and a transfer mold is placed in each of the trays. Each of the transfer molds is provided with a plurality of receiving grooves for placing different types of graphite parts and matching their shapes. The receiving grooves are in a fit state with the graphite parts therein, and each of the transfer molds is covered with a protective cover to cover the receiving groove.

[0006] In a specific embodiment of the transfer device for maintaining the above-mentioned silicon carbide chamber graphite parts, the transfer mold includes a transfer plate and a plurality of protection pads designed according to the shape of the graphite parts, and a plurality of the receiving grooves are provided on the transfer plate. The inner cavity of each of the receiving grooves is provided with an elastic protection pad, and the graphite parts are placed in contact with the protection pads when placed in the receiving grooves.

[0007] In a specific embodiment of the above-mentioned transfer device for maintaining graphite parts in a silicon carbide chamber, the protection pad is made of silicone material.

[0008] In a specific embodiment of the above-mentioned transfer device for maintaining graphite parts in a silicon carbide chamber, a plurality of evenly distributed protrusions are integrally formed on the inner wall of the protection pad, and the protrusions fit the graphite parts placed in the receiving groove.

[0009] In a specific embodiment of the transfer device for maintaining the above-mentioned silicon carbide chamber graphite parts, a placement groove is provided on the tray, the transfer mold is placed in the placement groove, at least one side wall of the placement groove is provided with a threaded hole with a horizontally arranged center line, a positioning bolt is threadedly connected to the threaded hole, and a socket corresponding to the threaded hole is provided on the side wall of the transfer mold, and the positioning bolt can be inserted into the corresponding socket when the transfer mold is placed in the placement groove.

[0010] In a specific embodiment of the above-mentioned transfer device for maintaining graphite parts in a silicon carbide chamber, a horizontal operating platform is fixed to the top of the transfer vehicle.

[0011] In a specific embodiment of the above-mentioned transfer device for maintaining graphite parts in a silicon carbide chamber, a vibration detection module is installed on the transfer vehicle, and the vibration detection module includes a power module, a vibration sensor, an alarm and a controller. The power module provides power to the controller, and the vibration sensor and the alarm are both connected to the controller.

[0012] In a specific embodiment of the transfer device for maintaining graphite parts in the above-mentioned silicon carbide chamber, there are two transfer molds, and different types of graphite parts include an upper half-moon part, a lower half-moon part, a side block, a first upstream protective sheet, a first downstream protective sheet, a central protective sheet, a first transitional piece, an air outlet barrel, a second upstream protective sheet, and a second downstream protective sheet. The receiving grooves on one of the transfer molds include a first receiving groove for receiving the upper half-moon part, a second receiving groove for receiving the lower half-moon part, a third receiving groove for receiving the side block, a fourth receiving groove for receiving the first upstream protective sheet, a fifth receiving groove for receiving the first downstream protective sheet, a sixth receiving groove for receiving the central protective sheet, a seventh receiving groove for receiving the first transitional piece, an eighth receiving groove for receiving the air outlet barrel, a ninth receiving groove for receiving the second upstream protective sheet, and a tenth receiving groove for receiving the second downstream protective sheet.

[0013] In a specific embodiment of the transfer device for maintaining graphite parts in the above-mentioned silicon carbide chamber, different types of graphite parts also include an upper half-moon main heat insulation cover, a lower half-moon main heat insulation cover, an upstream heat insulation cover, a downstream heat insulation cover, a protective graphite felt, a first quartz flat cover semi-lunar support, a second quartz flat cover semi-lunar support, a second transition piece, a first argon purge gas nozzle, a second argon purge gas nozzle and an air flotation gas nozzle, and another receiving groove on the transfer mold includes an eleventh receiving groove for receiving the upper half-moon main heat insulation cover, a twelfth receiving groove for receiving the lower half-moon main heat insulation cover, a thirteenth receiving groove for receiving the upstream heat insulation cover, a fourteenth receiving groove for receiving the downstream heat insulation cover, a fifteenth receiving groove for receiving the protective graphite felt, a sixteenth receiving groove for receiving the first quartz flat cover semi-lunar support, a seventeenth receiving groove for receiving the second quartz flat cover semi-lunar support, an eighteenth receiving groove for receiving the second transition piece, a nineteenth receiving groove for receiving the first argon purge gas nozzle, a twentieth receiving groove for receiving the second argon purge gas nozzle, and a twenty-first receiving groove for receiving the air flotation gas nozzle.

[0014] In a specific embodiment of the transfer device for maintaining the silicon carbide chamber graphite part, the first receiving groove and the second receiving groove are located at one end of one of the transfer molds and are arranged vertically, the eighth receiving groove, the ninth receiving groove and the tenth receiving groove are located at the other end of the transfer mold and are arranged vertically in sequence, and the third receiving groove, the fourth receiving groove, the fifth receiving groove, the sixth receiving groove and the seventh receiving groove are located between the two ends of the transfer mold; The eleventh accommodating groove and the twelfth accommodating groove are located at one end of the other transfer mold and are arranged up and down, the eighteenth accommodating groove, the nineteenth accommodating groove, the twentieth accommodating groove and the twenty-first accommodating groove are all located at the other end of the transfer mold and are arranged up and down in sequence, and the thirteenth accommodating groove, the fourteenth accommodating groove, the fifteenth accommodating groove, the sixteenth accommodating groove and the seventeenth accommodating groove are located between the two ends of the transfer mold.

[0015] Compared with the prior art, the present invention has the following beneficial effects: 1. The present invention designs a transfer mold that matches the graphite parts. Each graphite part is placed in a corresponding receiving groove on the transfer mold. The graphite parts do not contact each other, and the graphite parts do not contact the transfer vehicle. The graphite parts will not collide with the transfer vehicle during the transfer process. The stable transportation environment ensures the physical structure of the graphite parts is intact, so that they can maintain good performance under complex process environments such as high temperature and high pressure in semiconductor manufacturing, thereby improving the yield rate of the entire semiconductor manufacturing. In the long run, the service life of the graphite parts is extended, and the cost of semiconductor manufacturing companies in purchasing and replacing graphite parts is reduced; the protective cover is buckled on the transfer mold during the transfer process to cover the graphite parts. During the transfer process, the surface of the graphite parts will not be contaminated with impurities such as dust and debris, thereby avoiding short circuits or other adverse effects that may be caused by these impurities in the semiconductor manufacturing process.

[0016] 2. The shape of the receiving groove is designed to be the same as that of the graphite part. The graphite part is not easy to shake when placed in the receiving groove. In order to better protect the graphite part, a protective pad is laid in the receiving groove. The protective pad is elastic and can buffer the vibration generated by the transfer vehicle during movement, thereby achieving the purpose of better protecting the graphite part.

[0017] 3. A protrusion is provided on the inner wall of the protective pad so that a gap exists between the graphite piece and the receiving groove while ensuring that the graphite piece does not shake relative to the transfer plate, which helps to remove the graphite piece from the receiving groove.

[0018] 4. Install a vibration detection module on the transfer vehicle, and use the vibration sensor to detect the vibration of the transfer vehicle during movement. When the vibration reaches the preset threshold, the alarm will sound to remind the operator to reduce the moving speed of the transfer vehicle. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] The preferred embodiments of the present invention are described below in conjunction with the accompanying drawings, in which: Figure 1 It is a schematic diagram of the overall structure of a transfer device for maintaining graphite parts in a silicon carbide chamber provided by the present invention; Figure 2 yes Figure 1 Schematic diagram of the structure of the middle tray; Figure 3 is a schematic diagram of the structure of the protective cover; Figure 4 It is a schematic diagram of the structure of a transfer mold; Figure 5 It is a schematic diagram of the structure of another transfer mold; Figure 6 It is a structural schematic diagram of a protection pad arranged in the first containing groove.

[0020] List of reference numerals: 1. Transfer vehicle; 101. Column; 102. Universal caster; 103. Handle; 2. Tray; 201. Placement slot; 3. Protective cover; 301. Limiting column; 4. Transfer board; 5. First receiving slot; 6. Third receiving slot; 7. Seventh receiving slot; 8. Eighth receiving slot; 9. Ninth receiving slot; 10. Tenth receiving slot; 11. Fourth receiving slot; 12. Fifth receiving slot; 13. Sixth receiving slot; 14. Second receiving slot; 15. Eleventh receiving slot slot; 16, twelfth receiving slot; 17, thirteenth receiving slot; 18, fourteenth receiving slot; 19, fifteenth receiving slot; 20, sixteenth receiving slot; 21, seventeenth receiving slot; 22, eighteenth receiving slot; 23, nineteenth receiving slot; 24, twentieth receiving slot; 25, twenty-first receiving slot; 26, jack; 27, positioning bolt; 28, protrusion; 29, vibration detection module; 30, operating platform; 31, protection pad; 32, limit hole. DETAILED DESCRIPTION

[0021] In order to make the purpose, technical solution and advantages of the present invention clearer, the technical solution of the present invention will be clearly and completely described below in conjunction with the accompanying drawings. Obviously, the described embodiments are part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative work are within the scope of protection of the present invention.

[0022] In the description of the present invention, it should be noted that the directions or positional relationships indicated by the terms "upper", "lower", "inner", "outer", etc. are based on the directions or positional relationships shown in the drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the system or element referred to must have a specific direction, be constructed and operated in a specific direction, and therefore cannot be understood as limiting the present invention. In addition, the terms "first", "second", etc. are used to define components, only for the convenience of distinguishing the above components, and unless otherwise stated, the above terms have no special meanings and cannot be understood as indicating or implying relative importance.

[0023] In the description of the present invention, it should be noted that, unless otherwise clearly specified and limited, the terms "installation", "setting", and "connection" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be an indirect connection through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0024] The present invention relates to the field of semiconductor manufacturing technology, and in particular to a transfer device for maintaining graphite parts in a silicon carbide chamber. The purpose is to solve the following problems caused by the graphite parts being easily damaged by collisions with the transfer device during the transfer process: first, the damaged graphite parts affect the service life of the graphite parts, shorten the time for replacing new parts, which not only wastes time but also increases the economic burden of the enterprise; second, if the damaged graphite parts are used in the semiconductor manufacturing process, the product performance may be unstable, or even defective products may appear, affecting the quality of semiconductor manufacturing. To this end, the present invention provides a transfer device for maintaining silicon carbide chamber graphite parts, including a transfer vehicle, a transfer mold and a protective cover. The transfer vehicle is provided with at least two trays arranged up and down, and a transfer mold is placed in each tray. Each transfer mold is provided with a plurality of receiving grooves for placing different types of graphite parts and matching their shapes, and the receiving grooves are in a fit with the graphite parts therein. Each transfer mold is covered with a protective cover to cover the receiving groove. The present invention designs a transfer mold that matches the graphite parts, and each graphite part is placed in a corresponding receiving groove on the transfer mold. The graphite parts do not contact each other, and the graphite parts do not contact the transfer vehicle. The graphite parts will not collide with the transfer vehicle during the transfer process. The stable transportation environment ensures the integrity of the physical structure of the graphite parts, so that they can maintain good performance under complex process environments such as high temperature and high pressure in semiconductor manufacturing, thereby improving the yield rate of the entire semiconductor manufacturing. In the long run, the service life of the graphite parts is extended, and the cost of semiconductor manufacturing companies in purchasing and replacing graphite parts is reduced.

[0025] The following is a detailed description of the transfer device for maintaining the silicon carbide chamber graphite parts provided by the embodiment of the present invention in conjunction with the accompanying drawings.

[0026] See also Figure 1-5 The present invention provides a transfer device for maintaining silicon carbide chamber graphite parts, including a transfer vehicle 1, a transfer mold and a protective cover 3. The transfer vehicle 1 is provided with at least two trays 2 arranged up and down, and a transfer mold is placed in each tray 2. Each transfer mold is provided with a plurality of receiving grooves for placing different types of graphite parts and matching their shapes. The receiving grooves are in a fit state with the graphite parts therein, and each transfer mold is covered with a protective cover 3 to cover the receiving groove.

[0027] For example, see Figure 3 At least two evenly distributed limiting posts 301 are fixed to the bottom of the edge of the protective cover 3, and a limiting hole 32 is provided at the corresponding position on the transfer mold. When the protective cover 3 is buckled on the transfer mold, the limiting posts 301 are inserted into the limiting holes 32 to prevent the protective cover 3 from being separated from the transfer mold during the transfer process. It should be noted that the above description is only an example, and the way the protective cover 3 is buckled on the transfer mold can be flexibly set according to the actual situation without deviating from the basic principles of the present invention.

[0028] In one embodiment, see Figure 4-6 The transfer mold includes a transfer plate 4 and a plurality of protective pads 31 designed according to the shape of the graphite piece. The transfer plate 4 is provided with a plurality of receiving grooves. The inner cavity of each receiving groove is provided with an elastic protective pad 31. When the graphite piece is placed in the receiving groove, it fits with the protective pad 31. Specifically, the limiting hole 32 is provided on the transfer plate 4. Figure 6 As shown, it is a schematic structural diagram of a protection pad 31 disposed in the first receiving groove 5 described below, and the shape of the protection pad 31 is the same as the shape of the upper half moon member described below.

[0029] In the above embodiment, the protective pad 31 can be fixed in the inner cavity of the receiving tank by bonding. The protective pad 31 is consistent with the shape of the graphite part, which is convenient for fitting with the graphite part, so that the graphite part is not easy to shake when placed in the receiving tank. In order to better protect the graphite part, the protective pad 31 is laid in the receiving tank. The protective pad 31 is elastic and can buffer the vibration generated by the transfer vehicle 1 during movement, so as to better protect the graphite part. Exemplarily, the protective pad 31 is made of silicone material.

[0030] In one embodiment, see Figure 6 The inner wall of the protection pad 31 is integrally formed with a plurality of evenly distributed protrusions 28, which fit the graphite piece placed in the receiving groove. By providing a plurality of protrusions 28, a gap is provided between the graphite piece and the receiving groove while ensuring that the graphite piece does not shake relative to the transfer plate 4, which helps to manually remove the graphite piece from the receiving groove.

[0031] In one embodiment, see Figure 2 , Figure 4 and Figure 5 A placement groove 201 is provided on the tray 2, and the transfer mold is placed in the placement groove 201. A threaded hole with a horizontal center line is provided on at least one side wall of the placement groove 201, and a positioning bolt 27 is threadedly connected in the threaded hole. A socket 26 corresponding to the threaded hole is provided on the side wall of the transfer mold. The positioning bolt 27 can be inserted into the corresponding socket 26 when the transfer mold is placed in the placement groove 201.

[0032] Specifically, the jack 26 is arranged on the side wall of the transfer plate 4, illustratively, as Figure 2As shown, two threaded holes are arranged side by side on the two side walls of the tray 2, and two insertion holes 26 corresponding to the threaded holes are arranged on the corresponding side walls of the transfer plate 4. After the transfer plate 4 is placed in the tray 2, the positioning bolts 27 are screwed into the corresponding threaded holes and the insertion holes 26 to realize the detachable fixation of the transfer plate 4 and the tray 2. In this way, when taking the graphite parts, the transfer plate 4 can be prevented from being pulled out of the tray 2 along with the graphite parts. In addition, the positioning bolts 27 can be detachable, which can not only fix the transfer plate 4, but also facilitate disassembly, cleaning or replacement. The insertion hole 26 can be a threaded hole or a non-threaded hole. In the present application, the insertion hole 26 is preferably a threaded hole.

[0033] In one embodiment, see Figure 1 A horizontal operating platform 30 is fixed on the top of the transfer vehicle 1. The operating platform 30 can be used to temporarily place multiple graphite parts to be placed in or taken out of the receiving tank, providing a convenient placement location. Of course, the operating platform 30 can also be used as a grinding platform. When the graphite parts are transported to the maintenance workshop for grinding, the operating platform 30 can act as a grinding platform and grind directly on the transfer vehicle 1.

[0034] In the present application, the transfer vehicle 1 includes a handle 103, a universal caster 102 and four columns 101. The four columns 101 are arranged in a rectangular shape and are fixedly connected to the outer wall of the tray 2, such as by welding. The universal caster 102 is installed at the bottom end of the column 101, and the top end of the column 101 is fixedly connected to the operating platform 30. The handle 103 is set on one side of the operating platform 30 and is fixedly connected to the column 101. The operator holds the handle 103 to push the transfer vehicle 1 to move. Figure 1 The shape of the handle 103 is only an example. The present application does not specifically limit the shape of the handle 103, and it can be flexibly set according to actual conditions without departing from the basic principles of the present invention.

[0035] In one embodiment, a vibration detection module 29 is installed on the transfer vehicle 1, and the vibration detection module 29 includes a power module, a vibration sensor, an alarm and a controller. The power module provides power to the controller, and the vibration sensor and the alarm are connected to the controller. The vibration sensor detects the vibration of the transfer vehicle 1 during movement, and the alarm sounds when the vibration reaches a preset threshold, so as to remind the operator to reduce the moving speed of the transfer vehicle 1. The vibration detection module 29 also includes a cabinet, which is fixed on the column 101, and the power module, the vibration sensor, the alarm and the controller are all installed in the cabinet.

[0036] In the present application, different types of graphite parts used in the silicon carbide chamber include an upper half-moon part, a lower half-moon part, a side block, a first upstream protective sheet, a first downstream protective sheet, a central protective sheet, a first transition piece, an air outlet barrel, a second upstream protective sheet, and a second downstream protective sheet, a half-moon insulation felt, a lower half-moon main heat insulation cover, an upstream heat insulation cover, a downstream heat insulation cover, a protective graphite felt, a first quartz flat cover half-moon support, a second quartz flat cover half-moon support, a second transition piece, a first argon purge gas nozzle, a second argon purge gas nozzle, and an air flotation gas nozzle.

[0037] Below Figure 4-5 The following is a specific description using the example shown.

[0038] The number of transfer molds is two, such as Figure 4 As shown, the receiving grooves on one of the transfer molds include a first receiving groove 5 for receiving the upper half-moon piece, a second receiving groove 14 for receiving the lower half-moon piece, a third receiving groove 6 for receiving the side block, a fourth receiving groove 11 for receiving the first upstream protective sheet, a fifth receiving groove 12 for receiving the first downstream protective sheet, a sixth receiving groove 13 for receiving the central protective sheet, a seventh receiving groove 7 for receiving the first transition piece, an eighth receiving groove 8 for receiving the air outlet barrel, a ninth receiving groove 9 for receiving the second upstream protective sheet, and a tenth receiving groove 10 for receiving the second downstream protective sheet. Figure 5 As shown, the receiving grooves on another transfer mold include an eleventh receiving groove 15 for receiving the upper half of the main heat insulation cover, a twelfth receiving groove 16 for receiving the lower half of the main heat insulation cover, a thirteenth receiving groove 17 for receiving the upstream heat insulation cover, a fourteenth receiving groove 18 for receiving the downstream heat insulation cover, a fifteenth receiving groove 19 for receiving the protective graphite felt, a sixteenth receiving groove 20 for receiving the first quartz flat cover semi-lunar support, a seventeenth receiving groove 21 for receiving the second quartz flat cover semi-lunar support, an eighteenth receiving groove 22 for receiving the second transition piece, a nineteenth receiving groove 23 for receiving the first argon purge gas nozzle, a twentieth receiving groove 24 for receiving the second argon purge gas nozzle, and a twenty-first receiving groove 25 for receiving the flotation gas nozzle.

[0039] Specifically, Figure 4 As shown, the first receiving groove 5 and the second receiving groove 14 are located at one end of one of the transfer molds and are arranged up and down, the eighth receiving groove 8, the ninth receiving groove 9 and the tenth receiving groove 10 are located at the other end of the transfer mold and are arranged up and down in sequence, and the third receiving groove 6, the fourth receiving groove 11, the fifth receiving groove 12, the sixth receiving groove 13 and the seventh receiving groove 7 are located between the two ends of the transfer mold. More specifically, since the number of the side block is two, the number of the third receiving groove 6 is two, as shown in FIG. Figure 4 As shown, they are arranged side by side, and the fourth receiving groove 11, the fifth receiving groove 12, the sixth receiving groove 13 and the seventh receiving groove 7 are all located on one side of the third receiving groove 6 and are arranged in sequence up and down.

[0040] like Figure 5 As shown, the eleventh receiving slot 15 and the twelfth receiving slot 16 are located at one end of another transfer mold and are arranged up and down, the eighteenth receiving slot 22, the nineteenth receiving slot 23, the twentieth receiving slot 24, and the twenty-first receiving slot 25 are all located at the other end of the transfer mold and are arranged up and down in sequence, and the thirteenth receiving slot 17, the fourteenth receiving slot 18, the fifteenth receiving slot 19, the sixteenth receiving slot 20, and the seventeenth receiving slot 21 are all located between the two ends of the transfer mold. More specifically, the thirteenth receiving slot 17 and the fourteenth receiving slot 18 are arranged up and down, and the fifteenth receiving slot 19, the sixteenth receiving slot 20, and the seventeenth receiving slot 21 are all located on one side of the thirteenth receiving slot 17 and the fourteenth receiving slot 18 and are arranged up and down in sequence.

[0041] It should be noted that the present application does not limit the location of the tray where each transfer mold is placed, and it can be flexibly placed according to the actual situation. Regarding the layout of each receiving slot on the transfer plate, the above description is only an example. The position of each receiving slot can be flexibly designed according to the actual situation without deviating from the basic principle of the present invention. In addition, the shape of the receiving slot is designed according to the shape of the graphite part itself. This application is only an example and can be flexibly designed according to the actual shape of the graphite part. The graphite part is a commercially available product known to technical personnel in this field, so it will not be described in detail.

[0042] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention, rather than to limit it. Although the present invention has been described in detail with reference to the aforementioned embodiments, those skilled in the art should understand that they can still modify the technical solutions described in the aforementioned embodiments, or make equivalent replacements for some of the technical features therein. However, these modifications or replacements do not cause the essence of the corresponding technical solutions to deviate from the protection scope of the technical solutions of the embodiments of the present invention.

Claims

1. A transport device for maintaining graphite parts in a silicon carbide chamber, characterized in that: It includes a transfer vehicle, a transfer mold and a protective cover. The transfer vehicle is provided with at least two trays arranged up and down, and a transfer mold is placed in each of the trays. Each of the transfer molds is provided with a plurality of receiving grooves for placing different types of graphite parts and matching their shapes. The receiving grooves are in a fit state with the graphite parts therein, and each of the transfer molds is covered with a protective cover to cover the receiving groove.

2. The transport device for maintaining silicon carbide chamber graphite parts according to claim 1, characterized in that: The transfer mold includes a transfer plate and a plurality of protection pads designed according to the shape of the graphite part. The transfer plate is provided with a plurality of the receiving grooves. The inner cavity of each receiving groove is provided with an elastic protection pad. When the graphite part is placed in the receiving groove, it fits with the protection pad.

3. The transport device for maintaining silicon carbide chamber graphite parts according to claim 2, characterized in that: The protective pad is made of silicone material.

4. The transport device for maintaining silicon carbide chamber graphite parts according to claim 3, characterized in that: A plurality of evenly distributed protrusions are integrally formed on the inner wall of the protection pad, and the protrusions are fitted with the graphite piece placed in the receiving groove.

5. The transport device for maintaining silicon carbide chamber graphite parts according to claim 1, characterized in that: The tray is provided with a placement groove, and the transfer mold is placed in the placement groove. At least one side wall of the placement groove is provided with a threaded hole with a horizontal center line, and a positioning bolt is threadedly connected to the threaded hole. The side wall of the transfer mold is provided with a socket corresponding to the threaded hole, and the positioning bolt can be inserted into the corresponding socket when the transfer mold is placed in the placement groove.

6. The transport device for maintaining silicon carbide chamber graphite parts according to claim 1, characterized in that: A horizontal operating platform is fixed on the top of the transfer vehicle.

7. The transport device for maintaining silicon carbide chamber graphite parts according to claim 1, characterized in that: The transfer vehicle is equipped with a vibration detection module, which includes a power module, a vibration sensor, an alarm and a controller. The power module provides power to the controller, and the vibration sensor and the alarm are both connected to the controller.

8. The transport device for maintaining silicon carbide chamber graphite parts according to claim 1, characterized in that: There are two transfer molds, and different types of graphite parts include an upper half-moon part, a lower half-moon part, a side block, a first upstream protective sheet, a first downstream protective sheet, a central protective sheet, a first transitional part, an air outlet barrel, a second upstream protective sheet, and a second downstream protective sheet. One of the receiving grooves on the transfer mold includes a first receiving groove for receiving the upper half-moon part, a second receiving groove for receiving the lower half-moon part, a third receiving groove for receiving the side block, a fourth receiving groove for receiving the first upstream protective sheet, a fifth receiving groove for receiving the first downstream protective sheet, a sixth receiving groove for receiving the central protective sheet, a seventh receiving groove for receiving the first transitional part, an eighth receiving groove for receiving the air outlet barrel, a ninth receiving groove for receiving the second upstream protective sheet, and a tenth receiving groove for receiving the second downstream protective sheet.

9. The transport device for maintaining silicon carbide chamber graphite parts according to claim 8, characterized in that: Different types of graphite parts also include an upper half-moon main heat insulation cover, a lower half-moon main heat insulation cover, an upstream heat insulation cover, a downstream heat insulation cover, a protective graphite felt, a first quartz flat cover semi-lunar support, a second quartz flat cover semi-lunar support, a second transition piece, a first argon purge gas nozzle, a second argon purge gas nozzle and an air flotation gas nozzle. Another receiving groove on the transfer mold includes an eleventh receiving groove for receiving the upper half-moon main heat insulation cover, a twelfth receiving groove for receiving the lower half-moon main heat insulation cover, a thirteenth receiving groove for receiving the upstream heat insulation cover, a fourteenth receiving groove for receiving the downstream heat insulation cover, a fifteenth receiving groove for receiving the protective graphite felt, a sixteenth receiving groove for receiving the first quartz flat cover semi-lunar support, a seventeenth receiving groove for receiving the second quartz flat cover semi-lunar support, an eighteenth receiving groove for receiving the second transition piece, a nineteenth receiving groove for receiving the first argon purge gas nozzle, a twentieth receiving groove for receiving the second argon purge gas nozzle, and a twenty-first receiving groove for receiving the air flotation gas nozzle.

10. The transport device for maintaining silicon carbide chamber graphite parts according to claim 9, characterized in that: The first receiving groove and the second receiving groove are located at one end of one of the transfer molds and are arranged vertically, the eighth receiving groove, the ninth receiving groove and the tenth receiving groove are located at the other end of the transfer mold and are arranged vertically in sequence, and the third receiving groove, the fourth receiving groove, the fifth receiving groove, the sixth receiving groove and the seventh receiving groove are located between the two ends of the transfer mold; The eleventh accommodating groove and the twelfth accommodating groove are located at one end of the other transfer mold and are arranged up and down, the eighteenth accommodating groove, the nineteenth accommodating groove, the twentieth accommodating groove and the twenty-first accommodating groove are all located at the other end of the transfer mold and are arranged up and down in sequence, and the thirteenth accommodating groove, the fourteenth accommodating groove, the fifteenth accommodating groove, the sixteenth accommodating groove and the seventeenth accommodating groove are located between the two ends of the transfer mold.

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