An inflating device for inflating an RSP mask box

Abstract

An inflatable device for inflating an RSP mask box, comprising a fixed tool and an inflatable component. The RSP mask box comprises a box body and an air inlet valve. The fixed tool comprises a tool base plate. Each of the inflatable components comprises an air nozzle bracket, an air nozzle, a center rod, a bracket base plate, and an inflatable spring. The air nozzle comprises a sealing ring and a deformation ring. The deformation ring is an annular umbrella-shaped structure. The center rod comprises a rod body, a blocking portion, a sealing portion, a head portion, and a tail portion. Compared with the prior art, the present invention provides the inflatable component to achieve contact-type inflation, so that the box body can be ventilated when it is put on and closed when it is taken away, which is simple and efficient. And by providing the air inlet valve, a double valve structure is achieved, thereby effectively preventing the box body from losing air. Finally, by providing the air nozzle, the inflatable component and the air inlet valve are always sealed, effectively preventing gas leakage at the connection, and reducing gas loss.

Description

Technical Field

[0001] The present invention relates to the technical field of semiconductor carriers, and in particular to an inflation device for inflating an RSP mask box. Background Art

[0002] An RSP (Reticle SMIF Pod, RSP for short) pod is a reticle transfer box used in the semiconductor manufacturing process. It is a protective device for storing reticles and is referred to as an RSP pod. The primary function of an RSP pod is to reduce particle adhesion and outgassing during the production, transfer, and processing of reticles to ensure the cleanliness and integrity of the reticles. The RSP pod is designed to provide a clean and stable environment for the reticles. Furthermore, the RSP pod must meet requirements such as high cleanliness, excellent airtightness, low outgassing, and anti-static protection (ESD). Therefore, to improve the cleanliness of the RSP pod, it is usually filled with a clean inert gas, such as nitrogen, to reduce the hazards of other harmful gases.

[0003] For example, the Chinese utility model disclosed in publication number CN203339120U discloses an air purification system for a wafer / mask sealed carrier, specifically a system for a wafer / mask sealed carrier capable of controlling the air intake rate and achieving a high cleaning effect. The system comprises at least one air-inflation module, an air-supply module, an exhaust module, and a processing module. The air-inflation module is provided with at least one air-inflation valve connected to the air-supply module, and the air-inflation module is provided with at least one exhaust valve connected to the exhaust module. A flow regulating valve and a pressure flow meter are provided between the air-supply module and the air-inflation circuit of the air-inflation valve. The flow regulating valve is also connected to the processing module. Thus, when the carrier is placed on the air-inflation module for inflation, the air supply status of the air-inflation module can be detected and displayed by the processing module, and its flow rate and pressure can be adjusted according to the actual situation, thereby quickly completing the inflation of the carrier and maintaining the stability of the inflow and outflow of clean gas inside the carrier, effectively improving its internal cleanliness.

[0004] While this utility model achieves rapid inflation of the carrier, it relies on manual activation or automatic induction, increasing the complexity of the process and equipment, leading to increased production costs. Furthermore, during the inflation process, this method of placing the reticle box directly on the inflation device for rapid inflation must ensure a tight seal. This not only prevents gas leakage during the inflation process, but also ensures the airtightness of the reticle box immediately after inflation to prevent gas leakage and air ingress. Furthermore, the gas source must be shut off immediately after inflation to prevent gas depletion. Summary of the Invention

[0005] In view of this, the present invention provides an inflation device for inflating an RSP mask box to solve the above technical problems.

[0006] An inflation device for inflating an RSP reticle box comprises a fixed fixture and multiple inflation assemblies mounted on the fixed fixture. The RSP reticle box comprises a box body placed on the fixed fixture and multiple air inlet valves mounted on the box body. The fixed fixture comprises a fixture base. Each inflation assembly comprises a nozzle bracket mounted on the fixture base, an air nozzle positioned between the nozzle bracket and the fixture base, a center rod mounted within the nozzle bracket, a bracket base mounted on the nozzle bracket, and an inflation spring positioned between the center rod and the bracket base. The air nozzle comprises a sealing ring positioned between the fixed fixture and the air outlet, and a deformable ring mounted on the sealing ring. The deformable ring is an annular umbrella-shaped structure. The center rod comprises a rod body, a blocking portion located on the rod body, a sealing portion located on one side of the blocking portion, a head portion located at one end of the rod body, and a tail portion located at the other end of the rod body. The sealing portion is located on the side of the blocking portion away from the head portion and includes a conical sealing surface and a sealing bottom portion. The conical sealing surface is a slope extending from the blocking portion to the sealing bottom portion. The sealing bottom portion is an annular protrusion with a diameter larger than that of the blocking portion. When the air nozzle is in a free state, the distance between the head portion and the tooling base plate is less than the maximum distance between the deformable ring and the tooling base plate. Each intake valve includes an intake valve body, an intake valve core disposed within the intake valve body, an intake plug disposed on one side of the intake valve core, and an intake spring disposed between the intake plug and the intake valve body. The intake valve body includes a valve chamber, a valve body air inlet disposed at one end of the valve chamber, an intake pressure plate disposed at the valve body air inlet, and a valve body air outlet disposed at the end of the valve chamber away from the valve body air inlet. The spring constant of the intake spring is greater than the spring constant of the gas filling spring. The distance between the deformation ring and the tooling base plate is such that the deformation ring can be tightly clamped between the air inlet pressure plate and the tooling base plate when the air inlet of the valve body is fully opened.

[0007] Furthermore, the fixing tool further includes at least four limiting angles provided on the tool base plate, and a guiding slope is provided on a side of the limiting angle close to the box body.

[0008] Furthermore, the tooling base plate is a rectangular plate structure, the limiting angle is set on the corner of the tooling base plate, and the tooling base plate is provided with a plurality of fixing holes for inserting fasteners and a plurality of air inlet holes for setting the inflatable component.

[0009] Furthermore, the air nozzle bracket includes a bracket body, an inflation air channel arranged in the bracket body, an air outlet portion arranged at one end of the inflation air channel, an inflation air inlet arranged on one side of the inflation air channel, and a clamping ring arranged on the air outlet portion.

[0010] Furthermore, the inflation air duct is arranged on the central axis of the bracket body, the air outlet portion is arranged at one end of the inflation air duct close to the tooling base plate, the inflation air inlet is arranged on the bracket body, the opening direction is the radial direction of the bracket body, and is connected to the inside of the inflation air duct, and the clamping ring is arranged at the end of the free end of the air outlet portion, and is a radially raised circular ring.

[0011] Furthermore, the rod body is axially arranged in the inflation airway, and the end close to the head passes through the air outlet portion, the diameter of the blocking portion is larger than the diameter of the rod body, and a guiding slope with a guiding function is provided at the connection, and the diameter of the blocking portion is an interference fit with the aperture of the air outlet portion, and the tail portion is a columnar structure with a diameter smaller than that of the rod body, and a clamping step is formed between it and the sealing portion.

[0012] Furthermore, a limiting slot is provided on the bracket base plate, and the limiting slot is provided in the axial direction of the bracket base plate and inserted into the inflation airway.

[0013] Furthermore, the valve cavity is a cavity inside the air inlet valve body, the valve body air inlet is arranged at one end of the valve cavity close to the inflation component, opposite to the air outlet, and both are fastened inside by the deformable ring, the air inlet pressure plate is located on the valve body air inlet, the plate surface is flush with the opening of the valve body air inlet, and the valve body air outlet is arranged on the air inlet valve body, and is located on the side of the air inlet valve body inside the RSP mask box.

[0014] Furthermore, the air intake plug is arranged in the valve cavity, including a movable rod inserted in the air intake valve core, and a blocking block fixed on the movable rod, one end of the movable rod passes through the center of the air intake valve core, and the other end is located in the valve cavity and is provided with an abutment portion, the blocking block is fixed on the movable rod, and the blocking block is tightly fitted with the inner wall of the air intake valve core.

[0015] Furthermore, one end of the intake spring abuts against the intake valve body, and the other end abuts against the abutting portion.

[0016] Compared to the prior art, the inflatable device for inflating an RSP pod provides a simple and efficient method for inflating the pod. The inflatable assembly achieves contact-type inflation. The weight of the pod compresses the central rod, opening the outlet. Air is released when the pod is placed, and closes when it is removed. This simple and efficient method effectively improves pod inflation efficiency and prevents continued gas discharge after the pod is removed, effectively reducing non-operational gas consumption. Furthermore, the inlet valve provides a dual-valve structure. By providing two springs with different spring rates, the inlet of the inflatable assembly opens first, followed by the inlet of the inlet valve, effectively preventing air loss within the pod. Finally, the nozzle connects the inflatable assembly and the inlet valve. The deformable ring maintains a seal between the inflatable assembly and the inlet valve during downward pressure, effectively preventing gas leakage at the connection and reducing gas loss. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1 The present invention is a structural schematic diagram of an inflation device for inflating an RSP reticle box when in use.

[0018] Figure 2 for Figure 1 Schematic diagram of the exploded structure of the inflation device used to inflate the RSP mask box.

[0019] Figure 3 for Figure 1 FIG. 1 is a schematic diagram showing an exploded structure of an inflation device for inflating an RSP mask box from another perspective.

[0020] Figure 4 for Figure 1 A schematic cross-sectional view of an inflation device for inflating an RSP mask box in a vertical cross section when in use.

[0021] Figure 5 for Figure 4 An enlarged view of the inflation device used to inflate the RSP reticle box at point A.

[0022] : Explanation of the accompanying drawings: fixed tooling 10, tooling base plate 11, limit angle 12, inflation component 20, air nozzle bracket 21, bracket body 211, inflation air duct 212, air outlet 213, inflation air inlet 214, snap ring 215, air nozzle 22, sealing ring 221, deformation ring 222, center rod 23, rod body 231, blocking portion 232, sealing portion 233, head 234, tail 235, bracket base plate 24, sealing gasket 241, limit slot 242, inflation spring 25, air intake connector 26, box body 30, air intake valve 40, air intake valve body 41, valve cavity 411, valve body air inlet 412, air intake pressure plate 413, valve body air outlet 414, air intake valve core 42, air intake plug 43, movable rod 431, blocking block 432, abutment portion 433, air intake spring 44. DETAILED DESCRIPTION

[0023] The following is a further detailed description of specific embodiments of the present invention. It should be understood that the description of the embodiments of the present invention herein is not intended to limit the scope of protection of the present invention.

[0024] like Figures 1 to 5 , which is a schematic structural diagram of an inflation device for inflating an RSP pod according to the present invention. The inflation device for inflating an RSP pod includes a fixed fixture 10 and a plurality of inflation components 20 disposed on the fixed fixture 10. It is contemplated that the inflation device for inflating an RSP pod may also include other functional modules such as an air source and air pipes, which are well known to those skilled in the art and will not be further detailed here.

[0025] The RSP reticle box is a product placed on the fixed tool 10 and inflated, and includes a box body 30 and a plurality of air inlet valves 40 provided on the box body 30 .

[0026] The fixing fixture 10 includes a fixture base plate 11 and at least four limiting angles 12 provided on the fixture base plate 11. The fixture base plate 11 is a base plate for supporting the box body 30 and is provided with a plurality of fixing holes for inserting fasteners and a plurality of air inlet holes for providing the inflatable component 20. These are common technologies in the field of mechanical equipment and are not the main content of this application. Therefore, they are not illustrated one by one in the drawings of the specification and are only briefly described here.

[0027] In one embodiment of the present application, the tooling base plate 11 is a rectangular plate-like structure, and the limiting angle 12 is set on the corner of the tooling base plate 11. A guiding slope is set on the side of the limiting angle 12 close to the box body 30, which is used to guide the box body 30 when it is placed on the fixed tool 10. The limiting angle 12 is an L-shaped structure, which plays a limiting role after the box body 30 is placed on the fixed tool 10. It is conceivable that when two fixed tools 10 are arranged side by side, the limiting angle 12 located adjacent to the two fixed tools 10 can be set to a T shape to reduce the number of limiting angles 12 used and reduce equipment costs.

[0028] Each of the inflation components 20 includes an air nozzle bracket 21 arranged on the tooling base plate 11, an air nozzle 22 arranged between the air nozzle bracket 21 and the tooling base plate 11, a center rod 23 arranged in the air nozzle bracket 21, a bracket base plate 24 arranged on the air nozzle bracket 21, an inflation spring 25 arranged between the center rod 23 and the bracket base plate 24, and an air intake connector 26 arranged on the air nozzle bracket 21.

[0029] The air nozzle bracket 21 includes a bracket body 211, an inflation air channel 212 arranged in the bracket body 211, an air outlet portion 213 arranged at one end of the inflation air channel 212, an inflation air inlet 214 arranged on one side of the inflation air channel 212, and a snap ring 215 arranged on the air outlet portion 213.

[0030] The bracket body 211 is a cylindrical structure, secured axially and vertically to the tooling base 11 via fasteners. It is located on the side of the tooling base 11 away from the stop angle 12. The air duct 212 is located on the central axis of the bracket body 211 to facilitate gas flow and house the center rod 23. The air outlet 213 is located at the end of the air duct 212 near the tooling base 11, forming a tubular structure that passes through the tooling base 11 and is used to house the air nozzle 22. The diameter of the outlet portion 213 is smaller than the diameter of the inflation channel 212. The cross-sectional shape of the connection between the inflation channel 212 and the outlet portion 213 is consistent with the cross-sectional shape of the center rod 23. This allows the center rod 23 to abut against and block the outlet portion 213 under the action of the inflation spring 25, thereby allowing it to cooperate with the inlet valve 40 of the RSP pod for inflation. The outlet portion 213 is sealed when not inflated. The inflation inlet 214 is provided on the bracket body 211, with the opening direction parallel to the radial direction of the bracket body 211 to reduce the overall size of the device. It communicates with the interior of the inflation channel 212 and is used to accommodate the inlet connector 26. The snap ring 215 is provided at the free end of the outlet portion 213 and is a radially raised circular ring that acts as a snap when the nozzle 22 is mounted on the nozzle bracket 21.

[0031] The air nozzle 22 is a sealing ring formed by injection molding of silicone or rubber material, and includes a sealing ring 221 filled between the fixing fixture 10 and the air outlet portion 213 , and a deformable ring 222 provided on the sealing ring 221 .

[0032] The sealing ring 221 is placed over the air outlet 213 and secured by the snap ring 215, preventing displacement of the sealing ring 221 after installation. The deformable ring 222 is an annular, umbrella-shaped structure. When the box body 30 is placed on the fixture 10, gravity causes the deformable ring 222 to deform and expand, buckling it onto the box body 30 to ensure a tight seal. The height of the deformable ring 222 should be coordinated with the structure of the intake valve 40 to ensure leakage during the entire inflation process.

[0033] The central rod 23 can be a cylindrical structure injection-molded from PEEK plastic and includes a rod body 231, a blocking portion 232 located on the rod body 231, a sealing portion 233 located on one side of the blocking portion 232, a head portion 234 located at one end of the rod body 231, and a tail portion 235 located at the other end of the rod body 231. When the air nozzle 22 is in a free state, the distance between the head portion 234 of the central rod 23 and the tooling base 11 is less than the maximum distance between the deformable ring 22 and the tooling base 11.

[0034] The rod body 231 is axially arranged in the inflation airway 212, and the end near the head 234 passes through the inflation outlet 213. The diameter of the blocking portion 232 is larger than the diameter of the rod body 231, and a guiding inclined surface with a guiding function is provided at the connection. The diameter of the blocking portion 232 is an interference fit with the aperture of the inflation outlet 213, so that when the center rod 23 is inserted, the inflation outlet 213 is blocked. The sealing portion 233 is arranged on the side of the blocking portion 232 away from the head 234, and includes a conical sealing surface and a sealing bottom. The conical sealing surface is an inclined surface from the blocking portion 232 to the sealing bottom, and the sealing bottom is an annular protrusion with a diameter larger than that of the blocking portion 232. The gas spring 25 acts to press the sealing portion 233 against the connection between the gas outlet 213 and the gas passage 212, thereby sealing the gas outlet 213 and preventing gas from flowing when the gas is not inflated. The head 234 is a spherical head, which is arranged on the free end of the rod 231 that passes through the gas outlet 213 to press against the inlet valve 40 provided on the box body 30. The specific working principle will be described in detail below. The tail 235 is a columnar structure with a diameter smaller than that of the rod 231. A step is formed between the tail 235 and the sealing portion 233 to fit over and fix the relative position of the gas spring 25.

[0035] The bracket base plate 24 is fixed to the bracket body 211 by fasteners and is located at an end away from the air outlet portion 213 to close the air duct 212. A sealing gasket 241 is provided between the bracket base plate 24 and the bracket body 211 to ensure the sealing performance in the air duct 212 during the fastening connection. The bracket base plate 24 is also provided with a limiting slot 242. The limiting slot 242 is a hollow cylindrical protrusion, which is provided in the axial direction of the bracket base plate 24 and inserted into the air duct 212 for the tail portion 235 to be inserted. When the center rod 23 moves in the air duct 212, the tail portion 235 is located in the limiting slot 242, thereby ensuring that the center rod 23 only moves along the axial direction in the air duct 212 and does not deviate in position.

[0036] The inflatable spring 25 is sleeved on the limiting slot 242, with one end abutting against the sealing portion 233 and the other end abutting against the bracket base plate 24, and when there is no external force, it pushes the center rod 23 to abut against the air outlet portion 213 for sealing.

[0037] The air inlet connector 26 is a threaded straight-through connector, which is fixed to the inflation air inlet 214 through a threaded connection, and sealing paint and sealing gaskets are used at the threads to ensure the sealing performance of the connection, so as to facilitate the connection of the air pipe to the air source for air supply.

[0038] The box body 30 is a box-shaped structure, with the main body being limited in position by the limiting angle 12. Due to the weight of the box body 30, when the box body 30 is stored, the air inlet valve 40 contacts the head portion 234 and presses down the center rod 23, thereby separating the blocking portion 232 from the sealing portion 233 and creating a gap, allowing gas to enter the box body 30 from the inflatable assembly 20.

[0039] The intake valves 40 are disposed on the box body 30. When the box body 30 is placed on the fixing fixture 10, the positions and number of the intake valves 40 correspond to the positions and number of the inflation components 20, so that the box body 30 is inflated through the inflation components 20. Each intake valve 40 includes an intake valve body 41, an intake valve core 42 disposed within the intake valve body 41, an intake plug 43 disposed on one side of the intake valve core 42, and an intake spring 44 disposed between the intake plug 43 and the intake valve body 41.

[0040] The inlet valve body 41 is mounted on the air inlet of the housing 30 via a snap-fit ​​structure, and the connection is sealed with a sealing gasket. The inlet valve body 41 includes a valve chamber 411, a valve inlet 412 disposed at one end of the valve chamber 411, an inlet pressure plate 413 disposed at the valve inlet 412, and a valve outlet 414 disposed at the end of the valve chamber 411 away from the valve inlet 412.

[0041] The valve cavity 411 is a hollow space within the inlet valve body 41, serving as a gas flow path and housing the inlet valve core 42, inlet plug 43, and inlet spring 44. The valve body inlet port 412 is located at one end of the valve cavity 411 near the inflation assembly 20, opposite the outlet port 213, and both are engaged by the deformable ring 222 to facilitate gas transmission. The inlet pressure plate 413 is located above the valve body inlet port 412, with its surface flush with the opening of the valve body inlet port 412. This serves as the main structure that overlies the deformable ring 222, engaging and sealing the valve body inlet port 412 and the outlet port 213 to prevent gas leakage during inflation. The valve body outlet port 414 is located on the inlet valve body 41, on the side of the inlet valve body 41 within the housing 30, to communicate with the valve cavity 411, thereby enabling gas supply to the housing 30.

[0042] The intake valve core 42 is disposed in the valve cavity 411 and is closely attached to the valve body air inlet 412. A plurality of through holes are provided on the intake valve core 42 for gas to enter. A sealing gasket is provided between the intake valve core 42 and the inner wall of the valve cavity 411 to prevent gas leakage.

[0043] The air inlet plug 43 is disposed within the valve cavity 411 and includes a movable rod 431 inserted into the air inlet valve core 42, and a blocking block 432 fixed to the movable rod 431. One end of the movable rod 431 passes through the center of the air inlet valve core 42, while the other end is located within the valve cavity 411 and is provided with an abutment portion 433. The blocking block 432 is fixed to the movable rod 431 and is tightly fitted with the inner wall of the air inlet valve core 42. By pressing the blocking block 432 against the air inlet valve core 42, the air inlet port 412 of the valve body can be closed.

[0044] One end of the intake spring 44 abuts against the inner wall of the intake valve body 41, and the other end abuts against the abutting portion 433, so that in the absence of external force, the elastic force generated by elastic deformation is used to press the intake plug 43 into the intake valve core 42, thereby blocking the valve body intake port 412 and preventing gas circulation.

[0045] In this embodiment, the spring coefficient of the air intake spring 44 is greater than the spring coefficient of the inflation spring 25, so that after the inflation is completed, when the box body 30 is separated from the fixed tooling 10, the air intake valve 40 is closed first, and then the inflation assembly 20 is closed, to ensure that the box body 30 is sufficiently inflated.

[0046] During use, the box body 30 is placed on the fixed fixture 10. First, the deformable ring 222 abuts against the air inlet valve 40 to prevent dust from entering the box body 30. Then, the center rod 23 is pressed down, so that the inflation outlet 213 is opened. After that, the air inlet plug 43 is also pushed open. Since the spring constant of the air inlet spring 44 is greater than the spring constant of the inflation spring 25, the air inlet plug 43 is opened after the inflation outlet 213, and then inflation is carried out. After the inflation is completed, when the box body 30 leaves the fixed fixture 10, under the action of the gas pressure and the elastic force of the inflation spring 25, the center rod 23 rebounds and blocks the inflation outlet 213, sealing the inflation outlet 213 to prevent gas consumption in the non-working state.

[0047] When the box body 30 is placed on the fixture 10, the deformable ring 222 first abuts the intake valve 40, and then the movable rod 431 and the center rod 23 abut each other. Because the spring constant of the intake spring 44 is greater than the spring constant of the gas spring 25, the center rod 23 moves first. As the blocking portion 232 leaves the outlet portion 213, the deformable ring 222 is continuously pressed downward. As the box body 30 is continuously pressed downward, the sealing portion 233 abuts against the limiting slot 242 and cannot move further. At this time, the air intake spring 44 is deformed due to extrusion, the movable rod 431 moves inward, the block 432 is separated from the air intake valve core 42, and the valve body air inlet 412 is opened, so that the inflation component 20 and the box body 30 form a gas passage for inflation. At this time, the deformable ring 222 is flattened and clamped between the air intake pressure plate 413 and the tooling base plate 11 to achieve the purpose of sufficient sealing. Therefore, the distance from the deformable ring 222 to the tooling base plate 11 should be based on the fact that it is tightly clamped between the air intake pressure plate 413 and the tooling base plate 11 when the valve body air inlet 412 is fully opened.

[0048] In addition, during the placement of the box body 30, when the center rod 23 moves to open the inflation assembly 20, the air inlet pressure plate 413 contacts the deformable ring 222, causing the deformable ring 222 to snap onto the air inlet pressure plate 413, thereby maintaining the sealing of the gas flow path. Subsequently, as the box body 30 is continuously pressed downward, the movable rod 431 moves to open the valve body air inlet 412, thereby ensuring that the gas flow path remains sealed throughout the inflation operation. Moreover, since the air source is fully open, the airflow rushing out at the moment the inflation assembly 20 is opened will expel the air in the deformable ring 222, thereby preventing residual air from entering the product after the air inlet valve 40 is opened. After inflation is completed, when the box body 30 leaves the fixed fixture 10, the air inlet plug 43 closes before the inflation outlet 213 because the spring constant of the air inlet spring 44 is greater than the spring constant of the inflation spring 25. Simultaneously, when the box body 30 leaves the fixed fixture 10, the deformable ring 222 abuts against the air inlet pressure plate 413 until the air inlet valve 40 is completely closed, thereby preventing gas leakage from the box body 30. After the air inlet pressure plate 413 is separated from the deformable ring 222, the inflation assembly 20 is closed again, thereby ensuring that the air inlet valve 40 is not exposed to external air during the process of opening and closing during the inflation operation.

[0049] Compared to the prior art, the inflation device for inflating an RSP mask pod provided by the present invention achieves contact inflation by providing the inflation assembly 20. The weight of the pod 30 presses the center rod 23, causing the air outlet 213 to open. Air is released when the pod 30 is placed on the pod and closes when it is removed. This simple and efficient design effectively improves the inflation efficiency of the pod 30 and prevents continued gas discharge after the pod 30 is removed, effectively reducing non-operational gas consumption. Furthermore, the inlet valve 40 provides a dual valve structure. By providing two springs with different spring rates, the air outlet of the inflation assembly 20 is opened first, followed by the air outlet of the inlet valve 40, effectively preventing air loss within the pod 30. Finally, by setting the air nozzle 22, the inflation component 20 and the air intake valve 40 are connected. The deformable deformable ring 222 ensures that the inflation component 20 and the air intake valve 40 are always sealed during the downward pressing of the box body 30, effectively preventing gas leakage at the connection and reducing gas loss.

[0050] The above are only preferred embodiments of the present invention and are not intended to limit the scope of protection of the present invention. Any modifications, equivalent replacements or improvements within the spirit of the present invention are included in the scope of the claims of the present invention.

Claims

1. An inflating device for inflating an RSP reticle box, characterized in that: The inflation device for inflating the RSP mask box includes a fixed tool and a plurality of inflation components arranged on the fixed tool, the RSP mask box includes a box body placed on the fixed tool and a plurality of air intake valves arranged on the box body, the fixed tool includes a tool base plate, each of the inflation components includes an air nozzle bracket arranged on the tool base plate, an air nozzle arranged between the air nozzle bracket and the tool base plate, a center rod arranged in the air nozzle bracket, a bracket base plate arranged on the air nozzle bracket, and an inflation spring arranged between the center rod and the bracket base plate, the air nozzle includes a sealing ring filled between the fixed tool and the air outlet, and a deforming ring arranged on the sealing ring, the deforming ring is an annular umbrella-shaped structure, the center rod includes a rod body, a blocking portion located on the rod body, a sealing portion located on one side of the blocking portion, a head located at one end of the rod body, and a tail located at the other end of the rod body, the sealing portion is arranged at the blocking portion The side of the part away from the head portion includes a conical sealing surface and a sealing bottom, the conical sealing surface is an inclined surface from the blocking portion to the sealing bottom, the sealing bottom is an annular protrusion with a diameter larger than the blocking portion, the gas nozzle is in a free state, the distance between the head and the tooling bottom plate is less than the maximum distance between the deformation ring and the tooling bottom plate, each of the intake valves includes an intake valve body, an intake valve core arranged in the intake valve body, an intake plug arranged on one side of the intake valve core, and An intake spring is arranged between the intake plug and the intake valve body, the intake valve body includes a valve cavity, a valve body air inlet arranged at one end of the valve cavity, an intake pressure plate arranged at the valve body air inlet, and a valve body air outlet arranged at one end of the valve cavity away from the valve body air inlet, the stiffness coefficient of the intake spring is greater than the stiffness coefficient of the charging spring, and the distance from the deformable ring to the tooling bottom plate is such that the deformable ring can be tightly clamped between the intake pressure plate and the tooling bottom plate when the valve body air inlet is fully opened.

2. The inflating device for inflating an RSP reticle box according to claim 1, characterized in that: The fixed tool also includes at least four limiting angles arranged on the tool bottom plate, and a guiding inclined surface is arranged on a side of the limiting angle close to the box body.

3. The inflating device for inflating an RSP reticle box according to claim 2, characterized in that: The tooling base plate is a rectangular plate-like structure, the limiting angle is set at the corner of the tooling base plate, and the tooling base plate is provided with a plurality of fixing holes for inserting fasteners, and a plurality of air inlet holes for setting the inflatable component.

4. The inflating device for inflating an RSP reticle box according to claim 1, characterized in that: The air nozzle bracket includes a bracket body, an inflation airway arranged in the bracket body, an air outlet portion arranged at one end of the inflation airway, an inflation air inlet arranged at one side of the inflation airway, and a clamping ring arranged on the air outlet portion.

5. The inflating device for inflating an RSP reticle box according to claim 4, characterized in that: The inflation air duct is arranged on the central axis of the bracket body, the air outlet is arranged at one end of the inflation air duct close to the tooling base plate, the inflation air inlet is arranged on the bracket body, the opening direction is the radial direction of the bracket body, and is communicated with the inside of the inflation air duct, and the clamping ring is arranged at the end of the free end of the air outlet, and is a circular ring protruding in the radial direction.

6. The inflating device for inflating an RSP reticle box according to claim 4, characterized in that: The rod body is axially arranged in the inflation airway, and the end close to the head passes through the air outlet portion. The diameter of the blocking portion is larger than the diameter of the rod body, and a guiding slope with a guiding function is provided at the connection. The diameter of the blocking portion is an interference fit with the aperture of the air outlet portion. The tail portion is a columnar structure with a smaller diameter than the rod body, and a clamping step is formed between the tail portion and the sealing portion.

7. The inflating device for inflating an RSP reticle box according to claim 4, characterized in that: The support bottom plate is provided with a limiting slot, which is arranged at the axial direction of the support bottom plate and inserted into the inflation airway.

8. The inflating device for inflating an RSP reticle box according to claim 1, characterized in that: The valve cavity is a hollow cavity inside the air inlet valve body. The valve body air inlet is arranged at one end of the valve cavity close to the inflation component, opposite to the air outlet, and both are fastened inside by the deformable ring. The air inlet pressure plate is located on the valve body air inlet, and the plate surface is flush with the opening of the valve body air inlet. The valve body air outlet is arranged on the air inlet valve body and is located on one side of the air inlet valve body inside the RSP mask box.

9. The inflating device for inflating an RSP reticle box according to claim 1, characterized in that: The air intake plug is arranged in the valve cavity, and includes a movable rod inserted in the air intake valve core, and a blocking block fixed on the movable rod. One end of the movable rod passes through the center of the air intake valve core, and the other end is located in the valve cavity and is provided with an abutment portion. The blocking block is fixed on the movable rod, and the blocking block is tightly fitted with the inner wall of the air intake valve core.

10. The inflating device for inflating an RSP reticle box according to claim 9, characterized in that: One end of the intake spring abuts against the intake valve body, and the other end abuts against the abutting portion.

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