Shaft end connecting structure and substrate supporting device

Abstract

The invention discloses a shaft end connecting structure and a substrate supporting device.The shaft end connecting structure comprises a hollow shaft and a rotating shaft, the rotating shaft surrounds the periphery of the hollow shaft, a first channel of the hollow shaft extends in the axial direction of the hollow shaft and penetrates through the hollow shaft, and a plurality of protruding keys distributed at intervals are arranged on the periphery of the hollow shaft; the groove of the rotating shaft extends from the second end of the rotating shaft to the first end of the rotating shaft, the first end of the hollow shaft is inserted into the groove and makes contact with the groove bottom of the groove to form sealing, the second channel of the rotating shaft extends in the axial direction of the rotating shaft and penetrates through the groove bottom of the groove, and the second channel communicates with the first channel. A plurality of key grooves distributed at intervals are formed in the inner wall of the groove, and the key grooves are in transition fit with the protruding keys. The shaft end connecting structure is good in stability during rotation, high in strength, not prone to causing unstable operation of a chuck, simple in sealing structure and good in sealing effect, and therefore the technological effect of a base plate is not prone to being affected.

Description

Technical Field

[0001] The present invention relates to the technical field of semiconductor manufacturing, and in particular to an axis end connection structure and a substrate supporting device. Background Art

[0002] The substrate support device is used to carry and drive the substrate to rotate. The stability of the operation of the substrate support device will directly affect the process effect of the substrate.

[0003] See also Figure 1 At present, the substrate supporting device includes a chuck 200', a rotating shaft 120', a hollow shaft 110' and a motor body 115'. The chuck 200' is used to carry and fix the substrate. The chuck 200' is fixedly connected to the rotating shaft 120'. The rotating shaft 120' has a groove extending along the axial direction of the rotating shaft 120'. The first end 1101' of the hollow shaft 110' extends from the motor body 115' and is inserted into the groove of the rotating shaft 120'. The motor body 115' is used to drive the hollow shaft 110' to rotate, so that the hollow shaft 110' drives the rotating shaft 120' to rotate, and then the rotating shaft 120' drives the chuck 200' to rotate together.

[0004] A common connection and sealing method between the hollow shaft 110' and the rotating shaft 120' is to open a slot at the first end 1101' of the hollow shaft 110', press a pin 126' laterally into the side of the rotating shaft 120', fix the pin 126' with the rotating shaft 120', and allow the pin 126' to be stuck in the slot at the first end 1101' of the hollow shaft 110', so that the rotating shaft 120' rotates together with the hollow shaft 110'. A sealing ring 127' is provided between the side wall of the rotating shaft 120' and the side wall of the hollow shaft 110' for sealing.

[0005] The above shaft end connection structure has the following disadvantages: First, the first end 1101' of the hollow shaft 110' is provided with a slot, which reduces the strength of the shaft end. When the motor body 115' drives the hollow shaft 110' to rotate, the pin 126' between the hollow shaft 110' and the rotating shaft 120' is likely to break the end of the slot, causing the chuck 200' to run unsteadily; Second, there is a line contact between the pin 126' and the first end 1101' of the hollow shaft 110', and there is a gap. When the hollow shaft 110' drives the rotating shaft 120' to rotate through the pin 126', the impact force of the hollow shaft 110' on the rotating shaft 120' is large, causing the chuck 200' to run unsteadily and easily wear the sealing ring 127', affecting the sealing effect, and ultimately affecting the process effect of the substrate. Summary of the invention

[0006] The purpose of the present invention is to solve the problems in the prior art that the shaft end connection structure has poor rotation stability, low strength, easily causes the chuck to run unsteadily, and affects the sealing effect.

[0007] In order to solve the above problems, the present application proposes a shaft end connection structure, including a hollow shaft and a rotating shaft, wherein the rotating shaft is arranged around the outer periphery of the hollow shaft, wherein:

[0008] The hollow shaft has a first end and a second end opposite to each other and a first channel, the first channel extends along the axial direction of the hollow shaft and penetrates the hollow shaft, and a plurality of convex keys distributed at intervals are arranged on the outer circumference of the hollow shaft;

[0009] The rotating shaft has a first end and a second end relative to each other, a second channel and a groove. The groove extends from the second end of the rotating shaft to the first end of the rotating shaft. The first end of the hollow shaft is inserted into the groove and contacts with the bottom of the groove to form a seal. The second channel extends along the axial direction of the rotating shaft and passes through the bottom of the groove, and the second channel is connected to the first channel. A plurality of spaced keyways are provided on the inner wall of the groove, and the keyways and the convex keys are transitionally matched.

[0010] In one embodiment of the present application, the end face of the first end of the hollow shaft directly contacts the bottom surface of the groove to form a seal, and the surface roughness Ra of the end face of the first end of the hollow shaft and the bottom surface of the groove are both greater than or equal to 0.2 μm.

[0011] In one embodiment of the present application, the surface roughness Ra of the end surface of the first end of the hollow shaft and the groove bottom surface are both in the range of 0.2 μm to 0.6 μm.

[0012] In one embodiment of the present application, a sealing gasket is further included, which is arranged between the first end of the hollow shaft and the bottom of the groove, so that the first end of the hollow shaft and the bottom of the groove are in contact with each other through the sealing gasket to form a seal.

[0013] In one embodiment of the present application, the keyway is close to the second end of the rotating shaft and connected to the end surface of the second end of the rotating shaft, and the position of the convex key corresponds to the position of the keyway.

[0014] In one embodiment of the present application, the number of the protruding keys is 3 to 8, and the number of the keyways is the same as the number of the protruding keys.

[0015] In an embodiment of the present application, the intervals between the plurality of convex keys are equal.

[0016] In one embodiment of the present application, the convex key and the hollow shaft are integrally formed.

[0017] The present application proposes a substrate supporting device, comprising:

[0018] A chuck, used for carrying and fixing the substrate, the chuck having a through hole;

[0019] The motor body; and the above-mentioned shaft end connection structure, the first end of the rotating shaft is fixedly connected to the chuck, the second channel is connected to the through hole of the chuck, the second end of the hollow shaft is connected to the motor body, and the motor body is used to drive the hollow shaft to rotate, so that the hollow shaft drives the chuck to rotate through the rotating shaft.

[0020] In one embodiment of the present application, the substrate supporting device further includes:

[0021] The vacuum source is connected to the first channel and is used to provide vacuum suction to the first channel, the second channel and the through hole of the chuck, so that the substrate is fixed on the chuck.

[0022] The shaft end connection structure of the present application includes a rotating shaft and a hollow shaft, wherein the rotating shaft has a groove for accommodating the first end of the hollow shaft, and the first end of the hollow shaft contacts the bottom of the groove to form an end face seal. The sealing structure is simple and has a good sealing effect. By setting a plurality of spaced keyways on the inner wall of the groove and a plurality of spaced convex keys on the outer periphery of the hollow shaft, the convex keys and the keyways are in transitional fit, so that the rotating shaft rotates with the hollow shaft. The convex keys and the keyways are in surface contact and are subjected to uniform force. Moreover, due to the shape and position tolerances of the plurality of convex keys, the fit clearance between the plurality of convex keys and the plurality of keyways is small, or even eliminated, thereby reducing the impact force during rotation. At the same time, the convex keys and the keyways are in transitional fit. In the process of inserting the convex keys into the keyways, force needs to be applied to overcome the friction force in order to fully insert the keyways, thereby preventing the rotating shaft from moving around the hollow shaft and enhancing the stability of the shaft end connection structure during rotation.

[0023] In addition, since the rotating shaft and the hollow shaft are connected by the cooperation of the convex key and the keyway, there is no need to groove the end of the hollow shaft to use additional parts (such as pins) for connection, which improves the strength of the hollow shaft end and there is basically no risk of breakage of the hollow shaft end.

[0024] The substrate supporting device of the present application adopts the above-mentioned shaft end connection structure. The rotating shaft in the shaft end connection structure is connected to the chuck and rotates together with the chuck. The rotating shaft and the hollow shaft are connected by a cam and a keyway. It has good stability and is not easy to cause unstable operation of the chuck, thereby not easily affecting the process effect of the substrate.

[0025] Other features and corresponding beneficial effects of the present invention are described in the latter part of the specification, and it should be understood that at least part of the beneficial effects become obvious from the description in the specification of the present invention. BRIEF DESCRIPTION OF THE DRAWINGS

[0026] Figure 1 is a schematic diagram of a substrate supporting device;

[0027] Figure 2 A schematic diagram of a substrate supporting device and an axial end connection structure thereof according to an embodiment of the present application;

[0028] Figure 3 It is a three-dimensional schematic diagram of a hollow shaft according to an embodiment of the present application;

[0029] Figure 4 It is a three-dimensional schematic diagram of a rotating shaft according to an embodiment of the present application;

[0030] Figure 5 for Figure 4 A schematic cross-sectional view along line CC; and

[0031] Figure 6 for Figure 2 Schematic diagram of the cross section along line BB. DETAILED DESCRIPTION

[0032] The following specific embodiments illustrate the implementation of the present invention, and those skilled in the art can easily understand other advantages and effects of the present invention from the contents disclosed in this specification. Although the description of the present invention will be introduced in conjunction with the preferred embodiment, this does not mean that the features of this invention are limited to this implementation. On the contrary, the purpose of introducing the invention in conjunction with the implementation is to cover other options or modifications that may extend based on the claims of the present invention. In order to provide a deep understanding of the present invention, the following description will include many specific details. The present invention can also be implemented without using these details. In addition, in order to avoid confusion or blurring the focus of the present invention, some specific details will be omitted in the description. It should be noted that the embodiments of the present invention and the features in the embodiments can be combined with each other without conflict.

[0033] It should be noted that in this specification, similar reference numerals and letters denote similar items in the following drawings, and therefore, once an item is defined in one drawing, it does not need to be further defined and explained in the subsequent drawings.

[0034] The technical solution of the present invention will be described clearly and completely below in conjunction with the accompanying drawings. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0035] In the description of the present invention, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc., indicating the orientation or positional relationship, are based on the orientation or positional relationship shown in the drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as limiting the present invention. In addition, the terms "first", "second", and "third" are used for descriptive purposes only, and cannot be understood as indicating or implying relative importance.

[0036] In the description of the present invention, it should be noted that, unless otherwise clearly specified and limited, the terms "installed", "connected", and "connected" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be indirectly connected through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0037] In order to make the objectives, technical solutions and advantages of the present invention more clear, the embodiments of the present invention will be further described in detail below with reference to the accompanying drawings.

[0038] Figure 2 Schematic diagram of a substrate support device and its shaft end connection structure according to an embodiment of the present application. Figure 2 The substrate supporting device includes a chuck 200 for carrying and fixing the substrate. The shaft end connecting structure 100 is arranged below the chuck 200 to drive the chuck 200 to rotate to meet the requirements of electroplating, polishing and other processes.

[0039] Figure 3 is a three-dimensional schematic diagram of a hollow shaft in one embodiment of the present application, Figure 4 is a three-dimensional schematic diagram of a rotating shaft according to an embodiment of the present application, Figure 5 yes Figure 4 Section view along line CC.

[0040] Combination Figures 2 to 5 The shaft end connection structure 100 includes a hollow shaft 110 and a rotating shaft 120, and the rotating shaft 120 is arranged around the outer periphery of the hollow shaft 110. The hollow shaft 110 has a first end 1101 and a second end 1102 opposite to each other and a first channel 111, and the first channel 111 extends along the axial direction of the hollow shaft 110 and penetrates the hollow shaft 110. A plurality of spaced convex keys 114 are arranged on the outer periphery of the hollow shaft 110. In some embodiments, the plurality of convex keys 114 are spaced equally from each other.

[0041] The rotating shaft 120 has a first end 1201 and a second end 1202 opposite to each other, a second channel 121 and a groove 123. The groove 123 extends from the second end 1202 of the rotating shaft 120 to the first end 1201 of the rotating shaft 120, and the first end 1101 of the hollow shaft 110 is inserted into the groove 123, and the first end 1101 of the hollow shaft 110 contacts the bottom of the groove 123 to form a seal. The second channel 121 extends along the axial direction of the rotating shaft 120 and passes through the bottom of the groove 123, and the second channel 121 is connected to the first channel 111, wherein the first channel 111 and the second channel 121 can be used for fluid to pass through, for example, gas is extracted outward through the first channel 111 and the second channel 121 to provide vacuum suction for the chuck 200. A plurality of spaced keyways 124 are provided on the inner wall of the groove 123, and the plurality of keyways 124 are transitionally matched with the plurality of convex keys 114 respectively. In some embodiments, the second channel 121 is coaxial with the first channel 111.

[0042] In this embodiment, the multiple keyways 124 cooperate with the multiple convex keys 114 to achieve the rotation of the rotating shaft 120 along with the hollow shaft 110. Figure 6 The multiple convex keys 114 and the multiple key slots 124 are in surface contact, and the force is uniform. Because of the shape and position tolerance of the multiple convex keys 114, the matching clearance between the multiple convex keys 114 and the multiple key slots 124 is small, or even eliminated, which reduces the impact force during rotation. At the same time, the convex keys 114 and the key slots 124 are transitionally matched. During the process of inserting the convex keys 114 into the key slots 124, it is necessary to apply force to overcome the friction force in order to fully insert the key slots 124, so as to prevent the rotating shaft 120 from moving around the hollow shaft 110, and enhance the stability of the shaft end connection structure 100 during rotation. It should be noted that the shape and position tolerance refers to the differences in shape and relative position of the multiple convex keys after processing within the allowable range of variation.

[0043] In addition, since the rotating shaft 120 and the hollow shaft 110 are connected by the cooperation of the convex key 114 and the keyway 124, there is no need to groove the first end 1101 of the hollow shaft 110 to use additional parts (such as pins) for connection, which improves the strength of the shaft end of the hollow shaft 110 and there is basically no risk of the shaft end of the hollow shaft 110 breaking.

[0044] It should be pointed out that the radius size of the portion of the groove 123 where the keyway 124 is not provided only needs to ensure that the first end 1101 of the hollow shaft 110 can be assembled therein. In addition, according to the shape and position tolerance of the convex key 114 on the hollow shaft 110, it is sufficient to ensure that the convex key 114 does not rotate relative to the keyway 124 after being inserted into it.

[0045] In some embodiments, in combination Figure 2 and Figure 4The keyway 124 is close to the second end 1202 of the rotating shaft 120 and connected to the end surface of the second end 1202 of the rotating shaft 120 . The position of the convex key 114 corresponds to the position of the keyway 124 .

[0046] In some embodiments, the number of the convex keys 114 is at least 2, preferably 3 to 8, and the number of the key slots 124 is the same as the number of the convex keys 114. In the embodiment of the present application, the number of the convex keys 114 is 4, and the intervals between them are equal. Within the reasonable demand range, the more the number of convex keys 114, the higher the manufacturing and assembly precision requirements, and the more uniform the force during rotation.

[0047] In some embodiments, the key 114 and the hollow shaft 110 are integrally formed.

[0048] Optionally, in some embodiments, the first end 1101 of the hollow shaft 110 is in contact with the bottom of the groove 123 via a sealing gasket (not shown) to form a seal to prevent air leakage at the connection between the first channel 111 and the second channel 121 .

[0049] Preferably, in some embodiments, the end face of the first end 1101 of the hollow shaft 110 is in direct contact with the bottom surface of the groove 123 to form a seal, which is used to prevent air leakage at the connection between the first channel 111 and the second channel 121. The surface roughness Ra of the end face of the first end 1101 of the hollow shaft 110 and the bottom surface of the groove 123 are both greater than or equal to 0.2μm. Within a reasonable range, the higher the surface roughness Ra, the better the sealing effect. Preferably, the value range of the surface roughness Ra of the end face of the first end 1101 of the hollow shaft 110 and the bottom surface of the groove 123 is 0.2μm to 0.6μm. This embodiment achieves a sealing effect by designing the surface roughness Ra so that the end face of the first end 1101 of the hollow shaft 110 and the bottom surface of the groove 123 are in surface contact. Compared with adding a sealing gasket for sealing, the end face of the hollow shaft 110 of this embodiment is directly in surface contact with the bottom surface of the groove 123 for sealing, the sealing structure is simpler, there is no possibility of wear of the sealing gasket, and the sealing reliability is higher. It should be pointed out that when the end face of the first end 1101 of the hollow shaft 110 contacts the bottom surface of the groove 123 to form a seal, a gap α remains between the upper surface of the convex key 114 and the top wall of the keyway 124.

[0050] See also Figure 2In some embodiments, a substrate support device is provided, which includes a chuck 200, a motor body (not shown), and the above-mentioned shaft end connection structure 100. The chuck 200 is used to carry and fix the substrate, and the chuck 200 has a through hole 210, which connects the upper surface and the lower surface of the chuck 200. The first end 1201 of the rotating shaft 120 of the shaft end connection structure 100 is fixedly connected to the chuck 200, and the second channel 121 of the rotating shaft 120 is connected to the through hole 210 of the chuck 200. The second end 1102 of the hollow shaft 110 is connected to the motor body, and the motor body is used to drive the hollow shaft 110 to rotate, so that the hollow shaft 110 drives the chuck 200 to rotate through the rotating shaft 120.

[0051] In some embodiments, the chuck 200 is a vacuum chuck, and the substrate supporting device further includes a vacuum source (not shown), which is connected to the first channel 111 and is used to provide vacuum suction to the first channel 111, the second channel 121 and the through hole 210 of the chuck 200, so that the substrate is adsorbed and fixed on the upper surface of the chuck 200.

[0052] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention, rather than to limit it. Although the present invention has been described in detail with reference to the aforementioned embodiments, those skilled in the art should understand that they can still modify the technical solutions described in the aforementioned embodiments, or replace some or all of the technical features therein with equivalents. However, these modifications or replacements do not cause the essence of the corresponding technical solutions to deviate from the scope of the technical solutions of the embodiments of the present invention.

Claims

1. A shaft end connection structure, characterized in that: It includes a hollow shaft and a rotating shaft, wherein the rotating shaft is arranged around the outer periphery of the hollow shaft, The hollow shaft has a first end and a second end opposite to each other and a first channel, the first channel extends along the axial direction of the hollow shaft and penetrates the hollow shaft, and a plurality of convex keys distributed at intervals are arranged on the outer circumference of the hollow shaft; The rotating shaft has a first end and a second end relative to each other, a second channel and a groove, the groove extending from the second end of the rotating shaft to the first end of the rotating shaft, the first end of the hollow shaft is inserted into the groove and contacts with the bottom of the groove to form a seal, the second channel extends along the axial direction of the rotating shaft and passes through the bottom of the groove, and the second channel is connected to the first channel, and a plurality of spaced key grooves are provided on the inner wall of the groove, and the key grooves are transitionally matched with the convex keys.

2. The shaft end connection structure according to claim 1, characterized in that: The end surface of the first end of the hollow shaft is in direct contact with the bottom surface of the groove to form a seal, and the surface roughness Ra of the end surface of the first end of the hollow shaft and the bottom surface of the groove is greater than or equal to 0.2 μm.

3. The shaft end connection structure according to claim 2, characterized in that: The surface roughness Ra of the end surface of the first end of the hollow shaft and the surface of the groove bottom are both in the range of 0.2 μm to 0.6 μm.

4. The shaft end connection structure according to claim 1, characterized in that: It also includes a sealing gasket, which is arranged between the first end of the hollow shaft and the bottom of the groove, so that the first end of the hollow shaft and the bottom of the groove are in contact with each other through the sealing gasket to form a seal.

5. The shaft end connection structure according to claim 1, characterized in that: The keyway is close to the second end of the rotating shaft and connected to the end surface of the second end of the rotating shaft. The position of the convex key corresponds to the position of the keyway.

6. The shaft end connection structure according to claim 1, characterized in that: The number of the convex keys is 3 to 8, and the number of the key slots is the same as the number of the convex keys.

7. The shaft end connection structure according to claim 1, characterized in that: The plurality of convex keys are spaced equally from one another.

8. The shaft end connection structure according to claim 1, characterized in that: The convex key and the hollow shaft are formed in one piece.

9. A substrate supporting device, characterized in that: include: A chuck, used to carry and fix the substrate, the chuck having a through hole; Motor body; as well as According to the shaft end connection structure as described in any one of claims 1 to 8, the first end of the rotating shaft is fixedly connected to the chuck, the second channel is connected to the through hole of the chuck, the second end of the hollow shaft is connected to the motor body, and the motor body is used to drive the hollow shaft to rotate, so that the hollow shaft drives the chuck to rotate through the rotating shaft.

10. The substrate supporting device according to claim 9, characterized in that: Also includes: A vacuum source is communicated with the first channel and is used to provide vacuum suction to the first channel, the second channel and the through hole of the chuck, so that the substrate is fixed on the chuck.

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