Wafer box detection equipment and wafer box detection system

Abstract

The present invention discloses a wafer box detection device and a wafer box detection system, comprising a feed conveyor belt, a discharge conveyor belt, a return conveyor belt, a pendulum sorter and a detection transmission belt, wherein a rotary mechanism is provided on the side of the detection transmission belt, and a synchronous detection mechanism is installed on the rotary mechanism through a support frame; the synchronous detection mechanism comprises a hanger installed through a mutually perpendicular horizontal moving structure and a vertical moving structure, a detection box is installed at the bottom end of the hanger, and parallel cross bars are symmetrically provided on both sides of the detection box, and a plurality of laser displacement sensors are evenly installed on each cross bar along the length direction through a plurality of detection rods. The present invention sets a synchronous detection mechanism to keep synchronous movement with the detection transmission belt under the drive of the rotary mechanism, so that the equipment can realize dynamic detection of the wafer box without stopping and waiting, and the entire detection process realizes automatic and continuous operation, which greatly improves the detection efficiency.

Description

Technical Field

[0001] The present invention relates to the technical field of product detection equipment, and in particular to a wafer box detection device and a wafer box detection system. Background Art

[0002] Wafers are round silicon wafers used in the manufacture of silicon semiconductor integrated circuits. Because wafers are generally fragile, they are typically stored in dedicated wafer cassettes during production and transportation to prevent damage. Currently, wafer cassettes on the market are equipped with slots to facilitate vertical placement of wafers. Multiple parallel slots can be placed in a single wafer cassette to accommodate multiple wafers.

[0003] In the existing technology, when a wafer box is produced, its card slot needs to be tested for flatness after it is formed. When the card slot is deformed, it is easy to cause the wafer to shake or even break during storage. The current inspection process is usually manual, which is not only time-consuming and labor-intensive, but also has low inspection efficiency, and it is difficult to ensure inspection accuracy and consistency. When some existing automatic inspection lines are conducting inspections, when the product is moved to the inspection area, it is generally necessary to stop the line for inspection. The entire inspection process still has the problem of low efficiency.

[0004] To this end, we propose a wafer box detection device and a wafer box detection system to solve the above problems. Summary of the Invention

[0005] The object of the present invention is to provide a wafer box detection device and a wafer box detection system to solve the problems raised in the above background technology.

[0006] To achieve the above object, the present invention provides the following technical solutions:

[0007] A wafer box inspection device includes a feed conveyor belt, a discharge conveyor belt, a return conveyor belt, a pendulum sorter, and an inspection conveyor belt. The feed conveyor belt, the inspection conveyor belt, the pendulum sorter, and the discharge conveyor belt are sequentially arranged on the same straight line according to the transmission direction, and the return conveyor belt is arranged on the other side of the pendulum sorter and is perpendicular to the transmission direction of the discharge conveyor belt. A rotary mechanism is provided on the side of the inspection conveyor belt, and a synchronous detection mechanism is installed on the rotary mechanism through a support frame. The rotary mechanism is used to drive the synchronous detection mechanism and the inspection conveyor belt to move synchronously.

[0008] The synchronous detection mechanism includes a hanger installed by a horizontal moving structure and a vertical moving structure that are perpendicular to each other. A detection box is installed at the bottom end of the hanger. Parallel cross bars are symmetrically provided on both sides of the detection box. A number of laser displacement sensors are evenly installed on each cross bar along the length direction through a number of detection rods. The laser displacement sensors extend into the material slot of the wafer box and move in the vertical direction to detect whether the upper and lower widths of the material slot of the wafer box are consistent.

[0009] In a further embodiment, the rotary mechanism includes a frame, with sprockets symmetrically mounted on both ends of the frame for rotation, one of the sprockets is connected to a motor, and a chain transmission is connected between the two sprockets.

[0010] In a further embodiment, a plurality of support frames are provided along the extension direction of the chain.

[0011] In a further embodiment, the structures of the horizontal moving structure and the vertical moving structure are equal, and the vertical moving structure includes a frame, in which a single screw is rotatably installed, and the end of the single screw is connected to motor 2, and a movable block is threadedly sleeved on the outer wall of the single screw.

[0012] In a further embodiment, a central gear is installed for rotation inside the detection box, and a motor three is installed under the detection box to drive the central gear to rotate. Two racks are symmetrically meshed on both sides of the central gear, and the two racks are fixedly connected to the two cross bars respectively.

[0013] In a further embodiment, a crossbeam frame is also installed between the support frame and the horizontal moving structure, and a double-headed screw is rotatably installed in the crossbeam frame, and one end of the double-headed screw passes through the side of the crossbeam frame and is connected to motor four, and sliding rods are symmetrically threaded on the two threaded sections of the double-headed screw, and a clamping plate for clamping the wafer box is installed at the lower end of the slide rod.

[0014] In a further embodiment, transition plates are provided between the connections of the feed conveyor belt, the detection transmission belt, the swing wheel sorter, the discharge conveyor belt and the return conveyor belt.

[0015] A wafer box detection system includes the wafer box detection device and a control box, wherein the control box is provided with

[0016] The acquisition module is used to centrally collect detection data of several laser displacement sensors when they move along the same vertical line;

[0017] Analysis module: used to compare and analyze the data collected by the acquisition module through algorithms, analyze whether the detection data when moving in the same vertical line are consistent, and then determine whether the card slot width of the wafer box is qualified;

[0018] Speed ​​control module; used to adjust the operating speed of the rotary mechanism;

[0019] Control module; used to control the speed regulation module to adjust the running speed of the rotary mechanism. When the synchronous detection mechanism rotates to the horizontal section of the rotary mechanism, its speed remains equal to the transmission speed of the detection transmission belt. When the synchronous detection mechanism rotates to the curved section of the rotary mechanism, its speed is lower than the transmission speed of the detection transmission belt. When the product is unqualified, the control module controls the swing wheel sorter to reverse, so that the wafer box on the detection transmission belt passes through the swing wheel sorter to guide the moving end high return conveyor and is output and returned; when the product is qualified, the swing wheel sorter does not reverse, and the wafer box on the detection transmission belt passes through the swing wheel sorter to guide and move to the discharge conveyor and is transported away.

[0020] Compared with the prior art, the present invention has the following beneficial effects:

[0021] The present invention cooperates by arranging a feed conveyor belt, a discharge conveyor belt, a return conveyor belt, a detection conveyor belt and a pendulum wheel sorter, so that the wafer box is transported from the feed conveyor belt to the detection conveyor belt for detection, qualified products are output by the discharge conveyor belt, and unqualified products are returned by the return conveyor belt. The pendulum wheel sorter is used to switch the transmission direction of the wafer box, effectively replacing the manual detection operation. At the same time, the synchronous detection mechanism keeps synchronous movement with the detection conveyor belt under the drive of the rotary mechanism, so that the equipment can realize dynamic detection of the wafer box without stopping and waiting. The entire detection process realizes automatic and continuous operation, which greatly improves the detection efficiency.

[0022] The synchronous detection mechanism in the present invention can also drive multiple laser displacement sensors on the detection box to simultaneously detect multiple material slots of the wafer box through the vertical moving structure, while the horizontal moving structure can drive the laser displacement sensor to shift horizontally to detect the remaining material slots, which not only ensures the detection accuracy and consistency, but also effectively improves the detection efficiency.

[0023] The synchronous detection mechanism in the present invention can also drive the two cross bars to move through the central gear and a pair of rack transmissions, thereby adjusting the distance between a pair of symmetrical laser displacement sensors, so as to be suitable for detection of wafer boxes of different sizes on the market, which is more flexible and convenient to use.

[0024] The synchronous detection mechanism in the present invention can also use a double-headed screw to drive a sliding rod to control the synchronous reverse movement of the two clamps to facilitate clamping or loosening the wafer box, thereby adjusting the position of the wafer box on the detection transmission belt, effectively improving the stability of the wafer box during dynamic detection, and ensuring the accuracy of detection. BRIEF DESCRIPTION OF THE DRAWINGS

[0025] Figure 1 It is a front structural schematic diagram of the present invention;

[0026] Figure 2 This is a rear view structural diagram of the present invention;

[0027] Figure 3 This is a schematic diagram of the structure of the detection transmission belt and the rotary mechanism of the present invention;

[0028] Figure 4 This is a structural diagram of the synchronous detection mechanism of the present invention;

[0029] Figure 5 This is a schematic diagram of the structure of the detection box of the present invention after being cut open;

[0030] Figure 6 It is a schematic diagram of the installation structure of the horizontal moving structure and the vertical moving structure of the present invention.

[0031] In the figure: 1. Feed conveyor belt; 2. Discharge conveyor belt; 3. Return conveyor belt; 4. Swing wheel sorter; 5. Detection transmission belt; 6. Rotating mechanism; 61. Frame; 62. Sprocket; 63. Chain; 64. Motor one; 7. Support frame; 71. Crossbeam frame; 72. Double-headed screw; 73. Motor four; 74. Slide rod; 75. Clamp; 8. Horizontal moving structure; 9. Vertical moving structure; 91. Frame; 92. Single screw; 93. Motor two; 94. Movable block; 10. Hanger; 11. Detection box; 111. Center gear; 112. Rack; 113. Motor three; 12. Cross bar; 13. Detection rod; 14. Laser displacement sensor; 15. Control box; 16. Transition plate. DETAILED DESCRIPTION

[0032] In the description of the present invention, it should be understood that terms such as "center," "longitudinal," "lateral," "upper," "lower," "front," "back," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," and "outer" indicate positions or locations based on the positions or locations shown in the accompanying drawings. These terms are used solely to facilitate and simplify the description of the present invention and are not intended to indicate or imply that the devices or components referred to must have, be constructed, or operate in a specific orientation. Therefore, they should not be construed as limitations on the present invention. In the description of the present invention, unless otherwise specified, "plurality" means two or more.

[0033] In the description of the present invention, it should be noted that, unless otherwise expressly specified or limited, the terms "mounted," "connected," and "connected" should be understood broadly. For example, they may refer to fixed, detachable, or integral connections; mechanical or electrical connections; direct or indirect connections through an intermediary; and internal communication between two components. Those skilled in the art will understand the specific meanings of these terms in the present invention based on specific circumstances.

[0034] The following will clearly and completely describe the technical solutions in the embodiments of the present invention in conjunction with the accompanying drawings. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative efforts are within the scope of protection of the present invention.

[0035] See also Figure 1-2 The output side of the feed conveyor 1 is provided with a detection conveyor belt 5, and the output side of the detection conveyor belt 5 is provided with a balance wheel sorter 4. The output side of the balance wheel sorter 4 and the detection conveyor belt 5 are on the same output line as the detection conveyor belt 5 and are provided with a discharge conveyor belt 2, while the return conveyor belt 3 is arranged on the other side of the balance wheel sorter 4 and is perpendicular to the transmission direction of the discharge conveyor belt 2. The balance wheel sorter 4 is used to switch the output direction, so that qualified products are guided to the discharge conveyor belt 2 and unqualified products are guided to the return conveyor belt 3. A rotating mechanism 6 is provided on the side of the detection conveyor belt 5. A synchronous detection mechanism is installed on the rotating mechanism 6 through a support frame 7. The rotating mechanism 6 is used to drive the synchronous detection mechanism to rotate and move synchronously with the detection conveyor belt 5, so that the synchronous detection mechanism and the detection conveyor belt 5 are in a relatively static state, so that when the detection conveyor belt 5 does not need to be stopped, the synchronous detection mechanism can be used for dynamic detection.

[0036] See also Figure 3 The synchronous detection mechanism includes a hanger 10 installed by a horizontal moving structure 8 and a vertical moving structure 9 that are perpendicular to each other. A detection box 11 is installed at the bottom end of the hanger 10, so that the horizontal moving structure 8 drives the detection box 11 to move horizontally, and the vertical moving structure 9 drives the detection box 11 to move vertically. Parallel cross bars 12 are symmetrically provided on both sides of the detection box 11. A number of laser displacement sensors 14 are evenly installed on each cross bar 12 along the length direction through a number of detection rods 13. When the wafer box moves to the detection conveyor belt 5, the laser displacement sensor 14 can be extended into the material slot of the wafer box after it descends. At this time, the detection is moved in the vertical direction to detect whether the upper and lower widths of the material slot of the wafer box are consistent.

[0037] See also Figure 3In order to facilitate the synchronous detection mechanism to be used for cyclic detection, a rotating mechanism 6 is set up, which includes a frame 61. Sprockets 62 are symmetrically installed at both ends of the frame 61. The sprockets 62 are distributed corresponding to the output and input ends of the detection transmission belt 5. One of the sprockets 62 is connected to a motor 64. The motor 64 is fixed to the frame 61, and a chain 63 is connected between the two sprockets 62 for transmission. The sprocket 62 drives the chain 63 to rotate, and then drives the synchronous detection mechanism to move a distance along the detection transmission belt 5 and then rotate, so as to facilitate the detection of subsequent wafer boxes.

[0038] Furthermore, according to actual production needs, several support frames 7 are provided along the extension direction of the chain 63, so that multiple synchronous detection mechanisms are installed for detection, so as to control the detection distance between adjacent wafer boxes and make them cooperate with multiple synchronous detection mechanisms to realize continuous detection.

[0039] See also Figure 6 The structures of the horizontal moving structure 8 and the vertical moving structure 9 are equal, and the vertical moving structure 9 includes a frame 91, in which a single screw 92 is rotatably installed, and the end of the single screw 92 passing through the frame 91 is connected to a second motor 93, and a movable block 94 is threadedly sleeved on the outer wall of the single screw 92. The movable block 94 is slidably connected to the ridge of the inner wall of the frame 91, thereby limiting it to prevent deflection. When the second motor 93 drives the single screw 92 to rotate, the movable block 94 can move along the single screw 92, and the other end of the frame 91 of the vertical moving structure 9 is connected to the movable block 94 of the horizontal moving structure 8, and then the horizontal moving structure 8 drives the vertical moving structure 9 to move horizontally.

[0040] See also Figure 5 , taking into account that in actual use, the current wafer box sizes can be divided into 12-inch wafer boxes, 8-inch wafer boxes, 6-inch wafer boxes, and 4-inch wafer boxes. Therefore, the distance of the card slots of each size of wafer box is different. In order to match wafer boxes of different specifications, a central gear 111 is installed inside the detection box 11, and a motor 113 is installed under the detection box 11 to drive the central gear 111 to rotate. Two racks 112 are meshed and connected on both sides of the central gear 111. The two racks 112 are symmetrically distributed about the center of the axis of the central gear 111, and the two racks 112 are respectively fixedly connected to the two cross bars 12, so that when the central gear 111 rotates, the two cross bars 12 are driven to move closer or farther away from each other through the meshing action with the racks 112, thereby adjusting the distance between the symmetrical pair of laser displacement sensors 14.

[0041] See also Figure 4The two ends of the double-headed screw 72 pass through the side of the crossbeam frame 71 and are connected to the motor 4 73. The two threaded sections of the double-headed screw 72 are symmetrically threaded with a sliding rod 74, and the lower end of the sliding rod 74 is provided with a clamping plate 75 for clamping the wafer box. The center line of the double-headed screw 72 coincides with the center line of the detection box 11. Considering that in actual production, when the wafer box is transferred from the feed conveyor belt 1 to the detection transmission belt 5, its position is difficult to maintain in the center position for detection, therefore, by synchronously moving and clamping the two clamping plates 75, the wafer box can be kept in the center state during detection, and the wafer box is more stable when clamped.

[0042] See also Figure 1-3 Taking into account that there are transition gaps between adjacent conveyor belts during actual assembly, there is a problem of stumbling when the wafer box passes through the transition gap. Therefore, transition plates 16 are provided between the joints of the feed conveyor belt 1, the detection conveyor belt 5, the swing wheel sorter 4, the discharge conveyor belt 2 and the return conveyor belt 3. The transition plates 16 are kept flush with the upper surfaces of the feed conveyor belt 1, the detection conveyor belt 5, the swing wheel sorter 4, the discharge conveyor belt 2 and the return conveyor belt 3, so as to improve the stability of the wafer box when moving through the conveyor belts.

[0043] A wafer box detection system includes a wafer box detection device and a control box 15, wherein the control box 15 is provided with

[0044] An acquisition module is used to centrally collect detection data of a plurality of laser displacement sensors 14 when they move along the same vertical line;

[0045] Analysis module: used to compare and analyze the data collected by the acquisition module through algorithms, analyze whether the detection data when moving in the same vertical line are consistent, and then determine whether the card slot width of the wafer box is qualified;

[0046] Speed ​​regulating module; used to adjust the operating speed of the rotary mechanism 6;

[0047] Control module; used to control the speed regulation module to adjust the running speed of the rotary mechanism 6. When the synchronous detection mechanism rotates to the horizontal section of the rotary mechanism 6, its speed remains equal to the transmission speed of the detection transmission belt 5. When the synchronous detection mechanism rotates to the curved section of the rotary mechanism 6, its speed is lower than the transmission speed of the detection transmission belt 5, so that when the synchronous detection mechanism moves to the input end of the detection transmission belt 5, its position is later than the wafer box, thereby preventing the wafer box from being knocked over during rotation. At the same time, when the moving end of the synchronous detection mechanism reaches the output end of the detection transmission belt 5, its position is later than the wafer box, thereby preventing the wafer box from being knocked over during rotation. When the product is unqualified, the control module controls the pendulum sorter 4 to reverse, so that the wafer box on the detection transmission belt 5 is guided by the pendulum sorter 4 to the moving end high return conveyor 3 and is output and returned; when the product is qualified, the pendulum sorter 4 does not reverse, and the wafer box on the detection transmission belt 5 is guided by the pendulum sorter 4 to move to the discharge conveyor 2 and be transported away.

[0048] It will be apparent to those skilled in the art that the present invention is not limited to the details of the exemplary embodiments described above and that the invention can be embodied in other specific forms without departing from the spirit or essential characteristics of the invention. Therefore, the embodiments should be considered in all respects as illustrative and non-restrictive, and the scope of the invention is defined by the appended claims, not the foregoing description, and all variations within the meaning and range of equivalents of the claims are intended to be included therein. Any reference sign in a claim should not be construed as limiting the claim to which it relates.

[0049] In addition, it should be understood that although this specification is described in terms of implementation methods, not every implementation method contains only one independent technical solution. This narrative method of the specification is only for the sake of clarity. Those skilled in the art should regard the specification as a whole. The technical solutions in each embodiment can also be appropriately combined to form other implementation methods that can be understood by those skilled in the art.

Claims

1. A wafer box detection device, comprising a feed conveyor belt (1), a discharge conveyor belt (2), a return conveyor belt (3), a pendulum sorter (4) and a detection transmission belt (5), characterized in that: The feed conveyor belt (1), the detection transmission belt (5), the oscillating wheel sorter (4) and the discharge conveyor belt (2) are sequentially arranged on the same straight line according to the transmission direction, and the return conveyor belt (3) is arranged on the other side of the oscillating wheel sorter (4) and is perpendicular to the transmission direction of the discharge conveyor belt (2). A rotary mechanism (6) is provided on the side of the detection transmission belt (5), and a synchronous detection mechanism is installed on the rotary mechanism (6) through a support frame (7). The rotary mechanism (6) is used to drive the synchronous detection mechanism and the detection transmission belt (5) to move synchronously; The synchronous detection mechanism includes a hanger (10) installed by a horizontal moving structure (8) and a vertical moving structure (9) that are perpendicular to each other. A detection box (11) is installed at the bottom end of the hanger (10). Parallel cross bars (12) are symmetrically provided on both sides of the detection box (11). A plurality of laser displacement sensors (14) are evenly installed on each cross bar (12) along the length direction through a plurality of detection rods (13). The laser displacement sensors (14) extend into the material slot of the wafer box and move in the vertical direction to detect whether the upper and lower widths of the material slot of the wafer box are consistent.

2. The wafer box detection device according to claim 1, characterized in that: The rotary mechanism (6) comprises a frame (61), sprockets (62) are symmetrically mounted on both ends of the frame (61), a motor (64) is connected under one of the sprockets (62), and a chain (63) is connected between the two sprockets (62) for transmission.

3. The wafer box detection device according to claim 2, characterized in that: Several support frames (7) are provided along the extension direction of the chain (63).

4. The wafer box detection device according to claim 1, characterized in that: The structures of the horizontal moving structure (8) and the vertical moving structure (9) are equal, and the vertical moving structure (9) includes a frame (91), a single screw (92) is rotatably installed in the frame (91), and the end of the single screw (92) is connected to a second motor (93), and a movable block (94) is threadedly sleeved on the outer wall of the single screw (92).

5. The wafer box detection device according to claim 1, characterized in that: A central gear (111) is rotatably mounted inside the detection box (11), and a motor (113) for driving the central gear (111) to rotate is mounted below the detection box (11). Two racks (112) are symmetrically meshed on both sides of the central gear (111), and the two racks (112) are fixedly connected to the two cross bars (12) respectively.

6. The wafer box detection device according to claim 1, characterized in that: A crossbeam frame (71) is also installed between the support frame (7) and the horizontal movable structure (8), and a double-headed screw (72) is rotatably installed in the crossbeam frame (71), and one end of the double-headed screw (72) passes through the side of the crossbeam frame (71) and is connected to a motor four (73), and a sliding rod (74) is symmetrically threaded on the two threaded sections of the double-headed screw (72), and a clamping plate (75) for clamping the wafer box is installed at the lower end of the sliding rod (74).

7. The wafer box detection device according to claim 1, characterized in that: Transition plates (16) are provided between the connection points of the feed conveyor belt (1), the detection transmission belt (5), the swing wheel sorter (4), the discharge conveyor belt (2) and the return conveyor belt (3).

8. A wafer box detection system, characterized in that: A detection device comprising a wafer box according to any one of claims 1 to 7 and a control box (15), wherein the control box (15) is provided with An acquisition module for centrally collecting detection data of a plurality of laser displacement sensors (14) when they move along the same vertical line; Analysis module: used to compare and analyze the data collected by the acquisition module through algorithms, analyze whether the detection data when moving in the same vertical line are consistent, and then determine whether the card slot width of the wafer box is qualified; Speed ​​control module; Used to adjust the operating speed of the rotary mechanism (6); The control module is used to control the speed regulating module to adjust the running speed of the rotary mechanism (6). When the synchronous detection mechanism rotates to the horizontal section of the rotary mechanism (6), its speed is kept equal to the transmission speed of the detection transmission belt (5). When the synchronous detection mechanism rotates to the curved section of the rotary mechanism (6), its speed is lower than the transmission speed of the detection transmission belt (5). When the product is unqualified, the control module controls the swing wheel sorter (4) to reverse, so that the wafer box on the detection transmission belt (5) is guided by the swing wheel sorter (4) to the high return material conveyor (3) at the moving end and is output and returned; when the product is qualified, the swing wheel sorter (4) does not reverse, and the wafer box on the detection transmission belt (5) is guided by the swing wheel sorter (4) to move to the discharge conveyor (2) and be transported away.

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