Blue film core stripping linkage synchronization method, device, equipment and storage medium

Abstract

The present invention relates to a blue film core stripping linkage synchronization method, device, equipment and storage medium, wherein the method is to obtain the ejection height of the ejector, the ejection target position, the ejection force and the suction nozzle target position based on various chip attributes and blue film characteristics; obtain the initial position coordinates of the ejector and the suction nozzle by collecting image information; plan the moving route and time driving sequence within the same predetermined time, drive the ejector and the suction nozzle to move, when it is monitored that the ejector moves to the ejector target position, the current position of the suction nozzle deviates from the planned position in the suction nozzle moving route, and adjust the speed curve of the suction nozzle according to the size of the suction nozzle deviation; when it is detected that the ejector reaches the ejection height and the suction nozzle moves to the suction nozzle target position, send a suction instruction operation to the vacuum generator, adjust the suction force until the chip is separated from the blue film, so as to achieve accurate, efficient, linkage and synchronous operation of the blue film core stripping process, and improve the overall production efficiency of chip core stripping.

Description

Technical Field

[0001] The present invention relates to the field of semiconductor manufacturing technology, and in particular to a blue film stripping linkage synchronization method, device, equipment and storage medium. Background Art

[0002] As electronic products continue to develop towards miniaturization and high performance, the size of chips is getting smaller and smaller, and the precision requirements are getting higher and higher. The traditional chip removal method can hardly meet the increasingly stringent production needs.

[0003] At present, although some core removal methods also consider the relevant characteristics of the chip and the blue film to determine the placement position, strength and other parameters of the ejector pin, they are often based on experience or simple theoretical estimates, which may easily lead to the ejector pin failing to provide just the right force when acting on the bottom of the chip, making it difficult for the chip to smoothly detach from the blue film, and may even cause chip damage due to uneven force. Moreover, many traditional core removal processes do not fully consider the coordinated movement of the ejector pin and the suction nozzle when planning the movement route of the ejector pin and the suction nozzle, resulting in the inability to achieve precise linkage synchronization between the ejector pin and the suction nozzle during the actual movement process. The two often move out of sync, such as the ejector pin over-lifting the chip before the suction nozzle reaches the optimal suction position, or the ejector pin is not lifted high enough and the suction nozzle is already in place but cannot effectively suck the chip. These problems greatly affect the success rate and efficiency of the core removal operation. Summary of the invention

[0004] The main purpose of the present invention is to provide a blue film core stripping linkage synchronization method, device, equipment and storage medium to achieve accurate, efficient, linkage and synchronization operation of the blue film core stripping process, thereby improving the chip stripping success rate, yield rate and overall production efficiency.

[0005] To achieve the above object, the present invention provides a blue film core stripping linkage synchronization method, comprising the following steps:

[0006] Based on the obtained chip properties and blue film characteristics; the ejection pin lifting height, ejection pin target position, ejection pin force and the best force distance point directly above the chip are obtained through a preset mechanical analysis model. The best force distance point directly above the chip is the nozzle target position;

[0007] The image information of the ejector pin and the nozzle is collected by the image sensor, and the image coordinate system is established through image recognition and processing technology to obtain the initial position coordinates of the ejector pin and the nozzle;

[0008] Based on the initial position coordinates of the ejector and the nozzle, the ejection height of the ejector, the target position of the ejector, the target position of the nozzle, and the motion parameters of the ejector and the nozzle, a motion planning algorithm is used to plan an ejector movement route and a nozzle movement route within the same predetermined time, wherein the movement route includes a movement direction and a movement speed;

[0009] Based on the movement routes of the ejector and the nozzle, the time driving sequence is planned by the time series analysis method, and the ejector and the nozzle are driven to move according to their respective movement routes. At the same time, the actual positions of the ejector and the nozzle are respectively monitored in real time by the displacement sensor. When the ejector is monitored to move to the ejector target position, the current position of the nozzle at the same time node is obtained;

[0010] If there is a deviation between the current position of the nozzle and the position of the same time node in the nozzle movement route, the speed curve of the nozzle is adjusted according to the size of the nozzle deviation through the motion planning algorithm based on time synchronization and the nozzle movement speed threshold, and the speed curve is adjusted in a uniform acceleration, uniform speed or uniform deceleration manner;

[0011] When the displacement sensor detects that the ejector pin reaches the ejector pin lifting height and the nozzle moves to the nozzle target position, a command to start suction is sent to the vacuum generator of the nozzle. At the same time, the suction force is adjusted according to the nozzle suction force feedback from the pressure sensor until the chip is separated from the blue film.

[0012] Furthermore, based on the obtained chip properties and blue film characteristics; the ejection pin lifting height, ejection pin target position, ejection pin force and the best force distance point directly above the chip are obtained through a preset mechanical analysis model, and the best force distance point directly above the chip is the nozzle target position step, including:

[0013] Collect various attributes of the chip, which include at least the size, weight, shape, layout and material of the chip, and obtain elastic parameters and adhesion parameters of the blue film used;

[0014] According to various properties of the chip, the suction force and the effective range of the nozzle are obtained;

[0015] Based on the collected chip and blue film data, the pre-trained mechanical analysis model is used to calculate the optimal ejector pin target position, ejector pin force, and ejector pin lifting height under the chip.

[0016] According to the ejection height of the ejector pin, the chip thickness property, the suction force and the range of action of the nozzle, the optimal force distance point directly above the chip is determined, and the optimal force distance point is the target position of the nozzle.

[0017] Furthermore, the step of collecting image information of the ejector and the nozzle by an image sensor, establishing an image coordinate system by image recognition and processing technology, and obtaining the initial position coordinates of the ejector and the nozzle includes:

[0018] The image sensor is used to collect images of the area where the ejector pin and the suction nozzle are located, and the collected images include image information of the ejector pin, the suction nozzle, and the surrounding environment of the ejector pin and the suction nozzle;

[0019] Preprocess the collected image information by graying, filtering, denoising, and enhancing contrast;

[0020] Perform feature extraction and recognition on the preprocessed image to determine the specific positions and key feature points of the ejector pin and the nozzle in the image, wherein the key feature points include the center position of the tip of the ejector pin and the center position of the suction port of the nozzle, and establish an image coordinate system based on a fixed point in the image as a coordinate origin;

[0021] Based on the established image coordinate system, the initial position coordinates of the ejector pin and the suction nozzle are obtained according to the specific positions of the ejector pin and the suction nozzle in the image and the key feature points.

[0022] Further, the step of planning the ejector movement route and the nozzle movement route within the same predetermined time using a motion planning algorithm based on the initial position coordinates of the ejector and the nozzle, the ejection height of the ejector, the ejection target position, the nozzle target position, and the motion parameters of the ejector and the nozzle, wherein the movement route includes a movement direction and a movement speed, comprises:

[0023] Based on the acquired data of the initial position coordinates of the ejector and the nozzle, the ejection height of the ejector, the target position of the ejector, and the target position of the nozzle, as well as the motion parameters of the maximum motion speed, acceleration limit, and deceleration limit of the ejector and the nozzle, the initial parameters of the moving direction, acceleration, and speed of the ejector and the nozzle in different time periods are determined by a motion planning algorithm;

[0024] According to the scheduled time of the ejector and the nozzle, the speed change curve of the initial parameters and the displacement distribution of each stage are adjusted, and the movement route of the ejector from the initial position to the ejector target position and then to the ejector lifting height and the nozzle from the initial position to the nozzle target position within the scheduled time is planned, and the movement route includes the movement direction and the movement speed corresponding to each moment.

[0025] Furthermore, the step of planning a time driving sequence by a time series analysis method based on the respective moving routes of the ejector and the nozzle, driving the ejector and the nozzle to move according to their respective moving routes, and monitoring the actual positions of the ejector and the nozzle in real time by a displacement sensor respectively, and obtaining the current position of the nozzle at the same time node when the ejector is monitored to move to the ejector target position, includes:

[0026] The movement process of the ejector and the suction nozzle is clarified through the movement routes of the ejector and the suction nozzle within the same predetermined time, wherein the movement process includes the ejector moving in a straight line upward from the ejector initial position to the ejector target position and then to the ejection height of the ejector, and the suction nozzle moving in a horizontal direction from the suction nozzle initial position to the corresponding vertical height position of the suction nozzle target position and then moving downward to the suction nozzle target position, and the corresponding movement speeds of the ejector and the suction nozzle at each stage are determined;

[0027] Construct a time series at fixed time intervals, decompose the movement process of the ejector and nozzle into various time nodes, and obtain the time-driven sequence of the movement routes of the ejector and nozzle;

[0028] Based on the planned time driving sequence, a corresponding control instruction sequence is generated, wherein the control instruction sequence includes specific operation requirements for the ejector and nozzle drive mechanisms at each time node;

[0029] According to the corresponding control instructions, the ejector and the suction nozzle are driven to move along their respective moving routes;

[0030] During the movement of the ejector pin and the nozzle, the actual position information of the ejector pin and the nozzle is monitored in real time through the displacement sensor;

[0031] When the ejector pin reaches the ejector pin target position at the same time node, the current position information of the nozzle is obtained from the actual position data of the nozzle fed back by the displacement sensor.

[0032] Furthermore, if there is a deviation between the current position of the nozzle and the position of the same time node in the nozzle movement route, the speed curve of the nozzle is adjusted according to the size of the nozzle deviation through the motion planning algorithm based on time synchronization and the nozzle movement speed threshold, and the speed curve is adjusted in a uniform acceleration or uniform speed or uniform deceleration step, including:

[0033] The current position information of the nozzle fed back by the displacement sensor in real time is compared with the planned position corresponding to the same time node in the nozzle movement route pre-planned by the motion planning algorithm. If there is a difference in the coordinate values ​​of the two after the comparison, and the difference exceeds the allowable error range, it is determined that there is a deviation between the current position of the nozzle and the planned position in the movement route, and the deviation of the coordinate difference between the current position of the nozzle and the planned position is obtained by calculation;

[0034] Based on the principle of time synchronization and the condition of not exceeding the movement speed threshold of the suction nozzle, the speed curve of the suction nozzle is adjusted. The movement route of the suction nozzle is from the current position of the suction nozzle to the target position of the suction nozzle, and the movement of the suction nozzle ends at the same time node when the ejector reaches the ejector lifting height. The adjustment method of the speed curve of the suction nozzle is uniform acceleration adjustment, uniform deceleration adjustment or uniform speed adjustment.

[0035] Further, when the displacement sensor detects that the ejector pin reaches the ejector pin lifting height and the suction nozzle moves to the suction nozzle target position, a command operation to start suction is sent to the vacuum generator of the suction nozzle, and at the same time, the suction force is adjusted according to the suction force of the suction nozzle fed back by the pressure sensor until the chip is separated from the blue film, the step includes:

[0036] Based on the feedback of the displacement sensor on the real-time monitoring of the positions of the ejector and the suction nozzle, when the ejector reaches the ejector lifting height and the suction nozzle reaches the target position, a command operation to start suction is sent to the vacuum generator of the suction nozzle;

[0037] Adjust the vacuum degree of the nozzle, detect the suction force of the nozzle through the pressure sensor on the nozzle, and dynamically adjust the suction force until the chip is completely separated from the blue film.

[0038] The present invention also provides a blue film core-removing linkage synchronization device, comprising:

[0039] The information acquisition module is used to obtain the ejection pin lifting height, ejection pin target position, ejection pin force and the optimal force distance point directly above the chip based on the acquired chip properties and blue film characteristics through a preset mechanical analysis model, and the optimal force distance point directly above the chip is the nozzle target position;

[0040] A coordinate establishment module is used to collect image information of the ejector pin and the nozzle through an image sensor, establish an image coordinate system through image recognition and processing technology, and obtain the initial position coordinates of the ejector pin and the nozzle;

[0041] An information planning module, used for planning the moving route of the ejector and the nozzle within the same predetermined time by using a motion planning algorithm based on the initial position coordinates of the ejector and the nozzle, the ejection height of the ejector, the target position of the ejector, the target position of the nozzle, and the motion parameters of the ejector and the nozzle;

[0042] A data execution module is used to plan a time driving sequence based on the movement routes of the ejector and the nozzle by a time series analysis method, drive the ejector and the nozzle to move according to their respective movement routes, and monitor the actual positions of the ejector and the nozzle in real time by a displacement sensor. When the ejector is detected to move to the ejector target position, the current position of the nozzle at the same time node is obtained;

[0043] A data adjustment module, for adjusting the speed curve of the nozzle based on time synchronization and the nozzle movement speed threshold through a motion planning algorithm according to the size of the nozzle deviation when there is a deviation between the current position of the nozzle and the position of the same time node in the nozzle movement route, wherein the speed curve is adjusted in a uniform acceleration, uniform speed or uniform deceleration manner;

[0044] The information detection module is used to send a command operation to the vacuum generator of the suction nozzle to start suction when the displacement sensor detects that the ejection pin reaches the ejection pin lifting height and the suction nozzle moves to the suction nozzle target position, and at the same time adjust the suction force according to the suction force of the suction nozzle fed back by the pressure sensor until the chip is separated from the blue film.

[0045] The present invention also provides a computer device, including a memory and a processor, wherein the memory stores a computer program, and the processor implements the steps of the above-mentioned blue film core-off linkage synchronization method when executing the computer program.

[0046] The present invention also provides a computer-readable storage medium on which a computer program is stored. When the computer program is executed by a processor, the steps of the above-mentioned blue film core-off linkage synchronization method are implemented.

[0047] The blue film core stripping linkage synchronization method, device, equipment and storage medium provided by the present invention have the following beneficial effects:

[0048] (1) By obtaining various chip properties (such as size, weight, shape, layout, material, etc.) and blue film characteristics (elastic parameters, adhesion parameters), the preset mechanical analysis model is used to obtain the ejector pin lift height, ejector pin target position, ejector pin force, and nozzle target position (the optimal force-bearing distance point directly above the chip). This avoids the uncertainty caused by previous experience or rough estimates, allowing the ejector pin and nozzle to accurately act at the appropriate position and apply appropriate force during the core removal process, effectively reducing the uneven force and damage to the chip caused by inaccurate operation position or force, greatly improving the accuracy of the core removal operation;

[0049] (2) Based on the initial position coordinates, relevant target positions and motion parameters of the ejector and nozzle, the motion planning algorithm is used to plan the ejector movement routes and nozzle movement routes within the same predetermined time, clarify the movement direction and movement speed, and plan the time drive sequence through the time series analysis method to drive the ejector and nozzle to move according to their respective movement routes, and monitor their positions in real time during the process. Through a complete planning, driving and monitoring mechanism, the ejector and nozzle can work closely and coordinately during the entire core removal process, and achieve linkage synchronization in strict accordance with the planned rhythm, avoiding the problem of uncoordinated movement of the two that affects the chip removal effect, and improving the continuity and synchronization of the core removal process;

[0050] (3) During the movement of the ejector and the nozzle, when the ejector is monitored to move to the ejector target position, the current position of the nozzle at the same time node is obtained. If there is a deviation between the current position of the nozzle and the position at the same time node in the nozzle movement route, the speed curve of the nozzle is adjusted to uniform acceleration, uniform speed or uniform deceleration based on the motion planning algorithm based on time synchronization and the nozzle movement speed threshold according to the size of the nozzle deviation, to ensure that the ejector and the nozzle can still accurately reach their respective target positions within the specified time, continue to ensure the smooth progress of the core removal operation, and improve the stability and success rate of the entire process. BRIEF DESCRIPTION OF THE DRAWINGS

[0051] Figure 1 It is a schematic flow chart of a blue film core stripping linkage synchronization method in one embodiment of the present invention;

[0052] Figure 2 It is a structural block diagram of a blue film core-removing linkage synchronization device in one embodiment of the present invention;

[0053] Figure 3 It is a schematic block diagram of the structure of a computer device according to an embodiment of the present invention.

[0054] The realization of the purpose, functional features and advantages of the present invention will be further explained in conjunction with embodiments and with reference to the accompanying drawings. DETAILED DESCRIPTION

[0055] In order to make the purpose, technical solution and advantages of the present invention more clearly understood, the present invention is further described in detail below in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain the present invention and are not intended to limit the present invention.

[0056] Reference Figure 1 , is a schematic flow chart of a blue film core-off linkage synchronization method proposed by the present invention, comprising the following steps:

[0057] S1, based on the obtained chip properties and blue film characteristics; the ejection pin lifting height, ejection pin target position, ejection pin force and the optimal force distance point directly above the chip are obtained through a preset mechanical analysis model, and the optimal force distance point directly above the chip is the nozzle target position;

[0058] S2, collecting image information of the ejector pin and the nozzle through an image sensor, establishing an image coordinate system through image recognition and processing technology, and obtaining the initial position coordinates of the ejector pin and the nozzle;

[0059] S3, based on the initial position coordinates of the ejector and the nozzle, the ejection height of the ejector, the target position of the ejector, the target position of the nozzle, and the motion parameters of the ejector and the nozzle, planning the ejector movement route and the nozzle movement route within the same predetermined time by using a motion planning algorithm, wherein the movement route includes a movement direction and a movement speed;

[0060] S4, based on the movement routes of the ejector and the nozzle, a time driving sequence is planned by a time series analysis method, the ejector and the nozzle are driven to move according to their respective movement routes, and the actual positions of the ejector and the nozzle are respectively monitored in real time by a displacement sensor. When the ejector is monitored to move to the ejector target position, the current position of the nozzle at the same time node is obtained;

[0061] S5, if there is a deviation between the current position of the nozzle and the position of the same time node in the nozzle movement route, then according to the size of the nozzle deviation, the speed curve of the nozzle is adjusted based on time synchronization and the nozzle movement speed threshold through the motion planning algorithm, and the speed curve is adjusted in a uniform acceleration, uniform speed or uniform deceleration manner;

[0062] S6, when the displacement sensor detects that the ejector pin reaches the ejector pin lifting height and the suction nozzle moves to the suction nozzle target position, a command to start suction is sent to the vacuum generator of the suction nozzle, and the suction force is adjusted according to the suction force of the suction nozzle fed back by the pressure sensor until the chip is separated from the blue film.

[0063] In one embodiment, based on the obtained chip properties and blue film characteristics; obtaining the ejection pin lifting height, ejection pin target position, ejection pin force and the optimal force distance point directly above the chip through a preset mechanical analysis model, wherein the optimal force distance point directly above the chip is the nozzle target position step S1, includes:

[0064] S11, collecting various attributes of the chip, wherein the various attributes at least include the size, weight, shape, layout and material of the chip, and obtaining elastic parameters and adhesion parameters of the blue film used;

[0065] S12, obtaining the suction force and the effective range of the nozzle according to various properties of the chip;

[0066] S13, according to the collected data information of the chip and the blue film, the optimal ejector target position, ejector force and ejector lifting height of the ejector under the chip are calculated by a pre-trained mechanical analysis model;

[0067] S14, determining the optimal force distance point directly above the chip according to the ejection height of the ejector pin, the chip thickness attribute, the suction force of the nozzle and the range of action, wherein the optimal force distance point is the nozzle target position.

[0068] As described in the above steps S11-S14, the various attribute information of the chip is collected comprehensively and meticulously, including the chip size (length, width, thickness), weight, shape (square, round or irregular shape), layout arrangement, and material characteristics. At the same time, the elastic parameters and adhesion parameters of the blue film used are also obtained. Based on the collected chip attributes and blue film data information, the suction force and range of the nozzle are deduced, and then the mechanical analysis model is used to find the best placement position of the ejector under the chip. For example, for a chip with symmetrical structure, the position below its geometric center is a suitable ejector placement position to ensure that the chip is relatively uniformly stressed when the ejector is lifted; but for chips with special layouts or irregular shapes, the force balance of the chip during the lifting process is analyzed based on more complex mechanical principles to find the best placement point that can make the chip smoothly detach from the blue film and will not be damaged due to excessive local force. This point is the ejector target position. It is necessary to comprehensively consider multiple factors such as the weight of the chip, the adhesion of the blue film, and the ejection height of the ejector to accurately calculate the ejector force. If the ejector force is too weak and cannot overcome the adhesion of the blue film to the chip and the chip's own gravity, the chip cannot be lifted up. Similarly, based on the mechanical analysis model, combined with relevant parameters such as the thickness of the chip and the elasticity of the blue film, a reasonable ejector pin lifting height is determined, which requires both ensuring that the chip can be fully separated from the blue film to create good conditions for the nozzle to suck, and not being too high to exceed the reasonable operating range. Finally, based on the determined ejector pin lifting height, chip thickness properties, nozzle suction force and range of action, the optimal force distance point directly above the chip is determined, and this point is the nozzle target position.

[0069] In one embodiment, the step S2 of collecting image information of the ejector and the nozzle by an image sensor, establishing an image coordinate system by image recognition and processing technology, and obtaining the initial position coordinates of the ejector and the nozzle includes:

[0070] S21, collecting images of the area where the ejector pin and the suction nozzle are located by using an image sensor, wherein the collected images include image information of the ejector pin, the suction nozzle, and the surrounding environment of the ejector pin and the suction nozzle;

[0071] S22, preprocessing the collected image information by graying, filtering, denoising, and enhancing contrast;

[0072] S23, extracting and identifying features of the preprocessed image, determining specific positions and key feature points of the ejector pin and the nozzle in the image, wherein the key feature points include the center position of the tip of the ejector pin and the center position of the suction port of the nozzle, and establishing an image coordinate system based on a fixed point in the image as a coordinate origin;

[0073] S24, based on the established image coordinate system, according to the specific positions of the ejector pin and the suction nozzle in the image and the key feature points, obtaining the initial position coordinates of the ejector pin and the suction nozzle.

[0074] As described in the above step S21, the image sensor is used to obtain image information of the ejector pin, the suction nozzle and their surrounding environment. The reason for covering the surrounding environment is to more accurately identify and locate the specific positions of the ejector pin and the suction nozzle in the entire scene in the subsequent process, so as to avoid misjudgment due to focusing only on the target object itself. In the complex internal environment of the core stripping equipment of this embodiment, a complete image of other components, brackets and other structures around the ejector pin and the suction nozzle is collected to provide a more comprehensive reference for subsequent processing.

[0075] As described in the above steps S22-S24, after the original image is collected, grayscale, filtering, denoising and contrast enhancement operations are performed to improve the image quality in preparation for further analysis. For the pre-processed image, key feature extraction and recognition work is performed, with the center position of the tip of the ejector pin and the center position of the suction port of the nozzle as the key feature points. They are also important points that need to be clarified when planning the movement path of the nozzle and interacting with the chip. Image algorithms (such as algorithms based on edge detection, template matching, etc.) and pattern recognition methods are used to determine the specific positions of the ejector pin and the nozzle in the image. A fixed point in the image (the upper left corner, lower right corner of the image, or a specific, easily identifiable and fixed mark point, etc.) is selected as the coordinate origin to establish an image coordinate system. Combined with the previously identified center position of the tip of the ejector pin and the center position of the suction port of the nozzle, the initial position coordinates of the ejector pin and the nozzle are accurately obtained. For example, the center position of the tip of the ejector pin is expressed as (x 1 ,y 1 ), the center coordinate of the suction port of the nozzle is expressed as (x 2 ,y 2 ), which is important basic data for subsequent planning of their movement routes and realization of precise core-removing operations, and provides a position reference basis for the subsequent steps of the entire blue film core-removing linkage synchronization method.

[0076] In one embodiment, the step S3 of planning the ejector movement route and the nozzle movement route within the same predetermined time using a motion planning algorithm based on the initial position coordinates of the ejector and the nozzle, the ejection height of the ejector, the ejection target position, the nozzle target position, and the motion parameters of the ejector and the nozzle, wherein the movement route includes a movement direction and a movement speed, comprises:

[0077] S31, based on the acquired data of the initial position coordinates of the ejector and the nozzle, the ejection height of the ejector, the target position of the ejector, the target position of the nozzle, and the motion parameters of the maximum motion speed, acceleration limit and deceleration limit of the ejector and the nozzle, determine the initial parameters of the moving direction, acceleration and speed of the ejector and the nozzle in different time periods through a motion planning algorithm;

[0078] S32, according to the scheduled time of the ejector and the suction nozzle, adjust the speed change curve of the initial parameters and the displacement distribution of each stage, and plan the movement route of the ejector from the initial position to the ejector target position and then to the ejector lifting height, and the suction nozzle from the initial position to the suction nozzle target position within the scheduled time, and the movement route includes the movement direction and the movement speed corresponding to each moment.

[0079] As described in step S31 above, according to the initial position coordinates of the ejector and nozzle obtained in steps S1 and S2, the ejector lifting height, the ejector target position, the nozzle target position data, as well as the maximum movement speed of the ejector and nozzle (limiting the fastest distance that can be moved per unit time during the movement process to avoid equipment damage due to excessive speed or chip damage due to excessive instantaneous force), acceleration limit (specifying the upper limit of the speed increase to make the movement process of the ejector and nozzle more stable and controllable) and deceleration limit motion parameters. Use the motion planning algorithm to determine the initial parameters of the movement direction, acceleration, and speed of the ejector and nozzle in different time periods. As described in step S32 above, the scheduled time for the ejector and the suction nozzle is an important constraint in the entire planning process, which stipulates the time allowed from the initial state to the completion of each target, that is, the time allowed for the ejector to reach the ejector target position from the initial position and then to the ejector lifting height, and the suction nozzle to reach the suction nozzle target position from the initial position. This scheduled time is set by comprehensively considering multiple factors such as production efficiency, equipment operation coordination, and overall requirements for chip core removal operations. All motion planning must be completed within this time frame. Based on this scheduled time, the speed change curve of the previously determined initial parameters and the displacement distribution of each stage are adjusted and optimized. The motion planning algorithm will reasonably arrange the speed change, movement direction change, and corresponding displacement of the ejector and the suction nozzle at each moment according to the scheduled time. This moving route covers the moving direction and corresponding moving speed of the ejector and the suction nozzle at each moment in detail, ensuring that the ejector and the suction nozzle accurately reach their respective target positions from the initial position within the same scheduled time, and realizing the coordinated cooperation and precise linkage between the two during the entire core removal process.

[0080] In one embodiment, the time driving sequence is planned by a time series analysis method based on the movement routes of the ejector and the nozzle, the ejector and the nozzle are driven to move according to their respective movement routes, and the actual positions of the ejector and the nozzle are respectively monitored in real time by a displacement sensor. When the ejector is monitored to move to the ejector target position, the step S4 of obtaining the current position of the nozzle at the same time node includes:

[0081] S41, clarifying the movement process of the ejector and the suction nozzle through the movement routes of the ejector and the suction nozzle within the same predetermined time, wherein the movement process includes the ejector moving in a straight line upward from the ejector initial position to the ejector target position and then to the ejection height of the ejector, and the suction nozzle moving in a horizontal direction from the suction nozzle initial position to a vertical height position corresponding to the suction nozzle target position and then moving downward to the suction nozzle target position, and determining the corresponding movement speeds of the ejector and the suction nozzle at each stage;

[0082] S42, constructing a time sequence according to a fixed time interval, decomposing the movement process of the ejector and the nozzle into various time nodes, and obtaining a time driving sequence of the movement routes of the ejector and the nozzle;

[0083] S43, generating a corresponding control instruction sequence based on the planned time drive sequence, wherein the control instruction sequence includes specific operation requirements for the ejector and nozzle drive mechanisms at each time node;

[0084] S44, driving the ejector pin and the suction nozzle to move along their respective moving routes according to the corresponding control instructions;

[0085] S45, during the movement of the ejector pin and the suction nozzle, the actual position information of the ejector pin and the suction nozzle is monitored in real time by the displacement sensor;

[0086] S46, when the ejector pin reaches the ejector pin target position at the same time node, the current position information of the nozzle is obtained from the actual position data of the nozzle fed back by the displacement sensor.

[0087] As described in the above steps S41-S46, the movement routes of the ejector and the suction nozzle are obtained through step S3. These movement routes specify in detail the movement directions of the ejector and the suction nozzle during the entire core stripping operation (such as the ejector first moves to the ejector target position and then moves vertically upward, the suction nozzle first moves horizontally and then vertically downward, etc.) and the corresponding movement speed at each moment (different time periods have different speed values). On this basis, the time series analysis method is used to plan the time drive sequence, and the entire core stripping process is disassembled into small time nodes according to fixed time intervals. The movement routes of the ejector and the suction nozzle are also refined to the specific states at each time node accordingly, guiding the ejector and the suction nozzle at what time to do what kind of movement, ensuring that they move in strict accordance with the established movement route in an orderly manner, and avoiding the situation where the movement sequence is chaotic and affects the core stripping operation. Based on the planned time drive sequence, the corresponding control instruction sequence is generated, and specific operation requirements are proposed for the ejector and suction nozzle drive mechanism at each time node. For example, at a certain time point, the ejector drive mechanism is driven by a control instruction to move the ejector a certain distance at a planned speed and direction, and at the same time, an instruction is issued to the nozzle drive mechanism to drive the nozzle to move at a corresponding speed and direction, thereby driving the ejector and the nozzle to move along their respective pre-planned moving routes, ensuring that the entire core removal process can proceed in an orderly manner, achieving the effect of linkage and synchronization between the two, and improving the accuracy and stability of the core removal operation. In the process of the ejector and the nozzle moving along the planned route, their actual position information is monitored in real time through the displacement sensor. When the displacement sensor detects that the ejector reaches the same time point as the ejector target position, the current position information of the nozzle is immediately obtained from the actual position data of the nozzle fed back by the displacement sensor.

[0088] In one embodiment, if there is a deviation between the current position of the nozzle and the position of the same time node in the nozzle movement route, the speed curve of the nozzle is adjusted according to the size of the nozzle deviation through a motion planning algorithm based on time synchronization and the nozzle movement speed threshold, and the speed curve is adjusted in a uniform acceleration or uniform speed or uniform deceleration adjustment step S5, including:

[0089] S51, comparing the current position information of the nozzle fed back by the displacement sensor in real time with the planned position corresponding to the same time node in the nozzle movement route pre-planned by the motion planning algorithm, and if there is a difference in the coordinate values ​​of the two after the comparison, and the difference exceeds the allowable error range, it is determined that there is a deviation between the current position of the nozzle and the planned position in the movement route, and the deviation size of the coordinate difference between the current position of the nozzle and the planned position is obtained by calculation;

[0090] S52, based on the principle of time synchronization and the condition of not exceeding the movement speed threshold of the suction nozzle, the speed curve of the suction nozzle is adjusted, the movement route of the suction nozzle is from the current position of the suction nozzle to the target position of the suction nozzle, and the movement of the suction nozzle ends at the same time node when the ejector reaches the ejection height of the ejector, and the adjustment method of the speed curve of the suction nozzle is uniform acceleration adjustment, uniform deceleration adjustment or uniform speed adjustment.

[0091] As described in the above steps S51-S52, the current position information of the nozzle fed back by the displacement sensor in real time is compared with the planned position corresponding to the same time node in the nozzle movement route pre-planned by the motion planning algorithm to check whether the nozzle has reached the position it should be at the corresponding time according to the established arrangement. When the comparison finds that there is a difference in the coordinate values ​​of the two, and this difference exceeds the allowable error range, it is determined that there is a deviation between the current position of the nozzle and the planned position in the movement route. Because it is almost impossible to achieve no position difference at all during the actual equipment operation and operation process, as long as the difference is within a reasonable range that does not affect the effect of the core stripping operation, it can be considered normal. When adjusting the nozzle speed curve, the entire core stripping operation is a coordinated process. The movement of the ejector and the nozzle needs to complete the corresponding actions and reach their respective target positions within the same time frame. While ensuring that the ejector reaches the ejection height, the nozzle must also accurately reach the nozzle target position to maintain the linkage synchronization state of the entire core stripping process. At the same time, the nozzle movement speed threshold must also be considered. This threshold limits the maximum speed, minimum speed, and speed change limit range that the nozzle can reach. Adjusting the nozzle speed curve based on this speed threshold can ensure that the adjusted speed is within a reasonable, safe and effective range, avoiding new problems caused by unreasonable speed adjustment. According to the size of the nozzle deviation, the speed curve of the nozzle is adjusted through the motion planning algorithm. If the current position of the nozzle lags behind the planned position (that is, the actual position is behind the position it should reach), and after comprehensively considering factors such as time synchronization and speed threshold, it is determined that the gap can be made up by appropriately speeding up the speed, and the speed curve is adjusted in a uniform acceleration manner. According to the nozzle deviation, based on time synchronization and the nozzle movement speed threshold, the nozzle speed curve can be adjusted flexibly by uniform acceleration, uniform speed or uniform deceleration. It can correct the position deviation problem of the nozzle during movement in real time, ensure that the nozzle and the ejector pin always maintain good linkage synchronization during the entire core removal process, improve the accuracy and success rate of the core removal operation, and ensure that the chip can be smoothly detached from the blue film.

[0092] In one embodiment, when the displacement sensor detects that the ejection pin reaches the ejection pin lifting height and the suction nozzle moves to the suction nozzle target position, a command operation to start suction is sent to the vacuum generator of the suction nozzle, and at the same time, the suction force is adjusted according to the suction force of the suction nozzle fed back by the pressure sensor until the chip is separated from the blue film, step S6 includes:

[0093] S61, based on the feedback of the displacement sensor on the real-time monitoring of the positions of the ejector and the suction nozzle, when the ejector reaches the ejector lifting height and the suction nozzle reaches the target position, a command operation to start suction is sent to the vacuum generator of the suction nozzle;

[0094] S62, adjust the vacuum degree of the suction nozzle, detect the suction force of the suction nozzle through the pressure sensor on the suction nozzle, and dynamically adjust the suction force until the chip is completely separated from the blue film.

[0095] As described in the above steps S61-S62, when the nozzle starts to suck the chip, the pressure sensor can detect the size of the suction force of the nozzle in real time and feed back these data. According to the suction force of the nozzle fed back by the pressure sensor, the suction force is dynamically adjusted. If the suction force value fed back by the pressure sensor shows that the current suction force is small and is not enough to overcome the adhesion between the chip and the blue film, resulting in the chip not being sucked up or only partially detached, then the suction force will be increased, such as by adjusting the relevant parameters of the vacuum generator (such as increasing the negative pressure intensity, etc.) to enhance the suction force of the nozzle on the chip, so that the chip can be further separated from the blue film; on the contrary, if it is detected that the suction force is too large, it may cause damage to the chip, or the chip has been separated from the blue film but the chip is over-adsorbed and other unstable conditions occur, the suction force will be appropriately reduced to ensure that the chip can be smoothly and completely separated from the blue film. This adjustment process will continue, and the suction force will be flexibly changed according to the data fed back by the pressure sensor in real time until the chip is completely separated from the blue film, achieving the ultimate goal of the entire core removal operation.

[0096] Reference Figure 2 , is a structural block diagram of a blue film core-removing linkage synchronization device in one embodiment of the present invention, comprising:

[0097] The information acquisition module is used to obtain the ejection pin lifting height, ejection pin target position, ejection pin force and the optimal force distance point directly above the chip based on the acquired chip properties and blue film characteristics through a preset mechanical analysis model, and the optimal force distance point directly above the chip is the nozzle target position;

[0098] A coordinate establishment module is used to collect image information of the ejector pin and the nozzle through an image sensor, establish an image coordinate system through image recognition and processing technology, and obtain the initial position coordinates of the ejector pin and the nozzle;

[0099] An information planning module, used for planning the moving route of the ejector and the nozzle within the same predetermined time by using a motion planning algorithm based on the initial position coordinates of the ejector and the nozzle, the ejection height of the ejector, the target position of the ejector, the target position of the nozzle, and the motion parameters of the ejector and the nozzle;

[0100] A data execution module is used to plan a time driving sequence based on the movement routes of the ejector and the nozzle by a time series analysis method, drive the ejector and the nozzle to move according to their respective movement routes, and monitor the actual positions of the ejector and the nozzle in real time by a displacement sensor. When the ejector is detected to move to the ejector target position, the current position of the nozzle at the same time node is obtained;

[0101] A data adjustment module, for adjusting the speed curve of the nozzle based on time synchronization and the nozzle movement speed threshold through a motion planning algorithm according to the size of the nozzle deviation when there is a deviation between the current position of the nozzle and the position of the same time node in the nozzle movement route, wherein the speed curve is adjusted in a uniform acceleration, uniform speed or uniform deceleration manner;

[0102] The information detection module is used to send a command operation to the vacuum generator of the suction nozzle to start suction when the displacement sensor detects that the ejection pin reaches the ejection pin lifting height and the suction nozzle moves to the suction nozzle target position, and at the same time adjust the suction force according to the suction force of the suction nozzle fed back by the pressure sensor until the chip is separated from the blue film.

[0103] For the specific implementation of each device in the above device example, please refer to the above method embodiment, which will not be repeated here.

[0104] Reference Figure 3 In an embodiment of the present invention, a computer device is also provided. The computer device may be a server, and its internal structure may be as follows: Figure 3 As shown. The computer device includes a processor, a memory, a display screen, an input device, a network interface and a database connected through a system bus. Among them, the processor designed by the computer is used to provide computing and control capabilities. The memory of the computer device includes a non-volatile storage medium and an internal memory. The non-volatile storage medium stores an operating system, a computer program and a database. The internal memory provides an environment for the operation of the operating system and the computer program in the non-volatile storage medium. The database of the computer device is used to store the corresponding data in this embodiment. The network interface of the computer device is used to communicate with an external terminal through a network connection. When the computer program is executed by the processor, the above method is implemented.

[0105] Those skilled in the art will understand that Figure 3The structure shown in the figure is merely a block diagram of a portion of the structure related to the solution of the present invention, and does not constitute a limitation on the computer device to which the solution of the present invention is applied.

[0106] An embodiment of the present invention further provides a computer-readable storage medium on which a computer program is stored, and when the computer program is executed by a processor, the above method is implemented. It can be understood that the computer-readable storage medium in this embodiment can be a volatile readable storage medium or a non-volatile readable storage medium.

[0107] In summary, based on the acquired chip properties and blue film characteristics; the ejection height of the ejector, the target position of the ejector, the ejection force and the optimal force distance point directly above the chip are obtained through a preset mechanical analysis model; the image information of the ejector and the nozzle is collected by an image sensor, and an image coordinate system is established through image recognition and processing technology to obtain the initial position coordinates of the ejector and the nozzle; based on the initial position coordinates of the ejector and the nozzle, the ejection height of the ejector, the target position of the ejector, the target position of the nozzle and the motion parameters of the ejector and the nozzle, a motion planning algorithm is used to plan the ejector movement route and the nozzle movement route within the same predetermined time; based on the respective movement routes of the ejector and the nozzle, a time series analysis method is used to plan the time driving sequence, and the ejector and the nozzle are driven to move according to their respective movement routes, and at the same time, displacement sensors are used to detect the movement of the ejector and the nozzle. The device monitors the actual positions of the ejector and the nozzle in real time respectively, and when it is detected that the ejector moves to the ejector target position, the current position of the nozzle at the same time node is obtained; if there is a deviation between the current position of the nozzle and the position at the same time node in the nozzle movement route, the speed curve of the nozzle is adjusted according to the size of the nozzle deviation through the motion planning algorithm based on time synchronization and the nozzle movement speed threshold; when the displacement sensor detects that the ejector reaches the ejector lifting height and the nozzle moves to the nozzle target position, a command to start suction is sent to the vacuum generator of the nozzle, and at the same time, the suction force is adjusted according to the nozzle suction force feedback from the pressure sensor until the chip is detached from the blue film, so as to realize accurate, efficient, linked and synchronous operation of the blue film core removal process, and improve the success rate, yield rate and overall production efficiency of chip core removal.

[0108] Those skilled in the art can understand that all or part of the processes in the above-mentioned embodiment methods can be completed by instructing the relevant hardware through a computer program, and the computer program can be stored in a non-volatile computer-readable storage medium. When the computer program is executed, it can include the processes of the embodiments of the above-mentioned methods. Among them, any reference to memory, storage, database or other media provided by the present invention and used in the embodiments may include non-volatile and / or volatile memory. Non-volatile memory may include read-only memory (ROM), programmable ROM (PROM), electrically programmable ROM (EPROM), electrically erasable programmable ROM (EEPROM) or flash memory. Volatile memory may include random access memory (RAM) or external cache memory. As an illustration and not limitation, RAM is available in a variety of forms, such as static RAM (SRAM), dynamic RAM (DRAM), synchronous DRAM (SDRAM), double-speed data rate SDRAM (SSRSDRAM), enhanced SDRAM (ESDRAM), synchronous link (Synchlink) DRAM (SLDRAM), memory bus (Rambus) direct RAM (RDRAM), direct memory bus dynamic RAM (DRDRAM), and memory bus dynamic RAM.

[0109] It should be noted that, in this article, the terms "include", "comprises" or any other variations thereof are intended to cover non-exclusive inclusion, so that a process, device, article or method including a series of elements includes not only those elements, but also includes other elements not explicitly listed, or also includes elements inherent to such process, device, article or method. In the absence of further restrictions, an element defined by the sentence "includes a ..." does not exclude the presence of other identical elements in the process, device, article or method including the element.

[0110] The above description is only a preferred embodiment of the present invention, and does not limit the patent scope of the present invention. Any equivalent structure or equivalent process transformation made by using the contents of the present invention specification and drawings, or directly or indirectly applied in other related technical fields, are also included in the patent protection scope of the present invention.

Claims

1. A blue film core stripping linkage synchronization method, characterized in that: The following steps are involved: Based on the obtained chip properties and blue film characteristics; the ejection pin lifting height, ejection pin target position, ejection pin force and the best force distance point directly above the chip are obtained through a preset mechanical analysis model. The best force distance point directly above the chip is the nozzle target position; The image information of the ejector pin and the nozzle is collected by the image sensor, and the image coordinate system is established through image recognition and processing technology to obtain the initial position coordinates of the ejector pin and the nozzle; Based on the initial position coordinates of the ejector and the nozzle, the ejection height of the ejector, the target position of the ejector, the target position of the nozzle, and the motion parameters of the ejector and the nozzle, a motion planning algorithm is used to plan an ejector movement route and a nozzle movement route within the same predetermined time, wherein the movement route includes a movement direction and a movement speed; Based on the movement routes of the ejector and the nozzle, the time driving sequence is planned by the time series analysis method, and the ejector and the nozzle are driven to move according to their respective movement routes. At the same time, the actual positions of the ejector and the nozzle are respectively monitored in real time by the displacement sensor. When the ejector is monitored to move to the ejector target position, the current position of the nozzle at the same time node is obtained; If there is a deviation between the current position of the nozzle and the position of the same time node in the nozzle movement route, the speed curve of the nozzle is adjusted according to the size of the nozzle deviation through the motion planning algorithm based on time synchronization and the nozzle movement speed threshold, and the speed curve is adjusted in a uniform acceleration, uniform speed or uniform deceleration manner; When the displacement sensor detects that the ejector pin reaches the ejector pin lifting height and the nozzle moves to the nozzle target position, a command to start suction is sent to the vacuum generator of the nozzle. At the same time, the suction force is adjusted according to the nozzle suction force feedback from the pressure sensor until the chip is separated from the blue film.

2. The blue film core removal linkage synchronization method according to claim 1 is characterized in that: The step of obtaining the ejector pin lifting height, ejector pin target position, ejector pin force and the optimal force distance point directly above the chip based on the acquired chip properties and blue film characteristics through a preset mechanical analysis model, wherein the optimal force distance point directly above the chip is the nozzle target position, includes: Collect various attributes of the chip, which include at least the size, weight, shape, layout and material of the chip, and obtain elastic parameters and adhesion parameters of the blue film used; According to various properties of the chip, the suction force and the effective range of the nozzle are obtained; Based on the collected chip and blue film data, the pre-trained mechanical analysis model is used to calculate the optimal ejector pin target position, ejector pin force, and ejector pin lifting height under the chip. According to the ejection height of the ejector pin, the chip thickness property, the suction force and the range of action of the nozzle, the optimal force distance point directly above the chip is determined, and the optimal force distance point is the target position of the nozzle.

3. The blue film core removal linkage synchronization method according to claim 1 is characterized in that: The step of collecting image information of the ejector and the nozzle by an image sensor, establishing an image coordinate system by image recognition and processing technology, and obtaining the initial position coordinates of the ejector and the nozzle includes: The image sensor is used to collect images of the area where the ejector pin and the suction nozzle are located, and the collected images include image information of the ejector pin, the suction nozzle, and the surrounding environment of the ejector pin and the suction nozzle; Preprocess the collected image information by graying, filtering, denoising, and enhancing contrast; Perform feature extraction and recognition on the preprocessed image to determine the specific positions and key feature points of the ejector pin and the nozzle in the image, wherein the key feature points include the center position of the tip of the ejector pin and the center position of the suction port of the nozzle, and establish an image coordinate system based on a fixed point in the image as a coordinate origin; Based on the established image coordinate system, the initial position coordinates of the ejector pin and the suction nozzle are obtained according to the specific positions of the ejector pin and the suction nozzle in the image and the key feature points.

4. The blue film core removal linkage synchronization method according to claim 1 is characterized in that: The step of planning the ejector movement route and the nozzle movement route within the same predetermined time by using a motion planning algorithm based on the initial position coordinates of the ejector and the nozzle, the ejection height of the ejector, the ejection target position, the nozzle target position, and the motion parameters of the ejector and the nozzle, wherein the movement route includes a movement direction and a movement speed, comprises: Based on the acquired data of the initial position coordinates of the ejector and the nozzle, the ejection height of the ejector, the target position of the ejector, and the target position of the nozzle, as well as the motion parameters of the maximum motion speed, acceleration limit, and deceleration limit of the ejector and the nozzle, the initial parameters of the moving direction, acceleration, and speed of the ejector and the nozzle in different time periods are determined by a motion planning algorithm; According to the scheduled time of the ejector and the nozzle, the speed change curve of the initial parameters and the displacement distribution of each stage are adjusted, and the movement route of the ejector from the initial position to the ejector target position and then to the ejector lifting height and the nozzle from the initial position to the nozzle target position within the scheduled time is planned, and the movement route includes the movement direction and the movement speed corresponding to each moment.

5. The blue film core removal linkage synchronization method according to claim 1 is characterized in that: The step of planning a time driving sequence by a time series analysis method based on the respective moving routes of the ejector and the nozzle, driving the ejector and the nozzle to move according to their respective moving routes, and simultaneously monitoring the actual positions of the ejector and the nozzle in real time by a displacement sensor, and obtaining the current position of the nozzle at the same time node when the ejector is monitored to move to the ejector target position, includes: The movement process of the ejector and the suction nozzle is clarified through the movement routes of the ejector and the suction nozzle within the same predetermined time, wherein the movement process includes the ejector moving in a straight line upward from the ejector initial position to the ejector target position and then to the ejection height of the ejector, and the suction nozzle moving in a horizontal direction from the suction nozzle initial position to the corresponding vertical height position of the suction nozzle target position and then moving downward to the suction nozzle target position, and the corresponding movement speeds of the ejector and the suction nozzle at each stage are determined; Construct a time series at fixed time intervals, decompose the movement process of the ejector and nozzle into various time nodes, and obtain the time-driven sequence of the movement routes of the ejector and nozzle; Based on the planned time driving sequence, a corresponding control instruction sequence is generated, wherein the control instruction sequence includes specific operation requirements for the ejector and nozzle drive mechanisms at each time node; According to the corresponding control instructions, the ejector and the suction nozzle are driven to move along their respective moving routes; During the movement of the ejector pin and the nozzle, the actual position information of the ejector pin and the nozzle is monitored in real time through the displacement sensor; When the ejector pin reaches the ejector pin target position at the same time node, the current position information of the nozzle is obtained from the actual position data of the nozzle fed back by the displacement sensor.

6. The blue film core stripping linkage synchronization method according to claim 1 is characterized in that: If there is a deviation between the current position of the nozzle and the position of the same time node in the nozzle movement route, the speed curve of the nozzle is adjusted according to the size of the nozzle deviation through a motion planning algorithm based on time synchronization and the nozzle movement speed threshold, and the speed curve is adjusted in a uniform acceleration, uniform speed or uniform deceleration step, including: The current position information of the nozzle fed back by the displacement sensor in real time is compared with the planned position corresponding to the same time node in the nozzle movement route pre-planned by the motion planning algorithm. If there is a difference in the coordinate values ​​of the two after the comparison, and the difference exceeds the allowable error range, it is determined that there is a deviation between the current position of the nozzle and the planned position in the movement route, and the deviation of the coordinate difference between the current position of the nozzle and the planned position is obtained by calculation; Based on the principle of time synchronization and the condition of not exceeding the movement speed threshold of the suction nozzle, the speed curve of the suction nozzle is adjusted. The movement route of the suction nozzle is from the current position of the suction nozzle to the target position of the suction nozzle, and the movement of the suction nozzle ends at the same time node when the ejector reaches the ejector lifting height. The adjustment method of the speed curve of the suction nozzle is uniform acceleration adjustment, uniform deceleration adjustment or uniform speed adjustment.

7. The blue film core stripping linkage synchronization method according to claim 1 is characterized in that: The step of sending a suction start instruction to a vacuum generator of the suction nozzle when the displacement sensor detects that the ejector pin reaches the ejector pin lifting height and the suction nozzle moves to the suction nozzle target position, and adjusting the suction force according to the suction force of the suction nozzle fed back by the pressure sensor until the chip is separated from the blue film, includes: Based on the feedback of the displacement sensor on the real-time monitoring of the positions of the ejector and the suction nozzle, when the ejector reaches the ejector lifting height and the suction nozzle reaches the target position, a command operation to start suction is sent to the vacuum generator of the suction nozzle; Adjust the vacuum degree of the nozzle, detect the suction force of the nozzle through the pressure sensor on the nozzle, and dynamically adjust the suction force until the chip is completely separated from the blue film.

8. A blue film core stripping linkage synchronization device, characterized in that: include: The information acquisition module is used to obtain various chip properties and blue film characteristics; The ejection pin lifting height, ejection pin target position, ejection pin force and the optimal force distance point directly above the chip are obtained through a preset mechanical analysis model, and the optimal force distance point directly above the chip is the nozzle target position; A coordinate establishment module is used to collect image information of the ejector pin and the nozzle through an image sensor, establish an image coordinate system through image recognition and processing technology, and obtain the initial position coordinates of the ejector pin and the nozzle; An information planning module, used for planning the moving route of the ejector and the nozzle within the same predetermined time by using a motion planning algorithm based on the initial position coordinates of the ejector and the nozzle, the ejection height of the ejector, the target position of the ejector, the target position of the nozzle, and the motion parameters of the ejector and the nozzle; A data execution module is used to plan a time driving sequence based on the movement routes of the ejector and the nozzle by a time series analysis method, drive the ejector and the nozzle to move according to their respective movement routes, and monitor the actual positions of the ejector and the nozzle in real time by a displacement sensor. When the ejector is detected to move to the ejector target position, the current position of the nozzle at the same time node is obtained; A data adjustment module, for adjusting the speed curve of the nozzle based on time synchronization and the nozzle movement speed threshold through a motion planning algorithm according to the size of the nozzle deviation when there is a deviation between the current position of the nozzle and the position of the same time node in the nozzle movement route, wherein the speed curve is adjusted in a uniform acceleration, uniform speed or uniform deceleration manner; The information detection module is used to send a command operation to the vacuum generator of the suction nozzle to start suction when the displacement sensor detects that the ejection pin reaches the ejection pin lifting height and the suction nozzle moves to the suction nozzle target position, and at the same time adjust the suction force according to the suction force of the suction nozzle fed back by the pressure sensor until the chip is separated from the blue film.

9. A computer device comprising a memory and a processor, wherein a computer program is stored in the memory, wherein: When the processor executes the computer program, the steps of the blue film core removal linkage synchronization method described in any one of claims 1 to 7 are implemented.

10. A computer-readable storage medium having a computer program stored thereon, characterized in that: When the computer program is executed by a processor, the steps of the blue film core removal linkage synchronization method described in any one of claims 1 to 7 are implemented.

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