Micro-control coating device for manufacturing micro-nano imprint mold

Abstract

The invention discloses a micro-control coating device for manufacturing a micro-nano imprinting mold, and relates to the field of mold coating. In order to overcome the defects that unnecessary waste is caused when the surface of the whole mold is coated, and meanwhile, the machining time is prolonged due to spraying of the whole surface. A micro-control coating device for manufacturing a micro-nano imprinting mold comprises a base, the base is fixedly connected with a first fixing frame, the first fixing frame is rotationally connected with a glass door, the base is slidably connected with a sliding frame, a feeding machine is fixedly installed on the base, a sliding part of a linear motor is fixedly connected with a second fixing frame, and a spraying frame is fixedly connected into the second fixing frame. And the spraying frame is communicated with the feeding machine through a feeding pipe. The spraying area is covered with the spraying frame and the rubber frame, complete resetting of the spraying area is achieved, the spraying time and the material cost are saved, and waste caused by large-range film coating is avoided.

Description

Technical Field

[0001] The invention relates to the field of mold coating, and in particular to a micro-controlled coating device for manufacturing micro-nano imprint molds. Background Art

[0002] With the rapid development of nanomanufacturing technology, micro-nano imprinting molds, especially those with complex three-dimensional nanostructures, have shown great potential in the preparation of nanopatterns, micro-optical components, biosensors, etc. However, these fine structures are easily damaged during the imprinting process, and the physical and chemical properties of the material itself may not be sufficient to meet the industrial needs of repeated use. Therefore, it is particularly important to perform functional coating treatment on the mold surface.

[0003] In the process of mold coating, in order to strengthen the protection of the key areas of the stamping and reduce costs, the stamping area is usually coated. In the existing coating process, chemical vapor deposition (CVD) and physical vapor deposition (PVD) are commonly used coating technologies. Although they have shown significant advantages in many fields, they are all for coating the entire mold surface, which causes unnecessary waste. Especially when using precious metals or high-cost materials as coating raw materials, the cost is particularly high. At the same time, spraying the entire surface increases the processing time. Summary of the invention

[0004] In order to overcome the disadvantages of coating the entire mold surface, which causes unnecessary waste, especially when precious metals or high-cost materials are used as coating raw materials, the cost is particularly high, and spraying the entire surface increases the processing time, the present invention provides a micro-controlled coating device for manufacturing micro-nano imprint molds.

[0005] A micro-controlled coating device for manufacturing micro-nano imprint molds includes a base, the base is fixedly connected to a first fixed frame, the first fixed frame is rotatably connected to a glass door, a linear motor is fixedly installed on the side of the first fixed frame away from the glass door, the base is slidably connected to a sliding frame, a feeder is fixedly installed on the base, the sliding part of the linear motor is fixedly connected to a second fixed frame, a spraying frame is fixedly connected in the second fixed frame, and the spraying frame is connected to the feeder through a feeding pipe.

[0006] As an improvement of the above solution, the square opening size of the spray frame is the same as the size of the mold, and is used to cover the surface of the mold that needs to be coated and coat it.

[0007] As an improvement of the above solution, a rubber frame is further included, and the rubber frame is fixedly connected to the bottom of the spraying frame.

[0008] As an improvement on the above scheme, it also includes a fixed tube, which is fixedly connected to the inner side wall of the sliding frame, a through hole is opened inside the fixed tube, the through hole is connected to the outside of the sliding frame, a connecting frame is slidably connected inside the fixed tube, the connecting frame is slidably connected to the sliding frame on a side away from the fixed tube, air inlets are opened on both sides of the connecting frame, an air outlet is opened on the top of the connecting frame, a dual-axis motor is fixedly installed in the connecting frame, the output shafts of the dual-axis motor are fixedly connected to the rotating shaft, the rotating shaft is fixedly connected to blades, an air supply frame is fixedly connected to the top of the sliding frame, the air supply frame is connected to the air outlet, a suction chamber is opened on a side of the sliding frame close to the connecting frame, the sliding frame is fixedly connected to a guide rail, the connecting frame is fixedly connected to a slider, the slider is slidably connected in the guide rail, a spring is fixedly connected between the connecting frame and the sliding frame, and a guide block is fixedly connected to the base.

[0009] As an improvement of the above solution, the guide block is inclined on one side to push the connecting frame to move toward the rear side.

[0010] As an improvement of the above scheme, the interior of the connecting frame is L-shaped, and the front outlet of the connecting frame is connected to the suction chamber to drive the air to discharge the air inside the suction chamber. The rear outlet of the connecting frame is connected to the air delivery frame to introduce air into the air delivery frame.

[0011] As an improvement of the above solution, the suction cavity is evenly arranged with a plurality of suction holes for suction molding, so as to prevent the mold from deviating due to inertia during movement.

[0012] As an improvement of the above solution, the air supply rack is L-shaped with an opening toward the front, and is used to cool the mold after coating.

[0013] As an improvement of the above scheme, it also includes a servo motor, which is fixedly installed on the side wall inside the base, and the servo motor output shaft is fixedly connected to a screw, which is threadedly connected to a connecting frame, the connecting frame is slidably connected to the base, and a telescopic piece is fixedly connected between the connecting frame and the base. A first contact switch is fixedly connected to the side of the base adjacent to the servo motor, and the first contact switch is electrically connected to the servo motor through a wire through a control module, and is used to control the reversal of the servo motor and drive the sliding frame to return. At least two second contact switches are installed on the base, and the second contact switch is electrically connected to the servo motor through a wire, and the second contact switch is electrically connected to the feeder through a wire, and is used to synchronously control the temporary stop of the servo motor and the start of the linear motor, and delay the start of the feeder.

[0014] As an improvement of the above solution, it also includes a limiting block, which is fixedly connected to the sliding frame.

[0015] The present invention covers the spraying area by means of a spray frame and a rubber frame, thereby achieving complete resetting of the spraying area, saving spraying time and material costs, avoiding waste caused by large-scale coating, and avoiding pollution caused by material atomization and dispersion in the air during mold coating.

[0016] By continuously switching the air outlet of the connecting frame back and forth, the mold can be quickly and firmly fixed to prevent the mold from deviating from its position during the movement of the sliding frame.

[0017] Through the cooperation of the connecting frame and the air supply frame, the mold is cleaned before coating and cooled after coating. The whole process before and after coating is automatically switched quickly to ensure the quality and efficiency of the whole mold coating process.

[0018] The limit block is used to limit the mold, and the servo motor is controlled to rotate by the first contact switch and the second contact switch, thereby driving the sliding frame to transport the mold quickly and accurately, thereby improving the efficiency of the equipment's transportation work. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] Figure 1 It is a schematic diagram of the three-dimensional structure of the present invention.

[0020] Figure 2 It is a schematic diagram of the three-dimensional structure of part of the present invention.

[0021] Figure 3 It is a three-dimensional structural schematic diagram of components such as the linear motor, the sliding frame and the feeder of the present invention.

[0022] Figure 4 It is a schematic diagram of the three-dimensional structure of the second fixing frame and the spraying frame of the present invention.

[0023] Figure 5 It is a schematic diagram of the three-dimensional structure of the spray frame and the rubber frame of the present invention.

[0024] Figure 6 It is a schematic diagram of the three-dimensional structure of the sliding frame of the present invention.

[0025] Figure 7 It is a schematic diagram of the three-dimensional structure of the base and the sliding frame of the present invention.

[0026] Figure 8 It is a three-dimensional structural schematic diagram of the connecting frame, dual-axis motor, rotating shaft and other components of the present invention.

[0027] Fig. 9 It is a three-dimensional structural schematic diagram of the connecting frame, sliding block, spring and other components of the present invention.

[0028] Fig.10 It is a schematic diagram of the three-dimensional structure of the connecting frame of the present invention.

[0029] Fig.11 It is a schematic diagram of the three-dimensional structure of the base and the second contact switch of the present invention.

[0030] Fig.12 It is a three-dimensional structural schematic diagram of the servo motor, screw rod, connection frame and other components of the present invention.

[0031] Names of the numbers in the figure: 101, base, 102, first fixed frame, 103, glass door, 104, linear motor, 105, sliding frame, 106, feeder, 107, second fixed frame, 108, feeding pipe, 1081, mold, 109, spray frame, 110, rubber frame, 201, fixed pipe, 202, connecting frame, 203, dual-axis motor, 204, rotating shaft, 205, blade, 206, air supply frame, 2061, guide rail, 207, slider, 208, spring, 209, air inlet, 210, air outlet, 211, suction chamber, 212, guide block, 301, servo motor, 302, screw, 303, connecting frame, 304, telescopic piece, 305, first contact switch, 306, second contact switch, 401, limit block. DETAILED DESCRIPTION

[0032] The above scheme is further described below in conjunction with specific examples. It should be understood that these examples are used to illustrate the present application and are not limited to the scope of the present application. The implementation conditions adopted in the examples can be further adjusted according to the conditions of the specific manufacturer, and the implementation conditions not specified are usually the conditions in conventional experiments.

[0033] Embodiment 1: A micro-controlled coating device for manufacturing a micro-nano imprint mold, such as Figure 1-Figure 6 As shown, it includes a base 101, a first fixed frame 102 is fixedly connected to the left side of the top of the base 101, a glass door 103 is rotatably connected to the front side of the first fixed frame 102, a linear motor 104 is fixedly installed on the rear side of the first fixed frame 102, a sliding frame 105 is slidably connected to the right side of the top of the base 101, a feeder 106 is fixedly installed on the left side of the lower part of the base 101, a second fixed frame 107 is fixedly connected to the front side of the sliding part of the linear motor 104, a spray frame 109 is fixedly connected inside the second fixed frame 107, the top of the spray frame 109 is connected to the feeder 106 through a feeding pipe 108, the square opening size of the spray frame 109 is the same as the size of the mold 1081, and is used to cover the surface of the mold 1081 that needs to be coated and coat it.

[0034] like Figure 4 and Figure 5 As shown, a rubber frame 110 is also included, and the rubber frame 110 is fixedly connected to the bottom of the spray frame 109.

[0035] First, place the mold 1081 that needs to be coated on the left and right sides of the top of the sliding frame 105, then push the sliding frame 105 to move to the left and push it into the first fixed frame 102, so that the mold 1081 is located below the spray frame 109, and then start the linear motor 104, thereby driving the second fixed frame 107, the feeding pipe 108, the spray frame 109 and the rubber frame 110 to move downward to cover the area of ​​the mold 1081 that needs to be sprayed with the coating, and then start the feeder 106, and the feeder 106 conveys the coating material to the spray frame 109 through the feeding pipe 108, and then the material is evenly sprayed on the mold 1081 on the left side of the top of the sliding frame 105 through the spray frame 109 to complete the coating, and then through the upper The same principle is used to coat the mold 1081 on the right side of the sliding frame 105. When the coating is completed, the linear motor 104 is started to rise and reset, thereby driving the second fixed frame 107, the spray frame 109 and the rubber frame 110 to rise and reset, and finally the sliding frame 105 and the mold 1081 are pushed to the right, and the mold 1081 is pushed out. After standing for a period of time, the mold 1081 after coating is taken out. In summary, the spraying area is covered by the spray frame 109 and the rubber frame 110, so that the spraying area is completely reset, which saves the spraying time and material cost, avoids the waste caused by large-scale coating, and avoids the pollution caused by the material atomization and dispersion in the air when the mold 1081 is coated.

[0036] like Figure 1 , Figure 7 , Figure 8 , Fig. 9 and Fig.10As shown, it also includes a fixed tube 201, which is fixedly connected to the middle side wall of the front side of the sliding frame 105. A through hole is opened in the fixed tube 201, and the through hole is connected to the outside of the sliding frame 105. A connecting frame 202 is slidably connected to the rear side of the fixed tube 201. The rear side of the connecting frame 202 is slidably connected to the sliding frame 105. A dual-axis motor 203 is fixedly installed in the connecting frame 202. The front and rear output shafts of the dual-axis motor 203 are fixedly connected to the rotating shaft 204. The rotating shaft 204 is fixedly connected to the blade 205. An air supply frame 206 is fixedly connected to the rear side of the top of the sliding frame 105. The air supply frame 206 is L-shaped, with an opening facing the front side, and is used to cool the mold 1081 after coating. The rear outlet of the connecting frame 202 is connected to the air supply frame 206, and is used to introduce air into the air supply frame 206. The sliding frame 105 is fixedly connected to a guide rail 2061. The connecting frame 202 is fixed A slider 207 is connected, and the slider 207 is slidably connected in the guide rail 2061. A spring 208 is fixedly connected between the connecting frame 202 and the sliding frame 105. Air inlets 209 are opened on the front and rear sides of the connecting frame 202, and air outlets 210 are opened on the front and rear tops of the connecting frame 202. The bottom of the air supply frame 206 is connected with the top of the air outlet 210. A suction cavity 211 is opened in the upper part of the sliding frame 105. The suction cavity 211 is evenly arranged with a plurality of penetrating blister holes for blistering the blister mold 1081 to prevent the mold 1081 from deviating due to inertia during movement. The interior of the connecting frame 202 is L-shaped, and the front outlet of the connecting frame 202 is communicated with the suction cavity 211 to drive air to discharge the air inside the suction cavity 211. A guide block 212 is fixedly connected to the right side of the front of the base 101, and the guide block 212 is set to be inclined to one side to push the connecting frame 202 to move backward.

[0037] In order to prevent the mold 1081 from deviating from its position during movement due to inertia when the sliding frame 105 drives the mold 1081 to start and stop, so that the spray frame 109 deviates when spraying the mold 1081, resulting in coating failure, and in order to speed up the cooling of the coating layer after the coating is completed, the specific operation is as follows: when the mold 1081 is placed, it is aligned with the suction cavity 211 in the sliding frame 105. At this time, the mold 1081 is located at the front side of the air supply frame 206, and then the dual-axis motor 203 is started, thereby driving the rotating shaft 204 and the blades 205 on the front and rear sides to rotate clockwise, and the blades 205 on the front side of the connecting frame 202 exhaust the air inside the connecting frame 202, and the blades 205 on the rear side of the connecting frame 202 exhaust the air behind the sliding frame 105. The air from the outside is introduced into the interior of the connecting frame 202 through the air inlet 209, and then the air is quickly transported to the air outlet 210 through the L-shaped channel inside the connecting frame 202, and finally the high-speed flowing air is sent to the surface of the mold 1081 through the air delivery frame 206 to clean the surface of the mold 1081 and the dust attached to the surface, and then the sliding frame 105 is pushed to move to the left, and the sliding frame 105 drives the fixed pipe 201, the connecting frame 202, the dual-axis motor 203, the rotating shaft 204, the blade 205, the air delivery frame 206, the guide rail 2061, the slider 207 and the spring 208 to move to the left. In the process of the sliding frame 105 moving to the left, as the connecting frame 202 gradually separates from the guide block 212, the spring 20 8 gradually resets, thereby driving the connecting frame 202, the dual-axis motor 203, the rotating shaft 204, the blade 205 and the slider 207 to move forward, so that the outlet on the front side of the connecting frame 202 is aligned with the suction chamber 211, and the blade 205 on the front side of the connecting frame 202 discharges the air in the suction chamber 211, so that a sealed negative pressure area is formed between the suction chamber 211 and the bottom of the mold 1081, and the mold 1081 is firmly adsorbed on the top of the sliding frame 105 to prevent it from moving, and the air outlet 210 on the rear side of the connecting frame 202 is separated from the air supply frame 206, and the air supply frame 206 stops supplying air, so that the mold 1081 is ready for coating. When the mold 1081 completes the coating operation, as the right side of the sliding frame 105 resets, the spring 208 The connecting frame 202 contacts with the guide block 212 again, thereby pushing the connecting frame 202, the dual-axis motor 203, the rotating shaft 204, the blade 205 and the slider 207 to move backward, and the spring 208 is deformed and compressed under the force, and the air inlet 209 on the front side of the connecting frame 202 is separated from the suction chamber 211. The air enters the suction chamber 211 through the bottom of the sliding frame 105, so that the internal air pressure is restored to balance, thereby losing the adsorption effect on the mold 1081, which is convenient for taking. The air outlet 210 on the rear side of the connecting frame 202 is aligned with the air supply frame 206 again, so that the air supply frame 206 supplies air again to cool down the mold 1081 after the film is coated. In summary, the air outlet 210 of the connecting frame 202 is switched back and forth continuously, so that the mold 1081 is fixed quickly and firmly.The mold 1081 is prevented from deviating from its position during the movement of the sliding frame 105. At the same time, during the placement of the mold 1081, the connection frame 202 cooperates with the air supply frame 206 to clean the mold 1081 before coating, and the mold 1081 is cooled after coating. The entire process before and after coating is automatically switched quickly, ensuring the quality and efficiency of the entire coating process of the mold 1081.

[0038] like Figure 1 , Fig.11 , Fig.12 As shown, it also includes a servo motor 301, which is fixedly installed on the side wall inside the base 101. The output shaft of the servo motor 301 is fixedly connected to a screw rod 302, and the screw rod 302 is threadedly connected to the bottom of the connecting frame 303. The connecting frame 303 is slidably connected to the base 101, and a telescopic piece 304 is fixedly connected between the connecting frame 303 and the base 101. A first contact switch 305 is fixedly connected to the left side of the upper part of the base 101. The first contact switch 305 is electrically connected to the servo motor 301 through a wire through the control module, and is used to control the servo motor 301 to reverse and drive the sliding frame 105 to return. The base 101 is installed with at least two second contact switches 306, which are electrically connected to the servo motor 301 through a wire, and the second contact switch 306 is electrically connected to the feeder 106 through a wire, and is used to synchronously control the servo motor 301 to temporarily stop and start the linear motor 104, and delay the control of the feeder 106 to start.

[0039] Embodiment 2: Based on embodiment 1, Figure 1 and Fig.12 As shown, it also includes a limit block 401 , which is fixedly connected to the top of the sliding frame 105 .

[0040] In order to improve the placement accuracy and conveying speed of the mold 1081, the specific operation is as follows: after placing the two molds 1081 on the left and right sides of the sliding frame 105, align them with the limit block 401, and when aligned, start the servo motor 301, the servo motor 301 drives the screw 302 to rotate, and the screw 302 thereby drives the connecting frame 303, the sliding frame 105 and the corresponding components installed on the sliding frame 105 to move to the left, and the telescopic piece 304 follows the sliding frame 105 to retract, and when the sliding frame 105 moves from right to left to the first second contact switch 306, the second contact switch 306 sends an electrical signal, and the control module receives the electrical signal to control the servo motor 301 to stop moving. At this time, the mold 1081 is located directly below the spray frame 109, and then the control module controls the linear motor 104 to descend, and the mold 1081 on the left side of the sliding frame 105 is coated through the spray frame 109. When the coating is completed, the servo motor 301 Start again, thereby driving the screw 302 to rotate, and then driving the sliding frame 105 to move to the left. When the sliding frame 105 contacts the second second contact switch 306, the same working principle as mentioned above is triggered to coat the mold 1081 on the right side of the sliding frame 105. When the coating is completed, the servo motor 301 drives the sliding frame 105 to move to the left until it contacts the first contact switch 305. The first contact switch 305 sends an electrical signal. After the control module receives the electrical signal, it controls the servo motor 301 to reverse, and directly drives the sliding frame 105 to move to the right to the initial position to complete the reset. In summary, through the limiting of the limit block 401, the mold 1081 is quickly positioned. The servo motor 301 is controlled to rotate by the first contact switch 305 and the second contact switch 306, thereby driving the sliding frame 105 to quickly and accurately transport the mold 1081, thereby improving the quality and efficiency of the equipment's transportation work.

[0041] The above embodiments are only preferred embodiments of the present invention and are not intended to limit the scope of implementation of the present invention. Therefore, all equivalent changes made to the contents described in the claims of the present invention should be included in the scope of the claims of the present invention.

Claims

1. A micro-controlled coating device for manufacturing micro-nano imprint molds, characterized in that: The invention comprises a base (101), wherein the base (101) is fixedly connected to a first fixed frame (102), the first fixed frame (102) is rotatably connected to a glass door (103), a linear motor (104) is fixedly installed on a side of the first fixed frame (102) away from the glass door (103), the base (101) is slidably connected to a sliding frame (105), a feeder (106) is fixedly installed on the base (101), a sliding portion of the linear motor (104) is fixedly connected to a second fixed frame (107), a spraying frame (109) is fixedly connected inside the second fixed frame (107), and the spraying frame (109) is connected to the feeder (106) via a feeding pipe (108).

2. A micro-controlled coating device for manufacturing a micro-nano imprint mold as claimed in claim 1, characterized in that the spray The square opening of the frame (109) has the same size as the mold (1081) and is used to cover the surface of the mold (1081) that needs to be coated and perform coating on it.

3. The micro-controlled coating device for manufacturing a micro-nano imprint mold according to claim 2, characterized in that: It also includes a rubber frame (110), which is fixedly connected to the bottom of the spraying frame (109).

4. The micro-controlled coating device for manufacturing a micro-nano imprint mold according to claim 3, characterized in that: The invention also comprises a fixed tube (201), the fixed tube (201) being fixedly connected to the inner side wall of the sliding frame (105), a through hole being opened inside the fixed tube (201), the through hole being connected to the outside of the sliding frame (105), a connecting frame (202) being slidably connected inside the fixed tube (201), a side of the connecting frame (202) away from the fixed tube (201) being slidably connected to the sliding frame (105), air inlets (209) being opened on both sides of the connecting frame (202), an air outlet (210) being opened on the top of the connecting frame (202), a dual-axis motor (203) being fixedly installed inside the connecting frame (202), and the output shafts of the dual-axis motor (203) being fixedly connected to the rotating shaft (20 4), the rotating shaft (204) is fixedly connected with a blade (205), the top of the sliding frame (105) is fixedly connected with an air supply frame (206), the air supply frame (206) is communicated with the air outlet (210), a suction cavity (211) is opened on a side of the sliding frame (105) close to the connecting frame (202), the sliding frame (105) is fixedly connected with a guide rail (2061), the connecting frame (202) is fixedly connected with a slider (207), the slider (207) is slidably connected in the guide rail (2061), a spring (208) is fixedly connected between the connecting frame (202) and the sliding frame (105), and the base (101) is fixedly connected with a guide block (212).

5. The micro-controlled coating device for manufacturing a micro-nano imprint mold according to claim 4, characterized in that: The guide block (212) is inclined on one side and is used to push the connecting frame (202) to move toward the rear side.

6. The micro-controlled coating device for manufacturing a micro-nano imprint mold according to claim 5, characterized in that: The interior of the connecting frame (202) is L-shaped, and the front outlet of the connecting frame (202) is in communication with the suction chamber (211) and is used to drive air to discharge the air inside the suction chamber (211). The rear outlet of the connecting frame (202) is in communication with the air delivery frame (206) and is used to introduce air into the air delivery frame (206).

7. The micro-controlled coating device for manufacturing a micro-nano imprint mold according to claim 6, characterized in that: The suction cavity (211) is evenly arranged with a plurality of suction holes for suctioning the mold (1081) to prevent the mold (1081) from deviating due to inertia during movement.

8. The micro-controlled coating device for manufacturing a micro-nano imprint mold according to claim 7, characterized in that: The air supply rack (206) is L-shaped, with an opening facing the front, and is used to cool the mold (1081) after coating.

9. The micro-controlled coating device for manufacturing a micro-nano imprint mold according to claim 8, characterized in that: The device also includes a servo motor (301), the servo motor (301) being fixedly mounted on a side wall inside the base (101), the output shaft of the servo motor (301) being fixedly connected to a screw rod (302), the screw rod (302) being threadedly connected to a connecting frame (303), the connecting frame (303) being slidably connected to the base (101), a telescopic sheet (304) being fixedly connected between the connecting frame (303) and the base (101), a first contact switch (305) being fixedly connected to a side of the base (101) adjacent to the servo motor (301), the first contact switch (305) being ) is electrically connected to the servo motor (301) through a wire through a control module, and is used to control the servo motor (301) to reverse and drive the sliding frame (105) to return. The base (101) is equipped with at least two second contact switches (306), and the second contact switches (306) are electrically connected to the servo motor (301) through a wire. The second contact switches (306) are electrically connected to the feeder (106) through a wire, and are used to synchronously control the servo motor (301) to temporarily stop and the linear motor (104) to start, and at the same time delay the control of the feeder (106) to start.

10. The micro-controlled coating device for manufacturing a micro-nano imprint mold according to claim 9, characterized in that: It also includes a limiting block (401), which is fixedly connected to the sliding frame (105).

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