Clamping and positioning mechanism for photomasks

Abstract

This disclosure relates to a clamping and positioning mechanism for photomasks, comprising: a positioning frame, the positioning frame including two first frames and two second frames connected and forming a positioning space; a clamping and positioning assembly, the clamping and positioning assembly including a plurality of clamping and positioning devices, one of the two first frames and one of the two second frames respectively provided with a clamping and positioning device; a first moving assembly, the first moving assembly including a first driving device and a first mounting frame connected by a frame drive; and a second moving assembly, the second moving assembly including a second driving device and a second mounting frame connected by a drive, the second mounting frame being arranged opposite to the first mounting frame, and both the first mounting frame and the second mounting frame being provided with clamping and positioning devices; each clamping and positioning device includes a base and a positioning element, the positioning element being connected to the base and forming a clamping space between the positioning element and the base. The clamping and positioning mechanism for photomasks provided by this disclosure is easy to operate and facilitates rapid clamping of photomasks.

Description

Technical Field

[0001] This disclosure relates to the field of photomask processing technology, and more specifically, to a clamping and positioning mechanism for photomasks. Background Technology

[0002] Photomasks are an indispensable component in photolithography, and their quality and precision directly affect the performance and reliability of the product. Therefore, inspecting photomasks is a crucial step in ensuring product quality. Before inspection, a positioning mechanism is typically used to clamp the photomask. However, in current technologies, this positioning mechanism relies on manual clamping, which is cumbersome and hinders rapid clamping, resulting in low photomask inspection efficiency. Summary of the Invention

[0003] The purpose of this disclosure is to provide a clamping and positioning mechanism for photomasks that is easy to operate and facilitates rapid clamping of photomasks.

[0004] To achieve the above objectives, this disclosure provides a clamping and positioning mechanism for a photomask. The clamping and positioning mechanism includes: a positioning frame comprising two first frames and two second frames arranged opposite each other, the first frames connected to the second frames and forming a positioning space; a clamping and positioning assembly comprising a plurality of clamping and positioning devices, one of the two first frames and one of the two second frames respectively provided with a clamping and positioning device; and a first moving assembly comprising a first driving device and a first mounting bracket, the first mounting bracket being parallel to and opposite to the other of the two second frames, the first driving device being connected to the first mounting bracket. The system comprises a frame drive connection to drive the first mounting frame to move along the extension direction of the first frame, the first mounting frame being provided with the clamping and positioning device; and a second moving assembly, the second moving assembly including a second driving device and a second mounting frame, the second mounting frame being arranged opposite to the first mounting frame and slidably connected to one of the two second frames, the second driving device being drively connected to the second mounting frame to drive the second mounting frame to move along the extension direction of the second frame, the second mounting frame being provided with the clamping and positioning device; the clamping and positioning device including a base and a positioning member, the positioning member being connected to the base and forming a clamping space between the positioning member and the base for inserting a mask.

[0005] Optionally, the clamping and positioning device includes an adjusting member, the base is provided with a threaded hole, one end of the adjusting member is connected to the positioning member, and the other end passes through the threaded hole and is threadedly connected to the threaded hole.

[0006] Optionally, the clamping and positioning device includes an elastic element, the positioning element having a mounting hole and a stop flange, the stop flange protruding radially away from the inner wall of the mounting hole, the adjusting element including a rod-shaped body and a positioning flange, the positioning flange protruding radially away from the outer peripheral wall of the rod-shaped body, the elastic element being sleeved on the rod-shaped body, with one end of the elastic element abutting against the stop flange and the other end abutting against the base, the elastic force of the elastic element being used to push the positioning element until the stop flange abuts against the positioning flange.

[0007] Optionally, the stop flange divides the mounting hole into a first hole portion and a second hole portion arranged coaxially. The clamping and positioning device includes a first bearing, which is arranged in the first hole portion and is used to rotatably connect the positioning member and the rod-shaped body. The stop flange and the positioning flange respectively abut against the first bearing.

[0008] Optionally, the clamping and positioning device includes a second bearing, which is arranged in the second hole portion and is used to rotatably connect the positioning member and the rod-shaped body, and the elastic member and the stop flange respectively abut against the second bearing.

[0009] Optionally, the adjusting member is provided with an operating groove that extends from the end face of the rod-shaped body toward the base.

[0010] Optionally, the base is provided with an opening that extends from the outer surface of the base to communicate with the threaded hole and the extension direction of the opening intersects with the extension direction of the threaded hole. The clamping and positioning device includes a locking member that passes through the opening and abuts against the adjusting member to restrict the rotation of the adjusting member.

[0011] Optionally, the positioning element includes a columnar body and a clamping flange, the clamping flange protruding radially along the columnar body, and the clamping space being formed between the clamping flange and the base.

[0012] Optionally, the clamping flange is provided with a guide slope on its side facing the base, and the guide slope is inclined from the outer peripheral wall of the clamping flange toward the base.

[0013] Optionally, the base includes a base body and a flexible plate. The base body is provided with a groove, and the flexible plate is detachably embedded in the groove. The surface of the flexible plate is flush with the base body, and the clamping space is formed between the flexible plate and the clamping flange.

[0014] Optionally, the clamping and positioning device includes an adjusting handle, which includes a connected handle portion and a screw. The first mounting bracket, the second mounting bracket, the first frame, and the second frame are provided with sliding grooves, in which nuts are slidably disposed. The base is provided with a connecting hole, and the screw passes through the connecting hole and is threadedly connected to the corresponding nut.

[0015] Optionally, two clamping and positioning devices are provided near the second driving device on the second mounting bracket. The two clamping and positioning devices share the same base. One of the two positioning elements of the two clamping and positioning devices is arranged opposite to the positioning element of the clamping and positioning device on the second frame, and the other is arranged opposite to the positioning element of the clamping and positioning device on the first frame.

[0016] Optionally, the two ends of the first mounting bracket are slidably connected to the two first frames via first sliding seats. The first driving device is constructed as a cylinder, which is mounted on the first frame. The piston rod of the cylinder is parallel to the first frame and is connected to the first sliding seat in a transmission manner.

[0017] Optionally, the second mounting bracket is slidably connected to the second frame via a second sliding seat, and the second driving device is configured as a cylinder, which is mounted on the first frame, with the piston rod of the cylinder parallel to the second frame and throttle connected to the second sliding seat.

[0018] With the above technical solution, the clamping and positioning mechanism for photomasks provided in this disclosure, when in use, drives the first mounting frame to move along the extension direction of the first frame through the first driving device, and drives the second mounting frame to move along the extension direction of the second frame through the second driving device. Since both the first mounting frame and the second mounting frame are provided with clamping and positioning devices, when the first mounting frame and the second mounting frame move, they drive the clamping and positioning devices on them to move, so as to clamp and limit the photomask between multiple clamping and positioning devices. Furthermore, since the clamping and positioning device includes a base and a positioning element, the positioning element is connected to the base and forms a clamping space between the positioning element and the base for inserting the mask. The base is used to support and place the mask. When the first moving component and the second moving component cooperate, that is, when the first mounting bracket moves along the extension direction of the first frame and the second mounting bracket moves along the extension direction of the second frame, they drive their respective clamping and positioning devices to move and approach the mask, so that each side of the mask is inserted into the clamping space of the corresponding clamping and positioning device. In summary, the mask can be fully positioned by the cooperation of the first moving component and the second moving component, achieving one-time clamping, which is simple to operate and reduces manual operation. It is beneficial to quickly clamp the mask, thereby improving the detection efficiency of the mask.

[0019] Other features and advantages of this disclosure will be described in detail in the following detailed description section. Attached Figure Description

[0020] The accompanying drawings are provided to further illustrate the present disclosure and form part of the specification. They are used together with the following detailed description to explain the present disclosure, but do not constitute a limitation thereof. In the drawings:

[0021] Figure 1 This is a schematic diagram of the structure of a clamping and positioning mechanism for a photomask provided in an exemplary embodiment of this disclosure;

[0022] Figure 2 This is another schematic diagram of a clamping and positioning mechanism for a photomask provided in an exemplary embodiment of this disclosure;

[0023] Figure 3 This is a schematic diagram of the structure of a clamping and positioning device for a mask clamping and positioning mechanism provided in an exemplary embodiment of the present disclosure;

[0024] Figure 4 This is a cross-sectional view of a clamping and positioning device for a mask clamping and positioning mechanism provided in an exemplary embodiment of the present disclosure;

[0025] Figure 5 yes Figure 1 A magnified view of a portion of point A in the middle.

[0026] Explanation of reference numerals in the attached figures

[0027] 1-Positioning frame; 10-Slide groove; 11-First frame; 12-Second frame; 2-Clamping and positioning device; 20-Clamping space; 21-Base; 210-Base body; 211-Threaded hole; 212-Opening; 213-Groove; 214-Connecting hole; 22-Positioning element; 221-Mounting hole; 2211-First hole portion; 2212-Second hole portion; 222-Stop flange; 223-Columnar body; 224-Clamping flange; 2241-With guide slope; 23-Adjusting element; 23 1- Rod-shaped main body; 232- Positioning flange; 233- Operating groove; 24- Elastic element; 25- First bearing; 26- Second bearing; 27- Adjusting handle; 271- Handle part; 272- Screw; 28- Flexible plate; 3- First moving component; 31- First driving device; 32- First mounting bracket; 33- First sliding seat; 34- First mounting plate; 4- Second moving component; 41- Second driving device; 42- Second mounting bracket; 43- Second sliding seat; 44- Second mounting plate; 5- Mask plate. Detailed Implementation

[0028] The specific embodiments of this disclosure will be described in detail below with reference to the accompanying drawings. It should be understood that the specific embodiments described herein are for illustration and explanation only and are not intended to limit this disclosure.

[0029] In this disclosure, unless otherwise stated, directional terms such as "inner" and "outer" refer to "inner" and "outer" relative to the contour of the corresponding component itself. Furthermore, the terms "first," "second," etc., used in this disclosure are for distinguishing one element from another and do not have sequential or importance implications. Additionally, in the following description, when referring to the accompanying drawings, unless otherwise explained, the same reference numerals in different drawings denote the same or similar elements. The above definitions are for explanation and illustration only and should not be construed as limiting this disclosure.

[0030] This disclosure provides a clamping and positioning mechanism for a photomask, with reference to... Figures 1 to 5 As shown, the clamping and positioning mechanism includes: a positioning frame 1, which includes two first frames 11 and two second frames 12 arranged opposite to each other, the first frames 11 and the second frames 12 being connected and enclosing a positioning space; a clamping and positioning assembly, which includes a plurality of clamping and positioning devices 2, one of the two first frames 11 and one of the two second frames 12 being respectively provided with a clamping and positioning device 2; and a first moving assembly 3, which includes a first driving device 31 and a first mounting frame 32, the first mounting frame 32 being arranged parallel to and opposite to the other of the two second frames 12, the first driving device 31 being drively connected to the first mounting frame 32 to drive the first mounting frame. The first mounting bracket 32 ​​moves along the extension direction of the first frame 11. A clamping and positioning device 2 is provided on the first mounting bracket 32. The second moving component 4 includes a second driving device 41 and a second mounting bracket 42. The second mounting bracket 42 is arranged opposite to the first mounting bracket 32 ​​and slidably connected to one of the two second frames 12. The second driving device 41 is connected to the second mounting bracket 42 to drive the second mounting bracket 42 to move along the extension direction of the second frame 12. A clamping and positioning device 2 is provided on the second mounting bracket 42. The clamping and positioning device 2 includes a base 21 and a positioning member 22. The positioning member 22 is connected to the base 21 and forms a clamping space 20 between the positioning member 22 and the base 21 for the insertion of the mask plate 5.

[0031] With the above technical solution, the clamping and positioning mechanism for the mask provided in this disclosure, when in use, drives the first mounting frame 32 to move along the extension direction of the first frame 11 through the first driving device 31, and drives the second mounting frame 42 to move along the extension direction of the second frame 12 through the second driving device 41. Since both the first mounting frame 32 and the second mounting frame 42 are provided with clamping and positioning devices 2, when the first mounting frame 32 and the second mounting frame 42 move, they drive the clamping and positioning devices 2 on them to move, so as to clamp and limit the mask 5 between the multiple clamping and positioning devices 2. Furthermore, since the clamping and positioning device 2 includes a base 21 and a positioning element 22, the positioning element 22 is connected to the base 21 and forms a clamping space 20 for inserting the mask 5 between the positioning element 22 and the base 21. The base 21 is used to support and place the mask 5. When the first moving component 3 and the second moving component 4 cooperate to operate, that is, when the first mounting bracket 32 ​​moves along the extension direction of the first frame 11 and the second mounting bracket 42 moves along the extension direction of the second frame 12, they drive their respective clamping and positioning devices 2 to move and move closer to the mask 5, so that each side of the mask 5 is inserted into the clamping space 20 of the corresponding clamping and positioning device 2. In summary, the full positioning of the mask 5 can be achieved by the cooperation of the first moving component 3 and the second moving component 4, so that it can be clamped in place in one go. The operation is simple and reduces manual operation, which is conducive to the rapid clamping of the mask 5, thereby improving the detection efficiency of the mask 5.

[0032] In this disclosure, the clamping and positioning devices 2 provided on the first mounting bracket 32 ​​can be multiple and spaced apart. Similarly, the clamping and positioning devices 2 provided on the second mounting bracket 42 can also be multiple and spaced apart. For example, the clamping and positioning devices 2 on the first mounting bracket 32 ​​and the clamping and positioning devices 2 on the second mounting bracket 42 can both be two or more. This disclosure does not impose any specific restrictions on this. In this way, the area of ​​clamping and positioning mechanism and mask 5 is increased, thereby improving the stability of mask 5 after clamping.

[0033] In the exemplary embodiments provided in this disclosure, reference is made to Figure 3 and Figure 4 As shown, the clamping and positioning device 2 may include an adjusting member 23. The base 21 is provided with a threaded hole 211. One end of the adjusting member 23 is connected to the positioning member 22, and the other end passes through the threaded hole 211 and is threadedly connected to the threaded hole 211. In the above technical solution, the adjusting member 23 can be constructed as a bolt. The positioning member 22 is connected to the base 21 by the adjusting member 23. Since the adjusting member 23 is threadedly connected to the threaded hole 211 on the base 21, the distance between the positioning member 22 and the base 21 can be adjusted by rotating the adjusting member 23. That is to say, the size of the clamping space 20 can be adjusted by rotating the adjusting member 23 to adapt to the clamping requirements of mask plates 5 of different thicknesses, thus expanding the scope of application.

[0034] In the exemplary embodiments provided in this disclosure, reference is made to Figure 4 As shown, the clamping and positioning device 2 may include an elastic element 24. The positioning element 22 is provided with a mounting hole 221 and a stop flange 222. The stop flange 222 protrudes radially away from the inner wall of the mounting hole 221. The adjusting element 23 includes a rod-shaped body 231 and a positioning flange 232. The positioning flange 232 protrudes radially away from the outer peripheral wall of the rod-shaped body 231. The elastic element 24 is sleeved on the rod-shaped body 231, and one end of the elastic element 24 abuts against the stop flange 222 and the other end abuts against the base 21. The elastic force of the elastic element 24 is used to push the positioning element 22 until the stop flange 222 abuts against the positioning flange 232. In the above technical solution, the adjusting member 23 passes through the mounting hole 221, and the elastic force of the elastic member 24 pushes the positioning member 22 against the stop flange 222 and the positioning flange 232 to make the adjusting member 23 and the positioning member 22 stably connected. The elastic member 24 can be constructed as a spring or an elastic rubber sleeve, and this disclosure does not specifically limit it. In this disclosure, by providing an elastic element 24, the positioning element 22 can float up and down along the axial direction of the rod-shaped body 231 under the elastic force of the elastic element 24, thereby elastically clamping the mask plate 5 and achieving adaptive clamping, avoiding damage to the mask plate 5 due to rigid clamping. In addition, since the positioning element 22 can float up and down along the axial direction of the rod-shaped body 231 and clamps the mask plate 5 using the elastic force of the elastic element 24, the clamping space 20 can be adjusted at once by the adjusting element 23, thus simultaneously meeting the clamping and positioning requirements of mask plates 5 with different thicknesses, reducing the frequency of adjustment and improving the convenience of use. When the stop flange 222 and the positioning flange 232 abut against each other, the positioning element 22 is stably sleeved on the adjusting element 23 under the action of the stop flange 222 and the positioning flange 232 abutting against each other, thereby preventing the positioning element 22 from detaching from the adjusting element 23 and ensuring the stability of the clamping and positioning device 2 during use.

[0035] In the exemplary embodiments provided in this disclosure, reference is made to Figure 4As shown, the stop flange 222 divides the mounting hole 221 into a first hole portion 2211 and a second hole portion 2212 arranged coaxially. The clamping and positioning device 2 may include a first bearing 25, which is arranged in the first hole portion 2211 and is used to rotatably connect the positioning member 22 and the rod-shaped body 231. The stop flange 222 and the positioning flange 232 respectively abut against the first bearing 25. By setting the first bearing 25, the positioning member 22 and the rod-shaped body 231 are rotatably connected, so that the positioning member 22 can rotate relative to the adjusting member 23. Thus, when the first driving device 31 drives the first mounting frame 32 to move along the extension direction of the first frame 11 or the second driving device 41 drives the second mounting frame 42 to move along the extension direction of the second frame 12, the clamping positioning device 2 on the first mounting frame 32 and the clamping positioning device 2 on the second mounting frame 42 roll along the mask plate 5, so that the clamping positioning device 2 and the mask plate 5 form rolling friction, which reduces the frictional force between the clamping positioning device 2 and the mask plate 5, reduces frictional loss, and extends the service life of the positioning member 22.

[0036] In the exemplary embodiments provided in this disclosure, reference is made to Figure 4 As shown, the clamping and positioning device 2 may include a second bearing 26, which is arranged in the second hole portion 2212 and used to rotatably connect the positioning member 22 and the rod-shaped body 231. The elastic member 24 and the stop flange 222 respectively abut against the second bearing 26. By providing the second bearing 26, the elastic member 24 can abut against the inner ring of the second bearing 26. Since the inner ring of the second bearing 26 is fixedly connected to the adjusting member 23, the positioning member 22 rotates relative to the adjusting member 23 with the outer ring of the second bearing 26. Therefore, when the positioning member 22 rotates, it will not be affected by the elastic member 24, ensuring the smooth rotation of the positioning member 22.

[0037] In this disclosure, a limiting ring groove may be formed on the outer peripheral wall of the rod-shaped body 231, and a retaining ring (not shown in the figure) is snapped into the limiting ring groove. The retaining ring is used to limit the second bearing 26 to the rod-shaped body 231 to ensure the reliability of the installation of the second bearing 26.

[0038] In the exemplary embodiments provided in this disclosure, reference is made to Figure 4 As shown, the adjusting member 23 may be provided with an operating groove 233, which extends from the end face of the rod-shaped body 231 toward the base 21. The operating groove 233 is used to cooperate with an operating tool such as a wrench. By operating the operating tool such as a wrench, the adjusting member 23 can be rotated, thereby adjusting the size of the clamping space 20 and improving the convenience of operation.

[0039] It should be noted that an operating protrusion can also be provided on the adjusting member 23. The operating protrusion protrudes radially from the rod-shaped body 231. By holding or clamping the operating protrusion with a tool, the adjusting member 23 can be rotated, thereby adjusting the size of the clamping space 20 and improving the convenience of operation.

[0040] In the exemplary embodiments provided in this disclosure, reference is made to Figure 3 and Figure 4 As shown, the base 21 may be provided with an opening 212. The opening 212 extends from the outer surface of the base 21 to communicate with the threaded hole 211, and the extension direction of the opening 212 intersects with the extension direction of the threaded hole 211. The clamping and positioning device 2 includes a locking member (not shown in the figure). The locking member passes through the opening 212 and abuts against the adjusting member 23 to restrict the rotation of the adjusting member 23. In the above technical solution, the opening 212 can be constructed as a threaded hole 211, and the locking member can be constructed as a set screw. The locking member is threadedly connected to the opening 212. After adjusting the distance between the positioning member 22 and the base 21, the locking member is tightened so that the locking member abuts against the adjusting member 23 to restrict the rotation of the adjusting member 23, thereby locking the adjusting member 23 and preventing the adjusting member 23 from rotating accidentally during use, thus improving the reliability of the clamping and positioning device 2 during use.

[0041] In the exemplary embodiments provided in this disclosure, reference is made to Figure 3 and Figure 4 As shown, the positioning element 22 may include a columnar body 223 and a clamping flange 224. The clamping flange 224 protrudes radially along the columnar body 223, and a clamping space 20 is formed between the clamping flange 224 and the base 21. This arrangement ensures that the positioning element 22 has good strength, and when the mask 5 is clamped, the mask 5 is clamped between the clamping flange 224 and the base 21. At this time, the outer surface of the mask 5 abuts against the outer peripheral surface of the columnar body 223, thereby ensuring the reliability of the mask 5 clamping, avoiding the mask 5 from shifting position during the detection process, and improving the accuracy of the detection.

[0042] In the exemplary embodiments provided in this disclosure, reference is made to Figure 4 As shown, a guide slope 2241 may be provided on the side of the clamping flange 224 facing the base 21. The guide slope 2241 slopes from the outer peripheral wall of the clamping flange 224 toward the base 21. The guide slope 2241 serves as a guide, allowing the mask 5 to be inserted into the clamping space 20 more smoothly, which helps to improve the clamping efficiency.

[0043] In the exemplary embodiments provided in this disclosure, reference is made to Figure 3As shown, the base 21 may include a base body 210 and a flexible plate 28. The base body 210 is provided with a groove 213, and the flexible plate 28 is detachably embedded in the groove 213. The surface of the flexible plate 28 is flush with the base body 210, and a clamping space 20 is formed between the flexible plate 28 and the clamping flange 224. In the above technical solution, the thickness of the flexible plate 28 can be set to be consistent with the depth of the groove 213. Mounting holes 221 are correspondingly provided on the bottom wall of the flexible plate 28 and the groove 213. The flexible plate 28 is installed in the groove 213 by fasteners, so that the surface of the flexible plate 28 is flush with the base body 210. The flexible plate 28 has a buffering effect. In this way, when clamped, the mask 5 can abut against the flexible plate 28, avoiding scratches or wear on the surface of the mask 5 due to hard contact. Similarly, the positioning member 22 can also be made of a flexible material, such as PEEK material, to ensure the integrity of the mask 5. In this embodiment, the opening 212 mentioned above is provided on the seat body 210 to facilitate the arrangement of the opening 212.

[0044] In the exemplary embodiments provided in this disclosure, reference is made to Figure 3 and Figure 4 As shown, the clamping and positioning device 2 may include an adjusting handle 27, which includes a connected handle portion 271 and a screw 272. The first mounting bracket 32, the second mounting bracket 42, the first frame 11, and the second frame 12 are provided with sliding grooves 10, in which nuts are slidably disposed. The base 21 is provided with a connecting hole 214, through which the screw 272 passes and is threadedly connected to the corresponding nut. With this configuration, when the screw 272 is tightened with the nut, the base 21 is locked. When the screw 272 is loosened, it moves along the corresponding sliding groove 10 with the corresponding nut. Once the desired position is reached, the screw 272 is tightened again with the nut, thus completing the position adjustment of the clamping and positioning device 2. This allows for adjustment of the spacing between the clamping and positioning devices 2 to accommodate the clamping of masks of different sizes.

[0045] In the exemplary embodiments provided in this disclosure, reference is made to Figure 1 , Figure 2 and Figure 5As shown, two clamping and positioning devices 2 can be provided on the second mounting bracket 42 near the second driving device 41. The two clamping and positioning devices 2 share the same base 21. One of the two positioning elements 22 in the two clamping and positioning devices 2 is arranged opposite to the positioning element 22 in the clamping and positioning device 2 on the second frame 12, and the other is arranged opposite to the positioning element 22 in the clamping and positioning device 2 on the first frame 11. With this arrangement, two sets of clamping forces with perpendicular clamping directions are formed, thereby enabling simultaneous clamping of two adjacent sides of the rectangular mask plate 5. In this embodiment, the base 21 and the flexible plate 28 can both be configured as L-shaped structures. The two clamping and positioning devices 2 can share the same flexible plate 28. The notch of the flexible plate 28 faces the inner side of the positioning frame 1. The two clamping and positioning devices 2 are respectively located at both ends of the flexible plate 28. In this way, when the second mounting frame 42 moves along the second frame 12, the two clamping and positioning devices 2 can respectively abut against the adjacent two sides of the rectangular mask plate 5, so as to clamp and position the rectangular mask plate 5 in two different directions, which improves the compactness of the mechanism and enhances the convenience of clamping.

[0046] In the exemplary embodiments provided in this disclosure, reference is made to Figure 1 , Figure 2 and Figure 5 As shown, the two ends of the first mounting bracket 32 ​​can be slidably connected to the two first frames 11 via the first sliding seat 33 respectively. The first driving device 31 is constructed as a cylinder, which is mounted on the first frame 11. The piston rod of the cylinder is parallel to the first frame 11 and is connected to the first sliding seat 33 in a transmission manner. In the above technical solution, the first sliding seat 33 is slidably disposed on the first frame 11, and the first mounting bracket 32 ​​is fixedly connected to the first sliding seat 33. Here, a first mounting plate 34 and a fastener can be provided. The fastener passes through the first mounting plate 34 and is threadedly connected to the nut in the slide groove 10 of the first frame 11. The cylinder is fixedly connected to the first mounting plate 34. In this way, when the fastener is tightened to the nut in the slide groove 10 of the first frame 11, the cylinder is locked and installed on the first frame 11. When the fastener is loosened, the cylinder is moved, and the cylinder drives the first mounting plate 34 to move along the first frame 11 to the required position. Then, the fastener is tightened to lock it, thereby realizing the adjustment of the position of the first moving component 3 to adapt to the clamping requirements of different sized mask plates 5.

[0047] In the exemplary embodiments provided in this disclosure, reference is made to Figure 5As shown, the second mounting bracket 42 can be slidably connected to the second frame 12 via the second sliding seat 43. The second driving device 41 is constructed as a cylinder, which is mounted on the first frame 11. The piston rod of the cylinder is parallel to the second frame 12 and is connected to the second sliding seat 43 in a transmission manner. In the above technical solution, the second sliding seat 43 is slidably disposed on the second frame 12, and the second mounting bracket 42 is fixedly connected to the second sliding seat 43. Here, a second mounting plate 44 and fasteners can be provided. The fasteners pass through the second mounting plate 44 and are threadedly connected to the nut in the slide groove 10 of the second frame 12. The cylinder is fixedly connected to the second mounting plate 44. In this way, when the fasteners are tightened to the nut in the slide groove 10 of the second frame, the cylinder is locked and installed on the second frame 12. When the fasteners are loosened, the cylinder is moved, and the cylinder drives the second mounting plate 44 to move along the second frame 12 to the desired position. Then, the fasteners are tightened to lock it, realizing the adjustment of the position of the second moving component 4, so as to adapt to the clamping requirements of different sized mask plates 5 and expand the scope of application.

[0048] It should be noted that, in order to improve versatility and facilitate future replacement, the first mounting bracket 32, the second mounting bracket 42, the first frame 11 and the second frame 12 can all be made of aluminum profiles. The aluminum profiles are pre-installed with nuts that can slide along the extension direction of the aluminum profiles, making them easy to disassemble and assemble, easy to adjust, and more flexible to use.

[0049] refer to Figures 1 to 5 As shown, the usage of the clamping and positioning mechanism for the mask 5 provided in this disclosure will be described in detail below.

[0050] Adjust the positions of the first moving component 3 and the second moving component 4 according to the length and width of the mask 5, so that the placement space enclosed by the clamping and positioning devices 2 on the first frame 11 and the second frame 12 is adapted to the size of the mask 5. Adjust the distance between the base 21 and the positioning member 22 according to the thickness of the mask 5, i.e., the size of the clamping space 20. Then, place the mask 5 so that it is located within the placement space and the sides of the mask 5 overlap the base 21 of each corresponding clamping and positioning device 2. After that, activate the first driving device 31 and the second driving device 41 to move the first mounting bracket 32 ​​and the second mounting bracket 42 toward the mask 5, so that the mask 5... The corresponding side of the mask plate 5 is inserted into the clamping space 20 of the corresponding clamping and positioning device 2. With the continuous driving of the first driving device 31 and the second driving device 41, the corresponding side of the mask plate 5 abuts against the columnar body 223 of the corresponding clamping and positioning device 2. At this point, the clamping of the mask plate 5 is completed, which is stable and reliable. When it is necessary to remove or replace the mask plate 5, the first driving device 31 and the second driving device 41 are activated to move in the opposite direction to the above, so as to drive the first mounting bracket 32 ​​and the second mounting bracket 42 away from the mask plate 5. Then, the mask plate 5 can be directly removed. The operation is simple and reduces manual intervention, which is conducive to the quick clamping or disassembly of the mask plate 5, thereby improving the detection efficiency of the mask plate 5.

[0051] The preferred embodiments of this disclosure have been described in detail above with reference to the accompanying drawings. However, this disclosure is not limited to the specific details of the above embodiments. Within the scope of the technical concept of this disclosure, various simple modifications can be made to the technical solutions of this disclosure, and these simple modifications all fall within the protection scope of this disclosure.

[0052] It should also be noted that the various specific technical features described in the above specific embodiments can be combined in any suitable manner without contradiction. In order to avoid unnecessary repetition, this disclosure will not describe the various possible combinations separately.

[0053] Furthermore, various different embodiments of this disclosure can be combined in any way, as long as they do not violate the spirit of this disclosure, they should also be regarded as the content disclosed in this disclosure.

Claims

1. A clamping and positioning mechanism for a photomask, characterized in that, The clamping and positioning mechanism includes: A positioning frame, comprising two first frames and two second frames arranged opposite to each other, wherein the first frames and the second frames are connected and enclose a positioning space; A clamping and positioning assembly, comprising a plurality of clamping and positioning devices, wherein one of the two first frames and one of the two second frames are respectively provided with the clamping and positioning devices; A first movable component, comprising a first driving device and a first mounting bracket, the first mounting bracket being arranged parallel to and opposite to the other of the two second frames, the first driving device being pulsatorically connected to the first mounting bracket to drive the first mounting bracket to move along the extending direction of the first frame, the first mounting bracket being provided with the clamping and positioning device; and The second moving component includes a second driving device and a second mounting bracket. The second mounting bracket is arranged opposite to the first mounting bracket and slidably connected to one of the two second frames. The second driving device is driven to the second mounting bracket to drive the second mounting bracket to move along the extension direction of the second frame. The clamping and positioning device is provided on the second mounting bracket. The clamping and positioning device includes a base, a positioning element, an adjusting element, and an elastic element. The positioning element is connected to the base and forms a clamping space between them for inserting a mask. The base has a threaded hole. One end of the adjusting element is connected to the positioning element, and the other end passes through the threaded hole and is threadedly connected to it. The positioning element has a mounting hole and a stop flange. The stop flange protrudes radially away from the inner wall of the mounting hole. The adjusting element includes a rod-shaped body and a positioning flange. The positioning flange protrudes radially away from the outer peripheral wall of the rod-shaped body. The elastic element is sleeved on the rod-shaped body, with one end abutting against the stop flange and the other end abutting against the base. The elastic force of the elastic element is used to push the positioning element until the stop flange abuts against the positioning flange.

2. The clamping and positioning mechanism for a photomask according to claim 1, characterized in that, The stop flange divides the mounting hole into a first hole portion and a second hole portion arranged coaxially. The clamping and positioning device includes a first bearing, which is arranged in the first hole portion and is used to rotatably connect the positioning member and the rod-shaped body. The stop flange and the positioning flange respectively abut against the first bearing.

3. The clamping and positioning mechanism for a photomask according to claim 2, characterized in that, The clamping and positioning device includes a second bearing, which is arranged in the second hole portion and is used to rotatably connect the positioning member and the rod-shaped body, and the elastic member and the stop flange respectively abut against the second bearing.

4. The clamping and positioning mechanism for a photomask according to claim 1, characterized in that, The adjusting component is provided with an operating groove that extends from the end face of the rod-shaped body toward the base.

5. The clamping and positioning mechanism for a photomask according to claim 1, characterized in that, The base is provided with an opening that extends from the outer surface of the base to communicate with the threaded hole and the extension direction of the opening intersects with the extension direction of the threaded hole. The clamping and positioning device includes a locking member that passes through the opening and abuts against the adjusting member to restrict the rotation of the adjusting member.

6. The clamping and positioning mechanism for a photomask according to any one of claims 1-5, characterized in that, The positioning element includes a columnar body and a clamping flange. The clamping flange protrudes radially along the columnar body, and a clamping space is formed between the clamping flange and the base.

7. The clamping and positioning mechanism for a photomask according to claim 6, characterized in that, The clamping flange is provided with a guide slope on its side facing the base, and the guide slope is inclined from the outer peripheral wall of the clamping flange toward the base.

8. The clamping and positioning mechanism for a photomask according to claim 6, characterized in that, The base includes a base body and a flexible plate. The base body is provided with a groove, and the flexible plate is detachably embedded in the groove. The surface of the flexible plate is flush with the base body, and the clamping space is formed between the flexible plate and the clamping flange.

9. The clamping and positioning mechanism for a photomask according to claim 1, characterized in that, The clamping and positioning device includes an adjusting handle, which includes a connected handle part and a screw. The first mounting bracket, the second mounting bracket, the first frame, and the second frame are provided with sliding grooves. A nut is slidably disposed in the sliding groove. The base is provided with a connecting hole. The screw passes through the connecting hole and is threadedly connected to the corresponding nut.

10. The clamping and positioning mechanism for a photomask according to claim 1, characterized in that, Two clamping and positioning devices are provided near the second driving device on the second mounting bracket. The two clamping and positioning devices share the same base. One of the two positioning elements of the two clamping and positioning devices is arranged opposite to the positioning element of the clamping and positioning device on the second frame, and the other is arranged opposite to the positioning element of the clamping and positioning device on the first frame.

11. The clamping and positioning mechanism for a photomask according to claim 1, characterized in that, The two ends of the first mounting bracket are slidably connected to the two first frames via first sliding seats. The first driving device is constructed as a cylinder, which is mounted on the first frame. The piston rod of the cylinder is parallel to the first frame and is connected to the first sliding seat in a transmission manner.

12. The clamping and positioning mechanism for a photomask according to claim 1, characterized in that, The second mounting bracket is slidably connected to the second frame via a second sliding seat. The second driving device is constructed as a cylinder, which is mounted on the first frame. The piston rod of the cylinder is parallel to the second frame and is throttle-connected to the second sliding seat.

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