A detection device and method for a lithography illumination system

Abstract

The application discloses a detection device and method of a photoetching illumination system, and belongs to the technical field of photoetching illumination detection. The device comprises a mounting frame, an objective lens, a bearing table for placing a silicon wafer, and a mask plate setting frame for placing a mask plate. The mounting frame is internally provided with an air pump. The output end of the air pump is communicated with the inner cavity of the setting frame through an air pipe. An adsorption port is formed in the upper portion of the setting frame. A second motor is fixedly installed at the top end of the mounting frame. The output shaft of the second motor is fixedly connected with a rotating shaft. The bottom end of the rotating shaft is fixedly installed with a rotating block. A connecting rod is slidingly installed on the rotating block. A plurality of adsorption blocks are slidingly installed on the connecting rod. The adsorption blocks are internally provided with adsorption assemblies for adsorbing the mask plate on the setting frame. Through the cooperation of the above structures, the time for replacing the mask plate can be effectively reduced, so that the detection efficiency is improved.

Description

Technical Field

[0001] This invention belongs to the field of photolithography illumination inspection technology, specifically a detection device and method for a photolithography illumination system. Background Technology

[0002] The lithography illumination system is a key component of a lithography machine. It is responsible for providing an illumination field with a specific spectral and intensity distribution for the projection lens imaging. The polarization detection technologies involved in lithography machines include optical element polarization detection technology, illumination pupil polarization detection technology, and projection lens polarization aberration detection technology.

[0003] The illumination pupil polarization detection technology mainly uses specific optical elements (such as polarizers and waveplates) and detection methods to accurately measure and analyze the polarized light in the illumination pupil. These optical elements can convert the polarization characteristics of the light under test into observable optical signals, which can then be acquired and processed by devices such as photodetectors.

[0004] For example, US20170010539A1, published in 2017, proposed a device for detecting projection optical polarization parameters. It solves the problem of environmental influences during multiple measurements in US7286245B2 by placing multiple measurement masks and polarization changing elements on the object surface. Through CN113552773B, the problem of the above polarization detection device having a large rotating waveplate component that cannot be directly placed into the lithography system for measurement is solved.

[0005] However, the published patent CN113552773B requires replacing the mask with the same period but a different phase during the measurement process. However, this replacement process is cumbersome and repetitive, which may lead to physical fatigue and muscle tension. In order to ensure the accuracy of the measurement, the adjustment time of the mask will be increased, thereby reducing the efficiency of the entire measurement process. Summary of the Invention

[0006] To address the aforementioned technical problems, this invention proposes a detection device and method for a photolithography illumination system, which can reduce the time required to change photomasks and improve detection efficiency.

[0007] To achieve the above objectives, the technical solution adopted by the present invention is as follows:

[0008] A testing device for a photolithography illumination system includes a mounting frame, an objective lens, a support stage for placing silicon wafers, and a photomask holder.

[0009] The mounting frame is a rectangular hollow frame with an opening at the top. An air pump is located on one of the two short sides of the opening at the top. The output end of the air pump is connected to the inner cavity of the mounting frame through an air pipe. An adsorption port is provided at the top of the mounting frame.

[0010] A second motor is fixedly installed on the other side of the two short sides of the opening on the mounting bracket. The output shaft of the second motor is fixedly connected to a rotating shaft. A rotating block is fixedly installed at the bottom of the rotating shaft. A connecting rod is slidably installed on the rotating block. An adsorption block is slidably installed on the connecting rod. Multiple adsorption blocks are provided.

[0011] The adsorption block is equipped with an adsorption component inside, which is used to adsorb the mask template on the mounting rack.

[0012] The adsorption assembly includes a sliding plate, an air cylinder, a piston rod, and a suction cup. The sliding plate is slidably installed inside the adsorption block. The air cylinder is hollow and fixedly installed on the sliding plate. One end of the piston rod extends out of the outer wall of the air cylinder and is fixedly connected to the inside of the adsorption block, while the other end is slidably connected to the inside of the air cylinder. The suction cup is fixedly installed at one end of the air cylinder and communicates with the inner cavity of the air cylinder.

[0013] A first motor is fixedly installed at the top of the adsorption block, and a threaded rod is fixedly installed on the output shaft of the first motor. One end of the threaded rod passes through the sliding plate and is connected to the sliding plate by a thread.

[0014] A transmission gear is fixedly installed at one end of the connecting rod near the rotating block, and a gear ring is fixedly installed inside the mounting bracket. The transmission gear meshes with the gear ring.

[0015] A slider is fixedly installed at one end of the adsorption block near the connecting rod. One end of the connecting rod passes through the slider. A spiral groove is opened on the connecting rod. A guide block is fixedly installed on the inner wall of the slider. One end of the guide block extends into the interior of the spiral groove.

[0016] The mounting bracket has a limiting ring groove inside, and a limiting rod is slidably installed inside the slider. One end of the limiting rod extends into the inside of the adsorption block, and the other end extends into the inside of the limiting ring groove.

[0017] A sliding block is slidably mounted on the outer wall of the rotating block. A connecting shaft is fixedly mounted on one end of the connecting rod near the sliding block. One end of the connecting shaft extends into the interior of the sliding block. The connecting shaft and the sliding block are connected by a torsion spring.

[0018] The mounting bracket has a guide ring fixedly installed inside, and the guide ring has a notch for the sliding block to enter.

[0019] The outer wall of the rotating block is provided with a moving groove, and the moving block is fixedly installed at one end of the sliding block near the rotating block. The moving block is slidably installed inside the moving groove.

[0020] A method for detecting a photolithography illumination system includes the following steps:

[0021] S1: By placing the mask template on the mounting frame, starting the air pump, and adsorbing the mask template through the set adsorption port, the pupil illumination detection is then performed;

[0022] S2: The second motor drives the rotating shaft to rotate, which rotates the connecting rod and the adsorption block to the top of the mounting frame. Then, the first motor drives the sliding plate to rotate, and the air cylinder and piston rod work together to make the suction cup adsorb the mask template on the mounting frame. The second motor rotates again to complete the storage of the mask template.

[0023] S3: The second motor drives the rotating shaft to rotate another connecting rod to the top of the mounting frame. Then, the first motor rotates to make the sliding plate slide down. At this time, the suction cup will release its adsorption on the mask, and the mask will fall onto the mounting frame, completing the replacement of the mask and continuing the pupil illumination detection.

[0024] The beneficial effects of this invention are as follows:

[0025] 1. This invention uses a second motor to rotate one of the connecting rods and the adsorption block to the top of the mounting frame. Then, driven by the first motor, the sliding plate slides downward, causing the piston rod to stretch inside the air cylinder. At this point, the mask template can be adsorbed by the suction cup, and then rotated into the mounting frame by the rotating shaft. When the mask template needs to be reused, the adsorption block adsorbing the mask template is rotated back to the top of the mounting frame by the rotating shaft. At this time, the sliding plate is controlled to slide down by controlling the first motor, and the mask template falls onto the mounting frame. By repeating this step, it can effectively help with multiple replacements of mask templates with the same cycle but different phases, as well as multiple and repeated measurement steps, minimizing the time for mask template replacement and improving detection efficiency.

[0026] 2. In this invention, the sliding block and connecting rod are rotated to the top of the notch by a rotating shaft. At this time, the sliding block and connecting rod slide down into the notch under the action of gravity, allowing the suction cup to fit against the mask template. Then, the first motor is started to drive the sliding plate to slide down. By separating the air cylinder and the piston rod, a negative pressure is generated inside the suction cup. As the sliding plate slides down, it also drives the suction cup down, further assisting the suction cup in adsorbing the mask template and ensuring the stability of the adsorption. Attached Figure Description

[0027] Figure 1 This is a perspective view of a detection device for a photolithography illumination system according to the present invention;

[0028] Figure 2 This is a schematic diagram of the structure of the mounting frame in this invention;

[0029] Figure 3 In this invention Figure 2 Enlarged view of point A in the middle;

[0030] Figure 4 This is a schematic diagram of the objective lens in this invention;

[0031] Figure 5 In this invention Figure 4 Enlarged view of point B in the middle;

[0032] Figure 6 This is a schematic diagram of the connecting rod in this invention;

[0033] Figure 7 In this invention Figure 6 Enlarged view of point C in the middle;

[0034] Figure 8 In this invention Figure 6 Enlarged view at point D;

[0035] Figure 9 In this invention Figure 6 Enlarged view at point E in the middle;

[0036] Figure 10 This is a flowchart of a detection method for a photolithography illumination system according to the present invention.

[0037] Figure label:

[0038] 1. Mounting frame; 2. Objective lens; 3. Support stage; 4. Mounting frame; 5. Adsorption port; 6. Moving block; 7. Rotating shaft; 8. Connecting rod; 9. Slider; 10. Adsorption block; 11. Moving groove; 12. Transmission gear; 13. Limiting ring groove; 14. Rotating block; 15. Guide ring; 16. Notch; 17. Gear ring; 18. First motor; 19. Threaded rod; 20. Sliding plate; 21. Piston rod; 22. Air cylinder; 23. Suction cup; 24. Limiting rod; 25. Spiral groove; 26. Guide block; 27. Connecting shaft; 28. Sliding block; 29. ​​Air pump; 30. Second motor. Detailed Implementation

[0039] To make the technical means, creative features, objectives and effects of this invention easier to understand, the invention will be further described below in conjunction with specific embodiments.

[0040] like Figure 1 As shown, the present invention provides a detection device for a photolithography illumination system, including a mounting frame 1, an objective lens 2, a support stage 3 for placing silicon wafers, and a mounting frame 4 for placing photomasks.

[0041] like Figure 2 As shown, the mounting frame 1 is a rectangular hollow frame with an upper opening. An air pump 29 is installed inside one of the two short sides of the upper opening. The output end of the air pump 29 is connected to the inner cavity of the mounting frame 4 through an air pipe. An adsorption port 5 is opened on the inner surface of the mounting frame 4.

[0042] When the mask template is placed on the mounting frame 4, the air pump 29 is activated to create a negative pressure at the adsorption port 5. Under the action of the negative pressure, the mask template on the mounting frame 4 can be adsorbed and fixed, which improves the installation efficiency and facilitates the testing work. Multiple adsorption ports 5 are provided.

[0043] like Figures 5-6 As shown, a second motor 30 is fixedly installed on the other side of the two short sides of the upper opening of the mounting bracket 1. The output shaft of the second motor 30 is fixedly connected to a rotating shaft 7. A rotating block 14 is fixedly installed at the bottom of the rotating shaft 7. A connecting rod 8 is slidably installed on the rotating block 14. An adsorption block 10 is slidably installed on the connecting rod 8. Multiple adsorption blocks 10 are provided.

[0044] The second motor 30 can be started to drive the rotating shaft 7 to rotate, thereby controlling the connecting rod 8 to move the adsorption block 10. Multiple connecting rods 8 and adsorption blocks 10 can be set up, with one connecting rod 8 and one adsorption block 10 forming a group. Every two groups are set symmetrically, and the number of groups must be even. Multiple groups are arranged in a ring on the outer wall of the rotating block 14. Multiple adsorption blocks 10 can adsorb multiple masks. According to the measurement process, masks with the same cycle but different phases can be replaced. This not only reduces the repetition of work, but also improves the efficiency of mask replacement, thereby improving the efficiency of measurement.

[0045] The adsorption block 10 is equipped with an adsorption component inside, which is used to adsorb the mask template on the mounting frame 4.

[0046] The second motor 30 can drive the rotating shaft 7 to rotate one of the connecting rods 8 and the adsorption block 10 to the top of the mounting frame 4, and the mask template on the mounting frame 4 can be adsorbed by the adsorption assembly. Then, the second motor 30 can be rotated to drive the other adsorption block 10 to the top of the mounting frame 4, and the mask template can be placed on the mounting frame 4 to complete the replacement.

[0047] like Figure 7 As shown in the preferred embodiment of the present invention, the adsorption assembly includes a sliding plate 20, an air cylinder 22, a piston rod 21, and a suction cup 23. The sliding plate 20 is slidably installed inside the adsorption block 10. The air cylinder 22 is hollow and fixedly installed on the sliding plate 20. One end of the piston rod 21 extends out of the outer wall of the air cylinder 22 and is fixedly connected to the inside of the adsorption block 10, while the other end is slidably connected to the inside of the air cylinder 22. The suction cup 23 is fixedly installed at one end of the air cylinder 22 and communicates with the inner cavity of the air cylinder 22.

[0048] When the sliding plate 20 slides inside the adsorption block 10, it will drive the air cylinder 22 to slide synchronously. Therefore, when the sliding plate 20 slides downward inside the adsorption block 10, the sliding plate 20 drives the air cylinder 22 to slide downward synchronously. At this time, the piston rod 21 can be stretched inside the air cylinder 22, and a negative pressure will also appear below the suction cup 23. When the adsorption block 10 drives the suction cup 23 to be above the mask template, until the suction cup 23 is in contact with the surface of the mask template, the sliding plate 20 can drive the air cylinder 22 to slide downward. At this time, the suction cup 23 can adsorb the mask template. When the sliding plate 20 drives the air cylinder 22 to slide upward, the suction cup 23 can release the adsorption of the mask template.

[0049] In a preferred embodiment of the present invention, a first motor 18 is fixedly installed on the top of the adsorption block 10, and a threaded rod 19 is fixedly installed on the output shaft of the first motor 18. One end of the threaded rod 19 passes through the sliding plate 20 and is connected to the sliding plate 20 by a thread.

[0050] The sliding plate 20 can be moved by starting the first motor 18, and the sliding of the sliding plate 20 is controlled by the rotation direction of the first motor 18.

[0051] like Figure 3 , Figure 4 , Figure 5 As shown, in a preferred embodiment of the present invention, a transmission gear 12 is fixedly installed at one end of the connecting rod 8 near the rotating block 14, and a gear ring 17 is fixedly installed inside the mounting bracket 1, with the transmission gear 12 meshing with the gear ring 17.

[0052] When the second motor 30 drives the rotating shaft 7 to rotate, the transmission gear 12 on the connecting rod 8 will follow the rotating shaft 7 to rotate circumferentially inside the mounting frame 1. At this time, the transmission gear 12 will contact the gear ring 17 inside the mounting frame 1, thereby causing the transmission gear 12 to drive the connecting rod 8 to rotate.

[0053] In a preferred embodiment of the present invention, a slider 9 is fixedly installed on one end of the adsorption block 10 near the connecting rod 8, one end of the connecting rod 8 passes through the slider 9, a spiral groove 25 is provided on the connecting rod 8, and a guide block 26 is fixedly installed on the inner wall of the slider 9, one end of the guide block 26 extends into the interior of the spiral groove 25.

[0054] When the second motor 30 drives the rotating shaft 7 to rotate, the transmission gear 12 will contact the gear ring 17 inside the mounting bracket 1, thereby causing the transmission gear 12 to drive the connecting rod 8 to rotate. At this time, the rotation of the connecting rod 8 will also cause the spiral groove 25 to rotate. Through the setting of the guide block 26, the slider 9 and the adsorption block 10 will slide on the outer wall of the connecting rod 8. When the slider 9 drives the adsorption block 10 to slide in the direction of the rotating shaft 7, the adsorption block 10 can be shortened. Then the adsorption block 10 can be rotated into the interior of the mounting bracket 1 for storage.

[0055] like Figure 8 As shown, in a preferred embodiment of the present invention, a limiting ring groove 13 is formed inside the mounting bracket 1, and a limiting rod 24 is slidably installed inside the slider 9. One end of the limiting rod 24 extends into the interior of the adsorption block 10, and the other end extends into the interior of the limiting ring groove 13.

[0056] One end of the limiting rod 24 is fixedly inserted through the slider 9 and the adsorption block 10. Therefore, when the connecting rod 8 rotates, the cooperation between the limiting rod 24 and the limiting ring groove 13 can prevent the slider 9 from rotating under the kinetic energy of the connecting rod 8, thus ensuring the stability of the slider 9 driving the adsorption block 10 to slide.

[0057] like Figure 9 As shown, in a preferred embodiment of the present invention, a sliding block 28 is slidably mounted on the outer wall of the rotating block 14, and a connecting shaft 27 is fixedly mounted on one end of the connecting rod 8 near the sliding block 28. One end of the connecting shaft 27 extends into the interior of the sliding block 28, and the connecting shaft 27 and the sliding block 28 are connected by a torsion spring.

[0058] When the second motor 30 drives the rotating shaft 7 to rotate, the connecting rod 8 will rotate under the action of the transmission gear 12 and the gear ring 17, and at the same time drive the connecting shaft 27 to rotate, causing the torsion spring to deform and store elastic potential energy until the transmission gear 12 and the gear ring 17 are disengaged, at which point the torsion spring can release the elastic potential energy and drive the connecting shaft 27 to reset.

[0059] In a preferred embodiment of the present invention, a guide ring 15 is fixedly installed inside the mounting bracket 1, and a notch 16 is provided on the guide ring 15 for the sliding block 28 to enter.

[0060] The guide ring 15 effectively supports the sliding block 28. When the rotating shaft 7 drives the sliding block 28 and the connecting rod 8 to rotate directly above the notch 16, the adsorption block 10 on the connecting rod 8 is also directly above the mounting frame 4. At this time, through the notch 16, the sliding block 28 and the connecting rod 8 will slide downward into the notch 16 under the action of gravity. Therefore, the adsorption block 10 will also slide down above the mounting frame 4, allowing the suction cup 23 to fit against the mask template. At the same time, the transmission gear 12 separates from the gear ring 17, and under the action of the torsion spring, it will drive the connecting rod 8 to reset and rotate. With the cooperation of the guide block 26 and the spiral groove 25, the adsorption block... 10 will slide towards the end away from the rotating shaft 7 and slide to the top of the mounting frame 4. At this time, the first motor 18 is started to drive the sliding plate 20 to slide down. Through the separation of the air cylinder 22 and the piston rod 21, a negative pressure is generated inside the suction cup 23. When the sliding plate 20 slides down, it will also drive the suction cup 23 to slide down, further assisting the suction cup 23 in adsorbing the mask template. The air pump 29 is de-energized, releasing the adsorption port 5 from the mask template. Then, the rotating shaft 7 drives the sliding block 28 to continue to rotate. The sliding block 28 can drive the connecting rod 8 to slide up through the inclined surface of the notch 16. The rotating shaft 7 rotates it into the interior of the mounting frame 1 for storage.

[0061] When the mask needs to be reused, the adsorption block 10 that adsorbs the mask is rotated back to the top of the mounting frame 4 via the rotating shaft 7. At this time, the first motor 18 is reversed, and the sliding plate 20 is driven to slide upward inside the adsorption block 10 under the action of the threaded rod 19. Thus, the adsorption of the mask by the suction cup 23 is released, and the mask falls onto the mounting frame 4. By repeating this step, it can effectively help in the case of changing mask with the same cycle but different phases multiple times and in the case of measurement steps that need to be repeated multiple times, so as to minimize the time for changing the mask and improve the detection efficiency.

[0062] In a preferred embodiment of the present invention, the outer wall of the rotating block 14 is provided with a moving groove 11, and the sliding block 28 is fixedly installed with a moving block 6 at one end near the rotating block 14. The moving block 6 is slidably installed inside the moving groove 11.

[0063] By cooperating with the movable slot 11 and the movable block 6, the sliding trajectory of the sliding block 28 can be limited.

[0064] like Figure 10 As shown, a detection method for a photolithography illumination system, the method employing the detection device of the aforementioned photolithography illumination system, includes the following steps:

[0065] S1: By placing the mask template on the mounting frame 4, starting the air pump 29, and adsorbing the mask template through the set adsorption port 5, the pupil illumination detection is then performed.

[0066] S2: The second motor 30 drives the rotating shaft 7 to rotate, and the connecting rod 8 and the adsorption block 10 are rotated to the top of the mounting frame 4. Then, the first motor 18 drives the sliding plate 20 to rotate, and through the cooperation of the air cylinder 22 and the piston rod 21, the suction cup 23 adsorbs the mask template on the mounting frame 4. The second motor 30 rotates again to complete the storage of the mask template.

[0067] S3: The second motor 30 drives the rotating shaft 7 to rotate another connecting rod 8 above the mounting frame 4. Then, the first motor 18 rotates to make the sliding plate 20 slide upward. At this time, the suction cup 23 will release its adsorption on the mask, and the mask will fall onto the mounting frame 4, completing the replacement of the mask and continuing the pupil illumination detection.

[0068] Working principle: The second motor 30 drives the rotating shaft 7 to rotate one of the connecting rods 8 and the adsorption block 10 to the top of the mounting frame 4. Then, the first motor 18 drives the sliding plate 20 to slide downward, causing the piston rod 21 to stretch inside the air cylinder 22. At this time, the mask template can be adsorbed by the suction cup 23, and then rotated into the mounting frame 1 by the rotating shaft 7. When the mask template needs to be reused, the adsorption block 10 adsorbing the mask template is rotated back to the top of the mounting frame 4 by the rotating shaft 7. At this time, the first motor 18 is reversed, and the sliding plate 20 is driven to slide upward inside the adsorption block 10 by the threaded rod 19. This releases the adsorption of the mask template by the suction cup 23, allowing the mask template to fall onto the mounting frame 4. By repeating this step, it can effectively help with multiple replacements of mask templates with the same cycle and different phases, as well as multiple and repeated measurement steps, minimizing the time for mask template replacement and improving detection efficiency.

[0069] When the rotating shaft 7 drives the sliding block 28 and the connecting rod 8 to rotate directly above the notch 16, the sliding block 28 and the connecting rod 8 will slide downward into the notch 16 under the action of gravity. Therefore, the adsorption block 10 will also slide down above the mounting frame 4, which can make the suction cup 23 fit with the mask template. At the same time, the transmission gear 12 and the gear ring 17 separate, and under the action of the torsion spring, the connecting rod 8 will be driven to reset and rotate. With the cooperation of the guide block 26 and the spiral groove 25, the adsorption block 10 will slide towards the end away from the rotating shaft 7 and slide to the top of the mounting frame 4. At this time, the first motor 18 is started to drive the sliding plate 20 to slide downward. Through the separation of the air cylinder 22 and the piston rod 21, a negative pressure is generated inside the suction cup 23. When the sliding plate 20 slides down, it will also drive the suction cup 23 to slide down, further assisting the suction cup 23 in adsorbing the mask template and ensuring the stability of the adsorption.

[0070] The terms "front," "back," "left," "right," "top," and "bottom" all refer to the figures in the accompanying drawings. Figure 1Based on the perspective of the observer, the side of the device facing the observer is defined as the front, the left side of the observer is defined as the left, and so on.

[0071] In the description of this invention, it should be understood that the terms "center", "longitudinal", "lateral", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limiting the scope of protection of this invention.

[0072] The foregoing has shown and described the basic principles, main features, and advantages of the present invention. Those skilled in the art should understand that the present invention is not limited to the above embodiments. The embodiments and descriptions in the specification are merely illustrative of the principles of the invention. Various changes and modifications can be made to the invention without departing from its spirit and scope, and all such changes and modifications fall within the scope of the present invention as claimed. The scope of protection of the present invention is defined by the appended claims and their equivalents.

Claims

1. A detection apparatus of a photolithography illumination system, which requires multiple replacement of mask plates having the same period and different phases, characterized in that, It includes mounting frame (1), objective lens (2), for placing silicon wafer bearing table (3) and for placing mask template holder (4); The mounting frame (1) is an open-top rectangular hollow frame, one of the two short edges of the open top is provided with an air pump (29), the output end of the air pump (29) is communicated with the inner cavity of the holder (4) through the air pipe, and the upper surface of the holder (4) is provided with an adsorption port (5); The other side of the two short edges of the open top of the mounting frame (1) is fixedly installed with a second motor (30), the output shaft of the second motor (30) is fixedly connected with a rotating shaft (7), the bottom end of the rotating shaft (7) is fixedly installed with a rotating block (14), the rotating block (14) is slidably installed with a connecting rod (8), the connecting rod (8) is slidably installed with an adsorption block (10), a plurality of connecting rods (8) and adsorption blocks (10) are arranged, one connecting rod (8) and one adsorption block (10) form a group, and a plurality of groups are arranged in annular arrangement on the outer wall of the rotating block (14), and the plurality of adsorption blocks (10) are used for adsorbing a plurality of mask templates; The inside of the adsorption block (10) is provided with an adsorption assembly for adsorbing the mask template on the holder (4); The adsorption assembly comprises a sliding plate (20), an air cylinder (22), a piston rod (21) and a suction cup (23), the sliding plate (20) is slidably installed in the inside of the adsorption block (10), the air cylinder (22) is hollowly arranged and fixedly installed on the sliding plate (20), one end of the piston rod (21) extends out of the outer wall of the air cylinder (22) and is fixedly connected with the inside of the adsorption block (10), the other end is slidably connected with the inside of the air cylinder (22), and the suction cup (23) is fixedly installed on one end of the air cylinder (22). The top end of the adsorption block (10) is fixedly installed with a first motor (18), the output shaft of the first motor (18) is fixedly installed with a threaded rod (19), one end of the threaded rod (19) penetrates through the sliding plate (20) and is connected with the sliding plate (20) through threads.

2. A detection device for a photolithography illumination system according to claim 1, characterized in that The end of the connecting rod (8) close to the rotating block (14) is fixedly installed with a transmission gear (12), the inside of the mounting frame (1) is fixedly installed with a gear ring (17), and the transmission gear (12) is engaged with the gear ring (17).

3. A detection device for a photolithography illumination system according to claim 2, characterized in that The end of the adsorption block (10) close to the connecting rod (8) is fixedly installed with a sliding block (9), one end of the connecting rod (8) penetrates through the sliding block (9), the connecting rod (8) is provided with a spiral groove (25), the inner wall of the sliding block (9) is fixedly installed with a guide block (26), and one end of the guide block (26) extends into the inside of the spiral groove (25).

4. A detection device for a photolithography illumination system according to claim 3, characterized in that The inside of the mounting frame (1) is provided with a limiting ring groove (13), the inside of the sliding block (9) is slidably installed with a limiting rod (24), one end of the limiting rod (24) extends into the inside of the adsorption block (10), and the other end extends into the inside of the limiting ring groove (13).

5. A detection device for a photolithography illumination system according to claim 4, characterized in that The outer wall of the rotating block (14) is slidably provided with a sliding block (28), one end of the connecting rod (8) is fixedly provided with a connecting shaft (27) close to the sliding block (28), one end of the connecting shaft (27) extends into the sliding block (28), and the connecting shaft (27) is connected with the sliding block (28) through a torsion spring.

6. A detection device for a photolithography illumination system according to claim 5, characterized in that The inside of the mounting frame (1) is fixedly provided with a guide ring (15), and the guide ring (15) is provided with a notch (16) for the sliding block (28) to enter.

7. A detection device for a photolithography illumination system according to claim 6, characterized in that The outer wall of the rotating block (14) is provided with a moving groove (11), and one end of the sliding block (28) close to the rotating block (14) is fixedly provided with a moving block (6) which is slidably arranged in the moving groove (11).

8. A method of detecting a lithography illumination system, the method using a detection device for a lithography illumination system according to any one of claims 1 to 7, characterized in that The method comprises the following steps: S1: Place the mask plate on the mounting frame (4), start the air pump (29), and adsorb the mask plate through the set adsorption port (5), then perform pupil illumination detection; S2: The second motor (30) drives the rotating shaft (7) to rotate, and the connecting rod (8) and the adsorption block (10) are rotated to the upper side of the mounting frame (4), the sliding plate (20) is driven to rotate through the first motor (18), and the suction cup (23) is adsorbed to the mask plate on the mounting frame (4) through the cooperation of the air cylinder (22) and the piston rod (21), the mask plate is adsorbed again through the rotation of the second motor (30), and the storage of the mask plate is completed; S3: The second motor (30) drives the rotating shaft (7) to rotate the other connecting rod (8) to the upper side of the mounting frame (4), the sliding plate (20) is slid upward through the rotation of the first motor (18), the suction cup (23) releases the adsorption of the mask plate, the mask plate falls on the mounting frame (4), the replacement of the mask plate is completed, and the pupil illumination detection is continued.

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