Resonant sensor PUF characteristic value and PUF key generation method

Abstract

The present application provides a method for generating PUF characteristic values ​​and PUF keys of a resonant sensor. The method includes: providing a resonant sensor, turning on the power supply of the resonant sensor, the resonant sensor including a power supply, a driving voltage adjustment circuit and a resonant sensor module; the driving voltage adjustment circuit is used to adjust the driving voltage input to the resonant sensor module; multiple groups of driving voltages are input to the resonant sensor module through the driving voltage adjustment circuit; the main vibration amplitude and the secondary vibration amplitude of the resonant sensor module under each group of driving voltages are measured; the multiple groups of driving voltages are used as excitations, and the main vibration amplitude and the secondary vibration amplitude under each group of driving voltages are used as responses to generate PUF characteristic values. The driving voltage in the resonant sensor is used as excitation, and the main vibration amplitude and the secondary vibration amplitude under different pressures are used as responses to generate the PUF characteristic value of the sensor, and there is no need to increase additional design and production costs, thereby reducing the PUF cost.

Description

Technical Field

[0001] The present application relates to the field of information security technology, and in particular to a method for generating a PUF characteristic value and a PUF key of a resonant sensor. Background Art

[0002] Physically Unclonable Function (PUF) has the characteristics of uniqueness and non-replicability, and has been successfully applied in the field of information security. It is a safe and effective encryption technology. The hardware identity is managed through the PUF physical characteristics of the hardware, and the root key is generated based on this characteristic. The key generation technology based on PUF allows the key to be kept in the device, which is highly secure. In addition, the cost of using PUF hardware is low, and it is also suitable for low-cost terminal devices such as wireless sensor devices.

[0003] In the related art, PUF key technology has been used in some large mobile terminal devices, such as using the data value after SRAM and DRAM initialization as PUF source data. However, this method is not suitable for small terminals, such as sensors. Therefore, an effective implementation method that can solve the PUF application on sensors is needed. Summary of the invention

[0004] Based on this, it is necessary to provide a resonant sensor PUF characteristic value generation method, a resonant sensor PUF key generation method, a resonant sensor security verification method and a resonant sensor security verification device that can solve the above-mentioned technical problems and effectively implement the PUF on the sensor.

[0005] In a first aspect, the present application provides a method for generating a PUF characteristic value of a resonant sensor, comprising:

[0006] Providing a resonant sensor, turning on the power of the resonant sensor, the resonant sensor comprising a power supply, a driving voltage adjustment circuit and a resonant sensor module; the driving voltage adjustment circuit is used to adjust the driving voltage input to the resonant sensor module;

[0007] Inputting multiple sets of driving voltages to the resonant sensor module via the driving voltage adjustment circuit;

[0008] Measure and obtain the primary vibration amplitude and the secondary vibration amplitude of the resonant sensor module under each set of driving voltages;

[0009] The plurality of driving voltages are used as excitations, and the primary oscillation amplitude and the secondary oscillation amplitude under each driving voltage are used as responses to generate PUF characteristic values.

[0010] The above-mentioned method for generating PUF characteristic values ​​of resonant sensors utilizes the fact that the main oscillation amplitude and the secondary oscillation amplitude of the resonant sensor are different under different driving voltages, but the main oscillation amplitude and the secondary oscillation amplitude under different driving voltages have unique and stable characteristics. The driving voltage in the resonant sensor is used as excitation, and the main oscillation amplitude and the secondary oscillation amplitude under different pressures are used as responses to generate the PUF characteristic value of the sensor. There is no need to increase additional design and production costs, thereby reducing the PUF cost.

[0011] In one embodiment, the resonant sensor module includes: a resonator, wherein the resonator generates resonance under the action of an excitation source, wherein the resonance includes a main vibration and a secondary vibration, and the resonance parameters include a main vibration frequency, a main vibration amplitude, a secondary vibration frequency, and a secondary vibration amplitude;

[0012] A driver connected to the resonator, the driver is used to generate an excitation source to drive the resonator to resonate;

[0013] A detector connected to the resonator, wherein the detector is used to detect a resonance parameter of the resonator.

[0014] In one embodiment, the inputting of multiple sets of driving voltages to the resonant sensor module via the driving voltage adjustment circuit is specifically: inputting multiple sets of driving voltages to the driver via the driving voltage adjustment circuit, and the excitation source generated by the driver drives the resonator to generate resonance;

[0015] The measurement obtains the primary vibration amplitude and the secondary vibration amplitude of the resonant sensor module under each set of driving voltages, specifically:

[0016] When the external pressure applied to the resonant sensor is zero, the detector is used to measure the main vibration amplitude and the secondary vibration amplitude of the resonator under each set of driving voltages to obtain multiple sets of main vibration amplitudes and secondary vibration amplitudes.

[0017] In one of the embodiments, the method further includes: when the external pressure applied to the resonant sensor is zero, using the detector to measure the main vibration frequency and the secondary vibration frequency under each set of driving voltages;

[0018] The generating of the PUF characteristic value specifically comprises: taking the multiple groups of the driving voltages as excitations, taking the main oscillation frequency, main oscillation amplitude, secondary oscillation frequency and secondary oscillation amplitude under each group of driving voltages as responses, and generating the PUF characteristic value.

[0019] The above-mentioned method for generating PUF characteristic values ​​of resonant sensors utilizes the fact that the main oscillation amplitude and the secondary oscillation amplitude of the resonant sensor are different under different driving voltages, but the main oscillation amplitude and the secondary oscillation amplitude under different driving voltages have unique and stable characteristics. The driving voltage in the resonant sensor is used as excitation, and the main oscillation frequency, main oscillation amplitude, secondary oscillation frequency and secondary oscillation amplitude under each group of driving voltages are used as responses to generate the PUF characteristic value of the sensor. There is no need to increase additional design and production costs, which reduces the PUF cost. Furthermore, the response parameters are increased, which improves the uniqueness of the PUF and the difference in PUF characteristic values ​​of different sensors.

[0020] In one embodiment, the resonant sensor is a MEMS sensor or an NMES sensor; the resonant sensor is a resonant pressure sensor, a resonant force sensor, a resonant displacement sensor, a resonant mass sensor, a resonant strain sensor, a resonant flow sensor, a resonant torque sensor, a resonant vibration sensor, a resonant liquid level sensor, a resonant gyroscope, a resonant gas sensor, a resonant magnetic sensor, a resonant biosensor, a resonant humidity sensor, a resonant temperature sensor, a resonant chemical sensor, a resonant acceleration sensor or a resonant inertial sensor.

[0021] In one embodiment, the resonator is a cantilever beam resonator, a double-ended fixed beam resonator, a ring resonator, a diaphragm resonator, a columnar resonator, a comb-tooth resonator, a piezoelectric resonator, or a nanowire resonator.

[0022] In a second aspect, the present application also provides a resonant sensor PUF key generation method, comprising:

[0023] Combining the PUF characteristic values ​​obtained by any of the above PUF characteristic value generation methods to obtain multiple CRP stimulus-response pairs;

[0024] Performing analog-to-digital conversion on the response in the CRP stimulus-response pair to obtain bit data;

[0025] The bit data is processed using a hash algorithm to generate a PUF key.

[0026] The above-mentioned resonant sensor PUF key generation method can enhance the security and reliability of the PUF key by performing analog-to-digital conversion and hash algorithm processing on the CRP stimulus-response pair.

[0027] In a third aspect, the present application also provides a method for safety verification of a resonant sensor, comprising:

[0028] A resonant sensor to be tested is provided, a security verification device is connected to the resonant sensor to be tested, and a power supply of the resonant sensor is turned on, wherein the security verification device stores a PUF key of the resonant sensor to be tested generated by the PUF key generation method in any of the above embodiments;

[0029] The security verification device generates a first random number and sends the first random number to the resonant sensor to be tested, and the resonant sensor to be tested takes the first random number as a challenge and generates a first response;

[0030] The resonant sensor to be tested encrypts the first random number to obtain a second response, and sends the second response to the security verification device, wherein the encryption key of the first random number is the first response;

[0031] Decrypting the second response using the PUF key stored in the security verification device as a decryption key to obtain a second random number;

[0032] The second random number is compared with the first random number, and if the two are the same, it is determined that the resonant sensor to be tested is a safety device.

[0033] In the above-mentioned security verification method of the resonant sensor, by using the PUF key and the challenge-response mechanism, the security verification of the resonant sensor is achieved, the authenticity of the sensor and the security of the data are ensured, thereby enhancing the security and anti-attack capabilities.

[0034] In a fourth aspect, the present application further provides a safety verification device for a resonant sensor, wherein the safety verification device can use the safety verification method described in the above embodiment to perform safety verification on the resonant sensor, and the safety verification device includes:

[0035] A memory, used to store PUF keys of multiple resonant sensors generated by the resonant sensor PUF key generation method described in any of the above embodiments;

[0036] A random number generation module, used to generate a first random number;

[0037] A decryption module, configured to decrypt a second response returned by the resonant sensor using the PUF key to obtain a second random number;

[0038] A comparison module, used for comparing the second random number with the first random number to obtain a comparison result;

[0039] A display module is used to display the comparison result and / or display the first random number and the second random number.

[0040] The security verification device of the resonant sensor mentioned above uses a first random number as the excitation of the resonant sensor to be tested to generate a first response, and uses the PUF key to decrypt the second response obtained after encryption based on the first random number to obtain a second random number, and performs security verification on the resonant sensor to be tested by comparing the first random number and the second random number. This method uses the PUF key and the challenge-response mechanism to realize the security verification of the resonant sensor, ensure the authenticity of the sensor and the security of the data, thereby enhancing security and anti-attack capabilities. BRIEF DESCRIPTION OF THE DRAWINGS

[0041] In order to more clearly illustrate the technical solutions in the embodiments of the present application or the conventional technology, the drawings required for use in the embodiments or the conventional technology descriptions are briefly introduced below. Obviously, the drawings described below are only some embodiments of the present application. For ordinary technicians in this field, other drawings can be obtained based on these drawings without creative work.

[0042] Figure 1 A schematic diagram of a flow chart of a method for generating a PUF characteristic value of a resonant sensor in one embodiment of the present application;

[0043] Figure 2 This is a schematic diagram of the structure of a resonant sensor in one embodiment of the present application;

[0044] Figure 3 This is a schematic diagram of the main vibration amplitude of the MEMS under different driving voltages in one embodiment of the present application;

[0045] Figure 4 A schematic diagram of the secondary vibration amplitude of MEMS under different driving voltages in one embodiment of the present application;

[0046] Figure 5 This is a schematic structural diagram of a resonant sensor module in one embodiment of the present application;

[0047] Figure 6 This is a schematic structural diagram of a cantilever beam resonator in one embodiment of the present application;

[0048] Figure 7 A schematic diagram of a process for generating a PUF characteristic value in one embodiment of the present application;

[0049] Figure 8 This is a schematic diagram of the MEMS main oscillation frequency, secondary oscillation frequency and amplitude under the initial driving voltage in one embodiment of the present application;

[0050] Fig. 9 A schematic diagram of a flow chart of a method for generating a PUF key for a resonant sensor in one embodiment of the present application;

[0051] Fig.10 A schematic diagram of a flow chart of a safety verification method for a resonant sensor in one embodiment of the present application;

[0052] Fig.11 It is a schematic diagram of the structure of a safety verification device for a resonant sensor in one embodiment of the present application. DETAILED DESCRIPTION

[0053] In order to make the above-mentioned purposes, features and advantages of the present application more obvious and easy to understand, the specific implementation methods of the present application are described in detail below in conjunction with the accompanying drawings. In the following description, many specific details are set forth to facilitate a full understanding of the present application. However, the present application can be implemented in many other ways different from those described herein, and those skilled in the art can make similar improvements without violating the connotation of the present application, so the present application is not limited by the specific embodiments disclosed below.

[0054] It is understandable that PUF, or Physical Unclonable Functions, is an important type of hardware security technology that uses the inherent properties of silicon-based semiconductors to randomly extract unclonable physical features, similar to biological fingerprints, and is a unique identifier for each chip. It uses the inevitable tiny differences in semiconductor devices during the manufacturing process (such as transistor threshold voltage, interconnect length, capacitance, etc.) to generate unique and unpredictable outputs. These differences make the response of each device unique and cannot be completely replicated even using the same manufacturing process. Therefore, PUF can be used as a "fingerprint" for devices for security applications such as identity authentication, key generation, and data encryption.

[0055] In the related art, PUFs based on other hardware features include Static RAM static random access memory (SRAM), ring oscillator (RO), arbiter PUFs, coating PUFs and dynamic RAM dynamic random access memory (DRAM). However, the limitation of hardware resources of wireless sensors makes it impossible to effectively use PUFs based on SRAM and DRAM. Secondly, RO PUF technology that increases additional design and production costs is not suitable. Therefore, in view of the technical problem that there is a lack of effective implementation methods for PUF on sensors in the related art, a resonant sensor PUF feature value generation method is proposed, which can solve the effective implementation of PUF applications on wireless sensors while realizing the application of PUF key technology on resonant MEMS sensors at a low cost.

[0056] In an exemplary embodiment, Figure 1 As shown, a method for generating a PUF characteristic value of a resonant sensor is provided, which may include the following steps 102 to 108, wherein:

[0057] Step 102, providing a resonant sensor, turning on the power of the resonant sensor, the resonant sensor comprising a power supply, a driving voltage adjustment circuit and a resonant sensor module; the driving voltage adjustment circuit is used to adjust the driving voltage input to the resonant sensor module.

[0058] Among them, resonant sensors use the resonance characteristics of the vibration system to achieve high-precision physical quantity measurement. This type of sensor is usually based on the working principle of the mass-spring-damper system, and indirectly measures external physical quantities by detecting the resonant frequency, amplitude or phase change of the vibration system. Resonant MEMS sensors have the advantages of high sensitivity, low power consumption, miniaturization and good stability, and are widely used in various types of sensors.

[0059] In an exemplary embodiment, the structural diagram of the resonant sensor can be as follows: Figure 2 As shown, the resonant sensor includes a power supply, a driving voltage adjustment circuit and a resonant sensor module; the driving voltage adjustment circuit is used to adjust the driving voltage input to the resonant sensor module. The driving voltage adjustment circuit can adjust the driving voltage input to the resonant sensor by adjusting the size of the resistor in the driving voltage adjustment circuit connected to the resonant sensor, thereby adjusting the driving voltage input to the resonant sensor. The resistor in the driving voltage adjustment circuit can be arranged in parallel or in series, or a variable resistance structure such as a sliding rheostat can be used.

[0060] The resonant sensor can be a wireless resonant sensor or a wired sensor. For resonant sensors with different transmission modes, the resonant sensor can be, but is not limited to, a MEMS sensor or an NMES sensor. The type of the resonant sensor is not limited here, and the structure of the resonant sensor is not specifically limited. This application is described with the resonant sensor being a resonant MEMS sensor.

[0061] Further, in an exemplary embodiment, the resonant sensor is a MEMS sensor or an NMES sensor; the resonant sensor is a resonant pressure sensor, a resonant force sensor, a resonant displacement sensor, a resonant mass sensor, a resonant strain sensor, a resonant flow sensor, a resonant torque sensor, a resonant vibration sensor, a resonant liquid level sensor, a resonant gyroscope, a resonant gas sensor, a resonant magnetic sensor, a resonant biosensor, a resonant humidity sensor, a resonant temperature sensor, a resonant chemical sensor, a resonant acceleration sensor or a resonant inertial sensor.

[0062] Step 104: input multiple sets of driving voltages to the resonant sensor module via the driving voltage adjustment circuit.

[0063] Step 106 , measuring and obtaining the primary vibration amplitude and the secondary vibration amplitude of the resonant sensor module under each set of driving voltages.

[0064] It is understandable that in order to expand the CRP set of MEMS, the amplitude of the driving voltage will be adjusted to generate primary frequency vibration and secondary vibration of different amplitudes. Then, in the actual processing process, CRP can be a set of data, and the data can come from the primary vibration amplitude or secondary vibration amplitude (i.e., secondary vibration amplitude) under multiple driving voltages. The size of the combination of data can range from the smallest 1 data to the entire data set. In an exemplary embodiment, Figure 3 As shown in FIG. 1 , a schematic diagram of the main vibration amplitude of MEMS under different driving voltages is provided, where the horizontal axis is the driving voltage and the vertical axis is the vibration amplitude. Figure 4 As shown, a schematic diagram of the secondary vibration amplitude of MEMS under different driving voltages is provided, where the horizontal axis is the driving voltage and the vertical axis is the vibration amplitude.

[0065] Step 108 , using multiple groups of driving voltages as excitations, and using the primary oscillation amplitude and the secondary oscillation amplitude under each group of driving voltages as responses, to generate PUF characteristic values.

[0066] The PUF characteristic value includes excitation and response, and each PUF characteristic value may include a driving voltage and a primary oscillation amplitude and a secondary oscillation amplitude under the driving voltage.

[0067] The above-mentioned method for generating PUF characteristic values ​​of resonant sensors utilizes the fact that the main oscillation amplitude and the secondary oscillation amplitude of the resonant sensor are different under different driving voltages, but the main oscillation amplitude and the secondary oscillation amplitude under different driving voltages have unique and stable characteristics. The driving voltage in the resonant sensor is used as excitation, and the main oscillation amplitude and the secondary oscillation amplitude under different pressures are used as responses to generate the PUF characteristic value of the sensor. There is no need to increase additional design and production costs, thereby reducing the PUF cost.

[0068] In an exemplary embodiment, a structural diagram of a resonant sensor module is provided, such as Figure 5 As shown, the resonant sensor module includes: a resonator, which generates resonance under the action of an excitation source, and the resonance includes a main vibration and a secondary vibration, and the resonance parameters include a main vibration frequency, a main vibration amplitude, a secondary vibration frequency, and a secondary vibration amplitude;

[0069] A driver connected to the resonator, the driver is used to generate an excitation source to drive the resonator to resonate;

[0070] A detector connected to the resonator is used to detect the resonance parameters of the resonator.

[0071] It can be understood that the common structure of all resonant sensors is: the driving voltage is output to the driver, the driver generates an excitation source, and the excitation source drives the resonator to produce a stable resonant frequency and enter a resonant state. However, the principles of the resonators are different, and the excitation sources are also different. For example, electrical excitation: the resonator is driven by applying an AC voltage or current. Applicable to capacitive and piezoelectric resonators. Mechanical excitation: The resonator is driven by applying mechanical vibration or force, which is applicable to mechanical resonators. Optical excitation: The optical fiber resonator is driven by a laser or other light source, which is applicable to optical resonant sensors. Piezoelectric excitation: Using the inverse piezoelectric effect of piezoelectric materials, the resonator generates mechanical vibrations by applying voltage. Electromagnetic excitation: The resonator is driven by an alternating magnetic field generated by a coil.

[0072] Among them, the detector, that is, the detection circuit, can be a detection circuit used to monitor the change of the resonant frequency of the resonator and convert it into an electrical signal. The accuracy and sensitivity of the detection circuit directly affect the measurement accuracy of the sensor. According to the working principle of the resonator, the detection circuit can use different technologies to measure the change of the resonant frequency. For example, the detection circuit can use electrical detection, optical detection, mechanical detection, etc. Further, electrical detection can be to determine the resonant frequency by measuring the electrical characteristics of the resonator (such as impedance, phase, amplitude, etc.), which is applicable to capacitive and piezoelectric resonators. Optical detection can be to determine the resonant frequency by measuring the interference, reflection or transmission of the optical signal, which is applicable to optical fiber resonators. Mechanical detection can be to determine the resonant frequency by measuring the mechanical displacement or vibration amplitude of the resonator, which is applicable to mechanical resonators.

[0073] Optionally, the resonator is any one of a cantilever beam resonator, a double-ended fixed beam resonator, a ring resonator, a diaphragm resonator, a columnar resonator, a comb-tooth capacitor resonator, a piezoelectric resonator, or a nanowire resonator. Among them, the cantilever beam resonator: is suitable for accelerometers, pressure sensors, and mass sensors. The double-ended fixed beam resonator: is suitable for high-precision accelerometers and gyroscopes. The ring resonator: is suitable for high-frequency filters and inertial sensors. The diaphragm resonator: is suitable for pressure sensors and acoustic sensors. The columnar resonator: is suitable for mass sensors and inertial sensors. The comb-tooth capacitor resonator: is suitable for high-frequency oscillators and inertial sensors. The piezoelectric resonator: is suitable for high-precision accelerometers, pressure sensors, and ultrasonic sensors. The nanowire resonator: is suitable for high-sensitivity sensors at the nanoscale.

[0074] In an exemplary embodiment, a cantilever beam resonator is used as an example. Figure 6 A top view of the cantilever beam resonator is given. The cantilever beam resonator includes a main vibration electrode and two secondary vibration electrodes; wherein the main vibration electrode is used to generate the main vibration; and the secondary vibration electrode is used to generate the secondary vibration. Furthermore, electrical detection may include phase-locked loop detection and spectrum analysis detection. Phase-locked loop (PLL) detection: the resonant frequency change of the resonator is tracked by the phase-locked loop circuit, and the corresponding electrical signal is output. Spectrum analysis detection: the spectrum characteristics of the resonator are measured by a spectrum analyzer to determine its resonant frequency. Optical detection may include optical interference detection: the resonant frequency of the optical fiber resonator is determined by measuring the interference fringes of the light wave.

[0075] Based on the above-mentioned resonant sensor module, the main oscillation frequency, main oscillation amplitude, secondary oscillation frequency and secondary oscillation amplitude can be obtained without adding additional detection circuits, thereby reducing the test cost.

[0076] In an exemplary embodiment, a plurality of driving voltages are input to the resonant sensor module via the driving voltage adjustment circuit, specifically: the plurality of driving voltages are input to the driver via the driving voltage adjustment circuit, and the excitation source generated by the driver drives the resonator to generate resonance;

[0077] Correspondingly, the main vibration amplitude and the secondary vibration amplitude of the resonant sensor module under each set of driving voltage are measured, specifically: when the external pressure applied to the resonant sensor is zero, the main vibration amplitude and the secondary vibration amplitude of the resonator under each set of driving voltage are measured by a detector to obtain multiple sets of main vibration amplitudes and secondary vibration amplitudes. It can be understood that the main vibration frequency and the secondary vibration frequency under each set of driving voltage measured by the detector can be measured when the resonant sensor is under the same external pressure. The external pressure can be zero or a normal atmospheric pressure. The embodiment of the present application is preferably measured under normal atmospheric pressure, that is, no additional pressure is applied. In this way, the main vibration amplitude and the secondary vibration amplitude of the resonator under each set of driving voltage are measured by the detector, and no additional external detection circuit is required, thereby reducing costs.

[0078] In order to meet the needs of different application scenarios, in addition to using multiple groups of driving voltages as excitations and the main vibration amplitude and the secondary vibration amplitude under each group of driving voltages as responses to generate PUF characteristic values, in an exemplary embodiment, based on the above-mentioned determination method of the main vibration amplitude and the secondary vibration amplitude, a method for generating PUF characteristic values ​​is provided, such as Figure 7 As shown, the following steps are included:

[0079] Step 702: Use a detector to measure and obtain the main oscillation frequency and the secondary oscillation frequency under each set of driving voltages.

[0080] It is understandable that the main vibration frequency and the secondary vibration frequency under each set of driving voltages measured by the detector can be measured by the resonant sensor under the same external pressure, and the external pressure can be zero or atmospheric pressure, which is not specifically limited here. In an exemplary embodiment, Figure 8 As shown, a schematic diagram of the MEMS main oscillation frequency, secondary oscillation frequency and amplitude under the initial driving voltage is provided, where the horizontal axis is the frequency and the vertical axis is the amplitude.

[0081] Exemplarily, when the external pressure applied to the resonant sensor is zero, the detector is used to measure the main vibration frequency and the secondary vibration frequency under each set of driving voltages.

[0082] Step 704, generating PUF characteristic values ​​specifically includes: taking multiple groups of driving voltages as excitations, taking the main oscillation frequency, main oscillation amplitude, secondary oscillation frequency and secondary oscillation amplitude under each group of driving voltages as responses, and generating PUF characteristic values.

[0083] Among them, the PUF characteristic value includes excitation and response. The excitation can be multiple groups of driving voltages, and the response is the main oscillation frequency, main oscillation amplitude, secondary oscillation frequency and secondary oscillation amplitude corresponding to each group of driving voltages.

[0084] It should be noted that when the driving voltage of the resonator of the MEMS resonant sensor changes, the changes of its main vibration frequency, main vibration amplitude, secondary vibration frequency and secondary vibration amplitude are as follows:

[0085] Master oscillation frequency: At low drive voltage, the master oscillation frequency remains basically unchanged; when the drive voltage increases to a certain extent, the resonator enters the nonlinear vibration region, which may cause the master oscillation frequency to increase slightly (hard spring effect) or decrease (soft spring effect). In addition, the increase in drive voltage may also cause the temperature to increase, further affecting the master oscillation frequency.

[0086] Main oscillation amplitude: At low drive voltage, the main oscillation amplitude is proportional to the drive voltage, and the amplitude increases linearly with the drive voltage; when the drive voltage increases to a certain level, the increase rate of the amplitude will slow down or even reach saturation. In addition, the increase in temperature may inhibit the further increase of the amplitude.

[0087] Suboscillation frequency: Under low driving voltage, the suboscillation frequency remains basically unchanged; when the driving voltage increases to a certain extent, the resonator enters the nonlinear vibration region, which may cause the suboscillation frequency to change. In addition, the increase in temperature will also affect the suboscillation frequency.

[0088] Secondary vibration amplitude: At low driving voltage, the secondary vibration amplitude is small; when the driving voltage increases to a certain extent, the secondary vibration amplitude may increase, especially when modal coupling occurs between the primary vibration mode and the secondary vibration mode. However, the temperature increase may inhibit the further increase of the secondary vibration amplitude.

[0089] Furthermore, in order to ensure the stability and accuracy of the resonator under different driving voltages, the driving voltage can be controlled within a certain range to avoid the resonator operating in a nonlinear vibration state during the test.

[0090] The above-mentioned method for generating PUF characteristic values ​​of resonant sensors utilizes the fact that the main oscillation amplitude and the secondary oscillation amplitude of the resonant sensor are different under different driving voltages, but the main oscillation amplitude and the secondary oscillation amplitude under different driving voltages have unique and stable characteristics. The driving voltage in the resonant sensor is used as excitation, and the main oscillation frequency, main oscillation amplitude, secondary oscillation frequency and secondary oscillation amplitude under each group of driving voltages are used as responses to generate the PUF characteristic value of the sensor. There is no need to increase additional design and production costs, which reduces the PUF cost. Furthermore, the response parameters are increased, and the uniqueness of the PUF and the difference in PUF characteristic values ​​of different sensors are improved.

[0091] Based on the PUF characteristic value generation method in any of the above embodiments, a resonant sensor PUF key generation method is provided, such as Fig. 9 As shown, it includes steps 902 to 906, wherein:

[0092] Step 902: Combine the acquired PUF feature values ​​to obtain multiple CRP stimulus-response pairs.

[0093] The PUF feature value obtained can be determined based on the PUF feature value generation method recorded in any of the above embodiments, which will not be described in detail here. CRP: Challenge and Response Pair, refers to the pairing of independent challenges and responses during the device authentication process. The combination method can be implemented by existing combination methods, which will not be described in detail here.

[0094] Exemplarily, the resonant sensor obtains a PUF characteristic value determined based on the PUF characteristic value generation method recorded in any of the above embodiments, and combines the obtained PUF characteristic values ​​to obtain multiple CRP stimulus-response pairs.

[0095] Step 904: Perform analog-to-digital conversion on the response in the CRP stimulus-response pair to obtain bit data.

[0096] It is immediately apparent that analog-to-digital conversion can be achieved by existing methods, which will not be elaborated here.

[0097] Step 906: Process the bit data using a hash algorithm to generate a PUF key.

[0098] Among them, the hash algorithm can convert an input of any length into an output of a fixed length. This output is called a hash value or hash value, which is used for authentication. This method can effectively prevent the key from being predicted or copied, and improve security. The hash algorithm can be, but is not limited to, any one of SM3, MD5 (Message Digest Algorithm 5), and RIPEMD (RACE Integrity Primitives Evaluation Message Digest).

[0099] In the above PUF key generation method, the security and reliability of the PUF key can be enhanced by performing analog-to-digital conversion and hash algorithm processing on the CRP stimulus-response pair.

[0100] Furthermore, the PUF key can also be stored in a security verification device of the resonant sensor, or in a server or cloud service to perform security verification on the resonant sensor, which can effectively improve the security verification effect of the resonant sensor, improve security and reliability, and is suitable for resource-constrained platforms.

[0101] It is worth noting that PUF can be used to verify the identity of the device, ensuring that only legitimate devices can access the system or network, and can be used to verify the integrity of the firmware, ensuring that the device loads authenticated firmware when it starts up, preventing malware or firmware tampering, and can also verify the authenticity of the product, etc. In order to ensure the performance and reliability of the sensor, the sensor needs to be securely verified. In an exemplary embodiment, a security verification method for a resonant sensor is provided, such as Fig.10 As shown, it includes steps 1002 to 1010, wherein:

[0102] Step 1002, provide a resonant sensor to be tested, connect a security verification device to the resonant sensor to be tested, turn on the power of the resonant sensor, and store the PUF key of the resonant sensor to be tested generated by the above-mentioned PUF key generation method in the security verification device.

[0103] The PUF key may be generated in the manner described in the above embodiments but is not limited thereto, which will not be described in detail here. The type of the resonant sensor to be tested may be the resonant sensor described in any of the above embodiments, and the structure of the resonant sensor to be tested will not be described in detail here.

[0104] Step 1004: the security verification device generates a first random number and sends it to the resonant sensor to be tested. The resonant sensor to be tested takes the first random number as a challenge and generates a first response.

[0105] The first random number may be generated by a pseudo-random number generator or a time-based random number generator, which is not specifically limited here.

[0106] Step 1006: The resonant sensor to be tested encrypts the first random number to obtain a second response, and sends the second response to the security verification device. The encryption key of the first random number is the first response.

[0107] Step 1008: Use the PUF key stored in the security verification device as a decryption key to decrypt the second response to obtain a second random number.

[0108] Step 1010: compare the second random number with the first random number. If the two are the same, determine that the resonant sensor to be tested is a safety device.

[0109] In the above-mentioned security verification method of the resonant sensor, by using the PUF key and the challenge-response mechanism, the security verification of the resonant sensor is achieved, the security and authenticity of the sensor are ensured, and unauthorized access and potential cloning attacks are effectively prevented, thereby enhancing security and anti-attack capabilities.

[0110] Furthermore, according to actual application requirements, the security verification of the resonant sensor can be: for the registration of a device (e.g., a resonant sensor), when used for the first time, the device will send a challenge-response pair (CRP) generated by its PUF to the authentication server. The server compares these CRPs with the pre-stored CRPs to verify the authenticity of the device. If the match is successful, the device will be registered as a legitimate device and assigned a unique identifier.

[0111] Then, for actual application needs, there may be a situation where random numbers are used in combination with challenges in CRP. In this case, the verification server will generate a random number and use it as part of the challenge, combined with the random number and the incentive in CRP. Based on the combination of the random number and the incentive in CRP, the challenge is determined, a response is generated, and the response is returned to the server. The server regenerates the expected response with the same random number and compares it with the received response. In this method, random numbers are introduced on the basis of CRP to ensure that the challenge used for each verification is unique and prevent replay attacks. In addition, random numbers increase the security of the system, making it difficult for attackers to predict or guess the content of the challenge.

[0112] Furthermore, in an exemplary embodiment, a safety verification device for a resonant sensor is provided, such as Fig.11 As shown, a schematic diagram of the structure of a safety verification device for a resonant sensor is provided. The safety verification device can use the above-mentioned safety verification method to perform safety verification on the resonant sensor. The safety verification device includes:

[0113] The memory 1102 is used to store the PUF keys of the multiple resonant sensors generated in any of the above embodiments.

[0114] The random number generation module 1104 is used to generate a first random number; wherein the first random number is used as an excitation of the resonant sensor to generate a first response.

[0115] The decryption module 1106 is used to decrypt the second response returned by the resonant sensor using the PUF key to obtain a second random number; the second response is obtained after the resonant sensor to be tested encrypts the first random number.

[0116] The comparison module 1108 is used to compare the second random number with the first random number to obtain a comparison result.

[0117] The display module 1110 is used to display the comparison result and / or display the first random number and the second random number.

[0118] Optionally, in an exemplary embodiment, when the resonant sensor to be tested is a wireless MEMS sensor, the safety verification device of the resonant sensor also includes an antenna module and a communication module. The antenna module enables the device to transmit data wirelessly without physical connection, and the communication module enables it to exchange data with an external system, including sending data collected by the sensor and receiving external instructions.

[0119] The above-mentioned security verification device uses the first random number as the excitation of the resonant sensor to be tested to generate a first response, and uses the PUF key to decrypt the second response obtained after encryption based on the first random number to obtain a second random number, and performs security verification on the resonant sensor to be tested by comparing the first random number and the second random number. This method uses the PUF key and the challenge-response mechanism to achieve security verification of the resonant sensor, ensure the authenticity of the sensor and the security of the data, thereby enhancing security and anti-attack capabilities.

[0120] It should be understood that, although the various steps in the flowcharts involved in the above-mentioned embodiments are displayed in sequence according to the indication of the arrows, these steps are not necessarily executed in sequence according to the order indicated by the arrows. Unless there is a clear explanation in this article, the execution of these steps does not have a strict order restriction, and these steps can be executed in other orders. Moreover, at least a part of the steps in the flowcharts involved in the above-mentioned embodiments can include multiple steps or multiple stages, and these steps or stages are not necessarily executed at the same time, but can be executed at different times, and the execution order of these steps or stages is not necessarily to be carried out in sequence, but can be executed in turn or alternately with other steps or at least a part of the steps or stages in other steps.

[0121] In one embodiment, a computer-readable storage medium is provided, on which a computer program is stored. When the computer program is executed by a processor, the steps in the above-mentioned method embodiments are implemented.

[0122] In one embodiment, a computer program product is provided, including a computer program, which implements the steps in the above method embodiments when executed by a processor.

[0123] In one embodiment, a computer device is further provided, including a memory and a processor, wherein a computer program is stored in the memory, and the processor implements the steps in the above method embodiments when executing the computer program.

[0124] It should be noted that when a component is referred to as being "fixed to" or "disposed on" another component, it may be directly on the other component or there may also be a central component. When a component is considered to be "connected to" another component, it may be directly connected to the other component or there may be a central component at the same time. The terms "vertical", "horizontal", "upper", "lower", "left", "right" and similar expressions used in the specification of this application are for illustrative purposes only and do not represent the only implementation method.

[0125] In addition, the terms "first" and "second" are used only for descriptive purposes and cannot be understood as indicating or implying relative importance or implicitly indicating the number of indicated technical features. Thus, the features defined as "first" and "second" may explicitly or implicitly include at least one of the features. In the description of the present application, the meaning of "multiple" is at least two, such as two, three, etc., unless otherwise clearly and specifically defined. In addition, the terms "including" and "having" and any of their variations are intended to cover non-exclusive inclusions. For example, a process, method, device, product or equipment that includes a series of steps or units is not limited to the listed steps or units, but optionally also includes steps or units that are not listed, or optionally also includes other steps or units inherent to these processes, methods, products or equipment.

[0126] In the present application, unless otherwise clearly specified and limited, a first feature being “above” or “below” a second feature may mean that the first feature is directly in contact with the second feature, or the first feature and the second feature are indirectly in contact through an intermediate medium. Moreover, a first feature being “above”, “above” or “above” a second feature may mean that the first feature is directly above or obliquely above the second feature, or simply means that the first feature is higher in level than the second feature. A first feature being “below”, “below” or “below” a second feature may mean that the first feature is directly below or obliquely below the second feature, or simply means that the first feature is lower in level than the second feature.

[0127] Unless otherwise defined, all technical and scientific terms used in the specification of this application have the same meaning as those commonly understood by those skilled in the art to which this application belongs. The terms used in the specification of this application are only for the purpose of describing specific embodiments and are not intended to limit this application. The term "and / or" used in the specification of this application includes any and all combinations of one or more related listed items.

[0128] The technical features of the above embodiments can be combined without changing the basic principles of the present application. To make the description concise, not all possible combinations of the technical features in the above embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

[0129] The above embodiments only express several implementation methods of the present application, and the descriptions thereof are relatively specific and detailed, but they cannot be understood as limiting the scope of the patent application. It should be pointed out that, for a person of ordinary skill in the art, several variations and improvements can be made without departing from the concept of the present application, and these all belong to the protection scope of the present application. Therefore, the scope of patent protection of the present application shall be subject to the attached claims.

Claims

1. A method for generating a PUF characteristic value of a resonant sensor, characterized in that: include: A resonant sensor is provided, and a power supply of the resonant sensor is turned on. The resonant sensor includes a power supply, a driving voltage adjustment circuit, and a resonant sensor module. The driving voltage adjustment circuit is used to adjust a driving voltage input to the resonant sensor module. The driving voltage adjustment circuit adjusts the driving voltage input to the resonant sensor in a manner that includes adjusting a resistor in the driving voltage adjustment circuit connected to the resonant sensor, thereby adjusting the driving voltage input to the resonant sensor. Inputting multiple sets of driving voltages to the resonant sensor module via the driving voltage adjustment circuit; Measure and obtain the primary vibration amplitude and the secondary vibration amplitude of the resonant sensor module under each set of driving voltages; Using the plurality of groups of driving voltages as excitations and the primary oscillation amplitude and the secondary oscillation amplitude under each group of driving voltages as responses, generating PUF characteristic values; The resonant sensor module includes: a resonator, which generates resonance under the action of an excitation source, wherein the resonance includes a main vibration and a secondary vibration, and the resonance parameters include a main vibration frequency, a main vibration amplitude, a secondary vibration frequency, and a secondary vibration amplitude; A driver connected to the resonator, the driver is used to generate an excitation source to drive the resonator to resonate; A detector connected to the resonator, wherein the detector is used to detect a resonance parameter of the resonator.

2. The PUF feature value generation method according to claim 1, characterized in that: The step of inputting a plurality of driving voltages to the resonant sensor module via the driving voltage adjustment circuit is specifically as follows: inputting a plurality of driving voltages to the driver via the driving voltage adjustment circuit, and the excitation source generated by the driver drives the resonator to generate resonance; The measurement obtains the primary vibration amplitude and the secondary vibration amplitude of the resonant sensor module under each set of driving voltages, specifically: The detector is used to measure the main vibration amplitude and the secondary vibration amplitude of the resonator under each set of driving voltages to obtain multiple sets of main vibration amplitudes and secondary vibration amplitudes.

3. The PUF feature value generation method according to claim 2, characterized in that: Also includes: The detector is used to measure the main vibration frequency and the secondary vibration frequency under each set of driving voltages; The generating of the PUF characteristic value specifically comprises: taking the multiple groups of the driving voltages as excitations, taking the main oscillation frequency, main oscillation amplitude, secondary oscillation frequency and secondary oscillation amplitude under each group of driving voltages as responses, and generating the PUF characteristic value.

4. The method for generating a PUF characteristic value according to any one of claims 1 to 3, characterized in that: The resonant sensor is a MEMS sensor or an NMES sensor; the resonant sensor is a resonant pressure sensor, a resonant force sensor, a resonant displacement sensor, a resonant mass sensor, a resonant strain sensor, a resonant flow sensor, a resonant torque sensor, a resonant vibration sensor, a resonant liquid level sensor, a resonant gyroscope, a resonant gas sensor, a resonant magnetic sensor, a resonant biosensor, a resonant humidity sensor, a resonant temperature sensor, a resonant chemical sensor, a resonant acceleration sensor or a resonant inertial sensor.

5. The PUF feature value generation method according to claim 4, characterized in that: The resonator is a cantilever beam resonator, a double-ended fixed beam resonator, a ring resonator, a diaphragm resonator, a columnar resonator, a comb-tooth resonator, a piezoelectric resonator, or a nanowire resonator.

6. A resonant sensor PUF key generation method, characterized in that: include: Combining the PUF characteristic values ​​obtained by the PUF characteristic value generation method according to any one of claims 1 to 5 to obtain a plurality of CRP stimulus-response pairs; Performing analog-to-digital conversion on the response in the CRP stimulus-response pair to obtain bit data; The bit data is processed using a hash algorithm to generate a PUF key.

7. The resonant sensor PUF key generation method according to claim 6, characterized in that: The method also includes storing the PUF key in a security verification device of the resonant sensor.

8. A method for safety verification of a resonant sensor, characterized in that: include: A resonant sensor to be tested is provided, a security verification device is connected to the resonant sensor to be tested, and a power supply of the resonant sensor is turned on, wherein the security verification device stores a PUF key of the resonant sensor to be tested generated by the PUF key generation method according to claim 6 or claim 7; The security verification device generates a first random number and sends the first random number to the resonant sensor to be tested, and the resonant sensor to be tested takes the first random number as a challenge and generates a first response; The resonant sensor to be tested encrypts the first random number to obtain a second response, and sends the second response to the security verification device, wherein the encryption key of the first random number is the first response; Decrypting the second response using the PUF key stored in the security verification device as a decryption key to obtain a second random number; The second random number is compared with the first random number, and if the two are the same, it is determined that the resonant sensor to be tested is a safety device.

9. A resonant sensor safety verification device, characterized in that: The safety verification device can use the safety verification method described in claim 8 to perform safety verification on the resonant sensor, and the safety verification device includes: A memory, used to store PUF keys of multiple resonant sensors generated by the method of claim 6 or claim 7; A random number generation module, used to generate a first random number; A decryption module, configured to decrypt a second response returned by the resonant sensor using the PUF key to obtain a second random number; A comparison module, used for comparing the second random number with the first random number to obtain a comparison result; A display module is used to display the comparison result and / or display the first random number and the second random number.

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