A gas purifier

Abstract

The present invention discloses a gas purifier, which belongs to the technical field of gas purification equipment, and includes a first gas purification device and a second gas purification device arranged adjacent to each other, wherein the first gas purification device includes a purification tank for containing liquid alloy, a telescopic device arranged at the bottom of the purification tank, a pressing assembly installed at the output end of the telescopic device, an extrusion molding assembly and a material removal assembly installed at the top of the purification tank, a gas inlet is provided at the bottom of the purification tank, a gas outlet is provided at the top of the purification tank, the pressing assembly is slidably matched with the inner wall of the purification tank, the telescopic device drives the pressing assembly to move along the vertical direction, the pressing assembly presses the solid reaction material to the extrusion molding assembly, and then removes it through the material removal assembly, the pressing assembly pushes the liquid alloy when rising, and the liquid alloy enters the second gas purification device through the filter hole. The device of the present invention can process the generated solid reaction material in time.

Description

Technical Field

[0001] The invention belongs to the technical field of gas purification equipment, and in particular relates to a gas purifier. Background Art

[0002] In the semiconductor industry, hydrogen, nitrogen, inert gas, and reducing gas are often needed, and these gases are required to have "ultra-high purity", especially low-level impurities such as oxygen, water, carbon dioxide, and carbon monoxide. CN103816770B discloses a gas purifier, which places an alloy material in a stainless steel container. The gas inlet is inserted into the liquid alloy, and the gas outlet is above the liquid alloy. When the gas passes through the liquid alloy, the gas containing oxygen elements in the gas is absorbed by the liquid alloy. Although the device can continuously provide consumed aluminum, the generated aluminum oxide floats on the surface of the liquid alloy and cannot be discharged in time, which not only affects the efficiency of subsequent chemical reactions, but also hinders the discharge of purified gas. Summary of the invention

[0003] In view of this, the object of the present invention is to provide a gas purifier that can process the generated solid reaction materials in a timely manner to solve the above technical problems.

[0004] In order to achieve the above object, the present invention provides the following technical solutions:

[0005] A gas purifier disclosed in the present invention comprises a first gas purification device and a second gas purification device arranged adjacent to each other, wherein the first gas purification device and the second gas purification device are connected through a filter hole, and a filter plate is installed in the filter hole; the first gas purification device and the second gas purification device have the same structure, wherein the first gas purification device comprises a purification tank for containing liquid alloy, a telescopic device arranged at the bottom of the purification tank, a pressing assembly installed at the output end of the telescopic device, an extrusion molding assembly installed at the top of the purification tank, and a material removal assembly, wherein a gas inlet is provided at the lower part of the purification tank, a gas outlet is provided at the upper part of the purification tank, the pressing assembly is slidably matched with the inner wall of the purification tank, the telescopic device drives the pressing assembly to move in a vertical direction, the pressing assembly presses the solid reaction material to the extrusion molding assembly, and then removes it through the material removal assembly, the pressing assembly pushes the liquid alloy when rising, and the liquid alloy enters the second gas purification device through the filter hole.

[0006] Furthermore, the extrusion molding component includes a top plate, an extrusion hole opened on the top plate, and an opening and closing component for controlling the opening and closing of the extrusion hole. The top plate is fixedly installed on the top of the purification tank. After the solid reaction material is extruded through the extrusion hole, the formed solid reaction material is cut off by the material removal component.

[0007] Furthermore, the opening and closing assembly includes a hose, a hard tube, a rotating ring and a rotating drive device, one end of the hose is fixed in the extrusion hole, the other end of the hose is connected to the hard tube, the hard tube is installed in a through hole opened on the rotating ring, the rotating rings are arranged on the upper side of the top plate at intervals, the rotating rings are rotatably installed on the inner side of the upper end of the purification tank, and the rotating rings are driven to rotate by the rotating drive device installed on the top plate.

[0008] Furthermore, a plurality of slits are provided on the surface of the hose, the slits are evenly spaced in the axial direction of the hose, and the slits do not penetrate in the circumferential direction of the hose.

[0009] Furthermore, a retaining ring is fixed to the inner ring of the rotating ring, and the retaining ring extends upward in a vertical direction.

[0010] Furthermore, the clamping assembly includes a pressing plate, a push plate arranged in parallel and spaced relationship at the lower side of the pressing plate, and a support plate connecting the pressing plate and the push plate. The push plate is connected to the output end of the telescopic device, and a receiving cavity for receiving solid aluminum is formed between the pressing plate and the push plate.

[0011] Furthermore, a filter ring is provided on the edge of the pressing plate, and the filter ring connects the inner cavity of the purification tank with the accommodating cavity.

[0012] Furthermore, the first gas purification device and the second gas purification device are simultaneously installed in a heating tank, and the heating tank is supported by a bracket.

[0013] Furthermore, a waste chamber is formed between the heating tank and the purification tank, and the waste chamber is used to receive the material removed by the material removal component.

[0014] The beneficial effects of the present invention are:

[0015] A gas purifier disclosed in the present invention, when it is necessary to remove solid reaction materials in a first gas purification device, the telescopic device is started, and the telescopic device drives the clamping component to move upward in the vertical direction. The clamping component presses the solid reaction materials against the extrusion molding component, and then removes them through the material removal component. Therefore, the device of the present invention can be used to process the generated solid reaction materials in time to ensure the gaseous purification efficiency.

[0016] In the device of the present invention, the pressing assembly pushes the liquid alloy when rising, and the liquid alloy then enters the second gas purification device through the filter hole. In a subsequent stage, the second gas purification device replaces the first gas purification device to purify the gas. By using two purification devices to perform gas purification work alternately, the continuity of the device operation is guaranteed and the work efficiency is improved.

[0017] In the device disclosed in the present invention, the gas inlet is arranged at the lower part of the purification tank, and the outlet is arranged at the upper part, so that the gas to be purified can be purified more thoroughly, and when the compression assembly rises, the gas in the first gas purification device can pass through the filter hole into the second gas purification device and then be discharged from the gas outlet of the second gas purification device in time, thereby ensuring the purity of the purified gas and the smoothness of the purification work.

[0018] Other advantages, objectives and features of the present invention will be described in the following description and will be apparent to those skilled in the art to some extent, or those skilled in the art may be taught from the practice of the present invention. The objectives and other advantages of the present invention may be realized and obtained through the following description. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] In order to make the purpose, technical solution and beneficial effects of the present invention clearer, the present invention provides the following drawings for illustration:

[0020] Figure 1 It is a schematic diagram of the structure of the gas purifier of the present invention;

[0021] Figure 2 It is a schematic diagram of the structure of the extrusion molding component;

[0022] Figure 3 is a cross-sectional view of an extruded component;

[0023] Figure 4 is a structural schematic diagram of a clamping assembly;

[0024] Figure 5 A schematic diagram of the structure of the hose.

[0025] The markings in the accompanying drawings are as follows: first gas purification device 1, second gas purification device 2, filter hole 3, filter plate 4, purification tank 5, telescopic device 6, clamping assembly 7, extrusion molding assembly 8, material removal assembly 9, gas inlet 10, gas outlet 11, solid reaction material 12, liquid alloy 13, top plate 14, extrusion hole 15, hose 16, hard pipe 17, rotating ring 18, rotating drive device 19, through hole 20, slit 21, baffle ring 22, pressure plate 23, push plate 24, support plate 25, solid aluminum 26, accommodating chamber 27, filter ring 28, heating tank 29, bracket 30, waste chamber 31. DETAILED DESCRIPTION

[0026] like Figures 1 to 5As shown, a gas purifier disclosed in the present invention comprises a first gas purification device 1 and a second gas purification device 2 arranged adjacent to each other, the first gas purification device 1 and the second gas purification device 2 are connected through a filter hole 3, a filter plate 4 is installed in the filter hole 3, the first gas purification device 1 and the second gas purification device 2 of the present invention use two completely identical sets of equipment, the two can be completely replaced, but the working processes are independent and staggered, and the two purification devices are used to perform gas purification work alternately, which ensures the continuity of the device operation and improves the work efficiency. The two adjacent purification devices of the present invention are used to facilitate the maintenance of the two sets of equipment and the filter plate 4 at the same time.

[0027] In some other embodiments, the first gas purification device 1 and the second gas purification device 2 may also be connected by a pipeline, and the filter plate 4 in the pipeline only allows the liquid alloy 13 to pass through, and does not allow the solid reaction material 12 to pass through, thereby improving the removal efficiency of the solid reaction material 12. In this embodiment, the liquid alloy 13 is made of gallium-aluminum alloy, which is liquid at high temperature, and the solid reaction material 12 is aluminum oxide after the reaction, which floats on the upper surface of the liquid alloy 13 and is easy to remove. In order to avoid affecting the liquid alloy 13, the above devices are all made of high melting point materials and will not dissolve in the liquid alloy 13 to prevent affecting the purification process.

[0028] In the embodiment of the present invention, the first gas purification device 1 and the second gas purification device 2 have the same structure, and the arrangement of the two is symmetrical relative to the plane where the filter hole 3 is located. Taking the first gas purification device 1 as an example, the first gas purification device 1 includes a purification tank 5 for containing liquid alloy 13, a telescopic device 6 arranged at the bottom of the purification tank 5, a clamping assembly 7 installed at the output end of the telescopic device 6, an extrusion molding assembly 8 and a material removal assembly 9 installed at the top of the purification tank 5, and the purification tank 5 is a straight cylinder as a whole, so that when the clamping assembly 7 moves up and down, it is possible to ensure sealing with its edge. The telescopic device 6 adopts a hydraulic cylinder, which is fixed at the bottom of the purification tank 5, and drives the clamping assembly 7 to move up and down by telescoping. It can be understood that the telescopic device 6 can adopt a cylinder or a linear motor or other linear displacement mechanism, which can be selected according to actual conditions.

[0029] In some other embodiments, the extrusion molding component 8 and the material removal component 9 can use a conventional extrusion molding machine and a cutter, and the cutter is responsible for cutting off the extruded solid reaction material 12 to facilitate subsequent use.

[0030] Specifically, a gas inlet 10 is provided at the lower portion of the purification tank 5, and a gas outlet 11 is provided at the upper portion of the purification tank 5, which not only allows the gas to fully react in the liquid alloy 13, but also allows the gas in the first gas purification device 1 to pass through the filter hole 3 into the second gas purification device 2 when the compression assembly 7 rises, and then be discharged from the gas outlet 11 of the second gas purification device 2 in time, thereby ensuring the purity of the purified gas and the smoothness of the purification work.

[0031] Among them, the pressing component 7 is slidably matched with the inner wall of the purification tank 5, and the telescopic device 6 drives the pressing component 7 to move in the vertical direction. The pressing component 7 presses the solid reaction material 12 on the extrusion molding component 8, and then removes it through the material removal component 9. The pressing component 7 pushes the liquid alloy 13 when rising, and the liquid alloy 13 enters the second gas purification device 2 through the filter hole 3, so that the second gas purification device 2 can replace the first gas purification device 1 to purify the gas. The present invention ensures the continuity of the device operation and improves the work efficiency by using two purification devices to perform gas purification work alternately.

[0032] In this embodiment, the cross section of the purification tank 5 is circular, and the extrusion molding assembly 8 includes a top plate 14, an extrusion hole 15 opened on the top plate 14, and an opening and closing assembly for controlling the opening and closing of the extrusion hole 15. The top plate 14 is coaxially fixedly installed on the top of the purification tank 5. When the pressing device squeezes the solid reaction material 12 to the top plate 14, the solid reaction material 12 is extruded through the extrusion hole 15, and the solid reaction material 12 after molding is removed by the material removal assembly 9. The solid reaction material 12 can be discharged in time, reducing the impact of the accumulation of the solid reaction material 12 on the purification tank 5.

[0033] In some other embodiments, the opening and closing component can adopt a conventional electrically controlled valve. During the purification reaction, the valve is closed. When the solid reaction material 12 needs to be removed, the valve needs to be opened so that the solid reaction material 12 can be removed smoothly.

[0034] In this embodiment, in order to facilitate the unified opening and closing of the channels of each extrusion hole 15, a unique opening and closing component is used. The opening and closing component disclosed in the present invention includes a hose 16, a hard tube 17, a rotating ring 18 and a rotating drive device 19. The hose 16 and the hard tube 17 are coaxially connected and fixed. The hose 16 adopts a rubber tube with low material cost. One end of the hose 16 is fixed in the extrusion hole 15, and the other end of the hose 16 is connected to the hard tube 17. The hard tube 17 is installed in the through hole 20 opened on the rotating ring 18. The rotating ring 18 is arranged on the upper side of the top plate 14 at intervals. The rotating ring 18 is rotatably installed on the inner side of the upper end of the purification tank 5. The rotating ring 18 is driven to rotate by the rotating drive device 19 installed on the top plate 14. The rotating drive device 19 of the present invention includes a hydraulic cylinder, a rotating support plate and a rotating shaft. The hydraulic cylinder is fixed on the top plate 14. The output end of the hydraulic cylinder is connected to the rotating support plate. The rotating support plate is connected to the rotating ring 18 and the rotating shaft. The rotating shaft is rotatably installed at the center of the top plate 14. After the hydraulic cylinder is started, it can drive the rotating support plate to rotate around the rotating shaft.

[0035] In some other embodiments, the rotation driving device 19 may also adopt a conventional device, such as a variable speed motor, etc. However, the torque of the variable speed motor is limited and cannot well control the deformation of the multiple hoses 16.

[0036] When the opening and closing assembly of the present invention is used, the hard tube 17 is located at the upper end of the soft tube 16. Specifically, when the solid reaction material 12 is extruded, the rotating ring 18 is controlled to be in the initial state. At this time, the hard tube 17 is coaxial with the soft tube 16, and the solid reaction material 12 can be extruded normally. When the passage of the extrusion hole 15 needs to be closed, the rotating drive device 19 controls the rotating ring 18 to rotate a certain angle. After the rotating ring 18 rotates, it synchronously drives each hard tube 17 to move around its circumferential direction. At this time, the soft tube 16 can be driven to deform until the soft tube 16 closes the entire extrusion hole 15, realizing the function of unified closure of the extrusion hole 15.

[0037] In this embodiment, a plurality of slits 21 are provided on the surface of the hose 16. The slits 21 are evenly spaced in the axial direction of the hose 16. The slits 21 do not penetrate the circumference of the hose 16, and there are three slits 21 on one circumference. The positions of the slits 21 are more conducive to deformation. By changing the cutting positions of the slits 21, the continuity of the hose 16 can be ensured, and the deformation position of the hose 16 can be guided to deform, so as to increase the stability of the structure during the opening and closing process of the opening and closing assembly.

[0038] In this embodiment, a retaining ring 22 is fixed to the inner ring of the rotating ring 18, and the retaining ring 22 extends upward in the vertical direction. By setting the retaining ring 22, the position of the inner ring of the rotating ring 18 can be blocked to prevent the solid reaction material 12 from entering the inner side of the rotating ring 18, and the solid reaction material 12 can be cleaned more conveniently. Of course, the retaining ring 22 structure here can also be some other irregular structures that have the function of blocking the reaction material, such as a conical retaining ring 22, or a cylindrical retaining ring 22, which is made of rubber material and can be easily cleaned.

[0039] In this embodiment, the pressing assembly 7 includes a pressing plate 23, a push plate 24 arranged parallel and spaced below the pressing plate 23, and a support plate 25 connecting the pressing plate 23 and the push plate 24. The push plate 24 is connected to the output end of the telescopic device 6. The pressing plate 23 and the push plate 24 are separated to form a receiving cavity 27 for receiving the solid aluminum 26. By providing the receiving cavity 27, the placement of the solid aluminum 26 can be facilitated, so the concentration of aluminum can be adjusted, and the direct compression of the solid aluminum 26 can be avoided. In some other embodiments, a relevant aluminum addition port can also be opened on the purification tank 5, but this method is more troublesome and cannot be used for continuous production.

[0040] In this embodiment, a filter ring 28 is provided on the edge of the pressure plate 23, and the filter ring 28 connects the inner cavity of the purification tank 5 with the accommodating cavity 27 to prevent alumina from entering the accommodating cavity 27. However, solid aluminum 26 can be melted into the liquid alloy 13 at the same time, so that aluminum can be replenished in time.

[0041] In this embodiment, the first gas purification device 1 and the second gas purification device 2 are installed in a heating tank 29 at the same time. The heating temperature of the heating tank 29 is between 300°C and 400°C. The heating tank 29 is supported by a bracket 30 to maintain the stability of the structure. A waste cavity 31 is formed between the heating tank 29 and the purification tank 5. The waste cavity 31 is used to receive the material removed by the removal component 9, which can facilitate the recycling of aluminum oxide.

[0042] Finally, it should be noted that the above preferred embodiments are only used to illustrate the technical solutions of the present invention rather than to limit it. Although the present invention has been described in detail through the above preferred embodiments, those skilled in the art should understand that various changes can be made in form and details without departing from the scope defined by the claims of the present invention.

Claims

1. A gas purifier, characterized in that: The invention comprises a first gas purification device (1) and a second gas purification device (2) which are arranged adjacent to each other, wherein the first gas purification device (1) and the second gas purification device (2) are connected via a filter hole (3), wherein a filter plate (4) is installed in the filter hole (3); the first gas purification device (1) and the second gas purification device (2) have the same structure, wherein the first gas purification device (1) comprises a purification tank (5) for containing a liquid alloy (13), a telescopic device (6) arranged at the bottom of the purification tank (5), a pressing assembly (7) installed at the output end of the telescopic device (6), an extrusion molding assembly (8) and a material removal assembly (9) installed at the top of the purification tank (5); a gas inlet (10) is provided at the bottom of the purification tank (5), a gas outlet (11) is provided at the top of the purification tank (5), and the pressing assembly (8) is provided at the top of the purification tank (5). (7) is slidably matched with the inner wall of the purification tank (5), the telescopic device (6) drives the pressing component (7) to move in the vertical direction, the pressing component (7) presses the solid reaction material (12) on the extrusion molding component (8), and then removes it through the material removal component (9), the pressing component (7) pushes the liquid alloy (13) when rising, and the liquid alloy (13) enters the second gas purification device (2) through the filter hole (3); the pressing component (7) includes a pressing plate (23), a push plate (24) arranged parallel and spaced below the pressing plate (23), and a support plate (25) connecting the pressing plate (23) and the push plate (24), the push plate (24) is connected to the output end of the telescopic device (6), and a receiving cavity (27) for receiving solid aluminum (26) is formed between the pressing plate (23) and the push plate (24).

2. A gas purifier according to claim 1, characterized in that: The extrusion molding component (8) comprises a top plate (14), an extrusion hole (15) formed on the top plate (14), and an opening and closing component for controlling the opening and closing of the extrusion hole (15); the top plate (14) is fixedly mounted on the top of the purification tank (5); after the solid reaction material (12) is extruded through the extrusion hole (15), the formed solid reaction material (12) is removed by the material removal component (9).

3. A gas purifier according to claim 2, characterized in that: The opening and closing assembly comprises a hose (16), a hard tube (17), a rotating ring (18) and a rotating drive device (19); one end of the hose (16) is fixed in the extrusion hole (15); the other end of the hose (16) is connected to the hard tube (17); the hard tube (17) is installed in a through hole (20) provided on the rotating ring (18); the rotating ring (18) is arranged at intervals on the upper side of the top plate (14); the rotating ring (18) is rotatably installed on the inner side of the upper end of the purification tank (5); and the rotating ring (18) is driven to rotate by the rotating drive device (19) installed on the top plate (14).

4. A gas purifier according to claim 3, characterized in that: A plurality of slits (21) are provided on the surface of the hose (16), the slits (21) are evenly spaced in the axial direction of the hose (16), and the slits (21) do not penetrate in the circumferential direction of the hose (16).

5. A gas purifier according to claim 4, characterized in that: A retaining ring (22) is fixed to the inner ring of the rotating ring (18), and the retaining ring (22) extends upward in a vertical direction.

6. A gas purifier according to claim 1, characterized in that: A filter ring (28) is provided on the edge of the pressure plate (23), and the filter ring (28) connects the inner cavity of the purification tank (5) with the accommodating cavity (27).

7. A gas purifier according to any one of claims 1 to 6, characterized in that: The first gas purification device (1) and the second gas purification device (2) are installed simultaneously in a heating tank (29), and the heating tank (29) is supported by a bracket (30).

8. A gas purifier according to claim 7, characterized in that: A waste chamber (31) is formed between the heating tank (29) and the purification tank (5), and the waste chamber (31) is used to receive materials removed by the material removal component (9).

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