Inner surface integrity detection device and gallium nitride reactor integrity detection system

Abstract

The present invention relates to the field of inspection and testing technology, and specifically to an inner surface integrity detection device and a gallium nitride reactor integrity detection system. The inner surface integrity detection device includes a base, a liquid supply mechanism, a first visual mechanism, an air blowing mechanism, a second visual mechanism and a processor. The liquid supply mechanism is used to intermittently deliver the detection liquid to the inner surface of the container to be detected so that the detection liquid flows to the air outlet. The first visual mechanism is used to obtain image data of the detection liquid between the liquid outlet and the air outlet. The air blowing mechanism is used to blow the detection liquid flowing to the air outlet to the lowest point of the inner surface of the container to be detected. The second visual mechanism is used to obtain image data of the detection liquid in the area below the air outlet. The processor is used to determine the inner surface integrity of the container to be detected based on the image data. It realizes the integration of the cleanliness detection and structural integrity detection of the inner surface of the object, greatly improves the detection efficiency, and has a high detection sensitivity.

Description

Technical Field

[0001] The present invention relates to the field of inspection and testing technology, and in particular to an inner surface integrity detection device and a gallium nitride reactor integrity detection system. Background Art

[0002] In the industrial production process, reusable objects need to be fully cleaned after each use in order to prepare for the next use. For container-type objects, the cleaning effect and structural integrity of the inner surface are directly related to the subsequent use effect. Therefore, the cleanliness and structural integrity of the inner surface of the corresponding object must be ensured.

[0003] In existing testing methods, cleanliness testing and structural integrity testing are two independent processes, which not only prolongs the testing process, but also requires the objects to be moved when switching between the two testing processes, which is time-consuming and labor-intensive.

[0004] In view of this, this application is hereby filed. Summary of the invention

[0005] The first object of the present invention is to provide an inner surface integrity detection device, which realizes the integration of the cleanliness detection and structural integrity detection of the inner surface of an object, greatly improves the detection efficiency, and has a higher detection sensitivity.

[0006] The second object of the present invention is to provide a gallium nitride reactor integrity detection system, which realizes the integration of the inner surface cleanliness detection and structural integrity detection of the gallium nitride production reactor, greatly improves the detection efficiency, and has a higher detection sensitivity.

[0007] The embodiment of the present invention is achieved as follows:

[0008] An inner surface integrity detection device comprises: a base, a liquid supply mechanism, a first visual mechanism, a blower mechanism, a second visual mechanism and a processor.

[0009] The liquid supply mechanism, the first visual mechanism, the air blowing mechanism and the second visual mechanism are all installed on the base, and the four are sequentially arranged at intervals along the surface of the base. The first visual mechanism and the second visual mechanism are both electrically connected to the processor.

[0010] During inspection, the container to be inspected is arranged horizontally, and the base is used to extend into the container to be inspected, so that the liquid supply mechanism, the first visual mechanism, the air blowing mechanism and the second visual mechanism are all facing the inner surface of the container to be inspected, and the four are arranged in sequence from high to low in the height direction along the inner surface of the container to be inspected.

[0011] The liquid outlet of the liquid supply mechanism and the air outlet of the air blowing mechanism are both in a straight line shape, and are both arranged toward the inner surface of the container to be detected, and are both arranged parallel to the central axis of the container to be detected.

[0012] The liquid supply mechanism is used to intermittently deliver the detection liquid to the inner surface of the container to be detected so that the detection liquid flows to the air outlet. The first visual mechanism is used to obtain image data of the detection liquid between the liquid outlet and the air outlet, which is recorded as the first image data. The air blowing mechanism is used to blow the detection liquid flowing to the air outlet to the lowest point of the inner surface of the container to be detected. The second visual mechanism is used to obtain image data of the detection liquid in the area below the air outlet, which is recorded as the second image data. The processor is used to determine the integrity of the inner surface of the container to be detected based on the first image data and the second image data.

[0013] Further, when the processor determines the integrity of the inner surface of the container to be inspected according to the first image data and the second image data, a determination process is executed, and the determination process includes the following steps:

[0014] S1. Determine the front edge boundary of each stream of detection liquid in the area between the liquid outlet and the air outlet according to the first image data.

[0015] S2. Determine the parallel relationship between the front edge and the liquid outlet, and / or the front edge and the air outlet. If they are parallel, the integrity of the inner surface area of ​​the corresponding container to be tested is determined to be qualified. Otherwise, it is unqualified.

[0016] Furthermore, in S2, if the result of the parallel relationship between the front end boundary and the liquid outlet, and / or the front end boundary and the air outlet is determined to be non-parallel, the portion of the front end boundary that is non-parallel to the liquid outlet and / or the air outlet is taken as a non-parallel object, and the remaining portion of the front end boundary that is parallel to the liquid outlet and / or the air outlet is taken as a parallel object.

[0017] If the non-parallel object lags behind the parallel object, it is determined that there is a local bulge at the position corresponding to the non-parallel object. If the non-parallel object is ahead of the parallel object, it is determined that there is a local depression at the position corresponding to the non-parallel object.

[0018] Furthermore, the determination process also includes the following steps:

[0019] S3. Determine, based on the second image data, the flow of each test liquid in the area below the air outlet blown out by the airflow of the air outlet.

[0020] S4. Determine whether there is bifurcation in the water flow. If there is bifurcation, the cleanliness of the inner surface of the container to be tested is determined to be unqualified. Otherwise, it is qualified.

[0021] Further, in S4, when it is determined that the cleanliness of the inner surface of the container to be inspected is unqualified, and the defect point is located at the starting position where the water flow bifurcates.

[0022] Furthermore, the detection liquid is: deionized water or a special cleaning agent for the container to be detected.

[0023] Furthermore, the base is arc-shaped, the liquid supply mechanism is fixedly connected to the base by a first connecting column, the first visual mechanism is fixedly connected to the base by a second connecting column, the hair blowing mechanism is fixedly connected to the base by a third connecting column, and the second visual mechanism is fixedly connected to the base by a fourth connecting column.

[0024] The first connecting column, the second connecting column, the third connecting column and the fourth connecting column are all fixedly connected to the outer arc surface of the base, and the four are arranged in sequence along the circumference of the outer arc surface of the base, and the four are arranged along the radial direction of the outer arc surface of the base.

[0025] Furthermore, the inner surface integrity detection device also includes: a rotating mechanism.

[0026] The rotating mechanism is used to place the container to be detected so that the container to be detected is arranged horizontally. The rotating mechanism is also used to control the rotation of the container to be detected so as to adjust the detected area of ​​the container to be detected.

[0027] Furthermore, the rotating mechanism is also used to continuously rotate the container to be inspected during the inspection process, and the direction in which the rotating mechanism drives the container to be inspected to rotate satisfies the condition: in the field of view of the first visual mechanism, the inner surface of the container to be inspected moves toward the liquid supply mechanism.

[0028] A gallium nitride reactor integrity detection system comprises: the above-mentioned inner surface integrity detection device.

[0029] The beneficial effects of the technical solution of the embodiment of the present invention include:

[0030] In the detection process of the inner surface integrity detection device provided by the embodiment of the present invention, each flow of detection liquid outputted from the liquid outlet to the inner surface can simultaneously complete a detection of the inner surface integrity and cleanliness, which greatly improves the detection frequency and detection efficiency. In addition, with the help of the flow image data of the detection liquid during the flow process, the integrity and cleanliness of the inner surface can be judged more sensitively.

[0031] In general, the inner surface integrity detection device provided by the embodiment of the present invention realizes the integration of the cleanliness detection and structural integrity detection of the inner surface of the object, greatly improves the detection efficiency, and has a high detection sensitivity. The gallium nitride reactor integrity detection system provided by the embodiment of the present invention realizes the integration of the cleanliness detection and structural integrity detection in the gallium nitride production reactor, greatly improves the detection efficiency, and has a high detection sensitivity. BRIEF DESCRIPTION OF THE DRAWINGS

[0032] In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings required for use in the embodiments are briefly introduced below. It should be understood that the following drawings only show certain embodiments of the present invention and therefore should not be regarded as limiting the scope. For ordinary technicians in this field, other related drawings can be obtained based on these drawings without creative work.

[0033] Figure 1 A schematic diagram of the overall structure of an inner surface integrity detection device provided by an embodiment of the present invention;

[0034] Figure 2 Schematic diagram of the relative position relationship between the liquid supply mechanism and the air blowing mechanism;

[0035] Figure 3 A schematic diagram of the test liquid output from the liquid outlet of the liquid supply mechanism flowing on the inner surface with qualified integrity;

[0036] Figure 4 A schematic diagram of the inner surface of a container to be inspected with qualified integrity provided by an embodiment of the present invention;

[0037] Figure 5 A schematic diagram of the front edge of the testing liquid output from the liquid outlet of the liquid supply mechanism when it flows on the inner surface with qualified integrity;

[0038] Figure 6 It is a schematic diagram of the front boundary when there is a local bulge on the inner surface;

[0039] Figure 7 It is a schematic diagram when there is a local protrusion on the inner surface of the container to be inspected;

[0040] Figure 8 It is a schematic diagram of the front boundary when there is a local depression on the inner surface;

[0041] Fig. 9 It is a schematic diagram when there is a local depression on the inner surface of the container to be inspected;

[0042] Fig.10 A schematic diagram of impurities on the inner surface of a container to be detected;

[0043] Fig.11 This is a schematic diagram of the water flow bifurcation phenomenon when there are impurities on the inner surface of the container to be detected.

[0044] Description of reference numerals:

[0045] Base 100; liquid supply mechanism 200; first visual mechanism 300; blower mechanism 400; second visual mechanism 500; first connecting column 610; second connecting column 620; third connecting column 630; fourth connecting column 640; container 700 to be detected. DETAILED DESCRIPTION

[0046] In order to make the purpose, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are part of the embodiments of the present invention, not all of the embodiments. Generally, the components of the embodiments of the present invention described and shown in the drawings here can be arranged and designed in various different configurations.

[0047] Therefore, the following detailed description of the embodiments of the present invention provided in the accompanying drawings is not intended to limit the scope of the invention claimed for protection, but merely represents selected embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0048] It should be noted that similar reference numerals and letters denote similar items in the following drawings, and therefore, once an item is defined in one drawing, further definition and explanation thereof is not required in subsequent drawings.

[0049] The terms “first”, “second”, etc. are only used for distinguishing descriptions and should not be understood as indicating or implying relative importance.

[0050] In addition, the terms "parallel", "vertical", etc. do not mean that the components must be absolutely parallel or vertical, but can be slightly tilted. For example, "parallel" only means that its direction is more parallel than "vertical", and does not mean that the structure must be completely parallel, but can be slightly tilted.

[0051] In the description of the present invention, it is also necessary to explain that, unless otherwise clearly specified and limited, the terms "setting", "installation" and "connection" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a direct connection, or an indirect connection through an intermediate medium, or it can be a communication between the two elements. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0052] In order to solve the deficiencies in the prior art, please refer to Figure 1 and Figure 2This embodiment provides an inner surface integrity detection device, which includes: a base 100, a liquid supply mechanism 200, a first visual mechanism 300, a blower mechanism 400, a second visual mechanism 500 and a processor (not shown in the figure).

[0053] The liquid supply mechanism 200 , the first visual mechanism 300 , the air blowing mechanism 400 and the second visual mechanism 500 are all installed on the base 100 , and the liquid supply mechanism 200 , the first visual mechanism 300 , the air blowing mechanism 400 and the second visual mechanism 500 are arranged in sequence and at intervals along the surface of the base 100 .

[0054] The first visual mechanism 300 and the second visual mechanism 500 are both used to acquire image data. The first visual mechanism 300 and the second visual mechanism 500 are both electrically connected to the processor to transmit corresponding image data to the processor.

[0055] During the inspection, the container 700 to be inspected is arranged horizontally (that is, the central axis of the container 700 to be inspected is arranged horizontally), and the base 100 is used to extend into the container 700 to be inspected. By adjusting the relative position relationship between the base 100 and the container 700 to be inspected, the liquid supply mechanism 200, the first visual mechanism 300, the air blowing mechanism 400 and the second visual mechanism 500 are all oriented toward the inner surface of the container 700 to be inspected, and the liquid supply mechanism 200, the first visual mechanism 300, the air blowing mechanism 400 and the second visual mechanism 500 are arranged in sequence from high to low along the inner surface of the container 700 to be inspected in the height direction. Among them, the liquid supply mechanism 200 is at the highest position, followed by the first visual mechanism 300, the air blowing mechanism 400 and the second visual mechanism 500, and the air blowing mechanism 400 is still higher than the lowest position of the inner surface of the container 700 to be inspected.

[0056] The liquid supply mechanism 200 and the air blowing mechanism 400 are both arranged close to the inner surface of the container 700 to be inspected, and the first visual mechanism 300 and the second visual mechanism 500 are both arranged at intervals from the inner surface of the container 700 to be inspected; the first visual mechanism 300 is located between the liquid supply mechanism 200 and the air blowing mechanism 400, and the second visual mechanism 500 is located on the side of the air blowing mechanism 400 away from the liquid supply mechanism 200.

[0057] The liquid outlet of the liquid supply mechanism 200 and the air outlet of the air blowing mechanism 400 are both in a straight line shape, and are both arranged toward the inner surface of the container to be detected 700, and are both arranged parallel to the central axis of the container to be detected 700, that is, the liquid outlet and the air outlet extend along the axial direction of the container to be detected 700. The width of the liquid outlet is less than or equal to the width of the air outlet. Optionally, the widths of the liquid outlet and the air outlet are the same, and the two are aligned with each other in the axial direction of the container to be detected 700, such as Figure 2 shown.

[0058] Based on the structural design of the liquid outlet and the air outlet, the liquid output from the liquid outlet of the liquid supply mechanism 200 to the inner surface of the container 700 to be detected is continuously distributed along the axial direction of the container 700 to be detected, and the airflow blown out from the air outlet of the air blowing mechanism 400 is also continuously distributed along the axial direction of the container 700 to be detected. Figure 2 shown.

[0059] Among them, the liquid supply mechanism 200 is used to intermittently transport the detection liquid to the inner surface of the container 700 to be detected. Due to the intermittent transportation, the detection liquid on the inner surface of the container 700 to be detected is in streams, and each stream of detection liquid flows to the position corresponding to the outlet of the air blowing mechanism 400 one by one.

[0060] The first visual mechanism 300 is used to obtain image data of the detection liquid in the area between the liquid outlet and the air outlet on the inner surface of the container 700 to be detected, such as Figure 1 and Figure 2 The image data of the range Q1 shown in is recorded as the first image data.

[0061] The air blowing mechanism 400 is used to blow the detection liquid flowing to the air outlet toward the lowest point of the inner surface of the container 700 to be detected, that is, to blow the detection liquid toward the side away from the liquid supply mechanism 200 .

[0062] The second visual mechanism 500 is used to obtain image data of the detection liquid on the inner surface of the area below the air outlet (i.e., the side of the air outlet away from the liquid supply mechanism 200), such as Figure 1 and Figure 2 The image data of the range Q2 shown in is recorded as the second image data.

[0063] The processor is used to determine the inner surface integrity of the container 700 to be inspected according to the first image data and the second image data.

[0064] When the liquid supply mechanism 200 intermittently delivers the detection liquid to the inner surface of the container 700 to be detected, the detection liquid on the inner surface of the container 700 to be detected flows intermittently toward the air outlet. If the inner surface (inner wall) of the container 700 to be detected is a complete and regular cylindrical surface, then each stream of detection liquid is continuously distributed along the axial direction of the container 700 to be detected on the inner surface, and the front edge of each stream of detection liquid is basically a straight line segment parallel to the central axis of the container 700 to be detected, such as Figure 3 The front boundary X is shown in FIG.

[0065] It should be noted that the above-mentioned “the front end boundary is basically a straight line segment parallel to the central axis of the container 700 to be detected” does not limit the front end boundary to be a standard straight line segment parallel to the central axis of the container 700 to be detected, but it can have a certain error, that is, the front end boundary can be an approximate straight line segment, and the “approximate” straight line segment corresponding to the front end boundary is “basically” parallel to the central axis of the container 700 to be detected. The allowable error range and judgment standard for the straight line segment that can be judged as “approximate” by the front end boundary, as well as the judgment standard and allowable error range for the “approximate” straight line segment corresponding to the front end boundary to be “basically” parallel to the central axis of the container 700 to be detected, can be flexibly adjusted and set according to actual conditions and needs, and this application does not impose specific restrictions and constraints.

[0066] The description in this application that the front end boundary of the detection liquid is a straight line segment, and that the front end boundary is parallel to the liquid outlet and / or the air outlet should be understood according to the above explanation and will not be repeated in the following text.

[0067] Through the above design, if the inner surface of the container 700 to be tested is a complete and regular cylindrical surface, then each stream of testing liquid can maintain the state of "the front edge is basically a straight line segment parallel to the central axis of the container 700 to be tested" during the process of flowing along the inner surface of the container 700 to be tested toward the air outlet. If this state can be maintained continuously, it means that the integrity of the inner surface between the liquid outlet and the air outlet is qualified.

[0068] When the test liquid flows to the air outlet, the airflow from the air outlet can "accelerate" each stream of test liquid, so that each stream of test liquid flows toward the side away from the outlet (the lowest position of the inner surface) at a faster flow rate. Since the test liquid is accelerated by the air outlet, it is more sensitive to uncleaned impurities attached to the inner surface, making it easier to detect the cleanliness of the inner surface.

[0069] That is to say, each flow of testing liquid outputted from the liquid outlet to the inner surface can simultaneously complete a test of the integrity and cleanliness of the inner surface, greatly improving the detection frequency and detection efficiency. In addition, with the help of the flow image data of the testing liquid during the flow process, the integrity and cleanliness of the inner surface can be judged more sensitively.

[0070] In general, the inner surface integrity detection device provided in this embodiment realizes the integration of the cleanliness detection and structural integrity detection of the inner surface of an object, greatly improves the detection efficiency, and has a high detection sensitivity.

[0071] Specifically, in this embodiment, when the processor determines the integrity of the inner surface of the container 700 to be inspected according to the first image data and the second image data, it executes a determination process, which includes the following steps:

[0072] S1. Determine the front edge of each test liquid in the area between the liquid outlet and the air outlet according to the first image data, that is, Figure 3 The front boundary X shown in .

[0073] S2. Determine the parallel relationship between the front edge and the liquid outlet, and / or the front edge and the air outlet. If they are parallel, then the corresponding inner surface area integrity of the container 700 to be tested is determined to be qualified. When the inner surface area of ​​the container 700 to be tested between the liquid outlet and the air outlet is complete and regular, such as Figure 4 As shown, when the detection liquid flows in this area, the front boundary X of the detection liquid (such as Figure 5 In other words, the integrity of the inner surface of the container 700 to be inspected can be determined by analyzing the state of the front edge X during the flow process. Otherwise, it is unqualified.

[0074] Among them, in S2, if the judgment result of the parallel relationship between the front end boundary and the liquid outlet, and / or the front end boundary and the air outlet is non-parallel, the part of the front end boundary that is not parallel to the liquid outlet and / or the air outlet is taken as a non-parallel object, and the remaining part of the front end boundary that is parallel to the liquid outlet and / or the air outlet is taken as a parallel object.

[0075] If the non-parallel object lags behind the parallel object, it is determined that there is a local bulge at the position corresponding to the non-parallel object. Figure 6 As shown in , the front boundary is divided into a non-parallel object y1 and a parallel object y2. Since the non-parallel object y1 lags behind the parallel object y2 in the flow direction, it means that there is a local bulge at the position corresponding to the non-parallel object y1, as shown in Figure 7 As shown in , there is a local protrusion Y1.

[0076] If the non-parallel object is ahead of the parallel object, it is determined that there is a local depression at the position corresponding to the non-parallel object. Figure 8 As shown in FIG. 1 , the front boundary is divided into a non-parallel object y3 and a parallel object y4. Since the non-parallel object y3 is relatively ahead of the parallel object y4 in the flow direction, it means that there is a local depression at the position corresponding to the non-parallel object y3, as shown in FIG. Fig. 9 As shown in , there is a local depression Y2.

[0077] It should be noted that this method still has a high detection sensitivity for protrusions with a smaller protrusion degree and depressions with a smaller depression degree.

[0078] Furthermore, the determination process also includes the following steps:

[0079] S3. Determine, based on the second image data, the flow of each test liquid in the area below the air outlet (the area on the side of the air outlet away from the liquid outlet) blown out by the airflow of the air outlet.

[0080] S4, judging whether there is bifurcation in the water flow. If there is bifurcation, it is judged that the cleanliness of the inner surface of the container 700 to be tested is unqualified. Otherwise, it is qualified.

[0081] If the area below the outlet is complete and regular, the water flow will also maintain the same Figure 5 In a similar state, there will be no water flow bifurcation.

[0082] In S4, when it is determined that the inner surface cleanliness of the container 700 to be inspected is unqualified, that is, the water flow has bifurcated, and the defect point where the impurity exists is located at the starting position of the water flow bifurcation. This is because the water flow is accelerated by the air outlet, and when the water flow contacts the impurity, its collision effect is amplified, and bifurcation occurs at the impurity, or bifurcated water splashes appear at the impurity. Fig.10 As shown in the figure, if there are impurities Z on the inner surface that are not thoroughly cleaned, the water flow will be as follows Fig.11 The bifurcation phenomenon is shown, and the starting position of the bifurcation corresponds to the position of the impurity Z (defect point).

[0083] Based on this, the detection sensitivity of small particle impurities can be effectively ensured.

[0084] Through the above design, the integrity, regularity and cleanliness of the inner surface can be tested simultaneously. The test liquid is used for integrity testing and cleanliness testing at the same time. During the testing process, the air outlet uses the blown air flow to accelerate the water flow, and the inner surface on the side of the air outlet away from the liquid outlet can be cleaned again.

[0085] Optionally, the detection liquid may be deionized water, or a special cleaning agent for the container 700 to be detected.

[0086] Further optionally, the base 100 can be set to an arc shape, the liquid supply mechanism 200 is fixedly connected to the base 100 by a first connecting column 610, the first visual mechanism 300 is fixedly connected to the base 100 by a second connecting column 620, the hair blowing mechanism 400 is fixedly connected to the base 100 by a third connecting column 630, and the second visual mechanism 500 is fixedly connected to the base 100 by a fourth connecting column 640.

[0087] The first connecting column 610 , the second connecting column 620 , the third connecting column 630 and the fourth connecting column 640 are all fixedly connected to the outer arc surface of the base 100 , and the four are arranged in sequence along the circumference of the outer arc surface of the base 100 , and the four are arranged along the radial direction of the outer arc surface of the base 100 .

[0088] The proximity of the liquid supply mechanism 200, the first visual mechanism 300, the blower mechanism 400, and the second visual mechanism 500 to the inner surface can be changed by adjusting the length of the first connecting column 610, the second connecting column 620, the third connecting column 630, and the fourth connecting column 640. During detection, the first connecting column 610, the second connecting column 620, the third connecting column 630, and the fourth connecting column 640 are adjusted to be arranged along the radial direction of the container 700 to be detected.

[0089] Furthermore, the inner surface integrity detection device also includes: a rotating mechanism (not shown in the figure).

[0090] The rotating mechanism is used to place the container 700 to be inspected so that the container 700 to be inspected is arranged horizontally. The rotating mechanism is also used to control the rotation of the container 700 to be inspected so as to adjust the inspected area of ​​the container 700 to be inspected.

[0091] The rotating mechanism is also used to continuously rotate the container 700 to be inspected during the inspection process, and the direction in which the rotating mechanism drives the container 700 to be inspected to rotate satisfies the condition that in the field of view of the first visual mechanism 300, the inner surface of the container 700 to be inspected moves toward the liquid supply mechanism 200, that is, the container 700 to be inspected is controlled to move in the direction as shown in FIG. Figure 1 Rotate in the direction P shown in FIG.

[0092] In this way, during the detection process, by controlling the rotation speed of the rotating mechanism, the inner surface can be continuously detected in the circumferential direction, further improving the detection efficiency. Since the container 700 to be detected is rotating synchronously, the adhesion effect of the inner surface on the detection liquid can be further amplified, which is more conducive to the detection of the cleanliness of the inner surface.

[0093] Based on the above design of the present application, during the detection process, illustratively, if a certain strand of detection liquid in the range Q1 detects the presence of a local protrusion at a certain position, the processor records the position, determines the real-time position of the local protrusion according to the rotation speed of the rotating mechanism, and tracks it. If the subsequent detection liquids of other strands all show that there is indeed a local protrusion at this position, then it can be determined that the judgment result is established. If the subsequent detection liquids of other strands do not show the presence of a local protrusion at this position, the processor controls the rotating mechanism to reverse back to the angle at which the local protrusion was just detected, and then continues to use the detection liquid to repeat the detection of this position. If it still does not show the presence of a local protrusion at this time, it is determined that the previous detection of the local protrusion is wrong, otherwise it is determined that the judgment result is established. In this way, missed detection can be effectively avoided.

[0094] On the other hand, during the detection process, similarly, if a certain flow of detection liquid in range Q2 detects the presence of particulate impurities at a certain position, the processor records the position, determines the real-time position of the particulate impurities according to the rotation speed of the rotating mechanism, and tracks it. If the subsequent water flows of other streams all show that there are indeed particulate impurities at this position, then it can be determined that the judgment result is established. If the subsequent water flows of other streams do not show the presence of particulate impurities at this position, the processor controls the rotating mechanism to reverse back to the angle where the particulate impurities were just detected, and then continues to use the water flow to repeat the detection of this position. If it still does not show the presence of particulate impurities at this position, it is determined that the previously detected particulate impurities have been washed away, otherwise it is determined that there are indeed particulate impurities here. In this way, missed detection and misjudgment can also be effectively avoided.

[0095] This embodiment also provides a gallium nitride reactor integrity detection system, which includes: the above-mentioned inner surface integrity detection device. The gallium nitride reactor integrity detection system uses the inner surface integrity detection device to detect the cleanliness and structural integrity of the inner surface of the gallium nitride production reactor. The gallium nitride reactor integrity detection system can also be provided with other components and parts in addition to the inner surface integrity detection device. The specific situation can be flexibly set according to actual needs, and this application does not make specific restrictions.

[0096] In summary, the inner surface integrity detection device provided by the embodiment of the present invention realizes the integration of the cleanliness detection and structural integrity detection of the inner surface of the object, greatly improves the detection efficiency, and has a high detection sensitivity. The gallium nitride reactor integrity detection system provided by the embodiment of the present invention realizes the integration of the cleanliness detection and structural integrity detection in the gallium nitride production reactor, greatly improves the detection efficiency, and has a high detection sensitivity.

[0097] The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. For those skilled in the art, the present invention may have various modifications and variations. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present invention shall be included in the protection scope of the present invention.

Claims

1. An inner surface integrity detection device, characterized in that: include: A base, a liquid supply mechanism, a first vision mechanism, a blower mechanism, a second vision mechanism and a processor; The liquid supply mechanism, the first visual mechanism, the air blowing mechanism and the second visual mechanism are all installed on the base, and the four are sequentially arranged at intervals along the surface of the base; the first visual mechanism and the second visual mechanism are both electrically connected to the processor; During the inspection, the container to be inspected is arranged horizontally, and the base is used to extend into the container to be inspected, so that the liquid supply mechanism, the first visual mechanism, the air blowing mechanism and the second visual mechanism are all facing the inner surface of the container to be inspected, and the four are arranged in sequence from high to low in the height direction along the inner surface of the container to be inspected; The liquid outlet of the liquid supply mechanism and the air outlet of the air blowing mechanism are both in a straight line shape, the liquid outlet and the air outlet are both arranged toward the inner surface of the container to be detected, and the liquid outlet and the air outlet are both arranged parallel to the central axis of the container to be detected; The liquid supply mechanism is used to intermittently deliver the detection liquid to the inner surface of the container to be detected, so that the detection liquid flows to the air outlet; the first visual mechanism is used to obtain image data of the detection liquid between the liquid outlet and the air outlet, which is recorded as first image data; the air blowing mechanism is used to blow the detection liquid flowing to the air outlet to the lowest point of the inner surface of the container to be detected; the second visual mechanism is used to obtain image data of the detection liquid in the area below the air outlet, which is recorded as second image data; the processor is used to determine the integrity of the inner surface of the container to be detected according to the first image data and the second image data; The base is arc-shaped, the liquid supply mechanism is fixedly connected to the base by a first connecting column, the first visual mechanism is fixedly connected to the base by a second connecting column, the blower mechanism is fixedly connected to the base by a third connecting column, and the second visual mechanism is fixedly connected to the base by a fourth connecting column; The first connecting column, the second connecting column, the third connecting column and the fourth connecting column are all fixedly connected to the outer arc surface of the base, and the four are arranged in sequence along the circumference of the outer arc surface of the base, and the four are arranged along the radial direction of the outer arc surface of the base.

2. The inner surface integrity detection device according to claim 1, characterized in that: When the processor determines the integrity of the inner surface of the container to be inspected according to the first image data and the second image data, a determination process is executed, and the determination process includes the following steps: S1. determining the front edge boundary of each stream of the detection liquid in the area between the liquid outlet and the air outlet according to the first image data; S2. Determine the parallel relationship between the front edge and the liquid outlet, and / or the front edge and the air outlet; if they are parallel, determine that the integrity of the corresponding inner surface area of ​​the container to be inspected is qualified; otherwise, it is unqualified.

3. The inner surface integrity detection device according to claim 2, characterized in that: In S2, if the result of the determination of the parallel relationship between the front edge boundary and the liquid outlet and / or the front edge boundary and the air outlet is non-parallel, the portion of the front edge boundary that is non-parallel to the liquid outlet and / or the air outlet is taken as a non-parallel object, and the remaining portion of the front edge boundary that is parallel to the liquid outlet and / or the air outlet is taken as a parallel object; If the non-parallel object lags behind the parallel object, it is determined that a local protrusion exists at the position corresponding to the non-parallel object; if the non-parallel object is ahead of the parallel object, it is determined that a local depression exists at the position corresponding to the non-parallel object.

4. The inner surface integrity detection device according to claim 2, characterized in that: The determination process also includes the following steps: S3, determining, based on the second image data, each flow of the detection liquid blown out by the airflow of the air outlet in the area below the air outlet; S4. Determine whether the water flow has a bifurcation phenomenon; if the bifurcation phenomenon exists, determine that the cleanliness of the inner surface of the container to be inspected is unqualified; otherwise, it is qualified.

5. The inner surface integrity detection device according to claim 4, characterized in that: In S4, when it is determined that the cleanliness of the inner surface of the container to be inspected is unqualified, and the defect point is located at the starting position where the bifurcation phenomenon of the water flow occurs.

6. The inner surface integrity detection device according to claim 1, characterized in that: The detection liquid is: deionized water or a special cleaning agent for the container to be detected.

7. The inner surface integrity detection device according to claim 1, characterized in that: The inner surface integrity detection device further comprises: a rotating mechanism; The rotating mechanism is used to place the container to be detected so that the container to be detected is arranged horizontally; the rotating mechanism is also used to control the rotation of the container to be detected so as to adjust the detected area of ​​the container to be detected.

8. The inner surface integrity detection device according to claim 7, characterized in that: The rotating mechanism is also used to continuously rotate the container to be inspected during the inspection process, and the direction in which the rotating mechanism drives the container to be inspected to rotate satisfies the condition: in the field of view of the first visual mechanism, the inner surface of the container to be inspected moves toward the liquid supply mechanism.

9. A gallium nitride reactor integrity detection system, characterized in that: include: An inner surface integrity detection device as described in any one of claims 1 to 8.

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